WO2023013484A9

WO2023013484A9 - Piezoelectric valve

Info

Publication number: WO2023013484A9
Application number: PCT/JP2022/028821
Authority: WO
Inventors: 隆文伊藤; 忠史松下; 世傑徐; 徴力王
Original assignee: 株式会社サタケ; 有限会社メカノトランスフォーマ
Priority date: 2021-08-02
Filing date: 2022-07-26
Publication date: 2023-06-15
Also published as: CN117795234A; WO2023013484A1; JP2023021757A; TW202307354A

Abstract

A piezoelectric valve comprising an actuator which has a valve body and which drives the valve body, a valve seat plate which has a valve seat that comes in contact with and separates from the valve body and a discharge path and which fixes the actuator, and a main body case which receives the valve seat plate, wherein the actuator comprises a piezoelectric element which generates, as a displacement, a driving force required for operating the valve body and a displacement enlarging mechanism which enlarges the displacement of the piezoelectric element to cause the displacement to act on the valve body, wherein the main body case comprises a gas supply port to which a compressed gas is supplied and a gas discharge port from which the compressed gas supplied from the gas supply port is discharged through the discharge path of the valve seat plate as a result of the separation between the valve body and the valve seat, and wherein the valve seat plate is fixed to the main body case at a forward portion on a side having the discharge path and a backward portion on a side for fixing the actuator.

Description

piezoelectric valve

The present invention relates to a piezoelectric valve that opens and closes using the displacement of a piezoelectric element.

Conventionally, a piezoelectric valve that opens and closes the valve using the displacement of a piezoelectric element and ejects compressed gas is well known, as described in Patent Documents 1 and 2, for example.

The piezoelectric valves disclosed in Patent Documents 1 and 2 below are equipped with actuators that utilize the characteristics of piezoelectric elements that are excellent in high-speed response performance. The disclosed piezoelectric valve further includes a displacement magnifying mechanism for magnifying a small displacement of the piezoelectric element on the actuator based on the principle of leverage.

Since the disclosed piezoelectric valve has excellent responsiveness, when it is used as an ejector valve of an optical sorting machine for grains such as rice grains to remove defective products, good products are less likely to be removed. It has been found from tests and empirical rules that the contamination rate of the removed defective products is higher than that of electromagnetic valves.

By the way, the piezoelectric valves described in Patent Documents 1 and 2 are housed in a case with the valve seat plate to which the actuator is fixed fixed to the front surface of the valve body.

However, piezoelectric valves have a structure in which the valve seat plate is suspended from the front of the valve body. Therefore, the valve seat plate may swing and come into contact with the inner surface of the case of the valve body. If there is a strong impact due to such contact, there is concern that the components of the piezoelectric valve will be damaged, and that the piezoelectric valve will not move normally if it is operated while the valve seat plate is in contact with the inner surface of the case. .

Japanese Patent No. 5764049 Japanese Patent Application Laid-Open No. 2021-8892

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a piezoelectric valve in which the valve seat plate does not shake and come into contact with the inner surface of the main body case, thereby preventing breakage due to impact at the time of contact and malfunction due to contact. and

In order to achieve the above object, the piezoelectric valve according to the present invention comprises:
an actuator having a valve body and driving the valve body;
a valve seat plate that has a valve seat and a discharge channel that contact and separate from the valve body and that fixes the actuator;
a body case that houses the valve seat plate,
The actuator also
a piezoelectric element that generates a driving force necessary for operating the valve body as a displacement;
a displacement magnifying mechanism that magnifies the displacement of the piezoelectric element and acts on the valve body,
The body case is
a gas supply port to which compressed gas is supplied;
a gas discharge port for discharging the compressed gas supplied from the gas supply port through the discharge path of the valve seat plate by the separation between the valve body and the valve seat,
The valve seat plate is fixed to the main body case at the front portion on the side having the discharge passage and the rear portion on the side where the actuator is fixed.

[Correction under Rule 91 27.03.2023]
In order to achieve the above object, a preferable aspect of the piezoelectric valve according to the present invention is
Equipped with multiple actuators,
each of the plurality of actuators includes a plurality of valve bodies, and drives the plurality of valve bodies individually in parallel planes;
The valve seat plate has a plurality of valve seats and a plurality of discharge passages that individually contact and separate from the plurality of valve bodies, and is capable of fixing a plurality of actuators,
The main body case further has a plurality of gas discharge ports for individually discharging the compressed gas supplied from the gas supply ports through the plurality of discharge paths of the valve seat plate by separating the plurality of valve bodies and the plurality of valve seats. Prepare.

A preferred embodiment of the piezoelectric valve according to the present invention is
The main body case is a case with an open rear surface, and has a gas discharge port on the front surface,
The valve seat plate is provided with a cover member that closes the opening on the rear surface of the main body case,
The front surface of the valve seat plate on the side having the discharge passage is fixed to the main body case by a screw from the front at the front surface where the discharge passage opens in the main body case, and the discharge passage communicates with the gas discharge port of the main body case. A lid member is fixed to the body case from the rear by screws at the rear portion on the side where the actuator is fixed, and closes the opening on the rear surface of the body case. Both side surfaces of the piezoelectric valve of this type are fixed to the main body case by screws from both sides.

Alternatively, in a preferred embodiment of the piezoelectric valve according to the present invention, the front surface of the valve seat plate on the side having the discharge passage is fixed by fitting to the main body case where the discharge passage opens. , the discharge path communicates with the gas discharge port of the main body case, and the cover member is fitted and fixed to the main body case at the rear portion on the side where the actuator is fixed to close the opening on the rear surface of the main body case.

A preferred embodiment of the piezoelectric valve according to the present invention is
The actuator also
a base secured to the valve seat plate;
a support integrally provided with the base;
and an action portion that is displaced as the piezoelectric element expands and contracts,
a piezoelectric element having one end connected to the mounting surface of the base and extending in a first longitudinal direction;
The valve body is provided on the side in the direction in which the action portion is displaced, and is driven by the displacement of the action portion,
The support extends in a second longitudinal direction that intersects with the first longitudinal direction along with the piezoelectric element,
The action portion is connected to the other end portion of the piezoelectric element and the tip portion of the support portion, and is displaced in displacement directions different from the first longitudinal direction and the second longitudinal direction as the piezoelectric element expands and contracts,
The displacement magnifying mechanism includes a support portion and an action portion.

A preferred embodiment of the piezoelectric valve according to the present invention is
The valve seat plate is provided with an electrode for connecting the lead wire of the piezoelectric element, and molded with a wiring pin for supplying power to the piezoelectric element,
The wiring pin has one end connected to the electrode and the other end extending rearward from the rear surface of the lid member.

In a preferred embodiment of the piezoelectric valve according to the present invention, the electrodes are coated with an insulating material together with one end side of the wiring pin while being connected to the lead wire of the piezoelectric element and the wiring pin.

A preferred embodiment of the piezoelectric valve according to the present invention is
An insulating resin material such as silicone is used as the insulating material.

A preferred embodiment of the piezoelectric valve according to the present invention is
A cover member that surrounds the other end of the wiring pin extending rearward from the rear surface of the valve seat plate and constitutes a wiring connector together with the other end of the wiring pin is fixed to the cover member of the valve seat plate.

A preferred aspect of the piezoelectric valve according to the present invention is to fix the cover member to the cover member of the valve seat plate by screws or fitting. Alternatively, as another preferred aspect of the piezoelectric valve according to the present invention, the cover member can be fixed to the cover member of the valve seat plate by both screws and fitting.

In a preferred embodiment of the piezoelectric valve according to the present invention, nuts, electrodes, and wiring pins for fixing the valve seat plate to the body case with screws are insert-molded together with the valve seat plate.

A preferred embodiment of the piezoelectric valve according to the present invention is a portion where the front surface of the valve seat plate is fixed to the front side inner surface of the body case, and the portion where the discharge path of the valve seat plate communicates with the gas discharge port of the body case. is sealed with a packing, and the portion where the cover member of the valve seat plate closes the opening on the rear surface of the main body case is sealed with an O-ring.

According to the piezoelectric valve of the present invention, the valve seat plate does not shake and contact the inner surface of the main body case, and damage due to impact when the valve seat plate contacts the inner surface of the main body case and malfunction due to contact are prevented. can be prevented.

According to the preferred aspect of the piezoelectric valve according to the present invention, it is possible to disassemble the piezoelectric valve by removing the screw, and it is possible to investigate the cause and repair the malfunction.

According to the preferred embodiment of the piezoelectric valve according to the present invention, it is possible to disassemble the piezoelectric valve by removing the screw, and it is possible to investigate the cause and repair when there is a problem. By suppressing the bulge in the direction, it is also possible to prevent problems when a plurality of the piezoelectric valves are used as an ejector valve of an optical sorter and arranged side by side.

According to the preferred embodiment of the piezoelectric valve according to the present invention, the wiring connector can be provided in the rear portion of the main body case. A type valve can be miniaturized.

According to the preferred aspect of the piezoelectric valve according to the present invention, together with the fact that the wiring pin is molded on the valve seat plate, it is possible to prevent short circuits due to water droplets and the like.

A preferred aspect of the piezoelectric valve according to the present invention facilitates assembly of the piezoelectric valve.

In the piezoelectric valve according to the present invention, the front surface of the valve seat plate is fixed to the front inner surface of the body case, and the discharge passage of the valve seat plate communicates with the gas discharge port of the body case. is sealed with packing, and the portion where the cover member of the valve seat plate closes the opening on the rear surface of the main body case is sealed with an O-ring, so that gas leakage from the main body case can be prevented. .

1 is a perspective view of a piezoelectric valve according to one embodiment of the invention; FIG. 2 is a front view of the piezoelectric valve of FIG. 1; FIG. 1 is a perspective view of one embodiment of a valve body included in a piezoelectric valve according to the present invention; FIG. 1 is a perspective view of one embodiment of an actuator provided in a piezoelectric valve according to the present invention; FIG. 1 is a perspective view of one embodiment of a valve seat plate provided in a piezoelectric valve according to the present invention; FIG. FIG. 6 is a front view of the valve seat plate of FIG. 5; Figure 6 is a side view of the valve seat plate of Figure 5; 8 is a perspective view of the valve seat plate shown in FIGS. 5-7 with the actuator of FIG. 4 fixed; FIG. FIG. 9 is a front view of the valve seat plate in the state of FIG. 8; FIG. 9 is a side view of the valve seat plate in the state of FIG. 8; FIG. 9 is a bottom view of the valve seat plate in the state of FIG. 8; FIG. 2 is an exploded view of the piezoelectric valve shown in FIG. 1;

An embodiment of the present invention will be described based on the drawings. FIG. 1 shows a perspective view of a piezoelectric valve according to one embodiment of the present invention. FIG. 2 shows a front view of the piezoelectric valve of FIG. FIG. 3 shows a perspective view of one embodiment of the valve body.

In the embodiment of the present invention, the piezoelectric valve 1 includes a valve body 2, an actuator 3 described later, and a valve seat plate 4 described later which is disposed inside the valve body 2 with the actuator 3 being fixed. Prepare.

The valve body 2 is a case with an open rear surface (corresponding to the lower surface in FIGS. 1 to 3). The valve body 2 is internally provided with a gas pressure chamber supplied with compressed gas from an external compressed gas supply (not shown).

Also, on the front surface of the valve body 2 (corresponding to the top surface in FIGS. 1 to 3), a connector capable of mounting a manifold (not shown) having a space inside for supplying compressed gas from a compressed gas source. A section (not shown) is provided.

A gas inlet for sucking compressed gas into the valve body 2 and a plurality of gas outlets for discharging the compressed gas are opened on the front surface of the connector. A gas supply port 21 communicating with the gas inlet of the connector and a plurality of gas outlets 22 communicating with the respective gas outlets of the connector are opened on the front surface of the valve body 2 .

As shown in FIGS. 1 and 2, a cover body 6 is attached to the rear surface of the valve body 2 . A wiring connector for supplying power to a piezoelectric element 32, which will be described later, is formed on the rear surface of the cover body 6. As shown in FIG.

FIG. 4 shows a perspective view of one embodiment of the actuator. The actuator 3 includes a base portion 31 fixed to the valve seat plate 4, which will be described later, and a piezoelectric element 32 having one end connected to the mounting surface of the base portion 31 and extending in the first longitudinal direction. The actuator 3 further includes a support portion 33 that is formed integrally with the base portion 31 and that is arranged so as to be aligned with the piezoelectric element 32 . The support portion 33 extends in a second longitudinal direction that intersects with the first longitudinal direction.

The actuator 3 has an action portion 34 connected to the other end of the piezoelectric element 32 and the tip of the support portion 33 . The action portion 34 is displaced in directions different from the first longitudinal direction and the second longitudinal direction as the piezoelectric element 32 expands and contracts. The actuator 3 further includes a valve body 35 provided on one side surface of the action portion 34 in the direction of displacement on the distal end side thereof. The valve body 35 is driven by displacement of the action portion 34 .

The base portion 31 has at least one mounting hole 381, and at least one of the mounting holes 381 is arranged on the side where the support portion 33 is integrally provided in the second longitudinal direction. The base portion 31 is fixed to the valve seat plate 4 with screws using mounting holes 381 arranged at least on the side where the support portion 33 is integrally provided.

The support portion 33 has a constricted portion 331 at an intermediate portion extending in the second longitudinal direction. The support portion 33 further has a mounting hole 382 closer to the base portion 31 than the constricted portion 331 . The support portion 33 is fixed to the valve seat plate 4 with screws using the mounting holes 382 .

The support portion 33 and the action portion 34 of the actuator 3 can be understood as elements constituting a displacement magnifying mechanism that magnifies the displacement of the piezoelectric element 32 and acts on the valve body 35 . That is, as the piezoelectric element 32 expands and contracts, the action portion 34 is displaced in a displacement direction different from the first longitudinal direction and the second longitudinal direction in a plane substantially parallel to a plane including the first longitudinal direction and the second longitudinal direction. do. In this case, by providing a constricted portion 331 in the intermediate portion extending in the second longitudinal direction of the support portion 33 , the actuator 3 can expand the displacement of the action portion 34 accompanying expansion and contraction of the piezoelectric element 32 .

Here, the base portion 31 and the support portion 33 can be molded into an integrated member by punching out a metal material. A metal material suitable as a material for the member integrating the base portion 31 and the support portion 33 is, for example, a stainless steel material including an Invar material. If the base portion 31 and the support portion 33 are integrally formed by punching a metal material, the number of parts can be reduced and the assembly of the actuator 3 can be facilitated.

Also, the base portion 31 and the support portion 33 may be formed from separate members. In this case, the support portion 33 can be provided integrally with the base portion 31 by attaching the support portion 33 as a separate member to the base portion 31 .

A connection member (not shown) made of an aluminum block or the like can be attached to the attachment surface of the base portion 31 with the piezoelectric element 32 . Thus, it is preferable that the material forming the connecting member is made of a material having a larger coefficient of linear expansion than that of the supporting portion 33 . If the piezoelectric element 32 is attached to the base portion 31 via a connecting member made of a material having a larger coefficient of linear expansion than the supporting portion 33, the influence of thermal expansion or thermal contraction of the piezoelectric element 32 due to temperature change is reduced. can be removed or eliminated. The connecting member can also be attached between the piezoelectric element 32 and the action portion 34 instead of the attachment surface of the base portion 31 .

The acting portion 34 can be made of a lightweight material such as aluminum. Forming the action portion 34 from a lightweight material is preferable for displacing the action portion 34 . Also, the valve body 35 can be made of rubber, preferably lubricating rubber.

The actuator 3 can connect the base portion 31 and the action portion 34 with the compression member 36 . In general, piezoelectric elements are easily damaged by loads in the tensile direction. However, if the base portion 31 and the action portion 34 are connected by the compression member 36, the piezoelectric element 32 can be compressed in the first longitudinal direction, so damage to the piezoelectric element 32 can be prevented.

FIG. 5 shows a perspective view of one embodiment of the valve seat plate. FIG. 6 shows a front view of the valve seat plate of FIG. FIG. 7 shows a side view of the valve seat plate of FIG. A valve seat plate 4 shown in FIG. 5 is an example of a valve seat plate to which four actuators can be attached. The valve seat plate 4 has a valve seat portion 41 in its central portion. Two valve seats 42 with which the valve element 35 of the actuator 3 abuts are provided on each of the opposite surfaces of the valve seat portion 41 (the front side and the back side of the valve seat plate 4 in the illustrated embodiment). In this embodiment, the respective valve seats 42 are provided as a pair on both surfaces of the valve seat portion 41 so as to partially overlap in the width direction when viewed from the front.

Mounting

portions

43 , 43 for the actuator 3 are formed on one side surface of the valve seat plate 4 . More specifically, the mounting

portions

43 , 43 are formed on one side surface of the valve seat plate 4 at positions facing both surfaces of the valve seat portion 41 , that is, the front side and the rear side of the valve seat portion 41 . be done. Likewise, on the other side surface of the valve seat plate 4, mounting portions 44 for the actuator 3 are formed at positions facing both surfaces of the valve seat portion 41, respectively.

As shown in FIG. 7 , a plurality of discharge passages 45 are formed in the valve seat portion 41 , and one end of each discharge passage 45 opens to the valve seat surface of each valve seat 42 . The other end of each discharge passage 45 opens to the front surface of the valve seat plate 4 (corresponding to the upper surface in FIGS. 5 to 7). Further, the valve seat plate 4 is integrally provided with a lid member 46 for closing the opening of the rear surface of the valve body 2 .

FIG. 8 shows a perspective view of the valve seat plate 4 with the actuator 3 fixed. FIG. 9 shows a front view of the valve seat plate 4 of FIG. FIG. 10 shows a side view of the valve seat plate 4 of FIG. FIG. 11 shows a bottom view of the valve seat plate 4 of FIG. In this embodiment, the valve bodies 35 of the four actuators 3 are arranged so as to face the valve seats 42 of the mounting

portions

43 and 44 of the valve seat plate 4 . In this embodiment, each actuator 3 is fixed to the valve seat plate 4 with screws.

An electrode 47 for connecting a lead wire (not shown) of the piezoelectric element 32 of the actuator 3 is provided at the rear (lower in FIGS. 8 to 10) position of the valve seat plate 4 . A wiring pin 48 for supplying power to the piezoelectric element 32 is molded at the rear position of the valve seat plate 4 .
At the rear end of the valve seat plate 4 , a lid member 46 is provided integrally with the valve seat plate 4 to close the opening on the rear surface of the case of the valve body 2 . The wiring pin 48 has one end connected to the electrode 47 and the other end extending rearward from the rear surface (lower surface in FIGS. 8 to 10) of the lid member 46 .

Here, the electrode 47 can be covered with an insulating material together with one end side of the wiring pin 48 while being connected to the lead wire of the piezoelectric element 32 and the wiring pin 48 . Examples of insulating materials suitable for use in such coating include insulating resin materials such as silicone. Such coating, together with the fact that the wiring pin 48 is molded on the valve seat plate 4, can prevent a short circuit due to water droplets or the like.

FIG. 12 shows an exploded view of one embodiment of the piezoelectric valve according to the present invention. In this embodiment, the piezoelectric valve 1 is assembled by the following steps. First, the valve seat plate 4 to which the actuator 3 is fixed is inserted into the case through the opening on the rear surface of the valve body 2 . Next, the opening on the rear surface of the valve body 2 is closed by the cover member 46 provided on the valve seat plate 4 . Finally, the cover body 6 is fixed to the rear surface of the lid member 46 . Through such steps, the piezoelectric valve 1 can be assembled.

Within the case of the valve body 2 , the valve seat plate 4 is fixed to the valve body 2 from the front by

screws

71 , 71 at the front surface where the discharge passage 45 opens at the front portion on the side having the discharge passage 45 . The fixed discharge passage 45 communicates with the gas discharge port 22 of the valve body 2 .

In the valve seat plate 4, the lid member 46 is fixed to the valve body 2 from behind by

screws

72, 72 at the rear portion on the side where the actuator 3 is fixed. As a result, the opening on the rear surface of the valve body 2 is closed.

At this time, the portion where the front surface of the valve seat plate 4 is fixed to the front inner surface of the valve body 2 , and the portion where the exhaust passage 45 of the valve seat plate 4 communicates with the gas exhaust port 22 of the valve body 2 is replaced by the packing 75 . can be sealed by Further, the O-ring 76 can be used to seal the portion where the cover member 46 of the valve seat plate 4 closes the opening on the rear surface of the valve body 2 . Such a seal using the packing 75 or the O-ring 76 can prevent the leakage of gas from the valve body 2 of the piezoelectric valve 1 of the present embodiment.

Then, on the rear surface of the lid member 46 of the valve seat plate 4, a cover body 6 is provided which surrounds the other end of the wiring pin 48 extending rearward from the rear surface of the lid member 46 and constitutes a wiring connector together with the other end of the wiring pin 48. It is fixed by a screw 74 or the like.

In the piezoelectric valve 1 according to the embodiment of the present invention, when the piezoelectric element 32 of the actuator 3 is energized in the closed state, the piezoelectric element 32 expands. As the piezoelectric element 32 expands, the action portion 34 is displaced, and the valve body 35 is separated from the valve seat 42 to open the valve. As a result, the piezoelectric valve 1 opens the compressed gas supplied from the gas supply port to the valve body 2 to the front surface of the valve body 2 through the discharge path 45 formed in the valve seat portion 41 of the valve seat plate 4. It is discharged from the gas discharge port 22 . On the other hand, in the piezoelectric valve 1 , when the piezoelectric element 32 of the actuator 3 is deenergized, the piezoelectric element 32 contracts, the action portion 34 displaces in the opposite direction, and the valve body 35 is seated on the valve seat 42 . to close the valve.

In the piezoelectric valve 1 according to the embodiment of the present invention, the valve seat plate 4 is fixed to the valve body 2 at two parts, the front part on the side having the discharge passage 45 and the rear part on the side fixing the actuator 3. . Therefore, the valve seat plate 4 does not swing and come into contact with the inner surface of the valve body 2 . Therefore, according to the piezoelectric valve 1 of the embodiment of the present invention, it is possible to prevent breakage due to impact when the valve seat plate 4 contacts the inner surface of the valve body 2 and malfunction due to contact.

Further, in the piezoelectric valve 1 according to the embodiment of the present invention, the front surface of the valve seat plate 4 on the side where the discharge passage 45 is provided, the front surface where the discharge passage 45 opens in the case of the valve body 2 is the valve body 2 . On the other hand, while it is fixed with

screws

71, 71 from the front, the lid member 46 is fixed with

screws

72, 72 from the rear to the valve body 2 at the rear portion on the side where the actuator is fixed. Therefore, the piezoelectric valve 1 can be disassembled by removing the screw, and it becomes possible to investigate the cause and repair the malfunction.

In the piezoelectric valve 1 according to the embodiment of the present invention, the wiring connector is fixed to the rear surface of the lid member 46 of the valve seat plate 4 by fixing the cover body 6 that constitutes a wiring connector together with the other end of the wiring pin 48 to the valve body. 2 can be provided in the rear part. Therefore, the piezoelectric valve 1 can be made smaller than a conventional piezoelectric valve in which a wiring connector is provided on the side of the valve body 2 .

In the piezoelectric valve 1 according to the embodiment of the present invention, the valve seat plate 4, as shown in FIGS. It can be fixed by

screws

73 , 73 . By fixing both side surfaces of the valve seat plate 4 to the valve body 2 with the

screws

73, 73 in this way, the bulge of the case of the valve body 2 in the width direction can be suppressed. Therefore, it is possible to prevent problems caused when a plurality of piezoelectric valves 1 are used as an ejector valve of an optical sorting machine and arranged side by side.

Here, in the embodiment of the present invention, the nuts for screwing the valve seat plate 4 to the valve body 2 , the electrode 47 and the wiring pin 48 can be insert-molded together with the valve seat plate 4 . Such insert molding facilitates assembly of the piezoelectric valve.

In the embodiment of the present invention, the front surface of the valve seat plate 4 where the discharge passage 45 opens in the case of the valve body 2 is fixed to the case of the valve body 2 from the front by

screws

71, 71. It was fixed to the case of the valve body 2 from behind by

screws

72 , 72 . However, it is not limited to the fixing method using screws. For example, it can be disassembled by fitting the front face of the valve seat plate 4 and the case of the valve body 2, or the lid member 46 and the case of the valve body 2, respectively. It is also possible to enable cause investigation and repair at the time of failure.

In addition, in the embodiment shown in FIG. 1, the plurality of gas discharge ports 22 opening in the front surface of the valve body 2 are not opened in a line in the thickness width direction of the valve body 2 . However, for example, by using an intermediate member or the like having therein a plurality of flow paths that communicate with the openings of the gas discharge ports 22 on one side and open in a row on the other side, the front surface of the connector section (not shown) A plurality of gas outlet openings may be arranged in a horizontal row.

In the above embodiment, the piezoelectric valve 1 has the valve element 35 seated on the valve seat 42 while no voltage is applied to the piezoelectric element 32 . However, the piezoelectric valve 1 is not limited to such a configuration. Body 35 can also be spaced from valve seat 42 .

In the above embodiment, the piezoelectric valve 1 has a valve seat plate 4 to which four actuators 3 are fixed inside the valve body 2, and four gas discharge ports 22 open on the front surface of the valve body 2. and However, the piezoelectric valve 1 is not limited to such a configuration, and the valve body 2 may be provided with a valve seat plate to which one or more actuators are fixed.

In the above embodiment, the valve seat plate 4 to which a total of four actuators 3 can be attached, two on each side, has been described as an example. It is also possible to use a valve seat plate for the piezoelectric valve 1, to which the two actuators 3 can be attached only on one side.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and the present invention can be implemented by appropriately changing its configuration without departing from the scope of the invention. can be done.

A piezoelectric valve according to the present invention includes an actuator that has a valve body and drives it, a valve seat plate that has a valve seat that contacts and separates from the valve body and a discharge path and fixes the actuator, and a valve seat plate. It can be used in piezoelectric valves with a valve body or body case.

1 Piezoelectric valve 2 Valve body (body case)
21 Gas supply port 22 Gas discharge port 3 Actuator 31 Base 32 Piezoelectric element 33 Supporting portion (displacement enlarging mechanism)
331 constricted portion 34 acting portion (displacement enlarging mechanism)
35 valve body 36 compression member 381 mounting hole 382 mounting hole 4 valve seat plate 41 valve seat portion 42 valve seat 43 mounting portion 44 mounting portion 45 discharge passage 46 cover member 47 electrode 48 wiring pin 6 cover body (cover member)
71 screw 72 screw 73 screw 74 screw 75 packing 76 O-ring

Claims

an actuator having a valve body and driving the valve body;
a valve seat plate that has a valve seat that contacts and separates from the valve body and a discharge passage and that fixes the actuator;
A piezoelectric valve comprising a body case that houses the valve seat plate,
The actuator further comprises:
a piezoelectric element that generates a driving force necessary for operating the valve body as a displacement;
a displacement magnifying mechanism that magnifies the displacement of the piezoelectric element and acts on the valve body,
The body case is
a gas supply port to which compressed gas is supplied;
a gas discharge port for discharging the compressed gas supplied from the gas supply port through the discharge passage of the valve seat plate due to the separation between the valve element and the valve seat;
A piezoelectric valve in which the valve seat plate is fixed to the main body case at a front portion on a side having the discharge passage and a rear portion on a side to which the actuator is fixed.
[Correction under Rule 91 27.03.2023]
comprising a plurality of the actuators having the valve bodies,
The plurality of actuators individually drive the plurality of valve bodies possessed by the plurality of actuators in parallel planes;
The valve seat plate has a plurality of valve seats and a plurality of discharge passages that individually contact and separate from the plurality of valve bodies, and is capable of fixing the plurality of actuators,
The main body case further discharges the compressed gas supplied from the gas supply port individually through the plurality of discharge paths of the valve seat plate due to the separation between the plurality of valve bodies and the plurality of valve seats. 2. The piezoelectric valve of claim 1, comprising a plurality of gas outlets.
The main body case is a case with an open rear surface, and has the gas discharge port on the front surface,
The valve seat plate is provided with a cover member that closes the opening of the rear surface of the main body case,
The front surface of the valve seat plate on the side having the discharge passage is fixed to the main body case by a screw from the front at the front surface where the discharge passage opens in the main body case, and the discharge passage is attached to the main body case. 2. The lid member is fixed to the body case from the rear by screws at a rear portion on a side where the actuator is fixed while communicating with the gas discharge port, and closes the opening on the rear surface of the body case. Or the piezoelectric valve according to 2.
The piezoelectric valve according to claim 3, wherein both side surfaces of the valve seat plate are further fixed to the main body case by screws from both sides.
The valve seat plate is provided with an electrode for connecting a lead wire of the piezoelectric element and molded with a wiring pin for supplying power to the piezoelectric element,
5. The piezoelectric valve according to claim 3, wherein the wiring pin has one end connected to the electrode and the other end extending rearward from the rear surface of the cover member.
6. The piezoelectric valve according to claim 5, wherein the electrode is covered with an insulating material together with one end side of the wiring pin while being connected to the lead wire of the piezoelectric element and the wiring pin.
The piezoelectric valve according to claim 5 or 6, wherein a cover member constituting a wiring connector together with the other end of the wiring pin extending rearward from the rear surface of the lid member is fixed to the lid member of the valve seat plate.
The piezoelectric valve according to any one of claims 5 to 7, wherein nuts for fixing the valve seat plate to the body case with screws, the electrodes and the wiring pins are insert-molded together with the valve seat plate.
The actuator further comprises:
a base secured to the valve seat plate;
a support portion provided integrally with the base;
and an action portion that is displaced as the piezoelectric element expands and contracts,
The piezoelectric element has one end connected to the mounting surface of the base and extends in a first longitudinal direction,
the valve body is provided on the side of the action portion in the direction of displacement, and is driven by the displacement of the action portion;
The support portion extends in a second longitudinal direction that intersects with the first longitudinal direction along with the piezoelectric element,
The action portion is connected to the other end portion of the piezoelectric element and the tip portion of the support portion, and is displaced in displacement directions different from the first longitudinal direction and the second longitudinal direction as the piezoelectric element expands and contracts. death,
9. The piezoelectric valve according to any one of claims 1 to 8, wherein the displacement enlarging mechanism includes the support portion and the action portion.