TW202307354A - Piezoelectric valve - Google Patents

Abstract

A piezoelectric valve comprises an actuator which has a valve body and drives that valve body, a valve seat plate which secures the actuator and has an exhaust channel and a valve seat that can be in contact with or separated from the valve body, and a main casing which accommodates the valve seat plate. The actuator comprises a piezoelectric element which generates a driving force necessary to operate the valve as a displacement, and a displacement expansion mechanism which expands the displacement of the piezoelectric element causing the displacement to act upon the valve, wherein the main casing comprises a gas supply opening through which a compressed gas is supplied and a gas discharge opening through which the compressed gas supplied from the gas supply opening is discharged via the exhaust channel of the valve seat plate by separation of the valve body and the valve seat, and the valve seat plate is secured to the main casing at a front section where the exhaust channel is provided and a rear section where the actuator is secured.

Description

piezoelectric valve

The present invention relates to a piezoelectric valve that uses the displacement of a piezoelectric element to open and close the valve.

In the prior art, there is a piezoelectric valve that uses the displacement of the piezoelectric element to open and close the valve to eject compressed gas, as described in Patent Documents 1 and 2 and is widely known.

The piezoelectric valves disclosed in the following Patent Documents 1 and 2 include actuators utilizing the characteristics of piezoelectric elements excellent in high-speed response performance. In the disclosed piezoelectric valve, the actuator is further equipped with a displacement amplification mechanism, which amplifies the small displacement of the piezoelectric element based on the principle of a lever.

Since the disclosed piezoelectric valve has excellent responsiveness, when it is used as a reject valve of an optical screening machine for removing defective products such as rice grains, good products are rarely involved and removed; Whether it is from experiments or experience, it is known that the mixing rate of defective products on the side of the removed defective products is higher than that of solenoid valves.

So far, the piezoelectric valves described in Patent Documents 1 and 2 are accommodated in the housing in a state where the valve seat plate on which the actuator is fixed is fixed to the front surface of the valve main body.

However, the piezoelectric valve adopts a structure in which the valve seat plate hangs from the front surface of the valve body. Therefore, sometimes the valve seat plate shakes and collides with the inner surface of the shell of the valve main body. If there is a strong impact due to such a collision, the components of the piezoelectric valve will be damaged, or the valve seat plate will be activated when it hits the inner surface of the casing, causing the piezoelectric valve to fail to operate normally. hidden worries. [Prior art literature] [Patent Document]

[Patent Document 1] Japanese Patent No. 5764049 [Patent Document 2] Japanese Unexamined Patent Publication No. 2021-008892

[Problem to be solved by the invention]

In view of this, the purpose of the present invention is to provide a piezoelectric valve, the valve seat plate will not be shaken and collide with the inner surface of the main body shell, and the damage or collision caused by the shock during the collision can be prevented. cause malfunction. [Technical means to solve the problem]

In order to achieve the above purpose, the piezoelectric valve of the present invention has: an actuator having a valve body and driving the valve body; a valve seat plate having a valve seat and a discharge passage which can be contacted or separated from the valve body, and holds the actuator; and the main body housing, housing the seat plate; where the actuator, more Piezoelectric elements, which generate the driving force required for the movement of the valve body in the form of displacement; and The displacement amplification mechanism amplifies the displacement of the piezoelectric element to make the valve body function; The main shell, with A gas supply port for receiving a supply of compressed gas; and The gas discharge port allows the compressed gas supplied from the gas supply port to be discharged through the discharge channel of the valve seat plate through the separation of the valve body and the valve seat; The valve seat plate is fixed to the main body casing at the front portion which is the side having the discharge passage and the rear portion which is the side where the actuator is fixed.

Moreover, in order to achieve the above object, in the preferred form of the piezoelectric valve of the present invention, having a plurality of actuators; The plurality of actuators individually drive the plurality of valve bodies each of the plurality of actuators has in parallel planes; a valve seat plate having a plurality of valve seats capable of individually contacting or separating from a plurality of valve bodies, and a plurality of discharge passages, and capable of fixing a plurality of actuators; The main casing is further equipped with a plurality of gas discharge ports. By separating the plurality of valve bodies and the plurality of valve seats, the compressed gas supplied from the gas supply port is discharged individually through the plurality of discharge channels of the valve seat plate.

In a preferred form of the piezoelectric valve of the present invention, The main body shell is tied to the shell with an opening on the rear surface and has a gas discharge port on the front surface; On the valve seat plate, there is a cover material, which closes the opening on the rear surface of the main body shell; The valve seat plate, on the side with the discharge channel, that is, the front part, makes the front surface of the main body shell with the discharge channel open, and is fixed to the main body shell with screws from the front, so that the discharge channel communicates with the gas discharge port of the main body shell , On the other hand, on the side of the fixed actuator, that is, the rear part, the cover material is fixed to the main body shell with screws from the rear to close the opening on the rear surface of the main body shell. This type of piezoelectric valve is fixed to the main shell by screws on both sides.

Or, in a preferred aspect of the piezoelectric valve of the present invention, the valve seat plate, on the side having the discharge channel, that is, the front portion, makes the front surface of the main body housing with the discharge channel open, by fitting It is fixed to the main body casing so that the discharge channel communicates with the gas discharge port of the main body casing. On the other hand, on the side where the actuator is fixed, that is, the rear part, the cover is fixed to the main body casing by fitting to close the The opening of the rear surface of the main body shell.

In a preferred form of the piezoelectric valve of the present invention, Actuator, more with: base, fixed to the seat plate; a support part integrally provided at the base; and The active part is displaced with the expansion and contraction of the piezoelectric element; a piezoelectric element, one end of which is connected to the mounting surface of the base and extends in a first lengthwise direction; The valve body is arranged on the side of the displacement direction of the acting part and is driven by the displacement of the acting part; The support portion is arranged in parallel with the piezoelectric element and extends in a second longitudinal direction intersecting with the first longitudinal direction; The action part is connected to the other end part of the piezoelectric element and the end part of the supporting part, and is displaced in a displacement direction different from the first longitudinal direction and the second longitudinal direction respectively as the piezoelectric element expands and contracts; The displacement amplification mechanism includes a support part and an action part.

In a preferred form of the piezoelectric valve of the present invention, On the valve seat plate, there are electrodes connected to the wires of the piezoelectric element, and on the other hand, wiring pins for power supply to the piezoelectric element are molded; One end of the wiring pin is connected to the electrode, and the other end extends backward from the rear surface of the cover material.

In a preferred aspect of the piezoelectric valve of the present invention, the electrode is covered with an insulating material together with one end side of the wiring pin in a state where the lead wire of the piezoelectric element is connected to the wiring pin.

In a preferred form of the piezoelectric valve of the present invention, As the insulating material, an insulating resin material such as silicone resin is used.

In a preferred form of the piezoelectric valve of the present invention, A cover member is fixed on the cover material of the valve seat plate, which surrounds the other end of the wiring pins extending rearward from the rear surface of the cover material, and forms a wiring joint together with the other end of the wiring pins.

In a preferred aspect of the piezoelectric valve of the present invention, the cover member is fixed to the cover material of the valve seat plate by screws or fitting. Alternatively, as another preferred aspect of the piezoelectric valve of the present invention, the cover member may be fixed to the cover material of the valve seat plate by both screws and fitting.

In a preferred form of the piezoelectric valve of the present invention, the nuts, electrodes, and wiring pins used to fix the valve seat plate to the main body shell with screws are embedded and injection molded together with the valve seat plate.

In a preferred aspect of the piezoelectric valve of the present invention, the front surface of the valve seat plate is fixed to the part of the inner surface of the front side of the main body casing, and the discharge channel of the valve seat plate is connected with the gas discharge port of the main body casing. The part is sealed by a gasket; the part of the opening on the rear surface of the main body shell is closed by the cover material of the valve seat plate, and is sealed by an O-ring. [Effect of Invention]

According to the piezoelectric valve of the present invention, the valve seat plate will no longer be shaken and collide with the inner surface of the main body casing, and the damage caused by the impact when the valve seat plate collides with the inner surface of the main body casing can be prevented , or malfunction caused by collision.

According to a preferred aspect of the piezoelectric valve of the present invention, the piezoelectric valve can be disassembled by removing the screws, and the cause of failure can be investigated or repaired.

According to a preferred aspect of the piezoelectric valve of the present invention, the piezoelectric valve can be disassembled by removing the screws, and the cause of failure can be investigated or repaired, and at the same time, by suppressing the expansion of the main body casing in the width direction Therefore, when the piezoelectric valve is used for a reject valve of an optical screening machine or the like, and a plurality of them are arranged side by side, failures can be prevented.

According to a preferred aspect of the piezoelectric valve of the present invention, since the wiring connector can be provided at the rear part of the main body case, compared with the conventional piezoelectric valve in which the wiring connector is provided at the side part of the main body case, Further, the piezoelectric valve can be miniaturized.

The preferred aspect of the piezoelectric valve according to the present invention, combined with the fact that the wiring pins are molded to the valve seat plate, prevents short circuits due to water droplets and the like.

According to the preferred aspect of the piezoelectric valve of the present invention, the assembly of the piezoelectric valve becomes easy.

In the piezoelectric valve of the present invention, the front surface of the valve seat plate is fixed to the inner surface of the front side of the main body shell; by adopting the following aspect: the discharge channel of the valve seat plate and the main body are sealed with a gasket The part connected with the gas discharge port of the housing is sealed with an O-ring to the opening part of the rear surface of the main housing closed by the cover material of the valve seat plate, so as to prevent gas from leaking from the main housing.

Embodiments of the present invention will be described based on the drawings. FIG. 1 shows a perspective view of a piezoelectric valve according to an embodiment of the present invention. FIG. 2 shows a front view of the piezoelectric valve of FIG. 1 . Figure 3 shows a perspective view of one embodiment of the valve body.

In the embodiment of the present invention, the piezoelectric valve 1 is provided with: a valve main body 2, an actuator 3 described later, and a valve seat plate 4 described later. The valve seat plate 4 keeps the actuator 3 in a fixed state. Arranged inside the valve body 2 .

The valve main body 2 is tied to a casing with an opening on the rear surface (corresponding to the bottom surface in FIGS. 1 to 3 ). The valve main body 2 has a gas pressure chamber inside thereof, and the gas pressure chamber receives a compressed gas supply from an external compressed gas supply source (not shown).

Furthermore, on the front surface (corresponding to the top surface in FIGS. 1 to 3 ) of the valve main body 2, there is provided a joint portion (not shown) to which a manifold (not shown) having a Space for a compressed gas supply from a compressed gas source.

A gas inlet for sucking compressed gas into the valve main body 2 and a plurality of gas outlets for discharging compressed gas are opened on the front surface of the joint portion. Furthermore, on the front surface of the valve main body 2, a gas supply port 21 and a plurality of gas discharge ports 22 are opened. Each gas outlet is connected.

As shown in FIGS. 1 and 2 , a cover 6 is attached to the rear surface of the valve body 2 . On the rear surface of the cover 6, a wiring terminal for supplying power to the piezoelectric element 32 described later is formed.

Figure 4 shows a perspective view of one embodiment of the actuator. The actuator 3 includes: a base 31 fixed to the valve seat plate 4 described later; and a piezoelectric element 32 , one end of which is connected to the mounting surface of the base 31 and extends in the first longitudinal direction. The actuator 3 further includes a support portion 33 which is integrally formed with the base portion 31 and arranged in parallel with the piezoelectric element 32 . The support portion 33 extends in a second longitudinal direction intersecting with the first longitudinal direction.

The actuator 3 includes an action portion 34 connected to the other end portion of the piezoelectric element 32 and the end portion of the support portion 33 . The action part 34 is displaced in directions different from the first longitudinal direction and the second longitudinal direction, respectively, as the piezoelectric element 32 expands and contracts. The actuator 3 further includes a valve body 35, which is provided on the distal end side of the acting portion 34, and on one side in the direction of displacement. The valve body 35 is driven by the displacement of the acting part 34 .

The base portion 31 has at least one mounting hole 381 , and at least one of the mounting holes 381 is disposed on the side where the supporting portion 33 is integrally provided in the second longitudinal direction. The base portion 31 is fixed to the valve seat plate 4 by screws using the mounting hole 381 disposed at least on the side where the supporting portion 33 is integrally provided.

The support portion 33 has a narrowed portion 331 at an intermediate portion extending in the second longitudinal direction. Further, the support portion 33 has an attachment hole 382 on the side closer to the base portion 31 than the retracted portion 331 . The support portion 33 is fixed to the valve seat plate 4 by screws through the installation hole 382 .

The supporting part 33 and the action part 34 of the actuator 3 can be understood as the essential elements of the displacement amplification mechanism, which will amplify the displacement of the piezoelectric element 32 and then make the valve body 35 function. That is, as the piezoelectric element 32 expands and contracts, the action portion 34 is substantially parallel to the plane including the first longitudinal direction and the second longitudinal direction, respectively parallel to the first longitudinal direction and the second longitudinal direction. Displacement in different displacement directions. At this time, the actuator 3 can amplify the displacement of the action part 34 accompanying the expansion and contraction of the piezoelectric element 32 by providing the retracted part 331 in the middle part extending in the second longitudinal direction of the support part 33 in advance.

Here, the base portion 31 and the support portion 33 can be formed into an integrated component by stamping metal materials. As a material for the member that integrates the base portion 31 and the support portion 33 , a preferable metal material is, for example, a stainless steel material including an INVAR material. If the base portion 31 and the support portion 33 are integrally formed by stamping a metal material, the number of parts will be reduced, and the assembly of the actuator 3 will be facilitated.

Furthermore, the base portion 31 and the support portion 33 may be formed of different members. In this case, by attaching the support portion 33 as another member to the base portion 31 , the support portion 33 can be integrally provided on the base portion 31 .

A connection member (not shown) made of an aluminum block or the like can be mounted on the mounting surface of the piezoelectric element 32 included in the base 31 . As such, the material forming the connecting member is preferably made of a material having a larger coefficient of linear expansion than the supporting portion 33 . If the piezoelectric element 32 is mounted on the base 31 through a connecting member formed of a material with a coefficient of linear expansion greater than that of the supporting portion 33, the thermal expansion or contraction of the piezoelectric element 32 caused by temperature changes can be slowed down or eliminated. The connection member may be installed not on the installation surface of the base 31 but between the piezoelectric element 32 and the action part 34 .

The action part 34 can be formed by lightweight materials such as aluminum. If the action part 34 is formed of a lightweight material, it is preferable in terms of displacing the action part 34 . Furthermore, the valve body 35 can be formed of rubber, preferably slidable rubber.

The actuator 3 can be connected between the base part 31 and the action part 34 via the compression member 36 . In general, piezoelectric elements are easily damaged by loads in the tensile direction. However, if the base portion 31 and the action portion 34 are connected by the compression member 36, since the piezoelectric element 32 can be compressed in the first longitudinal direction, damage to the piezoelectric element 32 can be prevented.

Fig. 5 shows a perspective view of one embodiment of the valve seat plate. FIG. 6 shows a front view of the valve seat plate of FIG. 5 . FIG. 7 shows a side view of the valve seat plate of FIG. 5 . The valve seat plate 4 shown in FIG. 5 is an example of a valve seat plate to which four actuators can be mounted. The valve seat plate 4 has a valve seat portion 41 at its central portion. Two valve seats 42 are respectively provided on the opposite sides of the valve seat portion 41 (in the case of the illustrated embodiment, the front surface side and the rear surface side of the valve seat plate 4), respectively, for the actuator. 3 valve body 35 abuts. In the present embodiment, the valve seats 42 are arranged in pairs on both sides of the valve seat portion 41 so as to face each other in the width direction viewed from the front surface, and partially overlap each other.

On one of the side surfaces of the valve seat plate 4, mounting portions 43, 43 of the actuator 3 are formed. More specifically, the mounting portions 43, 43 are mounted on one of the side surfaces of the valve seat plate 4, and are respectively formed on both sides of the valve seat portion 41, that is, on the front surface side and the rear surface side of the valve seat portion 41, opposite to each other. Location. Furthermore, on the other side of the valve seat plate 4, also at positions where both surfaces of the valve seat portion 41 face each other, mounting portions 44 for the actuator 3 are respectively formed.

As shown in FIG. 7 , a plurality of discharge passages 45 are formed on the valve seat portion 41 ; one end of each discharge passage 45 opens on the valve seat surface of each valve seat 42 . Also, the other end of each discharge passage 45 opens to the front surface (corresponding to the top surface in FIGS. 5 to 7 ) of the valve seat plate 4 . Furthermore, the valve seat plate 4 has a cover material 46 that closes the opening on the rear surface of the valve body 2 and is integrally provided on the valve seat plate 4 .

FIG. 8 shows a perspective view of the valve seat plate 4 in a state where the actuator 3 is fixed. FIG. 9 shows a front view of the valve seat plate 4 of FIG. 8 . FIG. 10 shows a side view of the valve seat plate 4 of FIG. 8 . FIG. 11 shows a bottom view of the valve seat plate 4 of FIG. 8 . In the present embodiment, the four actuators 3 are arranged on the mounting portions 43 and 44 of the valve seat plate 4 so that the respective valve bodies 35 are opposed to the respective valve seats 42 . In this embodiment, each actuator 3 is fixed to the valve seat plate 4 with screws.

At the rear of the valve seat plate 4 (below in FIGS. 8 to 10 ), there is an electrode 47 for connecting the lead wire (not shown) of the piezoelectric element 32 in the actuator 3 . Furthermore, at the rear position of the valve seat plate 4 , wiring pins 48 for supplying power to the piezoelectric element 32 are molded.

At the rear end portion of the valve seat plate 4 , a cover material 46 for closing the opening of the casing rear surface of the valve main body 2 is integrally provided on the valve seat plate 4 . One end of the wiring pin 48 is connected to the electrode 47 , and the other end extends backward from the rear surface (the bottom surface in FIGS. 8 to 10 ) of the cover material 46 .

Here, the electrode 47 may be covered with an insulating material together with one end side of the wiring pin 48 in a state where the lead wire of the piezoelectric element 32 is connected to the wiring pin 48 . As a preferable insulating material used for this covering, insulating resin materials, such as silicone resin, are mentioned. If such coating can be applied, it will complement the fact that the wiring pins 48 are molded on the valve seat plate 4, and can prevent short circuits caused by water droplets and the like.

Fig. 12 shows an exploded assembly view of an embodiment of the piezoelectric valve of the present invention. In this embodiment, the piezoelectric valve 1 is assembled through the following steps. First, the valve seat plate 4 to which the actuator 3 is fixed is inserted into the housing from the opening on the rear surface of the valve main body 2 . Next, the opening on the rear surface of the valve main body 2 is closed by the cover material 46 provided on the valve seat plate 4 . Finally, the cover body 6 is fixed to the rear surface of the cover material 46 . After such steps, the piezoelectric valve 1 can be assembled.

In the shell of the valve main body 2, the valve seat plate 4 is fixed to the valve main body 2 by screws 71 and 71 from the front on the side with the discharge passage 45, that is, the front portion, so that the front surface of the discharge passage 45 is opened. The fixed discharge passage 45 communicates with the gas discharge port 22 of the valve body 2 .

Furthermore, the valve seat plate 4 is fixed to the valve main body 2 with the screws 72 and 72 from the rear at the side where the actuator 3 is fixed, that is, the rear portion. Thereby, the opening on the rear surface of the valve main body 2 is closed.

At this time, the part where the front surface of the valve seat plate 4 is fixed to the inner surface of the front side of the valve body 2 and the discharge channel 45 of the valve seat plate 4 communicates with the gas discharge port 22 of the valve body 2 can be used. Sealed by gasket 75 . Furthermore, the portion where the opening on the rear surface of the valve main body 2 is closed by the cover material 46 of the valve seat plate 4 may be sealed by an O-ring 76 . With such sealing using the packing 75 or the O-ring 76 , the piezoelectric valve 1 of this embodiment can prevent gas from leaking from the valve main body 2 .

Then, on the rear surface of the cover material 46 of the valve seat plate 4, for surrounding the other end of the wiring pin 48 extending rearward from the rear surface of the cover material 46, a wiring joint is formed together with the other end of the wiring pin 48. The cover body 6 is fixed with screws 74 and the like.

In the piezoelectric valve 1 according to the embodiment of the present invention described above, when the piezoelectric element 32 of the actuator 3 is energized in the valve-closed state, the piezoelectric element 32 expands. As the piezoelectric element 32 expands, the action part 34 is displaced, and the valve body 35 is separated from the valve seat 42 to open the valve. Thereby, the piezoelectric valve 1 is supplied from the gas supply port to the The compressed gas of the valve body 2 is discharged. On the other hand, in the piezoelectric valve 1, when the energization to the piezoelectric element 32 of the actuator 3 is removed, the piezoelectric element 32 will contract, and the action part 34 will be displaced in the opposite direction, and the valve body 35 will be in the opposite direction. The valve seat 42 is seated to close the valve.

In the piezoelectric valve 1 according to the embodiment of the present invention, the valve seat plate 4 is fixed to the valve at two parts: the front part, which is the side having the discharge passage 45, and the rear part, which is the side where the actuator 3 is fixed. Subject 2. Therefore, the valve seat plate 4 does not vibrate against the inner surface of the valve main body 2 . Therefore, according to the piezoelectric valve 1 according to the embodiment of the present invention, it is possible to prevent damage due to the impact when the valve seat plate 4 collides with the inner surface of the valve body 2 or malfunction due to the impact.

Furthermore, in the piezoelectric valve 1 of the embodiment of the present invention, the valve seat plate 4 is on the side having the discharge passage 45, that is, the front portion, so that the front surface of the discharge passage 45 is opened in the casing of the valve main body 2, It is fixed to the valve main body 2 with screws 71, 71 from the front; Therefore, the piezoelectric valve 1 can be disassembled by removing the screws, and it is possible to investigate or repair the cause of a failure.

In the piezoelectric valve 1 of the embodiment of the present invention, by making the cover body 6 which constitutes the wiring joint together with the other end of the wiring pin 48 fixed to the rear surface of the cover material 46 of the valve seat plate 4, the wiring joint can be fixed to the rear surface of the valve seat plate 4. It is provided at the rear part of the valve main body 2 . Therefore, the piezoelectric valve 1 can be downsized compared to a conventional piezoelectric valve in which a wiring terminal is provided on a side portion of the valve main body 2 .

In the piezoelectric valve 1 of the embodiment of the present invention, as shown in Figures 1 and 12, the valve seat plate 4 can be fixed on both sides by screws 73 and 73 at the rear part of the fixed actuator 3 side. Valve body 2. In this way, if the two sides of the valve seat plate 4 are fixed to the valve main body 2 with the screws 73 and 73, the expansion of the shell of the valve main body 2 in the width direction can be suppressed quite small. Therefore, it is possible to prevent failures when a plurality of piezoelectric valves 1 are used in a reject valve of an optical screening machine and are arranged side by side.

Here, in the embodiment of the present invention, the nuts, electrodes 47 and wiring pins 48 for screwing the valve seat plate 4 to the valve main body 2 can be embedded and injection molded together with the valve seat plate 4 . By performing such submerged injection molding, the piezoelectric valve can be easily assembled.

In the above-mentioned embodiment of the present invention, the valve seat plate 4 is fixed in the shell of the valve body 2, so that the front surface of the discharge channel 45 is opened, and is fixed to the shell of the valve body 2 with screws 71, 71 from the front, and the cover material 46 It is fixed to the casing of the valve main body 2 with screws 72 and 72 from the rear. However, it is not limited to the fixing method by screws. For example, the front surface of the valve seat plate 4 and the casing of the valve main body 2, or the cover material 46 and the casing of the valve main body 2 may be respectively fixed by fitting, However, it can be disassembled, and it is also possible to investigate or repair the cause of a failure.

Also, in the embodiment shown in FIG. 1 , the plurality of gas discharge ports 22 opened on the front surface of the valve main body 2 are not opened in a row in the thickness direction of the valve main body 2 . However, it is also possible, for example, by using an intermediate member or the like having a plurality of flow paths inside (the plurality of flow paths communicate with the openings of the respective gas discharge ports 22 on one side and are opened in a row on the other side), so that A plurality of gas discharge ports opened on the front surface of the joint portion (not shown) are aligned in a row.

In the above embodiment, the piezoelectric valve 1 seats the valve body 35 on the valve seat 42 in a state where no voltage is applied to the piezoelectric element 32 . However, the piezoelectric valve 1 is not limited to this configuration, and the piezoelectric valve 1 can also make the valve body 35 an open valve in a state where no voltage is applied to the piezoelectric element 32 by changing the polarity of the voltage supplied from the drive unit. The state of seat 42.

In the above-mentioned embodiment, the piezoelectric valve 1 is placed inside the valve body 2, and the valve seat plate 4 on which the four actuators 3 are fixed is arranged, and the four gas discharge ports 22 are opened on the front surface of the valve body 2. . However, the configuration is not limited to this, and the piezoelectric valve 1 may be provided with a valve seat plate on which at least one actuator is fixed to the valve main body 2 .

In the above-mentioned embodiment, the valve seat plate 4 that can install two actuators 3 in total on both sides is described as an example, however, it is not limited to this configuration; Use a seat plate that can mount two actuators 3 on only one side.

The embodiments of the present invention have been described above, but the present invention is not limited to the above-mentioned embodiments; the present invention can be implemented by appropriately changing its configuration without departing from the scope of the invention. [Industrial availability]

The piezoelectric valve of the present invention can be used to include: an actuator having a valve body and driving it; a valve seat plate having a valve seat and a discharge passage which can be in contact with or separated from the valve body and fixing the actuator; and A piezoelectric valve with a valve body (i.e., body housing) that houses the seat plate.

1: Piezoelectric valve 2: Valve body (main body shell) 21: Gas supply port 22: Gas outlet 3: Actuator 31: base 32: Piezoelectric element 33: Support part (displacement amplification mechanism) 331: Retracted part 34: Action part (displacement amplification mechanism) 35: valve body 36: Compression components 381: Mounting hole 382: Mounting hole 4: Seat plate 41: Seat part 42: valve seat 43: Installation department 44: Installation Department 45: discharge channel 46: Cover material 47: electrode 48: Wiring pin 6: Cover body 71: screw 72: screw 73: screw 74: screw 75: Liner 76: O-ring

[ Fig. 1 ] A perspective view of a piezoelectric valve according to an embodiment of the present invention. [ Fig. 2 ] A front view of the piezoelectric valve of Fig. 1 . [ Fig. 3 ] A perspective view of an embodiment of a valve main body included in the piezoelectric valve of the present invention. [ Fig. 4 ] A perspective view of an embodiment of an actuator included in the piezoelectric valve of the present invention. [ Fig. 5 ] A perspective view of an embodiment of a valve seat plate included in the piezoelectric valve of the present invention. [ Fig. 6 ] A front view of the valve seat plate of Fig. 5 . [ Fig. 7 ] A side view of the valve seat plate of Fig. 5 . [ Fig. 8 ] A perspective view of the valve seat plate shown in Fig. 5 to Fig. 7 in a state where the actuator of Fig. 4 is fixed. [ Fig. 9 ] A front view of the valve seat plate in the state shown in Fig. 8 . [ Fig. 10 ] A side view of the valve seat plate in the state shown in Fig. 8 . [ Fig. 11 ] A bottom view of the valve seat plate in the state of Fig. 8 . [ Fig. 12 ] An exploded view of the assembly of the piezoelectric valve shown in Fig. 1 .

1: Piezoelectric valve

2: Main shell

22: Gas outlet

3: Actuator

4: Seat plate

45: discharge channel

46: Cover material

48: Wiring pin

6: Cover body

71~74: screw

75: Liner

76: O-ring

Claims (10)

A piezoelectric valve comprising: an actuator having a valve body and driving the valve body; a valve seat plate having a valve seat and a discharge passage which can be contacted or separated from the valve body, and which fixes the actuator; and a main body housing housing the seat plate; The actuator also has: a piezoelectric element that generates the driving force required for the movement of the valve body in the form of displacement; and The displacement amplification mechanism amplifies the displacement of the piezoelectric element to make the valve body function; The main body housing has: A gas supply port for receiving a supply of compressed gas; and A gas discharge port, through the separation of the valve body and the valve seat, the compressed gas supplied from the gas supply port is discharged through the discharge channel of the valve seat plate; The valve seat plate is fixed to the main body casing at a front portion which is a side having the discharge passage and a rear portion which is a side where the actuator is fixed. Such as the piezoelectric valve of claim 1, wherein, there are a plurality of the actuator with the valve body; The plurality of actuators individually drive the plurality of valve bodies each of the plurality of actuators has in parallel planes; The valve seat plate has a plurality of valve seats that can be individually contacted or separated from the plurality of valve bodies, and a plurality of discharge passages, and can fix the plurality of actuators; The main body housing is further provided with a plurality of gas discharge ports, and by separating the plurality of valve bodies from the plurality of valve seats, the compressed gas supplied from the gas supply port passes through the plurality of discharge channels of the valve seat plate. and discharged individually. Such as the piezoelectric valve of claim 1, wherein, The main body casing is tied to a casing with an open rear surface and has the gas discharge port on the front surface; A cover material is provided on the valve seat plate to close the opening of the rear surface of the main body shell; The valve seat plate, on the side with the discharge channel, that is, the front part, will have the front surface of the discharge channel opening in the main body shell, and fix it to the main body shell with screws from the front, so that the discharge channel and the The gas discharge port of the main body shell is connected. On the other hand, on the side where the actuator is fixed, that is, the rear part, the cover material is fixed to the main body shell with screws from the rear to close the rear surface of the main body shell. opening. Such as the piezoelectric valve of claim 2, wherein, The main body casing is tied to a casing with an open rear surface and has the gas discharge port on the front surface; A cover material is provided on the valve seat plate to close the opening of the rear surface of the main body shell; The valve seat plate, on the side with the discharge channel, that is, the front part, will have the front surface of the discharge channel opening in the main body shell, and fix it to the main body shell with screws from the front, so that the discharge channel and the The gas discharge port of the main body shell is connected. On the other hand, on the side where the actuator is fixed, that is, the rear part, the cover material is fixed to the main body shell with screws from the rear to close the rear surface of the main body shell. opening. Such as the piezoelectric valve of claim 3 or 4, wherein, The valve seat plate is further fixed to the main body casing by screws on both sides. Such as the piezoelectric valve of claim 3 or 4, wherein, On the valve seat plate, there are electrodes connected to the lead wires of the piezoelectric element, and on the other hand, wiring pins for power supply to the piezoelectric element are molded; One end of the wiring pin is connected to the electrode, and the other end extends backward from the rear surface of the cover material. Such as the piezoelectric valve of claim 6, wherein, The electrode is covered with an insulating material together with one end side of the wiring pin in a state where the lead wire of the piezoelectric element is connected to the wiring pin. Such as the piezoelectric valve of claim 6, wherein: On the cover material of the valve seat plate, the other end of the wiring pin extending rearward from the rear surface of the cover material is fixed, and together with the other end of the wiring pin, a cover member constituting a wiring joint is formed. Such as the piezoelectric valve of claim 6, wherein, The nut for fixing the valve seat plate to the main body casing with screws, the electrodes and the wiring pins are embedded and injection molded together with the valve seat plate. Such as the piezoelectric valve of claim 1 or 2, wherein, The actuator, more a base fixed to the seat plate; a support portion integrally provided on the base; and The active part is displaced with the expansion and contraction of the piezoelectric element; The piezoelectric element, one end of which is connected to the mounting surface of the base, and extends in a first length direction; The valve body is arranged on the side of the displacement direction of the acting part and is driven by the displacement of the acting part; the support portion is arranged side by side with the piezoelectric element and extends in a second longitudinal direction intersecting with the first longitudinal direction; The action part is connected to the other end part of the piezoelectric element and the end part of the support part, and as the piezoelectric element expands and contracts, the displacements are different from the first longitudinal direction and the second longitudinal direction respectively. displacement in the direction; The displacement amplifying mechanism includes the supporting part and the acting part.

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