TW202242293A - Piezoelectric valve - Google Patents

Abstract

A piezoelectric valve 1 comprises an actuator 3 which drives a valve body 35, a valve seat plate 4 which secures the actuator 3, and a main body case which house the valve seat plate 4. The actuator 3 comprises a base section 31 secured to the valve seat plate 4, a piezoelectric element 32 of which one end is connected to a mounting surface of the base section 31 and which extends in a first longitudinal direction, a support section 33 which is provided integrally with the base section 31 and extends in parallel with the piezoelectric element 32 in a second longitudinal direction orthogonal to the first longitudinal direction, an action part 34 which connects to the other end of the piezoelectric element 32 and to the leading end of the support section 33, and undergoes displacement in a different direction from both the first longitudinal direction and the second longitudinal direction in accordance with the expansion and contraction of the piezoelectric element 32, and a valve body 35 provided on the side in the direction of displacement of the action part 34. The support section 33 has a narrow section 331 in the central portion that extends in the second longitudinal direction, and is secured to the valve seat plate 4 on the base section 31 side of the narrow section 331.

Description

piezoelectric valve

The present invention relates to a piezoelectric valve that uses the displacement of a piezoelectric element to open and close the valve.

Piezoelectric valves that open and close a valve by utilizing displacement of a piezoelectric element and eject compressed gas are known (see Patent Documents 1 and 2).

The piezoelectric valves described in Patent Documents 1 and 2 have an actuator that utilizes the characteristics of a piezoelectric element with excellent high-speed response performance, and the actuator is equipped with a lever principle to amplify the small displacement of the piezoelectric element. The displacement expansion mechanism.

The piezoelectric valve has excellent reactivity, so when it is used as an injection valve of an optical sorting machine for rice grains and other granular materials to remove defective products, there are fewer cases of removing good products by mistake, and the removed defective products The point of view that the mixing rate of defective products on the side is higher than that of electromagnetic valves can be obtained both experimentally and empirically.

In addition, when the piezoelectric valve is used as an injection valve of the optical sorting machine, for example, as described in Patent Document 2, it is directly and continuously installed in a space where compressed air is supplied from a compressed air source. A manifold having a plurality of nozzle hole openings at the front end of the injector.

However, in the piezoelectric valves described in Patent Documents 1 and 2, the valve seat plate for fixing the actuator is accommodated in the housing of the valve body. The actuator is equipped with a complex displacement expansion mechanism including arms, spring plates, etc., so the thickness dimension of the actuator cannot be reduced. Therefore, when the piezoelectric valve is provided with a plurality of air outlets, it is difficult to reduce the distance between the air outlets.

Therefore, the inventors of the present invention proposed a piezoelectric valve whose actuator has a displacement expansion mechanism with a simple structure (refer to Patent Document 3. Hereinafter, it will be referred to as "previous invention").

Through the piezoelectric valve of the previous invention, the thickness dimension of the actuator can be reduced compared with the conventional technology, so when there are multiple actuators, the air discharge port can be reduced compared with the conventional piezoelectric valve spacing.

However, in the piezoelectric valve of the aforementioned invention, when the displacement of the valve body is measured "when a driving voltage is applied to the piezoelectric element of the actuator, the piezoelectric element is extended, and the valve body is driven to open" , It is confirmed that fluctuations occur in the displacement waveform, and there is doubt that the compressed air cannot be discharged from the air outlet in a stable state. Therefore, there is still room for further improvement of the piezoelectric valve invented before. [Prior Technical Literature] [Patent Document]

[Patent Document 1] Japanese Patent Laid-Open No. 2017-51894 [Patent Document 2] Japanese Unexamined Patent Publication No. 2015-137664 [Patent Document 3] Japanese Patent Application No. 2020-154308

[Problem to be solved by the invention]

The purpose of the present invention is to provide a piezoelectric valve that can reduce the fluctuation generated in the displacement waveform of the valve body in the actuator and discharge compressed gas from the gas discharge port in a stable state. . [Means to solve the problem]

To achieve the above object, the present invention is a piezoelectric valve, comprising: an actuator, which drives the valve body; a valve seat plate having a valve seat in contact with or separated from the valve body and a discharge passage, and fixing the actuator; and, The main body shell accommodates the valve seat disc; The actuator contains: a base fixed to the seat disc; a piezoelectric element, one end of which is connected to the mounting surface of the base and extends toward the first long side; The supporting part is provided on the base part in an integrated manner, juxtaposed with the piezoelectric element and extending toward the second long side direction intersecting with the first long side direction; The action part is connected to the other end of the piezoelectric element and the front end of the support part, and is displaced in directions different from the first longitudinal direction and the second longitudinal direction as the piezoelectric element expands and contracts. ;as well as, The valve body is arranged on the side of the displacement direction of the acting part and is driven by the displacement of the acting part; The supporting part has a narrowed part at the middle part extending in the direction of the second long side, and is fixed to the valve seat plate on the side closer to the base than the narrowed part between the narrowed part and the base ; The body shell contains: a gas supply port supplied with compressed gas; and, The gas discharge port discharges the compressed gas supplied from the gas supply port through the discharge path of the valve seat plate through the separation of the valve body and the valve seat.

Also, in order to achieve the above object, the present invention is a piezoelectric valve, comprising: A plurality of actuators respectively drive a plurality of valve bodies in respective parallel planes; a valve seat plate having a plurality of valve seats and a plurality of discharge passages respectively in contact with or separated from the plurality of valve bodies, and fixing the plurality of actuators; and, The main body shell accommodates the valve seat disc; The plurality of actuators respectively include: a base fixed to the seat disc; a piezoelectric element, one end of which is connected to the mounting surface of the base and extends toward the first long side; The supporting part is provided on the base part in an integrated manner, juxtaposed with the piezoelectric element and extending toward the second long side direction intersecting with the first long side direction; The action part is connected to the other end of the piezoelectric element and the front end of the support part, and is displaced in directions different from the first longitudinal direction and the second longitudinal direction as the piezoelectric element expands and contracts. ;as well as, The valve body is arranged on the side of the displacement direction of the acting part and is driven by the displacement of the acting part; The supporting part has a narrowed part at the middle part extending in the direction of the second long side, and is fixed to the valve seat plate on the side closer to the base than the narrowed part between the narrowed part and the base ; The body shell contains: The gas supply port is supplied with compressed gas; The plurality of gas discharge ports separate the plurality of valve bodies from the plurality of valve seats, and discharge the compressed gas supplied from the gas supply port through the respective discharge channels of the valve seat plate.

In the present invention, Preferably, the supporting portion is integrally formed on the base by forming a metal material, such as stainless steel including invariant steel, integrally with the base.

Also, in the present invention, The supporting portion may also be integrally provided on the base by attaching other members made of, for example, stainless steel including invariant steel to the base.

In the present invention, The base is preferably fixed to the valve seat disc at least on the side connected to one end of the piezoelectric element. In the present invention, The base can also be fixed to the valve seat disc on the side where the support is provided.

In the present invention, Preferably, the displacement of the valve body is adjusted by the length from the narrowed portion of the support portion to the front end.

In the present invention, Preferably, between the narrowed portion and the base, a plurality of installation holes are provided along the second longitudinal direction on the side closer to the base than the narrowed portion, and the supporting portion utilizes at least One of the mounting holes is fixed to the valve seat disc with screws.

In the present invention, Preferably, at least one of the one end portion or the other end portion of the piezoelectric element is connected to the mounting surface of the base portion or the action portion via a connection portion made of a material having a coefficient of linear expansion larger than that of the support portion.

In the present invention, Preferably, the linking portion is integrally provided on the action portion, And the other end of the piezoelectric element is connected to the action part through the connecting part made of a material with a linear expansion coefficient greater than that of the supporting part.

In the present invention, Preferably, the connection part is integrally formed on the function part by using a metal material such as aluminum material and the function part to be integrally formed.

Also, in the present invention, For example, by attaching another member made of an aluminum block or the like to the action portion, the connecting portion may be integrally provided on the action portion.

In the present invention, The actuator preferably further includes a compressing member respectively connected to the base portion and the acting portion, and compressing the piezoelectric element in the first longitudinal direction.

In the present invention, The actuator preferably further includes the compression member respectively connected to the base portion and the action portion and compresses the piezoelectric element toward the first longitudinal direction, and makes it located on the approximate central axis of the piezoelectric element 32 .

In the present invention, Preferably, a gap formed between the base portion and the active portion and between the piezoelectric element and the support portion is filled with silicone resin, and the gap is filled with the silicone resin.

In the present invention, Preferably, gaps formed between the base portion and the active portion and between the piezoelectric element and the supporting portion are set at equal intervals, and the gaps are filled with the silicone resin.

In the present invention, Preferably, a gap formed between the base portion and the action portion and between the side extending in the first longitudinal direction of the piezoelectric element and the side extending in the second longitudinal direction of the support portion is filled with silicone resin, The gap is filled with the silicone resin.

In the present invention, Preferably, the gap formed between the base portion and the action portion and between the side where the piezoelectric element extends in the first longitudinal direction and the side where the support portion extends in the second longitudinal direction is provided at equal intervals. [Effect of the invention]

In the piezoelectric valve of the present invention, the actuator includes a piezoelectric element fixed to the base of the valve seat plate, one end connected to the mounting surface of the base and extending in the direction of the first long side, in an integrated manner A support part provided on the base and parallel to the piezoelectric element and extending in a second longitudinal direction intersecting with the first longitudinal direction is connected to the other end of the piezoelectric element and the front end of the support part, and the acting part that is displaced in a displacement direction that is different from the first longitudinal direction and the second longitudinal direction along with the expansion and contraction of the piezoelectric element, and the acting part is arranged on the side of the displacement direction and is driven by the acting part. The valve body is driven by the displacement of the supporting part, and the supporting part has a narrowed part in the middle part extending in the direction of the second long side, and is fixed to the valve seat plate on the side closer to the base than the narrowed part Therefore, compared with the conventional piezoelectric valve, the fluctuation generated in the displacement waveform of the valve body in the actuator can be reduced, and the compressed gas can be discharged from the gas discharge port in a stable state.

In the piezoelectric valve of the present invention, if the actuator is set to adjust the displacement of the valve body by the length from the narrowed portion of the support portion to the front end, the gas discharged from the gas discharge port can be adjusted. The discharge volume of compressed gas.

In the piezoelectric valve of the present invention, if at least one of the one end or the other end of the piezoelectric element is connected to the mounting surface of the base through a connecting portion made of a material having a coefficient of linear expansion larger than that of the supporting portion Or the active part can reduce or eliminate the influence of thermal shrinkage of the piezoelectric element caused by temperature changes.

In the piezoelectric valve of the present invention, if the actuator further includes a compression member respectively connected to the base portion and the action portion, and compresses the piezoelectric element in the direction of the first long side, it can prevent the Damage to the piezoelectric element damaged by the load in the direction.

In the piezoelectric valve of the present invention, if the compression member included in the actuator is respectively connected to the base portion and the action portion and compresses the piezoelectric element in the direction of the first long side, it is located on the piezoelectric element slightly on the central axis, the torsion force caused by the compression member will not act on the piezoelectric element, thereby effectively preventing damage to the piezoelectric element.

In the piezoelectric valve of the present invention, if the gap formed between the base part and the action part and between the piezoelectric element and the support part is filled with silicone resin, the displacement waveform of the valve body can be reduced more effectively. fluctuations in .

In the piezoelectric valve of the present invention, if the gap formed between the base portion and the action portion and between the piezoelectric element and the support portion is set at equal intervals, and the gap is filled with the silicone resin, it can be Filling of the gap with silicone resin is easily performed.

Embodiments of the present invention will be described based on the drawings. [Basic structure of piezoelectric valve] First, the basic configuration of the piezoelectric valve of the present invention will be described. Fig. 1 shows a perspective view of a piezoelectric valve. Fig. 2 is a schematic diagram of a piezoelectric valve and shows a view from the side. The piezoelectric valve 1 includes a valve main body 2 , an actuator 3 described later, and a valve seat plate 4 described later arranged inside the valve main body 2 in a state where the actuator 3 is fixed.

The valve body 2 is a housing with an opening on the back (bottom in FIGS. 1 and 2 ), and has a gas pressure chamber inside to receive compressed gas from an external compressed gas supply source (not shown). Also, on the front side of the valve body 2 (the top surface in FIGS. 1 and 2 ), a connection portion 5 is provided for installing in a manifold (not shown) that has a space for supplying compressed gas from the compressed gas supply source. Show).

On the front of the connection part 5, there are gas suction ports 51 for sucking compressed gas into the valve body 2 and a plurality of gas discharge ports 52 for discharging the compressed gas. Also, on the front of the valve body 2, there is a gas supply port (not shown) communicated with the gas inlet 51 of the connecting portion 5 and a plurality of gas discharge ports (not shown) communicated with each gas discharge port 52. show) to open. The back surface of the valve body 2 is closed by a cover body 6, and a wiring connector 61 for supplying power to a piezoelectric element 32 described later is arranged on the cover body 6.

Fig. 3 is a perspective view showing the state in which the actuator is fixed to the valve seat disc. Here, as an example of the actuator, the state of the actuator invented before fixing is shown. Fig. 4 is a schematic diagram of a state in which the actuator is fixed to the valve seat disc, and shows a view viewed from the side of the valve seat disc in Fig. 3 . Fig. 5 is a schematic diagram of a state in which the actuator is fixed to the valve seat disc, and shows a view when viewed from the front side of the valve seat disc in Figs. 3 and 4 . The piezoelectric valve 1 accommodates the valve seat plate 4 for fixing the actuator 3 inside the valve body 2 . This valve seat plate 4 is an example of a valve seat plate that can be installed with two actuators 3, and has a valve seat portion 41 in the central part, and the two opposite sides of the valve seat portion 41 are respectively provided with a The valve seat 42 that the valve body 35 of the actuator 3 abuts against.

A mounting portion 43 of the actuator 3 is formed at a position facing one side of the valve seat portion 41 on one side of the valve seat plate 4 . Also, on the other side of the valve seat plate 4 , a mounting portion 44 of the actuator 3 is formed at a position facing the other side of the valve seat portion 41 . The two actuators 3 are disposed on the respective mounting portions 43 and 44 of the valve seat plate 4 so that the respective valve bodies 35 and the respective valve seats 42 face each other, and are fixed with screws.

In the valve seat portion 41, a plurality of discharge passages 45 opening on the valve seat surface of the respective valve seats 42 are formed, and each discharge passage 45 opens on the front surface (the top surface in FIG. 4 ) of the valve seat disc 4 . The valve seat disc 4 is disposed inside the valve body 2 in a state where the two actuators 3 are fixed, and by fixing the front side of the valve body 2 with screws, the discharge passages 45 communicates with the gas outlets opened on the front side of the valve body 2 .

In the piezoelectric valve 1 , two valve seat discs 4 are housed side by side in the width direction in the casing of the valve body 2 , and four gas discharge ports are opened on the front surface of the valve body 2 .

In addition, the piezoelectric valve 1 is configured so that four actuators 3 are arranged in the housing of the valve body 2, and four gas outlets are opened on the front of the valve body 2, but it is not limited thereto, and can be More than one actuator 3 is arranged in the valve body.

[Previously Invented Actuator] Fig. 6 shows a schematic diagram of an actuator included in the piezoelectric valve of the foregoing invention. The actuator 3 of the previous invention has a base 31 fixed to the valve seat disc 4, a piezoelectric element 32 that is connected to the mounting surface of the base 31 at one end and extends toward the first longitudinal direction, and is integrally formed with the base 31. And a support portion 33 parallel to the piezoelectric element 32 and extending in a second longitudinal direction intersecting with the first longitudinal direction.

In addition, the actuator 3 of the previous invention is provided with the other end portion of the piezoelectric element 32 and the front end portion of the support portion 33, and along with the expansion and contraction of the piezoelectric element 32, the actuator 3 is connected to the first longitudinal direction respectively. The action part 34 that is displaced in a direction different from the second longitudinal direction, and the valve body that is provided on the front end side of the action part 34 and on one side of the displacement direction, and is driven by the displacement of the action part 34 35.

The actuator 3 expands and contracts with the piezoelectric element 32, so that the action part 34 is in a plane approximately parallel to the plane including the first long-side direction and the second long-side direction, respectively facing the first long-side direction. Displacement in a direction different from the side direction and the second long side direction. At this time, by providing the narrowed portion 331 in the middle portion of the support portion 33 extending in the second longitudinal direction, the displacement of the action portion 34 accompanying the expansion and contraction of the piezoelectric element 32 can be enlarged.

On the mounting surface of the base portion 31, a connecting member 311 made of, for example, an aluminum block or the like can be mounted.

In addition, the actuator 3 can connect the base portion 31 and the action portion 34 with a compression member 36 .

Fig. 7 shows a schematic diagram of the displacement waveform of the valve body in the actuator of the previous invention. The displacement waveform of the valve body 35 shown in FIG. 7 is obtained by applying a driving voltage to the piezoelectric element 32 in the previously invented actuator 3 shown in FIG. The displacement of the valve body 35 when the valve body 35 is opened and driven.

The experiment was carried out by applying a driving voltage to the piezoelectric element 32 based on the method described in "Example" of JP-A-2017-160973. The experimental conditions are as follows. In addition, each time condition of the input signal is set to an optimum value in which the fluctuation generated in the displacement waveform of the valve body is less. (1) Driving voltage: 72V (2) Input signal: the first pre-pulse time t1 = 0.097ms The first stop time t2 = 0.077ms The second pre-pulse time t3 = 0.6ms The second stop time t4 = 0.01ms Main pulse time t5＝0.216ms (Piezoelectric element conduction time: 1ms)

As shown in FIG. 7 , in the actuator 3 of the aforementioned invention, it was confirmed that a plurality of large fluctuations, which we thought were caused by resonance, occurred in the displacement waveform of the valve body. Therefore, the piezoelectric valve of the foregoing invention may not be able to discharge the compressed gas from the gas discharge port in a stable state.

[Actuator of the present invention] The piezoelectric valve of the present invention improves the actuator in the piezoelectric valve of the previous invention.

＜Implementation 1＞ Fig. 8 shows a schematic diagram of an actuator according to Embodiment 1 of the present invention. The actuator 3 of Embodiment 1 has a base 31 fixed to the valve seat disc 4, a piezoelectric element 32 with one end connected to the mounting surface of the base 31 and extending in the direction of the first long side, and designed in an integrated manner. A supporting portion 33 is provided on the base portion 31 and extends in parallel with the piezoelectric element 32 in a second longitudinal direction intersecting with the first longitudinal direction.

In addition, the actuator 3 of Embodiment 1 is connected to the other end portion of the piezoelectric element 32 and the front end portion of the support portion 33, and moves toward the first long side respectively as the piezoelectric element 32 expands and contracts. The action part 34 is displaced in a direction different from the second longitudinal direction, and the valve body is provided on the front end side of the action part 34 and on one side of the displacement direction and driven by the displacement of the action part 34 35.

In the actuator 3 of Embodiment 1, the base 31 includes a side connected to one end of the piezoelectric element 32 and a side integrated with the support portion 33, and on the side connected to the piezoelectric element 32 and The side provided with the supporting portion 33 is fixed to the valve seat plate 4 with screws.

In addition, in the actuator 3 of Embodiment 1, the support portion 33 has a narrowed portion 331 at the middle portion extending in the second longitudinal direction, and the narrowed portion 331 and the base portion 31 The mounting holes 38 on the side closer to the base 31 than the narrowed portion 331 are fixed to the valve seat plate 4 with screws.

In addition, the base portion 31 may be fixed to the valve seat plate 4 at least on the side connected to one end portion of the piezoelectric element 32 .

Here, the base portion 31 and the support portion 33 can be integrally formed by punching out metal materials such as stainless steel materials including constant steel materials, for example. If the base portion 31 and the support portion 33 are integrally formed by punching the metal material, the number of parts can be reduced and the assembly of the actuator 3 can be made easier.

Also, the base portion 31 and the support portion 33 may be formed with different members, and the support portion 33 may be integrally provided on the base portion by attaching the support portion 33 as another member to the base portion 31. 31.

In the actuator 3 of Embodiment 1, the acting portion 34 can be formed of a lightweight material such as aluminum, for example. It is preferable to displace the action portion 34 if the action portion 34 is formed of a lightweight material such as aluminum. Also, the valve body 35 can be made of rubber, preferably slippery rubber.

The actuator 3 can connect the base part 31 and the action part 34 with a compression member 36 . The piezoelectric element 32 is easily damaged by the load in the tension direction, so the compression member 36 is used to connect the base portion 31 and the action portion 34 . Thereby, the piezoelectric element 32 can be compressed in the first longitudinal direction, so that the piezoelectric element 32 can be prevented from being damaged.

Fig. 9 is a schematic diagram showing the displacement waveform of the valve body in the actuator according to Embodiment 1 of the present invention. The displacement waveform of the valve body 35 shown in FIG. 9 is measured by a laser measuring device. In the actuator 3 of Embodiment 1 shown in FIG. 8, a driving voltage is applied to the piezoelectric element 32 so that the piezoelectric element 32 The displacement of the valve body 35 when it is stretched to drive the valve body 35 to open the valve.

The experiment was carried out by applying a driving voltage to the piezoelectric element 32 based on the method described in "Example" of JP-A-2017-160973. The experimental conditions are as follows. In addition, each time condition of the input signal is set to an optimum value in which the fluctuation generated in the displacement waveform of the valve body is less. (1) Driving voltage: 72V (2) Input signal: the first pre-pulse time t1 = 0.06ms The first stop time t2 = 0.012ms The second pre-pulse time t3 = 0.89ms The second stop time t4 = 0.035ms Main pulse time t5＝0.003ms (Piezoelectric element conduction time: 1ms)

As shown in FIG. 9 , in the actuator 3 of Embodiment 1, it was confirmed that almost no fluctuation occurred in the displacement waveform of the valve body 35 . Therefore, the piezoelectric valve of the present invention can discharge the compressed gas from the gas discharge port in a stable state by having the actuator 3 of the first embodiment, compared with the piezoelectric valve of the previous invention.

＜Implementation 2＞ Fig. 10 shows a schematic diagram of an actuator according to Embodiment 2 of the present invention. The actuator 3 of Embodiment 2 is in the actuator 3 of Embodiment 1 above, the other end of the piezoelectric element 32 passes through the connecting portion 37 made of a material with a linear expansion coefficient greater than that of the supporting portion 33 And it is connected to this action|action part 34.

In the actuator 3 of Embodiment 2, the other end of the piezoelectric element 32 is connected to the action part 34 through the connecting part 37 made of a material with a coefficient of linear expansion greater than that of the support part 33, so that the The effect of thermal shrinkage of the piezoelectric element 32 caused by temperature changes is eliminated.

In the actuator 3 of Embodiment 2, the connection part 37 and the action part 34 are integrally formed, for example, they can be integrally formed by punching metal materials such as aluminum. If the action part 34 and the connecting part 37 are integrally formed by punching light-weight metal materials such as aluminum, the number of parts can be reduced and the assembly of the actuator 3 can be made easier.

Also, the connecting portion 37 may be formed by other members such as an aluminum block, and by installing the connecting portion 37 as another member on the acting portion 34, the connecting portion 37 and the acting portion 34 may be set as One.

In addition, one end of the piezoelectric element 32 may be connected to the mounting surface of the base 31 via the connecting portion 37 by forming the connecting portion 37 with another member such as an aluminum block.

Fig. 11 is a schematic diagram showing the displacement waveform of the valve body in the actuator according to Embodiment 2 of the present invention. The displacement waveform of the valve body 35 shown in FIG. 11 is measured by a laser measuring device. In the actuator 3 of the embodiment 2 shown in FIG. 10, a driving voltage is applied to the piezoelectric element 32 to make the piezoelectric element 32 Stretch to the displacement of the valve body 35 when the valve body 35 is opened and driven.

The experiment was carried out by applying a driving voltage to the piezoelectric element 32 based on the method described in "Example" of JP-A-2017-160973. The experimental conditions are as follows. In addition, each time condition of the input signal is set to an optimum value in which fluctuations in the displacement waveform of the valve body are less. (1) Driving voltage: 72V (2) Input signal: the first pre-pulse time t1 = 0.058ms The first stop time t2 = 0.008ms The second pre-pulse time t3 = 0.877ms The second stop time t4 = 0.046ms Main pulse time t5＝0.011ms (Piezoelectric element conduction time: 1ms)

As shown in FIG. 11 , in the actuator 3 of Embodiment 2, it can be confirmed that there is almost no fluctuation in the displacement waveform of the valve body 35 , or even if there is fluctuation, it is less than that of the previous invention shown in FIG. 7 . Actuator 3 reduces fluctuations. Therefore, the piezoelectric valve of the present invention can discharge the compressed gas from the gas discharge port in a stable state by having the actuator 3 of the second embodiment, compared with the piezoelectric valve of the previous invention.

＜Implementation 3＞ Fig. 12 shows a schematic diagram of an actuator according to Embodiment 3 of the present invention. The actuator 3 of Embodiment 3 is, in the actuator 3 of Embodiment 2 above, along the direction of the first long side, at a position approximately on the center axis of the piezoelectric element 32, which is connected to the actuator 3. The base portion 31 and the action portion 34 compress the piezoelectric element 32 in the first longitudinal direction.

The actuator 3 of Embodiment 3 is provided at a position approximately on the central axis of the piezoelectric element 32, respectively connected to the base portion 31 and the action portion 34, and compresses the piezoelectric element 32 toward the first longitudinal direction. The compression member 36, so the torsion force caused by the compression member 36 will not act on the piezoelectric element 32, and the damage of the piezoelectric element 32 can be effectively prevented.

Fig. 13 is a schematic diagram showing the displacement waveform of the valve body in the actuator according to Embodiment 3 of the present invention. The displacement waveform of the valve body 35 shown in FIG. 13 is also measured by a laser measuring instrument. In the actuator 3 of the embodiment 3 shown in FIG. 12, a driving voltage is applied to the piezoelectric element 32 to make the piezoelectric element 32 is extended to the displacement of the valve body 35 when the valve body 35 is opened and driven.

The experiment was carried out by applying a driving voltage to the piezoelectric element 32 based on the method described in "Example" of JP-A-2017-160973. The experimental conditions are as follows. In addition, each time condition of the input signal is set to an optimum value in which the fluctuation generated in the displacement waveform of the valve body is less. (1) Driving voltage: 72V (2) Input signal: the first pre-pulse time t1 = 0.054ms The first stop time t2 = 0.015ms The second pre-pulse time t3 = 0.875ms The second stop time t4 = 0.046ms Main pulse time t5＝0.01ms (Piezoelectric element conduction time: 1ms)

As shown in FIG. 13 , in the actuator 3 of Embodiment 3, it can also be confirmed that there is almost no fluctuation in the displacement waveform of the valve body 35 , or even if there is fluctuation, it is smaller than that of the previous invention shown in FIG. 7 . Actuator 3 reduces fluctuations. Therefore, the piezoelectric valve of the present invention can discharge the compressed gas from the gas discharge port in a stable state by having the actuator 3 of the third embodiment, compared with the piezoelectric valve of the previous invention.

＜Other forms of implementation＞ The actuator 3 of the above-mentioned embodiment of the present invention can adjust the valve body by the length from the narrowed portion 331 of the support portion 33 to the front end of the support portion 33 connected to the action portion 34. 35 to adjust the discharge volume of the compressed gas discharged from the gas outlet. That is, the piezoelectric valve of the present invention can increase the displacement of the valve body 35 by utilizing the actuator 3 having the support portion 33 whose length from the narrowed portion 331 to the front end is long. , and increase the discharge volume of the compressed gas discharged from the gas discharge port. Also, the piezoelectric valve of the present invention can reduce the displacement of the valve body 35 by utilizing the actuator 3 provided with the support portion 33 having a shorter length from the narrowed portion 331 to the front end. And reduce the discharge amount of the compressed gas discharged from the gas discharge port.

In the above-mentioned actuator 3 of the embodiment of the present invention, it is also possible to provide a plurality of installations along the second longitudinal direction on the support portion 33 on the side closer to the base portion 31 than the narrowed portion 331. holes 38 , and at least one mounting hole 38 is used to fix the supporting portion 33 to the valve seat plate 4 with screws. In the above-mentioned actuator 3 of the embodiment of the present invention, if the support portion 33 is closer to the base portion 31 than the narrowed portion 331, a plurality of mounting holes 38 are provided along the second longitudinal direction. , and use at least one of the mounting holes 38 to fix the support portion 33 to the valve seat plate 4 with screws, the valve body can be adjusted by fixing the support portion 33 to the position of the mounting hole 38 of the valve seat plate 4 35 displacement, and adjust the discharge of compressed gas discharged from the gas outlet.

In the above-mentioned actuator 3 of the embodiment of the present invention, the gap formed between the base portion 31 and the action portion 34 and between the piezoelectric element 32 and the support portion 33 can be filled with silicone resin, and the Silicone fills the gap.

In the above-mentioned actuator 3 of the embodiment of the present invention, at least one of the one end or the other end of the piezoelectric element 32 can be connected through a connecting part made of a material having a coefficient of linear expansion greater than that of the supporting part 33 37 is connected to the installation surface of the base 31 or the active part 34, the gap formed between the piezoelectric element 32 and the connecting part 37 and the supporting part 33 is filled with silicone resin, and filled with the silicone resin the gap.

In the actuator 3 according to the embodiment of the present invention described above, if the space between the base portion 31 and the action portion 34 is filled with silicone resin, and the side where the piezoelectric element 32 extends in the first longitudinal direction and the support The gap formed between the sides extending in the second longitudinal direction of the portion 33 can more effectively reduce the fluctuation generated in the displacement waveform of the valve body 35 through the damping effect of the silicone rubber.

In addition, in the actuator 3 according to the above embodiment of the present invention, the gaps formed between the base portion 31 and the action portion 34 and between the piezoelectric element 32 and the support portion 33 can be set at equal intervals.

In the actuator 3 of the embodiment of the present invention described above, if the side between the base portion 31 and the action portion 34 and the side where the piezoelectric element 32 extends in the first longitudinal direction and the support portion 33 toward the second 2 The gaps formed between the sides extending in the longitudinal direction are set at equal intervals, and the gaps are filled with silicone resin, so that the gaps can be more easily filled with silicone resin.

As mentioned above, although the embodiment of this invention was described, this invention is not limited to the said embodiment, The structure can be changed suitably, without deviating from the range of invention. [Industrial Utilization Possibility]

The piezoelectric valve of the present invention can reduce the fluctuation generated in the displacement waveform of the valve body, and discharge the compressed gas from the gas discharge port in a stable state, so it is very useful.

1: Piezoelectric valve 2: Valve body 3: Actuator 31: base 311: Connecting components 32: Piezoelectric element 33: support part 331: narrowing part 34: Action department 35: valve body 36: Compression components 37: Connecting part 38: Mounting hole 4: Seat plate 41: Seat part 42: valve seat 43: Installation Department 44: Installation Department 45: discharge way 5: Connecting part 51: Gas suction port 52: Gas outlet 6: Cover body 61: Wiring connector

Fig. 1 is a perspective view of a piezoelectric valve. Fig. 2 is a schematic diagram of a piezoelectric valve. Fig. 3 is a perspective view of the state in which the actuator is fixed to the valve seat disc. Fig. 4 is a schematic diagram of the state where the actuator is fixed on the valve seat disc. Fig. 5 is a schematic diagram of the state where the actuator is fixed on the valve seat disc. Figure 6 is a schematic diagram of the actuator of the previous invention. Fig. 7 is a schematic diagram of the displacement waveform of the valve body in the actuator of the previous invention. Fig. 8 is a schematic diagram of an actuator according to Embodiment 1 of the present invention. Fig. 9 is a schematic diagram of the displacement waveform of the valve body in the actuator according to Embodiment 1 of the present invention. Fig. 10 is a schematic diagram of an actuator according to Embodiment 2 of the present invention. Fig. 11 is a schematic diagram of the displacement waveform of the valve body in the actuator according to Embodiment 2 of the present invention. Fig. 12 is a schematic diagram of an actuator according to Embodiment 3 of the present invention. Fig. 13 is a schematic diagram of the displacement waveform of the valve body in the actuator according to Embodiment 3 of the present invention.

1: Piezoelectric valve

2: Valve body

5: Connecting part

51: Gas suction port

52: Gas outlet

6: Cover body

Claims (10)

A piezoelectric valve comprising: an actuator, which drives the valve body; a valve seat plate having a valve seat in contact with or separated from the valve body and a discharge passage, and fixing the actuator; and, The main body shell accommodates the valve seat disc; The actuator contains: a base fixed to the seat disc; a piezoelectric element, one end of which is connected to the mounting surface of the base and extends toward the first long side; The supporting part is provided on the base part in an integrated manner, and is juxtaposed with the piezoelectric element and extends in a second long side direction intersecting with the first long side direction; The action part is connected to the other end of the piezoelectric element and the front end of the support part, and is displaced in directions different from the first longitudinal direction and the second longitudinal direction as the piezoelectric element expands and contracts. ;as well as, The valve body is arranged on the side of the displacement direction of the acting part and is driven by the displacement of the acting part; The support portion has a narrowing portion at the middle portion extending toward the second long side, and is fixed to the valve seat plate on the side closer to the base than the narrowing portion; The body shell contains: a gas supply port supplied with compressed gas; and, The gas discharge port discharges the compressed gas supplied from the gas supply port through the discharge path of the valve seat plate through the separation of the valve body and the valve seat. A piezoelectric valve comprising: A plurality of actuators respectively drive a plurality of valve bodies in respective parallel planes; a valve seat plate having a plurality of valve seats and a plurality of discharge passages respectively in contact with or separated from the plurality of valve bodies, and fixing the plurality of actuators; and, The main body shell accommodates the valve seat disc; The plurality of actuators each include: a base fixed to the seat disc; a piezoelectric element, one end of which is connected to the mounting surface of the base and extends toward the first long side; The supporting part is provided on the base part in an integrated manner, and is juxtaposed with the piezoelectric element and extends in a second long side direction intersecting with the first long side direction; The action part is connected to the other end of the piezoelectric element and the front end of the support part, and is displaced in directions different from the first longitudinal direction and the second longitudinal direction as the piezoelectric element expands and contracts. ;as well as, The valve body is arranged on the side of the displacement direction of the acting part and is driven by the displacement of the acting part; The support portion has a narrowed portion at the middle portion extending in the direction of the second long side, and is fixed to the valve seat plate on the side closer to the base than the narrowed portion; The body shell contains: a gas supply port supplied with compressed gas; and, The plurality of gas discharge ports separate the plurality of valve bodies from the plurality of valve seats, and discharge the compressed gas supplied from the gas supply port through the plurality of discharge channels of the valve seat plate. The piezoelectric valve according to claim 1 or 2, wherein, The base is fixed to the seat disc at least on the side connected to one end of the piezoelectric element. The piezoelectric valve according to claim 1 or 2, wherein, The displacement of the valve body is adjusted through the length from the narrowed portion of the support portion to the front end. The piezoelectric valve according to claim 1 or 2, wherein, At least one of the one end or the other end of the piezoelectric element is connected to the installation surface of the base or the active part through a connection part made of a material having a coefficient of linear expansion greater than that of the support part. The piezoelectric valve according to claim 5, wherein, The connecting portion is integrally provided on the active portion; The other end of the piezoelectric element is connected to the action part through the connection part made of a material with a coefficient of linear expansion larger than that of the support part. The piezoelectric valve according to claim 1 or 2, wherein, The actuator further includes a compression member, which is respectively connected to the base portion and the action portion, and compresses the piezoelectric element in the first longitudinal direction. The piezoelectric valve as claimed in claim 7, wherein, The actuator includes the compressing member on the approximate central axis of the piezoelectric element, which is respectively connected to the base and the action portion and compresses the piezoelectric element in the first longitudinal direction. The piezoelectric valve according to claim 1 or 2, wherein, The gap formed between the base part and the active part and the piezoelectric element and the supporting part is filled with silicone resin. The piezoelectric valve according to claim 1 or 2, wherein, The gap formed between the base part and the action part and between the piezoelectric element and the support part is set at equal intervals, and the gap is filled with silicone resin.

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