CN117203457A - Piezoelectric valve - Google Patents
Piezoelectric valve Download PDFInfo
- Publication number
- CN117203457A CN117203457A CN202280028728.8A CN202280028728A CN117203457A CN 117203457 A CN117203457 A CN 117203457A CN 202280028728 A CN202280028728 A CN 202280028728A CN 117203457 A CN117203457 A CN 117203457A
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- Prior art keywords
- valve
- piezoelectric
- piezoelectric element
- longitudinal direction
- base
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- 238000006073 displacement reaction Methods 0.000 claims abstract description 61
- 230000009471 action Effects 0.000 claims abstract description 14
- 230000008602 contraction Effects 0.000 claims abstract description 12
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- 229920002050 silicone resin Polymers 0.000 claims description 16
- 230000006835 compression Effects 0.000 claims description 13
- 238000007906 compression Methods 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 12
- 238000007599 discharging Methods 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 9
- 238000010586 diagram Methods 0.000 description 9
- 230000036278 prepulse Effects 0.000 description 8
- 239000007769 metal material Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000003562 lightweight material Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 2
- 239000004945 silicone rubber Substances 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 235000013339 cereals Nutrition 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
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- 230000001050 lubricating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Electrically Driven Valve-Operating Means (AREA)
Abstract
A piezoelectric valve (1) is provided with: an actuator (3) that drives the valve element (35); a valve seat plate (4) for fixing the actuator (3); and a main body housing that houses the valve seat plate (4). The actuator (3) is provided with a base (31) fixed to the valve seat plate (4), a piezoelectric element (32) having one end connected to the mounting surface of the base (31) and extending in the first longitudinal direction, a support (33) integrally provided on the base (31) and extending in the second longitudinal direction intersecting the first longitudinal direction in parallel with the piezoelectric element (32), an action part (34) connected to the other end of the piezoelectric element (32) and the front end of the support (33) and displaced in a direction different from the first longitudinal direction and the second longitudinal direction, respectively, in response to expansion and contraction of the piezoelectric element (32), and a valve element (35) provided on the side of the displacement direction of the action part (34). The support portion (33) has a narrowed portion (331) at an intermediate portion extending in the second longitudinal direction, and is fixed to the valve seat plate (4) on the side of the narrowed portion (331) closer to the base portion (31).
Description
Technical Field
The present invention relates to a piezoelectric valve that opens and closes a valve by displacement of a piezoelectric element.
Background
Piezoelectric valves that open and close valves by displacement of piezoelectric elements and discharge compressed gas are known (see patent documents 1 and 2).
The piezoelectric valves described in patent documents 1 and 2 include an actuator that uses the characteristics of a piezoelectric element having excellent high-speed response performance, and the actuator includes a displacement amplifying mechanism that amplifies a small displacement of the piezoelectric element based on a lever principle.
Since the piezoelectric valve has excellent response, when defective products are removed by the injection valve for an optical sorting machine for granular objects such as rice grains, the defective products are less erroneously removed, and the mixing rate of the removed defective products is higher than that of the electromagnetic valve, which is experimentally and empirically available.
In addition, in the case of using the piezoelectric valve as a valve or the like of an ejector of the optical sorting machine, as described in patent document 2, for example, the piezoelectric valve is directly and continuously attached to a manifold having a space in which compressed air is supplied from a compressed air source, and a plurality of nozzle holes are opened at the tip of the ejector.
However, the piezoelectric valves described in patent documents 1 and 2 house a valve seat plate for fixing the actuator in a housing of a valve body. The actuator includes a displacement amplifying mechanism having a complicated structure including an arm, a leaf spring, and the like, and cannot be reduced in thickness. Therefore, when the piezoelectric valve is provided with a plurality of air discharge ports, there is a problem in that it is difficult to reduce the pitch of the air discharge ports.
Accordingly, the present inventors have proposed a piezoelectric valve having an actuator provided with a displacement amplifying mechanism of a simple structure (see patent document 3, hereinafter referred to as "the foregoing invention").
According to the piezoelectric valve of the present invention, since the thickness of the actuator can be made smaller than before, when a plurality of actuators are provided, the pitch of the air outlet can be reduced as compared with the conventional piezoelectric valve.
However, in the piezoelectric valve according to the present invention, when the displacement amount of the valve element is measured when the driving voltage is applied to the piezoelectric element of the actuator to extend the piezoelectric element and the valve element is driven to open, it is confirmed that the displacement waveform fluctuates, and there is a concern that compressed air cannot be discharged from the air discharge port in a stable state, and therefore, there is still a room for further improvement in the piezoelectric valve according to the present invention.
Prior art literature
Patent literature
Patent document 1: japanese patent laid-open No. 2017-51894
Patent document 2: japanese patent application laid-open No. 2015-137664
Patent document 3: japanese patent application 2020-154308
Disclosure of Invention
Problems to be solved by the invention
The present invention improves the piezoelectric valve of the present invention, and an object of the present invention is to provide a piezoelectric valve capable of reducing fluctuation in a displacement waveform of a valve element in an actuator and discharging compressed gas from a gas discharge port in a stable state.
Means for solving the problems
In order to achieve the above object, the present invention provides a piezoelectric valve comprising: an actuator that drives the valve element; a valve seat plate having a valve seat and a discharge path which are in contact with and separated from the valve body, and fixing the actuator; and a main body case accommodating the valve seat plate, wherein the actuator includes: a base portion fixed to the valve seat plate; a piezoelectric element having one end connected to the mounting surface of the base and extending in the first longitudinal direction; a support part integrally provided on the base part, and extending in a second longitudinal direction intersecting the first longitudinal direction, the support part being arranged in parallel with the piezoelectric element; an operating portion that connects the other end portion of the piezoelectric element and the distal end portion of the support portion, and that is displaced in a direction different from the first longitudinal direction and the second longitudinal direction in response to expansion and contraction of the piezoelectric element; and a valve body provided on a side of the acting portion in the direction of the displacement, and driven by the displacement of the acting portion, wherein the support portion has a narrowed portion at an intermediate portion extending in the second longitudinal direction, and is fixed to the valve seat plate on a side of the narrowed portion closer to the base than the narrowed portion, and between the narrowed portion and the base, and wherein the main body case includes: a gas supply port to which compressed gas is supplied; and a gas discharge port that discharges the compressed gas supplied from the gas supply port through the discharge passage of the valve seat plate by separating the valve body from the valve seat.
In order to achieve the above object, the present invention provides a piezoelectric valve comprising: a plurality of actuators that drive the plurality of valve bodies in parallel planes independently; a valve seat plate having a plurality of valve seats and a discharge path which are independently contacted with and separated from the plurality of valve cores, and fixing the plurality of actuators; and a main body case accommodating the valve seat plate, wherein the piezoelectric valve includes: a base portion fixed to the valve seat plate; a piezoelectric element having one end connected to the mounting surface of the base and extending in the first longitudinal direction; a support part integrally provided on the base part, and extending in a second longitudinal direction intersecting the first longitudinal direction, the support part being arranged in parallel with the piezoelectric element; an operating portion that connects the other end portion of the piezoelectric element and the distal end portion of the support portion, and that is displaced in a direction different from the first longitudinal direction and the second longitudinal direction in response to expansion and contraction of the piezoelectric element; and a valve body provided on a side of the acting portion in the direction of the displacement, and driven by the displacement of the acting portion, wherein the support portion has a narrowed portion at an intermediate portion extending in the second longitudinal direction, and is fixed to the valve seat plate on a side of the narrowed portion closer to the base than the narrowed portion, and between the narrowed portion and the base, and wherein the main body case includes: a gas supply port to which compressed gas is supplied; and a gas discharge port that, by separating the plurality of valve elements from the plurality of valve seats, independently discharges the compressed gas supplied from the gas supply port through the discharge passages of the valve seat plate.
In the present invention, the support portion is preferably integrally formed with the base portion by a metal material such as stainless steel including a constant steel material, and is integrally provided with the base portion.
In the present invention, the support portion may be integrally provided with the base portion by attaching another member made of, for example, stainless steel including a constant steel material to the base portion.
In the present invention, the base is preferably fixed to the valve seat plate at least on a side to which one end of the piezoelectric element is connected.
In the present invention, the base may be fixed to the valve seat plate on a side where the support portion is provided.
In the present invention, it is preferable that the displacement amount of the valve body is adjusted by a length from the narrowed portion of the support portion to the distal end portion.
In the present invention, it is preferable that a plurality of mounting holes are provided in the support portion on the side of the base portion than the narrowed portion, and between the narrowed portion and the base portion along the second longitudinal direction,
the support portion is threadably secured to the valve seat plate with at least one of the mounting holes.
In the present invention, at least one of the one end portion and the other end portion of the piezoelectric element is preferably connected to the mounting surface of the base portion or the acting portion via a connecting portion made of a material having a linear expansion coefficient larger than that of the supporting portion.
In the present invention, it is preferable that the connecting portion is integrally provided with the acting portion,
the other end portion of the piezoelectric element is connected to the acting portion via the connecting portion made of a material having a linear expansion coefficient larger than that of the supporting portion.
In the present invention, it is preferable that the connecting portion is integrally formed with the acting portion by a metal material such as aluminum, and is integrally provided with the acting portion.
In the present invention, the connecting portion may be integrally provided to the acting portion by attaching another member made of, for example, an aluminum block to the acting portion.
In the present invention, it is preferable that the actuator further includes a compression member that is coupled to the base and the acting portion, respectively, and compresses the piezoelectric element in the first longitudinal direction.
In the present invention, it is preferable that the actuator includes the compression member that is coupled to the base and the acting portion, respectively, so as to be located on a substantially central axis of the piezoelectric element, and compresses the piezoelectric element in the first longitudinal direction.
In the present invention, it is preferable that a gap between the base and the acting portion and between the piezoelectric element and the supporting portion is filled with a silicone resin, and the gap is filled with the silicone resin.
In the present invention, it is preferable that the gaps formed between the base and the acting portion and between the piezoelectric element and the supporting portion are equally spaced, and the gaps are filled with the silicone resin.
In the present invention, it is preferable that a gap between a side of the piezoelectric element formed between the base and the acting portion and extending in the first longitudinal direction and a side of the supporting portion extending in the second longitudinal direction is filled with a silicone resin, and the gap is filled with the silicone resin.
In the present invention, it is preferable that a gap between a side of the piezoelectric element extending in the first longitudinal direction and a side of the support portion extending in the second longitudinal direction, which is formed between the base portion and the acting portion, is equal to an interval.
Effects of the invention
In the piezoelectric valve according to the present invention, the actuator includes: a base portion fixed to the valve seat plate; a piezoelectric element having one end connected to the mounting surface of the base and extending in the first longitudinal direction; a support part integrally provided on the base part, and extending in a second longitudinal direction intersecting the first longitudinal direction, the support part being arranged in parallel with the piezoelectric element; an operating portion that connects the other end portion of the piezoelectric element and the distal end portion of the support portion, and that is displaced in a displacement direction different from each of the first longitudinal direction and the second longitudinal direction in accordance with expansion and contraction of the piezoelectric element; and the valve element is provided on a side of the action portion in the direction of the displacement, and is driven by the displacement of the action portion, and the support portion has a narrowed portion at an intermediate portion extending in the second longitudinal direction, and is fixed to the valve seat plate on a side of the narrowed portion closer to the base portion than the base portion.
In the piezoelectric valve according to the present invention, the actuator can adjust the discharge amount of the compressed gas discharged from the gas discharge port by adjusting the displacement amount of the valve body by the length from the narrowed portion to the distal end portion of the support portion.
In the piezoelectric valve according to the present invention, if at least one of the one end portion and the other end portion of the piezoelectric element is connected to the mounting surface of the base portion or the acting portion via a connecting portion made of a material having a linear expansion coefficient larger than that of the supporting portion, the influence of thermal contraction of the piezoelectric element due to temperature change can be reduced or eliminated.
In the piezoelectric valve according to the present invention, if the actuator further includes a compression member that is coupled to the base portion and the acting portion, respectively, and compresses the piezoelectric element in the first longitudinal direction, damage to the piezoelectric element that is easily damaged by a load in the tensile direction can be prevented.
In the piezoelectric valve according to the present invention, if the actuator includes the compression member that is coupled to the base and the acting portion, respectively, so as to be located on the substantially central axis of the piezoelectric element and compresses the piezoelectric element in the first longitudinal direction, the torsion force caused by the compression member can be prevented from acting on the piezoelectric element, and damage to the piezoelectric element can be effectively prevented.
In the piezoelectric valve according to the present invention, if the gap formed between the base portion and the acting portion and between the piezoelectric element and the support portion is filled with silicone resin, the fluctuation of the displacement waveform of the valve element can be reduced more effectively.
In the piezoelectric valve according to the present invention, if the gaps formed between the base and the acting portion and between the piezoelectric element and the supporting portion are set to be equally spaced, and the gaps are filled with the silicone resin, the silicone resin can easily fill the gaps.
Drawings
Fig. 1 is a perspective view of a piezoelectric valve.
Fig. 2 is an explanatory diagram of the piezoelectric valve.
Fig. 3 is a perspective view of the state in which the actuator is fixed to the valve seat plate.
Fig. 4 is an explanatory view of a state in which the actuator is fixed to the valve seat plate.
Fig. 5 is an explanatory view of a state in which the actuator is fixed to the valve seat plate.
Fig. 6 is an explanatory view of the actuator of the previous invention.
Fig. 7 is an explanatory diagram of a displacement waveform of the valve element in the actuator of the foregoing invention.
Fig. 8 is an explanatory view of an actuator according to embodiment 1 of the present invention.
Fig. 9 is an explanatory diagram of a displacement waveform of a valve element in the actuator of embodiment 1 of the present invention.
Fig. 10 is an explanatory view of an actuator according to embodiment 2 of the present invention.
Fig. 11 is an explanatory diagram of a displacement waveform of a valve element in the actuator according to embodiment 2 of the present invention.
Fig. 12 is an explanatory view of an actuator according to embodiment 3 of the present invention.
Fig. 13 is an explanatory diagram of a displacement waveform of a valve element in the actuator according to embodiment 3 of the present invention.
Detailed Description
Embodiments of the present invention will be described based on the drawings.
[ basic constitution of piezoelectric valve ]
First, the basic structure of the piezoelectric valve of the present invention will be described.
Fig. 1 shows a perspective view of a piezoelectric valve. Fig. 2 is an explanatory view of the piezoelectric valve, and shows a side view.
The piezoelectric valve 1 includes a valve body 2, an actuator 3 described later, and a valve seat plate 4 described later that is disposed inside the valve body 2 in a state where the actuator 3 is fixed.
The valve body 2 is a case having an opening on the back surface (bottom surface in fig. 1 and 2), and includes a gas pressure chamber therein for receiving supply of compressed gas from an external compressed gas supply source (not shown).
A connection portion 5 is provided on the front surface (top surface in fig. 1 and 2) of the valve body 2, and the connection portion 5 is used for attaching a manifold (not shown) having a space in which compressed gas is supplied from the compressed gas supply source.
A gas inlet 51 for sucking compressed gas into the valve body 2 and a plurality of gas outlets 52 for discharging the compressed gas are formed in the front surface of the connection portion 5.
A gas supply port (not shown) communicating with the gas suction port 51 of the connection part 5 and a plurality of gas discharge ports (not shown) communicating with the gas discharge ports 52 are formed in the front surface of the valve body 2.
The back surface of the valve body 2 is closed by a cover 6, and a wiring connector 61 for supplying power to the piezoelectric element 32 described later is disposed in the cover 6.
Fig. 3 is a perspective view showing a state in which the actuator is fixed to the valve seat plate. Here, the actuator of the present invention is shown in a fixed state as an example of the actuator. Fig. 4 is an explanatory view of a state in which the actuator is fixed to the valve seat plate, and shows a view from the side of the valve seat plate of fig. 3. Fig. 5 is an explanatory view of a state in which the actuator is fixed to the valve seat plate, and shows a view from the front side of the valve seat plate of fig. 3 and 4.
The piezoelectric valve 1 accommodates a valve seat plate 4 to which an actuator 3 is fixed in the valve body 2.
The valve seat plate 4 is an example of a valve seat plate to which two actuators 3 can be attached, and has a valve seat portion 41 in a central portion, and valve seats 42 against which the valve elements 35 of the actuators 3 are abutted are provided on opposite side surfaces of the valve seat portion 41.
The mounting portion 43 of the actuator 3 is formed on one surface side of the valve seat plate 4 at a position facing one side surface of the valve seat portion 41.
Further, a mounting portion 44 of the actuator 3 is formed on the other surface side of the valve seat plate 4 at a position facing the other side surface of the valve seat portion 41.
The two actuators 3 are disposed on the mounting portions 43, 44 of the valve seat plate 4 so that the valve elements 35 face the valve seats 42, and are fixed by screws.
The valve seat portion 41 is formed with a plurality of discharge passages 45 that open on a valve seat surface of each valve seat 42, and each discharge passage 45 opens on a front surface (top surface in fig. 4) of the valve seat plate 4.
The valve seat plate 4 is disposed inside the valve body 2 in a state where the two actuators 3 are fixed, and the front surface of the valve body 2 is fixed by screws from the front surface side thereof, so that the discharge passages 45 communicate with the gas discharge ports opened in the front surface of the valve body 2.
The piezoelectric valve 1 accommodates two valve seat plates 4 in a widthwise direction in a housing of the valve body 2, and four gas discharge ports are opened in a front surface of the valve body 2.
In the piezoelectric valve 1, four actuators 3 are disposed in the housing of the valve body 2, and four gas discharge ports are opened in the front surface of the valve body 2, but the present invention is not limited thereto, and one or more actuators 3 may be disposed in the valve body.
[ actuator of the foregoing invention ]
Fig. 6 is an explanatory view of an actuator provided in the piezoelectric valve according to the present invention.
The actuator 3 of the present invention includes a base 31 fixed to the valve seat plate 4, a piezoelectric element 32 having one end connected to the mounting surface of the base 31 and extending in the first longitudinal direction, and a support 33 integrally formed with the base 31 and extending in the second longitudinal direction intersecting the first longitudinal direction, and arranged side by side with the piezoelectric element 32.
The actuator 3 of the present invention includes an action portion 34 connected to the other end portion of the piezoelectric element 32 and the distal end portion of the support portion 33 and displaced in a direction different from the first longitudinal direction and the second longitudinal direction in response to the expansion and contraction of the piezoelectric element 32, and a valve body 35 provided on the distal end side of the action portion 34 and on one side surface in the direction of the displacement and driven by the displacement of the action portion 34.
The actuator 3 displaces the acting portion 34 in a direction different from the first longitudinal direction and the second longitudinal direction in a plane substantially parallel to a plane including the first longitudinal direction and the second longitudinal direction in response to expansion and contraction of the piezoelectric element 32.
In this case, by providing the narrowed portion 331 at the intermediate portion of the support portion 33 extending in the second longitudinal direction, the displacement of the acting portion 34 associated with the expansion and contraction of the piezoelectric element 32 can be enlarged.
A connecting member 311 made of, for example, an aluminum block can be attached to the attachment surface of the base 31.
The actuator 3 can connect the base 31 and the acting portion 34 by a compression member 36.
Fig. 7 is an explanatory diagram of a displacement waveform of a valve element of the actuator according to the present invention.
The displacement waveform of the valve body 35 shown in fig. 7 is a displacement waveform obtained by measuring the displacement amount of the valve body 35 when the piezoelectric element 32 is elongated by applying a driving voltage to the piezoelectric element 32 in the actuator 3 of the present invention shown in fig. 6 by a laser measuring device, and the valve body 35 is driven to open.
The experiment was performed by applying a driving voltage to the piezoelectric element 32 according to the method described in [ example ] of japanese patent application laid-open No. 2017-160973. The experimental conditions are as follows. The time conditions of the input signals are set to optimal values in a state where fluctuations generated in the displacement waveform of the valve element are small.
(1) Driving voltage: 72V
(2) Input signal: first pre-pulse time t1=0.097 ms
First stop time t2=0.077 ms
Second pre-pulse time t3=0.6 ms
Second stop time t4=0.01 ms
Main pulse time t5=0.216 ms
(energization time of piezoelectric element: 1 ms)
As shown in fig. 7, in the actuator 3 according to the present invention, it was confirmed that a plurality of large fluctuations, which are thought to be caused by resonance, were generated in the displacement waveform of the valve element.
Accordingly, the piezoelectric valve of the present invention may not be capable of discharging the compressed gas from the gas discharge port in a stable state.
[ actuator of the invention ]
The piezoelectric valve according to the present invention is a valve in which an actuator is improved in the piezoelectric valve according to the present invention.
Embodiment 1 >
Fig. 8 is an explanatory view of an actuator according to embodiment 1 of the present invention.
The actuator 3 according to embodiment 1 includes a base 31 fixed to the valve seat plate 4, a piezoelectric element 32 having one end connected to the mounting surface of the base 31 and extending in the first longitudinal direction, and a support portion 33 integrally provided on the base 31 and extending in the second longitudinal direction intersecting the first longitudinal direction, the support portion being arranged side by side with the piezoelectric element 32.
The actuator 3 according to embodiment 1 includes an action portion 34 connected to the other end portion of the piezoelectric element 32 and the distal end portion of the support portion 33 and displaced in a direction different from the first longitudinal direction and the second longitudinal direction in response to expansion and contraction of the piezoelectric element 32, and a valve body 35 provided on the distal end side of the action portion 34 and on one side surface in the direction of the displacement and driven by the displacement of the action portion 34.
In the actuator 3 according to embodiment 1, the base 31 includes a side to which one end of the piezoelectric element 32 is connected and a side to which the support portion 33 is integrally provided, and is fixed to the valve seat plate 4 by screws on the side to which the piezoelectric element 32 is connected and the side to which the support portion 33 is provided.
In the actuator 3 according to embodiment 1, the support portion 33 has a narrowed portion 331 at a middle portion extending in the second longitudinal direction, and is fixed to the valve seat plate 4 by screws using a mounting hole 38 provided on the side of the narrowed portion 331 closer to the base portion 31 than the narrowed portion 331 and between the narrowed portion 331 and the base portion 31.
The base 31 may be fixed to the valve seat plate 4 at least on the side to which one end of the piezoelectric element 32 is connected.
Here, the base 31 and the support 33 may be integrally formed by punching a metal material such as stainless steel including a constant steel material.
If the base portion 31 and the support portion 33 are integrally formed by pressing the metal material, the number of parts is reduced, and the actuator 3 can be easily assembled.
The base 31 and the support 33 may be formed of different members, and the support 33 of different members may be attached to the base 31 so that the support 33 is integrally provided with the base 31.
In the actuator 3 according to embodiment 1, the acting portion 34 may be formed of a lightweight material such as aluminum. When the working portion 34 is formed of a lightweight material such as aluminum, it is preferable to displace the working portion 34.
The valve body 35 is made of rubber or the like, and is preferably made of lubricating rubber.
The actuator 3 can connect the base 31 and the acting portion 34 by a compression member 36.
Since the piezoelectric element 32 is easily damaged by the load in the stretching direction, the base 31 and the acting portion 34 are connected by the compression member 36. Accordingly, the piezoelectric element 32 can be compressed in the first longitudinal direction, and damage to the piezoelectric element 32 can be prevented.
Fig. 9 is an explanatory diagram showing a displacement waveform of a valve element in the actuator according to embodiment 1 of the present invention.
The displacement waveform of the valve element 35 shown in fig. 9 is a waveform obtained by measuring the displacement amount of the valve element 35 when the driving voltage is applied to the piezoelectric element 32 to extend the piezoelectric element 32 and the valve element 35 is driven by the laser measuring device in the actuator 3 of embodiment 1 shown in fig. 8.
The experiment was performed by applying a driving voltage to the piezoelectric element 32 according to the method described in [ example ] of japanese patent application laid-open No. 2017-160973. The experimental conditions are as follows. The time conditions of the input signals are set to optimal values in a state where fluctuations generated in the displacement waveform of the valve element are small.
(1) Driving voltage: 72V
(2) Input signal: first pre-pulse time t1=0.06 ms
First stop time t2=0.012 ms
Second pre-pulse time t3=0.89 ms
Second stop time t4=0.035 ms
Main pulse time t5=0.003 ms
(energization time of piezoelectric element: 1 ms)
As shown in fig. 9, in the actuator 3 of embodiment 1, it was confirmed that little fluctuation occurred in the displacement waveform of the valve element 35.
Therefore, the piezoelectric valve of the present invention is provided with the actuator 3 of embodiment 1, whereby the compressed gas can be discharged from the gas discharge port in a stable state as compared with the piezoelectric valve of the present invention.
Embodiment 2 >
Fig. 10 is an explanatory view of an actuator according to embodiment 2 of the present invention.
In the actuator 3 according to embodiment 2, in the actuator 3 according to embodiment 1, the other end portion of the piezoelectric element 32 is connected to the acting portion 34 via a connecting portion 37, and the connecting portion 37 is made of a material having a linear expansion coefficient larger than that of the supporting portion 33.
The actuator 3 according to embodiment 2 is configured such that the other end portion of the piezoelectric element 32 is connected to the acting portion 34 via the connecting portion 37 made of a material having a linear expansion coefficient larger than that of the supporting portion 33, and thus, the influence of thermal contraction of the piezoelectric element 32 due to temperature change can be reduced or eliminated.
In the actuator 3 according to embodiment 2, the connecting portion 37 is integrally provided with the acting portion 34, and can be integrally formed by press working a metal material such as an aluminum material.
When the operation portion 34 and the connection portion 37 are integrally formed by punching a lightweight metal material such as aluminum, the number of parts is reduced, and the actuator 3 can be easily assembled.
The connecting portion 37 may be formed of another member such as an aluminum block, and the connecting portion 37 may be integrally provided with the acting portion 34 by attaching the connecting portion 37 as another member to the acting portion 34.
The connecting portion 37 may be formed of another member such as an aluminum block, for example, so that one end of the piezoelectric element 32 is connected to the mounting surface of the base 31 via the connecting portion 37.
Fig. 11 is an explanatory diagram showing a displacement waveform of a valve element of an actuator according to embodiment 2 of the present invention.
The displacement waveform of the valve element 35 shown in fig. 11 is a waveform obtained by measuring the displacement amount of the valve element 35 when the piezoelectric element 32 is extended by applying a driving voltage to the piezoelectric element 32 and the valve element 35 is driven by opening the valve in the actuator 3 of embodiment 2 shown in fig. 10 by a laser detector.
The experiment was performed by applying a driving voltage to the piezoelectric element 32 according to the method described in [ example ] of japanese patent application laid-open No. 2017-160973. The experimental conditions are as follows. Each time condition of the input signal is set to an optimum value that is in a state where fluctuation generated by the displacement waveform of the valve element is small.
(1) Driving voltage: 72V
(2) Input signal: first pre-pulse time t1=0.058 ms
First stop time t2=0.008 ms
Second pre-pulse time t3=0.877 ms
Second stop time t4=0.046 ms
Main pulse time t5=0.011 ms
(energization time of piezoelectric element: 1 ms)
As shown in fig. 11, in the actuator 3 of embodiment 2, it can be confirmed that little fluctuation occurs in the displacement waveform of the valve body 35, or even if fluctuation occurs, the fluctuation is reduced as compared with the actuator 3 of the previous invention shown in fig. 7.
Accordingly, the piezoelectric valve of the present invention is provided with the actuator 3 of embodiment 2, whereby the compressed gas can be discharged from the gas discharge port in a stable state as compared with the piezoelectric valve of the present invention.
Embodiment 3 >
Fig. 12 is an explanatory view of an actuator according to embodiment 3 of the present invention.
The actuator 3 according to embodiment 3 is the actuator 3 according to embodiment 2, wherein the compression member 36 coupled to the base 31 and the acting portion 34 and compressing the piezoelectric element 32 in the first longitudinal direction is provided so as to be located on the substantially central axis of the piezoelectric element 32 along the first longitudinal direction.
The actuator 3 according to embodiment 3 includes the compression member 36 that is coupled to the base 31 and the acting portion 34, respectively, and compresses the piezoelectric element 32 in the first longitudinal direction so as to be located on the substantially central axis of the piezoelectric element 32, and therefore, the piezoelectric element 32 is not subjected to torsion of the compression member 36, and damage to the piezoelectric element 32 can be effectively prevented.
Fig. 13 is an explanatory diagram showing a displacement waveform of a valve element of an actuator according to embodiment 3 of the present invention.
The displacement waveform of the valve element 35 shown in fig. 13 is also a waveform obtained by measuring the displacement amount of the valve element 35 when the piezoelectric element 32 is elongated by applying a driving voltage to the piezoelectric element 32 in the actuator 3 of embodiment 3 shown in fig. 12 by the laser detector, and the valve element 35 is driven to open.
The experiment was performed by applying a driving voltage to the piezoelectric element 32 according to the method described in [ example ] of japanese patent application laid-open No. 2017-160973. The experimental conditions are as follows. The time conditions of the input signal are set to be optimal values in a state where the fluctuation of the displacement waveform of the valve element is small.
(1) Driving voltage: 72V
(2) Input signal: first pre-pulse time t1=0.054 ms
First stop time t2=0.015 ms
Second pre-pulse time t3=0.875 ms
Second stop time t4=0.046 ms
Main pulse time t5=0.01 ms
(energization time of piezoelectric element: 1 ms)
As shown in fig. 13, the actuator 3 of embodiment 3 can also confirm that the displacement waveform of the valve body 35 hardly fluctuates, or that even if fluctuation occurs, the fluctuation is reduced as compared with the actuator 3 of the previous invention shown in fig. 7.
Accordingly, the piezoelectric valve of the present invention is provided with the actuator 3 of embodiment 3, and thus, compared with the piezoelectric valve of the present invention, compressed gas can be discharged from the gas discharge port in a stable state.
< other embodiments >
The actuator 3 according to the embodiment of the present invention can adjust the displacement amount of the valve body 35 by adjusting the length from the narrowed portion 331 of the supporting portion 33 to the distal end portion of the supporting portion 33 connected to the acting portion 34, thereby adjusting the discharge amount of the compressed gas discharged from the gas discharge port.
That is, in the piezoelectric valve of the present invention, the displacement amount of the valve body 35 can be increased by using the actuator 3 having the support portion 33 having a long length from the narrowed portion 331 to the distal end portion, and the discharge amount of the compressed gas discharged from the gas discharge port can be increased.
In addition, the piezoelectric valve according to the present invention can reduce the displacement of the valve element 35 and reduce the discharge amount of the compressed gas discharged from the gas discharge port by using the actuator 3 having the support portion 33 having a short length from the narrowed portion 331 to the distal end portion.
In the actuator 3 according to the embodiment of the present invention, a plurality of mounting holes 38 may be provided in the support portion 33 on the side of the narrowed portion 331 with respect to the base portion 31 in the second longitudinal direction, and the support portion 33 may be fastened to the valve seat plate 4 by screws through at least one of the mounting holes 38.
In the actuator 3 according to the embodiment of the present invention, if a plurality of mounting holes 38 are provided in the support portion 33 on the side of the narrowed portion 331 with respect to the base portion 31 in the second longitudinal direction, and the support portion 33 is screwed to the valve seat plate 4 by at least one of the mounting holes 38, the displacement amount of the valve body 35 can be adjusted by fixing the support portion 33 to the mounting hole 38 of the valve seat plate 4, and the discharge amount of the compressed gas discharged from the gas discharge port can be adjusted.
In the actuator 3 according to the embodiment of the present invention, the gap between the base 31 and the acting portion 34 and between the piezoelectric element 32 and the supporting portion 33 may be filled with a silicone resin, and the gap may be filled with the silicone resin.
In the actuator 3 according to the embodiment of the present invention, when at least one of the one end portion and the other end portion of the piezoelectric element 32 is connected to the mounting surface of the base portion 31 or the acting portion 34 via the connecting portion 37 made of a material having a linear expansion coefficient larger than that of the supporting portion 33, the gap between the piezoelectric element 32 and the connecting portion 37 and the supporting portion 33 can be filled with silicone resin, and the gap can be filled with the silicone resin.
In the actuator 3 according to the embodiment of the present invention, if the gap between the side of the piezoelectric element 32 extending in the first longitudinal direction and the side of the support portion 33 extending in the second longitudinal direction, which is formed between the base portion 31 and the acting portion 34, is filled with silicone rubber, the vibration of the displacement waveform of the valve element 35 can be reduced more effectively by the damping effect of the silicone rubber.
In the actuator 3 according to the embodiment of the present invention, the gap formed between the base 31 and the acting portion 34 and between the piezoelectric element 32 and the supporting portion 33 can be set to be equal.
In the actuator 3 according to the embodiment of the present invention, if the gap between the side of the piezoelectric element 32 extending in the first longitudinal direction and the side of the support 33 extending in the second longitudinal direction, which is formed between the base 31 and the acting portion 34, is set to be equal, and the gap is filled with silicone resin, the filling of the gap with silicone resin can be easily performed.
The embodiments of the present invention have been described above, but the present invention is not limited to the above embodiments, and the configuration thereof may be appropriately changed without departing from the scope of the invention.
Availability in production
The piezoelectric valve of the present invention is extremely useful because it can reduce the fluctuation of the displacement waveform of the valve element and discharge compressed gas from the gas discharge port in a stable state.
Symbol description
1-piezoelectric valve, 2-valve body, 3-actuator, 31-base, 311-connecting member, 32-piezoelectric element, 33-supporting portion, 331-narrowing portion, 34-acting portion, 35-valve core, 36-compressing member, 37-connecting portion, 38-mounting hole, 4-valve seat plate, 41-valve seat portion, 42-valve seat, 43-mounting portion, 44-mounting portion, 45-discharge passage, 5-connecting portion, 51-gas suction port, 52-gas discharge port, 6-cover, 61-wiring connector.
Claims (10)
1. A piezoelectric valve, comprising:
an actuator that drives the valve element;
a valve seat plate having a valve seat and a discharge path which are in contact with and separated from the valve body, and fixing the actuator; and
a main body housing for housing the valve seat plate,
the above-mentioned piezoelectric valve is characterized in that,
the actuator is provided with:
a base portion fixed to the valve seat plate;
a piezoelectric element having one end connected to the mounting surface of the base and extending in the first longitudinal direction;
a support part integrally provided on the base part, and extending in a second longitudinal direction intersecting the first longitudinal direction, the support part being arranged in parallel with the piezoelectric element;
an operating portion that connects the other end portion of the piezoelectric element and the distal end portion of the support portion, and that is displaced in a direction different from the first longitudinal direction and the second longitudinal direction in response to expansion and contraction of the piezoelectric element; and
the valve element is provided on the side of the action portion in the direction of the displacement and is driven by the displacement of the action portion,
the support portion has a narrowed portion at an intermediate portion extending in the second longitudinal direction, and is fixed to the valve seat plate on a side of the narrowed portion closer to the base portion than the narrowed portion,
the main body case includes:
a gas supply port to which compressed gas is supplied; and
and a gas discharge port for discharging the compressed gas supplied from the gas supply port through the discharge passage of the valve seat plate by separating the valve body from the valve seat.
2. A piezoelectric valve, comprising:
a plurality of actuators that drive the plurality of valve bodies in parallel planes independently;
a valve seat plate having a plurality of valve seats and a discharge path which are independently contacted with and separated from the plurality of valve cores, and fixing the plurality of actuators; and
a main body housing for housing the valve seat plate,
the above-mentioned piezoelectric valve is characterized in that,
each of the plurality of actuators includes:
a base portion fixed to the valve seat plate;
a piezoelectric element having one end connected to the mounting surface of the base and extending in the first longitudinal direction;
a support part integrally provided on the base part, and extending in a second longitudinal direction intersecting the first longitudinal direction, the support part being arranged in parallel with the piezoelectric element;
an operating portion that connects the other end portion of the piezoelectric element and the distal end portion of the support portion, and that is displaced in a direction different from the first longitudinal direction and the second longitudinal direction in response to expansion and contraction of the piezoelectric element; and
the valve element is provided on the side of the action portion in the direction of the displacement and is driven by the displacement of the action portion,
the support portion has a narrowed portion at an intermediate portion extending in the second longitudinal direction, and is fixed to the valve seat plate on a side of the narrowed portion closer to the base portion than the narrowed portion,
the main body case includes:
a gas supply port to which compressed gas is supplied; and
and a gas discharge port for independently discharging the compressed gas supplied from the gas supply port through the discharge passages of the valve seat plate by separating the valve elements from the valve seats.
3. A piezoelectric valve according to claim 1 or 2, wherein,
the base is fixed to the valve seat plate at least on a side to which one end of the piezoelectric element is connected.
4. A piezoelectric valve according to claim 1 or 2, wherein,
the displacement of the valve element is adjusted by the length of the support portion from the narrowed portion to the distal end portion.
5. A piezoelectric valve according to claim 1 or 2, wherein,
at least one of the one end portion and the other end portion of the piezoelectric element is connected to the mounting surface of the base portion or the acting portion via a connecting portion, and the connecting portion is made of a material having a linear expansion coefficient larger than that of the supporting portion.
6. The piezoelectric valve of claim 5, wherein the piezoelectric valve is,
the connecting part is integrally provided with the acting part,
the other end portion of the piezoelectric element is connected to the acting portion via the connecting portion made of a material having a linear expansion coefficient larger than that of the supporting portion.
7. A piezoelectric valve according to claim 1 or 2, wherein,
the actuator further includes a compression member that is coupled to the base and the acting portion, respectively, and compresses the piezoelectric element in the first longitudinal direction.
8. The piezoelectric valve of claim 7, wherein,
the actuator includes the compression member coupled to the base and the acting portion, respectively, on a substantially central axis of the piezoelectric element, and compressing the piezoelectric element in the first longitudinal direction.
9. A piezoelectric valve according to claim 1 or 2, wherein,
a gap formed between the base and the acting portion and between the piezoelectric element and the supporting portion is filled with a silicone resin.
10. A piezoelectric valve according to claim 1 or 2, wherein,
gaps formed between the base and the acting portion and between the piezoelectric element and the supporting portion are equally spaced, and the gaps are filled with silicone resin.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021-072204 | 2021-04-21 | ||
| JP2021072204A JP2022166778A (en) | 2021-04-21 | 2021-04-21 | Piezoelectric type valve |
| PCT/JP2022/015648 WO2022224757A1 (en) | 2021-04-21 | 2022-03-29 | Piezoelectric valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117203457A true CN117203457A (en) | 2023-12-08 |
Family
ID=83722191
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202280028728.8A Pending CN117203457A (en) | 2021-04-21 | 2022-03-29 | Piezoelectric valve |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2022166778A (en) |
| CN (1) | CN117203457A (en) |
| TW (1) | TW202242293A (en) |
| WO (1) | WO2022224757A1 (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110870194B (en) * | 2017-07-07 | 2023-09-22 | 有限会社机械变压器 | Displacement amplification mechanism, grinding device, actuator, distributor and air valve |
| JP7254285B2 (en) * | 2019-04-23 | 2023-04-10 | 株式会社サタケ | Piezoelectric valve and manufacturing method of the piezoelectric valve |
-
2021
- 2021-04-21 JP JP2021072204A patent/JP2022166778A/en active Pending
-
2022
- 2022-03-29 CN CN202280028728.8A patent/CN117203457A/en active Pending
- 2022-03-29 WO PCT/JP2022/015648 patent/WO2022224757A1/en active Application Filing
- 2022-04-14 TW TW111114164A patent/TW202242293A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| TW202242293A (en) | 2022-11-01 |
| WO2022224757A1 (en) | 2022-10-27 |
| JP2022166778A (en) | 2022-11-02 |
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