WO2023005672A1 - Growth substrate assembly and manufacturing method therefor, and manufacturing method for light-emitting assembly - Google Patents

Growth substrate assembly and manufacturing method therefor, and manufacturing method for light-emitting assembly Download PDF

Info

Publication number
WO2023005672A1
WO2023005672A1 PCT/CN2022/105584 CN2022105584W WO2023005672A1 WO 2023005672 A1 WO2023005672 A1 WO 2023005672A1 CN 2022105584 W CN2022105584 W CN 2022105584W WO 2023005672 A1 WO2023005672 A1 WO 2023005672A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
growth substrate
hot
melt adhesive
adhesive layer
Prior art date
Application number
PCT/CN2022/105584
Other languages
French (fr)
Chinese (zh)
Inventor
翟峰
Original Assignee
重庆康佳光电技术研究院有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 重庆康佳光电技术研究院有限公司 filed Critical 重庆康佳光电技术研究院有限公司
Publication of WO2023005672A1 publication Critical patent/WO2023005672A1/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/15Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/62Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls

Definitions

  • the present application relates to the field of light-emitting chips, in particular to a growth substrate assembly, a manufacturing method thereof, and a manufacturing method of a light-emitting assembly.
  • Micro-LED As a new generation of display technology, Micro-LED has higher photoelectric efficiency, higher brightness, higher contrast, and lower power consumption than existing liquid crystal displays, and can also be combined with flexible panels to achieve flexible show.
  • the Micro-LED display panel includes several pixel regions SPR (Subpixel Rendering, sub-pixel rendering), each pixel area SPR includes red Micro-LED chips, blue Micro-LED chips, and green Micro-LED chips.
  • SPR Subpixel Rendering, sub-pixel rendering
  • each pixel area SPR includes red Micro-LED chips, blue Micro-LED chips, and green Micro-LED chips.
  • WAFER growth substrates
  • the above chip transfer process it is necessary to select two kinds of adhesive materials to make the first adhesive layer and the second adhesive layer respectively, and it is necessary to ensure that the viscosity of the first adhesive layer is lower than that of the second adhesive layer, so it is difficult to find a suitable adhesive. materials, and the above transfer process needs to transfer the Micro-LED chip from the growth substrate to the temporary substrate, and from the temporary substrate to the transfer substrate. The transfer efficiency is low and the temporary substrate and the transfer substrate need to be prepared, and the transfer cost is also high.
  • the purpose of this application is to provide a growth substrate assembly and its manufacturing method, and a manufacturing method of a light-emitting assembly, aiming to solve the problem of how to improve the transfer efficiency of LED chips and reduce the transfer cost in related technologies .
  • the application provides a growth substrate assembly, including:
  • a plurality of light-emitting chips arranged on the growth substrate, positive electrodes and negative electrodes are grown on the bottom surfaces of the plurality of light-emitting chips, and the bottom surface is the side of the light-emitting chips away from the growth substrate;
  • a hot-melt adhesive layer provided on the growth substrate to partially cover the bottom surface of the light-emitting chip, the positive electrode, the negative electrode, and the connection between the positive electrode and the negative electrode on the bottom surface of the light-emitting chip The area between is exposed to the hot-melt adhesive layer.
  • the present application also provides a method for manufacturing the growth substrate assembly as described above, including:
  • a sacrificial layer unit is respectively arranged on the bottom surface of each of the light-emitting chips, and each of the sacrificial layer units separates the positive electrode, the negative electrode, and the area between the positive electrode and the negative electrode on the bottom surface of each of the light-emitting chips. cover;
  • a hot-melt adhesive layer is formed on the growth substrate, the hot-melt adhesive layer partially covers the bottom surfaces of the plurality of light-emitting chips, and the sacrificial layer unit is exposed to the hot-melt adhesive layer;
  • each of the sacrificial layer units is removed, so that the positive electrode, the negative electrode, and the area between the positive electrode and the negative electrode of each light-emitting chip are exposed to the The hot melt adhesive layer.
  • the present application also provides a method for manufacturing a light-emitting component, including:
  • the side of the growth substrate on which the light-emitting chip is grown is placed on the circuit board, facing the side of the circuit board where the chip bonding area is provided;
  • the light-emitting chip on the growth substrate is peeled off from the growth substrate, and the peeled light-emitting chip falls onto the corresponding chip bonding area along the channels formed by the glue columns on both sides thereof ;
  • the hot-melt adhesive layer is removed together with the growth substrate, and the pads in each chip bonding area are connected to the positive electrode and the negative electrode of the corresponding light-emitting chip.
  • the present application also provides a light-emitting component, which is manufactured by the method for manufacturing the light-emitting component as described above.
  • the above-mentioned growth substrate assembly is provided with a plurality of light-emitting chips on the growth substrate, and the bottom surface of each light-emitting chip is far away from the growth substrate and has a positive electrode and a negative electrode; layer, and the positive and negative electrodes of the light-emitting chip and the area between them are exposed to the hot melt adhesive layer; when the light-emitting chip on the growth substrate is transferred to the circuit board, the side of the growth substrate with the light-emitting chip After being arranged facing the side of the circuit board with the chip bonding area, the hot melt adhesive layer is heated to at least liquefy (that is, melt) the area covering the bottom surface of the light-emitting chip, and then flows to the circuit board under the action of gravity, and Glue pillars are formed on both sides of each light-emitting chip, so that after the light-emitting chips on the growth substrate are peeled off from the growth substrate, the channels formed by the glue pillars on both sides of the growth substrate fall onto the
  • the growth substrate assembly obtained by the method for manufacturing the growth substrate assembly described above does not need to transfer the light-emitting chip from the growth substrate to the temporary substrate, and then from the temporary substrate to the circuit board during the process of transferring the light-emitting chip on the growth substrate assembly to the circuit board. Transfer to the transfer substrate, and it is no longer necessary to prepare a temporary substrate and a transfer substrate, the chip transfer efficiency is higher, and the transfer cost is lower.
  • the light-emitting chip of the above-mentioned light-emitting assembly is directly transferred from the above-mentioned growth substrate assembly to the circuit board.
  • the entire transfer process does not need to transfer the light-emitting chip from the growth substrate to the temporary substrate, and then from the temporary substrate to the transfer substrate, and no longer needs to prepare the temporary substrate. 1. Transfer the substrate, the chip transfer efficiency is higher, and the transfer cost is lower, so that the manufacturing efficiency of the light-emitting component is higher, and the manufacturing cost is lower.
  • Figure 1-1 is a schematic diagram of Micro-LED chips of three colors transferred from the growth substrate to the display backplane in the related art
  • Figure 1-2 is a schematic diagram of the process of transferring red light Micro-LED chips in related technologies
  • Figure 1-3 is a schematic diagram of the lamination area of the temporary substrate and the growth substrate in the related art
  • 1-4 are schematic diagrams of temporary substrates carrying red Micro-LED chips in the related art
  • Figure 1-5 is a schematic diagram of a temporary substrate after some red Micro-LED chips are picked up in the related art
  • Figure 1-6 is a schematic diagram of the display backplane after the Micro-LED chip transfer and bonding are completed
  • FIG. 2 is a schematic structural diagram of the growth substrate provided in the embodiment of the present application.
  • Fig. 3 is a schematic diagram 1 of the structure of the growth substrate assembly provided by the embodiment of the present application.
  • Fig. 4 is a schematic diagram II of the structure of the growth substrate assembly provided by the embodiment of the present application.
  • Fig. 5 is a structural schematic diagram III of the growth substrate assembly provided in the embodiment of the present application.
  • Fig. 6 is a schematic diagram 4 of the structure of the growth substrate assembly provided by the embodiment of the present application.
  • FIG. 7 is a schematic flowchart of a method for manufacturing a growth substrate assembly provided in another optional embodiment of the present application.
  • Fig. 8 is a schematic diagram of the manufacturing process of the growth substrate assembly provided by another alternative embodiment of the present application.
  • Fig. 9 is a schematic diagram of a manufacturing process of a light-emitting component provided in another optional embodiment of the present application.
  • Fig. 10 is a schematic diagram of the manufacturing process of the light-emitting component provided by another optional embodiment of the present application.
  • Fig. 11 is a schematic diagram of bonding a growth substrate and a circuit board provided in another optional embodiment of the present application.
  • Fig. 12 is a schematic diagram of the transfer process of the first light-emitting chip provided in another optional embodiment of the present application.
  • Fig. 13 is a schematic diagram of the transfer process of the second light-emitting chip provided in another optional embodiment of the present application.
  • Fig. 14 is a schematic diagram of a third light-emitting chip transfer process provided in another optional embodiment of the present application.
  • 10-Growth substrate 10a-Red chip growth substrate, 10b-Green chip growth substrate, 10c-Blue chip growth substrate, 100-Pixel area SPR, 101-Red Micro-LED chip, 102-Chip vacancies, 20- Temporary substrate, 201-first adhesive layer, 30-transfer substrate, 301-second adhesive layer, 302-display backplane, 4-growth substrate, 41-first growth substrate, 42-second growth substrate, 43 -the third growth substrate, 5-light-emitting chip, 50-electrode, 51-the first light-emitting chip, 52-the second light-emitting chip, 53-the third light-emitting chip, 6-hot-melt adhesive layer, 61-hot-melt glue unit, 62-glue column, 7-sacrificial layer unit, 8-circuit board, 81-welding pad.
  • each SPR 100 includes red Micro-LED chips, blue Micro-LED chips, and green Micro-LED chips.
  • red Micro-LED chips, blue Micro-LED chips, and green Micro-LED chips are transferred to the display backplane 302 .
  • the process of transferring the Micro-LED chip from the growth substrate to the display backplane 302 is introduced, as shown in Figure 1-2 to Figure 1-5:
  • S201 Attach the side of the temporary substrate 20 provided with the first adhesive layer 201 to the side of the growth substrate 10 on which the red Micro-LED chip 101 is grown; one of the top views after bonding is shown in Figure 1-3 ;
  • S202 to S203 Peel off the growth substrate 10, and transfer the red Micro-LED chip 101 to the temporary substrate 20; at this time, a top view of the temporary substrate 20 is shown in Fig. 1-4;
  • S204 Attach the side of the transfer substrate 30 provided with the second adhesive layer 301 to the side of the temporary substrate 20 carrying the red Micro-LED chips 101, so as to selectively pick up the corresponding red Micro-LED chips from the temporary substrate 101.
  • -LED chip 101 as shown in Figures 1-5, the red light Micro-LED chip at the corresponding position on the temporary substrate 20 is picked up, leaving a corresponding chip vacancy 102;
  • S205 Transfer the red Micro-LED chips picked up by the transfer substrate 20 to corresponding chip bonding areas on the display backplane 302 .
  • the blue Micro-LED chip and the green Micro-LED chip are also transferred to the display backplane by the above-mentioned chip transfer process in sequence, and the display backplane that completes the transfer of all Micro-LED chips is shown in Figure 1-6.
  • the above chip transfer process two kinds of adhesive materials need to be selected to make the first adhesive layer 201 and the second adhesive layer 301 respectively, and it is necessary to ensure that the viscosity of the first adhesive layer 201 is lower than that of the second adhesive layer 301 , it is difficult to find a suitable material, and the above transfer process needs to transfer the Micro-LED chip from the growth substrate 10 to the temporary substrate 20, from the temporary substrate 20 to the transfer substrate 30, the transfer efficiency is low and the temporary substrate 10 and the transfer substrate 20 need to be prepared , the transfer cost is also higher.
  • This embodiment provides a growth substrate assembly, including a growth substrate and several light-emitting chips located on the growth substrate.
  • the growth substrate carries the light-emitting chips in the growth substrate assembly, and in this embodiment, these light-emitting chips can be directly grown on the growth substrate.
  • the shape and material of the growth substrate are not limited. For example, it can be but not limited to a rectangular substrate, a circular substrate, and its material can be but not limited to a silicon substrate, a gallium nitride substrate, a gallium arsenide substrate, a sapphire substrate. Substrate etc.
  • Electrodes are grown on the bottom surfaces of several light-emitting chips, and the grown electrodes include positive electrodes and negative electrodes; the bottom surface of the light-emitting chips is the side away from the growth substrate of the light-emitting chips. It should be understood that the light-emitting chip in this embodiment can be replaced with other electronic chips according to application requirements, such as a resistor chip, a capacitor chip, a driver chip, a control chip, etc., which will not be repeated here.
  • the light-emitting chip in this embodiment can be a miniature light-emitting chip, for example, it can include but not limited to at least one of Mini LED chip and Micro-LED chip, or it can be an ordinary light-emitting chip with a size greater than or equal to 200 microns .
  • the growth substrate assembly in this embodiment also includes a hot-melt adhesive layer arranged on the growth substrate to partially cover the bottom surface of the light-emitting chip, the positive electrode, the negative electrode, and the area between the positive electrode and the negative electrode on the bottom surface of the light-emitting chip Exposed to the hot-melt adhesive layer; that is, the hot-melt adhesive layer in this embodiment only covers a part of the bottom surface of the light-emitting chip, so that the positive electrode, the negative electrode, and the area between the positive electrode and the negative electrode of the light-emitting chip are exposed .
  • the positive electrode, the negative electrode, and the area between the positive electrode and the negative electrode of the light-emitting chip can all be exposed to the hot-melt adhesive layer, or only a part of it can be exposed outside the hot-melt adhesive layer, but it is necessary to ensure that the electrode The bottom surface (that is, the side of the electrode away from the growth substrate) is exposed outside the hot-melt adhesive layer.
  • the hot-melt adhesive layer in this embodiment can change from a solidified state to a liquefied (ie melted) state when heated to a certain extent, and flow down along both sides of the light-emitting chip under the action of gravity, so that the heat on both sides of the light-emitting chip A gel column is formed.
  • the exposure of the positive electrode and the negative electrode of the light-emitting chip to the hot melt adhesive layer in this embodiment does not necessarily mean that the hot melt adhesive layer does not cover any area of the electrode of the light-emitting chip at all, but that the positive electrode of the light-emitting chip And the negative electrode is not completely covered by the hot melt adhesive layer.
  • the hot-melt adhesive layer may be, but not limited to, a non-conductive adhesive layer.
  • the hot-melt adhesive layer may also be a conductive adhesive layer.
  • the thermal The melt layer is heated to at least liquefy the area covering the bottom surface of the light-emitting chip, and the liquefied hot-melt glue layer flows to the circuit board under the action of gravity, and forms glue columns on both sides of the light-emitting chip, and the light-emitting chip on the growth substrate is After being peeled off from the growth substrate, the channels formed by the glue columns on both sides fall to the corresponding chip bonding areas respectively, so as to realize the direct transfer of the light-emitting chip to the circuit board.
  • the whole process does not need to remove the light-emitting chip from the
  • the growth substrate is transferred to the temporary substrate, and then transferred from the temporary substrate to the transfer substrate. It is no longer necessary to prepare the temporary substrate and the transfer substrate, and the transfer efficiency is higher and the transfer cost is lower.
  • the light-emitting chip falls from the growth substrate to the corresponding chip bonding area on the circuit board, it falls along the channel formed by the glue columns on both sides, so as to ensure that the light-emitting chip falls accurately to its corresponding chip bond.
  • the glue columns on both sides it can also avoid the flipping or tilting of the light-emitting chip during the falling process, which can further improve the quality and reliability of chip transfer bonding.
  • the circuit board in this embodiment may be a display backplane, or various circuit boards for lighting, and may be a flexible circuit board or a rigid circuit board.
  • the display backplane may be, but not limited to, a glass backplane or a PCB board.
  • a plurality of chip bonding areas are provided on the circuit board, and bonding pads corresponding to the positive electrodes and the negative electrodes of the light-emitting chip are provided in the chip bonding areas.
  • the number of bonding areas of each chip and the distribution on the circuit board can be flexibly set according to application requirements.
  • the bonding areas of each chip can be distributed in an array on the circuit board, or can be flexibly distributed or even It can be flexibly distributed according to requirements; in some application examples, in order to facilitate the transfer of light-emitting chips directly from the growth substrate to the circuit board, the distribution of each chip bonding area on the circuit board can be consistent with the layout and layout of the corresponding light-emitting chips on the growth substrate. The location corresponds to the distribution.
  • the hot-melt adhesive layer can be an integrally formed whole layer of adhesive layer, and can also include several hot-melt adhesive units, one hot-melt adhesive unit corresponds to one light-emitting chip, and each hot-melt adhesive unit is separated from each other.
  • the glue-melting unit partially covers the bottom surface of its corresponding light-emitting chip, and the electrodes of the light-emitting chip are exposed to the hot-melt glue layer.
  • one light-emitting chip can be set in one chip bonding area, and multiple light-emitting chips can also be set according to requirements.
  • the transfer is done during the chip transfer process.
  • the hot melt adhesive layer does not directly contact the electrodes of the light emitting chip.
  • the hot melt adhesive layer does not directly contact the electrodes of the light emitting chip.
  • the growth substrate assembly in addition to the growth substrate, the light-emitting chip, and the hot-melt adhesive layer, the growth substrate assembly also includes several sacrificial layer units.
  • the sacrificial layer units correspond to the light-emitting chips one by one, and cover the light-emitting chip The positive electrode, the negative electrode, and the area between the positive and negative electrodes. That is to say, in the final form of the growth substrate assembly, the sacrificial layer unit is not removed, but remains. It can be understood that, compared with the growth substrate assembly in which the sacrificial layer unit is removed, the sacrificial layer unit on the light-emitting chip can be used in the process of transporting the growth substrate assembly.
  • the sacrificial layer unit is removed during the preparation of the growth substrate assembly, this will naturally facilitate the subsequent application of the growth substrate assembly.
  • the growth substrate assembly is used to prepare a display panel, it is not necessary to remove the sacrificial layer unit. It is beneficial to improve the preparation efficiency of the display panel, reduce the burden on the display panel manufacturer, and thus enhance the market competitiveness of the growth substrate component.
  • the sacrificial layer unit is a photoresist layer unit, which can be prepared by positive photoresist or negative photoresist.
  • the sacrificial layer unit may be a polyvinyl alcohol layer unit.
  • FIG. 2 to FIG. 3 An exemplary growth substrate assembly is shown in FIG. 2 to FIG. 3, which includes a growth substrate 4, a number of light-emitting chips 5 formed on the growth substrate 4, and an electrode 50 is provided on the bottom surface of each light-emitting chip 5, that is, an electrode 50 Located on the side of the light-emitting chip 5 away from the growth substrate 4 , the electrodes 50 include a positive electrode and a negative electrode.
  • the growth substrate assembly further includes a hot-melt adhesive layer 6 disposed on the growth substrate 4 and covering at least a part of the bottom surface of each light-emitting chip 5 .
  • the hot-melt adhesive layer 6 is flush with the electrodes 50 of the light-emitting chip 5 (i.e., the positive electrode and the negative electrode). 6 can also be slightly higher or slightly lower than the electrode 50.
  • the hot-melt adhesive layer 6 in this example is an integrally formed adhesive layer, that is, the gaps between the light-emitting chips 5 are also filled and covered by the hot-mel
  • FIG. 4 Another exemplary growth substrate assembly is shown in FIG. 4, which includes a growth substrate 4, a number of light-emitting chips 5 formed on the growth substrate 4, and electrodes 50 (including positive electrodes and negative electrodes) are provided on the bottom surface of each light-emitting chip 5. ).
  • the growth substrate assembly further includes a hot-melt adhesive layer 6 disposed on the growth substrate 4 and covering at least a part of the bottom surface of each light-emitting chip 5 .
  • the hot-melt adhesive layer 6 is flush with the electrode 50 of the light-emitting chip 5 , and may be slightly higher or slightly lower than the electrode 50 .
  • the hot-melt glue layer 6 in this example includes several hot-melt glue units 61, one hot-melt glue unit 61 corresponds to a light-emitting chip 5, and each hot-melt glue unit 61 is separated from each other, and the hot-melt glue unit 61 lights up its corresponding light-emitting chip 5.
  • the bottom surface of the chip 5 is partially covered, and the bottom surface of the light-emitting chip 5 including the positive electrode, the negative electrode and the area between them are exposed to the hot-melt adhesive unit 61 .
  • the shape of the hot-melt adhesive unit 61 in this embodiment can be set flexibly, for example, it can be an arc as shown in Figure 4, or it can be a rectangle as shown in Figure 5, and of course it can also be other regular shapes, or it can be different. Regular shape, without any limitation here.
  • the hot-melt adhesive layer can also cover at least a part of the area between the positive electrode and the negative electrode of the light-emitting chip, as long as it is ensured that the hot-melt adhesive covering this area can be turned into a liquid state after being heated. Flow along both sides of the light-emitting chip to the circuit board to form a glue column.
  • the positive electrode, the negative electrode, and the area between the positive electrode and the negative electrode of the light-emitting chip 5 are exposed to the hot melt adhesive layer 6, which only means that the positive electrode, the negative electrode, and the area between the two electrodes will not be covered.
  • the hot-melt adhesive layer 6 is completely covered, and they each have some areas exposed to the hot-melt adhesive layer 6.
  • the end face of the free end of the electrode 50 can be exposed to the hot-melt adhesive layer 6.
  • the electrodes 50 of the light-emitting chip 5 are eutectically bonded to the pads on the circuit board.
  • the electrode 50 of the light-emitting chip 5 is exposed to the hot melt adhesive layer 6, the electrode 50 can also be in contact with the hot melt adhesive layer 6, that is, there is a part of the electrode 50 covered by the hot melt adhesive layer. 6, for example, in the light-emitting chip 50 shown in FIG. 3 and FIG. However, in some examples, please continue to refer to FIG. 4, there is no direct contact between the hot melt adhesive layer 6 and the electrode 50 of the light-emitting chip 5, and there are A certain gap.
  • the solution of setting a gap between the two can prevent the hot melt adhesive layer 6 from affecting the bonding of the light emitting chip 5 and the circuit board, which is conducive to improving the growth rate.
  • another growth substrate assembly is provided, as shown in FIG. Located on the bottom surface of the light-emitting chip 5, the electrode 50 of the light-emitting chip 5 is covered to ensure that the hot melt adhesive layer 6 does not completely cover the electrode 50 of the light-emitting chip 5 during the process of preparing the growth substrate assembly.
  • the sacrificial layer unit 7 will be removed before the hot melt adhesive layer 6, for example, the sacrificial layer unit 7 may be removed by wet etching, therefore, in this embodiment
  • the sacrificial layer unit 7 when selecting the material of the sacrificial layer unit 7, it should be ensured that the sacrificial layer unit 7 has at least one removal method that meets the requirements, and the removal method that meets the requirements needs to ensure that the hot melt adhesive layer 6 is basically not affected, let alone the luminescence chip5.
  • the sacrificial layer unit 7 can be formed of photoresist or polyvinyl alcohol.
  • the sacrificial layer unit 7 may be disposed on the bottom surface of the light-emitting chip 5 by means including but not limited to dispensing, coating, and the like. In some examples, the sacrificial layer unit 7 can completely cover the electrode 50 of the light emitting chip 5 and the area between the two electrodes 50 , as shown in FIG. 6 . In this case, during the subsequent application of the growth substrate assembly, after the sacrificial layer unit 7 is removed, there will be a gap between the hot melt adhesive layer 6 and the electrode 50 , similar to that shown in FIG. 4 .
  • the sacrificial layer unit 7 covers the end face of the free end of the electrode 50 and the area between the two electrodes 50, but the partial area on the side of the electrode 50 will not be covered by the sacrificial layer unit 7.
  • hot melt adhesive The layer 6 will cover the area on the side of the electrode 50 that is not covered by the sacrificial layer unit 7 , that is, the hot melt adhesive layer 6 may be in direct contact with a part of the electrode 50 of the light emitting chip 5 .
  • the hot-melt adhesive layer 6 set later may cover the sacrificial layer set earlier.
  • the hot-melt adhesive layer 6 set later may cover the sacrificial layer set earlier.
  • the growth substrate 4 in this embodiment may include, but not limited to, a growth substrate for growing red light-emitting chips, a growth substrate for growing green light-emitting chips, a growth substrate for growing blue light-emitting chips, a growth substrate for growing ultraviolet light-emitting chips, etc. It can be flexibly set according to application requirements.
  • the whole process is fast and simple, and there is no need to transfer the light-emitting chip from the growth substrate to the temporary substrate, and then from the temporary substrate to the transfer substrate, and it is no longer necessary to prepare the temporary substrate and the transfer substrate, the transfer efficiency is higher, and Transfer costs are lower.
  • FIG. 7 an example manufacturing method of the above-mentioned growth substrate assembly, as shown in FIG. 7 , which includes but is not limited to:
  • S701 growing several light-emitting chips on the growth substrate, electrodes (including positive electrodes and negative electrodes) are grown on the bottom surfaces of the several light-emitting chips, and the bottom surface of the light-emitting chips is the side away from the growth substrate of the light-emitting chips.
  • various light-emitting chip growth methods may be used for growing the light-emitting chip on the growth substrate, which is not limited here.
  • S702 Arrange sacrificial layer units on the bottom surface of each light-emitting chip, and each sacrificial layer unit covers the positive electrode, the negative electrode, and the area between the positive electrode and the negative electrode on the bottom surface of each light-emitting chip.
  • each sacrificial layer unit is not limited, it only needs to completely cover the positive electrode, the negative electrode and the area between the two of the light-emitting chip and not completely cover the bottom surface of the light-emitting chip.
  • the formation method and specific material of the sacrificial layer unit can be flexibly selected.
  • the sacrificial layer unit can be but not limited to a photoresist layer unit or a polyvinyl alcohol layer unit.
  • the hot melt adhesive layer is subsequently formed on it, it can be removed. It can be understood that when using a growth substrate assembly to prepare a light-emitting assembly (such as a display panel), it is necessary to transfer and bond the light-emitting chip in the growth substrate assembly to a corresponding circuit board. The chip is peeled off from the growth substrate and the hot melt adhesive layer, and the sacrificial layer unit attached to the bottom surface of the light-emitting chip needs to be removed. Therefore, the sacrificial layer
  • S703 forming a hot-melt adhesive layer on the growth substrate, the hot-melt adhesive layer partially covers the bottom surfaces of the plurality of light-emitting chips, and the sacrificial layer units are exposed to the hot-melt adhesive layer, so as to facilitate subsequent removal of the sacrificial layer units.
  • the photoresist unit can be washed away, so that the electrode of the light emitting chip covered by it is exposed to the hot melt adhesive layer.
  • the number of Micro-LED chips transferred to the display backplane is basically tens of thousands or more. Therefore, after the Micro-LED chip is completed, it is difficult to detect the dead pixels on the display backplane, and even if the bad pixels are detected, it is difficult to repair them. Even if they are repaired, the repair process is complicated. In addition, when transferring Micro-LED chips, the entire surface of the Micro-LED chips on the growth substrate is lifted off by laser, and all Micro-LED chips are transferred to the temporary substrate, resulting in the final preparation of Micro-LED display devices.
  • step S702 before setting the sacrificial layer unit on the bottom surface of each light-emitting chip, it may also include but not limited to:
  • detecting each light-emitting chip on the growth substrate may include but not limited to at least one of the following:
  • the optical characteristics of each light-emitting chip are detected.
  • the optical specificity and appearance quality of the light-emitting chip on the growth substrate can be generated in advance by not limited to the Micro PL/AOI detection method, and the corresponding mapping data can be generated to determine the unqualified light emission. chip and remove it from the growth substrate.
  • detecting the optical characteristics of each light-emitting chip may include but not limited to: detecting the main wavelength of each light-emitting chip, and if the difference between the main wavelength and the preset standard main wavelength is greater than the preset The light-emitting chip with the difference value is judged as an unqualified light-emitting chip, so that the dominant wavelength consistency of the light-emitting chip remaining on the growth substrate is good, and the uniformity of light emission of the light-emitting component is improved, so that the display effect or lighting effect is better. good.
  • the following uses the sacrificial layer unit as the photoresist layer unit to illustrate the process of manufacturing the growth substrate assembly shown in Figure 4 as an example; the manufacturing process of the growth substrate assembly shown in Figure 3 and Figure 5 is similar, No more details here.
  • FIG. 8 An example of making the growth substrate assembly shown in Figure 4 is shown in Figure 8, which includes but is not limited to:
  • S801 grow several light-emitting chips 5 on the growth substrate 4, electrodes 50 (including positive electrodes and negative electrodes) are grown on the bottom surfaces of the several light-emitting chips 5, and the bottom surface of the light-emitting chips 5 is the side away from the growth substrate of the light-emitting chips 5.
  • the way of growing the light-emitting chip 5 on the growth substrate in this example can adopt various ways of growing the light-emitting chip 5 , which will not be repeated here.
  • S802 Set sacrificial layer units 7 on the bottom surfaces of the light emitting chips 5 respectively, and each sacrificial layer unit 7 respectively covers the positive electrode, the negative electrode and the area between the positive electrodes and the negative electrodes on the bottom surface of each light emitting chip.
  • each sacrificial layer unit 7 is arc, and the shape of each sacrificial layer unit 7 is the same, of course, some of them may be the same and some of them may be different. And its shape is not limited to arc, it can also be rectangular, etc., which will not be repeated here.
  • S803 Forming several hot-melt glue units 61 on the growth substrate 4, the several hot-melt glue units 61 respectively cover a part of the bottom surface of several light-emitting chips 5, and the sacrificial layer unit 7 is exposed to the hot-melt glue units 61, so as to facilitate subsequent Removal of the sacrificial layer unit 7.
  • the growth substrate assembly to be prepared is the growth substrate assembly shown in FIG. 6 , it is not necessary to remove the sacrificial layer unit 7, and the growth substrate assembly can be directly produced after the hot melt adhesive layer is solidified. .
  • the manufacturing method of the growth substrate assembly provided by this embodiment is simple, convenient and efficient.
  • the light-emitting chip on the growth substrate assembly is transferred to the circuit board, it is no longer necessary to transfer the light-emitting chip from the growth substrate to the temporary substrate, and then from the temporary substrate to the transfer substrate, and it is no longer necessary to prepare the temporary substrate and the transfer substrate, The chip transfer efficiency is higher, and the transfer cost is lower.
  • This embodiment also provides a light-emitting assembly, which is made by using the growth substrate assembly in the above-mentioned embodiments.
  • a light-emitting assembly which is made by using the growth substrate assembly in the above-mentioned embodiments.
  • this embodiment will be described below by taking a manufacturing method of a light-emitting component as an example. Please refer to Fig. 9, the manufacturing method of the light-emitting component may include but not limited to:
  • S901 Fabricate a growth substrate assembly; in this embodiment, it can be produced by but not limited to the method for fabricating the growth substrate assembly shown in the above embodiments, and will not be repeated here.
  • S902 Arranging the side of the growth substrate on which the light-emitting chip is grown on the circuit board, facing the side of the circuit board provided with the chip bonding area.
  • the side of the growth substrate on which the light-emitting chip is grown is placed on the circuit board, and when it is arranged opposite to the side of the circuit board provided with the chip bonding area, the positive electrode and the negative electrode of the light-emitting chip are in contact with the circuit board.
  • the corresponding pads in the bonding area of the upper chip can be directly contacted, and there is a certain gap between the hot melt adhesive layer and the circuit board.
  • the electrodes of the light-emitting chip and the chip on the circuit board A certain gap can also be reserved between the corresponding pads in the bonding area, and there is a certain gap between the hot-melt adhesive layer and the circuit board.
  • S903 performing first heating on the hot-melt adhesive layer, so that the hot-melt adhesive layer liquefies and then flows onto the circuit board to form adhesive columns on both sides of the light-emitting chip.
  • the temperature and heating time specifically adopted for the first heating in this embodiment can be flexibly set according to the specific material of the hot-melt adhesive layer and the required liquefaction state of the hot-melt adhesive layer, and there is no limitation here.
  • S904 Peel off the light-emitting chip on the growth substrate from the growth substrate, and drop the peeled light-emitting chip onto the respective corresponding chip bonding regions along the channels formed by the glue columns on both sides thereof.
  • the method of peeling off the light-emitting chip on the growth substrate from the growth substrate can be flexibly adopted, for example, but not limited to, laser lift-off method can be used.
  • the light-emitting chip falls from the growth substrate to the corresponding chip bonding area on the circuit board, it falls along the channels formed by the glue columns on both sides, so as to ensure that the light-emitting chip falls accurately to its bonding area.
  • the corresponding chip bonding area and due to the limitation of the glue columns on both sides, can also prevent the light-emitting chip from flipping or tilting during the falling process, which can further improve the quality and reliability of chip transfer bonding.
  • S905 Remove the hot-melt adhesive layer together with the growth substrate, and connect the pads in the bonding regions of each chip to the positive electrode and the negative electrode of the corresponding light-emitting chip.
  • the growth substrate is made of sapphire and other materials
  • the circuit board is densely covered with metal circuits and an inorganic protective layer; the characteristic of the hot-melt adhesive layer is that it has poor wettability with metal, so it is easier to separate from the circuit board ;
  • the hot-melt adhesive layer remains on the circuit board, when the electrodes of the light-emitting chip and the pads in the chip bonding area are subsequently heated and welded, the hot-melt adhesive layer will also gather in the place where there is no metal solder, and will not Interfere with the electrical connection of the light-emitting chip.
  • removing the hot-melt adhesive layer together with the growth substrate in S905 includes:
  • the hot-melt adhesive layer is removed together with the growth substrate.
  • it in order to make the hot melt adhesive layer follow the growth substrate better after the second heating, it can be selected to heat the hot melt adhesive layer from the side away from the growth substrate, so that the hot melt adhesive The part of the layer away from the growth substrate will melt first, and the adhesion between the hot melt adhesive layer and the circuit board will be reduced; at the same time, the side of the hot melt adhesive layer close to the growth substrate is not completely melted, and its contact with the growth substrate There is still a large bonding force between them, which can ensure that the hot melt adhesive layer is removed along with the growth substrate.
  • the side of the growth substrate on which the light-emitting chip is grown can be directly aligned with the circuit board, and then the hot-melt adhesive layer is heated to at least liquefy the area covering the bottom surface of the light-emitting chip.
  • the glue layer flows along both sides of the light-emitting chip to the circuit board to form glue columns.
  • the light-emitting chips on the growth substrate are peeled off from the growth substrate, and then follow the channels formed by the glue columns on both sides.
  • the entire chip transfer process does not need a temporary substrate, transfer substrate or transfer head, the production efficiency is higher, and the production cost is lower .
  • the light-emitting chips set on the circuit board are light-emitting chips of the same color.
  • the manufacturing process of the light-emitting component in this application scenario is shown in Figure 10, which includes but is not limited to:
  • S1001 Place the side of the growth substrate 4 on which the light-emitting chip 5 grows on the circuit board 8, and set it opposite to the side of the circuit board 8 provided with the chip bonding area, wherein the chip bonding area is provided with the light-emitting chip 5
  • the positive electrode and the negative electrode respectively correspond to the pads 81.
  • the positive electrode of the light-emitting chip 5 and the At least one of the negative electrodes is in direct contact with the corresponding pad 81 in the chip bonding area on the circuit board 8 , as shown in FIG. 11 , and there is a certain gap between the hot melt glue unit 61 and the circuit board 4 .
  • the front side of the light-emitting chip 5 A certain gap can also be reserved between the electrode and the negative electrode and the corresponding pad 81 in the chip bonding area on the circuit board 8, and there is a certain gap between the hot-melt glue unit 61 and the circuit board 8, as shown in FIG. 10 .
  • S1002 First heat the hot-melt glue unit 61 to make it liquefy at least the area covered on the bottom surface and flow to the circuit board along the two sides of the light-emitting chip 5 under the action of gravity to form glue columns 62, so as to play a relatively fixed effect, and the glue column 62 forms a channel for the light-emitting chip 5 to fall onto the circuit board; the light-emitting chip 5 on the growth substrate 4 is peeled off from the growth substrate 4, and the peeled light-emitting chip 5 falls along the above-mentioned channel to the on the corresponding chip bonding area.
  • the temperature and heating time specifically adopted for the first heating in this embodiment can be flexibly set according to the specific material of the hot-melt glue unit 61 and the required liquefaction state of the hot-melt glue unit 61 , which is not limited here.
  • the hot-melt glue unit 61 can be heated for a second time to further liquefy, and then the hot-melt glue unit 61 can be removed together with the growth substrate.
  • the hot-melt adhesive layer will gather in the place where there is no solder, and will not Interfere with the electrical connection of the light-emitting chip.
  • the growth substrate includes a first light-emitting chip (for example, a red light-emitting chip), a second light-emitting chip (for example, a green light-emitting chip) and a third light-emitting chip (for example, a blue light-emitting chip).
  • a first light-emitting chip for example, a red light-emitting chip
  • a second light-emitting chip for example, a green light-emitting chip
  • a third light-emitting chip for example, a blue light-emitting chip
  • the process of sequentially transferring the first light-emitting chip, the second light-emitting chip and the third light-emitting chip to the circuit board is taken as an example to describe below.
  • S1201 Place the side of the first growth substrate 41 on which the first light-emitting chip 51 grows on the circuit board 8, and set it opposite to the side of the circuit board 8 provided with the chip bonding area, wherein the chip bonding area is provided with Pads 81 corresponding to positive and negative electrodes of the first light emitting chip 51 .
  • S1202 First heat the hot-melt glue unit 61 to make it liquefy at least the area covered on the bottom surface and flow to the circuit board along both sides of the first light-emitting chip 51 under the action of gravity to form glue columns 62, thereby Relatively fixed and the role of forming a channel for the first light-emitting chip 51 to fall; the first light-emitting chip 51 on the first growth substrate 41 is peeled off from the first growth substrate 4, and the first light-emitting chip 51 after peeling is along its two sides.
  • the channels formed by the glue pillars 62 respectively fall on the respective corresponding chip bonding regions.
  • S1301 Place the side of the second growth substrate 42 on which the second light-emitting chip 52 grows on the circuit board 8, and set it opposite to the side of the circuit board 8 provided with the chip bonding area, wherein the chip bonding area is provided with Pads 81 corresponding to positive and negative electrodes of the second light emitting chip 52 .
  • the previously transferred first light emitting chip 51 will not interfere with the subsequently transferred second light emitting chip 52 on the circuit board 8 .
  • S1302 First heat the hot-melt glue unit 61 to liquefy at least the area covered on the bottom surface and flow to the circuit board along the two sides of the second light-emitting chip 52 under the action of gravity to form the glue column 62, so as to play a relatively The role of fixing and forming a channel for the second light-emitting chip 52 to fall; and peeling the second light-emitting chip 52 on the second growth substrate 42 from the first growth substrate 4, and the peeled second light-emitting chip 52 along its two sides
  • the channels formed by the glue pillars 62 respectively fall on the respective corresponding chip bonding regions.
  • the hot-melt glue unit 61 may be heated for a second time to be further liquefied, and then the hot-melt glue unit 61 is removed together with the second growth substrate 42 .
  • S1401 Place the side of the third growth substrate 43 on which the third light-emitting chip 53 grows on the circuit board 8, and set it opposite to the side of the circuit board 8 provided with the chip bonding area, wherein the chip bonding area is provided with Pads 81 corresponding to positive and negative electrodes of the third light emitting chip 53 .
  • the previously transferred first light emitting chip 51 and the second light emitting chip 52 on the circuit board 8 will not interfere with the subsequent transferred third light emitting chip 53 .
  • S1402 First heat the hot-melt glue unit 61 to liquefy at least the area covered on the bottom surface and flow to the circuit board along the two sides of the third light-emitting chip 53 to form glue columns 62 under the action of gravity, so as to play a relatively The role of fixing and forming a channel for the third light-emitting chip 53 to fall; peeling the third light-emitting chip 53 on the third growth substrate 43 from the first growth substrate 4, and the third light-emitting chip 53 after peeling is along the sides of the third light-emitting chip 53.
  • the channels formed by the glue pillars 62 drop onto the corresponding chip bonding areas respectively.
  • the hot-melt glue unit 61 may be heated for a second time to be further liquefied, and then the hot-melt glue unit 61 is removed together with the third growth substrate 43 .
  • the positive electrode and the negative electrode of the first light-emitting chip 51, the second light-emitting chip 52, and the third light-emitting chip 53 can be welded to the pad 81 in the chip bonding area at one time, thereby improving welding efficiency and Consistency of welding.
  • the welding of the positive electrode, the negative electrode and the welding pad can also be completed after each transfer of the light-emitting chip.
  • the transfer order of the first light emitting chip 51 , the second light emitting chip 52 and the third light emitting chip 53 can be flexibly adjusted, and is not limited to the order of the above examples, and will not be repeated here.
  • This embodiment also provides a display screen, which can be a flexible display screen or a rigid display screen, and it can be a display screen of a regular shape, such as a rectangle, a circle, an ellipse, etc., or a display screen of a special shape.
  • Screen The display screen includes a display screen frame and a display panel as shown in the above examples, the display panel is made of the above-mentioned light-emitting components, and the display panel is fixed in the display screen frame.
  • the display screen in this embodiment can be applied to various electronic devices, such as monitors, computers, mobile phones, smart watches, vehicle-mounted devices, billboards, and the like.
  • the display screen has higher production efficiency, lower cost, better yield rate, higher light extraction efficiency and better display effect.

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Led Device Packages (AREA)

Abstract

The present application relates to a growth substrate assembly, a manufacturing method therefor, and a manufacturing method for a light-emitting assembly. The growth substrate assembly comprises: a growth substrate, multiple light-emitting chips disposed on the growth substrate, and a hot-melt adhesive layer attached to the growth substrate and partially covering the bottom surface of the light-emitting chips. Positive electrodes and negative electrodes are grown on the bottom surfaces of the light-emitting chips, the bottom surfaces being the surfaces of the light-emitting chips distant from the growth substrate. The positive electrodes, the negative electrodes, and a region between the positive electrodes and the negative electrodes on the bottom surfaces of the light-emitting chips are exposed to the hot-melt adhesive layer.

Description

生长基板组件及其制作方法、发光组件的制作方法Growth substrate assembly and manufacturing method thereof, and manufacturing method of light-emitting assembly 技术领域technical field
本申请涉及发光芯片领域,尤其涉及一种生长基板组件及其制作方法、发光组件的制作方法。The present application relates to the field of light-emitting chips, in particular to a growth substrate assembly, a manufacturing method thereof, and a manufacturing method of a light-emitting assembly.
背景技术Background technique
Micro-LED作为新一代的显示技术,与现有的液晶显示相比具有更高的光电效率,更高的亮度,更高的对比度,以及更低的功耗,且还能结合柔性面板实现柔性显示。As a new generation of display technology, Micro-LED has higher photoelectric efficiency, higher brightness, higher contrast, and lower power consumption than existing liquid crystal displays, and can also be combined with flexible panels to achieve flexible show.
Micro-LED显示面板上包括了若干像素区域SPR(Subpixel Rendering,子像素呈现),每个像素区域SPR包括红光Micro-LED芯片、蓝光Micro-LED芯片、绿光Micro-LED芯片。在显示面板的制作过程中,需要将红光Micro-LED芯片、蓝光Micro-LED芯片和绿光Micro-LED芯片从各自的生长基板(WAFER)转移到显示背板上;以红光Micro-LED芯片的转移过程为例,其转移过程如下:The Micro-LED display panel includes several pixel regions SPR (Subpixel Rendering, sub-pixel rendering), each pixel area SPR includes red Micro-LED chips, blue Micro-LED chips, and green Micro-LED chips. In the production process of the display panel, it is necessary to transfer the red Micro-LED chip, the blue Micro-LED chip and the green Micro-LED chip from their respective growth substrates (WAFER) to the display backplane; Taking the transfer process of the chip as an example, the transfer process is as follows:
将临时基板设有第一粘接层的一面与生长基板上生长有红光Micro-LED芯片的一面贴合,然后将生长基板剥离,将红光Micro-LED芯片转移至临时基板上;Bonding the side of the temporary substrate provided with the first adhesive layer to the side of the growth substrate on which the red Micro-LED chip is grown, then peeling off the growth substrate, and transferring the red Micro-LED chip to the temporary substrate;
将转移基板设有第二粘接层的一面与临时基板上承载有红光Micro-LED芯片的一面贴合,从而从临时基板上选择性的拾取对应的红光Micro-LED芯片;Bonding the side of the transfer substrate provided with the second adhesive layer with the side of the temporary substrate carrying the red Micro-LED chips, so as to selectively pick up the corresponding red Micro-LED chips from the temporary substrate;
将转移基板拾取的红光Micro-LED芯片转移至显示背板上对应的芯片键合区内。Transfer the red micro-LED chip picked up by the transfer substrate to the corresponding chip bonding area on the display backplane.
在上述芯片转移过程中,需要选择两款胶材来分别制作第一粘接层和第二粘接层,且需要保证第一粘接层的黏性低于第二粘接层,难以找到合适的材料,且上述转移过程需要将Micro-LED芯片从生长基板转移至临时基板,从临时基板转移至转移基板,转移效率低且需要制备临时基板和转移基板,转移成本也较高。In the above chip transfer process, it is necessary to select two kinds of adhesive materials to make the first adhesive layer and the second adhesive layer respectively, and it is necessary to ensure that the viscosity of the first adhesive layer is lower than that of the second adhesive layer, so it is difficult to find a suitable adhesive. materials, and the above transfer process needs to transfer the Micro-LED chip from the growth substrate to the temporary substrate, and from the temporary substrate to the transfer substrate. The transfer efficiency is low and the temporary substrate and the transfer substrate need to be prepared, and the transfer cost is also high.
因此,如何提升LED芯片的转移效率并降低转移成本是目前亟需解决的问题。Therefore, how to improve the transfer efficiency of LED chips and reduce the transfer cost is an urgent problem to be solved at present.
技术问题technical problem
鉴于上述现有技术的不足,本申请的目的在于提供一种生长基板组件及其制作方法、发光组件的制作方法,旨在解决相关技术中,如何提升LED芯片的转移效率并降低转移成本的问题。In view of the deficiencies of the above-mentioned prior art, the purpose of this application is to provide a growth substrate assembly and its manufacturing method, and a manufacturing method of a light-emitting assembly, aiming to solve the problem of how to improve the transfer efficiency of LED chips and reduce the transfer cost in related technologies .
技术解决方案technical solution
本申请提供一种生长基板组件,包括:The application provides a growth substrate assembly, including:
生长基板;growth substrate;
设置于所述生长基板上的若干发光芯片,所述若干发光芯片的底面上生长有正电极和负电极,所述底面为所述发光芯片远离所述生长基板的一面;A plurality of light-emitting chips arranged on the growth substrate, positive electrodes and negative electrodes are grown on the bottom surfaces of the plurality of light-emitting chips, and the bottom surface is the side of the light-emitting chips away from the growth substrate;
设于所述生长基板上,将所述发光芯片的底面部分覆盖的热融胶层,所述发光芯片底面上的所述正电极、所述负电极以及所述正电极和所述负电极之间的区域裸露于所述热融胶层。A hot-melt adhesive layer provided on the growth substrate to partially cover the bottom surface of the light-emitting chip, the positive electrode, the negative electrode, and the connection between the positive electrode and the negative electrode on the bottom surface of the light-emitting chip The area between is exposed to the hot-melt adhesive layer.
基于同样的发明构思,本申请还提供一种如上所述的生长基板组件的制作方法,包括:Based on the same inventive concept, the present application also provides a method for manufacturing the growth substrate assembly as described above, including:
在生长基板上生长若干所述发光芯片;growing several light-emitting chips on a growth substrate;
分别在各所述发光芯片的底面上设置牺牲层单元,各所述牺牲层单元分别将各所述发光芯片底面上的所述正电极、负电极以及正电极和所述负电极之间的区域覆盖;A sacrificial layer unit is respectively arranged on the bottom surface of each of the light-emitting chips, and each of the sacrificial layer units separates the positive electrode, the negative electrode, and the area between the positive electrode and the negative electrode on the bottom surface of each of the light-emitting chips. cover;
在所述生长基板上形成热融胶层,所述热融胶层将所述若干发光芯片的底面部分覆盖,所述牺牲层单元裸露于所述热融胶层;A hot-melt adhesive layer is formed on the growth substrate, the hot-melt adhesive layer partially covers the bottom surfaces of the plurality of light-emitting chips, and the sacrificial layer unit is exposed to the hot-melt adhesive layer;
在所述热融胶层固化后,去除各所述牺牲层单元,使得各所述发光芯片的所述正电极、所述负电极以及所述正电极和所述负电极之间的区域裸露于所述热融胶层。After the hot-melt adhesive layer is cured, each of the sacrificial layer units is removed, so that the positive electrode, the negative electrode, and the area between the positive electrode and the negative electrode of each light-emitting chip are exposed to the The hot melt adhesive layer.
基于同样的发明构思,本申请还提供一种发光组件的制作方法,包括:Based on the same inventive concept, the present application also provides a method for manufacturing a light-emitting component, including:
通过如上所述的生长基板组件的制作方法制作所述生长基板组件;Fabricating the growth substrate assembly by the method for fabricating the growth substrate assembly as described above;
将所述生长基板生长有所述发光芯片的一面设于电路板之上,与所述电路板设有芯片键合区的一面对位设置;The side of the growth substrate on which the light-emitting chip is grown is placed on the circuit board, facing the side of the circuit board where the chip bonding area is provided;
对所述热融胶层进行第一加热,使得所述热融胶层液化后流至所述电路板上,在所述发光芯片的两侧形成胶柱;Carrying out first heating to the hot-melt adhesive layer, so that the hot-melt adhesive layer liquefies and then flows onto the circuit board, forming glue columns on both sides of the light-emitting chip;
将所述生长基板上的所述发光芯片与所述生长基板剥离,剥离后的所述发光芯片沿其两侧的所述胶柱所构成的通道落至各自对应的所述芯片键合区上;The light-emitting chip on the growth substrate is peeled off from the growth substrate, and the peeled light-emitting chip falls onto the corresponding chip bonding area along the channels formed by the glue columns on both sides thereof ;
将所述热融胶层随所述生长基板一起移除,并将各所述芯片键合区内焊盘与对应的所述发光芯片的所述正电极和所述负电极连接。The hot-melt adhesive layer is removed together with the growth substrate, and the pads in each chip bonding area are connected to the positive electrode and the negative electrode of the corresponding light-emitting chip.
基于同样的发明构思,本申请还提供一种发光组件,所述发光组件通过如上所述的发光组件的制作方法制得。Based on the same inventive concept, the present application also provides a light-emitting component, which is manufactured by the method for manufacturing the light-emitting component as described above.
有益效果Beneficial effect
上述生长基板组件,其生长基板上设有若干发光芯片,各发光芯片的底面远离生长基板且生长有正电极和负电极;在该生长基板上设有将发光芯片的底面部分覆盖的热融胶层,且发光芯片的正电极和负电极以及二者之间的区域裸露于热融胶层;将该生长基板上的发光芯片转移至电路板上时,将该生长基板生长有发光芯片的一面与电路板设有芯片键合区的一面对位设置后,对热融胶层加热至少使覆盖在发光芯片底面上的区域液化(也即融化)后在重力作用下流至电路板上,并在各发光芯片的两侧形成胶柱,使得生长基板上的发光芯片被从生长基板剥离后,沿其两侧的所述胶柱所构成的通道分别落至各自对应的芯片键合区上,从而实现将发光芯片直接转移至电路板上,整个过程不再需要将发光芯片从生长基板转移至临时基板,再从临时基板转移至转移基板,也不再需要制备临时基板、转移基板,转移效率更高,且转移成本更低。The above-mentioned growth substrate assembly is provided with a plurality of light-emitting chips on the growth substrate, and the bottom surface of each light-emitting chip is far away from the growth substrate and has a positive electrode and a negative electrode; layer, and the positive and negative electrodes of the light-emitting chip and the area between them are exposed to the hot melt adhesive layer; when the light-emitting chip on the growth substrate is transferred to the circuit board, the side of the growth substrate with the light-emitting chip After being arranged facing the side of the circuit board with the chip bonding area, the hot melt adhesive layer is heated to at least liquefy (that is, melt) the area covering the bottom surface of the light-emitting chip, and then flows to the circuit board under the action of gravity, and Glue pillars are formed on both sides of each light-emitting chip, so that after the light-emitting chips on the growth substrate are peeled off from the growth substrate, the channels formed by the glue pillars on both sides of the growth substrate fall onto the corresponding chip bonding regions respectively, In this way, the light-emitting chip can be directly transferred to the circuit board. In the whole process, it is no longer necessary to transfer the light-emitting chip from the growth substrate to the temporary substrate, and then from the temporary substrate to the transfer substrate, and it is no longer necessary to prepare the temporary substrate and the transfer substrate. Higher, and lower transfer costs.
上述生长基板组件的制作方法所制得生长基板组件,由于将该生长基板组件上的发光芯片转移至电路板的过程中,不再需要将发光芯片从生长基板转移至临时基板,再从临时基板转移至转移基板,也不再需要制备临时基板、转移基板,芯片转移效率更高,且转移成本更低。The growth substrate assembly obtained by the method for manufacturing the growth substrate assembly described above does not need to transfer the light-emitting chip from the growth substrate to the temporary substrate, and then from the temporary substrate to the circuit board during the process of transferring the light-emitting chip on the growth substrate assembly to the circuit board. Transfer to the transfer substrate, and it is no longer necessary to prepare a temporary substrate and a transfer substrate, the chip transfer efficiency is higher, and the transfer cost is lower.
以上发光组件的制作方法,在将生长基板组件上的发光芯片转移至电路板上的过程中,不再需要将发光芯片从生长基板转移至临时基板,再从临时基板转移至转移基板,也不再需要制备临时基板、转移基板,芯片转移效率更高,且转移成本更低,使得该发光组件的制作效率更高,制作成本更低。In the process of transferring the light-emitting chip on the growth substrate assembly to the circuit board in the above method of manufacturing the light-emitting component, it is no longer necessary to transfer the light-emitting chip from the growth substrate to the temporary substrate, and then from the temporary substrate to the transfer substrate. Furthermore, it is necessary to prepare a temporary substrate and a transfer substrate, and the chip transfer efficiency is higher, and the transfer cost is lower, so that the manufacturing efficiency of the light-emitting component is higher, and the manufacturing cost is lower.
上述发光组件的发光芯片从上述生长基板组件直接转移至电路板上,整个转移过程不需要将发光芯片从生长基板转移至临时基板,再从临时基板转移至转移基板,也不再需要制备临时基板、转移基板,芯片转移效率更高,且转移成本更低,使得该发光组件的制作效率更高,且制作成本更低。The light-emitting chip of the above-mentioned light-emitting assembly is directly transferred from the above-mentioned growth substrate assembly to the circuit board. The entire transfer process does not need to transfer the light-emitting chip from the growth substrate to the temporary substrate, and then from the temporary substrate to the transfer substrate, and no longer needs to prepare the temporary substrate. 1. Transfer the substrate, the chip transfer efficiency is higher, and the transfer cost is lower, so that the manufacturing efficiency of the light-emitting component is higher, and the manufacturing cost is lower.
附图说明Description of drawings
图1-1为相关技术中三种颜色的Micro-LED芯片从生长基板分别转移至显示背板的示意图;Figure 1-1 is a schematic diagram of Micro-LED chips of three colors transferred from the growth substrate to the display backplane in the related art;
图1-2为相关技术中转移红光Micro-LED芯片的过程示意图;Figure 1-2 is a schematic diagram of the process of transferring red light Micro-LED chips in related technologies;
图1-3为相关技术中临时基板与生长基板的贴合区域示意图;Figure 1-3 is a schematic diagram of the lamination area of the temporary substrate and the growth substrate in the related art;
图1-4为相关技术中承载有红光Micro-LED芯片的临时基板的示意图;1-4 are schematic diagrams of temporary substrates carrying red Micro-LED chips in the related art;
图1-5为相关技术中部分红光Micro-LED芯片被拾取走后的临时基板的示意图;Figure 1-5 is a schematic diagram of a temporary substrate after some red Micro-LED chips are picked up in the related art;
图1-6为完成Micro-LED芯片转移和键合后的显示背板的示意图;Figure 1-6 is a schematic diagram of the display backplane after the Micro-LED chip transfer and bonding are completed;
图2为本申请实施例提供的生长基板结构示意图;FIG. 2 is a schematic structural diagram of the growth substrate provided in the embodiment of the present application;
图3为本申请实施例提供的生长基板组件结构示意图一;Fig. 3 is a schematic diagram 1 of the structure of the growth substrate assembly provided by the embodiment of the present application;
图4为本申请实施例提供的生长基板组件结构示意图二;Fig. 4 is a schematic diagram II of the structure of the growth substrate assembly provided by the embodiment of the present application;
图5为本申请实施例提供的生长基板组件结构示意图三;Fig. 5 is a structural schematic diagram III of the growth substrate assembly provided in the embodiment of the present application;
图6为本申请实施例提供的生长基板组件结构示意图四;Fig. 6 is a schematic diagram 4 of the structure of the growth substrate assembly provided by the embodiment of the present application;
图7为本申请另一可选实施例提供的生长基板组件制作方法流程示意图;FIG. 7 is a schematic flowchart of a method for manufacturing a growth substrate assembly provided in another optional embodiment of the present application;
图8为本申请另一可选实施例提供的生长基板组件制作过程示意图;Fig. 8 is a schematic diagram of the manufacturing process of the growth substrate assembly provided by another alternative embodiment of the present application;
图9为本申请又一可选实施例提供的发光组件制作流程示意示意图;Fig. 9 is a schematic diagram of a manufacturing process of a light-emitting component provided in another optional embodiment of the present application;
图10为本申请又一可选实施例提供的发光组件制作过程示意图;Fig. 10 is a schematic diagram of the manufacturing process of the light-emitting component provided by another optional embodiment of the present application;
图11为本申请又一可选实施例提供的生长基板与电路板贴合示意图;Fig. 11 is a schematic diagram of bonding a growth substrate and a circuit board provided in another optional embodiment of the present application;
图12为本申请又一可选实施例提供的第一发光芯片转移过程示意图;Fig. 12 is a schematic diagram of the transfer process of the first light-emitting chip provided in another optional embodiment of the present application;
图13为本申请又一可选实施例提供的第二发光芯片转移过程示意图;Fig. 13 is a schematic diagram of the transfer process of the second light-emitting chip provided in another optional embodiment of the present application;
图14为本申请又一可选实施例提供的第三发光芯片转移过程示意图;Fig. 14 is a schematic diagram of a third light-emitting chip transfer process provided in another optional embodiment of the present application;
附图标记说明:Explanation of reference signs:
10-生长基板,10a-红光芯片生长基板,10b-绿光芯片生长基板,10c-蓝光芯片生长基板,100-像素区域SPR,101-红光Micro-LED芯片,102-芯片空位,20-临时基板,201-第一粘接层,30-转移基板,301-第二粘接层,302-显示背板,4-生长基板,41-第一生长基板,42-第二生长基板,43-第三生长基板,5-发光芯片,50-电极,51-第一发光芯片,52-第二发光芯片,53-第三发光芯片,6-热融胶层,61-热融胶单元,62-胶柱,7-牺牲层单元,8-电路板,81-焊盘。10-Growth substrate, 10a-Red chip growth substrate, 10b-Green chip growth substrate, 10c-Blue chip growth substrate, 100-Pixel area SPR, 101-Red Micro-LED chip, 102-Chip vacancies, 20- Temporary substrate, 201-first adhesive layer, 30-transfer substrate, 301-second adhesive layer, 302-display backplane, 4-growth substrate, 41-first growth substrate, 42-second growth substrate, 43 -the third growth substrate, 5-light-emitting chip, 50-electrode, 51-the first light-emitting chip, 52-the second light-emitting chip, 53-the third light-emitting chip, 6-hot-melt adhesive layer, 61-hot-melt glue unit, 62-glue column, 7-sacrificial layer unit, 8-circuit board, 81-welding pad.
本发明的实施方式Embodiments of the present invention
为了便于理解本申请,下面将参照相关附图对本申请进行更全面的描述。附图中给出了本申请的较佳实施方式。但是,本申请可以以许多不同的形式来实现,并不限于本文所描述的实施方式。相反地,提供这些实施方式的目的是使对本申请的公开内容理解的更加透彻全面。In order to facilitate the understanding of the present application, the present application will be described more fully below with reference to the relevant drawings. Preferred embodiments of the application are shown in the accompanying drawings. However, the present application can be embodied in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the application more thorough and comprehensive.
除非另有定义,本文所使用的所有的技术和科学术语与属于本申请的技术领域的技术人员通常理解的含义相同。本文中在本申请的说明书中所使用的术语只是为了描述具体的实施方式的目的,不是旨在于限制本申请。Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this application belongs. The terminology used herein in the description of the application is only for the purpose of describing specific embodiments, and is not intended to limit the application.
在Micro-LED显示技术中,参见图1-1所示,显示面板上具有若干像素区域SPR 100,每个SPR 100中均包括红光Micro-LED芯片、蓝光Micro-LED芯片、绿光Micro-LED芯片。制备显示面板时,需要将红光Micro-LED芯片、蓝光Micro-LED芯片和绿光Micro-LED芯片从各自的生长基板(如图1-1中的红光芯片生长基板10a、绿光芯片生长基板10b、蓝光芯片生长基板10c)转移到显示背板302上。下面以红光Micro-LED芯片的转移过程为例,对于从生长基板转移Micro-LED芯片至显示背板302的过程进行介绍,请参见图1-2至图1-5所示:In Micro-LED display technology, as shown in Figure 1-1, there are several pixel regions SPR 100 on the display panel, each SPR 100 includes red Micro-LED chips, blue Micro-LED chips, and green Micro-LED chips. When preparing a display panel, it is necessary to grow red Micro-LED chips, blue Micro-LED chips, and green Micro-LED chips from their respective growth substrates (such as the red chip growth substrate 10a and the green chip growth substrate 10a in Figure 1-1). The substrate 10 b and the blue light chip growth substrate 10 c ) are transferred to the display backplane 302 . Taking the transfer process of the red Micro-LED chip as an example, the process of transferring the Micro-LED chip from the growth substrate to the display backplane 302 is introduced, as shown in Figure 1-2 to Figure 1-5:
S201:将临时基板20设有第一粘接层201的一面与生长基板10上生长有红光Micro-LED芯片101的一面贴合;其中一种贴合后的俯视图参见图1-3所示;S201: Attach the side of the temporary substrate 20 provided with the first adhesive layer 201 to the side of the growth substrate 10 on which the red Micro-LED chip 101 is grown; one of the top views after bonding is shown in Figure 1-3 ;
S202至S203:将生长基板10剥离,将红光Micro-LED芯片101转移至临时基板20上;此时临时基板20的一种俯视图参见图1-4所示;S202 to S203: Peel off the growth substrate 10, and transfer the red Micro-LED chip 101 to the temporary substrate 20; at this time, a top view of the temporary substrate 20 is shown in Fig. 1-4;
S204:将转移基板30设有第二粘接层301的一面与临时基板20上承载有红光Micro-LED芯片101的一面贴合,从而从临时基板101上选择性的拾取对应的红光Micro-LED芯片101;参见图1-5所示,临时基板20上对应位置的红光Micro-LED芯片被拾取后留下对应的芯片空位102;S204: Attach the side of the transfer substrate 30 provided with the second adhesive layer 301 to the side of the temporary substrate 20 carrying the red Micro-LED chips 101, so as to selectively pick up the corresponding red Micro-LED chips from the temporary substrate 101. -LED chip 101; as shown in Figures 1-5, the red light Micro-LED chip at the corresponding position on the temporary substrate 20 is picked up, leaving a corresponding chip vacancy 102;
S205:将转移基板20拾取的红光Micro-LED芯片转移至显示背板302上对应的芯片键合区内。S205: Transfer the red Micro-LED chips picked up by the transfer substrate 20 to corresponding chip bonding areas on the display backplane 302 .
对于蓝光Micro-LED芯片和绿光Micro-LED芯片也依次采用上述芯片转移过程转移至显示背板上,完成所有的Micro-LED芯片转移的显示背板参见图1-6所示。The blue Micro-LED chip and the green Micro-LED chip are also transferred to the display backplane by the above-mentioned chip transfer process in sequence, and the display backplane that completes the transfer of all Micro-LED chips is shown in Figure 1-6.
在上述芯片转移过程中,需要选择两款胶材来分别制作第一粘接层201和第二粘接层301,且需要保证第一粘接层201的黏性低于第二粘接层301,难以找到合适的材料,且上述转移过程需要将Micro-LED芯片从生长基板10转移至临时基板20,从临时基板20转移至转移基板30,转移效率低且需要制备临时基板10和转移基板20,转移成本也较高。In the above chip transfer process, two kinds of adhesive materials need to be selected to make the first adhesive layer 201 and the second adhesive layer 301 respectively, and it is necessary to ensure that the viscosity of the first adhesive layer 201 is lower than that of the second adhesive layer 301 , it is difficult to find a suitable material, and the above transfer process needs to transfer the Micro-LED chip from the growth substrate 10 to the temporary substrate 20, from the temporary substrate 20 to the transfer substrate 30, the transfer efficiency is low and the temporary substrate 10 and the transfer substrate 20 need to be prepared , the transfer cost is also higher.
基于此,本申请希望提供一种能够解决上述技术问题的方案,其详细内容将在后续实施例中得以阐述。Based on this, the present application hopes to provide a solution capable of solving the above-mentioned technical problems, the details of which will be described in subsequent embodiments.
本实施例提供了一种生长基板组件,包括生长基板及位于该生长基板上的若干发光芯片。This embodiment provides a growth substrate assembly, including a growth substrate and several light-emitting chips located on the growth substrate.
其中,生长基板对生长基板组件中的发光芯片进行承载,在本实施例中,这些发光芯片可以直接在该生长基板上进行生长。本实施例中对于生长基板的形状和材质不做限制,例如其可以为但不限于矩形基板、圆形基板,其材质可以为但不限于硅基板、氮化镓基板、砷化镓基板、蓝宝石基板等。Wherein, the growth substrate carries the light-emitting chips in the growth substrate assembly, and in this embodiment, these light-emitting chips can be directly grown on the growth substrate. In this embodiment, the shape and material of the growth substrate are not limited. For example, it can be but not limited to a rectangular substrate, a circular substrate, and its material can be but not limited to a silicon substrate, a gallium nitride substrate, a gallium arsenide substrate, a sapphire substrate. Substrate etc.
若干发光芯片的底面上生长有电极,生长的电极包括正电极和负电极;其中发光芯片的底面为发光芯片远离生长基板的一面。应当理解的是,本实施例中的该发光芯片可根据应用需求替换为其他电子芯片,例如电阻芯片、电容芯片、驱动芯片、控制芯片等,在此不再一一赘述。Electrodes are grown on the bottom surfaces of several light-emitting chips, and the grown electrodes include positive electrodes and negative electrodes; the bottom surface of the light-emitting chips is the side away from the growth substrate of the light-emitting chips. It should be understood that the light-emitting chip in this embodiment can be replaced with other electronic chips according to application requirements, such as a resistor chip, a capacitor chip, a driver chip, a control chip, etc., which will not be repeated here.
应当理解的是,本实施例中的发光芯片可以为微型发光芯片,例如可包括但不限于Mini LED芯片和Micro-LED芯片中的至少一种,也可为尺寸大于等于200微米的普通发光芯片。It should be understood that the light-emitting chip in this embodiment can be a miniature light-emitting chip, for example, it can include but not limited to at least one of Mini LED chip and Micro-LED chip, or it can be an ordinary light-emitting chip with a size greater than or equal to 200 microns .
本实施例中的生长基板组件还包括设于生长基板上,将发光芯片的底面部分覆盖的热融胶层,发光芯片的底面上的正电极、负电极以及正电极和负电极之间的区域裸露于热融胶层;也即本实施例中的热融胶层仅将发光芯片的底面的一部分进行覆盖,以供发光芯片的正电极、负电极以及正电极和负电极之间的区域露出。在本实施例中,发光芯片的正电极、负电极以及正电极和负电极之间的区域可以全部裸露于热融胶层,也可仅仅一部分裸露于热融胶层外,但需要保证电极的底面(也即电极远离生长基板的一面)裸露于热融胶层外。本实施例中的热融胶层在受热达到一定的程度时可由固化状态变为液化(即融化)状态,并在重力作用下沿着发光芯片的两侧向下流,从而在发光芯片的两侧形成胶柱。The growth substrate assembly in this embodiment also includes a hot-melt adhesive layer arranged on the growth substrate to partially cover the bottom surface of the light-emitting chip, the positive electrode, the negative electrode, and the area between the positive electrode and the negative electrode on the bottom surface of the light-emitting chip Exposed to the hot-melt adhesive layer; that is, the hot-melt adhesive layer in this embodiment only covers a part of the bottom surface of the light-emitting chip, so that the positive electrode, the negative electrode, and the area between the positive electrode and the negative electrode of the light-emitting chip are exposed . In this embodiment, the positive electrode, the negative electrode, and the area between the positive electrode and the negative electrode of the light-emitting chip can all be exposed to the hot-melt adhesive layer, or only a part of it can be exposed outside the hot-melt adhesive layer, but it is necessary to ensure that the electrode The bottom surface (that is, the side of the electrode away from the growth substrate) is exposed outside the hot-melt adhesive layer. The hot-melt adhesive layer in this embodiment can change from a solidified state to a liquefied (ie melted) state when heated to a certain extent, and flow down along both sides of the light-emitting chip under the action of gravity, so that the heat on both sides of the light-emitting chip A gel column is formed.
需要说明的是,本实施例中发光芯片的正电极、负电极裸露于热熔胶层并不一定意味着热熔胶层完全不覆盖发光芯片电极的任何区域,而是说明发光芯片的正电极与负电极未被热熔胶层完全包覆。It should be noted that the exposure of the positive electrode and the negative electrode of the light-emitting chip to the hot melt adhesive layer in this embodiment does not necessarily mean that the hot melt adhesive layer does not cover any area of the electrode of the light-emitting chip at all, but that the positive electrode of the light-emitting chip And the negative electrode is not completely covered by the hot melt adhesive layer.
且在本实施例的一种示例中,热融胶层可以为但不限于非导电胶层。当然,在另一些应用示例中,该热融胶层也可以为导电胶层。And in an example of this embodiment, the hot-melt adhesive layer may be, but not limited to, a non-conductive adhesive layer. Certainly, in some other application examples, the hot-melt adhesive layer may also be a conductive adhesive layer.
在本实施例中,将上述生长基板上的发光芯片转移至电路板上时,将该生长基板生长有发光芯片的一面与电路板设有芯片键合区的一面对位设置后,对热融胶层加热至少使覆盖在发光芯片底面上的区域液化,液化后的热融胶层在重力作用下流至电路板上,并在发光芯片的两侧形成胶柱,生长基板上的发光芯片被从生长基板剥离后则沿着其两侧的胶柱所形成的通道分别落至各自对应的芯片键合区上,从而实现将发光芯片直接转移至电路板上,整个过程不需要将发光芯片从生长基板转移至临时基板,再从临时基板转移至转移基板,也不再需要制备临时基板、转移基板,转移效率更高,且转移成本更低。且发光芯片在从生长基板落至电路板上对应的芯片键合区时,是沿着其两侧的胶柱所形成的通道下落的,从而可保证发光芯片精确的落至其对应的芯片键合区,且由于其两侧胶柱的限位,还可避免发光芯片在下落过程中发生翻转或倾斜等,可进一步提升芯片转移键合的质量和可靠性。In this embodiment, when transferring the light-emitting chip on the growth substrate to the circuit board, after the side of the growth substrate on which the light-emitting chip is grown and the side of the circuit board provided with the chip bonding area are arranged to face each other, the thermal The melt layer is heated to at least liquefy the area covering the bottom surface of the light-emitting chip, and the liquefied hot-melt glue layer flows to the circuit board under the action of gravity, and forms glue columns on both sides of the light-emitting chip, and the light-emitting chip on the growth substrate is After being peeled off from the growth substrate, the channels formed by the glue columns on both sides fall to the corresponding chip bonding areas respectively, so as to realize the direct transfer of the light-emitting chip to the circuit board. The whole process does not need to remove the light-emitting chip from the The growth substrate is transferred to the temporary substrate, and then transferred from the temporary substrate to the transfer substrate. It is no longer necessary to prepare the temporary substrate and the transfer substrate, and the transfer efficiency is higher and the transfer cost is lower. And when the light-emitting chip falls from the growth substrate to the corresponding chip bonding area on the circuit board, it falls along the channel formed by the glue columns on both sides, so as to ensure that the light-emitting chip falls accurately to its corresponding chip bond. And due to the limitation of the glue columns on both sides, it can also avoid the flipping or tilting of the light-emitting chip during the falling process, which can further improve the quality and reliability of chip transfer bonding.
本实施例中的电路板可以为显示背板,也可以为照明用的各种电路板,且可以为柔性电路板,也可以为刚性电路板。为显示背板时,该显示背板可以为但不限于玻璃背板或PCB板。The circuit board in this embodiment may be a display backplane, or various circuit boards for lighting, and may be a flexible circuit board or a rigid circuit board. When it is a display backplane, the display backplane may be, but not limited to, a glass backplane or a PCB board.
本实施例中的电路板上设有多个芯片键合区,芯片键合区内设有与发光芯片的正电极和负电极各自对应的焊盘。应当理解的是,各芯片键合区的个数以及在电路板上的分布可以根据应用需求灵活设置,例如各芯片键合区可以在电路板上呈阵列分布,也可按其他规则灵活分布甚至根据需求可灵活分布;在一些应用示例中,为了便于直接从生长基板上将发光芯片转移至电路板上,各芯片键合区在电路板上的分布可与生长基板上相应发光芯片的布局和位置对应分布。In this embodiment, a plurality of chip bonding areas are provided on the circuit board, and bonding pads corresponding to the positive electrodes and the negative electrodes of the light-emitting chip are provided in the chip bonding areas. It should be understood that the number of bonding areas of each chip and the distribution on the circuit board can be flexibly set according to application requirements. For example, the bonding areas of each chip can be distributed in an array on the circuit board, or can be flexibly distributed or even It can be flexibly distributed according to requirements; in some application examples, in order to facilitate the transfer of light-emitting chips directly from the growth substrate to the circuit board, the distribution of each chip bonding area on the circuit board can be consistent with the layout and layout of the corresponding light-emitting chips on the growth substrate. The location corresponds to the distribution.
在本实施例中,热融胶层可以为一体成型的一整层胶层,也可以包括若干热融胶单元,一个热融胶单元对应一颗发光芯片,各热融胶单元相互分离,热融胶单元将其对应的发光芯片的底面部分覆盖,发光芯片的电极裸露于热融胶层。In this embodiment, the hot-melt adhesive layer can be an integrally formed whole layer of adhesive layer, and can also include several hot-melt adhesive units, one hot-melt adhesive unit corresponds to one light-emitting chip, and each hot-melt adhesive unit is separated from each other. The glue-melting unit partially covers the bottom surface of its corresponding light-emitting chip, and the electrodes of the light-emitting chip are exposed to the hot-melt glue layer.
另外,应当理解的是,在本实施例中,一个芯片键合区内可以设置一颗发光芯片,也可根据需求设置多颗发光芯片,设置多颗发光芯片时,这多颗发光芯片在一次芯片转移过程中完成转移。In addition, it should be understood that, in this embodiment, one light-emitting chip can be set in one chip bonding area, and multiple light-emitting chips can also be set according to requirements. The transfer is done during the chip transfer process.
在本实施例的一些示例中,热熔胶层与发光芯片的正电极、负电极之间存在间隙,也即热熔胶层不直接接触发光芯片的电极。这主要是因为制备生长基板组件时,在生长基板与发光芯片上设置热熔胶层时,发光芯片的正电极与负电极是被其他保护结构(即牺牲层单元)覆盖保护着的,因此,热熔胶不会直接覆盖在发光芯片正电极、负电极的表面,二者间被牺牲层单元间隔。即便后续将牺牲层单元去除后,热熔胶层与发光芯片正电极、负电极之间也还是会有一定的间隙。In some examples of this embodiment, there is a gap between the hot melt adhesive layer and the positive electrode and the negative electrode of the light emitting chip, that is, the hot melt adhesive layer does not directly contact the electrodes of the light emitting chip. This is mainly because when preparing the growth substrate assembly, when the hot melt adhesive layer is set on the growth substrate and the light-emitting chip, the positive electrode and negative electrode of the light-emitting chip are covered and protected by other protective structures (that is, the sacrificial layer unit). Therefore, The hot melt adhesive will not directly cover the surface of the positive electrode and the negative electrode of the light-emitting chip, and the two are separated by a sacrificial layer unit. Even if the sacrificial layer unit is subsequently removed, there will still be a certain gap between the hot melt adhesive layer and the positive and negative electrodes of the light-emitting chip.
在本实施例的部分示例中,生长基板组件中除了包括生长基板、发光芯片、热熔胶层之外,还包括有若干牺牲层单元,牺牲层单元与发光芯片一一对应,其覆盖发光芯片正电极、负电极以及正电极和负电极之间的区域。也就是说,在这种生长基板组件的最终形态中,牺牲层单元并没有被去除,而是保留下来。可以理解的是,相较于去除牺牲层单元的生长基板组件,保留发光芯片上的牺牲层单元可以在运输生长基板组件的过程中,利用牺牲层单元对发光芯片的电极以及两电极之间的区域进行保护,维护发光芯片的品质。当然,如果在制备生长基板组件的过程就去除牺牲层单元,这自然可以方便后续对生长基板组件的应用,例如在利用生长基板组件制备显示面板时,就不需要进行牺牲层单元的去除,有利于提升显示面板的制备效率,降低显示面板生产厂家的负担,从而提升生长基板组件的市场竞争力。In some examples of this embodiment, in addition to the growth substrate, the light-emitting chip, and the hot-melt adhesive layer, the growth substrate assembly also includes several sacrificial layer units. The sacrificial layer units correspond to the light-emitting chips one by one, and cover the light-emitting chip The positive electrode, the negative electrode, and the area between the positive and negative electrodes. That is to say, in the final form of the growth substrate assembly, the sacrificial layer unit is not removed, but remains. It can be understood that, compared with the growth substrate assembly in which the sacrificial layer unit is removed, the sacrificial layer unit on the light-emitting chip can be used in the process of transporting the growth substrate assembly. Protect the area and maintain the quality of the light-emitting chip. Of course, if the sacrificial layer unit is removed during the preparation of the growth substrate assembly, this will naturally facilitate the subsequent application of the growth substrate assembly. For example, when the growth substrate assembly is used to prepare a display panel, it is not necessary to remove the sacrificial layer unit. It is beneficial to improve the preparation efficiency of the display panel, reduce the burden on the display panel manufacturer, and thus enhance the market competitiveness of the growth substrate component.
在一些示例中,牺牲层单元为光刻胶层单元,采用正性光刻胶或负性光刻胶制备均可。在另一些示例中,牺牲层单元可以为聚乙烯醇层单元。In some examples, the sacrificial layer unit is a photoresist layer unit, which can be prepared by positive photoresist or negative photoresist. In other examples, the sacrificial layer unit may be a polyvinyl alcohol layer unit.
为了便于理解,下面结合几种示例的生长基板组件结构进行说明。For ease of understanding, descriptions are given below in conjunction with several exemplary growth substrate assembly structures.
一种示例的生长基板组件参见图2至图3所示,其包括生长基板4,在生长基板4上形成的若干发光芯片5,各发光芯片5的底面上设有电极50,也即电极50位于发光芯片5远离生长基板4的一面上,电极50包括正电极和负电极。生长基板组件还包括设置于生长基板4上,将各发光芯片5的底面的至少一部分覆盖的热融胶层6。在本示例中,热融胶层6与发光芯片5的电极50(即正电极和负电极)齐平正电极、负电极以及二者之间的区域裸露于热融胶层6,热融胶层6也可略高于或略低于电极50。本示例中的热融胶层6为一体成型的胶层,也即各发光芯片5之间的间隙也被热融胶层6填充覆盖。An exemplary growth substrate assembly is shown in FIG. 2 to FIG. 3, which includes a growth substrate 4, a number of light-emitting chips 5 formed on the growth substrate 4, and an electrode 50 is provided on the bottom surface of each light-emitting chip 5, that is, an electrode 50 Located on the side of the light-emitting chip 5 away from the growth substrate 4 , the electrodes 50 include a positive electrode and a negative electrode. The growth substrate assembly further includes a hot-melt adhesive layer 6 disposed on the growth substrate 4 and covering at least a part of the bottom surface of each light-emitting chip 5 . In this example, the hot-melt adhesive layer 6 is flush with the electrodes 50 of the light-emitting chip 5 (i.e., the positive electrode and the negative electrode). 6 can also be slightly higher or slightly lower than the electrode 50. The hot-melt adhesive layer 6 in this example is an integrally formed adhesive layer, that is, the gaps between the light-emitting chips 5 are also filled and covered by the hot-melt adhesive layer 6 .
另一种示例的生长基板组件参见图4所示,其包括生长基板4,在生长基板4上形成的若干发光芯片5,各发光芯片5的底面上设有电极50(包括正电极和负电极)。生长基板组件还包括设置于生长基板4上,将各发光芯片5的底面的至少一部分覆盖的热融胶层6。在本示例中,热融胶层6与发光芯片5的电极50齐平,也可略高于或略低于电极50。本示例中的热融胶层6包括若干个热融胶单元61,一个热融胶单元61对应一颗发光芯片5,各热融胶单元61相互分离,热融胶单元61将其对应的发光芯片5的底面部分覆盖,发光芯片5底面的包括正电极、负电极以及二者之间内的区域裸露于热融胶单元61。本实施例中的热融胶单元61的形状可以灵活设置,例如可以为图4所示的弧形,也可以为图5所示的矩形组成,当然还可为其他规则形状,也可为不规则形状,在此对其不做任何限制。Another exemplary growth substrate assembly is shown in FIG. 4, which includes a growth substrate 4, a number of light-emitting chips 5 formed on the growth substrate 4, and electrodes 50 (including positive electrodes and negative electrodes) are provided on the bottom surface of each light-emitting chip 5. ). The growth substrate assembly further includes a hot-melt adhesive layer 6 disposed on the growth substrate 4 and covering at least a part of the bottom surface of each light-emitting chip 5 . In this example, the hot-melt adhesive layer 6 is flush with the electrode 50 of the light-emitting chip 5 , and may be slightly higher or slightly lower than the electrode 50 . The hot-melt glue layer 6 in this example includes several hot-melt glue units 61, one hot-melt glue unit 61 corresponds to a light-emitting chip 5, and each hot-melt glue unit 61 is separated from each other, and the hot-melt glue unit 61 lights up its corresponding light-emitting chip 5. The bottom surface of the chip 5 is partially covered, and the bottom surface of the light-emitting chip 5 including the positive electrode, the negative electrode and the area between them are exposed to the hot-melt adhesive unit 61 . The shape of the hot-melt adhesive unit 61 in this embodiment can be set flexibly, for example, it can be an arc as shown in Figure 4, or it can be a rectangle as shown in Figure 5, and of course it can also be other regular shapes, or it can be different. Regular shape, without any limitation here.
应当理解的是,本实施例中,热融胶层也可以将发光芯片正电极和负电极之间的区域中的至少一部分覆盖,只要保证覆盖该区域的热融胶在受热变为液态后能沿着发光芯片两侧流至电路板上形成胶柱即可。It should be understood that, in this embodiment, the hot-melt adhesive layer can also cover at least a part of the area between the positive electrode and the negative electrode of the light-emitting chip, as long as it is ensured that the hot-melt adhesive covering this area can be turned into a liquid state after being heated. Flow along both sides of the light-emitting chip to the circuit board to form a glue column.
根据前述介绍可知,发光芯片5的正电极、负电极及正电极与负电极之间的区域裸露于热熔胶层6,仅意味着正电极、负电极以及两电极之间的区域不会被热熔胶层6完全包覆,它们各有部分区域外露于热熔胶层6,例如通常情况下,电极50自由端的端面可以外露于热熔胶层6,这主要是为了便于后续可以直接将发光芯片5的电极50与电路板上的焊盘进行共晶键合。在本实施例的一些示例中,发光芯片5的电极50虽然裸露于热熔胶层6,但电极50也可以与热熔胶层6接触,也即电极50上存在部分区域被热熔胶层6覆盖,例如在图3与图5的发光芯片50中,其电极50的侧面可以有部分区域被热熔胶层6覆盖。不过还有一些示例中,请继续参见图4,热熔胶层6与发光芯片5的电极50之间无直接接触,热熔胶单元61与发光芯片5的正电极及负电极之间均存在一定的间隙。可以理解的是,相较于热熔胶层6直接接触电极50的情况,在二者间设置间隙的方案可以避免热熔胶层6影响发光芯片5与电路板的键合,有利于提升生长基板组件中发光芯片5的应用品质。According to the foregoing introduction, it can be seen that the positive electrode, the negative electrode, and the area between the positive electrode and the negative electrode of the light-emitting chip 5 are exposed to the hot melt adhesive layer 6, which only means that the positive electrode, the negative electrode, and the area between the two electrodes will not be covered. The hot-melt adhesive layer 6 is completely covered, and they each have some areas exposed to the hot-melt adhesive layer 6. For example, in general, the end face of the free end of the electrode 50 can be exposed to the hot-melt adhesive layer 6. The electrodes 50 of the light-emitting chip 5 are eutectically bonded to the pads on the circuit board. In some examples of this embodiment, although the electrode 50 of the light-emitting chip 5 is exposed to the hot melt adhesive layer 6, the electrode 50 can also be in contact with the hot melt adhesive layer 6, that is, there is a part of the electrode 50 covered by the hot melt adhesive layer. 6, for example, in the light-emitting chip 50 shown in FIG. 3 and FIG. However, in some examples, please continue to refer to FIG. 4, there is no direct contact between the hot melt adhesive layer 6 and the electrode 50 of the light-emitting chip 5, and there are A certain gap. It can be understood that, compared with the situation where the hot melt adhesive layer 6 directly contacts the electrode 50, the solution of setting a gap between the two can prevent the hot melt adhesive layer 6 from affecting the bonding of the light emitting chip 5 and the circuit board, which is conducive to improving the growth rate. The application quality of the light-emitting chip 5 in the substrate assembly.
在本实施例的一些示例中还提供另外一种生长基板组件,请参见图6所示,该生长基板组件当中,还包括牺牲层单元7,牺牲层单元7与发光芯片5一一对应,其位于发光芯片5的底面上,对发光芯片5的电极50进行包覆,以在确保在制备生长基板组件的过程中,热熔胶层6不会对发光芯片5的电极50进行全包覆。可以理解的是,在生长基板组件的应用过程中,牺牲层单元7会先于热熔胶层6被去除,例如牺牲层单元7可能会通过湿法刻蚀的方式去除,因此,在本实施例中,选择牺牲层单元7的材质时,应当保证牺牲层单元7具有至少一种满足要求的去除方式,该满足要求的去除方式需要确保基本不会影响热熔胶层6,更不能影响发光芯片5。在本实施例的一些示例中,牺牲层单元7可以选择光刻胶或者是聚乙烯醇形成。In some examples of this embodiment, another growth substrate assembly is provided, as shown in FIG. Located on the bottom surface of the light-emitting chip 5, the electrode 50 of the light-emitting chip 5 is covered to ensure that the hot melt adhesive layer 6 does not completely cover the electrode 50 of the light-emitting chip 5 during the process of preparing the growth substrate assembly. It can be understood that during the application process of the growth substrate assembly, the sacrificial layer unit 7 will be removed before the hot melt adhesive layer 6, for example, the sacrificial layer unit 7 may be removed by wet etching, therefore, in this embodiment In this example, when selecting the material of the sacrificial layer unit 7, it should be ensured that the sacrificial layer unit 7 has at least one removal method that meets the requirements, and the removal method that meets the requirements needs to ensure that the hot melt adhesive layer 6 is basically not affected, let alone the luminescence chip5. In some examples of this embodiment, the sacrificial layer unit 7 can be formed of photoresist or polyvinyl alcohol.
在本实施例的一些示例中,牺牲层单元7可以采用包括但不限于点胶、涂覆等方式设置于发光芯片5的底面上。在一些示例中,牺牲层单元7可以对发光芯片5的电极50,以及两电极50之间的区域形成全包覆,如图6所示。在这种情况下,后续应用生长基板组件的过程中,当牺牲层单元7被去除之后,热熔胶层6与电极50之间就会存在一个间隙,类似于图4所示。还有一些示例中,牺牲层单元7覆盖电极50自由端的端面以及两电极50之间的区域,但电极50侧面的部分区域并不会被牺牲层单元7覆盖,在一些示例中,热熔胶层6会覆盖在电极50侧面未被牺牲层单元7覆盖的区域上,也即热熔胶层6可能会与发光芯片5的电极50的部分区域直接接触。In some examples of this embodiment, the sacrificial layer unit 7 may be disposed on the bottom surface of the light-emitting chip 5 by means including but not limited to dispensing, coating, and the like. In some examples, the sacrificial layer unit 7 can completely cover the electrode 50 of the light emitting chip 5 and the area between the two electrodes 50 , as shown in FIG. 6 . In this case, during the subsequent application of the growth substrate assembly, after the sacrificial layer unit 7 is removed, there will be a gap between the hot melt adhesive layer 6 and the electrode 50 , similar to that shown in FIG. 4 . In some examples, the sacrificial layer unit 7 covers the end face of the free end of the electrode 50 and the area between the two electrodes 50, but the partial area on the side of the electrode 50 will not be covered by the sacrificial layer unit 7. In some examples, hot melt adhesive The layer 6 will cover the area on the side of the electrode 50 that is not covered by the sacrificial layer unit 7 , that is, the hot melt adhesive layer 6 may be in direct contact with a part of the electrode 50 of the light emitting chip 5 .
可以理解的是,由于在制备生长基板组件时,是先设置牺牲层单元7,然后形成热熔胶层6,因此,在后设置的热熔胶层6可能会覆盖至在先设置的牺牲层单元7的部分区域上,请继续参见图6。It can be understood that, since the sacrificial layer unit 7 is set first when the growth substrate assembly is prepared, and then the hot-melt adhesive layer 6 is formed, the hot-melt adhesive layer 6 set later may cover the sacrificial layer set earlier. For some areas of unit 7, please continue to refer to FIG. 6 .
本实施例中的生长基板4可以包括但不限于生长红光发光芯片的生长基板,生长绿光发光芯片的生长基板,生长蓝光发光芯片的生长基板,生长紫外光发光芯片的生长基板等,具体可根据应用需求灵活设置。本实施例中,将生长基板4上的发光芯片5转移至电路板上时,将该生长基板4生长有发光芯片5的一面与电路板设有芯片键合区的一面对位设置后,对热融胶层6加热至少使覆盖在发光芯片5底面上的区域液化,液化后的热融胶层6在重力作用下流至电路板上,并在发光芯片的两侧形成胶柱,此时生长基板4上的发光芯片5被从生长基板4剥离后则分别沿其两侧的胶柱所构成的通道落至各自对应的芯片键合区上,从而实现将发光芯片5直接并精确的转移至电路板上,整个过程快速、简便,不需要将发光芯片从生长基板转移至临时基板,再从临时基板转移至转移基板,也不再需要制备临时基板、转移基板,转移效率更高,且转移成本更低。The growth substrate 4 in this embodiment may include, but not limited to, a growth substrate for growing red light-emitting chips, a growth substrate for growing green light-emitting chips, a growth substrate for growing blue light-emitting chips, a growth substrate for growing ultraviolet light-emitting chips, etc. It can be flexibly set according to application requirements. In this embodiment, when the light-emitting chip 5 on the growth substrate 4 is transferred to the circuit board, after the side of the growth substrate 4 on which the light-emitting chip 5 is grown and the side of the circuit board where the chip bonding area is provided face to face, Heat the hot-melt adhesive layer 6 to at least liquefy the area covering the bottom surface of the light-emitting chip 5, and the liquefied hot-melt adhesive layer 6 flows to the circuit board under the action of gravity, and forms glue columns on both sides of the light-emitting chip. After the light-emitting chip 5 on the growth substrate 4 is peeled off from the growth substrate 4, it falls to the corresponding chip bonding area along the channels formed by the glue columns on both sides, so as to realize the direct and precise transfer of the light-emitting chip 5 On the circuit board, the whole process is fast and simple, and there is no need to transfer the light-emitting chip from the growth substrate to the temporary substrate, and then from the temporary substrate to the transfer substrate, and it is no longer necessary to prepare the temporary substrate and the transfer substrate, the transfer efficiency is higher, and Transfer costs are lower.
另一可选实施例:Another optional embodiment:
为了便于理解,本实施例下面以上述生长基板组件的一种示例制作方法进行说明,参见图7所示,其包括但不限于:For ease of understanding, this embodiment will be described below with an example manufacturing method of the above-mentioned growth substrate assembly, as shown in FIG. 7 , which includes but is not limited to:
S701:在生长基板上生长若干发光芯片,若干发光芯片底面上生长有电极(包括正电极和负电极),发光芯片底面为发光芯片远离生长基板的一面。S701: growing several light-emitting chips on the growth substrate, electrodes (including positive electrodes and negative electrodes) are grown on the bottom surfaces of the several light-emitting chips, and the bottom surface of the light-emitting chips is the side away from the growth substrate of the light-emitting chips.
应当理解的是,本实施例中在生长基板上生长发光芯片的方式,可以采用各种发光芯片的生长方式,在此对其不做限制。It should be understood that, in this embodiment, various light-emitting chip growth methods may be used for growing the light-emitting chip on the growth substrate, which is not limited here.
S702:分别在各发光芯片的底面上设置牺牲层单元,各牺牲层单元分别将各发光芯片底面上的正电极、负电极以及正电极和负电极之间的区域覆盖。S702: Arrange sacrificial layer units on the bottom surface of each light-emitting chip, and each sacrificial layer unit covers the positive electrode, the negative electrode, and the area between the positive electrode and the negative electrode on the bottom surface of each light-emitting chip.
在本实施例中,各牺牲层单元的尺寸、形状不做限制,只需要将发光芯片的正电极、负电极以及二者之间的区域完全覆盖且未将发光芯片的底面全部覆盖即可。In this embodiment, the size and shape of each sacrificial layer unit is not limited, it only needs to completely cover the positive electrode, the negative electrode and the area between the two of the light-emitting chip and not completely cover the bottom surface of the light-emitting chip.
在本实施例中,牺牲层单元的形成方式,以及具体材质可以灵活选择,例如,一些示例中,牺牲层单元可以为但不限于为光刻胶层单元或聚乙烯醇层单元。只要后续在其上形成热熔胶层后,能将其清除即可。可以理解的是,在使用生长基板组件制备发光组件(例如显示面板)时,需要将生长基板组件中的发光芯片转移并键合到对应的电路板上,在这种情况下,不仅需要将发光芯片从生长基板上、热熔胶层中剥离出来,而且还需要去除附着在发光芯片底面的牺牲层单元。所以,牺牲层In this embodiment, the formation method and specific material of the sacrificial layer unit can be flexibly selected. For example, in some examples, the sacrificial layer unit can be but not limited to a photoresist layer unit or a polyvinyl alcohol layer unit. As long as the hot melt adhesive layer is subsequently formed on it, it can be removed. It can be understood that when using a growth substrate assembly to prepare a light-emitting assembly (such as a display panel), it is necessary to transfer and bond the light-emitting chip in the growth substrate assembly to a corresponding circuit board. The chip is peeled off from the growth substrate and the hot melt adhesive layer, and the sacrificial layer unit attached to the bottom surface of the light-emitting chip needs to be removed. Therefore, the sacrificial layer
S703:在生长基板上形成热融胶层,热融胶层将若干发光芯片的底面部分覆盖,牺牲层单元裸露于热融胶层,以便于后续牺牲层单元的清除。S703: forming a hot-melt adhesive layer on the growth substrate, the hot-melt adhesive layer partially covers the bottom surfaces of the plurality of light-emitting chips, and the sacrificial layer units are exposed to the hot-melt adhesive layer, so as to facilitate subsequent removal of the sacrificial layer units.
S704:在热融胶层固化后,去除各牺牲层单元,使得各发光芯片底面上的正电极、负电极以及正电极和负电极之间的区域裸露于热融胶层。S704: After the hot-melt adhesive layer is cured, remove each sacrificial layer unit, so that the positive electrode, the negative electrode, and the area between the positive electrode and the negative electrode on the bottom surface of each light-emitting chip are exposed to the hot-melt adhesive layer.
例如在牺牲层单元为光刻胶单元时,可将光刻胶单元清洗掉,从而使得被其覆盖的发光芯片的电极裸露于热融胶层。For example, when the sacrificial layer unit is a photoresist unit, the photoresist unit can be washed away, so that the electrode of the light emitting chip covered by it is exposed to the hot melt adhesive layer.
在Micro-LED显示领域, 由于向显示背板上转移的Micro-LED芯片数基本都是数万以上级别。因此在完成Micro-LED芯片后,对显示背板上出现的坏点难以检测,且即使检测出坏点,也难以对其进行修复,即使对其进行修复,修复过程也比较繁杂。另外,现有进行Micro-LED芯片转移时,对生长基板上的Micro-LED芯片进行整面性的激光剥离,所有Micro-LED芯片均被转移至临时基板,导致最终制备的Micro-LED显示器件上芯片的质量不可控,后期维修成本比较高;另外由于不能预先挑选Micro-LED芯片的发光波长,最终制备的显示器件发光均匀性不佳。针对该问题,在本实施例中,上述S702步骤中,分别在各发光芯片的底面上设置牺牲层单元之前,还可包括但不限于:In the field of Micro-LED display, the number of Micro-LED chips transferred to the display backplane is basically tens of thousands or more. Therefore, after the Micro-LED chip is completed, it is difficult to detect the dead pixels on the display backplane, and even if the bad pixels are detected, it is difficult to repair them. Even if they are repaired, the repair process is complicated. In addition, when transferring Micro-LED chips, the entire surface of the Micro-LED chips on the growth substrate is lifted off by laser, and all Micro-LED chips are transferred to the temporary substrate, resulting in the final preparation of Micro-LED display devices. The quality of the upper chip is uncontrollable, and the maintenance cost in the later stage is relatively high; in addition, because the light-emitting wavelength of the Micro-LED chip cannot be selected in advance, the final display device has poor light-emitting uniformity. To solve this problem, in this embodiment, in the above step S702, before setting the sacrificial layer unit on the bottom surface of each light-emitting chip, it may also include but not limited to:
对生长基板上的各发光芯片进行检测,将检测不合格的发光芯片从生长基板上去除;从而使得留在生长基板上的发光芯片都是合格的发光芯片,尽量避免转移至电路板上的发光芯片出现坏点的情况发生,从而尽量避免后续进行坏点的检测和修复,提升产品质量并降低维护成本。Detect each light-emitting chip on the growth substrate, and remove the unqualified light-emitting chip from the growth substrate; so that the light-emitting chips left on the growth substrate are all qualified light-emitting chips, and try to avoid the light-emitting chips transferred to the circuit board. The occurrence of dead pixels on the chip, so as to avoid subsequent detection and repair of dead pixels as much as possible, improve product quality and reduce maintenance costs.
在本实施例中,对生长基板上的各发光芯片进行检测可包括但不限于以下至少之一:In this embodiment, detecting each light-emitting chip on the growth substrate may include but not limited to at least one of the following:
对各发光芯片的外观进行检测;Detect the appearance of each light-emitting chip;
对各发光芯片的光学特性进行检测。The optical characteristics of each light-emitting chip are detected.
例如,在一种示例中,可以通过先不限于通过Micro PL/AOI检测方式,提前对生长基板上的发光芯片的光学特定和外观质量,生成相应的mapping data,从而从中确定出不合格的发光芯片并将其从生长基板上移除。For example, in one example, the optical specificity and appearance quality of the light-emitting chip on the growth substrate can be generated in advance by not limited to the Micro PL/AOI detection method, and the corresponding mapping data can be generated to determine the unqualified light emission. chip and remove it from the growth substrate.
在本实施例的一些示例中,对各发光芯片的光学特性进行检测可包括但不限于:对各发光芯片的主波长main wavelength进行检测,对于主波长与预设标准主波长的差值大于预设差值的发光芯片判定为不合格的发光芯片,从而使得保留在生长基板上的发光芯片的主波长一致性好,进而提升发光组件的发光均匀性更高,使其显示效果或照明效果更佳。In some examples of this embodiment, detecting the optical characteristics of each light-emitting chip may include but not limited to: detecting the main wavelength of each light-emitting chip, and if the difference between the main wavelength and the preset standard main wavelength is greater than the preset The light-emitting chip with the difference value is judged as an unqualified light-emitting chip, so that the dominant wavelength consistency of the light-emitting chip remaining on the growth substrate is good, and the uniformity of light emission of the light-emitting component is improved, so that the display effect or lighting effect is better. good.
为了便于理解,下面以牺牲层单元为光刻胶层单元,对制作图4所示的生长基板组件的过程为示例进行说明;对于图3、图5中所示的生长基板组件制作过程类似,在此不再一一赘述。For ease of understanding, the following uses the sacrificial layer unit as the photoresist layer unit to illustrate the process of manufacturing the growth substrate assembly shown in Figure 4 as an example; the manufacturing process of the growth substrate assembly shown in Figure 3 and Figure 5 is similar, No more details here.
制作图4所示的生长基板组件的一种示例参见图8所示,其包括但不限于:An example of making the growth substrate assembly shown in Figure 4 is shown in Figure 8, which includes but is not limited to:
S801:在生长基板4上生长若干发光芯片5,若干发光芯片5的底面上生长有电极50(包括正极电极和负电极),发光芯片5的底面为发光芯片5远离生长基板的一面。S801: grow several light-emitting chips 5 on the growth substrate 4, electrodes 50 (including positive electrodes and negative electrodes) are grown on the bottom surfaces of the several light-emitting chips 5, and the bottom surface of the light-emitting chips 5 is the side away from the growth substrate of the light-emitting chips 5.
应当理解的是,本示例中在生长基板上生长发光芯片5的方式,可以采用各种发光芯片5的生长方式,在此不再赘述。It should be understood that, the way of growing the light-emitting chip 5 on the growth substrate in this example can adopt various ways of growing the light-emitting chip 5 , which will not be repeated here.
S802:分别在各发光芯片5的底面上设置牺牲层单元7,各牺牲层单元7分别将各发光芯片底面上的正电极、负电极以及正电极和负电极之间的区域覆盖。S802: Set sacrificial layer units 7 on the bottom surfaces of the light emitting chips 5 respectively, and each sacrificial layer unit 7 respectively covers the positive electrode, the negative electrode and the area between the positive electrodes and the negative electrodes on the bottom surface of each light emitting chip.
在本示例中,各牺牲层单元7形状为弧形,且各牺牲层单元7的形状相同, 当然也可一部分相同,一部分不同。且其形状并不限于弧形,也可为矩形等,在此不再赘述。In this example, the shape of each sacrificial layer unit 7 is arc, and the shape of each sacrificial layer unit 7 is the same, of course, some of them may be the same and some of them may be different. And its shape is not limited to arc, it can also be rectangular, etc., which will not be repeated here.
S803:在生长基板4上形成若干个热融胶单元61,若干个热融胶单元61分别将若干发光芯片5的底面的一部分覆盖,牺牲层单元7裸露于热融胶单元61,以便于后续牺牲层单元7的清除。S803: Forming several hot-melt glue units 61 on the growth substrate 4, the several hot-melt glue units 61 respectively cover a part of the bottom surface of several light-emitting chips 5, and the sacrificial layer unit 7 is exposed to the hot-melt glue units 61, so as to facilitate subsequent Removal of the sacrificial layer unit 7.
S804:在热融胶层固化后,去除各牺牲层单元7,使得各发光芯片5底面上的正电极、负电极以及正电极和负电极之间的区域裸露于热融胶单元61,从而制得图4所示的生长基板组件。S804: After the hot-melt adhesive layer is cured, remove each sacrificial layer unit 7, so that the positive electrode, the negative electrode, and the area between the positive electrode and the negative electrode on the bottom surface of each light-emitting chip 5 are exposed to the hot-melt adhesive unit 61, thereby manufacturing The growth substrate assembly shown in Figure 4 was obtained.
应当理解的是,如果需要制得的生长基板组件为图6所示的生长基板组件,则可以不必进行牺牲层单元7的去除,当热熔胶层固化之后,就可以直接制得生长基板组件。It should be understood that, if the growth substrate assembly to be prepared is the growth substrate assembly shown in FIG. 6 , it is not necessary to remove the sacrificial layer unit 7, and the growth substrate assembly can be directly produced after the hot melt adhesive layer is solidified. .
可见,本实施例提供的生长基板组件制作方法简单便捷,且效率高。将该生长基板组件上的发光芯片转移至电路板上时,不再需要将发光芯片从生长基板转移至临时基板,再从临时基板转移至转移基板,也不再需要制备临时基板、转移基板,芯片转移效率更高,且转移成本更低。It can be seen that the manufacturing method of the growth substrate assembly provided by this embodiment is simple, convenient and efficient. When the light-emitting chip on the growth substrate assembly is transferred to the circuit board, it is no longer necessary to transfer the light-emitting chip from the growth substrate to the temporary substrate, and then from the temporary substrate to the transfer substrate, and it is no longer necessary to prepare the temporary substrate and the transfer substrate, The chip transfer efficiency is higher, and the transfer cost is lower.
又一可选实施例:Yet another optional embodiment:
本实施例还提供了一种发光组件,该发光组件利用上述各实施例中的生长基板组件制得。为了便于理解,本实施例下面以发光组件的制作方法为示例进行说明。请参见图9所示,发光组件的制作方法可包括但不限于:This embodiment also provides a light-emitting assembly, which is made by using the growth substrate assembly in the above-mentioned embodiments. For ease of understanding, this embodiment will be described below by taking a manufacturing method of a light-emitting component as an example. Please refer to Fig. 9, the manufacturing method of the light-emitting component may include but not limited to:
S901:制作生长基板组件;本实施例中可通过但不限于上述实施例所示的生长基板组件制作方法制得,在此不再赘述。S901: Fabricate a growth substrate assembly; in this embodiment, it can be produced by but not limited to the method for fabricating the growth substrate assembly shown in the above embodiments, and will not be repeated here.
S902:将生长基板生长有发光芯片的一面设于电路板之上,与电路板设有芯片键合区的一面对位设置。S902: Arranging the side of the growth substrate on which the light-emitting chip is grown on the circuit board, facing the side of the circuit board provided with the chip bonding area.
在本实施例中,将生长基板生长有发光芯片的一面设于电路板之上,与电路板设有芯片键合区的一面对位设置时,发光芯片的正电极和负电极与电路板上芯片键合区内对应的焊盘可直接接触,且热融胶层与电路板之间具有一定的间隙。In this embodiment, the side of the growth substrate on which the light-emitting chip is grown is placed on the circuit board, and when it is arranged opposite to the side of the circuit board provided with the chip bonding area, the positive electrode and the negative electrode of the light-emitting chip are in contact with the circuit board. The corresponding pads in the bonding area of the upper chip can be directly contacted, and there is a certain gap between the hot melt adhesive layer and the circuit board.
当然,在本实施例中,将生长基板生长有发光芯片的一面设于电路板之上,与电路板设有芯片键合区的一面对位设置时,发光芯片的电极与电路板上芯片键合区内对应的焊盘之间也可保留一定的间隙,且热融胶层与电路板之间具有一定的间隙。Of course, in this embodiment, when the side of the growth substrate on which the light-emitting chip is grown is arranged on the circuit board, and is arranged in a position opposite to the side of the circuit board provided with the chip bonding area, the electrodes of the light-emitting chip and the chip on the circuit board A certain gap can also be reserved between the corresponding pads in the bonding area, and there is a certain gap between the hot-melt adhesive layer and the circuit board.
S903:对热融胶层进行第一加热,使得热融胶层液化后流至所电路板上,在发光芯片的两侧形成胶柱。S903: performing first heating on the hot-melt adhesive layer, so that the hot-melt adhesive layer liquefies and then flows onto the circuit board to form adhesive columns on both sides of the light-emitting chip.
当然,对热融胶层进行第一加热后,也可使得热融胶层的其他区域液化。且本实施例中第一加热具体采用的温度和加热时间,可以根据热融胶层的具体材质和以及所需的热融胶层的液化状态灵活设置,在此对其不做限制。Of course, after the first heating of the hot-melt adhesive layer, other regions of the hot-melt adhesive layer may also be liquefied. Moreover, the temperature and heating time specifically adopted for the first heating in this embodiment can be flexibly set according to the specific material of the hot-melt adhesive layer and the required liquefaction state of the hot-melt adhesive layer, and there is no limitation here.
S904:将生长基板上的发光芯片与生长基板剥离,剥离后的发光芯片沿其两侧的胶柱所构成的通道分别落至各自对应的芯片键合区上。S904: Peel off the light-emitting chip on the growth substrate from the growth substrate, and drop the peeled light-emitting chip onto the respective corresponding chip bonding regions along the channels formed by the glue columns on both sides thereof.
本实施例中,将生长基板上的发光芯片与生长基板剥离的方式可以灵活采用,例如可以采用但不限于激光剥离方式。In this embodiment, the method of peeling off the light-emitting chip on the growth substrate from the growth substrate can be flexibly adopted, for example, but not limited to, laser lift-off method can be used.
本实施例中,发光芯片在从生长基板落至电路板上对应的芯片键合区时,是沿着其两侧的胶柱所形成的通道下落的,从而可保证发光芯片精确的落至其对应的芯片键合区,且由于其两侧胶柱的限位,还可避免发光芯片在下落过程中发生翻转或倾斜等,可进一步提升芯片转移键合的质量和可靠性。In this embodiment, when the light-emitting chip falls from the growth substrate to the corresponding chip bonding area on the circuit board, it falls along the channels formed by the glue columns on both sides, so as to ensure that the light-emitting chip falls accurately to its bonding area. The corresponding chip bonding area, and due to the limitation of the glue columns on both sides, can also prevent the light-emitting chip from flipping or tilting during the falling process, which can further improve the quality and reliability of chip transfer bonding.
S905:将热融胶层随生长基板一起移除,并将各芯片键合区内焊盘与对应的发光芯片的正电极和负电极连接。在本步骤中,由于生长基板是蓝宝石等材质的基板,电路板是密集覆盖的金属线路,以及无机保护层;热融胶层的特性是与金属的浸润性差,因此其与电路板更容易分离;另外,即使热融胶层有残留在电路板上,后续对发光芯片的电极和芯片键合区内的焊盘加热焊接时,热融胶层也会聚集在无金属焊料的地方,不会对发光芯片的电连接造成干扰。S905: Remove the hot-melt adhesive layer together with the growth substrate, and connect the pads in the bonding regions of each chip to the positive electrode and the negative electrode of the corresponding light-emitting chip. In this step, since the growth substrate is made of sapphire and other materials, the circuit board is densely covered with metal circuits and an inorganic protective layer; the characteristic of the hot-melt adhesive layer is that it has poor wettability with metal, so it is easier to separate from the circuit board ; In addition, even if the hot-melt adhesive layer remains on the circuit board, when the electrodes of the light-emitting chip and the pads in the chip bonding area are subsequently heated and welded, the hot-melt adhesive layer will also gather in the place where there is no metal solder, and will not Interfere with the electrical connection of the light-emitting chip.
在本实施例的一些示例中,为了便于热融胶胶层的移除,上述S905中将热融胶层随生长基板一起移除包括:In some examples of this embodiment, in order to facilitate the removal of the hot-melt adhesive layer, removing the hot-melt adhesive layer together with the growth substrate in S905 includes:
对热融胶层进行第二加热使其进一步液化后,再将热融胶层随生长基板一起移除。在本实施例的一些示例中,为了使得热熔胶层在经历第二加热后更好地跟随生长基板,可以选择从热熔胶层远离生长基板的一侧对其进行加热,这样热熔胶层远离生长基板一侧的部分会先熔化,热熔胶层与电路板之间的附着力减小;与此同时,热熔胶层靠近生长基板的一侧并未完全熔化,其与生长基板之间仍旧具有较大的结合力,这样可以保证热熔胶层被随着生长基板一同去除。After the hot-melt adhesive layer is heated for a second time to further liquefy, the hot-melt adhesive layer is removed together with the growth substrate. In some examples of this embodiment, in order to make the hot melt adhesive layer follow the growth substrate better after the second heating, it can be selected to heat the hot melt adhesive layer from the side away from the growth substrate, so that the hot melt adhesive The part of the layer away from the growth substrate will melt first, and the adhesion between the hot melt adhesive layer and the circuit board will be reduced; at the same time, the side of the hot melt adhesive layer close to the growth substrate is not completely melted, and its contact with the growth substrate There is still a large bonding force between them, which can ensure that the hot melt adhesive layer is removed along with the growth substrate.
可见,在制作发光组件中,可直接将生长基板生长有发光芯片的一面与电路板对位设置,然后对热融胶层加热至少使覆盖在发光芯片底面上的区域液化,液化后的热融胶层在重力作用下沿着发光芯片的两侧流至电路板上形成胶柱,此时生长基板上的发光芯片被从生长基板剥离后则分别沿着其两侧的胶柱所形成的通道落至各自对应的芯片键合区上,从而实现将发光芯片直接转移至电路板上,整个芯片转移过程都不再需要临时基板、转移基板或转移头,制作效率更高,且制作成本更低。It can be seen that in the production of light-emitting components, the side of the growth substrate on which the light-emitting chip is grown can be directly aligned with the circuit board, and then the hot-melt adhesive layer is heated to at least liquefy the area covering the bottom surface of the light-emitting chip. Under the action of gravity, the glue layer flows along both sides of the light-emitting chip to the circuit board to form glue columns. At this time, the light-emitting chips on the growth substrate are peeled off from the growth substrate, and then follow the channels formed by the glue columns on both sides. Falling onto the corresponding chip bonding area, so as to realize the direct transfer of the light-emitting chip to the circuit board, the entire chip transfer process does not need a temporary substrate, transfer substrate or transfer head, the production efficiency is higher, and the production cost is lower .
为了便于理解,本实施例下面结合一种应用场景为示例进行说明。在本应用场景中,设在电路板上设置的发光芯片为同一颜色的发光芯片,本应用场景中的发光组件的制作过程参见图10所示,其包括但不限于:For ease of understanding, this embodiment will be described below in conjunction with an application scenario as an example. In this application scenario, the light-emitting chips set on the circuit board are light-emitting chips of the same color. The manufacturing process of the light-emitting component in this application scenario is shown in Figure 10, which includes but is not limited to:
S1001:将生长基板4生长有发光芯片5的一面设于电路板8之上,与电路板8设有芯片键合区的一面对位设置,其中芯片键合区内设有与发光芯片5的正电极和负电极分别对应的焊盘81。S1001: Place the side of the growth substrate 4 on which the light-emitting chip 5 grows on the circuit board 8, and set it opposite to the side of the circuit board 8 provided with the chip bonding area, wherein the chip bonding area is provided with the light-emitting chip 5 The positive electrode and the negative electrode respectively correspond to the pads 81.
在本实施例中,将生长基板4生长有发光芯片5的一面设于电路板8之上,与电路板8设有芯片键合区的一面对位设置时,发光芯片5的正电极和负电极中的至少一个与电路板8上芯片键合区内对应的焊盘81可直接接触,例如参见图11所示,且热融胶单元61与电路板4之间具有一定的间隙。In this embodiment, when the side of the growth substrate 4 on which the light-emitting chip 5 is grown is placed on the circuit board 8, and is positioned opposite to the side of the circuit board 8 provided with the chip bonding area, the positive electrode of the light-emitting chip 5 and the At least one of the negative electrodes is in direct contact with the corresponding pad 81 in the chip bonding area on the circuit board 8 , as shown in FIG. 11 , and there is a certain gap between the hot melt glue unit 61 and the circuit board 4 .
当然,在本实施例中,将生长基板4生长有发光芯片5的一面设于电路板8之上,与电路板8设有芯片键合区的一面对位设置时,发光芯片5的正电极和负电极与电路板8上芯片键合区内对应的焊盘81之间也可保留一定的间隙,且热融胶单元61与电路板8之间具有一定的间隙,参见图10所示。Of course, in this embodiment, when the side of the growth substrate 4 on which the light-emitting chip 5 is grown is set on the circuit board 8, and is arranged in a position opposite to the side of the circuit board 8 provided with the chip bonding area, the front side of the light-emitting chip 5 A certain gap can also be reserved between the electrode and the negative electrode and the corresponding pad 81 in the chip bonding area on the circuit board 8, and there is a certain gap between the hot-melt glue unit 61 and the circuit board 8, as shown in FIG. 10 .
S1002:对热融胶单元61进行第一加热,使其至少覆盖在底面上的区域液化并在重力作用下沿着发光芯片5的两侧流至电路板上形成胶柱62,从而起到相对固定的效果,且该胶柱62形成供发光芯片5落至电路板上的通道;将生长基板4上的发光芯片5与生长基板4剥离,剥离后的发光芯片5分别沿着上述通道落至各自对应的芯片键合区上。S1002: First heat the hot-melt glue unit 61 to make it liquefy at least the area covered on the bottom surface and flow to the circuit board along the two sides of the light-emitting chip 5 under the action of gravity to form glue columns 62, so as to play a relatively fixed effect, and the glue column 62 forms a channel for the light-emitting chip 5 to fall onto the circuit board; the light-emitting chip 5 on the growth substrate 4 is peeled off from the growth substrate 4, and the peeled light-emitting chip 5 falls along the above-mentioned channel to the on the corresponding chip bonding area.
当然,对热融胶单元61进行第一加热后,也可使得热融胶单元61的其他区域液化。且本实施例中第一加热具体采用的温度和加热时间,可以根据热融胶单元61的具体材质和以及所需的热融胶单元61的液化状态灵活设置,在此对其不做限制。Of course, after the first heating of the hot-melt glue unit 61 , other regions of the hot-melt glue unit 61 may also be liquefied. Moreover, the temperature and heating time specifically adopted for the first heating in this embodiment can be flexibly set according to the specific material of the hot-melt glue unit 61 and the required liquefaction state of the hot-melt glue unit 61 , which is not limited here.
S1003: 将热融胶单元61随生长基板4一起移除,并将各芯片键合区内的焊盘81与各自对应的发光芯片5的正电极和负电极连接。S1003: Remove the hot-melt adhesive unit 61 together with the growth substrate 4, and connect the pads 81 in each chip bonding area to the positive electrodes and negative electrodes of the respective corresponding light-emitting chips 5.
例如可对热融胶单元61进行第二加热使其进一步液化后,再将热融胶单元61随生长基板一起移除。For example, the hot-melt glue unit 61 can be heated for a second time to further liquefy, and then the hot-melt glue unit 61 can be removed together with the growth substrate.
在本步骤中,即使热融胶有残留在电路板上,后续对发光芯片的电极和芯片键合区内的焊盘加热焊接时,热融胶层也会聚集在无焊料的地方,不会对发光芯片的电连接造成干扰。In this step, even if the hot-melt adhesive remains on the circuit board, when the electrodes of the light-emitting chip and the pads in the chip bonding area are subsequently heated and soldered, the hot-melt adhesive layer will gather in the place where there is no solder, and will not Interfere with the electrical connection of the light-emitting chip.
为了便于理解,本实施例下面结合另一种应用场景为示例进行说明。在本示例中,生长基板包括分别生长有第一发光芯片(例如为红光发光芯片)、第二发光芯片(例如为绿光发光芯片)和第三发光芯片(例如为蓝光发光芯片)的第一生长基板、第二生长基板和第三生长基板。For ease of understanding, this embodiment will be described below in conjunction with another application scenario as an example. In this example, the growth substrate includes a first light-emitting chip (for example, a red light-emitting chip), a second light-emitting chip (for example, a green light-emitting chip) and a third light-emitting chip (for example, a blue light-emitting chip). A growth substrate, a second growth substrate and a third growth substrate.
下面以依次分别向电路板转移第一发光芯片、第二发光芯片和第三发光芯片的过程为示例进行说明。The process of sequentially transferring the first light-emitting chip, the second light-emitting chip and the third light-emitting chip to the circuit board is taken as an example to describe below.
向电路板转移第一发光芯片的过程参见图12所示,包括:The process of transferring the first light-emitting chip to the circuit board is shown in Figure 12, including:
S1201:将第一生长基板41生长有第一发光芯片51的一面设于电路板8之上,与电路板8设有芯片键合区的一面对位设置,其中芯片键合区内设有与第一发光芯片51的正电极和负电极对应的焊盘81。S1201: Place the side of the first growth substrate 41 on which the first light-emitting chip 51 grows on the circuit board 8, and set it opposite to the side of the circuit board 8 provided with the chip bonding area, wherein the chip bonding area is provided with Pads 81 corresponding to positive and negative electrodes of the first light emitting chip 51 .
S1202:对热融胶单元61进行第一加热,使其至少覆盖在底面上的区域液化并在重力作用下沿第一发光芯片51的两侧流至电路板上形成胶柱62,从而起到相对固定以及形成供第一发光芯片51下落的通道的作用;将第一生长基板41上的第一发光芯片51与第一生长基板4剥离,剥离后的第一发光芯片51沿着其两侧的胶柱62所形成的通道分别落至各自对应的芯片键合区上。S1202: First heat the hot-melt glue unit 61 to make it liquefy at least the area covered on the bottom surface and flow to the circuit board along both sides of the first light-emitting chip 51 under the action of gravity to form glue columns 62, thereby Relatively fixed and the role of forming a channel for the first light-emitting chip 51 to fall; the first light-emitting chip 51 on the first growth substrate 41 is peeled off from the first growth substrate 4, and the first light-emitting chip 51 after peeling is along its two sides. The channels formed by the glue pillars 62 respectively fall on the respective corresponding chip bonding regions.
S1203:对热融胶单元61进行第二加热使其进一步液化后,将热融胶单元61随第一生长基板41一起移除。S1203: After the second heating is performed on the hot-melt glue unit 61 to further liquefy it, the hot-melt glue unit 61 is removed together with the first growth substrate 41 .
向电路板转移第二发光芯片的过程参见图13所示,包括:The process of transferring the second light-emitting chip to the circuit board is shown in Figure 13, including:
S1301:将第二生长基板42生长有第二发光芯片52的一面设于电路板8之上,与电路板8设有芯片键合区的一面对位设置,其中芯片键合区内设有与第二发光芯片52的正电极和负电极对应的焊盘81。S1301: Place the side of the second growth substrate 42 on which the second light-emitting chip 52 grows on the circuit board 8, and set it opposite to the side of the circuit board 8 provided with the chip bonding area, wherein the chip bonding area is provided with Pads 81 corresponding to positive and negative electrodes of the second light emitting chip 52 .
参见图13所示,之前转移的第一发光芯片51在电路板8上对后续转移的第二发光芯片52不会造成干扰。Referring to FIG. 13 , the previously transferred first light emitting chip 51 will not interfere with the subsequently transferred second light emitting chip 52 on the circuit board 8 .
S1302:对热融胶单元61进行第一加热使其至少覆盖在底面上的区域液化并在重力作用下沿第二发光芯片52的两侧流至电路板上形成胶柱62,从而起到相对固定以及形成供第二发光芯片52下落的通道的作用;并将第二生长基板42上的第二发光芯片52与第一生长基板4剥离,剥离后的第二发光芯片52沿着其两侧的胶柱62所形成的通道分别落至各自对应的芯片键合区上。S1302: First heat the hot-melt glue unit 61 to liquefy at least the area covered on the bottom surface and flow to the circuit board along the two sides of the second light-emitting chip 52 under the action of gravity to form the glue column 62, so as to play a relatively The role of fixing and forming a channel for the second light-emitting chip 52 to fall; and peeling the second light-emitting chip 52 on the second growth substrate 42 from the first growth substrate 4, and the peeled second light-emitting chip 52 along its two sides The channels formed by the glue pillars 62 respectively fall on the respective corresponding chip bonding regions.
S1303:可对热融胶单元61进行第二加热使其进一步液化后,将热融胶单元61随第二生长基板42一起移除。S1303: The hot-melt glue unit 61 may be heated for a second time to be further liquefied, and then the hot-melt glue unit 61 is removed together with the second growth substrate 42 .
向电路板转移第三发光芯片的过程参见图14所示,包括:The process of transferring the third light-emitting chip to the circuit board is shown in Figure 14, including:
S1401:将第三生长基板43生长有第三发光芯片53的一面设于电路板8之上,与电路板8设有芯片键合区的一面对位设置,其中芯片键合区内设有与第三发光芯片53的正电极和负电极对应的焊盘81。S1401: Place the side of the third growth substrate 43 on which the third light-emitting chip 53 grows on the circuit board 8, and set it opposite to the side of the circuit board 8 provided with the chip bonding area, wherein the chip bonding area is provided with Pads 81 corresponding to positive and negative electrodes of the third light emitting chip 53 .
参见图13所示,之前转移的第一发光芯片51、第二发光芯片52在电路板8上对后续转移的第三发光芯片53不会造成干扰。Referring to FIG. 13 , the previously transferred first light emitting chip 51 and the second light emitting chip 52 on the circuit board 8 will not interfere with the subsequent transferred third light emitting chip 53 .
S1402:对热融胶单元61进行第一加热使其至少覆盖在底面上的区域液化并在重力作用下沿第三发光芯片53的两侧流至电路板上形成胶柱62,从而起到相对固定以及形成供第三发光芯片53下落的通道的作用;将第三生长基板43上的第三发光芯片53与第一生长基板4剥离,剥离后的第三发光芯片53沿着其两侧的胶柱62所形成的通道分别落至各自对应的芯片键合区上。S1402: First heat the hot-melt glue unit 61 to liquefy at least the area covered on the bottom surface and flow to the circuit board along the two sides of the third light-emitting chip 53 to form glue columns 62 under the action of gravity, so as to play a relatively The role of fixing and forming a channel for the third light-emitting chip 53 to fall; peeling the third light-emitting chip 53 on the third growth substrate 43 from the first growth substrate 4, and the third light-emitting chip 53 after peeling is along the sides of the third light-emitting chip 53. The channels formed by the glue pillars 62 drop onto the corresponding chip bonding areas respectively.
S1403:可对热融胶单元61进行第二加热使其进一步液化后,将热融胶单元61随第三生长基板43一起移除。S1403: The hot-melt glue unit 61 may be heated for a second time to be further liquefied, and then the hot-melt glue unit 61 is removed together with the third growth substrate 43 .
在本示例中,可将第一发光芯片51、第二发光芯片52和第三发光芯片53的正电极和负电极与芯片键合区内的焊盘81进行一次性焊接,从而提升焊接效率和焊接的一致性。当然也可在每转移完一次发光芯片后就完成正电极和负电极与焊盘的焊接。且应当理解的是,第一发光芯片51、第二发光芯片52和第三发光芯片53的转移顺序可以灵活调整,并不限于上述示例的顺序,在此不再赘述。In this example, the positive electrode and the negative electrode of the first light-emitting chip 51, the second light-emitting chip 52, and the third light-emitting chip 53 can be welded to the pad 81 in the chip bonding area at one time, thereby improving welding efficiency and Consistency of welding. Of course, the welding of the positive electrode, the negative electrode and the welding pad can also be completed after each transfer of the light-emitting chip. And it should be understood that the transfer order of the first light emitting chip 51 , the second light emitting chip 52 and the third light emitting chip 53 can be flexibly adjusted, and is not limited to the order of the above examples, and will not be repeated here.
可见,在上述多种发光颜色的芯片转移过程中,也不需要将发光芯片从生长基板转移至临时基板,再从临时基板转移至转移基板,也不再需要制备临时基板、转移基板,芯片转移效率更高,且转移成本更低,使得该发光组件的制作效率更高,且制作成本更低。It can be seen that in the process of chip transfer of the above-mentioned multiple luminescent colors, there is no need to transfer the light-emitting chip from the growth substrate to the temporary substrate, and then from the temporary substrate to the transfer substrate, and it is no longer necessary to prepare the temporary substrate, the transfer substrate, and the chip transfer. The efficiency is higher, and the transfer cost is lower, so that the manufacturing efficiency of the light-emitting component is higher, and the manufacturing cost is lower.
本实施例还提供了一种显示屏,其可为柔性显示屏,也可为刚性显示屏,且其可为规则形状的显示屏,例如矩形、圆形、椭圆形等,也可为异形显示屏。该显示屏包括显示屏框架,以及如上各示例所示的显示面板,该显示面板由上述发光组件制得,且该显示面板固设于显示屏框架内。应当理解的是,本实施例中的显示屏可以应用于各种电子设备,例如显示器、电脑、手机、智能手表、车载设备、广告牌等。该显示屏制作效率更高,成本更低,良品率更好,出光效率更高且显示效果更好。This embodiment also provides a display screen, which can be a flexible display screen or a rigid display screen, and it can be a display screen of a regular shape, such as a rectangle, a circle, an ellipse, etc., or a display screen of a special shape. Screen. The display screen includes a display screen frame and a display panel as shown in the above examples, the display panel is made of the above-mentioned light-emitting components, and the display panel is fixed in the display screen frame. It should be understood that the display screen in this embodiment can be applied to various electronic devices, such as monitors, computers, mobile phones, smart watches, vehicle-mounted devices, billboards, and the like. The display screen has higher production efficiency, lower cost, better yield rate, higher light extraction efficiency and better display effect.
应当理解的是,本申请的应用不限于上述的举例,对本领域普通技术人员来说,可以根据上述说明加以改进或变换,所有这些改进和变换都应属于本申请所附权利要求的保护范围。It should be understood that the application of the present application is not limited to the above examples, and those skilled in the art can make improvements or changes based on the above descriptions, and all these improvements and changes should belong to the protection scope of the appended claims of the present application.

Claims (17)

  1. 一种生长基板组件,包括:A growth substrate assembly comprising:
    生长基板;growth substrate;
    设置于所述生长基板上的若干发光芯片,所述若干发光芯片底面上生长有正电极和负电极,所述底面为所述发光芯片远离所述生长基板的一面;A plurality of light-emitting chips arranged on the growth substrate, positive electrodes and negative electrodes are grown on the bottom surfaces of the plurality of light-emitting chips, and the bottom surface is the side of the light-emitting chips away from the growth substrate;
    附着于所述生长基板上,且将所述发光芯片底面部分覆盖的热融胶层,所述发光芯片底面上的所述正电极、所述负电极以及所述正电极和所述负电极之间的区域裸露于所述热融胶层。A hot-melt adhesive layer attached to the growth substrate and partially covering the bottom surface of the light-emitting chip, the positive electrode, the negative electrode, and the connection between the positive electrode and the negative electrode on the bottom surface of the light-emitting chip The area between is exposed to the hot-melt adhesive layer.
  2. 如权利要求1所述的生长基板组件,其中,所述热融胶层包括若干热融胶单元,一个所述热融胶单元对应一颗所述发光芯片,各所述热融胶单元相互分离,所述热融胶单元将其对应的所述发光芯片的底面部分覆盖。The growth substrate assembly according to claim 1, wherein the hot-melt adhesive layer includes several hot-melt adhesive units, one of the hot-melt adhesive units corresponds to one of the light-emitting chips, and each of the hot-melt adhesive units is separated from each other , the hot-melt adhesive unit partially covers the bottom surface of the corresponding light-emitting chip.
  3. 如权利要求1所述的生长基板组件,其中,所述热融胶层与所述发光芯片的所述正电极和所述负电极齐平。The growth substrate assembly according to claim 1, wherein the hot melt adhesive layer is flush with the positive electrode and the negative electrode of the light emitting chip.
  4. 如权利要求1所述的生长基板组件,其中,所述热融胶层为非导电胶层。The growth substrate assembly according to claim 1, wherein the hot-melt adhesive layer is a non-conductive adhesive layer.
  5. 如权利要求1所述的生长基板组件,其中,所述热熔胶层与所述正电极、所述负电极间存在间隙。The growth substrate assembly according to claim 1, wherein there is a gap between the hot melt adhesive layer and the positive electrode and the negative electrode.
  6. 如权利要求1所述的生长基板组件,其中,还包括多个牺牲层单元,所述牺牲层单元与所述发光芯片一一对应,所述牺牲层单元覆盖所述发光芯片所述正电极、所述负电极以及所述正电极和所述负电极之间的区域。The growth substrate assembly according to claim 1, further comprising a plurality of sacrificial layer units corresponding to the light-emitting chips one by one, the sacrificial layer units covering the positive electrodes, The negative electrode and the region between the positive electrode and the negative electrode.
  7. 如权利要求6所述的生长基板组件,其中,所述牺牲层单元为光刻胶层单元。The growth substrate assembly according to claim 6, wherein the sacrificial layer unit is a photoresist layer unit.
  8. 如权利要求6所述的生长基板组件,其中,所述牺牲层单元为聚乙烯醇层单元。The growth substrate assembly according to claim 6, wherein the sacrificial layer unit is a polyvinyl alcohol layer unit.
  9. 如权利要求6所述的生长基板组件,其中,至少一个所述牺牲层单元的部分区域被所述热融胶层覆盖。The growth substrate assembly according to claim 6, wherein at least one part of the sacrificial layer unit is covered by the hot-melt adhesive layer.
  10. 一种如权利要求1所述的生长基板组件的制作方法,其中,包括:A method for manufacturing a growth substrate assembly as claimed in claim 1, comprising:
    在生长基板上生长若干所述发光芯片;growing several light-emitting chips on a growth substrate;
    分别在各所述发光芯片的底面上设置牺牲层单元,各所述牺牲层单元分别将各所述发光芯片底面上的所述正电极、所述负电极以及所述正电极和所述负电极之间的区域覆盖;A sacrificial layer unit is respectively arranged on the bottom surface of each of the light-emitting chips, and each of the sacrificial layer units respectively connects the positive electrode, the negative electrode, and the positive electrode and the negative electrode on the bottom surface of each of the light-emitting chips. area coverage between
    在所述生长基板上形成热融胶层,所述热融胶层将所述若干发光芯片的底面部分覆盖,所述牺牲层单元部分裸露于所述热融胶层;A hot-melt adhesive layer is formed on the growth substrate, the hot-melt adhesive layer partially covers the bottom surfaces of the plurality of light-emitting chips, and the sacrificial layer unit is partially exposed to the hot-melt adhesive layer;
    在所述热融胶层固化后,去除各所述牺牲层单元,使得各所述发光芯片底面上的所述正电极、所述负电极以及所述正电极和所述负电极之间的区域裸露于所述热融胶层。After the hot-melt adhesive layer is cured, remove each sacrificial layer unit, so that the positive electrode, the negative electrode, and the area between the positive electrode and the negative electrode on the bottom surface of each light-emitting chip exposed to the hot melt adhesive layer.
  11. 如权利要求10所述的生长基板组件的制作方法,其中,所述牺牲层单元为光刻胶层单元。The manufacturing method of the growth substrate assembly according to claim 10, wherein the sacrificial layer unit is a photoresist layer unit.
  12. 如权利要求10所述的生长基板组件的制作方法,其中,所述牺牲层单元为聚乙烯醇层单元。The method for manufacturing a growth substrate assembly according to claim 10, wherein the sacrificial layer unit is a polyvinyl alcohol layer unit.
  13. 如权利要求10所述的生长基板组件的制作方法,其中,所述分别在各所述发光芯片的底面上设置牺牲层单元之前,还包括:The method for manufacturing a growth substrate assembly according to claim 10, wherein, before arranging the sacrificial layer unit on the bottom surface of each of the light-emitting chips, further comprising:
    对所述生长基板上的各所述发光芯片进行检测;Detecting each of the light-emitting chips on the growth substrate;
    将检测不合格的所述发光芯片从所述生长基板上去除;removing the unqualified light-emitting chip from the growth substrate;
    所述对所述生长基板上的各所述发光芯片进行检测包括以下至少之一:The detecting each of the light-emitting chips on the growth substrate includes at least one of the following:
    对各所述发光芯片的外观进行检测;Detecting the appearance of each of the light-emitting chips;
    对各所述发光芯片的光学特性进行检测。The optical characteristics of each of the light-emitting chips are detected.
  14. 如权利要求13所述的生长基板组件的制作方法,其中,所述对各所述发光芯片的光学特性进行检测包括:The method for manufacturing a growth substrate assembly according to claim 13, wherein said detecting the optical characteristics of each of said light-emitting chips comprises:
    对各所述发光芯片的主波长进行检测。The dominant wavelength of each light-emitting chip is detected.
  15. 一种发光组件的制作方法,其中,包括:A method for manufacturing a light-emitting component, including:
    通过如权利要求10所述的生长基板组件的制作方法制作所述生长基板组件;Manufacturing the growth substrate assembly by the method for manufacturing the growth substrate assembly as claimed in claim 10;
    将所述生长基板生长有所述发光芯片的一面设于电路板之上,与所述电路板设有芯片键合区的一面对位设置;The side of the growth substrate on which the light-emitting chip is grown is placed on the circuit board, facing the side of the circuit board where the chip bonding area is provided;
    对所述热融胶层进行第一加热,使得所述热融胶层液化后流至所述电路板上,在所述发光芯片的两侧形成胶柱;Carrying out first heating to the hot-melt adhesive layer, so that the hot-melt adhesive layer liquefies and then flows onto the circuit board, forming glue columns on both sides of the light-emitting chip;
    将所述生长基板上的所述发光芯片与所述生长基板剥离,剥离后的所述发光芯片沿其两侧的所述胶柱所构成的通道落至对应的所述芯片键合区上;The light-emitting chip on the growth substrate is peeled off from the growth substrate, and the peeled light-emitting chip falls onto the corresponding bonding area of the chip along the channels formed by the glue columns on both sides thereof;
    将所述热融胶层随所述生长基板一起移除,并将各所述芯片键合区内焊盘与对应的所述发光芯片的所述正电极和所述负电极连接。The hot-melt adhesive layer is removed together with the growth substrate, and the pads in each chip bonding area are connected to the positive electrode and the negative electrode of the corresponding light-emitting chip.
  16. 如权利要求15所述的发光组件的制作方法,其中,所述将所述热融胶层随所述生长基板一起移除包括:The manufacturing method of a light-emitting component according to claim 15, wherein said removing said hot-melt adhesive layer together with said growth substrate comprises:
    对所述热融胶层进行第二加热使其进一步液化后,将所述热融胶层随所述生长基板一起移除。After the hot-melt adhesive layer is heated for a second time to further liquefy, the hot-melt adhesive layer is removed together with the growth substrate.
  17. 如权利要求16所述的发光组件的制作方法,其中,所述第二加热为自所述热熔胶层远离所述生长基板的一侧对所述热熔胶层加热。The manufacturing method of a light-emitting component according to claim 16, wherein the second heating is heating the hot-melt adhesive layer from a side of the hot-melt adhesive layer away from the growth substrate.
PCT/CN2022/105584 2021-07-26 2022-07-14 Growth substrate assembly and manufacturing method therefor, and manufacturing method for light-emitting assembly WO2023005672A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202110846728.6 2021-07-26
CN202110846728.6A CN115692451A (en) 2021-07-26 2021-07-26 Growth substrate assembly, light-emitting assembly and manufacturing method thereof

Publications (1)

Publication Number Publication Date
WO2023005672A1 true WO2023005672A1 (en) 2023-02-02

Family

ID=85058040

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2022/105584 WO2023005672A1 (en) 2021-07-26 2022-07-14 Growth substrate assembly and manufacturing method therefor, and manufacturing method for light-emitting assembly

Country Status (2)

Country Link
CN (1) CN115692451A (en)
WO (1) WO2023005672A1 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112133795A (en) * 2019-06-24 2020-12-25 天津三安光电有限公司 Method for manufacturing semiconductor light-emitting element structure suitable for transfer
KR102216369B1 (en) * 2020-03-19 2021-02-17 (주)라이타이저 Led chip transferring method and adevice using foam and photoresist, manufacturing method of display apparatus using the same
CN112582515A (en) * 2020-12-11 2021-03-30 苏州芯聚半导体有限公司 Light emitting diode and manufacturing method thereof
CN112820673A (en) * 2021-02-09 2021-05-18 南昌广恒电子中心(有限合伙) Transfer apparatus, transfer method, and display device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112133795A (en) * 2019-06-24 2020-12-25 天津三安光电有限公司 Method for manufacturing semiconductor light-emitting element structure suitable for transfer
KR102216369B1 (en) * 2020-03-19 2021-02-17 (주)라이타이저 Led chip transferring method and adevice using foam and photoresist, manufacturing method of display apparatus using the same
CN112582515A (en) * 2020-12-11 2021-03-30 苏州芯聚半导体有限公司 Light emitting diode and manufacturing method thereof
CN112820673A (en) * 2021-02-09 2021-05-18 南昌广恒电子中心(有限合伙) Transfer apparatus, transfer method, and display device

Also Published As

Publication number Publication date
CN115692451A (en) 2023-02-03

Similar Documents

Publication Publication Date Title
US10886257B2 (en) Micro LED display device and method for manufacturing same
JP5652252B2 (en) LIGHT EMITTING DEVICE, LIGHTING DEVICE, AND DISPLAY DEVICE
CN107026124A (en) Manufacture the method and miniature light-emitting diode display of miniature light-emitting diode display
WO2020248750A1 (en) Micro led transfer method and display panel
CN106170849A (en) The transfer method of micro-light emitting diode, manufacture method, device and electronic equipment
CN106663721A (en) Display device using semiconductor light emitting device
CN107240356B (en) Full-color LED display unit and preparation method thereof
CN108231653A (en) A kind of MicroLED chips transfer method and device
CN111081158A (en) Spliced display screen, preparation method thereof and display device
KR20200022626A (en) Display panel having micro led and method of manufacturing the same
WO2021168615A1 (en) Mass transfer method for light-emitting diodes, and display back panel assembly
CN114141930A (en) Light emitting diode transfer method, light emitting substrate and display panel
CN203760010U (en) Semiconductor display unit based on lamination baseboard with separated display and control
WO2023005672A1 (en) Growth substrate assembly and manufacturing method therefor, and manufacturing method for light-emitting assembly
WO2020232835A1 (en) Display panel and manufacturing method therefor
WO2023004535A1 (en) Circuit board assembly, light-emitting assembly, and manufacturing method therefor
CN115832119A (en) Display device and manufacturing method thereof
WO2022236750A1 (en) Chip temporary component, display panel and manufacturing method therefor
CN106801791A (en) COB LED encapsulation modules, display device, lighting device and method for packing
CN115719755A (en) Circuit board assembly, manufacturing method thereof and chip transfer method
CN115692450A (en) Circuit board assembly, light-emitting assembly and manufacturing method thereof
WO2021134489A1 (en) Mass transfer apparatus, fabrication method therefor, and display device
CN114078403B (en) High PPI color Micro-LED display screen and manufacturing method
CN215418184U (en) Transfer head and transfer head mold
CN110120445A (en) Transfer method, equipment, display base plate and the device of incandescnet particle

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 22848277

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE