WO2022268090A1 - 波导线电极结构和电光调制器 - Google Patents

波导线电极结构和电光调制器 Download PDF

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Publication number
WO2022268090A1
WO2022268090A1 PCT/CN2022/100239 CN2022100239W WO2022268090A1 WO 2022268090 A1 WO2022268090 A1 WO 2022268090A1 CN 2022100239 W CN2022100239 W CN 2022100239W WO 2022268090 A1 WO2022268090 A1 WO 2022268090A1
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Prior art keywords
electrode
extension
electrodes
waveguide
sub
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PCT/CN2022/100239
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English (en)
French (fr)
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梁寒潇
宋一品
周颖聪
巫海苍
毛文浩
宋时伟
孙维祺
俞清扬
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苏州极刻光核科技有限公司
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Priority to EP22827583.0A priority Critical patent/EP4350426A1/en
Publication of WO2022268090A1 publication Critical patent/WO2022268090A1/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/212—Mach-Zehnder type
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/0305—Constructional arrangements
    • G02F1/0316—Electrodes
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure

Definitions

  • the present disclosure relates to the field of photoelectric signal technology, in particular to a waveguide electrode structure and an electro-optic modulator.
  • the rapid development of emerging network application services such as the Internet of Things, unmanned driving, telemedicine, and distance education has put forward higher requirements for high-speed and large-capacity communication technologies.
  • How to load high-speed electrical signals onto optical carriers is a core research content.
  • the electro-optic modulator is one of the core devices in optical interconnection, optical computing, and optical communication systems. The performance of the modulator plays an important role in the transmission distance and transmission speed of optical signals. With people's increasingly urgent demand for high-speed and large-capacity communication technology, higher requirements are put forward for the modulation rate of electro-optic modulators.
  • the electro-optic modulator is a modulator made by using the electro-optic effect of certain electro-optic crystals, such as lithium niobate crystal (LiNbO3), gallium arsenide crystal (GaAs) and lithium tantalate crystal (LiTaO3).
  • the electro-optic effect means that when a voltage is applied to the electro-optic crystal, the refractive index of the electro-optic crystal will change, resulting in a change in the characteristics of the light wave passing through the crystal, and realizing the modulation of the phase, amplitude, intensity and polarization state of the optical signal.
  • the input light wave of the MZ interferometric modulator passes through a section of optical path and is divided into two equal beams at the splitting element, which are respectively transmitted through two optical waveguides.
  • the optical waveguide is made of electro-optical materials, and its refractive index varies with the applied voltage. The size of the beam changes, so that the two beams of light signals arrive at the light-combining element to produce a phase difference.
  • the optical path difference of the two beams of light is an integer multiple of the wavelength, the coherence of the two beams of light is strengthened; if the optical path difference of the two beams of light is 1/2 of the wavelength, the coherence of the two beams of light cancels out, and the output of the modulator is very small, so by controlling The voltage can modulate the optical signal.
  • the impedance of the electrode material needs to be consistent with the impedance of the input end, and at the same time, it is not only necessary to ensure that the transmission speed of the electrical signal is the same as that of the optical signal in the waveguide.
  • the group velocity of the transmission in the medium is the same or close, and the transmission loss of the electrical signal needs to be reduced as much as possible, which puts forward very high requirements for the electrode design.
  • an object of the present disclosure is to provide a waveguide electrode structure and an electro-optic modulator, so as to improve the modulation effect on transmitted light.
  • the embodiment of the first aspect of the present disclosure provides a waveguide electrode structure, including: a first ground electrode, a signal electrode, and a second ground electrode arranged at intervals in sequence; an optical waveguide, including a first branch and a second branch , the first branch is arranged in the first gap formed between the first ground electrode and the signal electrode, and the second branch is arranged in the second gap formed between the second ground electrode and the signal electrode; the first covering layer, at least partially covering the first branch; a second covering layer at least partially covering the second branch; and at least one electrode extension, each electrode extension facing from the signal electrode to the first side of the first ground electrode, the signal electrode facing the first side of the first ground electrode The second side of the ground electrode, the third side of the first ground electrode facing the signal electrode, or the fourth side of the second ground electrode facing the signal electrode starts to protrude toward the first gap or the second gap adjacent to the side, each The electrode extension also extends to the upper surface of the first cover layer or the second cover layer.
  • the upper surface of the first cover layer and/or the second cover layer includes: at least one inclined section, and each inclined section is along the direction from the signal electrode, the first ground electrode or the second ground electrode to the electrode.
  • the direction of the adjacent first branch or the second branch extends obliquely upward; wherein the electrode extension extends to the upper surface of the first covering layer or the second covering layer through the inclined section; or the electrode extending part and its connected At least a part of the electrode extends to the upper surface of the first cover layer or the second cover layer via the inclined section.
  • the electrode extension part includes: a plurality of extended sub-electrodes, and each extended sub-electrode starts from one side of the first ground electrode, the second ground electrode or the signal electrode toward the first gap or the second gap adjacent to the side. The gap sticks out.
  • each extension sub-electrode includes: an extension part protruding from one side of the first ground electrode, the second ground electrode or the signal electrode toward the first gap or the second gap adjacent to the side.
  • each extension sub-electrode further includes: an electrode part, which is disposed on the protruding terminal end of the extension part, and extends along a direction parallel to the first branch or the second branch.
  • the upper surface of the first cladding layer and/or the second cladding layer further includes: a platform section adjacent to a higher side edge of the inclined section, wherein the optical waveguide is disposed under the platform section, and the extension The ends of the electrodes are arranged on the platform section or the inclined section.
  • At least one electrode extension part includes: a first electrode extension part disposed on the first side of the signal electrode facing the first ground electrode; a second electrode extension part disposed on the second side of the signal electrode facing the second ground electrode.
  • the third electrode extension is arranged on the third side of the first ground electrode facing the signal electrode; and the fourth electrode extension is arranged on the fourth side of the second ground electrode facing the signal electrode.
  • the first electrode extension part includes a plurality of first extension sub-electrodes, each first extension sub-electrode protrudes from the first side toward the first gap; and the second electrode extension part includes a plurality of second extension sub-electrodes Each second extended sub-electrode protrudes from the second side toward the second gap.
  • the third electrode extension part includes a plurality of third extension sub-electrodes, each third extension sub-electrode protrudes from the third side toward the first gap; and the fourth electrode extension part includes a plurality of fourth extension sub-electrodes Each of the fourth extended sub-electrodes protrudes from the fourth side toward the second gap.
  • the first electrode extension part includes a plurality of first extension sub-electrodes, and each first extension sub-electrode protrudes from the first side toward the first gap;
  • the second electrode extension part includes a plurality of second extension sub-electrodes , each second extended sub-electrode protrudes from the second side toward the second gap;
  • the third electrode extension includes a plurality of third extended sub-electrodes, and each third extended sub-electrode extends from the third side toward the first gap protruding;
  • the fourth electrode extension part includes a plurality of fourth extending sub-electrodes, each fourth extending sub-electrode protruding from the fourth side toward the second gap.
  • each first extension sub-electrode in the first electrode extension part is arranged opposite to the corresponding third extension sub-electrode in the third electrode extension part; each second extension sub-electrode in the second electrode extension part They are respectively arranged opposite to the corresponding fourth extension sub-electrodes in the fourth electrode extension part.
  • the upper surface of the first covering layer includes a first inclined section, a first platform section and a second inclined section adjacent in sequence, the first inclined section faces the first ground electrode, and the second inclined section faces the signal electrode; and the upper surface of the second cover layer includes a third inclined section, a second platform section and a fourth inclined section adjacent in sequence, the third inclined section faces the signal electrode, and the fourth inclined section faces the second A ground electrode, wherein the first electrode extension extends to the first platform section via the second inclined section, the second electrode extension extends to the second platform section via the third inclined section, and the third electrode extension extends via the first The sloped section extends to the first platform section, and the fourth electrode extension extends to the second platform section via the fourth sloped section.
  • each electrode extension part the electrode parts of two adjacent extension sub-electrodes are arranged at intervals.
  • each electrode extension part the electrode parts of two adjacent extension sub-electrodes are connected end-to-end.
  • the refractive index of the cladding layer is lower than the refractive index of the optical waveguide.
  • An embodiment of the second aspect of the present disclosure provides an electro-optic modulator, comprising: a substrate; an isolation layer disposed on the upper surface of the substrate; a thin film layer disposed on the upper surface of the isolation layer, the thin film layer being made of a photoelectric material; the above
  • the waveguide electrode structure is arranged on the upper surface of the thin film layer; and the optical component is arranged on the upper surface of the thin film layer for separating the light propagating in the optical waveguide into the light in the first branch and the second branch, and It is used to recombine the light in the first branch and the second branch into the light propagating in the optical waveguide.
  • the lower surfaces of the signal electrode, the first ground electrode and the second ground electrode penetrate the film layer and directly contact the isolation layer.
  • the thin film layer is X-cut, Y-cut, or Z-cut thin film lithium niobate that has been etched.
  • the waveguide electrode structure of the embodiment of the present disclosure is additionally provided with a cover layer above the optical waveguide, and makes the electrode extension connected to the signal electrode or the ground electrode extend to the upper surface of the cover layer.
  • the electrode structure of the waveguide in the embodiment of the present disclosure ensures that the distance between the signal electrode and the electrode extension of the ground electrode is close enough, and at the same time ensures that there is a certain distance between the edge of the electrode extension and the corresponding optical waveguide. Therefore,
  • the waveguide electrode structure of this embodiment increases the electro-optical conversion efficiency while avoiding the influence on the normal transmission of light in the first branch or the second branch, and greatly improves the modulation effect of the waveguide electrode structure.
  • FIG. 1 shows a top view of a waveguide electrode structure according to an embodiment of the present disclosure
  • FIG. 2 shows a perspective schematic view of the waveguide electrode structure in FIG. 1;
  • Fig. 3 shows a schematic cross-sectional view of the waveguide electrode structure in Fig. 1;
  • Fig. 4 shows a top view of a waveguide electrode structure according to another embodiment of the present disclosure
  • FIG. 5 shows a schematic perspective view of the waveguide electrode structure in FIG. 4;
  • Fig. 6 shows a top view of a waveguide electrode structure according to yet another embodiment of the present disclosure
  • FIG. 7 shows a schematic perspective view of the waveguide electrode structure in FIG. 6;
  • Fig. 8 shows a top view of a waveguide electrode structure according to yet another embodiment of the present disclosure
  • Fig. 9 shows a top view of a waveguide electrode structure according to yet another embodiment of the present disclosure.
  • Fig. 10 shows a schematic perspective view of a waveguide electrode structure according to yet another embodiment of the present disclosure
  • FIG. 11 shows a schematic perspective view of an electro-optic modulator according to an embodiment of the present disclosure.
  • FIG. 1 shows a top view of a waveguide electrode structure according to an embodiment of the present disclosure
  • FIG. 2 shows a perspective view of the waveguide electrode structure in FIG. 1
  • FIG. 3 shows A schematic cross-sectional view of the waveguide electrode structure in FIG. 1 is shown.
  • the waveguide electrode structure includes: a first ground electrode 210, a signal electrode 100, a second ground electrode 220, an optical waveguide 300, a first covering layer 410, a second covering layer 420 and at least one Electrode extension.
  • the first ground electrodes 210 , the signal electrodes 100 and the second ground electrodes 220 are sequentially arranged at intervals.
  • the optical waveguide 300 includes a first branch 310 and a second branch 320, the first branch 310 is arranged in the first gap 250 formed between the first ground electrode 210 and the signal electrode 100, the second branch 320 is arranged at the second In the second gap 260 formed between the ground electrode 220 and the signal electrode 100 .
  • the first covering layer 410 and the second covering layer 420 at least partially cover the first branch 310 or the second branch 320 respectively.
  • Each electrode extension is disposed on the first side 101 of the signal electrode 100 facing the first ground electrode 210, the second side 102 of the signal electrode 100 facing the second ground electrode 220, and the third side of the first ground electrode 210 facing the signal electrode 100.
  • each electrode extension part starts from the electrode side where it is located and extends toward the first gap 250 or the second gap 260 adjacent to the electrode side , each extension sub-electrode also extends to the upper surface of the first covering layer 410 or the second covering layer 420 .
  • the first ground electrode 210, the signal electrode 100, and the second ground electrode 220 are all extended along the first direction, that is, the y direction shown in the figure.
  • the extension lengths of the three electrodes and their can be of equal width.
  • the first ground electrode 210, the signal electrode 100, and the second ground electrode 220 are arranged at intervals in sequence along the second direction, that is, the z direction shown in the figure.
  • the first gap 250 forms a second gap 260 between the second ground electrode 220 and the signal electrode 100 .
  • the widths of the first gap 250 and the second gap 260 may be equal.
  • the above three electrodes may be arranged in the same plane, that is, in the y-z plane shown in the figure.
  • the above three electrodes can be made of metal materials, and the signal electrode 100 is also connected to an external modulation circuit to apply the modulation voltage V.
  • the optical waveguide 300 includes a first trunk 330 , a second trunk 340 , a first branch 310 and a second branch 320 .
  • the first main path 330 of the optical waveguide 300 is divided into a first branch path 310 and a second branch path 320 by a light splitting element (not shown in the figure) near the above three electrodes, wherein the first branch path 310 extends into the second branch path.
  • a gap 250 extends along the first direction (y direction) in the gap, and the second branch 320 extends into the second gap 260 and also extends along the first direction (y direction) in the gap, that is to say , the first branch 310 and the second branch 320 are kept parallel.
  • the first branch 310 and the second branch 320 extend to a position away from the three electrodes, they are combined into a second trunk 340 through a light-combining element (not shown in the figure).
  • the first covering layer 410 is covered on the first branch 310
  • the second covering layer 420 is covered on the second branch 320 .
  • the above-mentioned two covering layers are also extended along the y-direction shown in FIG.
  • the cross-section of the covering layer can be any suitable shape such as triangle, rectangle, trapezoid, semicircle, etc., and the waveguide of the first branch 310 or the second branch 320 can be arranged at the center of the bottom of the covering layer, that is to say, as shown in FIG. 3, the optical waveguide cross-section of the first branch 310 or the second branch 320 is located in the middle of the bottom of the cross-section of the cladding layer.
  • At least one electrode extension may include four electrode extensions.
  • the first electrode extension 51 is disposed on the first side 101 of the signal electrode 100 facing the first ground electrode 210;
  • the second electrode extension 52 is arranged on the second side 102 of the signal electrode 100 facing the second ground electrode 220;
  • the third electrode extension 53 is arranged on the third side 213 of the first ground electrode 210 facing the signal electrode 100;
  • the fourth electrode The extension part 54 is disposed on the fourth side 224 of the second ground electrode 220 facing the signal electrode 100 .
  • each electrode extension part includes: a plurality of extension sub-electrodes.
  • Each extension sub-electrode protrudes from one side of the first ground electrode, the second ground electrode or the signal electrode toward the first gap 250 or the second gap 260 adjacent to the side.
  • the first electrode extension 51 includes a plurality of first extension sub-electrodes 510, and each first extension sub-electrode 510 protrudes from the first side 101 toward the first gap 250;
  • the second electrode extension 52 includes a plurality of The second extended sub-electrodes 520, each second extended sub-electrode 520 protrudes from the second side 102 toward the second gap 260;
  • the third electrode extension 53 includes a plurality of third extended sub-electrodes 530, each third extended The sub-electrodes 530 protrude from the third side 213 toward the first gap 250;
  • the fourth electrode extension 54 includes a plurality of fourth extended sub-electrodes 540, and each fourth extended sub-electrode 540 extends from the fourth side 224 toward the second gap 250;
  • the gap 260 protrudes.
  • first extension sub-electrodes 510 in the first electrode extension 51 are arranged at intervals along the first side 101, the root of each extension sub-electrode is connected to the signal electrode 100, and Each extension sub-electrode is also made of metal material, so the modulation voltage applied to the signal electrode 100 can be further conducted to act on the first extension sub-electrode 510 .
  • the plurality of second extended sub-electrodes 520 to fourth extended sub-electrodes 540 are arranged on one side of the corresponding signal electrode 100 or ground electrode in the same manner, and details are not repeated here.
  • each third extended sub-electrode 53 may include an extension portion 531 and an electrode portion 532 .
  • the extension part 531 protrudes from one side of the first ground electrode 210 toward the first gap 250 adjacent to the side.
  • the electrode portion 532 is disposed on the terminal end of the extension portion 531, and is extended along a direction parallel to the first branch 310 (ie, the y direction in the figure), that is, the extension portion of each extension sub-electrode 531 and the electrode portion 532 are arranged perpendicular to each other.
  • each first extension sub-electrode 510 may also include an extension portion 511 and an electrode portion 512 .
  • the extension part 511 protrudes from one side of the signal electrode 100 toward the first gap 250 adjacent to the side.
  • the electrode portion 512 is disposed on the terminal end of the extension portion 511 and extends along a direction parallel to the first branch 310 (ie, the y direction in the figure).
  • the structures and arrangements of the second extended sub-electrode 520 and the fourth extended sub-electrode 540 are similar to those of the above-mentioned first extended sub-electrode 510 and the third extended sub-electrode 530 , and will not be repeated here.
  • each extension part of each extension sub-electrode is connected to the midpoint of the electrode part along its extension direction, that is to say, in the top view of the waveguide electrode structure as shown in FIG. 1 , each extension The sub-electrodes are similar to a "T"-shaped structure.
  • the length of the extension part of each extension sub-electrode is equal, so that the electrode parts of all the extension sub-electrodes of each electrode extension part are on the same straight line.
  • the waveguide electrode structure of the present disclosure reduces the distance between the signal electrode 100 and the ground electrode by setting the extension sub-electrode on the first ground electrode 210, the second ground electrode 220 and/or the signal electrode 100, which is beneficial to reduce the modulation voltage The transmission loss of the electrical signal.
  • the waveguide electrode structure In addition, some inherent characteristics of the waveguide electrode structure, such as: impedance and propagation speed of electrical signals, etc., are closely related to some properties of these extension sub-electrodes (such as: the length of the extension part, the length of the electrode part, etc.), therefore, In the actual manufacturing process of the waveguide electrode structure, the values of these properties can be flexibly set, so that the impedance of the electro-optic modulator made of the waveguide electrode structure is the same or close to the input impedance (generally 50 ⁇ ), and the electrical signal The propagation speed in the modulation circuit is the same or close to the speed of light in the optical waveguide 300, thereby improving the effect of light modulation.
  • the upper surface of the first cover layer 410 and/or the second cover layer 420 includes at least one inclined section.
  • Each inclined section extends obliquely upward along the direction from the signal electrode 100, the first ground electrode 210, or the second ground electrode 220 toward the first branch 310 or the second branch 320 adjacent to the electrode, and the electrode is extended.
  • the portion extends to the upper surface of the first cover layer 410 or the second cover layer 420 via the inclined section.
  • the cross-sections of the first covering layer 410 and the second covering layer 420 may both be trapezoidal including inclined sections.
  • the upper surface of the first covering layer 410 includes a first inclined section 411, a first platform section 413, and a second inclined section 412 adjacent in sequence, and the first inclined section 411 faces the second inclined section 411.
  • the first inclined section 411 extends obliquely upward along a direction from the first ground electrode 210 to the first branch 310 .
  • the second inclined section 412 extends obliquely upward along the direction from the signal electrode 100 to the first branch 310 .
  • the upper surface of the second cover layer 420 includes a third inclined section 421 , a second platform section 423 and a fourth inclined section 422 adjacent in sequence, the third inclined section 421 faces the signal electrode 100 , and the fourth inclined section 422 facing the second ground electrode 220 .
  • the third inclined section 421 extends obliquely upward along the direction from the signal electrode 100 to the second branch 320 .
  • the fourth inclined section 422 extends obliquely upward along the direction from the second ground electrode 220 to the second branch 320 .
  • the first electrode extension 51 extends to the first platform section 413 via the second inclined section 412
  • the second electrode extension 52 extends to the second platform section 423 via the third inclined section 421
  • the third electrode extension 53 Extending to the first platform section 413 via the first inclined section 411
  • the fourth electrode extension 54 extends to the second platform section 423 via the fourth inclined section 422 .
  • only the electrode extension itself extends to the corresponding inclined section
  • the corresponding first ground electrode 210, second ground electrode 220 or signal electrode 100 does not extend to the corresponding inclined section
  • the edges are also arranged at a certain distance from the corresponding covering layer edges.
  • a part of the three electrodes may also extend to the corresponding inclined section, that is, the electrode extension connected to the electrodes extends upwards from the inclined section.
  • the first extended sub-electrodes 510 of the first electrode extension 51 to the fourth extended sub-electrodes 540 of the fourth electrode extension 54 have the same number
  • the multiple first extended sub-electrodes 510 and the multiple The third extended sub-electrodes 530 are arranged opposite to each other on the first platform section 413, so that, viewed on the y-z plane, the electrode part of each first extended sub-electrode 510 and the corresponding third extended sub-electrode 530
  • the electrode portions are aligned with each other, and the first branch 310 is located between the electrode portion of each first extended sub-electrode 510 and the electrode portion of each third extended sub-electrode 530 .
  • a plurality of second extended sub-electrodes 520 and a plurality of fourth extended sub-electrodes 540 are arranged in one-to-one correspondence on the second platform section 423, so that, viewed on the y-z plane, each second extended sub-electrode 520
  • the electrode portions of the corresponding fourth extended sub-electrodes 540 are aligned with each other, and the second branch 320 is located between the electrode portions of each second extended sub-electrode 520 and the electrode portion of each fourth extended sub-electrode 540 .
  • the electrical loss of the modulated signal voltage (that is, the voltage applied between the signal electrode 100 and the ground electrode) is related to the size of the first gap 250 and the second gap 260, the larger the first gap 250 and the second gap 260 The smaller (that is, the closer the signal electrode 100 is to the ground electrode), the higher the electro-optic modulation efficiency.
  • the signal electrode 100 or the ground electrode is arranged too close to the first branch 310 or the second branch 320 of the optical waveguide 300, the above electrodes may affect the light in the first branch 310 or the second branch 320. normal transmission.
  • a cover layer is additionally provided above the optical waveguide 300 , and the electrode extension connected to the signal electrode 100 or the ground electrode extends to the upper surface of the cover layer.
  • the waveguide electrode structure of this embodiment increases the electro-optical conversion efficiency while avoiding the impact on the normal transmission of light in the first branch 310 or the second branch 320, greatly The modulation effect of the waveguide electrode structure is improved.
  • FIG. 4 shows a top view of a waveguide electrode structure according to another embodiment of the present disclosure.
  • FIG. 5 shows a schematic perspective view of the waveguide electrode structure in FIG. 4 .
  • the first electrode extension 51 includes a plurality of first extension sub-electrodes 510, and each first extension sub-electrode 510 protrudes from the first side 101 toward the first gap 250;
  • the second electrode extension 52 It includes a plurality of second extension sub-electrodes 520 , and each second extension sub-electrode 520 protrudes from the second side 102 toward the second gap 260 .
  • the third electrode extension part 53 and the fourth electrode extension part 54 do not include extended sub-electrodes, but extend outward from the corresponding electrode side as shown in FIG. 5 .
  • the first covering layer 410 may also be designed to only include the second inclined section 412 facing the signal electrode 100 .
  • the cross-section of the first covering layer 410 can be designed in the form of a right-angled trapezoid, its right-angled side faces the first ground electrode 210, its inclined side (that is, the second inclined section 412) faces the signal electrode 100, and the third electrode extends
  • the part 53 may directly extend to the upper surface of the first cover layer 410 .
  • the second covering layer 420 can only include the third inclined section 421 facing the signal electrode 100 .
  • the cross-section of the second covering layer 420 can be designed in the form of a right-angled trapezoid, its right-angled side faces the second ground electrode 220, its inclined side (that is, the above-mentioned third inclined section 421) faces the signal electrode 100, and the fourth electrode extends
  • the portion 54 may directly extend to the upper surface of the second cover layer 420 .
  • FIG. 6 shows a top view of a waveguide electrode structure according to yet another embodiment of the present disclosure
  • FIG. 7 shows a perspective view of the waveguide electrode structure in FIG. 6
  • the third electrode extension 53 includes a plurality of third extension sub-electrodes 530 , and each third extension sub-electrode 530 protrudes from the third side 213 toward the first gap 250
  • the fourth electrode extension 54 It includes a plurality of fourth extension sub-electrodes 540 , and each fourth extension sub-electrode 540 protrudes from the fourth side 224 toward the second gap 260 .
  • the first electrode extension part 51 and the second electrode extension part 52 do not include extended sub-electrodes, but as shown in FIG.
  • the first covering layer 410 may also be designed to include only the first inclined section 411 facing the first ground electrode 210 .
  • the cross-section of the first covering layer 410 can be designed in the form of a right-angled trapezoid, its right-angled side faces the signal electrode 100, and its inclined side (that is, the first inclined section 411) faces the first ground electrode 210, and the first electrode extends
  • the part 51 may directly extend to the upper surface of the first cover layer 410 .
  • the second covering layer 420 it is also possible to design the second covering layer 420 to only include the fourth inclined section 422 facing the second ground electrode 220 .
  • the cross-section of the second cover layer 420 can be designed in the form of a right-angled trapezoid, its right-angled side faces the signal electrode 100, and its inclined side (that is, the fourth inclined section 422) faces the second ground electrode 220, and the second electrode extends
  • the portion 52 may directly extend to the upper surface of the second cover layer 420 .
  • Fig. 8 shows a top view of a waveguide electrode structure according to yet another embodiment of the present disclosure.
  • the extension part of each extension sub-electrode is connected to a position close to the midpoint of the corresponding electrode part, in the embodiment shown in FIG. 8 , each extension sub-electrode In the electrode, the terminal end portion of the extension portion may also be connected to one end of the electrode portion in its extending direction. That is to say, when viewed on the y-z plane, each extended sub-electrode is in an "L" shape.
  • Fig. 9 shows a top view of a waveguide electrode structure according to yet another embodiment of the present disclosure.
  • the electrode parts of two adjacent extension sub-electrodes are arranged at intervals, but in some other embodiments as shown in Figure 9 , the electrode portions of two adjacent extension sub-electrodes can also be arranged end-to-end. That is to say, in each electrode extension part, the electrode parts of the respective extension sub-electrodes are connected in sequence to form a straight line parallel to the first branch 310 or the second branch 320 .
  • Fig. 10 shows a schematic perspective view of a waveguide electrode structure according to another embodiment of the present disclosure.
  • the difference between the waveguide electrode structure of this embodiment and the waveguide electrode structure shown in FIG. 2 is that the extension sub-electrode of each electrode extension part only includes the extension part, not the electrode part.
  • the ends of the extensions in each first extended sub-electrode 510 are aligned with the ends of the extensions in the corresponding third extended sub-electrodes 530, while in the second covering On the second platform section 423 of the layer 420 , the end of the extension in each second extension sub-electrode 520 is aligned with the end of the extension in the corresponding fourth extension sub-electrode 540 .
  • each electrode extension extends to the platform section of the corresponding covering layer
  • each electrode extension may only extend to the inclined area part.
  • the electrode extension comprises extension sub-electrodes
  • the ends of the extension sub-electrodes may also extend only to the inclined section.
  • the covering layer may not have platform sections at all, for example, the upper surface of the covering layer is only composed of two inclined sections (that is, the cross-section of the covering layer is triangular), in this case, each Each electrode extension may only extend to the sloped section.
  • the covering layer may not be provided with inclined sections or platform sections at all, for example, the upper surface of the covering layer is only composed of arc surfaces (that is, the cross-section of the covering layer is a semicircular or arc-shaped surface), In this case, each electrode extension may extend onto the arcuate surface.
  • the refractive index of the above cladding layer is smaller than that of the optical waveguide 300 to prevent the light transmitted in the optical waveguide 300 from being emitted.
  • FIG. 8 shows a schematic perspective view of an electro-optic modulator according to an embodiment of the present disclosure.
  • the electro-optic modulator includes a substrate 800, an isolation layer 700 formed on the surface of the substrate 800, and a thin film layer 600 formed on the surface of the isolation layer 700.
  • the above-mentioned coplanar waveguide electrode structure is disposed on the thin film layer 600.
  • the thin film layer 600 can be made of photoelectric material, which can be specifically etched X-cut, Y-cut, or Z-cut thin film lithium niobate.
  • the substrate 800 may be made of silicon, silicon dioxide, silicon and silicon dioxide multilayer material, or silicon dioxide, metal and silicon multilayer material.
  • the above-mentioned electro-optic modulator further includes: an optical component (not shown in the figure).
  • the optical component may include the above-mentioned light-splitting element and light-combining element, and is arranged on the upper surface of the film layer.
  • the light-splitting element is used to split the light propagating in the optical waveguide 300 into the light in the first branch 310 and the second branch 320
  • the light-combining element is used to recombine the light in the first branch 310 and the second branch 320 combined into light propagating in the optical waveguide 300 .
  • the specific manufacturing process of the electro-optic modulator can be as follows: first prepare the substrate 800 and the isolation layer 700, and form the thin film layer 600 on the upper surface of the isolation layer 700, and then arrange the first branch 310 and the second branch of the optical waveguide 300. branch 320, and a first covering layer 410 and a second covering layer 420 are provided on the first branch 310 and the second branch 320. Finally, the first ground electrode 210 , the second ground electrode 220 , the signal electrode 100 , and electrode extensions respectively connected to the three electrodes are further formed on the film layer 600 and the covering layer.
  • a metal layer can be grown on the thin film layer 600 and the cover layer where the first ground electrode 210 and the third extended sub-electrode 530 are located, and then the third extended sub-electrode is finally formed.
  • a mask is set at the position of the first ground electrode 210 and the third extended sub-electrode 530 , and finally an integral pattern of the first ground electrode 210 and the third extended sub-electrode 530 is manufactured by etching.
  • the first inclined section 411 of the first covering layer 410 provides a support surface for the extension of the third extension sub-electrode 530 during the etching process.
  • the formation of the signal electrode 100 , the first extended sub-electrode 510 , the second extended sub-electrode 520 , and the formation of the second ground electrode 220 and the fourth extended sub-electrode 540 are similar to the above-mentioned process, and will not be repeated here.
  • the lower surfaces of the signal electrode 100, the first ground electrode 210 and the second ground electrode 220 are on the thin film layer 600, in some other embodiments, these three electrodes can also penetrate the thin film Layer 600 directly contacts the surface of isolation layer 700 .
  • first”, “second”, “third”, etc. are used for descriptive purposes only, and should not be interpreted as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as “first”, “second” and “third” may explicitly or implicitly include one or more of these features.
  • “plurality” means two or more, unless otherwise specifically defined.
  • a first feature being “on” or “under” a second feature may include direct contact between the first and second features, and may also include the first and second features Not in direct contact but through another characteristic contact between them.
  • “above”, “above” and “above” the first feature on the second feature include that the first feature is directly above and obliquely above the second feature, or simply means that the first feature is horizontally higher than the second feature.
  • “Below”, “under” and “under” the first feature to the second feature include that the first feature is directly below and obliquely below the second feature, or simply means that the first feature is less horizontally than the second feature.

Abstract

本公开提供了一种波导线电极结构和电光调制器，其中，波导线电极结构额外设置位于光波导上方的覆盖层，并使得连接至信号电极或地电极的电极延长部延伸到覆盖层的上表面。本公开实施例的波导线电极结构在保证了信号电极和地电极的电极延长部之间距离足够接近的情况下，同时保证了电极延长部和相应的光波导存在一定的间距，因此，本公开的波导线电极结构在增大了电光转换效率的同时，避免了对第一支路或第二支路中光的正常传输的影响，大幅度提高了波导线电极结构的调制效果。

Description

波导线电极结构和电光调制器 技术领域
本公开涉及光电信号技术领域，尤其涉及一种波导线电极结构和电光调制器。
背景技术
近年来物联网、无人驾驶、远程医疗、远程教育等新兴网络应用业务的飞速发展，对于高速大容量通信技术提出了更高的要求。光通信因为带宽大、可靠性高、成本低、抗干扰能力强等特点，在高速、大容量通信方向取得了飞速的发展。如何将高速电信号加载到光载波上是一项核心研究内容。电光调制器作为将电信号转换成光信号的器件，是光互连、光计算、光通信系统中的核心器件之一，调制器性能对于光信号的传输距离与传输速度起着重要作用。随着人们对于高速、大容量通信技术日益的迫切需求，对于电光调制器的调制速率也提出了更高的要求。
电光调制器是利用某些电光晶体，如铌酸锂晶体(LiNbO3)、砷化稼晶体(GaAs)和钽酸锂晶体(LiTaO3)的电光效应制成的调制器。电光效应即当把电压加到电光晶体上时，电光晶体的折射率将发生变化，结果引起通过该晶体的光波特性的变化，实现对光信号的相位、幅度、强度以及偏振状态的调制。
MZ干涉仪式调制器的输入光波经过一段光路后在一分二的分光原件处被分成相等的两束，分别通过两光波导传输，光波导是由电光材料制成的，其折射率随外加电压的大小而变化，从而使两束光信号到达合光原件处产生相位差。若两束光的光程差是波长的整数倍，两束光相干加强；若两束光的光程差是波长的1/2，两束光相干抵消，调制器输出很小，因此通过控制电压就能对光信号进行调制。
然而，在高速电光调制器共面波导线电极结构设计时，为了防止电信号的微波反射，需要电极材料的阻抗与输入端阻抗保持一致，而同时不仅需要保证电信号传输速度与光信号在波导中传输的群速度相同或接近，又需要尽量降低电信号的传输损耗，这就对电极设计提出了很高的要求。
发明内容
本公开旨在至少解决现有技术中存在的技术问题之一。为此，本公开的一个目的在于提出一种波导线电极结构和电光调制器，以提高对传输光的调制效果。
本公开第一方面的实施例提供了一种波导线电极结构，包括：依次间隔排列设置的第一地电极、信号电极和第二地电极；光波导，包括第一支路和第二支路，第一支路设置在第一地电极和信号电极之间形成的第一间隙中，第二支路设置在第二地电极和信号电极之间形成的第二间隙中；第一覆盖层，至少部分覆盖第一支路；第二覆盖层，至少部分覆盖第二支路；和至少一个电极延长部，每个电极延长部从信号电极面向第一地电极的第一侧、信号电极面向第二地电极的第二侧、第一地电极面向信号电极的第三侧或第二地电极面向信号电极的第四侧开始朝向与该侧邻近的第一间隙或第二间隙伸出，每个电极延长部还延伸至第一覆盖层或第二覆盖层的上表面。
可选地，第一覆盖层和/或第二覆盖层的上表面包括：至少一个倾斜区段，每个倾斜区段沿着从信号电极、第一地电极或第二地电极朝向与该电极相邻的第一支路或第二支路的方向向上倾斜延伸设置；其中电极延长部经由倾斜区段延伸到第一覆盖层或第二覆盖层的上表面；或电极延长部以及其相连的电极的至少一部分经由倾斜区段延伸到第一覆盖层或第二覆盖层的上表面。
可选地，电极延长部包括：多个延伸子电极，每个延伸子电极均从第一地电极、第二地电极或信号电极的一侧开始朝向与该侧邻近的第一间隙或第二间隙伸出。
可选地，每个延伸子电极包括：延伸部，从第一地电极、第二地电极或信号电极的一侧开始朝向与该侧邻近的第一间隙或第二间隙伸出。
可选地，每个延伸子电极还包括：电极部，设置在延伸部伸出的末端端部上，并且沿着平行于第一支路或第二支路的方向延伸设置。
可选地，第一覆盖层和/或第二覆盖层的上表面还包括：平台区段，邻接倾斜区段较高的一侧边缘，其中，光波导设置在平台区段下方，并且延伸子电极的末端设置在平台区段或者倾斜区段上。
可选地，至少一个电极延长部包括：第一电极延长部，设置在信号电极面向第一地电极的第一侧上；第二电极延长部，设置在信号电极面向第二地电极的第二侧上；第三电极延长部，设置在第一地电极面向信号电极的第三侧上；和第四电极延长部，设置在第二地电极面向信号电极的第四侧上。
可选地，第一电极延长部包括多个第一延伸子电极，每个第一延伸子电极均从第一侧朝向第一间隙伸出；并且第二电极延长部包括多个第二延伸子电极，每个第二延伸子电极均从第二侧朝向第二间隙伸出。
可选地，第三电极延长部包括多个第三延伸子电极，每个第三延伸子电极均从第三侧朝向第一间隙伸出；并且第四电极延长部包括多个第四延伸子电极，每个第四延伸子电极均从第四侧朝向第二间隙伸出。
可选地，第一电极延长部包括多个第一延伸子电极，每个第一延伸子电极均从第一侧朝向第一间隙伸出；第二电极延长部包括多个第二延伸子电极，每个第二延伸子电极均从第二侧朝向第二间隙伸出；第三电极延长部包括多个第三延伸子电极，每个第三延伸子电极均从第三侧朝向第一间隙伸出；并且第四电极延长部包括多个第四延伸子电极，每个第四延伸子电极均从第四侧朝向第二间隙伸出。
可选地，第一电极延长部中的每个第一延伸子电极分别与第三电极延长部中对应的第三延伸子电极相对设置；第二电极延长部中的每个第二延伸子电极分别与第四电极延长部中对应的第四延伸子电极相对设置。
可选地，第一覆盖层的上表面包括依次邻接的第一倾斜区段、第一平台区段和第二倾斜区段，第一倾斜区段面向第一地电极，第二倾斜区段面向信号电极；和第二覆盖层的上表面包括依次邻接的第三倾斜区段、第二平台区段和第四倾斜区段，第三倾斜区段面向信号电极，第四倾斜区段面向第二地电极，其中第一电极延长部经由第二倾斜区段延伸到第一平台区段，第二电极延长部经由第三倾斜区段延伸到第二平台区段，第三电极延长部经由第一倾斜区段延伸到第一平台区段，第四电极延长部经由第四倾斜区段延伸到第二平台区段。
可选地，在每个电极延长部中，相邻两个延伸子电极的电极部间隔设置。
可选地，在每个电极延长部中，相邻两个延伸子电极的电极部首尾连接设置。
可选地，覆盖层的折射率小于光波导的折射率。
本公开第二方面的实施例提供了一种电光调制器，包括：基底；隔离层，设置在基底的上表面；薄膜层，设置在隔离层的上表面，薄膜层由光电材料制成；上述的波导线电极结构设置在薄膜层的上表面；和光学组件，设置在薄膜层的上表面，用于将光波导中传播的光分开成第一支路和第二支路中的光，并且用于将第一支路和第二支路中的光再次合并为光波导中传播的光。
可选地，信号电极、第一地电极和第二地电极的下表面穿透薄膜层直接接触隔离层。
可选地，薄膜层为经过刻蚀加工的X切，Y切，或者Z切的薄膜铌酸锂。
本公开实施例的波导线电极结构额外设置位于光波导上方的覆盖层，并使得连接至信号电极或地电极的电极延长部延伸到覆盖层的上表面。本公开实施例的波导线电极结 构在保证了信号电极和地电极的电极延长部之间距离足够靠近的情况下，同时保证了电极延长部的边缘和相应的光波导存在一定的间距，因此，本实施例的波导线电极结构在增大了电光转换效率的同时，避免了对第一支路或第二支路中光的正常传输的影响，大幅度提高了波导线电极结构的调制效果。
附图说明
在附图中，除非另外规定，否则贯穿多个附图相同的附图标记表示相同或相似的部件或元素。这些附图不一定是按照比例绘制的。应该理解，这些附图仅描绘了根据本公开公开的一些实施方式，而不应将其视为是对本公开范围的限制。
图1示出了本公开一个实施例的波导线电极结构的俯视图；
图2示出了图1中的波导线电极结构的立体示意图；
图3示出了图1中的波导线电极结构的横截面示意图；
图4示出了本公开另一个实施例的波导线电极结构的俯视图；
图5示出了图4中的波导线电极结构的立体示意图；
图6示出了本公开又一个实施例的波导线电极结构的俯视图；
图7示出了图6中的波导线电极结构的立体示意图；
图8示出了本公开又一个实施例的波导线电极结构的俯视图；
图9示出了本公开又一个实施例的波导线电极结构的俯视图；
图10示出了本公开又一个实施例的波导线电极结构的立体示意图；
图11示出了本公开一个实施例的电光调制器的立体示意图。
具体实施方式
在下文中，仅简单地描述了某些示例性实施例。正如本领域技术人员可认识到的那样，在不脱离本公开的精神或范围的情况下，可通过各种不同方式修改所描述的实施例。因此，附图和描述被认为本质上是示例性的而非限制性的。
本公开首先提供了一种波导线电极结构，图1示出了本公开一个实施例的波导线电极结构的俯视图；图2示出了图1中的波导线电极结构的立体示意图；图3示出了图1中的波导线电极结构的横截面示意图。如图1-图3所示，该波导线电极结构包括：第一地电极210、信号电极100、第二地电极220、光波导300、第一覆盖层410、第二覆盖层420和至少一个电极延长部。第一地电极210、信号电极100和第二地电极220依次间隔排列设置。光波导300包括第一支路310和第二支路320，第一支路310设置在第一地电 极210和信号电极100之间形成的第一间隙250中，第二支路320设置在第二地电极220和信号电极100之间形成的第二间隙260中。第一覆盖层410、第二覆盖层420至少分别部分覆盖第一支路310或第二支路320。每个电极延长部设置在信号电极100面向第一地电极210的第一侧101、信号电极100面向第二地电极220的第二侧102、第一地电极210面向信号电极100的第三侧213或第二地电极220面向信号电极100的第四侧224上，每个电极延长部均从所在的电极一侧开始朝向与该电极一侧邻近的第一间隙250或第二间隙260伸出，每个延伸子电极还延伸至第一覆盖层410或第二覆盖层420的上表面。
具体地，如图1所示，第一地电极210、信号电极100、第二地电极220均沿着第一方向、即图中所示的y方向延伸设置，三个电极的延伸长度以及它们的宽度可以均相等。第一地电极210、信号电极100和第二地电极220还依次沿着第二方向、即图中所示的z方向间隔排列设置，因此，在第一地电极210和信号电极100之间形成第一间隙250，在第二地电极220和信号电极100之间形成第二间隙260。上述第一间隙250和第二间隙260的宽度大小可以相等。上述三个电极可以设置在同一平面内，即设置在图中所示的y-z平面内。上述三个电极可以由金属材料制成，并且信号电极100还连接到外部调制电路，以分别在第一地电极210和信号电极100之间以及在第二地电极220和信号电极100之间施加调制电压V。光波导300包括第一干路330、第二干路340、第一支路310和第二支路320。光波导300的第一干路330在邻近上述三个电极的位置通过分光原件(图中未示出)分开成第一支路310和第二支路320，其中第一支路310延伸进入第一间隙250并在间隙中沿着第一方向(y方向)延伸设置，第二支路320延伸进入第二间隙260并在间隙中同样沿着第一方向(y方向)延伸设置，也就是说，第一支路310和第二支路320保持平行。在第一支路310和第二支路320延伸到远离三个电极的位置处时，通过合光原件(图中未示出)结合成为第二干路340。如图2和图3所示，在第一支路310的上方覆盖有第一覆盖层410，在第二支路320的上方覆盖有第二覆盖层420。上述两个覆盖层同样沿着图1所示的y方向延伸设置，并且在第三方向、即x方向上形成两个隆起。覆盖层的截面可以是三角形、长方形、梯形、半圆形等任何适合的形状，第一支路310或第二支路320的波导线可以设置在覆盖层底部的中央，也就是说，如图3所示，第一支路310或第二支路320的光波导横截面位于覆盖层的横截面的底部中间位置。
在本实施例中，至少一个电极延长部可以包括4个电极延长部，如图1所示，第一电极延长部51设置在信号电极100面向第一地电极210的第一侧101上；第二电极延长部52设置在信号电极100面向第二地电极220的第二侧102上；第三电极延长部53设 置在第一地电极210面向信号电极100的第三侧213上；第四电极延长部54设置在第二地电极220面向信号电极100的第四侧224上。
在本实施例中，每个电极延长部均包括：多个延伸子电极。每个延伸子电极均从第一地电极、第二地电极或信号电极的一侧开始朝向与该侧邻近的第一间隙250或第二间隙260伸出。具体地，第一电极延长部51包括多个第一延伸子电极510，每个第一延伸子电极510均从第一侧101朝向第一间隙250伸出；第二电极延长部52包括多个第二延伸子电极520，每个第二延伸子电极520均从第二侧102朝向第二间隙260伸出；第三电极延长部53包括多个第三延伸子电极530，每个第三延伸子电极530均从第三侧213朝向第一间隙250伸出；第四电极延长部54包括多个第四延伸子电极540，每个第四延伸子电极540均从第四侧224朝向第二间隙260伸出。以第一电极延长部51为例，第一电极延长部51中的多个第一延伸子电极510沿着第一侧101间隔设置，每个延伸子电极的根部都连接到信号电极100，并且每个延伸子电极同样由金属材料制成，因此施加到信号电极100上的调制电压可以进一步传导作用于第一延伸子电极510上。多个第二延伸子电极520至第四延伸子电极540以同样的方式设置在相应的信号电极100或地电极的一侧上，这里不再进行赘述。
上述延伸子电极的具体结构如图2所示，以第三延伸子电极530为例，每个第三延伸子电极53可以包括延伸部531和电极部532。延伸部531从第一地电极210的一侧开始朝向与该侧邻近的第一间隙250伸出。电极部532设置在延伸部531伸出的末端端部上，并且沿着平行于第一支路310的方向(即图中y方向)延伸设置，也就是说，每个延伸子电极的延伸部531和电极部532相互垂直设置。再例如，每个第一延伸子电极510也可以包括延伸部511和电极部512。延伸部511从信号电极100的一侧开始朝向与该侧邻近的第一间隙250伸出。电极部512设置在延伸部511伸出的末端端部上，并且沿着平行于第一支路310的方向(即图中y方向)延伸设置。第二延伸子电极520和第四延伸子电极540的结构和设置方式与上述第一延伸子电极510和第三延伸子电极530相类似，这里不再赘述。在本实施例中，每个延伸子电极的延伸部连接到电极部的沿其延伸方向上的中点，也就是说，在如图1所示的波导线电极结构的俯视图中，每个延伸子电极为类似“T”形的结构。另外，每个延伸子电极的延伸部长度相等，从而使得每个电极延长部的所有延伸子电极的电极部在同一条直线上。
本公开的波导线电极结构通过在第一地电极210、第二地电极220和/或信号电极100上设置延伸子电极，使得信号电极100和地电极之间的间隔缩小，有利于减少调制电压 的电信号的传输损耗。另外，波导线电极结构的一些固有特性，例如：阻抗和电信号的传播速度等，和这些延伸子电极的某些属性(例如：延伸部的长度、电极部的长度等)密切相关，因此，在实际的波导线电极结构制作过程中，可以灵活设置这些属性的数值，以使得波导线电极结构制成的电光调制器的阻抗与输入端阻抗相同或相近(一般为50Ω)，并且使得电信号在调制电路中的传播速度与光在光波导300中的速度相同或相近，从而提高光调制的效果。
第一覆盖层410和/或第二覆盖层420的上表面包括：至少一个倾斜区段。每个倾斜区段沿着从信号电极100、第一地电极210或第二地电极220朝向与该电极相邻的第一支路310或第二支路320的方向向上倾斜延伸设置，电极延长部经由倾斜区段延伸到第一覆盖层410或第二覆盖层420的上表面。在本实施例中，第一覆盖层410和第二覆盖层420的横截面均可以为包含倾斜区段的梯形。通过设置倾斜区段，可以使得相应的地电极或信号电极100的电极延长部延伸到覆盖层的上表面。如图2和图3所示，第一覆盖层410的上表面包括依次邻接的第一倾斜区段411、第一平台区段413和第二倾斜区段412，第一倾斜区段411面向第一地电极210，第二倾斜区段412面向信号电极100。第一倾斜区段411沿着从第一地电极210到第一支路310的方向向上倾斜延伸设置。第二倾斜区段412沿着从信号电极100到第一支路310的方向向上倾斜延伸设置。第二覆盖层420的上表面包括依次邻接的第三倾斜区段421、第二平台区段423和第四倾斜区段422，第三倾斜区段421面向信号电极100，第四倾斜区段422面向第二地电极220。第三倾斜区段421沿着从信号电极100到第二支路320的方向向上倾斜延伸设置。第四倾斜区段422沿着从第二地电极220到第二支路320的方向向上倾斜延伸设置。第一电极延长部51经由第二倾斜区段412延伸到第一平台区段413，第二电极延长部52经由第三倾斜区段421延伸到第二平台区段423，第三电极延长部53经由第一倾斜区段411延伸到第一平台区段413，第四电极延长部54经由第四倾斜区段422延伸到第二平台区段423。在上述实施例中，只有电极延长部本身延伸到对应的倾斜区段，相应的第一地电极210、第二地电极220或信号电极100并没有延伸到对应的倾斜区段，并且上述电极的边缘还与对应的覆盖层边缘间隔一定距离设置。但是可以理解，在另外一些实施例中，这三个电极的一部分也可以延伸到对应的倾斜区段，也就是说，与电极相连的电极延长部从倾斜区段开始向上延伸设置。
在本实施例中，第一电极延长部51的第一延伸子电极510至第四电极延长部54的第四延伸子电极540具有相同的数量，而且，多个第一延伸子电极510和多个第三延伸 子电极530在第一平台区段413上一一相对设置，从而使得，在y-z平面上观察，每个第一延伸子电极510的电极部与对应的第三延伸子电极530的电极部相互对齐，第一支路310位于各个第一延伸子电极510的电极部和各个第三延伸子电极530的电极部之间。同理，多个第二延伸子电极520和多个第四延伸子电极540在第二平台区段423上一一对应设置，从而使得，在y-z平面上观察，每个第二延伸子电极520的电极部与对应的第四延伸子电极540的电极部相互对齐，第二支路320位于各个第二延伸子电极520的电极部和各个第四延伸子电极540的电极部之间。
一般而言，调制信号电压(即施加在信号电极100上和地电极之间的电压)的电损耗和第一间隙250和第二间隙260的大小相关，第一间隙250和第二间隙260越小(即信号电极100和地电极越近)，电光调制效率越高。但是，如果将信号电极100或地电极设置成距离光波导300的第一支路310或第二支路320过近，可能会导致上述电极影响第一支路310或第二支路320中光的正常传输。根据本实施例的波导线电极结构，额外设置位于光波导300上方的覆盖层，并使得连接至信号电极100或地电极的电极延长部延伸到覆盖层的上表面。这样设置，在保证了信号电极100和地电极的电极延长部距离足够靠近的情况下，同时保证了电极延长部和相应的光波导300(即第一支路310或第二支路320)之间存在一定的间距，因此，本实施例的波导线电极结构在增大了电光转换效率的同时，避免了对第一支路310或第二支路320中光的正常传输的影响，大幅度提高了波导线电极结构的调制效果。
下面结合图4-图9进一步描述本公开的一些其他变形实施例。图4示出了本公开另一个实施例的波导线电极结构的俯视图。图5示出了图4中的波导线电极结构的立体示意图。如图4所示，第一电极延长部51包括多个第一延伸子电极510，每个第一延伸子电极510均从第一侧101朝向第一间隙250伸出；第二电极延长部52包括多个第二延伸子电极520，每个第二延伸子电极520均从第二侧102朝向第二间隙260伸出。也就是说在第三电极延长部53和第四电极延长部54不包括延伸子电极，而是如图5所示从相应的电极一侧整片向外延伸。在另外一些实施例中，还可以将第一覆盖层410设计成仅包含面向信号电极100的第二倾斜区段412的形式。例如第一覆盖层410的截面可以被设计成直角梯形的形式，其直角一面面向第一地电极210，其倾斜的一面(即上述第二倾斜区段412)面向信号电极100，第三电极延长部53可以直接延伸到第一覆盖层410的上表面。还可以将第二覆盖层420设计成仅包含面向信号电极100的第三倾斜区段421的形式。例如第二覆盖层420的截面可以被设计成直角梯形的形式，其直角一面面向第二 地电极220，其倾斜的一面(即上述第三倾斜区段421)面向信号电极100，第四电极延长部54可以直接延伸到第二覆盖层420的上表面。
图6示出了本公开又一个实施例的波导线电极结构的俯视图，图7示出了图6中的波导线电极结构的立体示意图。如图6所示，第三电极延长部53包括多个第三延伸子电极530，每个第三延伸子电极530均从第三侧213朝向第一间隙250伸出；第四电极延长部54包括多个第四延伸子电极540，每个第四延伸子电极540均从第四侧224朝向第二间隙260伸出。也就是说第一电极延长部51和第二电极延长部52不包括延伸子电极，而是如图7所示从相应的电极一侧整片向外延伸。在另外一些实施例中，还可以将第一覆盖层410设计成仅包含面向第一地电极210的第一倾斜区段411的形式。例如第一覆盖层410的截面可以被设计成直角梯形的形式，其直角一面面向信号电极100，其倾斜的一面(即上述第一倾斜区段411)面向第一地电极210，第一电极延长部51可以直接延伸到第一覆盖层410的上表面。还可以将第二覆盖层420设计成仅包含面向第二地电极220的第四倾斜区段422的形式。例如第二覆盖层420的截面可以被设计成直角梯形的形式，其直角一面面向信号电极100，其倾斜的一面(即上述第四倾斜区段422)面向第二地电极220，第二电极延长部52可以直接延伸到第二覆盖层420的上表面。
图8示出了本公开又一个实施例的波导线电极结构的俯视图。虽然在图1-图7所示的实施例中，每个延伸子电极的延伸部连接到相应电极部的靠近其中点的位置，但是在图8所示的实施例中，在每个延伸子电极中，延伸部的末端端部还可以连接到电极部在其延伸方向上的一端。也就是说，在y-z平面上观察，每个延伸子电极呈“L”形。
图9示出了本公开又一个实施例的波导线电极结构的俯视图。虽然在图1-图8所示的多个实施例中，在每个电极延长部中，相邻两个延伸子电极的电极部间隔设置，但是在如图9所示的另外一些实施例中，相邻两个延伸子电极的电极部还可以首尾连接设置。也就是说，在每个电极延长部中，各个延伸子电极的电极部依次连接从而形成平行于第一支路310或第二支路320的一条直线。
图10示出了本公开另一个实施例的波导线电极结构的立体示意图。该实施例的波导线电极结构和图2所示的波导线电极结构的不同之处在于：每个电极延长部的延伸子电极仅包含延伸部，而不包含电极部。在第一覆盖层410的第一平台区段413上，每个第一延伸子电极510中的延伸部和对应的第三延伸子电极530中的延伸部的末端相对齐，而在第二覆盖层420的第二平台区段423上，每个第二延伸子电极520中的延伸部和对应的第四延伸子电极540中的延伸部的末端相对齐。
需要补充说明的是，虽然在上述多个实施例中，每个电极延长部均延伸到了相应覆盖层的平台区段，但是在另外一些实施例中，每个电极延长部可以仅延伸到倾斜区段。在电极延长部包括延伸子电极的情况下，延伸子电极的末端也可以仅延伸到倾斜区段。在另外一些实施例中，覆盖层可以根本不设置平台区段，例如覆盖层的上表面仅由两个倾斜区段组成(即，覆盖层的横截面为三角形)，在这种情况下，每个电极延长部可以仅延伸到倾斜区段。在另外一些实施例中，覆盖层可以根本不设置倾斜区段或平台区段，例如覆盖层的上表面仅由弧面组成(即，覆盖层的横截面为半圆形或弧形面)，在这种情况下，每个电极延长部可以延伸到弧面上。
另外，上述覆盖层的折射率小于光波导300的折射率，以防止光波导300中传输的光射出。
根据本公开的另一方面，本公开还提供了一种电光调制器。图8示出了本公开一个实施例的电光调制器的立体示意图。该电光调制器包括基底800、形成于基底800表面的隔离层700以及形成于隔离层700表面的薄膜层600，薄膜层600上设置有上述的共面的波导线电极结构。薄膜层600可以由光电材料制成，其具体可以为经过刻蚀加工的X切，Y切，或者Z切的薄膜铌酸锂。基底800可以由硅、二氧化硅、硅和二氧化硅多层材料或者二氧化硅、金属与硅的多层材料制成。信号电极100、第一地电极210和第二地电极220中的任一者和与其连接的延伸子电极可以通过刻蚀加工形成。另外，上述电光调制器还包括：光学组件(未在图中示出)。光学组件可以包括上文提及的分光原件和合光原件，并设置在薄膜层的上表面。分光原件用于将光波导300中传播的光分开成第一支路310和第二支路320中的光，合光原件用于将第一支路310和第二支路320中的光再次合并为光波导300中传播的光。
该电光调制器的具体的制造过程可以是，先准备好基底800和隔离层700，并在隔离层700的上表面形成薄膜层600，然后布置好光波导300的第一支路310和第二支路320，并在第一支路310和第二支路320上设置第一覆盖层410和第二覆盖层420。最后在薄膜层600和覆盖层上进一步形成第一地电极210、第二地电极220、信号电极100以及分别与三个电极相连的电极延伸部。以第一地电极210和第三延伸子电极530为例，可以在薄膜层600和覆盖层上的第一地电极210和第三延伸子电极530所在的位置生长金属层，然后在最终形成第一地电极210和第三延伸子电极530的位置设置掩模，最后通过刻蚀加工制造出第一地电极210和第三延伸子电极530的一体图案。第一覆盖层410的第一倾斜区段411在该刻蚀加工过程中为第三延伸子电极530的延伸部提供了支撑面。信号 电极100和第一延伸子电极510、第二延伸子电极520的形成以及第二地电极220和第四延伸子电极540的形成与上述过程类似，这里不再赘述。
另外，虽然在本实施例中，信号电极100、第一地电极210和第二地电极220的下表面在薄膜层600上，但是在另外一些实施例中，这三个电极还可以穿透薄膜层600直接接触隔离层700表面。
应当理解的是，在本说明书中，术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”、“顺时针”、“逆时针”、“轴向”、“径向”、“周向”等指示的方位或位置关系或尺寸为基于附图所示的方位或位置关系或尺寸，使用这些术语仅是为了便于描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，并且因此不能理解为对本公开的保护范围的限制。
此外，术语“第一”、“第二”、“第三”等仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”、“第三”的特征可以明示或者隐含地包括一个或者更多个该特征。在本公开的描述中，“多个”的含义是两个或两个以上，除非另有明确具体的限定。
在本公开中，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或成一体；可以是机械连接，也可以是电连接，还可以是通信；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本公开中的具体含义。
在本公开中，除非另有明确的规定和限定，第一特征在第二特征之“上”或之“下”可以包括第一和第二特征直接接触，也可以包括第一和第二特征不是直接接触而是通过它们之间的另外的特征接触。而且，第一特征在第二特征“之上”、“上方”和“上面”包括第一特征在第二特征正上方和斜上方，或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”包括第一特征在第二特征正下方和斜下方，或仅仅表示第一特征水平高度小于第二特征。
本说明书提供了能够用于实现本公开的许多不同的实施方式或例子。应当理解的是，这些不同的实施方式或例子完全是示例性的，并且不用于以任何方式限制本公开的保护范围。本领域技术人员在本公开的说明书的公开内容的基础上，能够想到各种变化或替 换，这些都应涵盖在本公开的保护范围之内。因此，本公开的保护范围应以所附权利要求所限定的保护范围为准。

Claims (18)

  1. 一种波导线电极结构，其特征在于，包括：
    依次间隔排列设置的第一地电极、信号电极和第二地电极；
    光波导，包括第一支路和第二支路，所述第一支路设置在所述第一地电极和所述信号电极之间形成的第一间隙中，所述第二支路设置在所述第二地电极和所述信号电极之间形成的第二间隙中；
    第一覆盖层，至少部分覆盖所述第一支路；
    第二覆盖层，至少部分覆盖所述第二支路；和
    至少一个电极延长部，每个所述电极延长部从所述信号电极面向所述第一地电极的第一侧、所述信号电极面向所述第二地电极的第二侧、所述第一地电极面向所述信号电极的第三侧或所述第二地电极面向所述信号电极的第四侧开始朝向与该侧邻近的所述第一间隙或所述第二间隙伸出，每个所述电极延长部还延伸至所述第一覆盖层或第二覆盖层的上表面。
  2. 根据权利要求1所述的波导线电极结构，其特征在于，所述第一覆盖层和/或所述第二覆盖层的上表面包括：
    至少一个倾斜区段，每个所述倾斜区段沿着从所述信号电极、所述第一地电极或所述第二地电极朝向与该电极相邻的所述第一支路或第二支路的方向向上倾斜延伸设置；其中
    所述电极延长部经由所述倾斜区段延伸到所述第一覆盖层或所述第二覆盖层的上表面；或
    所述电极延长部以及其相连的电极的至少一部分经由所述倾斜区段延伸到所述第一覆盖层或所述第二覆盖层的上表面。
  3. 根据权利要求2所述的波导线电极结构，其特征在于，所述电极延长部包括：
    多个延伸子电极，每个所述延伸子电极均从所述第一地电极、所述第二地电极或所述信号电极的一侧开始朝向与该侧邻近的所述第一间隙或所述第二间隙伸出。
  4. 根据权利要求3所述的波导线电极结构，其特征在于，每个所述延伸子电极包括：
    延伸部，从所述第一地电极、所述第二地电极或所述信号电极的一侧开始朝向与该侧邻近的所述第一间隙或所述第二间隙伸出。
  5. 根据权利要求4所述的波导线电极结构，其特征在于，每个所述延伸子电极还包括：
    电极部，设置在所述延伸部伸出的末端端部上，并且沿着平行于所述第一支路或所述第二支路的方向延伸设置。
  6. 根据权利要求3所述的波导线电极结构，其特征在于，所述第一覆盖层和/或所述第二覆盖层的上表面还包括：
    平台区段，邻接所述倾斜区段较高的一侧边缘，其中，
    所述光波导设置在所述平台区段下方，并且所述延伸子电极的末端设置在所述平台区段或者所述倾斜区段上。
  7. 根据权利要求1-6中任一项所述的波导线电极结构，其特征在于，所述至少一个电极延长部包括：
    第一电极延长部，设置在所述信号电极面向所述第一地电极的第一侧上；
    第二电极延长部，设置在所述信号电极面向所述第二地电极的第二侧上；
    第三电极延长部，设置在所述第一地电极面向所述信号电极的第三侧上；和
    第四电极延长部，设置在所述第二地电极面向所述信号电极的第四侧上。
  8. 根据权利要求7所述的波导线电极结构，其特征在于，
    所述第一电极延长部包括多个第一延伸子电极，每个所述第一延伸子电极均从所述第一侧朝向所述第一间隙伸出；并且
    所述第二电极延长部包括多个第二延伸子电极，每个所述第二延伸子电极均从所述第二侧朝向所述第二间隙伸出。
  9. 根据权利要求7所述的波导线电极结构，其特征在于，
    所述第三电极延长部包括多个第三延伸子电极，每个所述第三延伸子电极均从所述第三侧朝向所述第一间隙伸出；并且
    所述第四电极延长部包括多个第四延伸子电极，每个所述第四延伸子电极均从所述第四侧朝向所述第二间隙伸出。
  10. 根据权利要求7所述的波导线电极结构，其特征在于
    所述第一电极延长部包括多个第一延伸子电极，每个所述第一延伸子电极均从所述第一侧朝向所述第一间隙伸出；
    所述第二电极延长部包括多个第二延伸子电极，每个所述第二延伸子电极均从所述第二侧朝向所述第二间隙伸出；
    所述第三电极延长部包括多个第三延伸子电极，每个所述第三延伸子电极均从所述第三侧朝向所述第一间隙伸出；并且
    所述第四电极延长部包括多个第四延伸子电极，每个所述第四延伸子电极均从所述第四侧朝向所述第二间隙伸出。
  11. 根据权利要求10所述的波导线电极结构，其特征在于，
    所述第一电极延长部中的每个所述第一延伸子电极分别与所述第三电极延长部中对应的所述第三延伸子电极相对设置；
    所述第二电极延长部中的每个所述第二延伸子电极分别与所述第四电极延长部中对应的所述第四延伸子电极相对设置。
  12. 根据权利要求7所述的波导线电极结构，其特征在于，
    所述第一覆盖层的上表面包括依次邻接的第一倾斜区段、第一平台区段和第二倾斜区段，所述第一倾斜区段面向所述第一地电极，所述第二倾斜区段面向所述信号电极；和
    所述第二覆盖层的上表面包括依次邻接的第三倾斜区段、第二平台区段和第四倾斜区段，所述第三倾斜区段面向所述信号电极，所述第四倾斜区段面向所述第二地电极，其中
    所述第一电极延长部经由所述第二倾斜区段延伸到所述第一平台区段，所述第二电极延长部经由所述第三倾斜区段延伸到所述第二平台区段，所述第三电极延长部经由所述第一倾斜区段延伸到所述第一平台区段，所述第四电极延长部经由所述第四倾斜区段延伸到所述第二平台区段。
  13. 根据权利要求3-6中任一项所述的波导线电极结构，其特征在于，
    在每个所述电极延长部中，相邻两个所述延伸子电极的电极部间隔设置。
  14. 根据权利要求3-6中任一项所述的波导线电极结构，其特征在于，
    在每个所述电极延长部中，相邻两个所述延伸子电极的电极部首尾连接设置。
  15. 根据权利要求1-6中任一项所述的波导线电极结构，其特征在于，
    所述覆盖层的折射率小于所述光波导的折射率。
  16. 一种电光调制器，其特征在于，包括：
    基底；
    隔离层，设置在所述基底的上表面；
    薄膜层，设置在所述隔离层的上表面，所述薄膜层由光电材料制成；
    如权利要求1-15中任一项所述的波导线电极结构，设置在所述薄膜层的上表面；和光学组件，设置在所述薄膜层的上表面，用于将所述光波导中传播的光分开成所述第一支路和所述第二支路中的光，并且用于将所述第一支路和所述第二支路中的光再次合并为所述光波导中传播的光。
  17. 根据权利要求16所述的电光调制器，其特征在于，
    所述信号电极、所述第一地电极和所述第二地电极的下表面穿透所述薄膜层直接接触所述隔离层。
  18. 根据权利要求16所述的电光调制器，其特征在于，所述薄膜层为经过刻蚀加工的X切，Y切，或者Z切的薄膜铌酸锂。
PCT/CN2022/100239 2021-06-25 2022-06-21 波导线电极结构和电光调制器 WO2022268090A1 (zh)

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