WO2022264362A1 - Système, dispositif et procédé d'inspection de défauts - Google Patents

Système, dispositif et procédé d'inspection de défauts Download PDF

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Publication number
WO2022264362A1
WO2022264362A1 PCT/JP2021/023044 JP2021023044W WO2022264362A1 WO 2022264362 A1 WO2022264362 A1 WO 2022264362A1 JP 2021023044 W JP2021023044 W JP 2021023044W WO 2022264362 A1 WO2022264362 A1 WO 2022264362A1
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WIPO (PCT)
Prior art keywords
measurement
unit
defect inspection
imaging
elastic wave
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PCT/JP2021/023044
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English (en)
Japanese (ja)
Inventor
貴秀 畠堀
健二 田窪
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株式会社島津製作所
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Priority to JP2023528881A priority Critical patent/JPWO2022264362A1/ja
Priority to PCT/JP2021/023044 priority patent/WO2022264362A1/fr
Publication of WO2022264362A1 publication Critical patent/WO2022264362A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes

Definitions

  • the present invention relates to a defect inspection system, a defect inspection apparatus, and a defect inspection method.
  • defect inspection method and defect inspection apparatus are known.
  • Such defect inspection method and defect inspection apparatus are disclosed in Japanese Patent No. 6451695, for example.
  • the defect inspection apparatus described in Japanese Patent No. 6451695 includes an excitation unit that excites elastic waves in an object to be inspected, an illumination unit that irradiates a measurement region on the surface of the object to be inspected with a strobe, and a displacement measurement unit. Prepare.
  • the displacement measuring unit measures the displacement of each point in the measurement area using laser interferometry.
  • a reflected laser beam is emitted from an illumination unit, which is a laser light source, and is reflected at each point in a measurement area, and a reference laser beam is emitted from the illumination unit and passed through a different optical path from the reflected laser beam. be interfered with.
  • the displacement of each point in the measurement area is measured by measuring the intensity of the interference light obtained by causing the reflected laser light and the reference laser light to interfere with each other.
  • the displacement measuring section measures the vibration state (amplitude and phase) of each point in the measurement area based on the measured displacement.
  • an image is created in which the difference in displacement due to vibration is represented by the difference in brightness of the image, and the created image A configuration is disclosed in which a discontinuous portion of the vibration state is detected as a defect by visually confirming by an inspector.
  • the size of the measurement area to be measured is limited.
  • the excitation unit that excites the elastic wave, the illumination unit (irradiation unit) that performs strobe irradiation, and the displacement measurement unit that measures the displacement should be changed once as the measurement area (installation position) is changed. need to be lifted and installed in another installation position. Therefore, every time the excitation unit, the illumination unit, and the displacement measurement unit are moved, it is necessary to adjust the installation position and the measurement field of view, increasing the workload of the inspection operator. Therefore, it is desired to suppress an increase in the workload of the inspection operator even when measuring an inspection object having a relatively large area.
  • the present invention has been made to solve the above-mentioned problems, and one object of the present invention is to reduce the workload of the inspection operator even when measuring an inspection object having a relatively large area.
  • An object of the present invention is to provide a defect inspection system, a defect inspection apparatus, and a defect inspection method capable of suppressing the increase.
  • a defect inspection system includes an excitation section for exciting an elastic wave in an inspection object, and imaging elements arranged in a line, wherein the excitation section generates an elastic wave.
  • a control unit configured to sequentially acquire the imaging results of and to acquire a two-dimensional distribution of the vibration state for defect inspection in the measurement region based on the sequentially acquired line-shaped imaging results.
  • line shape means not only that the number of pixels in the width direction (minor axis direction) of the line shape (straight line) is 1, but also that the number of pixels in the width direction of the line shape (straight line) is 1. is described as a broad concept including multiple.
  • the moving mechanism moves along the outer surface of the main housing, at each of the plurality of measurement positions in the measurement area, line-shaped imaging results by the measurement unit , and acquires a two-dimensional distribution of vibration states for defect inspection in the measurement region based on the sequentially acquired line-shaped imaging results.
  • the measurement area is linearly aligned at each of the multiple measurement positions without adjusting the installation position and the measurement field of view. It is possible to easily acquire the imaging result of the imaging. Therefore, by combining the line-shaped imaging results obtained at each of the plurality of measurement positions, it is possible to easily obtain the imaging results of the entire measurement region. As a result, it is possible to suppress an increase in the workload of the inspection operator even when measuring an inspection object having a relatively large area.
  • a defect inspection apparatus includes an excitation unit that excites elastic waves in an inspection object, and imaging elements that are arranged in a line.
  • a defect inspection apparatus includes linearly arranged imaging elements, and linearly images a measurement region of an outer surface of an object to be inspected in a state in which elastic waves are excited by an excitation unit.
  • a measuring unit that measures Further it comprises a body casing part in which the measuring part is arranged, and a movement mechanism for movably arranging the body casing part along the outer surface of the inspection object.
  • the measurement area is linearly aligned at each of the multiple measurement positions without adjusting the installation position and the measurement field of view. It is possible to easily acquire the imaging result of the imaging. Therefore, by combining the line-shaped imaging results measured at each of the plurality of measurement positions, it is possible to easily obtain the imaging results over the entire measurement region. As a result, it is possible to provide a defect inspection apparatus capable of suppressing an increase in the workload of an inspection operator even when measuring an inspection object having a relatively large area.
  • a defect inspection method comprises a step of exciting an elastic wave in an object to be inspected; a step of sequentially obtaining line-shaped imaging results by performing linear imaging while moving the measurement position and measuring; and obtaining a two-dimensional distribution of vibration states.
  • linear imaging is performed while moving the measurement position.
  • Line-shaped imaging results are obtained sequentially by measuring the A two-dimensional distribution of the vibration state for defect inspection in the measurement area is obtained based on the line-shaped imaging results that are sequentially obtained.
  • linear imaging results can be obtained sequentially by performing measurements by taking linear images while moving the measurement positions at each of the plurality of measurement positions. Unlike the case where the measuring part to be measured is lifted one by one and moved to another measuring position without having to hold the line at each of the plurality of measuring positions in the measuring area without adjusting the measuring position and the measuring field of view.
  • the defect inspection system and the defect inspection apparatus are capable of suppressing an increase in the workload of the inspection operator even when measuring an inspection object having a relatively large area. , and a defect inspection method.
  • FIG. 1 is a schematic diagram showing the configuration of a defect inspection system according to a first embodiment
  • FIG. It is the figure which showed the structure of the defect inspection apparatus by 1st Embodiment. It is a figure for demonstrating the wheel part and vibrator by 1st Embodiment.
  • FIG. 4 is a diagram for explaining a method of acquiring imaging results while changing measurement positions according to the first embodiment;
  • FIG. 4 is a diagram for explaining the period of oscillation of elastic waves and the exposure time of imaging by the measurement unit according to the first embodiment; It is the figure which showed an example of the vibration state image by 1st Embodiment.
  • 4 is a diagram (flow chart) for explaining a defect inspection method according to the first embodiment;
  • FIG. 11 is a diagram for explaining the period of vibration of elastic waves and the rate of imaging by the measurement unit according to the second embodiment; It is a schematic diagram showing the configuration of the defect inspection system according to the third embodiment. It is the figure which showed the structure of the defect inspection apparatus by 3rd Embodiment. It is a figure for demonstrating the phase of an elastic wave and irradiation of the laser beam by an irradiation part by 3rd Embodiment.
  • FIG. 10 is a diagram showing an example of a defect image according to modifications of the first to third embodiments;
  • a defect inspection system 100 performs non-destructive defect inspection by laser interferometry on a measurement area Pa (see FIG. 2) of an inspection object P, which is, for example, an aircraft part. Used.
  • the inspection object P is, for example, a honeycomb material or carbon fiber reinforced polymer (CFRP).
  • the defective portion Q includes cracks and peeling occurring inside (surface layer/surface) of the measurement area Pa.
  • a defect inspection system 100 according to the first embodiment includes a defect inspection device 101 and a processing device 102 .
  • the defect inspection device 101 and the processing device 102 are connected by a cable C, and are configured to be able to transmit and receive signals to each other.
  • the defect inspection device 101 and the processing device 102 may be configured to be able to transmit and receive signals to each other through wireless communication.
  • the defect inspection apparatus 101 includes a vibrator 10 , an irradiation section 20 , a measurement section 30 (see FIG. 2), a housing 40 , a grip section 50 and a wheel section 60 .
  • the vibrator 10 is an example of the "excitation section” in the claims.
  • the wheel part 60 is an example of a “moving mechanism” in the claims.
  • the housing 40 is an example of the “main body housing section” and the “shielding section” in the claims.
  • the vibrator 10 excites an elastic wave in the inspection object P.
  • the vibrator 10 is arranged inside a wheel portion 60 (wheel portion 60a), which will be described later.
  • the vibrator 10 is configured to excite an elastic wave in the inspection object P by propagating the vibration through the wheel portion 60 .
  • the vibrator 10 also converts an AC signal from a signal generator 90 of the processing device 102, which will be described later, into mechanical vibration.
  • Vibrator 10 includes, for example, a piezoelectric element.
  • the vibrator 10 vibrates along a direction perpendicular to the outer surface of the inspection object P. As shown in FIG.
  • the vibrator 10 is arranged so as to propagate the vibration along the direction perpendicular to the inspection object P. As shown in FIG.
  • the vibrator 10 propagates vibration along the Z direction in FIG. 1 so that the inspection object P vibrates (displaces) along the out-of-plane direction (Z direction) of the outer surface. Excite the waves. Then, the elastic waves excited in the inspection object P are propagated in the inspection object P in the in-plane directions (X direction and Y direction) of the outer surface. That is, the elastic wave excited in the inspection object P is arranged along the surface of the measurement area Pa of the inspection object P (along the XY plane), and the laser light from the irradiation unit 20 described later is linearly generated.
  • the irradiating unit 20 irradiates the measurement area Pa of the inspection object P in a state in which elastic waves are excited by the vibrator 10 with laser light.
  • the irradiation unit 20 includes a laser light source (not shown).
  • the laser light source is, for example, a laser diode, and emits laser light (near-infrared light) with a wavelength of 785 nm.
  • the irradiation unit 20 includes an illumination light lens 21 .
  • the illumination light lens 21 includes a cylindrical lens that diffuses linear laser light into a sheet (planar).
  • the laser light emitted from the laser light source is planarly diffused along the X direction by the illumination light lens 21 as indicated by the dashed-dotted line L in FIGS. 1 and 3 .
  • the irradiating unit 20 spreads planar sheet light, which is obtained by diffusing laser light in the direction (X direction) in which the imaging elements of the measuring unit 30 described below are arranged in a line, to the measurement area Pa It is configured to irradiate in a line (straight line).
  • the sheet light (laser light) diffused in a sheet shape (planar shape) extending along the X direction has a predetermined width in the Y direction as well due to interference in the measuring unit 30, which will be described later.
  • the outer surface of the measurement area Pa of the inspection object P is irradiated.
  • the measuring unit 30 linearly measures the measurement area Pa on the outer surface of the inspection object P in a state in which elastic waves are excited by the oscillator 10 along the X direction. Take an image and measure it.
  • the measurement unit 30 causes the reflected laser light, which is the laser light irradiated by the irradiation unit 20 and reflected in the measurement area Pa, and the reference laser light irradiated by the irradiation unit 20 to interfere with each other by laser interferometry. It is configured.
  • the measurement unit 30 captures and measures interference light obtained by causing the reflected laser light and the reference laser light to interfere with each other.
  • the measurement unit 30 includes, for example, a speckle shearing interferometer.
  • the measurement unit 30 uses the laser beams reflected at two different positions (position Pa1 and position Pa2) in the Y direction of the measurement area Pa excited by the vibrator 10 as a reflected laser beam and a reference laser beam.
  • the light and the reference laser light are caused to interfere by laser interferometry. That is, the reference laser light is laser light reflected at a position different from (near) the reflection position of the reflected laser light in the measurement area Pa.
  • the measuring section 30 also includes a beam splitter 31 , a first reflecting mirror 32 a , a second reflecting mirror 32 b , a condenser lens 33 and an image sensor 34 .
  • the beam splitter 31 includes a half mirror.
  • the beam splitter 31 is arranged at a position where the laser beam reflected in the measurement area Pa of the inspection object P is incident.
  • the beam splitter 31 reflects the incident laser light toward the first reflecting mirror 32a along the optical path indicated by the straight line S1 in FIG.
  • the light is transmitted to the second reflecting mirror 32b side. 2
  • the beam splitter 31 transmits the incident laser light reflected by the first reflecting mirror 32a to the image sensor 34 along the optical path indicated by the straight line S1 in FIG.
  • the laser light reflected by the second reflecting mirror 32b is reflected toward the image sensor 34 side.
  • the first reflecting mirror 32 a is arranged at an angle of 45 degrees with respect to the reflecting surface of the beam splitter 31 on the optical path of the laser beam reflected by the beam splitter 31 .
  • the first reflecting mirror 32a reflects the laser light reflected by the beam splitter 31 toward the beam splitter 31 side.
  • the second reflecting mirror 32b is arranged at an angle slightly inclined from 45 degrees with respect to the reflecting surface of the beam splitter 31 on the optical path of the laser light passing through the beam splitter 31.
  • the second reflecting mirror 32b reflects the laser light that has passed through the beam splitter 31 and is incident to the beam splitter 31 side. Since the second reflecting mirror 32b is slightly inclined at an angle of 45 degrees with respect to the reflecting surface of the beam splitter 31, in the measurement area Pa, the laser beam incident on the first reflecting mirror 32a is reflected from the position Pa1. also reflects the laser light reflected at the position (position Pa2) slightly shifted in the Y2 direction.
  • the condenser lens 33 is arranged between the beam splitter 31 and the image sensor 34, and collects the laser light transmitted through the beam splitter 31 (straight line S1 in FIG. 2) and the laser light reflected by the beam splitter 31 (line S1 in FIG. 2). Broken line S2) is condensed. Thereby, the laser beams reflected at two different points in the Y direction of the measurement area Pa are caused to interfere with each other.
  • the image sensor 34 captures (measures) linearly the interference light obtained by interfering the laser light.
  • the image sensor 34 detects the laser light (straight line S1 in FIG. 2) that is reflected by the first reflecting mirror 32a after being reflected by the beam splitter 31 and passes through the beam splitter 31, and the second reflection after passing through the beam splitter 31. It is arranged on the optical path with the laser beam (broken line S2 in FIG. 2) reflected by the mirror 32b and reflected by the beam splitter 31.
  • the image sensor 34 has imaging elements arranged in a line.
  • the image sensor 34 has 1 ⁇ 1024 pixels (imaging device). That is, in the image sensor 34, a plurality of imaging elements are arranged in a line along the X direction. Then, a one-dimensional linear imaging result D (see FIG. 4) having 1 ⁇ 1024 pixels is captured by one measurement (imaging).
  • Image sensor 34 includes, for example, a CMOS image sensor or a CCD image sensor.
  • Position Pa1 and position Pa2 are positions separated from each other by a minute distance in the Y direction.
  • the laser beams (reflected laser beam and reference laser beam) reflected from mutually different positions (Pa1 and Pa2) in each measurement position of the measurement area Pa are guided by the measuring unit 30 to become interference light, and the image sensor 34 The light is incident on each of the imaging elements arranged in a line. The details of the imaging (measurement) of the interference light by the measurement unit 30 will be described later.
  • the housing 40 has the irradiation unit 20 and the measurement unit 30 arranged therein. Further, the housing 40 shields the laser light by surrounding the irradiation section 20 and the measurement section 30 . Specifically, the housing 40 has side walls 41 surrounding the irradiation unit 20 and the measurement unit 30 from the X1, X2, Y1, and Y2 direction sides. Further, the housing 40 has an upper surface portion 42 on the Z1 direction side. The side wall portion 41 and the upper surface portion 42 suppress (shield) the laser light from the irradiation portion 20 from leaking to the outside of the device (outside the housing 40).
  • the side wall portion 41 and the upper surface portion 42 suppress (shield) ambient light (disturbance light) from entering the inside of the device (inside the housing 40) from the outside of the device (outside the housing 40).
  • the housing 40 includes a bottom portion 43 on the Z2 direction side.
  • the bottom surface portion 43 is provided with an opening 43a, and the laser beam emitted from the irradiation unit 20 is irradiated onto the outer surface of the measurement area Pa of the inspection object P through the opening 43a. Then, the laser light (reflected laser light and reference laser light) reflected on the outer surface of the measurement area Pa enters the measuring section 30 inside the housing 40 via the opening 43a.
  • the grip portion 50 is gripped by an inspection operator.
  • the grip portion 50 is connected to a shaft portion 61 (see FIG. 3) of a wheel portion 60, which will be described later, and transmits an operation force for moving the irradiation portion 20 and the measurement portion 30 by the inspection operator to the housing 40.
  • the wheel unit 60 is configured to move the housing 40 along the outer surface of the inspection object P along the Y direction in the first embodiment.
  • the wheel portion 60 includes two (a pair of) different wheel portions 60a and 60b.
  • the wheel portion 60a is connected to the X1 direction side of the housing 40, and the wheel portion 60b is connected to the X2 direction side. That is, the measuring portion 30 is arranged between two different wheel portions 60a and 60b.
  • the wheel unit 60 rotates while contacting the outer surface of the inspection object P in a state in which the housing 40 is fixed so as to be separated from and face the outer surface of the inspection object P.
  • the housing 40 is configured to In other words, even when the wheel unit 60 rotates, the relative positions of the irradiation unit 20 and the measurement unit 30 with respect to the inspection object P inside the housing 40 are arranged so as not to be changed. Further, the housing 40 is arranged so as not to come into contact with the outer surface of the inspection object P. As shown in FIG.
  • the vibrator 10 is arranged on the shaft portion 61 inside the wheel portion 60a on the X1 direction side. Further, the inside of the wheel portion 60a is filled with a flow member.
  • the flow member is, for example, water. Vibration by the vibrator 10 arranged on the shaft portion 61 is propagated to the outer peripheral portion 62 of the wheel via the flow member.
  • the shaft portion 61 inside the wheel portion 60 is configured not to rotate even when the outer peripheral portion 62 rotates. Therefore, even when the wheel portion 60 (wheel portion 60a) rotates with the movement of the housing 40, the vibrator 10 continuously propagates vibration along the Z direction without rotating. Further, in the first embodiment, the wheel unit 60 rotates about the X direction by the operation force of the inspection operator who grips the grip unit 50, thereby moving the housing 40 in the Y direction.
  • the processing device 102 includes a control section 70, a display section 80, and a signal generator 90.
  • FIG. The processing device 102 is, for example, a tablet PC (personal computer).
  • the processing device 102 displays a vibration state image E (see FIG. 6) for defect inspection based on the imaging result D imaged (measured) by the defect inspection device 101 .
  • the control unit 70 controls each unit of the processing device 102 . Also, the control unit 70 controls each unit of the defect inspection apparatus 101 .
  • the control unit 70 controls the vibration of the vibrator 10 and the imaging of the interference light, which is the laser light that interferes with the image sensor 34 .
  • the control unit 70 includes, for example, a CPU (Central Processing Unit). Details of the control by the control unit 70 will be described later.
  • the display unit 80 displays an image based on the control by the control unit 70. Specifically, the display unit 80 displays a vibration state image E (see FIG. 6) that is generated by the control unit 70 and represents a two-dimensional distribution of the vibration state of the elastic waves excited in the measurement area Pa of the inspection object P. indicate.
  • the display unit 80 includes a liquid crystal display, an organic EL (Electro-Luminescence) display, or the like.
  • the signal generator 90 outputs alternating current for vibrating the vibrator 10 under the control of the control unit 70 .
  • An alternating current from the signal generator 90 is transmitted to the vibrator 10 via the cable C.
  • the control unit 70 moves the wheel unit 60 along the outer surface of the housing 40 so that the plurality of measurement positions (P1, P2, P3 , . . . ), the line-shaped imaging results D by the measurement unit 30 are sequentially acquired.
  • the imaging result D is a one-dimensional image in which the intensity of the interference light is indicated by pixel values (luminance values).
  • the measurement unit 30 is moved in the Y direction by the inspection operator, and at each of the plurality of measurement positions (P1, P2, P3, . . . ) in the measurement area Pa, , line-shaped imaging (measurement).
  • the measurement unit 30 scans the measurement area Pa with an imaging device (image sensor 34) arranged one-dimensionally in a line extending in the X direction, and scans the entire measurement area Pa along the XY plane. , two-dimensional interference light measurement (imaging) is performed. Note that in FIG. 4, differences (shades) in pixel values (luminance values) are indicated by differences in hatching.
  • the measurement unit 30 has one measurement position (for example, P1 ), linear imaging (measurement) is performed a plurality of times (two times) in succession. That is, the rotation of the wheel section 60 causes the measurement section 30 to move in the Y direction. At this time, the measurement unit 30 changes the measurement position from P1 to P2 after performing imaging a plurality of times (twice) at the measurement position P1, and performs imaging a plurality of times (twice) at the next measurement position P2. conduct.
  • One measurement position is, for example, 0.1 mm wide in the Y direction.
  • the measurement unit 30 performs imaging (measurement) a plurality of times (twice) each time the measurement unit 30 is moved by 0.1 mm in the Y direction, assuming that the measurement position is changed.
  • the control unit 70 acquires the rotation angle of the wheel unit 60 based on information from an angle sensor such as an encoder (not shown) provided on the wheel unit 60, and information indicating that the measurement position has been changed. to get Note that even when images (measurements) are continuously taken while moving the measurement unit 30 by continuously moving the wheel unit 60, the movement of the measurement unit 30 during the multiple times of image pickup (measurement) is performed. However, if the amount of movement is sufficiently small with respect to the width of one measurement position P1, it can be regarded as imaging (measurement) multiple times at the same measurement position.
  • the control unit 70 controls, at each of a plurality of measurement positions, the line-shaped imaging result D in a state in which elastic waves are excited and the line-shaped imaging result D in a state in which elastic waves are not excited.
  • An imaging result D having a shape is acquired. That is, the measurement unit 30 performs the first imaging at one of the plurality of measurement positions while vibrating the vibrator 10, and then takes two images with the vibrator 10 stopped vibrating. Take the second image.
  • the exposure time in one image pickup by the image sensor 34 is longer than the period T of vibration of the vibrator 10 . Therefore, the intensity of the imaged (measured) interference light is the integrated value of the interference light over a period of time longer than the period T of the oscillator 10 .
  • control unit 70 is configured to acquire a two-dimensional distribution of vibration states for defect inspection in the measurement area Pa based on the line-shaped imaging results D sequentially acquired. Based on the obtained two-dimensional distribution of the vibration state, the control unit 70 is configured to generate a vibration state image E in which the two-dimensional distribution of the vibration state in the measurement area Pa can be visually recognized. .
  • the control unit 70 acquires the pixel value I0 based on the intensities (luminance values) I1 and I2 of the two interference lights acquired by all the imaging elements of the image sensor 34 at the measurement position P1.
  • a linear vibration state (distribution of pixel values I0 ) at the measurement position P1 is acquired.
  • the control unit 70 changes the measurement positions from P1 to P2, P3, . Acquire in sequence along with the movement of Based on the obtained linear vibration states (distribution of pixel values I0 ) at the plurality of measurement positions, the control unit 70 generates a vibration state image E showing a two-dimensional distribution of vibration states in the measurement area Pa.
  • the control unit 70 can visually recognize the two-dimensional distribution of the vibration state by, for example, representing the magnitude of the pixel value I0 with a difference in color (red for large values, blue for small values).
  • a vibration state image E shown as follows is generated.
  • the difference in color is represented by the difference in hatching.
  • control unit 70 causes the display unit 80 to display the generated vibration state image E.
  • FIG. By viewing the vibration state image E displayed on the display unit 80, the inspection operator recognizes the position of the defect (defective portion Q) based on the two-dimensional distribution of the vibration state in the measurement area Pa of the inspection object P. do.
  • the region Ea of the vibration state image E in FIG. 6 is a portion where the pixel value I0 is relatively large and approximately indicates the position of the defect (defective portion Q).
  • the vibration state image E may be generated and displayed based on an input operation to an operation unit (not shown), or the measurement unit 30 (housing 40), the vibration state images E may be sequentially generated and displayed in real time for each measurement position while measuring (imaging).
  • defect inspection method (Defect inspection method according to the first embodiment) Next, a defect inspection method according to the first embodiment will be described with reference to FIG.
  • the defect inspection method is performed by the processing device 102 while the wheel portion 60 is turned (rotated) and the housing 40 is moved by applying an operation force to the grip portion 50 by the inspection operator.
  • step 501 an elastic wave is excited in the inspection object P.
  • an AC signal for exciting elastic waves is output from the signal generator 90 to the vibrator 10 .
  • step 502 at one measurement position among a plurality of measurement positions (P1, P2, P3, . , and an image pickup result D is measured.
  • step 503 the operation of the vibrator 10 is stopped, and the elastic wave excited in the inspection object P is stopped.
  • step 504 a linear image is captured at one measurement position on the outer surface of the inspection object P in a state where the elastic wave is not excited, and the imaging result D is measured.
  • step 505 it is determined whether or not the change of the measurement position has been completed. If it is determined that the change of the measurement position has ended, the process proceeds to step 507 . If it is determined that the change of the measurement position has not ended, the process proceeds to step 506 .
  • step 506 information indicating that the inspection operator has moved (rotated) the wheel portion 60 and changed the measurement position is acquired. That is, information indicating that the measurement position has been changed is acquired based on the angle information from the encoder provided on the wheel portion 60 . Then, line-shaped imaging (measurement) is started at the measurement position after the change (after movement), and the process returns to step 501 . Note that steps 501 to 504 are repeated while the measurement position is sequentially changed (moved) until it is determined in step 505 that the change of the measurement position has been completed.
  • the line-shaped measurement is performed while moving the measurement position.
  • a line-shaped imaging result D is obtained sequentially by imaging and measuring.
  • step 507 when it is determined that the change of the measurement position has been completed, based on the line-shaped imaging results D sequentially acquired at each of the plurality of acquired measurement positions, defect inspection for the measurement area Pa is performed. A two-dimensional distribution of vibration states is obtained.
  • step 508 a vibration state image E is generated based on the obtained two-dimensional distribution of vibration states.
  • step 509 the generated vibration state image E is displayed on the display section 80 .
  • a plurality of measurement positions ( P1, P2, P3, . . . ), the line-shaped imaging results D by the measurement unit 30 are sequentially obtained, and the defect inspection in the measurement area Pa is performed based on the sequentially obtained line-shaped imaging results D.
  • a control unit 70 configured to acquire a two-dimensional distribution of vibration states for. Accordingly, by moving the housing 40 in which the measuring unit 30 is arranged by the wheel unit 60, the measuring unit 30 can be moved along the outer surface of the measurement area Pa of the inspection object P.
  • a plurality of measurement areas Pa can be obtained without adjusting the installation position and the measurement field of view of the measurement unit 30. It is possible to easily acquire the imaging result D that is linearly imaged at each of the measurement positions. Therefore, by combining the line-shaped imaging results D captured at each of the plurality of measurement positions, the imaging results D covering the entire measurement area Pa can be easily obtained. As a result, even when measuring an inspection object P having a relatively large area, it is possible to suppress an increase in the workload of the inspection operator.
  • the moving mechanism is fixed to the outer surface of the inspection object P in a state in which the housing 40 (main body housing portion) is spaced apart from and faces the outer surface of the inspection object P.
  • the vibrator 10 (excitation unit) is arranged inside the wheel unit 60 and propagates vibration through the wheel unit 60 to generate elastic waves in the inspection object P. configured to excite.
  • the wheel portion 60 that abuts on the outer surface of the inspection object P rotates to move the housing 40 to the inspection object P, unlike the case where the measurement position is changed by lifting the inspection object P one time at a time.
  • the irradiation unit 20 is further provided for irradiating the measurement area Pa in which the elastic wave is excited by the transducer 10 (excitation unit) with a laser beam. Then, the reflected laser light, which is the laser light reflected in the measurement area Pa, is caused to interfere with the reference laser light irradiated by the irradiation unit 20, and the interference light obtained by causing the reflected laser light and the reference laser light to interfere is generated as a line.
  • the control unit 70 measures the vibration in the measurement area Pa based on the imaging result D showing the intensity of the interference light that is linearly imaged and measured by the measurement unit 30. It is configured to obtain a two-dimensional distribution of states.
  • the ultrasonic waves output from the ultrasonic array are emitted at the interface (outer surface) of the inspection object P A large reflected wave is generated. Due to this reflected wave, the surface and the surface layer near the surface become dead zones in ultrasonic inspection, making it difficult to detect defects.
  • the control unit 70 is linearly imaged by the measurement unit 30, and based on the imaging result D showing the intensity of the interference light measured, two vibration states in the measurement area Pa are obtained. Configure to get the dimensional distribution.
  • the reference laser light includes the laser light reflected at a position different from the reflection position of the reflected laser light in the measurement area Pa, and the measurement unit 30 measures the reflected laser light at the different positions in the measurement area Pa.
  • the interference light obtained by causing the reflected laser light and the reference laser light to interfere with each other is imaged linearly and measured.
  • the reference laser beam is the laser beam reflected in the measurement area Pa similarly to the reflected laser beam, so the difference between the optical path of the reflected laser beam and the optical path of the reference laser beam can be reduced. . Therefore, it is possible to suppress deterioration in detection accuracy due to environmental disturbance caused by a large difference between the optical path of the reflected laser beam and the optical path of the reference laser beam.
  • the two-dimensional distribution of the vibration state for defect inspection can be obtained with high accuracy by capturing a linear image of the interference light obtained by interfering the reflected laser light and the reference laser light, which have a small difference in their optical paths. can.
  • the control unit 70 controls the line-shaped imaging result D in the state where the elastic wave is excited and the line-shaped imaging result D in the state where the elastic wave is not excited at each of the plurality of measurement positions.
  • the linear vibration state at each of the plurality of measurement positions is obtained.
  • the control unit 70 controls the line-shaped imaging result D in the state in which the elastic wave is excited and the line-shaped imaging result D in the state in which the elastic wave is not excited at each of a plurality of measurement positions.
  • the image pickup result D in the form of a line
  • the linear vibration state at each of the plurality of measurement positions is acquired.
  • the measurement time at one measurement position can be shortened, so the measurement time for measuring the entire measurement area Pa can be shortened. can be done.
  • the housing 40 (main body housing) shields the laser light by surrounding the irradiation section 20 and the measurement section 30 .
  • the housing 40 shielding portion
  • the housing 40 can shield the laser beam that leaks to the outside of the device (defect inspection device 101). It is possible to suppress the leakage of a laser beam with a large output. Therefore, the measurement can be performed with a high-output laser beam without affecting the outside of the device.
  • the measurement unit 30 arranged inside the housing 40 is shielded from the outside by the housing 40, ambient light (disturbance light) from the outside can be suppressed from entering the inside of the housing 40. can be done. Therefore, it is possible to suppress deterioration in accuracy of measurement by the measurement unit 30 due to ambient light (disturbance light).
  • the irradiating unit 20 spreads planar sheet light, which is obtained by diffusing laser light along the direction (X direction) in which the imaging elements of the measuring unit 30 are arranged in a line, to the measurement area Pa It is configured to irradiate in a line shape.
  • the laser light from the irradiation unit 20 can be diffused so as to correspond to the arrangement of the linear imaging elements for the measurement unit 30 to perform measurement. Therefore, it is possible to prevent the amount of illumination light from the irradiation section 20 from becoming larger than necessary with respect to the amount of light received by the measurement section 30 . As a result, it is possible to suppress the irradiation of laser light from the irradiation unit 20 more than necessary.
  • the grip portion 50 gripped by the inspection operator is further provided, and the wheel portion 60 (moving mechanism) is operated by the inspection operator who grips the grip portion 50 to move the housing 40 (main body). case) is configured to move.
  • the inspection operator can easily transmit the operating force for moving the housing 40 to the housing 40 by gripping the grip portion 50 . Therefore, the inspection operator can easily move the housing 40 by gripping the grip portion 50 .
  • the display unit 80 for displaying an image is further provided based on the control by the control unit 70, and the control unit 70 controls the measurement area Pa based on the acquired two-dimensional distribution of the vibration state. It is configured to generate a vibration state image E in which the two-dimensional distribution of the vibration state can be visually recognized and to display it on the display unit 80 .
  • the inspection operator can easily recognize the two-dimensional distribution of the vibration state in the measurement area Pa by viewing the vibration state image E displayed on the display unit 80 . Therefore, based on the vibration state image E displayed on the display unit 80, a portion where the vibration state is discontinuous can be easily recognized as a defect.
  • the wheel unit 60 fixes the housing 40 (main body housing) to the outer surface of the inspection object P so as to be separated from and face the inspection object P. It includes two different wheel portions 60a and 60b that rotate while abutting the outer surface of P, and the measuring portion 30 is positioned between each of the two different wheel portions 60a and 60b. With this configuration, the measurement unit 30 is arranged between each of the two different wheel portions 60a and 60b. The measurement unit 30 can be moved in a stable state. Therefore, stable measurement can be performed while moving the measuring unit 30. Therefore, in order to measure the inspection object P having a relatively large area, the measuring unit 30 (housing 40) is moved while performing measurement (imaging). In this case, stable measurement can be performed with high accuracy.
  • the line is measured while moving the measurement position.
  • Line-shaped imaging results D are obtained sequentially by imaging and measuring in the form of a line.
  • a two-dimensional distribution of the vibration state for defect inspection in the measurement area Pa is obtained based on the line-shaped imaging results D that are sequentially obtained.
  • the linear imaging results D can be obtained sequentially by performing linear imaging and measurement while moving the measuring position at each of the plurality of measuring positions.
  • a plurality of measurement positions in the measurement area Pa can be obtained without adjusting the measurement position and the measurement field of view. It is possible to easily acquire the image pickup result D that is imaged in a line at each of the above. Therefore, by combining the linear imaging results D measured at each of the plurality of measurement positions, the imaging results D covering the entire measurement area Pa can be easily obtained. As a result, it is possible to provide a defect inspection method capable of suppressing an increase in the workload of the inspection operator even when measuring an inspection object P having a relatively large area.
  • FIG. 8 to 10 the configuration of the defect inspection system 200 according to the second embodiment of the present invention will be described with reference to FIGS. 8 to 10.
  • FIG. In this second embodiment unlike the first embodiment configured to obtain two imaging results D at one measurement position, 32 imaging results D are obtained at one measurement position. is configured as In the drawings, the same components as in the first embodiment are indicated by the same reference numerals, and descriptions thereof are omitted.
  • the defect inspection system 200 includes a defect inspection device 201 and a processing device 202.
  • the defect inspection device 201 includes a measuring section 230 .
  • the processing device 202 also includes a control unit 270 .
  • the measurement unit 230 causes the laser beams reflected at two different points in the measurement area Pa where the acoustic waves are excited by the oscillator 10 to interfere. Also, in the second embodiment, the measurement unit 230 includes an image sensor 234 and a phase shifter 235 .
  • the phase shifter 235 is arranged between the beam splitter 31 and the first reflecting mirror 32a, and changes (shifts) the phase of the transmitted laser light (straight line S1 in FIG. 9) under the control of the control unit 270. In other words, the phase shifter 235 changes the phase difference between the two laser beams to interfere with each other.
  • the measurement unit 230 operates the phase shifter 235 to measure (image) the interference light with the image sensor 234 while changing the phase difference between the two laser beams to be interfered.
  • the measurement unit 230 that performs linear imaging and measurement performs measurement at a plurality of measurement positions in a time period shorter than the period T of the elastic wave excited by the transducer 10. In the same measurement position of the, it is configured to perform the measurement (imaging) a plurality of times. That is, unlike the first embodiment, the image sensor 234 of the measurement unit 230 has an exposure time shorter than the period T of the elastic wave. For example, when the period T of the transducer 10 is 0.08 milliseconds, the measurement unit 230 (image sensor 234) takes an image every 0.01 milliseconds (every 1 ⁇ 8 of the period T).
  • the control unit 270 controls each unit of the defect inspection device 201 and the processing device 202 in the same manner as the control unit 70 according to the first embodiment. In addition, along with the movement of the wheel unit 60, the control unit 270 controls the entire measurement area Pa from the linear imaging results D at each of the plurality of measurement positions (P1, P2, P3, . . . ). Get the line-shaped vibration state. Then, based on the acquired linear vibration state, the control unit 270 generates a vibration state image E and causes the display unit 80 to display it.
  • the control unit 270 measures the vibration state in the measurement area Pa a plurality of times at the same measurement position in a time period shorter than the period T of the elastic wave by the measurement unit 230 that performs linear imaging and measurement. is configured to obtain a two-dimensional distribution of Specifically, the control unit 270 changes the phase difference between the two laser beams at one measurement position (for example, P1) among the plurality of measurement positions (P1, P2, P3, . . . ). Imaging is performed 32 times, and an imaging result D is acquired.
  • the control unit 270 determines the luminance value I From k0 to Ik3 , the optical phase (the phase difference between the two optical paths when the phase shift amount is zero) ⁇ k is obtained from equation (2).
  • ⁇ k ⁇ arctan ⁇ (I k3 ⁇ I k1 )/(I k2 ⁇ I k0 ) ⁇ (2)
  • the control unit 270 performs sine wave approximation on the optical phase ⁇ k by the method of least squares, and obtains the approximation coefficients X, ⁇ , and Z in Equation (3).
  • k is an integer of 0-7.
  • Y is a complex amplitude and is expressed as in Equation (4).
  • Y Xexp(i ⁇ ): complex amplitude (4)
  • the control unit 270 obtains the vibration state indicating the optical phase change at each phase time ⁇ (0 ⁇ 2 ⁇ ) of the vibration of the elastic wave from the approximate expression obtained by removing the constant term Z from the equation (3).
  • the control unit 270 acquires the linear vibration state at one measurement position by performing the same processing for all the linear pixels at one measurement position.
  • the control unit 270 acquires the linear vibration state at each of the plurality of measurement positions over the entire measurement area Pa as the wheel unit 60 moves. Then, the control unit 270 acquires the two-dimensional distribution of the vibration state based on the acquired linear vibration state. For example, similarly to the first embodiment, the control unit 270 generates a vibration state image E that displays the obtained two-dimensional distribution of the vibration state (distribution of approximated optical phase change) in a color-coded manner.
  • the measurement unit 230 that performs linear imaging and measurement performs a plurality of It is configured to perform multiple measurements at the same measurement position among the measurement positions (P1, P2, P3, . . . ).
  • a two-dimensional distribution of the vibration state in the measurement area Pa is obtained by a plurality of measurements at the same measurement position in a time period shorter than the period T of the elastic wave.
  • the measurement interval by the measurement unit 230 is longer than the period T of the elastic wave, it is necessary to perform imaging (measurement) while acquiring the phase of the elastic wave at the imaging timing. Then, it is necessary to calculate the vibration state of the elastic wave based on the obtained imaging result D and the phase of the elastic wave.
  • the measurement unit 230 that performs linear imaging and measurement is configured to perform multiple measurements at the same measurement position in a time period shorter than the period T of the elastic wave. .
  • the vibration state of the elastic wave can be easily obtained (computed). Therefore, it is possible to suppress an increase in the processing load for controlling the timing of imaging and the phase of the elastic wave.
  • Other effects of the second embodiment are the same as those of the first embodiment.
  • the configuration of the defect inspection system 300 according to the third embodiment of the present invention will be described with reference to FIGS. 11 to 13.
  • FIG. in this third embodiment unlike the above-described second embodiment in which imaging is performed a plurality of times in a time shorter than the period T of the elastic wave, the irradiation unit 320 is arranged to correspond to the phase of the elastic wave. It is configured to perform imaging while performing strobe irradiation by.
  • the same reference numerals are assigned to the same configurations as those of the second embodiment, and the description thereof will be omitted.
  • a defect inspection system 300 in the third embodiment includes a defect inspection device 301 and a processing device 302.
  • the defect inspection device 301 includes an irradiation section 320 and a measurement section 330 .
  • the processing device 302 also includes a control unit 370 .
  • the irradiator 320 irradiates a laser beam as in the first and second embodiments.
  • the irradiating section 320 is configured to irradiate a laser beam by stroboscopic illumination whose timing is synchronized with a predetermined phase of vibration of the vibrator 10 based on the alternating current from the signal generator 90. ing.
  • the measurement unit 330 causes the laser beams reflected at two different points in the measurement area Pa where the acoustic wave is excited by the oscillator 10 to interfere.
  • Measurement unit 330 also includes image sensor 34 and phase shifter 235 .
  • the measurement unit 330 according to the third embodiment performs imaging using the image sensor 34 having an exposure time longer than the oscillation period T of the elastic wave, as in the first embodiment.
  • the measurement unit 330 operates the phase shifter 235 to measure (image) the interference light while changing the phase difference between the two laser beams to be interfered.
  • the control unit 370 controls each unit of the defect inspection device 301 and the processing device 302 in the same manner as the control unit 70 (270) according to the first and second embodiments.
  • the control unit 370 acquires the linear vibration state from the linear imaging results D at each of the plurality of measurement positions over the entire measurement area Pa as the wheel unit 60 moves. Then, based on the acquired linear vibration state, the control unit 370 generates a vibration state image E and causes the display unit 80 to display it.
  • control unit 370 acquires the phase of the elastic wave at the timing when the imaging result D is acquired by controlling the phase of the elastic wave and the timing of measurement by the measurement unit 330, Based on the phase of the elastic wave obtained and the imaging result D, the two-dimensional distribution of the vibration state in the measurement area Pa is obtained.
  • the control unit 370 controls the phase and frequency of vibration of the vibrator 10 by controlling the signal generator 90 . Further, the control section 370 controls the signal generator 90 to cause the irradiation section 320 to irradiate the laser light in synchronization with the predetermined phase of the vibration of the vibrator 10 .
  • the control unit 370 acquires the vibration state indicating the optical phase change from the acquired luminance value by the same control processing as the control unit 270 according to the second embodiment, and calculates the two-dimensional distribution (approximation) of the acquired vibration state.
  • a vibration state image E is generated that displays the distribution of the optical phase change obtained by the measurement.
  • the control unit 370 acquires the phase of the elastic wave at the timing when the imaging result D is acquired by controlling the phase of the elastic wave and the timing of measurement by the measurement unit 330.
  • the two-dimensional distribution of the vibration state in the measurement area Pa is obtained.
  • the display unit 80 displays the vibration state image E that allows the two-dimensional distribution of the vibration state in the measurement area Pa to be visually recognized.
  • the displayed defect image F may be displayed on the display unit 480 . That is, the defective portion Q (defect) in the measurement area Pa of the inspection object P may be detected (extracted) by image processing.
  • the control unit of the processing device 402 detects a discontinuous region of the vibration state as a defect (defective portion Q) of the inspection object P based on the obtained two-dimensional distribution of the vibration state. .
  • a defect image F is generated in which the area detected as being defective can be identified.
  • a defect image F may be generated that indicates the shape of the defect by contour lines surrounding the detected area.
  • the vibration state image E showing the two-dimensional distribution of the vibration state and the generated defect image F may be displayed side by side on the display unit 480 .
  • the vibration state image E and the defect image F may be superimposed and displayed on the display unit 480 .
  • control unit of the processing device 402 may be configured to identify the type of defect such as peeling and cracking of the coating film based on the area or shape of the region of the detected defect (defective portion Q). good.
  • defect type information Fa (see FIG. 14) that enables identification of the defect type may be displayed on the display unit 480 together with the defect image F.
  • the defect image F may be generated so that the defect type can be identified by color-coding according to the defect type.
  • the moving mechanism fixes the housing 40 (main body housing portion) to the outer surface of the inspection object P while separating it from and facing the inspection object P.
  • the moving mechanism may be configured by a member having a smooth surface so that the housing 40 is moved while sliding on the outer surface of the inspection target P.
  • the vibrator 10 (excitation section) is arranged on the shaft portion 61 of the wheel section 60a, but the present invention is not limited to this.
  • the vibrator 10 may be arranged in a portion other than the shaft portion 61 inside the wheel portion 60a. That is, the vibrator 10 may be provided so as to abut on the inner side of the outer peripheral portion 62 .
  • the vibrator 10 may be provided outside the wheel portion 60a instead of inside.
  • the vibrator 10 may be arranged on the wheel portion 60b instead of the wheel portion 60a.
  • the measurement unit 30 shows an example in which the interference light obtained by interfering with the laser light is captured linearly and measured.
  • the present invention is not limited to this.
  • the vibration state (two-dimensional distribution of the vibration state) on the outer surface can be obtained by an optical measurement method such as the digital image correlation method or the moire sampling method instead of the laser interferometry method using interference light. good too.
  • the vibration state (two-dimensional distribution of the vibration state) may be obtained approximately by performing a plurality of imagings at each timing of different phases of the elastic wave without phase shifting.
  • the case 40 shows an example in which the laser beam is shielded by surrounding the irradiation unit 20 (320) and the measurement unit 30 (230, 330).
  • the present invention is not limited to this.
  • the housing 40 may be configured so as not to shield the irradiation section 20 (320) and the measurement section 30 (230, 330).
  • the irradiation unit 20 (320) diffuses the laser light along the direction (X direction) in which the imaging elements of the measurement unit 30 (230, 330) are arranged in a line.
  • the laser light emitted from the irradiation unit 20 (320) may be configured to be three-dimensionally diffused instead of planar (sheet-like).
  • the wheel portion 60 (moving mechanism) is configured to move the housing 40 (main body housing portion) by the operation force of the inspection operator holding the grip portion 50.
  • the moving mechanism may include a driving unit such as a motor, and the housing 40 may be moved by operating the driving unit of the moving mechanism under the control of the control unit 70 (270, 370).
  • control unit 70 is configured to display the vibration state image E on the display unit 80 of the processing device 102 (202, 302), which is a tablet PC.
  • the present invention is not limited to this.
  • the generated vibration state image E may be displayed on a wearable device such as smart glasses.
  • the measurement unit 30 (230, 330) is arranged between each of two different wheel units 60 (60a and 60b), but the present invention It is not limited to this.
  • the measurement unit 30 (230, 330) may be arranged between three wheels.
  • the wheel portion 60 may be configured by one wheel.
  • the control unit 70 based on the imaging result D acquired by the defect inspection device 101 (201, 301), the control unit 70 (270, 370) of the processing device 102 (202, 302)
  • the vibration state image E is generated and the generated vibration state image E is displayed on the display unit 80 of the processing device 102 (202, 302)
  • the present invention is not limited to this.
  • the control unit 70 (270, 370) and the display unit 80 may be integrally provided in the defect inspection apparatus 101 (201, 301).
  • the number of pixels of the line-shaped imaging result D by the measurement unit 30 (230, 330) is 1 ⁇ 1024, but the present invention is not limited to this. No.
  • the number of pixels of imaging result D may be 64 ⁇ 1024. That is, the imaging device included in the measurement unit 30 (230, 330) may be configured to measure (image) the imaging result D having a plurality of pixels in the width direction.
  • the laser beam is irradiated linearly along the direction (X direction) in which the shaft portion 61 of the wheel portion 60 extends, and the measurement area Pa of the outer surface of the inspection object P is measured. is linearly imaged along the direction (X direction) in which the shaft portion 61 extends, but the present invention is not limited to this.
  • the area to be imaged in a line may be imaged in a line extending along the direction (Y direction) perpendicular to the shaft portion 61 .
  • the image may be captured in a line extending in a direction (oblique direction) inclined from a direction perpendicular to the moving direction (Y direction).
  • the laser light reflected at two different positions (position Pa1 and position Pa2) in the Y direction (moving direction) of the measurement area Pa is used as the reflected laser light and the reference laser light.
  • the direction (shear direction) in which the positions Pa1 and Pa2 are spaced apart is a direction (X direction) parallel to the shaft portion 61 of the wheel portion 60 or a direction obliquely shifted from the direction parallel to the shaft portion 61. You may do so.
  • an excitation unit that excites elastic waves in an object to be inspected; a measuring unit that includes linearly arranged imaging elements, and that linearly captures and measures a measurement region on the outer surface of the inspection object in a state where the elastic waves are excited by the excitation unit; a body casing part in which the measurement part is arranged; a moving mechanism for movably arranging the body casing along the outer surface of the inspection object; Accompanied by the movement along the outer surface of the main housing portion by the moving mechanism, sequentially acquiring line-shaped imaging results by the measuring unit at each of a plurality of measurement positions in the measurement area, and sequentially acquiring a control unit configured to acquire a two-dimensional distribution of vibration states for defect inspection in the measurement area based on the obtained line-shaped imaging result.
  • the moving mechanism includes a wheel portion that rotates while contacting the outer surface of the inspection object in a state in which the main body housing portion is fixed so as to be spaced apart from and face the outer surface of the inspection object.
  • the excitation section is arranged inside the wheel section and configured to excite the elastic wave in the inspection object by propagating vibration through the wheel section. inspection system.
  • the measurement unit causes interference between a reflected laser beam, which is the laser beam irradiated by the irradiation unit and reflected in the measurement region, and a reference laser beam irradiated by the irradiation unit. It is configured to image and measure the interference light that is caused to interfere with the reference laser light in a line shape,
  • the control unit is configured to acquire the two-dimensional distribution of the vibration state in the measurement region based on the imaging result indicating the intensity of the interference light measured by linear imaging by the measurement unit.
  • the reference laser light includes the laser light reflected at a position different from the reflection position of the reflected laser light in the measurement area; wherein the measurement unit is configured to linearly image and measure the interference light obtained by causing the reflected laser light and the reference laser light reflected at different positions in the measurement region to interfere with each other; 4.
  • the control unit obtains, at each of the plurality of measurement positions, the line-shaped imaging result in a state in which the elastic wave is excited and the line-shaped imaging result in a state in which the elastic wave is not excited. 5.
  • the defect inspection system according to item 3 or 4 configured to acquire the line-shaped vibration state at each of the plurality of measurement positions by:
  • the measurement unit which performs linear imaging and measurement, performs a plurality of measurements at the same measurement position among the plurality of measurement positions in a time period shorter than the period of the elastic wave excited by the excitation unit. is configured to do
  • the control unit measures the two-dimensional state of the vibration in the measurement area by measuring the same measurement position a plurality of times in a time period shorter than the period of the elastic wave by the measurement unit that performs linear imaging and measurement. 5.
  • the defect inspection system of item 3 or 4 configured to obtain a distribution.
  • the control unit acquires the phase of the elastic wave at the timing when the imaging result is acquired by controlling the phase of the elastic wave and the timing of measurement by the measurement unit, and acquires the acquired elastic wave 5.
  • the defect inspection system according to item 3 or 4 configured to acquire the two-dimensional distribution of the vibration state in the measurement area based on the phase of and the imaging result.
  • (Item 8) 8. The defect inspection system according to any one of items 3 to 7, wherein the body housing includes a shielding section that shields the laser beam by surrounding the irradiation section and the measurement section.
  • the irradiation unit is configured to linearly irradiate the measurement region with planar sheet light obtained by diffusing the laser light along a direction in which the imaging elements of the measurement unit are arranged in a line.
  • the defect inspection system according to any one of items 3 to 8.
  • (Item 11) Further comprising a display unit for displaying an image based on the control by the control unit, Based on the obtained two-dimensional distribution of the vibration state, the control unit generates a vibration state image in which the two-dimensional distribution of the vibration state in the measurement region is visually recognizable, and displays the image on the display unit.
  • the defect inspection system according to any one of items 1 to 10, configured to display.
  • the moving mechanism includes two different moving mechanisms that rotate while contacting the outer surface of the inspection object in a state in which the main body casing is fixed so as to be separated from and face the outer surface of the inspection object. Including the wheel part, 12.
  • the defect inspection system according to any one of items 1 to 11, wherein the measuring unit is arranged between each of two different wheel units.
  • An excitation unit that excites elastic waves in an object to be inspected; a measuring unit that includes linearly arranged imaging elements, and that linearly captures and measures a measurement region on the outer surface of the inspection object in a state where the elastic waves are excited by the excitation unit; a body casing part in which the measurement part is arranged;
  • a defect inspection apparatus comprising: a movement mechanism for arranging the body housing part so as to be movable along the outer surface of the inspection object.
  • transducer excitation part
  • measurement section 320 irradiation section 30, 230, 330 measurement section
  • housing main body housing section, shielding section
  • gripping portion 60, 60a, 60b wheel portion (moving mechanism)
  • 270, 370 control section 80, 480 display section 100, 200, 300 defect inspection system 101, 201, 301 defect inspection apparatus

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Abstract

L'invention concerne un système d'inspection de défauts (100) comprenant : une unité d'excitation (10), permettant d'exciter des ondes élastiques dans un objet d'inspection (P) ; une unité de mesure (30), permettant à l'imagerie d'une zone de mesure (Pa) de la surface extérieure de l'objet d'inspection (P) de mesurer la zone de mesure (Pa) ; une partie de boîtier de corps (40) à l'intérieur de laquelle est disposée l'unité de mesure (30) ; un mécanisme de déplacement (60), disposé pour pouvoir déplacer la partie de boîtier de corps (40) le long de la surface extérieure de l'objet d'inspection (P) ; et une unité de commande (70), conçue pour acquérir séquentiellement des résultats d'imagerie linéaire (D) à chacune des positions d'une pluralité de positions de mesure de la zone de mesure (Pa) lors du mouvement par le mécanisme de déplacement (60) et pour acquérir une distribution bidimensionnelle d'états d'excitation pour une inspection de défauts dans la zone de mesure (Pa) selon les résultats d'imagerie linéaire (D).
PCT/JP2021/023044 2021-06-17 2021-06-17 Système, dispositif et procédé d'inspection de défauts WO2022264362A1 (fr)

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JPH0192607A (ja) * 1987-05-07 1989-04-11 Toa Nenryo Kogyo Kk タンク板検査装置
JPH0961386A (ja) * 1995-08-23 1997-03-07 Hitachi Ltd 光熱変位画像検出方法及び装置
JP2007024674A (ja) * 2005-07-15 2007-02-01 Hitachi Ltd 表面・表層検査装置、及び表面・表層検査方法
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