WO2022234823A1 - Resin material and multilayer printed wiring board - Google Patents
Resin material and multilayer printed wiring board Download PDFInfo
- Publication number
- WO2022234823A1 WO2022234823A1 PCT/JP2022/019363 JP2022019363W WO2022234823A1 WO 2022234823 A1 WO2022234823 A1 WO 2022234823A1 JP 2022019363 W JP2022019363 W JP 2022019363W WO 2022234823 A1 WO2022234823 A1 WO 2022234823A1
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- WIPO (PCT)
- Prior art keywords
- resin material
- resin
- curing agent
- weight
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- Prior art date
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K2201/00—Specific properties of additives
- C08K2201/002—Physical properties
- C08K2201/005—Additives being defined by their particle size in general
Definitions
- the present invention relates to resin materials containing epoxy compounds.
- the present invention also relates to a multilayer printed wiring board using the above resin material.
- a resin material is used to form an insulating layer for insulation between internal layers and to form an insulating layer positioned on a surface layer.
- Wiring which is generally made of metal, is laminated on the surface of the insulating layer.
- a resin film obtained by forming the resin material into a film may be used.
- the above resin materials and resin films are used as insulating materials for multilayer printed wiring boards including build-up films.
- Patent Document 1 discloses a resin composition containing (A) an epoxy resin, (B) a polymer compound, (C) a fluorine atom-containing alkoxysilane compound, and (D) an inorganic filler.
- the polymer compound is selected from a polybutadiene structure, a polysiloxane structure, a poly(meth)acrylate structure, a polyalkylene structure, a polyalkyleneoxy structure, a polyisoprene structure, a polyisobutylene structure, and a polycarbonate structure. It is a polymer compound having one or more structures that are
- Patent Document 2 discloses a resin composition containing (A) a resin having an aliphatic polycarbonate skeleton and (B) an inorganic and/or organic filler.
- substrates that require a low dielectric loss tangent are becoming larger and more multilayered, and the weight of the substrate is increasing. Along with this, chipping of the cured material layer at the edges of the substrate tends to occur during handling and transportation of the substrate.
- Patent Documents 1 and 2 describe a resin material containing a resin having a polycarbonate structure.
- the resins having a polycarbonate structure described in Patent Documents 1 and 2 are not curing agents.
- the dielectric loss tangent of the cured product can be reduced to some extent.
- the desmear property may be lowered, or chipping may occur in the cured material layer at the edges of the substrate.
- the objects of the present invention are 1) to reduce the dielectric loss tangent of the cured product, 2) to effectively remove smear by desmear treatment, 3) to increase the plating peel strength, and 4) to provide a substrate. It is an object of the present invention to provide a resin material capable of making it difficult for chipping to occur in a cured material layer at the end. Another object of the present invention is to provide a multilayer printed wiring board using the resin material.
- an epoxy compound, a filler, and a curing agent are included, wherein the filler has an average particle size of 2.0 ⁇ m or less, and the curing agent has a carbonate structure and an epoxy group.
- a resin material is provided that includes a first curing agent having reactive functional groups.
- the content of the filler is 50% by weight or more and 90% by weight or less in 100% by weight of the components excluding the solvent in the resin material.
- the first curing agent has a molecular weight of 20,000 or less.
- the curing agent contains a second curing agent that does not have a carbonate structure.
- the second curing agent contains an active ester compound.
- the resin material contains polyimide resin.
- the resin material is a resin film.
- the resin material according to the present invention is suitably used for forming insulating layers in multilayer printed wiring boards.
- the present invention comprises a circuit board, a plurality of insulating layers disposed on a surface of the circuit board, and a metal layer disposed between the plurality of insulating layers, wherein A multilayer printed wiring board is provided in which at least one layer is a cured product of the resin material described above.
- a resin material according to the present invention includes an epoxy compound, a filler, and a curing agent, wherein the filler has an average particle size of 2.0 ⁇ m or less, and the curing agent has a carbonate structure and reacts with an epoxy group.
- a first curing agent with possible functional groups is included. Since the resin material according to the present invention has the above configuration, 1) the dielectric loss tangent of the cured product can be lowered, 2) smear can be effectively removed by desmear treatment, and 3). The plating peel strength can be increased, and 4) chipping of the cured product layer at the edge of the substrate can be prevented.
- FIG. 1 is a cross-sectional view schematically showing a multilayer printed wiring board using a resin material according to one embodiment of the present invention.
- a resin material according to the present invention includes an epoxy compound, a filler, and a curing agent, wherein the filler has an average particle size of 2.0 ⁇ m or less, and the curing agent has a carbonate structure and reacts with an epoxy group.
- a first curing agent with possible functional groups is included.
- the resin material according to the present invention has the above configuration, 1) the dielectric loss tangent of the cured product can be lowered, 2) smear can be effectively removed by desmear treatment, and 3). All of the effects of 1)-4) can be exhibited, namely that the peel strength of the plating can be increased and 4) chipping of the cured product layer at the edge of the substrate can be prevented.
- the curing agent contains the first curing agent having a carbonate structure and a functional group capable of reacting with an epoxy group.
- the carbonate structure inside is less likely to undergo phase separation in the cured product. Therefore, since a uniform cured product can be obtained, chipping of the cured product layer at the edge of the substrate can be prevented.
- the curing agent contains the first curing agent, uniform cross-linking of the first curing agent and the epoxy compound can be achieved after the formation of the through-holes. The resulting smear can be uniformly etched by the desmear treatment, and the smear can be effectively removed.
- the curing agent contains the first curing agent, it is possible to prevent smear from being partially excessively etched due to phase separation of the carbonate structure. Peel strength can be increased.
- the filler has an average particle size of 2.0 ⁇ m or less, the first curing agent and the epoxy compound are uniformly crosslinked even in the vicinity of the filler. It is possible to make it difficult for chipping to occur in the cured product layer of the part. As a result, smear can be removed more efficiently.
- the resin material according to the present invention may be a resin composition or a resin film.
- the resin composition has fluidity.
- the resin composition may be in the form of a paste.
- the pasty form includes a liquid form.
- the resin material according to the present invention is preferably a resin film because of its excellent handleability.
- the resin material according to the present invention is preferably a thermosetting resin material.
- the resin film is preferably a thermosetting resin film.
- the resin material includes an epoxy compound.
- Conventionally known epoxy compounds can be used as the epoxy compound.
- the epoxy compound is an organic compound having at least one epoxy group. Only one type of the epoxy compound may be used, or two or more types may be used in combination.
- epoxy compounds examples include bisphenol A type epoxy compounds, bisphenol F type epoxy compounds, bisphenol S type epoxy compounds, phenol novolac type epoxy compounds, biphenyl type epoxy compounds, biphenyl novolac type epoxy compounds, biphenol type epoxy compounds, and naphthalene type epoxy compounds.
- fluorene type epoxy compound, phenol aralkyl type epoxy compound, naphthol aralkyl type epoxy compound, dicyclopentadiene type epoxy compound, anthracene type epoxy compound, epoxy compound having adamantane skeleton, epoxy compound having tricyclodecane skeleton, naphthylene ether type Epoxy compounds, epoxy compounds having a triazine core in the skeleton, and the like are included.
- the epoxy compound may be a glycidyl ether compound.
- the glycidyl ether compound is a compound having at least one glycidyl ether group.
- the epoxy compound preferably contains an epoxy compound having an aromatic skeleton, a naphthalene skeleton or More preferably, it contains an epoxy compound having a phenyl skeleton.
- the epoxy compound preferably contains an epoxy compound that is liquid at 25°C and an epoxy compound that is solid at 25°C.
- the viscosity at 25°C of the epoxy compound that is liquid at 25°C is preferably 1000 mPa ⁇ s or less, more preferably 500 mPa ⁇ s or less.
- the viscosity of the epoxy compound can be measured using, for example, a dynamic viscoelasticity measuring device ("VAR-100" manufactured by Rheological Instruments).
- the molecular weight of the epoxy compound is preferably 1000 or less. In this case, even if the filler content is 50% by weight or more in 100% by weight of the components excluding the solvent in the resin material, a resin material with high fluidity can be obtained when forming the insulating layer. Therefore, when an uncured resin material or a B-stage resin material is laminated on a circuit board, the filler can be uniformly present. "100% by weight of the components excluding the solvent in the resin material” means "100% by weight of the components excluding the solvent in the resin material" when the resin material contains the solvent, and when the resin material does not contain the solvent means "100% by weight of resin material".
- the molecular weight of the epoxy compound means the molecular weight that can be calculated from the structural formula when the epoxy compound is not a polymer and when the structural formula of the epoxy compound can be specified. Moreover, when the said epoxy compound is a polymer, it means the weight average molecular weight in terms of polystyrene measured by gel permeation chromatography (GPC).
- the content of the epoxy compound is preferably 5% by weight or more, more preferably 10% by weight or more, preferably 25% by weight or less, and more preferably 20% by weight in 100% by weight of the components excluding the solvent in the resin material. It is below. When the content of the epoxy compound is not less than the above lower limit and not more than the above upper limit, the above effects 1) to 4) can be exhibited more effectively.
- the content of the epoxy compound is preferably 15% by weight or more, more preferably 25% by weight or more, still more preferably 35% by weight or more, and preferably 60% by weight in 100% by weight of the components excluding the filler and solvent in the resin material. % by weight or less.
- the content of the epoxy compound is not less than the above lower limit and not more than the above upper limit, the above effects 1) to 4) can be exhibited even more effectively.
- the resin material contains a curing agent.
- the curing agent includes a first curing agent having a carbonate structure and a functional group capable of reacting with an epoxy group.
- the curing agent may or may not contain a second curing agent that does not have a carbonate structure.
- the first curing agent is a compound (curing agent) having a carbonate structure and a functional group capable of reacting with an epoxy group.
- the first curing agent has a functional group capable of reacting with an epoxy group.
- the first curing agent has a functional group capable of reacting with the epoxy group of the epoxy compound. Only one kind of the first curing agent may be used, or two or more kinds thereof may be used in combination.
- Examples of functional groups that can react with the epoxy groups include amino groups, hydroxyl groups, active ester groups, cyanate ester groups, carbodiimide groups, maleimide groups, and benzoxazine groups.
- the functional group capable of reacting with the epoxy group is preferably a maleimide group, a hydroxyl group, or an active ester group.
- the first curing agent preferably has an aliphatic ring. From the viewpoint of enhancing the heat resistance of the cured product, the first curing agent preferably has an aromatic ring. From the viewpoint of further lowering the dielectric loss tangent of the cured product and increasing the heat resistance of the cured product, the first curing agent preferably has an aliphatic ring and an aromatic ring.
- the first curing agent preferably has a phenol structure or an active ester structure.
- the active ester structure is, for example, a structure represented by the following formula (10A).
- R1 represents an aliphatic chain, an aliphatic ring or an aromatic ring
- R2 represents an aromatic ring
- the first curing agent preferably contains a phenol carbonate compound (a compound having a carbonate structure and a phenol structure), and a phenol carbonate compound ( A compound having a carbonate structure and a phenol structure) is more preferred.
- a phenol carbonate compound a compound having a carbonate structure and a phenol structure
- the effect of 3) above can be exhibited more effectively.
- the first curing agent is preferably a compound represented by the following formula (3).
- X1 and X2 each represent a hydroxyl group or an active ester group
- R1 represents an aliphatic ring
- R2 and R3 each represent a skeleton derived from a bisphenol compound
- n is 1 or more.
- X1 and X2 may be the same or different.
- R2 and R3 may be the same or different.
- n may represent an integer of 500 or less, an integer of 200 or less, an integer of 100 or less, or an integer of 50 or less.
- n preferably represents an integer such that the molecular weight of the first curing agent is 2000 or more.
- n preferably represents an integer such that the molecular weight of the first curing agent is 20,000 or less.
- the first curing agent should be an active ester carbonate compound (a carbonate structure and an active compound having an ester structure).
- the first curing agent is an active ester carbonate compound (a carbonate structure and an active compound having an ester structure).
- the molecular weight of the first curing agent is preferably 2000 or more, more preferably 3000 or more, preferably 20000 or less, more preferably 15000 or less.
- the above effects 1) to 4) can be exhibited more effectively.
- the molecular weight of the first curing agent means the molecular weight that can be calculated from the structural formula.
- curing agent is a polymer, it means the weight average molecular weight in polystyrene conversion measured by the gel permeation chromatography (GPC).
- the glass transition temperature of the first curing agent is preferably 30°C or higher, more preferably 50°C or higher, and preferably 150°C or lower, more preferably 120°C or lower.
- the plating peel strength can be further increased.
- the glass transition temperature of the first curing agent is equal to or lower than the upper limit, the curability of the resin material can be further improved, and the dielectric loss tangent of the cured product can be further improved.
- the content of the first curing agent in 100% by weight of the curing agent is preferably 10% by weight or more, more preferably 20% by weight or more, preferably 60% by weight or less, and more preferably 55% by weight or less. .
- the content of the first curing agent is at least the above lower limit, the above effects 1) and 2) can be exhibited more effectively.
- the content of the first curing agent is equal to or less than the upper limit, the above effects 3) and 4) can be exhibited more effectively.
- the content of the first curing agent with respect to 100 parts by weight of the epoxy compound is preferably 10 parts by weight or more, more preferably 20 parts by weight or more, preferably 70 parts by weight or less, and more preferably 60 parts by weight or less.
- the content of the first curing agent is equal to or more than the lower limit and equal to or less than the upper limit, the above effects 1) to 4) can be exhibited more effectively.
- the content of the first curing agent in 100% by weight of the components excluding the solvent in the resin material is preferably 0.5% by weight or more, more preferably 1% by weight or more, and preferably 20% by weight or less. Preferably, it is 15% by weight or less.
- the content of the first curing agent is not less than the lower limit and not more than the upper limit, the above effects 1) to 4) can be exhibited more effectively.
- the content of the first curing agent is preferably 2.5% by weight or more, more preferably 5% by weight or more, and preferably 35% by weight or less in 100% by weight of the components excluding the filler and solvent in the resin material. , more preferably 30% by weight or less.
- the content of the first curing agent is not less than the lower limit and not more than the upper limit, the above effects 1) to 4) can be exhibited more effectively.
- "100% by weight of components excluding fillers and solvents in the resin material” means “100% by weight of components excluding fillers and solvents in the resin material” when the resin material contains a solvent. When not containing, it means “100% by weight of the components excluding the filler in the resin material”.
- the second curing agent is a compound (curing agent) that does not have a carbonate structure.
- the curing agent preferably contains the second curing agent. Only one kind of the second curing agent may be used, or two or more kinds thereof may be used in combination.
- the second curing agent preferably has a functional group capable of reacting with an epoxy group.
- the second curing agent preferably has a functional group capable of reacting with the epoxy group of the epoxy compound.
- Examples of the second curing agent include active ester compounds, phenol compounds (phenol curing agents), cyanate ester compounds (cyanate ester curing agents), carbodiimide compounds (carbodiimide curing agents), oxazoline compounds, maleimide compounds, benzoxazine compounds (benzo oxazine curing agent), amine compounds (amine curing agent), thiol compounds (thiol curing agent), phosphine compounds, dicyandiamide, acid anhydrides, and the like.
- the second curing agent preferably contains an active ester compound, a phenol compound, a cyanate ester compound, a carbodiimide compound, an oxazoline compound, or a maleimide compound, more preferably an active ester compound or a phenol compound, and an active ester More preferably, it contains a compound.
- the dielectric loss tangent of the cured product can be further reduced, and the thermal dimensional stability of the cured product can be further enhanced.
- the second curing agent preferably contains an active ester compound.
- the second curing agent preferably contains a phenol compound.
- the active ester compound is a compound that contains at least one ester bond in its structure and that has an aliphatic chain, an aliphatic ring, or an aromatic ring bonded to both sides of the ester bond.
- An active ester compound is obtained, for example, by a condensation reaction between a carboxylic acid compound or a thiocarboxylic acid compound and a hydroxy compound or a thiol compound.
- Examples of active ester compounds include compounds represented by the following formula (1). Only one kind of the active ester compound may be used, or two or more kinds thereof may be used in combination.
- X1 represents an aliphatic chain-containing group, an aliphatic ring-containing group, or an aromatic ring-containing group
- X2 represents an aromatic ring-containing group
- Preferred examples of the aromatic ring-containing group include an optionally substituted benzene ring and an optionally substituted naphthalene ring.
- a hydrocarbon group is mentioned as said substituent. The number of carbon atoms in the hydrocarbon group is preferably 12 or less, more preferably 6 or less, still more preferably 4 or less.
- the combination of X1 and X2 includes a combination of a benzene ring which may have a substituent and a benzene ring which may have a substituent, and a combination of a benzene ring, which may have a substituent, and a naphthalene ring, which may have a substituent. Furthermore, in the above formula (1), the combination of X1 and X2 includes a combination of an optionally substituted naphthalene ring and an optionally substituted naphthalene ring.
- the above active ester compound is not particularly limited. From the viewpoint of further improving the thermal dimensional stability and flame retardancy of the cured product, the active ester compound is preferably an active ester compound having two or more aromatic rings. From the viewpoint of reducing the dielectric loss tangent of the cured product and enhancing the thermal dimensional stability of the cured product, the active ester compound more preferably has a naphthalene ring in the main chain skeleton.
- Phenolic compounds examples include novolak-type phenol, biphenol-type phenol, naphthalene-type phenol, dicyclopentadiene-type phenol, aralkyl-type phenol, and dicyclopentadiene-type phenol. As for the said phenol compound, only 1 type may be used and 2 or more types may be used together.
- phenol compounds Commercially available products of the above phenol compounds include novolak phenol (manufactured by DIC Corporation "TD-2091”), biphenyl novolak phenol (manufactured by Meiwa Kasei Co., Ltd. "MEH-7851”), aralkyl phenol compounds (manufactured by Meiwa Kasei Co., Ltd. "MEH -7800”), and phenols having an aminotriazine skeleton (manufactured by DIC “LA-1356” and “LA-3018-50P”).
- Cyanate ester compound examples include novolak-type cyanate-ester resins, bisphenol-type cyanate-ester resins, and prepolymers obtained by partially trimerizing these.
- Examples of the novolak-type cyanate ester resins include phenol novolac-type cyanate ester resins and alkylphenol-type cyanate ester resins.
- Examples of the bisphenol type cyanate ester resin include bisphenol A type cyanate ester resin, bisphenol E type cyanate ester resin and tetramethylbisphenol F type cyanate ester resin. As for the said cyanate ester compound, only 1 type may be used and 2 or more types may be used together.
- cyanate ester compounds include phenol novolac type cyanate ester resins (“PT-30” and “PT-60” manufactured by Lonza Japan Co., Ltd.) and prepolymers in which bisphenol type cyanate ester resins are trimerized (Lonza Japan “BA-230S”, “BA-3000S”, “BTP-1000S” and “BTP-6020S” manufactured by the same company).
- the carbodiimide compound is a compound having a structural unit represented by the following formula (2).
- the right end and left end are bonding sites with other groups. Only one kind of the carbodiimide compound may be used, or two or more kinds thereof may be used in combination.
- X is an alkylene group, an alkylene group to which a substituent is bonded, a cycloalkylene group, a cycloalkylene group to which a substituent is bonded, an arylene group, or an arylene group to which a substituent is bonded group, and p is an integer of 1-5.
- the multiple X's may be the same or different.
- At least one X is an alkylene group, a group in which a substituent is bonded to an alkylene group, a cycloalkylene group, or a group in which a substituent is bonded to a cycloalkylene group.
- carbodiimide compounds include "Carbodilite V-02B”, “Carbodilite V-03”, “Carbodilite V-04K”, “Carbodilite V-07”, “Carbodilite V-09”, and “Carbodilite V-09” manufactured by Nisshinbo Chemical Co., Ltd. 10M-SP” and “Carbodilite 10M-SP (improved)", and “Stabaxol P", “Stabaxol P400” and "Hykasil 510" manufactured by Rhein Chemie.
- maleimide compounds examples include N-phenylmaleimide and N-alkylbismaleimide.
- the maleimide compound may be a bismaleimide compound. Only one type of the maleimide compound may be used, or two or more types may be used in combination.
- the maleimide compound may or may not have an aromatic ring.
- the maleimide compound preferably has an aromatic ring.
- the nitrogen atom in the maleimide skeleton and the aromatic ring are bonded.
- the molecular weight of the maleimide compound is preferably 500 or more, more preferably 1000 or more, preferably less than 30,000, and more preferably less than 20,000.
- the molecular weight of the maleimide compound means the molecular weight that can be calculated from the structural formula. Further, the molecular weight of the maleimide compound means the weight average molecular weight in terms of polystyrene measured by gel permeation chromatography (GPC) when the maleimide compound is a polymer.
- GPC gel permeation chromatography
- maleimide compounds examples include “BMI-4000” and “BMI-5100” manufactured by Daiwa Kasei Kogyo Co., Ltd., and Designer Molecules Inc. and “BMI-3000” manufactured by K.K.
- Benzoxazine compounds examples include Pd-type benzoxazine and Fa-type benzoxazine. Only one kind of the benzoxazine compound may be used, or two or more kinds thereof may be used in combination.
- Acid anhydride examples include tetrahydrophthalic anhydride and alkylstyrene-maleic anhydride copolymer. Only one kind of the acid anhydride may be used, or two or more kinds thereof may be used in combination.
- the content of the second curing agent with respect to 100 parts by weight of the epoxy compound is preferably 40 parts by weight or more, more preferably 45 parts by weight or more, preferably 90 parts by weight or less, and more preferably 85 parts by weight or less.
- the content of the second curing agent is the above lower limit or more and the above upper limit or less, the curability can be further improved, the thermal dimensional stability of the cured product is further improved, and the remaining unreacted components are reduced. Volatilization can be further suppressed.
- the content of the curing agent (total content of the first curing agent and the second curing agent) with respect to 100 parts by weight of the epoxy compound is preferably 80 parts by weight or more, more preferably 85 parts by weight or more. is 135 parts by weight or less, more preferably 130 parts by weight or less.
- the content of the curing agent is not less than the above lower limit and not more than the above upper limit, the curability can be further improved, the thermal dimensional stability of the cured product is further improved, and the remaining unreacted components are more volatilized. can be further suppressed.
- the total content of the epoxy compound and the curing agent (the total content of the epoxy compound, the first curing agent, and the second curing agent) in 100% by weight of the components excluding the filler and solvent in the resin material ) is preferably 50% by weight or more, more preferably 60% by weight or more, preferably 98% by weight or less, and more preferably 95% by weight or less.
- the curability can be further improved, and the thermal dimensional stability of the cured product can be further improved.
- the resin material contains a filler.
- the average particle size of the filler is 2.0 ⁇ m or less.
- the filler may be an organic filler, an inorganic filler, or a mixture of an organic filler and an inorganic filler. Only one kind of the filler may be used, or two or more kinds thereof may be used in combination.
- organic filler examples include benzoxazine resin particles, benzoxazole resin particles, fluororesin particles, acrylic resin particles, and styrene resin particles.
- fluororesin particles By using fluororesin particles as the organic filler, the dielectric constant of the cured product can be further lowered.
- the said organic filler only 1 type may be used and 2 or more types may be used together.
- Examples of the inorganic filler include silica, talc, clay, mica, hydrotalcite, alumina, magnesium oxide, aluminum hydroxide, aluminum nitride, and boron nitride. Only one kind of the inorganic filler may be used, or two or more kinds thereof may be used in combination.
- the filler is preferably an inorganic filler.
- the dielectric loss tangent of the cured product can be further reduced.
- the inorganic filler is preferably silica or alumina, more preferably silica, and even more preferably fused silica.
- silica as a filler, the coefficient of thermal expansion of the cured product is further lowered, and the dielectric loss tangent of the cured product is further lowered. Also, the dielectric constant of the cured product can be improved.
- the shape of silica is preferably spherical.
- the inorganic filler is preferably spherical, more preferably spherical silica.
- the surface roughness of the surface of the cured product is effectively reduced, and the adhesive strength between the cured product and the metal layer is effectively increased.
- the inorganic filler is spherical silica, the curing of the resin is promoted regardless of the curing environment, the glass transition temperature of the cured product is effectively increased, and the thermal linear expansion coefficient of the cured product is effectively reduced. can do.
- the aspect ratio of the inorganic filler is preferably 2 or less, more preferably 1.5 or less.
- the inorganic filler is preferably surface-treated, more preferably surface-treated with a coupling agent, and even more preferably surface-treated with a silane coupling agent.
- a coupling agent preferably surface-treated with a coupling agent
- a silane coupling agent By surface-treating the inorganic filler, the surface roughness of the surface of the roughened cured product is further reduced, and the adhesive strength between the cured product and the metal layer is further increased.
- finer wiring can be formed on the surface of the cured product, and even better inter-wiring insulation reliability and interlayer insulation reliability are imparted to the cured product. can do.
- Examples of the above coupling agents include silane coupling agents, titanium coupling agents and aluminum coupling agents.
- Examples of the silane coupling agent include methacrylsilane, acrylsilane, aminosilane, imidazolesilane, vinylsilane, and epoxysilane.
- the average particle size of the filler is 2.0 ⁇ m or less.
- the average particle size of the filler is preferably 0.1 ⁇ m or more, more preferably 0.3 ⁇ m or more, preferably 1.8 ⁇ m or less, and more preferably 1.6 ⁇ m or less.
- the average particle size of the filler may exceed 0.5 ⁇ m, may be 1.0 ⁇ m or more, may be 1 ⁇ m or less, may be less than 1 ⁇ m, or may be 0.5 ⁇ m or less. may be less than 0.5 ⁇ m, and may be 0.3 ⁇ m or less.
- the average particle size of the inorganic filler is preferably 0.1 ⁇ m or more, more preferably 0.3 ⁇ m or more, preferably 1.8 ⁇ m or less, and more preferably 1.6 ⁇ m or less.
- the average particle size of the inorganic filler is at least the lower limit and at most the upper limit, the surface roughness after etching can be reduced and the peel strength of the plating can be increased, and the adhesion between the insulating layer and the metal layer is improved. can enhance sexuality.
- the average particle size of the inorganic filler may exceed 0.5 ⁇ m, may be 1.0 ⁇ m or more, may be 1 ⁇ m or less, may be less than 1 ⁇ m, or may be 0.5 ⁇ m or less. It may be less than 0.5 ⁇ m, or it may be 0.3 ⁇ m or less.
- the average particle size of the organic filler is preferably 0.1 ⁇ m or more, more preferably 0.3 ⁇ m or more, preferably 1.8 ⁇ m or less, and more preferably 1.6 ⁇ m or less. .
- the average particle size of the organic filler is the lower limit or more and the upper limit or less, the surface roughness after etching can be reduced and the plating peel strength can be increased, and the adhesion between the insulating layer and the metal layer can be improved. can enhance sexuality.
- the average particle size of the organic filler may exceed 0.5 ⁇ m, may be 1.0 ⁇ m or more, may be 1 ⁇ m or less, may be less than 1 ⁇ m, or may be 0.5 ⁇ m or less. It may be less than 0.5 ⁇ m, or it may be 0.3 ⁇ m or less.
- a median diameter (d50) value of 50% is adopted as the average particle diameter of the above fillers (inorganic filler and organic filler).
- the average particle size is preferably the average particle size of primary particles.
- the average particle size can be measured using a laser diffraction scattering type particle size distribution analyzer.
- the content of the filler is preferably 50% by weight or more, more preferably 60% by weight or more, preferably 90% by weight or less, and more preferably 85% by weight or less in 100% by weight of the components excluding the solvent in the resin material. , more preferably 80% by weight or less.
- the filler content is at least the lower limit, the dielectric loss tangent is effectively lowered.
- the content of the filler is equal to or less than the above upper limit, the thermal dimensional stability of the cured product can be enhanced, and warpage of the cured product can be effectively suppressed.
- the content of the filler is at least the lower limit and at most the upper limit, the surface roughness of the surface of the cured product can be further reduced, and finer wiring can be formed on the surface of the cured product.
- the content of the filler is equal to or more than the lower limit and equal to or less than the upper limit, it is possible to lower the coefficient of thermal expansion of the cured product and to improve the smear removability.
- the resin material preferably contains a curing accelerator. However, the resin material may not contain a curing accelerator. The use of the curing accelerator makes the curing speed even faster. By rapidly curing the resin material, the crosslinked structure in the cured product becomes uniform and the number of unreacted functional groups is reduced, resulting in a high crosslink density.
- the curing accelerator is not particularly limited, and conventionally known curing accelerators can be used. Only one kind of the curing accelerator may be used, or two or more kinds thereof may be used in combination.
- curing accelerator examples include anionic curing accelerators such as imidazole compounds, cationic curing accelerators such as amine compounds, and curing accelerators other than anionic and cationic curing accelerators such as phosphorus compounds and organometallic compounds. , and radical curing accelerators such as peroxides.
- imidazole compound examples include 2-undecylimidazole, 2-heptadecylimidazole, 2-methylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 2-phenyl-4-methylimidazole, 1-benzyl- 2-methylimidazole, 1-benzyl-2-phenylimidazole, 1,2-dimethylimidazole, 1-cyanoethyl-2-methylimidazole, 1-cyanoethyl-2-ethyl-4-methylimidazole, 1-cyanoethyl-2-un Decylimidazole, 1-cyanoethyl-2-phenylimidazole, 1-cyanoethyl-2-undecylimidazolium trimellitate, 1-cyanoethyl-2-phenylimidazolium trimellitate, 2,4-diamino-6-[2' -methylimidazolyl-(1′)]-eth-
- amine compounds examples include diethylamine, triethylamine, diethylenetetramine, triethylenetetramine and 4,4-dimethylaminopyridine.
- Examples of the phosphorus compounds include triphenylphosphine compounds.
- organometallic compounds examples include zinc naphthenate, cobalt naphthenate, tin octylate, cobalt octylate, bisacetylacetonate cobalt (II) and trisacetylacetonate cobalt (III).
- Examples of the above peroxides include dicumyl peroxide and perhexyl 25B.
- the curing accelerator preferably contains the anionic curing accelerator, and more preferably contains the imidazole compound.
- the content of the anionic curing accelerator is preferably 20% by weight or more, more preferably 100% by weight of the curing accelerator. is 50% by weight or more, more preferably 70% by weight or more, and most preferably 100% by weight (total amount). Therefore, the hardening accelerator is most preferably the anionic hardening accelerator.
- the content of the curing accelerator is not particularly limited.
- the content of the curing accelerator is preferably 0.01% by weight or more, more preferably 0.05% by weight or more, and preferably 5% by weight or less in 100% by weight of the components excluding the filler and solvent in the resin material, More preferably, it is 3% by weight or less.
- the content of the curing accelerator is equal to or more than the lower limit and equal to or less than the upper limit, the resin material is efficiently cured. If the content of the curing accelerator is within a more preferable range, the storage stability of the resin material will be further increased, and a more favorable cured product will be obtained.
- the resin material may or may not contain a thermosetting compound other than the epoxy compound.
- a thermosetting compound other than the epoxy compound only one type may be used, or two or more types may be used in combination.
- Thermosetting compounds other than the above epoxy compounds include vinyl compounds, styrene compounds, oxetane compounds, polyarylate compounds, diallyl phthalate compounds, acrylate compounds, episulfide compounds, (meth)acrylic compounds, amino compounds, unsaturated polyester compounds, polyurethanes. compounds, and silicone compounds.
- the resin material may contain a thermoplastic resin.
- the thermoplastic resin include polyimide resin, phenoxy resin and polyvinyl acetal resin. Only one kind of the thermoplastic resin may be used, or two or more kinds thereof may be used in combination.
- the thermoplastic resin is preferably a polyimide resin or a phenoxy resin, more preferably a polyimide resin.
- the resin material preferably contains a polyimide resin or a phenoxy resin, and more preferably contains a polyimide resin.
- the resin material does not contain or contains a polyimide resin.
- the resin material may or may not contain a polyimide resin.
- the resin material does not contain or contains a phenoxy resin.
- the resin material may contain no phenoxy resin or may contain a phenoxy resin.
- the thermoplastic resin is preferably a polyimide resin.
- the resin material preferably contains polyimide resin.
- the resin material may not contain a phenoxy resin.
- the polyimide resin is preferably a polyimide resin obtained by a method of reacting tetracarboxylic dianhydride and dimer diamine.
- tetracarboxylic dianhydride examples include pyromellitic dianhydride, 3,3′,4,4′-benzophenonetetracarboxylic dianhydride, 3,3′,4,4′-biphenylsulfonetetra Carboxylic dianhydride, 1,4,5,8-naphthalenetetracarboxylic dianhydride, 2,3,6,7-naphthalenetetracarboxylic dianhydride, 3,3′,4,4′-biphenyl ether Tetracarboxylic dianhydride, 3,3′,4,4′-dimethyldiphenylsilanetetracarboxylic dianhydride, 3,3′,4,4′-tetraphenylsilanetetracarboxylic dianhydride, 1,2 ,3,4-furantetracarboxylic dianhydride, 4,4′-bis(3,4-dicarboxyphenoxy)diphenyl sulfide dianhydride,
- dimer diamine examples include Versamin 551 (trade name, manufactured by BASF Japan Ltd., 3,4-bis(1-aminoheptyl)-6-hexyl-5-(1-octenyl)cyclohexene) and Versamin 552 (trade name).
- Versamin 551 trade name, manufactured by BASF Japan Ltd., 3,4-bis(1-aminoheptyl)-6-hexyl-5-(1-octenyl)cyclohexene
- Versamin 552 trade name
- Cognix Japan Co., Ltd. a hydrogenated product of Versamin 551
- PRIAMINE 1075 PRIAMINE 1074
- the polyimide resin may have an acid anhydride structure, a maleimide structure, or a citraconimide structure at its terminal.
- the polyimide resin and the epoxy compound can be reacted.
- the thermal dimensional stability of the cured product can be enhanced.
- the thermoplastic resin preferably contains a phenoxy resin.
- the resin material preferably contains a phenoxy resin.
- the use of the phenoxy resin suppresses the deterioration of the embedding properties of the resin film in the holes or irregularities of the circuit board and the non-uniformity of the inorganic filler.
- the use of a phenoxy resin makes it possible to adjust the melt viscosity, so that the dispersibility of the inorganic filler is improved, and in the curing process, the resin composition or B-staged product is less likely to wet and spread in unintended regions.
- the above phenoxy resin is not particularly limited. Conventionally known phenoxy resins can be used as the phenoxy resin. Only one type of the phenoxy resin may be used, or two or more types may be used in combination.
- phenoxy resins examples include phenoxy resins having a skeleton such as a bisphenol A skeleton, a bisphenol F skeleton, a bisphenol S skeleton, a biphenyl skeleton, a novolac skeleton, a naphthalene skeleton, and an imide skeleton.
- phenoxy resin Commercial products of the phenoxy resin include, for example, Nippon Steel & Sumikin Chemical Co., Ltd. "YP50”, “YP55” and “YP70”, and Mitsubishi Chemical Corporation "1256B40", “4250”, “4256H40", “4275”, “ YX6954BH30” and “YX8100BH30”.
- the weight-average molecular weight of the thermoplastic resin, the polyimide resin, and the phenoxy resin is preferably 5,000 or more, more preferably 10,000 or more, and preferably 100,000 or less. Preferably it is 50000 or less.
- the weight average molecular weight of the thermoplastic resin, polyimide resin, and phenoxy resin means the weight average molecular weight in terms of polystyrene measured by gel permeation chromatography (GPC).
- the contents of the thermoplastic resin, the polyimide resin and the phenoxy resin are not particularly limited.
- the content of the thermoplastic resin (when the thermoplastic resin is a polyimide resin or a phenoxy resin, the content of the polyimide resin or the phenoxy resin) in 100% by weight of the components excluding the filler and solvent in the resin material is preferably is 1% by weight or more, more preferably 2% by weight or more, preferably 30% by weight or less, and more preferably 20% by weight or less.
- the content of the thermoplastic resin is equal to or more than the lower limit and equal to or less than the upper limit, the embedding property of the resin film into the holes or unevenness of the circuit board is improved.
- thermoplastic resin When the content of the thermoplastic resin is equal to or higher than the lower limit, formation of the resin film becomes easier, and an even better insulating layer can be obtained. If the content of the thermoplastic resin is equal to or less than the upper limit, the thermal expansion coefficient of the cured product will be even lower. When the content of the thermoplastic resin is equal to or less than the upper limit, the surface roughness of the cured product is further reduced, and the adhesive strength between the cured product and the metal layer is further increased.
- the resin material does not contain or contains a solvent.
- the resin material may or may not contain a solvent.
- the solvent By using the solvent, the viscosity of the resin material can be controlled within a suitable range, and the coatability of the resin material can be improved.
- the solvent may be used to obtain a slurry containing the inorganic filler. Only one of the above solvents may be used, or two or more thereof may be used in combination.
- Examples of the solvent include acetone, methanol, ethanol, butanol, 2-propanol, 2-methoxyethanol, 2-ethoxyethanol, 1-methoxy-2-propanol, 2-acetoxy-1-methoxypropane, toluene, xylene, methyl ethyl ketone, N,N-dimethylformamide, methyl isobutyl ketone, N-methyl-pyrrolidone, n-hexane, cyclohexane, cyclohexanone and mixtures such as naphtha.
- the boiling point of the solvent is preferably 200°C or lower, more preferably 180°C or lower.
- the content of the solvent in the resin composition is not particularly limited. The content of the solvent can be appropriately changed in consideration of the coatability of the resin composition.
- the content of the solvent in 100% by weight of the B-stage film is preferably 0.5% by weight or more, more preferably 1% by weight or more, and preferably 10% by weight. % or less, more preferably 5 wt % or less.
- the above resin materials contain leveling agents, flame retardants, coupling agents, coloring agents, antioxidants, ultraviolet degradation inhibitors, antifoaming agents, etc. agents, thickeners, thixotropic agents, and the like.
- Examples of the above coupling agents include silane coupling agents, titanium coupling agents and aluminum coupling agents.
- Examples of the silane coupling agent include vinylsilane, aminosilane, imidazolesilane and epoxysilane.
- a resin film (B-stage product/B-stage film) is obtained by molding the resin composition described above into a film.
- the resin material is preferably a resin film.
- the resin film is preferably a B-stage film.
- Examples of methods for obtaining a resin film by molding a resin composition into a film include the following methods.
- An extrusion molding method in which a resin composition is melt-kneaded using an extruder, extruded, and then molded into a film using a T-die, a circular die, or the like.
- a casting molding method in which a resin composition containing a solvent is cast and molded into a film.
- An extrusion molding method or a casting molding method is preferable because it can be used for thinning.
- Film includes sheets.
- a resin film that is a B-stage film can be obtained by molding the resin composition into a film and drying it by heating at, for example, 50° C. to 150° C. for 1 minute to 10 minutes to the extent that thermal curing does not proceed excessively. can.
- a film-like resin composition that can be obtained through the drying process as described above is called a B-stage film.
- the B-stage film is in a semi-cured state.
- a semi-cured product is not completely cured and may be further cured.
- the resin film does not have to be a prepreg. If the resin film is not a prepreg, no migration occurs along the glass cloth or the like. In addition, when the resin film is laminated or precured, the unevenness due to the glass cloth does not occur on the surface.
- the resin film can be used in the form of a laminated film comprising a metal foil or base film and a resin film laminated on the surface of the metal foil or base film.
- the metal foil is preferably copper foil.
- Examples of the base film of the laminated film include polyester resin films such as polyethylene terephthalate film and polybutylene terephthalate film, olefin resin films such as polyethylene film and polypropylene film, and polyimide resin films.
- the surface of the base film may be subjected to release treatment, if necessary.
- the thickness of the resin film is preferably 5 ⁇ m or more and preferably 200 ⁇ m or less.
- the thickness of the insulating layer formed of the resin film is preferably equal to or greater than the thickness of the conductor layer (metal layer) forming the circuit.
- the thickness of the insulating layer is preferably 5 ⁇ m or more and preferably 200 ⁇ m or less.
- the average coefficient of linear expansion (CTE) of the resulting cured product from 25° C. to 150° C. under a tensile load of 33 mN is preferably 33 ppm/° C. or less, more preferably 30 ppm/° C. or less, and still more preferably 27 ppm. /°C or less, particularly preferably 24 ppm/°C or less, most preferably 22 ppm/°C or less.
- the average coefficient of linear expansion (CTE) of the cured product may be 17 ppm/°C or higher, or 19 ppm/°C or higher.
- the average coefficient of linear expansion (CTE) of the cured product is measured as follows.
- a film-shaped resin material (resin film) is heated at 130°C for 60 minutes for temporary curing, and then heated at 200°C for 90 minutes to obtain a cured product of the resin material.
- the obtained cured product is cut into a size of 3 mm ⁇ 25 mm.
- a thermomechanical analyzer for example, "EXSTAR TMA/SS6100” manufactured by SII Nanotechnology Co., Ltd.
- the cut cured product was measured from 25 ° C. to Calculate the average coefficient of linear expansion (ppm/°C) up to 150°C.
- the above resin material is suitably used for forming a mold resin for embedding a semiconductor chip in a semiconductor device.
- the above resin material is suitably used for liquid crystal polymer (LCP) substitute applications, millimeter wave antenna applications, and rewiring layer applications.
- LCP liquid crystal polymer
- the above resin material is not limited to the above applications, and is suitable for general wiring formation applications.
- the above resin material is suitably used as an insulating material.
- the above resin material is suitably used for forming an insulating layer in a printed wiring board.
- the printed wiring board is obtained, for example, by heating and pressurizing the resin material.
- a member to be laminated having a metal layer on its surface can be laminated on one or both sides of the resin film. It is possible to suitably obtain a laminated structure comprising a member to be laminated having a metal layer on its surface and a resin film laminated on the surface of the metal layer, wherein the resin film is the resin material described above.
- a method for laminating the resin film and the member to be laminated having the metal layer on the surface thereof is not particularly limited, and a known method can be used. For example, using a device such as a parallel plate press or a roll laminator, the resin film can be laminated on a member to be laminated having a metal layer on its surface while applying pressure with or without heating.
- the material of the metal layer is preferably copper.
- the member to be laminated having the metal layer on its surface may be a metal foil such as copper foil.
- the above resin material is suitably used to obtain a copper-clad laminate.
- An example of the copper-clad laminate is a copper-clad laminate comprising a copper foil and a resin film laminated on one surface of the copper foil.
- the thickness of the copper foil of the copper clad laminate is not particularly limited.
- the thickness of the copper foil is preferably 1 ⁇ m or more and 100 ⁇ m or less.
- the copper foil preferably has fine irregularities on its surface.
- a method for forming the unevenness is not particularly limited. Examples of the method for forming the unevenness include a forming method using a known chemical solution.
- the above resin material is suitably used to obtain a multilayer substrate.
- the multi-layer board is a multi-layer board comprising a circuit board and an insulating layer laminated on the circuit board.
- the insulating layer of this multilayer substrate is formed of the above resin material.
- the insulating layer of the multilayer substrate may be formed of the resin film of the laminated film by using the laminated film.
- the insulating layer is preferably laminated on the surface of the circuit board on which the circuit is provided. A part of the insulating layer is preferably embedded between the circuits.
- the surface of the insulating layer opposite to the surface on which the circuit board is laminated is roughened.
- a conventionally known roughening treatment method can be used for the roughening treatment method, and is not particularly limited.
- the surface of the insulating layer may be subjected to a swelling treatment before the roughening treatment.
- the multilayer substrate further includes a copper plating layer laminated on the roughened surface of the insulating layer.
- the multilayer board is a multilayer board that includes a circuit board and a plurality of insulating layers laminated on the surface of the circuit board. At least one of the plurality of insulating layers arranged on the circuit board is formed using the resin material.
- the multilayer substrate preferably further includes a circuit laminated on at least one surface of the insulating layer formed using the resin film.
- multilayer printed wiring boards require high insulation reliability due to insulating layers.
- insulation reliability can be effectively improved by exhibiting the effects of the present invention. Therefore, the resin material according to the present invention is suitably used for forming insulating layers in multilayer printed wiring boards.
- the multilayer printed wiring board includes, for example, a circuit board, a plurality of insulating layers arranged on the surface of the circuit board, and metal layers arranged between the plurality of insulating layers. At least one of the insulating layers is a cured product of the resin material.
- FIG. 1 is a cross-sectional view schematically showing a multilayer printed wiring board using a resin material according to one embodiment of the present invention.
- a plurality of insulating layers 13 to 16 are laminated on the upper surface 12a of the circuit board 12.
- the insulating layers 13 to 16 are hardened layers.
- a metal layer 17 is formed on a partial region of the upper surface 12 a of the circuit board 12 .
- the insulating layers 13 to 15 other than the insulating layer 16 positioned on the outer surface opposite to the circuit board 12 side have a metal layer 17 formed on a partial region of the upper surface.
- Metal layer 17 is a circuit.
- a metal layer 17 is arranged between the circuit board 12 and the insulating layer 13 and between the laminated insulating layers 13 to 16, respectively.
- the lower metal layer 17 and the upper metal layer 17 are connected to each other by at least one of via-hole connection and through-hole connection (not shown).
- the insulating layers 13 to 16 are formed from the cured resin material.
- the surfaces of the insulating layers 13-16 are roughened, fine holes (not shown) are formed in the surfaces of the insulating layers 13-16.
- the metal layer 17 reaches inside the fine holes.
- the widthwise dimension (L) of the metal layer 17 and the widthwise dimension (S) of the portion where the metal layer 17 is not formed can be reduced.
- good insulation reliability is imparted between the upper metal layer and the lower metal layer that are not connected by via-hole connections and through-hole connections (not shown).
- the resin material is preferably used to obtain a cured product that is roughened or desmeared.
- the cured product also includes a pre-cured product that can be further cured.
- the cured product is preferably subjected to a roughening treatment.
- the cured product is preferably subjected to a swelling treatment before the roughening treatment.
- the cured product is preferably subjected to swelling treatment after precuring and before roughening treatment, and further cured after roughening treatment.
- the cured product does not necessarily have to be subjected to a swelling treatment.
- the swelling treatment method for example, a method of treating the cured product with an aqueous solution or an organic solvent dispersion solution of a compound containing ethylene glycol as a main component is used.
- the swelling liquid used for the swelling treatment generally contains an alkali as a pH adjuster or the like.
- the swelling liquid preferably contains sodium hydroxide.
- the swelling treatment is performed by treating the cured product with a 40% by weight ethylene glycol aqueous solution or the like at a treatment temperature of 30° C. to 85° C. for 1 minute to 30 minutes.
- the temperature of the swelling treatment is preferably in the range of 50.degree. C. to 85.degree.
- the temperature of the swelling treatment is too low, the swelling treatment takes a long time, and the adhesive strength between the cured product and the metal layer tends to decrease.
- a chemical oxidizing agent such as a manganese compound, a chromium compound, or a persulfate compound is used. These chemical oxidants are used as aqueous solutions or organic solvent dispersion solutions after water or organic solvents are added.
- the roughening liquid used for the roughening treatment generally contains an alkali as a pH adjuster or the like.
- the roughening liquid preferably contains sodium hydroxide.
- Examples of the manganese compound include potassium permanganate and sodium permanganate.
- Examples of the chromium compound include potassium dichromate and anhydrous potassium chromate.
- Examples of the persulfate compound include sodium persulfate, potassium persulfate and ammonium persulfate.
- the arithmetic mean roughness Ra of the surface of the cured product is preferably 10 nm or more, preferably less than 300 nm, more preferably less than 200 nm, still more preferably less than 150 nm.
- the adhesive strength between the cured product and the metal layer is increased, and finer wiring is formed on the surface of the insulating layer. Furthermore, conductor loss can be suppressed, and signal loss can be kept low.
- the arithmetic mean roughness Ra is measured according to JIS B0601:1994.
- Through-holes may be formed in the cured product obtained by precuring the resin material.
- Vias, through holes, or the like are formed as through holes in the multilayer substrates and the like.
- vias can be formed by irradiation with a laser such as a CO2 laser.
- the diameter of the via is not particularly limited, it is about 60 ⁇ m to 80 ⁇ m. Due to the formation of the through-holes, smears, which are residues of the resin derived from the resin component contained in the cured product, are often formed at the bottom of the vias.
- the surface of the cured product is preferably desmeared.
- the desmearing treatment may also serve as the roughening treatment.
- a desmearing liquid used for desmearing generally contains an alkali.
- the desmear treatment liquid preferably contains sodium hydroxide.
- the surface roughness of the surface of the desmeared cured product is sufficiently reduced.
- Curing agent First Curing Agent: Phenol carbonate compound ("FTC509” manufactured by Gunei Chemical Co., Ltd., molecular weight 4000, glass transition temperature 110 ° C.) Active ester carbonate compound-containing liquid (“FTC509ES” manufactured by Gunei Chemical Co., Ltd., molecular weight 4000, solid content 55% by weight, glass transition temperature 33°C)
- Second curing agent Phenolic compound-containing liquid ("LA-1356” manufactured by DIC, solid content 60% by weight) Active ester compound-containing liquid (manufactured by DIC "HPC-8000L-65T", solid content 65% by weight)
- Imidazole compound (2-phenyl-4-methylimidazole, "2P4MZ" manufactured by Shikoku Kasei Kogyo Co., Ltd.
- Slurry containing silica 1 slurry containing spherical silica that is surface-treated with a silane coupling agent, average particle size 0.1 ⁇ m, prepared by the following preparation method
- Slurry containing silica 2 slurry containing spherical silica that is surface-treated with a silane coupling agent, average particle size 0.5 ⁇ m, prepared by the following preparation method
- Slurry containing silica 3 slurry containing spherical silica that is surface-treated with a silane coupling agent, average particle size 2.0 ⁇ m, prepared by the following preparation method
- Slurry containing silica 4 slurry containing spherical silica that is surface-treated with a silane coupling agent, average particle size 2.5 ⁇ m, prepared by the following preparation method
- silica 1-containing slurry ⁇ Method for preparing silica 1-containing slurry> Silica (“Seahoster KE-S10” manufactured by Nippon Shokubai Co., Ltd.) was surface-treated with a silane coupling agent having an N-phenyl-3-aminopropyl group (“KBM-573” manufactured by Shin-Etsu Chemical Co., Ltd.). Cyclohexanone (“037-05096” manufactured by Wako Pure Chemical Industries, Ltd.) was added to the resulting surface-treated product so as to have a content of 50% by weight to obtain a silica 1-containing slurry.
- Polyimide resin-containing liquid polyimide resin-containing liquid (nonvolatile content 26.8% by weight) which is a reaction product of tetracarboxylic dianhydride and dimer diamine, synthesized according to Synthesis Example 1 below)
- Phenoxy resin-containing liquid weight average molecular weight 39000, "YX6954BH30” manufactured by Mitsubishi Chemical Corporation, solid content 30% by weight
- Carbonate resin weight average molecular weight 1000, "C-1015N” manufactured by Kuraray Co., Ltd.
- the weight average molecular weights of the first curing agent and the thermoplastic resin were determined by GPC (gel permeation chromatography) as follows.
- Examples 1 to 7 and Comparative Examples 1 to 3 The components shown in Tables 1 and 2 below were blended in the amounts shown in Tables 1 and 2 below (unit: parts by weight of solid content) and stirred at room temperature until a uniform solution was obtained to obtain a resin material.
- Preparation of resin film Using an applicator, apply the obtained resin material on the release-treated surface of a release-treated PET film (“XG284” manufactured by Toray Industries, Inc., thickness 25 ⁇ m), and then place in a gear oven at 100° C. for 2 minutes. Dry for 30 seconds to evaporate the solvent. Thus, a laminated film (laminated film of PET film and resin film) in which a resin film (B stage film) having a thickness of 40 ⁇ m was laminated on the PET film was obtained.
- XG284 manufactured by Toray Industries, Inc., thickness 25 ⁇ m
- Dielectric loss tangent (Df) of cured product The resulting resin film was heated at 180° C. for 30 minutes for temporary curing, and then heated at 200° C. for 90 minutes to obtain a cured product.
- the resulting cured product was cut into a size of 2 mm in width and 80 mm in length, and 10 sheets were superimposed and measured by Kanto Denshi Applied Development Co., Ltd.'s "Cavity Resonance Perturbation Method Dielectric Constant Measurement Device CP521" and Keysight Technologies, Inc.'s " Using a network analyzer N5224A PNA, the dielectric loss tangent was measured at room temperature (23° C.) and a frequency of 5.8 GHz by the cavity resonance method.
- Dielectric loss tangent is less than 2.8 ⁇ 10 -3 ⁇ : Dielectric loss tangent is 2.8 ⁇ 10 -3 or more and less than 2.9 ⁇ 10 -3 ⁇ : Dielectric loss tangent is 2.9 ⁇ 10 -3 or more Less than 3.0 ⁇ 10 ⁇ 3 ⁇ : Dielectric loss tangent is 3.0 ⁇ 10 ⁇ 3 or more
- a laminate A was obtained in which semi-cured resin films were laminated on both sides of the CCL substrate.
- Via (through hole) formation A CO 2 laser (manufactured by Hitachi Via Mechanics Co., Ltd.) was applied to the semi-cured product of the resin film of the obtained laminate A, and a via (through hole) having a diameter of 65 ⁇ m at the upper end and a diameter of 45 ⁇ m at the lower end (bottom) holes) were formed.
- a laminate B was obtained in which the semi-cured resin film was laminated on the CCL substrate and vias (through holes) were formed in the semi-cured resin film.
- Laminate B after the swelling treatment was placed in a roughening aqueous solution of potassium permanganate (“Concentrate Compact CP” manufactured by Atotech Japan Co., Ltd.) at 80° C. and shaken for 30 minutes.
- a cleaning solution (“Reduction Securigant P” manufactured by Atotech Japan Co., Ltd.) at 25°C, it was cleaned with pure water to obtain an evaluation sample.
- the bottom of the evaluation sample via was observed with a scanning electron microscope (SEM), and the maximum smear length from the wall surface of the via bottom was measured.
- SEM scanning electron microscope
- Electroless plating treatment The surface of the roughened cured product of the evaluation sample obtained in the evaluation of “(2) desmear property (removability of residue at bottom of via)” was washed with an alkaline cleaner (“Cleaner Securigant” manufactured by Atotech Japan Co., Ltd.) at 60 ° C. 902") for 5 minutes and degreased. After washing, the cured product was treated with a pre-dip liquid ("Pre-dip Neogant B" manufactured by Atotech Japan Co., Ltd.) at 25°C for 2 minutes. Thereafter, the cured product was treated with an activator liquid (“Activator Neogant 834” manufactured by Atotech Japan Co., Ltd.) at 40° C. for 5 minutes to attach a palladium catalyst. Next, the cured product was treated with a reducing liquid (“Reducer Neogant WA” manufactured by Atotech Japan Co., Ltd.) at 30° C. for 5 minutes.
- an alkaline cleaner (“Cleaner Securigant” manufactured by Atotech
- the cured product is placed in a chemical copper solution ("Basic Printgant MSK-DK”, “Copper Printgant MSK”, “Stabilizer Printgant MSK”, and “Reducer Cu” manufactured by Atotech Japan Co., Ltd.) for electroless plating. was carried out until the plating thickness reached about 0.5 ⁇ m. After electroless plating, an annealing treatment was performed at a temperature of 120° C. for 30 minutes in order to remove residual hydrogen gas. All the steps up to the step of electroless plating were carried out with a beaker scale of 2 liters of the processing liquid, while shaking the cured product.
- Electroplating treatment Next, the electroless-plated cured product was electroplated until the plating thickness reached 25 ⁇ m.
- copper sulfate solution (“Copper sulfate pentahydrate” manufactured by Wako Pure Chemical Industries, “Sulfuric acid” manufactured by Wako Pure Chemical Industries, Ltd. “Basic Leveler Cupalaside HL” manufactured by Atotech Japan, “ Electrolytic plating was carried out until the thickness of the plating reached about 25 ⁇ m by applying a current of 0.6 A/cm 2 using a correction agent "Capalacid GS").
- the cured product was heated at 200° C. for 60 minutes to further cure the cured product.
- a cured product having a copper plating layer laminated on the upper surface was obtained.
- Plating peel strength measurement In the surface of the copper plating layer of the hardened product on which the obtained copper plating layer was laminated, 10 mm-wide strip-shaped cuts were made at 5 mm intervals at a total of 6 locations. Set the hardened product with the copper plating layer laminated on the upper surface in a 90° peel tester ("TE-3001" manufactured by Tester Sangyo Co., Ltd.), pick up the edge of the notched copper plating layer with a gripper, and make a via The peel strength (plating peel strength) was measured by peeling the copper plating layer by 20 mm while avoiding the portion where was formed. The peel strength (plating peel strength) was measured for each of the six notch points, and the average value of the plating peel strength was obtained. Plating peel strength was determined according to the following criteria.
- the resin film was semi-cured by heating at 100° C. for 30 minutes and then at 180° C. for 30 minutes. Then, (a) swelling treatment and (b) permanganate treatment were performed in the same manner as in the evaluation of “(2) desmear property (removability of residue on via bottom)”. Then, it was heated at 200° C. for 60 minutes to obtain a laminate D in which two cured resin film layers were laminated on both sides of the CCL substrate. By repeating the same treatment, a laminate E was obtained in which 8 cured resin film layers were laminated on both sides of the CCL substrate.
- the obtained laminate E was dropped from a height of 1 m a total of 20 times.
- the presence or absence of chipping of the cured product layer of the resin film at the edge of the substrate was checked using a microscope each time the substrate was dropped.
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Abstract
Description
上記樹脂材料は、エポキシ化合物を含む。上記エポキシ化合物として、従来公知のエポキシ化合物を使用可能である。上記エポキシ化合物は、少なくとも1個のエポキシ基を有する有機化合物である。上記エポキシ化合物は、1種のみが用いられてもよく、2種以上が併用されてもよい。 [Epoxy compound]
The resin material includes an epoxy compound. Conventionally known epoxy compounds can be used as the epoxy compound. The epoxy compound is an organic compound having at least one epoxy group. Only one type of the epoxy compound may be used, or two or more types may be used in combination.
上記樹脂材料は、硬化剤を含む。上記の1)-4)の効果を発揮させる観点から、上記硬化剤は、カーボネート構造を有しかつエポキシ基と反応可能な官能基を有する第1の硬化剤を含む。上記硬化剤は、カーボネート構造を有さない第2の硬化剤を含んでいてもよく、含んでいなくてもよい。 [Curing agent]
The resin material contains a curing agent. From the viewpoint of exhibiting the effects of 1) to 4) above, the curing agent includes a first curing agent having a carbonate structure and a functional group capable of reacting with an epoxy group. The curing agent may or may not contain a second curing agent that does not have a carbonate structure.
上記第1の硬化剤は、カーボネート構造を有しかつエポキシ基と反応可能な官能基を有する化合物(硬化剤)である。上記第1の硬化剤は、カーボネート構造(-O-C(=O)-O-)を有する。上記第1の硬化剤は、エポキシ基と反応可能な官能基を有する。上記第1の硬化剤は、上記エポキシ化合物のエポキシ基と反応可能な官能基を有する。上記第1の硬化剤は、1種のみが用いられてもよく、2種以上が併用されてもよい。 <First Curing Agent>
The first curing agent is a compound (curing agent) having a carbonate structure and a functional group capable of reacting with an epoxy group. The first curing agent has a carbonate structure (--OC(=O)--O--). The first curing agent has a functional group capable of reacting with an epoxy group. The first curing agent has a functional group capable of reacting with the epoxy group of the epoxy compound. Only one kind of the first curing agent may be used, or two or more kinds thereof may be used in combination.
上記第2の硬化剤は、カーボネート構造を有さない化合物(硬化剤)である。上記硬化剤は、上記第2の硬化剤を含むことが好ましい。上記第2の硬化剤は、1種のみが用いられてもよく、2種以上が併用されてもよい。 <Second Curing Agent>
The second curing agent is a compound (curing agent) that does not have a carbonate structure. The curing agent preferably contains the second curing agent. Only one kind of the second curing agent may be used, or two or more kinds thereof may be used in combination.
上記活性エステル化合物とは、構造体中にエステル結合を少なくとも1つ含み、かつ、エステル結合の両側に脂肪族鎖、脂肪族環又は芳香族環が結合している化合物をいう。活性エステル化合物は、例えばカルボン酸化合物又はチオカルボン酸化合物と、ヒドロキシ化合物又はチオール化合物との縮合反応によって得られる。活性エステル化合物の例としては、下記式(1)で表される化合物が挙げられる。上記活性エステル化合物は、1種のみが用いられてもよく、2種以上が併用されてもよい。 Active ester compound:
The active ester compound is a compound that contains at least one ester bond in its structure and that has an aliphatic chain, an aliphatic ring, or an aromatic ring bonded to both sides of the ester bond. An active ester compound is obtained, for example, by a condensation reaction between a carboxylic acid compound or a thiocarboxylic acid compound and a hydroxy compound or a thiol compound. Examples of active ester compounds include compounds represented by the following formula (1). Only one kind of the active ester compound may be used, or two or more kinds thereof may be used in combination.
上記フェノール化合物としては、ノボラック型フェノール、ビフェノール型フェノール、ナフタレン型フェノール、ジシクロペンタジエン型フェノール、アラルキル型フェノール及びジシクロペンタジエン型フェノール等が挙げられる。上記フェノール化合物は、1種のみが用いられてもよく、2種以上が併用されてもよい。 Phenolic compounds:
Examples of the phenol compound include novolak-type phenol, biphenol-type phenol, naphthalene-type phenol, dicyclopentadiene-type phenol, aralkyl-type phenol, and dicyclopentadiene-type phenol. As for the said phenol compound, only 1 type may be used and 2 or more types may be used together.
上記シアネートエステル化合物としては、ノボラック型シアネートエステル樹脂、ビスフェノール型シアネートエステル樹脂、並びにこれらが一部三量化されたプレポリマー等が挙げられる。上記ノボラック型シアネートエステル樹脂としては、フェノールノボラック型シアネートエステル樹脂及びアルキルフェノール型シアネートエステル樹脂等が挙げられる。上記ビスフェノール型シアネートエステル樹脂としては、ビスフェノールA型シアネートエステル樹脂、ビスフェノールE型シアネートエステル樹脂及びテトラメチルビスフェノールF型シアネートエステル樹脂等が挙げられる。上記シアネートエステル化合物は、1種のみが用いられてもよく、2種以上が併用されてもよい。 Cyanate ester compound:
Examples of the cyanate ester compound include novolak-type cyanate-ester resins, bisphenol-type cyanate-ester resins, and prepolymers obtained by partially trimerizing these. Examples of the novolak-type cyanate ester resins include phenol novolac-type cyanate ester resins and alkylphenol-type cyanate ester resins. Examples of the bisphenol type cyanate ester resin include bisphenol A type cyanate ester resin, bisphenol E type cyanate ester resin and tetramethylbisphenol F type cyanate ester resin. As for the said cyanate ester compound, only 1 type may be used and 2 or more types may be used together.
上記カルボジイミド化合物は、下記式(2)で表される構造単位を有する化合物である。下記式(2)において、右端部及び左端部は、他の基との結合部位である。上記カルボジイミド化合物は、1種のみが用いられてもよく、2種以上が併用されてもよい。 Carbodiimide compounds:
The carbodiimide compound is a compound having a structural unit represented by the following formula (2). In the following formula (2), the right end and left end are bonding sites with other groups. Only one kind of the carbodiimide compound may be used, or two or more kinds thereof may be used in combination.
上記マレイミド化合物としては、N-フェニルマレイミド及びN-アルキルビスマレイミド等が挙げられる。上記マレイミド化合物は、ビスマレイミド化合物であってもよい。上記マレイミド化合物は、1種のみが用いられてもよく、2種以上が併用されてもよい。 Maleimide compounds:
Examples of the maleimide compound include N-phenylmaleimide and N-alkylbismaleimide. The maleimide compound may be a bismaleimide compound. Only one type of the maleimide compound may be used, or two or more types may be used in combination.
上記ベンゾオキサジン化合物としては、P-d型ベンゾオキサジン、及びF-a型ベンゾオキサジン等が挙げられる。上記ベンゾオキサジン化合物は、1種のみが用いられてもよく、2種以上が併用されてもよい。 Benzoxazine compounds:
Examples of the benzoxazine compound include Pd-type benzoxazine and Fa-type benzoxazine. Only one kind of the benzoxazine compound may be used, or two or more kinds thereof may be used in combination.
上記酸無水物としては、テトラヒドロフタル酸無水物、及びアルキルスチレン-無水マレイン酸共重合体等が挙げられる。上記酸無水物は、1種のみが用いられてもよく、2種以上が併用されてもよい。 Acid anhydride:
Examples of the acid anhydride include tetrahydrophthalic anhydride and alkylstyrene-maleic anhydride copolymer. Only one kind of the acid anhydride may be used, or two or more kinds thereof may be used in combination.
上記樹脂材料は、フィラーを含む。上記フィラーの平均粒子径は2.0μm以下である。上記フィラーは、有機フィラーであってもよく、無機フィラーであってもよく、有機フィラーと無機フィラーとの混合物であってもよい。上記フィラーは、1種のみが用いられてもよく、2種以上が併用されてもよい。 [Filler]
The resin material contains a filler. The average particle size of the filler is 2.0 μm or less. The filler may be an organic filler, an inorganic filler, or a mixture of an organic filler and an inorganic filler. Only one kind of the filler may be used, or two or more kinds thereof may be used in combination.
The average particle size of the filler is preferably 0.1 µm or more, more preferably 0.3 µm or more, preferably 1.8 µm or less, and more preferably 1.6 µm or less. When the average particle size of the filler is the lower limit or more and the upper limit or less, the surface roughness after etching can be reduced, and the plating peel strength can be increased, and the adhesion between the insulating layer and the metal layer. can increase The average particle size of the filler may exceed 0.5 μm, may be 1.0 μm or more, may be 1 μm or less, may be less than 1 μm, or may be 0.5 μm or less. may be less than 0.5 μm, and may be 0.3 μm or less.
上記樹脂材料は、硬化促進剤を含むことが好ましい。ただし、上記樹脂材料は、硬化促進剤を含まなくてもよい。上記硬化促進剤の使用により、硬化速度がより一層速くなる。樹脂材料を速やかに硬化させることで、硬化物における架橋構造が均一になると共に、未反応の官能基数が減り、結果的に架橋密度が高くなる。上記硬化促進剤は特に限定されず、従来公知の硬化促進剤を使用可能である。上記硬化促進剤は、1種のみが用いられてもよく、2種以上が併用されてもよい。 [Curing accelerator]
The resin material preferably contains a curing accelerator. However, the resin material may not contain a curing accelerator. The use of the curing accelerator makes the curing speed even faster. By rapidly curing the resin material, the crosslinked structure in the cured product becomes uniform and the number of unreacted functional groups is reduced, resulting in a high crosslink density. The curing accelerator is not particularly limited, and conventionally known curing accelerators can be used. Only one kind of the curing accelerator may be used, or two or more kinds thereof may be used in combination.
上記樹脂材料は、エポキシ化合物以外の熱硬化性化合物を含んでいてもよく、含んでいなくてもよい。上記エポキシ化合物以外の熱硬化性化合物は、1種のみが用いられてもよく、2種以上が併用されてもよい。 [Thermosetting compound other than epoxy compound]
The resin material may or may not contain a thermosetting compound other than the epoxy compound. As for the thermosetting compounds other than the epoxy compound, only one type may be used, or two or more types may be used in combination.
上記樹脂材料は、熱可塑性樹脂を含んでいてもよい。上記熱可塑性樹脂としては、ポリイミド樹脂、フェノキシ樹脂及びポリビニルアセタール樹脂等が挙げられる。上記熱可塑性樹脂は、1種のみが用いられてもよく、2種以上が併用されてもよい。 [Thermoplastic resin]
The resin material may contain a thermoplastic resin. Examples of the thermoplastic resin include polyimide resin, phenoxy resin and polyvinyl acetal resin. Only one kind of the thermoplastic resin may be used, or two or more kinds thereof may be used in combination.
上記樹脂材料は、溶剤を含まないか又は含む。上記樹脂材料は、溶剤を含んでいてもよく、溶剤を含んでいなくてもよい。上記溶剤の使用により、樹脂材料の粘度を好適な範囲に制御でき、樹脂材料の塗工性を高めることができる。また、上記溶剤は、上記無機フィラーを含むスラリーを得るために用いられてもよい。上記溶剤は1種のみが用いられてもよく、2種以上が併用されてもよい。 [solvent]
The resin material does not contain or contains a solvent. The resin material may or may not contain a solvent. By using the solvent, the viscosity of the resin material can be controlled within a suitable range, and the coatability of the resin material can be improved. Moreover, the solvent may be used to obtain a slurry containing the inorganic filler. Only one of the above solvents may be used, or two or more thereof may be used in combination.
耐衝撃性、耐熱性、樹脂の相溶性及び作業性等の改善を目的として、上記樹脂材料は、レベリング剤、難燃剤、カップリング剤、着色剤、酸化防止剤、紫外線劣化防止剤、消泡剤、増粘剤、及び揺変性付与剤等を含んでいてもよい。 [Other ingredients]
For the purpose of improving impact resistance, heat resistance, resin compatibility, workability, etc., the above resin materials contain leveling agents, flame retardants, coupling agents, coloring agents, antioxidants, ultraviolet degradation inhibitors, antifoaming agents, etc. agents, thickeners, thixotropic agents, and the like.
上述した樹脂組成物をフィルム状に成形することにより樹脂フィルム(Bステージ化物/Bステージフィルム)が得られる。上記樹脂材料は、樹脂フィルムであることが好ましい。樹脂フィルムは、Bステージフィルムであることが好ましい。 (resin film)
A resin film (B-stage product/B-stage film) is obtained by molding the resin composition described above into a film. The resin material is preferably a resin film. The resin film is preferably a B-stage film.
上記樹脂材料を130℃で60分間加熱して仮硬化させた後、200℃で90分間加熱し、樹脂材料の硬化物を得る。この場合に、得られた硬化物の引っ張り荷重33mNでの25℃~150℃までの平均線膨張係数(CTE)は、好ましくは33ppm/℃以下、より好ましくは30ppm/℃以下、更に好ましくは27ppm/℃以下、特に好ましくは24ppm/℃以下、最も好ましくは22ppm/℃以下である。上記硬化物の平均線膨張係数(CTE)は、17ppm/℃以上であってもよく、19ppm/℃以上であってもよい。 (other details of resin material)
The above resin material is heated at 130° C. for 60 minutes to temporarily harden, and then heated at 200° C. for 90 minutes to obtain a cured product of the resin material. In this case, the average coefficient of linear expansion (CTE) of the resulting cured product from 25° C. to 150° C. under a tensile load of 33 mN is preferably 33 ppm/° C. or less, more preferably 30 ppm/° C. or less, and still more preferably 27 ppm. /°C or less, particularly preferably 24 ppm/°C or less, most preferably 22 ppm/°C or less. The average coefficient of linear expansion (CTE) of the cured product may be 17 ppm/°C or higher, or 19 ppm/°C or higher.
上記樹脂材料は、半導体装置において半導体チップを埋め込むモールド樹脂を形成するために好適に用いられる。 (Semiconductor devices, printed wiring boards, copper clad laminates and multilayer printed wiring boards)
The above resin material is suitably used for forming a mold resin for embedding a semiconductor chip in a semiconductor device.
上記樹脂材料は、粗化処理又はデスミア処理される硬化物を得るために用いられることが好ましい。上記硬化物には、更に硬化が可能な予備硬化物も含まれる。 (Roughening treatment and swelling treatment)
The resin material is preferably used to obtain a cured product that is roughened or desmeared. The cured product also includes a pre-cured product that can be further cured.
上記樹脂材料を予備硬化させることにより得られた硬化物に、貫通孔が形成されることがある。上記多層基板などでは、貫通孔として、ビア又はスルーホール等が形成される。例えば、ビアは、CO2レーザー等のレーザーの照射により形成できる。ビアの直径は特に限定されないが、60μm~80μm程度である。上記貫通孔の形成により、ビア内の底部には、硬化物に含まれている樹脂成分に由来する樹脂の残渣であるスミアが形成されることが多い。 (Desmear treatment)
Through-holes may be formed in the cured product obtained by precuring the resin material. Vias, through holes, or the like are formed as through holes in the multilayer substrates and the like. For example, vias can be formed by irradiation with a laser such as a CO2 laser. Although the diameter of the via is not particularly limited, it is about 60 μm to 80 μm. Due to the formation of the through-holes, smears, which are residues of the resin derived from the resin component contained in the cured product, are often formed at the bottom of the vias.
ビフェニル型エポキシ化合物(日本化薬製「NC3000L」)
ビスフェノールF型エポキシ化合物(DIC社製「830S」) (epoxy compound)
Biphenyl-type epoxy compound ("NC3000L" manufactured by Nippon Kayaku)
Bisphenol F type epoxy compound ("830S" manufactured by DIC)
第1の硬化剤:
フェノールカーボネート化合物(群栄化学社製「FTC509」、分子量4000、ガラス転移温度110℃)
活性エステルカーボネート化合物含有液(群栄化学社製「FTC509ES」、分子量4000、固形分55重量%、ガラス転移温度33℃) (curing agent)
First Curing Agent:
Phenol carbonate compound ("FTC509" manufactured by Gunei Chemical Co., Ltd., molecular weight 4000, glass transition temperature 110 ° C.)
Active ester carbonate compound-containing liquid ("FTC509ES" manufactured by Gunei Chemical Co., Ltd., molecular weight 4000, solid content 55% by weight, glass transition temperature 33°C)
フェノール化合物含有液(DIC社製「LA-1356」、固形分60重量%)
活性エステル化合物含有液(DIC社製「HPC-8000L-65T」、固形分65重量%) Second curing agent:
Phenolic compound-containing liquid ("LA-1356" manufactured by DIC, solid content 60% by weight)
Active ester compound-containing liquid (manufactured by DIC "HPC-8000L-65T", solid content 65% by weight)
イミダゾール化合物(2-フェニル-4-メチルイミダゾール、四国化成工業社製「2P4MZ」) (Curing accelerator)
Imidazole compound (2-phenyl-4-methylimidazole, "2P4MZ" manufactured by Shikoku Kasei Kogyo Co., Ltd.)
シリカ1含有スラリー(シランカップリング剤による表面処理物である球状シリカを含むスラリー、平均粒子径0.1μm、以下の作製方法により作製)
シリカ2含有スラリー(シランカップリング剤による表面処理物である球状シリカを含むスラリー、平均粒子径0.5μm、以下の作製方法により作製)
シリカ3含有スラリー(シランカップリング剤による表面処理物である球状シリカを含むスラリー、平均粒子径2.0μm、以下の作製方法により作製)
シリカ4含有スラリー(シランカップリング剤による表面処理物である球状シリカを含むスラリー、平均粒子径2.5μm、以下の作製方法により作製) (Filler: inorganic filler)
Slurry containing silica 1 (slurry containing spherical silica that is surface-treated with a silane coupling agent, average particle size 0.1 μm, prepared by the following preparation method)
Slurry containing silica 2 (slurry containing spherical silica that is surface-treated with a silane coupling agent, average particle size 0.5 μm, prepared by the following preparation method)
Slurry containing silica 3 (slurry containing spherical silica that is surface-treated with a silane coupling agent, average particle size 2.0 μm, prepared by the following preparation method)
Slurry containing silica 4 (slurry containing spherical silica that is surface-treated with a silane coupling agent, average particle size 2.5 μm, prepared by the following preparation method)
シリカ(日本触媒社製「シーホスターKE-S10」)を、N-フェニル-3-アミノプロピル基を有するシランカップリング剤(信越化学工業社製「KBM-573」)で表面処理した。得られた表面処理物に対して、50重量%の含有量となるようにシクロヘキサノン(和光純薬工業社製「037-05096」)を添加して、シリカ1含有スラリーを得た。 <Method for preparing silica 1-containing slurry>
Silica (“Seahoster KE-S10” manufactured by Nippon Shokubai Co., Ltd.) was surface-treated with a silane coupling agent having an N-phenyl-3-aminopropyl group (“KBM-573” manufactured by Shin-Etsu Chemical Co., Ltd.). Cyclohexanone (“037-05096” manufactured by Wako Pure Chemical Industries, Ltd.) was added to the resulting surface-treated product so as to have a content of 50% by weight to obtain a silica 1-containing slurry.
シリカ(アドマテックス社製「SO-C2」)を、N-フェニル-3-アミノプロピル基を有するシランカップリング剤(信越化学工業社製「KBM-573」)で表面処理した。得られた表面処理物に対して、50重量%の含有量となるようにシクロヘキサノン(和光純薬工業社製「037-05096」)を添加して、シリカ2含有スラリーを得た。 <Method for preparing slurry containing silica 2>
Silica (“SO-C2” manufactured by Admatechs) was surface-treated with a silane coupling agent having an N-phenyl-3-aminopropyl group (“KBM-573” manufactured by Shin-Etsu Chemical Co., Ltd.). Cyclohexanone (“037-05096” manufactured by Wako Pure Chemical Industries, Ltd.) was added to the resulting surface-treated product so as to have a content of 50% by weight to obtain a silica 2-containing slurry.
シリカ(アドマテックス社製「SO-C6」)を、N-フェニル-3-アミノプロピル基を有するシランカップリング剤(信越化学工業社製「KBM-573」)で表面処理した。得られた表面処理物に対して、50重量%の含有量となるようにシクロヘキサノン(和光純薬工業社製「037-05096」)を添加して、シリカ3含有スラリーを得た。 <Method for preparing slurry containing silica 3>
Silica ("SO-C6" manufactured by Admatechs) was surface-treated with a silane coupling agent having an N-phenyl-3-aminopropyl group ("KBM-573" manufactured by Shin-Etsu Chemical Co., Ltd.). Cyclohexanone (“037-05096” manufactured by Wako Pure Chemical Industries, Ltd.) was added to the resulting surface-treated product so as to have a content of 50% by weight to obtain a silica 3-containing slurry.
シリカ(日本触媒社製「シーホスターKE-S250」)を、N-フェニル-3-アミノプロピル基を有するシランカップリング剤(信越化学工業社製「KBM-573」)で表面処理した。得られた表面処理物に対して、50重量%の含有量となるようにシクロヘキサノン(和光純薬工業社製「037-05096」)を添加して、シリカ4含有スラリーを得た。 <Method for preparing slurry containing silica 4>
Silica (“Seahoster KE-S250” manufactured by Nippon Shokubai Co., Ltd.) was surface-treated with a silane coupling agent having an N-phenyl-3-aminopropyl group (“KBM-573” manufactured by Shin-Etsu Chemical Co., Ltd.). Cyclohexanone (“037-05096” manufactured by Wako Pure Chemical Industries, Ltd.) was added to the obtained surface-treated product so as to have a content of 50% by weight to obtain a silica 4-containing slurry.
ポリイミド樹脂含有液(テトラカルボン酸二無水物とダイマージアミンとの反応物であるポリイミド樹脂含有液(不揮発分26.8重量%)、以下の合成例1に従って合成)
フェノキシ樹脂含有液(重量平均分子量39000、三菱ケミカル社製「YX6954BH30」、固形分30重量%)
カーボネート樹脂(重量平均分子量1000、クラレ社製「C-1015N」) (Thermoplastic resin)
Polyimide resin-containing liquid (polyimide resin-containing liquid (nonvolatile content 26.8% by weight) which is a reaction product of tetracarboxylic dianhydride and dimer diamine, synthesized according to Synthesis Example 1 below)
Phenoxy resin-containing liquid (weight average molecular weight 39000, "YX6954BH30" manufactured by Mitsubishi Chemical Corporation, solid content 30% by weight)
Carbonate resin (weight average molecular weight 1000, "C-1015N" manufactured by Kuraray Co., Ltd.)
撹拌機、分水器、温度計及び窒素ガス導入管を備えた反応容器に、テトラカルボン酸二無水物(SABICジャパン合同会社製「BisDA-1000」)300.0gと、シクロヘキサノン665.5gとを入れ、反応容器中の溶液を60℃まで加熱した。次いで、反応容器中に、ダイマージアミン(クローダジャパン社製「PRIAMINE1075」)89.0gと、1,3-ビスアミノメチルシクロヘキサン(三菱ガス化学社製)54.7gとを滴下した。次いで、反応容器中に、メチルシクロヘキサン121.0gと、エチレングリコールジメチルエーテル423.5gとを添加し、140℃で10時間かけてイミド化反応を行った。このようにして、ポリイミド樹脂含有液(不揮発分26.8重量%)を得た。得られたポリイミド化合物の分子量(重量平均分子量)は20000であった。なお、酸成分/アミン成分のモル比は1.04であった。 <Synthesis Example 1>
A reaction vessel equipped with a stirrer, a water separator, a thermometer and a nitrogen gas inlet tube was charged with 300.0 g of tetracarboxylic dianhydride ("BisDA-1000" manufactured by SABIC Japan LLC) and 665.5 g of cyclohexanone. and the solution in the reaction vessel was heated to 60°C. Then, 89.0 g of dimer diamine (“PRIAMINE 1075” manufactured by Croda Japan) and 54.7 g of 1,3-bisaminomethylcyclohexane (manufactured by Mitsubishi Gas Chemical Company, Inc.) were dropped into the reaction vessel. Then, 121.0 g of methylcyclohexane and 423.5 g of ethylene glycol dimethyl ether were added to the reactor, and imidization reaction was carried out at 140° C. for 10 hours. Thus, a polyimide resin-containing liquid (26.8% by weight of non-volatile content) was obtained. The molecular weight (weight average molecular weight) of the obtained polyimide compound was 20,000. The molar ratio of acid component/amine component was 1.04.
下記の表1,2に示す成分を下記の表1,2に示す配合量(単位は固形分重量部)で配合し、均一な溶液となるまで常温で撹拌し、樹脂材料を得た。 (Examples 1 to 7 and Comparative Examples 1 to 3)
The components shown in Tables 1 and 2 below were blended in the amounts shown in Tables 1 and 2 below (unit: parts by weight of solid content) and stirred at room temperature until a uniform solution was obtained to obtain a resin material.
アプリケーターを用いて、離型処理されたPETフィルム(東レ社製「XG284」、厚み25μm)の離型処理面上に得られた樹脂材料を塗工した後、100℃のギヤオーブン内で2分30秒間乾燥し、溶剤を揮発させた。このようにして、PETフィルム上に、厚さが40μmである樹脂フィルム(Bステージフィルム)が積層されている積層フィルム(PETフィルムと樹脂フィルムとの積層フィルム)を得た。 Preparation of resin film:
Using an applicator, apply the obtained resin material on the release-treated surface of a release-treated PET film (“XG284” manufactured by Toray Industries, Inc., thickness 25 μm), and then place in a gear oven at 100° C. for 2 minutes. Dry for 30 seconds to evaporate the solvent. Thus, a laminated film (laminated film of PET film and resin film) in which a resin film (B stage film) having a thickness of 40 μm was laminated on the PET film was obtained.
(1)硬化物の誘電正接(Df)
得られた樹脂フィルムを180℃で30分間加熱して仮硬化させた後、200℃で90分間加熱して、硬化物を得た。得られた硬化物を幅2mm、長さ80mmの大きさに裁断して10枚を重ね合わせて、関東電子応用開発社製「空洞共振摂動法誘電率測定装置CP521」及びキーサイトテクノロジー社製「ネットワークアナライザーN5224A PNA」を用いて、空洞共振法で常温(23℃)及び周波数5.8GHzにて誘電正接を測定した。 [evaluation]
(1) Dielectric loss tangent (Df) of cured product
The resulting resin film was heated at 180° C. for 30 minutes for temporary curing, and then heated at 200° C. for 90 minutes to obtain a cured product. The resulting cured product was cut into a size of 2 mm in width and 80 mm in length, and 10 sheets were superimposed and measured by Kanto Denshi Applied Development Co., Ltd.'s "Cavity Resonance Perturbation Method Dielectric Constant Measurement Device CP521" and Keysight Technologies, Inc.'s " Using a network analyzer N5224A PNA, the dielectric loss tangent was measured at room temperature (23° C.) and a frequency of 5.8 GHz by the cavity resonance method.
○〇○:誘電正接が2.8×10-3未満
○〇:誘電正接が2.8×10-3以上2.9×10-3未満
〇:誘電正接が2.9×10-3以上3.0×10-3未満
×:誘電正接が3.0×10-3以上 [Criteria for Dielectric Loss Tangent (Df) of Cured Material]
○○○: Dielectric loss tangent is less than 2.8×10 -3 ○○: Dielectric loss tangent is 2.8×10 -3 or more and less than 2.9×10 -3 〇: Dielectric loss tangent is 2.9×10 -3 or more Less than 3.0×10 −3 ×: Dielectric loss tangent is 3.0×10 −3 or more
ラミネート・半硬化処理:
CCL基板(日立化成工業社製「E-679FGR」)を、銅表面粗化剤(メック社製「メックエッチボンド CZ-8201」)に浸漬し、銅表面が粗化処理された100mm角のCCL基板を得た。真空加圧式ラミネーター機(名機製作所社製「MVLP-500」)を用いて、粗化処理されたCCL基板に、得られた積層フィルムをラミネート圧0.7MPa及びラミネート温度100℃で20秒間ラミネートし、更にプレス圧力1.0MPa及びプレス温度100℃で40秒間プレスした。積層フィルムのPETフィルムを剥がした後、100℃で30分間、次いで、180℃で30分間加熱し、樹脂フィルムを半硬化させた。このようにして、CCL基板の両面に樹脂フィルムの半硬化物が積層されている積層体Aを得た。 (2) Desmear property (removability of residue on bottom of via)
Lamination/semi-curing treatment:
A CCL substrate (“E-679FGR” manufactured by Hitachi Chemical Co., Ltd.) was immersed in a copper surface roughening agent (“Mec Etch Bond CZ-8201” manufactured by MEC Co., Ltd.) to form a 100 mm square CCL with a roughened copper surface. got the substrate. Using a vacuum pressurized laminator ("MVLP-500" manufactured by Meiki Seisakusho Co., Ltd.), the resulting laminated film was laminated on a roughened CCL substrate at a lamination pressure of 0.7 MPa and a lamination temperature of 100° C. for 20 seconds. and further pressed at a press pressure of 1.0 MPa and a press temperature of 100° C. for 40 seconds. After peeling off the PET film of the laminated film, the resin film was semi-cured by heating at 100° C. for 30 minutes and then at 180° C. for 30 minutes. Thus, a laminate A was obtained in which semi-cured resin films were laminated on both sides of the CCL substrate.
得られた積層体Aの樹脂フィルムの半硬化物に、CO2レーザー(日立ビアメカニクス社製)を用いて、上端での直径が65μm、下端(底部)での直径が45μmであるビア(貫通孔)を形成した。このようにして、CCL基板に樹脂フィルムの半硬化物が積層されており、かつ樹脂フィルムの半硬化物にビア(貫通孔)が形成されている積層体Bを得た。 Via (through hole) formation:
A CO 2 laser (manufactured by Hitachi Via Mechanics Co., Ltd.) was applied to the semi-cured product of the resin film of the obtained laminate A, and a via (through hole) having a diameter of 65 μm at the upper end and a diameter of 45 μm at the lower end (bottom) holes) were formed. Thus, a laminate B was obtained in which the semi-cured resin film was laminated on the CCL substrate and vias (through holes) were formed in the semi-cured resin film.
(a)膨潤処理
60℃の膨潤液(アトテックジャパン社製「スウェリングディップセキュリガントP」)に、得られた積層体Bを入れて、10分間揺動させた。その後、純水で洗浄した。 Via bottom residue removal process:
(a) Swelling Treatment The obtained laminate B was placed in a swelling liquid (“Swelling Dip Securigant P” manufactured by Atotech Japan) at 60° C. and shaken for 10 minutes. After that, it was washed with pure water.
80℃の過マンガン酸カリウム(アトテックジャパン社製「コンセントレートコンパクトCP」)粗化水溶液に、膨潤処理後の積層体Bを入れて、30分間揺動させた。次に、25℃の洗浄液(アトテックジャパン社製「リダクションセキュリガントP」)を用いて2分間処理した後、純水で洗浄を行い、評価サンプルを得た。 (b) Permanganate treatment (roughening treatment and desmear treatment)
Laminate B after the swelling treatment was placed in a roughening aqueous solution of potassium permanganate (“Concentrate Compact CP” manufactured by Atotech Japan Co., Ltd.) at 80° C. and shaken for 30 minutes. Next, after being treated for 2 minutes using a cleaning solution ("Reduction Securigant P" manufactured by Atotech Japan Co., Ltd.) at 25°C, it was cleaned with pure water to obtain an evaluation sample.
○○:最大スミア長が1μm未満
○:最大スミア長が1μm以上2μm未満
△:最大スミア長が2μm以上3μm未満
×:最大スミア長が3μm以上 [Desmear property (removability of residue on via bottom) criteria]
○○: Maximum smear length less than 1 μm ○: Maximum smear length 1 μm or more and less than 2 μm △: Maximum smear length 2 μm or more and less than 3 μm ×: Maximum smear length 3 μm or more
無電解めっき処理:
「(2)デスミア性(ビア底の残渣の除去性)」の評価で得られた評価サンプルの粗化処理された硬化物の表面を、60℃のアルカリクリーナ(アトテックジャパン社製「クリーナーセキュリガント902」)で5分間処理し、脱脂洗浄した。洗浄後、上記硬化物を25℃のプリディップ液(アトテックジャパン社製「プリディップネオガントB」)で2分間処理した。その後、上記硬化物を40℃のアクチベーター液(アトテックジャパン社製「アクチベーターネオガント834」)で5分間処理し、パラジウム触媒を付けた。次に、30℃の還元液(アトテックジャパン社製「リデューサーネオガントWA」)により、硬化物を5分間処理した。 (3) Plating peel strength Electroless plating treatment:
The surface of the roughened cured product of the evaluation sample obtained in the evaluation of “(2) desmear property (removability of residue at bottom of via)” was washed with an alkaline cleaner (“Cleaner Securigant” manufactured by Atotech Japan Co., Ltd.) at 60 ° C. 902") for 5 minutes and degreased. After washing, the cured product was treated with a pre-dip liquid ("Pre-dip Neogant B" manufactured by Atotech Japan Co., Ltd.) at 25°C for 2 minutes. Thereafter, the cured product was treated with an activator liquid (“Activator Neogant 834” manufactured by Atotech Japan Co., Ltd.) at 40° C. for 5 minutes to attach a palladium catalyst. Next, the cured product was treated with a reducing liquid (“Reducer Neogant WA” manufactured by Atotech Japan Co., Ltd.) at 30° C. for 5 minutes.
次に、無電解めっき処理された硬化物に、電解めっきをめっき厚さが25μmとなるまで実施した。電解銅めっきとして硫酸銅溶液(和光純薬工業社製「硫酸銅五水和物」、和光純薬工業社製「硫酸」、アトテックジャパン社製「ベーシックレベラーカパラシド HL」、アトテックジャパン社製「補正剤カパラシド GS」)を用いて、0.6A/cm2の電流を流し、めっき厚さが25μm程度となるまで電解めっきを実施した。銅めっき処理後、硬化物を200℃で60分間加熱し、硬化物を更に硬化させた。このようにして、銅めっき層が上面に積層された硬化物を得た。 Electroplating treatment:
Next, the electroless-plated cured product was electroplated until the plating thickness reached 25 μm. As electrolytic copper plating, copper sulfate solution (“Copper sulfate pentahydrate” manufactured by Wako Pure Chemical Industries, “Sulfuric acid” manufactured by Wako Pure Chemical Industries, Ltd. “Basic Leveler Cupalaside HL” manufactured by Atotech Japan, “ Electrolytic plating was carried out until the thickness of the plating reached about 25 μm by applying a current of 0.6 A/cm 2 using a correction agent "Capalacid GS"). After the copper plating treatment, the cured product was heated at 200° C. for 60 minutes to further cure the cured product. Thus, a cured product having a copper plating layer laminated on the upper surface was obtained.
得られた銅めっき層が上面に積層された硬化物の銅めっき層の表面に10mm幅の短冊状の切込みを、5mm間隔で合計6箇所入れた。90°剥離試験機(テスター産業社製「TE-3001」)に銅めっき層が上面に積層された硬化物をセットし、つかみ具で切込みの入った銅めっき層の端部をつまみあげ、ビアが形成された箇所を避けて銅めっき層を20mm剥離して剥離強度(メッキピール強度)を測定した。6箇所の切り込み箇所に対してそれぞれ剥離強度(メッキピール強度)を測定し、メッキピール強度の平均値を求めた。メッキピール強度を下記の基準で判定した。 Plating peel strength measurement:
In the surface of the copper plating layer of the hardened product on which the obtained copper plating layer was laminated, 10 mm-wide strip-shaped cuts were made at 5 mm intervals at a total of 6 locations. Set the hardened product with the copper plating layer laminated on the upper surface in a 90° peel tester ("TE-3001" manufactured by Tester Sangyo Co., Ltd.), pick up the edge of the notched copper plating layer with a gripper, and make a via The peel strength (plating peel strength) was measured by peeling the copper plating layer by 20 mm while avoiding the portion where was formed. The peel strength (plating peel strength) was measured for each of the six notch points, and the average value of the plating peel strength was obtained. Plating peel strength was determined according to the following criteria.
○○:メッキピール強度の平均値が0.50kgf/cm以上
○:メッキピール強度の平均値が0.45kgf/cm以上0.50kgf/cm未満
△:メッキピール強度の平均値が0.40kgf/cm以上0.45kgf/cm未満
×:メッキピール強度の平均値が0.40kgf/cm未満 [Criteria for plating peel strength]
○○: The average value of plating peel strength is 0.50 kgf/cm or more ○: The average value of plating peel strength is 0.45 kgf/cm or more and less than 0.50 kgf/cm △: The average value of plating peel strength is 0.40 kgf/cm cm or more and less than 0.45 kgf/cm ×: Average value of plating peel strength is less than 0.40 kgf/cm
「(2)デスミア性(ビア底の残渣の除去性)」の評価で得られた積層体Aに対して、「(2)デスミア性(ビア底の残渣の除去性)」の評価に記載の方法と同様にして、(a)膨潤処理及び(b)過マンガン酸塩処理を行った。次いで、200℃で60分間加熱し、積層体Cを得た。得られた積層体Cに対して、真空加圧式ラミネーター機(名機製作所社製「MVLP-500」)を用いて、得られた積層フィルムをラミネート圧0.7MPa及びラミネート温度100℃で20秒間ラミネートし、更にプレス圧力1.0MPa及びプレス温度100℃で40秒間プレスした。積層フィルムのPETフィルムを剥がした後、100℃で30分間、次いで、180℃で30分間加熱し、樹脂フィルムを半硬化させた。次いで、「(2)デスミア性(ビア底の残渣の除去性)」の評価に記載の方法と同様にして、(a)膨潤処理及び(b)過マンガン酸塩処理を行った。次いで、200℃で60分間加熱し、CCL基板の両面に2層の樹脂フィルムの硬化物層が積層されている積層体Dを得た。同様の処理を繰り返し行うことで、CCL基板の両面に8層の樹脂フィルムの硬化物層が積層されている積層体Eを得た。 (4) Chipping in the cured product layer at the edge of the substrate “(2) Desmear property (removability of residue at via bottom)” (a) swelling treatment and (b) permanganate treatment. Then, it was heated at 200° C. for 60 minutes to obtain a laminate C. Using a vacuum pressure laminator ("MVLP-500" manufactured by Meiki Seisakusho Co., Ltd.), the obtained laminated film was laminated to the obtained laminate C at a lamination pressure of 0.7 MPa and a lamination temperature of 100 ° C. for 20 seconds. It was laminated and further pressed at a press pressure of 1.0 MPa and a press temperature of 100° C. for 40 seconds. After peeling off the PET film of the laminated film, the resin film was semi-cured by heating at 100° C. for 30 minutes and then at 180° C. for 30 minutes. Then, (a) swelling treatment and (b) permanganate treatment were performed in the same manner as in the evaluation of “(2) desmear property (removability of residue on via bottom)”. Then, it was heated at 200° C. for 60 minutes to obtain a laminate D in which two cured resin film layers were laminated on both sides of the CCL substrate. By repeating the same treatment, a laminate E was obtained in which 8 cured resin film layers were laminated on both sides of the CCL substrate.
○○:20回の落下で、基板端部の硬化物層において欠けが発生しない
○:11回以上19回以下の落下で、基板端部の硬化物層において欠けが発生する
△:6回以上10回以下の落下で、基板端部の硬化物層において欠けが発生する
×:1回以上5回以下の落下で、基板端部の硬化物層において欠けが発生する [Determination Criteria for Chipping in Cured Material Layer at Edge of Substrate]
○○: No chipping occurs in the cured product layer at the edge of the substrate after 20 drops ○: Chipping occurs in the cured product layer at the edge of the substrate after dropping 11 times or more and 19 times or less △: 6 times or more Cracking occurs in the cured product layer at the edge of the substrate when dropped 10 times or less. ×: Chipping occurs in the cured product layer at the edge of the substrate when dropped 1 to 5 times.
12…回路基板
12a…上面
13~16…絶縁層
17…金属層 DESCRIPTION OF
Claims (9)
- エポキシ化合物と、フィラーと、硬化剤とを含み、
前記フィラーの平均粒子径が2.0μm以下であり、
前記硬化剤が、カーボネート構造を有しかつエポキシ基と反応可能な官能基を有する第1の硬化剤を含む、樹脂材料。 including an epoxy compound, a filler, and a curing agent;
The average particle size of the filler is 2.0 μm or less,
The resin material, wherein the curing agent includes a first curing agent having a carbonate structure and a functional group capable of reacting with an epoxy group. - 樹脂材料中の溶剤を除く成分100重量%中、前記フィラーの含有量が50重量%以上90重量%以下である、請求項1に記載の樹脂材料。 The resin material according to claim 1, wherein the content of the filler is 50% by weight or more and 90% by weight or less in 100% by weight of the components excluding the solvent in the resin material.
- 前記第1の硬化剤の分子量が20000以下である、請求項1又は2に記載の樹脂材料。 The resin material according to claim 1 or 2, wherein the first curing agent has a molecular weight of 20,000 or less.
- 前記硬化剤が、カーボネート構造を有さない第2の硬化剤を含む、請求項1~3のいずれか1項に記載の樹脂材料。 The resin material according to any one of claims 1 to 3, wherein the curing agent includes a second curing agent that does not have a carbonate structure.
- 前記第2の硬化剤が、活性エステル化合物を含む、請求項4に記載の樹脂材料。 The resin material according to claim 4, wherein the second curing agent contains an active ester compound.
- ポリイミド樹脂を含む、請求項1~5のいずれか1項に記載の樹脂材料。 The resin material according to any one of claims 1 to 5, which contains a polyimide resin.
- 樹脂フィルムである、請求項1~6のいずれか1項に記載の樹脂材料。 The resin material according to any one of claims 1 to 6, which is a resin film.
- 多層プリント配線板において、絶縁層を形成するために用いられる、請求項1~7のいずれか1項に記載の樹脂材料。 The resin material according to any one of claims 1 to 7, which is used for forming an insulating layer in a multilayer printed wiring board.
- 回路基板と、
前記回路基板の表面上に配置された複数の絶縁層と、
複数の前記絶縁層間に配置された金属層とを備え、
複数の前記絶縁層の内の少なくとも1層が、請求項1~8のいずれか1項に記載の樹脂材料の硬化物である、多層プリント配線板。 a circuit board;
a plurality of insulating layers disposed on the surface of the circuit board;
A metal layer disposed between the plurality of insulating layers,
A multilayer printed wiring board, wherein at least one of the plurality of insulating layers is a cured product of the resin material according to any one of claims 1 to 8.
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JP2022538329A JPWO2022234823A1 (en) | 2021-05-07 | 2022-04-28 | |
KR1020237027212A KR20240004223A (en) | 2021-05-07 | 2022-04-28 | Resin materials and multilayer printed wiring boards |
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JPH11503792A (en) * | 1995-02-07 | 1999-03-30 | ビーエーエスエフ、コーポレーション | Cathodic electrodeposition using cyclic carbonate curable coating composition |
WO2018105282A1 (en) * | 2016-12-09 | 2018-06-14 | 三菱瓦斯化学株式会社 | Gas barrier film |
JP2019089965A (en) * | 2017-11-16 | 2019-06-13 | 群栄化学工業株式会社 | Phenol carbonate resin, method for producing the same, resin varnish, and method for producing laminated plate |
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JP2007284555A (en) | 2006-04-17 | 2007-11-01 | Hitachi Chem Co Ltd | Resin composition and coating film-forming material comprising the same |
JP7066975B2 (en) | 2017-03-10 | 2022-05-16 | 味の素株式会社 | Resin composition, resin sheet, circuit board and semiconductor chip package |
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- 2022-04-28 CN CN202280032844.7A patent/CN117255820A/en active Pending
- 2022-04-28 JP JP2022538329A patent/JPWO2022234823A1/ja active Pending
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11503792A (en) * | 1995-02-07 | 1999-03-30 | ビーエーエスエフ、コーポレーション | Cathodic electrodeposition using cyclic carbonate curable coating composition |
WO2018105282A1 (en) * | 2016-12-09 | 2018-06-14 | 三菱瓦斯化学株式会社 | Gas barrier film |
JP2019089965A (en) * | 2017-11-16 | 2019-06-13 | 群栄化学工業株式会社 | Phenol carbonate resin, method for producing the same, resin varnish, and method for producing laminated plate |
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KR20240004223A (en) | 2024-01-11 |
CN117255820A (en) | 2023-12-19 |
JPWO2022234823A1 (en) | 2022-11-10 |
TW202311340A (en) | 2023-03-16 |
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