WO2022201658A1 - 光学検査装置及び光学検査方法 - Google Patents
光学検査装置及び光学検査方法 Download PDFInfo
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- WO2022201658A1 WO2022201658A1 PCT/JP2021/045161 JP2021045161W WO2022201658A1 WO 2022201658 A1 WO2022201658 A1 WO 2022201658A1 JP 2021045161 W JP2021045161 W JP 2021045161W WO 2022201658 A1 WO2022201658 A1 WO 2022201658A1
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Definitions
- the present invention relates to an optical inspection apparatus and method for optically inspecting samples, and more particularly to an optical inspection apparatus and method suitable for inspecting a large amount of microscopic samples such as microplastics.
- microplastics plastics with a size of 5 mm or less, known as microplastics, have a negative impact on river and ocean ecosystems, and may affect human health through the food chain. . For this reason, large-scale distribution surveys of microplastics and research aimed at identifying their sources are being actively carried out in various parts of the world.
- FTIR Fourier Transform Infrared Spectroscopy
- infrared microscopes using FTIR are widely used for component analysis of microplastics.
- the present invention was made to solve these problems, and its main purpose is to provide an optical inspection device and an optical inspection method that can easily perform high-precision inspection of microplastics and the like.
- optical inspection apparatus for optically inspecting an object, an urging unit that applies a force to a group of objects on a stage to move the group of objects with respect to the stage; a capture unit having an attachment unit to which each object in the object group that has moved from the stage is attached; an analysis unit that optically analyzes the object captured by the capture unit; Prepare.
- an optical inspection apparatus for optically inspecting an object, an urging unit that applies a force to a group of objects on a stage to move the group of objects with respect to the stage; a capture unit that independently captures each object in the object group that has moved from the stage; an analysis unit that optically analyzes the object captured by the capture unit; Prepare.
- one aspect of the optical inspection method according to the present invention is an optical inspection method for optically inspecting an object, A force is applied to a group of objects on a stage to move the group of objects with respect to the stage, and each object in the group of objects moved from the stage is attached to an attachment section provided in a capture section. a sample preparation step of capturing by attaching; an analysis step of optically analyzing the object captured by the capture unit; have
- the group of objects placed on the stage is moved from the stage by the force applied by the urging section.
- Objects may overlap on the stage, but are dispersed apart from each other by the complete or some degree of freedom of movement of each object.
- the objects in the moved object group the objects that come into contact with the attachment portion of the capturing portion are attached to the attachment portion. Since a new object does not adhere to a portion of the adhering portion to which another object has already adhered, overlapping of a plurality of objects is unlikely to occur in the catching portion. That is, in the capture section, the plurality of objects are separated from each other so that they can be individually optically analyzed.
- a sample in which microscopic objects such as microplastics are appropriately dispersed in a sample such as water and whose positions are fixed can be processed manually, requiring labor and time.
- a sample such as water and whose positions are fixed
- optical analysis of individual microplastics, for example, can be carried out efficiently and well. It is also advantageous for automating a series of steps from sample preparation to analysis.
- FIG. 1 is a schematic block configuration diagram of an optical inspection apparatus that is an embodiment of the present invention
- FIG. 2A and 2B are a top view (A) and a front view (B) of a trapping mesh member used in the sample preparation device in the optical inspection device of the present embodiment
- FIG. 1A and 1B are schematic configuration diagrams of a sample preparation device in an optical inspection apparatus according to the present embodiment, in which (A) shows a state before a capturing operation, and (B) shows a state after a capturing operation;
- the schematic block diagram which shows the example of a changed completely type of sample preparation apparatus.
- FIG. 4 is a schematic configuration diagram of a sample preparation device according to another embodiment
- FIG. 4 is a schematic configuration diagram of a sample preparation device according to another embodiment
- the "object" in the optical inspection apparatus and method according to the present invention can be, for example, a minute solid matter that can be dispersed and floated in a liquid such as water.
- this object is a microplastic.
- optical analysis in the optical inspection apparatus and method according to the present invention includes, for example, spectrometry such as FTIR, component analysis using fluorescent X-ray analysis, normal microscope, phase contrast microscope, infrared microscope, etc. analysis of the shape, size, color, etc. of the object based on optical observation using various microscopes.
- spectrometry such as FTIR, component analysis using fluorescent X-ray analysis, normal microscope, phase contrast microscope, infrared microscope, etc. analysis of the shape, size, color, etc. of the object based on optical observation using various microscopes.
- the "stage" in the optical inspection apparatus and method according to the present invention is, for example, a plate-shaped member having many openings such as a mesh filter, and a material with high water permeability and water absorption such as filter paper.
- a plate-like member can be included.
- FIG. 1 is a schematic block diagram of the optical inspection apparatus of this embodiment.
- This optical inspection apparatus inspects microplastics mixed in liquids such as ocean water and river water, and includes a pretreatment device 1 , a sample preparation device 2 and an optical analysis device 3 .
- a cleaning process using an acid is performed in order to remove dirt on the surface of the microplastics dispersed in the sample 4 such as ocean water containing the microplastics.
- the microplastics are floated in the liquid by specific gravity separation using sodium iodide (NaI), and the liquid containing the collected microplastics is filtered through a metal mesh filter to collect the microplastics.
- NaI sodium iodide
- the number of microplastics is large, microplastics (slices) of various sizes and shapes collected on the metal mesh filter are in an overlapping state.
- the sample preparation device 2 receives the metal mesh filter 5 on which a large number of plastic sections (hereafter, a large number of sections are collectively referred to as a "section group") are placed.
- the size and shape of each slice in this group of slices varies.
- the sample preparation device 2 prepares a sample in which the slices are separated from each other, appropriately dispersed and fixed. The configuration and operation of the device for that purpose will be described later in detail.
- the optical analyzer 3 receives the sample 6 in which the sections are appropriately dispersed and fixed, and analyzes the components contained in each section to identify the type of plastic in the section. In parallel, information such as the size, shape, and color of each section is collected.
- the optical analysis device 3 is a device combining FTIR and a microscopic observation device.
- FIG. 2 is a top view (A) and a front view (B) of a trapping mesh member.
- the sample preparation device 2 includes an air blower 20 that generates an upward airflow.
- the configuration of the air blowing unit 20 is not particularly limited, and for example, one that generates an airflow using a rotating wing body such as a fan or a blower, or one that generates an airflow using a compressed air source is used. be able to.
- the blower unit 20 it is desirable that the blower unit 20 be capable of adjusting the flow rate of the air flow and the duration of the blow. As a result, it is possible to appropriately adjust the air volume and the like according to the size and weight of the slice, which is the target object, and to adjust the speed and spread of the slice as it rises.
- the air blower 20 may blow air intermittently.
- a cylindrical casing 21 whose upper surface is open and whose sides are surrounded is arranged above the blowing unit 20 so that the air sent from the blowing unit 20 travels upward without leaking to the sides. It is Inside the casing 21, a metal mesh filter 22 (5) having a group of pieces 23A placed on its upper surface is mounted substantially horizontally at a predetermined distance above the air blower 20. . Furthermore, above it, a trapping mesh member 24 is installed substantially horizontally at a predetermined distance from the metal mesh filter 22 .
- the trapping mesh member 24 has a body portion 240 having a predetermined opening (opening degree) similar to that of the metal mesh filter 22, and a plurality of adhesive portions 241 are attached to one surface of the body portion 240 according to a predetermined pattern. It was established.
- This adhesive part 241 is for fixing each section.
- the type and material of the member of the adhesive part 241 are not particularly limited, but it is desirable that they do not interfere with the component analysis by FTIR. It is better to use However, even if an organic adhesive is used, if the spectrum of the component contained in the adhesive is known, correction processing such as subtraction can be performed to obtain the A spectrum can be obtained with high accuracy. Therefore, if the adhesive portion 241 is not at least an adhesive made of the same material as plastic, there is substantially no problem.
- the shape of one adhesive portion 241 is substantially circular in top view, and the plurality of adhesive portions 241 are provided according to a pattern in which adjacent ones are arranged at substantially regular intervals.
- the shape of each adhesive portion 241 and the arrangement pattern of the plurality of adhesive portions 241 are not limited to this, but are preferably matched to the size and shape of the section to be captured.
- the degree of opening of the body portion 240 of the trapping mesh member 24 may be selected according to the size of the section to be trapped.
- a reference marker 242 is provided on the outer peripheral edge of the trapping mesh member 24 .
- the reference marker 242 indicates a reference position of the plurality of adhesive portions 241. Using this position as a reference, the plurality of adhesive portions 241 in one trapping mesh member 24 is given an identifier such as a serial number. be able to.
- each row of the adhesive portions 241 is arranged in order from the top to A, B, C, and so on. , and numbered 1, 2, 3, . . . from the left in each row. Accordingly, numbers A1, A2, A3, A4, A5, B1, B2, .
- the air blower 20 is operated in the state shown in FIG. 3(A) to form an upward air flow.
- the airflow escapes upward through the openings of the metal mesh filter 22 and the openings of the trapping mesh member 24 .
- the section group placed on the metal mesh filter 22 is stirred up by the air flow from below (that is, floats up).
- the slices included in the swirling slice group come into contact with the adhesive portion 241 on the lower surface of the trapping mesh member 24, the slices stick to the adhesive portion 241 (see FIG. 3(B)).
- a section does not stick to a location where the adhesive portion 241 does not exist, and another section does not stick to a location where a certain section sticks. Therefore, according to the arrangement pattern of the adhesive portion 241 , the segments are separated from each other and captured on one surface of the capturing mesh member 24 in an appropriately dispersed state.
- the air blowing unit 20 for example, by blowing air from the air blowing unit 20 for a predetermined period of time, when almost all of the sections on the metal mesh filter 22 are caught by the trapping mesh member 24, the air blowing is stopped.
- the trapping mesh member 24 is taken out.
- the trapping mesh member 24 can be appropriately replaced with an unused one to remove the metal mesh filter. Almost all segments 23A on 22 need to be captured. In this way, the trapping mesh member 24 with the pieces 23B attached to the adhesive portion 241 (the pieces attached to the trapping mesh member 24 are denoted by reference numeral 23B) is transferred to the optical analyzer 3 .
- FIG. 7 is a photograph showing an example of a state in which a plurality of sections are captured by the capturing mesh member.
- the sections are a section ⁇ p1 having a size of about 2 to 5 mm, a section ⁇ p2 having a size of about 1 to 2 mm, and a section ⁇ p3 having a size of about 0.5 mm.
- the body of the capture mesh member is 100 mesh (number of meshes between 25.4 mm).
- the diameter of the adhesive portion 241 is about 5 mm.
- each section is separated to the extent that it can be analyzed individually by FTIR.
- the accuracy of the analysis is improved if the sections are completely separated, at least qualitative analysis is possible even if the sections are not completely separated from each other, that is, partially overlapped. That is, here, each section included in the section group is captured by the capturing mesh member independently of each other.
- the trapping mesh member 24 (sample 6) to which a large number of sections are fixed is set as it is on the sample stage, and a microscopic observation image is acquired, and FTIR analysis is performed for each section. Run. If the trapping mesh member 24 is set so that the reference marker 242 comes to a predetermined position (direction) when setting the trapping mesh member 24, the position where the adhesive portion 241 is provided in the two-dimensional plane is known. Therefore, positioning for microscopic observation and FTIR analysis can be easily performed. That is, it is possible to perform rough positioning with the range in which the adhesive portion 241 exists as a target, recognize the position where the section actually exists within that range, and perform the FTIR analysis.
- each adhesive portion 241 is assigned an identification number, so information such as the area of the section obtained by microscopic observation, information such as the spectrum obtained by FTIR analysis, and plastic can be stored in association with the identification number.
- the section captured by the capturing mesh member 24 can be fixed semi-permanently, so that the sample can be easily transported and stored for a long period of time. Therefore, if the test results are questionable, the same sample can be retested or analyzed and measured using a different method, and more accurate and useful information can be obtained. .
- An operator may transport the sample among the pretreatment device 1, the sample preparation device 2, and the optical analysis device 3, and attach the sample to each device. may be automatically implemented using
- FIG. 4 is a schematic configuration diagram of a sample preparation device 2 in an optical inspection device that is another embodiment of the present invention. The same components as those of the sample preparation apparatus shown in FIG.
- a plurality of trapping mesh members with different openings are arranged at predetermined intervals in the height direction.
- the adhesive portions 24A1 and 24B1 shown in FIG. 4A are omitted.
- the opening of the lower trapping mesh member 24A is larger than the opening of the upper trapping mesh member 24B.
- the adhesive portion 24A1 of the lower trapping mesh member 24A is larger than the adhesive portion 24B1 of the upper trapping mesh member 24B. That is, the mesh member 24A for trapping on the lower side has a coarser mesh. Therefore, among the pieces that are blown up by the air flow, large pieces cannot pass through the openings of the lower trapping mesh member 24A, and most of them cannot pass through the openings of the trapping mesh member 24A. It sticks to the portion 24A1. On the other hand, small pieces that pass through the openings of the lower trapping mesh member 24A stick to the adhesive portion 24B1 provided on the upper trapping mesh member 24B.
- the air flow generated by the air blowing unit 20 gives the section group a force to make it soar. can do.
- FIG. 5 is a schematic configuration diagram of a sample generation device in another embodiment.
- the air inside the casing 21 is sucked up by the suction part 25 arranged further above the trapping mesh member 24, thereby generating an air flow from the bottom to the top.
- this also enables the same operation as the sample generating apparatus in the above embodiment.
- FIG. 6 is a schematic configuration diagram of a sample generation device in still another embodiment.
- force is applied to the groups of sections by an air flow to move them, but in this embodiment, force is applied to the groups of sections by electrostatic force, taking advantage of the fact that plastic is easily electrified. and move it.
- the charging unit 26 applies a biased voltage to the piece 23A on the metal mesh filter 22 to charge the piece 23A to a predetermined polarity.
- the induced electric field generator 27 attracts the segment group with a voltage having a polarity opposite to the polarity of the charge of the segment 23A.
- each segment 23A moves upward and sticks to the adhesive portion 241 of the trapping mesh member 24.
- the ease of electrification depends on the type of plastic, and the polarity of the charge also differs depending on the type of plastic. Therefore, in order to capture all types of plastic pieces, it is preferable to perform the capturing operation while changing the polarity and voltage value of the voltage generated by the charging section 26 and the induced electric field forming section 27 . In other words, the method may allow for the selective capture of certain types of plastic pieces. Therefore, sorting according to the type of plastic is possible.
- a mechanism is provided to apply an impact from below to the metal mesh filter 22 on which the slice group is placed or to vibrate the metal mesh filter 22, and the impact or vibration causes the slices on the metal mesh filter 22 to be flipped up. You may make it move upwards by making it soar.
- optical inspection apparatus of the above-described embodiment is intended to inspect microplastics
- the objects to be inspected are not limited to microplastics. can be used to inspect the optical inspection apparatus of the above-described embodiment
- optical analysis method is not limited to FTIR, but various optical analysis and observation methods including ordinary infrared spectroscopy, ultraviolet-visible spectroscopy, fluorescence spectroscopy, Raman spectroscopy, and fluorescent X-ray analysis. is clearly available.
- One aspect of the optical inspection apparatus is an optical inspection apparatus for optically inspecting an object, an urging unit that applies a force to a group of objects on a stage to move the inspection object with respect to the stage; a capture unit having an attachment unit to which each object in the object group that has moved from the stage is attached; an analysis unit that optically analyzes the object captured by the capture unit; Prepare.
- one aspect of the optical inspection method according to the present invention is an optical inspection method for optically inspecting an object, A force is applied to a group of objects on a stage to move the group of objects with respect to the stage, and each object in the group of objects moved from the stage is attached to an attachment section provided in a capture section. a sample preparation step of capturing by attaching; an analysis step of optically analyzing the object captured by the capture unit; have
- the capture section may be arranged above the stage in the vertical direction.
- the capture section may be arranged vertically above the stage.
- the stage is mesh-shaped, and the biasing section generates an air flow directed upward from below the stage in the vertical direction.
- An air flow generator may be included.
- the stages are all mesh-shaped, and in the sample preparation step, an air flow directed upward from below the stage in the vertical direction can be caused to move the object group from the stage upward.
- the airflow may be sent out from a blowing section arranged below the stage, or the air may be sucked by a suction section arranged above the trapping section. flow may be formed.
- the object is relatively lightweight, such as microplastics, it can be inspected regardless of the physical characteristics of the object. Objects can also be scattered and risen. Thereby, the object can be more reliably captured by the capturing unit. Also, the device can be constructed at a relatively low cost.
- a plurality of the adhering portions may be provided in the capturing portion according to a predetermined pattern.
- a plurality of the attachment portions may be provided on the capture portion according to a predetermined pattern.
- the attachment section is provided at a predetermined position of the capture section. As a result, it becomes easier to grasp the position where the object exists on the capturing section, so traceability is improved, for example, when another analysis is performed after the optical analysis in the analyzing section.
- the capture section is provided with a reference marker that indicates a reference position of the plurality of attachment sections.
- the capturing portion is provided with a reference marker indicating a reference position of the plurality of attachment portions. can be assumed to exist.
- identifiers such as serial numbers can be assigned to the plurality of attached portions on the capturing portion with reference to the position of the reference marker. It is possible to manage the analysis results of each section in association with the identifier.
- the position of the reference marker can be used to position the capturing part during analysis in the analysis part.
- the capturing unit includes first and A second mesh-like member may be provided, the first and second mesh-like members having different opening sizes.
- the capture unit is arranged above the stage in the vertical direction and separated in the height direction. and a second mesh-like member, the first and second mesh-like members having different opening sizes.
- the mesh-like member with a large aperture size is arranged relatively downward, that is, at a position closer to the stage.
- the object is classified into a plurality of types according to its size and shape, and in the classified state, the It is trapped in the first or second mesh-like member.
- a sample containing the object group is subjected to cleaning treatment of the object group, and contamination with the object group.
- a pretreatment unit that performs at least one of a separation treatment and a separation treatment, and the stage may be a mesh filter that filters a treatment liquid containing the treated sample.
- the sample containing the object group is cleaned prior to the sample preparation step.
- a pretreatment step of performing at least one of the treatment and the separation treatment of the object group and the contaminants is performed, and the stage is a mesh filter for filtering the treated liquid containing the sample after the treatment. be able to.
- an object group whose purity has been enhanced can be subjected to analysis. Accurate information about each object can thereby be obtained. In addition, since it is possible to avoid analyzing unnecessary contaminants, for example, it is possible to improve the efficiency of inspection of the object.
- the optical inspection method according to the present invention can inspect various inspection objects, and is particularly useful for inspection of microplastics.
- the inspection object may be microplastic.
- the analysis unit may be a Fourier transform infrared spectrophotometer.
- the analysis step may perform Fourier transform infrared spectroscopic analysis.
- microplastics contained in ocean water, river water, etc. are efficiently inspected, and their distribution status and their sources are investigated. can provide useful information to identify
- An optical inspection apparatus is an optical inspection apparatus for optically inspecting an object, an urging unit that applies a force to a group of objects on a stage to move the group of objects with respect to the stage; a capture unit that independently captures each object in the object group that has moved from the stage; an analysis unit that optically analyzes the object captured by the capture unit; Prepare.
- the state in which "each object is captured independently of each other” here means a state in which at least each object can be individually optically analyzed. Therefore, for example, when irradiating an object with light and measuring transmitted light and reflected light, the optical path of the irradiated light and the transmitted light (reflected light) is determined so that one object is not affected by other objects. As long as is ensured, it does not matter if a part of the plurality of objects overlaps. Of course, the objects included in the object group may be captured without overlapping or contacting each other. According to the optical inspection device described in item 18, it is clear that the same effects as those of the optical inspection device described in item 1 can be obtained.
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Abstract
Description
ステージ上にある対象物群に対し、該対象物群を前記ステージに対して移動させる力を与える付勢部と、
前記ステージから移動した前記対象物群中の各対象物が付着する付着部を有する捕捉部と、
前記捕捉部に捕捉された前記対象物を光学的に分析する分析部と、
を備える。
ステージ上にある対象物群に対し、該対象物群を前記ステージに対して移動させる力を与える付勢部と、
前記ステージから移動した前記対象物群中の各対象物を互いに独立して捕捉する捕捉部と、
前記捕捉部に捕捉された前記対象物を光学的に分析する分析部と、
を備える。
ステージ上にある対象物群に対し、該対象物群を前記ステージに対して移動させる力を与えるとともに、前記ステージから移動した前記対象物群中の各対象物を捕捉部に設けた付着部に付着させることで捕捉する試料作成ステップと、
前記捕捉部に捕捉された前記対象物を光学的に分析する分析ステップと、
を有する。
図1は、本実施形態の光学検査装置の概略ブロック構成図である。この光学検査装置は、海洋水、河川水などの液体中に混入しているマイクロプラスチックの検査を行うものであり、前処理装置1、試料作成装置2、及び光学分析装置3、を備える。
上述した例示的な実施形態は、以下の態様の具体例であることが当業者により理解される。
ステージ上にある対象物群に対し、該検査対象物を前記ステージに対して移動させる力を与える付勢部と、
前記ステージから移動した前記対象物群中の各対象物が付着する付着部を有する捕捉部と、
前記捕捉部に捕捉された前記対象物を光学的に分析する分析部と、
を備える。
ステージ上にある対象物群に対し、該対象物群を前記ステージに対して移動させる力を与えるとともに、前記ステージから移動した前記対象物群中の各対象物を捕捉部に設けた付着部に付着させることで捕捉する試料作成ステップと、
前記捕捉部に捕捉された前記対象物を光学的に分析する分析ステップと、
を有する。
ステージ上にある対象物群に対し、該対象物群を前記ステージに対して移動させる力を与える付勢部と、
前記ステージから移動した前記対象物群中の各対象物を互いに独立して捕捉する捕捉部と、
前記捕捉部に捕捉された前記対象物を光学的に分析する分析部と、
を備える。
2…試料作成装置
20…送風部
21…ケーシング
22…金属メッシュフィルター
23A、23B…マイクロプラスチック
24(5)…捕捉用メッシュ部材
240…本体部
241、24A1、24B1…粘着部
242…基準マーカー
25…吸引部
26…帯電部
27…誘引電場形成部
3…光学分析装置
Claims (18)
- 対象物を光学的に検査する光学検査装置であって、
ステージ上にある対象物群に対し、該対象物群を前記ステージに対して移動させる力を与える付勢部と、
前記ステージから移動した前記対象物群中の各対象物が付着する付着部を有する捕捉部と、
前記捕捉部に捕捉された前記対象物を光学的に分析する分析部と、
を備える光学検査装置。 - 前記捕捉部は、前記ステージに対して鉛直方向において上方に配置されている、請求項1に記載の光学検査装置。
- 前記ステージはメッシュ状であり、前記付勢部は、鉛直方向において前記ステージの下方から上方に向かう空気流を生起させる気流生起部を含む、請求項1に記載の光学検査装置。
- 前記付着部は、所定のパターンに従って前記捕捉部に複数設けられている、請求項1に記載の光学検査装置。
- 前記捕捉部に複数の前記付着部の基準となる位置を示す基準マーカーが設けられている、請求項1に記載の光学検査装置。
- 前記捕捉部は、鉛直方向において前記ステージの上方に高さ方向に離して配置された第1及び第2のメッシュ状部材を有し、
前記第1及び第2のメッシュ状部材は互いに異なる開口サイズを有する、請求項1に記載の光学検査装置。 - 前記対象物群を含むサンプルに対し、前記対象物群の洗浄処理と、前記対象物群と夾雑物との分離処理との少なくとも一方の処理を実施する前処理部、をさらに備え、
前記ステージは、前記処理後のサンプルを含む処理液を濾過するメッシュ状のフィルターである、請求項1に記載の光学検査装置。 - 前記分析部はフーリエ変換赤外分光光度計である、請求項1に記載の光学検査装置。
- 対象物を光学的に検査する光学検査方法であって、
ステージ上にある対象物群に対し、該対象物群を前記ステージに対して移動させる力を与えるとともに、前記ステージから移動した前記対象物群中の各対象物を捕捉部に設けた付着部に付着させることで捕捉する試料作成ステップと、
前記捕捉部に捕捉された前記対象物を光学的に分析する分析ステップと、
を有する光学検査方法。 - 前記捕捉部は、前記ステージに対して鉛直方向において上方に配置されている、請求項9に記載の光学検査方法。
- 前記ステージはメッシュ状であり、前記試料作成ステップでは、鉛直方向において前記ステージの下方から上方に向かう空気流を生起させることで、前記対象物群を前記ステージからその上方に移動させる、請求項9に記載の光学検査方法。
- 前記付着部は、所定のパターンに従って前記捕捉部に複数設けられている、請求項9に記載の光学検査方法。
- 前記捕捉部に複数の前記付着部の基準となる位置を示す基準マーカーが設けられている、請求項9に記載の光学検査方法。
- 前記捕捉部は、鉛直方向において前記ステージの上方に高さ方向に離して配置された第1及び第2のメッシュ部材を有し、前記第1及び第2のメッシュ部材は互いに異なる開口サイズを有する、請求項9に記載の光学検査方法。
- 前記試料作成ステップに先立って、前記対象物群を含むサンプルに対し、前記対象物群の洗浄処理と、前記対象物群と夾雑物との分離処理との少なくとも一方の処理を行う前処理ステップを実施し、前記処理後のサンプルを含む処理液を濾過するメッシュ状のフィルターを前記ステージとする、請求項9に記載の光学検査方法。
- 前記対象物はマイクロプラスチックである、請求項9に記載の光学検査方法。
- 前記分析ステップではフーリエ変換赤外分光分析を行う、請求項9に記載の光学検査方法。
- 対象物を光学的に検査する光学検査装置であって、
ステージ上にある対象物群に対し、該対象物群を前記ステージに対して移動させる力を与える付勢部と、
前記ステージから移動した前記対象物群中の各対象物を互いに独立して捕捉する捕捉部と、
前記捕捉部に捕捉された前記対象物を光学的に分析する分析部と、
を備える光学検査装置。
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