WO2022190840A1 - Capteur stratiforme et son procédé de fabrication - Google Patents

Capteur stratiforme et son procédé de fabrication Download PDF

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Publication number
WO2022190840A1
WO2022190840A1 PCT/JP2022/006994 JP2022006994W WO2022190840A1 WO 2022190840 A1 WO2022190840 A1 WO 2022190840A1 JP 2022006994 W JP2022006994 W JP 2022006994W WO 2022190840 A1 WO2022190840 A1 WO 2022190840A1
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WO
WIPO (PCT)
Prior art keywords
sensor
sheet
resistor
base material
resistors
Prior art date
Application number
PCT/JP2022/006994
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English (en)
Japanese (ja)
Inventor
雅博 菊池
Original Assignee
凸版印刷株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority claimed from JP2021109191A external-priority patent/JP2022140219A/ja
Application filed by 凸版印刷株式会社 filed Critical 凸版印刷株式会社
Publication of WO2022190840A1 publication Critical patent/WO2022190840A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
    • G01L5/1623—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of pressure sensitive conductors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/165—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in capacitance

Definitions

  • the present disclosure relates to sheet sensors.
  • the sense of touch is an organ that detects vibration, stress, pressure, and temperature singly or in combination. Techniques for sensing vibration, stress, pressure, and temperature by simulating the sense of touch are known. A technique for measuring these is known.
  • a tactile sensor using such a method there is known a resistor sensor that detects a load from a change in the value of a resistor caused by an external stimulus.
  • the variable resistance sensor has a simple structure and can be manufactured by printing, so it is low cost and has many applications as a tactile sensor.
  • a resistance value change type sensor element detects a load in one axial direction (for example, the vertical Z-axis) of the sensor medium as a change in resistance value.
  • sensor elements for Z-axis detection are arranged in a matrix, and the shear load detected from each of the adjacent sensor elements changes over time. Detects directional shear motion.
  • a three-dimensional structure for detecting a shear load parallel to the XY plane is configured to realize a shear load sensor (for example, Patent Document 1).
  • the wiring from the sensor elements and the control system become complicated as the number of elements increases. made it difficult. Further, in the method of Patent Document 1, since the detection element has a complicated structure, it is difficult to construct a large-area sheet-like sensor that detects changes in shear load on the XY plane. In view of these problems, the present disclosure provides a sheet-like sensor that can be manufactured by printing at a low cost and that can have a large area.
  • a sheet-shaped sensor includes two or more sensor elements arranged between a pair of opposing sheet-shaped substrates, and the sensor element is one of the pair of substrates.
  • a sheet-like first resistor formed on one of the substrates and a sheet-like second resistor formed on the other substrate are arranged to face each other, and the first resistor and the second The resistor is in contact with the first resistor in a state in which the second resistor can be relatively displaced, and further connects between the pair of base materials to provide the sensor element with respect to the first resistor
  • the gist of the invention is that it has a joint for positioning the second resistor.
  • a sheet sensor which is another aspect of the present disclosure, includes a pair of base materials whose surfaces other than the main surface are covered with an exterior part, a sensor element disposed between the main surfaces of the pair of base materials, a hole provided to communicate with the base material from the surface of the exterior part of each of the pair of base materials, and the hole provided in one base material of the pair of base materials is provided in the pair of base materials.
  • the gist is that it is provided at a position that does not overlap the outer shape of the hole provided in the other base material in a plan view.
  • a plurality of sheet-shaped first resistors are formed by pattern-printing resistors on a sheet-shaped first base material, and a plurality of sheet-shaped second resistors are formed.
  • a plurality of joints are formed so as to surround the outer periphery of the region where one or more first resistors or one or more second resistors are formed, and each first A second base material is superimposed on the first base material so that the resistor and the second resistor face each other, and the joint portion is connected to the other of the first base material and the second base material.
  • the gist of the invention is to adhere to a material to connect a first substrate and a second substrate.
  • aspects of the present disclosure provide a large-area sheet-like sensor in which a plurality of sensor elements are arranged, which can be manufactured by printing at low cost, and a method for manufacturing the sheet-like sensor.
  • FIG. 1 is a configuration diagram of a sheet-like sensor according to a first embodiment based on the present disclosure
  • FIG. 1 is a cross-sectional view of a sheet-like sensor according to a first embodiment based on the present disclosure
  • FIG. FIG. 4 is a plan view of the sensor element according to the first embodiment based on the present disclosure when it is a shear force detection sensor
  • FIG. 4 is a cross-sectional view when the sensor element according to the first embodiment based on the present disclosure is a shear force detection sensor
  • FIG. 2 is a plan view showing an arrangement example of sensor elements and joints according to the first embodiment based on the present disclosure
  • FIG. 4 is a plan view showing another arrangement example of the sensor element and the joint portion according to the first embodiment based on the present disclosure
  • FIG. 4 is a diagram showing an example of a manufacturing process of the sheet-like sensor according to the first embodiment based on the present disclosure
  • FIG. 4 is a diagram showing an example of a manufacturing process of the sheet-like sensor according to the first embodiment based on the present disclosure
  • FIG. 4 is a diagram showing an example of a manufacturing process of the sheet-like sensor according to the first embodiment based on the present disclosure
  • 1 is a plan view showing the configuration of a temperature sensor according to a first embodiment based on the present disclosure
  • FIG. 1 is a cross-sectional view showing the configuration of a temperature sensor according to a first embodiment based on the present disclosure
  • FIG. 4 is a diagram of an example of arrangement when one of the sensor elements is a temperature sensor element according to the first embodiment based on the present disclosure;
  • FIG. 4 is a diagram of an example of wiring from the sensor element according to the first embodiment according to the present disclosure;
  • FIG. 4 is a diagram of a wiring example of a common electrode from the sensor element according to the first embodiment based on the present disclosure;
  • FIG. 4 is a cross-sectional view showing a first example of a sheet-like sensor according to a second embodiment based on the present disclosure;
  • FIG. 4 is a cross-sectional view showing a second example of a sheet-like sensor according to a second embodiment based on the present disclosure;
  • FIG. 10 is a plan view showing an example of positions of holes provided in a substrate of a sheet-like sensor according to a second embodiment based on the present disclosure
  • FIG. 10 is a plan view showing an example of positions of holes provided in a substrate of a sheet-like sensor according to a second embodiment based on the present disclosure
  • FIG. 10 is a plan view showing an example of positions of holes provided in a substrate of a sheet-like sensor according to a second embodiment based on the present disclosure
  • FIG. 10 is a plan view showing an example of positions of holes provided in a substrate of a sheet-like sensor according to a second embodiment based on the present disclosure
  • FIG. 10 is a plan view showing an example of positions of holes provided in a substrate of a sheet-like sensor according to a second embodiment based on the present disclosure
  • FIG. 10 is a plan view showing an example of positions of holes provided in a substrate of a sheet-like sensor according to a second embodiment based on the present disclosure
  • FIG. 10 is a plan view
  • FIG. 5 is a cross-sectional view showing an example of arrangement of jigs inserted into a substrate of a sheet-like sensor according to a second embodiment based on the present disclosure
  • FIG. 5 is a cross-sectional view showing a state in which a jig is inserted into a substrate of a sheet-like sensor according to a second embodiment based on the present disclosure
  • FIG. 10 is a cross-sectional view showing another example of arrangement of jigs inserted into the substrate of the sheet-like sensor according to the second embodiment based on the present disclosure
  • FIG. 5 is a cross-sectional view showing an example of arrangement of jigs inserted into a substrate of a sheet-like sensor according to a second embodiment based on the present disclosure
  • FIG. 5 is a cross-sectional view showing a state in which a jig is inserted into a substrate of a sheet-like sensor according to a second embodiment based on the present disclosure
  • FIG. 10 is a cross-
  • FIG. 5 is a cross-sectional view showing a state in which a jig is inserted into a substrate of a sheet-like sensor according to a second embodiment based on the present disclosure
  • FIG. 10 is a cross-sectional view showing a configuration example when a substrate and a jig of a sheet-like sensor are integrated according to a second embodiment based on the present disclosure
  • FIG. 5 is a schematic diagram showing a state in which a shear load is applied to the sheet-shaped sensor according to the second embodiment based on the present disclosure
  • FIG. 2 is a diagram of an example inlay configuration of sheet-like sensors according to embodiments in accordance with the present disclosure
  • FIG. 2 is a diagram of an example inlay configuration of sheet-like sensors in a matrix arrangement, according to embodiments in accordance with the present disclosure;
  • each embodiment a sheet-like sensor in which a plurality of pressure-sensitive sensors that output a shear load applied to the sensor as a change in resistance value are arranged in a planar direction will be described as an example.
  • Each embodiment is a sheet sensor that operates as a shear pressure sensor that detects a shear load in the horizontal plane of the XY plane that cannot be detected by a general vertical pressure sensor.
  • the sheet-like sensor according to this embodiment is configured by arranging a plurality of sensor elements 4 and 5 and a plurality of joints 6 between a pair of base materials 2 and 3. .
  • the sheet-shaped sensor of this embodiment is a case in which two sensor elements 4 and 5 constitute one sensor set.
  • a plurality (three in FIG. 1) of joint portions 6 are arranged so as to surround the outer circumferences of the two sensor elements 4 and 5 that constitute the sensor elements.
  • a set of sensors is also called a load sensor.
  • FIGS. 1 and 2 Although only one set of load sensors is illustrated in FIGS. 1 and 2 , multiple sets of load sensors may be arranged between the pair of sheet-like base materials 2 and 3 . A plurality of sets of load sensors are arranged in a matrix between a pair of base materials 2 and 3 in plan view.
  • the sheet-like substrates 2 and 3 are made of thermoplastic, for example. In this case, the substrates 2 and 3 can be bonded to each other through a plurality of bonding portions 6 by applying heat and pressure from the outside.
  • the substrates 2 and 3 are made of, for example, plastic forms such as polyethylene, polypropylene, polyethylene terephthalate, polycarbonate, and acrylic.
  • the surface side of the substrates 2 and 3 (the surface opposite to the surface on which the sensor element is provided) may have a hard coat layer.
  • This hard coat layer is composed of, for example, a cured acrylic layer.
  • the thickness of this hard coat layer is, for example, in the range of 1 ⁇ m or more and 5 ⁇ m or less. Within this range, it is easy to prevent cracking of the hard coat layer itself while preventing the substrates 2 and 3 from being scratched.
  • a bonding layer may be provided on the inner side (opposing surface side) of the base materials 2 and 3 .
  • the bonding layer is composed of, for example, a urethane layer.
  • the thickness of the bonding layer is, for example, in the range of 1 ⁇ m or more and 10 ⁇ m or less.
  • the thickness of each of the base materials 2 and 3 is, for example, in the range of 25 ⁇ m or more and 200 ⁇ m or less. Within this range, the substrates 2 and 3 are less likely to bend and can be rolled.
  • the substrates 2 and 3 can carry the resistors 4A, 4B, 5A and 5B constituting the sensor elements 4 and 5, thereby protecting the sensor elements 4 and 5 from the outside.
  • the two sensor elements 4 and 5 forming one load sensor are an X-axis resistance element and a Y-axis resistance element.
  • the sensor elements 4 and 5 constituting the X-axis resistance element and the Y-axis resistance element are sheet-like first resistors 4A and 5A formed on one base material 2 of the pair of base materials 2 and 3. and sheet-like second resistors 4B and 5B formed on the other base material 3 .
  • the first resistors 4A, 5A and the second resistors 4B, 5B are arranged such that the second resistors 4B, 5B are relatively displaceable in the plane direction (lateral direction) with respect to the first resistors 4A, 5A.
  • the resistor surfaces 4Aa and 5Aa of the first resistors 4A and 5A and the resistor surfaces 4Ba and 5Ba of the second resistors 4B and 5B are in contact with each other so that the contact surface 10 is formed. forming.
  • the contact area between the first resistor 4A and the second resistor 4B changes, and the resistance changes according to the shear displacement. value changes.
  • the resistance value of the Y-axis resistance element changes with respect to the shear load in the Y-axis direction.
  • the coordinate system indicated by the X-axis and the Y-axis may not be an orthogonal coordinate system, and may be an oblique coordinate system.
  • the sensor elements 4 and 5 output information (resistance value) for calculating the load as the contact area of the two opposing resistors 4A, 4B, 5A and 5B changes with respect to the shear load.
  • a calibration curve is set in advance by measuring resistance values when predetermined loads are applied in the X and Y directions. When the actual shear load is measured, the resistance value of the contact surface 10 under the shear load is converted into the shear load based on the calibration curve and calculated.
  • the sensor elements 4 and 5 should be designed so that the resistance value of the contact surface 10 between the first resistors 4A and 5A and the second resistors 4B and 5B is several ⁇ to several hundred ⁇ .
  • the resistance value of each material of the resistors 4A, 4B, 5A, and 5B forming the sensor elements 4 and 5 becomes a conductive path for measuring the resistance value of the contact surface 10
  • the resistance value of the contact surface 10 A combination of materials and dimensions that gives a lower resistance value than .
  • the resistance value of the contact surface 10 may be adjusted by adjusting the surface roughness to increase or decrease the contact area.
  • the first resistors 4A, 5A and the second resistors 4B, 5B are made of conductive resin, for example.
  • the conductive resin can be formed by pattern-printing or coating the surfaces of the substrates 2 and 3 with a conductive ink in which a carbon filler or a metal filler is dispersed in a binder resin.
  • the resistance of the contact surface 10 may be adjusted by forming an oxide film on the surface of the metal pattern (the pattern of the lead wires (wirings 50 to 55), see FIGS. 8 and 9).
  • the sensor elements 4, 5 can be arranged individually. Methods such as screen printing, gravure printing, and inkjet can be used as the printing method. Coating techniques include gravure coating, electrostatic spraying, die coating, and the like. In the coating method, a resistive element pattern mask is used.
  • the shear load when applying a shear load that accompanies actual shear displacement, the shear load is always applied with the Z-axis load in the vertical direction (opposing direction).
  • shear displacement is determined by the viscoelastic properties of the material of the joint 6 when the difference between the frictional force on the contact surface 10 and the Z-axis load acting as a drag against the shear load acts on the joint 6. . Therefore, when calculating the shear load, it is preferable to correct the calculated value using the Z-axis load and the viscoelastic properties of the material of the joint 6 .
  • the sensor elements 4 and 5 configured as described above for detecting pressure may be added separately.
  • the shear load when a shear load that accompanies actual shear displacement is applied, the shear load is always applied with a Z-axis load in the vertical direction (opposing direction).
  • shear displacement is determined by the viscoelastic properties of the material of the joint 6 when the difference between the frictional force on the contact surface 10 and the Z-axis load acting as a drag against the shear load acts on the joint 6. . Therefore, when calculating the shear load, it is preferable to correct the calculated value using the Z-axis load and the viscoelastic properties of the material of the joint 6 .
  • the sensor elements 4 and 5 configured as described above for detecting pressure may be added separately.
  • a sensor for vertical load of variable resistance value type is added to each load sensor, and the load sensor detects the Z axis in addition to the detection of the X axis and the Y axis. It is also possible to use a three-axis sensor for the detection of. At this time, the frictional force acting on the contact surface 10 may be corrected from the Z-axis load, and the calibration curve of the shear load may be adjusted from the vertical load. Further, lead wires (lead wires) for resistance value measurement are arranged from the sensor elements 4 and 5 to the substrates 2 and 3 . A printed wiring board may be used for the lead wire, or it may be printed using conductive ink such as silver paste.
  • a joint 6 is provided for each load sensor.
  • the joint portion 6 is disposed on the outer periphery of the plurality of sensor elements 4 and 5 that constitute the corresponding load sensor, and connects the pair of base materials 2 and 3 to the sensor element 4 that constitutes the corresponding load sensor. 5, the second resistors 4B and 5B are positioned with respect to the first resistors 4A and 5A.
  • the joints 6 define the initial positions (positions under no load) of the sensor elements 4 and 5 in the three axial directions of the XY and Z directions. As shown in FIG.
  • the opposing substrates 2 and 3 are connected only at a joint 6, and the X-axis resistance element 4 and the Y-axis resistance element 5 are connected to the opposed resistors 4A, 4B, 5A, and 5B. (resistor surfaces 4Aa, 5Aa, 4Ba, 5Ba).
  • the joint 6 may be formed by, for example, a pillar-shaped patch, or may be formed by printing on one or both surfaces of the pair of base materials 2 and 3 . It is possible to bond the base materials 2 and 3 at the joint portion 6 by pressing the base materials 2 and 3 after forming the joint portion 6 with a pressure-sensitive adhesive or an adhesive.
  • the joint 6 can also be made of a thermoplastic material. In this case, the material forming the joint 6 is heated and fused by thermocompression bonding using a laminator or the like that applies heat to the entire surface. , the base materials 2 and 3 are joined via the joining portion 6 .
  • the substrates 2 and 3 are made of a thermoplastic material, or a thermoplastic joint layer is separately provided under the load sensor element pattern, and the joint 6 is positioned afterward. It is also possible to bond the substrates 2 and 3 by pressing a thermal stamp patterned in , and heating and bonding only the bonding portion 6.
  • the material of the joint portion 6 is selected from, for example, elastic resin.
  • examples of the material of the joint 6 include polyethylene, polypropylene, polyvinyl chloride, polystyrene, polyvinyl acetate, and polyurethane.
  • the bonding part 6 is not limited to a material or a bonding process as long as the material can bond the base materials 2 and 3 by adhesion and solidification by thermoplasticity, thermosetting, UV curing, or the like in the bonding process.
  • the resistors 4A, 4B, 5A, and 5B are preferably made of a harder material than the material of the joint 6, because deformation of the resistors 4A, 4B, 5A, and 5B is suppressed.
  • the joint portion 6 may be thicker or thinner than the thickness of the sensor elements 4 and 5 .
  • the joint portion 6 When the joint portion 6 is thicker, the portion surrounded by the joint portion 6 becomes concave. If the joint portion 6 is thinner, the portion surrounded by the joint portion 6 has a convex shape.
  • the joints 6 are preferably arranged with respect to the sensor elements 4 and 5 as described below, so that the friction of the contact surface 10 under shear load is stabilized.
  • three or more joints 6 are arranged for each load sensor so as to surround the outer periphery of a plurality of sensor elements 4 and 5 that constitute the load sensor.
  • the three or more joints 6 are arranged, for example, in a circular shape of a first circle 30 centered on the center of mass of the two or more sensor elements 4 and 5 that constitute the pair of corresponding sensors in plan view. In addition, they are provided at positions where the distance between adjacent joints 6 is equal (equally spaced positions). That is, the respective joints 6 are arranged at corner positions of a regular polygonal shape (having the same number of corners as the number of joints 6) centered on the center of the first circle 30 . At this time, the two or more sensor elements 4 and 5 constituting each load sensor are arranged so as to be inscribed in a second circle 20 centered on the center of mass. It is preferably less than twice the radius of circle 20 .
  • the sensor elements 4 and 5 are arranged inside a circle centered on the center of mass in order to uniformly apply a Z load to the surfaces of the resistors 4A, 4B, 5A, and 5B.
  • three or more joints 6 are arranged within a circle having a radius of one to two times the radius of a circle circumscribing the sensor elements 4 and 5 from the center of the sensor elements 4 and 5 .
  • the joints 6 can be arranged at the vertices of a regular polygon centered on the center of mass of the sensor elements 4 and 5 .
  • This center of mass can be a pseudo center of gravity determined only from the outline of the element.
  • the inside of the outline of the element is the center of gravity when it is assumed that the material has a two-dimensionally uniform mass.
  • This pseudo center of gravity coincides with the center of pressure applied to the element and is preferable.
  • the position of the center of mass of the sensor elements 4, 5 is the center of mass of the sensor elements 4, 5 forming the pair.
  • the joints 6 are formed between the facing substrates 2 and 3 in a dot pattern so as to surround the outer peripheries of the sensor elements 4 and 5 with a gap in the circumferential direction.
  • the shape of the joint 6 can be a dot.
  • a dot can be a circle. Also, it may be elliptical.
  • the frictional force of the contact surface 10 of the resistors 4A, 4B, 5A, 5B generated under load acts as a constant drag against the shear load, and the change in the area of the resistors 4A, 4B, 5A, 5B under shear load
  • the volume also becomes constant with respect to the shear load.
  • the load sensor is less likely to vibrate, and can be stably displaced in any direction in a two-dimensional plane.
  • FIG. 3A is a plan view showing one configuration example of the sensor element 4
  • FIG. 3B is a cross-sectional view showing one configuration example of the sensor element 4.
  • FIG. In the sensor element 4 shown in FIGS. 3A and 3B the first resistor 4A and the second resistor 4B are both rectangular, but have different long sides.
  • the short sides of the two resistors 4A and 4B are arranged in the shear detection direction, and the short sides of the two resistors 4A and 4B partially overlap each other. placed.
  • the resistors 4A and 4B with short long sides are set so as to be positioned at the center of the resistors 4A and 4B with long long sides.
  • the sensor element 5 also has a similar configuration.
  • the shape and arrangement of the first resistors 4A, 5A and the second resistors 4B, 5B are not limited to this.
  • Two resistors 4A, 4B, 5A, and 5B arranged to face each other are, in plan view, in accordance with the shear displacement in the direction of the shear force to be detected, the overlapping region of the two resistors 4A, 4B, 5A, and 5B
  • the two resistors 4A, 4B, 5A, and 5B overlap each other so that the area of the overlapping region of the two resistors 4A, 4B, 5A, and 5B is kept constant against shear displacement in the direction perpendicular to the direction of the shear force to be detected as the area changes.
  • the shape and arrangement of the resistors 4A, 4B, 5A, and 5B are configured.
  • the first resistors 4A, 5A and the second resistors 4B, 5B are connected via the contact surface 10 to convert the resistance value of the contact surface 10 into a shear load.
  • FIGS. 3A and 3B show an example arrangement of the sensor elements 4, 5 forming a set of load sensors employing the configuration example shown in FIGS. 3A and 3B.
  • the load sensor shown in FIG. 4A has one set of the X-axis resistance element 4 and the Y-axis resistance element 5, and three joints 6 arranged at the vertices of an equilateral triangle.
  • the plurality of joints 6 to be arranged may have joints 6 with a large cross section and joints 6 with a small cross section.
  • the ratio of the numbers of large joints 6 and small joints 6 can be, for example, 1:1 or more and 1:6 or less.
  • a small joint portion 6 may be arranged on the outer periphery of the large joint portion 6 .
  • the stress applied to the large joints 6 can be distributed to the small joints 6 .
  • the small joints 6 may be arranged outside the large joints 6 with the center of mass of the sensor elements forming the set as the center. With such an arrangement, when a part of the small joint 6 is broken, the load sensor indicates an abnormal value relative to the surrounding element values, so that the failure can be detected before the device is completely damaged and stops working. Cheap.
  • the load sensor shown in FIG. 4B has two sets of the X-axis resistance element 4 and the Y-axis resistance element 5, and four joints 6 are arranged at the vertices of a regular square. With such an arrangement relationship, the vertical load applied to the sensor elements 4 and 5 is averaged, and the contact surface load on each contact surface 10 in the load sensor is stabilized. As a result, the friction and electrical resistance of the contact surface 10 are stabilized. In addition, by setting the arrangement of the joints 6 as described above, even if the shear load is applied from any direction on the XY plane (two-dimensional direction), a uniform shear load is applied to the sensor elements 4 and 5. This allows for more accurate shear load measurements. 4A and 4B show an example of this embodiment, and the number of sets of sensor elements 4 and 5 constituting one set of load sensors and the number of vertices of the regular polygon in which the joints 6 are arranged are shown in FIGS. is not limited to
  • the shape becomes closer to a circle, and the shear load is evenly transmitted to the sensor elements 4 and 5 as shear displacement in all directions of XY. Further, by increasing the number of sets of the sensor elements 4 and 5 constituting one set of load sensors, the acceleration is improved and accurate measurement becomes possible. It is also possible to measure the area distribution of the shear load spread over the XY plane by arranging a large number of load sensors consisting of sets of sensor elements 4 and 5 and joints 6 in a matrix and measuring the resistance value of each. is.
  • a plurality of sets of load sensors may be arranged in a matrix between the substrates 2 and 3, or as described above, a plurality of sensor components consisting of one set of load sensors are prepared between the substrates 2 and 3. may be laid out in a matrix on top of other two-dimensional sensors. In this case, it is preferable to detachably attach each sensor component to the other two-dimensional sensor. Further, it is possible to provide robustness by arranging a large number of sensor elements 4 and 5 having the same characteristics and detecting data with a plurality of element sets. In this case, even if some of the elements fail, the values of the surrounding elements can complement the values of the failed elements. In addition, it is easy to detect the defect of the element from the abnormality among many elements.
  • in-field calibration can be easily performed by matching the values of the element groups of adjacent load sensors.
  • Machine learning may be used for detection of these abnormalities and for calibration.
  • This machine learning may be hierarchical machine learning.
  • the point-by-point value itself can be used as teacher data, or the pattern of the distribution of values can be used as teacher data.
  • Data of a plurality of sheets can also be used as teacher data.
  • a plurality of load sensors may be arranged in a square arrangement or a hexagonal arrangement. Also, for accuracy improvement and redundancy, a plurality of load sensors may be arranged as one cell. Vibration can be detected by decomposing changes in the resistance values of the sensor elements 4 and 5 with time to make them vibration detection type elements, or by making the sensor elements 4 and 5 temperature detection type by selecting a temperature variable resistance material. It is also possible to use a sheet-like sensor for temperature detection.
  • an example of the structure of the temperature sensor element 40 is such that the contact between the first resistor 7 and the second resistor 8 is maintained even when the substrates 2 and 3 are displaced by shearing. It is configured so that the area of the surface 41 does not change.
  • the resistor 8 is entirely inside the resistor 7 in plan view within the range of the set maximum shear deviation. As a result, the contact area of the temperature sensor element 40 does not change even with shear. Therefore, the temperature can be detected stably and accurately by detecting the temperature change in the resistance values of the resistors 7 and 8 without being affected by shear.
  • FIG. 7 shows an example in which the sensor elements 4 and 5 for shearing and the temperature sensor element 40 are arranged at the same time as load sensors. Unlike the shearing sensor element, the temperature sensor element 40 may be placed near the shearing element without any restrictions on its placement. Also, by arranging elements for detecting pressure, vibration, and temperature in a matrix, it is possible to form a sheet-like sensor for planar complex tactile sensation.
  • FIG. 8 shows an example of wiring to the sensor elements 4 and 5 constituting the load sensor.
  • the wiring pattern is formed so that the wiring to the resistors 4A and 5A of the base material 2 and the wiring from the resistors 4B and 5B of the base material 3 do not intersect.
  • an overcoat made of an insulator may be provided on the wiring.
  • FIG. 9 it is possible to integrate the electrodes on the substrates 2 and 3 into a common electrode 60 to simplify the wiring.
  • the wirings 50 to 55 to each element may be arranged in a matrix and each wiring may be multiplexed. Wiring multiplexing can be doubled, tripled, or quadrupled. By multiplexing, measurement can be continued even if one wiring is disconnected. At this time, disconnection may be detected from a change in resistance or a change in impedance.
  • the wiring can be a copper wire, or can be a wiring formed by printing. Alternatively, it may be formed by etching a metal foil. This metal foil can be an aluminum foil, a copper foil, or a laminated foil thereof. Metal foil or printed wiring can reduce the cost of the sheet sensor. In addition, when the front and back surfaces are joined at a plurality of points, wiring can be passed between the joining points.
  • joint portions 6 may also be provided at portions where wirings intersect. As a result, it is possible to selectively reinforce the crossing portions of the wiring, which tend to break.
  • the sheet end peripheries of the pair of base materials 2 and 3 may be joined at a continuous joining portion.
  • the space between the pair of base materials 2 and 3 constituting the sheet-like sensor can be sealed.
  • the space between the pair of base materials 2 and 3 may be filled with an inert gas such as nitrogen.
  • ⁇ Manufacturing method> 5A to 5C illustrate an example of a method for manufacturing the sheet-like sensor of this embodiment. That is, a plurality of sheet-like first resistors 4A and 5A are formed by pattern-printing resistors 4A and 5A on a sheet-like first base material 2, and a sheet-like second base material 3 is provided with resistors. By pattern-printing the bodies 4B and 5B, sheet-like second resistors 4B and 5B are formed at positions capable of facing the first resistors 4A and 5A, respectively. Next, one or more of the first resistors 4A, 5A, or one or more of the first resistors 4A, 5A, or one or more of the first base material 2 or the second base material 3 in plan view.
  • a plurality of joints 6 are formed so as to surround the outer periphery of the region where the second resistors 4B and 5B are to be formed.
  • the second base material 3 is placed on the first base material 2 so that the first resistors 4A, 5A and the second resistors 4B, 5B are opposed to each other, and the joint portion 6 is placed on the first base material. It is fixed to the other base material 3 of the material 2 or the second base material 3 to connect the first base material 2 and the second base material 3 .
  • FIGS. 5A to 5C illustrate the case of one set of load sensors, two or more sets of load sensors may be provided.
  • resistors 4A, 4B, 5A, and 5B are pattern-printed on the respective substrates 2 and 3 to form first sheet-like resistors 4A and 5A and sheet-like resistors 4A and 5A. are formed on the substrates 2 and 3, respectively.
  • a joint 6 is formed on one of the substrates 2 . Either of the base materials 2 and 3 forming the joint portion 6 may be used.
  • the bonding portion 6 may be formed by pattern printing using the bonding material resin ink as described above, or the bonding material resin paint may be applied to the substrates 2 and 3 and the resistors 4A, 4B, 5A, and 5B in patterns.
  • a two-layer sealant structure of the substrates 2 and 3 and a thermoplastic resin as a bonding material may be formed by coating between the substrates 2 and 3, and the bonding portion 6 may be fixed by lamination bonding by pattern heating.
  • FIG. A sheet sensor 101 according to the second embodiment is a pressure sensor that outputs a shear load applied to a medium as a change in physical quantity such as a resistance value.
  • a shear load applied to a medium as a change in physical quantity such as a resistance value.
  • Convention sheet-type tactile sensors that can measure shear load, when a shear load is applied from the surface, the sensor surface slips and the shear is not transmitted to the pressure-sensitive layer in the sheet, making accurate shear load measurement difficult. Met. Therefore, a method of sandwiching a high-friction sheet between the load applicator and the sensor surface to reduce slippage, and a method of fixing the load applicator and the sensor surface with an adhesive have been adopted.
  • the sheet-shaped sensor 101 can reliably transmit the shear load applied to the sensor surface to the pressure-sensitive layer even in a sheet-type tactile sensor, enabling accurate shear load measurement.
  • FIG. 10 is a cross-sectional view showing one configuration example of the sheet-shaped sensor 101 of the present disclosure.
  • a sensor element 104 is formed in the sheet-like sensor 101 so as to be sandwiched between a first base material 102 and a second base material 103 .
  • the sheet-like sensor 101 is formed with an exterior portion 108 covering a surface other than the main surface of the base material 102 and an exterior portion 109 covering a surface other than the main surface of the base material 103 .
  • a shear load is applied to the sensor surface, a shear displacement occurs between the substrates 102 and 103 according to the shear load, and the sensor element 104 existing between the substrates 102 and 103 is displaced. Strain due to displacement is transmitted and the shear load is measured.
  • a resistor 104A (not shown) formed on the first base material 102 and a resistor 104B (not shown) formed on the second base material 103 are arranged on the surface of the resistor. 104Aa and the resistor surface 104Ba are in contact with each other to constitute the sensor element 104.
  • FIG. The arrangement of the resistor 104A and the resistor 104B of the sensor element 104 is the same as the arrangement of the first resistor 4A and the second resistor 4B shown in FIGS. 3A and 3B. are omitted.
  • the shear load is calculated by converting the change in resistance with the applied load.
  • a sensor element may be formed in which the resistance value changes according to the shear displacement in each of the X and Y directions. That is, when a shear load is generated in the X-axis direction, the contact area between the first resistor 104A and the second resistor 104B changes, and the resistance of the X-axis sensor resistance element changes according to the shear displacement. A physical quantity such as changes. Similarly, the Y-axis resistive element changes in physical quantity such as a resistance value with respect to a shear load in the Y-axis direction. If the sensor element 104 is composed of such a combination of two resistance elements, it is also possible to measure the direction and magnitude of the shear load applied to the XY plane.
  • the sensor element 104 may have any configuration as long as it can detect a change in physical quantity with respect to the shear load.
  • the above-described variable resistance sensor is widely used, but a variable capacitance sensor having a capacitor structure may also be used.
  • the sensor element 104 is formed on the base material 102 and the base material 103 using a method such as printing or coating. Especially in printing, it is preferable because it is easy to arrange each of the plurality of sensor elements 104 individually.
  • printing methods include screen printing, gravure printing, and inkjet
  • coating methods include gravure coating, electrostatic spraying, die coating, and the like.
  • a resistive element pattern mask is used.
  • Base material Any material may be used for the base material 102 and the base material 103 as long as it can be formed into a sheet.
  • a material for forming the base material 102 and the base material 103 it is preferable to use a resin material, and polyethylene, polypropylene, polyethylene terephthalate, polycarbonate, acryl, or the like can be used.
  • the thickness of the base materials 102 and 103 is preferably 25 ⁇ m or more and 300 ⁇ m or less. If the thickness of the base materials 102 and 103 is within this range, the base materials 102 and 103 do not bend and can be rolled up, and even if the surface of the load applying body is curved, the sheet-like sensor 101 can be loaded. It can be attached to the application body.
  • the exterior part 108 and the exterior part 109 have a function of protecting the sheet-like sensor 101 and giving the sheet-like sensor 101 a design property.
  • the exterior parts 108 and 109 may be formed by laminating a pouch film or the like on the base materials 102 and 103, or may be formed by coating the surfaces of the base materials 102 and 103 excluding the main surfaces with a protective layer material or the like. You can Furthermore, the surfaces of the exterior parts 108 and 109 may be printed.
  • the materials and configurations of the exterior parts 108 and 109 are not limited to the materials and configurations described above, and can be appropriately selected depending on the intended use.
  • the sheet-like sensor 101 has two or more holes provided in each of the base material 102 and the base material 103 .
  • the hole is provided to communicate with the base material 102 from the surface of the exterior part 108, and may penetrate from the surface of the exterior part 108 to the main surface of the base material 102 (the surface facing the base material 103). Holes are similarly provided in the exterior part 109 and the base material 103 . That is, the holes may be formed from the exterior parts 108 and 109 to the middle of the substrates 102 and 103 or may penetrate through the substrates 102 and 103 .
  • FIG. 10 is a cross-sectional view showing a sheet-like sensor 101 (101A) of the first example having holes 105 formed from the exterior parts 108 and 109 to the middle of the base materials 102 and 103.
  • FIG. 11 shows the sheet sensor 101 (101B) of the second example having a hole 106 penetrating from the exterior part 108 to the base material 102 and a hole 107 penetrating from the exterior part 109 to the base material 103. It is a sectional view showing.
  • the holes 105 provided in one base material do not overlap the holes 105 provided in the other base material (for example, the base material 103) in plan view. It is provided at a position (a position that does not coincide with the vertical direction in the cross-sectional views of FIGS. 10 and 11).
  • some of the holes 106 provided in one base material correspond to the holes 107 provided in the other base material (for example, the base material 103). are provided at positions that do not overlap with each other in plan view. This makes it easier for the shear load to be transmitted to the pressure-sensitive layer of the sensor element 104 when the shear load is applied, so that the accuracy of the shear load measurement of the sheet-like sensor 101 can be improved.
  • a vertical load is also applied at the same time.
  • a local pressure due to a vertical load is applied to the edge portion of the sensor element 104 , and the shear load is less likely to be transmitted to the pressure sensitive layer of the sensor element 104 .
  • the thickness direction is also applied at the same time. The application of the vertical load brings the base material 102 and the base material 103 into close contact with each other, generating friction at the interface.
  • the shear load transmitted to the sensor element 104 is determined by the force relationship between this interface friction and the friction between the surface of the sheet-like sensor 101 and the load applying body. is large, making it difficult for the shear load to be transmitted to the sensor element 104 .
  • the sheet-like sensor 101 has a hole structure extending in the thickness direction of the base material 102 and the base material 103, so that the applied shear load is efficiently transferred from the base materials 102 and 103 to the base material 102 using the holes. and 103 can be effectively transmitted to the sensor element 104 that is in contact with them.
  • the formation of the bottomed holes 105 inside the substrates 102 and 103 can be achieved by laser processing, forming a special layer on the surfaces of the substrates 102 and 103, or by providing a special layer on the surfaces of the substrates 102 and 103, and then using a mold.
  • a method such as embossing which is formed by pressing, a method of physically forming with a drill, and a method of raising the portion other than the hole forming portion with a resin material or the like by printing or coating can be used.
  • Holes 106 and 107 passing through substrates 102 and 103 as shown in FIG. 11 can be formed by punching using a punch or a punching blade.
  • FIGS. 12A to 12D are schematic plan views showing an example of the arrangement of holes 105 in the base material 102 or base material 103 of the sheet-like sensor 101A shown in FIG.
  • a plurality of holes are provided in one substrate.
  • the base material 102 or 103 rotates around the holes with respect to the direction of the XY plane and suppresses a change in the direction of the shear applied to the pressure-sensitive layer. be able to.
  • FIGS. In order to evenly transmit shear from all directions to the pressure-sensitive layer, when an even number of holes 105 are formed as shown in FIGS. placed at a distance. As shown in FIG. 2D, when an odd number of holes 105 are formed, the holes 105 are arranged at the vertices of a regular polygon with the center O of the sensor element 104 as the center of gravity.
  • a regular polygon is a regular polygon having the number of vertices corresponding to the number of holes. Holes are arranged at similar positions in the sheet-like sensor 101B shown in FIG.
  • the sheet-like sensor 101 may include a jig 120 penetrating from the exterior portion 108 in the hole 105 to the base material 102 . That is, the jig 120 is inserted into the hole 105 and connects the exterior part 108 and the base material 102 within the hole 105 .
  • 13A and 13B, and 14A and 14B are cross-sectional views showing configuration examples of the sheet-like sensor 101 when the hole 105 and the jig 120 are combined. Two or more holes 105 or holes 106 and 107 are provided in each of the base material 102 and the base material 103 .
  • FIG. 13A and 13B are cross-sectional schematic diagrams showing the configuration of a jig 120 in a sheet-like sensor 101A in which holes 105 having bottoms are formed inside substrates 102 and 103.
  • the jig 120 includes, for example, projections 120A that are inserted into a plurality of (for example, two) holes 105, and connection portions 120B that connect the projections 120A to each other on the surfaces of the exterior parts 108 and 109. It may be in the form of a pin with As shown in FIG. 13B, such protrusions 120A of jigs 120 are inserted into respective holes 105.
  • FIG. 13A is inserted into respective holes 105.
  • the jig 120 can be a structure having a cylindrical pin with a diameter smaller than the diameter of the hole 105 as the projecting portion 120A.
  • a material for the jig 120 a material such as metal or ceramic that does not deform when shear is applied can be selected.
  • 14A and 14B are cross-sectional schematic diagrams showing the configuration of a jig 120 in a sheet-like sensor 101B in which holes 106 and 107 passing through base materials 102 and 103 are formed.
  • the outer shape of one of the substrates 102 and 103 is made smaller than the other, and only the hole 106 formed in the other is made smaller. is so that the protrusion 120A of the jig 120 penetrates.
  • the outer shape of the base material 103 is made smaller than that of the base material 102, and a through hole 106 is formed in a portion of the base material 102 that does not overlap with the base material 103.
  • the hole 106 of the base material 102 is formed below the hole 107 formed in the base material 103 .
  • the outer diameter of the hole 106 on the substrate 102 side is formed larger than the outer diameter of the hole 107 .
  • the amount by which the outer diameter of one of the holes (holes 106) is increased is preferably set to an amount that causes shear displacement when shear is applied.
  • the jig 120 inserted from the substrate 103 side does not hit the hole 106 formed in the substrate 102 during the shear measurement. Since the amount of shear displacement due to the application of a shearing load is about several hundred ⁇ m, it is preferable that the difference between the outer diameter of the hole 106 and the outer diameter of the hole 107 facing each other is about 1 mm. Specifically, when the hole 107 has a diameter of 2 mm, the diameter of the hole 106 facing the hole 107 should be 3 mm.
  • FIG. 15 is a sectional view showing a configuration example of the sheet-like sensor 101 when the jig 120 and the sheet-like sensor 101A shown in FIG. 10 are integrated.
  • the applied load layer 110 has protrusions 110A that fill the holes 105, and connecting portions 110B that are formed on the surfaces of the substrates 102 and 103, respectively.
  • a material for forming the applied load layer 110 a rigid body such as metal or ceramic is selected.
  • a material having a viscous component, such as resin as the material for forming the applied load layer 110, in this case, shear is less likely to be transmitted to the protrusion 110A.
  • a sheet-shaped sensor 101B shown in FIG. 11 can also have a similar integrated structure.
  • FIG. 16 is a schematic diagram showing a state in which a shear load is applied to the sheet-like sensor 101 by the load applying body 130.
  • the load applying body 130 is an object to be subjected to shear measurement, and there are no particular restrictions on its shape and material.
  • the shear load component is transmitted to the sensor element 104 as shear through the protrusions 110 A of the applied load layer 110 in the holes 105 of the substrate 103 .
  • the material and surface shape of the surface of the applied load layer 110 can be selected so that the friction with the load applying member 130 is increased. There are no restrictions on the material and shape as long as the friction is high, but for example, metal or ceramic with minute projections is selected. In this manner, the sheet-shaped sensor 101 is obtained, which enables stable measurement of the shear load in all directions on the XY plane using a sheet-shaped medium.
  • the sensor element 104 includes an elastic joint (not shown in FIG. 10) that elastically operates against a shear load and joins the base material 102 and the base material 103 together with a pressure-sensitive layer that senses shear as a change in physical quantity. may have.
  • the provision of elastic joints allows the substrate 102 or substrate 103 to return to its initial position when the shear load is released, thus reducing the shear load when a continuously varying shear load is applied. Load measurement becomes easier.
  • the sheet-like sensor 101 can also be a three-axis sensor having detection directions in the Z-axis direction in addition to the X-axis direction and the Y-axis direction by further including a resistance variable vertical load sensor.
  • the sensor element 104 may have a lead wiring for physical quantity change output.
  • a printed wiring board may be used, or a conductive ink such as silver paste may be used for printing.
  • the sheet-like sensor of this embodiment can also be an inlay that is inserted into the case.
  • a two-dimensional sensor can be made by inserting this inlay into a case.
  • the case containing the inlay may have a pocket for each inlay.
  • An inlay may then be inserted into the pocket. This allows the inlay to be placed in place.
  • each sheet-like sensor may be fixed in the case by meshing or the like. This fixation may be fixed when pressure is applied to the two-dimensional sensor.
  • the fixing of the inlay may be detachable. By making it detachable, it becomes easy to replace the inlay when it is damaged.
  • a two-dimensional sensor may be used housed within the cover.
  • the case may be a bag body, and the sheet-like sensor may be spread inside the case.
  • FIG. 17 shows an inlay 70 consisting of a sheet-like sensor with a set of load sensors provided between strip-like substrates 2,3.
  • FIG. 18 illustrates a two-dimensional sensor 71 in which the inlays 70 shown in FIG. 17 are arranged in a matrix in a case.
  • the placement of the inlays 70 may be evenly spaced or may vary from region to region.
  • the density of sensing can be varied within the plane by setting different intervals for each region. Uniform sensing can be achieved by arranging them at regular intervals.
  • Each sheet-shaped sensor that constitutes the inlay 70 may have two or more sets of load sensors.
  • the edge of the case or the edge of the pocket may be sealed.
  • the seal may be waterproof. This seal may be a zipper.
  • a waterproof seal can prevent failure due to water ingress into the inlay.
  • a waterproof seal also prevents contamination of the inlay, especially when the case is laid on a bed.
  • a two-dimensional sensor 71 with an inlay inserted into a case with waterproof seals at the ends is excellent in terms of hygiene.
  • one of the plurality of sensor elements constituting one set of load sensors is a pressure sensor element, it may be of the capacitance type. Also, the pressure sensor element may be composed of a piezoelectric element. A temperature sensor element as described above may also be provided. The temperature sensor element can also be used for calibrating the pressure sensor element. Especially when the inlays 70 are used, the area can be easily increased by increasing the number of the inlays 70 .
  • the sensor elements 4 and 5 that detect a shear load or the like by changes in the resistance values of the surface contact areas of the first resistors 4A and 5A and the second resistors 4B and 5B are formed into sheets.
  • a sheet-like sensor can be manufactured by a printing method by forming it into a shape.
  • it is an inexpensive sensor that can be manufactured by printing. It is possible to provide a sheet-like sensor that can be increased in area. In this way, the present disclosure makes it possible to provide a load sensor capable of stably measuring shear loads in all directions on the XY plane using a sheet-shaped medium.
  • the present disclosure can also take the following configurations.
  • Two or more sensor elements are arranged between a pair of sheet-shaped substrates facing each other, and the sensor element is a sheet-shaped first substrate formed on one of the pair of substrates.
  • One resistor and a sheet-like second resistor formed on the other base material are arranged to face each other, and the first resistor and the second resistor are arranged in the same manner as the first resistor.
  • the second resistor is in contact with the body so as to be relatively displaceable, and further, the pair of base materials are connected to each other so that the second resistor is connected to the first resistor in the sensor element.
  • a sheet sensor with positioning joints are provided.
  • the two or more sensor elements constitute a set of sensors for each of the plurality of sensor elements.
  • Three or more of the joints are provided for each sensor set, and the three or more joints are arranged so that the centers of mass of the two or more sensor elements constituting the corresponding sensor set are aligned in a plan view. They are arranged in a circular shape of a first circle centered, and the distances between adjacent joints are equal.
  • the two or more sensor elements constituting the set of sensors are arranged so as to be inscribed in a second circle centered on the center of mass, and the radius of the first circle is the radius of the second circle. is less than twice as large as (5)
  • the plurality of sensor elements constituting the set of sensors includes two or more shear force detection sensors that detect shear force, and the direction of the shear force detected by the two or more shear force detection sensors in a plan view is The two resistors, which are different from each other and arranged opposite each other in each shear force detection sensor, change the area of the overlapping region of the two resistors according to the shear displacement in the direction of the shear force to be detected in a plan view.
  • the shape and arrangement of the two resistors are configured such that the area of the overlapping region of the two resistors is maintained constant with respect to the shear displacement in the direction orthogonal to the direction of the shear force to be detected. ing. (6) A plurality of sets of the sensors are provided, and the sets of the plurality of sensors are arranged in a matrix in plan view.
  • a sheet-shaped sensor provided at a position that does not overlap the holes provided in the material in a plan view.
  • a plurality of the holes are provided in each of the pair of base materials, and when an even number of the holes are provided, they are arranged at positions equidistant from the center of the sensor element in a plan view; When the holes are provided in an odd number, they are provided at the vertices of a regular polygon with the center of the sensor element as the center of gravity in a plan view.
  • a jig penetrating from the exterior part in the hole to the base material is provided.
  • the jig is pin-shaped.
  • the jig is made of metal or ceramic. (12) The hole penetrates from the surface of the exterior part to the main surface of the base material, and the hole provided in the main surface of one of the pair of base materials It is provided at a position overlapping with a hole provided in the other base material in plan view, and the jigs are connected to each other on the main surface of the base material.
  • a resistor is pattern-printed on a sheet-like first base material to form a plurality of first resistors, and a resistor is pattern-printed on a sheet-like second base material to form the first resistor.
  • a second resistor is formed at a position capable of facing the resistor, and one or more of the first substrate or the second substrate is provided with one or more of the second resistors in a plan view.
  • a plurality of joints are formed so as to surround the outer periphery of the region where one resistor or one or more of the second resistors are formed, and the first resistors and the second resistors are opposed to each other.
  • the second base material is superimposed on the first base material in such a manner that the joint portion is fixed to the other base material of the first base material or the second base material, thereby forming the second base material.
  • the first base material and the second base material are connected.
  • Example 1 A sheet-like sensor having the structure shown in FIG. 1 was formed by the following method.
  • a 100 ⁇ m PET film was used as the base material.
  • a resistor was printed on each of the pair of substrates using a carbon ink (manufactured by Jujo Chemical, trade name: JELCON CH-N).
  • a sheet-like first resistor and a sheet-like second resistor are formed on one surface of one base material, and a sheet-like second resistor is formed on one surface of the other base material.
  • a first resistor and a sheet-like second resistor were formed, and the resistors were brought into contact with each other to form a sensor element.
  • Each resistor is formed so as to be inscribed in a radius of 7 mm centered on the center of mass of the two sensor elements.
  • polyethylene manufactured by Japan Polyethylene, trade name: Novatec LC525.
  • the three joints were formed within a 10 mm position range centered on the center of mass of the two sensor elements, and at the positions of the vertices of an equilateral triangle with respect to the center.
  • Each joint was a cylindrical body with a diameter of ⁇ 3 mm.
  • a 100 ⁇ m PET film was used as the base material.
  • a resistor was printed on each of the pair of substrates using a carbon ink (manufactured by Jujo Chemical, trade name: JELCON CH-N).
  • the sensor element was formed by bringing the resistors into contact with each other so that the pair of resistors partially overlapped in the shear force detection direction.
  • the contact area between the resistors changes, and the shear load change can be measured as a resistance change.
  • a through-hole having a diameter of 2.0 mm was formed in each of the pair of base materials using a punching blade.
  • a sheet-like sensor of Example 2-1 was produced by fixing a pair of base materials using a double-sided tape (Teraoka Seisakusho, 7070W) as a joint material.
  • a pin-shaped jig with a diameter of 1.9 mm was produced according to the position of the through hole provided in each of the pair of base materials.
  • a shear load was applied by inserting jigs into through-holes provided in each of the pair of base materials, fixing one jig, and applying shear displacement to the other jig.
  • Comparative Example 2-1 Comparative Example 2-2 was produced in the same manner as in Example 2-1, except that the sensor of Example 2-1 was not provided with holes.
  • Example 2-1 shearing was applied by pressing a high friction sheet (Poron MX-48HF; manufactured by INOAC).
  • a high friction sheet Poron MX-48HF; manufactured by INOAC.
  • shear was applied to the sheet-shaped sensor while maintaining the vertical load at 10 N or 20 N.
  • Table 1 below shows the shear load [N] when the vertical load described above is maintained.
  • Example 2-1 As shown in Table 1, in Example 2-1, a shear load of up to 10 N or 20 N, which is the same as the vertical load, could be applied. On the other hand, in Comparative Example 2-1, only up to 3 N could be applied, and it was confirmed that at this point, the contact surface between the high-friction sheet and the sensor deviated.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

Par rapport à des capteurs susceptibles de détecter une charge de cisaillement ou similaire, la présente invention concerne un capteur stratiforme à grande surface qui est bon marché et qui peut être fabriqué par impression, et sur lequel sont disposés une pluralité d'éléments capteur. Dans le capteur stratiforme, au moins deux éléments capteurs sont disposés entre deux substrats stratiformes opposés. Dans les éléments capteurs, une première résistance stratiforme formée sur un substrat et une seconde résistance stratiforme formée sur l'autre substrat sont disposées en regard l'une de l'autre, et la première résistance et la seconde résistance sont en contact l'une avec l'autre de sorte que la seconde résistance peut être déplacée par rapport à la première résistance ; et le capteur stratiforme comprend en outre une partie charnière qui relie les deux substrats ensemble et qui positionne la seconde résistance par rapport à la première résistance dans chaque élément capteur.
PCT/JP2022/006994 2021-03-10 2022-02-21 Capteur stratiforme et son procédé de fabrication WO2022190840A1 (fr)

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JP2021109191A JP2022140219A (ja) 2021-03-10 2021-06-30 シート状センサ及びその製造方法
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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6155120A (en) * 1995-11-14 2000-12-05 Taylor; Geoffrey L. Piezoresistive foot pressure measurement method and apparatus
JP2003509685A (ja) * 1999-09-13 2003-03-11 エンカース エスアールエル 表面外力分布小型感知装置
JP2015169532A (ja) * 2014-03-06 2015-09-28 国立大学法人信州大学 シートセンサシステムおよびシートセンサ
WO2018042685A1 (fr) * 2016-08-30 2018-03-08 株式会社フジクラ Unité de capteur de détection de charge
JP2019184573A (ja) * 2018-04-05 2019-10-24 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． 圧力センサ
JP2020016549A (ja) * 2018-07-25 2020-01-30 凸版印刷株式会社 触覚センサ及びその製造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6155120A (en) * 1995-11-14 2000-12-05 Taylor; Geoffrey L. Piezoresistive foot pressure measurement method and apparatus
JP2003509685A (ja) * 1999-09-13 2003-03-11 エンカース エスアールエル 表面外力分布小型感知装置
JP2015169532A (ja) * 2014-03-06 2015-09-28 国立大学法人信州大学 シートセンサシステムおよびシートセンサ
WO2018042685A1 (fr) * 2016-08-30 2018-03-08 株式会社フジクラ Unité de capteur de détection de charge
JP2019184573A (ja) * 2018-04-05 2019-10-24 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． 圧力センサ
JP2020016549A (ja) * 2018-07-25 2020-01-30 凸版印刷株式会社 触覚センサ及びその製造方法

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