WO2022172360A1

WO2022172360A1 - Coupling device, coupling structure, and manufacturing method of coupling structure

Info

Publication number: WO2022172360A1
Application number: PCT/JP2021/004962
Authority: WO
Inventors: 貞亮金山
Original assignee: 株式会社アクシス
Priority date: 2021-02-10
Filing date: 2021-02-10
Publication date: 2022-08-18
Also published as: JPWO2022172360A1; CN116802427A

Abstract

A coupling device 10 is provided with: a coupling member 50 that has an annular body portion 60 that covers the outer periphery of a site where pipes 11, 12 are coupled and an interposition portion 61 interposed between end faces 20 of the two pipes 11, 12; an electrically conductive member 51 that is provided on the outer peripheral surface of the coupling member 50 corresponding to the interposition portion 61 and generates heat by electromagnetic induction; and an annular cover member 52 that covers the electrically conductive member 51 from the outside. The coupling device 10 is further provided with an annular interposition member 53 that can be interposed between the outer peripheral surface of the site where the two pipes 11, 12 are coupled and the body portion 60 of the coupling member 50.

Description

Coupling device, joint structure, and joint structure manufacturing method

The present invention relates to a joint device, joint structure, and joint structure manufacturing method.

Joints used for piping in semiconductor manufacturing equipment and the like are generally mechanically connected to pipes using a screw mechanism or the like. For example, with the pipe inserted into the joint, the joint and the pipe are connected to each other by tightening a screw mechanism provided outside the joint and the pipe line (see Patent Document 1).

However, when connecting a joint and a pipe using the mechanical method described above, the thickness of the joint must be increased in order to withstand the tightening stress of the screw, and the connection structure between the joint and the pipe must be large. become In addition, there is a possibility that the connection between the joint and the pipe may become loose due to vibration, internal pressure, etc. during use of the pipe, so retightening work is required to prevent liquid leakage.

Therefore, it has been proposed to attach a conductive member to a joint connected to a pipe, heat the conductive member by electromagnetic induction, and weld the joint and the pipe (see Patent Document 2).

JP 2009-115154 A International publication 2020/022178

However, according to the welding method described above, when connecting two pipes, it is necessary to first connect one pipe to the joint and then connect the other pipe to the joint, which takes time. .

The present invention has been made in view of this point, and one of its objects is to shorten the time required for the work of connecting a joint and a pipe using a welding method.

A joint device according to one aspect of the present invention is a joint member having an annular main body portion that covers the outer periphery of a connecting portion of two connected pipes, and an intervening portion that is interposed between the end surfaces of the two connected pipes. a conductive member disposed on the outer peripheral surface of the joint member corresponding to the intervening portion and generating heat by electromagnetic induction; and an annular cover member covering the conductive member from the outside.

According to this aspect, the joint device, in which the conductive member is arranged on the outer peripheral surface of the joint member and the cover member covers the conductive member from the outside thereof, is attached to the two connected pipes, and the intermediate portion of the joint member is mounted. is placed between the end surfaces of the two pipes to be connected, and the main body of the joint member covers the outer peripheral surface of the connecting portion of the two pipes to be connected. The periphery of the intervening portion of the member is welded to each other, and the two connected pipes can be connected to each other via the joint member. As a result, the two connected pipes and the joint member can be simultaneously and easily connected using electromagnetic induction, so that the time required for connecting the joint member and the connected pipe can be greatly reduced. Moreover, since the contact area between the joint member and the pipe to be connected can be increased, the welding strength can be improved.

In the above aspect, the joint member is configured such that the conductive member is axially inserted into the main body portion, and the joint member abuts against the first end surface of the inserted conductive member on the insertion direction side. You may make it have a contact part.

In the above aspect, the cover member may be configured to be insertable from the axial direction of the main body portion of the joint member into which the conductive member is inserted.

In the above aspect, the cover member may have a pressing portion that presses the second axial end surface of the conductive member.

In the above aspect, the joint member and the cover member may have an engagement mechanism that engages the joint member and the cover member with each other.

In the above aspect, the joint device may further include an annular interposed member that can be interposed between the outer peripheral surface of the connection portion of the two connected pipes and the main body portion of the joint member.

In the above aspect, the intervening member may have a locking portion that locks onto the end surface of the connected pipe.

In the above aspect, the interposed member may have a function of confirming that the end faces of the two connected pipes are in contact with or close to the interposed portion of the joint member.

In the above aspect, the intervening portion of the joint member may project from the main body portion toward the central axis thereof and have an annular convex shape around the axis of the main body portion.

In the above aspect, the intermediate portion of the joint member may be formed so that both side surfaces in the axial direction protrude outward in the axial direction.

In the above aspect, the connected pipe may be a pipe for semiconductor manufacturing equipment.

A joint structure according to an aspect of the present invention includes the above-described joint device and two connected pipes, the circumferences of intervening portions of the joint members are welded to each other, and the two connected pipes connect the joint member. are connected to each other through

A method for manufacturing a joint structure according to an aspect of the present invention includes a joint member having an annular main body portion and an intervening portion; A coupling device having a conductive member and an annular cover member covering the conductive member from the outside is attached to two connected pipes, and the intervening portion is arranged between the end faces of the two connected pipes. a first step of covering the outer peripheral surface of the connecting portion of the two pipes to be connected with the body portion; and a second step of connecting the two connected pipes to each other via the joint member.

In the above aspect, in the first step, an annular interposed member may be interposed between the outer peripheral surface of the connecting portion of the two connected pipes and the main body portion of the joint member.

In the above aspect, in the first step, the intervening member may be used to confirm that the end faces of the two connected pipes are in contact with or close to the intervening portion of the joint member.

In the above aspect, a step of assembling the joint member, the conductive member and the cover member may be included before the first step.

According to the present invention, it is possible to shorten the time required for connecting joints and pipes using the welding method.

It is a perspective view of each member which decomposed|disassembled the joint structure which concerns on this Embodiment. It is a sectional view of each member of joint structure. FIG. 4 is a cross-sectional view of the joint structure when each member of the joint structure is assembled; Fig. 3 is a cross-sectional view of a tube; It is an enlarged view of the cross section of joint structure. It is a perspective view of a joint member. It is a sectional view of a joint member. 4 is a perspective view of a conductive member; FIG. 4 is a cross-sectional view of a conductive member; FIG. It is a perspective view of a cover member. It is a sectional view of a cover member. It is an enlarged cross-sectional view of a cross-section of the joint structure. It is an enlarged cross-sectional view of a cross-section of the joint structure. It is a perspective view of an intervening member. It is a sectional view of an intervening member. FIG. 4 is an enlarged cross-sectional view of a tube with an intervening member attached; It is a sectional view of a joint device. FIG. 4 is a cross-sectional view of a joint member to which a conductive member is attached; FIG. 2 is a cross-sectional view of a coupling device positioned between two tubes;

Preferred embodiments of the present invention will be described below with reference to the drawings. The same reference numerals are given to the same elements, and overlapping explanations are omitted. In addition, unless otherwise specified, positional relationships such as up, down, left, and right are based on the positional relationships shown in the drawings.

FIG. 1 is an exploded perspective view of each member of a joint structure 1 according to the present embodiment. FIG. 2 is a cross-sectional view of each member of the joint structure 1 taken along a vertical plane including the central axis C of the joint structure 1. FIG. FIG. 3 is a cross-sectional view of the joint structure 1 when each member of the joint structure 1 is assembled. As shown in FIGS. 1 to 3, the joint structure 1 includes a joint device 10 and two

pipes

11 and 12 which are pipes to be connected.

The

pipes

11 and 12 are made of fluorine-based resin, which is used, for example, for piping in semiconductor manufacturing equipment. The

tubes

11 and 12 are circular tubes, for example, and are soft and deformable. The material of the

pipes

11 and 12 is not particularly limited to fluorine-based resin, and may be other plastic resin such as PP. The

tubes

11, 12 each have an end face 20 on the connection side.

On the end face 20, as shown in FIG. 4, for example, an engaged portion 30 is formed that protrudes toward the distal end side in the axial direction X parallel to the central axis C of the

pipes

11 and 12. As shown in FIG. This locked portion 30 is for locking a locking portion 221 of an intervening member 53 which will be described later. In addition, the “front end side” of the

tubes

11 and 12 referred to here refers to the connection portion side where the tube 11 and the tube 12 are connected to each other.

The locked portion 30 has, for example, an inclined surface 40 inclined at a predetermined angle with respect to the radial direction Y of the tubes 11 and 12 (the direction perpendicular to the axial direction X). The inclined surface 40 is formed from the outer

peripheral surfaces

11a, 12a of the

tubes

11, 12 toward the center axis C side (inward). The inclined surface 40 is inclined so as to gradually move away from the tip as it approaches the central axis C. As shown in FIG. That is, the engaged portion 30 has a triangular shape in a cross section obtained by cutting the

pipes

11 and 12 along a vertical plane including the central axis C. As shown in FIG. The engaged portion 30 is formed in an annular shape around the central axis C. As shown in FIG.

In addition, the end surface 20 has an annular flat surface 41 facing the distal end side (parallel to the radial direction Y) inside the locked portion 30 (on the side of the central axis C). The flat surface 41 is connected to the inclined surface 40 of the locked portion 30 . The locked portion 30 and the flat surface 41 are formed by processing the end surfaces of the

tubes

11 and 12 using, for example, a special jig.

As shown in FIGS. 1 to 3, the joint device 10 includes, for example, a joint member 50, a conductive member 51, a cover member 52, and two intervening members 53.

　As shown in Figs. 5 to 7, the joint member 50 has a substantially cylindrical shape. The joint member 50 is made of resin that is melted by heat of a predetermined temperature. The joint member 50 includes, for example, an annular body portion 60 that covers the outer periphery of the connecting portion of the two

pipes

11 and 12, an intervening portion 61 interposed between the end faces 20 of the two

pipes

11 and 12, and the body portion 60 and the intervening portion 61 are connected to each other.

The body part 60 has a substantially cylindrical shape. The body portion 60 has a first outer peripheral surface 80 and a second outer peripheral surface 81 . The first outer peripheral surface 80 is formed halfway from the first end 60a in the axial direction X of the main body 60 toward the second end 60b. The length in the axial direction X of the first outer peripheral surface 80 is longer than the length in the axial direction X of the conductive member 51 to be described later. The first outer peripheral surface 80 has a constant distance (diameter) from the central axis C of the body portion 60 in the axial direction X. As shown in FIG.

The first outer peripheral surface 80 is provided with a recess 90 for engaging with the cover member 52 described later. The recess 90 is provided, for example, at the end of the first outer peripheral surface 80 on the first end 60a side. The recesses 90 are provided at a plurality of locations, for example, two locations in the circumferential direction R around the central axis C of the body portion 60 at equal intervals.

The second outer peripheral surface 81 is connected to the end of the first outer peripheral surface 80 on the second end 60b side. The second outer peripheral surface 81 has, for example, a larger diameter than the first outer peripheral surface 80 . As a result, between the first outer peripheral surface 80 and the second outer peripheral surface 81, an end surface 82 is formed as an annular contact portion facing in the axial direction X (parallel to the radial direction Y). This end surface 82 abuts on a first end surface 152 (to be described later) of the conductive member 51 when the conductive member 51 is inserted into the first outer peripheral surface 80, and functions as a stopper.

The second outer peripheral surface 81 is provided with projections 91 for engaging with the cover member 52 which will be described later. The protrusion 91 protrudes outward in the radial direction Y. As shown in FIG. The protrusion 91 is provided, for example, near the end of the second outer peripheral surface 81 on the side of the second end 60b. The protrusions 91 are provided at a plurality of locations, for example, two locations in the circumferential direction R around the central axis C of the body portion 60 at equal intervals. The recess 90 and the protrusion 91 are provided at the same position in the circumferential direction R of the main body 60, for example.

The body portion 60 has a first inner peripheral surface 120, a second inner peripheral surface 121, a third inner peripheral surface 122, a fourth inner peripheral surface 123 and a fifth inner peripheral surface 124 in this order.

The first inner peripheral surface 120, the second inner peripheral surface 121, the third inner peripheral surface 122, the fourth inner peripheral surface 123 and the fifth inner peripheral surface 124 are the outer peripheral surfaces 11a of the

tubes

11 and 12, The diameter is larger than 12a.

The first inner peripheral surface 120 and the second inner peripheral surface 121 are located closer to the first end portion 60a in the axial direction X than the connecting portion 62, and the third inner peripheral surface 122 and the fourth inner peripheral surface The surface 123 and the fifth inner peripheral surface 124 are located closer to the second end 60b in the axial direction X than the connecting portion 62 is.

The second inner peripheral surface 121 has a smaller diameter than the first inner peripheral surface 120 . Thereby, an annular end surface 125 facing the first end 60a in the axial direction X is formed between the second inner peripheral surface 121 and the first inner peripheral surface 120 .

The third inner peripheral surface 122 has a smaller diameter than the fourth inner peripheral surface 123 , and the fourth inner peripheral surface 123 has a smaller diameter than the fifth inner peripheral surface 124 . Therefore, between the third inner peripheral surface 122 and the fourth inner peripheral surface 123, an annular end surface 126 facing the second end 60b in the axial direction X is formed. An annular end face 127 facing the second end 60 b in the axial direction X is formed between 123 and the fifth inner peripheral face 124 .

The total length of the first inner peripheral surface 120 and the second inner peripheral surface 121 in the axial direction X is the length of the third inner peripheral surface 122, the fourth inner peripheral surface 123 and the fifth inner peripheral surface 124. It is shorter than the overall length in the axial direction X. For example, the second inner peripheral surface 121 and the third inner peripheral surface 122 have the same length in the axial direction X, and the first inner peripheral surface 120 and the fourth inner peripheral surface 123 have the same length in the axial direction X. are equal to each other.

The intervening portion 61 protrudes from the main body portion 60 toward the central axis C and has an annular convex shape around the central axis C of the main body portion 60 . The intervening portion 61 is provided inside the body portion 60 closer to the first end portion 60 a than the center of the body portion 60 in the axial direction X. As shown in FIG. The intervening portion 61 has annular side peripheral surfaces 130 on both sides in the axial direction X and an annular inner peripheral surface 131 on the central axis C side.

The side peripheral surfaces 130 are formed to protrude outward in the axial direction X, respectively. The side peripheral surface 130 is composed of, for example, a first inclined surface 140 located outside in the radial direction Y and a second inclined surface 141 located inside in the radial direction Y. As shown in FIG. The first inclined surface 140 and the second inclined surface 141 are connected at the center in the radial direction Y. As shown in FIG. As a result, the side peripheral surface 130 has a top portion where the center in the radial direction Y protrudes the most.

The inner peripheral surface 131 is a flat surface with a constant diameter. The diameter of the inner peripheral surface 131 is approximately the same as the inner peripheral surfaces of the

tubes

11 and 12, for example.

The connecting portion 62 protrudes from between the second inner peripheral surface 121 and the third inner peripheral surface 122 of the main body portion 60 toward the central axis C, and is formed in an annular shape around the central axis C of the main body portion 60. .

The conductive member 51 shown in FIGS. 5, 8 and 9 is arranged on the outer peripheral surface of the joint member 50 and interposed between the joint member 50 and the cover member 52. The conductive member 51 is made of, for example, carbon or metal silicon. The material of the conductive member 51 is not limited to this, and may be metal such as stainless steel (SUS430), steel (SS400), pre-hardened steel (NAK55), or spring material (SUS304WPB, SUS316WPA). .

The conductive member 51 is formed in an annular shape around the central axis C. The conductive member 51 has an outer peripheral surface 150 and an inner peripheral surface 151 with a constant diameter. The inner peripheral surface 151 has substantially the same diameter as the first outer peripheral surface 80 of the body portion 60 of the joint member 50 . The outer peripheral surface 150 has substantially the same diameter as a second inner peripheral surface 161 described later of the cover member 52 or a smaller diameter than the second inner peripheral surface 161 . The thickness in the radial direction Y of the conductive member 51 is approximately the same as the width in the radial direction Y of the end face 82 of the main body 60, for example. The conductive member 51 has a length in the axial direction X that is shorter than the first outer peripheral surface 80 of the body portion 60 of the joint member 50 . The conductive member 51 has a first end face 152 and a second end face 153 on both end faces in the axial direction X. As shown in FIG.

As shown in FIGS. 5, 10 and 11, the cover member 52 has a substantially cylindrical shape. The cover member 52 is made of PTFE having a higher melting point than the joint member 50 and the intervening member 53 or PFA having the same melting point. The cover member 52 has a first inner peripheral surface 160 and a second inner peripheral surface 161 . The first inner peripheral surface 160 and the second inner peripheral surface 161 are provided in this order from the first end portion 52a of the cover member 52 in the axial direction X toward the second end portion 52b. Note that when the joint member 50, the conductive member 51 and the cover member 52 are assembled, the first end portion 60a side of the body portion 60 of the joint member 50, the second end surface 153 side of the conductive member 51, The first end portion 52a side of the cover member 52 corresponds to the second end portion 60b side of the body portion 60 of the joint member 50, the first end surface 152 side of the conductive member 51, and the cover member 52 side. , and the second end 52b side thereof correspond to each other.

The first inner peripheral surface 160 is provided near the first end 52 a of the cover member 52 . The first inner peripheral surface 160 has a smaller diameter than the second inner peripheral surface 161 . As a result, an end surface 162 is formed between the first inner peripheral surface 160 and the second inner peripheral surface 161 as an annular pressing portion facing the second end 52b in the axial direction X. As shown in FIG. The end surface 162 can cover and press the second end surface 153 of the conductive member 51 attached to the joint member 50 .

As shown in FIG. 12, the first inner peripheral surface 160 is provided with projections 170 that engage with the recesses 90 of the body portion 60 of the joint member 50 . For example, the projections 170 are provided at a plurality of locations, for example, two locations in the circumferential direction R around the central axis C of the cover member 52 at equal intervals.

As shown in FIGS. 5, 10 and 11, the second inner peripheral surface 161 is formed in the axial direction X from the first inner peripheral surface 160 to the second end 52b of the cover member 52. As shown in FIGS. The second inner peripheral surface 161 has a substantially constant diameter in the axial direction X. As shown in FIG. The second inner peripheral surface 161 covers the outer peripheral surface 150 of the conductive member 51 when the cover member 52 is attached to the joint member 50 .

On the second inner peripheral surface 161, a protruding portion 180 slightly protruding toward the center axis C side and extending in the axial direction X is formed. The ridges 180 are provided at a plurality of locations in the circumferential direction R. Further, as shown in FIG. 13 , a through hole 190 that engages with the projection 91 of the body portion 60 of the joint member 50 is provided near the second end portion 52b of the second inner peripheral surface 161 . The through hole 190 penetrates the cover member 52 in the radial direction Y (thickness direction). The through holes 190 are provided, for example, at a plurality of locations, for example, two locations in the circumferential direction R around the central axis C of the cover member 52 at equal intervals. A groove 191 is formed in the second end portion 52 b corresponding to the through hole 190 of the second inner peripheral surface 161 . This groove 191 serves as a guide through which the protrusion 91 of the main body portion 60 of the joint member 50 passes when the cover member 52 is inserted into the joint member 50 .

The cover member 52 has an outer peripheral surface 195 with a constant diameter. When the cover member 52 is combined with the joint member 50 , the end face of the second end 52 b side in the axial direction X is aligned with the end face of the body portion 60 of the joint member 50 on the second end 60 b side. It is configured.

The joint member 50 and the cover member 52 have engaging mechanisms that engage with each other. The engagement mechanism is composed of the recess 90 and the protrusion 170, and the protrusion 91 and the through hole 190 described above.

The intervening member 53 shown in FIGS. 5, 14 and 15 is interposed between the joint member 50 and the outer

peripheral surfaces

11a and 12a of the

pipes

11 and 12. The intervening member 53 is made of a resin having a melting point similar to that of the joint member 50, such as PFA. The interposed member 53 has a first outer peripheral surface 200, a second outer peripheral surface 201, and a third outer peripheral surface 202 in this order from the front end portion 53a side to the rear end portion 53b side.

The second outer peripheral surface 201 has a larger diameter than the first outer peripheral surface 200 , and the third outer peripheral surface 202 has a larger diameter than the second outer peripheral surface 201 . As a result, an annular end surface 203 is formed between the first outer peripheral surface 200 and the second outer peripheral surface 201 and faces the tip portion 53a in the axial direction X. As shown in FIG. An annular end surface 204 facing toward the tip portion 53 a in the axial direction X is formed between the second outer peripheral surface 201 and the third outer peripheral surface 202 .

The first outer peripheral surface 200 has substantially the same diameter as the second inner peripheral surface 121 and the third inner peripheral surface 122 of the body portion 60 of the joint member 50 . The first outer peripheral surface 200 has the same length in the axial direction X as the second inner peripheral surface 121 and the third inner peripheral surface 122 of the body portion 60 .

The second outer peripheral surface 201 has the same diameter as the first inner peripheral surface 120 and the fourth inner peripheral surface 123 of the body portion 60 of the joint member 50 . The second outer peripheral surface 201 has the same length in the axial direction X as the first inner peripheral surface 120 and the fourth inner peripheral surface 123 of the body portion 60 .

The third outer peripheral surface 202 has the same diameter as the fifth inner peripheral surface 124 of the body portion 60 of the joint member 50 and the first inner peripheral surface 160 of the cover member 52 . The third outer peripheral surface 202 has the same length in the axial direction X as the fifth inner peripheral surface 124 of the body portion 60 and the first inner peripheral surface 160 of the cover member 52 .

Therefore, as shown in FIGS. 5 and 12, when the intervening member 53 is interposed between the joint member 50 and the outer peripheral surface 11a of the pipe 11 on the second end portion 60b side of the body portion 60 of the joint member 50, , the first outer peripheral surface 200, the second outer peripheral surface 201 and the third outer peripheral surface 202 are respectively the third inner peripheral surface 122, the fourth inner peripheral surface 123 and the fifth inner peripheral surface of the body portion 60. 124. 5 and 13, when the intervening member 53 is interposed between the joint member 50 and the outer peripheral surface 12a of the pipe 12 on the first end portion 60a side of the body portion 60 of the joint member 50, , the first outer peripheral surface 200, the second outer peripheral surface 201 and the third outer peripheral surface 202 are respectively the second inner peripheral surface 121 of the body portion 60, the first inner peripheral surface 120 and the first outer peripheral surface 120 of the cover member 52. conforms to the inner peripheral surface 160 of the .

As shown in FIG. 16, the intervening member 53 has an inner peripheral surface 220 with the same diameter as the outer

peripheral surfaces

11a, 12a of the

pipes

11, 12. An engaging portion 221 is formed at the tip of the inner peripheral surface 220 to be engaged with the engaged portion 30 of the end surface 20 of the

pipes

11 and 12 .

The locking portion 221 protrudes inward (on the side of the central axis C) and is annularly formed around the central axis C. The locking portion 221 has an inclined surface 222 facing the rear end portion 53b. The inclined surface 222 is formed so as to gradually approach the rear end portion 53b from the front end portion 53a side as it approaches the central axis C side. By matching the inclined surface 222 with the inclined surface 40 of the locked portion 30 , the locking portion 221 is locked to the locked portion 30 .

As shown in FIG. 5, when the end surfaces 20 of the

pipes

11 and 12 come into contact with or close to the intervening portion 61 of the joint member 50, the rear end portion 53b of the intervening member 53 is pushed into the main body portion of the joint member 50. As shown in FIG. The rear end 53b of the intervening member 53 is aligned with the end face of the second end 60b of the cover member 52, and the end face of the first end 52a of the cover member 52 is aligned. That is, the intervening member 53 has a function of confirming that the end surfaces of the

pipes

11 and 12 are in contact with or close to the intervening portion 61 of the joint member 50 .

Next, a method for manufacturing the joint structure 1 configured as above will be described.

First, as shown in FIG. 1,

pipes

11 and 12 to be connected, a joint member 50 of the joint device 10, a conductive member 51, a cover member 52 and two intervening members 53 are prepared. Next, the end faces 20 of the

tubes

11 and 12 are machined with a special jig to form engaged portions 30 on the end faces 20 of the

tubes

11 and 12 as shown in FIG. An intervening member 53 is attached to the end surface 20 of each

tube

11, 12 as shown in FIG. At this time, the engaging portion 221 of the distal end portion 53a of the intervening member 53 is engaged with the engaged portion 30 of the end surface 20 of the

pipes

11 and 12 .

On the other hand, as shown in FIG. 17, the joint member 50, the conductive member 51 and the cover member 52 are combined with each other. For example, first, as shown in FIG. 18, the conductive member 51 is inserted onto the first outer peripheral surface 80 of the body portion 60 of the joint member 50 from the first end portion 60a side of the body portion 60 . The first end face 152 of the conductive member 51 is inserted until it contacts the end face 82 . Next, as shown in FIG. 17, the cover member 52 is inserted onto the conductive member 51 inserted into the body portion 60 from the first end portion 60a side of the body portion 60 . At this time, the end surface 162 of the cover member 52 covers and presses the second end surface 153 of the conductive member 51 , and the second inner peripheral surface 161 of the cover member 52 covers the outer peripheral surface 150 of the conductive member 51 . Also, the projection 91 of the body portion 60 fits into the through hole 190 of the cover member 52 , and the projection 170 of the cover member 52 fits into the recess 90 of the body portion 60 . In this way, the joint member 50 and the cover member 52 engage with each other with the conductive member 51 built therein. At this time, the conductive member 51 is not exposed to the outside. Either the process of assembling the

pipes

11 and 12 and the intermediate member 53 or the process of assembling the joint member 50, the conductive member 51 and the cover member 52 may be performed first.

Next, the structure of the joint member 50, the conductive member 51 and the cover member 52 is placed between the

pipes

11 and 12 as shown in FIG. Then, the end faces 20 of the

pipes

11 and 12 are aligned so that the intervening portion 61 of the joint member 50 is sandwiched between the end faces 20 of the

pipes

11 and 12 as shown in FIG. At this time, the intervening member 53 is fitted between the outer

peripheral surfaces

11 a and 12 a of the

pipes

11 and 12 and the body portion 60 of the joint member 50 . Then, as shown in FIG. 5 , on the pipe 11 side, the pipe 11 is pushed inside the body portion 60 until the rear end portion 53b of the intervening member 53 is aligned with the end face of the second end portion 60b of the body portion 60 of the joint member 50 . , and on the tube 12 side, the tube 11 is inserted inside the body portion 60 until the rear end portion 53b of the intervening member 53 is aligned with the end surface of the first end portion 52a of the cover member 52 . Then, the user can confirm that the pipe 11 is sufficiently fitted into the joint member 50 by aligning the rear end portion 53b of the intervening member 53 with the end surface of the second end portion 60b of the body portion 60 of the joint member 50. It is confirmed that the rear end portion 53b of the intervening member 53 is aligned with the end surface of the first end portion 52a of the cover member 52, and that the pipe 12 is sufficiently fitted into the joint member 50.

Next, the electromagnetic induction type welder is operated to electromagnetically induce the conductive member 51 of the joint device 10, causing the conductive member 51 to generate heat. The heat of the conductive member 51 is transmitted to, for example, the surrounding joint member 50 and the interposed member 53, and the body portion 60, the connection portion 62 and the interposed portion 61, and the interposed member 53 of the joint member 50 around the conductive member 51 They melt and weld together. The

pipes

11 and 12 are thus connected to each other via the joint member 50 . After that, the welding machine is stopped, and the work of connecting the

pipes

11 and 12 is completed.

According to this embodiment, the joint device 10 in which the conductive member 51 is arranged on the first outer peripheral surface 80 of the joint member 50 and the cover member 52 covers the conductive member 51 from the outside is connected to the two pipes 11 . , 12, the intermediate portion 61 of the joint member 50 is arranged between the end faces 20 of the two

pipes

11, 12, and the body portion 60 of the joint member 50 presses the outer peripheral surface of the connecting portion of the two

pipes

11, 12. 11a and 12a are covered, and in that state, the conductive member 51 is heated by electromagnetic induction, and the periphery of the intervening portion 61 of the joint member 50 is welded to each other, and the two

pipes

11 and 12 are connected to each other via the joint member 50. can be connected. As a result, the two

pipes

11, 12 and the joint member 50 can be simultaneously and easily connected using electromagnetic induction, so that the time required for connecting the joint member 50 and the

pipes

11, 12 can be greatly reduced. be able to. Moreover, since the contact area between the joint member 50 and the

pipes

11 and 12 can be increased, the welding strength can be improved.

The joint member 50 is configured such that the conductive member 51 is inserted into the body portion 60 from the axial direction X, and the conductive member 51 that is inserted contacts the first end face 152 on the insertion direction side. It has an end face 82 as a portion. This simplifies the work of attaching the conductive member 51 to the joint member 50 .

The cover member 52 is configured to be insertable from the axial direction X of the body portion 60 into the body portion 60 of the joint member 50 into which the conductive member 51 is inserted. This simplifies the work of attaching the cover member 52 to the joint member 50 .

The cover member 52 has an end surface 162 as a pressing portion that presses the second end surface 153 in the axial direction X of the conductive member 51 . As a result, the cover member 52 and the joint member 50 can firmly cover the conductive member 51 and prevent the conductive member 51 from being exposed to the outside.

The joint member 50 and the cover member 52 have an engagement mechanism that engages the joint member 50 and the cover member 52 with each other. This simplifies the work of attaching the cover member 52 to the joint member 50 . In addition, it is possible to prevent the conductive member 51 from being accidentally exposed to the outside.

Since the joint device 10 includes the intervening member 53 , it is possible to suppress the formation of gaps between the joint device 10 and the

pipes

11 and 12 . As a result, the overall contact strength between the joint device 10 and the

pipes

11, 12 can be improved.

Since the intervening member 53 has locking portions 221 that are engaged with the end faces 20 of the

pipes

11 and 12, the work of attaching the intervening member 53 to the

pipes

11 and 12 is simplified.

The intervening member 53 has a function of confirming that the end faces 20 of the

pipes

11 and 12 are in contact with or close to the intervening portion 61 of the joint member 50 . Although the contact portion between the end surfaces 20 of the

pipes

11 and 12 and the intervening portion 61 of the joint member 50 is located at a position that is difficult to see, the end surfaces 20 of the

pipes

11 and 12 and the interposed portion 61 of the joint member 50 are distantly adhered. It can prevent things from not being done enough. In addition, since the work for confirming the attachment of the

pipes

11 and 12 and the joint device 10 is simplified, the attachment work can be completed in a short time.

The intervening portion 61 of the joint member 50 protrudes from the main body portion 60 toward the central axis thereof and has an annular convex shape around the central axis C of the main body portion 60 . As a result, the welding area between the joint member 50 and the end surfaces 20 of the

pipes

11 and 12 is widened, and the welding strength is improved.

The intervening portion 61 of the joint member 50 is formed so that both side surfaces in the axial direction X protrude outward in the axial direction X, respectively. As a result, the welding area between the joint member 50 and the end faces 20 of the

pipes

11 and 12 is widened, and the welding strength is improved.

It is difficult to use a material such as a conductive member for piping for semiconductor manufacturing equipment in order to prevent the generation of particles. can also be used for fittings.

Although the preferred embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to such examples. It is obvious that a person skilled in the art can conceive various modifications or modifications within the scope of the idea described in the claims, and these naturally belong to the technical scope of the present invention. understood as a thing.

For example, in the above embodiment, the shapes of the joint member 50, the conductive member 51, the cover member 52, and the intervening member 53 of the joint device 10 are not limited to those of the above embodiment. The joint device 10 may not include the intervening member 53 . The shapes of the

pipes

11 and 12 are not limited to those of the above embodiment, and the present invention can be applied to any known pipe joints such as L-shaped and T-shaped.

The present invention is useful in shortening the time required to connect joints and pipes using the welding method.

Reference Signs List 1 joint structure 10

joint device

11, 12 pipe 50 joint member 51 conductive member 52 cover member 60 body portion 61 intervening portion C central axis X axial direction Y radial direction R circumferential direction

Claims

a joint member having an annular main body covering the outer periphery of a connecting portion of two connected pipes and an intervening portion interposed between the end surfaces of the two connected pipes;
a conductive member disposed on the outer peripheral surface of the joint member corresponding to the intervening portion and generating heat by electromagnetic induction;
and an annular cover member that covers the conductive member from the outside.
The joint member is configured such that the conductive member is axially inserted into the body portion, and has a contact portion that contacts a first end surface of the inserted conductive member on the insertion direction side. 2. A coupling device according to claim 1.
The joint device according to claim 2, wherein the cover member is configured to be insertable from the axial direction of the main body portion of the joint member into which the conductive member is inserted.
The joint device according to claim 2 or 3, wherein the cover member has a pressing portion that presses the second axial end surface of the conductive member.
The joint device according to any one of claims 1 to 4, wherein said joint member and said cover member have an engaging mechanism for engaging said joint member and said cover member with each other.
The joint device according to any one of claims 1 to 5, further comprising an annular intervening member that can be interposed between the outer peripheral surface of the connection portion of the two connected pipes and the body portion of the joint member. .
The joint device according to any one of claims 1 to 6, wherein the intervening member has a locking portion that locks onto the end surface of the connected pipe.
The joint according to any one of claims 1 to 7, wherein the intervening member has a function of confirming that the end faces of the two connected pipes are in contact with or close to the intervening portion of the joint member. Device.
The intervening portion of the joint member according to any one of claims 1 to 8, wherein the intervening portion of the joint member protrudes from the main body portion toward the central axis thereof and has an annular ridge shape around the axis of the main body portion. fitting device.
The joint device according to any one of claims 1 to 9, wherein the intermediate portion of the joint member is formed such that both axial side surfaces project outward in the axial direction.
The joint device according to any one of claims 1 to 10, wherein the connected pipe is a pipe for semiconductor manufacturing equipment.
A joint device according to any one of claims 1 to 11;
and two connected pipes,
A joint structure in which the circumferences of the intervening portions of the joint member are welded to each other, and the two connected pipes are connected to each other via the joint member.
a joint member having an annular main body portion and an intermediate portion; a conductive member disposed on an outer peripheral surface of the joint member corresponding to the intermediate portion and generating heat by electromagnetic induction; and a cover member is attached to two connected pipes, the intermediate portion is arranged between the end surfaces of the two connected pipes, and the body portion connects the two connected pipes. A first step of covering the outer peripheral surface of
and a second step of generating heat in the conductive member by electromagnetic induction so that at least the periphery of the intervening portion of the joint member is welded to each other and the two pipes to be connected are connected to each other via the joint member. Also, a manufacturing method of the joint structure.
14. The method of manufacturing a joint structure according to claim 13, wherein in the first step, an annular interposed member is interposed between the outer peripheral surface of the connecting portion of the two connected pipes and the main body portion of the joint member.
15. The manufacturing of the joint structure according to claim 14, wherein in the first step, the intervening member confirms that the end surfaces of the two connected pipes are in contact with or close to the intervening portion of the joint member. Method.
The manufacturing method of the joint structure according to any one of claims 13 to 15, comprising a step of assembling the joint member, the conductive member and the cover member before the first step.