WO2022166378A1 - 一种检测条纹对比度变化的迈克尔逊干涉光纤温度传感器 - Google Patents

一种检测条纹对比度变化的迈克尔逊干涉光纤温度传感器 Download PDF

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WO2022166378A1
WO2022166378A1 PCT/CN2021/136286 CN2021136286W WO2022166378A1 WO 2022166378 A1 WO2022166378 A1 WO 2022166378A1 CN 2021136286 W CN2021136286 W CN 2021136286W WO 2022166378 A1 WO2022166378 A1 WO 2022166378A1
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optical fiber
semiconductor
photodetector
optical
temperature sensor
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PCT/CN2021/136286
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English (en)
French (fr)
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王文华
师文庆
熊正烨
吴伟娜
张炎生
罗元政
谢玉萍
费贤翔
黄江
赖学辉
王楚虹
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广东海洋大学
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Priority to US17/741,834 priority Critical patent/US11448558B2/en
Publication of WO2022166378A1 publication Critical patent/WO2022166378A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4215—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical elements being wavelength selective optical elements, e.g. variable wavelength optical modules or wavelength lockers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4236—Fixing or mounting methods of the aligned elements
    • G02B6/4237—Welding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4236—Fixing or mounting methods of the aligned elements
    • G02B6/4239—Adhesive bonding; Encapsulation with polymer material
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12138—Sensor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12159—Interferometer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/241—Light guide terminations
    • G02B6/243—Light guide terminations as light absorbers

Definitions

  • the invention relates to the intersection of optical fiber Michelson interference and semiconductor materials, in particular to a Michelson interference optical fiber temperature sensor for detecting fringe contrast changes.
  • the optical fiber sensor has electrical insulation, anti-electromagnetic interference, high sensitivity, high temperature resistance and corrosion resistance, and the sensor end is passive, so it is intrinsically safe and can be transmitted over long distances without signal conversion and amplifier; at the same time, the optical fiber sensor is small in size and light in weight.
  • Communication, civil engineering, petrochemical, aerospace and other fields have broad application prospects.
  • Michelson fiber interference technology is a main technology commonly used in fiber optic sensors. It has the advantages of simple structure and low technical requirements for production. It is often used in In the measurement of air refractive index and underwater acoustic signal, the measurement process mainly depends on the counting of interference fringes or the measurement of fringe movement, which requires high signal demodulation, especially in high-precision and high-sensitivity measurement occasions.
  • Michelson fiber interference technology can also be used for the measurement of ambient temperature in theory.
  • the light source can be a broadband light source and a narrow-band laser light source.
  • fringe counting or fringe moving methods are usually used for measurement.
  • Signal demodulation is complex and requires When the signal demodulation method is not perfect, the sensitivity and accuracy of the sensor will be reduced; when the broadband light source is used for measurement, the interference effect is very low, and the interference peak tracking is usually used to achieve parameter measurement, but the peak tracking measurement method has shortcomings such as low accuracy. Or use other precision instruments to track interference peaks to achieve temperature measurement, but often lead to complex and expensive systems. Therefore, there are few reports on the optical fiber temperature sensor based on Michelson interference, and it is necessary to provide a Michelson interference optical fiber temperature sensor that detects the change of fringe contrast, so as to overcome the current deficiencies and realize temperature measurement.
  • the purpose of the present invention is to provide a Michelson interference optical fiber temperature sensor for detecting the change of fringe contrast, so as to solve the technical problems existing in the prior art. With the characteristics of high precision and high precision, high-precision temperature measurement can be achieved without relying on other precision instruments.
  • the present invention provides a Michelson interference fiber temperature sensor for detecting fringe contrast changes, comprising: a light source, a fiber coupler, a coarse wavelength division multiplexer, a first photodetector, a second photodetector, a processing circuit, and a display device; the light source, the fiber coupler, and the coarse wavelength division multiplexer are connected in sequence, and the coarse wavelength division multiplexer is respectively connected to the first photodetector, the second photoelectric a detector is connected, the first photodetector and the second photodetector are connected to the processing circuit, and the processing circuit is connected to the display device;
  • the optical fiber coupler is also connected with a first optical fiber and a second optical fiber, and one end of the first optical fiber or the second optical fiber away from the optical fiber coupler is connected with a semiconductor;
  • the light source is used for emitting an optical signal
  • the optical fiber coupler is used to couple and distribute the optical signal emitted by the light source and the optical signal returned by the first optical fiber and the second optical fiber;
  • the coarse wavelength division multiplexer is used for demultiplexing the optical signals returned by the first optical fiber and the second optical fiber to obtain a broadband optical signal and a narrowband optical signal;
  • the first photodetector and the second photodetector are respectively configured to receive the broadband optical signal and the narrowband optical signal obtained by demultiplexing by the coarse wavelength division multiplexer;
  • the processing circuit is used to perform signal processing on the broadband optical signal and the narrowband optical signal received by the first photodetector and the second photodetector, detect the change of the contrast of the interference fringes, and demodulate the temperature based on the change of the contrast of the interference fringes. Test results;
  • the display device is used for displaying the temperature detection result obtained by demodulation.
  • the first optical fiber and the second optical fiber are single-mode or multi-mode optical fibers, and the optical fiber coupler is a 3dB coupler.
  • the second optical fiber is connected to the semiconductor, the length of the first optical fiber is approximately equal to the sum of the lengths of the second optical fiber and the semiconductor, and the first optical fiber and the second optical fiber are in the same environment middle.
  • the end face of the end of the first optical fiber away from the optical fiber coupler is coated with a first reflective film
  • One end of the semiconductor is connected to the second optical fiber, and the end face of the other end is a cleavage surface, and the cleavage surface is coated with a second reflective film.
  • the end surface of the semiconductor coated with the second reflective film is perpendicular to the axis of the semiconductor, and the end surface of the semiconductor connected to the second optical fiber is a first inclined surface.
  • the second optical fiber is sleeved with a first sleeve
  • the end face of the second optical fiber connected to the semiconductor is a second inclined surface
  • the second inclined surface of the second optical fiber is connected to the semiconductor.
  • the first sleeve and the semiconductor are sleeved with a second sleeve, and the second optical fiber and the semiconductor are fixedly assembled through the second sleeve.
  • the second sleeve is a metal sleeve.
  • the material of the semiconductor is gallium arsenide or a semiconductor material whose transmittance or absorbance change is larger than that of gallium arsenide when the wavelength of incident light is the same.
  • the line width of the narrowband optical signal obtained by demultiplexing by the coarse wavelength division multiplexer is ⁇ 5 nm
  • the line width of the broadband optical signal is ⁇ 40 nm.
  • the processing circuit amplifies the optical signals detected by the first photodetector and the second photodetector
  • the output of the second photodetector is divided by the first photodetector From the output of the detector, the phase information and phase change information of the interference fringes are obtained, and then the change information of the contrast of the interference fringes is obtained, and the change of the ambient temperature is obtained according to the change information of the contrast of the interference fringes.
  • the invention makes full use of the advantage that the interference signal of the optical fiber interferometer can realize high-precision measurement, and at the same time, the sensor is designed to detect the contrast change, that is, the light intensity detection, so as to simplify the signal demodulation and realize the high-sensitivity and high-precision measurement.
  • the optical signal from the light source can return to the same value of optical power after entering the first optical fiber and the second optical fiber respectively, reaching the coupler to generate interference fringes, and the contrast is equal to 1.
  • the transmittance of the semiconductor changes greatly.
  • the optical power returned by the second fiber has a relatively large change, which causes the interference fringes to move and the contrast also changes greatly.
  • the coarse wavelength division multiplexer is divided into two fiber numbers for detection and processing to determine the contrast. At the same time, it can eliminate the influence of the signal fluctuation of the light source and the change of the fiber loss, and demodulate the corresponding ambient temperature.
  • the Michelson interference optical fiber temperature sensor for detecting fringe contrast change proposed by the invention has a simple and fast manufacturing process, and the sensor has the characteristics of safety and reliability, stable signal, low cost, high sensitivity and high precision, and can be realized without relying on other precise instruments High precision measurement of temperature.
  • FIG. 1 is a schematic structural diagram of a Michelson interference optical fiber temperature sensor for detecting fringe contrast changes according to the present invention
  • FIG. 2 is a schematic diagram of the assembly of the second optical fiber and the semiconductor in the embodiment of the present invention.
  • this embodiment provides a Michelson interference optical fiber temperature sensor for detecting fringe contrast changes, including:
  • the optical fiber coupler is also connected with a first optical fiber and a second optical fiber, and one end of the first optical fiber or the second optical fiber away from the optical fiber coupler is connected with a semiconductor;
  • the light source adopts a broadband light source for emitting optical signals
  • the optical fiber coupler is used to couple and distribute the optical signal emitted by the light source and the optical signal returned by the first optical fiber and the second optical fiber;
  • the coarse wavelength division multiplexer is used for demultiplexing the optical signals returned by the first optical fiber and the second optical fiber to obtain a broadband optical signal and a narrowband optical signal;
  • the first photodetector and the second photodetector are respectively configured to receive the broadband optical signal and the narrowband optical signal demultiplexed by the coarse wavelength division multiplexer;
  • the processing circuit is used to perform signal processing on the broadband optical signal and the narrowband optical signal received by the first photodetector and the second photodetector, detect the change of the contrast of the interference fringes, and demodulate the temperature based on the change of the contrast of the interference fringes. Test results;
  • the display device is used for displaying the temperature detection result obtained by demodulation.
  • the first optical fiber and the second optical fiber are single-mode or multi-mode optical fibers; the optical fiber coupler is a 3dB coupler, so that the contrast ratio of the interference fringes is as close to 1 as possible.
  • the second optical fiber is connected to the semiconductor, the length of the first optical fiber is approximately equal to the sum of the lengths of the second optical fiber and the semiconductor, and the length tolerance is ⁇ 0.5mm; at the same time, the The first optical fiber and the second optical fiber are in the same environment, so that the influence of the environment on the first optical fiber and the second optical fiber is basically the same, and the interference of the environment to the interference test signal is avoided.
  • the end face of the end of the first optical fiber away from the optical fiber coupler is coated with a first reflective film
  • the semiconductor is a cylinder with a diameter of 1-2mm, the axis length of the semiconductor is 0.1-10mm, one end of the semiconductor is connected to the second optical fiber, and the other end is a cleavage surface, and the cleavage surface is plated There is a second reflective film, so that the optical powers of the optical signals returned by the first optical fiber and the second optical fiber to the optical fiber coupler are substantially equal.
  • the end face of the semiconductor coated with the second reflective film is perpendicular to the axis of the semiconductor, the end face connecting the semiconductor and the second optical fiber is a first inclined face, and the first inclined face is connected to the axis of the semiconductor.
  • the included angle between the axes of the semiconductors is 6°-20°.
  • the second optical fiber is sleeved with a first sleeve, and the second optical fiber is bonded in the first sleeve by optical ultraviolet glue, or fixed in the first sleeve by laser welding.
  • the end face connecting the second optical fiber and the semiconductor is a second inclined surface, and the included angle between the second inclined surface and the axis of the first sleeve is 6°-20°;
  • the first The axis of the sleeve is 5-7mm long and the diameter is 1-2mm;
  • the second inclined surface of the second optical fiber corresponds to the first inclined surface of the semiconductor, and the first sleeve is sleeved with the outside of the semiconductor.
  • the semiconductor end-face reflects the power of the optical signal back to the fiber coupler, thereby reducing interference with temperature testing.
  • the method for assembling the second optical fiber and the semiconductor is as follows:
  • the second optical fiber and the semiconductor are packaged in the second sleeve to complete the assembly of the second optical fiber and the semiconductor.
  • the second sleeve is a metal sleeve with high thermal conductivity, specifically, the thermal conductivity is greater than 380W/(m ⁇ K).
  • the material of the semiconductor is gallium arsenide, or other semiconductor materials whose transmittance or absorbance change is greater than that of gallium arsenide when the wavelength of the incident light is the same;
  • the first optical fiber is not connected to the semiconductor, and the returned optical power basically does not change, while the second optical fiber is connected to the semiconductor.
  • the contrast of the interference fringes formed by the two optical fibers changes greatly, and finally the accurate and sensitive measurement of the ambient temperature is realized.
  • the coarse wavelength division multiplexer demultiplexes to obtain a narrowband optical signal with a linewidth of ⁇ 5 nm and a broadband optical signal with a linewidth of ⁇ 40 nm, so that the interference effect of the broadband optical signal basically disappears, and the first optoelectronic
  • the optical signal received by the detector is only the information of the power of the light source, fluctuation and fiber loss, and the information of the change of the optical fiber coupler splitting ratio caused by the change of the light source; while the narrow-band optical signal still has a good interference effect, the second photodetector
  • the received optical signal contains not only the phase information, but also the information of the power of the light source, the fluctuation of the light source and the fiber loss, the information of the change of the splitting ratio of the fiber coupler caused by the change of the light source, the transmittance of the semiconductor due to the change of temperature ( or absorbance) change information
  • the processing circuit amplifies the optical signals detected by the first photodetector and the second photodet
  • the workflow of the Michelson interference optical fiber temperature sensor for detecting fringe contrast changes of the present invention is as follows:
  • the optical signal emitted by the light source After the optical signal emitted by the light source is split by the optical fiber coupler, it enters the first optical fiber and the second optical fiber respectively, and returns to the optical fiber coupler in the same way after being transmitted through the first optical fiber and the second optical fiber.
  • the broadband optical signal and the narrowband optical signal are demultiplexed by the coarse wavelength division multiplexer, and the narrowband optical signal and the broadband optical signal are respectively received by the first photodetector and the second photodetector,
  • the processing circuit performs signal processing on the optical signals received by the first photodetector and the second photodetector, detects the change of the contrast of the interference fringes, demodulates the temperature detection result based on the change of the contrast of the interference fringes, and passes the temperature detection result through the display device to display.
  • the invention makes full use of the advantage that the interference signal of the optical fiber interferometer can realize high-precision measurement, and at the same time, the sensor is designed to detect the contrast change, that is, the light intensity detection, so as to simplify the signal demodulation and realize the high-sensitivity and high-precision measurement.
  • the optical signal from the light source can return to the same value of optical power after entering the first optical fiber and the second optical fiber respectively, reaching the coupler to generate interference fringes, and the contrast is equal to 1.
  • the transmittance of the semiconductor changes greatly.
  • the optical power returned by the second fiber has a relatively large change, which causes the interference fringes to move and the contrast also changes greatly.
  • the coarse wavelength division multiplexer is divided into two fiber numbers for detection and processing to determine the contrast. At the same time, it can eliminate the influence of the signal fluctuation of the light source and the change of the fiber loss, and demodulate the corresponding ambient temperature.
  • the Michelson interference optical fiber temperature sensor for detecting fringe contrast change proposed by the invention has a simple and fast manufacturing process, and the sensor has the characteristics of safety and reliability, stable signal, low cost, high sensitivity and high precision, and can be realized without relying on other precise instruments High precision measurement of temperature.

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Abstract

一种检测条纹对比度变化的迈克尔逊干涉光纤温度传感器，包括：光源、光纤耦合器、粗波分复用器、第一光电探测器、第二光电探测器、处理电路、显示装置；光源、光纤耦合器、粗波分复用器依次连接，粗波分复用器分别与第一光电探测器、第二光电探测器连接，第一光电探测器、第二光电探测器与处理电路连接，处理电路与显示装置连接；光纤耦合器还连接有第一光纤、第二光纤，第一光纤或第二光纤远离光纤耦合器的一端连接有半导体。该检测条纹对比度变化的迈克尔逊干涉光纤温度传感器制作过程简单、快捷，传感器具有安全可靠、信号稳定、成本低、灵敏度高和精度高的特点，不依赖其他精密仪器即可实现温度的高精度测量。

Description

一种检测条纹对比度变化的迈克尔逊干涉光纤温度传感器 技术领域
本发明涉及光纤迈克尔逊干涉和半导体材料的交叉领域，特别是涉及一种检测条纹对比度变化的迈克尔逊干涉光纤温度传感器。
背景技术
光纤传感器具有电绝缘、抗电磁干扰、灵敏度高、耐高温耐腐蚀、传感器端无源，因而本质安全，无需信号转换和放大器即可远距离传输；同时，光纤传感器体积小、重量轻，因而在通信、土木工程、石油化工、航空航天等领域都有广泛的应用前景，迈克尔逊光纤干涉技术是光纤传感器常用的一种主要技术，具有结构简单、制作所需技术要求较低的优点，常用于空气折射率、水声信号的测量，测量过程主要依赖于干涉条纹的计数或者条纹移动量进行测量，对信号解调要求很高，尤其是在高精度和高灵敏度的测量场合。
迈克尔逊光纤干涉技术在理论上也可用于环境温度的测量，光源可采用宽带光源和窄带激光光源，采用窄带激光光源测量时通常采用条纹计数或条纹移动的方法测量，信号解调比较复杂且要求高，信号解调方法不完善的时候将造成传感器的灵敏度和精度降低；采用宽带光源测量时由于干涉效应非常低，通常采用干涉峰值跟踪实现参数测量，但是峰值跟踪测量法存在精度低等不足，或者借助其他精密仪器实现干涉峰值的跟踪以实现温度测量，但往往导致系统变得复杂、成本高昂。因此，有关基于迈克尔逊干涉的光纤温度传感器的报到较少，有必要提供一种检测条纹对比度变化的迈克尔逊干涉光纤温度传感 器，以克服当前的不足，实现温度的测量。
发明内容
本发明的目的是提供一种检测条纹对比度变化的迈克尔逊干涉光纤温度传感器，以解决现有技术中存在的技术问题，制作过程简单、快捷，传感器具有安全可靠、信号稳定、成本低、灵敏度高和精度高的特点，不依赖其他精密仪器即可实现温度的高精度测量。
为实现上述目的，本发明提供了如下方案：本发明提供一种检测条纹对比度变化的迈克尔逊干涉光纤温度传感器，包括：光源、光纤耦合器、粗波分复用器、第一光电探测器、第二光电探测器、处理电路、显示装置；所述光源、光纤耦合器、粗波分复用器依次连接，所述粗波分复用器分别与所述第一光电探测器、第二光电探测器连接，所述第一光电探测器、第二光电探测器与所述处理电路连接，所述处理电路与所述显示装置连接；
所述光纤耦合器还连接有第一光纤、第二光纤，所述第一光纤或第二光纤远离所述光纤耦合器的一端连接有半导体；
所述光源用于发射光信号；
所述光纤耦合器用于对所述光源发射的光信号以及所述第一光纤、第二光纤返回的光信号进行耦合、分配；
所述粗波分复用器用于对所述第一光纤、第二光纤返回的光信号进行解复用，得到宽带光信号和窄带光信号；
所述第一光电探测器、第二光电探测器分别用于接收所述粗波分 复用器解复用得到的宽带光信号和窄带光信号；
所述处理电路用于对所述第一光电探测器、第二光电探测器接收的宽带光信号和窄带光信号进行信号处理，检测干涉条纹对比度的变化，基于干涉条纹对比度的变化解调得到温度检测结果；
所述显示装置用于对解调得到的温度检测结果进行显示。
优选地，所述第一光纤、第二光纤为单模或多模光纤，所述光纤耦合器为3dB耦合器。
优选地，所述第二光纤与所述半导体连接，所述第一光纤的长度近似等于所述第二光纤与所述半导体的长度和，且所述第一光纤、第二光纤处于相同的环境中。
优选地，所述第一光纤远离所述光纤耦合器的一端的端面上镀有第一反射膜；
所述半导体一端与所述第二光纤连接，另一端的端面为解理面，所述解理面上镀有第二反射膜。
优选地，所述半导体镀有第二反射膜的端面与所述半导体的轴线垂直，所述半导体与所述第二光纤连接的端面为第一倾斜面。
优选地，所述第二光纤外部套接有第一套管，所述第二光纤与所述半导体连接的端面为第二倾斜面，所述第二光纤的第二倾斜面与所述半导体的第一倾斜面相对应，所述第一套管与所述半导体的外部套接有第二套管，通过所述第二套管对所述第二光纤和所述半导体进行固定装配。
优选地，所述第二套管为金属套管。
优选地，所述半导体的材料为砷化镓或者在入射光的波长相同的情况下，受环境温度变化影响时透射率或吸光率变化大于砷化镓的半导体材料。
优选地，所述粗波分复用器解复用得到窄带光信号的线宽≤5nm，宽带光信号的线宽≥40nm。
优选地，所述处理电路对所述第一光电探测器、所述第二光电探测器探测到的光信号进行放大处理后，将所述第二光电探测器的输出除以所述第一光电探测器的输出，得到干涉条纹的相位信息和相位变化信息，进而得到干涉条纹的对比度的变化信息，根据干涉条纹的对比度的变化信息得到环境温度的变化。
本发明公开了以下技术效果：
本发明充分利用光纤干涉仪干涉信号能实现高精度测量的优点，同时又将传感器设计为对比度变化的检测，即光强检测，达到信号解调的简化，实现高灵敏高精度的测量。常温下，光源发出的光信号分别进入第一光纤和第二光纤之后能够返回相同光功率的值，到达耦合器产生干涉条纹，对比度等于1，当温度变化时，半导体的透射率发生较大变化，第二光纤返回的光功率发生比较大的变化，从而导致干涉条纹移动的同时对比度也发生较大变化，随之由粗波分复用器分成两路光纤号分别探测后进行处理，确定对比度具体的变化量，同时又能消除光源的信号波动和光纤损耗变化的影响，解调出对应的环境温度。
本发明提出的检测条纹对比度变化的迈克尔逊干涉光纤温度传感器，其制作过程简单、快捷，传感器具有安全可靠、信号稳定、成本低、灵敏度高和精度高的特点，不依赖其他精密仪器即可实现温度的高精度测量。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1为本发明检测条纹对比度变化的迈克尔逊干涉光纤温度传感器结构示意图；
图2为本发明实施例中第二光纤与半导体的装配示意图。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
为使本发明的上述目的、特征和优点能够更加明显易懂，下面结合附图和具体实施方式对本发明作进一步详细的说明。
参照图1所示，本实施例提供一种检测条纹对比度变化的迈克尔逊干涉光纤温度传感器，包括：
光源、光纤耦合器、粗波分复用器、第一光电探测器PD1、第二光电探测器PD2、处理电路、显示装置；所述光源、光纤耦合器、粗波分复用器依次连接，所述粗波分复用器分别与所述第一光电探测器、第二光电探测器连接，所述第一光电探测器、第二光电探测器与所述处理电路连接，所述处理电路与所述显示装置连接；
所述光纤耦合器还连接有第一光纤、第二光纤，所述第一光纤或第二光纤远离所述光纤耦合器的一端连接有半导体；
所述光源采用宽带光源，用于发射光信号；
所述光纤耦合器用于对所述光源发射的光信号以及所述第一光纤、第二光纤返回的光信号进行耦合、分配；
所述粗波分复用器用于对所述第一光纤、第二光纤返回的光信号进行解复用，得到宽带光信号和窄带光信号；
所述第一光电探测器、第二光电探测器分别用于接收所述粗波分复用器解复用得到的宽带光信号和窄带光信号；
所述处理电路用于对所述第一光电探测器、第二光电探测器接收的宽带光信号和窄带光信号进行信号处理，检测干涉条纹对比度的变化，基于干涉条纹对比度的变化解调得到温度检测结果；
所述显示装置用于对解调得到的温度检测结果进行显示。
进一步地优化方案，所述第一光纤、第二光纤为单模或多模光纤； 所述光纤耦合器为3dB耦合器，使得干涉条纹的对比度尽量接近1。
进一步地优化方案，所述第二光纤与所述半导体连接，所述第一光纤的长度近似等于所述第二光纤与所述半导体的长度和，长度的公差为±0.5mm；同时，所述第一光纤、第二光纤处于相同的环境中，使得环境对所述第一光纤、第二光纤的影响基本相同，避免环境对干涉测试信号的干扰。
进一步地优化方案，所述第一光纤远离所述光纤耦合器的一端的端面上镀有第一反射膜；
所述半导体是直径为1-2mm的圆柱体，所述半导体的轴线长度为0.1-10mm，所述半导体一端与所述第二光纤连接，另一端为解理面，所述解理面上镀有第二反射膜，使得所述第一光纤、第二光纤返回所述光纤耦合器的光信号的光功率基本相等。
进一步地优化方案，所述半导体镀有第二反射膜的端面与所述半导体的轴线垂直，所述半导体与所述第二光纤连接的端面为第一倾斜面，所述第一倾斜面与所述半导体的轴线的夹角为6°-20°。
进一步地优化方案，所述第二光纤外部套接有第一套管，所述第二光纤采用光学紫外胶粘接在所述第一套管内，或采用激光焊接的方法固定在所述第一套管内；所述第二光纤与所述半导体连接的端面为第二倾斜面，所述第二倾斜面与所述第一套管的轴线的夹角为6°-20°；所述第一套管的轴线长5-7mm、直径1-2mm；所述第二光纤的第二倾斜面与所述半导体的第一倾斜面相对应，所述第一套管与所述半导体的外部套接有第二套管，通过第二套管对第二光纤和半导体进 行固定装配，具体如图2所示；其中第二光纤、半导体的连接端面设置成倾斜面的目的是急剧降低第二光纤端面和半导体端面对光信号反射回光纤耦合器的功率，从而减少对温度测试的干扰。
所述第二光纤与所述半导体装配方法为：
将所述第二光纤固定在所述第一套管内；
连同所述第一套管将所述第二光纤与所述半导体连接的端面加工为第二倾斜面；
将所述第二光纤的第二倾斜面与所述半导体的第一倾斜面平行放置，使所述第二倾斜面与所述第一倾斜面接触在一起；
将所述第二光纤、所述半导体封装在所述第二套管内，完成所述第二光纤与所述半导体的装配。
进一步地优化方案，所述第二套管为导热系数高的金属套管，具体为热传导率大于380W/(m·K)。
进一步地优化方案，所述半导体的材料为砷化镓，或者在入射光的波长相同的情况下，其他受环境温度变化影响时透射率或吸光率变化大于砷化镓的半导体材料；环境温度发生变化时，所述第一光纤没有连接半导体，返回的光功率基本上没有发生变化，而第二光纤连接有半导体，温度变化时，返回的光功率发生较大变化，从而造成第一光纤、第二光纤形成的干涉条纹对比度产生较大的变化，最终实现对环境温度的精确、灵敏测量。
进一步地优化方案，所述粗波分复用器解复用得到窄带光信号的 线宽≤5nm，宽带光信号的线宽≥40nm，使得宽带光信号的干涉效果基本消失，所述第一光电探测器接收到的光信号只是光源功率、波动和光纤损耗的信息、因光源变化引起的光纤耦合器分光比变化的信息；而窄带光信号依然有良好的干涉效果，所述第二光电探测器接收到的光信号不仅包含了相位信息，还包含了光源功率、光源波动和光纤损耗的信息、因光源变化引起的光纤耦合器分光比变化的信息、所述半导体由于温度变化引起的透射率(或吸光率)变化信息，所述处理电路对第一光电探测器、第二光电探测器探测到的光信号进行放大处理后，将第二光电探测器的输出除以第一光电探测器的输出，以消除光源功率、光源波动和光纤损耗的信息、因光源变化引起的光纤耦合器分光比变化的信息，最终剩下干涉条纹的相位信息和所述半导体由于温度变化引起的透射率(或吸光率)变化信息，根据半导体透射率或吸光率的变化信息，得到干涉条纹的对比度的变化信息，根据干涉条纹的对比度的变化信息得到环境温度的变化；因此，根据条纹对比度的变化信息，能够准确解调出环境温度的变化。
本发明检测条纹对比度变化的迈克尔逊干涉光纤温度传感器的工作流程如下：
所述光源发射的光信号经所述光纤耦合器分光后，分别进入所述第一光纤、第二光纤，经所述第一光纤、第二光纤传输后原路返回至所述光纤耦合器，由所述粗波分复用器解复用出宽带光信号和窄带光信号，所述窄带光信号、宽带光信号分别被所述第一光电探测器、第二光电探测器接收，经所述处理电路对所述第一光电探测器、第二光 电探测器接收的光信号进行信号处理，检测干涉条纹对比度的变化，基于干涉条纹对比度的变化解调得到温度检测结果，并通过所述显示装置进行显示。
本发明具有如下有益效果：
本发明充分利用光纤干涉仪干涉信号能实现高精度测量的优点，同时又将传感器设计为对比度变化的检测，即光强检测，达到信号解调的简化，实现高灵敏高精度的测量。常温下，光源发出的光信号分别进入第一光纤和第二光纤之后能够返回相同光功率的值，到达耦合器产生干涉条纹，对比度等于1，当温度变化时，半导体的透射率发生较大变化，第二光纤返回的光功率发生比较大的变化，从而导致干涉条纹移动的同时对比度也发生较大变化，随之由粗波分复用器分成两路光纤号分别探测后进行处理，确定对比度具体的变化量，同时又能消除光源的信号波动和光纤损耗变化的影响，解调出对应的环境温度。
本发明提出的检测条纹对比度变化的迈克尔逊干涉光纤温度传感器，其制作过程简单、快捷，传感器具有安全可靠、信号稳定、成本低、灵敏度高和精度高的特点，不依赖其他精密仪器即可实现温度的高精度测量。
以上所述的实施例仅是对本发明的优选方式进行描述，并非对本发明的范围进行限定，在不脱离本发明设计精神的前提下，本领域普通技术人员对本发明的技术方案做出的各种变形和改进，均应落入本发明权利要求书确定的保护范围内。

Claims (10)

  1. 一种检测条纹对比度变化的迈克尔逊干涉光纤温度传感器，其特征在于，包括：光源、光纤耦合器、粗波分复用器、第一光电探测器、第二光电探测器、处理电路、显示装置；所述光源、光纤耦合器、粗波分复用器依次连接，所述粗波分复用器分别与所述第一光电探测器、第二光电探测器连接，所述第一光电探测器、第二光电探测器与所述处理电路连接，所述处理电路与所述显示装置连接；
    所述光纤耦合器还连接有第一光纤、第二光纤，所述第一光纤或第二光纤远离所述光纤耦合器的一端连接有半导体；
    所述光源用于发射光信号；
    所述光纤耦合器用于对所述光源发射的光信号以及所述第一光纤、第二光纤返回的光信号进行耦合、分配；
    所述粗波分复用器用于对所述第一光纤、第二光纤返回的光信号进行解复用，得到宽带光信号和窄带光信号；
    所述第一光电探测器、第二光电探测器分别用于接收所述粗波分复用器解复用得到的宽带光信号和窄带光信号；
    所述处理电路用于对所述第一光电探测器、第二光电探测器接收的宽带光信号和窄带光信号进行信号处理，检测干涉条纹对比度的变化，基于干涉条纹对比度的变化解调得到温度检测结果；
    所述显示装置用于对解调得到的温度检测结果进行显示。
  2. 根据权利要求1所述的检测条纹对比度变化的迈克尔逊干涉光纤温度传感器，其特征在于，所述第一光纤、第二光纤为单模或多 模光纤，所述光纤耦合器为3dB耦合器。
  3. 根据权利要求1所述的检测条纹对比度变化的迈克尔逊干涉光纤温度传感器，其特征在于，所述第二光纤与所述半导体连接，所述第一光纤的长度近似等于所述第二光纤与所述半导体的长度和，且所述第一光纤、第二光纤处于相同的环境中。
  4. 根据权利要求1所述的检测条纹对比度变化的迈克尔逊干涉光纤温度传感器，其特征在于，所述第一光纤远离所述光纤耦合器的一端的端面上镀有第一反射膜；
    所述半导体一端与所述第二光纤连接，另一端的端面为解理面，所述解理面上镀有第二反射膜。
  5. 根据权利要求4所述的检测条纹对比度变化的迈克尔逊干涉光纤温度传感器，其特征在于，所述半导体镀有第二反射膜的端面与所述半导体的轴线垂直，所述半导体与所述第二光纤连接的端面为第一倾斜面。
  6. 根据权利要求5所述的检测条纹对比度变化的迈克尔逊干涉光纤温度传感器，其特征在于，所述第二光纤外部套接有第一套管，所述第二光纤与所述半导体连接的端面为第二倾斜面，所述第二光纤的第二倾斜面与所述半导体的第一倾斜面相对应，所述第一套管与所述半导体的外部套接有第二套管，通过所述第二套管对所述第二光纤和所述半导体进行固定装配。
  7. 根据权利要求6所述的检测条纹对比度变化的迈克尔逊干涉光纤温度传感器，其特征在于，所述第二套管为金属套管。
  8. 根据权利要求1所述的检测条纹对比度变化的迈克尔逊干涉光纤温度传感器，其特征在于，所述半导体的材料为砷化镓或者在入射光的波长相同的情况下，受环境温度变化影响时透射率或吸光率变化大于砷化镓的半导体材料。
  9. 根据权利要求1所述的检测条纹对比度变化的迈克尔逊干涉光纤温度传感器，其特征在于，所述粗波分复用器解复用得到窄带光信号的线宽≤5nm，宽带光信号的线宽≥40nm。
  10. 根据权利要求1所述的检测条纹对比度变化的迈克尔逊干涉光纤温度传感器，其特征在于，所述处理电路对所述第一光电探测器、所述第二光电探测器探测到的光信号进行放大处理后，将所述第二光电探测器的输出除以所述第一光电探测器的输出，得到干涉条纹的相位信息和相位变化信息，进而得到干涉条纹的对比度的变化信息，根据干涉条纹的对比度的变化信息得到环境温度的变化。
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