WO2022166037A1 - Tip clearance online measuring device, measuring method, and test bench - Google Patents

Tip clearance online measuring device, measuring method, and test bench Download PDF

Info

Publication number
WO2022166037A1
WO2022166037A1 PCT/CN2021/095979 CN2021095979W WO2022166037A1 WO 2022166037 A1 WO2022166037 A1 WO 2022166037A1 CN 2021095979 W CN2021095979 W CN 2021095979W WO 2022166037 A1 WO2022166037 A1 WO 2022166037A1
Authority
WO
WIPO (PCT)
Prior art keywords
blade
optical fiber
tip clearance
control device
time
Prior art date
Application number
PCT/CN2021/095979
Other languages
French (fr)
Chinese (zh)
Inventor
肖志成
吴亚东
蒙一鸣
田杰
李健萍
欧阳华
Original Assignee
上海交通大学
上海交大航空发动机科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 上海交通大学, 上海交大航空发动机科技有限公司 filed Critical 上海交通大学
Publication of WO2022166037A1 publication Critical patent/WO2022166037A1/en

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/14Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures

Definitions

  • the application relates to the field of mechanical measurement, and in particular, to an online measurement device and an online measurement method for blade tip clearance, and a test bench for calibrating the online measurement device.
  • Tip clearance refers to the radial distance between the tip of a rotor blade and the casing.
  • tip clearance is an important design parameter. If the blade tip clearance is too small, it will lead to friction between the blade and the casing, resulting in potential safety hazards and equipment failure. Therefore, the online tip clearance measurement technology can improve the operation efficiency of the turbomachinery and reduce the operation risk.
  • Existing technologies fall into many categories.
  • the second is to measure the change of the reflected signal intensity (amplitude) through an optical (including electromagnetic wave) probe.
  • the third is to measure the distance through laser triangulation. This method has high reliability and ease of use, but the sampling frequency is limited and cannot be applied to high-speed turbomachinery. And the size of the product is large, which is not suitable for practical application.
  • the fourth is the tip timing method (for example, Ye Dechao et al. published the paper "Tip gap measurement technology based on multi-beam tip timing principle” published in "Optoelectronic Laser", Vol. 22, No. 4, 2011, p. 570).
  • the probe of this method has a complex structure and large size, and requires two channels of photoelectric signals for detection.
  • an online measuring device for blade tip clearance including:
  • a fiber optic probe configured to form a cone beam
  • optical fiber one end is connected to the optical fiber probe, and the optical fiber includes a transmitting optical fiber and a receiving optical fiber;
  • control device connected to the other end of the optical fiber, the control device configured to be able to control the intensity of the light emitted by the transmitting optical fiber, process the reflected light received by the receiving optical fiber, and identify the blade under test passing through the taper The time spent by the beam.
  • one end of the optical fiber probe is connected to the optical fiber, and the other end is provided with a casing, the casing is provided with an opening, and the center of the opening is the center of the light probe. overlapping; a lens is also arranged in the casing.
  • the optical fibers are bundled fibers.
  • the control device includes an emission light control module, a reflected light processing module and an arithmetic module
  • the emission light control module is configured to control the intensity of the light emitted by the emission fiber
  • the reflection light is configured to convert the reflected light signal into an electrical signal
  • the arithmetic module is configured to be able to identify the time taken for the blade under test to pass through the cone beam.
  • control device further includes a communication module, and the communication module is configured to communicate the control device with the upper computer.
  • the present application also provides a method for on-line measurement of blade tip clearance using the above-mentioned measuring device, the method comprising the following steps:
  • the step of converting the reflected light into an electrical signal includes: first converting the reflected light into an analog electrical signal, and then converting the analog electrical signal into a digital electrical signal.
  • the tip clearance is calculated according to Equation 1 below:
  • formula 1 can be simplified as follows:
  • c represents the tip clearance
  • k represents the fiber probe constant
  • w represents the rotational speed of the blade under test
  • r represents the tip radius of the blade under test
  • t represents the blade under test passing through the cone
  • the step of identifying when the bladed beam passes through the cone of light comprises:
  • the control device When the analog electrical signal exceeds a preset trigger voltage threshold, the control device is triggered, and the tested blade starts to pass through the fiber probe;
  • the control device When the analog electrical signal is lower than the preset trigger voltage threshold, the control device is triggered, and the measured blade leaves the fiber probe.
  • the method further includes:
  • the method further includes:
  • the time difference between the time point when the measured blade passes through the optical fiber probe and the time point when the measured blade leaves the optical fiber probe is taken as the time point when the measured blade passes through the cone.
  • the method further comprises: calibrating the constant k of the fiber probe.
  • the step of calibrating the constant k of the fiber probe is performed on a test bench.
  • the test bed is configured to enable control of tip clearance.
  • the step of calibrating the constant k of the optical fiber probe includes the following steps:
  • the impeller of the test stand rotates n times, and the time when each blade of the impeller passes through the fiber probe in each circle is collected;
  • a least squares method is used to fit the variation relationship corresponding to each of the blades as a straight line.
  • the present application also provides a test bench for calibrating the above-mentioned online measurement device
  • the test bench includes a bracket, a power component, an impeller and a micro-movement platform, the bracket and the power component Fixed connection, the impeller is connected to the output shaft of the power component, the fiber probe of the online measurement device is fixed on the micro-movement platform, and the tip clearance can be adjusted by adjusting the horizontal position of the micro-movement platform. control.
  • test bench is arranged on a fixed platform.
  • the micro-movement platform has four degrees of freedom.
  • the present invention has the following beneficial effects:
  • the blade tip clearance is calculated by using the cone beam to detect the blade, combining the rotational speed and the blade radius;
  • the tip clearance measurement is completed by a fiber probe with a lens at the top.
  • the structure is simple, the cost is low, and the disassembly and assembly are convenient. In practical applications, multi-point calibration is not required, thus reducing the difficulty of monitoring the tip clearance;
  • the measurement can be performed at a very high sampling rate while reducing the amount of data, thereby improving the measurement accuracy and reducing the communication pressure with the host computer.
  • FIG. 1 is a schematic structural diagram of an online measurement device 100 according to a preferred embodiment of the present application
  • Fig. 2 is the composition schematic diagram of the control device
  • Fig. 3 is the flow chart of the online measurement method
  • Fig. 4 is the light path diagram of the measured blade passing through the cone beam
  • Fig. 5 is the schematic flow chart when using formula (2) to measure
  • FIG. 6 is a schematic diagram of a triggering time determination method
  • Fig. 7 is the structural representation of the test bench
  • Fig. 8 is the schematic flow chart of calibration fiber probe constant k
  • FIG. 9 is a schematic diagram of the corresponding change relationship of each measured blade in the calibration process.
  • FIG. 10 is a schematic diagram of the measurement results.
  • an on-line measurement device 100 for blade tip clearance based on blade tip timing technology includes an optical fiber probe 5 , an optical fiber 6 , and a control device 9 .
  • One end of the fiber probe 5 is connected to the fiber 6, and the other end can emit a light beam, which is a cone beam 2.
  • the cone beam 2 can illuminate the measured blade 1.
  • the control device 9 is connected to the other end of the optical fiber 6 , and the control device 9 can control the optical fiber 6 to emit laser light. After the laser light is emitted through the fiber probe 5 , a cone beam 2 is formed.
  • the control device 9 can control the intensity of the emitted laser light.
  • the tip area of the blade under test 1 is diffusely reflected, and the reflected light can be converted into an electrical signal after being received by the control device 9.
  • the control device 9 can identify the time it takes for the blade 1 to be tested to pass through the cone beam 2 according to the electrical signal.
  • the fiber probe 5 can convert the laser light emitted by the fiber 6 into a cone beam 2 .
  • the fiber probe 5 includes a casing 3, one end of the casing 3 is connected to the optical fiber 6, and the other end is used for emitting a light beam.
  • the end of the casing 3 for emitting the beam is provided with an opening 11 for the laser to emit.
  • the center of the opening 11 overlaps with the center of the fiber probe 5, and a lens 4 is arranged in the casing 3.
  • a cone beam 2 is formed. It should be understood that other structures that enable the fiber probe 5 to form the cone beam 2 can also be applied in the present application.
  • the optical fiber 6 includes a transmitting optical fiber 8 and a receiving optical fiber 7, wherein the transmitting optical fiber 8 is used for emitting laser light, and the receiving optical fiber 7 is used for receiving reflected light.
  • One end of the transmitting fiber 8 and the receiving fiber 7 are both connected to the fiber probe 5 , and the other end is connected to the control device 9 .
  • the optical fiber 6 is a bundled optical fiber 6, that is, the part of the transmitting optical fiber 8 and the receiving optical fiber 7 connected to the optical fiber probe 5 is arranged in an optical fiber bundle, and then the transmitting optical fiber 8 and the receiving optical fiber 7 are connected to the control device 9. That part can be separated to facilitate the connection of the two to different interfaces of the control device 9 respectively. It should be understood that two separate fibers could also be used.
  • the control device 9 can control the emitting fiber 8 to emit laser light, and can control the intensity of the emitted laser light. At the same time, after the receiving optical fiber 7 receives the reflected light signal, the control device 9 converts the optical signal received by the receiving optical fiber 7 into an analog electrical signal. For the convenience of processing, the analog electrical signal is further converted from analog to digital. Then, the control device 9 performs arithmetic processing on the converted electrical signal, and can identify the time when the blade 1 under test passes through the cone beam 2 . As shown in FIG.
  • the control device 9 includes at least an emission light control module, a reflected light processing module and an arithmetic module, wherein the emission light control module has an optical fiber 6 interface, which is connected to the emission optical fiber 8 and can control the emission optical fiber. 8. Emit single-mode laser and control the laser intensity.
  • the emission light control module may be an existing laser generating device in the prior art.
  • the reflected light processing module has an optical fiber 6 interface, which is connected to the receiving optical fiber 7. When the reflected light signal passing through the receiving optical fiber 7 is converted into an analog electrical signal by the reflected light processing module, it is further converted into a digital signal.
  • the reflected light control module may include a photocell for converting optical signals into electrical signals, and an A/D conversion component for converting analog electrical signals into digital signals.
  • the operation module receives the digital signal from the reflected light processing module, and can perform operation to identify the time when the blade 1 under test passes through the cone beam 2 . At the same time, the operation module can also be connected with the emission light control module, and sends instructions such as the intensity of the laser to be emitted to the emission light control module.
  • the control device 9 further includes a storage module to store the digital signal, the calculated data, etc. in the control device 9 .
  • control device 9 may also integrate subsequent data processing functions, that is, calculate the tip clearance according to the time when the measured blade 1 passes through the cone beam 2 , the rotational speed and the radius of the measured blade 1 .
  • control device 9 further includes a communication module, which can communicate with the upper computer 10 to realize data interaction, thereby realizing the remote control of the online measurement device 100, and at the same time, the function of calculating the blade tip clearance can be implemented on the upper computer 10. It is realized to simplify the structure of the control device 9 .
  • the control device 9 may adopt a known processing system, such as an industrial computer, a single-chip microcomputer, an embedded system, etc., and a display component, a human-computer interaction component, etc. may also be integrated on the control device 9 .
  • the present application also provides a method for on-line measurement of blade tip clearance, as shown in Figure 3, comprising the following steps:
  • Step S1 emit a cone beam 2 to irradiate the blade 1 under test.
  • the cone-shaped beam 2 can be generated by the above-mentioned online measuring device 100, preferably, the single-mode laser is emitted from the transmitting optical fiber 8, and the cone-shaped beam 2 is formed after passing through the lens 4, and is irradiated on the measured blade 1 through the casing 3;
  • Step S2 Receive the light reflected by the blade 1 under test.
  • the measured blade 1 passes through the cone beam 2, diffuse reflection occurs in the blade tip area, and the reflected light is transmitted to the control device 9 through the receiving fiber 7;
  • Step S3 Convert the reflected light into an electrical signal. After receiving the reflected light, the control device 9 converts the reflected light signal into an analog electrical signal through the reflected light processing module, and further can be converted into a digital signal;
  • Step S4 Calculate the tip clearance.
  • the control device 9 can process the electrical signal to identify the time when the measured blade 1 passes through the cone beam 2, and then calculate the size of the blade tip gap by combining the blade rotational speed and the blade tip radius.
  • step 4 the principle of calculating the tip clearance is as follows:
  • FIG. 4 it is a schematic diagram of the optical path of the measured blade 1 passing through the cone beam 2, in which, d lens represents the effective diameter of the lens 4, x pass represents the passing length of the blade tip in the area of the cone beam 2, and c represents the blade
  • d lens represents the effective diameter of the lens 4
  • x pass represents the passing length of the blade tip in the area of the cone beam 2
  • c represents the blade
  • the size of the tip gap v is the image distance
  • d tip is the thickness of the blade tip
  • d focus is the diameter of the focal point
  • is the rotational speed
  • r is the radius of the blade tip
  • t the control device 9 is triggered when the measured blade 1 passes through the cone beam 2 time. Then the relationship between the tip clearance and the trigger length can be expressed as:
  • the right-hand side of the formula consists of two parts, the first part It is an item that is proportional to the time when the control device 9 is triggered when the blade passes through the cone beam 2 .
  • the second part is a constant related to both the measured object and the probe.
  • k is a constant only related to the optical fiber probe 5, which is called the optical fiber probe 5 constant, which needs to be calibrated before actual measurement.
  • b is a constant related to the measured blade 1, it only affects the specific value of the tip clearance without affecting its variation, so the value of b can be regarded as the measurement zero point and can be specified during the measurement process.
  • the method for determining the time t when the control device 9 is activated is as follows.
  • the control device 9 is triggered, specifically, the component in the control device 9 that converts the reflected light into an electrical signal is triggered.
  • the component that converts the reflected light into an electrical signal can use a photocell.
  • the photocell is used as an example for description here.
  • set a trigger voltage threshold and noise suppression delay threshold When the amplitude of the electrical analog signal collected by the control device 9 exceeds the set trigger voltage threshold, it can be considered as starting to trigger, that is, the blade 1 under test starts to pass through the fiber probe 5 .
  • the end trigger whose time exceeds the noise suppression delay threshold after the start trigger is called an effective end trigger.
  • the start trigger whose time exceeds the noise suppression delay threshold after the end trigger is regarded as a valid end trigger. is a valid start trigger.
  • the time difference between an effective rising trigger and an effective falling trigger is the time t when the photocell is triggered.
  • the fiber probe constant k can be calibrated by the test bench. In this test rig, the rotational speed and tip clearance of the blade under test can be precisely controlled.
  • the test bench includes a bracket 22, a power component 21, an impeller 23 and a micro-movement platform 24.
  • the bracket 22 is fixedly connected to the power component 21, and the impeller 23 is connected to the output shaft of the power component 21.
  • the on-line measurement device to be calibrated The fiber probe of 100 is fixed on the micro-movement platform 20.
  • the gap between the fiber probe and the tip of the impeller 23 is adjusted to achieve the purpose of accurately controlling the tip gap.
  • the rotational speed of the power component 21 the purpose of precisely controlling the rotational speed of the impeller 23 is achieved.
  • the power component 21 may be a servo motor, and it should be understood that other types of motors may also be used.
  • the micro-movement platform 24 in order to precisely control the blade tip clearance, can be selected as a four-axis micro-movement platform 24, that is, the micro-movement platform 24 has four degrees of freedom, which can be precisely adjusted in the three directions of XYZ, and the surrounding The angle of the center line of the fiber probe 5 can be precisely adjusted.
  • the micro-moving platform 24 can well control the blade tip clearance, and the control precision can be set to not less than 0.01 mm.
  • the test bench can be placed on a platform 20 whose rigidity meets a preset requirement, so as to reduce the interference of the external environment on the calibration.
  • the number n of rotations of the impeller 23 can be set to be ⁇ 100, and the gradient of increasing the tip clearance in sequence is 0.2, 0.4, .
  • the system, device and each module provided by the present application can be implemented by logic gates by logically programming the method steps. , switches, application-specific integrated circuits, programmable logic controllers, and embedded microcontrollers to implement the same program. Therefore, the systems, devices and their respective modules provided in this application can be considered as a kind of hardware components, and the modules included in them for realizing various programs can also be considered as structures in the hardware components; A module for realizing various functions can be regarded as either a software program for realizing a method or a structure within a hardware component.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

A tip clearance online measuring device (100), comprising: an optical fiber probe (5), configured as capable of producing a conical light beam; an optical fiber (6), connected at one end to the optical fiber probe (5), the optical fiber (6) comprising a transmitting optical fiber (8) and a receiving optical fiber (7); a control device (9), connected to the other end of the optical fiber (6), the control device (9) being configured as capable of controlling the intensity of a light transmitted by the transmitting optical fiber (8), processing a reflected light received by the receiving optical fiber (7), and identifying the time that a blade being measured uses to pass through the conical light beam. A contactless real-time measurement is implemented with respect to tip clearance and is free of interference from factors such as the blade material and surface properties, thus increasing the reliability of the measurement; at the same time, the measuring device is structurally simple, inexpensive, and convenient to mount and unmount, obviates the need for multipoint calibration, and reduces the difficulty of measuring tip clearance. Also provided are a tip clearance online measuring method and a test bench.

Description

叶顶间隙的在线测量装置、测量方法及试验台On-line measuring device, measuring method and test bench for blade tip clearance 技术领域technical field
本申请涉及机械测量领域,尤其涉及一种叶顶间隙的在线测量装置及在线测量方法,以及对该在线测量装置进行标定的试验台。The application relates to the field of mechanical measurement, and in particular, to an online measurement device and an online measurement method for blade tip clearance, and a test bench for calibrating the online measurement device.
背景技术Background technique
叶顶间隙是指转子叶片的叶尖和机壳之间的径向距离。对于叶轮机械来说,叶顶间隙是一项重要设计参数。叶顶间隙过小则会导致叶片与机壳的碰摩,产生安全隐患,造成设备故障。因此,叶顶间隙在线测量技术可以提高叶轮机械运行效率并且降低运行风险。现有技术分为多类。Tip clearance refers to the radial distance between the tip of a rotor blade and the casing. For turbomachinery, tip clearance is an important design parameter. If the blade tip clearance is too small, it will lead to friction between the blade and the casing, resulting in potential safety hazards and equipment failure. Therefore, the online tip clearance measurement technology can improve the operation efficiency of the turbomachinery and reduce the operation risk. Existing technologies fall into many categories.
一是通过电容式传感器进行测量。这类方法不足之处是:需要标定多个点才能完成测量,并且受被测叶片叶尖几何形态、叶轮机工质性质等影响大,长时间工作的可靠性低,可移植性有限。One is to measure by capacitive sensor. The disadvantage of this method is that it needs to calibrate multiple points to complete the measurement, and is greatly affected by the geometry of the blade tip to be measured and the properties of the impeller working medium, the reliability of long-term work is low, and the portability is limited.
二是通过光学(包括电磁波)探头测量反射信号强度(幅值)变化进行测量。这类方法对叶片表面的反射性质极为敏感,稍有污损或倾斜便会使测量结果受到很大的影响。The second is to measure the change of the reflected signal intensity (amplitude) through an optical (including electromagnetic wave) probe. These methods are extremely sensitive to the reflective properties of the blade surface, and slight fouling or tilting can greatly affect the measurement results.
三是通过激光三角法测距。这种方法可靠性、易用性均较高,但采样频率有限,不能适用于高转速的叶轮机械。并且产品尺寸大,不适合实际应用。The third is to measure the distance through laser triangulation. This method has high reliability and ease of use, but the sampling frequency is limited and cannot be applied to high-speed turbomachinery. And the size of the product is large, which is not suitable for practical application.
四是叶尖定时法(例如叶德超等在《光电子激光》杂志2011年第22卷第4期570页发表的论文《基于多光束叶尖定时原理的叶尖间隙测量技术》)。这种方法的探头结构复杂,尺寸较大,并且需要两个通道的光电信号才能进行探测。The fourth is the tip timing method (for example, Ye Dechao et al. published the paper "Tip gap measurement technology based on multi-beam tip timing principle" published in "Optoelectronic Laser", Vol. 22, No. 4, 2011, p. 570). The probe of this method has a complex structure and large size, and requires two channels of photoelectric signals for detection.
因此,本领域的技术人员致力于开发一种叶顶间隙的在线测量装置、测量方法及试验台,能够对叶顶间隙实现非接触式实时测量,且不受叶片材料、表面性质等因素干扰,提高了测量可靠性,同时该测量装置结构简单、成本低廉、拆装方便,无需多点标定,降低了叶顶间隙测量的难度。Therefore, those skilled in the art are committed to developing an on-line measuring device, measuring method and test bench for the tip clearance, which can realize non-contact real-time measurement of the tip clearance without being disturbed by factors such as blade material and surface properties. The measurement reliability is improved, and at the same time, the measurement device is simple in structure, low in cost, convenient in disassembly and assembly, does not need multi-point calibration, and reduces the difficulty of blade tip clearance measurement.
发明内容SUMMARY OF THE INVENTION
为实现上述目的,本申请提供了一种叶顶间隙在线测量装置,包括:In order to achieve the above purpose, the present application provides an online measuring device for blade tip clearance, including:
光纤探头,被配置为能够形成锥形光束;a fiber optic probe configured to form a cone beam;
光纤,一端连接至所述光纤探头,所述光纤包括发射光纤和接收光纤;an optical fiber, one end is connected to the optical fiber probe, and the optical fiber includes a transmitting optical fiber and a receiving optical fiber;
控制装置,与所述光纤的另一端连接,所述控制装置被配置为能够控制所述发射光纤发射光的强度,处理被所述接收光纤接收的反射光以及识别被测叶片通过所述锥 形光束所用的时间。a control device connected to the other end of the optical fiber, the control device configured to be able to control the intensity of the light emitted by the transmitting optical fiber, process the reflected light received by the receiving optical fiber, and identify the blade under test passing through the taper The time spent by the beam.
在一些实施方式中,可选地,所述光纤探头的一端连接所述光纤,另一端设置有机匣,所述机匣上设置有开孔,所述开孔的圆心与所述光线探头的中心重叠;所述机匣内还设置有透镜。In some embodiments, optionally, one end of the optical fiber probe is connected to the optical fiber, and the other end is provided with a casing, the casing is provided with an opening, and the center of the opening is the center of the light probe. overlapping; a lens is also arranged in the casing.
在一些实施方式中,可选地,所述光纤为集束光纤。In some embodiments, optionally, the optical fibers are bundled fibers.
在一些实施方式中,可选地,所述控制装置包括发射光控制模块、反射光处理模块和运算模块,所述发射光控制模块被配置为控制所述发射光纤发射光的强度,所述反射光处理模块被配置为将所述反射光信号转换为电信号;所述运算模块被配置为能够识别所述被测叶片通过所述锥形光束所用的时间。In some embodiments, optionally, the control device includes an emission light control module, a reflected light processing module and an arithmetic module, the emission light control module is configured to control the intensity of the light emitted by the emission fiber, the reflection light The light processing module is configured to convert the reflected light signal into an electrical signal; the arithmetic module is configured to be able to identify the time taken for the blade under test to pass through the cone beam.
在一些实施方式中,可选地,所述控制装置还包括通信模块,所述通信模块被配置为将所述控制装置与上位机通讯。In some embodiments, optionally, the control device further includes a communication module, and the communication module is configured to communicate the control device with the upper computer.
为实现上述目的,本申请还提供了一种使用如上所述的测量装置进行叶顶间隙在线测量的方法,所述方法包括如下步骤:In order to achieve the above purpose, the present application also provides a method for on-line measurement of blade tip clearance using the above-mentioned measuring device, the method comprising the following steps:
发射锥形光束,使其照射在被测叶片上;Emit a cone beam to irradiate on the tested leaf;
接收经所述被测叶片反射的光;receiving the light reflected by the measured blade;
将所述反射的光转换成电信号;converting the reflected light into an electrical signal;
识别所述被测叶片通过所述锥形光束的时间;Identifying the time when the blade under test passes through the cone beam;
计算叶顶间隙。Calculate tip clearance.
在一些实施方式中,可选地,所述反射的光转换成电信号的步骤包括:先将所述反射的光转换成模拟电信号,然后将所述模拟电信号转换成数字电信号。In some embodiments, optionally, the step of converting the reflected light into an electrical signal includes: first converting the reflected light into an analog electrical signal, and then converting the analog electrical signal into a digital electrical signal.
在一些实施方式中,可选地,根据以下公式1计算所述叶顶间隙:In some embodiments, optionally, the tip clearance is calculated according to Equation 1 below:
Figure PCTCN2021095979-appb-000001
Figure PCTCN2021095979-appb-000001
其中,d lens表示所述测量装置的透镜的有效直径;c表示所述叶顶间隙大小;v表示像距;d tip表示叶顶厚度;d focus表示焦点直径;ω表示所述待测叶片的转速;r表示所述待测叶片的叶顶半径;t表示所述待测叶片通过所述锥形光束时所述测量装置的控制装置被触发的时间。 Wherein, d lens represents the effective diameter of the lens of the measuring device; c represents the size of the blade tip clearance; v represents the image distance; d tip represents the thickness of the blade tip; d focus represents the focal point diameter; rotational speed; r represents the tip radius of the blade to be measured; t represents the time when the control device of the measurement device is triggered when the blade to be measured passes through the cone beam.
在一些实施方式中,可选地,所述公式1能够被简化为如下所示:In some embodiments, optionally, the formula 1 can be simplified as follows:
c=kwrt-b            2c=kwrt-b 2
其中,c表示所述叶顶间隙,k表示光纤探头常数,w表示所述被测叶片的转速,r表示所述被测叶片的叶顶半径,t表示所述被测叶片通过所述锥形光束时所述控制装置被触发的时间,b表示所述被测叶片的常数。Where, c represents the tip clearance, k represents the fiber probe constant, w represents the rotational speed of the blade under test, r represents the tip radius of the blade under test, and t represents the blade under test passing through the cone The time when the control device is activated when the beam is on, b represents the constant of the measured blade.
在一些实施方式中,可选地,识别所述被叶片通过所述锥形光束的时间的步骤包括:In some embodiments, optionally, the step of identifying when the bladed beam passes through the cone of light comprises:
当所述模拟电信号超过预设触发电压阈值时,所述控制装置被触发,所述被测叶片开始通过所述光纤探头;When the analog electrical signal exceeds a preset trigger voltage threshold, the control device is triggered, and the tested blade starts to pass through the fiber probe;
当所述模拟电信号低于所述预设触发电压阈值时,所述控制装置被触发,所述被测叶片离开所述光纤探头。When the analog electrical signal is lower than the preset trigger voltage threshold, the control device is triggered, and the measured blade leaves the fiber probe.
在一些实施方式中,可选地,所述方法还包括:In some embodiments, optionally, the method further includes:
所述被测叶片开始通过所述光纤探头的时间超出预设延时阈值时,则认为所述控制装置被有效触发;When the time when the measured blade starts to pass through the optical fiber probe exceeds a preset delay threshold, it is considered that the control device is effectively triggered;
所述被测叶片离开所述光线探头时间超出所述预设延时阈值时,则认为所述控制装置被有效触发。When the time when the measured blade leaves the light probe exceeds the preset delay threshold, it is considered that the control device is effectively triggered.
在一些实施方式中,可选地,所述方法还包括:In some embodiments, optionally, the method further includes:
在所述有效触发情况下,所述被测叶片通过所述光纤探头的时间点和所述被测叶片离开所述光纤探头的时间点之间的时间差作为所述被测叶片通过所述锥形光束时所述控制装置被触发的时间t。In the case of the effective triggering, the time difference between the time point when the measured blade passes through the optical fiber probe and the time point when the measured blade leaves the optical fiber probe is taken as the time point when the measured blade passes through the cone The time t at which the control device is activated when the beam is activated.
在一些实施方式中,可选地,所述方法还包括:标定所述光纤探头的常数k。In some embodiments, optionally, the method further comprises: calibrating the constant k of the fiber probe.
在一些实施方式中,可选地,在试验台上执行标定所述光纤探头的常数k的步骤。In some embodiments, optionally, the step of calibrating the constant k of the fiber probe is performed on a test bench.
在一些实施方式中,可选地,所述试验台被配置为能够控制叶顶间隙。Optionally, in some embodiments, the test bed is configured to enable control of tip clearance.
在一些实施方式中,可选地,标定所述光纤探头的常数k的步骤,包括如下步骤:In some embodiments, optionally, the step of calibrating the constant k of the optical fiber probe includes the following steps:
所述试验台的叶轮旋转n圈,采集所述叶轮的每个叶片在每一圈通过所述光纤探头的时间;The impeller of the test stand rotates n times, and the time when each blade of the impeller passes through the fiber probe in each circle is collected;
基于所述叶轮旋转n圈,计算每个所述叶片通过所述光纤探头的平均时间;Calculate the average time that each of the blades passes through the fiber probe based on n rotations of the impeller;
依次增加所述叶顶间隙的所述预设值,重复执行上述步骤;increasing the preset value of the tip clearance in sequence, and repeating the above steps;
以所述控制装置被触发的时间与所述叶片的叶尖速度的乘积为横轴、所述叶顶间隙为纵轴,得到每个所述叶片对应的变化关系;Taking the product of the triggering time of the control device and the tip speed of the blade as the horizontal axis, and the tip clearance as the vertical axis, the corresponding variation relationship of each blade is obtained;
将每个所述叶片对应的所述变化关系拟合为直线,得到斜率;Fitting the variation relationship corresponding to each of the blades as a straight line to obtain a slope;
计算所述斜率的平均值,完成所述光纤探头的常数k的标定。Calculate the average value of the slope, and complete the calibration of the constant k of the fiber probe.
在一些实施方式中,可选地,使用最小二乘法将每个所述叶片对应的所述变化关系拟合为直线。In some embodiments, optionally, a least squares method is used to fit the variation relationship corresponding to each of the blades as a straight line.
为了实现上述目的,本申请还提供了一种用于标定如上所述的在线测量装置的试验台,所述试验台包括支架、动力部件、叶轮和微动平台,所述支架与所述动力部件固定连接,所述叶轮连接至所述动力部件的输出轴上,所述在线测量装置的光纤探头固定在所述微动平台上,通过调节所述微动平台的水平位置以实现叶顶间隙的控制。In order to achieve the above purpose, the present application also provides a test bench for calibrating the above-mentioned online measurement device, the test bench includes a bracket, a power component, an impeller and a micro-movement platform, the bracket and the power component Fixed connection, the impeller is connected to the output shaft of the power component, the fiber probe of the online measurement device is fixed on the micro-movement platform, and the tip clearance can be adjusted by adjusting the horizontal position of the micro-movement platform. control.
在一些实施方式中,可选地,所述试验台设置在一固定平台上。In some embodiments, optionally, the test bench is arranged on a fixed platform.
在一些实施方式中,可选地,所述微动平台具有四个自由度。In some embodiments, optionally, the micro-movement platform has four degrees of freedom.
与现有技术相比,本发明具有如下的有益效果:Compared with the prior art, the present invention has the following beneficial effects:
1、通过使用锥形光束对叶片进行探测,结合转速和叶片半径计算出叶顶间隙大小;1. The blade tip clearance is calculated by using the cone beam to detect the blade, combining the rotational speed and the blade radius;
2、能够对叶顶间隙实现非接触式实时测量,并且不受叶片材料、表面性质等因素干扰,提高了测量可靠性;2. It can realize non-contact real-time measurement of blade tip clearance, and it is not disturbed by factors such as blade material and surface properties, which improves the measurement reliability;
3、通过一支顶端包含透镜的光纤探头完成叶顶间隙测量,结构简单、成本低廉、拆装方便,在实际应用中无需多点标定,从而降低了叶顶间隙监测的难度;3. The tip clearance measurement is completed by a fiber probe with a lens at the top. The structure is simple, the cost is low, and the disassembly and assembly are convenient. In practical applications, multi-point calibration is not required, thus reducing the difficulty of monitoring the tip clearance;
4、通过仅测量叶片通过光锥的时间并换算出叶顶间隙,可以极高的采样率进行测量的同时降低数据量,从而提高了测量精度并减小与上位机的通信压力。4. By only measuring the time when the blade passes through the light cone and converting the tip clearance, the measurement can be performed at a very high sampling rate while reducing the amount of data, thereby improving the measurement accuracy and reducing the communication pressure with the host computer.
以下将结合附图对本申请的构思、具体结构及产生的技术效果作进一步说明,以充分地了解本申请的目的、特征和效果。The concept, specific structure and technical effects of the present application will be further described below with reference to the accompanying drawings, so as to fully understand the purpose, features and effects of the present application.
附图说明Description of drawings
图1是本申请的一个较佳实施例的在线测量装置100的结构示意图;FIG. 1 is a schematic structural diagram of an online measurement device 100 according to a preferred embodiment of the present application;
图2是控制装置的组成示意图;Fig. 2 is the composition schematic diagram of the control device;
图3是在线测量方法的流程图;Fig. 3 is the flow chart of the online measurement method;
图4是被测叶片通过锥形光束的光路图;Fig. 4 is the light path diagram of the measured blade passing through the cone beam;
图5是运用公式(2)进行测量时的流程示意图;Fig. 5 is the schematic flow chart when using formula (2) to measure;
图6是触发时间判定方式示意图;6 is a schematic diagram of a triggering time determination method;
图7是试验台的结构示意图;Fig. 7 is the structural representation of the test bench;
图8是标定光纤探头常数k的流程示意图;Fig. 8 is the schematic flow chart of calibration fiber probe constant k;
图9是标定过程中每个被测叶片对应的变化关系示意图;9 is a schematic diagram of the corresponding change relationship of each measured blade in the calibration process;
图10是测量结果示意图。FIG. 10 is a schematic diagram of the measurement results.
具体实施方式Detailed ways
以下参考说明书附图介绍本申请的多个优选实施例,使其技术内容更加清楚和便于理解。本申请可以通过许多不同形式的实施例来得以体现,本申请的保护范围并非仅限于文中提到的实施例。The following describes several preferred embodiments of the present application with reference to the accompanying drawings, so as to make its technical content clearer and easier to understand. The present application can be embodied in many different forms of embodiments, and the protection scope of the present application is not limited to the embodiments mentioned herein.
在附图中,结构相同的部件以相同数字标号表示,各处结构或功能相似的组件以相似数字标号表示。附图所示的每一组件的尺寸和厚度是任意示出的,本申请并没有限定每个组件的尺寸和厚度。为了使图示更清晰,附图中有些地方适当夸大了部件的厚度。In the drawings, structurally identical components are denoted by the same numerals, and structurally or functionally similar components are denoted by like numerals throughout. The size and thickness of each component shown in the drawings are arbitrarily shown, and the present application does not limit the size and thickness of each component. In order to make the illustration clearer, the thicknesses of components are appropriately exaggerated in some places in the drawings.
如图1所示,一种基于叶尖定时技术的叶顶间隙在线测量装置100,包括光纤探头5、光纤6、控制装置9。光纤探头5的一端连接至光纤6,另一端能够发射光束,该光束为锥形光束2,当被测叶片1经过该锥形光束2时,锥形光束2能够照射在被测叶片1上。控制装置9与光纤6的另一端连接,控制装置9能够控制光纤6发射激光,激光通过光纤探头5射出后,形成锥形光束2。控制装置9可以控制所发射的激光强度。当被测叶片1经过锥形光束2时,被测叶片1的叶顶区域发生漫反射,被反射的光被控制装置9接收后,能够转换成电信号。控制装置9根据该电信号,可以识别被测叶片1通过锥形光束2所用的时间。As shown in FIG. 1 , an on-line measurement device 100 for blade tip clearance based on blade tip timing technology includes an optical fiber probe 5 , an optical fiber 6 , and a control device 9 . One end of the fiber probe 5 is connected to the fiber 6, and the other end can emit a light beam, which is a cone beam 2. When the measured blade 1 passes through the cone beam 2, the cone beam 2 can illuminate the measured blade 1. The control device 9 is connected to the other end of the optical fiber 6 , and the control device 9 can control the optical fiber 6 to emit laser light. After the laser light is emitted through the fiber probe 5 , a cone beam 2 is formed. The control device 9 can control the intensity of the emitted laser light. When the blade under test 1 passes through the cone beam 2, the tip area of the blade under test 1 is diffusely reflected, and the reflected light can be converted into an electrical signal after being received by the control device 9. The control device 9 can identify the time it takes for the blade 1 to be tested to pass through the cone beam 2 according to the electrical signal.
光纤探头5可以将光纤6发射的激光变为锥形光束2。在一些实施方式中,光纤探头5包括机匣3,机匣3的一端与光纤6连接,另一端用于射出光束。机匣3上用于射出光束的一端设置有开孔11,以供激光射出,该开孔11的圆心与光纤探头5的中心重叠,在机匣3内设置有透镜4,当激光从光纤6射出,经过透镜4后,形成锥形光束2。应当理解,其他能够使得光纤探头5形成锥形光束2的结构亦可应用在本申请中。The fiber probe 5 can convert the laser light emitted by the fiber 6 into a cone beam 2 . In some embodiments, the fiber probe 5 includes a casing 3, one end of the casing 3 is connected to the optical fiber 6, and the other end is used for emitting a light beam. The end of the casing 3 for emitting the beam is provided with an opening 11 for the laser to emit. The center of the opening 11 overlaps with the center of the fiber probe 5, and a lens 4 is arranged in the casing 3. When the laser is emitted from the optical fiber 6 Outgoing, after passing through the lens 4, a cone beam 2 is formed. It should be understood that other structures that enable the fiber probe 5 to form the cone beam 2 can also be applied in the present application.
本申请需要通过光纤6发射激光,较佳地为单模激光,同时,对于被叶片发射的光,也需要通过光纤6接收。光纤6包括发射光纤8和接收光纤7,其中发射光纤8用于射出激光,接收光纤7用于接收反射光。发射光纤8和接收光纤7的一端均连接至光纤探头5,另一端连接至控制装置9。在一些实施方式中,光纤6采用集束光纤6,即将发射光纤8和接收光纤7连接至光纤探头5的那一部分设置在一个光纤束中,然后发射光纤8和接收光纤7连接至控制装置9的那一部分可以分开,以方便两者分别连接至控制装置9的不同接口。应当理解,也可以使用两根独立的光纤。In the present application, laser light, preferably single-mode laser light, needs to be emitted through the optical fiber 6 , and at the same time, the light emitted by the blade also needs to be received through the optical fiber 6 . The optical fiber 6 includes a transmitting optical fiber 8 and a receiving optical fiber 7, wherein the transmitting optical fiber 8 is used for emitting laser light, and the receiving optical fiber 7 is used for receiving reflected light. One end of the transmitting fiber 8 and the receiving fiber 7 are both connected to the fiber probe 5 , and the other end is connected to the control device 9 . In some embodiments, the optical fiber 6 is a bundled optical fiber 6, that is, the part of the transmitting optical fiber 8 and the receiving optical fiber 7 connected to the optical fiber probe 5 is arranged in an optical fiber bundle, and then the transmitting optical fiber 8 and the receiving optical fiber 7 are connected to the control device 9. That part can be separated to facilitate the connection of the two to different interfaces of the control device 9 respectively. It should be understood that two separate fibers could also be used.
控制装置9可以控制发射光纤8发射激光,并能控制所发射的激光的强度。同时,当接收光纤7接收了反射光信号后,控制装置9将接收光纤7接收的光信号转换为模拟电信号。为方便处理,进一步地将模拟电信号进行模数转换。然后控制装置9对转换后的电信号进行运算处理,可以识别出被测叶片1通过锥形光束2的时间。如图2所示,在一些实施方式中,控制装置9至少包括发射光控制模块、反射光处理模块和运算模块,其中发射光控制模块具有光纤6接口,与发射光纤8连接,能够控制发射光纤8发射单模激光,并控制激光强度。发射光控制模块可以是现有技术中已有的激光发生装置。反射光处理模块具有光纤6接口,与接收光纤7连接,当通过接收光纤7的反射光信号被反射光处理模块转换为模拟电信号,并进一步地转换为数字信号。反射光控制模块可以包括用于将光信号转换为电信号的光电管,以及将模拟电信号转换为数字信号的A/D转换组件。运算模块接收来自反射光处理模块的数字信号,可以进行运算,以识别被测叶片1通过锥形光束2的时间。运算模块同时还可以与发射光控制模块连接,将需要发射的激光强度等指令发送给发射光控制模块。在一些实施方式中,控制装置9还包括存储模块,以将数字信号、运算后的数据等储存在控制装置9中。在一些实施方式中,控制装置9还可以集成后续的数据处理功能,即根据被测叶片1通过锥形光束2的时间、被测叶片1的转速和半径计算得出叶顶间隙。在一些实施方式中,控制装置9还包括通信模块,可以和上位机10进行通信,实现数据交互,从而实现在线测量装置100的远程控制,同时可以将计算叶顶间隙的功能在上位机10上予以实现,以简化控制装置9的结构。控制装置9可以采用已知的处理系统,例如工控机、单片机、嵌入式系统等,同时控制装置9上还可以集成显示部件、人机交互部件等。The control device 9 can control the emitting fiber 8 to emit laser light, and can control the intensity of the emitted laser light. At the same time, after the receiving optical fiber 7 receives the reflected light signal, the control device 9 converts the optical signal received by the receiving optical fiber 7 into an analog electrical signal. For the convenience of processing, the analog electrical signal is further converted from analog to digital. Then, the control device 9 performs arithmetic processing on the converted electrical signal, and can identify the time when the blade 1 under test passes through the cone beam 2 . As shown in FIG. 2 , in some embodiments, the control device 9 includes at least an emission light control module, a reflected light processing module and an arithmetic module, wherein the emission light control module has an optical fiber 6 interface, which is connected to the emission optical fiber 8 and can control the emission optical fiber. 8. Emit single-mode laser and control the laser intensity. The emission light control module may be an existing laser generating device in the prior art. The reflected light processing module has an optical fiber 6 interface, which is connected to the receiving optical fiber 7. When the reflected light signal passing through the receiving optical fiber 7 is converted into an analog electrical signal by the reflected light processing module, it is further converted into a digital signal. The reflected light control module may include a photocell for converting optical signals into electrical signals, and an A/D conversion component for converting analog electrical signals into digital signals. The operation module receives the digital signal from the reflected light processing module, and can perform operation to identify the time when the blade 1 under test passes through the cone beam 2 . At the same time, the operation module can also be connected with the emission light control module, and sends instructions such as the intensity of the laser to be emitted to the emission light control module. In some embodiments, the control device 9 further includes a storage module to store the digital signal, the calculated data, etc. in the control device 9 . In some embodiments, the control device 9 may also integrate subsequent data processing functions, that is, calculate the tip clearance according to the time when the measured blade 1 passes through the cone beam 2 , the rotational speed and the radius of the measured blade 1 . In some embodiments, the control device 9 further includes a communication module, which can communicate with the upper computer 10 to realize data interaction, thereby realizing the remote control of the online measurement device 100, and at the same time, the function of calculating the blade tip clearance can be implemented on the upper computer 10. It is realized to simplify the structure of the control device 9 . The control device 9 may adopt a known processing system, such as an industrial computer, a single-chip microcomputer, an embedded system, etc., and a display component, a human-computer interaction component, etc. may also be integrated on the control device 9 .
本申请还提供了一种进行叶顶间隙在线测量的方法,如图3所示,包括如下步骤:The present application also provides a method for on-line measurement of blade tip clearance, as shown in Figure 3, comprising the following steps:
步骤S1:发射锥形光束2,使其照射在被测叶片1上。可以通过如上所述的在线测量装置100产生锥形光束2,较佳地,发射光纤8发出单模激光,经过透镜4后形成锥形光束2,通过机匣3照射在被测叶片1上;Step S1: emit a cone beam 2 to irradiate the blade 1 under test. The cone-shaped beam 2 can be generated by the above-mentioned online measuring device 100, preferably, the single-mode laser is emitted from the transmitting optical fiber 8, and the cone-shaped beam 2 is formed after passing through the lens 4, and is irradiated on the measured blade 1 through the casing 3;
步骤S2:接收经被测叶片1反射的光。当被测叶片1经过锥形光束2时,叶顶区域发生漫反射,反射光通过接收光纤7传输至控制装置9;Step S2: Receive the light reflected by the blade 1 under test. When the measured blade 1 passes through the cone beam 2, diffuse reflection occurs in the blade tip area, and the reflected light is transmitted to the control device 9 through the receiving fiber 7;
步骤S3:将反射光转换为电信号。控制装置9接收到反射光后,经过反射光处理模块,将反射光信号转换为模拟电信号,进一步地可以转换成数字信号;Step S3: Convert the reflected light into an electrical signal. After receiving the reflected light, the control device 9 converts the reflected light signal into an analog electrical signal through the reflected light processing module, and further can be converted into a digital signal;
步骤S4:计算叶顶间隙。控制装置9可以处理电信号,从而识别出被测叶片1通过锥形光束2的时间,然后结合叶片转速、叶顶半径,计算出叶顶间隙的大小。Step S4: Calculate the tip clearance. The control device 9 can process the electrical signal to identify the time when the measured blade 1 passes through the cone beam 2, and then calculate the size of the blade tip gap by combining the blade rotational speed and the blade tip radius.
其中,步骤4中,计算叶顶间隙的原理如下:Among them, in step 4, the principle of calculating the tip clearance is as follows:
如图4所示,是被测叶片1通过锥形光束2时的光路示意图,其中,d lens表示透镜4有效直径,x pass表示叶尖在锥形光束2区域中的通过长度,c表示叶顶间隙大小,v表示像距,d tip表示叶顶厚度,d focus表示焦点直径,ω表示转速,r表示叶顶半径,t表示被测叶片1通过锥形光束2时控制装置9被触发的时间。则叶顶间隙与触发长度的关系可以表示为: As shown in Figure 4, it is a schematic diagram of the optical path of the measured blade 1 passing through the cone beam 2, in which, d lens represents the effective diameter of the lens 4, x pass represents the passing length of the blade tip in the area of the cone beam 2, and c represents the blade The size of the tip gap, v is the image distance, d tip is the thickness of the blade tip, d focus is the diameter of the focal point, ω is the rotational speed, r is the radius of the blade tip, and t is the control device 9 is triggered when the measured blade 1 passes through the cone beam 2 time. Then the relationship between the tip clearance and the trigger length can be expressed as:
Figure PCTCN2021095979-appb-000002
Figure PCTCN2021095979-appb-000002
该式的右边由两部分组成,第一部分
Figure PCTCN2021095979-appb-000003
是与叶片通过锥形光束2时控制装置9被触发的时间成正比的一项,该项的比例系数与被测物体无关,仅与光纤探头5相关。第二部分
Figure PCTCN2021095979-appb-000004
是一与被测物体和探头都相关的常数。
The right-hand side of the formula consists of two parts, the first part
Figure PCTCN2021095979-appb-000003
It is an item that is proportional to the time when the control device 9 is triggered when the blade passes through the cone beam 2 . the second part
Figure PCTCN2021095979-appb-000004
is a constant related to both the measured object and the probe.
在实际使用中,该式可以被简化为:In practice, this formula can be simplified to:
c=kωrt-b          (2)c=kωrt-b (2)
其中,k是一仅与光纤探头5相关的常数,称为光纤探头5常数,进行实际测量前需要对其进行标定。而b是与被测叶片1相关的常数,它只影响叶顶间隙的具体值而不影响其变化量,因此b的值可以视为测量零点,可在测量过程中指定。Among them, k is a constant only related to the optical fiber probe 5, which is called the optical fiber probe 5 constant, which needs to be calibrated before actual measurement. And b is a constant related to the measured blade 1, it only affects the specific value of the tip clearance without affecting its variation, so the value of b can be regarded as the measurement zero point and can be specified during the measurement process.
运用公式(2)进行叶顶间隙测量的流程如图5所示,标定光纤探头5常数k,然后测量被测叶片1通过锥形光束2时控制装置9被触发的时间t,结合转速、叶片半径,并将b视为零点,计算叶顶间隙c。The process of using formula (2) to measure the tip clearance is shown in Figure 5. The constant k of the fiber probe 5 is calibrated, and then the time t when the control device 9 is triggered when the measured blade 1 passes through the cone beam 2 is measured. Radius, and considering b as the zero point, calculate the tip clearance c.
参见图6,对于确定控制装置9被触发时间t的方法如下所述。控制装置9被触发,具体指控制装置9中的将反射光转化为电信号的组件被触发,在一些实施方式中,反射光转化为电信号的组件可以选用光电管。这里以光电管为例进行描述。首先,设定一触发电压阈值和抑噪延时阈值。当控制装置9收集到的电模拟信号幅值超过设定的触发电压阈值时,可以被认为是开始触发,即有被测叶片1开始通过光纤探头5。当模拟电信号幅值低于触发电压阈值时,被认为是结束触发,即被测叶片1完全离开光纤探头5。考虑到电模拟信号本身存在噪声波动,开始触发后时间超出抑噪延时阈值的结束触发才被称为有效结束触发,同理,结束触发后时间超出抑噪延时阈值的开始触发才被认为是有效开始触发。一次有效上升触发和一次有效下降触发之间的时间差即为光电管被触发的时间t。Referring to FIG. 6 , the method for determining the time t when the control device 9 is activated is as follows. The control device 9 is triggered, specifically, the component in the control device 9 that converts the reflected light into an electrical signal is triggered. In some embodiments, the component that converts the reflected light into an electrical signal can use a photocell. The photocell is used as an example for description here. First, set a trigger voltage threshold and noise suppression delay threshold. When the amplitude of the electrical analog signal collected by the control device 9 exceeds the set trigger voltage threshold, it can be considered as starting to trigger, that is, the blade 1 under test starts to pass through the fiber probe 5 . When the amplitude of the analog electrical signal is lower than the trigger voltage threshold, it is regarded as the end of the trigger, that is, the blade under test 1 completely leaves the fiber probe 5 . Considering the noise fluctuation of the electrical analog signal itself, the end trigger whose time exceeds the noise suppression delay threshold after the start trigger is called an effective end trigger. Similarly, the start trigger whose time exceeds the noise suppression delay threshold after the end trigger is regarded as a valid end trigger. is a valid start trigger. The time difference between an effective rising trigger and an effective falling trigger is the time t when the photocell is triggered.
在识别出被测叶片1通过锥形光束2所用的时间后,根据叶片转速和叶片半径计算被测叶片1通过锥形光束2的等效长度,然后根据等效长度计算出叶顶间隙大小,即可以采用如上所述的两个公式之一进行计算。After identifying the time it takes for the blade 1 to pass through the cone beam 2, calculate the equivalent length of the blade 1 to pass through the cone beam 2 according to the blade speed and blade radius, and then calculate the tip clearance according to the equivalent length. That is, one of the two formulas described above can be used for calculation.
对于公式(2)中,光纤探头常数k可以通过试验台进行标定。在该试验台中,被测叶片的转速和叶顶间隙是能够被精确控制的。For formula (2), the fiber probe constant k can be calibrated by the test bench. In this test rig, the rotational speed and tip clearance of the blade under test can be precisely controlled.
如图7所示,试验台包括支架22、动力部件21、叶轮23和微动平台24,支架22与动力部件21固定连接,叶轮23连接至动力部件21的输出轴,待标定的在线测量装置100的光纤探头固定在微动平台20上,通过调节微动平台24的水平位置,从而调节光纤探头与叶轮23的叶顶之间的间隙,达到精确控制叶顶间隙的目的。同时,通过控制动力部件21的转速,达到精确控制叶轮23转速的目的。As shown in FIG. 7 , the test bench includes a bracket 22, a power component 21, an impeller 23 and a micro-movement platform 24. The bracket 22 is fixedly connected to the power component 21, and the impeller 23 is connected to the output shaft of the power component 21. The on-line measurement device to be calibrated The fiber probe of 100 is fixed on the micro-movement platform 20. By adjusting the horizontal position of the micro-movement platform 24, the gap between the fiber probe and the tip of the impeller 23 is adjusted to achieve the purpose of accurately controlling the tip gap. At the same time, by controlling the rotational speed of the power component 21 , the purpose of precisely controlling the rotational speed of the impeller 23 is achieved.
在一些实施方式中,动力部件21可以选用伺服电机,应当理解,也可以选用其他类型的电机。In some embodiments, the power component 21 may be a servo motor, and it should be understood that other types of motors may also be used.
在一些实施方式中,为能够精确控制叶顶间隙,微动平台24可以选用四轴微动平台24,即微动平台24具有四个自由度,其在XYZ三个方向可以精确调整,以及围绕光纤探5头的中线的角度可以精确调整。微动平台24可以很好地实现叶顶间隙的控制,控制精度可以设为不低于0.01毫米。In some embodiments, in order to precisely control the blade tip clearance, the micro-movement platform 24 can be selected as a four-axis micro-movement platform 24, that is, the micro-movement platform 24 has four degrees of freedom, which can be precisely adjusted in the three directions of XYZ, and the surrounding The angle of the center line of the fiber probe 5 can be precisely adjusted. The micro-moving platform 24 can well control the blade tip clearance, and the control precision can be set to not less than 0.01 mm.
在一些实施方式中,试验台可以放置在一个刚性达到预设要求的平台20上,以减少外界环境对标定的干扰。In some embodiments, the test bench can be placed on a platform 20 whose rigidity meets a preset requirement, so as to reduce the interference of the external environment on the calibration.
参见图8,对光纤探头常数进行标定的方法如下:Referring to Figure 8, the method for calibrating the fiber probe constant is as follows:
S201:控制动力部件21旋转,使得叶轮23旋转。叶轮23旋转n圈,采集第i圈第j个叶片通过光纤探头的时间t ij;其中,i≤n,j≤叶轮23的叶片总数。 S201: Control the rotation of the power component 21 so that the impeller 23 rotates. The impeller 23 rotates n times, and the time t ij when the jth blade of the ith circle passes through the optical fiber probe is collected;
S202:基于叶轮23旋转n圈,计算叶轮23的被测叶片通过光纤探头的平均时间:
Figure PCTCN2021095979-appb-000005
S202: Calculate the average time for the blades under test of the impeller 23 to pass through the fiber probe based on n rotations of the impeller 23:
Figure PCTCN2021095979-appb-000005
S203:将叶顶间隙依次增大预设值,重复执行步骤S201至步骤S202。S203: Increase the blade tip clearance by a preset value in turn, and repeat steps S201 to S202.
S204:参见图9,将采集的数据进行处理:以控制装置被触发时间与叶尖速度的乘积
Figure PCTCN2021095979-appb-000006
为横轴,设定的叶顶间隙为纵轴作图,得到每个叶片对应的变化关系;
S204: Referring to FIG. 9, the collected data is processed: the product of the triggering time of the control device and the speed of the blade tip
Figure PCTCN2021095979-appb-000006
is the horizontal axis, the set tip clearance is plotted as the vertical axis, and the corresponding change relationship of each blade is obtained;
S205:将每个叶片对应的变化关系拟合为直线,得到斜率k j;其中,可以采用最小二乘法进行拟合; S205: Fit the variation relationship corresponding to each leaf as a straight line to obtain the slope k j ; wherein, the least squares method can be used for fitting;
S206:计算斜率的平均值k=∑k j,完成光纤探头常数k的标定。 S206: Calculate the average value k=∑k j of the slope, and complete the calibration of the constant k of the fiber probe.
其中,叶轮23旋转的圈数n可以设置为≥100,将叶顶间隙依次增大的梯度为0.2,0.4,……,1.2毫米,然后重复步骤S201的采集过程。Wherein, the number n of rotations of the impeller 23 can be set to be ≥100, and the gradient of increasing the tip clearance in sequence is 0.2, 0.4, .
在本申请中,使用一台具有12个叶片的试验台进行了试验。在转速变化的条件下实时测量叶顶间隙,结果如图10所示。可见,本申请在变转速工况下,可以准确反应叶顶间隙的变化,精度不低于0.05毫米,验证了本申请的可行性。In the present application, experiments were carried out using a test rig with 12 blades. The tip clearance was measured in real time under the condition of changing rotational speed, and the results are shown in Figure 10. It can be seen that under the condition of variable speed, the application can accurately reflect the change of the blade tip clearance, and the accuracy is not less than 0.05 mm, which verifies the feasibility of the application.
应当注意,除了以纯计算机可读程序代码方式实现本申请提供的系统、装置及其各个模块以外,完全可以通过将方法步骤进行逻辑编程来使得本申请提供的系统、装置及其各个模块以逻辑门、开关、专用集成电路、可编程逻辑控制器以及嵌入式微控制器等的形式来实现相同程序。所以,本申请提供的系统、装置及其各个模块可以被认为是一种硬件部件,而对其内包括的用于实现各种程序的模块也可以视为硬件部件内的结构;也可以将用于实现各种功能的模块视为既可以是实现方法的软件程序又可以是硬件部件内的结构。It should be noted that, in addition to implementing the system, device and each module provided by the present application in the form of pure computer readable program code, the system, device and each module provided by the present application can be implemented by logic gates by logically programming the method steps. , switches, application-specific integrated circuits, programmable logic controllers, and embedded microcontrollers to implement the same program. Therefore, the systems, devices and their respective modules provided in this application can be considered as a kind of hardware components, and the modules included in them for realizing various programs can also be considered as structures in the hardware components; A module for realizing various functions can be regarded as either a software program for realizing a method or a structure within a hardware component.
以上详细描述了本申请的较佳具体实施例。应当理解,本领域的普通技术无需创造性劳动就可以根据本申请的构思作出诸多修改和变化。因此,凡本技术领域中技术人员依本申请的构思在现有技术的基础上通过逻辑分析、推理或者有限的实验可以得到的技术方案,皆应在由权利要求书所确定的保护范围内。The preferred specific embodiments of the present application are described in detail above. It should be understood that many modifications and changes can be made according to the concept of the present application without creative efforts by ordinary skills in the art. Therefore, any technical solutions that can be obtained by those skilled in the art through logical analysis, reasoning or limited experiments on the basis of the prior art according to the concept of the present application shall fall within the protection scope determined by the claims.

Claims (20)

  1. 一种叶顶间隙在线测量装置,其特征在于,包括:An on-line measuring device for blade tip clearance, comprising:
    光纤探头,被配置为能够形成锥形光束;a fiber optic probe configured to form a cone beam;
    光纤,一端连接至所述光纤探头,所述光纤包括发射光纤和接收光纤;an optical fiber, one end is connected to the optical fiber probe, and the optical fiber includes a transmitting optical fiber and a receiving optical fiber;
    控制装置,与所述光纤的另一端连接,所述控制装置被配置为能够控制所述发射光纤发射光的强度,处理被所述接收光纤接收的反射光以及识别被测叶片通过所述锥形光束所用的时间。a control device connected to the other end of the optical fiber, the control device configured to be able to control the intensity of the light emitted by the transmitting optical fiber, process the reflected light received by the receiving optical fiber, and identify the blade under test passing through the taper The time spent by the beam.
  2. 如权利要求1所述的叶顶间隙在线测量装置,其特征在于,所述光纤探头的一端连接所述光纤,另一端设置有机匣,所述机匣上设置有开孔,所述开孔的圆心与所述光线探头的中心重叠;所述机匣内还设置有透镜。The on-line measuring device for blade tip clearance according to claim 1, wherein one end of the optical fiber probe is connected to the optical fiber, and the other end is provided with a casing, the casing is provided with an opening, and the opening of the opening is The center of the circle overlaps with the center of the light probe; a lens is also arranged in the casing.
  3. 如权利要求1所述的叶顶间隙在线测量装置,其特征在于,所述光纤为集束光纤。The on-line measuring device for blade tip clearance according to claim 1, wherein the optical fiber is a bundled optical fiber.
  4. 如权利要求1所述的叶顶间隙在线测量装置,其特征在于,所述控制装置包括发射光控制模块、反射光处理模块和运算模块,所述发射光控制模块被配置为控制所述发射光纤发射光的强度,所述反射光处理模块被配置为将所述反射光信号转换为电信号;所述运算模块被配置为能够识别所述被测叶片通过所述锥形光束所用的时间。The on-line measuring device for blade tip clearance according to claim 1, wherein the control device comprises an emission light control module, a reflected light processing module and an arithmetic module, and the emission light control module is configured to control the emission optical fiber the intensity of the emitted light, the reflected light processing module is configured to convert the reflected light signal into an electrical signal; the arithmetic module is configured to be able to identify the time it takes for the blade under test to pass through the cone beam.
  5. 如权利要求4所述的叶顶间隙在线测量装置,其特征在于,所述控制装置还包括通信模块,所述通信模块被配置为将所述控制装置与上位机通讯。The online blade tip clearance measuring device according to claim 4, wherein the control device further comprises a communication module, and the communication module is configured to communicate the control device with a host computer.
  6. 一种使用如权利要求1所述的测量装置进行叶顶间隙在线测量的方法,其特征在于,所述方法包括如下步骤:A method for on-line measurement of blade tip clearance using the measuring device as claimed in claim 1, wherein the method comprises the steps of:
    发射锥形光束,使其照射在被测叶片上;Emit a cone beam to irradiate on the tested leaf;
    接收经所述被测叶片反射的光;receiving the light reflected by the measured blade;
    将所述反射的光转换成电信号;converting the reflected light into an electrical signal;
    识别所述被测叶片通过所述锥形光束的时间;Identifying the time when the blade under test passes through the cone beam;
    计算叶顶间隙。Calculate tip clearance.
  7. 如权利要求6所述的方法,其特征在于,所述反射的光转换成电信号的步骤包括:先将所述反射的光转换成模拟电信号,然后将所述模拟电信号转换成数字电信号。The method of claim 6, wherein the step of converting the reflected light into an electrical signal comprises: first converting the reflected light into an analog electrical signal, and then converting the analog electrical signal into a digital electrical signal Signal.
  8. 如权利要求6所述的方法,其特征在于,根据以下公式1计算所述叶顶间隙:The method of claim 6, wherein the tip clearance is calculated according to Equation 1 below:
    Figure PCTCN2021095979-appb-100001
    Figure PCTCN2021095979-appb-100001
    其中,d lens表示所述测量装置的透镜的有效直径;c表示所述叶顶间隙大小;v表示像距;d tip表示叶顶厚度;d focus表示焦点直径;ω表示所述待测叶片的转速;r表示所述待测叶片的叶顶半径;t表示所述待测叶片通过所述锥形光束时所述测量装置的控制装置被触发的时间。 Wherein, d lens represents the effective diameter of the lens of the measuring device; c represents the size of the blade tip clearance; v represents the image distance; d tip represents the thickness of the blade tip; d focus represents the focal point diameter; rotational speed; r represents the tip radius of the blade to be measured; t represents the time when the control device of the measurement device is triggered when the blade to be measured passes through the cone beam.
  9. 如权利要求8所述的方法,其特征在于,所述公式1能够被简化为如下所示:The method of claim 8, wherein the formula 1 can be simplified as follows:
    c=kwrt-b  2c=kwrt-b 2
    其中,c表示所述叶顶间隙,k表示光纤探头常数,w表示所述被测叶片的转速,r表示所述被测叶片的叶顶半径,t表示所述被测叶片通过所述锥形光束时所述控制装置被触发的时间,b表示所述被测叶片的常数。Where, c represents the tip clearance, k represents the fiber probe constant, w represents the rotational speed of the blade under test, r represents the tip radius of the blade under test, and t represents the blade under test passing through the cone The time when the control device is activated when the beam is on, b represents the constant of the measured blade.
  10. 如权利要求8所述的方法,其特征在于,识别所述被叶片通过所述锥形光束的时间的步骤包括:9. The method of claim 8, wherein the step of identifying when the bladed beam passes the cone of light comprises:
    当所述模拟电信号超过预设触发电压阈值时,所述控制装置被触发,所述被测叶片开始通过所述光纤探头;When the analog electrical signal exceeds a preset trigger voltage threshold, the control device is triggered, and the tested blade starts to pass through the fiber probe;
    当所述模拟电信号低于所述预设触发电压阈值时,所述控制装置被触发,所述被测叶片离开所述光纤探头。When the analog electrical signal is lower than the preset trigger voltage threshold, the control device is triggered, and the measured blade leaves the fiber probe.
  11. 如权利要求10所述的方法,其特征在于,所述方法还包括:The method of claim 10, wherein the method further comprises:
    所述被测叶片开始通过所述光纤探头的时间超出预设延时阈值时,则认为所述控制装置被有效触发;When the time when the measured blade starts to pass through the optical fiber probe exceeds a preset delay threshold, it is considered that the control device is effectively triggered;
    所述被测叶片离开所述光线探头时间超出所述预设延时阈值时,则认为所述控制装置被有效触发。When the time when the measured blade leaves the light probe exceeds the preset delay threshold, it is considered that the control device is effectively triggered.
  12. 如权利要求11所述的方法,其特征在于,所述方法还包括:The method of claim 11, wherein the method further comprises:
    在所述有效触发情况下,所述被测叶片通过所述光纤探头的时间点和所述被测叶片离开所述光纤探头的时间点之间的时间差作为所述被测叶片通过所述锥形光束时所述控制装置被触发的时间t。In the case of the effective triggering, the time difference between the time point when the measured blade passes through the optical fiber probe and the time point when the measured blade leaves the optical fiber probe is taken as the time point when the measured blade passes through the cone The time t at which the control device is activated when the beam is activated.
  13. 如权利要求9所述的方法,其特征在于,所述方法还包括:标定所述光纤探头的常数k。The method of claim 9, wherein the method further comprises: calibrating the constant k of the fiber probe.
  14. 如权利要求13所述的方法,其特征在于,在试验台上执行标定所述光纤探头的常数k的步骤。14. The method of claim 13, wherein the step of calibrating the constant k of the fiber probe is performed on a test bench.
  15. 如权利要求14所述的方法,其特征在于,所述试验台被配置为能够控制叶顶间隙。15. The method of claim 14, wherein the test stand is configured to control tip clearance.
  16. 如权利要求15所述的方法,其特征在于,标定所述光纤探头的常数k的步骤,包括如下步骤:The method of claim 15, wherein the step of calibrating the constant k of the optical fiber probe comprises the following steps:
    所述试验台的叶轮旋转n圈,采集所述叶轮的每个叶片在每一圈通过所述光纤探头的时间;The impeller of the test stand rotates n times, and the time when each blade of the impeller passes through the fiber probe in each circle is collected;
    基于所述叶轮旋转n圈,计算每个所述叶片通过所述光纤探头的平均时间;Calculate the average time for each of the blades to pass through the fiber probe based on n rotations of the impeller;
    依次增加所述叶顶间隙的所述预设值,重复执行上述步骤;sequentially increasing the preset value of the tip clearance, and repeating the above steps;
    以所述控制装置被触发的时间与所述叶片的叶尖速度的乘积为横轴、所述叶顶间隙为纵轴,得到每个所述叶片对应的变化关系;Taking the product of the triggering time of the control device and the tip speed of the blade as the horizontal axis, and the tip clearance as the vertical axis, the corresponding variation relationship of each blade is obtained;
    将每个所述叶片对应的所述变化关系拟合为直线,得到斜率;Fitting the variation relationship corresponding to each of the blades as a straight line to obtain a slope;
    计算所述斜率的平均值,完成所述光纤探头的常数k的标定。The average value of the slope is calculated to complete the calibration of the constant k of the fiber probe.
  17. 如权利要求16所述的方法,其特征在于,使用最小二乘法将每个所述叶片对应的所述变化关系拟合为直线。17. The method of claim 16, wherein the variation relationship corresponding to each of the blades is fitted as a straight line using a least squares method.
  18. 一种用于标定如权利要求1所述的在线测量装置的试验台,其特征在于,所述试验台包括支架、动力部件、叶轮和微动平台,所述支架与所述动力部件固定连接,所述叶轮连接至所述动力部件的输出轴上,所述在线测量装置的光纤探头固定在所述微动平台上,通过调节所述微动平台的水平位置以实现叶顶间隙的控制。A test bench for calibrating the online measurement device according to claim 1, wherein the test bench comprises a bracket, a power component, an impeller and a micro-movement platform, and the bracket is fixedly connected with the power component, The impeller is connected to the output shaft of the power component, the fiber probe of the online measurement device is fixed on the micro-movement platform, and the tip clearance is controlled by adjusting the horizontal position of the micro-movement platform.
  19. 如权利要求18所述的试验台,其特征在于,所述试验台设置在一固定平台上。The test stand according to claim 18, wherein the test stand is arranged on a fixed platform.
  20. 如权利要求18所述的试验台,其特征在于,所述微动平台具有四个自由度。The test stand of claim 18, wherein the micro-movement platform has four degrees of freedom.
PCT/CN2021/095979 2021-02-02 2021-05-26 Tip clearance online measuring device, measuring method, and test bench WO2022166037A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202110143238.XA CN112902859B (en) 2021-02-02 2021-02-02 Blade tip timing technology-based blade tip clearance online measurement method and device
CN202110143238.X 2021-02-02

Publications (1)

Publication Number Publication Date
WO2022166037A1 true WO2022166037A1 (en) 2022-08-11

Family

ID=76121448

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2021/095979 WO2022166037A1 (en) 2021-02-02 2021-05-26 Tip clearance online measuring device, measuring method, and test bench

Country Status (2)

Country Link
CN (1) CN112902859B (en)
WO (1) WO2022166037A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113865519A (en) * 2021-09-29 2021-12-31 中国航发动力股份有限公司 Concentricity assembly quality detection device and method
CN114034259B (en) * 2022-01-11 2022-06-10 成都中科翼能科技有限公司 Blade tip clearance measuring system and method based on double optical fiber probes

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100168981A1 (en) * 2008-10-24 2010-07-01 Prime Photonics, Lc Differential Focus Blade Clearance Probe and Methods for Using Same
CN103438814A (en) * 2013-08-29 2013-12-11 中国科学院工程热物理研究所 Optical fiber measurement method and device of blade tip clearance
CN104501728A (en) * 2014-12-12 2015-04-08 天津大学 Tip clearance measurement method based on all-fiber tip timing
CN112097662A (en) * 2020-08-27 2020-12-18 天津大学 Blade tip clearance measuring device and method based on three-beam blade tip timing
CN112129400A (en) * 2020-09-24 2020-12-25 哈尔滨工程大学 Device and method for regularly measuring blade tip based on optical fiber bundle probe

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59142408A (en) * 1983-02-02 1984-08-15 Ishikawajima Harima Heavy Ind Co Ltd Device for measuring tip clearance of blade
DE102010053726B4 (en) * 2010-11-30 2012-11-29 Technische Universität Dresden Device for non-incremental position and shape measurement of moving solids
DE102011077736A1 (en) * 2011-06-17 2012-12-20 Siemens Aktiengesellschaft distance sensor
JP6532061B2 (en) * 2016-03-18 2019-06-19 三菱重工業株式会社 Optical measurement apparatus, optical measurement method and rotary machine
CN110702208A (en) * 2019-10-11 2020-01-17 天津大学 Optical fiber bundle type blade tip timing sensor based on self-focusing lens

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100168981A1 (en) * 2008-10-24 2010-07-01 Prime Photonics, Lc Differential Focus Blade Clearance Probe and Methods for Using Same
CN103438814A (en) * 2013-08-29 2013-12-11 中国科学院工程热物理研究所 Optical fiber measurement method and device of blade tip clearance
CN104501728A (en) * 2014-12-12 2015-04-08 天津大学 Tip clearance measurement method based on all-fiber tip timing
CN112097662A (en) * 2020-08-27 2020-12-18 天津大学 Blade tip clearance measuring device and method based on three-beam blade tip timing
CN112129400A (en) * 2020-09-24 2020-12-25 哈尔滨工程大学 Device and method for regularly measuring blade tip based on optical fiber bundle probe

Also Published As

Publication number Publication date
CN112902859B (en) 2021-12-24
CN112902859A (en) 2021-06-04

Similar Documents

Publication Publication Date Title
WO2022166037A1 (en) Tip clearance online measuring device, measuring method, and test bench
US4806018A (en) Angular reflectance sensor
CN106735864A (en) The vibration mirror scanning laser processing and device of coaxial real-time detection
EP3628963B1 (en) Measurement system and method of manufacturing a shaft with a hole
CN106017519B (en) A kind of Demodulation System for Fiber Optic Fabry-Perot Sensors and method
CN112539698B (en) Method for on-line tracking and real-time feedback of laser beam acting material interior
US20220128029A1 (en) Improving or optimizing wind turbine output by detecting flow detachment
WO2013181598A1 (en) Laser-based edge detection
US4136961A (en) Method and apparatus for detection of inclusions in glass article or the like
US4484069A (en) Apparatus and method for sensing distance
US5137353A (en) Angular displacement measuring device
CN109387824A (en) A kind of laser range finder transmitting-receiving plain shaft parallelism measurement method
US20220364959A1 (en) Determination apparatus, machining system, determination method, and recording medium
CN100470193C (en) Device and method for measuring thickness of quartz wave plate
CN1180237C (en) Broad-band light source signal detection method and its detector
US3873211A (en) Hole measurer controller
CN108195300A (en) A kind of method of fibre-optical F-P sensor measuring strain
CN109297585A (en) A kind of Experiments of Optics system and experimental method based on facula deviation method measurement laser facula focal diameter
JPH10209199A (en) Vibration amplitude evaluator and wire bonder
CN210198563U (en) Real-time monitoring laser energy device
CN108318135A (en) A kind of optical-fiber laser on-line monitoring system
CN106969717A (en) Symmetrical beam bridge-type is from stabilized laser measurement diameter system and its scaling method, measuring method
CN203687883U (en) Prepreg online detection device
CN207502552U (en) rotary body detection device and system
CN1249414C (en) Torque dynamic measurer of low speed spindle base on visual sense

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 21924044

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

32PN Ep: public notification in the ep bulletin as address of the adressee cannot be established

Free format text: NOTING OF LOSS OF RIGHTS PURSUANT TO RULE 112(1) EPC (EPO FORM 1205A DATED 24.01.2024)