WO2022157458A1 - Dispositif de mesure et/ou de modification d'une surface - Google Patents
Dispositif de mesure et/ou de modification d'une surface Download PDFInfo
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- WO2022157458A1 WO2022157458A1 PCT/FR2022/050112 FR2022050112W WO2022157458A1 WO 2022157458 A1 WO2022157458 A1 WO 2022157458A1 FR 2022050112 W FR2022050112 W FR 2022050112W WO 2022157458 A1 WO2022157458 A1 WO 2022157458A1
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- probe
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- sample holder
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
- G01Q60/04—STM [Scanning Tunnelling Microscopy] combined with AFM [Atomic Force Microscopy]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q40/00—Calibration, e.g. of probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
- G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/06—Probe tip arrays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
- G01Q30/12—Fluid environment
- G01Q30/14—Liquid environment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q80/00—Applications, other than SPM, of scanning-probe techniques
Definitions
- TITLE DEVICE FOR MEASURING AND/OR MODIFYING A SURFACE
- the present invention relates to a device capable of measuring and/or treating a surface by scanning one or more probes.
- an AFM comprises a probe, the probe comprising a tip capable of being positioned opposite the surface, for example in contact and up to several hundred nanometers from the surface.
- the interaction between the tip and the surface to be evaluated leads to a variation of the mechanical properties of the probe. This variation is recorded to evaluate the surface, for example by measuring variations in the reflection of a laser beam on the probe, or variations in the electrical properties of a piezoresistive material integrated into the probe.
- the intermittent contact mode consists for example of causing the probe to vibrate at its resonant frequency, at a predetermined amplitude.
- the interaction between the tip of the probe and the surface causes a variation in the resonance frequency of the probe, and thus a reduction in the amplitude of the vibrations.
- Different control means make it possible to maintain the amplitude of the vibrations of the probe constant, or the amplitude of the forces of interaction between the tip and the surface constant, while scanning the surface with the tip so as to evaluate the surface.
- the spatial resolution in a plane tangent to the surface, is limited by the size of the tip.
- the resolution of a measurement of the force of interaction between the tip and the surface is limited by the mechanical properties of the probe.
- an AFM probe has a tuning fork shape, of micrometric or millimetric size, made for example of quartz.
- Giessibl et al. (Giessibl, FJ, Pielmeier, F., Eguchi, T., An, T., & Hasegawa, Y. (2011 ), Comparison of force sensors for atomic force microscopy based on quartz tuning forks and length-extensional resonators, Physical Review B, 84(2), 125409) describe the use of a micrometric probe, having a bending stiffness of between 500 N.m' 1 and 3000 N.nr 1 .
- the probe comprises a harmonic oscillator of macroscopic size, in particular a tuning fork whose size is greater than 1 cm, on which a tungsten tip is fixedly mounted and intended to be positioned opposite the surface to be evaluated.
- a harmonic oscillator of macroscopic size in particular a tuning fork whose size is greater than 1 cm, on which a tungsten tip is fixedly mounted and intended to be positioned opposite the surface to be evaluated.
- the known devices do not make it possible to easily measure different parameters at the same point on the surface, nor to treat the surface while measuring it, using different probes. Such measurements or multiple treatments are difficult and costly today, and require the use of different instruments, with limited results.
- Document FR 3089850 describes an additive manufacturing system for depositing a fluid on a substrate in a controlled manner.
- the system makes it possible to detect the approach of a protuberance in the vicinity of the substrate, but does not make it possible to implement a simultaneous measurement with the deposit, making it possible to characterize the deposits made.
- the probes making it possible to measure the surface in ⁇ FM mode, or in ⁇ FM mode functionalized so as to detect magnetic properties of the surface each comprise a probe movement detector. It is thus necessary to change the device to implement each of the measures.
- An object of the invention is to propose a solution for manufacturing a device making it possible to couple measurements of different natures using a device that is simpler than the known devices. Another object of the invention is to increase the precision of the measurements obtained by the known devices. Another object of the invention is to propose a solution making it possible both to measure a surface and to process or modify the measured surface. Another object of the invention is to make it possible to measure the same surface by a tunneling current measurement and by an atomic force measurement.
- At least one of the preceding aims is achieved in the context of the present invention by means of a device for measuring and/or modifying a surface of a sample, comprising:
- a sample holder having a first zone adapted to receive the sample mounted in a fixed manner with respect to the first zone
- the device also comprising at least one element chosen from: i) a hybrid probe able to detect a first parameter at a point on the surface and to generate a first measurement signal representative of the first parameter, and a second parameter at the same point on the surface, different from the first parameterized, and to generate a second measurement signal representative of the second parameter, and ii) a first probe able to detect a first parameter at a point of the surface and to generate a first measurement signal representative of the first parameter, and a second probe able to detect a second parameter at a point on the surface and to generate a second measurement signal representative of the second parameter, the first parameter being different from the second parameter, or one of the first probe and of the second probe being able to modify a third parameter of the surface at the point of the surface,
- the sample holder having at least a second zone, distinct from the first zone and fixed with respect to the support, the sample holder being deformable so as to allow a relative movement of the first zone with respect to the second zone,
- the device comprising a detector capable of detecting a displacement of the first zone relative to the second zone
- the device comprising a processing module configured to determine a property of the surface at a plurality of points on the surface from a plurality of first signals and a plurality of second signals generated by the hybrid probe, or by the first probe and by the second probe, when the hybrid probe is positioned successively facing several points on the surface, or when the first probe and the second probe are each positioned successively facing several points on the surface.
- the device may advantageously comprise the following characteristics, taken individually or in any of their technically possible combinations:
- the first probe and the second probe are each capable of modifying respectively a third parameter of the surface and a fourth parameter of the surface at the point of the surface, the third parameter and the fourth parameter being different from each other
- the device comprises the first probe and the second probe, the device also comprising a probe switch, the first probe and the second probe each being fixedly mounted on the probe switch, the switch being configured to cause a movement of the first probe and the second probe with respect to the sample holder, so that before the movement, the first probe is facing a point on the surface and after the movement, the second probe is facing the same point of the surface,
- the switch comprises a system for rotating the probes configured so that the movement is a rotational movement, the switch preferably comprising a translation system configured to control a translation of the rotation system, relative to the sample holder along an axis perpendicular to the surface,
- the switch comprises a translation system configured to control a translation of the rotation system relative to the sample holder along an axis parallel to the surface
- the sample holder is a harmonic oscillator
- the detector is mounted fixed to the sample holder, and is preferably mounted fixed to the first zone,
- the device comprises an actuator configured to cause the sample holder to vibrate at a predetermined frequency
- the device comprises a closed-loop servo-control regulator, the detector being capable of transmitting a signal representative of a measurement of the displacement of the first zone to the regulator and the regulator being capable of transmitting a regulation signal to the actuator,
- the sample holder has a length greater than 2 mm, in particular greater than 1 cm, and preferably greater than 3 cm,
- a bending stiffness of the sample holder between the first zone and the second zone is greater than 10 3 N.nr 1 , in particular greater than 10 4 N.nr 1 and preferably greater than 10 5 N.nr 1
- the device comprises a cell adapted to contain a liquid medium, the cell being preferentially mounted fixed with respect to the first zone, and the sample being mounted fixed to the cell
- the sample holder comprises several second zones, and preferentially in which the first zone is arranged between two second zones and at an equal distance from each of the second zones.
- Another subject of the invention is a method for evaluating a surface of a sample by a device which is the subject of the invention, the device comprising the first probe and the second probe and the processing module configured to determine a property of the surface at a plurality of points on the surface from a plurality of first signals generated by the first probe and a plurality of second signals generated by the second probe when the first probe and the second probe are each positioned successively facing several points on the surface, the method comprising steps of: a) positioning the first probe facing a point on the surface, preferably at a distance less than 100 nm from the point on the surface and in particular less than 10 nm from the point of the surface, b) measurement of the displacement of the first zone relative to the second zone by the detector so as to evaluate an interaction between the surface and the first probe, c) positioning the second probe opposite the point on the surface, preferably at a distance less than 100 nm from the point on the surface and in particular less than 10 nm from the point on the surface, and preferably d
- one of the first probe and of the second probe is capable of modifying a third parameter of the surface at the point of the surface, the method comprising a step, subsequent to step b) and/or in step d), modification of the third parametric of the surface at the point of the surface.
- a repetition of step a) defines a scanning of the surface by the first probe and, preferably, a repetition of step c) defines the same scanning of the surface by the second probe.
- the method comprises steps of:
- the method also comprises a step e) of actuating the sample holder, concomitant with step b) of measurement and/or with step d) of measurement, in which the actuator is actuated so as to vibrate the first zone of the sample holder at a predetermined frequency comprised between 500 Hz and 10 MHz, and preferentially, the sample holder has at least one natural resonance frequency fk, so as to cause the first zone to vibrate at a frequency comprised between (f - 0.5.f k ) and (f k + 0.5.f k ).
- the actuator is actuated so as to cause the first zone of the sample holder to vibrate at several predetermined frequencies.
- Another object of the invention is a method for determining a spatial calibration parameter of a device for measuring and/or modifying a surface of a sample, the device being a device according to an embodiment of the invention, comprising the first probe, the second probe and a processing module configured to determine a property of the surface at a plurality of points on the surface from a plurality of first signals generated by the first probe and a plurality of second signals generated by the second probe when the first probe and the second probe are each positioned successively facing several points on the surface, the method comprising steps of: e) positioning the first probe facing a first point on the surface , f) measurement of the displacement of the first zone relative to the second zone by the detector so as to evaluate an interaction between the surface and the first probe, g) positioning of the second probe opposite a second point on the surface , h) measuring the displacement of the first zone relative to the second zone by the detector so as to evaluate an interaction between the surface and the second probe, the method comprising:
- FIG. 1 schematically illustrates a device according to one embodiment of the invention
- FIG. 2 - Figure 2 is a photograph of a device according to one embodiment of the invention
- FIG. 3 - figure 3 schematically illustrates part of a device according to one embodiment of the invention suitable for evaluating the surface of a sample in a liquid medium
- FIG. 4 schematically illustrates a probe switch according to one embodiment of the invention
- FIG. 5 schematically illustrates a probe switch according to one embodiment of the invention
- FIG. 6 schematically illustrates a probe switch according to one embodiment of the invention
- FIG. 7 schematically illustrates a method for evaluating and/or modifying a surface according to one embodiment of the invention
- FIG. 8 - figure 8 illustrates a method for determining a calibration spatial parameter according to one embodiment of the invention
- FIG. 9 illustrates a mechanical response of a harmonic oscillator according to one embodiment of the invention
- FIG. 10 illustrates a measurement by tunnel effect according to one embodiment of the invention
- FIG. 11 is an image of an atomic step taken by a device according to one embodiment of the invention by tunnel effect imaging
- FIG. 12 is an image of an atomic step performed by a device according to one embodiment of the invention by tunnel effect imaging
- FIG. 13 is a profile of an atomic step performed by a device according to one embodiment of the invention by tunnel effect imaging
- FIG. 14 is a profile of an atomic step performed by a device according to one embodiment of the invention by tunnel effect imaging
- FIG. 15 is an image of an atomic step produced by a device according to one embodiment of the invention by atomic force imaging
- FIG. 16 is an image of an atomic step performed by a device according to one embodiment of the invention by tunnel effect
- FIG. 17 is a profile of an atomic step performed by a device according to one embodiment of the invention by atomic force imaging
- FIG. 18 is a profile of an atomic step produced by a device according to one embodiment of the invention by tunnel effect.
- the device 1 comprises a sample holder 3.
- the sample holder 3 supports a sample 2 having a surface 9 capable of being measured.
- the sample holder 3 comprises at least two distinct zones: a first zone 4 and a second zone 7.
- the first zone 4 is adapted to receive the sample 2 fixedly mounted relative to the first zone 4.
- the device 1 also comprises a support 6.
- the support 6 is mounted fixed to the ground or to the reference of the place of measurement.
- the second zone 7 is mounted fixed to the support.
- the second zone 7 can form a single piece with the support 6, or be welded to the support 6.
- the sample holder 3 is deformable, so as to allow a relative movement of the first zone 4 with respect to the second zone 7.
- the bending stiffness of the sample holder 3, and in particular of the part or parts located between the first zone 4 and the second zone or zones 7, has a bending stiffness greater than 10 3 N.nr 1 , in particular greater than 10 4 N.nr 1 and more preferably greater than 10 5 N.nr 1 .
- the bending stiffness of the sample holder 3, and in particular of the parts located between the first zone 4 and the second zone or zones 7, has a bending stiffness of less than 10 8 N.nr 1 , and preferably less than 10 7 N.rn'1.
- the sample holder 3 can for example be made of aluminum. Thus, even though the sample holder 3 is deformable, it can have a higher rigidity than that of the probes of the prior art while remaining sufficiently deformable to allow an evaluation of the surface.
- the sample holder 3 has at least one macroscopic dimension, that is to say greater than 2 mm, in particular greater than 1 cm, and preferably greater than 3 cm.
- the sample holder 3 may for example be in the form of a cuboid aluminum bar, 7 cm long, 12 mm thick and 7 mm wide.
- the first zone 4 then corresponds to one of the ends of the bar, and the second zone 7 corresponds to the other end of the bar, mounted fixed to the support.
- the dimensions of sample holder 3 must allow sample holder 3 to support sample 2.
- the sample carrier 3 is preferably a harmonic oscillator.
- the sample holder 3 can have a natural frequency comprised between 500 Hz and 10 MHz, preferably comprised between 1 kHz and 1 MHz. Thus, the measurement of the frequency of the sample holder 3 is not disturbed by surrounding noise, for example caused by electrical or acoustic noise.
- the sample carrier 3 has for example a quality factor greater than 10, and preferably greater than 100.
- the sample carrier 3 has a natural frequency of 2 kHz, and a quality factor of 100.
- the sample holder 3 can also be in the form of a tuning fork of macroscopic size, preferably with a length greater than 1 cm.
- the stem of the tuning fork corresponds to the second zone 7, and at least one blade of the tuning fork corresponds to the first zone 4.
- the quality factor of the sample holder 3 can be maximized compared to a sample holder 3 in the shape of beam of the same length.
- the device 1 also comprises a detector 8 suitable for detecting a displacement of the first zone 4 with respect to the second zone 7.
- the second zone 7 being fixed with respect to the earth, it may suffice for the detector 8 to detect the absolute movement of the first zone 4.
- the detector 8 can being an accelerometer, for example manufactured in MEMS technology, mounted in a fixed manner with respect to a part of the sample holder 3 and preferably with respect to the first zone 4 of the sample holder 3. Thus, it is possible to maximize the amplitude of the movement of the sample holder 3 measured.
- the detector 8 can be an optical interferometer, a capacitive detector, a piezoelectric detector, a laser detection detector, and/or a tunneling detector.
- the detector 8 is for example mounted fixed facing the sample 2 on the first area 4 of the sample holder 3.
- the range of movement frequency detectable by the detector 8 must include the natural frequency of the sample holder 3.
- the detector 8 can advantageously measure movements corresponding to vibrations of very low amplitude of the sample holder 3, preferably of an amplitude less than 1 nm, and in particular of an amplitude less than 500 ⁇ m.
- Device 1 comprises at least one probe 5.
- probe 5 will mean:
- hybrid probe 14 able to detect a first parameter at a point on surface 9 and to generate a first measurement signal representative of the first parameter, and a second parameter at the same point on surface 9, different from the first parameter, and in generating a second measurement signal representative of the second parameter, and/or
- a probe for example a first probe 15 or a second probe 16, able to detect a parameter at a point of the surface 9 and to generate a measurement signal representative of the first parameter.
- a probe 5 is capable of detecting a parameter at a point of surface 9 and of generating a measurement signal representative of the first parameter, and may be capable of modifying a parameter of surface 9 at the point of surface 9.
- the device 1 is capable of generating at least two different signals, each signal being representative of a parameter different from the parameter represented by the other signal, and/or
- the device comprises at least two probes 5, one of the two probes 5 being capable of modifying a third parameter of the surface 9 at the point of the surface 9.
- the device comprises at least two probes 5, one of the two probes 5 being capable of modifying a third parameter of the surface 9 at the point of the surface 9.
- the device 1 comprises at least one element chosen from: i) a hybrid probe 14 able to detect a first parameter at a point of the surface 9 and to generate a first measurement signal representative of the first parameter, and a second parameter at a point of the surface 9, different from the first parameter, and to generate a second measurement signal representative of the second parameter, and ii) a first probe 15 able to detect a first parameter at a point of the surface 9 and to generate a first signal of measurement representative of the first parameter, and a second probe 16 capable of detecting a second parameter at a point of the surface 9 and of generating a second measurement signal representative of the second parameter, the first parameter being different from the second parameter, or one of the first probe 15 and of the second probe 16 being capable of modifying a third parameter of the surface 9 at the point of the surface 9.
- one of the first probe 15 and of the second probe 16 can itself be a hybrid probe.
- the probe 5 may include a tip 13 capable of being positioned facing the surface 9 of the sample.
- the device 1 comprises means for positioning the probe 5 with respect to the surface 9.
- the probe 5 may comprise a tungsten tip etched by electrochemistry, fixedly mounted to means for positioning the probe 5 with respect to a tangential direction to the surface 9, allowing control of the position with sub-micrometric precision, preferably less than 100 ⁇ m.
- the means for positioning the probe 5 can comprise a piezoscanner. Differently from the prior art, the probe may not include a sensor, and thus be passive.
- Probe 5 can be adapted to measure one or more parameters representative of surface 9 and/or to modify surface 9.
- probe 5 can be suitable for measuring a parameter representative of surface 9 by atomic force measurement ( ⁇ FM ), by current measurement by tunnel effect (STM), by thermal measurement, by magnetic measurement, by chemical measurement.
- ⁇ FM atomic force measurement
- STM current measurement by tunnel effect
- the probe 5 can be suitable for treating a point on the surface 9, for example by depositing a material from the probe 5 towards the point on the surface 9, and/or by depositing particles from the probe 5 towards the point of area 9.
- the probe 5 may comprise a tungsten tip 13, and/or a gold tip 13, and/or a platinum tip 13, and/or an ⁇ FM lever.
- the probe 5 can also preferably comprise a stretched pipette, suitable for sucking up or depositing a liquid or a gas on the surface 9.
- the probe 5 can also preferably comprise a sphere having a glass surface, the glass surface being preferably chemically functionalized, for example by gold, by chemical groups specific to making the glass surface hydrophobic , by highly oriented pyrolytic graphite, by graphene comprising boron nitride (graphene BN).
- the probe 5 can also comprise a micro-clamp, preferably manufactured by lithography (“microgripper” in English).
- the probe 5 may also comprise an electrically conductive tip 13, and/or a resistive tip 13 and/or a thermal tip 13 and/or a tip 13 having a diamond surface.
- At least one of the probes 5 is made of a different material from another probe 5.
- Each probe 5 can comprise positioning means independent of each other.
- the inventors have discovered that the sample holder 3 can be used to detect the interactions between the surface 9 and the tip 13 of the probe 5. Indeed, the tip 13 can be brought closer to the surface 9 at a sufficiently small distance, by example between 1 ⁇ and 10 cm, preferably between 1 nm and 10 ⁇ m, to increase the interaction between the tip 13 and the surface 9, so that the mechanical properties of the sample holder 3 are modified.
- the sensor is part of or is attached to the probe 5
- the interactions between the surface 9 and the tip 13 are detected by the sample holder 13
- the sample holder 3 is mechanically decoupled from the probe 5.
- the cost of a probe 5 since the probe 5 does not necessarily include a sensor.
- the implementation of a plurality of measurements is facilitated because the different probes used all operate with the same sensor.
- the cost of the device 1 as a whole can also be reduced, the sample holder 3 being reused for each measurement.
- the evaluation of the surface 9 can be implemented in media other than air in a simplified way: indeed, the manufacture of the sensor no longer has to take into account the dissipation of the energy transmitted to the medium during the movement of the probe 5 in a medium with different properties from air such as a liquid, because the movement allowing the detection of the interaction between the tip 13 and the surface 9 is carried out by the sample holder 3. Even if the medium in contact with the surface 9 is not such as to cause more frictional forces with the probe 5 than the air, as is the case for a partial vacuum, the integration of a probe 5 without sensor in an enclosure adapted to said medium is simplified. Finally, the hybrid probe 14 and/or the first probe 15 and the second probe 16 being able to interact with different parameters of the surface, it is possible to measure the surface 9 more precisely and/or to precisely measure the Surface 9 and edit it.
- the device 1 also comprises a processing module configured to determine a property of the surface at a plurality of points on the surface from a plurality of first signals and from a plurality of second signals generated by the hybrid probe, or by the first probe and by the second probe, when the hybrid probe 14 is positioned successively opposite several points of the surface 9, or when the first probe 15 and the second probe 16 are each positioned successively opposite several points of the surface 9.
- a processing module configured to determine a property of the surface at a plurality of points on the surface from a plurality of first signals and from a plurality of second signals generated by the hybrid probe, or by the first probe and by the second probe, when the hybrid probe 14 is positioned successively opposite several points of the surface 9, or when the first probe 15 and the second probe 16 are each positioned successively opposite several points of the surface 9.
- the first probe 15 and the second probe 16 are each capable of modifying respectively a third parameter of the surface 9 and a fourth parameter of the surface 9 at the point of the surface 9, the third parameter and the fourth parameter being different the one another.
- the first probe deposits a product on the surface and the second probe then deposits a reagent.
- a modification of the surface 9 can also comprise an etching of the surface 9 by a probe 5.
- the parameter of the surface 9 can be representative of the morphology of the surface.
- a modification of the surface 9 can also comprise a deposit of biological material on the surface 9, and preferentially of biological cells.
- the modified parameter of surface 9 can be representative of the cell density on surface 9.
- a modification of the surface 9 can also comprise the deposition of a liquid by a first probe 15 forming a pipette suitable for ejecting the liquid on the surface 9.
- the probe 5 can be suitable for measuring parameter of the surface 9 by detection of capillary forces between the pipette forming the first probe 15 and the surface 9.
- a device 1 comprising the first probe 15 can also comprise a second probe 16 suitable for measuring a parameter of the surface 9 by atomic force, that is to say, for example, to measure repulsive Pauli forces between the second probe 16 and the surface 9.
- the device 1 can comprise a first probe 15 able to detect a force driven by the surface on the first probe, preferably of the ⁇ FM type, and a second probe 16 able to detect a parameter of the surface different from a driven force. by the surface on the first probe, preferably an electric current by tunnel effect and/or a temperature and/or a chemical composition of the surface.
- the device 1 can comprise a first probe 15 able to detect a force driven by the surface on the first probe, preferably an atomic force, and a second probe 16 able to detect a parameter of the surface different from a driven force. by the surface on the first probe, preferably an electric current by tunnel effect and/or a temperature and/or a chemical composition of the surface, one of the first probe 15 and of the second probe 16, or a third probe, being able to modify a parameter of the surface, preferably to deposit a material on the surface or to deposit particles on the surface 9.
- the device 1 can comprise a first probe 15 capable of detecting a force driven by the surface on the first probe 15, preferably an atomic force, and a second probe 16 capable of detecting a parameter of the surface different from a force driven by the surface on the first probe 15, preferably a rheology of the surface 9, and/or an electronic property of the surface 9, a magnetic property of the surface 9, a physicochemical property of the surface 9.
- the device 1 can comprise a first probe 15 suitable for detecting a current by tunnel effect between the probe 5 and the surface. 9, and a second probe 16 capable of detecting a parameter of the surface different from a current by tunnel effect between probe 5 and surface 9.
- the device 1 is particularly advantageous for carrying out measurements of a surface 9 in a liquid medium.
- the device 1 may include a cell 12.
- the cell 12 is adapted to contain a liquid or gelled medium.
- the cell 12 is mounted fixed to the first zone 4.
- the sample is mounted fixed to the cell 12.
- the measurement of a surface 9 in a liquid medium is simplified. Indeed, it is not necessary for the probe 5, comprising the tip 13, to oscillate. Thus, the measurement is not interfered with by any frictional forces which may be exerted by the liquid medium on the probe 5 during the evaluation of the surface 9, as is the case in the microscopes of the prior art.
- This type of configuration is particularly advantageous for the evaluation of biological objects attached to the surface 9.
- the detector 8 is not mounted in a submerged probe 5, it is possible to avoid a drift of the signal from outlet of the detector 8. Indeed, the sample holder 3 and the detector 8 can be kept out of contact with the liquid medium.
- the device 1 can comprise a switch 17 of probes, the first probe 15 and the second probe 16 each being fixedly mounted on the switch 17 of probes 5, the switch 17 being configured to cause a movement of the first probe 15 and of the second probe 16 so that before the movement, the first probe 15 is facing a point on the surface 9 and that after the movement, the second probe 16 is opposite the same point on surface 9.
- the switch 17 being configured to cause a movement of the first probe 15 and of the second probe 16 so that before the movement, the first probe 15 is facing a point on the surface 9 and that after the movement, the second probe 16 is opposite the same point on surface 9.
- This technique makes it possible to measure the surface with an accuracy increased with regard to the devices with which the two parameters of the surface 9 are measured at the same time by two probes.
- switch 17 may be a linear switch.
- the switch 17 can be configured to control a translational movement of part of the switch 17 so as to interchange the position of the first probe 15 of the second probe 16.
- the movement of the switch 17 can be controlled in part by a piezoelectric system.
- the switch 17 preferably comprises a rotation system 18 of the probes 5, configured so that the movement is a rotational movement around a main axis 19.
- the rotational movement is preferably controlled by a piezoelectric rotor.
- the switch 17 preferably comprises a translation system 20 configured to control a translation of the rotation system 18 along an axis perpendicular to the surface 9.
- a translation system 20 configured to control a translation of the rotation system 18 along an axis perpendicular to the surface 9.
- the switch 17 preferably comprises a translation system configured to control a translation of the rotation system 18 relative to the sample holder 3 along an axis parallel to the surface 9.
- a translation system configured to control a translation of the rotation system 18 relative to the sample holder 3 along an axis parallel to the surface 9.
- the probe 5 may have a main axis crossing the tip 13 of the probe 5.
- the main axis of the probe 5 is perpendicular to the surface 9, or locally perpendicular to the plane tangent to the surface 9 at the point facing the probe 5.
- the direction of the main axis of the rotation system 18 and the direction of the main axis of the probe 5 with respect to the main axis of the rotation system 18 are determined so that the main axis of the probe 5 is perpendicular to the surface 9.
- the main axis of the rotation system 18 can be parallel to the surface 9, and the main axis of the probe 5 can form an angle with the main axis of the rotation system 18 equals 90°.
- the main axis of the rotation system 18 can form an angle equal to 45° with the surface 9, and the main axis of the probe 5 can form an angle equal to 45° with the main axis of the turn 18.
- another aspect of the invention is a method 300 for evaluating the surface 9 by the device 1, the device 1 comprising the first probe 15, the second probe 16 and the processing module configured to determine a property of the surface at a plurality of points on the surface from a plurality of first signals generated by the first probe 15 and a plurality of second signals generated by the second probe 16 when the first probe 15 and the second probe 16 are each positioned successively opposite several points on the surface 9.
- one of the first probe 15 and of the second probe 16 can itself be a hybrid probe.
- the method can also be implemented with a hybrid probe instead of the assembly formed by the first probe and the second probe.
- the method comprises a step 301 of positioning the first probe 15 opposite a point on the surface 9, preferably at a distance less than 100 nm from the point on the surface and in particular less than 10 nm from the point on the surface 9.
- the method comprises a step 302 of measuring the displacement of the first zone 4 relative to the second zone 7 by the detector 8 so as to evaluate an interaction between the surface 9 and the first probe 15.
- the method comprises a step 303 of positioning the second probe 16 opposite the point on the surface 9, preferably at a distance less than 100 nm from the point on the surface and in particular less than 10 nm from the point on the surface 9.
- the method comprising a step 304 of measuring the displacement of the first zone 4 relative to the second zone 7 by the detector 8 so as to evaluate an interaction between the surface 9 and the second probe 16.
- the method 300 preferably comprises a repetition of the steps 301 and 302, the step 301 being carried out at other points facing the surface 9.
- the repetition of the step 301 defines a scanning of the surface 9 by the first probe 15
- the repetition can be implemented by scanning the surface 9 to be evaluated by moving the first probe 15.
- the scanning can be implemented by repeating the steps 301 and 302 at successive points separated for example by a sub-nanometric distance , between 100 ⁇ m and 1 nm.
- the method 300 preferably comprises a repetition of the steps 303 and 304, the step 303 being carried out at points facing the surface 9 during the repetition of the steps 301 and 302.
- the repetition of the step 303 defines a scan of the surface 9 by the second probe 16.
- the repetition can be implemented by scanning the surface 9 to be evaluated by moving the second probe 16.
- the scanning can be implemented by repeating the steps 303 and 304 at successive points separated by example by a sub-nanometric distance, between 100 ⁇ m and 1 nm.
- one of the first probe 15 and the second probe 16, or another probe 5 of the device 1 is suitable for modifying a third parameter of the surface 9 at the point of the surface 9 and the method 300 comprising a step , subsequent to step 302 and/or step 304, of modification of the third parameter of the surface 9 at the point of the surface 9.
- the method 300 comprising a step , subsequent to step 302 and/or step 304, of modification of the third parameter of the surface 9 at the point of the surface 9.
- the method 300 also comprises steps of:
- each step 304 being subsequent to a step 303 of the repetition of steps 303.
- the first probe makes it possible to evaluate an interaction between the surface 9 and the first probe 15 at different points on the surface. An association is thus determined between a point on the surface and a measured parameter. In this sense, it is possible to determine a “first image” of the surface 9 which is a representation of the parameter measured as a function of the points of the surface.
- second image is used with the same meaning in relation to the parameter measured using the second probe.
- the method 300 also includes a step of determining a third image of the surface 9 from the first image and the second image.
- a step of determining a third image of the surface 9 from the first image and the second image is possible to obtain a more precise image of the surface 9 by combining the information of the first image of the second image.
- the device 1 preferably comprises an actuator 10 configured to vibrate the door sample 3, in a controlled manner, at a predetermined frequency.
- the actuator 10 may for example be a piezoelectric (or “dither”) actuator capable of causing the sample holder 3 to vibrate at its natural frequency.
- the actuator can also be of the acoustic type (it emits acoustic waves), of the mechanical type or of the magnetic type.
- the actuator 10 can be mounted in a fixed manner on the sample holder 3, for example supported by the second part 7 of the sample holder 3.
- the method according to one aspect of the invention can comprise a step, preferably simultaneous with the step for measuring the displacement of the first zone 4, in which the actuator 10 is actuated so as to cause the first zone 4 of the sample holder 3 to vibrate at a predetermined frequency comprised between 500 Hz and 10 MHz.
- the actuator 10 is preferably actuated so as to cause the first zone 4 to vibrate at a frequency comprised between f 0 ⁇ 0.5.fo and f 0 +0.5 .fo, in particular between f 0 - 0.1. fo and f 0 + 0.1.
- the actuation of the first zone 4 can also be implemented at several predetermined frequencies. It is thus possible to evaluate the behavior of a sample 2 under stress at different frequencies or speeds.
- the device 1 can also comprise a closed-loop servo-control regulator 11 .
- a signal representative of the movement of the first zone 4 can be transmitted by the detector 8 to the regulator 11.
- the regulator 11 can then transmit a regulation instruction to the actuator 10 and/or to the means for positioning the tip 13, so as to to regulate the interactions between the tip 13 and the surface 9.
- the device 1 preferably comprises a tip positioning actuator making it possible to position the tip 13 of the probe 5 facing the surface 9.
- the tip positioning actuator can be a piezomotor.
- the regulator 11 can be adapted to transmit a regulation signal to the tip positioning actuator, so as to maintain the tip 13 at a constant and predetermined distance from the surface 9 over time.
- the quality factor (defined by the ratio between the resonance frequency and the width of the Lorenztian resonance at mid-height) can be controlled by the shape of the sample holder 3 used.
- the sample holder 3 can have the shape of a beam fixedly mounted at its two ends to the support 6 by the second zones 7.
- the first zone 4 is then arranged in the middle of the beam, at an equal distance from each of the second zones 7.
- the sample holder 3 can also have the shape of a membrane. In this case, the first zone 4 is arranged in the center of the membrane, and the second zone 7 is arranged at the edge of the membrane.
- another object of the invention is a method for determining a spatial calibration parameter of a device 1, comprising the first probe 15 and the second probe 16. The method comprising steps of:
- the method comprising:
- the first calibration image 22 and the second calibration image 23 each present at least one part representative of the same part of the surface 9.
- the alignment can be implemented digitally, by known image registration methods or known image matching methods, by a processing unit, the device 1 preferably comprising the processing unit.
- the method for evaluating a surface described above preferably comprises a step of correcting the spatial position of a probe 5, preferably of the first probe 15 and/or of the second probe 16, in which the first probe is spatially shifted 15 and/or the second probe 16 so as to compensate for the spatial offset between the first probe 15 and the second probe 16 by the predetermined spatial calibration parameter, preferably by the method for determining a spatial calibration parameter.
- the sample holder 3 can comprise a macroscopic aluminum beam, fixedly mounted on a support 6.
- the length L of the beam is equal to 7.5 cm
- the width w of the beam is equal to 6 .8 mm
- the thickness t of the beam is equal to 12 mm.
- the resonance frequency of the fundamental mode of the beam is defined by the formula (2): where m e ff is the effective mass of the beam, equal to 0.24p xtxwx L, p being the density of aluminum.
- the frequency f 0 is substantially equal to 1 kHz
- m e ff is substantially equal to 3.8 g.
- a piezoelectric actuator 10 is glued to the support 6 and allows the mechanical excitation of the sample holder 3.
- the oscillations of the sample holder 3 are detected using a Michelson interferometer, comprising a laser detection spot focused at the end of the sample holder 3.
- the sample 2 to be characterized is glued to the end of the sample holder 3 opposite the support 6, and on the side opposite the laser detection spot with respect to the sample holder 3.
- FIG. illustrates the mechanical response of the sample holder, forming an oscillator, and coupled to the sample of highly oriented pyrolytic graphite (HOPG).
- the amplitude of the oscillation as a function of the difference at the natural frequency presents a standard Lorentzian form with a quality factor of the order of 100.
- the first probe 15 is a Pt-lr STM tip
- the second probe 16 is a chemically etched tungsten tip.
- Each of the tips is placed on a three-axis piezo-scanner with sub-nanometric resolution (Tritor101 Piezosystemjena) and faces the surface of the sample.
- a voltage difference can be applied between one of the probe 5 and the surface 9 of the sample, so as to detect an electric current between the surface 9 and the probe 5, by a low noise amplifier.
- the sensitivity F m in to the force of an oscillator in a certain frequency range B can be calculated by the formula (3): 100 pN/ fHz (3) where kB is Boltzmann's constant, and T is equal to 300 K.
- kB is Boltzmann's constant
- T is equal to 300 K.
- the device 1 is initially used as a scanning tunneling microscope (STM).
- STM scanning tunneling microscope
- the sample holder 3 is kept at rest and a constant electrical voltage is applied between the first Pt/lt probe 15 and the sample 2.
- the first probe 15 is then brought close to the surface 9 of the sample 2 while the electric current is recorded.
- Sample 2 is mounted on the end of an oscillator.
- FIG. 10 illustrates an electronic current flowing between the first probe 15 and the surface 9 when a constant potential difference of 0.5 V is applied between the surface 9 and the tip of the first probe 15, as a function of the distance h between the surface 9 and the tip of the first probe 15, during the movement of the first probe 15 towards the surface 9.
- the approach of the first probe 15 to the surface 9 leads to a strong increase in the detectable current.
- the noise level is sufficiently small to allow detection of a tunnel effect at distances h of the order of 1 nanometer.
- a constant current regulation is imposed by the device 1, at a predetermined value.
- probe 5 is then swept over the surface and the distance h is adjusted in order to keep the measured current constant.
- FIG. 11 illustrates an atomic step formed by the graphite surface and measured by the device 1 described above.
- FIG. 13 illustrates the profile measured according to the bar schematized in FIG. 11. The height of the step is measured equal to 0.6 nm, which corresponds to a two-layer atomic terrace.
- FIG. 12 illustrates an atomic pitch formed by the graphite surface and measured by the device 1 described above.
- FIG. 14 illustrates the profile measured according to the bar schematized in FIG. 12. The height of the step is measured equal to 0.3 nm, which corresponds to a single-layer atomic terrace.
- a measurement of the ⁇ FM type can then be implemented.
- the sample holder 3, forming a mechanical oscillator is excited at its resonant frequency.
- the variation of the resonant frequency ôf is related to the conservative response of the force, while the widening of the resonance (variation from a quality factor Qo to another quality factor Qi) is related to the dissipation.
- Measurements and controls are carried out in real time by a complete set of Specs-Nanonis (RT5, SC5 and OC4).
- Two feedback loops make it possible to work at the resonance frequency of the sample holder 3 and to maintain the amplitude of oscillation A constant by modifying the amplitude of the voltage applied to the piezoelectric actuator 10 .
- the device 1 is used in FM- ⁇ FM mode ( ⁇ FM with frequency modulation).
- the second probe 16 scans the surface 9 with a constant frequency offset, that is to say a constant force gradient.
- the amplitude of the vibration A of the oscillator is kept constant at 10 nm.
- FIG. 15 illustrates an image obtained by scanning the second electrochemically etched tungsten probe 16 facing a graphite sample, presenting a surface 9 characteristic of a HOPG.
- Figure 17 illustrates the profile measured according to the bar schematized in figure 15.
- STM imaging can be performed.
- a constant electric voltage difference equal to 0.5 V is applied between the second probe 16 and the surface 9, and the electric current is measured.
- Figure 16 illustrates an STM image measured by monitoring a constant current.
- Figure 18 illustrates a profile measured according to the bar schematized in Figure 16.
- the second probe 16 can also be considered as a hybrid probe 14 in this example: indeed, it makes it possible both to measure a current by tunnel effect and to carry out a force measurement.
- the device comprises a first probe 15 and a second probe 16, the second probe 16 being a hybrid probe used as an ⁇ FM probe or a STM probe.
- the device 1 can be used to implement containment measures for a liquid.
- the device 1 then comprises a cell 12 into which a liquid to be studied is poured.
- a first probe comprising a glass ball of a first diameter is used to measure the containment of the liquid.
- a second probe comprising a glass ball of a second diameter different from the first diameter is used to also measure the containment of the liquid.
- a third probe comprising a glass ball of a third diameter different from the first diameter and from the second diameter is used to also measure the confinement of the liquid.
- the device 1 thus makes it possible to measure the confinement of the liquid as a function of the diameter of the ball of the probe.
- the balls used have a diameter which can vary between a few tens of microns and a few millimeters.
- the use of different diameters makes it possible to explore different rheological regimes.
- the friction or confinement measurement carried out for each probe makes it possible to analyze different rheological regimes of the liquid.
- the deposition of the liquid in the cell 12 can be preceded by a topological measurement ⁇ FM of the bottom of the cell 12.
- the device also comprises a probe ⁇ FM which is used to carry out this topological measurement .
- the device 1 can be used to implement the deposition of magnetic elements on a surface and the measurement of a magnetic property of the surface after this deposition.
- a first probe comprising a pipette or any other deposition system is used to deposit magnetic particles on the surface.
- a second probe comprising a special magnetic point is used to measure a magnetic property of the surface after this deposition.
- the deposition of the magnetic elements can be preceded by a topological measurement ⁇ FM of the surface.
- the device also comprises an AFM probe which is used to perform this topological measurement.
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
Claims
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CN202280020769.2A CN117043609A (zh) | 2021-01-20 | 2022-01-20 | 表面测量和/或改变装置 |
EP22705430.1A EP4281788A1 (fr) | 2021-01-20 | 2022-01-20 | Dispositif de mesure et/ou de modification d'une surface |
US18/273,252 US20240118310A1 (en) | 2021-01-20 | 2022-01-20 | Device for measuring and/or modifying a surface |
KR1020237027879A KR20230172455A (ko) | 2021-01-20 | 2022-01-20 | 표면을 측정하고/하거나 수정하기 위한 장치 |
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FRFR2100549 | 2021-01-20 | ||
FR2100549A FR3119024B1 (fr) | 2021-01-20 | 2021-01-20 | Dispositif de mesure et/ou de modification d’une surface |
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PCT/FR2022/050112 WO2022157458A1 (fr) | 2021-01-20 | 2022-01-20 | Dispositif de mesure et/ou de modification d'une surface |
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US (1) | US20240118310A1 (fr) |
EP (1) | EP4281788A1 (fr) |
KR (1) | KR20230172455A (fr) |
CN (1) | CN117043609A (fr) |
FR (1) | FR3119024B1 (fr) |
TW (1) | TW202244498A (fr) |
WO (1) | WO2022157458A1 (fr) |
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US5253516A (en) * | 1990-05-23 | 1993-10-19 | Digital Instruments, Inc. | Atomic force microscope for small samples having dual-mode operating capability |
FR2887986A1 (fr) * | 2005-11-07 | 2007-01-05 | Commissariat Energie Atomique | Procede de caracterisation d'un objet deformable et capteur pour la mise en oeuvre d'un tel procede |
US20070214864A1 (en) * | 2006-02-23 | 2007-09-20 | Asylum Research Corporation | Active Damping of High Speed Scanning Probe Microscope Components |
US7597717B1 (en) * | 2007-06-25 | 2009-10-06 | The United States Of America As Represented By The Secretary Of The Navy | Rotatable multi-cantilever scanning probe microscopy head |
US20180275165A1 (en) * | 2017-03-24 | 2018-09-27 | Fei Company | Method for calibrating and imaging using multi-tip scanning probe microscope |
FR3089850A1 (fr) | 2018-12-18 | 2020-06-19 | Paris Sciences Et Lettres Quartier Latin | Système pour déposer de manière contrôlée un fluide sur un substrat |
FR3098918A1 (fr) * | 2019-07-16 | 2021-01-22 | Paris Sciences Et Lettres - Quartier Latin | Microscope a force atomique |
-
2021
- 2021-01-20 FR FR2100549A patent/FR3119024B1/fr active Active
-
2022
- 2022-01-20 WO PCT/FR2022/050112 patent/WO2022157458A1/fr active Application Filing
- 2022-01-20 CN CN202280020769.2A patent/CN117043609A/zh active Pending
- 2022-01-20 KR KR1020237027879A patent/KR20230172455A/ko unknown
- 2022-01-20 EP EP22705430.1A patent/EP4281788A1/fr active Pending
- 2022-01-20 TW TW111102446A patent/TW202244498A/zh unknown
- 2022-01-20 US US18/273,252 patent/US20240118310A1/en active Pending
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US5253516A (en) * | 1990-05-23 | 1993-10-19 | Digital Instruments, Inc. | Atomic force microscope for small samples having dual-mode operating capability |
FR2887986A1 (fr) * | 2005-11-07 | 2007-01-05 | Commissariat Energie Atomique | Procede de caracterisation d'un objet deformable et capteur pour la mise en oeuvre d'un tel procede |
US20070214864A1 (en) * | 2006-02-23 | 2007-09-20 | Asylum Research Corporation | Active Damping of High Speed Scanning Probe Microscope Components |
US7597717B1 (en) * | 2007-06-25 | 2009-10-06 | The United States Of America As Represented By The Secretary Of The Navy | Rotatable multi-cantilever scanning probe microscopy head |
US20180275165A1 (en) * | 2017-03-24 | 2018-09-27 | Fei Company | Method for calibrating and imaging using multi-tip scanning probe microscope |
FR3089850A1 (fr) | 2018-12-18 | 2020-06-19 | Paris Sciences Et Lettres Quartier Latin | Système pour déposer de manière contrôlée un fluide sur un substrat |
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KR20230172455A (ko) | 2023-12-22 |
TW202244498A (zh) | 2022-11-16 |
CN117043609A (zh) | 2023-11-10 |
FR3119024B1 (fr) | 2023-11-10 |
US20240118310A1 (en) | 2024-04-11 |
FR3119024A1 (fr) | 2022-07-22 |
EP4281788A1 (fr) | 2023-11-29 |
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