WO2022147919A1 - Broadband spectrometer - Google Patents
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- WO2022147919A1 WO2022147919A1 PCT/CN2021/085492 CN2021085492W WO2022147919A1 WO 2022147919 A1 WO2022147919 A1 WO 2022147919A1 CN 2021085492 W CN2021085492 W CN 2021085492W WO 2022147919 A1 WO2022147919 A1 WO 2022147919A1
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- 239000005357 flat glass Substances 0.000 claims abstract description 101
- 238000002955 isolation Methods 0.000 claims abstract description 17
- 230000003287 optical effect Effects 0.000 claims description 14
- 239000013307 optical fiber Substances 0.000 claims description 4
- 238000002310 reflectometry Methods 0.000 claims description 3
- 238000002834 transmittance Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 13
- 230000003595 spectral effect Effects 0.000 abstract description 6
- 238000001514 detection method Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
Definitions
- the invention relates to a broadband spectrometer, which belongs to the technical field of light wavelength detection.
- the purpose of the present invention is to provide a wide-band spectrometer, which does not increase the size of the optical path, has a wide detection spectral range and high measurement accuracy, achieves pm-level measurement accuracy, and reduces costs.
- a broadband spectrometer comprising: an optical input port, a light shield, a beam collimator, a first flat glass, a second flat glass, at least two cylindrical lenses and at least two cylindrical lenses.
- One side of the front surface of the first flat glass is provided with at least one small flat glass with a thickness and located in the sealed cavity, the other side of the front surface has a first reflective layer, and the thickness of the small flat glass is smaller than the thickness of the isolation frame , the back surface of the second flat glass has a second reflective layer, the surface of the small flat glass facing the second flat glass has a third reflective layer, and the light shield is arranged on the beam collimator and the first flat glass between the second flat glass and at least two linear photodetectors.
- the number of the small flat glass is 2, and the thickness of one small flat glass is greater than the thickness of the other small flat glass.
- the optical input port is an optical fiber input port.
- the linear photodetector is a linear scanning image device.
- the reflectivity of the first reflection layer, the second reflection layer and the third reflection layer is greater than 30%, and the transmittance is greater than 50%.
- the shapes of the first flat glass, the second flat glass and the isolation frame are rectangles.
- the present invention has the following advantages compared with the prior art:
- an isolation frame with a hollow area in the center and a wedge angle is arranged between the first flat glass and the second flat glass, thereby forming a sealed cavity, on the front surface side of the first flat glass.
- a small flat glass with at least one thickness and located in the sealed cavity is provided, the other side of the front surface has a first reflective layer, the thickness of the small flat glass is smaller than the thickness of the isolation frame, and the rear surface of the second flat glass has a second reflective layer , There is a third reflective layer on the surface of the small flat glass and the second flat glass.
- Embodiment 3 is a schematic diagram of the decomposition structure of Embodiment 2 of the broadband spectrometer of the present invention.
- connection should be understood in a broad sense, for example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or a Electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the internal connection of two components.
- installation should be understood in a broad sense, for example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or a Electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the internal connection of two components.
- Embodiment 1 A broadband spectrometer, comprising: an optical input port 1, a light shield 2, a beam collimator 3, a first flat glass 4, a second flat glass 5, 2 cylindrical lenses 6 and 2 linear photodetectors 7, between the first flat glass 4 and the second flat glass 5, an isolation frame 8 with a hollow area in the center and a wedge angle is arranged to form a sealed cavity, and the front surface of the first flat glass 4 arranged opposite to the rear surface of the second flat glass 5;
- One side of the front surface of the first flat glass 4 is provided with a small flat glass 9 with a thickness and located in the sealed cavity, and the other side of the front surface has a first reflective layer 101, and the thickness of the small flat glass 9 is smaller than that of the isolation
- the thickness of the frame 8 the rear surface of the second flat glass 5 has a second reflective layer 102, the surface of the small flat glass 9 facing the second flat glass 5 has a third reflective layer 103, and the light shield 2 is provided with between the beam collimator 3 and the first flat glass 4 or between the second flat glass 5 and at least two linear photodetectors 7 .
- the above-mentioned optical input port 1 is an optical fiber input port.
- the above-mentioned linear photodetector 7 is a linear scanning image device.
- the reflectivity of the first reflective layer 101 , the second reflective layer 102 and the third reflective layer 103 is greater than 30%, and the transmittance is greater than 50%.
- Embodiment 2 A broadband spectrometer, comprising: an optical input port 1, a light shield 2, a beam collimator 3, a first flat glass 4, a second flat glass 5, 2 cylindrical lenses 6 and 2 linear photodetectors 7, between the first flat glass 4 and the second flat glass 5, an isolation frame 8 with a hollow area in the center and a wedge angle is arranged to form a sealed cavity, and the front surface of the first flat glass 4 arranged opposite to the rear surface of the second flat glass 5;
- One side of the front surface of the first flat glass 4 is provided with two small flat glasses 9 of thickness and located in the sealed cavity, and the other side of the front surface has a first reflective layer 101, and the thickness of the small flat glass 9 is less than The thickness of the isolation frame 8, wherein the thickness of one small flat glass 9 is greater than the thickness of the other small flat glass 9, the rear surface of the second flat glass 5 has a second reflective layer 102, the small flat glass 9 and the second The opposite surface of the flat glass 5 has a third reflective layer 103 , and the light shield 2 is disposed between the beam collimator 3 and the first flat glass 4 or between the second flat glass 5 and the two linear photodetectors 7 .
- the above-mentioned optical input port 1 is an optical fiber input port.
- the first flat glass 4 , the second flat glass 5 and the isolation frame 8 are rectangular in shape.
- an isolation frame with a hollow area in the center and a wedge angle is arranged between the first flat glass and the second flat glass, so as to form a sealed cavity, and a front surface of the first flat glass is The side is provided with at least one small flat glass of thickness and located in the sealed cavity, the other side of the front surface has a first reflective layer, the thickness of the small flat glass is smaller than the thickness of the isolation frame, and the rear surface of the second flat glass has a second reflection layer There is a third reflective layer on the surface of the small flat glass facing the second flat glass.
Abstract
A broadband spectrometer, comprising: a light input port (1), a light shield (2), a beam collimator (3), first flat glass (4), second flat glass (5), at least two cylindrical lenses (6), and at least two linear photodetectors (7). An isolation frame (8) having a hollow area at the center and having a wedge angle is arranged between the first flat glass (4) and the second flat glass (5), so as to form a sealed cavity. A front surface of the first flat glass (4) is disposed opposite a rear surface of the second flat glass (5). At least one small flat glass (9) having a thickness and located within the sealed cavity is arranged on one side of the front surface of the first flat glass (4), and a first reflecting layer (101) is provided on the other side of the front surface. A second reflecting layer (102) is provided on the rear surface of the second flat glass (5). A third reflecting layer (103) is provided on a surface of the small flat glass (9) opposite the second flat glass (5). The broadband spectrometer has a wide spectral range of measurement and high measurement precision, without increasing the size of a light path.
Description
本发明涉及一种宽波段光谱仪，属于光波长检测技术领域。The invention relates to a broadband spectrometer, which belongs to the technical field of light wavelength detection.
现有的干涉标准具由于受限于横向尺寸、线阵光电探测器的像元数量、信号噪音和计算精度等因素影响，采用一个干涉标准具较难在宽光谱范围(几百纳米)实现pm级和更高的测量精度。为了解决宽测量范围和高测量精度之间的矛盾，研发检测光谱范围宽且测量精度高的光波长测量装置对光领域的发展是至关重要的。Existing interference etalons are difficult to achieve pm in a wide spectral range (hundreds of nanometers) with one interference etalon due to the limitations of lateral size, the number of pixels of linear photodetectors, signal noise, and computational accuracy. level and higher measurement accuracy. In order to solve the contradiction between wide measurement range and high measurement accuracy, the development of optical wavelength measurement devices with a wide detection spectral range and high measurement accuracy is crucial to the development of the optical field.
发明内容SUMMARY OF THE INVENTION
本发明的目的是提供一种宽波段光谱仪，此宽波段光谱仪在不增加光路尺寸的同时，检测的光谱范围宽且测量精度高，达到了pm级测量精度，也降低了成本。The purpose of the present invention is to provide a wide-band spectrometer, which does not increase the size of the optical path, has a wide detection spectral range and high measurement accuracy, achieves pm-level measurement accuracy, and reduces costs.
为达到上述目的，本发明采用的技术方案是：一种宽波段光谱仪，包括：光输入端口、遮光罩、光束准直器、第一平板玻璃、第二平板玻璃、至少2个柱透镜和至少2个线性光电探测器，所述第一平板玻璃与第二平板玻璃之间设置有一中央具有镂空区且带有楔角的隔离框，从而形成一密封腔，所述第一平板玻璃的前表面与第二平板玻璃的后表面相向设置；In order to achieve the above object, the technical solution adopted in the present invention is: a broadband spectrometer, comprising: an optical input port, a light shield, a beam collimator, a first flat glass, a second flat glass, at least two cylindrical lenses and at least two cylindrical lenses. 2 linear photodetectors, an isolation frame with a hollow area in the center and a wedge angle is set between the first flat glass and the second flat glass, so as to form a sealed cavity, the front surface of the first flat glass arranged opposite to the rear surface of the second flat glass;
所述第一平板玻璃的前表面一侧设置有至少一个厚度且位于密封腔内的小平板玻璃，前表面另一侧具有一第一反射层，所述小平板玻璃的厚度小于隔离框的厚度，所述第二平板玻璃的后表面具有第二反射层，所述小平板玻璃与第二平板玻璃相向的表面具有第三反射层，所述遮光罩设置于光束准直器与第一平板玻璃之间或者第二平板玻璃与至少2个线性光电探测器之间。One side of the front surface of the first flat glass is provided with at least one small flat glass with a thickness and located in the sealed cavity, the other side of the front surface has a first reflective layer, and the thickness of the small flat glass is smaller than the thickness of the isolation frame , the back surface of the second flat glass has a second reflective layer, the surface of the small flat glass facing the second flat glass has a third reflective layer, and the light shield is arranged on the beam collimator and the first flat glass between the second flat glass and at least two linear photodetectors.
上述技术方案中进一步改进的方案如下：The further improved scheme in the above technical scheme is as follows:
1、上述方案中，所述小平板玻璃的数目为2个，其中一个小平板玻璃的厚度大于另一个小平板玻璃的厚度。1. In the above solution, the number of the small flat glass is 2, and the thickness of one small flat glass is greater than the thickness of the other small flat glass.
2、上述方案中，所述光输入端口为光纤输入端口。2. In the above solution, the optical input port is an optical fiber input port.
3、上述方案中，所述线性光电探测器为线性扫描图像器件。3. In the above solution, the linear photodetector is a linear scanning image device.
4、上述方案中，所述第一反射层、第二反射层和第三反射层的反射率大于30％，透射率大于50％。4. In the above solution, the reflectivity of the first reflection layer, the second reflection layer and the third reflection layer is greater than 30%, and the transmittance is greater than 50%.
5、上述方案中，所述第一平板玻璃、第二平板玻璃和隔离框形状为矩形。5. In the above solution, the shapes of the first flat glass, the second flat glass and the isolation frame are rectangles.
由于上述技术方案的运用，本发明与现有技术相比具有下列优点：Due to the application of the above-mentioned technical solutions, the present invention has the following advantages compared with the prior art:
本发明宽波段光谱仪，其在第一平板玻璃与第二平板玻璃之间设置有一中央具有镂空区且带有楔角的隔离框，从而形成一密封腔，在第一平板玻璃的前表面一侧设置有至少一个厚度且位于密封腔内的小平板玻璃，前表面另一侧具有一第一反射层，小平板玻璃的厚度小于隔离框的厚度，第二平板玻璃的后表面具有第二反射层，在小平板玻璃与第二平板玻璃相向的表面具有第三反射层，该巧妙的结构设计在不增加光路尺寸的同时，检测的光谱范围宽且测量精度高，达到了pm级测量精度，也降低了成本。In the broadband spectrometer of the present invention, an isolation frame with a hollow area in the center and a wedge angle is arranged between the first flat glass and the second flat glass, thereby forming a sealed cavity, on the front surface side of the first flat glass. A small flat glass with at least one thickness and located in the sealed cavity is provided, the other side of the front surface has a first reflective layer, the thickness of the small flat glass is smaller than the thickness of the isolation frame, and the rear surface of the second flat glass has a second reflective layer , There is a third reflective layer on the surface of the small flat glass and the second flat glass. This ingenious structural design does not increase the size of the optical path, while the detection spectral range is wide and the measurement accuracy is high, reaching the pm-level measurement accuracy. Reduced costs.
附图1为本发明宽波段光谱仪的结构示意图；Accompanying drawing 1 is the structural representation of the broadband spectrometer of the present invention;
附图2为本发明宽波段光谱仪实施例1的分解结构示意图；Accompanying drawing 2 is the exploded structure schematic diagram of the embodiment 1 of the broadband spectrometer of the present invention;
附图3为本发明宽波段光谱仪实施例2的分解结构示意图。3 is a schematic diagram of the decomposition structure of Embodiment 2 of the broadband spectrometer of the present invention.
以上附图中：1、光输入端口；2、遮光罩；3、光束准直器；4、第一平板玻璃；5、第二平板玻璃；6、柱透镜；7、线性光电探测器；8、隔离框；9、小平板玻璃；101、第一反射层；102、第二反射层；103、第三反射层。In the above drawings: 1. Optical input port; 2. Light hood; 3. Beam collimator; 4. First flat glass; 5. Second flat glass; 6. Cylindrical lens; 7. Linear photodetector; 8 , isolation frame; 9, small flat glass; 101, the first reflection layer; 102, the second reflection layer; 103, the third reflection layer.
在本专利的描述中，需要说明的是，术语“中心”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制；术语“第一”、“第二”、“第三”仅用于描述目的，而不能理解为指示或暗示相对重要性；此外，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以具体情况理解上述术语在本专利的具体含义。In the description of this patent, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the accompanying drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the indicated device or element must have a specific orientation or a specific orientation. construction and operation, and therefore should not be construed as limiting the invention; the terms "first", "second", "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance; furthermore, unless otherwise Clearly stipulated and defined, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or a Electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the internal connection of two components. For those of ordinary skill in the art, the specific meanings of the above terms in this patent can be understood in specific situations.
实施例1：一种宽波段光谱仪，包括：光输入端口1、遮光罩2、光束准直器3、第一平板玻璃4、第二平板玻璃5、2个柱透镜6和2个线性光电探测器7，所述第一平板玻璃4与第二平板玻璃5之间设置有一中央具有镂空区且带有楔角的隔离框8，从而形成一密封腔，所述第一平板玻璃4的前表面与第二平板玻 璃5的后表面相向设置；Embodiment 1: A broadband spectrometer, comprising: an optical input port 1, a light shield 2, a beam collimator 3, a first flat glass 4, a second flat glass 5, 2 cylindrical lenses 6 and 2 linear photodetectors 7, between the first flat glass 4 and the second flat glass 5, an isolation frame 8 with a hollow area in the center and a wedge angle is arranged to form a sealed cavity, and the front surface of the first flat glass 4 arranged opposite to the rear surface of the second flat glass 5;
所述第一平板玻璃4的前表面一侧设置有一个厚度且位于密封腔内的小平板玻璃9，前表面另一侧具有一第一反射层101，所述小平板玻璃9的厚度小于隔离框8的厚度，所述第二平板玻璃5的后表面具有第二反射层102，所述小平板玻璃9与第二平板玻璃5相向的表面具有第三反射层103，所述遮光罩2设置于光束准直器3与第一平板玻璃4之间或者第二平板玻璃5与至少2个线性光电探测器7之间。One side of the front surface of the first flat glass 4 is provided with a small flat glass 9 with a thickness and located in the sealed cavity, and the other side of the front surface has a first reflective layer 101, and the thickness of the small flat glass 9 is smaller than that of the isolation The thickness of the frame 8, the rear surface of the second flat glass 5 has a second reflective layer 102, the surface of the small flat glass 9 facing the second flat glass 5 has a third reflective layer 103, and the light shield 2 is provided with between the beam collimator 3 and the first flat glass 4 or between the second flat glass 5 and at least two linear photodetectors 7 .
上述光输入端口1为光纤输入端口。The above-mentioned optical input port 1 is an optical fiber input port.
上述线性光电探测器7为线性扫描图像器件。The above-mentioned linear photodetector 7 is a linear scanning image device.
上述第一反射层101、第二反射层102和第三反射层103的反射率大于30％，透射率大于50％。The reflectivity of the first reflective layer 101 , the second reflective layer 102 and the third reflective layer 103 is greater than 30%, and the transmittance is greater than 50%.
实施例2：一种宽波段光谱仪，包括：光输入端口1、遮光罩2、光束准直器3、第一平板玻璃4、第二平板玻璃5、2个柱透镜6和2个线性光电探测器7，所述第一平板玻璃4与第二平板玻璃5之间设置有一中央具有镂空区且带有楔角的隔离框8，从而形成一密封腔，所述第一平板玻璃4的前表面与第二平板玻璃5的后表面相向设置；Embodiment 2: A broadband spectrometer, comprising: an optical input port 1, a light shield 2, a beam collimator 3, a first flat glass 4, a second flat glass 5, 2 cylindrical lenses 6 and 2 linear photodetectors 7, between the first flat glass 4 and the second flat glass 5, an isolation frame 8 with a hollow area in the center and a wedge angle is arranged to form a sealed cavity, and the front surface of the first flat glass 4 arranged opposite to the rear surface of the second flat glass 5;
所述第一平板玻璃4的前表面一侧设置有两个厚度且位于密封腔内的小平板玻璃9，前表面另一侧具有一第一反射层101，所述小平板玻璃9的厚度小于隔离框8的厚度，其中一个小平板玻璃9的厚度大于另一个小平板玻璃9的厚度，所述第二平板玻璃5的后表面具有第二反射层102，所述小平板玻璃9与第二平板玻璃5相向的表面具有第三反射层103，所述遮光罩2设置于光束准直器3与第一平板玻璃4之间或者第二平板玻璃5与2个线性光电探测器7之间。One side of the front surface of the first flat glass 4 is provided with two small flat glasses 9 of thickness and located in the sealed cavity, and the other side of the front surface has a first reflective layer 101, and the thickness of the small flat glass 9 is less than The thickness of the isolation frame 8, wherein the thickness of one small flat glass 9 is greater than the thickness of the other small flat glass 9, the rear surface of the second flat glass 5 has a second reflective layer 102, the small flat glass 9 and the second The opposite surface of the flat glass 5 has a third reflective layer 103 , and the light shield 2 is disposed between the beam collimator 3 and the first flat glass 4 or between the second flat glass 5 and the two linear photodetectors 7 .
上述光输入端口1为光纤输入端口。The above-mentioned optical input port 1 is an optical fiber input port.
上述第一平板玻璃4、第二平板玻璃5和隔离框8形状为矩形。The first flat glass 4 , the second flat glass 5 and the isolation frame 8 are rectangular in shape.
采用上述宽波段光谱仪时，其在第一平板玻璃与第二平板玻璃之间设置有一中央具有镂空区且带有楔角的隔离框，从而形成一密封腔，在第一平板玻璃的前表面一侧设置有至少一个厚度且位于密封腔内的小平板玻璃，前表面另一侧具有一第一反射层，小平板玻璃的厚度小于隔离框的厚度，第二平板玻璃的后表面具有第二反射层，在小平板玻璃与第二平板玻璃相向的表面具有第三反射层，该巧妙的结构设计在不增加光路尺寸的同时，检测的光谱范围宽且测量精度高，达到了pm级测量精度，也降低了成本。When the above-mentioned broadband spectrometer is used, an isolation frame with a hollow area in the center and a wedge angle is arranged between the first flat glass and the second flat glass, so as to form a sealed cavity, and a front surface of the first flat glass is The side is provided with at least one small flat glass of thickness and located in the sealed cavity, the other side of the front surface has a first reflective layer, the thickness of the small flat glass is smaller than the thickness of the isolation frame, and the rear surface of the second flat glass has a second reflection layer There is a third reflective layer on the surface of the small flat glass facing the second flat glass. This ingenious structural design does not increase the size of the optical path, while the detection spectral range is wide and the measurement accuracy is high, reaching pm-level measurement accuracy, Costs are also reduced.
上述实施例只为说明本发明的技术构思及特点，其目的在于让熟悉此项技术的人士能够了解本发明的内容并据以实施，并不能以此限制本发明的保护范围。凡根据本发明精神实质所作的等效变化或修饰，都应涵盖在本发明的保护范围之内。The above-mentioned embodiments are only intended to illustrate the technical concept and characteristics of the present invention, and the purpose thereof is to enable those who are familiar with the art to understand the content of the present invention and implement them accordingly, and cannot limit the protection scope of the present invention. All equivalent changes or modifications made according to the spirit of the present invention should be included within the protection scope of the present invention.
Claims (6)
- 一种宽波段光谱仪，其特征在于：包括：光输入端口(1)、遮光罩(2)、光束准直器(3)、第一平板玻璃(4)、第二平板玻璃(5)、至少2个柱透镜(6)和至少2个线性光电探测器(7)，所述第一平板玻璃(4)与第二平板玻璃(5)之间设置有一中央具有镂空区且带有楔角的隔离框(8)，从而形成一密封腔，所述第一平板玻璃(4)的前表面与第二平板玻璃(5)的后表面相向设置；A broadband spectrometer, characterized by comprising: an optical input port (1), a light shield (2), a beam collimator (3), a first flat glass (4), a second flat glass (5), at least 2 cylindrical lenses (6) and at least 2 linear photodetectors (7), between the first flat glass (4) and the second flat glass (5) is provided a center with a hollow area and a wedge angle. an isolation frame (8), thereby forming a sealed cavity, and the front surface of the first flat glass (4) and the rear surface of the second flat glass (5) are arranged opposite to each other;所述第一平板玻璃(4)的前表面一侧设置有至少一个厚度且位于密封腔内的小平板玻璃(9)，前表面另一侧具有一第一反射层(101)，所述小平板玻璃(9)的厚度小于隔离框(8)的厚度，所述第二平板玻璃(5)的后表面具有第二反射层(102)，所述小平板玻璃(9)与第二平板玻璃(5)相向的表面具有第三反射层(103)，所述遮光罩(2)设置于光束准直器(3)与第一平板玻璃(4)之间或者第二平板玻璃(5)与至少2个线性光电探测器(7)之间。One side of the front surface of the first flat glass (4) is provided with a small flat glass (9) with at least one thickness and located in the sealed cavity, and the other side of the front surface is provided with a first reflective layer (101), the small flat glass (9) The thickness of the flat glass (9) is smaller than the thickness of the isolation frame (8), the rear surface of the second flat glass (5) is provided with a second reflective layer (102), and the small flat glass (9) and the second flat glass (5) The opposite surface has a third reflective layer (103), and the light shield (2) is arranged between the beam collimator (3) and the first flat glass (4) or between the second flat glass (5) and the Between at least 2 linear photodetectors (7).
- 根据权利要求1所述的宽波段光谱仪，其特征在于：所述小平板玻璃(9)的数目为2个，其中一个小平板玻璃(9)的厚度大于另一个小平板玻璃(9)的厚度。The broadband spectrometer according to claim 1, characterized in that: the number of the small flat glass (9) is 2, and the thickness of one small flat glass (9) is greater than the thickness of the other small flat glass (9). .
- 根据权利要求1所述的宽波段光谱仪，其特征在于：所述光输入端口(1)为光纤输入端口。The broadband spectrometer according to claim 1, wherein the optical input port (1) is an optical fiber input port.
- 根据权利要求1所述的宽波段光谱仪，其特征在于：所述线性光电探测器(7)为线性扫描图像器件。The broadband spectrometer according to claim 1, wherein the linear photodetector (7) is a linear scanning image device.
- 根据权利要求1所述的宽波段光谱仪，其特征在于：所述第一反射层(101)、第二反射层(102)和第三反射层(103)的反射率大于30％，透射率大于50％。The broadband spectrometer according to claim 1, wherein the reflectivity of the first reflection layer (101), the second reflection layer (102) and the third reflection layer (103) is greater than 30%, and the transmittance is greater than 50%.
- 根据权利要求1所述的宽波段光谱仪，其特征在于：所述第一平板玻璃(4)、第二平板玻璃(5)和隔离框(8)形状为矩形。The broadband spectrometer according to claim 1, wherein the first flat glass (4), the second flat glass (5) and the isolation frame (8) are rectangular in shape.
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