WO2022145158A1 - 感光性ドライフィルム、積層フィルム、積層フィルムの製造方法及びパターン化されたレジスト膜の製造方法 - Google Patents
感光性ドライフィルム、積層フィルム、積層フィルムの製造方法及びパターン化されたレジスト膜の製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims description 27
- 239000002253 acid Substances 0.000 claims abstract description 99
- 239000011347 resin Substances 0.000 claims abstract description 98
- 229920005989 resin Polymers 0.000 claims abstract description 98
- 239000003960 organic solvent Substances 0.000 claims abstract description 86
- 239000000203 mixture Substances 0.000 claims abstract description 85
- 239000004925 Acrylic resin Substances 0.000 claims abstract description 58
- 229920000178 Acrylic resin Polymers 0.000 claims abstract description 58
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims abstract description 39
- 238000009835 boiling Methods 0.000 claims abstract description 31
- 238000010438 heat treatment Methods 0.000 claims abstract description 29
- 239000002904 solvent Substances 0.000 claims abstract description 23
- 125000002723 alicyclic group Chemical group 0.000 claims abstract description 22
- 239000003513 alkali Substances 0.000 claims abstract description 17
- 230000009471 action Effects 0.000 claims abstract description 14
- 239000001257 hydrogen Substances 0.000 claims abstract description 10
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 10
- 239000000758 substrate Substances 0.000 claims description 55
- 238000000034 method Methods 0.000 claims description 22
- 239000002585 base Substances 0.000 claims description 21
- 238000000576 coating method Methods 0.000 claims description 21
- 239000011248 coating agent Substances 0.000 claims description 20
- 230000005855 radiation Effects 0.000 claims description 14
- 238000010030 laminating Methods 0.000 claims description 9
- 238000001035 drying Methods 0.000 claims description 8
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 claims description 6
- RDOXTESZEPMUJZ-UHFFFAOYSA-N anisole Chemical compound COC1=CC=CC=C1 RDOXTESZEPMUJZ-UHFFFAOYSA-N 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 3
- RYNQKSJRFHJZTK-UHFFFAOYSA-N (3-methoxy-3-methylbutyl) acetate Chemical compound COC(C)(C)CCOC(C)=O RYNQKSJRFHJZTK-UHFFFAOYSA-N 0.000 claims description 2
- LAVARTIQQDZFNT-UHFFFAOYSA-N 1-(1-methoxypropan-2-yloxy)propan-2-yl acetate Chemical compound COCC(C)OCC(C)OC(C)=O LAVARTIQQDZFNT-UHFFFAOYSA-N 0.000 claims description 2
- RWNUSVWFHDHRCJ-UHFFFAOYSA-N 1-butoxypropan-2-ol Chemical compound CCCCOCC(C)O RWNUSVWFHDHRCJ-UHFFFAOYSA-N 0.000 claims description 2
- QMYGFTJCQFEDST-UHFFFAOYSA-N 3-methoxybutyl acetate Chemical compound COC(C)CCOC(C)=O QMYGFTJCQFEDST-UHFFFAOYSA-N 0.000 claims description 2
- VATRWWPJWVCZTA-UHFFFAOYSA-N 3-oxo-n-[2-(trifluoromethyl)phenyl]butanamide Chemical compound CC(=O)CC(=O)NC1=CC=CC=C1C(F)(F)F VATRWWPJWVCZTA-UHFFFAOYSA-N 0.000 claims description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 claims description 2
- YYLLIJHXUHJATK-UHFFFAOYSA-N Cyclohexyl acetate Chemical compound CC(=O)OC1CCCCC1 YYLLIJHXUHJATK-UHFFFAOYSA-N 0.000 claims description 2
- UZKWTJUDCOPSNM-UHFFFAOYSA-N methoxybenzene Substances CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 claims description 2
- HSDFKDZBJMDHFF-UHFFFAOYSA-N methyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OC HSDFKDZBJMDHFF-UHFFFAOYSA-N 0.000 claims description 2
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 claims 3
- 239000000470 constituent Substances 0.000 abstract description 11
- 238000000926 separation method Methods 0.000 abstract description 9
- 239000000126 substance Substances 0.000 abstract description 9
- 230000003321 amplification Effects 0.000 abstract 2
- 238000003199 nucleic acid amplification method Methods 0.000 abstract 2
- 239000010408 film Substances 0.000 description 222
- -1 sulfonium ions Chemical class 0.000 description 155
- 125000004432 carbon atom Chemical group C* 0.000 description 150
- 125000000217 alkyl group Chemical group 0.000 description 121
- 150000001875 compounds Chemical class 0.000 description 94
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 82
- 125000001424 substituent group Chemical group 0.000 description 72
- 125000004122 cyclic group Chemical group 0.000 description 64
- 125000001931 aliphatic group Chemical group 0.000 description 57
- 125000002947 alkylene group Chemical group 0.000 description 56
- 150000002430 hydrocarbons Chemical group 0.000 description 44
- 125000005647 linker group Chemical group 0.000 description 38
- 229910052717 sulfur Inorganic materials 0.000 description 36
- 125000003545 alkoxy group Chemical group 0.000 description 31
- 229910052751 metal Inorganic materials 0.000 description 29
- 239000002184 metal Substances 0.000 description 29
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 28
- 229910052731 fluorine Inorganic materials 0.000 description 26
- 125000001153 fluoro group Chemical group F* 0.000 description 26
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 26
- 125000004430 oxygen atom Chemical group O* 0.000 description 26
- 125000003118 aryl group Chemical group 0.000 description 23
- ORILYTVJVMAKLC-UHFFFAOYSA-N adamantane Chemical group C1C(C2)CC3CC1CC2C3 ORILYTVJVMAKLC-UHFFFAOYSA-N 0.000 description 22
- 150000007513 acids Chemical class 0.000 description 21
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 21
- 239000004094 surface-active agent Substances 0.000 description 21
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 20
- 239000011593 sulfur Substances 0.000 description 20
- 125000002521 alkyl halide group Chemical group 0.000 description 19
- 125000005843 halogen group Chemical group 0.000 description 19
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 18
- 125000004434 sulfur atom Chemical group 0.000 description 18
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 17
- RGSFGYAAUTVSQA-UHFFFAOYSA-N Cyclopentane Chemical compound C1CCCC1 RGSFGYAAUTVSQA-UHFFFAOYSA-N 0.000 description 16
- 125000002768 hydroxyalkyl group Chemical group 0.000 description 16
- 150000002596 lactones Chemical class 0.000 description 16
- 125000005842 heteroatom Chemical group 0.000 description 15
- 229920001296 polysiloxane Polymers 0.000 description 15
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 15
- 229910052799 carbon Inorganic materials 0.000 description 14
- DMEGYFMYUHOHGS-UHFFFAOYSA-N heptamethylene Natural products C1CCCCCC1 DMEGYFMYUHOHGS-UHFFFAOYSA-N 0.000 description 14
- 238000007747 plating Methods 0.000 description 14
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 13
- 239000000243 solution Substances 0.000 description 13
- 125000003866 trichloromethyl group Chemical group ClC(Cl)(Cl)* 0.000 description 13
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 12
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 description 12
- 229920002120 photoresistant polymer Polymers 0.000 description 11
- 125000003367 polycyclic group Chemical group 0.000 description 11
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 10
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 10
- 125000004429 atom Chemical group 0.000 description 10
- 150000001721 carbon Chemical group 0.000 description 10
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 10
- 239000010949 copper Substances 0.000 description 10
- 125000002950 monocyclic group Chemical group 0.000 description 10
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 10
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 9
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 9
- 125000002029 aromatic hydrocarbon group Chemical group 0.000 description 9
- 125000006165 cyclic alkyl group Chemical group 0.000 description 9
- 238000011161 development Methods 0.000 description 9
- 230000018109 developmental process Effects 0.000 description 9
- 238000009792 diffusion process Methods 0.000 description 9
- 125000001624 naphthyl group Chemical group 0.000 description 9
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 9
- 125000003396 thiol group Chemical group [H]S* 0.000 description 9
- 150000001450 anions Chemical class 0.000 description 8
- 229910052801 chlorine Inorganic materials 0.000 description 8
- 125000004093 cyano group Chemical group *C#N 0.000 description 8
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 8
- 229920003986 novolac Polymers 0.000 description 8
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical group [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 7
- 229910052796 boron Inorganic materials 0.000 description 7
- 150000001639 boron compounds Chemical class 0.000 description 7
- 150000001768 cations Chemical class 0.000 description 7
- 238000004090 dissolution Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 7
- 239000003112 inhibitor Substances 0.000 description 7
- 229910052740 iodine Inorganic materials 0.000 description 7
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 7
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 7
- 125000005358 mercaptoalkyl group Chemical group 0.000 description 7
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 7
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 7
- 239000007787 solid Substances 0.000 description 7
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 7
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 6
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 6
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical group [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 6
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 6
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical group C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 6
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 6
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 6
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 6
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 6
- 239000007864 aqueous solution Substances 0.000 description 6
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 6
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 6
- 239000011737 fluorine Substances 0.000 description 6
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 6
- 238000002156 mixing Methods 0.000 description 6
- UMRZSTCPUPJPOJ-KNVOCYPGSA-N norbornane Chemical compound C1C[C@H]2CC[C@@H]1C2 UMRZSTCPUPJPOJ-KNVOCYPGSA-N 0.000 description 6
- 229920000139 polyethylene terephthalate Polymers 0.000 description 6
- 239000005020 polyethylene terephthalate Substances 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- YGSDEFSMJLZEOE-UHFFFAOYSA-N salicylic acid Chemical compound OC(=O)C1=CC=CC=C1O YGSDEFSMJLZEOE-UHFFFAOYSA-N 0.000 description 6
- 150000003839 salts Chemical class 0.000 description 6
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 description 6
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical group C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 5
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 5
- 125000002252 acyl group Chemical group 0.000 description 5
- 125000004414 alkyl thio group Chemical group 0.000 description 5
- 150000001491 aromatic compounds Chemical class 0.000 description 5
- 150000004945 aromatic hydrocarbons Chemical group 0.000 description 5
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 5
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 5
- 229910052736 halogen Inorganic materials 0.000 description 5
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 5
- 150000002763 monocarboxylic acids Chemical class 0.000 description 5
- FJKROLUGYXJWQN-UHFFFAOYSA-N papa-hydroxy-benzoic acid Natural products OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 description 5
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 5
- 229910052698 phosphorus Inorganic materials 0.000 description 5
- 239000011574 phosphorus Substances 0.000 description 5
- 230000007261 regionalization Effects 0.000 description 5
- 238000006467 substitution reaction Methods 0.000 description 5
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 4
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 4
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 4
- 229910015900 BF3 Inorganic materials 0.000 description 4
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 4
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- NQRYJNQNLNOLGT-UHFFFAOYSA-N Piperidine Chemical compound C1CCNCC1 NQRYJNQNLNOLGT-UHFFFAOYSA-N 0.000 description 4
- 239000004698 Polyethylene Substances 0.000 description 4
- 239000004743 Polypropylene Substances 0.000 description 4
- 150000008065 acid anhydrides Chemical class 0.000 description 4
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 4
- 239000000460 chlorine Substances 0.000 description 4
- 125000001309 chloro group Chemical group Cl* 0.000 description 4
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 4
- 150000001991 dicarboxylic acids Chemical class 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 150000002367 halogens Chemical class 0.000 description 4
- 125000004029 hydroxymethyl group Chemical group [H]OC([H])([H])* 0.000 description 4
- 125000001972 isopentyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 description 4
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 4
- 239000011976 maleic acid Substances 0.000 description 4
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 4
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 4
- 125000001971 neopentyl group Chemical group [H]C([*])([H])C(C([H])([H])[H])(C([H])([H])[H])C([H])([H])[H] 0.000 description 4
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- QWVGKYWNOKOFNN-UHFFFAOYSA-N o-cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 description 4
- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 description 4
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N phenylbenzene Natural products C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 4
- 229920000573 polyethylene Polymers 0.000 description 4
- 229920001155 polypropylene Polymers 0.000 description 4
- 229920000915 polyvinyl chloride Polymers 0.000 description 4
- 229930195734 saturated hydrocarbon Natural products 0.000 description 4
- LWNGJAHMBMVCJR-UHFFFAOYSA-N (2,3,4,5,6-pentafluorophenoxy)boronic acid Chemical compound OB(O)OC1=C(F)C(F)=C(F)C(F)=C1F LWNGJAHMBMVCJR-UHFFFAOYSA-N 0.000 description 3
- YUTHQCGFZNYPIG-UHFFFAOYSA-N 1-[2-(2-methylprop-2-enoyloxy)ethyl]cyclohexane-1,2-dicarboxylic acid Chemical compound CC(=C)C(=O)OCCC1(C(O)=O)CCCCC1C(O)=O YUTHQCGFZNYPIG-UHFFFAOYSA-N 0.000 description 3
- LBNDGEZENJUBCO-UHFFFAOYSA-N 2-[2-(2-methylprop-2-enoyloxy)ethyl]butanedioic acid Chemical compound CC(=C)C(=O)OCCC(C(O)=O)CC(O)=O LBNDGEZENJUBCO-UHFFFAOYSA-N 0.000 description 3
- SBYMUDUGTIKLCR-UHFFFAOYSA-N 2-chloroethenylbenzene Chemical compound ClC=CC1=CC=CC=C1 SBYMUDUGTIKLCR-UHFFFAOYSA-N 0.000 description 3
- 125000004200 2-methoxyethyl group Chemical group [H]C([H])([H])OC([H])([H])C([H])([H])* 0.000 description 3
- YGBVAGIVGBLKFE-UHFFFAOYSA-N 2-phenylbut-1-en-1-ol Chemical compound CCC(=CO)C1=CC=CC=C1 YGBVAGIVGBLKFE-UHFFFAOYSA-N 0.000 description 3
- XLLXMBCBJGATSP-UHFFFAOYSA-N 2-phenylethenol Chemical compound OC=CC1=CC=CC=C1 XLLXMBCBJGATSP-UHFFFAOYSA-N 0.000 description 3
- MKHXOKALQIHXPI-UHFFFAOYSA-N 2-phenylprop-1-en-1-ol Chemical compound OC=C(C)C1=CC=CC=C1 MKHXOKALQIHXPI-UHFFFAOYSA-N 0.000 description 3
- DWTKNKBWDQHROK-UHFFFAOYSA-N 3-[2-(2-methylprop-2-enoyloxy)ethyl]phthalic acid Chemical compound CC(=C)C(=O)OCCC1=CC=CC(C(O)=O)=C1C(O)=O DWTKNKBWDQHROK-UHFFFAOYSA-N 0.000 description 3
- IWTYTFSSTWXZFU-UHFFFAOYSA-N 3-chloroprop-1-enylbenzene Chemical compound ClCC=CC1=CC=CC=C1 IWTYTFSSTWXZFU-UHFFFAOYSA-N 0.000 description 3
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 3
- 239000005711 Benzoic acid Substances 0.000 description 3
- 229920002799 BoPET Polymers 0.000 description 3
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 3
- 239000004215 Carbon black (E152) Substances 0.000 description 3
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical class S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- RWRDLPDLKQPQOW-UHFFFAOYSA-N Pyrrolidine Chemical compound C1CCNC1 RWRDLPDLKQPQOW-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 125000005396 acrylic acid ester group Chemical group 0.000 description 3
- 150000001299 aldehydes Chemical class 0.000 description 3
- 125000004453 alkoxycarbonyl group Chemical group 0.000 description 3
- XYLMUPLGERFSHI-UHFFFAOYSA-N alpha-Methylstyrene Chemical compound CC(=C)C1=CC=CC=C1 XYLMUPLGERFSHI-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 125000003710 aryl alkyl group Chemical group 0.000 description 3
- 125000005110 aryl thio group Chemical group 0.000 description 3
- 235000010233 benzoic acid Nutrition 0.000 description 3
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000004305 biphenyl Substances 0.000 description 3
- 235000010290 biphenyl Nutrition 0.000 description 3
- 229910052795 boron group element Inorganic materials 0.000 description 3
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 3
- 125000004218 chloromethyl group Chemical group [H]C([H])(Cl)* 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 3
- 125000006841 cyclic skeleton Chemical group 0.000 description 3
- WJTCGQSWYFHTAC-UHFFFAOYSA-N cyclooctane Chemical compound C1CCCCCCC1 WJTCGQSWYFHTAC-UHFFFAOYSA-N 0.000 description 3
- 239000004914 cyclooctane Substances 0.000 description 3
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 3
- 125000004772 dichloromethyl group Chemical group [H]C(Cl)(Cl)* 0.000 description 3
- LTYMSROWYAPPGB-UHFFFAOYSA-O diphenylsulfanium Chemical compound C=1C=CC=CC=1[SH+]C1=CC=CC=C1 LTYMSROWYAPPGB-UHFFFAOYSA-O 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 239000006260 foam Substances 0.000 description 3
- 239000001530 fumaric acid Substances 0.000 description 3
- LNTHITQWFMADLM-UHFFFAOYSA-N gallic acid Chemical compound OC(=O)C1=CC(O)=C(O)C(O)=C1 LNTHITQWFMADLM-UHFFFAOYSA-N 0.000 description 3
- 125000001072 heteroaryl group Chemical group 0.000 description 3
- 229930195733 hydrocarbon Natural products 0.000 description 3
- 230000002401 inhibitory effect Effects 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 125000002816 methylsulfanyl group Chemical group [H]C([H])([H])S[*] 0.000 description 3
- JESXATFQYMPTNL-UHFFFAOYSA-N mono-hydroxyphenyl-ethylene Natural products OC1=CC=CC=C1C=C JESXATFQYMPTNL-UHFFFAOYSA-N 0.000 description 3
- 125000004433 nitrogen atom Chemical group N* 0.000 description 3
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 150000004010 onium ions Chemical class 0.000 description 3
- 125000000962 organic group Chemical group 0.000 description 3
- 125000004043 oxo group Chemical group O=* 0.000 description 3
- 125000005010 perfluoroalkyl group Chemical group 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 3
- 235000011007 phosphoric acid Nutrition 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 3
- 229960004889 salicylic acid Drugs 0.000 description 3
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 3
- RMVRSNDYEFQCLF-UHFFFAOYSA-N thiophenol Chemical compound SC1=CC=CC=C1 RMVRSNDYEFQCLF-UHFFFAOYSA-N 0.000 description 3
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 3
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 3
- ITMCEJHCFYSIIV-UHFFFAOYSA-M triflate Chemical compound [O-]S(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-M 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- GGAUUQHSCNMCAU-ZXZARUISSA-N (2s,3r)-butane-1,2,3,4-tetracarboxylic acid Chemical compound OC(=O)C[C@H](C(O)=O)[C@H](C(O)=O)CC(O)=O GGAUUQHSCNMCAU-ZXZARUISSA-N 0.000 description 2
- SASYHUDIOGGZCN-ARJAWSKDSA-N (z)-2-ethylbut-2-enedioic acid Chemical compound CC\C(C(O)=O)=C\C(O)=O SASYHUDIOGGZCN-ARJAWSKDSA-N 0.000 description 2
- JGTNAGYHADQMCM-UHFFFAOYSA-M 1,1,2,2,3,3,4,4,4-nonafluorobutane-1-sulfonate Chemical compound [O-]S(=O)(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F JGTNAGYHADQMCM-UHFFFAOYSA-M 0.000 description 2
- JIHQDMXYYFUGFV-UHFFFAOYSA-N 1,3,5-triazine Chemical compound C1=NC=NC=N1 JIHQDMXYYFUGFV-UHFFFAOYSA-N 0.000 description 2
- GWEHVDNNLFDJLR-UHFFFAOYSA-N 1,3-diphenylurea Chemical compound C=1C=CC=CC=1NC(=O)NC1=CC=CC=C1 GWEHVDNNLFDJLR-UHFFFAOYSA-N 0.000 description 2
- 125000004066 1-hydroxyethyl group Chemical group [H]OC([H])([*])C([H])([H])[H] 0.000 description 2
- KJCVRFUGPWSIIH-UHFFFAOYSA-N 1-naphthol Chemical compound C1=CC=C2C(O)=CC=CC2=C1 KJCVRFUGPWSIIH-UHFFFAOYSA-N 0.000 description 2
- HYZJCKYKOHLVJF-UHFFFAOYSA-N 1H-benzimidazole Chemical compound C1=CC=C2NC=NC2=C1 HYZJCKYKOHLVJF-UHFFFAOYSA-N 0.000 description 2
- OGRAOKJKVGDSFR-UHFFFAOYSA-N 2,3,5-trimethylphenol Chemical compound CC1=CC(C)=C(C)C(O)=C1 OGRAOKJKVGDSFR-UHFFFAOYSA-N 0.000 description 2
- QWBBPBRQALCEIZ-UHFFFAOYSA-N 2,3-dimethylphenol Chemical compound CC1=CC=CC(O)=C1C QWBBPBRQALCEIZ-UHFFFAOYSA-N 0.000 description 2
- NKTOLZVEWDHZMU-UHFFFAOYSA-N 2,5-xylenol Chemical compound CC1=CC=C(C)C(O)=C1 NKTOLZVEWDHZMU-UHFFFAOYSA-N 0.000 description 2
- NXXYKOUNUYWIHA-UHFFFAOYSA-N 2,6-Dimethylphenol Chemical compound CC1=CC=CC(C)=C1O NXXYKOUNUYWIHA-UHFFFAOYSA-N 0.000 description 2
- BFQFFNWLTHFJOZ-UHFFFAOYSA-N 2-(1,3-benzodioxol-5-yl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC(C(Cl)(Cl)Cl)=NC(C=2C=C3OCOC3=CC=2)=N1 BFQFFNWLTHFJOZ-UHFFFAOYSA-N 0.000 description 2
- OEPOKWHJYJXUGD-UHFFFAOYSA-N 2-(3-phenylmethoxyphenyl)-1,3-thiazole-4-carbaldehyde Chemical compound O=CC1=CSC(C=2C=C(OCC=3C=CC=CC=3)C=CC=2)=N1 OEPOKWHJYJXUGD-UHFFFAOYSA-N 0.000 description 2
- GJYCVCVHRSWLNY-UHFFFAOYSA-N 2-butylphenol Chemical compound CCCCC1=CC=CC=C1O GJYCVCVHRSWLNY-UHFFFAOYSA-N 0.000 description 2
- 125000004777 2-fluoroethyl group Chemical group [H]C([H])(F)C([H])([H])* 0.000 description 2
- JWAZRIHNYRIHIV-UHFFFAOYSA-N 2-naphthol Chemical compound C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 description 2
- YCOXTKKNXUZSKD-UHFFFAOYSA-N 3,4-xylenol Chemical compound CC1=CC=C(O)C=C1C YCOXTKKNXUZSKD-UHFFFAOYSA-N 0.000 description 2
- TUAMRELNJMMDMT-UHFFFAOYSA-N 3,5-xylenol Chemical compound CC1=CC(C)=CC(O)=C1 TUAMRELNJMMDMT-UHFFFAOYSA-N 0.000 description 2
- HMNKTRSOROOSPP-UHFFFAOYSA-N 3-Ethylphenol Chemical compound CCC1=CC=CC(O)=C1 HMNKTRSOROOSPP-UHFFFAOYSA-N 0.000 description 2
- WHBMMWSBFZVSSR-UHFFFAOYSA-N 3-hydroxybutyric acid Chemical compound CC(O)CC(O)=O WHBMMWSBFZVSSR-UHFFFAOYSA-N 0.000 description 2
- HXDOZKJGKXYMEW-UHFFFAOYSA-N 4-ethylphenol Chemical compound CCC1=CC=C(O)C=C1 HXDOZKJGKXYMEW-UHFFFAOYSA-N 0.000 description 2
- XLSZMDLNRCVEIJ-UHFFFAOYSA-N 4-methylimidazole Chemical compound CC1=CNC=N1 XLSZMDLNRCVEIJ-UHFFFAOYSA-N 0.000 description 2
- KYMOWQQIZINTJZ-UHFFFAOYSA-N 4-methylsulfanylbenzenethiol Chemical compound CSC1=CC=C(S)C=C1 KYMOWQQIZINTJZ-UHFFFAOYSA-N 0.000 description 2
- QNVNLUSHGRBCLO-UHFFFAOYSA-N 5-hydroxybenzene-1,3-dicarboxylic acid Chemical compound OC(=O)C1=CC(O)=CC(C(O)=O)=C1 QNVNLUSHGRBCLO-UHFFFAOYSA-N 0.000 description 2
- OZJPLYNZGCXSJM-UHFFFAOYSA-N 5-valerolactone Chemical compound O=C1CCCCO1 OZJPLYNZGCXSJM-UHFFFAOYSA-N 0.000 description 2
- KDCGOANMDULRCW-UHFFFAOYSA-N 7H-purine Chemical compound N1=CNC2=NC=NC2=C1 KDCGOANMDULRCW-UHFFFAOYSA-N 0.000 description 2
- IKHGUXGNUITLKF-UHFFFAOYSA-N Acetaldehyde Chemical compound CC=O IKHGUXGNUITLKF-UHFFFAOYSA-N 0.000 description 2
- DLFVBJFMPXGRIB-UHFFFAOYSA-N Acetamide Chemical compound CC(N)=O DLFVBJFMPXGRIB-UHFFFAOYSA-N 0.000 description 2
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 2
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- KXDAEFPNCMNJSK-UHFFFAOYSA-N Benzamide Chemical compound NC(=O)C1=CC=CC=C1 KXDAEFPNCMNJSK-UHFFFAOYSA-N 0.000 description 2
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- IEPRKVQEAMIZSS-UHFFFAOYSA-N Di-Et ester-Fumaric acid Natural products CCOC(=O)C=CC(=O)OCC IEPRKVQEAMIZSS-UHFFFAOYSA-N 0.000 description 2
- IEPRKVQEAMIZSS-WAYWQWQTSA-N Diethyl maleate Chemical compound CCOC(=O)\C=C/C(=O)OCC IEPRKVQEAMIZSS-WAYWQWQTSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- ZHNUHDYFZUAESO-UHFFFAOYSA-N Formamide Chemical compound NC=O ZHNUHDYFZUAESO-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- SIKJAQJRHWYJAI-UHFFFAOYSA-N Indole Chemical compound C1=CC=C2NC=CC2=C1 SIKJAQJRHWYJAI-UHFFFAOYSA-N 0.000 description 2
- YNAVUWVOSKDBBP-UHFFFAOYSA-N Morpholine Chemical compound C1COCCN1 YNAVUWVOSKDBBP-UHFFFAOYSA-N 0.000 description 2
- ATHHXGZTWNVVOU-UHFFFAOYSA-N N-methylformamide Chemical compound CNC=O ATHHXGZTWNVVOU-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- ABLZXFCXXLZCGV-UHFFFAOYSA-N Phosphorous acid Chemical compound OP(O)=O ABLZXFCXXLZCGV-UHFFFAOYSA-N 0.000 description 2
- KYQCOXFCLRTKLS-UHFFFAOYSA-N Pyrazine Chemical compound C1=CN=CC=N1 KYQCOXFCLRTKLS-UHFFFAOYSA-N 0.000 description 2
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 2
- SMWDFEZZVXVKRB-UHFFFAOYSA-N Quinoline Chemical compound N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 239000004115 Sodium Silicate Substances 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 description 2
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 2
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 2
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 2
- ZUUNHCQWPCGZDH-UHFFFAOYSA-N [4-(4-benzoyl-2-chlorophenyl)sulfanylphenyl]-bis(4-fluorophenyl)sulfanium Chemical compound C1=CC(F)=CC=C1[S+](C=1C=CC(SC=2C(=CC(=CC=2)C(=O)C=2C=CC=CC=2)Cl)=CC=1)C1=CC=C(F)C=C1 ZUUNHCQWPCGZDH-UHFFFAOYSA-N 0.000 description 2
- 235000011054 acetic acid Nutrition 0.000 description 2
- 239000003377 acid catalyst Substances 0.000 description 2
- 125000004423 acyloxy group Chemical group 0.000 description 2
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 150000007824 aliphatic compounds Chemical class 0.000 description 2
- 125000004183 alkoxy alkyl group Chemical group 0.000 description 2
- 125000004448 alkyl carbonyl group Chemical group 0.000 description 2
- 125000005192 alkyl ethylene group Chemical group 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 125000000129 anionic group Chemical group 0.000 description 2
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 2
- 125000005129 aryl carbonyl group Chemical group 0.000 description 2
- 125000005161 aryl oxy carbonyl group Chemical group 0.000 description 2
- 125000000732 arylene group Chemical group 0.000 description 2
- 125000004104 aryloxy group Chemical group 0.000 description 2
- HUMNYLRZRPPJDN-UHFFFAOYSA-N benzaldehyde Chemical compound O=CC1=CC=CC=C1 HUMNYLRZRPPJDN-UHFFFAOYSA-N 0.000 description 2
- XSCHRSMBECNVNS-UHFFFAOYSA-N benzopyrazine Natural products N1=CC=NC2=CC=CC=C21 XSCHRSMBECNVNS-UHFFFAOYSA-N 0.000 description 2
- IOJUPLGTWVMSFF-UHFFFAOYSA-N benzothiazole Chemical compound C1=CC=C2SC=NC2=C1 IOJUPLGTWVMSFF-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 125000006267 biphenyl group Chemical group 0.000 description 2
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 2
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 2
- 229910052794 bromium Inorganic materials 0.000 description 2
- 125000005997 bromomethyl group Chemical group 0.000 description 2
- KPWJBEFBFLRCLH-UHFFFAOYSA-L cadmium bromide Chemical compound Br[Cd]Br KPWJBEFBFLRCLH-UHFFFAOYSA-L 0.000 description 2
- YKYOUMDCQGMQQO-UHFFFAOYSA-L cadmium dichloride Chemical compound Cl[Cd]Cl YKYOUMDCQGMQQO-UHFFFAOYSA-L 0.000 description 2
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 2
- 150000001735 carboxylic acids Chemical class 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- QSAWQNUELGIYBC-UHFFFAOYSA-N cyclohexane-1,2-dicarboxylic acid Chemical compound OC(=O)C1CCCCC1C(O)=O QSAWQNUELGIYBC-UHFFFAOYSA-N 0.000 description 2
- STZIXLPVKZUAMV-UHFFFAOYSA-N cyclopentane-1,1,2,2-tetracarboxylic acid Chemical compound OC(=O)C1(C(O)=O)CCCC1(C(O)=O)C(O)=O STZIXLPVKZUAMV-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- PIZLBWGMERQCOC-UHFFFAOYSA-N dibenzyl carbonate Chemical compound C=1C=CC=CC=1COC(=O)OCC1=CC=CC=C1 PIZLBWGMERQCOC-UHFFFAOYSA-N 0.000 description 2
- JBSLOWBPDRZSMB-BQYQJAHWSA-N dibutyl (e)-but-2-enedioate Chemical compound CCCCOC(=O)\C=C\C(=O)OCCCC JBSLOWBPDRZSMB-BQYQJAHWSA-N 0.000 description 2
- 150000001993 dienes Chemical class 0.000 description 2
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 2
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 2
- 125000001028 difluoromethyl group Chemical group [H]C(F)(F)* 0.000 description 2
- URSLCTBXQMKCFE-UHFFFAOYSA-N dihydrogenborate Chemical compound OB(O)[O-] URSLCTBXQMKCFE-UHFFFAOYSA-N 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 2
- OWZDULOODZHVCQ-UHFFFAOYSA-N diphenyl-(4-phenylsulfanylphenyl)sulfanium Chemical compound C=1C=C([S+](C=2C=CC=CC=2)C=2C=CC=CC=2)C=CC=1SC1=CC=CC=C1 OWZDULOODZHVCQ-UHFFFAOYSA-N 0.000 description 2
- OZLBDYMWFAHSOQ-UHFFFAOYSA-N diphenyliodanium Chemical compound C=1C=CC=CC=1[I+]C1=CC=CC=C1 OZLBDYMWFAHSOQ-UHFFFAOYSA-N 0.000 description 2
- WEHWNAOGRSTTBQ-UHFFFAOYSA-N dipropylamine Chemical compound CCCNCCC WEHWNAOGRSTTBQ-UHFFFAOYSA-N 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 125000004705 ethylthio group Chemical group C(C)S* 0.000 description 2
- 238000003682 fluorination reaction Methods 0.000 description 2
- 125000004216 fluoromethyl group Chemical group [H]C([H])(F)* 0.000 description 2
- HYBBIBNJHNGZAN-UHFFFAOYSA-N furfural Chemical compound O=CC1=CC=CO1 HYBBIBNJHNGZAN-UHFFFAOYSA-N 0.000 description 2
- 229940074391 gallic acid Drugs 0.000 description 2
- 235000004515 gallic acid Nutrition 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 125000000623 heterocyclic group Chemical group 0.000 description 2
- NAQMVNRVTILPCV-UHFFFAOYSA-N hexane-1,6-diamine Chemical compound NCCCCCCN NAQMVNRVTILPCV-UHFFFAOYSA-N 0.000 description 2
- 239000011630 iodine Substances 0.000 description 2
- KQNPFQTWMSNSAP-UHFFFAOYSA-N isobutyric acid Chemical compound CC(C)C(O)=O KQNPFQTWMSNSAP-UHFFFAOYSA-N 0.000 description 2
- QQVIHTHCMHWDBS-UHFFFAOYSA-N isophthalic acid Chemical compound OC(=O)C1=CC=CC(C(O)=O)=C1 QQVIHTHCMHWDBS-UHFFFAOYSA-N 0.000 description 2
- 125000003253 isopropoxy group Chemical group [H]C([H])([H])C([H])(O*)C([H])([H])[H] 0.000 description 2
- 150000004715 keto acids Chemical class 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- RLSSMJSEOOYNOY-UHFFFAOYSA-N m-cresol Chemical compound CC1=CC=CC(O)=C1 RLSSMJSEOOYNOY-UHFFFAOYSA-N 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- FQPSGWSUVKBHSU-UHFFFAOYSA-N methacrylamide Chemical compound CC(=C)C(N)=O FQPSGWSUVKBHSU-UHFFFAOYSA-N 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 125000006606 n-butoxy group Chemical group 0.000 description 2
- 125000001280 n-hexyl group Chemical group C(CCCCC)* 0.000 description 2
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- 125000003506 n-propoxy group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])O* 0.000 description 2
- 125000002560 nitrile group Chemical group 0.000 description 2
- 235000006408 oxalic acid Nutrition 0.000 description 2
- IWDCLRJOBJJRNH-UHFFFAOYSA-N p-cresol Chemical compound CC1=CC=C(O)C=C1 IWDCLRJOBJJRNH-UHFFFAOYSA-N 0.000 description 2
- JOXIMZWYDAKGHI-UHFFFAOYSA-N p-toluenesulfonic acid Substances CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 2
- 125000004817 pentamethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[*:1] 0.000 description 2
- YNPNZTXNASCQKK-UHFFFAOYSA-N phenanthrene Chemical compound C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 description 2
- 150000002989 phenols Chemical class 0.000 description 2
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 2
- ACVYVLVWPXVTIT-UHFFFAOYSA-N phosphinic acid Chemical compound O[PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-N 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- 229920002432 poly(vinyl methyl ether) polymer Polymers 0.000 description 2
- 229920002689 polyvinyl acetate Polymers 0.000 description 2
- 239000011118 polyvinyl acetate Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical compound CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- KIDHWZJUCRJVML-UHFFFAOYSA-N putrescine Chemical compound NCCCCN KIDHWZJUCRJVML-UHFFFAOYSA-N 0.000 description 2
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
- CYIDZMCFTVVTJO-UHFFFAOYSA-N pyromellitic acid Chemical compound OC(=O)C1=CC(C(O)=O)=C(C(O)=O)C=C1C(O)=O CYIDZMCFTVVTJO-UHFFFAOYSA-N 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 150000002910 rare earth metals Chemical class 0.000 description 2
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 2
- 229910052911 sodium silicate Inorganic materials 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 2
- JMSVCTWVEWCHDZ-UHFFFAOYSA-N syringic acid Chemical compound COC1=CC(C(O)=O)=CC(OC)=C1O JMSVCTWVEWCHDZ-UHFFFAOYSA-N 0.000 description 2
- 125000004213 tert-butoxy group Chemical group [H]C([H])([H])C(O*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- ZSUXOVNWDZTCFN-UHFFFAOYSA-L tin(ii) bromide Chemical compound Br[Sn]Br ZSUXOVNWDZTCFN-UHFFFAOYSA-L 0.000 description 2
- 125000004665 trialkylsilyl group Chemical group 0.000 description 2
- 125000005591 trimellitate group Chemical group 0.000 description 2
- ARCGXLSVLAOJQL-UHFFFAOYSA-N trimellitic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C(C(O)=O)=C1 ARCGXLSVLAOJQL-UHFFFAOYSA-N 0.000 description 2
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 2
- 125000003258 trimethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])[*:1] 0.000 description 2
- WLOQLWBIJZDHET-UHFFFAOYSA-N triphenylsulfonium Chemical compound C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 WLOQLWBIJZDHET-UHFFFAOYSA-N 0.000 description 2
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 2
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- VNDYJBBGRKZCSX-UHFFFAOYSA-L zinc bromide Chemical compound Br[Zn]Br VNDYJBBGRKZCSX-UHFFFAOYSA-L 0.000 description 2
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 description 2
- UAYWVJHJZHQCIE-UHFFFAOYSA-L zinc iodide Chemical compound I[Zn]I UAYWVJHJZHQCIE-UHFFFAOYSA-L 0.000 description 2
- ONDPHDOFVYQSGI-UHFFFAOYSA-N zinc nitrate Chemical compound [Zn+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O ONDPHDOFVYQSGI-UHFFFAOYSA-N 0.000 description 2
- DTGKSKDOIYIVQL-WEDXCCLWSA-N (+)-borneol Chemical group C1C[C@@]2(C)[C@@H](O)C[C@@H]1C2(C)C DTGKSKDOIYIVQL-WEDXCCLWSA-N 0.000 description 1
- TXUICONDJPYNPY-UHFFFAOYSA-N (1,10,13-trimethyl-3-oxo-4,5,6,7,8,9,11,12,14,15,16,17-dodecahydrocyclopenta[a]phenanthren-17-yl) heptanoate Chemical compound C1CC2CC(=O)C=C(C)C2(C)C2C1C1CCC(OC(=O)CCCCCC)C1(C)CC2 TXUICONDJPYNPY-UHFFFAOYSA-N 0.000 description 1
- MZVIAOIHWLOXPX-UHFFFAOYSA-N (1,3-dioxoisoindol-2-yl) methanesulfonate Chemical compound C1=CC=C2C(=O)N(OS(=O)(=O)C)C(=O)C2=C1 MZVIAOIHWLOXPX-UHFFFAOYSA-N 0.000 description 1
- GYXAHUXQRATWDV-UHFFFAOYSA-N (1,3-dioxoisoindol-2-yl) trifluoromethanesulfonate Chemical compound C1=CC=C2C(=O)N(OS(=O)(=O)C(F)(F)F)C(=O)C2=C1 GYXAHUXQRATWDV-UHFFFAOYSA-N 0.000 description 1
- LCIOIBLOWNIOOF-UHFFFAOYSA-N (2,3-difluorophenoxy)boronic acid Chemical compound OB(O)OC1=CC=CC(F)=C1F LCIOIBLOWNIOOF-UHFFFAOYSA-N 0.000 description 1
- AZYZDWOTYBTZQO-UHFFFAOYSA-N (2,5-dioxopyrrolidin-1-yl) methanesulfonate Chemical compound CS(=O)(=O)ON1C(=O)CCC1=O AZYZDWOTYBTZQO-UHFFFAOYSA-N 0.000 description 1
- XGLBWFAMJODNHB-UHFFFAOYSA-N (2,5-dioxopyrrolidin-1-yl) trichloromethanesulfonate Chemical compound ClC(Cl)(Cl)S(=O)(=O)ON1C(=O)CCC1=O XGLBWFAMJODNHB-UHFFFAOYSA-N 0.000 description 1
- WMGVPDQNPUQRND-UHFFFAOYSA-N (2-methylphenyl)acetonitrile Chemical compound CC1=CC=CC=C1CC#N WMGVPDQNPUQRND-UHFFFAOYSA-N 0.000 description 1
- YXTDAZMTQFUZHK-ZVGUSBNCSA-L (2r,3r)-2,3-dihydroxybutanedioate;tin(2+) Chemical compound [Sn+2].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O YXTDAZMTQFUZHK-ZVGUSBNCSA-L 0.000 description 1
- IIPCTBAMTPCGJK-UHFFFAOYSA-N (3-sulfanylphenyl)methanol Chemical compound OCC1=CC=CC(S)=C1 IIPCTBAMTPCGJK-UHFFFAOYSA-N 0.000 description 1
- WBUSZOLVSDXDOC-UHFFFAOYSA-M (4-methoxyphenyl)-diphenylsulfanium;trifluoromethanesulfonate Chemical compound [O-]S(=O)(=O)C(F)(F)F.C1=CC(OC)=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 WBUSZOLVSDXDOC-UHFFFAOYSA-M 0.000 description 1
- YXSLFXLNXREQFW-UHFFFAOYSA-M (4-methoxyphenyl)-phenyliodanium;trifluoromethanesulfonate Chemical compound [O-]S(=O)(=O)C(F)(F)F.C1=CC(OC)=CC=C1[I+]C1=CC=CC=C1 YXSLFXLNXREQFW-UHFFFAOYSA-M 0.000 description 1
- QKAIFCSOWIMRJG-UHFFFAOYSA-N (4-methylphenyl)-(4-propan-2-ylphenyl)iodanium Chemical compound C1=CC(C(C)C)=CC=C1[I+]C1=CC=C(C)C=C1 QKAIFCSOWIMRJG-UHFFFAOYSA-N 0.000 description 1
- CIZFAASMIWNDTR-UHFFFAOYSA-N (4-methylphenyl)-[4-(2-methylpropyl)phenyl]iodanium Chemical compound C1=CC(CC(C)C)=CC=C1[I+]C1=CC=C(C)C=C1 CIZFAASMIWNDTR-UHFFFAOYSA-N 0.000 description 1
- VQVGJEIVVJBMCV-UHFFFAOYSA-N (4-octoxyphenyl)-phenyliodanium Chemical compound C1=CC(OCCCCCCCC)=CC=C1[I+]C1=CC=CC=C1 VQVGJEIVVJBMCV-UHFFFAOYSA-N 0.000 description 1
- RLAWXWSZTKMPQQ-UHFFFAOYSA-M (4-tert-butylphenyl)-diphenylsulfanium;trifluoromethanesulfonate Chemical compound [O-]S(=O)(=O)C(F)(F)F.C1=CC(C(C)(C)C)=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 RLAWXWSZTKMPQQ-UHFFFAOYSA-M 0.000 description 1
- AFENDNXGAFYKQO-VKHMYHEASA-N (S)-2-hydroxybutyric acid Chemical compound CC[C@H](O)C(O)=O AFENDNXGAFYKQO-VKHMYHEASA-N 0.000 description 1
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 1
- JHVQWALHXJPODC-ALCCZGGFSA-N (z)-2-[2-(2-methylprop-2-enoyloxy)ethyl]but-2-enedioic acid Chemical compound CC(=C)C(=O)OCC\C(C(O)=O)=C\C(O)=O JHVQWALHXJPODC-ALCCZGGFSA-N 0.000 description 1
- YFSUTJLHUFNCNZ-UHFFFAOYSA-M 1,1,2,2,3,3,4,4,5,5,6,6,7,7,8,8,8-heptadecafluorooctane-1-sulfonate Chemical compound [O-]S(=O)(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F YFSUTJLHUFNCNZ-UHFFFAOYSA-M 0.000 description 1
- AVQQQNCBBIEMEU-UHFFFAOYSA-N 1,1,3,3-tetramethylurea Chemical compound CN(C)C(=O)N(C)C AVQQQNCBBIEMEU-UHFFFAOYSA-N 0.000 description 1
- YBBLOADPFWKNGS-UHFFFAOYSA-N 1,1-dimethylurea Chemical compound CN(C)C(N)=O YBBLOADPFWKNGS-UHFFFAOYSA-N 0.000 description 1
- NWHNXXMYEICZAT-UHFFFAOYSA-N 1,2,2,6,6-pentamethylpiperidin-4-ol Chemical class CN1C(C)(C)CC(O)CC1(C)C NWHNXXMYEICZAT-UHFFFAOYSA-N 0.000 description 1
- FIDRAVVQGKNYQK-UHFFFAOYSA-N 1,2,3,4-tetrahydrotriazine Chemical compound C1NNNC=C1 FIDRAVVQGKNYQK-UHFFFAOYSA-N 0.000 description 1
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 1
- FYADHXFMURLYQI-UHFFFAOYSA-N 1,2,4-triazine Chemical compound C1=CN=NC=N1 FYADHXFMURLYQI-UHFFFAOYSA-N 0.000 description 1
- DPHCYOASDIMGRA-UHFFFAOYSA-N 1,2-di(decan-4-yloxy)-3-iodobenzene Chemical compound CCCC(CCCCCC)OC=1C(=C(C=CC=1)I)OC(CCC)CCCCCC DPHCYOASDIMGRA-UHFFFAOYSA-N 0.000 description 1
- NZUPFZNVGSWLQC-UHFFFAOYSA-N 1,3,5-tris(2,3-dibromopropyl)-1,3,5-triazinane-2,4,6-trione Chemical compound BrCC(Br)CN1C(=O)N(CC(Br)CBr)C(=O)N(CC(Br)CBr)C1=O NZUPFZNVGSWLQC-UHFFFAOYSA-N 0.000 description 1
- BCMCBBGGLRIHSE-UHFFFAOYSA-N 1,3-benzoxazole Chemical compound C1=CC=C2OC=NC2=C1 BCMCBBGGLRIHSE-UHFFFAOYSA-N 0.000 description 1
- 229940057054 1,3-dimethylurea Drugs 0.000 description 1
- AJIKETNVAMWHDD-UHFFFAOYSA-N 1,4-bis(sulfanylmethyl)cyclohexa-2,4-dien-1-ol Chemical compound SCC1(CC=C(C=C1)CS)O AJIKETNVAMWHDD-UHFFFAOYSA-N 0.000 description 1
- RXYPXQSKLGGKOL-UHFFFAOYSA-N 1,4-dimethylpiperazine Chemical compound CN1CCN(C)CC1 RXYPXQSKLGGKOL-UHFFFAOYSA-N 0.000 description 1
- OPGNITOIECCLAQ-UHFFFAOYSA-N 1,5-bis(sulfanylmethyl)cyclohexa-2,4-dien-1-ol Chemical compound SCC1(CC(=CC=C1)CS)O OPGNITOIECCLAQ-UHFFFAOYSA-N 0.000 description 1
- GYQQFWWMZYBCIB-UHFFFAOYSA-N 1-[diazo-(4-methylphenyl)sulfonylmethyl]sulfonyl-4-methylbenzene Chemical compound C1=CC(C)=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1=CC=C(C)C=C1 GYQQFWWMZYBCIB-UHFFFAOYSA-N 0.000 description 1
- BMVXCPBXGZKUPN-UHFFFAOYSA-N 1-hexanamine Chemical compound CCCCCCN BMVXCPBXGZKUPN-UHFFFAOYSA-N 0.000 description 1
- RTBFRGCFXZNCOE-UHFFFAOYSA-N 1-methylsulfonylpiperidin-4-one Chemical compound CS(=O)(=O)N1CCC(=O)CC1 RTBFRGCFXZNCOE-UHFFFAOYSA-N 0.000 description 1
- QWENRTYMTSOGBR-UHFFFAOYSA-N 1H-1,2,3-Triazole Chemical compound C=1C=NNN=1 QWENRTYMTSOGBR-UHFFFAOYSA-N 0.000 description 1
- BAXOFTOLAUCFNW-UHFFFAOYSA-N 1H-indazole Chemical compound C1=CC=C2C=NNC2=C1 BAXOFTOLAUCFNW-UHFFFAOYSA-N 0.000 description 1
- XYHKNCXZYYTLRG-UHFFFAOYSA-N 1h-imidazole-2-carbaldehyde Chemical compound O=CC1=NC=CN1 XYHKNCXZYYTLRG-UHFFFAOYSA-N 0.000 description 1
- 125000004778 2,2-difluoroethyl group Chemical group [H]C([H])(*)C([H])(F)F 0.000 description 1
- IKMBXKGUMLSBOT-UHFFFAOYSA-N 2,3,4,5,6-pentafluorobenzenesulfonic acid Chemical compound OS(=O)(=O)C1=C(F)C(F)=C(F)C(F)=C1F IKMBXKGUMLSBOT-UHFFFAOYSA-N 0.000 description 1
- GQHTUMJGOHRCHB-UHFFFAOYSA-N 2,3,4,6,7,8,9,10-octahydropyrimido[1,2-a]azepine Chemical compound C1CCCCN2CCCN=C21 GQHTUMJGOHRCHB-UHFFFAOYSA-N 0.000 description 1
- XRUGBBIQLIVCSI-UHFFFAOYSA-N 2,3,4-trimethylphenol Chemical compound CC1=CC=C(O)C(C)=C1C XRUGBBIQLIVCSI-UHFFFAOYSA-N 0.000 description 1
- XGBWXISUZXYULS-UHFFFAOYSA-N 2,3-ditert-butylpyridine Chemical group CC(C)(C)C1=CC=CN=C1C(C)(C)C XGBWXISUZXYULS-UHFFFAOYSA-N 0.000 description 1
- KMVWNDHKTPHDMT-UHFFFAOYSA-N 2,4,6-tripyridin-2-yl-1,3,5-triazine Chemical compound N1=CC=CC=C1C1=NC(C=2N=CC=CC=2)=NC(C=2N=CC=CC=2)=N1 KMVWNDHKTPHDMT-UHFFFAOYSA-N 0.000 description 1
- BVBUVHZVGAXBJX-UHFFFAOYSA-N 2,4,6-tris(2,3-dibromopropyl)-1,3,5-triazine Chemical compound BrCC(Br)CC1=NC(CC(Br)CBr)=NC(CC(Br)CBr)=N1 BVBUVHZVGAXBJX-UHFFFAOYSA-N 0.000 description 1
- KUFFULVDNCHOFZ-UHFFFAOYSA-N 2,4-xylenol Chemical compound CC1=CC=C(O)C(C)=C1 KUFFULVDNCHOFZ-UHFFFAOYSA-N 0.000 description 1
- PJUOHDQXFNPPRF-UHFFFAOYSA-N 2,6-diphenylpyridine Chemical compound C1=CC=CC=C1C1=CC=CC(C=2C=CC=CC=2)=N1 PJUOHDQXFNPPRF-UHFFFAOYSA-N 0.000 description 1
- NFVMNXZFSKGLDR-UHFFFAOYSA-N 2,6-ditert-butyl-4-sulfanylphenol Chemical compound CC(C)(C)C1=CC(S)=CC(C(C)(C)C)=C1O NFVMNXZFSKGLDR-UHFFFAOYSA-N 0.000 description 1
- QIRUERQWPNHWRC-UHFFFAOYSA-N 2-(1,3-benzodioxol-5-ylmethyl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC(C(Cl)(Cl)Cl)=NC(CC=2C=C3OCOC3=CC=2)=N1 QIRUERQWPNHWRC-UHFFFAOYSA-N 0.000 description 1
- FVNIIPIYHHEXQA-UHFFFAOYSA-N 2-(4-methoxynaphthalen-1-yl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C12=CC=CC=C2C(OC)=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 FVNIIPIYHHEXQA-UHFFFAOYSA-N 0.000 description 1
- QTUVQQKHBMGYEH-UHFFFAOYSA-N 2-(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC=NC=N1 QTUVQQKHBMGYEH-UHFFFAOYSA-N 0.000 description 1
- IXQGCWUGDFDQMF-UHFFFAOYSA-N 2-Ethylphenol Chemical compound CCC1=CC=CC=C1O IXQGCWUGDFDQMF-UHFFFAOYSA-N 0.000 description 1
- QDCPNGVVOWVKJG-VAWYXSNFSA-N 2-[(e)-dodec-1-enyl]butanedioic acid Chemical compound CCCCCCCCCC\C=C\C(C(O)=O)CC(O)=O QDCPNGVVOWVKJG-VAWYXSNFSA-N 0.000 description 1
- NKUYCJUBDAXZRX-UHFFFAOYSA-N 2-[2-(1,3-benzodioxol-5-yl)ethenyl]-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC(C(Cl)(Cl)Cl)=NC(C=CC=2C=C3OCOC3=CC=2)=N1 NKUYCJUBDAXZRX-UHFFFAOYSA-N 0.000 description 1
- COORVRSSRBIIFJ-UHFFFAOYSA-N 2-[2-(2-hydroxyethoxy)ethoxy]-1-methoxyethanol;prop-2-enoic acid Chemical compound OC(=O)C=C.COC(O)COCCOCCO COORVRSSRBIIFJ-UHFFFAOYSA-N 0.000 description 1
- ZJRNXDIVAGHETA-UHFFFAOYSA-N 2-[2-(3,4-dimethoxyphenyl)ethenyl]-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=C(OC)C(OC)=CC=C1C=CC1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 ZJRNXDIVAGHETA-UHFFFAOYSA-N 0.000 description 1
- XCIXLYIKKUQVST-UHFFFAOYSA-N 2-[2-(3,5-dimethoxyphenyl)ethenyl]-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound COC1=CC(OC)=CC(C=CC=2N=C(N=C(N=2)C(Cl)(Cl)Cl)C(Cl)(Cl)Cl)=C1 XCIXLYIKKUQVST-UHFFFAOYSA-N 0.000 description 1
- XOPKKHCDIAYUSK-UHFFFAOYSA-N 2-[2-(5-methylfuran-2-yl)ethenyl]-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound O1C(C)=CC=C1C=CC1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 XOPKKHCDIAYUSK-UHFFFAOYSA-N 0.000 description 1
- DNUYOWCKBJFOGS-UHFFFAOYSA-N 2-[[10-(2,2-dicarboxyethyl)anthracen-9-yl]methyl]propanedioic acid Chemical compound C1=CC=C2C(CC(C(=O)O)C(O)=O)=C(C=CC=C3)C3=C(CC(C(O)=O)C(O)=O)C2=C1 DNUYOWCKBJFOGS-UHFFFAOYSA-N 0.000 description 1
- SAFWZKVQMVOANB-UHFFFAOYSA-N 2-[tert-butylsulfonyl(diazo)methyl]sulfonyl-2-methylpropane Chemical compound CC(C)(C)S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C(C)(C)C SAFWZKVQMVOANB-UHFFFAOYSA-N 0.000 description 1
- LOZJPUXMNANKIQ-UHFFFAOYSA-N 2-benzyl-3-nitro-4-(nitromethyl)benzenesulfonic acid Chemical class OS(=O)(=O)C1=CC=C(C[N+]([O-])=O)C([N+]([O-])=O)=C1CC1=CC=CC=C1 LOZJPUXMNANKIQ-UHFFFAOYSA-N 0.000 description 1
- OXARSGWUNAXHIJ-UHFFFAOYSA-N 2-benzyl-4-methyl-3-nitrobenzenesulfonic acid Chemical class CC1=CC=C(S(O)(=O)=O)C(CC=2C=CC=CC=2)=C1[N+]([O-])=O OXARSGWUNAXHIJ-UHFFFAOYSA-N 0.000 description 1
- 125000005999 2-bromoethyl group Chemical group 0.000 description 1
- 125000001340 2-chloroethyl group Chemical group [H]C([H])(Cl)C([H])([H])* 0.000 description 1
- RLHGFJMGWQXPBW-UHFFFAOYSA-N 2-hydroxy-3-(1h-imidazol-5-ylmethyl)benzamide Chemical compound NC(=O)C1=CC=CC(CC=2NC=NC=2)=C1O RLHGFJMGWQXPBW-UHFFFAOYSA-N 0.000 description 1
- HFCUBKYHMMPGBY-UHFFFAOYSA-N 2-methoxyethyl prop-2-enoate Chemical compound COCCOC(=O)C=C HFCUBKYHMMPGBY-UHFFFAOYSA-N 0.000 description 1
- OBOSXEWFRARQPU-UHFFFAOYSA-N 2-n,2-n-dimethylpyridine-2,5-diamine Chemical compound CN(C)C1=CC=C(N)C=N1 OBOSXEWFRARQPU-UHFFFAOYSA-N 0.000 description 1
- CMWKITSNTDAEDT-UHFFFAOYSA-N 2-nitrobenzaldehyde Chemical compound [O-][N+](=O)C1=CC=CC=C1C=O CMWKITSNTDAEDT-UHFFFAOYSA-N 0.000 description 1
- 125000000094 2-phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 1
- QQOMQLYQAXGHSU-UHFFFAOYSA-N 236TMPh Natural products CC1=CC=C(C)C(O)=C1C QQOMQLYQAXGHSU-UHFFFAOYSA-N 0.000 description 1
- BLFIUDXNGYVYMP-UHFFFAOYSA-N 3,4,5-trimethoxybenzenethiol Chemical compound COC1=CC(S)=CC(OC)=C1OC BLFIUDXNGYVYMP-UHFFFAOYSA-N 0.000 description 1
- HNJZDPKMMZXSKT-UHFFFAOYSA-N 3,4-dichlorobenzenethiol Chemical compound SC1=CC=C(Cl)C(Cl)=C1 HNJZDPKMMZXSKT-UHFFFAOYSA-N 0.000 description 1
- BGVRHDQMTMPAEZ-UHFFFAOYSA-N 3,4-difluorobenzenethiol Chemical compound FC1=CC=C(S)C=C1F BGVRHDQMTMPAEZ-UHFFFAOYSA-N 0.000 description 1
- MTKAJLNGIVXZIS-UHFFFAOYSA-N 3,4-dimethoxybenzenethiol Chemical compound COC1=CC=C(S)C=C1OC MTKAJLNGIVXZIS-UHFFFAOYSA-N 0.000 description 1
- IDKCKPBAFOIONK-UHFFFAOYSA-N 3,4-dimethylbenzenethiol Chemical compound CC1=CC=C(S)C=C1C IDKCKPBAFOIONK-UHFFFAOYSA-N 0.000 description 1
- WRXIPCQPHZMXOO-UHFFFAOYSA-N 3,5-dichlorobenzenethiol Chemical compound SC1=CC(Cl)=CC(Cl)=C1 WRXIPCQPHZMXOO-UHFFFAOYSA-N 0.000 description 1
- LFYVNHDFVIPZHV-UHFFFAOYSA-N 3,5-difluorobenzenethiol Chemical compound FC1=CC(F)=CC(S)=C1 LFYVNHDFVIPZHV-UHFFFAOYSA-N 0.000 description 1
- CESBAYSBPMVAEI-UHFFFAOYSA-N 3,5-dimethylbenzenethiol Chemical compound CC1=CC(C)=CC(S)=C1 CESBAYSBPMVAEI-UHFFFAOYSA-N 0.000 description 1
- CGDKKLOSMYJVOK-UHFFFAOYSA-N 3,5-ditert-butyl-4-methoxybenzenethiol Chemical compound COC1=C(C(C)(C)C)C=C(S)C=C1C(C)(C)C CGDKKLOSMYJVOK-UHFFFAOYSA-N 0.000 description 1
- XSHPNRUFIUTBAP-UHFFFAOYSA-N 3-(sulfanylmethyl)phenol Chemical compound OC1=CC=CC(CS)=C1 XSHPNRUFIUTBAP-UHFFFAOYSA-N 0.000 description 1
- SCURCOWZQJIUGR-UHFFFAOYSA-N 3-(trifluoromethyl)benzenethiol Chemical compound FC(F)(F)C1=CC=CC(S)=C1 SCURCOWZQJIUGR-UHFFFAOYSA-N 0.000 description 1
- GWYFCOCPABKNJV-UHFFFAOYSA-M 3-Methylbutanoic acid Natural products CC(C)CC([O-])=O GWYFCOCPABKNJV-UHFFFAOYSA-M 0.000 description 1
- HNGQQUDFJDROPY-UHFFFAOYSA-N 3-bromobenzenethiol Chemical compound SC1=CC=CC(Br)=C1 HNGQQUDFJDROPY-UHFFFAOYSA-N 0.000 description 1
- LPVIODAMAHTWHF-UHFFFAOYSA-N 3-butylbenzenethiol Chemical compound CCCCC1=CC=CC(S)=C1 LPVIODAMAHTWHF-UHFFFAOYSA-N 0.000 description 1
- MQSXUKPGWMJYBT-UHFFFAOYSA-N 3-butylphenol Chemical compound CCCCC1=CC=CC(O)=C1 MQSXUKPGWMJYBT-UHFFFAOYSA-N 0.000 description 1
- CQJDYPZUDYXHLM-UHFFFAOYSA-N 3-chlorobenzenethiol Chemical compound SC1=CC=CC(Cl)=C1 CQJDYPZUDYXHLM-UHFFFAOYSA-N 0.000 description 1
- WULNDUPZYLKLBH-UHFFFAOYSA-N 3-ethylbenzenethiol Chemical compound CCC1=CC=CC(S)=C1 WULNDUPZYLKLBH-UHFFFAOYSA-N 0.000 description 1
- ZDEUGINAVLMAET-UHFFFAOYSA-N 3-fluorobenzenethiol Chemical compound FC1=CC=CC(S)=C1 ZDEUGINAVLMAET-UHFFFAOYSA-N 0.000 description 1
- QMVAZEHZOPDGHA-UHFFFAOYSA-N 3-methoxybenzenethiol Chemical compound COC1=CC=CC(S)=C1 QMVAZEHZOPDGHA-UHFFFAOYSA-N 0.000 description 1
- WRXOZRLZDJAYDR-UHFFFAOYSA-N 3-methylbenzenethiol Chemical compound CC1=CC=CC(S)=C1 WRXOZRLZDJAYDR-UHFFFAOYSA-N 0.000 description 1
- AYKYXWQEBUNJCN-UHFFFAOYSA-N 3-methylfuran-2,5-dione Chemical compound CC1=CC(=O)OC1=O AYKYXWQEBUNJCN-UHFFFAOYSA-N 0.000 description 1
- OFNISBHGPNMTMS-UHFFFAOYSA-N 3-methylideneoxolane-2,5-dione Chemical compound C=C1CC(=O)OC1=O OFNISBHGPNMTMS-UHFFFAOYSA-N 0.000 description 1
- AELUMDDQRLJQRX-UHFFFAOYSA-N 3-propan-2-ylbenzenethiol Chemical compound CC(C)C1=CC=CC(S)=C1 AELUMDDQRLJQRX-UHFFFAOYSA-N 0.000 description 1
- PBFNLGUGYAFVCX-UHFFFAOYSA-N 3-tert-butyl-4-methylbenzenethiol Chemical compound CC1=CC=C(S)C=C1C(C)(C)C PBFNLGUGYAFVCX-UHFFFAOYSA-N 0.000 description 1
- MIJGIDMKYZLJSU-UHFFFAOYSA-N 3-tert-butyl-5-methylbenzenethiol Chemical compound CC1=CC(S)=CC(C(C)(C)C)=C1 MIJGIDMKYZLJSU-UHFFFAOYSA-N 0.000 description 1
- JIBAYVMQQFJSGC-UHFFFAOYSA-N 3-tert-butylbenzenethiol Chemical compound CC(C)(C)C1=CC=CC(S)=C1 JIBAYVMQQFJSGC-UHFFFAOYSA-N 0.000 description 1
- YBRVSVVVWCFQMG-UHFFFAOYSA-N 4,4'-diaminodiphenylmethane Chemical compound C1=CC(N)=CC=C1CC1=CC=C(N)C=C1 YBRVSVVVWCFQMG-UHFFFAOYSA-N 0.000 description 1
- UITKHKNFVCYWNG-UHFFFAOYSA-N 4-(3,4-dicarboxybenzoyl)phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1C(=O)C1=CC=C(C(O)=O)C(C(O)=O)=C1 UITKHKNFVCYWNG-UHFFFAOYSA-N 0.000 description 1
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- IOSONAGXTXMCDY-UHFFFAOYSA-N 4-(benzylsulfanylmethyl)phenol Chemical compound C1=CC(O)=CC=C1CSCC1=CC=CC=C1 IOSONAGXTXMCDY-UHFFFAOYSA-N 0.000 description 1
- KGLOORYXUIFLSZ-UHFFFAOYSA-N 4-(sulfanylmethyl)phenol Chemical compound OC1=CC=C(CS)C=C1 KGLOORYXUIFLSZ-UHFFFAOYSA-N 0.000 description 1
- WCMLRSZJUIKVCW-UHFFFAOYSA-N 4-(trifluoromethyl)benzenethiol Chemical compound FC(F)(F)C1=CC=C(S)C=C1 WCMLRSZJUIKVCW-UHFFFAOYSA-N 0.000 description 1
- HLBLWEWZXPIGSM-UHFFFAOYSA-N 4-Aminophenyl ether Chemical compound C1=CC(N)=CC=C1OC1=CC=C(N)C=C1 HLBLWEWZXPIGSM-UHFFFAOYSA-N 0.000 description 1
- OKIHXNKYYGUVTE-UHFFFAOYSA-N 4-Fluorothiophenol Chemical compound FC1=CC=C(S)C=C1 OKIHXNKYYGUVTE-UHFFFAOYSA-N 0.000 description 1
- ARRIPSQGMHQZCZ-UHFFFAOYSA-N 4-[(2-methylpropan-2-yl)oxy]benzenethiol Chemical compound CC(C)(C)OC1=CC=C(S)C=C1 ARRIPSQGMHQZCZ-UHFFFAOYSA-N 0.000 description 1
- LZJWLHDEWPQTPL-UHFFFAOYSA-N 4-bromo-3-methylbenzenethiol Chemical compound CC1=CC(S)=CC=C1Br LZJWLHDEWPQTPL-UHFFFAOYSA-N 0.000 description 1
- FTBCOQFMQSTCQQ-UHFFFAOYSA-N 4-bromobenzenethiol Chemical compound SC1=CC=C(Br)C=C1 FTBCOQFMQSTCQQ-UHFFFAOYSA-N 0.000 description 1
- PVQZSZNJUBQKJW-UHFFFAOYSA-N 4-butylbenzenethiol Chemical compound CCCCC1=CC=C(S)C=C1 PVQZSZNJUBQKJW-UHFFFAOYSA-N 0.000 description 1
- IAIFQYCINHEYAM-UHFFFAOYSA-N 4-butylsulfanylbenzenethiol Chemical compound CCCCSC1=CC=C(S)C=C1 IAIFQYCINHEYAM-UHFFFAOYSA-N 0.000 description 1
- VZXOZSQDJJNBRC-UHFFFAOYSA-N 4-chlorobenzenethiol Chemical compound SC1=CC=C(Cl)C=C1 VZXOZSQDJJNBRC-UHFFFAOYSA-N 0.000 description 1
- OXWOIUVGAWIZQQ-UHFFFAOYSA-N 4-ethoxybenzenethiol Chemical compound CCOC1=CC=C(S)C=C1 OXWOIUVGAWIZQQ-UHFFFAOYSA-N 0.000 description 1
- WWQQPHUHTAZWDH-UHFFFAOYSA-N 4-ethylbenzenethiol Chemical compound CCC1=CC=C(S)C=C1 WWQQPHUHTAZWDH-UHFFFAOYSA-N 0.000 description 1
- YIZJHQYLSZSTKQ-UHFFFAOYSA-N 4-ethylsulfanylbenzenethiol Chemical compound CCSC1=CC=C(S)C=C1 YIZJHQYLSZSTKQ-UHFFFAOYSA-N 0.000 description 1
- 125000001255 4-fluorophenyl group Chemical group [H]C1=C([H])C(*)=C([H])C([H])=C1F 0.000 description 1
- 229940090248 4-hydroxybenzoic acid Drugs 0.000 description 1
- FUGYGGDSWSUORM-UHFFFAOYSA-N 4-hydroxystyrene Chemical compound OC1=CC=C(C=C)C=C1 FUGYGGDSWSUORM-UHFFFAOYSA-N 0.000 description 1
- IKZUTVQEBGHQJA-UHFFFAOYSA-N 4-iodobenzenethiol Chemical compound SC1=CC=C(I)C=C1 IKZUTVQEBGHQJA-UHFFFAOYSA-N 0.000 description 1
- NIFAOMSJMGEFTQ-UHFFFAOYSA-N 4-methoxybenzenethiol Chemical compound COC1=CC=C(S)C=C1 NIFAOMSJMGEFTQ-UHFFFAOYSA-N 0.000 description 1
- 125000004172 4-methoxyphenyl group Chemical group [H]C1=C([H])C(OC([H])([H])[H])=C([H])C([H])=C1* 0.000 description 1
- WLHCBQAPPJAULW-UHFFFAOYSA-N 4-methylbenzenethiol Chemical compound CC1=CC=C(S)C=C1 WLHCBQAPPJAULW-UHFFFAOYSA-N 0.000 description 1
- QZHXKQKKEBXYRG-UHFFFAOYSA-N 4-n-(4-aminophenyl)benzene-1,4-diamine Chemical compound C1=CC(N)=CC=C1NC1=CC=C(N)C=C1 QZHXKQKKEBXYRG-UHFFFAOYSA-N 0.000 description 1
- CYYZDBDROVLTJU-UHFFFAOYSA-N 4-n-Butylphenol Chemical compound CCCCC1=CC=C(O)C=C1 CYYZDBDROVLTJU-UHFFFAOYSA-N 0.000 description 1
- APDUDRFJNCIWAG-UHFFFAOYSA-N 4-propan-2-ylbenzenethiol Chemical compound CC(C)C1=CC=C(S)C=C1 APDUDRFJNCIWAG-UHFFFAOYSA-N 0.000 description 1
- LHJATWWCJZZRBU-UHFFFAOYSA-N 4-propan-2-yloxybenzenethiol Chemical compound CC(C)OC1=CC=C(S)C=C1 LHJATWWCJZZRBU-UHFFFAOYSA-N 0.000 description 1
- HTNBBGMFIFDMFW-UHFFFAOYSA-N 4-sulfanylbenzene-1,2-diol Chemical compound OC1=CC=C(S)C=C1O HTNBBGMFIFDMFW-UHFFFAOYSA-N 0.000 description 1
- BXAVKNRWVKUTLY-UHFFFAOYSA-N 4-sulfanylphenol Chemical compound OC1=CC=C(S)C=C1 BXAVKNRWVKUTLY-UHFFFAOYSA-N 0.000 description 1
- XEQLOBCWMSSZTP-UHFFFAOYSA-N 4-tert-butyl-3-methylbenzenethiol Chemical compound CC1=CC(S)=CC=C1C(C)(C)C XEQLOBCWMSSZTP-UHFFFAOYSA-N 0.000 description 1
- GNXBFFHXJDZGEK-UHFFFAOYSA-N 4-tert-butylbenzenethiol Chemical compound CC(C)(C)C1=CC=C(S)C=C1 GNXBFFHXJDZGEK-UHFFFAOYSA-N 0.000 description 1
- DADBIDGDDHNYJO-UHFFFAOYSA-N 4-tert-butylsulfanylbenzenethiol Chemical compound CC(C)(C)SC1=CC=C(S)C=C1 DADBIDGDDHNYJO-UHFFFAOYSA-N 0.000 description 1
- NSPMIYGKQJPBQR-UHFFFAOYSA-N 4H-1,2,4-triazole Chemical compound C=1N=CNN=1 NSPMIYGKQJPBQR-UHFFFAOYSA-N 0.000 description 1
- CSHJJWDAZSZQBT-UHFFFAOYSA-N 7a-methyl-4,5-dihydro-3ah-2-benzofuran-1,3-dione Chemical compound C1=CCCC2C(=O)OC(=O)C21C CSHJJWDAZSZQBT-UHFFFAOYSA-N 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 1
- 239000007848 Bronsted acid Substances 0.000 description 1
- RTTVZSQKMQXLHM-UHFFFAOYSA-N C(C1=CC=CC=C1)(=O)C1=CC=C(C=C1)SC1=C(C=CC=C1)[S+](C1=CC=CC=C1)C1=CC=CC=C1 Chemical compound C(C1=CC=CC=C1)(=O)C1=CC=C(C=C1)SC1=C(C=CC=C1)[S+](C1=CC=CC=C1)C1=CC=CC=C1 RTTVZSQKMQXLHM-UHFFFAOYSA-N 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 241000723347 Cinnamomum Species 0.000 description 1
- YXHKONLOYHBTNS-UHFFFAOYSA-N Diazomethane Chemical compound C=[N+]=[N-] YXHKONLOYHBTNS-UHFFFAOYSA-N 0.000 description 1
- HZCDANOFLILNSA-UHFFFAOYSA-N Dimethyl hydrogen phosphite Chemical compound COP(=O)OC HZCDANOFLILNSA-UHFFFAOYSA-N 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- WJYIASZWHGOTOU-UHFFFAOYSA-N Heptylamine Chemical compound CCCCCCCN WJYIASZWHGOTOU-UHFFFAOYSA-N 0.000 description 1
- 101000692259 Homo sapiens Phosphoprotein associated with glycosphingolipid-enriched microdomains 1 Proteins 0.000 description 1
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- 229910021380 Manganese Chloride Inorganic materials 0.000 description 1
- GLFNIEUTAYBVOC-UHFFFAOYSA-L Manganese chloride Chemical compound Cl[Mn]Cl GLFNIEUTAYBVOC-UHFFFAOYSA-L 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
- MGJKQDOBUOMPEZ-UHFFFAOYSA-N N,N'-dimethylurea Chemical compound CNC(=O)NC MGJKQDOBUOMPEZ-UHFFFAOYSA-N 0.000 description 1
- KWYHDKDOAIKMQN-UHFFFAOYSA-N N,N,N',N'-tetramethylethylenediamine Chemical compound CN(C)CCN(C)C KWYHDKDOAIKMQN-UHFFFAOYSA-N 0.000 description 1
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
- SJRJJKPEHAURKC-UHFFFAOYSA-N N-Methylmorpholine Chemical compound CN1CCOCC1 SJRJJKPEHAURKC-UHFFFAOYSA-N 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- UEEJHVSXFDXPFK-UHFFFAOYSA-N N-dimethylaminoethanol Chemical compound CN(C)CCO UEEJHVSXFDXPFK-UHFFFAOYSA-N 0.000 description 1
- OHLUUHNLEMFGTQ-UHFFFAOYSA-N N-methylacetamide Chemical compound CNC(C)=O OHLUUHNLEMFGTQ-UHFFFAOYSA-N 0.000 description 1
- XGEGHDBEHXKFPX-UHFFFAOYSA-N N-methylthiourea Natural products CNC(N)=O XGEGHDBEHXKFPX-UHFFFAOYSA-N 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- NMNFDTCOWIDEAV-UHFFFAOYSA-N OP(O)=O.OP(O)=O Chemical class OP(O)=O.OP(O)=O NMNFDTCOWIDEAV-UHFFFAOYSA-N 0.000 description 1
- ZCQWOFVYLHDMMC-UHFFFAOYSA-N Oxazole Chemical compound C1=COC=N1 ZCQWOFVYLHDMMC-UHFFFAOYSA-N 0.000 description 1
- PCNDJXKNXGMECE-UHFFFAOYSA-N Phenazine Natural products C1=CC=CC2=NC3=CC=CC=C3N=C21 PCNDJXKNXGMECE-UHFFFAOYSA-N 0.000 description 1
- QLZHNIAADXEJJP-UHFFFAOYSA-N Phenylphosphonic acid Chemical compound OP(O)(=O)C1=CC=CC=C1 QLZHNIAADXEJJP-UHFFFAOYSA-N 0.000 description 1
- 102100026066 Phosphoprotein associated with glycosphingolipid-enriched microdomains 1 Human genes 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- GLUUGHFHXGJENI-UHFFFAOYSA-N Piperazine Chemical compound C1CNCCN1 GLUUGHFHXGJENI-UHFFFAOYSA-N 0.000 description 1
- 229920001665 Poly-4-vinylphenol Polymers 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- WTKZEGDFNFYCGP-UHFFFAOYSA-N Pyrazole Chemical compound C=1C=NNC=1 WTKZEGDFNFYCGP-UHFFFAOYSA-N 0.000 description 1
- CZPWVGJYEJSRLH-UHFFFAOYSA-N Pyrimidine Chemical compound C1=CN=CN=C1 CZPWVGJYEJSRLH-UHFFFAOYSA-N 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- 101000987219 Sus scrofa Pregnancy-associated glycoprotein 1 Proteins 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- FZWLAAWBMGSTSO-UHFFFAOYSA-N Thiazole Chemical compound C1=CSC=N1 FZWLAAWBMGSTSO-UHFFFAOYSA-N 0.000 description 1
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Thiophene Chemical group C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 description 1
- 229910052775 Thulium Inorganic materials 0.000 description 1
- 229910021626 Tin(II) chloride Inorganic materials 0.000 description 1
- DTQVDTLACAAQTR-UHFFFAOYSA-M Trifluoroacetate Chemical compound [O-]C(=O)C(F)(F)F DTQVDTLACAAQTR-UHFFFAOYSA-M 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- KWFUQEHEGLRXIF-UHFFFAOYSA-N [2-(2-hydroxytetradecoxy)phenyl]-phenyliodanium Chemical compound CCCCCCCCCCCCC(O)COC1=CC=CC=C1[I+]C1=CC=CC=C1 KWFUQEHEGLRXIF-UHFFFAOYSA-N 0.000 description 1
- UVSSPWOKVSKHCU-UHFFFAOYSA-N [2-(trifluoromethyl)phenoxy]boronic acid Chemical compound OB(O)OC1=CC=CC=C1C(F)(F)F UVSSPWOKVSKHCU-UHFFFAOYSA-N 0.000 description 1
- DXIYJLVGNSDKDI-UHFFFAOYSA-N [4-(4-benzoylphenyl)sulfanylphenyl]-diphenylsulfanium Chemical compound C=1C=C(SC=2C=CC(=CC=2)[S+](C=2C=CC=CC=2)C=2C=CC=CC=2)C=CC=1C(=O)C1=CC=CC=C1 DXIYJLVGNSDKDI-UHFFFAOYSA-N 0.000 description 1
- PFHLXMMCWCWAMA-UHFFFAOYSA-N [4-(4-diphenylsulfoniophenyl)sulfanylphenyl]-diphenylsulfanium Chemical compound C=1C=C([S+](C=2C=CC=CC=2)C=2C=CC=CC=2)C=CC=1SC(C=C1)=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 PFHLXMMCWCWAMA-UHFFFAOYSA-N 0.000 description 1
- RBRKCXPVSANVAF-UHFFFAOYSA-N [4-[4-(4-tert-butylbenzoyl)phenyl]sulfanylphenyl]-bis(4-methylphenyl)sulfanium Chemical compound C1=CC(C)=CC=C1[S+](C=1C=CC(SC=2C=CC(=CC=2)C(=O)C=2C=CC(=CC=2)C(C)(C)C)=CC=1)C1=CC=C(C)C=C1 RBRKCXPVSANVAF-UHFFFAOYSA-N 0.000 description 1
- ABKJGHLMKKHLGY-UHFFFAOYSA-N [4-[4-bis[4-(2-hydroxyethoxy)phenyl]sulfoniophenyl]sulfanylphenyl]-bis[4-(2-hydroxyethoxy)phenyl]sulfanium Chemical compound C1=CC(OCCO)=CC=C1[S+](C=1C=CC(SC=2C=CC(=CC=2)[S+](C=2C=CC(OCCO)=CC=2)C=2C=CC(OCCO)=CC=2)=CC=1)C1=CC=C(OCCO)C=C1 ABKJGHLMKKHLGY-UHFFFAOYSA-N 0.000 description 1
- LMBCUZJGJVCPSD-UHFFFAOYSA-N [[cyano(phenyl)methylidene]amino] 4-methylbenzenesulfonate Chemical compound C1=CC(C)=CC=C1S(=O)(=O)ON=C(C#N)C1=CC=CC=C1 LMBCUZJGJVCPSD-UHFFFAOYSA-N 0.000 description 1
- UHNRALZVSXNUTL-UHFFFAOYSA-N [[cyano-(2,4-dichlorophenyl)methylidene]amino] benzenesulfonate Chemical compound ClC1=CC(Cl)=CC=C1C(C#N)=NOS(=O)(=O)C1=CC=CC=C1 UHNRALZVSXNUTL-UHFFFAOYSA-N 0.000 description 1
- LOVKRNMQTUTWQJ-UHFFFAOYSA-N [[cyano-(4-methoxyphenyl)methylidene]amino] 2-chlorobenzenesulfonate Chemical compound C1=CC(OC)=CC=C1C(C#N)=NOS(=O)(=O)C1=CC=CC=C1Cl LOVKRNMQTUTWQJ-UHFFFAOYSA-N 0.000 description 1
- GLGXSTXZLFQYKJ-UHFFFAOYSA-N [cyclohexylsulfonyl(diazo)methyl]sulfonylcyclohexane Chemical compound C1CCCCC1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCCC1 GLGXSTXZLFQYKJ-UHFFFAOYSA-N 0.000 description 1
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 1
- ZOIORXHNWRGPMV-UHFFFAOYSA-N acetic acid;zinc Chemical compound [Zn].CC(O)=O.CC(O)=O ZOIORXHNWRGPMV-UHFFFAOYSA-N 0.000 description 1
- 125000002777 acetyl group Chemical group [H]C([H])([H])C(*)=O 0.000 description 1
- 125000005035 acylthio group Chemical group 0.000 description 1
- 125000005073 adamantyl group Chemical group C12(CC3CC(CC(C1)C3)C2)* 0.000 description 1
- 239000001361 adipic acid Substances 0.000 description 1
- 235000011037 adipic acid Nutrition 0.000 description 1
- 150000001338 aliphatic hydrocarbons Chemical group 0.000 description 1
- 125000003342 alkenyl group Chemical group 0.000 description 1
- 125000005196 alkyl carbonyloxy group Chemical group 0.000 description 1
- 125000004644 alkyl sulfinyl group Chemical group 0.000 description 1
- 125000004390 alkyl sulfonyl group Chemical group 0.000 description 1
- 125000005529 alkyleneoxy group Chemical group 0.000 description 1
- 125000000304 alkynyl group Chemical group 0.000 description 1
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 150000008064 anhydrides Chemical class 0.000 description 1
- JFCQEDHGNNZCLN-UHFFFAOYSA-N anhydrous glutaric acid Natural products OC(=O)CCCC(O)=O JFCQEDHGNNZCLN-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 125000004659 aryl alkyl thio group Chemical group 0.000 description 1
- 125000002102 aryl alkyloxo group Chemical group 0.000 description 1
- 125000005135 aryl sulfinyl group Chemical group 0.000 description 1
- 125000004391 aryl sulfonyl group Chemical group 0.000 description 1
- CIZVQWNPBGYCGK-UHFFFAOYSA-N benzenediazonium Chemical class N#[N+]C1=CC=CC=C1 CIZVQWNPBGYCGK-UHFFFAOYSA-N 0.000 description 1
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 1
- OVHDZBAFUMEXCX-UHFFFAOYSA-N benzyl 4-methylbenzenesulfonate Chemical compound C1=CC(C)=CC=C1S(=O)(=O)OCC1=CC=CC=C1 OVHDZBAFUMEXCX-UHFFFAOYSA-N 0.000 description 1
- GWYFCOCPABKNJV-UHFFFAOYSA-N beta-methyl-butyric acid Natural products CC(C)CC(O)=O GWYFCOCPABKNJV-UHFFFAOYSA-N 0.000 description 1
- VEZXCJBBBCKRPI-UHFFFAOYSA-N beta-propiolactone Chemical compound O=C1CCO1 VEZXCJBBBCKRPI-UHFFFAOYSA-N 0.000 description 1
- YXVFYQXJAXKLAK-UHFFFAOYSA-N biphenyl-4-ol Chemical compound C1=CC(O)=CC=C1C1=CC=CC=C1 YXVFYQXJAXKLAK-UHFFFAOYSA-N 0.000 description 1
- ZLSMCQSGRWNEGX-UHFFFAOYSA-N bis(4-aminophenyl)methanone Chemical compound C1=CC(N)=CC=C1C(=O)C1=CC=C(N)C=C1 ZLSMCQSGRWNEGX-UHFFFAOYSA-N 0.000 description 1
- YSXJIDHYEFYSON-UHFFFAOYSA-N bis(4-dodecylphenyl)iodanium Chemical compound C1=CC(CCCCCCCCCCCC)=CC=C1[I+]C1=CC=C(CCCCCCCCCCCC)C=C1 YSXJIDHYEFYSON-UHFFFAOYSA-N 0.000 description 1
- DWBJZABVMXQFPV-UHFFFAOYSA-N bis(4-methoxyphenyl)iodanium Chemical compound C1=CC(OC)=CC=C1[I+]C1=CC=C(OC)C=C1 DWBJZABVMXQFPV-UHFFFAOYSA-N 0.000 description 1
- UUJZSXVOPPFFOT-UHFFFAOYSA-N bis(4-methylphenyl)-(9-oxo-7-propan-2-ylthioxanthen-2-yl)sulfanium Chemical compound C1=C2C(=O)C3=CC(C(C)C)=CC=C3SC2=CC=C1[S+](C=1C=CC(C)=CC=1)C1=CC=C(C)C=C1 UUJZSXVOPPFFOT-UHFFFAOYSA-N 0.000 description 1
- HKWWDSQUZURFQR-UHFFFAOYSA-N bis(4-methylphenyl)iodanium Chemical compound C1=CC(C)=CC=C1[I+]C1=CC=C(C)C=C1 HKWWDSQUZURFQR-UHFFFAOYSA-N 0.000 description 1
- 229940106691 bisphenol a Drugs 0.000 description 1
- ILAHWRKJUDSMFH-UHFFFAOYSA-N boron tribromide Chemical compound BrB(Br)Br ILAHWRKJUDSMFH-UHFFFAOYSA-N 0.000 description 1
- 125000003917 carbamoyl group Chemical group [H]N([H])C(*)=O 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical class OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 description 1
- 150000007942 carboxylates Chemical class 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- ZMIGMASIKSOYAM-UHFFFAOYSA-N cerium Chemical compound [Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce] ZMIGMASIKSOYAM-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 235000017803 cinnamon Nutrition 0.000 description 1
- WCZVZNOTHYJIEI-UHFFFAOYSA-N cinnoline Chemical compound N1=NC=CC2=CC=CC=C21 WCZVZNOTHYJIEI-UHFFFAOYSA-N 0.000 description 1
- 235000015165 citric acid Nutrition 0.000 description 1
- GVPFVAHMJGGAJG-UHFFFAOYSA-L cobalt dichloride Chemical compound [Cl-].[Cl-].[Co+2] GVPFVAHMJGGAJG-UHFFFAOYSA-L 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000007334 copolymerization reaction Methods 0.000 description 1
- 125000000000 cycloalkoxy group Chemical group 0.000 description 1
- 125000000753 cycloalkyl group Chemical group 0.000 description 1
- 125000005170 cycloalkyloxycarbonyl group Chemical group 0.000 description 1
- 125000005366 cycloalkylthio group Chemical group 0.000 description 1
- 125000001995 cyclobutyl group Chemical group [H]C1([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 1
- 125000001559 cyclopropyl group Chemical group [H]C1([H])C([H])([H])C1([H])* 0.000 description 1
- 229960002887 deanol Drugs 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- RJYMRRJVDRJMJW-UHFFFAOYSA-L dibromomanganese Chemical compound Br[Mn]Br RJYMRRJVDRJMJW-UHFFFAOYSA-L 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- UYAAVKFHBMJOJZ-UHFFFAOYSA-N diimidazo[1,3-b:1',3'-e]pyrazine-5,10-dione Chemical compound O=C1C2=CN=CN2C(=O)C2=CN=CN12 UYAAVKFHBMJOJZ-UHFFFAOYSA-N 0.000 description 1
- 239000012972 dimethylethanolamine Substances 0.000 description 1
- 239000012971 dimethylpiperazine Substances 0.000 description 1
- ASMQGLCHMVWBQR-UHFFFAOYSA-M diphenyl phosphate Chemical compound C=1C=CC=CC=1OP(=O)([O-])OC1=CC=CC=C1 ASMQGLCHMVWBQR-UHFFFAOYSA-M 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
- 125000006232 ethoxy propyl group Chemical group [H]C([H])([H])C([H])([H])OC([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- DWKWNUVRZPQFQZ-UHFFFAOYSA-N ethoxycarbonyl-ethyl-(naphthalen-2-ylmethyl)sulfanium Chemical compound C1=CC=CC2=CC(C[S+](CC)C(=O)OCC)=CC=C21 DWKWNUVRZPQFQZ-UHFFFAOYSA-N 0.000 description 1
- 125000005448 ethoxyethyl group Chemical group [H]C([H])([H])C([H])([H])OC([H])([H])C([H])([H])* 0.000 description 1
- CEEHFWSNEHHQPJ-UHFFFAOYSA-N ethyl 5-hydroxy-7-oxo-2-phenyl-8-prop-2-enylpyrido[2,3-d]pyrimidine-6-carboxylate Chemical compound N1=C2N(CC=C)C(=O)C(C(=O)OCC)=C(O)C2=CN=C1C1=CC=CC=C1 CEEHFWSNEHHQPJ-UHFFFAOYSA-N 0.000 description 1
- OGPBJKLSAFTDLK-UHFFFAOYSA-N europium atom Chemical compound [Eu] OGPBJKLSAFTDLK-UHFFFAOYSA-N 0.000 description 1
- 229960002089 ferrous chloride Drugs 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- RMBPEFMHABBEKP-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2C3=C[CH]C=CC3=CC2=C1 RMBPEFMHABBEKP-UHFFFAOYSA-N 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- ANSXAPJVJOKRDJ-UHFFFAOYSA-N furo[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1=C2C(=O)OC(=O)C2=CC2=C1C(=O)OC2=O ANSXAPJVJOKRDJ-UHFFFAOYSA-N 0.000 description 1
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- UPWPDUACHOATKO-UHFFFAOYSA-K gallium trichloride Chemical compound Cl[Ga](Cl)Cl UPWPDUACHOATKO-UHFFFAOYSA-K 0.000 description 1
- SRVXDMYFQIODQI-UHFFFAOYSA-K gallium(iii) bromide Chemical compound Br[Ga](Br)Br SRVXDMYFQIODQI-UHFFFAOYSA-K 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000005549 heteroarylene group Chemical group 0.000 description 1
- 150000002391 heterocyclic compounds Chemical class 0.000 description 1
- MUTGBJKUEZFXGO-UHFFFAOYSA-N hexahydrophthalic anhydride Chemical compound C1CCCC2C(=O)OC(=O)C21 MUTGBJKUEZFXGO-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical class I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 1
- 125000004356 hydroxy functional group Chemical group O* 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- PSCMQHVBLHHWTO-UHFFFAOYSA-K indium(iii) chloride Chemical compound Cl[In](Cl)Cl PSCMQHVBLHHWTO-UHFFFAOYSA-K 0.000 description 1
- PZOUSPYUWWUPPK-UHFFFAOYSA-N indole Natural products CC1=CC=CC2=C1C=CN2 PZOUSPYUWWUPPK-UHFFFAOYSA-N 0.000 description 1
- RKJUIXBNRJVNHR-UHFFFAOYSA-N indolenine Natural products C1=CC=C2CC=NC2=C1 RKJUIXBNRJVNHR-UHFFFAOYSA-N 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- NMCUIPGRVMDVDB-UHFFFAOYSA-L iron dichloride Chemical compound Cl[Fe]Cl NMCUIPGRVMDVDB-UHFFFAOYSA-L 0.000 description 1
- 125000002510 isobutoxy group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])O* 0.000 description 1
- 125000006229 isopropoxyethyl group Chemical group [H]C([H])([H])C([H])(OC([H])([H])C([H])([H])*)C([H])([H])[H] 0.000 description 1
- AWJUIBRHMBBTKR-UHFFFAOYSA-N isoquinoline Chemical compound C1=NC=CC2=CC=CC=C21 AWJUIBRHMBBTKR-UHFFFAOYSA-N 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- OHSVLFRHMCKCQY-UHFFFAOYSA-N lutetium atom Chemical compound [Lu] OHSVLFRHMCKCQY-UHFFFAOYSA-N 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 239000001630 malic acid Substances 0.000 description 1
- 235000011090 malic acid Nutrition 0.000 description 1
- 239000011565 manganese chloride Substances 0.000 description 1
- 235000002867 manganese chloride Nutrition 0.000 description 1
- 229940099607 manganese chloride Drugs 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- IJFXRHURBJZNAO-UHFFFAOYSA-N meta--hydroxybenzoic acid Natural products OC(=O)C1=CC=CC(O)=C1 IJFXRHURBJZNAO-UHFFFAOYSA-N 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 125000005395 methacrylic acid group Chemical group 0.000 description 1
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 1
- KEPMBNBMFNHEJO-UHFFFAOYSA-N methyl-octadecyl-phenacylsulfanium Chemical compound CCCCCCCCCCCCCCCCCC[S+](C)CC(=O)C1=CC=CC=C1 KEPMBNBMFNHEJO-UHFFFAOYSA-N 0.000 description 1
- XGEGHDBEHXKFPX-NJFSPNSNSA-N methylurea Chemical compound [14CH3]NC(N)=O XGEGHDBEHXKFPX-NJFSPNSNSA-N 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- MXHTZQSKTCCMFG-UHFFFAOYSA-N n,n-dibenzyl-1-phenylmethanamine Chemical compound C=1C=CC=CC=1CN(CC=1C=CC=CC=1)CC1=CC=CC=C1 MXHTZQSKTCCMFG-UHFFFAOYSA-N 0.000 description 1
- OOHAUGDGCWURIT-UHFFFAOYSA-N n,n-dipentylpentan-1-amine Chemical compound CCCCCN(CCCCC)CCCCC OOHAUGDGCWURIT-UHFFFAOYSA-N 0.000 description 1
- 125000004708 n-butylthio group Chemical group C(CCC)S* 0.000 description 1
- GNVRJGIVDSQCOP-UHFFFAOYSA-N n-ethyl-n-methylethanamine Chemical compound CCN(C)CC GNVRJGIVDSQCOP-UHFFFAOYSA-N 0.000 description 1
- 125000003136 n-heptyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000004706 n-propylthio group Chemical group C(CC)S* 0.000 description 1
- HDLRSIQOZFLEPK-UHFFFAOYSA-N naphthalene-1,2,5,8-tetracarboxylic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C2=C(C(O)=O)C(C(=O)O)=CC=C21 HDLRSIQOZFLEPK-UHFFFAOYSA-N 0.000 description 1
- 150000002790 naphthalenes Chemical class 0.000 description 1
- 125000004998 naphthylethyl group Chemical group C1(=CC=CC2=CC=CC=C12)CC* 0.000 description 1
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 1
- BMGNSKKZFQMGDH-FDGPNNRMSA-L nickel(2+);(z)-4-oxopent-2-en-2-olate Chemical compound [Ni+2].C\C([O-])=C\C(C)=O.C\C([O-])=C\C(C)=O BMGNSKKZFQMGDH-FDGPNNRMSA-L 0.000 description 1
- UQPSGBZICXWIAG-UHFFFAOYSA-L nickel(2+);dibromide;trihydrate Chemical compound O.O.O.Br[Ni]Br UQPSGBZICXWIAG-UHFFFAOYSA-L 0.000 description 1
- NLEUXPOVZGDKJI-UHFFFAOYSA-N nickel(2+);dicyanide Chemical compound [Ni+2].N#[C-].N#[C-] NLEUXPOVZGDKJI-UHFFFAOYSA-N 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 150000002825 nitriles Chemical class 0.000 description 1
- IZJVVXCHJIQVOL-UHFFFAOYSA-N nitro(phenyl)methanesulfonic acid Chemical class OS(=O)(=O)C([N+]([O-])=O)C1=CC=CC=C1 IZJVVXCHJIQVOL-UHFFFAOYSA-N 0.000 description 1
- FJDUDHYHRVPMJZ-UHFFFAOYSA-N nonan-1-amine Chemical compound CCCCCCCCCN FJDUDHYHRVPMJZ-UHFFFAOYSA-N 0.000 description 1
- 125000001400 nonyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000002868 norbornyl group Chemical group C12(CCC(CC1)C2)* 0.000 description 1
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N o-biphenylenemethane Natural products C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 1
- IOQPZZOEVPZRBK-UHFFFAOYSA-N octan-1-amine Chemical compound CCCCCCCCN IOQPZZOEVPZRBK-UHFFFAOYSA-N 0.000 description 1
- CDXVUROVRIFQMV-UHFFFAOYSA-N oxo(diphenoxy)phosphanium Chemical compound C=1C=CC=CC=1O[P+](=O)OC1=CC=CC=C1 CDXVUROVRIFQMV-UHFFFAOYSA-N 0.000 description 1
- RQKYHDHLEMEVDR-UHFFFAOYSA-N oxo-bis(phenylmethoxy)phosphanium Chemical compound C=1C=CC=CC=1CO[P+](=O)OCC1=CC=CC=C1 RQKYHDHLEMEVDR-UHFFFAOYSA-N 0.000 description 1
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- QNGNSVIICDLXHT-UHFFFAOYSA-N para-ethylbenzaldehyde Natural products CCC1=CC=C(C=O)C=C1 QNGNSVIICDLXHT-UHFFFAOYSA-N 0.000 description 1
- 125000006551 perfluoro alkylene group Chemical group 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- NIXKBAZVOQAHGC-UHFFFAOYSA-N phenylmethanesulfonic acid Chemical compound OS(=O)(=O)CC1=CC=CC=C1 NIXKBAZVOQAHGC-UHFFFAOYSA-N 0.000 description 1
- MLCHBQKMVKNBOV-UHFFFAOYSA-N phenylphosphinic acid Chemical compound OP(=O)C1=CC=CC=C1 MLCHBQKMVKNBOV-UHFFFAOYSA-N 0.000 description 1
- 150000003007 phosphonic acid derivatives Chemical class 0.000 description 1
- 150000003016 phosphoric acids Chemical class 0.000 description 1
- LFSXCDWNBUNEEM-UHFFFAOYSA-N phthalazine Chemical compound C1=NN=CC2=CC=CC=C21 LFSXCDWNBUNEEM-UHFFFAOYSA-N 0.000 description 1
- LGRFSURHDFAFJT-UHFFFAOYSA-N phthalic anhydride Chemical compound C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 1
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 1
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- PUDIUYLPXJFUGB-UHFFFAOYSA-N praseodymium atom Chemical compound [Pr] PUDIUYLPXJFUGB-UHFFFAOYSA-N 0.000 description 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 1
- QLNJFJADRCOGBJ-UHFFFAOYSA-N propionamide Chemical compound CCC(N)=O QLNJFJADRCOGBJ-UHFFFAOYSA-N 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- 229940116423 propylene glycol diacetate Drugs 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- PBMFSQRYOILNGV-UHFFFAOYSA-N pyridazine Chemical compound C1=CC=NN=C1 PBMFSQRYOILNGV-UHFFFAOYSA-N 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- HNJBEVLQSNELDL-UHFFFAOYSA-N pyrrolidin-2-one Chemical compound O=C1CCCN1 HNJBEVLQSNELDL-UHFFFAOYSA-N 0.000 description 1
- JWVCLYRUEFBMGU-UHFFFAOYSA-N quinazoline Chemical compound N1=CN=CC2=CC=CC=C21 JWVCLYRUEFBMGU-UHFFFAOYSA-N 0.000 description 1
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- MCJGNVYPOGVAJF-UHFFFAOYSA-N quinolin-8-ol Chemical compound C1=CN=C2C(O)=CC=CC2=C1 MCJGNVYPOGVAJF-UHFFFAOYSA-N 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000011342 resin composition Substances 0.000 description 1
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 235000019795 sodium metasilicate Nutrition 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007655 standard test method Methods 0.000 description 1
- 239000001119 stannous chloride Substances 0.000 description 1
- 235000011150 stannous chloride Nutrition 0.000 description 1
- RCIVOBGSMSSVTR-UHFFFAOYSA-L stannous sulfate Chemical compound [SnH2+2].[O-]S([O-])(=O)=O RCIVOBGSMSSVTR-UHFFFAOYSA-L 0.000 description 1
- 229940007163 stannous tartrate Drugs 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-O sulfonium Chemical compound [SH3+] RWSOTUBLDIXVET-UHFFFAOYSA-O 0.000 description 1
- 150000008053 sultones Chemical group 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- YIBXWXOYFGZLRU-UHFFFAOYSA-N syringic aldehyde Natural products CC12CCC(C3(CCC(=O)C(C)(C)C3CC=3)C)C=3C1(C)CCC2C1COC(C)(C)C(O)C(O)C1 YIBXWXOYFGZLRU-UHFFFAOYSA-N 0.000 description 1
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 1
- PUGUQINMNYINPK-UHFFFAOYSA-N tert-butyl 4-(2-chloroacetyl)piperazine-1-carboxylate Chemical compound CC(C)(C)OC(=O)N1CCN(C(=O)CCl)CC1 PUGUQINMNYINPK-UHFFFAOYSA-N 0.000 description 1
- 125000005931 tert-butyloxycarbonyl group Chemical group [H]C([H])([H])C(OC(*)=O)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 1
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 125000003718 tetrahydrofuranyl group Chemical group 0.000 description 1
- 125000001412 tetrahydropyranyl group Chemical group 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 description 1
- 125000001544 thienyl group Chemical group 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 125000002813 thiocarbonyl group Chemical group *C(*)=S 0.000 description 1
- 125000005300 thiocarboxy group Chemical group C(=S)(O)* 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- 229910000375 tin(II) sulfate Inorganic materials 0.000 description 1
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 1
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 1
- 125000005147 toluenesulfonyl group Chemical group C=1(C(=CC=CC1)S(=O)(=O)*)C 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- 150000003918 triazines Chemical class 0.000 description 1
- LGQXXHMEBUOXRP-UHFFFAOYSA-N tributyl borate Chemical compound CCCCOB(OCCCC)OCCCC LGQXXHMEBUOXRP-UHFFFAOYSA-N 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
- IMNIMPAHZVJRPE-UHFFFAOYSA-N triethylenediamine Chemical compound C1CN2CCN1CC2 IMNIMPAHZVJRPE-UHFFFAOYSA-N 0.000 description 1
- WTVXIBRMWGUIMI-UHFFFAOYSA-N trifluoro($l^{1}-oxidanylsulfonyl)methane Chemical group [O]S(=O)(=O)C(F)(F)F WTVXIBRMWGUIMI-UHFFFAOYSA-N 0.000 description 1
- ULAQISQDFQAUCH-UHFFFAOYSA-N trifluoromethanesulfonic acid hydroiodide Chemical compound I.OS(=O)(=O)C(F)(F)F ULAQISQDFQAUCH-UHFFFAOYSA-N 0.000 description 1
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- 125000000026 trimethylsilyl group Chemical group [H]C([H])([H])[Si]([*])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- DTBRTYHFHGNZFX-UHFFFAOYSA-N trioctyl borate Chemical compound CCCCCCCCOB(OCCCCCCCC)OCCCCCCCC DTBRTYHFHGNZFX-UHFFFAOYSA-N 0.000 description 1
- MDCWDBMBZLORER-UHFFFAOYSA-N triphenyl borate Chemical compound C=1C=CC=CC=1OB(OC=1C=CC=CC=1)OC1=CC=CC=C1 MDCWDBMBZLORER-UHFFFAOYSA-N 0.000 description 1
- 239000012953 triphenylsulfonium Substances 0.000 description 1
- YFTHZRPMJXBUME-UHFFFAOYSA-N tripropylamine Chemical compound CCCN(CCC)CCC YFTHZRPMJXBUME-UHFFFAOYSA-N 0.000 description 1
- QKFJVDSYTSWPII-UHFFFAOYSA-N tris(4-methylphenyl)sulfanium Chemical compound C1=CC(C)=CC=C1[S+](C=1C=CC(C)=CC=1)C1=CC=C(C)C=C1 QKFJVDSYTSWPII-UHFFFAOYSA-N 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 239000004246 zinc acetate Substances 0.000 description 1
- 229940102001 zinc bromide Drugs 0.000 description 1
- 239000011592 zinc chloride Substances 0.000 description 1
- 235000005074 zinc chloride Nutrition 0.000 description 1
- CITILBVTAYEWKR-UHFFFAOYSA-L zinc trifluoromethanesulfonate Substances [Zn+2].[O-]S(=O)(=O)C(F)(F)F.[O-]S(=O)(=O)C(F)(F)F CITILBVTAYEWKR-UHFFFAOYSA-L 0.000 description 1
- ZMLPZCGHASSGEA-UHFFFAOYSA-M zinc trifluoromethanesulfonate Chemical compound [Zn+2].[O-]S(=O)(=O)C(F)(F)F ZMLPZCGHASSGEA-UHFFFAOYSA-M 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0048—Photosensitive materials characterised by the solvents or agents facilitating spreading, e.g. tensio-active agents
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
- G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/32—Liquid compositions therefor, e.g. developers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
Definitions
- the present invention relates to a photosensitive dry film, a laminated film having the photosensitive dry film, a method for producing the laminated film, and a method for producing a patterned resist film using the above-mentioned laminated film.
- Photolithography is the mainstream of precision microfabrication technology.
- Photofabrication is a method in which a photoresist composition is applied to the surface of a workpiece to form a photoresist layer, the photolithography layer is patterned by photolithography technology, and the patterned photoresist layer (photoresist pattern) is used as a mask for chemical etching and electrolysis. It is a general term for technologies for manufacturing various precision parts such as semiconductor packages by performing etching or electroforming mainly for electroplating.
- connection terminals for example, a protruding electrode (mounting terminal) such as a bump protruding on a package, or a metal post connecting a rewiring extending from a peripheral terminal on a wafer and a mounting terminal. Etc. are arranged on the substrate with high precision.
- Photoresist compositions are used for photofabrication as described above, and as such photoresist compositions, chemically amplified photosensitive compositions containing an acid generator are known (Patent Documents 1 and 2). Etc.).
- acid is generated from the acid generator by irradiation (exposure), the diffusion of the acid is promoted by the heat treatment, and an acid catalytic reaction occurs with the base resin or the like in the composition. Its alkali solubility changes.
- Such a chemically amplified photosensitive composition can be used for forming a patterned insulating film and an etching mask, as well as forming a plated object such as a bump, a metal post, and Cu rewiring by a plating process. It is used in.
- a chemically amplified photosensitive composition is used to form a photoresist layer having a desired film thickness on a support such as a metal substrate, exposed through a predetermined mask pattern, developed, and then developed.
- a photoresist pattern is formed in which the portion forming the plated product is selectively removed (peeled) and used as a mold.
- the photoresist layer to be formed when the photoresist layer to be formed is thick or the like, the photoresist layer may be a photosensitive dry film formed on a base film using an applicator, a bar coater, or the like.
- a laminated film in which a photosensitive dry film is formed on such a base film is laminated on a support (substrate) so that the photosensitive dry film is in contact with the surface of the support, and the base film is peeled off or the like. Then, by exposing and developing the photosensitive dry film in a position-selective manner, a resist pattern can be formed on the support.
- a solvent is contained in the photosensitive dry film in order to provide flexibility. Then, after laminating the photosensitive dry film on the support (substrate), the solvent is removed from the photosensitive dry film in order to form a resist pattern having a good shape, and then the photosensitive dry film is exposed and developed. ..
- PAB photosensitive dry film
- bubbles generated when the solvent evaporates may remain on the photosensitive dry film after heating (PAB). be.
- the presence of bubbles in the heated photosensitive dry film forms a resist pattern (patterned resist film) with unintended pores (foam).
- the photosensitive dry film when used for forming the above-mentioned plated molded product, an alicyclic hydrocarbon group-containing group is introduced into the base resin in order to improve the chemical resistance and heat resistance of the pattern used as a mold.
- the photosensitive dry film may become cloudy or separated.
- a photosensitive dry film that becomes cloudy or separated has poor transparency and uniformity, and it is difficult to exert the functions of the acid generator and resin contained in it. Therefore, a patterned resist film having a desired shape is obtained. Hard to get.
- the present invention has been made in view of the above problems, and is a photosensitive dry film composed of a chemically amplified positive photosensitive composition, in which white turbidity and separation due to the contained resin are suppressed, and heating is performed.
- a photosensitive dry film capable of suppressing residual bubbles generated when the solvent is removed, a laminated film having the photosensitive dry film, a method for producing the laminated film, and a pattern using the above-mentioned laminated film. It is an object of the present invention to provide a method for producing a resist film.
- the present inventors have made an acid generator (A) that generates an acid by irradiation with active light or radiation and a resin whose solubility in an alkali is increased by the action of the acid (A).
- B) and an organic solvent (S) are contained, the resin (B) contains an acrylic resin (B3), and the acrylic resin (B3) contains an acid non-dissociable alicyclic hydrocarbon group-containing group (meth).
- S1 an acrylic resin
- the present invention has been completed. Specifically, the present invention provides the following.
- the first aspect of the present invention is a photosensitive dry film composed of a chemically amplified positive photosensitive composition. It contains an acid generator (A) that generates an acid by irradiation with active light or radiation, a resin (B) whose solubility in an alkali is increased by the action of the acid, and an organic solvent (S).
- the resin (B) contains an acrylic resin (B3) and contains The acrylic resin (B3) contains a structural unit (B3a) derived from a (meth) acrylate containing an acid non-dissociable alicyclic hydrocarbon group-containing group.
- the organic solvent (S) is the following conditions I) and II) :. I) The boiling point under atmospheric pressure is 150 ° C. or higher.
- the value of the energy term ⁇ h due to hydrogen bonding with respect to the Hansen solubility parameter is 11 (MPa) 0.5 or less.
- the second aspect of the present invention is a laminated film in which a base film and a photosensitive dry film according to the first aspect are laminated.
- a third aspect of the present invention is the method for producing a laminated film according to the second aspect.
- a method for producing a laminated film which comprises a drying step of forming a photosensitive dry film by heating a coating film to remove a part of the organic solvent (S).
- a fourth aspect of the present invention comprises a laminating step of laminating the laminated film according to the second aspect on a substrate so that the photosensitive dry film is in contact with the surface of the substrate.
- the base film removing process for removing the base film from the laminated film A solvent removing step of heating the photosensitive dry film at 100 ° C. or higher and 180 ° C. or lower to remove the organic solvent (S).
- S organic solvent
- the photosensitive dry film is exposed by irradiating the photosensitive dry film with active light or radiation in a position-selective manner.
- a method for producing a patterned resist film which comprises a developing step of developing a photosensitive dry film after exposure.
- the present invention is a photosensitive dry film composed of a chemically amplified positive photosensitive composition, which is generated when white turbidity and separation due to the contained resin are suppressed and the solvent is removed by heating.
- a photosensitive dry film in which residual bubbles are suppressed a laminated film having the photosensitive dry film, a method for producing the laminated film, and a method for producing a patterned resist film using the above-mentioned laminated film. can do.
- the photosensitive dry film is composed of a chemically amplified positive photosensitive composition (hereinafter, also referred to as a photosensitive composition).
- the photosensitive dry film has an acid generator (A) that generates an acid by irradiation with active light or radiation (hereinafter, also referred to as an acid generator (A)), and the solubility in an alkali is increased by the action of the acid.
- A an acid generator
- It contains a resin (B) (hereinafter, also referred to as a resin (B)) and an organic solvent (S).
- the resin (B) contains an acrylic resin (B3), and the acrylic resin (B3) contains a structural unit (B3a) derived from a (meth) acrylate containing an acid non-dissociable alicyclic hydrocarbon group-containing group.
- the organic solvent (S) contains a high boiling point organic solvent (S1) that satisfies the following conditions I) and II).
- the boiling point under atmospheric pressure is 150 ° C. or higher.
- the value of the energy term ⁇ h due to hydrogen bonding with respect to the Hansen solubility parameter is 11 (MPa) 0.5 or less.
- Such a photosensitive dry film has a coating step of applying a photosensitive composition to form a coating film and heating the coating film to remove a part of an organic solvent (S) contained in the photosensitive composition.
- This can be produced by a method comprising a drying step of forming a photosensitive dry film.
- the photosensitive composition contains an acid generator (A), a resin (B), and an organic solvent (S) as in the photosensitive dry film, and the resin (B) contains an acrylic resin (B3).
- the acrylic resin (B3) contains a structural unit (B3a) derived from (meth) acrylate containing an acid-non-dissociable alicyclic hydrocarbon group-containing group, and the organic solvent (S) contains conditions I) and. Contains a high boiling point organic solvent (S1) that satisfies II). That is, the components contained in the photosensitive composition are typically the same as the components contained in the photosensitive dry film.
- the organic solvent (S) in the photosensitive dry film is typically obtained.
- the blending ratio of each component not related to the organic solvent (S) and the blending ratio of the constituent units in the resin are typically substantially the same in the photosensitive composition and the photosensitive dry film.
- the acid generator (A) is a compound that generates an acid by irradiation with active light or radiation, and is not particularly limited as long as it is a compound that directly or indirectly generates an acid by light.
- the acid generator (A) the acid generator of the first to fifth aspects described below is preferable.
- suitable ones will be described as the first to fifth embodiments.
- X 1a represents a sulfur atom or an iodine atom having a valence g, and g is 1 or 2.
- h represents the number of repeating units of the structure in parentheses.
- R 1a is an organic group bonded to X 1a , an aryl group having 6 to 30 carbon atoms, a heterocyclic group having 4 to 30 carbon atoms, an alkyl group having 1 to 30 carbon atoms, and the like.
- R 1a is alkyl, hydroxy, alkoxy, alkylcarbonyl, arylcarbonyl, alkoxycarbonyl, aryloxycarbonyl, arylthio. At least one selected from the group consisting of carbonyl, acyloxy, arylthio, alkylthio, aryl, heterocyclic, aryloxy, alkylsulfinyl, arylsulfinyl, alkylsulfonyl, arylsulfonyl, alkyleneoxy, amino, cyano, nitro groups, and halogens.
- R 1a is g + h (g-1) + 1, and R 1a may be the same or different from each other.
- two or more R 1a are directly attached to each other, or -O-, -S-, -SO-, -SO 2- , -NH-, -NR 2a- , -CO-, -COO-, -CONH-.
- An alkylene group having 1 or more and 3 or less carbon atoms or a phenylene group may be bonded to form a ring structure containing X 1a .
- R 2a is an alkyl group having 1 or more and 5 or less carbon atoms or an aryl group having 6 or more and 10 or less carbon atoms.
- X 2a has a structure represented by the following formula (a2).
- X4a comprises an alkylene group having 1 or more and 8 or less carbon atoms, an arylene group having 6 or more and 20 or less carbon atoms, or a divalent group of a heterocyclic compound having 8 or more and 20 or less carbon atoms.
- X 4a is composed of an alkyl having 1 to 8 carbon atoms, an alkoxy having 1 to 8 carbon atoms, an aryl, hydroxy, cyano, and nitro groups having 6 to 10 carbon atoms, and a halogen. It may be substituted with at least one selected.
- X 5a is -O-, -S-, -SO-, -SO 2- , -NH-, -NR 2a- , -CO-, -COO-, -CONH-, alkylene with 1 or more carbon atoms and 3 or less carbon atoms.
- h represents the number of repeating units of the structure in parentheses.
- the h + 1 X4a and the h X5a may be the same or different, respectively.
- R 2a is the same as the above definition.
- X 3a- is a counterion of onium, and examples thereof include a fluorinated alkylfluorophosphate anion represented by the following formula (a17) and a borate anion represented by the following formula (a18).
- R 3a represents an alkyl group in which 80% or more of hydrogen atoms are substituted with fluorine atoms.
- j indicates the number thereof, and is an integer of 1 or more and 5 or less.
- the j R3a may be the same or different.
- R 4a to R 7a independently represent a fluorine atom or a phenyl group, and a part or all of the hydrogen atom of the phenyl group is selected from the group consisting of a fluorine atom and a trifluoromethyl group. It may be replaced with at least one of these.
- Examples of the onium ion in the compound represented by the above formula (a1) include triphenylsulfonium, tri-p-tolylsulfonium, 4- (phenylthio) phenyldiphenylsulfonium, bis [4- (diphenylsulfonio) phenyl] sulfide, and the like.
- preferable onium ions include sulfonium ions represented by the following formula (a19).
- R 8a is independently composed of a hydrogen atom, an alkyl, a hydroxy, an alkoxy, an alkylcarbonyl, an alkylcarbonyloxy, an alkyloxycarbonyl, a halogen atom, and an aryl, an arylcarbonyl, which may have a substituent. Represents a group selected from the group.
- X 2a has the same meaning as X 2a in the above formula (a1).
- sulfonium ion represented by the above formula (a19) include 4- (phenylthio) phenyldiphenylsulfonium, 4- (4-benzoyl-2-chlorophenylthio) phenylbis (4-fluorophenyl) sulfonium, 4-.
- R 3a represents an alkyl group substituted with a fluorine atom, and the preferable number of carbon atoms is 1 or more and 8 or less, and the more preferable number of carbon atoms is 1 or more. It is 4 or less.
- Specific examples of the alkyl group include linear alkyl groups such as methyl, ethyl, propyl, butyl, pentyl and octyl; branched alkyl groups such as isopropyl, isobutyl, sec-butyl and tert-butyl; and further cyclopropyl, cyclobutyl and cyclopentyl.
- Cycloalkyl groups such as cyclohexyl, and the like, and the ratio of the hydrogen atom of the alkyl group substituted with the fluorine atom is usually 80% or more, preferably 90% or more, and more preferably 100%.
- substitution rate of the fluorine atom is less than 80%, the acid strength of the onium fluorinated alkylfluorophosphate represented by the above formula (a1) decreases.
- R 3a is a linear or branched perfluoroalkyl group having a carbon atom number of 1 or more and 4 or less and a fluorine atom substitution rate of 100%, and specific examples thereof include CF 3 and CF 3 CF. 2 , (CF 3 ) 2 CF, CF 3 CF 2 CF 2 , CF 3 CF 2 CF 2 CF 2 , (CF 3 ) 2 CF CF 2 , CF 3 CF 2 (CF 3 ) CF, (CF 3 ) 3 C Can be mentioned.
- the number j of R 3a is an integer of 1 or more and 5 or less, preferably 2 or more and 4 or less, and particularly preferably 2 or 3.
- preferred fluorinated alkylfluorophosphate anions include [(CF 3 CF 2 ) 2 PF 4 ] - , [(CF 3 CF 2 ) 3 PF 3 ] - , [((CF 3 ) 2 CF) 2 ).
- Preferred specific examples of the borate anion represented by the above formula (a18) are tetrakis (pentafluorophenyl) borate ([B (C6 F 5) 4 ] - ) and tetrakis [(trifluoromethyl) phenyl] borate ( [B (C 6 H 4 CF 3 ) 4 ] - ), difluorobis (pentafluorophenyl) borate ([(C 6 F 5 ) 2 BF 2 ] - ), trifluoro (pentafluorophenyl) borate ([(C) 6 F 5 ) BF 3 ] - ), tetrakis (difluorophenyl) borate ([B (C 6 H 3 F 2 ) 4 ] - ) and the like.
- tetrakis (pentafluorophenyl) borate ([B (C 6 F 5 ) 4 ] - ) is particularly preferable
- the second aspect of the acid generator (A) is 2,4-bis (trichloromethyl) -6-piperonyl-1,3,5-triazine, 2,4-bis (trichloromethyl) -6- [2. -(2-Frill) ethenyl] -s-triazine, 2,4-bis (trichloromethyl) -6- [2- (5-methyl-2-furyl) ethenyl] -s-triazine, 2,4-bis ( Trichloromethyl) -6- [2- (5-ethyl-2-furyl) ethenyl] -s-triazine, 2,4-bis (trichloromethyl) -6- [2- (5-propyl-2-furyl) ethenyl ] -S-Triazine, 2,4-bis (trichloromethyl) -6- [2- (3,5-dimethoxyphenyl) ethenyl] -s-triazine, 2,
- R 9a , R 10a , and R 11a each independently represent an alkyl halide group.
- R 12a represents a monovalent, divalent or trivalent organic group
- R 13a is a substituted or unsubstituted saturated hydrocarbon group, unsaturated hydrocarbon group or aromatic group.
- n represents the number of repeating units of the structure in parentheses.
- examples of the aromatic group include an aryl group such as a phenyl group and a naphthyl group, and a heteroaryl group such as a frill group and a thienyl group. These may have one or more suitable substituents such as a halogen atom, an alkyl group, an alkoxy group, a nitro group and the like on the ring.
- R 13a is particularly preferably an alkyl group having 1 or more and 6 or less carbon atoms, and examples thereof include a methyl group, an ethyl group, a propyl group and a butyl group.
- a compound in which R 12a is an aromatic group and R 13a is an alkyl group having 1 or more and 4 or less carbon atoms is preferable.
- R 12a is any of a phenyl group, a methyl phenyl group, and a methoxy phenyl group
- R 13a is a compound having a methyl group, specifically. Specifically, ⁇ - (methylsulfonyloxyimino) -1-phenyl acetonitrile, ⁇ - (methylsulfonyloxyimino) -1- (p-methylphenyl) acetonitrile, ⁇ - (methylsulfonyloxyimino) -1- (p-).
- the acid generator represented by the above formula (a4) specifically includes an acid generator represented by the following formula.
- an onium salt having a naphthalene ring in the cation portion can be mentioned.
- having a naphthalene ring it means having a structure derived from naphthalene, and it means that the structure of at least two rings and their aromaticity are maintained.
- This naphthalene ring has a substituent such as a linear or branched alkyl group having 1 or more and 6 or less carbon atoms, a hydroxyl group, and a linear or branched alkoxy group having 1 or more and 6 or less carbon atoms. May be good.
- the structure derived from the naphthalene ring may be a monovalent group (one free valence) or a divalent group (two free valences) or more, but it may be a monovalent group. Desirable (however, at this time, the free valence shall be counted except for the portion bonded to the above substituent).
- the number of naphthalene rings is preferably 1 or more and 3 or less.
- a structure represented by the following formula (a5) is preferable.
- R 14a , R 15a , and R 16a represents a group represented by the following formula (a6), and the rest are linear or branched with 1 or more and 6 or less carbon atoms.
- one of R 14a , R 15a , and R 16a is a group represented by the following formula (a6), and the remaining two are independently linear or branched with 1 or more and 6 or less carbon atoms. It is an alkylene group of, and these ends may be bonded to form a cyclic.
- R 17a and R 18a are independently hydroxyl groups, linear or branched alkoxy groups having 1 to 6 carbon atoms, or linear or branched having 1 to 6 carbon atoms.
- R 19a represents a linear or branched alkylene group having 1 to 6 carbon atoms which may have a single bond or a substituent.
- l and m each independently represent an integer of 0 or more and 2 or less, and l + m is 3 or less.
- R 17a when there are a plurality of R 17a , they may be the same or different from each other. Further, when a plurality of R 18a exist, they may be the same or different from each other.
- the number of groups represented by the above formula (a6) is preferably one from the viewpoint of compound stability, and the rest are direct sequences having 1 or more and 6 or less carbon atoms. It is a chain or branched alkylene group, and these ends may be bonded to form a cyclic group. In this case, the above two alkylene groups form a 3- to 9-membered ring including a sulfur atom.
- the number of atoms (including sulfur atoms) constituting the ring is preferably 5 or more and 6 or less.
- examples of the substituent that the alkylene group may have include an oxygen atom (in this case, a carbonyl group is formed together with a carbon atom constituting the alkylene group), a hydroxyl group and the like.
- the substituents that the phenyl group may have include a hydroxyl group, a linear or branched alkoxy group having 1 or more and 6 or less carbon atoms, and a linear or branched alkoxy group having 1 or more and 6 or less carbon atoms. Alkoxy group and the like can be mentioned.
- Suitable examples of these cation portions include those represented by the following formulas (a7) and (a8), and a structure represented by the following formula (a8) is particularly preferable.
- the cation portion may be an iodonium salt or a sulfonium salt, but a sulfonium salt is preferable from the viewpoint of acid generation efficiency and the like.
- an anion portion of an onium salt having a naphthalene ring in the cation portion an anion capable of forming a sulfonium salt is desirable.
- the anion portion of such an acid generator is a fluoroalkyl sulfonic acid ion or an aryl sulfonic acid ion in which a part or all of hydrogen atoms are fluorinated.
- the alkyl group in the fluoroalkyl sulfonic acid ion may be linear, branched or cyclic with 1 or more and 20 or less carbon atoms, and has 1 or more and 10 or less carbon atoms from the bulkiness of the generated acid and its diffusion distance. Is preferable. In particular, branched or annular ones are preferable because they have a short diffusion distance. Further, since it can be synthesized at low cost, a methyl group, an ethyl group, a propyl group, a butyl group, an octyl group and the like can be mentioned as preferable ones.
- Examples of the aryl group in the aryl sulfonic acid ion are an aryl group having 6 or more carbon atoms and 20 or less carbon atoms, and examples thereof include an alkyl group, a phenyl group which may or may not be substituted with a halogen atom, and a naphthyl group.
- an aryl group having 6 or more and 10 or less carbon atoms is preferable because it can be synthesized at low cost.
- Specific examples of the preferred ones include a phenyl group, a toluenesulfonyl group, an ethylphenyl group, a naphthyl group, a methylnaphthyl group and the like.
- the fluorination rate when a part or all of hydrogen atoms is fluorinated is preferably 10% or more and 100% or less, more preferably 50% or more and 100%.
- the following is particularly preferable, in which all hydrogen atoms are replaced with fluorine atoms because the acid strength becomes stronger.
- Specific examples of such a substance include trifluoromethanesulfonate, perfluorobutane sulfonate, perfluorooctane sulfonate, perfluorobenzene sulfonate and the like.
- a preferable anion portion includes one represented by the following formula (a9).
- R 20a is a group represented by the following formulas (a10), (a11), and (a12).
- x represents an integer of 1 or more and 4 or less.
- R 21a is a hydrogen atom, a hydroxyl group, a linear or branched alkyl group having 1 or more and 6 or less carbon atoms, or a linear or branched alkyl group having 1 or more and 6 or less carbon atoms.
- y represents an integer of 1 or more and 3 or less.
- trifluoromethanesulfonate and perfluorobutanesulfonate are preferable from the viewpoint of safety.
- anion portion those containing nitrogen represented by the following formulas (a13) and (a14) can also be used.
- Xa represents a linear or branched alkylene group in which at least one hydrogen atom is substituted with a fluorine atom, and the number of carbon atoms of the alkylene group is 2 or more and 6 It is preferably 3 or more and 5 or less, and most preferably the number of carbon atoms is 3.
- Y a and Z a each independently represent a linear or branched alkyl group in which at least one hydrogen atom is substituted with a fluorine atom, and the number of carbon atoms of the alkyl group is 1 or more and 10 or less. It is preferably 1 or more and 7 or less, and more preferably 1 or more and 3 or less.
- the ratio of fluorine atoms in the alkylene group or alkyl group, that is, the fluorination rate is preferably 70% or more and 100% or less, more preferably 90% or more and 100% or less, and most preferably all hydrogen atoms are fluorine. It is a perfluoroalkylene group or a perfluoroalkyl group substituted with an atom.
- onium salt having a naphthalene ring in such a cation portion include compounds represented by the following formulas (a15) and (a16).
- the fifth aspect of the acid generator (A) includes bis (p-toluenesulfonyl) diazomethane, bis (1,1-dimethylethylsulfonyl) diazomethane, bis (cyclohexylsulfonyl) diazomethane, and bis (2,4-).
- Dimethylphenylsulfonyl) Bissulfonyldiazomethanes such as diazomethane; p-toluenesulfonic acid 2-nitrobenzyl, p-toluenesulfonic acid 2,6-dinitrobenzyl, nitrobenzyltosylate, dinitrobenzyltosylate, nitrobenzylsulfonate, nitro Nitrobenzyl derivatives such as benzylcarbonate, dinitrobenzylcarbonate; pyrogalloltrimesylate, pyrogalloltritosylate, benzyltosylate, benzylsulfonate, N-methylsulfonyloxysuccinimide, N-trichloromethylsulfonyloxysuccinimide, N-phenylsulfonyl Sulfonic acid esters such as oxymaleimide and N-methylsulfonyloxyphthalimide; N- (tri
- This acid generator (A) may be used alone or in combination of two or more.
- the content of the acid generator (A) is preferably 0.1% by mass or more and 10% by mass or less, and 0.2% by mass or more and 6% by mass or less, based on the total solid content of the photosensitive composition. It is more preferable, and it is particularly preferable that it is 0.5% by mass or more and 3% by mass or less.
- the photosensitive composition contains an acrylic resin (B3) as an essential component as the resin (B) whose solubility in alkali is increased by the action of an acid.
- the acrylic resin (B3) contains a structural unit (B3a) derived from a (meth) acrylate containing an acid non-dissociable alicyclic hydrocarbon group-containing group.
- the photosensitive composition may contain an acrylic resin (B3) and any resin whose solubility in an alkali is increased by the action of an acid other than the acrylic resin (B3).
- the ratio of the mass of the acrylic resin (B3) to the mass of the resin (B) is preferably 50% by mass or more, more preferably 70% by mass or more, and further preferably 90% by mass or more.
- any resin whose solubility in alkali is increased by the action of an acid other than the acrylic resin (B3) include a novolak resin (B1), a polyhydroxystyrene resin (B2), and an acrylic resin other than the acrylic resin (B3). .. Each resin will be specifically described below.
- Novolak resin (B1) As the novolak resin (B1), a resin containing a structural unit represented by the following formula (b1) can be used.
- R 1b represents an acid dissociative dissolution inhibitor
- R 2b and R 3b each independently represent a hydrogen atom or an alkyl group having 1 or more and 6 or less carbon atoms.
- Examples of the acid dissociative dissolution inhibitor group represented by R 1b include a group represented by the following formulas (b2) and (b3), and a linear, branched, or cyclic alkyl having 1 or more and 6 or less carbon atoms. It is preferably a group, a vinyloxyethyl group, a tetrahydropyranyl group, a tetrahydrofuranyl group, or a trialkylsilyl group.
- R 4b and R 5b each independently represent a hydrogen atom or a linear or branched alkyl group having 1 or more and 6 or less carbon atoms, and R 6b is carbon.
- R 4b and R 5b represents a linear, branched, or cyclic alkyl group having 1 or more and 10 or less atoms
- R7b represents a linear, branched, or cyclic alkyl group having 1 or more and 6 or less carbon atoms. Represents 0 or 1.
- linear or branched alkyl group examples include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, a neopentyl group and the like. ..
- cyclic alkyl group examples include a cyclopentyl group and a cyclohexyl group.
- the acid dissociative dissolution inhibitory group represented by the above formula (b2) specifically, a methoxyethyl group, an ethoxyethyl group, an n-propoxyethyl group, an isopropoxyethyl group, an n-butoxyethyl group, Examples thereof include isobutoxyethyl group, tert-butoxyethyl group, cyclohexyloxyethyl group, methoxypropyl group, ethoxypropyl group, 1-methoxy-1-methyl-ethyl group, 1-ethoxy-1-methylethyl group and the like.
- the acid dissociative dissolution inhibitory group represented by the above formula (b3) include a tert-butoxycarbonyl group and a tert-butoxycarbonylmethyl group.
- the trialkylsilyl group include groups having 1 or more and 6 or less carbon atoms in each alkyl group such as a trimethylsilyl group and a tri-tert-butyldimethylsilyl group.
- Polyhydroxystyrene resin (B2) As the polyhydroxystyrene resin (B2), a resin containing a structural unit represented by the following formula (b4) can be used.
- R 8b represents a hydrogen atom or an alkyl group having 1 or more and 6 or less carbon atoms
- R 9b represents an acid dissociative dissolution inhibitory group.
- the above-mentioned alkyl group having 1 or more and 6 or less carbon atoms is, for example, a linear, branched, or cyclic alkyl group having 1 or more and 6 or less carbon atoms.
- the linear or branched alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, a neopentyl group and the like.
- the cyclic alkyl group include a cyclopentyl group and a cyclohexyl group.
- the same acid dissociative dissolution inhibitor as those exemplified in the formulas (b2) and (b3) can be used.
- the polyhydroxystyrene resin (B2) can contain another polymerizable compound as a constituent unit for the purpose of appropriately controlling the physical and chemical properties.
- a polymerizable compound include known radically polymerizable compounds and anionic polymerizable compounds.
- polymerizable compounds include monocarboxylic acids such as acrylic acid, methacrylic acid, and crotonic acid; dicarboxylic acids such as maleic acid, fumaric acid, and itaconic acid; 2-methacryloyloxyethyl succinic acid, 2-.
- Methacrylic acid derivatives having carboxy groups and ester bonds such as methacryloyloxyethyl maleic acid, 2-methacryloyloxyethylphthalic acid, 2-methacryloyloxyethyl hexahydrophthalic acid; methyl (meth) acrylate, ethyl (meth) acrylate, butyl (Meth) acrylic acid alkyl esters such as (meth) acrylate; (meth) acrylic acid hydroxyalkyl esters such as 2-hydroxyethyl (meth) acrylate and 2-hydroxypropyl (meth) acrylate; phenyl (meth) acrylate, (Meta) acrylic acid aryl esters such as benzyl (meth) acrylate; dicarboxylic acid diesters such as diethyl maleate and dibutyl fumarate; styrene, ⁇ -methylstyrene, chlorostyrene, chloromethylstyrene,
- the acrylic resin (B3) as the resin (B) whose solubility in alkali is increased by the action of an acid is a structural unit (B3a) derived from a (meth) acrylate containing an acid-non-dissociable alicyclic hydrocarbon group-containing group. ) (Hereinafter also referred to as a structural unit (B3a)).
- acrylic resin means that the ratio of acrylic constituent units which are constituent units derived from a monomer having a (meth) acryloyloxy group to all the constituent units constituting a resin is 50 mol. % Or more, preferably 70 mol% or more, more preferably 90 mol% or more.
- (meth) acrylic means both “acrylic” and “methacrylic”.
- (Meta) acrylate means both “acrylate” and “methacrylate”.
- (Meta) acryloyloxy means both “acryloyloxy” and "methacryloyloxy”.
- Examples of the acid non-dissociable alicyclic hydrocarbon group-containing group contained in the structural unit (B3a) include a polycyclic acid non-dissociable alicyclic hydrocarbon group-containing group.
- a polycyclic acid non-dissociable alicyclic hydrocarbon group-containing group a tricyclodecanyl group, an adamantyl group, a tetracyclododecanyl group, an isobornyl group, a norbornyl group and the like are industrially readily available. Preferred in terms of points.
- These acid-non-dissociable alicyclic hydrocarbon group-containing groups may have a linear or branched alkyl group having 1 or more and 5 or less carbon atoms as a substituent.
- the structural unit (B3a) can be introduced into the acrylic resin (B3), for example, by using (meth) acrylic acid esters having an acid non-dissociable alicyclic hydrocarbon group-containing group as a copolymerization component. can.
- Examples of the structural unit (B3a) include the following formulas (B3a-1) to (B3a-5).
- R 25b represents a hydrogen atom or a methyl group.
- the ratio of the mass of the constituent unit (B3a) to the mass of the acrylic resin (B3) is preferably 15% by mass or more and 50% by mass or less, and more preferably 20% by mass or more and 30% by mass or less.
- the acrylic resin (B3) preferably contains, for example, a constituent unit (b-3) derived from an acrylic acid ester containing a —SO2 -containing cyclic group or a lactone-containing cyclic group. In such a case, when forming a resist pattern, it is easy to form a resist pattern having a preferable cross-sectional shape.
- -SO 2 -containing cyclic group means a cyclic group containing a ring containing -SO 2- in its ring skeleton, and specifically, a sulfur atom (specifically, -SO 2 -containing ring group) in -SO 2-.
- S is a cyclic group forming a part of the cyclic skeleton of the cyclic group.
- a ring containing -SO 2- in its ring skeleton is counted as the first ring, and if it is the ring alone, it is a monocyclic group, and if it has another ring structure, it is a polycyclic group regardless of its structure. It is called.
- -SO 2 -The contained cyclic group may be monocyclic or polycyclic.
- -SO 2 -containing cyclic groups are particularly cyclic groups containing -O-SO 2 -in their cyclic skeleton, that is, -OS- in -O-SO 2- contains a part of the cyclic skeleton. It is preferably a cyclic group containing a sultone ring to be formed.
- the number of carbon atoms of the —SO2 -containing cyclic group is preferably 3 or more and 30 or less, more preferably 4 or more and 20 or less, further preferably 4 or more and 15 or less, and particularly preferably 4 or more and 12 or less.
- the number of carbon atoms is the number of carbon atoms constituting the ring skeleton, and does not include the number of carbon atoms in the substituent.
- the —SO 2 -containing cyclic group may be a —SO 2 -containing aliphatic cyclic group or a —SO 2 -containing aromatic cyclic group. It is preferably a —SO2 -containing aliphatic cyclic group.
- a hydrogen atom is obtained from an aliphatic hydrocarbon ring in which a part of carbon atoms constituting the ring skeleton is substituted with -SO 2- or -O-SO 2- .
- Examples include groups excluding at least one. More specifically, a group in which at least one hydrogen atom is removed from an aliphatic hydrocarbon ring in which -CH 2- is substituted with -SO 2- , which constitutes the ring skeleton, constitutes the ring-CH 2- .
- examples thereof include a group in which at least one hydrogen atom is removed from an aliphatic hydrocarbon ring in which CH 2 -is substituted with —O — SO2-.
- the number of carbon atoms in the alicyclic hydrocarbon ring is preferably 3 or more and 20 or less, and more preferably 3 or more and 12 or less.
- the alicyclic hydrocarbon ring may be a polycyclic type or a monocyclic type.
- the monocyclic alicyclic hydrocarbon group a group obtained by removing two hydrogen atoms from a monocycloalkane having 3 or more and 6 or less carbon atoms is preferable. Examples of the monocycloalkane include cyclopentane and cyclohexane.
- the polycyclic alicyclic hydrocarbon ring is preferably a group obtained by removing two hydrogen atoms from a polycycloalkane having 7 or more and 12 or less carbon atoms, and specifically, the polycycloalkane is adamantan or norbornane. , Isobornane, tricyclodecane, tetracyclododecane and the like.
- the —SO2 -containing cyclic group may have a substituent.
- alkyl group As the alkyl group as the substituent, an alkyl group having 1 or more carbon atoms and 6 or less carbon atoms is preferable.
- the alkyl group is preferably linear or branched. Specific examples thereof include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, tert-butyl group, n-pentyl group, isopentyl group, neopentyl group, n-hexyl group and the like. Be done. Among these, a methyl group or an ethyl group is preferable, and a methyl group is particularly preferable.
- alkoxy group As the alkoxy group as the substituent, an alkoxy group having 1 or more carbon atoms and 6 or less carbon atoms is preferable.
- the alkoxy group is preferably linear or branched. Specific examples thereof include a group in which an alkyl group mentioned as the above-mentioned alkyl group as a substituent is bonded to an oxygen atom (—O—).
- halogen atom examples include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom and the like, and a fluorine atom is preferable.
- halogenated alkyl group of the substituent examples include a group in which a part or all of the hydrogen atom of the above-mentioned alkyl group is substituted with the above-mentioned halogen atom.
- alkyl halide group examples include a group in which a part or all of the hydrogen atom of the alkyl group mentioned as the alkyl group as the above-mentioned substituent is substituted with the above-mentioned halogen atom.
- halogenated alkyl group a fluorinated alkyl group is preferable, and a perfluoroalkyl group is particularly preferable.
- R is a hydrogen atom or a linear, branched or cyclic alkyl group having 1 or more and 15 or less carbon atoms.
- R " is a linear or branched alkyl group
- the number of carbon atoms of the chain alkyl group is preferably 1 or more and 10 or less, more preferably 1 or more and 5 or less, and particularly preferably 1 or 2.
- R " is a cyclic alkyl group
- the number of carbon atoms of the cyclic alkyl group is preferably 3 or more and 15 or less, more preferably 4 or more and 12 or less, and particularly preferably 5 or more and 10 or less.
- a fluorine atom preferably 3 or more and 15 or less, more preferably 4 or more and 12 or less, and particularly preferably 5 or more and 10 or less.
- a fluorine atom preferably 3 or more and 15 or less, more preferably 4 or more and 12 or less, and particularly preferably 5 or more and 10 or less.
- a fluorine atom preferably 3 or more and 15 or less, more preferably 4 or more and 12 or less, and particularly preferably 5 or more and 10 or less.
- a fluorine atom preferably 3 or more and 15 or less, more preferably 4 or more and 12 or less, and particularly preferably 5 or more and 10 or less.
- a fluorine atom preferably 3 or more and 15 or less, more preferably
- one or more hydrogen atoms can be obtained from monocycloalkanes such as cyclopentane and cyclohexane, and polycycloalkanes such as adamantan, norbornan, isobornane, tricyclodecane and tetracyclododecane. Examples include the excluded groups.
- hydroxyalkyl group As the hydroxyalkyl group as the substituent, a hydroxyalkyl group having 1 or more carbon atoms and 6 or less carbon atoms is preferable. Specifically, a group in which at least one of the hydrogen atoms of the alkyl group mentioned as the alkyl group as the above-mentioned substituent is substituted with a hydroxyl group can be mentioned.
- -SO 2 -Containing cyclic groups include, more specifically, groups represented by the following formulas (3-1) to (3-4).
- A' is an alkylene group, an oxygen atom or a sulfur atom having 1 or more and 5 or less carbon atoms which may contain an oxygen atom or a sulfur atom
- z is an integer of 0 or more and 2 or less
- A' is an alkylene group having 1 or more and 5 or less carbon atoms which may contain an oxygen atom (-O-) or a sulfur atom (-S-). , Oxygen atom, or sulfur atom.
- the alkylene group having 1 or more and 5 or less carbon atoms in A' preferably a linear or branched alkylene group, and examples thereof include a methylene group, an ethylene group, an n-propylene group and an isopropylene group.
- the alkylene group contains an oxygen atom or a sulfur atom
- specific examples thereof include a group in which -O- or -S- is interposed between the terminal or carbon atom of the above-mentioned alkylene group, for example, -O-.
- examples thereof include CH 2- , -CH 2 -O-CH 2- , -S-CH 2- , -CH 2 -S-CH 2- , and the like.
- A' an alkylene group having 1 or more and 5 or less carbon atoms or —O— is preferable, an alkylene group having 1 or more and 5 or less carbon atoms is more preferable, and a methylene group is most preferable.
- z may be any of 0, 1, and 2, with 0 being most preferred.
- the plurality of R 10b may be the same or different.
- the group represented by the above-mentioned formula (3-1) is preferable, and the above-mentioned chemical formulas (3-1-1) and (3-1-18) are preferable.
- (3-3-1) and at least one selected from the group consisting of the groups represented by (3-4-1) are more preferable, and the above-mentioned chemical formula (3-1-1) is used.
- the groups that are used are most preferred.
- the lactone ring is counted as the first ring, and when it has only a lactone ring, it is called a monocyclic group, and when it has another ring structure, it is called a polycyclic group regardless of its structure.
- the lactone-containing cyclic group may be a monocyclic group or a polycyclic group.
- lactone cyclic group in the structural unit (b-3) can be used without particular limitation.
- the lactone-containing monocyclic group is a group obtained by removing one hydrogen atom from a 4- to 6-membered ring lactone, for example, a group obtained by removing one hydrogen atom from ⁇ -propionolactone, or ⁇ -butyrolactone. Examples thereof include a group from which one hydrogen atom has been removed, a group from which one hydrogen atom has been removed from ⁇ -valerolactone, and the like.
- lactone-containing polycyclic group include a bicycloalkane having a lactone ring, a tricycloalkane, and a group obtained by removing one hydrogen atom from a tetracycloalkane.
- the structural unit (b-3) is not particularly limited as long as it has a —SO2 -containing cyclic group or a lactone-containing cyclic group, but the structure of the other portion is not particularly limited, but it is bonded to the carbon atom at the ⁇ -position.
- a structural unit (b-3-L) which is a structural unit derived from an acrylic acid ester in which a hydrogen atom bonded to is optionally substituted with a substituent and contains a lactone-containing cyclic group. At least one structural unit is preferred.
- R is a hydrogen atom, an alkyl group having 1 or more and 5 or less carbon atoms, or an alkyl halide group having 1 or more and 5 or less carbon atoms, and R 11b is a ⁇ SO2 -containing cyclic group.
- R 12b is a single bond or a divalent linking group.
- R is the same as described above.
- R 11b is the same as the —SO2 -containing cyclic group mentioned above.
- R 12b may be either a single bond or a divalent linking group.
- the divalent linking group in R 12b is not particularly limited, and examples thereof include a divalent hydrocarbon group which may have a substituent, a divalent linking group containing a heteroatom, and the like.
- the hydrocarbon group as a divalent linking group may be an aliphatic hydrocarbon group or an aromatic hydrocarbon group.
- An aliphatic hydrocarbon group means a hydrocarbon group having no aromaticity.
- the aliphatic hydrocarbon group may be saturated or unsaturated. Saturated hydrocarbon groups are usually preferred. More specifically, the aliphatic hydrocarbon group includes a linear or branched aliphatic hydrocarbon group, an aliphatic hydrocarbon group having a ring in the structure, and the like.
- the number of carbon atoms of the linear or branched aliphatic hydrocarbon group is preferably 1 or more and 10 or less, more preferably 1 or more and 8 or less, and further preferably 1 or more and 5 or less.
- a linear alkylene group is preferable. Specifically, a methylene group [-CH 2- ], an ethylene group [-(CH 2 ) 2- ], a trimethylene group [-(CH 2 ) 3- ], a tetramethylene group [-(CH 2 ) 4- ]. , Pentamethylene group [-(CH 2 ) 5- ] and the like.
- branched-chain alkylene group As the branched-chain aliphatic hydrocarbon group, a branched-chain alkylene group is preferable. Specifically, -CH (CH 3 )-, -CH (CH 2 CH 3 )-, -C (CH 3 ) 2- , -C (CH 3 ) (CH 2 CH 3 )-, -C (CH) 3 ) (CH 2 CH 2 CH 3 )-, -C (CH 2 CH 3 ) 2 -etc.
- Alkylmethylene groups -CH (CH 3 ) CH 2- , -CH (CH 3 ) CH (CH 3 )- , -C (CH 3 ) 2 CH 2- , -CH (CH 2 CH 3 ) CH 2- , -C (CH 2 CH 3 ) 2 -CH 2- , etc.
- Alkylethylene groups -CH (CH 3 ) CH 2 CH 2- , -CH 2 CH (CH 3 ) CH 2- , etc.
- Alkyltrimethylene groups -CH (CH 3 ) CH 2 CH 2 CH 2- , -CH 2 CH (CH 3 ) CH 2 CH 2-
- Alkyltetramethylene groups such as Alkylalkylene groups such as Alkyltetramethylene groups and the like can be mentioned.
- Alkyl group in the alkylalkylene group a linear alkyl group having 1 or more and 5 or less carbon atoms is preferable.
- the linear or branched aliphatic hydrocarbon group described above may or may not have a substituent (a group or atom other than a hydrogen atom) that replaces a hydrogen atom.
- a cyclic aliphatic hydrocarbon group which may contain a substituent containing a hetero atom in the ring structure (two hydrogen atoms are removed from the aliphatic hydrocarbon ring).
- Group a group in which the cyclic aliphatic hydrocarbon group is bonded to the terminal of a linear or branched aliphatic hydrocarbon group, or a cyclic aliphatic hydrocarbon group in a linear or branched chain. Examples thereof include groups intervening in the middle of the aliphatic hydrocarbon group. Examples of the above-mentioned linear or branched-chain aliphatic hydrocarbon group include the same as described above.
- the number of carbon atoms of the cyclic aliphatic hydrocarbon group is preferably 3 or more and 20 or less, and more preferably 3 or more and 12 or less.
- the cyclic aliphatic hydrocarbon group may be a polycyclic type or a monocyclic type.
- a group obtained by removing two hydrogen atoms from a monocycloalkane is preferable.
- the number of carbon atoms of the monocycloalkane is preferably 3 or more and 6 or less. Specific examples thereof include cyclopentane and cyclohexane.
- the polycyclic aliphatic hydrocarbon group a group obtained by removing two hydrogen atoms from a polycycloalkane is preferable.
- the number of carbon atoms of the polycycloalkane is preferably 7 or more and 12 or less. Specific examples thereof include adamantane, norbornane, isobornane, tricyclodecane, tetracyclododecane and the like.
- the cyclic aliphatic hydrocarbon group may or may not have a substituent (a group or atom other than a hydrogen atom) that replaces a hydrogen atom.
- an alkyl group having 1 or more carbon atoms and 5 or less carbon atoms is preferable, and a methyl group, an ethyl group, a propyl group, an n-butyl group and a tert-butyl group are more preferable.
- an alkoxy group having 1 or more and 5 or less carbon atoms is preferable, and a methoxy group, an ethoxy group, an n-propoxy group, an iso-propoxy group, an n-butoxy group, and a tert-butoxy group. Is more preferable, and a methoxy group and an ethoxy group are particularly preferable.
- halogen atom examples include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom and the like, and a fluorine atom is preferable.
- Examples of the above-mentioned alkyl halide group as a substituent include a group in which a part or all of the hydrogen atom of the above-mentioned alkyl group is substituted with the above-mentioned halogen atom.
- the cyclic aliphatic hydrocarbon group may have a part of carbon atoms constituting its ring structure substituted with —O— or —S—.
- the aromatic hydrocarbon group as a divalent hydrocarbon group is a divalent hydrocarbon group having at least one aromatic ring, and may have a substituent.
- the aromatic ring is not particularly limited as long as it is a cyclic conjugated system having 4n + 2 ⁇ electrons, and may be a monocyclic type or a polycyclic type.
- the number of carbon atoms in the aromatic ring is preferably 5 or more and 30 or less, more preferably 5 or more and 20 or less, further preferably 6 or more and 15 or less, and particularly preferably 6 or more and 12 or less. However, the carbon atom number does not include the carbon atom number of the substituent.
- the aromatic ring is an aromatic hydrocarbon ring such as benzene, naphthalene, anthracene, and phenanthrene; an aromatic heterocycle in which a part of carbon atoms constituting the aromatic hydrocarbon ring is substituted with a heteroatom; And so on.
- the hetero atom in the aromatic heterocycle include an oxygen atom, a sulfur atom, a nitrogen atom and the like.
- Specific examples of the aromatic heterocycle include a pyridine ring and a thiophene ring.
- an aromatic hydrocarbon group as a divalent hydrocarbon group, a group obtained by removing two hydrogen atoms from the above-mentioned aromatic hydrocarbon ring or aromatic heterocycle (arylene group or heteroarylene group); A group obtained by removing two hydrogen atoms from an aromatic compound containing two or more aromatic rings (for example, biphenyl, fluorene, etc.); a group obtained by removing one hydrogen atom from the above aromatic hydrocarbon ring or aromatic heterocycle (for example, a group obtained by removing one hydrogen atom from the above aromatic hydrocarbon ring or aromatic heterocycle).
- a group in which one of the hydrogen atoms of an aryl group or heteroaryl group is substituted with an alkylene group for example, a benzyl group, a phenethyl group, a 1-naphthylmethyl group, a 2-naphthylmethyl group, a 1-naphthylethyl group, 2- A group obtained by removing one hydrogen atom from an aryl group in an arylalkyl group such as a naphthylethyl group); and the like.
- the number of carbon atoms of the alkylene group bonded to the above aryl group or heteroaryl group is preferably 1 or more and 4 or less, more preferably 1 or more and 2 or less, and particularly preferably 1.
- the hydrogen atom of the aromatic hydrocarbon group may be substituted with a substituent.
- the hydrogen atom bonded to the aromatic ring in the aromatic hydrocarbon group may be substituted with a substituent.
- an alkyl group having 1 or more carbon atoms and 5 or less carbon atoms is preferable, and a methyl group, an ethyl group, an n-propyl group, an n-butyl group and a tert-butyl group are more preferable.
- an alkoxy group having 1 or more and 5 or less carbon atoms is preferable, and a methoxy group, an ethoxy group, an n-propoxy group, an iso-propoxy group, an n-butoxy group, and a tert-butoxy group. Is preferable, and a methoxy group and an ethoxy group are more preferable.
- halogen atom examples include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom and the like, and a fluorine atom is preferable.
- Examples of the above-mentioned alkyl halide group as a substituent include a group in which a part or all of the hydrogen atom of the above-mentioned alkyl group is substituted with the above-mentioned halogen atom.
- the hetero atom in the divalent linking group containing a hetero atom is an atom other than a carbon atom and a hydrogen atom, and is, for example, an oxygen atom, a nitrogen atom, a sulfur atom, and a halogen atom. And so on.
- divalent hydrocarbon group include the same as the divalent hydrocarbon group which may have the above-mentioned substituent, and a linear or branched aliphatic hydrocarbon group is preferable. ..
- the number of carbon atoms of the substituent is preferably 1 or more and 10 or less, more preferably 1 or more and 8 or less, and particularly preferably 1 or more and 5 or less.
- divalent linking group in R 12b a linear or branched alkylene group, a cyclic aliphatic hydrocarbon group, or a divalent linking group containing a heteroatom is particularly preferable.
- the divalent linking group in R 12b is a linear or branched alkylene group
- the number of carbon atoms of the alkylene group is preferably 1 or more and 10 or less, more preferably 1 or more and 6 or less, and 1 or more and 4 or less. Is particularly preferable, and 1 or more and 3 or less are most preferable.
- divalent hydrocarbon group which may have a substituent it is mentioned as a linear or branched aliphatic hydrocarbon group. Examples thereof include a linear alkylene group and a branched alkylene group.
- the cyclic aliphatic hydrocarbon group may have a "substituent" as the above-mentioned divalent linking group.
- divalent hydrocarbon group the same group as the cyclic aliphatic hydrocarbon group mentioned as “aliphatic hydrocarbon group containing a ring in the structure" can be mentioned.
- cyclic aliphatic hydrocarbon group a group in which two or more hydrogen atoms are removed from cyclopentane, cyclohexane, norbornane, isobornane, adamantane, tricyclodecane, or tetracyclododecane is particularly preferable.
- the divalent linking group in R 12b is a divalent linking group containing a hetero atom
- the hydrogen atom in -NH- may be substituted with a substituent such as an alkyl group or an acyl.
- the number of carbon atoms of the substituent is preferably 1 or more and 10 or less, more preferably 1 or more and 8 or less, and particularly preferably 1 or more and 5 or less.
- Y 1 and Y 2 are divalent hydrocarbon groups that may independently have a substituent.
- Examples of the divalent hydrocarbon group include the same as the "divalent hydrocarbon group which may have a substituent" mentioned in the description as the divalent linking group.
- a linear aliphatic hydrocarbon group is preferable, a linear alkylene group is more preferable, a linear alkylene group having 1 or more carbon atoms and 5 or less carbon atoms is more preferable, and a methylene group and ethylene are preferable. Groups are particularly preferred.
- a linear or branched aliphatic hydrocarbon group is preferable, and a methylene group, an ethylene group, and an alkyl methylene group are more preferable.
- the alkyl group in the alkylmethylene group is preferably a linear alkyl group having 1 or more and 5 or less carbon atoms, more preferably a linear alkyl group having 1 or more and 3 or less carbon atoms, and particularly preferably a methyl group.
- a' is an integer of 1 or more and 10 or less, preferably an integer of 1 or more and 8 or less, more preferably 1 or more and 5 or less, further preferably 1 or 2, and most preferably 1.
- b' is an integer of 1 or more and 10 or less, preferably an integer of 1 or more and 8 or less, more preferably an integer of 1 or more and 5 or less, still more preferably 1 or 2, and most preferably 1.
- the divalent linking group in R 12b as the divalent linking group containing a hetero atom, an organic group composed of a combination of at least one non-hydrocarbon group and a divalent hydrocarbon group is preferable.
- -O] A group represented by m' -Y 2- or -Y 1 -OC ( O) -Y 2- is particularly preferable.
- the alkylene group is preferably a linear or branched alkylene group.
- Suitable examples of the linear aliphatic hydrocarbon group include methylene group [-CH 2- ], ethylene group [-(CH 2 ) 2- ], trimethylene group [-(CH 2 ) 3- ], Examples thereof include a tetramethylene group [-(CH 2 ) 4- ], a pentamethylene group [-(CH 2 ) 5- ], and the like.
- Suitable examples of this branched alkylene group are -CH (CH 3 )-, -CH (CH 2 CH 3 )-, -C (CH 3 ) 2- , -C (CH 3 ) (CH 2 ).
- Alkylmethylene groups such as CH 3 )-, -C (CH 3 ) (CH 2 CH 2 CH 3 )-, -C (CH 2 CH 3 ) 2- , etc .; -CH (CH 3 ) CH 2- , -CH ( Alkylene ethylene such as CH 3 ) CH (CH 3 )-,-C (CH 3 ) 2 CH 2- , -CH (CH 2 CH 3 ) CH 2- , -C (CH 2 CH 3 ) 2 -CH 2- , etc. Group; -CH (CH 3 ) CH 2 CH 2- , -CH 2 CH (CH 3 ) CH 2- , etc.
- Alkyltrimethylene group -CH (CH 3 ) CH 2 CH 2 CH 2- , -CH 2 CH (CH 3 ) CH 2
- An alkyl alkylene group such as an alkyl tetramethylene group such as CH 2- or the like can be mentioned.
- the structural unit (b-3-S) is preferably a structural unit represented by the following formula (b-S1-1).
- R and R 11b are the same as described above, and R 13b is a divalent linking group.
- the R 13b is not particularly limited, and examples thereof include the same as the above-mentioned divalent linking group in R 12b .
- the divalent linking group of R 13b a linear or branched alkylene group, an aliphatic hydrocarbon group containing a ring in the structure, or a divalent linking group containing a hetero atom is preferable, and the divalent linking group is linear.
- a branched alkylene group or a divalent linking group containing an oxygen atom as a hetero atom is preferable.
- linear alkylene group a methylene group or an ethylene group is preferable, and a methylene group is particularly preferable.
- branched alkylene group an alkylmethylene group or an alkylethylene group is preferable, and -CH (CH 3 )-, -C (CH 3 ) 2- , or -C (CH 3 ) 2 CH 2- is particularly preferable. preferable.
- Y 1 and Y 2 are divalent hydrocarbon groups that may independently have substituents, and m'is an integer of 0 or more and 3 or less.
- c is an integer of 1 or more and 5 or less, preferably 1 or 2.
- d is an integer of 1 or more and 5 or less, preferably 1 or 2.
- a structural unit represented by the following formula (b-S1-11) or (b-S1-12) is particularly preferable, and the structural unit (b-S1-12) is used.
- the structural unit represented is more preferable.
- A' preferably is a methylene group, an oxygen atom (-O-), or a sulfur atom (-S-).
- a linear or branched alkylene group or a divalent linking group containing an oxygen atom is preferable.
- the linear or branched alkylene group and the divalent linking group containing an oxygen atom in R 13b include the above-mentioned linear or branched alkylene group and a divalent linking group containing an oxygen atom, respectively. The same can be mentioned.
- the structural unit represented by the formula (b-S1-12) As the structural unit represented by the formula (b-S1-12), the structural unit represented by the following formula (b-S1-12a) or (b-S1-12b) is particularly preferable.
- Constuent unit (b-3-L) Examples of the structural unit (b-3-L) include those in which R 11b in the above-mentioned formula (b-S1) is replaced with a lactone-containing cyclic group, and more specifically, the following formula (b) Examples thereof include structural units represented by b-L1) to (b-L5).
- R is a hydrogen atom, an alkyl group having 1 or more and 5 or less carbon atoms, or an alkyl halide group having 1 or more and 5 or less carbon atoms; R'is an independent hydrogen atom, an alkyl group and an alkoxy group, respectively.
- R is a hydrogen atom or alkyl group
- R 12b is a single bond or It is a divalent linking group, where s "is an integer of 0 or more and 2 or less
- A is an alkylene group having 1 or more and 5 or less carbon atoms which may contain an oxygen atom or a sulfur atom, an oxygen atom, or sulfur. It is an atom; r is 0 or 1.
- R in the formulas (b-L1) to (b-L5) is the same as described above.
- R' a hydrogen atom is preferable in consideration of industrial availability and the like.
- the alkyl group in “R” may be linear, branched or cyclic.
- the number of carbon atoms is preferably 1 or more and 10 or less, and more preferably 1 or more and 5 or less.
- R "is a cyclic alkyl group the number of carbon atoms is preferably 3 or more and 15 or less, more preferably 4 or more and 12 or less, and most preferably 5 or more and 10 or less.
- one or more polycycloalkanes such as monocycloalkane, bicycloalkane, tricycloalkane, and tetracycloalkane which may or may not be substituted with a fluorine atom or a fluorinated alkyl group.
- examples thereof include groups excluding hydrogen atoms.
- one or more monocycloalkanes such as cyclopentane and cyclohexane, and polycycloalkanes such as adamantan, norbornan, isobornane, tricyclodecane and tetracyclododecane. Examples include groups excluding hydrogen atoms.
- A is an alkylene group having 1 or more carbon atoms and 5 or less carbon atoms, an oxygen atom (—O—) or a sulfur atom. It is preferably (—S—), and more preferably an alkylene group having 1 or more and 5 or less carbon atoms, or —O—.
- a methylene group or a dimethylmethylene group is more preferable, and a methylene group is most preferable.
- R 12b is the same as R 12b in the above formula (b-S1).
- s is preferably 1 or 2.
- R ⁇ represents a hydrogen atom, a methyl group, or a trifluoromethyl group.
- the structural unit (b-3-L) at least one selected from the group consisting of the structural units represented by the above-mentioned formulas (b-L1) to (b-L5) is preferable, and the structural unit (b-L1) is preferably one.
- )-(B-L3) at least one selected from the group consisting of the structural units represented by the above-mentioned formula (b-L1) or (b-L3) is more preferable.
- At least one selected from the group is particularly preferred.
- the above-mentioned formulas (b-L1-1), (b-L1-2), (b-L2-1), (b-L2-7), (b-L2-12), (b-L2). -14), (b-L3-1), and at least one selected from the group consisting of the structural units represented by (b-L3-5) are preferable.
- the structural unit (b-3-L) the structural unit represented by the following formulas (b-L6) to (b-L7) is also preferable.
- R and R 12b are the same as described above.
- the acrylic resin (B3) is a structural unit represented by the following formulas (b5) to (b7) having an acid dissociating group as a structural unit that enhances the solubility of the acrylic resin (B3) in an alkali by the action of an acid. including.
- R 14b and R 18b to R 23b are independently hydrogen atoms, linear or branched alkyl groups having 1 or more and 6 or less carbon atoms, fluorine atoms, or fluorine atoms, respectively.
- R15b to R17b are independently linear or branched alkyl groups having 1 or more and 6 or less carbon atoms.
- It represents a linear or branched fluorinated alkyl group having 1 or more and 6 or less carbon atoms, or an alicyclic group having 5 or more and 20 or less carbon atoms, and R 16b and R 17b are bonded to each other, and both of them are bonded to each other.
- a hydrocarbon ring having 5 or more and 20 or less carbon atoms may be formed together with the bonded carbon atom, and Y b represents an aliphatic cyclic group or an alkyl group which may have a substituent, and p.
- linear or branched alkyl group examples include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, a neopentyl group and the like.
- the fluorinated alkyl group is one in which a part or all of the hydrogen atom of the above alkyl group is substituted with a fluorine atom.
- aliphatic cyclic group examples include groups obtained by removing one or more hydrogen atoms from polycycloalkanes such as monocycloalkanes, bicycloalkanes, tricycloalkanes, and tetracycloalkanes.
- a group obtained by removing one hydrogen atom from monocycloalkanes such as cyclopentane, cyclohexane, cycloheptane, and cyclooctane
- polycycloalkanes such as adamantan, norbornane, isobornane, tricyclodecane, and tetracyclododecane.
- a group obtained by removing one hydrogen atom from cyclohexane or adamantane (which may further have a substituent) is preferable.
- the carbon atoms of the R 15b , R 16b , and R 17b are high in contrast and have good resolution, focal depth width, and the like. It is preferably a linear or branched alkyl group having a number of 1 or more and 4 or less, and more preferably a linear or branched alkyl group having 2 or more and 4 or less carbon atoms.
- the R 19b , R 20b , R 22b , and R 23b are preferably hydrogen atoms or methyl groups.
- R 16b and R 17b may form an aliphatic cyclic group having 5 or more and 20 or less carbon atoms together with the carbon atom to which both are bonded.
- Specific examples of such an aliphatic cyclic group include groups obtained by removing one or more hydrogen atoms from polycycloalkanes such as monocycloalkanes, bicycloalkanes, tricycloalkanes, and tetracycloalkanes.
- one or more hydrogen atoms were removed from monocycloalkanes such as cyclopentane, cyclohexane, cycloheptane, and cyclooctane, and polycycloalkanes such as adamantan, norbornane, isobornane, tricyclodecane, and tetracyclododecane.
- monocycloalkanes such as cyclopentane, cyclohexane, cycloheptane, and cyclooctane
- polycycloalkanes such as adamantan, norbornane, isobornane, tricyclodecane, and tetracyclododecane.
- the group is mentioned.
- a group obtained by removing one or more hydrogen atoms from cyclohexane or adamantane (which may further have a substituent) is preferable.
- the Y b is an aliphatic cyclic group or an alkyl group, and examples thereof include groups obtained by removing one or more hydrogen atoms from polycycloalkanes such as monocycloalkanes, bicycloalkanes, tricycloalkanes, and tetracycloalkanes. .. Specifically, one or more hydrogen atoms were removed from monocycloalkanes such as cyclopentane, cyclohexane, cycloheptane, and cyclooctane, and polycycloalkanes such as adamantan, norbornane, isobornane, tricyclodecane, and tetracyclododecane. The basis etc. can be mentioned. In particular, a group obtained by removing one or more hydrogen atoms from adamantane (which may further have a substituent) is preferable.
- Y b is an alkyl group
- it is preferably a linear or branched alkyl group having 1 or more and 20 or less carbon atoms, preferably 6 or more and 15 or less.
- Such an alkyl group is particularly preferably an alkoxyalkyl group, and examples of such an alkoxyalkyl group include 1-methoxyethyl group, 1-ethoxyethyl group, 1-n-propoxyethyl group, and 1-isopropoxy.
- Ethyl group 1-n-butoxyethyl group, 1-isobutoxyethyl group, 1-tert-butoxyethyl group, 1-methoxypropyl group, 1-ethoxypropyl group, 1-methoxy-1-methyl-ethyl group, 1 -Ethyl-1-methylethyl group and the like can be mentioned.
- R 24b represents a hydrogen atom or a methyl group.
- R 24b represents a hydrogen atom or a methyl group.
- R 24b represents a hydrogen atom or a methyl group.
- the structural unit represented by the formula (b6) is preferable from the viewpoint of easy synthesis and relatively high sensitivity. Further, among the structural units represented by the formula (b6), a structural unit in which Y b is an alkyl group is preferable, and a structural unit in which one or both of R 19b and R 20b is an alkyl group is preferable.
- the acrylic resin (B3) is a resin composed of a copolymer containing the structural units represented by the above formulas (b5) to (b7) and the structural units derived from the polymerizable compound having an ether bond. Is preferable.
- Examples of the polymerizable compound having an ether bond include a radically polymerizable compound such as a (meth) acrylic acid derivative having an ether bond and an ester bond, and specific examples thereof include 2-methoxyethyl (meth) acrylate.
- 2-ethoxyethyl (meth) acrylate methoxytriethylene glycol (meth) acrylate, 3-methoxybutyl (meth) acrylate, ethylcarbitol (meth) acrylate, phenoxypolyethylene glycol (meth) acrylate, methoxypolyethylene glycol (meth) Examples thereof include acrylate, methoxypolypropylene glycol (meth) acrylate, and tetrahydrofurfuryl (meth) acrylate.
- the polymerizable compound having an ether bond is preferably 2-methoxyethyl (meth) acrylate, 2-ethoxyethyl (meth) acrylate, or methoxytriethylene glycol (meth) acrylate. These polymerizable compounds may be used alone or in combination of two or more.
- the acrylic resin (B3) can contain other polymerizable compounds as a constituent unit for the purpose of appropriately controlling the physical and chemical properties.
- examples of such a polymerizable compound include known radically polymerizable compounds and anionic polymerizable compounds.
- polymerizable compounds examples include monocarboxylic acids such as acrylic acid, methacrylic acid and crotonic acid; dicarboxylic acids such as maleic acid, fumaric acid and itaconic acid; 2-methacryloyloxyethyl succinic acid and 2-methacryloyloxy.
- Methacrylic acid derivatives having carboxy groups and ester bonds such as ethylmaleic acid, 2-methacryloyloxyethylphthalic acid, 2-methacryloyloxyethylhexahydrophthalic acid; methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth).
- (Meth) acrylic acid alkyl esters such as acrylates and cyclohexyl (meth) acrylates; (meth) acrylic acid hydroxyalkyl esters such as 2-hydroxyethyl (meth) acrylates and 2-hydroxypropyl (meth) acrylates; phenyl ( (Meta) acrylic acid aryl esters such as meth) acrylates and benzyl (meth) acrylates; dicarboxylic acid diesters such as diethyl maleate and dibutyl fumarate; styrene, ⁇ -methylstyrene, chlorostyrene, chloromethylstyrene, vinyltoluene , Hydroxystyrene, ⁇ -methylhydroxystyrene, ⁇ -ethylhydroxystyrene and other vinyl group-containing aromatic compounds; vinyl acetate and other vinyl group-containing aliphatic compounds; butadiene, isoprene and other conjugated diolefin
- the acrylic resin (B3) may contain a structural unit derived from a polymerizable compound having a carboxy group, such as the monocarboxylic acids and dicarboxylic acids described above.
- the ratio of the structural units derived from the polymerizable compound having a carboxy group in the acrylic resin (B3) is determined from the viewpoint that it is easy to form a resist pattern including a non-resist portion which is a rectangular shape having a better cross-sectional shape. It is preferably less than 20% by mass, more preferably 0.1% by mass or more and 15% by mass or less, and particularly preferably 1% by mass or more and 10% by mass or less.
- examples of the polymerizable compound include vinyl group-containing aromatic compounds and the like.
- the acrylic resin (B3) contains a structural unit (b-3) containing a ⁇ SO2 -containing cyclic group or a lactone-containing cyclic group, the structural unit (b-3) in the acrylic resin (B3).
- the content is preferably 5% by mass or more, more preferably 10% by mass or more, particularly preferably 10% by mass or more and 50% by mass or less, and most preferably 10% by mass or more and 30% by mass or less.
- the photosensitive composition contains a structural unit (b-3) in an amount within the above range, it is easy to achieve both good developability and good pattern shape.
- the acrylic resin (B3) does not have to contain the —SO2 -containing cyclic group or the structural unit (b-3) containing the lactone-containing cyclic group.
- the acrylic resin (B3) preferably contains 5% by mass or more of the structural units represented by the above formulas (b5) to (b7), more preferably 10% by mass or more, and 10% by mass or more. It is particularly preferable to contain 50% by mass or less. Further, the acrylic resin (B3) preferably contains the structural unit represented by the above formula (b6) in an amount of 0.1% by mass or more and 30% by mass or less, and more preferably 1% by mass or more and 20% by mass or less. It is preferable, and it is particularly preferable to contain 5% by mass or more and 10% by mass or less.
- the acrylic resin (B3) preferably contains a structural unit derived from the above-mentioned polymerizable compound having an ether bond.
- the content of the structural unit derived from the polymerizable compound having an ether bond in the acrylic resin (B3) is preferably 0% by mass or more and 50% by mass or less, more preferably 5% by mass or more and 40% by mass or less, and 5% by mass. % Or more and 30% by mass or less are more preferable.
- acrylic resins other than the acrylic resin (B3) described above can also be used as the resin (B).
- the acrylic resin other than the acrylic resin (B3) is not particularly limited as long as it is a resin containing the structural units represented by the above-mentioned formulas (b5) to (b7).
- the polystyrene-equivalent mass average molecular weight of the resin (B) described above is preferably 10,000 or more and 600,000 or less, more preferably 20,000 or more and 400,000 or less, and further preferably 30,000 or more and 300,000 or less.
- the dispersity of the resin (B) is preferably 1.05 or more.
- the degree of dispersion is a value obtained by dividing the mass average molecular weight by the number average molecular weight. By setting such a degree of dispersion, it is possible to avoid problems such as stress resistance to the desired plating and the tendency of the metal layer obtained by the plating treatment to swell.
- the content of the resin (B) is preferably 5% by mass or more and 60% by mass or less with respect to the total mass of the photosensitive composition.
- the content of the resin (B) is preferably 5% by mass or more and 99% by mass or less, and more preferably 50% by mass or more and 99% by mass or less, based on the total solid content mass of the photosensitive composition. preferable.
- the photosensitive composition preferably further contains an acid diffusion inhibitor (C) in order to improve the shape of the resist pattern, the retention stability of the photosensitive resin film, and the like.
- an acid diffusion inhibitor (C) a nitrogen-containing compound (C1) is preferable, and if necessary, an organic carboxylic acid, or a phosphorus oxo acid or a derivative thereof (C2) can be contained.
- nitrogen-containing compound (C1) examples include trimethylamine, diethylamine, triethylamine, di-n-propylamine, tri-n-propylamine, tri-n-pentylamine, tribenzylamine, diethanolamine, triethanolamine and n-hexylamine.
- hindered amine compounds such as -87 (all manufactured by ADEKA) and 4-hydroxy-1,2,2,6,6-pentamethylpiperidine derivatives, 2,6-diphenylpyridine, and 2,6- Pyridine in which the 2,6-position of di-tert-butylpyridine or the like is substituted with a substituent such as a hydrocarbon group can also be used as the nitrogen-containing compound (C1).
- the nitrogen-containing compound (C1) is usually used in a range of 0 parts by mass or more and 5 parts by mass or less with respect to 100 parts by mass of the total mass of the resin (B) and the alkali-soluble resin (D) below, and is 0 parts by mass or more. It is particularly preferable to use it in the range of 3 parts by mass or less.
- Organic carboxylic acid, or phosphorus oxo acid or its derivative (C2)
- organic carboxylic acids phosphorus oxo acids or derivatives thereof (C2)
- malonic acid citric acid, malic acid, succinic acid, benzoic acid, salicylic acid and the like
- succinic acid succinic acid
- salicylic acid and the like are suitable as the organic carboxylic acid.
- Particularly salicylic acid is preferred.
- Phosphoric oxo acids or derivatives thereof include phosphoric acids such as phosphoric acid, di-n-butyl ester of phosphoric acid, diphenyl ester of phosphoric acid and derivatives thereof; phosphonic acid, dimethyl phosphonic acid ester, phosphonic acid- Phosphonic acids such as di-n-butyl ester, phenylphosphonic acid, phosphonic acid diphenyl ester, phosphonic acid dibenzyl ester and derivatives such as their esters; like phosphinic acid such as phosphinic acid, phenylphosphinic acid and their esters. Derivatives; etc. Of these, phosphonic acid is particularly preferable. These may be used alone or in combination of two or more.
- the organic carboxylic acid, or the oxo acid of phosphorus or a derivative thereof (C2) is usually 0 parts by mass or more and 5 parts by mass or less with respect to the total mass of 100 parts by mass of the resin (B) and the following alkali-soluble resin (D). It is used in a range, and it is particularly preferable to use it in a range of 0 parts by mass or more and 3 parts by mass or less.
- an organic carboxylic acid, or a phosphorus oxo acid or a derivative thereof (C2) in the same amount as the nitrogen-containing compound (C1).
- the photosensitive composition may not contain the alkali-soluble resin (D), but is preferably further contained in the alkali-soluble resin (D) in order to improve crack resistance.
- the alkali-soluble resin is a resin solution having a resin concentration of 20% by mass (solvent: propylene glycol monomethyl ether acetate) to form a resin film having a thickness of 1 ⁇ m on a substrate to form a 2.38% by mass TMAH aqueous solution.
- solvent propylene glycol monomethyl ether acetate
- the alkali-soluble resin (D) does not have an acid dissociative group.
- the alkali-soluble resin (D) is preferably at least one resin selected from the group consisting of novolak resin (D1), polyhydroxystyrene resin (D2), and acrylic resin (D3).
- Novolak resin (D1) The novolak resin is obtained, for example, by adding and condensing an aromatic compound having a phenolic hydroxyl group (hereinafter, simply referred to as "phenols”) and aldehydes under an acid catalyst.
- phenols an aromatic compound having a phenolic hydroxyl group
- aldehydes aldehydes
- phenols examples include phenol, o-cresol, m-cresol, p-cresol, o-ethylphenol, m-ethylphenol, p-ethylphenol, o-butylphenol, m-butylphenol, p-butylphenol, 2 , 3-Xylenol, 2,4-Xylenol, 2,5-Xylenol, 2,6-Xylenol, 3,4-Xylenol, 3,5-Xylenol, 2,3,5-trimethylphenol, 3,4,5- Examples thereof include trimethylphenol, p-phenylphenol, resorcinol, hydroquinone, hydroquinone monomethyl ether, pyrogallol, fluoroxylenol, hydroxydiphenyl, bisphenol A, gallic acid, gallic acid ester, ⁇ -naphthol, ⁇ -naphthol and the like.
- aldehydes examples include formaldehyde, furfural, benzaldehyde, nitrobenzaldehyde, acetaldehyde and the like.
- the catalyst at the time of the addition condensation reaction is not particularly limited, but for example, hydrochloric acid, nitric acid, sulfuric acid, formic acid, oxalic acid, acetic acid and the like are used as the acid catalyst.
- the mass average molecular weight of the novolak resin (D1) is not particularly limited as long as it does not impair the object of the present invention, but is preferably 1000 or more and 50,000 or less.
- Polyhydroxystyrene resin (D2) examples of the hydroxystyrene-based compound constituting the polyhydroxystyrene resin (D2) include p-hydroxystyrene, ⁇ -methylhydroxystyrene, ⁇ -ethylhydroxystyrene and the like. Further, the polyhydroxystyrene resin (D2) is preferably a copolymer with the styrene resin. Examples of the styrene-based compound constituting such a styrene resin include styrene, chlorostyrene, chloromethylstyrene, vinyltoluene, ⁇ -methylstyrene and the like.
- the mass average molecular weight of the polyhydroxystyrene resin (D2) is not particularly limited as long as it does not impair the object of the present invention, but is preferably 1000 or more and 50,000 or less.
- the acrylic resin (D3) preferably contains a structural unit derived from a polymerizable compound having an ether bond and a structural unit derived from a polymerizable compound having a carboxy group.
- Examples of the polymerizable compound having an ether bond include 2-methoxyethyl (meth) acrylate, methoxytriethylene glycol (meth) acrylate, 3-methoxybutyl (meth) acrylate, ethylcarbitol (meth) acrylate, and phenoxypolyethylene glycol (.
- Examples thereof include (meth) acrylic acid derivatives having ether bonds and ester bonds such as meth) acrylates, methoxypolypropylene glycol (meth) acrylates, and tetrahydrofurfuryl (meth) acrylates.
- the polymerizable compound having an ether bond is preferably 2-methoxyethyl acrylate or methoxytriethylene glycol acrylate. These polymerizable compounds may be used alone or in combination of two or more.
- Examples of the polymerizable compound having a carboxy group include monocarboxylic acids such as acrylic acid, methacrylic acid and crotonic acid; dicarboxylic acids such as maleic acid, fumaric acid and itaconic acid; 2-methacryloyloxyethyl succinic acid and 2-methacryloyloxy.
- Examples of compounds having a carboxy group and an ester bond such as ethylmaleic acid, 2-methacryloyloxyethylphthalic acid, 2-methacryloyloxyethylhexahydrophthalic acid; and the like can be exemplified.
- the polymerizable compound having a carboxy group is preferably acrylic acid or methacrylic acid. These polymerizable compounds may be used alone or in combination of two or more.
- the mass average molecular weight of the acrylic resin (D3) is not particularly limited as long as it does not impair the object of the present invention, but is preferably 50,000 or more and 800,000 or less.
- the content of the alkali-soluble resin (D) is preferably 0 parts by mass or more and 80 parts by mass or less, preferably 0 parts by mass or more and 60 parts by mass when the total of the above resin (B) and the alkali-soluble resin (D) is 100 parts by mass. More preferably, it is by mass or less.
- the photosensitive composition preferably contains a sulfur-containing compound (E).
- the sulfur-containing compound (E) is a compound containing a sulfur atom that can coordinate with a metal.
- a compound capable of producing two or more tautomers when at least one tautomer contains a sulfur atom coordinated with a metal constituting the surface of a metal substrate, the compound is a sulfur-containing compound. Applicable. When a resist pattern used as a plating mold is formed on a surface made of a metal such as Cu, defects in the cross-sectional shape such as footing are likely to occur.
- the photosensitive composition contains the sulfur-containing compound (E), it is easy to suppress the occurrence of defects in the cross-sectional shape such as footing even when the resist pattern is formed on the metal surface of the substrate.
- footing is a phenomenon in which the width of the bottom is narrower than the width of the top in the non-resist portion because the resist portion projects toward the non-resist portion near the contact surface between the substrate surface and the resist pattern. Is.
- a photosensitive dry film composed of a photosensitive composition is used for pattern formation on a substrate other than a metal substrate, it is not particularly necessary for the photosensitive composition to contain a sulfur-containing compound.
- the photosensitive dry film composed of a photosensitive composition When a photosensitive dry film composed of a photosensitive composition is used for pattern formation on a substrate other than a metal substrate, the reduction in the number of components of the photosensitive composition facilitates the production of the photosensitive composition. Further, it is preferable that the photosensitive composition does not contain the sulfur-containing compound (E) from the viewpoint of reducing the production cost of the photosensitive composition. It should be noted that there is no particular problem due to the fact that the photosensitive dry film composed of the photosensitive composition used for pattern formation on a substrate other than the metal substrate contains the sulfur-containing compound (E).
- Sulfur atoms that can coordinate with a metal are, for example, a mercapto group (-SH), a thiocarboxy group (-CO-SH), a dithiocarboxy group (-CS-SH), and a thiocarbonyl group (-CS-). It is contained in sulfur-containing compounds as such. It is preferable that the sulfur-containing compound has a mercapto group because it is easy to coordinate with a metal and has an excellent effect of suppressing footing.
- Preferred examples of the sulfur-containing compound having a mercapto group include a compound represented by the following formula (e1).
- R e1 and R e2 each independently represent a hydrogen atom or an alkyl group
- R e3 represents a single bond or an alkylene group
- R e4 is a u-valent fat which may contain an atom other than carbon. Indicates a family group, and u indicates an integer of 2 or more and 4 or less.
- R e1 and R e2 are alkyl groups
- the alkyl groups may be linear or branched, and are preferably linear.
- the number of carbon atoms of the alkyl group is not particularly limited as long as the object of the present invention is not impaired.
- the number of carbon atoms of the alkyl group is preferably 1 or more and 4 or less, particularly preferably 1 or 2, and most preferably 1.
- R e3 is an alkylene group
- the alkylene group may be linear or branched chain, and it is preferable that the alkylene group is linear.
- Re 3 is an alkylene group
- the number of carbon atoms of the alkylene group is not particularly limited as long as it does not impair the object of the present invention.
- the number of carbon atoms of the alkylene group is preferably 1 or more and 10 or less, more preferably 1 or more and 5 or less, particularly preferably 1 or 2, and most preferably 1.
- R e4 is an aliphatic group having a divalent value or more and a tetravalence or less, which may contain an atom other than carbon.
- the atom other than carbon that R e4 may contain include a nitrogen atom, an oxygen atom, a sulfur atom, a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
- the structure of the aliphatic group of R e4 may be linear, branched chain, cyclic, or a combination of these structures.
- mercapto compounds represented by the above formulas (e3-L1) to (e3-L7) include the following compounds.
- mercapto compounds represented by the above formulas (e3-1) to (e3-4) include the following compounds.
- a suitable example of a compound having a mercapto group includes a compound represented by the following formula (e4).
- R e5 is a hydroxyl group, an alkyl group having 1 or more and 4 or less carbon atoms, an alkoxy group having 1 or more and 4 or less carbon atoms, an alkylthio group having 1 or more and 4 or less carbon atoms, and 1 or more carbon atoms and 4 or less.
- n1 is an integer of 0 or more and 3 or less.
- Re5 may be the same or different.
- R e5 is an alkyl group having 1 to 4 carbon atoms and may have a hydroxyl group
- R e5 is an alkyl group having 1 to 4 carbon atoms and may have a hydroxyl group
- R e5 is an alkyl group having 1 to 4 carbon atoms and may have a hydroxyl group
- Groups include groups, sec-butyl groups, and tert-butyl groups.
- alkyl groups a methyl group, a hydroxymethyl group, and an ethyl group are preferable.
- R e5 is an alkoxy group having 1 or more carbon atoms and 4 or less carbon atoms
- R e5 is an alkoxy group having 1 or more carbon atoms and 4 or less carbon atoms
- R e5 is an alkoxy group having 1 or more carbon atoms and 4 or less carbon atoms
- R e5 is an alkoxy group having 1 or more carbon atoms and 4 or less carbon atoms
- R e5 is an alkoxy group having 1 or more carbon atoms and 4 or less carbon atoms
- R e5 is an alkoxy group having 1 or more carbon atoms and 4 or less carbon atoms
- R e5 is an alkoxy group having 1 or more carbon atoms and 4 or less carbon atoms
- R e5 is an alkoxy group having 1 or more carbon atoms and 4 or less carbon atoms
- R e5 is an alkoxy group having 1 or more carbon atoms and 4 or less carbon atoms
- R e5 is an alkylthio group having 1 or more carbon atoms and 4 or less carbon atoms
- R e5 is an alkylthio group having 1 or more carbon atoms and 4 or less carbon atoms
- R e5 is an alkylthio group having 1 or more carbon atoms and 4 or less carbon atoms
- R e5 is an alkylthio group having 1 or more carbon atoms and 4 or less carbon atoms
- R e5 is an alkylthio group having 1 or more carbon atoms and 4 or less carbon atoms
- a methylthio group an ethylthio group, an n-propylthio group, an isopropylthio group, an n-butylthio group, an isobutylthio group and a sec-butylthio group.
- tert-butylthio groups Among these alkylthio groups, a methylthio group and an eth
- R e5 is a hydroxyalkyl group having 1 or more carbon atoms and 4 or less carbon atoms
- R e5 is a hydroxyalkyl group having 1 or more carbon atoms and 4 or less carbon atoms
- a hydroxymethyl group a 2-hydroxyethyl group, a 1-hydroxyethyl group, a 3-hydroxy-n-propyl group, and 4 -Hydroxy-n-butyl group and the like can be mentioned.
- hydroxyalkyl groups a hydroxymethyl group, a 2-hydroxyethyl group, and a 1-hydroxyethyl group are preferable, and a hydroxymethyl group is more preferable.
- R e5 is a mercaptoalkyl group having 1 or more carbon atoms and 4 or less carbon atoms
- R e5 is a mercaptoalkyl group having 1 or more carbon atoms and 4 or less carbon atoms
- R e5 is a mercaptoalkyl group having 1 or more carbon atoms and 4 or less carbon atoms
- a mercaptomethyl group a 2-mercaptoethyl group, a 1-mercaptoethyl group, a 3-mercapto-n-propyl group, and 4 -Mercapto-n-butyl group and the like
- mercaptoalkyl groups a mercaptomethyl group, a 2-mercaptoethyl group, and a 1-mercaptoethyl group are preferable, and a mercaptomethyl group is more preferable.
- R e5 is an alkyl halide group having 1 or more and 4 or less carbon atoms
- examples of the halogen atom contained in the alkyl halide group include fluorine, chlorine, bromine, and iodine.
- Specific examples of the case where R e5 is an alkyl halide group having 1 or more carbon atoms and 4 or less carbon atoms include a chloromethyl group, a bromomethyl group, an iodomethyl group, a fluoromethyl group, a dichloromethyl group, a dibromomethyl group, and a difluoromethyl group.
- Trichloromethyl group tribromomethyl group, trifluoromethyl group, 2-chloroethyl group, 2-bromoethyl group, 2-fluoroethyl group, 1,2-dichloroethyl group, 2,2-difluoroethyl group, 1-chloro- Examples thereof include 2-fluoroethyl group, 3-chloro-n-propyl group, 3-bromo-n-propyl group, 3-fluoro-n-propyl group, 4-chloro-n-butyl group and the like.
- chloromethyl group, bromomethyl group, iodomethyl group, fluoromethyl group, dichloromethyl group, dibromomethyl group, difluoromethyl group, trichloromethyl group, tribromomethyl group, and trifluoromethyl group is preferable, and chloromethyl group, dichloromethyl group, trichloromethyl group, and trifluoromethyl group are more preferable.
- R e5 is a halogen atom
- R e5 is a halogen atom
- n1 is an integer of 0 or more and 3 or less, and 1 is more preferable.
- n1 is 2 or 3
- the plurality of Re5s may be the same or different.
- the substitution position of R e5 on the benzene ring is not particularly limited.
- the substitution position of R e5 on the benzene ring is preferably the meta position or the para position with respect to the bond position of-(CH 2 ) n0 -SH.
- the compound represented by the formula (e4) is preferably a compound having at least one group selected from the group consisting of an alkyl group, a hydroxyalkyl group and a mercaptoalkyl group as R e5 , and an alkyl as R e5 .
- a compound having one group selected from the group consisting of a group, a hydroxyalkyl group, and a mercaptoalkyl group is more preferable.
- the compound represented by the formula (e4) has, as R e5 , one group selected from the group consisting of an alkyl group, a hydroxyalkyl group, and a mercaptoalkyl group, an alkyl group, a hydroxyalkyl group, or a mercaptoalkyl group is used.
- the substitution position on the benzene ring of the group is preferably the meta-position or the para-position with respect to the bond position of-(CH 2 ) n0 -SH, and more preferably the para-position.
- n0 is an integer of 0 or more and 3 or less. Since the compound can be easily prepared and obtained, n0 is preferably 0 or 1, and more preferably 0.
- Specific examples of the compound represented by the formula (e4) include p-mercaptophenol, p-thiocresol, m-thiocresol, 4- (methylthio) benzenethiol, 4-methoxybenzenethiol, 3-methoxybenzenethiol, and the like.
- Examples of the sulfur-containing compound having a mercapto group include homovariants of a compound containing a nitrogen-containing aromatic heterocycle substituted with a mercapto group and a compound containing a nitrogen-containing aromatic heterocycle substituted with a mercapto group. Be done.
- nitrogen-containing aromatic heterocycle examples include imidazole, pyrazole, 1,2,3-triazole, 1,2,4-triazole, oxazole, thiazole, pyridine, pyrimidine, pyridazine, pyrazine, 1,2, 3-triazine, 1,2,4-triazine, 1,3,5-triazine, indole, indazole, benzoimidazole, benzoxazole, benzothiazole, 1H-benzotriazole, quinoline, isoquinolin, cinnoline, phthalazine, quinazoline, quinoxalin, And 1,8-naphthylidine.
- Suitable specific examples of the nitrogen-containing heterocyclic compound suitable as the sulfur-containing compound and the tautomer of the nitrogen-containing heterocyclic compound include the following compounds.
- the amount used is 0.01 parts by mass or more and 5 parts by mass with respect to 100 parts by mass of the total mass of the resin (B) and the alkali-soluble resin (D). It is preferably 0.02 parts by mass or more, and more preferably 3 parts by mass or less.
- the photosensitive composition contains an organic solvent (S).
- the organic solvent (S) contains a high boiling point organic solvent (S1) that satisfies the following conditions I) and II).
- the boiling point under atmospheric pressure is 150 ° C. or higher.
- the value of the energy term ⁇ h due to hydrogen bonding with respect to the Hansen solubility parameter is 11 (MPa) 0.5 or less.
- the boiling point of the high boiling point organic solvent (S1) under atmospheric pressure is preferably 230 ° C. or lower, more preferably 220 ° C. or lower, still more preferably 215 ° C. or lower.
- the hydrogen bond energy term ⁇ h with respect to the Hansen solubility parameter can be determined by the software developed by Charles Hansen et al. (Soft name: Hansen Solubility Parameter in Practice (HSPiP)).
- the energy term ⁇ h due to hydrogen bonding is preferably 10.0 (MPa) 0.5 or less, more preferably 9.5 (MPa) 0.5 or less.
- the energy term ⁇ h due to hydrogen bonding is preferably 5.5 (MPa) 0.5 or more.
- the evaporation rate of the high boiling point organic solvent (S1) is not particularly limited, but for example, the relative evaporation rate when the evaporation rate of butyl acetate is 100 is preferably 60 or less, more preferably 40 or less. This relative evaporation rate is determined as the relative rate with respect to the weight loss amount of n-butyl acetate per unit time at a temperature of 25 ° C. and a relative humidity of 55% RH, as specified by ASTM D 3539-87 standard test method. Be done.
- Examples of the high boiling point organic solvent (S1) include anisole, methyl 3-ethoxypropionate, 3-methoxybutyl acetate, cyclohexanol acetate, dipropylene glycol dimethyl ether, and 3-methoxy-3-methyl-1-butyl acetate (Solfit acetate). ), Propylene glycol diacetate, gamma butyrolactone, dipropylene glycol methyl ether acetate, and propylene glycol monobutyl ether.
- the organic solvent (S) may contain an organic solvent other than the high boiling point organic solvent (S1) together with the high boiling point organic solvent (S1).
- the ratio of the mass of the high boiling point organic solvent (S1) to the mass of the organic solvent (S) is preferably 10% by mass or more, more preferably 50% by mass or more, and 90% by mass or more. It is more preferably 100% by mass, and particularly preferably 100% by mass.
- the total content of the organic solvent (S), that is, the mass of the high boiling point organic solvent (S1) and the mass of the organic solvent other than the high boiling point organic solvent (S1) to be contained as necessary is The present invention is not particularly limited as long as it does not impair the object of the present invention.
- the organic solvent (S) is the photosensitive composition.
- the solid content concentration of the above is preferably in the range of 30% by mass or more, more preferably 40% by mass or more.
- the upper limit of the solid content concentration of the photosensitive composition is preferably 60% by mass or less.
- the solid content is a component other than the organic solvent (S) and water.
- the content of the organic solvent (S) in the photosensitive dry film is preferably 10% by mass or more and 25% by mass or less, more preferably 15% by mass or more and 25% by mass, from the viewpoint of the flexibility of the photosensitive dry film. It is as follows.
- the photosensitive composition may further contain a polyvinyl resin in order to improve the plasticity.
- a polyvinyl resin include polyvinyl chloride, polystyrene, polyvinyl acetate, polyvinyl acetate, polyvinyl benzoic acid, polyvinyl methyl ether, polyvinyl ethyl ether, polyvinyl alcohol, polyvinylpyrrolidone, polyvinylphenol, and copolymers thereof.
- the polyvinyl resin is preferably polyvinyl methyl ether because of its low glass transition point.
- the photosensitive composition may contain a Lewis acidic compound. Since the photosensitive composition contains a Lewis acidic compound, it is easy to obtain a highly sensitive photosensitive composition, and a photosensitive dry film composed of the photosensitive composition is used to obtain a resist pattern having a rectangular cross-sectional shape. Easy to form. Further, when a pattern is formed using a photosensitive dry film composed of a photosensitive composition, a desired shape and dimensions are required when the time required for each step at the time of pattern formation and the time required between each step are long. There may be adverse effects such as difficulty in forming the pattern of the above and deterioration of developability. However, by blending the Lewis acidic compound in the photosensitive composition, such an adverse effect on the pattern shape and developability can be alleviated, and the process margin can be widened.
- the Lewis acidic compound means "a compound acting as an electron pair acceptor having an empty orbital capable of receiving at least one electron pair".
- the Lewis acidic compound is not particularly limited as long as it falls under the above definition and is recognized by those skilled in the art as a Lewis acidic compound.
- a compound that does not correspond to Bronsted acid (protonic acid) is preferably used.
- Specific examples of the Lewis acidic compound include boron trifluoride and an ether complex of boron trifluoride (for example, BF 3 ⁇ Et 2 O, BF 3 ⁇ Me 2 O, BF 3 ⁇ THF, etc. Et is an ethyl group and Me.
- THF is tetrahydrofuran
- organic boron compounds eg, tri-n-octyl borate, tri-n-butyl borate, triphenyl borate, and boron triphenylide
- titanium chloride chloride
- Zinc acid manganese chloride, manganese bromide, nickel chloride, nickel bromide, nickel cyanide, nickel acetylacetonate, cadmium chloride, cadmium bromide, stannous chloride, stannous bromide, stannous sulfate, and Examples thereof include stannous tartrate acid.
- Lewis acidic compounds include rare earth metal elements such as chloride, bromide, sulfate, nitrate, carboxylate, or trifluoromethanesulfonate, cobalt chloride, ferrous chloride, and yttrium chloride. Be done.
- rare earth metal element include lanthanum, cerium, praseodymium, neodymium, samarium, europium, gadolinium, terbium, dysprosium, formium, erbium, thulium, ytterbium, and lutetium.
- the Lewis acidic compound preferably contains a Lewis acidic compound containing a Group 13 element of the Periodic Table, because it is easily available and the effect of its addition is good.
- examples of the Group 13 element of the Periodic Table include boron, aluminum, gallium, indium, and thallium.
- boron is preferable because the Lewis acidic compound is easily available and the effect of addition is particularly excellent. That is, it is preferable that the Lewis acidic compound contains a Lewis acidic compound containing boron.
- Examples of the Lewis acidic compound containing boron include boron fluoride, an ether complex of boron fluoride, boron chloride, boron halides such as boron bromide, and various organic boron compounds.
- an organic boron compound is preferable because the content ratio of halogen atoms in the Lewis acidic compound is small and the photosensitive composition can be easily applied to applications requiring a low halogen content.
- R f1 and R f2 are each independently a hydrocarbon group having 1 or more carbon atoms and 20 or less carbon atoms, and the hydrocarbon group may have 1 or more substituents, t1. Is an integer of 0 or more and 3 or less, and when a plurality of R f1s are present, two of the plurality of R f1s may be coupled to each other to form a ring, and when a plurality of OR f2s are present, a plurality of ORs are present. Two of f2 may be combined with each other to form a ring.)
- the boron compound represented by is mentioned.
- the photosensitive composition preferably contains one or more of the boron compounds represented by the above formula (f1) as Lewis acidic compounds.
- R f1 and R f2 are hydrocarbon groups in the formula (f1)
- the number of carbon atoms of the hydrocarbon group is 1 or more and 20 or less.
- the hydrocarbon group having 1 or more and 20 or less carbon atoms may be an aliphatic hydrocarbon group or an aromatic hydrocarbon group, and may be a hydrocarbon group composed of a combination of an aliphatic group and an aromatic group. There may be.
- As the hydrocarbon group having 1 or more and 20 or less carbon atoms a saturated aliphatic hydrocarbon group or an aromatic hydrocarbon group is preferable.
- the number of carbon atoms of the hydrocarbon group as R f1 and R f2 is preferably 1 or more and 10 or less.
- the hydrocarbon group is an aliphatic hydrocarbon group
- the number of carbon atoms thereof is more preferably 1 or more and 6 or less, and particularly preferably 1 or more and 4 or less.
- the hydrocarbon groups as R f1 and R f2 may be saturated hydrocarbon groups or unsaturated hydrocarbon groups, and are preferably saturated hydrocarbon groups.
- the hydrocarbon group as R f1 and R f2 is an aliphatic hydrocarbon group
- the aliphatic hydrocarbon group may be linear, branched, or cyclic. It may be a combination of these structures.
- aromatic hydrocarbon group examples include a phenyl group, a naphthalene-1-yl group, a naphthalene-2-yl group, a 4-phenylphenyl group, a 3-phenylphenyl group, and a 2-phenylphenyl group. Be done. Of these, a phenyl group is preferred.
- the alkyl group is preferable as the saturated aliphatic hydrocarbon group. Suitable specific examples of the alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, sec-butyl group, tert-butyl group, n-pentyl group and n-hexyl. Examples include a group, an n-heptyl group, an n-octyl group, a 2-ethylhexyl group, an n-nonyl group, and an n-decyl group.
- the hydrocarbon groups as R f1 and R f2 may have one or more substituents.
- substituents are halogen atom, hydroxyl group, alkyl group, aralkyl group, alkoxy group, cycloalkyloxy group, aryloxy group, aralkyloxy group, alkylthio group, cycloalkylthio group, arylthio group, aralkylthio group and acyl group.
- organic boron compound represented by the above formula (f1) include the following compounds.
- Pen indicates a pentyl group
- Hex indicates a hexyl group
- Hep indicates a heptyl group
- Oct indicates an octyl group
- Non indicates a nonyl group
- Dec indicates a decyl group.
- the Lewis acidic compound is preferably used in the range of 0.01 parts by mass or more and 5 parts by mass or less with respect to the total mass of 100 parts by mass of the resin (B) and the alkali-soluble resin (D), and more preferably 0. It is used in the range of 0.01 part by mass or more and 3 parts by mass or less, and more preferably 0.05 parts by mass or more and 2 parts by mass or less.
- a photosensitive dry film composed of a photosensitive composition when used for forming a pattern serving as a template for forming a plated model, a template formed by using the photosensitive dry film composed of the photosensitive composition is used.
- the photosensitive composition may further contain an adhesion aid in order to improve the adhesion between the and the metal substrate.
- the photosensitive composition may further contain a surfactant in order to improve coatability, defoaming property, leveling property and the like.
- a surfactant for example, a fluorine-based surfactant or a silicone-based surfactant is preferably used.
- Specific examples of the fluorine-based surfactants include BM-1000, BM-1100 (all manufactured by BM Chemie), Megafuck F142D, Megafuck F172, Megafuck F173, and Megafuck F183 (all manufactured by Dainippon Ink and Chemicals Co., Ltd.).
- Florard FC-135, Florard FC-170C, Florard FC-430, Florard FC-431 all manufactured by Sumitomo 3M
- Surfron S-112, Surfron S-113, Surfron S-131, Surfron S- Commercially available fluorine-based surfactants such as 141, Surflon S-145 (all manufactured by Asahi Glass Co., Ltd.), SH-28PA, SH-190, SH-193, SZ-6032, SF-8428 (all manufactured by Toray Silicone Co., Ltd.)
- fluorine-based surfactants such as 141, Surflon S-145 (all manufactured by Asahi Glass Co., Ltd.), SH-28PA, SH-190, SH-193, SZ-6032, SF-8428 (all manufactured by Toray Silicone Co., Ltd.)
- silicone-based surfactant examples include unmodified silicone-based surfactants, polyether-modified silicone-based surfactants, polyester-modified silicone-based surfactants, alkyl-modified silicone-based surfactants, aralkyl-modified silicone-based surfactants, and aralkyl-based silicone-based surfactants.
- a reactive silicone-based surfactant or the like can be preferably used.
- the silicone-based surfactant a commercially available silicone-based surfactant can be used.
- silicone-based surfactants include Paintad M (manufactured by Toray Dow Corning), Topika K1000, Topika K2000, Topika K5000 (all manufactured by Takachiho Sangyo Co., Ltd.), XL-121 (polyester-modified silicone-based). Examples thereof include surfactants (manufactured by Clariant), BYK-310 (polyester-modified silicone-based surfactants, manufactured by Big Chemie) and the like.
- the photosensitive composition may further contain an acid or an acid anhydride in order to finely adjust the solubility in a developing solution.
- acids and acid anhydrides include monocarboxylic acids such as acetic acid, propionic acid, n-butyric acid, isobutyric acid, n-valeric acid, isovaleric acid, benzoic acid and cinnamon acid; lactic acid, 2-hydroxybutyric acid, Hydroxy monocarboxylates such as 3-hydroxybutyric acid, salicylic acid, m-hydroxybenzoic acid, p-hydroxybenzoic acid, 2-hydroxykatosyl acid, 3-hydroxykatsura acid, 4-hydroxykatsura acid, 5-hydroxyisophthalic acid, syringic acid, etc.
- monocarboxylic acids such as acetic acid, propionic acid, n-butyric acid, isobutyric acid, n-valeric acid, isovaleric acid, benzoic acid and cinnamon acid
- lactic acid, 2-hydroxybutyric acid Hydroxy monocarboxylates such as 3-hydroxybutyric acid, salicylic acid, m-hydroxybenzoic acid, p
- Acids oxalic acid, succinic acid, glutaric acid, adipic acid, maleic acid, itaconic acid, hexahydrophthalic acid, phthalic acid, isophthalic acid, terephthalic acid, 1,2-cyclohexanedicarboxylic acid, 1,2,4-cyclohexanetricarbonate
- Polyvalent carboxylic acids such as acid, butanetetracarboxylic acid, trimellitic acid, pyromellitic acid, cyclopentanetetracarboxylic acid, butanetetracarboxylic acid, 1,2,5,8-naphthalenetetracarboxylic acid; itaconic anhydride, anhydrous Succinic acid, Citraconic anhydride, Dodecenyl succinic acid, Tricarbanyl anhydride, Maleic anhydride, Hexahydrophthalic acid anhydride, Methyltetrahydrophthalic acid anhydride, Hymic acid anhydride,
- the photosensitive composition may further contain a well-known sensitizer in order to improve the sensitivity.
- the above-mentioned photosensitive composition is prepared by mixing and stirring each of the above-mentioned components by a usual method.
- Examples of the device that can be used when mixing and stirring each of the above components include a dissolver, a homogenizer, and a three-roll mill. After uniformly mixing each of the above components, the obtained mixture may be further filtered using a mesh, a membrane filter or the like.
- a configuration derived from the above-mentioned photosensitive composition that is, a (meth) acrylate containing an acid-non-dissociable alicyclic hydrocarbon group-containing group as the resin (B) whose solubility in an alkali is increased by the action of an acid.
- the photosensitive dry of the present invention formed by using a photosensitive composition containing a high boiling point organic solvent (S1) satisfying the above conditions I) and II) as an organic solvent (S) together with an acrylic resin containing a unit (B3a).
- the film contains a structural unit (B3a) derived from a (meth) acrylate containing an acid non-dissociable alicyclic hydrocarbon group-containing group as the resin (B) whose solubility in alkali is increased by the action of an acid.
- the organic solvent (S) contains a high boiling point organic solvent (S1) that satisfies the above conditions I) and II).
- the photosensitive dry film composed of the above-mentioned photosensitive composition suppresses white turbidity and separation due to the contained resin, and is heated (PAB) to remove the solvent. It has the effect of suppressing the residual bubbles generated during the process.
- the photosensitive dry film of the present invention is an acrylic resin (B3) containing a structural unit (B3a) derived from a (meth) acrylate containing an acid non-dissociable alicyclic hydrocarbon group-containing group as the resin (B). ) And the high boiling point organic solvent (S1) satisfying the above conditions I) and II) as the organic solvent (S), the formation of the above hard layer is suppressed, or the hard layer is not formed. Therefore, the bubbles generated when the solvent evaporates by heating (PAB) the photosensitive dry film are easily removed from the photosensitive dry film, and the residual bubbles are suppressed. In addition, the photosensitive dry film containing the above-mentioned components also suppresses white turbidity and separation due to the contained resin.
- the film thickness of the photosensitive dry film is preferably 40 ⁇ m or more and 200 ⁇ m or less, and more preferably 60 ⁇ m or more and 150 ⁇ m or less.
- the content ratio of the organic solvent (S) in the photosensitive dry film is preferably about 10% by mass or more and 25% by mass or less from the viewpoint of the flexibility of the photosensitive dry film.
- the content ratio of the high boiling point organic solvent (S1) to the organic solvent (S) is preferably 50% by mass or more, more preferably 90% by mass or more, and 100% by mass. The above is more preferable.
- the laminated film is a laminated body in which a base film and the above-mentioned photosensitive dry film are laminated.
- the base film preferably has light transmission.
- Specific examples thereof include polyethylene terephthalate (PET) film, polypropylene (PP) film, polyethylene (PE) film, and the like, and polyethylene terephthalate (PET) film is preferable because it has an excellent balance between light transmission and breaking strength.
- Such a laminated film can be obtained by a coating step of applying the above-mentioned chemically amplified positive photosensitive composition on a base film to form a coating film and by heating the coating film to obtain an organic solvent (S). It can be produced by a method for producing a laminated film, which comprises a drying step of forming a photosensitive dry film by removing a part of the film.
- the coating step when the above-mentioned photosensitive composition is applied onto the substrate film to form a coating film, it is preferable to use an applicator, a bar coater, a wire bar coater, a roll coater, a curtain flow coater, or the like. It is difficult to form a thick coating film with a spin coater or the like, but it is easy to form a thick film by using these.
- the coating film is heated to remove a part of the organic solvent (S) to form a photosensitive dry film (photosensitive layer).
- a part of the organic solvent (S) is removed, but a part of the organic solvent (S) remains without being removed. Therefore, the photosensitive dry film (photosensitive layer) has flexibility.
- the heating temperature of the coating film is not particularly limited, and is, for example, 50 ° C. or higher and 100 ° C. or lower, preferably 50 ° C. or higher and 90 ° C. or lower.
- the laminated film may further have a protective film on the surface opposite to the base film of the photosensitive dry film (photosensitive layer).
- a protective film examples include polyethylene terephthalate (PET) film, polypropylene (PP) film, polyethylene (PE) film and the like.
- a patterned resist film can be formed on the substrate by using the laminated film described above.
- Such a patterned resist film is preferably used as an insulating film, an etching mask, a mold for forming a plated model, and the like.
- the preferred method is A laminating step of laminating the above-mentioned laminated film on a substrate so that the photosensitive dry film is in contact with the surface of the substrate.
- an exposure step of irradiating the photosensitive dry film with active light or radiation in a position-selective manner to expose the photosensitive dry film includes a method for producing a patterned resist film.
- a method for manufacturing a substrate with a mold provided with a mold for forming a plated object a substrate having a metal surface is used as the substrate, and the above-mentioned laminated film is formed on the metal surface of the substrate having a metal surface as a photosensitive dry film.
- the substrate on which the laminated film is laminated is not particularly limited, and conventionally known substrates can be used.
- a substrate for electronic components, a substrate on which a predetermined wiring pattern is formed, and the like can be exemplified.
- a silicon substrate, a glass substrate, or the like can also be used.
- a substrate with a mold provided with a mold for forming a plated object is manufactured, a substrate having a metal surface is used as the substrate.
- the metal species constituting the metal surface copper, gold and aluminum are preferable, and copper is more preferable.
- the laminated film is placed on the substrate so that the photosensitive dry film is in contact with the surface of the substrate, and the photosensitive dry film and the substrate are crimped with a pressure roll or the like.
- the base film removing step the base film is removed by peeling it from the laminated film. As a result, only the photosensitive dry film is formed on the substrate.
- the photosensitive dry film is heated (PAB) at 100 ° C. or higher and 180 ° C. or lower to remove the organic solvent (S).
- the temperature for heating the photosensitive dry film may be 100 ° C. or higher and 180 ° C. or lower, but for example, the lower limit is preferably 120 ° C. or higher or 130 ° C. or higher, and the upper limit is 150 ° C. or lower or 145 ° C. or lower. preferable.
- the time for heating the photosensitive dry film is, for example, about 2 minutes or more and 120 minutes or less.
- the content ratio of the organic solvent (S) is preferably less than 10% by mass, more preferably 8% by mass or less. be.
- active light rays or radiation for example, ultraviolet rays having a wavelength of 300 nm or more and 500 nm or less, or visible light rays are emitted to the photosensitive dry film formed on the substrate as described above through a mask having a predetermined pattern. It is selectively irradiated (exposed).
- the radiation source a low-pressure mercury lamp, a high-pressure mercury lamp, an ultra-high-pressure mercury lamp, a metal halide lamp, an argon gas laser, or the like can be used.
- the radiation includes microwaves, infrared rays, visible rays, ultraviolet rays, X-rays, ⁇ -rays, electron beams, proton rays, neutron rays, ion rays and the like.
- the amount of radiation irradiation varies depending on the composition of the photosensitive composition, the film thickness of the photosensitive layer, and the like, but is, for example, 100 mJ / cm 2 or more and 10,000 mJ / cm 2 or less.
- the radiation includes a light beam that activates the acid generator (A) in order to generate an acid.
- the photosensitive dry film is heated (PEB), preferably using a known method to promote acid diffusion, and the alkali of the photosensitive dry film is found in the exposed portion of the photosensitive dry film. Change the solubility in a developing solution such as a developing solution.
- the exposed photosensitive dry film is developed according to a conventionally known method, and unnecessary portions are dissolved and removed to obtain a predetermined resist pattern (patterned resist film) or plating molding.
- a template for forming an object is formed.
- an alkaline aqueous solution is used as the developing solution.
- Examples of the developing solution include sodium hydroxide, potassium hydroxide, sodium carbonate, sodium silicate, sodium metasilicate, aqueous ammonia, ethylamine, n-propylamine, diethylamine, di-n-propylamine, triethylamine, and methyldiethylamine.
- An aqueous solution of an alkali such as -5-nonane can be used.
- an aqueous solution obtained by adding an appropriate amount of a water-soluble organic solvent such as methanol or ethanol or a surfactant to the above alkaline aqueous solution can also be used as a developing solution. Further, depending on the composition of the photosensitive composition, it is also possible to apply development with an organic solvent.
- the development time varies depending on the composition of the photosensitive dry film, the film thickness of the photosensitive dry film, etc., but is usually between 1 minute and 30 minutes or less.
- the developing method may be any of a liquid filling method, a dipping method, a paddle method, a spray developing method and the like.
- a resist pattern patterned in a desired shape is formed on the metal surface of the substrate having the metal surface. Further, in this way, a substrate having a resist pattern on the surface of the substrate can be manufactured.
- ⁇ Manufacturing method of plated objects By embedding a conductor such as metal by plating in the non-resist portion (the portion removed by the developing solution) in the mold of the substrate with a mold formed by the above method, for example, connection terminals such as bumps and metal posts can be formed. , Cu rewiring can form plated objects.
- the plating treatment method is not particularly limited, and various conventionally known methods can be adopted.
- As the plating solution solder plating, copper plating, gold plating, and nickel plating solution are particularly preferably used.
- the remaining mold is finally removed by a stripping solution or the like according to a conventional method.
- the following B1 and B2 were used as the resin (resin (B)) whose solubility in alkali was increased by the action of acid.
- the number in the lower right of the parentheses in each structural unit in the following structural formula represents the content (mass%) of the structural unit in the resin.
- the mass average molecular weight Mw of B1 is 80500, and the dispersity (Mw / Mn) is 5.82.
- the B2 mass average molecular weight Mw is 80800, and the dispersity (Mw / Mn) is 5.08.
- the solid content concentration is such that the content of the organic solvent in the photosensitive dry film prepared by the following [Preparation of a laminated film provided with the photosensitive dry film] using the photosensitive composition is 18% by mass. , Adjusted within the range of 40 to 55% by mass in each Example and Comparative Example. Tables 1 and 2 describe the boiling points of the organic solvents used and the hydrogen bond energy term ⁇ h with respect to the Hansen solubility parameter.
- the obtained laminated film was subjected to a copper sputtering silicon wafer using a dry film laminator (VA-700, manufactured by Taisei Laminator Co., Ltd.) under the conditions of a speed of 1 m / min, a pressure of 0.5 MPa (G), and a heating temperature of 70 ° C.
- a photosensitive dry film (photosensitive layer) was attached to the surface of the substrate (8 inches) so as to be in contact with the copper spatter surface of the substrate, and a photosensitive dry film having a thickness of 120 ⁇ m was laminated on the substrate.
- the PET film was peeled off, and the organic solvent was removed from the photosensitive dry film by heating (PAB) at 140 ° C. for 10 minutes using a hot plate.
- PAB photosensitive dry film after heating
- less than 10% by mass of the organic solvent remained in the photosensitive dry film after heating (PAB) at 140 ° C. for 10 minutes.
- the photosensitive dry film on the substrate is observed with a microscope, and when the number of bubbles present in the photosensitive dry film after heating at 140 ° C. for 10 minutes (PAB) is 10 or less, it is evaluated as ⁇ , 11 or more and 50.
- the following cases were evaluated as x, and the cases of 51 or more were evaluated as XX.
- the results are shown in the "Foam after heating" column of Tables 1 and 2.
- TMAH tetramethylammonium hydroxide
- an acid generator (A) that generates an acid by irradiation with active light or radiation, a resin (B) whose solubility in an alkali is increased by the action of the acid, and an organic solvent (S).
- the resin (B) contains an acrylic resin (B3) containing a structural unit (B3a) derived from a (meth) acrylate containing an acid-non-dissociable alicyclic hydrocarbon group-containing group, and contains an organic solvent (B3).
- S the boiling point under atmospheric pressure is 150 ° C. or higher
- II) the value of the energy term ⁇ h due to hydrogen bonding with respect to the Hansen solubility parameter is 11 (MPa) 0.5 or lower.
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Abstract
Description
このような基材フィルム上に感光性ドライフィルムが形成された積層フィルムを、支持体(基板)上に、感光性ドライフィルムが支持体の表面に接するように積層し、基材フィルムを剥離等し、感光性ドライフィルムを位置選択的に露光し現像することにより、支持体上に、レジストパターンを形成することができる。
しかしながら、従来の感光性ドライフィルムを加熱(PAB)して溶媒を除去すると、溶媒が蒸発する際に発生する泡が、加熱(PAB)後の感光性ドライフィルムに残存する場合があるという問題がある。加熱後の感光性ドライフィルムに泡が存在すると、意図しない空孔(泡)を有する、レジストパターン(パターン化されたレジスト膜)が形成される。
この場合、感光性ドライフィルムについて、白濁や分離が生じてしまう場合がある。白濁や分離が生じた感光性ドライフィルムでは、透明性や均一性が悪く、また、含有される酸発生剤や樹脂の機能を発揮し難いため、所望の形状を有するパターン化されたレジスト膜が得難い。
活性光線又は放射線の照射により酸を発生する酸発生剤(A)と、酸の作用によりアルカリに対する溶解性が増大する樹脂(B)と、有機溶媒(S)とを含有し、
樹脂(B)が、アクリル樹脂(B3)を含み、
アクリル樹脂(B3)が、酸非解離性の脂環式炭化水素基含有基を含む(メタ)アクリレートに由来する構成単位(B3a)を含み、
有機溶媒(S)が、下記条件I)及びII):
I)大気圧下での沸点が150℃以上である。
II)ハンセン溶解度パラメータに関する、水素結合によるエネルギーの項δhの値が11(MPa)0.5以下である。
を満たす高沸点有機溶媒(S1)を含む、感光性ドライフィルムである。
基材フィルム上に、化学増幅型ポジ型感光性組成物を塗布して塗布膜を形成する塗布工程と、
塗布膜を加熱して、有機溶媒(S)の一部を除去することにより、感光性ドライフィルムを形成する、乾燥工程とを含む、積層フィルムの製造方法である。
積層フィルムから基材フィルムを除去する基材フィルム除去工程と、
感光性ドライフィルムを100℃以上180℃以下で加熱して有機溶媒(S)を除去する溶媒除去工程と、
溶媒除去工程後、感光性ドライフィルムに、位置選択的に活性光線又は放射線を照射して露光する露光工程と、
露光後の感光性ドライフィルムを現像する現像工程とを含む、パターン化されたレジスト膜の製造方法である。
感光性ドライフィルムは、化学増幅型ポジ型感光性組成物(以下感光性組成物とも記す。)で構成される。そして、感光性ドライフィルムは、活性光線又は放射線の照射により酸を発生する酸発生剤(A)(以下酸発生剤(A)とも記す。)と、酸の作用によりアルカリに対する溶解性が増大する樹脂(B)(以下樹脂(B)とも記す。)と、有機溶媒(S)とを含有する。樹脂(B)はアクリル樹脂(B3)を含み、アクリル樹脂(B3)は、酸非解離性の脂環式炭化水素基含有基を含む(メタ)アクリレートに由来する構成単位(B3a)を含む。また、有機溶媒(S)は、下記条件I)及びII)を満たす高沸点有機溶媒(S1)を含む。
I)大気圧下での沸点が150℃以上である。
II)ハンセン溶解度パラメータに関する、水素結合によるエネルギーの項δhの値が11(MPa)0.5以下である。
酸発生剤(A)は、活性光線又は放射線の照射により酸を発生する化合物であり、光により直接又は間接的に酸を発生する化合物であれば特に限定されない。酸発生剤(A)としては、以下に説明する、第一~第五の態様の酸発生剤が好ましい。以下、感光性組成物において好適に使用される酸発生剤(A)のうち好適なものについて、第一から第五の態様として説明する。
感光性組成物は、酸の作用によりアルカリに対する溶解性が増大する樹脂(B)として、アクリル樹脂(B3)を必須成分として含む。そして、アクリル樹脂(B3)は、酸非解離性の脂環式炭化水素基含有基を含む(メタ)アクリレートに由来する構成単位(B3a)を含む。
感光性組成物は、アクリル樹脂(B3)とともに、アクリル樹脂(B3)以外の酸の作用によりアルカリに対する溶解性が増大する任意の樹脂を含んでいてもよい。但し、樹脂(B)の質量に対するアクリル樹脂(B3)の質量の比率が、50質量%以上であることが好ましく、70質量%以上であることがより好ましく、90質量%以上であることがさらに好ましく、100質量%以上であることが特に好ましい。
アクリル樹脂(B3)以外の酸の作用によりアルカリに対する溶解性が増大する任意の樹脂としては、ノボラック樹脂(B1)、ポリヒドロキシスチレン樹脂(B2)やアクリル樹脂(B3)以外のアクリル樹脂が挙げられる。
以下に各樹脂について、具体的に説明する。
ノボラック樹脂(B1)としては、下記式(b1)で表される構成単位を含む樹脂を使用することができる。
ポリヒドロキシスチレン樹脂(B2)としては、下記式(b4)で表される構成単位を含む樹脂を使用することができる。
酸の作用によりアルカリに対する溶解性が増大する樹脂(B)としてのアクリル樹脂(B3)は、酸非解離性の脂環式炭化水素基含有基を含む(メタ)アクリレートに由来する構成単位(B3a)(以下構成単位(B3a)とも記載する。)を含む。
また、本明細書において、「(メタ)アクリル」とは、「アクリル」及び「メタクリル」の両者を意味する。「(メタ)アクリレート」とは、「アクリレート」及び「メタクリレート」の両者を意味する。「(メタ)アクリロイルオキシ」とは、「アクリロイルオキシ」及び「メタクリロイルオキシ」の両者を意味する。
構成単位(B3a)は、例えば、酸非解離性の脂環式炭化水素基含有基を有する(メタ)アクリル酸エステル類を共重合成分とすることにより、アクリル樹脂(B3)に導入することができる。
ここで、「-SO2-含有環式基」とは、その環骨格中に-SO2-を含む環を含有する環式基を示し、具体的には、-SO2-における硫黄原子(S)が環式基の環骨格の一部を形成する環式基である。その環骨格中に-SO2-を含む環をひとつ目の環として数え、当該環のみの場合は単環式基、さらに他の環構造を有する場合は、その構造に関わらず多環式基と称する。-SO2-含有環式基は、単環式であってもよく、多環式であってもよい。
「ラクトン含有環式基」とは、その環骨格中に-O-C(=O)-を含む環(ラクトン環)を含有する環式基を示す。ラクトン環をひとつ目の環として数え、ラクトン環のみの場合は単環式基、さらに他の環構造を有する場合は、その構造に関わらず多環式基と称する。ラクトン含有環式基は、単環式基であってもよく、多環式基であってもよい。
構成単位(b-3-S)の例として、より具体的には、下記式(b-S1)で表される構成単位が挙げられる。
R11bは、前記で挙げた-SO2-含有環式基と同様である。
R12bは、単結合、2価の連結基のいずれであってもよい。
2価の連結基としての炭化水素基は、脂肪族炭化水素基であってもよく、芳香族炭化水素基であってもよい。脂肪族炭化水素基は、芳香族性を持たない炭化水素基を意味する。当該脂肪族炭化水素基は、飽和であってもよく、不飽和であってもよい。通常は飽和炭化水素基が好ましい。当該脂肪族炭化水素基として、より具体的には、直鎖状又は分岐鎖状の脂肪族炭化水素基、構造中に環を含む脂肪族炭化水素基等が挙げられる。
ヘテロ原子を含む2価の連結基におけるヘテロ原子とは、炭素原子及び水素原子以外の原子であり、例えば、酸素原子、窒素原子、硫黄原子、及びハロゲン原子等が挙げられる。
R13bの2価の連結基としては、直鎖状若しくは分岐鎖状のアルキレン基、構造中に環を含む脂肪族炭化水素基、又はヘテロ原子を含む2価の連結基が好ましく、直鎖状若しくは分岐鎖状のアルキレン基、又はヘテロ原子として酸素原子を含む2価の連結基が好ましい。
構成単位(b-3-L)の例としては、例えば前述の式(b-S1)中のR11bをラクトン含有環式基で置換したものが挙げられ、より具体的には、下記式(b-L1)~(b-L5)で表される構成単位が挙げられる。
R’におけるアルキル基、アルコキシ基、ハロゲン化アルキル基、-COOR”、-OC(=O)R”、ヒドロキシアルキル基としては、それぞれ、-SO2-含有環式基が有していてもよい置換基として挙げたアルキル基、アルコキシ基、ハロゲン化アルキル基、-COOR”、-OC(=O)R”、ヒドロキシアルキル基について前述したものと同様のものが挙げられる。
R”におけるアルキル基は、直鎖状、分岐鎖状、環状のいずれであってもよい。
R”が直鎖状又は分岐鎖状のアルキル基の場合は、炭素原子数1以上10以下であることが好ましく、炭素原子数1以上5以下であることがさらに好ましい。
R”が環状のアルキル基の場合は、炭素原子数3以上15以下であることが好ましく、炭素原子数4以上12以下であることがさらに好ましく、炭素原子数5以上10以下が最も好ましい。具体的には、フッ素原子又はフッ素化アルキル基で置換されていてもよいし、されていなくてもよいモノシクロアルカン、ビシクロアルカン、トリシクロアルカン、テトラシクロアルカン等のポリシクロアルカンから1個以上の水素原子を除いた基等を例示できる。具体的には、シクロペンタン、シクロヘキサン等のモノシクロアルカンや、アダマンタン、ノルボルナン、イソボルナン、トリシクロデカン、テトラシクロドデカン等のポリシクロアルカンから1個以上の水素原子を除いた基等が挙げられる。
A”としては、前述の式(3-1)中のA’と同様のものが挙げられる。A”は、炭素原子数1以上5以下のアルキレン基、酸素原子(-O-)又は硫黄原子(-S-)であることが好ましく、炭素原子数1以上5以下のアルキレン基、又は-O-がより好ましい。炭素原子数1以上5以下のアルキレン基としては、メチレン基、又はジメチルメチレン基がより好ましく、メチレン基が最も好ましい。
式(b-L1)中、s”は1又は2であることが好ましい。
以下に、前述の式(b-L1)~(b-L3)で表される構成単位の具体例を例示する。以下の各式中、Rαは、水素原子、メチル基、又はトリフルオロメチル基を示す。
なかでも、前述の式(b-L1-1)、(b-L1-2)、(b-L2-1)、(b-L2-7)、(b-L2-12)、(b-L2-14)、(b-L3-1)、及び(b-L3-5)で表される構成単位からなる群から選択される少なくとも1種が好ましい。
脂肪族環式基の具体例としては、モノシクロアルカン、ビシクロアルカン、トリシクロアルカン、テトラシクロアルカン等のポリシクロアルカンから1個以上の水素原子を除いた基が挙げられる。具体的には、シクロペンタン、シクロヘキサン、シクロヘプタン、シクロオクタン等のモノシクロアルカンや、アダマンタン、ノルボルナン、イソボルナン、トリシクロデカン、テトラシクロドデカン等のポリシクロアルカンから1個の水素原子を除いた基が挙げられる。特に、シクロヘキサン、アダマンタンから1個の水素原子を除いた基(さらに置換基を有していてもよい)が好ましい。
また、アクリル樹脂(B3)は、前述の式(b6)で表される構成単位を、0.1質量%以上30質量%以下含むのが好ましく、1質量%以上20質量%以下含むのがより好ましく、5質量%以上10質量%以下含むのが特に好ましい。
また、樹脂(B)の含有量は、感光性組成物の全固形分質量に対して5質量%以上99質量%以下であることが好ましく、50質量%以上99質量%以下であることがより好ましい。
感光性組成物は、レジストパターンの形状や、感光性樹脂膜の引き置き安定性等の向上のため、さらに酸拡散抑制剤(C)を含有することが好ましい。酸拡散抑制剤(C)としては、含窒素化合物(C1)が好ましく、さらに必要に応じて、有機カルボン酸、又はリンのオキソ酸若しくはその誘導体(C2)を含有させることができる。
含窒素化合物(C1)としては、トリメチルアミン、ジエチルアミン、トリエチルアミン、ジ-n-プロピルアミン、トリ-n-プロピルアミン、トリ-n-ペンチルアミン、トリベンジルアミン、ジエタノールアミン、トリエタノールアミン、n-ヘキシルアミン、n-ヘプチルアミン、n-オクチルアミン、n-ノニルアミン、エチレンジアミン、N,N,N’,N’-テトラメチルエチレンジアミン、テトラメチレンジアミン、ヘキサメチレンジアミン、4,4’-ジアミノジフェニルメタン、4,4’-ジアミノジフェニルエーテル、4,4’-ジアミノベンゾフェノン、4,4’-ジアミノジフェニルアミン、ホルムアミド、N-メチルホルムアミド、N,N-ジメチルホルムアミド、アセトアミド、N-メチルアセトアミド、N,N-ジメチルアセトアミド、プロピオンアミド、ベンズアミド、ピロリドン、N-メチルピロリドン、メチルウレア、1,1-ジメチルウレア、1,3-ジメチルウレア、1,1,3,3,-テトラメチルウレア、1,3-ジフェニルウレア、イミダゾール、ベンズイミダゾール、4-メチルイミダゾール、8-オキシキノリン、アクリジン、プリン、ピロリジン、ピペリジン、2,4,6-トリ(2-ピリジル)-S-トリアジン、モルホリン、4-メチルモルホリン、ピペラジン、1,4-ジメチルピペラジン、1,4-ジアザビシクロ[2.2.2]オクタン、ピリジン等を挙げることができる。これらは単独で用いてもよく、2種以上を組み合わせて用いてもよい。
有機カルボン酸、又はリンのオキソ酸若しくはその誘導体(C2)のうち、有機カルボン酸としては、具体的には、マロン酸、クエン酸、リンゴ酸、コハク酸、安息香酸、サリチル酸等が好適であり、特にサリチル酸が好ましい。
感光性組成物は、アルカリ可溶性樹脂(D)を含有していなくてもよいが、クラック耐性を向上させるため、さらにアルカリ可溶性樹脂(D)を含有することが好ましい。ここで、アルカリ可溶性樹脂とは、樹脂濃度20質量%の樹脂溶液(溶媒:プロピレングリコールモノメチルエーテルアセテート)により、膜厚1μmの樹脂膜を基板上に形成し、2.38質量%のTMAH水溶液に1分間浸漬した際、0.01μm以上溶解するものをいう。なお、アルカリ可溶性樹脂(D)は、酸解離性基を有さない。アルカリ可溶性樹脂(D)としては、ノボラック樹脂(D1)、ポリヒドロキシスチレン樹脂(D2)、及びアクリル樹脂(D3)からなる群より選ばれる少なくとも1種の樹脂であることが好ましい。
ノボラック樹脂は、例えばフェノール性水酸基を有する芳香族化合物(以下、単に「フェノール類」という。)とアルデヒド類とを酸触媒下で付加縮合させることにより得られる。
上記アルデヒド類としては、例えば、ホルムアルデヒド、フルフラール、ベンズアルデヒド、ニトロベンズアルデヒド、アセトアルデヒド等が挙げられる。
付加縮合反応時の触媒は、特に限定されるものではないが、例えば酸触媒では、塩酸、硝酸、硫酸、蟻酸、シュウ酸、酢酸等が使用される。
ポリヒドロキシスチレン樹脂(D2)を構成するヒドロキシスチレン系化合物としては、p-ヒドロキシスチレン、α-メチルヒドロキシスチレン、α-エチルヒドロキシスチレン等が挙げられる。
さらに、ポリヒドロキシスチレン樹脂(D2)は、スチレン樹脂との共重合体とすることが好ましい。このようなスチレン樹脂を構成するスチレン系化合物としては、スチレン、クロロスチレン、クロロメチルスチレン、ビニルトルエン、α-メチルスチレン等が挙げられる。
アクリル樹脂(D3)としては、エーテル結合を有する重合性化合物から誘導された構成単位、及びカルボキシ基を有する重合性化合物から誘導された構成単位を含むことが好ましい。
感光性組成物で構成される感光性ドライフィルムが金属基板上でのパターン形成に用いられる場合、感光性組成物が、含硫黄化合物(E)を含むのが好ましい。含硫黄化合物(E)は、金属に対して配位し得る硫黄原子を含む化合物である。なお、2以上の互変異性体を生じ得る化合物に関して、少なくとも1つの互変異性体が金属基板の表面を構成する金属に対して配位する硫黄原子を含む場合、当該化合物は含硫黄化合物に該当する。
Cu等の金属からなる表面上に、めっき用の鋳型として用いられるレジストパターンを形成する場合、フッティング等の断面形状の不具合が生じやすい。しかし、感光性組成物が含硫黄化合物(E)を含む場合、基板における金属からなる表面上にレジストパターンを形成する場合でも、フッティング等の断面形状の不具合の発生を抑制しやすい。なお、「フッティング」とは、基板表面とレジストパターンの接触面付近においてレジスト部が非レジスト部側に張り出してしまうことによって、非レジスト部においてトップの幅よりもボトムの幅のほうが狭くなる現象である。
感光性組成物で構成される感光性ドライフィルムが金属基板以外の基板上でのパターン形成に用いられる場合、感光性組成物が含硫黄化合物を含む必要は特段ない。感光性組成物で構成される感光性ドライフィルムが金属基板以外の基板上でのパターン形成に用いられる場合、感光性組成物の成分数の低減により、感光性組成物の製造が容易である点や、感光性組成物の製造コストを低減できる点等から、感光性組成物が含硫黄化合物(E)を含まないのが好ましい。
なお、金属基板以外の基板上でのパターン形成に用いられる感光性組成物で構成される感光性ドライフィルムが含硫黄化合物(E)を含むことによる不具合は特段ない。
金属に対して配位しやすく、フッティングの抑制効果に優れることから、含硫黄化合物がメルカプト基を有するのが好ましい。
含窒素芳香族複素環の好適な具体例としては、イミダゾール、ピラゾール、1,2,3-トリアゾール、1,2,4-トリアゾール、オキサゾール、チアゾール、ピリジン、ピリミジン、ピリダジン、ピラジン、1,2,3-トリアジン、1,2,4-トリアジン、1,3,5-トリアジン、インドール、インダゾール、ベンゾイミダゾール、ベンゾオキサゾール、ベンゾチアゾール、1H-ベンゾトリアゾール、キノリン、イソキノリン、シンノリン、フタラジン、キナゾリン、キノキサリン、及び1,8-ナフチリジンが挙げられる。
感光性組成物は、有機溶媒(S)を含有する。そして、有機溶媒(S)は、下記条件I)及びII)を満たす高沸点有機溶媒(S1)を含む。
I)大気圧下での沸点が150℃以上である。
II)ハンセン溶解度パラメータに関する、水素結合によるエネルギーの項δhの値が11(MPa)0.5以下である。
水素結合によるエネルギーの項δhは、好ましくは10.0(MPa)0.5以下、より好ましくは9.5(MPa)0.5以下である。
水素結合によるエネルギーの項δhは、好ましくは5.5(MPa)0.5以上である。
感光性組成物を塗布及び乾燥(加熱)して得られる感光性ドライフィルム(感光性層)の膜厚が40μm以上となるような厚膜の場合、有機溶媒(S)は、感光性組成物の固形分濃度が、好ましくは30質量%以上、より好ましくは40質量%以上となる範囲で、用いる。感光性組成物の固形分濃度の上限は、好ましくは60質量%以下である。本明細書において、固形分とは、有機溶媒(S)及び水以外の成分である。
なお、感光性ドライフィルムにおける有機溶媒(S)の含有量は、感光性ドライフィルムの可撓性の観点から、好ましくは10質量%以上25質量%以下、より好ましくは15質量%以上25質量%以下である。
感光性組成物は、可塑性を向上させるため、さらにポリビニル樹脂を含有していてもよい。ポリビニル樹脂の具体例としては、ポリ塩化ビニル、ポリスチレン、ポリヒドロキシスチレン、ポリ酢酸ビニル、ポリビニル安息香酸、ポリビニルメチルエーテル、ポリビニルエチルエーテル、ポリビニルアルコール、ポリビニルピロリドン、ポリビニルフェノール、及びこれらの共重合体等が挙げられる。ポリビニル樹脂は、ガラス転移点の低さの点から、好ましくはポリビニルメチルエーテルである。
また、感光性組成物で構成される感光性ドライフィルムを用いてパターンを形成する場合、パターン形成時の各工程の所要時間や、各工程間の所要時間が長い場合に、所望する形状や寸法のパターンを形成しにくかったり、現像性が悪化したりする悪影響が生じる場合がある。しかし、感光性組成物にルイス酸性化合物を配合することによって、このようなパターン形状や現像性への悪影響を緩和することができ、プロセスマージンを広くすることができる。
ルイス酸性化合物としては、上記の定義に該当し、当業者においてルイス酸性化合物であると認識される化合物であれば特に限定されない。ルイス酸性化合物としては、ブレンステッド酸(プロトン酸)に該当しない化合物が好ましく用いられる。
ルイス酸性化合物の具体例としては、フッ化ホウ素、フッ化ホウ素のエーテル錯体(例えば、BF3・Et2O、BF3・Me2O、BF3・THF等。Etはエチル基であり、Meはメチル基であり、THFはテトラヒドロフランである。)、有機ホウ素化合物(例えば、ホウ酸トリn-オクチル、ホウ酸トリn-ブチル、ホウ酸トリフェニル、及びトリフェニルホウ素等)、塩化チタン、塩化アルミニウム、臭化アルミニウム、塩化ガリウム、臭化ガリウム、塩化インジウム、トリフルオロ酢酸タリウム、塩化スズ、塩化亜鉛、臭化亜鉛、ヨウ化亜鉛、トリフルオロメタンスルホン酸亜鉛、酢酸亜鉛、硝酸亜鉛、テトラフルオロホウ酸亜鉛、塩化マンガン、臭化マンガン、塩化ニッケル、臭化ニッケル、シアン化ニッケル、ニッケルアセチルアセトネート、塩化カドミウム、臭化カドミウム、塩化第一スズ、臭化第一スズ、硫酸第一スズ、及び酒石酸第一スズ等が挙げられる。
また、ルイス酸性化合物の他の具体例としては、希土類金属元素の、クロリド、ブロミド、スルフェート、ニトレート、カルボキシレート、又はトリフルオロメタンスルホネートと、塩化コバルト、塩化第一鉄、及び塩化イットリウム等とが挙げられる。
ここで、希土類金属元素としては、例えばランタン、セリウム、プラセオジム、ネオジム、サマリウム、ユウロピウム、ガドリニウム、テルビウム、ジスプロシウム、ホルミウム、エルビウム、ツリウム、イッテルビウム、及びルテチウム等である。
ここで、周期律表第13族元素としては、ホウ素、アルミニウム、ガリウム、インジウム、及びタリウムが挙げられる。
上記の周期律表第13族元素の中では、ルイス酸性化合物の入手の容易性や、添加効果が特に優れることから、ホウ素が好ましい。つまり、ルイス酸性化合物が、ホウ素を含むルイス酸性化合物を含有するのが好ましい。
B(Rf1)t1(ORf2)(3-t1)・・・(f1)
(式(f1)中、Rf1及びRf2は、それぞれ独立に炭素原子数1以上20以下の炭化水素基であり、前記炭化水素基は1以上の置換基を有していてもよく、t1は0以上3以下の整数であり、Rf1が複数存在する場合、複数のRf1のうちの2つが互いに結合して環を形成してもよく、ORf2が複数存在する場合、複数のORf2のうちの2つが互いに結合して環を形成してもよい。)
で表されるホウ素化合物が挙げられる。感光性組成物は、ルイス酸性化合物として上記式(f1)で表されるホウ素化合物の1種以上を含むのが好ましい。
炭素原子数1以上20以下の炭化水素基としては、飽和脂肪族炭化水素基、又は芳香族炭化水素基が好ましい。Rf1及びRf2としての炭化水素基の炭素原子数は、1以上10以下が好ましい。炭化水素基が脂肪族炭化水素基である場合、その炭素原子数は、1以上6以下がより好ましく、1以上4以下が特に好ましい。
Rf1及びRf2としての炭化水素基は、飽和炭化水素基であっても、不飽和炭化水素基であってもよく、飽和炭化水素基であるのが好ましい。
Rf1及びRf2としての炭化水素基が脂肪族炭化水素基である場合、当該脂肪族炭化水素基は、直鎖状であっても、分岐鎖状であっても、環状であっても、これらの構造の組み合わせであってもよい。
置換基の炭素原子数は、本発明の目的を阻害しない範囲で特に限定されないが、1以上10以下が好ましく、1以上6以下がより好ましい。
フッ素系界面活性剤の具体例としては、BM-1000、BM-1100(いずれもBMケミー社製)、メガファックF142D、メガファックF172、メガファックF173、メガファックF183(いずれも大日本インキ化学工業社製)、フロラードFC-135、フロラードFC-170C、フロラードFC-430、フロラードFC-431(いずれも住友スリーエム社製)、サーフロンS-112、サーフロンS-113、サーフロンS-131、サーフロンS-141、サーフロンS-145(いずれも旭硝子社製)、SH-28PA、SH-190、SH-193、SZ-6032、SF-8428(いずれも東レシリコーン社製)等の市販のフッ素系界面活性剤が挙げられるが、これらに限定されるものではない。
シリコーン系界面活性剤としては、未変性シリコーン系界面活性剤、ポリエーテル変性シリコーン系界面活性剤、ポリエステル変性シリコーン系界面活性剤、アルキル変性シリコーン系界面活性剤、アラルキル変性シリコーン系界面活性剤、及び反応性シリコーン系界面活性剤等を好ましく用いることができる。
シリコーン系界面活性剤としては、市販のシリコーン系界面活性剤を用いることができる。市販のシリコーン系界面活性剤の具体例としては、ペインタッドM(東レ・ダウコーニング社製)、トピカK1000、トピカK2000、トピカK5000(いずれも高千穂産業社製)、XL-121(ポリエーテル変性シリコーン系界面活性剤、クラリアント社製)、BYK-310(ポリエステル変性シリコーン系界面活性剤、ビックケミー社製)等が挙げられる。
このような上述の感光性組成物で構成される感光性ドライフィルムは、後述する実施例に示すように、含有される樹脂による白濁や分離が抑制され、且つ加熱(PAB)して溶媒を除去する際に発生する泡の残存を抑制できるという効果を奏する。
感光性ドライフィルムを加熱(PAB)して溶媒を除去しようとすると、まず感光性ドライフィルムの表面の溶媒が蒸発することにより、感光性ドライフィルムの表面に、感光性ドライフィルム内部よりも硬い層ができる。この硬い層が障害となるため、感光性ドライフィルム内部に含まれる溶媒が蒸発する際に発生する泡が、当該表面から抜け難くなる。このため、泡が感光性ドライフィルムに残存する。
しかしながら、本発明の感光性ドライフィルムは、樹脂(B)としての酸非解離性の脂環式炭化水素基含有基を含む(メタ)アクリレートに由来する構成単位(B3a)を含むアクリル樹脂(B3)とともに、有機溶媒(S)として上記条件I)及びII)を満たす高沸点有機溶媒(S1)を含むためか、上記の硬い層の形成が抑制される、又は硬い層が形成されない。このため、感光性ドライフィルムを加熱(PAB)することにより溶媒が蒸発する際に発生した泡が、感光性ドライフィルムから抜けやすく、泡の残存が抑制される。
また、上述の成分を含む感光性ドライフィルムは、含有される樹脂による白濁や分離も抑制される。
また、感光性ドライフィルムにおける有機溶媒(S)の含有比率は、感光性ドライフィルムの可撓性の観点から、好ましくは10質量%以上25質量%以下程度である。
また、感光性ドライフィルムにおいて、有機溶媒(S)に対する高沸点有機溶媒(S1)の含有比率は、50質量%以上であることが好ましく、90質量%以上であることがより好ましく、100質量%以上であることがさらに好ましい。
積層フィルムは、基材フィルムと、上述の感光性ドライフィルムとが積層された積層体である。
塗布膜の加熱温度は、特に限定されず、例えば、50℃以上100℃以下であり、好ましくは50℃以上90℃以下である。
上記説明した積層フィルムを用いて、基板上に、パターン化されたレジスト膜を形成することができる。かかるパターン化されたレジスト膜は、絶縁膜、エッチングマスク、及びめっき造形物を形成するための鋳型等として好ましく用いられる。
好適な方法としては、
基板上に、上述の積層フィルムを、感光性ドライフィルムが基板の表面に接するように積層する積層工程と、
積層フィルムから基材フィルムを除去する基材フィルム除去工程と、
感光性ドライフィルムを100℃以上180℃以下で加熱(PAB)して有機溶媒(S)を除去する溶媒除去工程と、
前記溶媒除去工程後、感光性ドライフィルムに、位置選択的に活性光線又は放射線を照射して露光する露光工程と、
露光後の感光性ドライフィルムを現像する現像工程と、
を含む、パターン化されたレジスト膜の製造方法が挙げられる。
めっき造形物を形成するための鋳型を備える鋳型付基板の製造方法は、基板として金属表面を有する基板を用い、金属表面を有する基板の金属表面上に、上述の積層フィルムを、感光性ドライフィルムが金属表面に接するように積層する工程を有することと、現像工程において、現像によりめっき造形物を形成するための鋳型を作製することの他は、パターン化されたレジスト膜の製造方法と同様である。
めっき造形物を形成するための鋳型を備える鋳型付基板を製造する場合、基板としては、金属表面を有する基板が用いられる。金属表面を構成する金属種としては、銅、金、アルミニウムが好ましく、銅がより好ましい。
溶媒除去工程において、感光性ドライフィルムを加熱する温度は、100℃以上180℃以下であればよいが、例えば下限は120℃以上や130℃以上が好ましく、上限は150℃以下や145℃以下が好ましい。
溶媒除去工程において、感光性ドライフィルムを加熱する時間は、例えば、2分以上120分以下程度である。
溶媒除去工程で加熱して有機溶媒(S)を除去した後の感光性ドライフィルムにおいて、有機溶媒(S)の含有比率は、好ましくは10質量%未満であり、より好ましくは8質量%以下である。
また、感光性組成物の組成によっては、有機溶剤による現像を適用することも可能である。
上記の方法により形成された鋳型付き基板の鋳型中の非レジスト部(現像液で除去された部分)に、めっきにより金属等の導体を埋め込むことにより、例えば、バンプ及びメタルポスト等の接続端子や、Cu再配線のようなめっき造形物を形成することができる。なお、めっき処理方法は特に制限されず、従来から公知の各種方法を採用することができる。めっき液としては、特にハンダめっき、銅めっき、金めっき、ニッケルめっき液が好適に用いられる。残っている鋳型は、最後に、常法に従って剥離液等を用いて除去される。
表1及び表2に、用いた有機溶媒の沸点と、ハンセン溶解度パラメータに関する水素結合によるエネルギーの項δhとを記載する。
実施例及び比較例の感光性組成物を、基材フィルムとしての縦300mm×横500mmの長方形のPETフィルム上の全面にアプリケーターにより塗布した後、オーブンで塗布膜を80℃、20分間の加熱により乾燥させて、PETフィルム上に膜厚120μmの感光性層(感光性ドライフィルム)を備える積層フィルムを得た。実施例及び比較例全てにおいて、得られた積層フィルムにおける感光性層(感光性ドライフィルム)は、感光性組成物が有する有機溶媒を、18質量%含んでいた。
得られた積層フィルムの感光性ドライフィルムを目視で観察し、樹脂の分離も白濁も観察されず透明であったものを〇評価、白濁が見られたものを×評価、樹脂の分離が見られたものを××評価とした。結果を表1及び表2に示す。
得られた積層フィルムを、ドライフィルムラミネータ(VA-700、大成ラミネーター株式会社製)を用いて、速度1m/分、圧力0.5MPa(G)、加熱温度70℃の条件で、銅スパッタシリコンウエハ基板(8インチ)の表面に、感光性ドライフィルム(感光性層)が基板の銅スパッタ表面に接するように、貼り付け、基板上に膜厚120μmの感光性ドライフィルムを積層した。
次に、PETフィルムを剥がし、ホットプレートを用いて、140℃で10分間加熱(PAB)することで、感光性ドライフィルムから有機溶媒を除去した。なお、140℃で10分間加熱(PAB)後の感光性ドライフィルムには、有機溶媒は10質量%未満残存していた。
基板上の感光性ドライフィルムを顕微鏡で観察し、140℃で10分間加熱(PAB)後の感光性ドライフィルムに存在する泡の数が、10個以下の場合を○評価、11個以上50個以下の場合を×評価、51個以上の場合を××評価とした。結果を表1及び表2の「加熱後の泡」欄に示す。
上記の〔加熱(PAB)後の感光性ドライフィルムに存在する泡の評価〕において、140℃で10分間加熱(PAB)した後の実施例の感光性ドライフィルムに対して、所定のマスクを介して、投影露光装置Prisma GHI(ウルトラテック社製、NA=0.16)を用いて、2000mJ/cm2の露光量で、選択的に露光した。次いで、基板をホットプレート上に載置して100℃で3分間の露光後加熱(PEB)を行った。その後、2.38%テトラメチルアンモニウム水酸化物(TMAH)水溶液(現像液、NMD-3、東京応化工業株式会社製)を感光性ドライフィルムに滴下して、23℃で60秒間放置(パドル現像)し、これを10回繰り返して現像した。その後、60秒間流水洗浄し、スピン乾燥して、直径40μmのコンタクトホールパターンを有するレジストパターン(パターン化されたレジスト膜)を得た。なお、得られたレジストパターンの形状は、実施例1~20で、差異はなかった。
Claims (9)
- 化学増幅型ポジ型感光性組成物で構成される感光性ドライフィルムであって、
活性光線又は放射線の照射により酸を発生する酸発生剤(A)と、酸の作用によりアルカリに対する溶解性が増大する樹脂(B)と、有機溶媒(S)とを含有し、
前記樹脂(B)が、アクリル樹脂(B3)を含み、
前記アクリル樹脂(B3)が、酸非解離性の脂環式炭化水素基含有基を含む(メタ)アクリレートに由来する構成単位(B3a)を含み、
前記有機溶媒(S)が、下記条件I)及びII):
I)大気圧下での沸点が150℃以上である。
II)ハンセン溶解度パラメータに関する、水素結合によるエネルギーの項δhの値が11(MPa)0.5以下である。
を満たす高沸点有機溶媒(S1)を含む、感光性ドライフィルム。 - 前記有機溶媒(S)の質量に対する、前記高沸点有機溶媒(S1)の質量の比率が10質量%以上である、請求項1に記載の感光性ドライフィルム。
- 前記アクリル樹脂(B3)の質量に対する前記構成単位(B3a)の質量の比率が、15質量%以上50質量%以下である、請求項1又は2に記載の感光性ドライフィルム。
- 前記高沸点有機溶媒(S1)が、アニソール、3-エトキシプロピオン酸メチル、3-メトキシブチルアセテート、シクロヘキサノールアセテート、ジプロピレングリコールジメチルエーテル、3-メトキシ-3-メチル-1-ブチルアセテート、プロピレングリコールジアセテート、ガンマブチロラクトン、ジプロピレングリコールメチルエーテルアセテート、及びプロピレングリコールモノブチルエーテルからなる群より選択される少なくとも1種である、請求項1~3のいずれか1項に記載の感光性ドライフィルム。
- 膜厚が、40μm以上200μm以下である、請求項1~4のいずれか1項に記載の感光性ドライフィルム。
- 基材フィルムと、請求項1~5のいずれか1項に記載の感光性ドライフィルムとが積層された、積層フィルム。
- 請求項6に記載の積層フィルムの製造方法であって、
基材フィルム上に、前記化学増幅型ポジ型感光性組成物を塗布して塗布膜を形成する塗布工程と、
前記塗布膜を加熱して、前記有機溶媒(S)の一部を除去することにより、前記感光性ドライフィルムを形成する、乾燥工程とを含む、積層フィルムの製造方法。 - 前記塗布膜の加熱が、50℃以上100℃以下の範囲内の温度で行われる、請求項7に記載の積層フィルムの製造方法。
- 基板上に、請求項6に記載の積層フィルムを、前記感光性ドライフィルムが前記基板の表面に接するように積層する積層工程と、
前記積層フィルムから前記基材フィルムを除去する基材フィルム除去工程と、
前記感光性ドライフィルムを100℃以上180℃以下で加熱して前記有機溶媒(S)を除去する溶媒除去工程と、
前記溶媒除去工程後、前記感光性ドライフィルムに、位置選択的に活性光線又は放射線を照射して露光する露光工程と、
露光後の前記感光性ドライフィルムを現像する現像工程とを含む、パターン化されたレジスト膜の製造方法。
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