WO2022141481A1 - Radio frequency transmission quadrupole rod power source circuit and control method therefor, and power source device - Google Patents

Radio frequency transmission quadrupole rod power source circuit and control method therefor, and power source device Download PDF

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Publication number
WO2022141481A1
WO2022141481A1 PCT/CN2020/142339 CN2020142339W WO2022141481A1 WO 2022141481 A1 WO2022141481 A1 WO 2022141481A1 CN 2020142339 W CN2020142339 W CN 2020142339W WO 2022141481 A1 WO2022141481 A1 WO 2022141481A1
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Prior art keywords
radio frequency
gating
amplifier
stage
frequency
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PCT/CN2020/142339
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French (fr)
Chinese (zh)
Inventor
熊亮
张涛
朱辉
齐彦兵
王攀攀
范荣荣
黄晓
张伟
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广州禾信仪器股份有限公司
昆山禾信质谱技术有限公司
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Publication of WO2022141481A1 publication Critical patent/WO2022141481A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/022Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/06Electron- or ion-optical arrangements
    • H01J49/062Ion guides
    • H01J49/063Multipole ion guides, e.g. quadrupoles, hexapoles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/34Dynamic spectrometers
    • H01J49/40Time-of-flight spectrometers

Definitions

  • the present application relates to the technical field of ion transmission, and in particular, to a radio frequency transmission quadrupole power supply circuit, a control method thereof, and a power supply device.
  • Mass Spectrometry is an analytical method for the determination and analysis of the mass-to-charge ratio (m/q) of the ions of the tested sample. Firstly, the uncharged sample to be tested is ionized, and then the ions are separated according to the mass-to-charge ratio by the method of electric field or magnetic field to obtain the mass spectrum. By analyzing the mass spectrum and related information of the sample, the qualitative and quantitative results of the sample can be obtained. Commonly used mass spectrometers are divided into analyzers, which are mainly divided into magnetic deflection mass spectrometers, quadrupole mass spectrometers, ion trap mass spectrometers and time-of-flight mass spectrometers.
  • a radio frequency transmission quadrupole power supply circuit comprising: a control device, a sine wave generating device, an amplifying device, a first gating device, a second gating device, a plurality of radio frequency magnetic ring transformers, a radio frequency transmission quadrupole and a feedback adjustment
  • the control device is connected to the sine wave generating device, the sine wave generating device is connected to the amplifying device, the amplifying device is connected to the first gating device, and the primary sides of the radio frequency magnetic toroidal transformers are respectively
  • the first gating device is connected, the secondary side of each radio frequency magnetic toroidal transformer is respectively connected with the second gating device, the second gating device is connected with the radio frequency transmission quadrupole, and the radio frequency transmission quadrupole
  • the pole rod is connected to the feedback adjustment device, the feedback adjustment device is connected to the control device, the feedback adjustment device is connected to the amplification device, the amplification device, the first gating device, and each of the radio frequency
  • the amplifying device includes a variable gain amplifier programmable amplitude modulator, an in-phase multi-stage amplifier circuit and an inverting multi-stage amplifier circuit, and the variable gain amplifier programmable amplitude modulator is connected to the sine wave generating device and the feedback
  • the adjusting device, the in-phase multi-stage amplifying circuit and the inverting multi-stage amplifying circuit are respectively connected to the variable gain amplification program-controlled amplitude modulator, and the in-phase multi-stage amplifying circuit and the inverting multi-stage amplifying circuit are respectively connected to the The first gating device, the in-phase multi-stage amplifier circuit and the inverting multi-stage amplifier circuit are respectively connected to the control device.
  • the non-inverting multi-stage amplifier circuit includes a non-inverting amplifier, a first-stage power amplifier and a second-stage power amplifier, the non-inverting amplifier is connected to a variable gain amplification programmable amplitude modulator, and the non-inverting amplifier is connected to the first power amplifier.
  • the phase amplifier, the first-stage amplifier and the second-stage amplifier are respectively connected to the control device.
  • the control device includes a main controller, a power supply and current monitor, a gating controller, and a medium and low voltage generator
  • the main controller is connected to the sine wave generating device
  • the feedback device is connected to the main controller
  • the power supply and current monitor, the gating controller and the medium and low voltage generator are respectively connected to the main controller
  • the power supply and current monitor are connected to the amplifying device
  • the gating controller is connected to the first gating device and the second gating device
  • the medium and low voltage generators are connected to the secondary taps of each of the radio frequency magnetic toroidal transformers.
  • the feedback adjustment device includes a detection circuit, an amplitude monitor, a digital-to-analog controller and a proportional-integral regulator, the detection circuit is connected to the radio frequency transmission quadrupole, and the detection circuit is connected to the A proportional-integral regulator and the amplitude monitor, the amplitude monitor and the digital-analog controller are respectively connected to the control device, the digital-analog controller is connected to the proportional-integral regulator, and the proportional-integral controller is connected to the proportional-integral regulator.
  • a regulator is connected to the amplification device.
  • a control method for the above-mentioned radio frequency transmission quadrupole power supply circuit comprising: obtaining a frequency setting value; The radio frequency magnetic toroidal transformer; by adjusting the sine wave generating device and the feedback adjusting device, the resonant frequency of the radio frequency transmission quadrupole power supply circuit at the minimum power consumption is obtained.
  • the radio frequency magnetic toroidal transformer includes a low frequency band radio frequency toroidal transformer, a mid frequency band radio frequency toroidal transformer and a high frequency band radio frequency toroidal transformer, and the first gate is controlled according to the frequency setting value
  • the step of gating the corresponding radio frequency magnetic toroidal transformer by the device and the second gating device includes: comparing and analyzing the frequency setting value and a preset first frequency range; when the frequency setting value is in the When the preset first frequency band is within the range, control the first gating device and the second gating device to gating the low-frequency radio frequency magnetic toroidal transformer; when the frequency setting value is not within the preset first frequency range; When it is within a frequency range, according to the comparison and analysis of the frequency setting value and the preset second frequency band range, the minimum threshold value of the preset second frequency band range is equal to the maximum threshold value of the preset first frequency band range; When the frequency setting value is within the preset second frequency band range, control the first gating device and the second g
  • the step of obtaining the resonant frequency of the radio frequency transmission quadrupole power supply circuit with minimum power consumption by adjusting the sine wave generating device and the feedback adjusting device includes: adjusting the sine wave generating device and the feedback adjustment device, and collect the current value of the amplifying device in real time; when the minimum current value of the amplifying device is obtained, read the current frequency of the sine wave generating device, that is, the radio frequency transmission quadrupole power supply The resonant frequency at which the circuit consumes minimum power.
  • a radio frequency transmission quadrupole power supply device includes the above-mentioned radio frequency transmission quadrupole power supply circuit, and the control device is used for scanning and obtaining the resonance frequency with the minimum power consumption according to the above-mentioned control method.
  • the radio frequency transmission quadrupole power supply equipment further includes a chassis, the control device, the sine wave generating device and the feedback adjustment device are integrated and arranged on the same main control board, the amplifying device, the The first gating device, the second gating device and a plurality of radio frequency magnetic toroidal transformers are integrally arranged on the same power amplifier board, and the main control board and the power amplifier board are pluggable and arranged in the chassis.
  • the above-mentioned radio frequency transmission quadrupole power supply circuit and its control method and power supply equipment when starting to work, the control device firstly controls the sine wave generating device to generate a corresponding sine wave signal, and the sine wave signal and the signal fed back by the feedback device are passed through the amplification device together. After amplification, the control device and the corresponding radio frequency magnetic toroidal transformer connected under the gating of the first gating device and the second gating device are finally loaded into the radio frequency transmission quadrupole, and the radio frequency high voltage electric field is generated at the radio frequency transmission quadrupole.
  • the above scheme is provided with a plurality of different radio frequency magnetic toroidal transformers.
  • radio frequency magnetic toroidal transformers When carrying out ion transmission of different mass ranges and different mass numbers, different radio frequency magnetic toroidal transformers can be correspondingly selected by the first gating device and the second gating device. Therefore, ion transmission in a very wide mass range from low-mass ions to high-mass ions can be realized, and a radio frequency high-voltage electric field with flexible matching of different frequency bands can be generated, so as to achieve a good wide-mass range ion transmission efficiency and instrument sensitivity; ,
  • the closed-loop control structure is realized through the feedback device, so that the radio frequency transmission quadrupole power supply circuit has extremely high adaptability and stability, so the application range of the mass spectrometer can be greatly improved.
  • FIG. 1 is a schematic structural diagram of a radio frequency transmission quadrupole power supply circuit in an embodiment
  • FIG. 2 is a schematic structural diagram of a radio frequency transmission quadrupole power supply circuit in another embodiment
  • FIG. 3 is a schematic diagram of a partial structure of an amplifying device in an embodiment
  • FIG. 4 is a schematic flowchart of a control method of a radio frequency transmission quadrupole power supply circuit in an embodiment
  • FIG. 5 is a schematic flowchart of a control method of a radio frequency transmission quadrupole power supply circuit in another embodiment
  • FIG. 6 is a schematic diagram of a gating control flow in an embodiment
  • FIG. 7 is a schematic diagram of a resonant frequency scanning process flow in an embodiment
  • FIG. 8 is a schematic structural diagram of a radio frequency transmission quadrupole power supply device in an embodiment.
  • a radio frequency transmission quadrupole power supply circuit includes: a control device 10, a sine wave generating device 20, an amplifying device 30, a first gating device 40, a second gating device 60, a plurality of radio frequency magnetic rings
  • the transformer 50, the radio frequency transmission quadrupole 70 and the feedback adjustment device 80, the control device 10 is connected to the sine wave generating device 20, the sine wave generating device 20 is connected to the amplifying device 30, the amplifying device 30 is connected to the first gating device 40, and each radio frequency magnetic ring
  • the primary side of the transformer 50 is connected to the first gating device 40 respectively, the secondary side of each radio frequency magnetic toroidal transformer 50 is respectively connected to the second gating device 60, the second gating device 60 is connected to the radio frequency transmission quadrupole 70, and the radio frequency transmission quadrupole
  • the rod 70 is connected to the feedback adjustment device 80, the feedback adjustment device 80 is connected to the control device 10, the feedback adjustment device 80 is connected to the amplifying device 30, the ampl
  • the sine wave generating device 20 can generate sine wave signals of different frequencies through the sine wave generating device 20 under the action of the control device 10 .
  • the sine wave generating device 20 can specifically generate sine wave signals in three different frequency bands: high frequency band, mid frequency band and low frequency band.
  • a plurality of radio frequency magnetic toroidal transformers 50 with different frequency ranges are provided.
  • the corresponding required frequency band can be selected
  • the primary side of the radio frequency toroidal transformer 50 in the range is connected to the circuit, and under the action of the control device 10 and the second gating device 60 , the secondary side of the radio frequency toroidal transformer 50 corresponding to the required frequency range can be connected to the circuit. Therefore, one of the radio frequency transmission quadrupole power supply circuits is connected to the circuit to work to meet the needs of ions in different mass ranges, and then ion transmission from low mass numbers within 20 to high mass numbers above 4500 can be realized.
  • the solution of this embodiment adopts an amplitude closed-loop feedback control loop in hardware, and the output waveform of the radio frequency transmission quadrupole 70 can be collected in real time through the feedback device for feedback adjustment.
  • the amplitude fluctuates, it will be compensated by feedback, which ensures that the RF high voltage amplitude applied to the RF transmission quadrupole is continuously stable and undisturbed, and the amplitude stability is within 0.1%, forming a stable and constant RF electric field.
  • each radio frequency magnetic toroidal transformer 50 is respectively connected to the control device 10 , so that the control device 10 can generate a DC bias voltage and apply it to the middle tap end of the secondary side of the radio frequency magnetic toroidal transformer 50 , so as to provide the radio frequency magnetic toroidal transformer 50
  • the RF AC high voltage generated by the secondary side coil provides the DC bias reference voltage.
  • both the first gating device 40 and the second gating device 60 are not unique, and under the action of the control device 10 , different paths of the radio frequency magnetic toroidal transformer 50 can be connected to the circuit.
  • both the first gating device 40 and the second gating device 60 may be implemented by using relays, wherein the first gating device 40 may be a power relay, and the second gating device 60 may be a power relay. High voltage relay is used.
  • the amplifying device 30 includes a variable gain amplifying programmable amplitude modulator 31, an in-phase multi-stage amplifying circuit 32 and an inverting multi-stage amplifying circuit 33, and the variable gain amplifying programmable amplitude modulator 31 is connected to a sine wave
  • the generating device 20 and the feedback adjusting device 80, the in-phase multi-stage amplifier circuit 32 and the inverting multi-stage amplifier circuit 33 are respectively connected to the variable gain amplifier programmable amplitude modulator 31, and the in-phase multi-stage amplifier circuit 32 and the inverting multi-stage amplifier circuit 33 are respectively connected
  • the first gating device 40 , the in-phase multi-stage amplifying circuit 32 and the inverting multi-stage amplifying circuit 33 are respectively connected to the control device 10 .
  • variable gain amplification programmable amplitude modulator 31 can perform amplitude modulation, is connected to the sine wave generating device 20 and the feedback device, and can receive the sinusoidal carrier signal of the sine wave generating device 20 and the feedback signal fed back by the feedback adjustment device 80 together to modulate.
  • the modulated AM wave is divided into two paths, the phases of the two sine wave signals differ by 180°, one of which is in-phase power amplification by the in-phase multi-stage amplifying circuit 32, and the other is inverting by the in-phase multi-stage amplifying circuit 33. Power amplification.
  • the controller controls the first gating device 40 to perform gating, and selects a corresponding radio frequency magnetic toroidal transformer 50 among the plurality of radio frequency magnetic toroidal transformers 50 to connect to the circuit, so that the two amplified sine wave signals have a phase difference of 180°.
  • the two-way sine wave signals output after passing through the second gating device 60 are respectively loaded into any two adjacent rods of the radio frequency transmission quadrupole 70 (No. One group of adjacent rods), and the two groups of adjacent rods of the radio frequency transmission quadrupole 70 are connected and conducted, and two sine wave signals can be output through the other group of adjacent rods.
  • the solution of this embodiment adopts a multi-stage power amplifying circuit structure for ions of different frequency bands and different mass ranges, and has a high RF high-voltage amplitude driving capability.
  • the specific structures of the non-inverting multi-stage amplifier circuit 32 and the inverting multi-stage amplifier circuit 33 are not unique.
  • the non-inverting amplifier 321 is connected to the variable gain amplifier programmable amplitude modulator 31, the non-inverting amplifier 321 is connected to the first-stage power amplifier 322, and the first-stage power amplifier 322 is connected to the second-stage power amplifier 323, the second-stage power amplifier 323 is connected to the first gating device 40, the non-inverting amplifier 321, the first-stage power amplifier 322 and the second-stage power amplifier 323 are respectively connected to the control device 10; and/or, the inverting multi-stage amplifier circuit 33 It includes an inverting amplifier 331, a first-stage amplifier 332 and a second-stage amplifier 333.
  • the inverting amplifier 331 is connected to the variable gain amplifier programmable amplitude modulator 31, the inverting amplifier 331 is connected to the first-stage amplifier 332, and the first-stage amplifier 332 is connected to the first-stage amplifier 332.
  • the second stage amplifier 333 and the second stage amplifier 333 are connected to the first gating device 40 , and the inverting amplifier 331 , the first stage amplifier 332 and the second stage amplifier 333 are respectively connected to the control device 10 .
  • the two channels of sine wave signals output by the programmable amplitude modulator 31 are amplified by the variable gain, and one channel of the signals is amplified and output in-phase by the non-inverting amplifier 321 , the first-stage power amplifier 322 and the second-stage power amplifier 323 .
  • the power amplified sine wave is amplified by the inverting amplifier 331, the first-stage amplifier 332, and the second-stage amplifier 333, and then outputs an inverting power amplified sine wave.
  • the phase difference between the two sine waves is 180°.
  • the power relay ie, the first gating device 40
  • it is loaded to the two ends of the primary side coil of the radio frequency magnetic toroidal transformer 50 that is turned on, and is boosted by the turns ratio of the radio frequency magnetic toroidal transformer 50 .
  • the two ends of the secondary side coil of 50 output two channels of RF high-voltage sine waves with a phase difference of 180°, which are gated by the high-voltage relay (ie the second gating device 60) and added to the two adjacent rods of the RF transmission quadrupole, A radio frequency high voltage electric field is formed, the two pairs of rods of the radio frequency transmission quadrupole are connected and conducted, and the other group of adjacent rods outputs two channels of radio frequency high voltage sine waves.
  • the specific structures of the first-stage power amplifier 322, the second-stage power amplifier 323, and the first-stage amplifier 332 and the second-stage amplifier 333 are not unique.
  • the first-stage power amplifier. 322 includes a first amplifier K1, a first resistor R1, a second resistor R2 and a third resistor R3, the second stage power amplifier 323 includes a first switch Q1 and a second switch Q2, and the first stage amplifier 332 includes a second amplifier K2, the fourth resistor R4, the fifth resistor R5 and the sixth resistor R6, the second-stage amplifier 333 includes a third switch Q3 and a fourth switch Q4; one end of the first resistor R1 is connected to the forward input of the first amplifier K1 The other end of the first resistor R1 is connected to the non-inverting amplifier 321, the inverting input end of the first amplifier K1 is connected to one end of the second resistor R2 and one end of the third resistor R3, the other end of the second resistor R2 is
  • the sine wave in-phase signal VIN1 output by the non-inverting amplifier 321 and the sine wave in-phase signal VIN2 output by the inverting amplifier 331 pass through the first-stage high-speed power operational amplifier (that is, the first amplifier K1 and the second amplifier respectively).
  • K2 Amplify at the same ratio, enter the dual power supply common collector triode complementary push-pull power amplifier circuit in the second-stage power amplifier 323 and the second-stage amplifier 333 respectively, the output in-phase and anti-phase two channels have good current drive and voltage drive capability
  • the sine wave power signal is applied to both ends of the primary side of the corresponding RF magnetic ring transformer 50 after gating.
  • the RF magnetic ring used can have extremely low loss and boost magnification at the resonance point of the RF frequency band. .
  • the secondary side of the RF magnetic toroidal transformer 50 can output high-amplitude RF high-voltage, which can well meet the requirements of different frequency bands and different mass numbers of ions. RF high voltage requirements.
  • the radio frequency magnetic toroidal transformer 50 adopts a transformer coil made of special material to ensure the working reliability of the radio frequency magnetic toroidal transformer 50, which may be carbonyl iron powder magnetic core material.
  • the control device 10 includes a main controller 11 , a power supply and current monitor 12 , a gating controller 13 and a medium and low voltage generator 14 , and the main controller 11 is connected to the sine wave generating device 20 , the feedback device is connected to the main controller 11, the power supply and current monitor 12, the gating controller 13 and the medium and low voltage generator 14 are respectively connected to the main controller 11, the power supply and the current monitor 12 are connected to the amplifying device 30, and the gating control
  • the generator 13 is connected to the first gating device 40 and the second gating device 60 , and the medium and low voltage generator 14 is connected to the secondary taps of each radio frequency magnetic toroidal transformer 50 .
  • control device 10 includes a main controller 11 that implements a main control function, a power supply and current monitor 12 that monitors the power supply and current of the amplifying device 30, and is used to control the first gating device 40 and the second selection device 40.
  • the gating controller 13 for operating the pass device 60 in the corresponding channel, and the medium and low voltage generator 14 for supplying the taps of the secondary coils of each radio frequency toroidal transformer 50 with DC bias voltage.
  • the main controller 11 sends a control instruction to the gating controller 13, so that the gating controller 13 controls the first gating device 40 and the second gating device 60 to corresponding channels operation, so that the corresponding radio frequency magnetic toroidal transformer 50 is connected to the circuit; at the same time, the medium and low voltage generator 14 is controlled to provide a DC bias current to the secondary coil of the radio frequency magnetic toroidal transformer 50, and finally a high-voltage electric field is generated at the radio frequency transmission quadrupole 70.
  • the power supply and current monitor 12 can collect the magnitude of the current flowing through the amplifying device 30, and then quickly and accurately scan the resonant frequency of the minimum power consumption of the radio frequency transmission quadrupole power supply circuit.
  • the feedback adjustment device 80 includes a detection circuit 81, an amplitude monitor 84, a digital-to-analog controller 82, and a proportional-integral regulator 83.
  • the detection circuit 81 is connected to the radio frequency transmission quadrupole 70, and the detection
  • the circuit 81 is connected to the proportional-integral regulator 83 and the amplitude monitor 84, the amplitude monitor 84 and the digital-analog controller 82 are respectively connected to the control device 10, the digital-analog controller 82 is connected to the proportional-integral regulator 83, and the proportional-integral regulator 83 is connected Amplifying device 30 .
  • the output feedback signal is added to the proportional integral regulator 83 (PI regulator), and the main controller 11 is passed through the DA
  • the control signal generated by the control that is, the digital-analog controller 82
  • PI regulator proportional integral regulator
  • the control signal generated by the control is adjusted by PI to compare and amplify the error, forming a hardware closed-loop negative feedback
  • the signal output by the PI regulator is fed back to the amplifying device 30, and real-time RF high-voltage sinusoidal
  • the amplitude of the wave is compensated and controlled to ensure a stable and constant amplitude.
  • the feedback signal output by the detection circuit 81 is also returned to the main controller 11 through the amplitude monitor 84 for real-time monitoring of the amplitude, thereby forming a complete hardware closed-loop feedback control loop.
  • the above-mentioned radio frequency transmission quadrupole power supply circuit when starting to work, the control device 10 first controls the sine wave generating device 20 to generate a corresponding sine wave signal, and the sine wave signal and the signal fed back by the feedback device are amplified by the amplifying device 30.
  • the corresponding radio frequency magnetic toroidal transformer 50 connected by the control device 10 and the first gating device 40 and the second gating device 60 is loaded into the radio frequency transmission quadrupole 70, and a radio frequency high voltage is generated at the radio frequency transmission quadrupole 70. electric field.
  • the above scheme is provided with a plurality of different radio frequency magnetic toroidal transformers 50.
  • the magnetic toroidal transformer 50 can realize ion transmission in a very wide mass range from low-mass ions to high-mass ions, generate radio frequency high-voltage electric fields flexibly matched in different frequency bands, and achieve good ion transmission efficiency in a wide mass range and Instrument sensitivity; at the same time, the closed-loop control structure is realized through the feedback device, so that the radio frequency transmission quadrupole power supply circuit has a very high degree of adaptability and stability, so it can greatly improve the application range of the mass spectrometer.
  • a control method of the above-mentioned radio frequency transmission quadrupole power supply circuit includes step S100 , step S200 and step S300 .
  • Step S100 obtaining a frequency setting value
  • Step S200 controlling the radio frequency magnetic toroidal transformer corresponding to the first gating device and the second gating device gating according to the frequency setting value
  • Step S300 adjusting the sine wave generating device and feedback adjustment The device is used to obtain the resonant frequency at the minimum power consumption of the radio frequency transmission quadrupole power supply circuit.
  • the specific structure of the radio frequency transmission quadrupole power supply circuit is as shown in the above embodiments and the accompanying drawings.
  • the radio frequency transmission quadrupole power supply circuit provided by the present application is turned on and works, a wide frequency range and fine step frequency scanning are adopted.
  • the program algorithm in different frequency bands, for the RF transmission quadrupole with different equivalent capacitance and the matching inductance coil on the secondary side of the RF magnetic toroidal transformer 50, can quickly and accurately scan the minimum power consumption with one key. Resonant frequency.
  • the control device 10 obtains a frequency setting value.
  • the frequency setting value may be directly input to the control device 10 by the user, or may be sent by a host computer or a user terminal connected to the control device 10 .
  • the control device 10 controls the first gating device 40 and the second gating device 60 to select different radio frequency magnetic toroidal transformers 50 according to the received set frequency, and continuously adjusts the input of the amplifying device 30 . , and finally scan to obtain the resonant frequency with the minimum power consumption, so that the radio frequency transmission quadrupole power supply circuit has a good adaptive ability.
  • step S300 includes step S310 and step S320.
  • Step S310 adjust the sine wave generating device and the feedback adjustment device, and collect the current value of the amplifying device in real time;
  • Step S320 when the minimum current value of the amplifying device is obtained, read the current frequency of the sine wave generating device, which is the radio frequency transmission four.
  • the control device 10 adjusts the sine wave generating device 20 and the feedback adjustment device 80, the corresponding signal loaded to the amplifying device 30 will also change. At this time, the control device 10 supplies power and the current monitor 12 by receiving power. The collected and sent current signal is analyzed, and when the minimum current signal is obtained, the frequency corresponding to the minimum current signal can be taken as the resonant frequency.
  • the radio frequency magnetic toroidal transformer 50 includes a low-frequency radio frequency toroidal transformer 50, a mid-frequency radio frequency toroidal transformer 50 and a high-frequency radio frequency toroidal transformer 50, and step S200 includes steps S210, S220, Step S230, Step S240, Step S250 and Step S260.
  • Step S210 compare and analyze the frequency setting value and the preset first frequency band range
  • Step S220 control the first gating device and the second gating device to select when the frequency setting value is within the preset first frequency band range.
  • Step S230 when the frequency setting value is not within the preset first frequency band range, compare and analyze the frequency setting value and the preset second frequency band range;
  • the minimum threshold value is equal to the maximum threshold value of the preset first frequency band range
  • Step S240 when the frequency setting value is within the preset second frequency band range, control the first gating device and the second gating device to gating the mid-band radio frequency magnetic ring Transformer
  • Step S250 when the frequency setting value is not within the preset second frequency band range, compare and analyze the frequency setting value and the preset third frequency band range
  • the minimum threshold value of the preset third frequency band range is equal to the preset first frequency band range.
  • step S260 when the frequency setting value is within the preset
  • the radio frequency transmission quadrupole power supply circuit is powered on to perform system initialization, and the control device 10 first reads the Freg set frequency value (that is, the above-mentioned frequency set value) sent by the host computer, and starts to judge Set whether the frequency value is within the preset first frequency range, that is, whether it is between the frequencies of FS1 and FE1. If the judgment result is yes, the gating channel 1 is turned on, the power relay (the first gating device 40 ) and the high voltage relay (the second gating device 60 ) are gating the first channel, and the low-frequency radio frequency magnetic toroidal transformer 50 is turned on.
  • the Freg set frequency value that is, the above-mentioned frequency set value
  • the control device 10 first reads the Freg set frequency value (that is, the above-mentioned frequency set value) sent by the host computer, and starts to judge Set whether the frequency value is within the preset first frequency range, that is, whether it is between the frequencies of FS1 and FE1. If the
  • the output of the digital-analog controller 82 (DAC) in the feedback adjustment device 80 can be adjusted continuously and finely and the output of the DDS frequency (that is, the sine wave generating device 20 ) can be adjusted.
  • the set frequency value is not within the preset first frequency band range as a result of the judgment, then it is then judged whether the set frequency value is within the preset second frequency band range, that is, whether it is between FS2 and FE2 frequencies. If yes, turn on the gating channel 2, the power relay and the high-voltage relay are gating the second channel, and the mid-band RF magnetic toroidal transformer 50 is turned on. Also, adjust the output of the digital-analog controller 82 and adjust the DDS frequency output through fine steps.
  • the power supply and current monitor 12 of the control device 10 collects the current signal, searches for the minimum current value of the amplifying device 30 cyclically, and reads the current actual frequency value Freg when the minimum current value is finally found.
  • the set frequency value is still not within the preset second frequency band range, it is then judged whether the set frequency value is within the preset third frequency band range, that is, whether it is between FS3 and FE3 frequencies. If yes, turn on the gating channel 3, the power relay and the high-voltage relay are gating the third channel, the high-frequency radio frequency magnetic toroidal transformer 50 is turned on, and also adjust the DAC output and the DDS frequency output by continuously fine-stepping, through the control device 10
  • the power supply and current monitor 12 collects the current signal, searches for the minimum current value of the amplifying device 30 cyclically, and reads the current actual frequency value Freg when the minimum current value is finally found. Determine whether the frequency value is within the preset third frequency band. If yes, it means that the matching resonance frequency in the preset third frequency band has been found, and the frequency scan is over; At the end of the program, a fast and accurate resonant frequency scan is achieved at the moment of power-on.
  • the control method of the above-mentioned radio frequency transmission quadrupole power supply circuit adopts the frequency scanning program algorithm with wide frequency range and fine step, and realizes the flexible switching gating and resonance of radio frequency high voltage in three frequency bands of high, middle and low frequency according to the transmission quadrupole of different capacitance characteristics.
  • the frequency is automatically scanned quickly and accurately.
  • a radio frequency transmission quadrupole power supply device includes the above radio frequency transmission quadrupole power supply circuit, and the control device 10 is configured to scan and obtain the resonant frequency with the minimum power consumption according to the above control method.
  • the sine wave generating device 20 is also the DDS sine wave signal generator. Under the action of the control device 10, the sine wave generates The device 20 can generate sine wave signals of different frequencies. In one embodiment, according to the working requirements of the time-of-flight mass spectrometer using the radio frequency transmission quadrupole 70, the sine wave generating device 20 can specifically generate sine wave signals in three different frequency bands: high frequency band, mid frequency band and low frequency band. At the same time, in the radio frequency transmission quadrupole power supply circuit of this embodiment, a plurality of radio frequency magnetic toroidal transformers 50 with different frequency ranges are provided.
  • the corresponding required frequency band can be selected
  • the primary side of the radio frequency toroidal transformer 50 in the range is connected to the circuit, and under the action of the control device 10 and the second gating device 60 , the secondary side of the radio frequency toroidal transformer 50 corresponding to the required frequency range can be connected to the circuit. Therefore, one of the radio frequency transmission quadrupole power supply circuits is connected to the circuit to work to meet the needs of ions in different mass ranges, and then ion transmission from low mass numbers within 20 to high mass numbers above 4500 can be realized.
  • the solution of this embodiment adopts an amplitude closed-loop feedback control loop in hardware, and the output waveform of the radio frequency transmission quadrupole 70 can be collected in real time through the feedback device for feedback adjustment.
  • the amplitude fluctuates, it will be compensated by feedback, which ensures that the RF high voltage amplitude applied to the RF transmission quadrupole is continuously stable and undisturbed, and the amplitude stability is within 0.1%, forming a stable and constant RF electric field.
  • each radio frequency magnetic toroidal transformer 50 is respectively connected to the control device 10 , so that the control device 10 can generate a DC bias voltage and apply it to the middle tap end of the secondary side of the radio frequency magnetic toroidal transformer 50 , so as to provide the radio frequency magnetic toroidal transformer 50
  • the RF AC high voltage generated by the secondary side coil provides the DC bias reference voltage.
  • the control device 10 obtains a frequency setting value.
  • the frequency setting value may be directly input to the control device 10 by the user, or may be sent by a host computer or a user terminal connected to the control device 10 .
  • the control device 10 controls the first gating device 40 and the second gating device 60 to select different radio frequency magnetic toroidal transformers 50 according to the received set frequency, and continuously adjusts the input of the amplifying device 30 . , and finally scan to obtain the resonant frequency with the minimum power consumption, so that the radio frequency transmission quadrupole power supply circuit has a good adaptive ability.
  • the radio frequency transmission quadrupole power supply device further includes a chassis, the control device 10 , the sine wave generating device 20 and the feedback adjustment device 80 are integrated on the same main control board, the amplifying device 30 and the first gating device 40 , The second gating device 60 and a plurality of radio frequency magnetic toroidal transformers 50 are integrated and arranged on the same power amplifier board, and the main control board and the power amplifier board are pluggable and arranged in the chassis.
  • the number of power amplifier boards in this embodiment is multiple.
  • the number of power amplifier boards is two for description, that is, the first The power amplifier board 500 and the second power amplifier board 600, the two power amplifier boards are two boards with the same structure and function. Among them, there are certain differences in the windings of the RF magnetic toroidal transformer 50, which are used for different RF transmission quadrupoles. high voltage electric field.
  • the main control board 400 , the first power amplifier board 500 and the second power amplifier board 600 can be quickly inserted into and pulled out of the chassis 700 .
  • the main control board 400 communicates with the outside and provides control signals to the first power amplifier board 500 and the second power amplifier board 600.
  • the first power amplifier board 500 provides the first group of radio frequency transmission quadrupoles with a high-frequency radio frequency electric field.
  • the two power amplifier board 600 provides the radio frequency high voltage electric field to the second group of radio frequency transmission quadrupoles. According to different requirements of the radio frequency transmission quadrupole, the first power amplifier board 500 and the second power amplifier board 600 can realize fast custom design and arbitrary plugging and replacement, and can be maintained more conveniently.
  • radio frequency transmission quadrupole power supply equipment adopts an integrated mechanical structure of plug-in modules, so that each functional module can be quickly customized design and maintenance and replacement according to different radio frequency transmission quadrupole rod requirements, which has strong operational convenience.

Abstract

The present application relates to a radio frequency transmission quadrupole rod power source circuit and a control method therefor, and a power source device. A plurality of different radio frequency magnetic ring transformers are arranged. During the transmission of ions having different mass ranges and different mass numbers, different radio frequency magnetic ring transformers can be correspondingly gated by means of a first gating device and a second gating device. Therefore, the transmission of ions having a very wide mass range from a small mass number of ions to a large mass number of ions can be realized. Radio frequency high-voltage electric fields flexibly matching different frequency bands are generated, such that a good efficiency of transmission of ions having a wide mass range and a good instrumental sensitivity are achieved. In addition, by means of a feedback apparatus, a closed-loop control architecture is realized, such that the radio frequency transmission quadrupole rod power source circuit has an extremely high adaptability and stability, and therefore, the application range of a mass spectrometer can be greatly increased.

Description

射频传输四极杆电源电路及其控制方法、电源设备Radio frequency transmission quadrupole power supply circuit and its control method, power supply equipment 技术领域technical field
本申请涉及离子传输技术领域,特别是涉及一种射频传输四极杆电源电路及其控制方法、电源设备。The present application relates to the technical field of ion transmission, and in particular, to a radio frequency transmission quadrupole power supply circuit, a control method thereof, and a power supply device.
背景技术Background technique
质谱法(Mass Spectrometry)是一种对被测样品离子的质荷比(m/q)进行测定分析的一种分析方法。首先将不带电的待测样品离子化,再通过电场或磁场的方法将离子按质荷比分离而得到质量谱,通过分析样品的质量谱和相关信息,可以得到样品的定性、定量结果。常用的质谱仪按分析器来划分,主要分为磁偏转式质谱仪、四极杆式质谱仪、离子阱质谱仪和飞行时间质谱仪。Mass Spectrometry is an analytical method for the determination and analysis of the mass-to-charge ratio (m/q) of the ions of the tested sample. Firstly, the uncharged sample to be tested is ionized, and then the ions are separated according to the mass-to-charge ratio by the method of electric field or magnetic field to obtain the mass spectrum. By analyzing the mass spectrum and related information of the sample, the qualitative and quantitative results of the sample can be obtained. Commonly used mass spectrometers are divided into analyzers, which are mainly divided into magnetic deflection mass spectrometers, quadrupole mass spectrometers, ion trap mass spectrometers and time-of-flight mass spectrometers.
随着质谱技术的发展,质谱仪的仪器性能指标也在不断的提升,新方法、新技术也在不断的引入。其中,在飞行时间质谱仪引入射频传输四极杆碰撞冷却聚焦技术,作为离子传输系统,对离子传输效率的提升和仪器灵敏度的增强有着很好的作用。射频传输四极杆工作时,需要加上特定频率和幅值的射频高压电场,针对不同质量数和质量范围的离子,所加的频率段和幅值有很大的差别,这对射频高压电源电场的控制方法和技术有很高的要求。With the development of mass spectrometry technology, the instrument performance indicators of mass spectrometers are constantly improving, and new methods and technologies are constantly being introduced. Among them, the introduction of radio frequency transmission quadrupole collision cooling focusing technology in the time-of-flight mass spectrometer, as an ion transmission system, has a good effect on the improvement of ion transmission efficiency and the enhancement of instrument sensitivity. When the RF transmission quadrupole works, it is necessary to add a high-frequency high-frequency electric field with a specific frequency and amplitude. For ions with different mass numbers and mass ranges, the added frequency range and amplitude are very different, which is very important for the high-frequency RF power supply. The control method and technology of the electric field have high requirements.
然而,目前飞行时间质谱仪中,针对射频传输四极杆,要实现从低质量数离子到高质量数离子的极宽的质量范围的离子传输,尤其20以内低质量数到4500以上高质量数的离子传输,产生不同频率段灵活匹配的射频高压电场,达到很好的宽质量范围离子传输效率和仪器灵敏度,以及自适应度和稳定度,还没有成熟的方法方案,使得仪器的应用领域也受到很大的限制。However, in the current time-of-flight mass spectrometer, for the radio frequency transmission quadrupole, it is necessary to achieve ion transmission in a very wide mass range from low mass ions to high mass ions, especially the low mass within 20 to the high mass above 4500. It can generate high-frequency high-frequency electric fields with flexible matching in different frequency bands, and achieve good ion transmission efficiency in a wide mass range and instrument sensitivity, as well as adaptability and stability. There is no mature method and scheme, which makes the application field of the instrument also subject to great restrictions.
发明内容SUMMARY OF THE INVENTION
基于此,有必要针对传统的飞行时间质谱仪应用领域受到限制的问题,提供一种射频传输四极杆电源电路及其控制方法、电源设备。Based on this, it is necessary to provide a radio frequency transmission quadrupole power supply circuit, a control method and a power supply device for the problem that the application field of the traditional time-of-flight mass spectrometer is limited.
一种射频传输四极杆电源电路,包括:控制装置、正弦波发生装置、放大装置、第一选通器件、第二选通器件、多个射频磁环变压器、射频传输四极杆和反馈调节装置,所述控制装置连接所述正弦波发生装置,所述正弦波发生装置连接所述放大装置,所述放大装置连接所述第一选通器件,各所述射频磁环变压器的原边分别连接所述第一选通器件,各所述射频磁环变压器的副边分别连接所述第二选通器件,所述第二选通器件连接所述射频传输四极杆,所述射频传输四极杆连接所述反馈调节装置,所述反馈调节装置连接所述控制装置,所述反馈调节装置连接所述放大装置,所述放大装置、所述第一选通器件、各所述射频磁环变压器的副边抽头和所述第二选通器件分别连接所述控制装置。A radio frequency transmission quadrupole power supply circuit, comprising: a control device, a sine wave generating device, an amplifying device, a first gating device, a second gating device, a plurality of radio frequency magnetic ring transformers, a radio frequency transmission quadrupole and a feedback adjustment The control device is connected to the sine wave generating device, the sine wave generating device is connected to the amplifying device, the amplifying device is connected to the first gating device, and the primary sides of the radio frequency magnetic toroidal transformers are respectively The first gating device is connected, the secondary side of each radio frequency magnetic toroidal transformer is respectively connected with the second gating device, the second gating device is connected with the radio frequency transmission quadrupole, and the radio frequency transmission quadrupole The pole rod is connected to the feedback adjustment device, the feedback adjustment device is connected to the control device, the feedback adjustment device is connected to the amplification device, the amplification device, the first gating device, and each of the radio frequency magnetic rings The secondary tap of the transformer and the second gating device are respectively connected to the control device.
在一个实施例中,所述放大装置包括可变增益放大程控调幅器、同相多级放大电路和反相多级放大电路,所述可变增益放大程控调幅器连接所述正弦波发生装置和反馈调节装置,所述同相多级放大电路和所述反相多级放大电路分别连接所述可变增益放大程控调幅器,所述同相多级放大电路和所述反相多级放大电路分别连接所述第一选通器件,所述同相多级放大电路和所述反相多级放大电路分别连接所述控制装置。In one embodiment, the amplifying device includes a variable gain amplifier programmable amplitude modulator, an in-phase multi-stage amplifier circuit and an inverting multi-stage amplifier circuit, and the variable gain amplifier programmable amplitude modulator is connected to the sine wave generating device and the feedback The adjusting device, the in-phase multi-stage amplifying circuit and the inverting multi-stage amplifying circuit are respectively connected to the variable gain amplification program-controlled amplitude modulator, and the in-phase multi-stage amplifying circuit and the inverting multi-stage amplifying circuit are respectively connected to the The first gating device, the in-phase multi-stage amplifier circuit and the inverting multi-stage amplifier circuit are respectively connected to the control device.
在一个实施例中,所述同相多级放大电路包括同相放大器、第一级功率放大器和第二级功率放大器,所述同相放大器连接可变增益放大程控调幅器,所述同相放大器连接所述第一级功率放大器,所述第一级功率放大器连接所述第二级功率放大器,所述第二级功率放大器连接所述第一选通器件,所述同相放大器、所述第一级功率放大器和所述第二级功率放大器分别连接所述控制装置; 和/或,所述反相多级放大电路包括反相放大器、第一级放大器和第二级放大器,所述反相放大器连接可变增益放大程控调幅器,所述反相放大器连接所述第一级放大器,所述第一级放大器连接所述第二级放大器,所述第二级放大器连接所述第一选通器件,所述反相放大器、所述第一级放大器和所述第二级放大器分别连接所述控制装置。In one embodiment, the non-inverting multi-stage amplifier circuit includes a non-inverting amplifier, a first-stage power amplifier and a second-stage power amplifier, the non-inverting amplifier is connected to a variable gain amplification programmable amplitude modulator, and the non-inverting amplifier is connected to the first power amplifier. A first-stage power amplifier, the first-stage power amplifier is connected to the second-stage power amplifier, the second-stage power amplifier is connected to the first gating device, the non-inverting amplifier, the first-stage power amplifier and The second-stage power amplifiers are respectively connected to the control device; and/or, the inverting multi-stage amplifier circuit includes an inverting amplifier, a first-stage amplifier and a second-stage amplifier, and the inverting amplifier is connected to a variable gain Amplifying programmable amplitude modulator, the inverting amplifier is connected to the first-stage amplifier, the first-stage amplifier is connected to the second-stage amplifier, the second-stage amplifier is connected to the first gating device, and the inverting amplifier is connected to the first gate device. The phase amplifier, the first-stage amplifier and the second-stage amplifier are respectively connected to the control device.
在一个实施例中,所述控制装置包括主控制器、功率供电和电流监测器、选通控制器以及中低压发生器,所述主控制器连接所述正弦波发生装置,所述反馈装置连接所述主控制器,所述功率供电和电流监测器、所述选通控制器以及所述中低压发生器分别连接所述主控制器,所述功率供电和电流监测器连接所述放大装置,所述选通控制器连接所述第一选通器件和所述第二选通器件,所述中低压发生器连接各所述射频磁环变压器的副边抽头。In one embodiment, the control device includes a main controller, a power supply and current monitor, a gating controller, and a medium and low voltage generator, the main controller is connected to the sine wave generating device, and the feedback device is connected to the main controller, the power supply and current monitor, the gating controller and the medium and low voltage generator are respectively connected to the main controller, the power supply and current monitor are connected to the amplifying device, The gating controller is connected to the first gating device and the second gating device, and the medium and low voltage generators are connected to the secondary taps of each of the radio frequency magnetic toroidal transformers.
在一个实施例中,所述反馈调节装置包括检波电路、幅值监测器、数模控制器和比例积分调节器,所述检波电路连接所述射频传输四极杆,所述检波电路连接所述比例积分调节器和所述幅值监测器,所述幅值监测器和所述数模控制器分别连接所述控制装置,所述数模控制器连接所述比例积分调节器,所述比例积分调节器连接所述放大装置。In one embodiment, the feedback adjustment device includes a detection circuit, an amplitude monitor, a digital-to-analog controller and a proportional-integral regulator, the detection circuit is connected to the radio frequency transmission quadrupole, and the detection circuit is connected to the A proportional-integral regulator and the amplitude monitor, the amplitude monitor and the digital-analog controller are respectively connected to the control device, the digital-analog controller is connected to the proportional-integral regulator, and the proportional-integral controller is connected to the proportional-integral regulator. A regulator is connected to the amplification device.
一种如上述的射频传输四极杆电源电路的控制方法,包括:获取频率设定值;根据所述频率设定值控制所述第一选通器件和所述第二选通器件选通对应的射频磁环变压器;通过调整所述正弦波发生装置和所述反馈调节装置,得到射频传输四极杆电源电路最小功耗时的谐振频率。A control method for the above-mentioned radio frequency transmission quadrupole power supply circuit, comprising: obtaining a frequency setting value; The radio frequency magnetic toroidal transformer; by adjusting the sine wave generating device and the feedback adjusting device, the resonant frequency of the radio frequency transmission quadrupole power supply circuit at the minimum power consumption is obtained.
在一个实施例中,所述射频磁环变压器包括低频段射频磁环变压器、中频段射频磁环变压器和高频段射频磁环变压器,所述根据所述频率设定值控制所述第一选通器件和所述第二选通器件选通对应的射频磁环变压器的步骤,包括: 根据所述频率设定值与预设第一频段范围进行比较分析;当所述频率设定值处于所述预设第一频段范围内时,控制所述第一选通器件和所述第二选通器件选通所述低频段射频磁环变压器;当所述频率设定值未处于所述预设第一频段范围内时,根据所述频率设定值与预设第二频段范围进行比较分析,所述预设第二频段范围的最小阈值等于所述预设第一频段范围的最大阈值;当所述频率设定值处于所述预设第二频段范围内时,控制所述第一选通器件和所述第二选通器件选通所述中频段射频磁环变压器;当所述频率设定值未处于所述预设第二频段范围内时,根据所述频率设定值与预设第三频段范围进行比较分析,所述预设第三频段范围的最小阈值等于所述预设第二频段范围的最大阈值;当所述频率设定值处于所述预设第三频段范围内时,控制所述第一选通器件和所述第二选通器件选通所述高频段射频磁环变压器。In one embodiment, the radio frequency magnetic toroidal transformer includes a low frequency band radio frequency toroidal transformer, a mid frequency band radio frequency toroidal transformer and a high frequency band radio frequency toroidal transformer, and the first gate is controlled according to the frequency setting value The step of gating the corresponding radio frequency magnetic toroidal transformer by the device and the second gating device includes: comparing and analyzing the frequency setting value and a preset first frequency range; when the frequency setting value is in the When the preset first frequency band is within the range, control the first gating device and the second gating device to gating the low-frequency radio frequency magnetic toroidal transformer; when the frequency setting value is not within the preset first frequency range; When it is within a frequency range, according to the comparison and analysis of the frequency setting value and the preset second frequency band range, the minimum threshold value of the preset second frequency band range is equal to the maximum threshold value of the preset first frequency band range; When the frequency setting value is within the preset second frequency band range, control the first gating device and the second gating device to gating the mid-band radio frequency magnetic toroidal transformer; when the frequency setting When the value is not within the preset second frequency band range, compare and analyze the frequency setting value and the preset third frequency band range, and the minimum threshold value of the preset third frequency band range is equal to the preset second frequency band range. the maximum threshold of the frequency band range; when the frequency setting value is within the preset third frequency band range, control the first gating device and the second gating device to gating the high-frequency radio frequency magnetic ring transformer.
在一个实施例中,所述通过调整所述正弦波发生装置和所述反馈调节装置,得到射频传输四极杆电源电路最小功耗时的谐振频率的步骤,包括:调整所述正弦波发生装置和所述反馈调节装置,并实时采集所述放大装置的电流值;当得到所述放大装置的最小电流值时,读取所述正弦波发生装置的当前频率,即为射频传输四极杆电源电路最小功耗时的谐振频率。In one embodiment, the step of obtaining the resonant frequency of the radio frequency transmission quadrupole power supply circuit with minimum power consumption by adjusting the sine wave generating device and the feedback adjusting device includes: adjusting the sine wave generating device and the feedback adjustment device, and collect the current value of the amplifying device in real time; when the minimum current value of the amplifying device is obtained, read the current frequency of the sine wave generating device, that is, the radio frequency transmission quadrupole power supply The resonant frequency at which the circuit consumes minimum power.
一种射频传输四极杆电源设备,包括上述的射频传输四极杆电源电路,所述控制装置用于根据上述的控制方法扫描得到最小功耗的谐振频率。A radio frequency transmission quadrupole power supply device includes the above-mentioned radio frequency transmission quadrupole power supply circuit, and the control device is used for scanning and obtaining the resonance frequency with the minimum power consumption according to the above-mentioned control method.
在一个实施例中,射频传输四极杆电源设备还包括机箱,所述控制装置、所述正弦波发生装置和所述反馈调节装置集成设置于同一主控板卡,所述放大装置、所述第一选通器件、所述第二选通器件和多个射频磁环变压器集成设置于同一功放板卡,所述主控板卡和所述功放板卡可插拔设置于所述机箱。In one embodiment, the radio frequency transmission quadrupole power supply equipment further includes a chassis, the control device, the sine wave generating device and the feedback adjustment device are integrated and arranged on the same main control board, the amplifying device, the The first gating device, the second gating device and a plurality of radio frequency magnetic toroidal transformers are integrally arranged on the same power amplifier board, and the main control board and the power amplifier board are pluggable and arranged in the chassis.
上述射频传输四极杆电源电路及其控制方法、电源设备,在开始工作时, 控制装置首先控制正弦波发生装置产生相应的正弦波信号,正弦波信号和反馈装置反馈的信号一起经放大装置的放大后,最终由控制装置和第一选通器件、第二选通器件选通下接入的对应射频磁环变压器加载至射频传输四极杆,在射频传输四极杆处生成射频高压电场。上述方案,设置有多个不同的射频磁环变压器,在进行不同质量范围、不同质量数的离子传输时,可通过第一选通器件和第二选通器件对应选通不同的射频磁环变压器,因此可实现从低质量数离子到高质量数离子的极宽的质量范围的离子传输,产生不同频率段灵活匹配的射频高压电场,达到很好的宽质量范围离子传输效率和仪器灵敏度;同时,通过反馈装置实现闭环控制架构,使得射频传输四极杆电源电路具有极高的自适应度和稳定度,因此可极大程度的提高质谱仪的应用范围。The above-mentioned radio frequency transmission quadrupole power supply circuit and its control method and power supply equipment, when starting to work, the control device firstly controls the sine wave generating device to generate a corresponding sine wave signal, and the sine wave signal and the signal fed back by the feedback device are passed through the amplification device together. After amplification, the control device and the corresponding radio frequency magnetic toroidal transformer connected under the gating of the first gating device and the second gating device are finally loaded into the radio frequency transmission quadrupole, and the radio frequency high voltage electric field is generated at the radio frequency transmission quadrupole. The above scheme is provided with a plurality of different radio frequency magnetic toroidal transformers. When carrying out ion transmission of different mass ranges and different mass numbers, different radio frequency magnetic toroidal transformers can be correspondingly selected by the first gating device and the second gating device. Therefore, ion transmission in a very wide mass range from low-mass ions to high-mass ions can be realized, and a radio frequency high-voltage electric field with flexible matching of different frequency bands can be generated, so as to achieve a good wide-mass range ion transmission efficiency and instrument sensitivity; , The closed-loop control structure is realized through the feedback device, so that the radio frequency transmission quadrupole power supply circuit has extremely high adaptability and stability, so the application range of the mass spectrometer can be greatly improved.
附图说明Description of drawings
为了更清楚地说明本申请实施例或传统技术中的技术方案,下面将对实施例或传统技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present application or in the traditional technology, the following briefly introduces the accompanying drawings that are used in the description of the embodiments or the traditional technology. Obviously, the drawings in the following description are only the For some embodiments of the application, for those of ordinary skill in the art, other drawings can also be obtained according to these drawings without any creative effort.
图1为一实施例中射频传输四极杆电源电路结构示意图;1 is a schematic structural diagram of a radio frequency transmission quadrupole power supply circuit in an embodiment;
图2为另一实施例中射频传输四极杆电源电路结构示意图;2 is a schematic structural diagram of a radio frequency transmission quadrupole power supply circuit in another embodiment;
图3为一实施例中放大装置部分结构示意图;3 is a schematic diagram of a partial structure of an amplifying device in an embodiment;
图4为一实施例中射频传输四极杆电源电路的控制方法流程示意图;4 is a schematic flowchart of a control method of a radio frequency transmission quadrupole power supply circuit in an embodiment;
图5为另一实施例中射频传输四极杆电源电路的控制方法流程示意图;5 is a schematic flowchart of a control method of a radio frequency transmission quadrupole power supply circuit in another embodiment;
图6为一实施例中选通控制流程示意图;6 is a schematic diagram of a gating control flow in an embodiment;
图7为一实施例中谐振频率扫描流程示意图;7 is a schematic diagram of a resonant frequency scanning process flow in an embodiment;
图8为一实施例中射频传输四极杆电源设备结构示意图。FIG. 8 is a schematic structural diagram of a radio frequency transmission quadrupole power supply device in an embodiment.
具体实施方式Detailed ways
为了便于理解本申请,下面将参照相关附图对本申请进行更全面的描述。附图中给出了本申请的较佳的实施例。但是,本申请可以以许多不同的形式来实现,并不限于本文所描述的实施例。相反地,提供这些实施例的目的是使对本申请的公开内容的理解更加透彻全面。In order to facilitate understanding of the present application, the present application will be described more fully below with reference to the related drawings. The preferred embodiments of the present application are shown in the accompanying drawings. However, the application may be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that a thorough and complete understanding of the disclosure of this application is provided.
请参阅图1,一种射频传输四极杆电源电路,包括:控制装置10、正弦波发生装置20、放大装置30、第一选通器件40、第二选通器件60、多个射频磁环变压器50、射频传输四极杆70和反馈调节装置80,控制装置10连接正弦波发生装置20,正弦波发生装置20连接放大装置30,放大装置30连接第一选通器件40,各射频磁环变压器50的原边分别连接第一选通器件40,各射频磁环变压器50的副边分别连接第二选通器件60,第二选通器件60连接射频传输四极杆70,射频传输四极杆70连接反馈调节装置80,反馈调节装置80连接控制装置10,反馈调节装置80连接放大装置30,放大装置30、第一选通器件40、各射频磁环变压器50的副边抽头(图未示)和第二选通器件60分别连接控制装置10。Referring to FIG. 1, a radio frequency transmission quadrupole power supply circuit includes: a control device 10, a sine wave generating device 20, an amplifying device 30, a first gating device 40, a second gating device 60, a plurality of radio frequency magnetic rings The transformer 50, the radio frequency transmission quadrupole 70 and the feedback adjustment device 80, the control device 10 is connected to the sine wave generating device 20, the sine wave generating device 20 is connected to the amplifying device 30, the amplifying device 30 is connected to the first gating device 40, and each radio frequency magnetic ring The primary side of the transformer 50 is connected to the first gating device 40 respectively, the secondary side of each radio frequency magnetic toroidal transformer 50 is respectively connected to the second gating device 60, the second gating device 60 is connected to the radio frequency transmission quadrupole 70, and the radio frequency transmission quadrupole The rod 70 is connected to the feedback adjustment device 80, the feedback adjustment device 80 is connected to the control device 10, the feedback adjustment device 80 is connected to the amplifying device 30, the amplifying device 30, the first gating device 40, and the secondary side tap of each radio frequency magnetic toroidal transformer 50 (not shown in the figure). shown) and the second gating device 60 are respectively connected to the control device 10.
具体地,正弦波发生装置20也即DDS正弦波信号发生器,在控制装置10的作用下,通过正弦波发生装置20能够产生不同频率大小的正弦波信号。在一个实施例中,根据采用射频传输四极杆70的飞行时间质谱仪工作需求,正弦波发生装置20具体可生成高频段、中频段以及低频段三种不同频段的正弦波信号。同时,本实施例的射频传输四极杆电源电路中,设置有多个不同频段范围的射频磁环变压器50,在控制装置10以及第一选通器件40的作用下,能够选取对 应所需频段范围的射频磁环变压器50的原边接入电路,同时在控制装置10以及第二选通器件60的作用下,能够使得对应所需频段范围的射频磁环变压器50的副边接入电路。从而选通其中一个射频传输四极杆电源电路接入电路进行工作,以满足不同质量范围离子的需求,进而可实现20以内低质量数到4500以上高质量数的离子传输。Specifically, the sine wave generating device 20 , that is, the DDS sine wave signal generator, can generate sine wave signals of different frequencies through the sine wave generating device 20 under the action of the control device 10 . In one embodiment, according to the working requirements of the time-of-flight mass spectrometer using the radio frequency transmission quadrupole 70, the sine wave generating device 20 can specifically generate sine wave signals in three different frequency bands: high frequency band, mid frequency band and low frequency band. At the same time, in the radio frequency transmission quadrupole power supply circuit of this embodiment, a plurality of radio frequency magnetic toroidal transformers 50 with different frequency ranges are provided. Under the action of the control device 10 and the first gating device 40, the corresponding required frequency band can be selected The primary side of the radio frequency toroidal transformer 50 in the range is connected to the circuit, and under the action of the control device 10 and the second gating device 60 , the secondary side of the radio frequency toroidal transformer 50 corresponding to the required frequency range can be connected to the circuit. Therefore, one of the radio frequency transmission quadrupole power supply circuits is connected to the circuit to work to meet the needs of ions in different mass ranges, and then ion transmission from low mass numbers within 20 to high mass numbers above 4500 can be realized.
同时,本实施例的方案在硬件上采用幅度闭环反馈控制环路,通过反馈装置可实时采集射频传输四极杆70的输出波形进行反馈调节,当加在射频传输四极杆上的射频高压的幅度出现波动时,就会通过反馈补偿回来,这样就保证了加在射频传输四极杆上的射频高压幅度持续稳定不受干扰,幅度稳定度达到0.1%以内,形成了稳定恒定的射频电场。各射频磁环变压器50的副边抽头分别连接控制装置10,因而通过控制装置10可以产生直流偏置电压加到射频磁环变压器50线圈次级侧的中间抽头端,从而给射频磁环变压器50次级侧线圈产生的射频交流高压提供直流偏置基准电压。At the same time, the solution of this embodiment adopts an amplitude closed-loop feedback control loop in hardware, and the output waveform of the radio frequency transmission quadrupole 70 can be collected in real time through the feedback device for feedback adjustment. When the amplitude fluctuates, it will be compensated by feedback, which ensures that the RF high voltage amplitude applied to the RF transmission quadrupole is continuously stable and undisturbed, and the amplitude stability is within 0.1%, forming a stable and constant RF electric field. The secondary side taps of each radio frequency magnetic toroidal transformer 50 are respectively connected to the control device 10 , so that the control device 10 can generate a DC bias voltage and apply it to the middle tap end of the secondary side of the radio frequency magnetic toroidal transformer 50 , so as to provide the radio frequency magnetic toroidal transformer 50 The RF AC high voltage generated by the secondary side coil provides the DC bias reference voltage.
应当指出的是,第一选通器件40和第二选通器件60的具体类型并不是唯一的,是要在控制装置10的作用下能够实现不同路射频磁环变压器50接入电路均可。例如,在一个实施例中,第一选通器件40、第二选通器件60均可以采用继电器来实现,其中第一选通器件40具体可采用功率继电器,而第二选通器件60具体可采用高压继电器。It should be pointed out that the specific types of the first gating device 40 and the second gating device 60 are not unique, and under the action of the control device 10 , different paths of the radio frequency magnetic toroidal transformer 50 can be connected to the circuit. For example, in one embodiment, both the first gating device 40 and the second gating device 60 may be implemented by using relays, wherein the first gating device 40 may be a power relay, and the second gating device 60 may be a power relay. High voltage relay is used.
请参阅图2,在一个实施例中,放大装置30包括可变增益放大程控调幅器31、同相多级放大电路32和反相多级放大电路33,可变增益放大程控调幅器31连接正弦波发生装置20和反馈调节装置80,同相多级放大电路32和反相多级放大电路33分别连接可变增益放大程控调幅器31,同相多级放大电路32和反相多级放大电路33分别连接第一选通器件40,同相多级放大电路32和反相 多级放大电路33分别连接控制装置10。Referring to FIG. 2, in one embodiment, the amplifying device 30 includes a variable gain amplifying programmable amplitude modulator 31, an in-phase multi-stage amplifying circuit 32 and an inverting multi-stage amplifying circuit 33, and the variable gain amplifying programmable amplitude modulator 31 is connected to a sine wave The generating device 20 and the feedback adjusting device 80, the in-phase multi-stage amplifier circuit 32 and the inverting multi-stage amplifier circuit 33 are respectively connected to the variable gain amplifier programmable amplitude modulator 31, and the in-phase multi-stage amplifier circuit 32 and the inverting multi-stage amplifier circuit 33 are respectively connected The first gating device 40 , the in-phase multi-stage amplifying circuit 32 and the inverting multi-stage amplifying circuit 33 are respectively connected to the control device 10 .
具体地,可变增益放大程控调幅器31可进行幅度调制,其与正弦波发生装置20和反馈装置连接,能够接收正弦波发生装置20的正弦载波信号以及反馈调节装置80反馈回来的反馈信号一起进行调制。经过调制后的调幅波分为两路,两路正弦波信号的相位相差180°,其中一路经过同相多级放大电路32进行同相功率放大,而另一路则反相多级放大电路33进行反相功率放大。之后控制器控制第一选通器件40进行选通作用,选取多个射频磁环变压器50中对应的一射频磁环变压器50接入电路,使得两路放大后且相位相差180°的正弦波信号分别从该射频磁环变压器50的初级侧线圈的两端输入,经过该射频磁环变压器50的次级线圈(也即副边绕组)的两端以及第二选通器件60,最终加载至射频传输四极杆70。Specifically, the variable gain amplification programmable amplitude modulator 31 can perform amplitude modulation, is connected to the sine wave generating device 20 and the feedback device, and can receive the sinusoidal carrier signal of the sine wave generating device 20 and the feedback signal fed back by the feedback adjustment device 80 together to modulate. The modulated AM wave is divided into two paths, the phases of the two sine wave signals differ by 180°, one of which is in-phase power amplification by the in-phase multi-stage amplifying circuit 32, and the other is inverting by the in-phase multi-stage amplifying circuit 33. Power amplification. After that, the controller controls the first gating device 40 to perform gating, and selects a corresponding radio frequency magnetic toroidal transformer 50 among the plurality of radio frequency magnetic toroidal transformers 50 to connect to the circuit, so that the two amplified sine wave signals have a phase difference of 180°. Input from the two ends of the primary side coil of the radio frequency toroidal transformer 50 respectively, pass through the two ends of the secondary coil (that is, the secondary winding) of the radio frequency toroidal transformer 50 and the second gating device 60, and finally load it into the radio frequency Transmission quadrupole 70 .
可以理解,为了保证射频传输四极杆70能够生成射频高压电场,经过第二选通器件60后输出的两路正弦波信号,分别加载至射频传输四极杆70的任意两个邻杆(第一组邻杆)上,而射频传输四极杆70的两组邻杆相连导通,可通过另外一组邻杆分别将两路正弦波信号输出。本实施例的方案,对不同频段、不同质量范围的离子,采用多级功率放大电路架构,具有很高的射频高压幅值驱动能力。It can be understood that, in order to ensure that the radio frequency transmission quadrupole 70 can generate a radio frequency high-voltage electric field, the two-way sine wave signals output after passing through the second gating device 60 are respectively loaded into any two adjacent rods of the radio frequency transmission quadrupole 70 (No. One group of adjacent rods), and the two groups of adjacent rods of the radio frequency transmission quadrupole 70 are connected and conducted, and two sine wave signals can be output through the other group of adjacent rods. The solution of this embodiment adopts a multi-stage power amplifying circuit structure for ions of different frequency bands and different mass ranges, and has a high RF high-voltage amplitude driving capability.
应当指出的是,同相多级放大电路32以及反相多级放大电路33的具体结构并不是唯一的,在一个实施例中,请结合参阅图2,同相多级放大电路32包括同相放大器321、第一级功率放大器322和第二级功率放大器323,同相放大器321连接可变增益放大程控调幅器31,同相放大器321连接第一级功率放大器322,第一级功率放大器322连接第二级功率放大器323,第二级功率放大器323连接第一选通器件40,同相放大器321、第一级功率放大器322和第二级功 率放大器323分别连接控制装置10;和/或,反相多级放大电路33包括反相放大器331、第一级放大器332和第二级放大器333,反相放大器331连接可变增益放大程控调幅器31,反相放大器331连接第一级放大器332,第一级放大器332连接第二级放大器333,第二级放大器333连接第一选通器件40,反相放大器331、第一级放大器332和第二级放大器333分别连接控制装置10。It should be noted that the specific structures of the non-inverting multi-stage amplifier circuit 32 and the inverting multi-stage amplifier circuit 33 are not unique. In one embodiment, please refer to FIG. The first-stage power amplifier 322 and the second-stage power amplifier 323, the non-inverting amplifier 321 is connected to the variable gain amplifier programmable amplitude modulator 31, the non-inverting amplifier 321 is connected to the first-stage power amplifier 322, and the first-stage power amplifier 322 is connected to the second-stage power amplifier 323, the second-stage power amplifier 323 is connected to the first gating device 40, the non-inverting amplifier 321, the first-stage power amplifier 322 and the second-stage power amplifier 323 are respectively connected to the control device 10; and/or, the inverting multi-stage amplifier circuit 33 It includes an inverting amplifier 331, a first-stage amplifier 332 and a second-stage amplifier 333. The inverting amplifier 331 is connected to the variable gain amplifier programmable amplitude modulator 31, the inverting amplifier 331 is connected to the first-stage amplifier 332, and the first-stage amplifier 332 is connected to the first-stage amplifier 332. The second stage amplifier 333 and the second stage amplifier 333 are connected to the first gating device 40 , and the inverting amplifier 331 , the first stage amplifier 332 and the second stage amplifier 333 are respectively connected to the control device 10 .
具体地,本实施例的方案,经过可变增益放大程控调幅器31输出的两路正弦波信号,其中一路经过同相放大器321、第一级功率放大器322、第二级功率放大器323的放大输出同相功率放大正弦波,一路经过反相放大器331、第一级放大器332、第二级放大器333的放大之后输出反相功率放大正弦波,两路正弦波相位相差180°。经过功率继电器(也即第一选通器件40)选通后加载到对应导通的射频磁环变压器50初级侧线圈的两端,经过射频磁环变压器50的匝比升压,射频磁环变压器50次级侧线圈两端输出两路相位相差180°的射频高压正弦波,经过高压继电器(也即第二选通器件60)选通,加到射频传输四极杆的两个邻杆上,形成射频高压电场,射频传输四极杆的两组对杆相连导通,另一组邻杆输出的两路射频高压正弦波。Specifically, in the solution of this embodiment, the two channels of sine wave signals output by the programmable amplitude modulator 31 are amplified by the variable gain, and one channel of the signals is amplified and output in-phase by the non-inverting amplifier 321 , the first-stage power amplifier 322 and the second-stage power amplifier 323 . The power amplified sine wave is amplified by the inverting amplifier 331, the first-stage amplifier 332, and the second-stage amplifier 333, and then outputs an inverting power amplified sine wave. The phase difference between the two sine waves is 180°. After being gated by the power relay (ie, the first gating device 40 ), it is loaded to the two ends of the primary side coil of the radio frequency magnetic toroidal transformer 50 that is turned on, and is boosted by the turns ratio of the radio frequency magnetic toroidal transformer 50 . The two ends of the secondary side coil of 50 output two channels of RF high-voltage sine waves with a phase difference of 180°, which are gated by the high-voltage relay (ie the second gating device 60) and added to the two adjacent rods of the RF transmission quadrupole, A radio frequency high voltage electric field is formed, the two pairs of rods of the radio frequency transmission quadrupole are connected and conducted, and the other group of adjacent rods outputs two channels of radio frequency high voltage sine waves.
第一级功率放大器322、第二级功率放大器323以及第一级放大器332和第二级放大器333的具体结构并不是唯一的,在一个实施例中,请结合参阅图3,第一级功率放大器322包括第一放大器K1、第一电阻R1、第二电阻R2和第三电阻R3,第二级功率放大器323包括第一开关管Q1和第二开关管Q2,第一级放大器332包括第二放大器K2、第四电阻R4、第五电阻R5和第六电阻R6,第二级放大器333包括第三开关管Q3和第四开关管Q4;第一电阻R1的一端连接第一放大器K1的正向输入端,第一电阻R1的另一端连接同相放大器321,第一放大器K1的反向输入端连接第二电阻R2的一端和第三电阻R3的一端,第二电 阻R2的另一端接地,第三电阻R3的另一端连接第一放大器K1的输出端、第一开关管Q1的控制端和第二开关管Q2的控制端,第一开关管Q1的第一端连接电源,第一开关管Q1的第二端连接第二开关管Q2的第一端和第一选通器件40(图未示),第二开关管Q2的第二端连接电源;第四电阻R4的一端连接第二放大器K2的正向输入端,第四电阻R4的另一端连接反相放大器331,第二放大器K2的反向输入端连接第五电阻R5的一端和第六电阻R6的一端,第五电阻R5的另一端接地,第六电阻R6的另一端连接第二放大器K2的输出端、第三开关管Q3的控制端和第四开关管Q4的控制端,第三开关管Q3的第一端连接电源,第三开关管Q3的第二端连接第四开关管Q4的第一端和第一选通器件40,第四开关管Q4的第二端连接电源。The specific structures of the first-stage power amplifier 322, the second-stage power amplifier 323, and the first-stage amplifier 332 and the second-stage amplifier 333 are not unique. In one embodiment, please refer to FIG. 3 in conjunction with the first-stage power amplifier. 322 includes a first amplifier K1, a first resistor R1, a second resistor R2 and a third resistor R3, the second stage power amplifier 323 includes a first switch Q1 and a second switch Q2, and the first stage amplifier 332 includes a second amplifier K2, the fourth resistor R4, the fifth resistor R5 and the sixth resistor R6, the second-stage amplifier 333 includes a third switch Q3 and a fourth switch Q4; one end of the first resistor R1 is connected to the forward input of the first amplifier K1 The other end of the first resistor R1 is connected to the non-inverting amplifier 321, the inverting input end of the first amplifier K1 is connected to one end of the second resistor R2 and one end of the third resistor R3, the other end of the second resistor R2 is grounded, and the third resistor The other end of R3 is connected to the output end of the first amplifier K1, the control end of the first switch tube Q1 and the control end of the second switch tube Q2, the first end of the first switch tube Q1 is connected to the power supply, and the first end of the first switch tube Q1 The two ends are connected to the first end of the second switch tube Q2 and the first gating device 40 (not shown), the second end of the second switch tube Q2 is connected to the power supply; one end of the fourth resistor R4 is connected to the positive terminal of the second amplifier K2 To the input end, the other end of the fourth resistor R4 is connected to the inverting amplifier 331, the inverting input end of the second amplifier K2 is connected to one end of the fifth resistor R5 and one end of the sixth resistor R6, and the other end of the fifth resistor R5 is grounded, The other end of the sixth resistor R6 is connected to the output end of the second amplifier K2, the control end of the third switch tube Q3 and the control end of the fourth switch tube Q4, the first end of the third switch tube Q3 is connected to the power supply, and the third switch tube Q3 is connected to the power supply. The second end of Q3 is connected to the first end of the fourth switch tube Q4 and the first gating device 40 , and the second end of the fourth switch tube Q4 is connected to the power supply.
具体地,经同相放大器321输出的正弦波同相信号VIN1以及经反相放大器331输出的正弦波反相信号VIN2,分别经过第一级高速功率运放(也即第一放大器K1和第二放大器K2)相同比例放大,分别进入第二级功率放大器323和第二级放大器333中的双电源共集电极三极管互补推挽功放电路,输出同相、反相两路有很好电流驱动和电压驱动能力的正弦波功率信号,经过选通后分别加到相应射频磁环变压器50初级侧的两端,采用的射频磁环,在射频频段的谐振点处,可以有极低的损耗和升压放大倍数。经过一级功放、二级功放和专用的射频磁环变压器50,这样就使射频磁环变压器50线圈的次级侧可以输出幅值很高射频高压,很好的满足不同频段不同质量数离子的射频高压需求。Specifically, the sine wave in-phase signal VIN1 output by the non-inverting amplifier 321 and the sine wave in-phase signal VIN2 output by the inverting amplifier 331 pass through the first-stage high-speed power operational amplifier (that is, the first amplifier K1 and the second amplifier respectively). K2) Amplify at the same ratio, enter the dual power supply common collector triode complementary push-pull power amplifier circuit in the second-stage power amplifier 323 and the second-stage amplifier 333 respectively, the output in-phase and anti-phase two channels have good current drive and voltage drive capability The sine wave power signal is applied to both ends of the primary side of the corresponding RF magnetic ring transformer 50 after gating. The RF magnetic ring used can have extremely low loss and boost magnification at the resonance point of the RF frequency band. . After the first-level power amplifier, the second-level power amplifier and the dedicated RF magnetic toroidal transformer 50, the secondary side of the RF magnetic toroidal transformer 50 can output high-amplitude RF high-voltage, which can well meet the requirements of different frequency bands and different mass numbers of ions. RF high voltage requirements.
应当指出的是,在一个实施例中,射频磁环变压器50采用特殊材料的变压器线圈,以保证射频磁环变压器50的工作可靠性,具体可以为羰基铁粉磁芯材料。It should be noted that, in one embodiment, the radio frequency magnetic toroidal transformer 50 adopts a transformer coil made of special material to ensure the working reliability of the radio frequency magnetic toroidal transformer 50, which may be carbonyl iron powder magnetic core material.
请参阅图2,在一个实施例中,控制装置10包括主控制器11、功率供电和 电流监测器12、选通控制器13以及中低压发生器14,主控制器11连接正弦波发生装置20,反馈装置连接主控制器11,功率供电和电流监测器12、选通控制器13以及中低压发生器14分别连接主控制器11,功率供电和电流监测器12连接放大装置30,选通控制器13连接第一选通器件40和第二选通器件60,中低压发生器14连接各射频磁环变压器50的副边抽头。Referring to FIG. 2 , in one embodiment, the control device 10 includes a main controller 11 , a power supply and current monitor 12 , a gating controller 13 and a medium and low voltage generator 14 , and the main controller 11 is connected to the sine wave generating device 20 , the feedback device is connected to the main controller 11, the power supply and current monitor 12, the gating controller 13 and the medium and low voltage generator 14 are respectively connected to the main controller 11, the power supply and the current monitor 12 are connected to the amplifying device 30, and the gating control The generator 13 is connected to the first gating device 40 and the second gating device 60 , and the medium and low voltage generator 14 is connected to the secondary taps of each radio frequency magnetic toroidal transformer 50 .
具体地,控制装置10包括实现主控制功能的主控制器11,对放大装置30的功率供电和电流进行监测的功率供电和电流监测器12,用来控制第一选通器件40和第二选通器件60以相应通道运行的选通控制器13,以及用来给各个射频磁环变压器50的次级线圈的抽头提供直流偏置电压的中低压发生器14几部分。在射频传输四极杆电源电路开启运行时,主控制器11通过向选通控制器13发送控制指令,使得选通控制器13控制第一选通器件40和第二选通器件60亦相应通道运行,使得对应的射频磁环变压器50接入电路;同时控制中低压发生器14向该射频磁环变压器50的次级线圈提供直流偏置电流,最终使得射频传输四极杆70处产生高压电场,通过功率供电和电流监测器12能够采集流经放大装置30的电流大小,进而快速精准的扫描出射频传输四极杆电源电路最小功耗的谐振频率。Specifically, the control device 10 includes a main controller 11 that implements a main control function, a power supply and current monitor 12 that monitors the power supply and current of the amplifying device 30, and is used to control the first gating device 40 and the second selection device 40. The gating controller 13 for operating the pass device 60 in the corresponding channel, and the medium and low voltage generator 14 for supplying the taps of the secondary coils of each radio frequency toroidal transformer 50 with DC bias voltage. When the radio frequency transmission quadrupole power supply circuit is turned on, the main controller 11 sends a control instruction to the gating controller 13, so that the gating controller 13 controls the first gating device 40 and the second gating device 60 to corresponding channels operation, so that the corresponding radio frequency magnetic toroidal transformer 50 is connected to the circuit; at the same time, the medium and low voltage generator 14 is controlled to provide a DC bias current to the secondary coil of the radio frequency magnetic toroidal transformer 50, and finally a high-voltage electric field is generated at the radio frequency transmission quadrupole 70. , the power supply and current monitor 12 can collect the magnitude of the current flowing through the amplifying device 30, and then quickly and accurately scan the resonant frequency of the minimum power consumption of the radio frequency transmission quadrupole power supply circuit.
请参阅图2,在一个实施例中,反馈调节装置80包括检波电路81、幅值监测器84、数模控制器82和比例积分调节器83,检波电路81连接射频传输四极杆70,检波电路81连接比例积分调节器83和幅值监测器84,幅值监测器84和数模控制器82分别连接控制装置10,数模控制器82连接比例积分调节器83,比例积分调节器83连接放大装置30。Referring to FIG. 2, in one embodiment, the feedback adjustment device 80 includes a detection circuit 81, an amplitude monitor 84, a digital-to-analog controller 82, and a proportional-integral regulator 83. The detection circuit 81 is connected to the radio frequency transmission quadrupole 70, and the detection The circuit 81 is connected to the proportional-integral regulator 83 and the amplitude monitor 84, the amplitude monitor 84 and the digital-analog controller 82 are respectively connected to the control device 10, the digital-analog controller 82 is connected to the proportional-integral regulator 83, and the proportional-integral regulator 83 is connected Amplifying device 30 .
具体地,射频传输四极杆70输出的两路射频高压正弦波经过检波电路81进行采集分析后,输出反馈信号加到比例积分调节器83(PI调节器)上,与主 控制器11通过DA控制(也即数模控制器82)产生的控制信号一起,经过PI调节进行误差比较放大,形成硬件闭环负反馈,最终经PI调节器输出的信号反馈至放大装置30,实时的对射频高压正弦波幅度进行补偿控制,以保证幅值的稳定恒定。同时,检波电路81输出的反馈信号还经过幅值监测器84返回给主控制器11进行幅值实时监测,由此形成完整的硬件闭环反馈控制环路。Specifically, after the two-way RF high-voltage sine wave output by the RF transmission quadrupole 70 is collected and analyzed by the detection circuit 81, the output feedback signal is added to the proportional integral regulator 83 (PI regulator), and the main controller 11 is passed through the DA The control signal generated by the control (that is, the digital-analog controller 82), is adjusted by PI to compare and amplify the error, forming a hardware closed-loop negative feedback, and finally the signal output by the PI regulator is fed back to the amplifying device 30, and real-time RF high-voltage sinusoidal The amplitude of the wave is compensated and controlled to ensure a stable and constant amplitude. At the same time, the feedback signal output by the detection circuit 81 is also returned to the main controller 11 through the amplitude monitor 84 for real-time monitoring of the amplitude, thereby forming a complete hardware closed-loop feedback control loop.
上述射频传输四极杆电源电路,在开始工作时,控制装置10首先控制正弦波发生装置20产生相应的正弦波信号,正弦波信号和反馈装置反馈的信号一起经放大装置30的放大后,最终由控制装置10和第一选通器件40、第二选通器件60选通下接入的对应射频磁环变压器50加载至射频传输四极杆70,在射频传输四极杆70处生成射频高压电场。上述方案,设置有多个不同的射频磁环变压器50,在进行不同质量范围、不同质量数的离子传输时,可通过第一选通器件40和第二选通器件60对应选通不同的射频磁环变压器50,因此可实现从低质量数离子到高质量数离子的极宽的质量范围的离子传输,产生不同频率段灵活匹配的射频高压电场,达到很好的宽质量范围离子传输效率和仪器灵敏度;同时,通过反馈装置实现闭环控制架构,使得射频传输四极杆电源电路具有极高的自适应度和稳定度,因此可极大程度的提高质谱仪的应用范围。The above-mentioned radio frequency transmission quadrupole power supply circuit, when starting to work, the control device 10 first controls the sine wave generating device 20 to generate a corresponding sine wave signal, and the sine wave signal and the signal fed back by the feedback device are amplified by the amplifying device 30. The corresponding radio frequency magnetic toroidal transformer 50 connected by the control device 10 and the first gating device 40 and the second gating device 60 is loaded into the radio frequency transmission quadrupole 70, and a radio frequency high voltage is generated at the radio frequency transmission quadrupole 70. electric field. The above scheme is provided with a plurality of different radio frequency magnetic toroidal transformers 50. When carrying out ion transmission of different mass ranges and different mass numbers, different radio frequencies can be correspondingly gated through the first gating device 40 and the second gating device 60. The magnetic toroidal transformer 50 can realize ion transmission in a very wide mass range from low-mass ions to high-mass ions, generate radio frequency high-voltage electric fields flexibly matched in different frequency bands, and achieve good ion transmission efficiency in a wide mass range and Instrument sensitivity; at the same time, the closed-loop control structure is realized through the feedback device, so that the radio frequency transmission quadrupole power supply circuit has a very high degree of adaptability and stability, so it can greatly improve the application range of the mass spectrometer.
请参阅图4,一种如上述的射频传输四极杆电源电路的控制方法,包括步骤S100、步骤S200和步骤S300。Please refer to FIG. 4 , a control method of the above-mentioned radio frequency transmission quadrupole power supply circuit includes step S100 , step S200 and step S300 .
步骤S100,获取频率设定值;步骤S200,根据频率设定值控制第一选通器件和第二选通器件选通对应的射频磁环变压器;步骤S300,通过调整正弦波发生装置和反馈调节装置,得到射频传输四极杆电源电路最小功耗时的谐振频率。Step S100, obtaining a frequency setting value; Step S200, controlling the radio frequency magnetic toroidal transformer corresponding to the first gating device and the second gating device gating according to the frequency setting value; Step S300, adjusting the sine wave generating device and feedback adjustment The device is used to obtain the resonant frequency at the minimum power consumption of the radio frequency transmission quadrupole power supply circuit.
具体地,射频传输四极杆电源电路的具体结构如上述各个实施例及附图所 示,本申请提供的射频传输四极杆电源电路在开启工作时,采用宽频率范围精细步进的频率扫描程序算法,在不同频率段下,针对具有不同等效电容的射频传输四极杆,以及相匹配的射频磁环变压器50次级侧的电感线圈,可以一键快速精准的扫描出最小功耗的谐振频率。首先控制装置10获取频率设定值,该频率设定值可以是用户直接输入控制装置10,也可以是通过与控制装置10相连接的上位机或者用户终端发送。Specifically, the specific structure of the radio frequency transmission quadrupole power supply circuit is as shown in the above embodiments and the accompanying drawings. When the radio frequency transmission quadrupole power supply circuit provided by the present application is turned on and works, a wide frequency range and fine step frequency scanning are adopted. The program algorithm, in different frequency bands, for the RF transmission quadrupole with different equivalent capacitance and the matching inductance coil on the secondary side of the RF magnetic toroidal transformer 50, can quickly and accurately scan the minimum power consumption with one key. Resonant frequency. First, the control device 10 obtains a frequency setting value. The frequency setting value may be directly input to the control device 10 by the user, or may be sent by a host computer or a user terminal connected to the control device 10 .
之后控制装置10根据接收到的设定频率的大小,对应控制第一选通器件40和第二选通器件60选通不同的射频磁环变压器50,通过对放大装置30的输入进行不断的调整,最终扫描得到最小功耗的谐振频率,使射频传输四极杆电源电路有了很好的自适应能力。Afterwards, the control device 10 controls the first gating device 40 and the second gating device 60 to select different radio frequency magnetic toroidal transformers 50 according to the received set frequency, and continuously adjusts the input of the amplifying device 30 . , and finally scan to obtain the resonant frequency with the minimum power consumption, so that the radio frequency transmission quadrupole power supply circuit has a good adaptive ability.
扫描得到谐振频率的方式并不是唯一的,请参阅图5,在一个实施例中,步骤S300包括步骤S310和步骤S320。The method of scanning to obtain the resonance frequency is not unique. Please refer to FIG. 5 . In one embodiment, step S300 includes step S310 and step S320.
步骤S310,调整正弦波发生装置和反馈调节装置,并实时采集放大装置的电流值;步骤S320,当得到放大装置的最小电流值时,读取正弦波发生装置的当前频率,即为射频传输四极杆电源电路最小功耗时的谐振频率。Step S310, adjust the sine wave generating device and the feedback adjustment device, and collect the current value of the amplifying device in real time; Step S320, when the minimum current value of the amplifying device is obtained, read the current frequency of the sine wave generating device, which is the radio frequency transmission four. The resonant frequency at which the pole power circuit has minimum power dissipation.
具体地,当控制装置10对正弦波发生装置20和反馈调节装置80进行调整时,对应的加载至放大装置30的信号也会发生变化,此时控制装置10通过接收功率供电和电流监测器12采集并发送的电流信号进行分析,得到最小电流信号时,将最小电流信号对应的频率作为谐振频率即可。Specifically, when the control device 10 adjusts the sine wave generating device 20 and the feedback adjustment device 80, the corresponding signal loaded to the amplifying device 30 will also change. At this time, the control device 10 supplies power and the current monitor 12 by receiving power. The collected and sent current signal is analyzed, and when the minimum current signal is obtained, the frequency corresponding to the minimum current signal can be taken as the resonant frequency.
请参阅图6,在一个实施例中,射频磁环变压器50包括低频段射频磁环变压器50、中频段射频磁环变压器50和高频段射频磁环变压器50,步骤S200包括步骤S210、步骤S220、步骤S230、步骤S240、步骤S250和步骤S260。Referring to FIG. 6 , in one embodiment, the radio frequency magnetic toroidal transformer 50 includes a low-frequency radio frequency toroidal transformer 50, a mid-frequency radio frequency toroidal transformer 50 and a high-frequency radio frequency toroidal transformer 50, and step S200 includes steps S210, S220, Step S230, Step S240, Step S250 and Step S260.
步骤S210,根据频率设定值与预设第一频段范围进行比较分析;步骤S220, 当频率设定值处于预设第一频段范围内时,控制第一选通器件和第二选通器件选通低频段射频磁环变压器;步骤S230,当频率设定值未处于预设第一频段范围内时,根据频率设定值与预设第二频段范围进行比较分析;预设第二频段范围的最小阈值等于预设第一频段范围的最大阈值;步骤S240,当频率设定值处于预设第二频段范围内时,控制第一选通器件和第二选通器件选通中频段射频磁环变压器;步骤S250,当频率设定值未处于预设第二频段范围内时,根据频率设定值与预设第三频段范围进行比较分析;预设第三频段范围的最小阈值等于预设第二频段范围的最大阈值;步骤S260,当频率设定值处于预设第三频段范围内时,控制第一选通器件和第二选通器件选通高频段射频磁环变压器。Step S210, compare and analyze the frequency setting value and the preset first frequency band range; Step S220, control the first gating device and the second gating device to select when the frequency setting value is within the preset first frequency band range. Connect the low-frequency radio frequency magnetic toroidal transformer; Step S230, when the frequency setting value is not within the preset first frequency band range, compare and analyze the frequency setting value and the preset second frequency band range; The minimum threshold value is equal to the maximum threshold value of the preset first frequency band range; Step S240, when the frequency setting value is within the preset second frequency band range, control the first gating device and the second gating device to gating the mid-band radio frequency magnetic ring Transformer; Step S250, when the frequency setting value is not within the preset second frequency band range, compare and analyze the frequency setting value and the preset third frequency band range; the minimum threshold value of the preset third frequency band range is equal to the preset first frequency band range. The maximum threshold of the second frequency band range; step S260, when the frequency setting value is within the preset third frequency band range, control the first gating device and the second gating device to gating the high frequency band radio frequency magnetic toroidal transformer.
具体地,请结合参阅图7,射频传输四极杆电源电路上电进行系统初始化,控制装置10首先读取上位机发来的Freg设定频率值(也即上述频率设定值),开始判断设定频率值是否在预设第一频段范围内,即是否在FS1和FE1频率之间。如果判断结果为是,开启选通通道1,功率继电器(第一选通器件40)和高压继电器(第二选通器件60)选选通第一路,低频段射频磁环变压器50导通。之后即可通过不断精细步进调整反馈调节装置80中数模控制器82(DAC)的输出和调整DDS频率(也即正弦波发生装置20)输出,通过控制装置10的功率供电和电流监测器12进行电流信号采集,循环查找放大装置30的最小电流值,当最终找到最小电流值时,读取当前实际频率值Freg。判断该频率值是否在预设第一频段范围内,如果是,说明已经找到预设第一频段范围内匹配的谐振频率,频率扫描结束;如果否,说明射频传输四极杆负载连接上有错误,程序结束。Specifically, referring to FIG. 7 , the radio frequency transmission quadrupole power supply circuit is powered on to perform system initialization, and the control device 10 first reads the Freg set frequency value (that is, the above-mentioned frequency set value) sent by the host computer, and starts to judge Set whether the frequency value is within the preset first frequency range, that is, whether it is between the frequencies of FS1 and FE1. If the judgment result is yes, the gating channel 1 is turned on, the power relay (the first gating device 40 ) and the high voltage relay (the second gating device 60 ) are gating the first channel, and the low-frequency radio frequency magnetic toroidal transformer 50 is turned on. After that, the output of the digital-analog controller 82 (DAC) in the feedback adjustment device 80 can be adjusted continuously and finely and the output of the DDS frequency (that is, the sine wave generating device 20 ) can be adjusted. 12. Carry out current signal acquisition, cycle to find the minimum current value of the amplifying device 30, and when the minimum current value is finally found, read the current actual frequency value Freg. Determine whether the frequency value is within the preset first frequency band. If it is, it means that a matching resonance frequency within the preset first frequency band has been found, and the frequency scan is over; if not, it means that there is an error in the connection of the radio frequency transmission quadrupole load. , the program ends.
如果判断结果设定频率值不在预设第一频段范围内,则接着判断设定频率值是否在预设第二频段范围内,即是否在FS2和FE2频率之间。如果是,开启 选通通道2,功率继电器和高压继电器选通第二路,中频段射频磁环变压器50导通,同样通过不断精细步进调整数模控制器82输出和调整DDS频率输出,通过控制装置10的功率供电和电流监测器12进行电流信号采集,循环查找放大装置30的最小电流值,当最终找到最小电流值时,读取当前实际频率值Freg。判断该频率值是否在预设第二频段范围内,如果是,说明已经找到预设第二频段范围内匹配的谐振频率,频率扫描结束;如果否,说明射频传输四极杆负载连接上有错误,程序结束。If the set frequency value is not within the preset first frequency band range as a result of the judgment, then it is then judged whether the set frequency value is within the preset second frequency band range, that is, whether it is between FS2 and FE2 frequencies. If yes, turn on the gating channel 2, the power relay and the high-voltage relay are gating the second channel, and the mid-band RF magnetic toroidal transformer 50 is turned on. Also, adjust the output of the digital-analog controller 82 and adjust the DDS frequency output through fine steps. The power supply and current monitor 12 of the control device 10 collects the current signal, searches for the minimum current value of the amplifying device 30 cyclically, and reads the current actual frequency value Freg when the minimum current value is finally found. Determine whether the frequency value is within the preset second frequency band. If it is, it means that a matching resonant frequency within the preset second frequency band has been found, and the frequency scan ends; if not, it means that there is an error in the connection of the radio frequency transmission quadrupole load. , the program ends.
如果设定频率值仍然不在预设第二频段范围内,则再接着判断设定频率是否在预设第三频段范围内,即是否在FS3和FE3频率之间。如果是,开启选通通道3,功率继电器和高压继电器选通第三路,高频段射频磁环变压器50导通,同样通过不断精细步进调整DAC输出和调整DDS频率输出,通过控制装置10的功率供电和电流监测器12进行电流信号采集,循环查找放大装置30的最小电流值,当最终找到最小电流值时,读取当前实际频率值Freg。判断该频率值是否在预设第三频段范围内,如果是,说明已经找到预设第三频段内匹配的谐振频率,频率扫描结束;如果否,说明射频传输四极杆负载连接上有错误,程序结束,这样就在上电瞬间实现了快速精准的谐振频率扫描。If the set frequency value is still not within the preset second frequency band range, it is then judged whether the set frequency value is within the preset third frequency band range, that is, whether it is between FS3 and FE3 frequencies. If yes, turn on the gating channel 3, the power relay and the high-voltage relay are gating the third channel, the high-frequency radio frequency magnetic toroidal transformer 50 is turned on, and also adjust the DAC output and the DDS frequency output by continuously fine-stepping, through the control device 10 The power supply and current monitor 12 collects the current signal, searches for the minimum current value of the amplifying device 30 cyclically, and reads the current actual frequency value Freg when the minimum current value is finally found. Determine whether the frequency value is within the preset third frequency band. If yes, it means that the matching resonance frequency in the preset third frequency band has been found, and the frequency scan is over; At the end of the program, a fast and accurate resonant frequency scan is achieved at the moment of power-on.
应当指出的是,预设第一频段范围、预设第二频段范围和预设第三频段范围之间的关系为,FS1<FE1=FS2<FE2=FS3<FE3。在一个实施例中,在通过控制装置10的功率供电和电流监测器12进行电流信号采集,循环查找放大装置30的最小电流值时,可以是循环查找一分钟,将这一分钟内的最下电流值作为放大装置30的最小电流值,实现快速精准的谐振频率扫描。It should be noted that the relationship between the preset first frequency range, the preset second frequency range, and the preset third frequency range is FS1<FE1=FS2<FE2=FS3<FE3. In one embodiment, when collecting the current signal through the power supply of the control device 10 and the current monitor 12, and cyclically searching for the minimum current value of the amplifying device 30, it may be cyclically searching for one minute, and the lowest current value in this minute is The current value is used as the minimum current value of the amplifying device 30 to achieve fast and accurate resonant frequency scanning.
上述射频传输四极杆电源电路的控制方法,采用宽频率范围精细步进的频率扫描程序算法,针对不同电容特性的传输四极杆,实现高中低三个频段的射 频高压灵活切换选通和谐振频率自动快速精准扫描。The control method of the above-mentioned radio frequency transmission quadrupole power supply circuit adopts the frequency scanning program algorithm with wide frequency range and fine step, and realizes the flexible switching gating and resonance of radio frequency high voltage in three frequency bands of high, middle and low frequency according to the transmission quadrupole of different capacitance characteristics. The frequency is automatically scanned quickly and accurately.
一种射频传输四极杆电源设备,包括上述的射频传输四极杆电源电路,控制装置10用于根据上述的控制方法扫描得到最小功耗的谐振频率。A radio frequency transmission quadrupole power supply device includes the above radio frequency transmission quadrupole power supply circuit, and the control device 10 is configured to scan and obtain the resonant frequency with the minimum power consumption according to the above control method.
具体地,射频传输四极杆电源电路的具体结构是上述各个实施例及附图所示,正弦波发生装置20也即DDS正弦波信号发生器,在控制装置10的作用下,通过正弦波发生装置20能够产生不同频率大小的正弦波信号。在一个实施例中,根据采用射频传输四极杆70的飞行时间质谱仪工作需求,正弦波发生装置20具体可生成高频段、中频段以及低频段三种不同频段的正弦波信号。同时,本实施例的射频传输四极杆电源电路中,设置有多个不同频段范围的射频磁环变压器50,在控制装置10以及第一选通器件40的作用下,能够选取对应所需频段范围的射频磁环变压器50的原边接入电路,同时在控制装置10以及第二选通器件60的作用下,能够使得对应所需频段范围的射频磁环变压器50的副边接入电路。从而选通其中一个射频传输四极杆电源电路接入电路进行工作,以满足不同质量范围离子的需求,进而可实现20以内低质量数到4500以上高质量数的离子传输。Specifically, the specific structure of the radio frequency transmission quadrupole power supply circuit is shown in the above-mentioned embodiments and the accompanying drawings. The sine wave generating device 20 is also the DDS sine wave signal generator. Under the action of the control device 10, the sine wave generates The device 20 can generate sine wave signals of different frequencies. In one embodiment, according to the working requirements of the time-of-flight mass spectrometer using the radio frequency transmission quadrupole 70, the sine wave generating device 20 can specifically generate sine wave signals in three different frequency bands: high frequency band, mid frequency band and low frequency band. At the same time, in the radio frequency transmission quadrupole power supply circuit of this embodiment, a plurality of radio frequency magnetic toroidal transformers 50 with different frequency ranges are provided. Under the action of the control device 10 and the first gating device 40, the corresponding required frequency band can be selected The primary side of the radio frequency toroidal transformer 50 in the range is connected to the circuit, and under the action of the control device 10 and the second gating device 60 , the secondary side of the radio frequency toroidal transformer 50 corresponding to the required frequency range can be connected to the circuit. Therefore, one of the radio frequency transmission quadrupole power supply circuits is connected to the circuit to work to meet the needs of ions in different mass ranges, and then ion transmission from low mass numbers within 20 to high mass numbers above 4500 can be realized.
同时,本实施例的方案在硬件上采用幅度闭环反馈控制环路,通过反馈装置可实时采集射频传输四极杆70的输出波形进行反馈调节,当加在射频传输四极杆上的射频高压的幅度出现波动时,就会通过反馈补偿回来,这样就保证了加在射频传输四极杆上的射频高压幅度持续稳定不受干扰,幅度稳定度达到0.1%以内,形成了稳定恒定的射频电场。各射频磁环变压器50的副边抽头分别连接控制装置10,因而通过控制装置10可以产生直流偏置电压加到射频磁环变压器50线圈次级侧的中间抽头端,从而给射频磁环变压器50次级侧线圈产生 的射频交流高压提供直流偏置基准电压。At the same time, the solution of this embodiment adopts an amplitude closed-loop feedback control loop in hardware, and the output waveform of the radio frequency transmission quadrupole 70 can be collected in real time through the feedback device for feedback adjustment. When the amplitude fluctuates, it will be compensated by feedback, which ensures that the RF high voltage amplitude applied to the RF transmission quadrupole is continuously stable and undisturbed, and the amplitude stability is within 0.1%, forming a stable and constant RF electric field. The secondary side taps of each radio frequency magnetic toroidal transformer 50 are respectively connected to the control device 10 , so that the control device 10 can generate a DC bias voltage and apply it to the middle tap end of the secondary side of the radio frequency magnetic toroidal transformer 50 , so as to provide the radio frequency magnetic toroidal transformer 50 The RF AC high voltage generated by the secondary side coil provides the DC bias reference voltage.
射频传输四极杆电源电路在开启工作时,采用宽频率范围精细步进的频率扫描程序算法,在不同频率段下,针对具有不同等效电容的射频传输四极杆,以及相匹配的射频磁环变压器50次级侧的电感线圈,可以一键快速精准的扫描出最小功耗的谐振频率。首先控制装置10获取频率设定值,该频率设定值可以是用户直接输入控制装置10,也可以是通过与控制装置10相连接的上位机或者用户终端发送。When the RF transmission quadrupole power supply circuit is turned on, it adopts a frequency scanning program algorithm with a wide frequency range and fine steps. The inductance coil on the secondary side of the toroidal transformer 50 can quickly and accurately scan the resonant frequency with the minimum power consumption with one click. First, the control device 10 obtains a frequency setting value. The frequency setting value may be directly input to the control device 10 by the user, or may be sent by a host computer or a user terminal connected to the control device 10 .
之后控制装置10根据接收到的设定频率的大小,对应控制第一选通器件40和第二选通器件60选通不同的射频磁环变压器50,通过对放大装置30的输入进行不断的调整,最终扫描得到最小功耗的谐振频率,使射频传输四极杆电源电路有了很好的自适应能力。Afterwards, the control device 10 controls the first gating device 40 and the second gating device 60 to select different radio frequency magnetic toroidal transformers 50 according to the received set frequency, and continuously adjusts the input of the amplifying device 30 . , and finally scan to obtain the resonant frequency with the minimum power consumption, so that the radio frequency transmission quadrupole power supply circuit has a good adaptive ability.
在一个实施例中,射频传输四极杆电源设备还包括机箱,控制装置10、正弦波发生装置20和反馈调节装置80集成设置于同一主控板卡,放大装置30、第一选通器件40、第二选通器件60和多个射频磁环变压器50集成设置于同一功放板卡,主控板卡和功放板卡可插拔设置于机箱。In one embodiment, the radio frequency transmission quadrupole power supply device further includes a chassis, the control device 10 , the sine wave generating device 20 and the feedback adjustment device 80 are integrated on the same main control board, the amplifying device 30 and the first gating device 40 , The second gating device 60 and a plurality of radio frequency magnetic toroidal transformers 50 are integrated and arranged on the same power amplifier board, and the main control board and the power amplifier board are pluggable and arranged in the chassis.
具体地,本实施例中功放板卡的数量为多个,为了便于理解,请结合参阅图8,在一个较为详细的实施例中,以功放板卡的数量为两个进行说明,即第一功放板卡500和第二功放板卡600,两功放板卡是结构和功能完全相同的两个板卡,其中射频磁环变压器50的绕组存在一定区别,用于不同射频传输四极杆产生不同的高压电场。主控板卡400、第一功放板卡500和第二功放板卡600可以实现快速插入和拔出机箱700。其中,主控板卡400与外部通信并给第一功放板卡500和第二功放板卡600提供控制信号,第一功放板卡500给第一组射频传输四极杆提供射频高压电场,第二功放板卡600给第二组射频传输四极杆提供 射频高压电场。根据不同的射频传输四极杆需求,第一功放板卡500和第二功放板卡600可以实现快速定制设计和任意插拔更换,同时可以更加方便的维护。Specifically, the number of power amplifier boards in this embodiment is multiple. For ease of understanding, please refer to FIG. 8 in conjunction with FIG. 8 . In a more detailed embodiment, the number of power amplifier boards is two for description, that is, the first The power amplifier board 500 and the second power amplifier board 600, the two power amplifier boards are two boards with the same structure and function. Among them, there are certain differences in the windings of the RF magnetic toroidal transformer 50, which are used for different RF transmission quadrupoles. high voltage electric field. The main control board 400 , the first power amplifier board 500 and the second power amplifier board 600 can be quickly inserted into and pulled out of the chassis 700 . The main control board 400 communicates with the outside and provides control signals to the first power amplifier board 500 and the second power amplifier board 600. The first power amplifier board 500 provides the first group of radio frequency transmission quadrupoles with a high-frequency radio frequency electric field. The two power amplifier board 600 provides the radio frequency high voltage electric field to the second group of radio frequency transmission quadrupoles. According to different requirements of the radio frequency transmission quadrupole, the first power amplifier board 500 and the second power amplifier board 600 can realize fast custom design and arbitrary plugging and replacement, and can be maintained more conveniently.
上述射频传输四极杆电源设备,采用插卡模块集成式机械结构,实现各功能模块可以根据不同的射频传输四极杆需求,进行快速定制设计和维护更换,具有较强的操作便利性。The above-mentioned radio frequency transmission quadrupole power supply equipment adopts an integrated mechanical structure of plug-in modules, so that each functional module can be quickly customized design and maintenance and replacement according to different radio frequency transmission quadrupole rod requirements, which has strong operational convenience.
以上所述实施例的各技术特征可以进行任意的组合,为使描述简洁,未对上述实施例中的各个技术特征所有可能的组合都进行描述,然而,只要这些技术特征的组合不存在矛盾,都应当认为是本说明书记载的范围。The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity, all possible combinations of the technical features in the above-described embodiments are not described. However, as long as there is no contradiction between the combinations of these technical features, All should be regarded as the scope described in this specification.
以上所述实施例仅表达了本申请的几种实施方式,其描述较为具体和详细,但并不能因此而理解为对申请专利范围的限制。应当指出的是,对于本领域的普通技术人员来说,在不脱离本申请构思的前提下,还可以做出若干变形和改进,这些都属于本申请的保护范围。因此,本申请专利的保护范围应以所附权利要求为准。The above-mentioned embodiments only represent several embodiments of the present application, and the descriptions thereof are relatively specific and detailed, but should not be construed as a limitation on the scope of the patent application. It should be pointed out that for those skilled in the art, without departing from the concept of the present application, several modifications and improvements can be made, which all belong to the protection scope of the present application. Therefore, the scope of protection of the patent of the present application shall be subject to the appended claims.

Claims (10)

  1. 一种射频传输四极杆电源电路,其特征在于,包括:控制装置、正弦波发生装置、放大装置、第一选通器件、第二选通器件、多个射频磁环变压器、射频传输四极杆和反馈调节装置,A radio frequency transmission quadrupole power supply circuit is characterized by comprising: a control device, a sine wave generating device, an amplifying device, a first gating device, a second gating device, a plurality of radio frequency magnetic ring transformers, a radio frequency transmission quadrupole lever and feedback adjustment device,
    所述控制装置连接所述正弦波发生装置,所述正弦波发生装置连接所述放大装置,所述放大装置连接所述第一选通器件,各所述射频磁环变压器的原边分别连接所述第一选通器件,各所述射频磁环变压器的副边分别连接所述第二选通器件,所述第二选通器件连接所述射频传输四极杆,所述射频传输四极杆连接所述反馈调节装置,所述反馈调节装置连接所述控制装置,所述反馈调节装置连接所述放大装置,所述放大装置、所述第一选通器件、各所述射频磁环变压器的副边抽头和所述第二选通器件分别连接所述控制装置。The control device is connected to the sine wave generating device, the sine wave generating device is connected to the amplifying device, the amplifying device is connected to the first gating device, and the primary sides of the radio frequency magnetic toroidal transformers are respectively connected to the the first gating device, the secondary side of each radio frequency toroidal transformer is respectively connected to the second gating device, the second gating device is connected to the radio frequency transmission quadrupole, the radio frequency transmission quadrupole connected to the feedback adjustment device, the feedback adjustment device is connected to the control device, the feedback adjustment device is connected to the amplifying device, the amplifier device, the first gating device, the radio frequency magnetic toroidal transformer The secondary side tap and the second gating device are respectively connected to the control device.
  2. 根据权利要求1所述的射频传输四极杆电源电路,其特征在于,所述放大装置包括可变增益放大程控调幅器、同相多级放大电路和反相多级放大电路,所述可变增益放大程控调幅器连接所述正弦波发生装置和反馈调节装置,所述同相多级放大电路和所述反相多级放大电路分别连接所述可变增益放大程控调幅器,所述同相多级放大电路和所述反相多级放大电路分别连接所述第一选通器件,所述同相多级放大电路和所述反相多级放大电路分别连接所述控制装置。The radio frequency transmission quadrupole power supply circuit according to claim 1, wherein the amplifying device comprises a variable gain amplifying programmable amplitude modulator, an in-phase multi-stage amplifier circuit and an inverting multi-stage amplifier circuit, the variable gain The amplifying programmable amplitude modulator is connected to the sine wave generating device and the feedback adjustment device, the in-phase multi-stage amplifying circuit and the inverting multi-stage amplifying circuit are respectively connected to the variable gain amplifying programmable amplitude modulator, and the in-phase multi-stage amplifying circuit The circuit and the inverting multi-stage amplifying circuit are respectively connected to the first gating device, and the in-phase multi-stage amplifying circuit and the inverting multi-stage amplifying circuit are respectively connected to the control device.
  3. 根据权利要求2所述的射频传输四极杆电源电路,其特征在于,所述同相多级放大电路包括同相放大器、第一级功率放大器和第二级功率放大器,所述同相放大器连接可变增益放大程控调幅器,所述同相放大器连接所述第一级功率放大器,所述第一级功率放大器连接所述第二级功率放大器,所述第二级功率放大器连接所述第一选通器件,所述同相放大器、所述第一级功率放大器和所述第二级功率放大器分别连接所述控制装置;和/或,The radio frequency transmission quadrupole power supply circuit according to claim 2, wherein the in-phase multi-stage amplifier circuit comprises a non-inverting amplifier, a first-stage power amplifier and a second-stage power amplifier, and the non-inverting amplifier is connected to a variable gain an amplification programmable amplitude modulator, the non-inverting amplifier is connected to the first-stage power amplifier, the first-stage power amplifier is connected to the second-stage power amplifier, and the second-stage power amplifier is connected to the first gating device, The non-inverting amplifier, the first-stage power amplifier and the second-stage power amplifier are respectively connected to the control device; and/or,
    所述反相多级放大电路包括反相放大器、第一级放大器和第二级放大器,所述反相放大器连接可变增益放大程控调幅器,所述反相放大器连接所述第一级放大器,所述第一级放大器连接所述第二级放大器,所述第二级放大器连接所述第一选通器件,所述反相放大器、所述第一级放大器和所述第二级放大器分别连接所述控制装置。The inverting multi-stage amplifier circuit includes an inverting amplifier, a first-stage amplifier and a second-stage amplifier, the inverting amplifier is connected to a variable gain amplification program-controlled amplitude modulator, and the inverting amplifier is connected to the first-stage amplifier, The first-stage amplifier is connected to the second-stage amplifier, the second-stage amplifier is connected to the first gating device, and the inverting amplifier, the first-stage amplifier, and the second-stage amplifier are respectively connected the control device.
  4. 根据权利要求1-3任一项所述的射频传输四极杆电源电路,其特征在于,所述控制装置包括主控制器、功率供电和电流监测器、选通控制器以及中低压发生器,所述主控制器连接所述正弦波发生装置,所述反馈装置连接所述主控制器,所述功率供电和电流监测器、所述选通控制器以及所述中低压发生器分别连接所述主控制器,所述功率供电和电流监测器连接所述放大装置,所述选通控制器连接所述第一选通器件和所述第二选通器件,所述中低压发生器连接各所述射频磁环变压器的副边抽头。The radio frequency transmission quadrupole power supply circuit according to any one of claims 1-3, wherein the control device comprises a main controller, a power supply and current monitor, a gating controller and a medium and low voltage generator, The main controller is connected to the sine wave generating device, the feedback device is connected to the main controller, the power supply and current monitor, the gating controller and the medium and low voltage generator are respectively connected to the The main controller, the power supply and the current monitor are connected to the amplification device, the gating controller is connected to the first gating device and the second gating device, and the medium and low voltage generators are connected to each The secondary tap of the RF toroidal transformer is described.
  5. 根据权利要求4所述的射频传输四极杆电源电路,其特征在于,所述反馈调节装置包括检波电路、幅值监测器、数模控制器和比例积分调节器,所述检波电路连接所述射频传输四极杆,所述检波电路连接所述比例积分调节器和所述幅值监测器,所述幅值监测器和所述数模控制器分别连接所述控制装置,所述数模控制器连接所述比例积分调节器,所述比例积分调节器连接所述放大装置。The radio frequency transmission quadrupole power supply circuit according to claim 4, wherein the feedback adjustment device comprises a detection circuit, an amplitude monitor, a digital-to-analog controller and a proportional-integral regulator, and the detection circuit is connected to the a radio frequency transmission quadrupole, the detection circuit is connected to the proportional-integral regulator and the amplitude monitor, the amplitude monitor and the digital-analog controller are respectively connected to the control device, and the digital-analog control The proportional-integral regulator is connected to the proportional-integral regulator, and the proportional-integral regulator is connected to the amplifying device.
  6. 一种如权利要求1-5任一项所述的射频传输四极杆电源电路的控制方法,其特征在于,包括:A method for controlling a radio frequency transmission quadrupole power supply circuit according to any one of claims 1-5, characterized in that, comprising:
    获取频率设定值;Get the frequency set value;
    根据所述频率设定值控制所述第一选通器件和所述第二选通器件选通对应的射频磁环变压器;control the first gating device and the second gating device to gating the corresponding radio frequency magnetic toroidal transformers according to the frequency setting value;
    通过调整所述正弦波发生装置和所述反馈调节装置,得到射频传输四极杆电源电路最小功耗时的谐振频率。By adjusting the sine wave generating device and the feedback adjusting device, the resonant frequency at the minimum power consumption of the radio frequency transmission quadrupole power supply circuit is obtained.
  7. 根据权利要求6所述的控制方法,其特征在于,所述射频磁环变压器包括低频段射频磁环变压器、中频段射频磁环变压器和高频段射频磁环变压器,所述根据所述频率设定值控制所述第一选通器件和所述第二选通器件选通对应的射频磁环变压器的步骤,包括:The control method according to claim 6, wherein the radio frequency magnetic toroidal transformer comprises a low-frequency radio frequency magnetic toroidal transformer, a mid-frequency radio frequency magnetic toroidal transformer and a high-frequency radio frequency magnetic toroidal transformer, and the setting according to the frequency The step of controlling the first gating device and the second gating device to gating the corresponding radio frequency magnetic toroidal transformers includes:
    根据所述频率设定值与预设第一频段范围进行比较分析;Carry out comparative analysis according to the frequency setting value and the preset first frequency band range;
    当所述频率设定值处于所述预设第一频段范围内时,控制所述第一选通器件和所述第二选通器件选通所述低频段射频磁环变压器;When the frequency setting value is within the preset first frequency band range, controlling the first gating device and the second gating device to gating the low-frequency radio frequency magnetic toroidal transformer;
    当所述频率设定值未处于所述预设第一频段范围内时,根据所述频率设定值与预设第二频段范围进行比较分析,所述预设第二频段范围的最小阈值等于所述预设第一频段范围的最大阈值;When the frequency setting value is not within the preset first frequency band range, compare and analyze the frequency setting value and the preset second frequency band range, and the minimum threshold value of the preset second frequency band range is equal to the preset maximum threshold of the first frequency band;
    当所述频率设定值处于所述预设第二频段范围内时,控制所述第一选通器件和所述第二选通器件选通所述中频段射频磁环变压器;When the frequency setting value is within the preset second frequency band range, controlling the first gating device and the second gating device to gating the mid-band radio frequency magnetic toroidal transformer;
    当所述频率设定值未处于所述预设第二频段范围内时,根据所述频率设定值与预设第三频段范围进行比较分析,所述预设第三频段范围的最小阈值等于所述预设第二频段范围的最大阈值;When the frequency setting value is not within the preset second frequency band range, compare and analyze the frequency setting value and the preset third frequency band range, and the minimum threshold value of the preset third frequency band range is equal to the preset maximum threshold of the second frequency band range;
    当所述频率设定值处于所述预设第三频段范围内时,控制所述第一选通器件和所述第二选通器件选通所述高频段射频磁环变压器。When the frequency setting value is within the preset third frequency band range, the first gating device and the second gating device are controlled to gating the high frequency band radio frequency magnetic toroidal transformer.
  8. 根据权利要求6所述的控制方法,其特征在于,所述通过调整所述正弦波发生装置和所述反馈调节装置,得到射频传输四极杆电源电路最小功耗时的谐振频率的步骤,包括:The control method according to claim 6, wherein the step of obtaining the resonant frequency of the radio frequency transmission quadrupole power supply circuit with minimum power consumption by adjusting the sine wave generating device and the feedback adjusting device comprises the following steps: :
    调整所述正弦波发生装置和所述反馈调节装置,并实时采集所述放大装置 的电流值;Adjusting the sine wave generating device and the feedback adjusting device, and collecting the current value of the amplifying device in real time;
    当得到所述放大装置的最小电流值时,读取所述正弦波发生装置的当前频率,即为射频传输四极杆电源电路最小功耗时的谐振频率。When the minimum current value of the amplifying device is obtained, the current frequency of the sine wave generating device is read, which is the resonant frequency at the minimum power consumption of the radio frequency transmission quadrupole power supply circuit.
  9. 一种射频传输四极杆电源设备,其特征在于,包括权利要求1-5任一项所述的射频传输四极杆电源电路,所述控制装置用于根据权利要求6-8任一项所述的控制方法扫描得到最小功耗的谐振频率。A radio frequency transmission quadrupole power supply device, characterized in that it includes the radio frequency transmission quadrupole power supply circuit described in any one of claims 1-5, and the control device is used for the radio frequency transmission quadrupole power supply circuit according to any one of claims 6-8. The control method described above scans to obtain the resonant frequency with the minimum power consumption.
  10. 根据权利要求9所述的射频传输四极杆电源设备,其特征在于,还包括机箱,所述控制装置、所述正弦波发生装置和所述反馈调节装置集成设置于同一主控板卡,所述放大装置、所述第一选通器件、所述第二选通器件和多个射频磁环变压器集成设置于同一功放板卡,所述主控板卡和所述功放板卡可插拔设置于所述机箱。The radio frequency transmission quadrupole power supply device according to claim 9, further comprising a chassis, wherein the control device, the sine wave generating device and the feedback adjustment device are integrated on the same main control board, so The amplifying device, the first gating device, the second gating device and a plurality of radio frequency magnetic toroidal transformers are integrated and arranged on the same power amplifier board, and the main control board and the power amplifier board are pluggable and set. in the chassis.
PCT/CN2020/142339 2020-12-29 2020-12-31 Radio frequency transmission quadrupole rod power source circuit and control method therefor, and power source device WO2022141481A1 (en)

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