CN113921369A - Radio frequency power supply for mass spectrometer ion guidance and tuning method thereof - Google Patents
Radio frequency power supply for mass spectrometer ion guidance and tuning method thereof Download PDFInfo
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Abstract
The invention provides a radio frequency power supply for ion guidance of a mass spectrometer and a tuning method thereof, wherein the radio frequency power supply comprises: the device comprises a frequency amplitude signal generating circuit, an amplitude control circuit, a frequency modulation circuit, a power amplifying circuit, a resonant coupling coil and a high-voltage feedback circuit; the output end of the frequency amplitude signal generating circuit is connected with the input ends of the amplitude control circuit and the frequency modulation circuit, the output end of the amplitude control circuit is connected with the input end of the frequency modulation circuit, the output end of the frequency modulation circuit is connected with the input end of the power amplification circuit, the output end of the power amplification circuit is connected with the input end of the resonant coupling coil, the resonant coupling coil forms a high-voltage output end, the output end of the resonant coupling coil is connected with the input end of the high-voltage feedback circuit, and the output end of the high-voltage feedback circuit is connected with the input end of the amplitude control circuit. The power supply has the advantages of simple structure, small volume, stable performance and convenient tuning, and the power supply has adjustable frequency signals without external supply.
Description
Technical Field
The invention relates to the technical field of mass spectrometer radio frequency power supplies, in particular to a radio frequency power supply for mass spectrometer ion guidance and a tuning method thereof.
Background
The mass spectrometer is a high-end chemical analysis instrument, and the radio frequency power supply is one of the core components. The radio frequency power supply is used for generating a radio frequency high-voltage signal and driving ions to move in the mass spectrometer. The rf power source may be divided into a pilot rf power source for directing ions therethrough and a rf power source for mass screening of the ions based on their effect on ion motion. The invention relates to a radio frequency power supply for guiding ions to pass through, belonging to a guide radio frequency power supply. The guiding radio frequency power supply applies two-phase radio frequency voltages with the same amplitude and opposite phases to the odd-numbered rod bodies and the even-numbered rod bodies guided by the multipole ions, and the middle axis radio frequency amplitude of the guiding rod system is 0. Ions deviating from the guide central axis are constrained by the radio frequency potential barrier when meeting the stable motion condition and rebound back to the central axis, thereby realizing the technical effect of efficiently transmitting ions in different air pressure regions.
In order to ensure that ions stably move in the mass spectrometer, the requirement on the stability of a radio frequency power supply is high. And in order to drive ions with large mass number to move, certain requirements are also made on the voltage amplitude of the radio frequency power supply. The guide rod is used as a driving object of the radio frequency power supply, and can be equivalent to a capacitor on a circuit, and a resonant coupling coil of the radio frequency power supply is equivalent to an inductor. LC resonance is realized on the circuit by the equivalent capacitor and the equivalent inductor to generate radio frequency high voltage, the circuit efficiency is highest at the moment, and a larger radio frequency amplitude can be generated under the condition of smaller power output. The condition for LC resonance generation is that the product of the frequency F, the capacitance C, and the inductance L is a fixed value.
The frequency of the conventional rf power source is generally generated by a crystal oscillator or an oscillating circuit, and the frequency is fixed. When tuning a radio frequency power supply, tuning is generally performed by adjusting an inductor or adjusting a capacitor. Therefore, the coil structure of the radio frequency power supply adopting the inductance regulation mode is relatively large and complex. The radio frequency power supply adopting the capacitance adjusting mode needs to be provided with a large high-pressure air adjustable capacitor, and the size is large.
The traditional radio frequency power supply generally judges whether the radio frequency power supply reaches a resonance state by observing the magnitude of input current, because of the difference of circuit structure and performance, the parameters influencing the input current are more, and the judgment of the resonance state by observing the input current has certain probability and can generate misjudgment, thereby causing unstable radio frequency output and low efficiency.
The CN107785229A patent document discloses a guide rod rf power supply, in which a pair of different-name ends of a pair of booster coils are respectively connected with a pair of guide rods; the other pair of different name terminals are directly connected and then connected with a direct current bias voltage. Since the boost coils are typically wound by hand or by machine, it is difficult to make the inductance values of the two coils uniform. When the inductance values of the two coils are slightly different, the radio frequency high voltage asymmetry condition is generated, and when the asymmetry difference reaches a certain degree, the mass spectrometer performance is affected. Meanwhile, a single resonance current value can only feed back the integral tuning condition of two phases output by the radio frequency power supply. In the long-term practical application of the mass spectrometer, the two earth capacitances and mutual capacitances of the ion guide are changed due to surface pollution, connection oxidation and other factors in the use process, so that the output resonance balance of the two radio frequencies is changed, the guide axis is suspended with radio frequency pseudo potential, the discrimination of mass and kinetic energy is caused to the transmission and introduction of ions, the detuning overload of a radio frequency power supply is caused in serious cases, the equipment is damaged, and potential huge risks are formed on aerospace analysis equipment with strict requirements and reliable performance. Therefore, there is a need to develop a conveniently tuned rf power supply to solve the problem of difficulty in two-phase balancing and optimizing the resonance state of the output rf.
In chinese patent publication No. CN106711010B, a quadrupole guide rod radio frequency power supply circuit of a mass spectrometer is disclosed, which outputs a high-frequency square wave signal with adjustable frequency and amplitude through a CPLD signal source circuit; then, amplifying the high-frequency square wave signal by a driving circuit to generate a driving signal; generating a sine wave radio frequency signal by the radio frequency transformation circuit according to the driving signal and a feedback signal output by the feedback circuit, and outputting the sine wave radio frequency signal to the guide rod; the feedback signal is a signal for reversely regulating the sine wave radio frequency signal when the sine wave radio frequency signal exceeds a preset range.
Disclosure of Invention
In view of the deficiencies in the prior art, it is an object of the present invention to provide a radio frequency power supply for ion guidance of a mass spectrometer and a method of tuning the same.
According to the invention there is provided a radio frequency power supply for ion guidance of a mass spectrometer, comprising: the device comprises a frequency amplitude signal generating circuit, an amplitude control circuit, a frequency modulation circuit, a power amplifying circuit, a resonant coupling coil and a high-voltage feedback circuit;
the output end of the frequency-amplitude signal generating circuit is connected with the input ends of the amplitude control circuit and the frequency modulation circuit, the output end of the amplitude control circuit is connected with the input end of the frequency modulation circuit, the output end of the frequency modulation circuit is connected with the input end of the power amplification circuit, the output end of the power amplification circuit is connected with the input end of the resonant coupling coil, the resonant coupling coil forms a high-voltage output end, the output end of the resonant coupling coil is connected with the input end of the high-voltage feedback circuit, and the output end of the high-voltage feedback circuit is connected with the input end of the amplitude control circuit.
Preferably, the frequency amplitude signal generating circuit comprises an MCU control circuit, a direct digital frequency synthesis circuit and a serial communication circuit, the MCU control circuit is used for controlling the direct digital frequency synthesis circuit, the direct digital frequency synthesis circuit is used for generating a stable square wave frequency signal, the serial communication circuit is used for receiving and analyzing a control command of the upper computer, and controlling the direct digital frequency synthesis circuit to output the frequency signal and controlling the MCU control circuit to output the amplitude signal.
Preferably, the amplitude control circuit comprises a first-stage amplification circuit and a second-stage amplification circuit, the first-stage amplification circuit is a reverse amplification circuit and performs equal-amplitude reverse amplification on the amplitude given signal, and the second-stage amplification circuit performs error operation amplification on the output of the first-stage amplification circuit and the output of the high-voltage feedback circuit.
Preferably, the frequency modulation circuit comprises a digital logic chip, and the digital logic chip is an open-drain output gate circuit chip.
Preferably, the power amplifying circuit includes a power tube circuit and a driving circuit, and the driving circuit is a push-pull circuit formed by a pair of triodes.
Preferably, the resonant coupling coil comprises a set of coils wound on a teflon tube, the resonant coupling coil comprises a set of primary coils, a first secondary coil and a second secondary coil, and the number of turns of the first secondary coil is the same as that of the second secondary coil.
Preferably, a tuning capacitor is arranged on the resonant coupling coil, and the tuning capacitor is connected in series between two output ends of the resonant coupling coil.
Preferably, the high-voltage feedback circuit comprises a capacitance sampling circuit and a full-wave rectification circuit, an input end of the capacitance sampling circuit is connected with the resonance coupling coil, an output end of the capacitance sampling circuit is connected with an input end of the full-wave rectification circuit, and an amplitude control circuit at an output end of the full-wave rectification circuit is connected.
Preferably, the device further comprises a resonance indicating circuit, the resonance indicating circuit is connected with the output end of the amplitude control circuit, and the resonance indicating circuit is a voltage following circuit formed by an operational amplifier.
According to the tuning method of the radio frequency power supply for mass spectrometer ion guidance provided by the invention, the signal frequency is changed through the upper computer, so that the output voltage of the resonance state indicating circuit is minimum, the optimal resonance state is reached at the moment, and when the frequency of the radio frequency power supply with the tuned using frequency does not meet the actual frequency requirement, the resonant frequency is close to the required frequency by increasing or decreasing the capacitance value of the resonant capacitor.
Compared with the prior art, the invention has the following beneficial effects:
1. the ion-guided radio frequency power supply has the advantages of simple structure, small volume, stable performance and convenient tuning.
2. The ion guide radio frequency power supply provided by the invention has an adjustable frequency signal without external supply.
3. The ion guide radio frequency power supply adopts a specific circuit structure, and the problem of radio frequency high voltage asymmetry caused by inconsistent inductance values of the two secondary coils is solved.
4. The ion guide radio frequency power supply has clear resonance state in the tuning process and can not generate misjudgment.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a block diagram of a system architecture of an RF power supply for mass spectrometer ion guidance in an embodiment of the present invention;
FIG. 2 is a schematic block circuit diagram of an RF power supply for mass spectrometer ion guidance in an embodiment of the present invention;
FIG. 3 is a schematic diagram of an equivalent circuit of a resonant coupling coil and a guide rod according to an embodiment of the present invention;
FIG. 4 is a mass spectrum diagram of the actual test result of the conventional pilot power supply;
fig. 5 is a mass spectrum diagram of an actual test result of the pilot power supply in the embodiment of the invention.
Description of reference numerals:
upper computer 1 power tube circuit 502
Frequency amplitude signal generating circuit 2 resonant coupling coil 6
First secondary coil 601 of MCU module 201
Amplitude control circuit 3 primary winding 603
Operational amplifier 301 high voltage feedback circuit 7
Frequency modulation circuit 4 full-wave rectifying circuit 701
Power amplification circuit 5 capacitance sampling circuit 702
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that it would be obvious to those skilled in the art that various changes and modifications can be made without departing from the spirit of the invention. All falling within the scope of the present invention.
The invention provides a radio frequency power supply for ion guidance of a mass spectrometer, which comprises: the device comprises a frequency amplitude signal generating circuit 2, an amplitude control circuit 3, a frequency modulation circuit 4, a power amplification circuit 5, a resonant coupling coil 6 and a high-voltage feedback circuit 7;
the output end of the frequency amplitude signal generating circuit 2 is connected with the input ends of the amplitude control circuit 3 and the frequency modulation circuit 4, the output end of the amplitude control circuit 3 is connected with the input end of the frequency modulation circuit 4, the output end of the frequency modulation circuit 4 is connected with the input end of the power amplification circuit 5, the output end of the power amplification circuit 5 is connected with the input end of the resonant coupling coil 6, the resonant coupling coil 6 forms a high-voltage output end, the output end of the resonant coupling coil 6 is connected with the input end of the high-voltage feedback circuit 7, and the output end of the high-voltage feedback circuit 7 is connected with the input end of the amplitude control circuit 3.
The frequency amplitude signal generating circuit 2 is controlled to generate a square wave signal with a certain frequency and a radio frequency amplitude signal by sending a control instruction by the upper computer 1. The control commands generally include a frequency command and an amplitude command. The frequency amplitude signal generating circuit 2 comprises an MCU control circuit, a direct digital frequency synthesis circuit and a serial communication circuit, the MCU control circuit is used for controlling the direct digital frequency synthesis circuit, the direct digital frequency synthesis circuit is used for generating stable square wave frequency signals, the serial communication circuit is used for receiving and analyzing control instructions of the upper computer 1, and controlling the direct digital frequency synthesis circuit to output frequency signals and controlling the MCU control circuit to output amplitude signals. In this embodiment, the MCU control circuit and the serial port communication circuit in the frequency/amplitude signal generating circuit 2 are included in the MCU module 201, and the MCU module 201 preferably selects an STM32 series ARM controller. The direct digital frequency synthesis circuit is contained in the DDS module 202. The upper computer 1 issues a control instruction of a square wave signal with default set frequency and a smaller direct current amplitude signal, the MCU module 201 analyzes the instruction of the upper computer 1 and then controls the DDS module 202 to output the square wave signal with set frequency, and the external DAC of the MCU module 201 outputs the set direct current signal which is the set amplitude signal.
The amplitude control circuit 3 includes two stages of operational amplifiers 4, which are a first stage amplification circuit and a second stage amplification circuit, respectively, the first stage amplification circuit is a reverse amplification circuit, and performs equal-amplitude reverse amplification on a given amplitude signal output by the MCU module 201, and the second stage amplification circuit performs error operational amplification on the output of the first stage amplification circuit and the output of the high voltage feedback circuit 7, and outputs the amplified output to the frequency modulation circuit 4.
The frequency modulation circuit 4 receives the output end of the amplitude control circuit 3 and the output end of the DDS module 202, performs amplitude modulation on the output signal, and outputs the output signal to the power amplification circuit 5, wherein the frequency modulation circuit 4 comprises a digital logic chip, and the digital logic chip is an open-drain output gate circuit chip.
The power amplification circuit 5 is configured to power-amplify the frequency-modulated signal and drive the primary coil 603 of the resonance coupling coil 6. The power amplifying circuit 5 includes a power tube circuit 502 and a driving circuit 501, the driving circuit 501 amplifies and shapes the modulation signal output by the frequency modulation circuit 4 and outputs the amplified and shaped modulation signal to the power tube circuit 502 to drive the power tube circuit 502 to work, and the driving circuit 501 is a push-pull circuit formed by a pair of triodes. The power tube circuit 502 outputs to the primary coil 603 of the resonant coupling coil 6, and the power on the primary coil 603 changes linearly with the output amplitude of the driving circuit 501. Further, since the signal amplitude of the output of the driving circuit 501 is controlled by the output of the amplitude control circuit 3, the whole power transmission process realizes closed-loop control.
The resonant coupling coil 6 is formed by a set of coils wound on a teflon tube, and the coils include a set of primary coils 603 and two sets of secondary coils with the same number of turns. The resonant coupling coil 6 is used for generating LC resonance with the guide rod, and radio frequency high voltage is generated after the LC resonance to drive ions to move in the guide rod.
The resonant coupling coil 6 includes a primary coil 603, a first secondary coil 601, a second secondary coil 602, a capacitor C1, a capacitor C2, a resistor R1, a resistor R2, a capacitor C3, and a capacitor C4. One end of the first secondary coil 601 is connected to one end of a capacitor C1 and one end of a resistor R1, the other end of a capacitor C1 is connected to one end of a capacitor C2, the other end of a capacitor C2 is connected to one end of the secondary coil 602 and one end of a resistor R2, and the other end of a resistor R1 is connected to the other end of a resistor R2. The other end of the first secondary coil 601 is connected with one end of a capacitor C3, the other end of a capacitor C3 is connected with one end of a capacitor C4, the other end of a capacitor C4 is connected with the other end of the second secondary coil 602, one end of the capacitor C3 forms an RF + end, the other end of the capacitor C4 forms an RF-end, and the RF + and the RF-ends are connected with the multi-stage guide rods. The capacitor C1 and the capacitor C2 are both CBB capacitors, and the high-stability high-voltage ceramic NPO capacitors are adopted by the capacitors C3 and C4.
The circuit connection mode can be used for eliminating the problem of radio frequency high voltage asymmetry caused by the inconsistency of the inductance values of the two secondary coils. Further, the problem of asymmetry of the radio frequency high voltage due to the non-uniform inductance values of the two secondary coils is eliminated for the purpose of elaboration. Fig. 3 shows a circuit in which the rf coupling coil and the guiding rod are equivalent to an inductor and a capacitor, where in fig. 3, V1 is an rf voltage generated after the first secondary coil 601 is equivalent, and V2 is an rf voltage generated after the second secondary coil 602602 is equivalent. Capacitors C5 and C6 are capacitors C3 and C4 described above, capacitor C7 is the equivalent of one pair of guide rods to ground, and C8 is the equivalent of the other pair of rods to ground. Assume that the secondary coil inductance values are not uniform resulting in V1 not being equal to V2. The circuit calculation shows that the radio frequency high voltages V3 and V4 on the two pairs of guide rods are both equal to (V1+ V2)/2, the radio frequency voltages on the two pairs of guide rods are equal, and the radio frequency voltage imbalance phenomenon cannot occur. C3 and C4 are tuning capacitors for assisting in tuning the rf power supply, and in some embodiments, the resonant frequency is close to the desired frequency by appropriately increasing or decreasing the capacitance of the capacitor C3 and the capacitor C4.
The high-voltage feedback circuit 7 is used for carrying out equal proportion attenuation on the radio frequency high voltage, and the attenuated voltage is input to the amplitude control signal 3 for difference operation after being rectified. The high-voltage feedback circuit 7 comprises a capacitance sampling circuit 702 and a full-wave rectifying circuit 701, the capacitance sampling circuit 702 attenuates high-voltage radio-frequency voltage into voltage alternating-current signals which are convenient to use by the full-wave rectifying circuit 701 at the next stage, the full-wave rectifying circuit 701 rectifies and filters the attenuated alternating-current low-voltage signals through diodes and outputs the rectified and filtered signals to the amplitude control circuit 3 for use, and the diodes adopted in the full-wave rectifying circuit 701 are low-voltage-drop Schottky diodes.
The resonance indicating circuit 8 is used for guiding the tuning of the radio frequency power supply, the resonance indicating circuit 8 is a voltage following circuit formed by the operational amplifier 4, and the frequency indicating circuit is connected with the output end of the amplitude control circuit 3.
The invention introduces a tuning method of a radio frequency power supply for mass spectrometer ion guidance, which changes signal frequency through an upper computer 1 to minimize the output voltage of a resonance state indicating circuit, reaches an optimal resonance state at the moment, and enables the resonance frequency to approach the required frequency by increasing and decreasing the capacitance value of a resonance capacitor when the difference between the frequency of the radio frequency power supply with the tuned using frequency and the actual required frequency is too large.
Fig. 4 and 5 show the driving results of the conventional pilot power supply and the pilot power supply realized by the invention on the quadrupole pilot of the electrospray atmospheric mass spectrometer working for 2000 hours. It can be seen that, when the traditional guidance power supply is driven, when the guidance electrode body is contaminated by long-term spray, two-phase capacitance value deviation occurs, especially when the contact pin sleeve pair is oxidized, the guidance power supply generates deviation under the original resonance condition due to the increase of working current, and the radio-frequency two-phase is greatly asymmetric according to the tuning result of the standard value, so that the introduced bias voltage needs to be greatly increased to minus dozens of volts, meanwhile, the mass spectrogram in figure 4 also reflects obvious mass discrimination, only a small amount of ions in a certain mass section (609 u-660 u) can be effectively detected, and the signal intensity is only that3×102. After the scheme of the invention is used, the tuning indicated value of the power supply is almost unchanged after the tuning of the voltage tuning value, the two-phase driving is automatically balanced, and the ion guide effect with wide mass range can be obtained by introducing the bias voltage with only minus a few volts, as shown in figure 5. Under the same amount of contamination, the mass of the two ions passes through the width of the window (275 u-734 u) and the ion signal intensity (6X 10)3) The difference of the two types of the Chinese medicinal composition is improved by about 3 to 20 times. Therefore, the technical scheme of the invention can obviously improve the manufacturing and debugging difficulty and long-term reliability of the physique spectrum system, and has good technical effects on the application of strict requirements on the long-term stability of the physique spectrum signals, such as aerospace material analysis, biological metabolism diagnosis, high-end residual gas analysis and the like.
The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes or modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention. The embodiments and features of the embodiments of the present application may be combined with each other arbitrarily without conflict.
Claims (10)
1. A radio frequency power supply for ion guidance of a mass spectrometer, comprising: the device comprises a frequency amplitude signal generating circuit (2), an amplitude control circuit (3), a frequency modulation circuit (4), a power amplification circuit (5), a resonant coupling coil (6) and a high-voltage feedback circuit (7);
the output end of the frequency and amplitude signal generating circuit (2) is connected with the input ends of the amplitude control circuit (3) and the frequency modulation circuit (4), the output end of the amplitude control circuit (3) is connected with the input end of the frequency modulation circuit (4), the output end of the frequency modulation circuit (4) is connected with the input end of the power amplification circuit (5), the output end of the power amplification circuit (5) is connected with the input end of the resonant coupling coil (6), the resonant coupling coil (6) forms a high-voltage output end, the output end of the resonant coupling coil (6) is connected with the input end of the high-voltage feedback circuit (7), and the output end of the high-voltage feedback circuit (7) is connected with the input end of the amplitude control circuit (3).
2. A radio frequency power supply for ion guidance of a mass spectrometer as claimed in claim 1, wherein: the frequency amplitude signal generating circuit (2) comprises an MCU control circuit, a direct digital frequency synthesis circuit and a serial communication circuit, the MCU control circuit is used for controlling the direct digital frequency synthesis circuit, the direct digital frequency synthesis circuit is used for generating stable square wave frequency signals, and the serial communication circuit is used for receiving and analyzing control instructions of the upper computer (1) and controlling the direct digital frequency synthesis circuit to output frequency signals and controlling the MCU control circuit to output amplitude signals.
3. A radio frequency power supply for ion guidance of a mass spectrometer as claimed in claim 1, wherein: the amplitude control circuit (3) comprises a first-stage amplification circuit and a second-stage amplification circuit, the first-stage amplification circuit is a reverse amplification circuit and is used for carrying out equal-amplitude reverse amplification on an amplitude given signal, and the second-stage amplification circuit is used for carrying out error operation amplification on the output of the first-stage amplification circuit and the output of the high-voltage feedback circuit (7).
4. A radio frequency power supply for ion guidance of a mass spectrometer as claimed in claim 1, wherein: the frequency modulation circuit (4) comprises a digital logic chip, and the digital logic chip is an open drain output gate circuit chip.
5. A radio frequency power supply for ion guidance of a mass spectrometer as claimed in claim 1, wherein: the power amplification circuit (5) comprises a power tube circuit (502) and a driving circuit (501), wherein the driving circuit (501) is a push-pull circuit formed by a pair of triodes.
6. A radio frequency power supply for ion guidance of a mass spectrometer as claimed in claim 1, wherein: the resonance coupling coil (6) comprises a group of coils wound on a polytetrafluoroethylene tube, the resonance coupling coil (6) comprises a group of primary coils (603), a first secondary coil (601) and a second secondary coil (602), and the number of turns of the first secondary coil (601) is the same as that of the second secondary coil (602).
7. A radio frequency power supply for ion guidance of a mass spectrometer as claimed in claim 1, wherein: and a tuning capacitor is arranged on the resonant coupling coil (6) and is connected between two output ends of the resonant coupling coil (6) in series.
8. A radio frequency power supply for ion guidance of a mass spectrometer as claimed in claim 1, wherein: the high-voltage feedback circuit (7) comprises a capacitance sampling circuit (702) and a full-wave rectifying circuit (701), the input end of the capacitance sampling circuit (702) is connected with the resonance coupling coil (6), the output end of the capacitance sampling circuit (702) is connected with the input end of the full-wave rectifying circuit (701), and the amplitude control circuit (3) at the output end of the full-wave rectifying circuit (701) is connected.
9. A radio frequency power supply for ion guidance of a mass spectrometer as claimed in claim 1, wherein: the circuit is characterized by further comprising a resonance indicating circuit (8), wherein the resonance indicating circuit (8) is connected with the output end of the amplitude control circuit (3), and the resonance indicating circuit (8) is a voltage following circuit formed by an operational amplifier.
10. A method of tuning a radio frequency power supply for ion guidance of a mass spectrometer using a radio frequency power supply for ion guidance of a mass spectrometer as claimed in any one of claims 1 to 9, characterized by: change signal frequency through host computer (1) for resonance state indicating circuit's output voltage is minimum, reaches best resonance state this moment, and the radio frequency power frequency after using the frequency tuning is not conform to actual frequency demand, through the appearance value of increase and decrease resonance electric capacity, makes resonance frequency be close to demand frequency.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114785320A (en) * | 2022-06-22 | 2022-07-22 | 中国科学院苏州生物医学工程技术研究所 | Compact ion guide driving device and automatic radio frequency tuning method, equipment and medium thereof |
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| US6762561B1 (en) * | 2000-03-31 | 2004-07-13 | Shimadzu Research Laboratory (Europe) Ltd. | Radio frequency resonator |
| WO2017194333A1 (en) * | 2016-05-10 | 2017-11-16 | Carl Zeiss Smt Gmbh | Apparatus and method for detecting ions |
| CN107785229A (en) * | 2017-09-12 | 2018-03-09 | 合肥美亚光电技术股份有限公司 | Radio-frequency power supply, tuning methods and the mass spectrograph of guide bar |
| CN112635288A (en) * | 2020-12-29 | 2021-04-09 | 广州禾信仪器股份有限公司 | Radio frequency transmission quadrupole rod power supply circuit, control method thereof and power supply equipment |
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2021
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| US6762561B1 (en) * | 2000-03-31 | 2004-07-13 | Shimadzu Research Laboratory (Europe) Ltd. | Radio frequency resonator |
| WO2017194333A1 (en) * | 2016-05-10 | 2017-11-16 | Carl Zeiss Smt Gmbh | Apparatus and method for detecting ions |
| CN107785229A (en) * | 2017-09-12 | 2018-03-09 | 合肥美亚光电技术股份有限公司 | Radio-frequency power supply, tuning methods and the mass spectrograph of guide bar |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114785320A (en) * | 2022-06-22 | 2022-07-22 | 中国科学院苏州生物医学工程技术研究所 | Compact ion guide driving device and automatic radio frequency tuning method, equipment and medium thereof |
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