WO2022141001A1 - 一种显微镜样品台 - Google Patents

一种显微镜样品台 Download PDF

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Publication number
WO2022141001A1
WO2022141001A1 PCT/CN2020/140426 CN2020140426W WO2022141001A1 WO 2022141001 A1 WO2022141001 A1 WO 2022141001A1 CN 2020140426 W CN2020140426 W CN 2020140426W WO 2022141001 A1 WO2022141001 A1 WO 2022141001A1
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WO
WIPO (PCT)
Prior art keywords
support structure
sample
sample stage
stage according
sample holder
Prior art date
Application number
PCT/CN2020/140426
Other languages
English (en)
French (fr)
Inventor
曹峰
栗宽
卢诗毅
李希全
孙思嘉
姚一帆
卢志钢
张齐容
刘纪凯
孙飞
Original Assignee
生物岛实验室
中国科学院生物物理研究所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 生物岛实验室, 中国科学院生物物理研究所 filed Critical 生物岛实验室
Priority to PCT/CN2020/140426 priority Critical patent/WO2022141001A1/zh
Priority to EP20967351.6A priority patent/EP4270442A1/en
Publication of WO2022141001A1 publication Critical patent/WO2022141001A1/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2007—Holding mechanisms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20278—Motorised movement
    • H01J2237/20285—Motorised movement computer-controlled

Definitions

  • the invention relates to the technical field of microscopes, in particular to a microscope sample stage.
  • Electron microscopy is a technique for microscopic imaging and in-situ analysis using an electron optical system.
  • the characteristics of electron microscope are: under extremely high magnification, it can directly observe the morphological structure and sample composition of the sample; it has high resolution, can directly distinguish atoms, and conduct nanoscale crystal structure and composition analysis; development direction Tends to be multifunctional and comprehensive.
  • the electron microscope sample stage is a device used to carry the sample to be tested in the electron microscope system.
  • Most of the electron microscope sample stages in the prior art realize the observation of multiple samples at one time by using a large XY axis movement stroke, resulting in a large volume of the electron microscope, especially a large volume of the sample chamber.
  • the number of samples carried by the sample stage in the prior art is still limited. When the number of observation samples is large, it is necessary to manually replace the samples frequently, and after each sample replacement, the equipment is evacuated again, and the sample observation position and focal length are re-adjusted.
  • the present invention proposes a sample stage for a microscope, which occupies a small space, has a large sample capacity, can adjust the position of the sample in three dimensions, and can control the temperature of the sample.
  • the stage and the sample holder are automatically locked and unlocked, and the locking state can be detected in real time, which can realize automatic unlocking and replacement of the sample holder and automatic locking of the sample holder after replacement, which is especially suitable for the application scene of electron microscope without manual participation.
  • the present invention provides a sample stage of a microscope, comprising:
  • the three-dimensional motion mechanism can move along the first direction, the second direction, and the third direction;
  • a support structure arranged on the three-dimensional motion mechanism and rotatable about an axis parallel to the third direction;
  • the support structure includes a locking mechanism by which the sample holder is secured.
  • the support structure includes: a fourth support structure disposed on the three-dimensional motion mechanism and rotatable around an axis parallel to the third direction.
  • the locking mechanism includes at least two claw heads and reset components respectively connected to the claw heads.
  • the supporting structure includes a fifth driving mechanism, and the fifth driving mechanism is used for driving the locking or unlocking of the locking structure.
  • the fifth drive mechanism includes a transmission component, a steering component, and a power component, and one end of the transmission component contacts the claw head in a locked state and drives the claw head to move outward along the center of the cross-section of the support structure.
  • the other end of the transmission part is connected with the steering part, one end of the steering part is connected with the transmission part, and the other end is connected with the power part.
  • the three-dimensional motion mechanism includes a first motion mechanism and a second motion mechanism
  • the first motion mechanism can drive the support structure to move along the first direction and the second direction
  • the second motion mechanism can The support structure is driven to move in a third direction.
  • a more specific one of the three-dimensional motion mechanism includes: a first support structure disposed on the base and capable of moving in a first direction relative to the base;
  • a second support structure disposed on the first support structure and capable of moving in a second direction relative to the first support structure;
  • a third support structure disposed on the second support structure and capable of moving in a third direction relative to the second support structure;
  • the upper surface of the base has an inwardly concave shape, and includes first guide rails disposed along the first direction on two opposite sidewalls of the concave, and the lower part of the first support structure.
  • the surface has a first sliding part matched with the first guide rail.
  • a side wall of the base is provided with a first drive mechanism for driving the first support structure to move;
  • the other side wall of the base is provided with a first grating ruler, and the lower surface of the corresponding position of the first supporting structure is provided with a grating ruler reading head for measuring the relative displacement of the base and the first supporting structure.
  • the upper surface of the first support structure has an inwardly concave shape, and includes a second guide rail disposed along the second direction on two opposite side walls of the concave, the second support The lower surface of the structure has a second sliding part matched with the second guide rail.
  • the side wall of the first support structure is provided with a second drive mechanism for driving the second support structure to move;
  • the other side wall of the first support structure is provided with a first grating scale
  • the lower surface of the corresponding position of the second support structure is provided with a grating scale reading head for measuring the relative displacement of the first support structure and the second support structure.
  • the third support structure is movably connected to the second support structure through a fixing portion fixed to the second support structure.
  • another surface of the fixing portion opposite to the surface on which the third support structure is installed is provided with a third drive mechanism for driving the third support structure to move.
  • the upper surface of the third support structure is provided with a fourth drive mechanism for driving the fourth support structure to rotate.
  • the fifth driving mechanism further includes a sensor.
  • the sample stage further includes a sample holder, and the sample holder includes:
  • a plurality of sample carrying positions are provided along the edge of the body.
  • the main body is disc-shaped or hollow disc-shaped; and/or
  • the sample carrying positions are arranged along a circle centered on the geometric center of the main body; and/or
  • the sample carrying positions are equally spaced along the edge of the body; and/or
  • the sample holder includes more than ten sample holding positions.
  • the sample holder further includes a first identification mark, a second identification mark, and a third identification mark arranged on the main body, wherein:
  • the first identification mark and the second identification mark are adhered to the upper surface of the main body; and/or
  • the upper surfaces of the first identification mark and the second identification mark are provided with one or more positioning scribe lines or raised stripes; and/or
  • the first identification mark is combined with the second identification mark to construct a sample holder positioning coordinate system
  • the third identification mark is used to indicate the placement direction of the sample holder.
  • the sample holder further includes a temperature control structure disposed on the main body, and the temperature control structure includes any one or more of the following: pipelines, dark grooves, and resistive paste patterns.
  • the pipeline comprises an annular pipeline arranged along a circle with the geometric center of the main body as the center;
  • the undercut comprises an annular undercut arranged along a circle with the geometric center of the main body as the center;
  • the resistive paste pattern is an annular shape arranged along a circle with the geometric center of the main body as the center, and includes a first insulating layer, a resistive paste pattern, and a second insulating layer sequentially stacked from the surface of the main body .
  • the angle between the first direction, the second direction and the third direction is between 60° and 120°; or
  • the first direction, the second direction and the third direction are orthogonal to each other.
  • the base and the first support structure, the second support structure, the third support structure, and the fourth support structure are movably connected to each other, so that the sample placed on the sample stage can be displaced and adjusted in three-dimensional space , so that the observer can easily observe each part of the sample; by setting the movable sample holder placing part, the sample holder can be flexibly and quickly taken and placed.
  • the guide rail and the drive mechanism are arranged at the connection of each support structure to cooperate with each other, and the transmission can be performed through the worm shaft and worm, and the grating ruler is arranged to measure the distance of the relative displacement between the platforms, eliminating the need for The process of manually adjusting the sample stage makes the displacement adjustment of the sample stage more convenient and accurate.
  • the sample stage and the sample holder can be automatically locked and unlocked through the locking structure, the locking state can be detected in real time, the automatic unlocking and replacement of the sample holder can be realized, and the sample holder can be automatically locked after replacement, No human involvement required.
  • the sample carrying position by arranging the sample carrying position on the edge of the sample holder or by setting the sample carrying position in an annular shape, the number of samples carried by the sample position can be significantly increased, so that the observer can observe the observation sample holder after changing the observation sample holder once. More samples can be obtained, which greatly saves the time and labor costs of the observers.
  • the sample can be adjusted arbitrarily in three-dimensional space to meet the observation requirements of the microscope, and under the same observation requirement, the observer can adjust the level or level of the sample holder only once.
  • the image of the sample holder after being optically photographed can be subjected to coordinate processing,
  • the image features of each sample are precisely positioned and measured;
  • the third identification mark is used to inform the observer of the placement direction of the sample holder and to indicate the position of the initial sample holder.
  • the temperature control structure of the sample holder can heat or cool the sample holder and the sample on the sample holder, which can be suitable for observation needs of samples with special requirements.
  • FIG. 1 is a structural diagram of a microscope sample stage according to an embodiment of the present invention.
  • FIG. 2 is a structural diagram of a microscope sample stage according to another embodiment of the present invention.
  • FIG. 3 is a structural diagram of a microscope sample stage according to still another embodiment of the present invention.
  • FIG. 4 is a structural diagram of a microscope sample stage according to another embodiment of the present invention.
  • 5-6 are structural diagrams of the fourth support structure of the microscope sample stage according to an embodiment of the present invention.
  • FIG. 7 is a structural diagram of a sample holder according to an embodiment of the present invention.
  • the microscope sample stage includes:
  • a support structure arranged on the three-dimensional motion mechanism and rotatable about an axis parallel to the third direction;
  • the support structure includes a locking mechanism by which the sample holder is secured.
  • the base 1 is located below the three-dimensional motion mechanism and is used to support the three-dimensional motion mechanism.
  • the three-dimensional motion mechanism can move in the first direction, the second direction and the third direction relative to the base, and the support structure is located on the top or inside of the three-dimensional motion mechanism, and can be driven by the three-dimensional motion mechanism to move in the first direction, the second direction and the third direction .
  • the support structure is rotatable relative to the three-dimensional motion mechanism and/or the base about an axis parallel to the third direction, wherein the support structure is rotatable relative to the three-dimensional motion mechanism or the support structure and the three-dimensional motion mechanism jointly rotate relative to the base.
  • the top of the support structure is fixedly provided with a sample holder placing portion for placing the sample holder.
  • the support structure includes a locking mechanism, the locking mechanism is arranged inside the support structure, and one end of the locking mechanism is located at the sample holder placement portion, and is used for locking or unlocking the sample holder placed in the sample holder placement portion.
  • the support structure includes a fourth support structure 5 which is arranged on the three-dimensional motion mechanism and can rotate around an axis parallel to the third direction.
  • the fourth support structure 5 includes a locking mechanism, and the locking mechanism includes a reset member 52 and at least two claw heads 53 .
  • the fourth support structure 5 further includes a casing 50 and a fifth driving mechanism, the locking mechanism is located inside the casing 50, the fifth driving mechanism is located at the end of the locking mechanism away from the sample holder placing portion 51, and the fifth driving mechanism is used for driving the locking mechanism
  • the locking mechanism can realize the locking and unlocking functions of the sample holder by expanding or contracting relative to the cross-sectional center of the fourth support structure.
  • One end of the locking mechanism away from the fifth driving mechanism is detachably connected to the sample holder 6, and the sample holder 6 is fixed on the locking mechanism through the locking mechanism.
  • the housing 50 is a hollow structure, and the reset member 52 of the locking mechanism and at least two claw heads 53 are arranged in the housing 50 .
  • a locking mechanism may be enclosed within housing 50 by sample holder placement portion 51 .
  • the claw head 53 is disposed at one end of the fourth support structure close to the sample holder placing portion.
  • a groove 531 matched with the claw head 53 is provided at one end of the casing 50 close to the sample holder placing portion 51 , and the claw head 53 can move radially relative to the groove 531 along the cross-sectional center of the fourth support structure.
  • a protrusion is provided on the outer side of the claw head 53, such as a set screw 58, which is used to abut against the protrusion on the bottom of the sample holder, so as to strengthen the locking effect with the sample holder.
  • the reset member 52 is fixed to the claw head 53 at one end and fixed to the housing 50 at the other end.
  • the claw head 53 can move radially in different directions along the cross-sectional center of the fourth support structure. Wherein, in the locked state, the claw head 53 moves outward relative to the cross-sectional center of the fourth support structure, and the set screw 58 is in contact with the bottom protrusion of the sample holder and locks the sample holder; in the unlocked state, the reset component 52 drives the claw head 53 Moving inward toward the center of the fourth support structure section, the set screw 58 is out of contact with the protrusion on the bottom of the sample holder and unlocks the sample holder.
  • the reset member 52 may be an elastic member such as a spring, elastic rubber, elastic sheet, etc., which is not limited herein.
  • the fifth driving mechanism includes a transmission part 54 , a steering part 55 and a power part 56 , and one end of the transmission part 54 is in contact with the claw head 53 and drives the claw head in a locked state 53 moves outward along the cross-sectional center of the fourth support structure, and is disengaged from the claw head 53 in the unlocked state.
  • one end of the transmission member 54 close to the claw head 53 is a cone.
  • the steering member 55 can be a universal ball or a universal joint, etc., and its function is that when the sample holder 6, the locking mechanism and the transmission member 54 need to rotate horizontally, the power member 56 does not need to follow the rotation and can continuously control the locking state of the locking mechanism. .
  • Its working principle is: when the sample holder 6 needs to be locked, the power part 56 drives the transmission part 54 and the steering part 55 to move in the direction of the locking mechanism, and the cone end of the transmission part 54 pushes the lock. mechanism to lock it.
  • the power component 56 drives the transmission component 54 and the steering component 55 to move away from the locking mechanism, and the reset component 52 drives the locking mechanism to enter the unlocked state .
  • the fifth driving mechanism further includes a sensor 57 and a sensor mounting seat 571, one end of the sensor mounting seat 571 is fixed on one side of the power component 56, and the other end is close to the Transmission part 54 .
  • the sensor 57 is installed on the side of the sensor mounting seat 571 close to the transmission member 54 .
  • the sensor 57 is used to detect the position of the transmission member 54 to determine the state of the locking mechanism.
  • the three-dimensional motion mechanism includes a first motion mechanism and a second motion mechanism, the first motion mechanism can drive the support structure to move along a first direction and a second direction, the second motion mechanism
  • the kinematic mechanism can drive the support structure to move in the third direction.
  • the first movement mechanism includes two non-parallel first track and second track, the first track is parallel to the first direction, the second track is parallel to the second direction, the first track is located under the second track and is stacked up and down,
  • the second rail can move back and forth in the first direction.
  • the second movement mechanism can be located on the top of the second track and is used to drive the support structure to move in the third direction.
  • the microscope sample stage as shown in FIG. 1 , the three-dimensional motion mechanism includes:
  • a first support structure 2 disposed on the base 1 and capable of moving relative to the base 1 in a first direction;
  • a second support structure 3 disposed on the first support structure 2 and capable of moving relative to the first support structure 2 in a second direction;
  • a third support structure 4 disposed on the second support structure 3 and capable of moving in a third direction relative to the second support structure 3;
  • the support structure includes:
  • a fourth support structure 5 disposed on the third support structure 4 and rotatable around an axis parallel to the third direction;
  • first direction, the second direction and the third direction are not parallel to each other.
  • the base 1 and the first support structure 2 are connected to each other, and are connected by a sliding device so that the first support structure 2 can reciprocate relative to the base 1 in a first direction, and the reciprocation The distance of movement is less than the length of the base 1 in the first direction; the first support structure 2 and the second support structure 3 are connected to each other, and are connected by a sliding device so that the second support structure 3 can be relative to the first support structure 2.
  • the distance of the reciprocating movement is smaller than the length of the first support structure 2 in the second direction; the third support structure 4 is combined with the fourth support structure 5, and the third support structure 4 can
  • the support structure 5 reciprocates in the third direction; the fourth support structure 5 is provided with a vertically placed rotating shaft, which can rotate in a horizontal plane.
  • the first direction, the second direction and the third direction are not parallel to each other, that is, a three-dimensional moving platform is formed.
  • the fourth support structure 5 is provided with a sample holder placing portion 51 .
  • the placing part is used to place and fix the sample holder 6 for observation.
  • the upper surface of the base 1 has an inwardly concave shape, and includes first guide rails 11 disposed along the first direction on two opposite side walls of the concave , the lower surface of the first support structure 2 has a first sliding member 12 matched with the first guide rail 11 .
  • a side wall of the base 1 is provided with a first drive mechanism 13 for driving the first support structure 2 to move;
  • the recess 1 on the upper surface of the base is provided with a first grating ruler 14 on the other side outer wall away from the first driving mechanism 13 , and the lower surface of the corresponding position of the first support structure 2 is provided with a grating ruler reading head for measuring the base 1 . Relative displacement to the first support structure 2 .
  • the upper surface of the base 1 is recessed inward, and on the two opposite side walls of the recess, the inner side walls or the top surfaces of the side walls along the extension direction of the side walls are provided with first guide rails 11 .
  • the lower surface of the first support structure 2 is provided with a first sliding member 12 that cooperates with the first guide rail 11 .
  • the first guide rail 11 and the first sliding member 12 include a roller type guide rail, a ball type guide rail, a gear type guide rail, etc., which are not limited herein.
  • One side wall of the base 1 is provided with a first drive mechanism 13, the first drive mechanism 13 is fixed on the outer side wall of the recessed side of the upper surface of the base 1, and is connected to the first support structure 2 through a worm gear or other transmission structure.
  • the lower surface is connected, and the displacement of the base 1 and the first support structure 2 can be finely adjusted, which is more suitable for the application scene of observing tiny samples in an electron microscope.
  • the upper surface of the base 1 is recessed and a first grating ruler 14 is disposed on the outer side wall of the other side away from the first driving mechanism 13 and the first supporting structure 2 corresponding to the position.
  • the scale grating and the grating scale reading head set at the corresponding position on the lower surface of the first support structure 2 .
  • the first grating scale 14 is arranged in parallel with the first guide rail 11 .
  • the observed objects are extremely small. Therefore, when the specimen moves, especially when the computer is required to automatically control the movement, it is necessary to accurately obtain the relative displacement data.
  • the grating scale is set to transmit the displacement data of the base 1 and the first support structure 2 to the control part.
  • the sample stage further includes a controller for automatically controlling the movement of the base 1 and the first support structure 2 .
  • the controller, the first drive mechanism 13 and the first grating ruler 14 form a closed-loop control, and the closed-loop control method is as follows.
  • the controller first receives the target position instruction, the controller compares the received target position with the current position of the grating to obtain initial displacement data, and then transmits the initial displacement data to the first driving mechanism 13 .
  • the first drive mechanism 13 drives the first support structure 2 to displace relative to the base 1 according to the initial displacement data.
  • the first grating ruler 14 transmits the actual displacement data to the controller for comparison, such as the actual displacement.
  • the controller receives the target position command as the first position and the current position as the second position, the controller compares the received first position with the second position, and the obtained first difference is the initial displacement data, and then Input the first difference value into the first drive mechanism 13 to drive the first support structure 2 to displace relative to the base 1. After the displacement is completed, the actual displacement data is transmitted to the controller for comparison. If the actual displacement data is the second difference value, the displacement If the rear position is the third position, the third position is re-compared with the first position and the above steps are repeated.
  • the upper surface of the first support structure 2 has an inwardly concave shape, and includes two opposite sidewalls of the concave along the For the second guide rail 21 arranged in the second direction, the lower surface of the second support structure 3 has a second sliding member 22 matched with the second guide rail 21 .
  • a second driving mechanism 23 is provided in the middle recess on the upper surface of the first support structure 2 for driving the second support structure 3 to move;
  • a second grating ruler 24 is provided on the concave outer side wall of the first support structure 2, and a grating ruler reading head is provided on the lower surface of the corresponding position of the second support structure 3 for measuring the first support structure 2 and the second grating ruler. Relative displacement of the support structure 3 .
  • the upper surface of the first support structure 2 is recessed inward, and two opposite side walls of the recess are provided with second guide rails 21 along the extending directions of the two inner side walls.
  • the second support The lower surface of the structure 3 is provided with a second sliding member 22 that cooperates with the second guide rail 21 .
  • the second guide rail 21 and the second sliding member 22 include a roller type guide rail, a ball type guide rail, a gear type guide rail, etc., which are not limited herein.
  • a second drive mechanism 23 is arranged in the middle recess on the upper surface of the first support structure 2, the second drive mechanism 23 is fixed in the middle recess on the upper surface of the first support structure 2, and is driven by a worm gear or other transmission mechanism.
  • the structure is connected to the lower surface of the corresponding position of the second support structure 3, and the displacement of the first support structure 2 and the second support structure 3 can be finely adjusted, which is more suitable for the application scene of observing tiny samples in an electron microscope.
  • a second grating ruler 24 is provided at a position corresponding to the second support structure 3 on one side of the outer side wall of the first support structure 2 which is recessed on the upper surface.
  • the scale grating on the outer side wall of one side and the grating scale reading head arranged at the corresponding position on the lower surface of the second support structure 3 .
  • the second grating scale 24 is arranged in parallel with the second guide rail 21 . In the field of electron microscopes, the observed objects are extremely small.
  • the third support structure 4 is movably connected to the second support structure 3 through a fixing portion 31 fixed to the second support structure 3 .
  • the fixing portion 31 is a plate-like structure with one side recessed inward, and is vertically fixed on one side of the upper surface of the second support structure.
  • the recessed direction is a vertical direction and faces the third support structure 4 .
  • the other surface of the fixing portion 31 opposite to the surface on which the third supporting structure 4 is installed is provided with a third driving mechanism 34 for driving the third supporting structure 4 move.
  • the fixing portion 31 is vertically arranged and fixed on one side of the upper surface of the second support structure 3 , which faces the third support structure
  • the side surface of 4 is recessed inward, and the direction of the recess is the vertical direction.
  • the two opposite side walls of the recess are provided with third guide rails 32 along the vertical direction.
  • the third sliding part 33 matched with the guide rail enables the third support structure 4 to reciprocate in the vertical direction relative to the fixed part 31 and the second support structure 3 .
  • a third drive mechanism 34 is disposed on the side surface of the fixing portion 31 away from the third support structure 4 , which is connected with the third support structure 4 through a worm gear or other transmission structure for driving the third support structure 4 to move.
  • a fourth driving mechanism 41 is provided on the upper surface of the third support structure 4 for driving the fourth support structure 5 to rotate.
  • the fourth drive mechanism 41 is disposed on the edge of the upper surface of the third support structure 4, and is connected to the fourth support structure 5 through a worm gear or other transmission structure, so as to drive the fourth support structure 5 to rotate in the horizontal direction.
  • the first driving mechanism 13 , the second driving mechanism 23 , the third driving mechanism 34 , and the fourth driving mechanism 41 are motor, piezoelectric ceramics, manual knob and other driving devices. any drive.
  • the specific forms and positions of the first, second, third and fourth driving mechanisms can also be set by themselves according to actual needs.
  • the sample stage further includes a sample holder 6, and the sample holder 6 includes: a main body; a plurality of sample holding positions 61 arranged along the edge of the main body .
  • the observers need to replace the samples frequently, and the observation efficiency is low.
  • the observation sample is switched by the mode, so that the observer can observe more samples after changing the observation sample holder 6 at one time, which greatly saves the time and labor cost of the observer.
  • the main body is in the shape of a disc or a hollow disc;
  • the sample holding position 61 is arranged along a circle with the geometric center of the main body as the center; and/or
  • the sample carrying positions 61 are arranged at equal intervals along the edge of the main body; and/or
  • the sample holder 6 includes more than ten sample holder positions.
  • the main body is in the shape of a disc or a hollow disc and/or the sample holding position 61 is arranged along a circle with the geometric center of the main body as the center of the circle.
  • this setting allows the observer to position a sample only by adjusting the horizontal or vertical position of the sample holder 6 once, and then the observation sample can be switched by rotating the sample holder 6 for subsequent observations, avoiding frequent debugging of the sample.
  • the horizontal or vertical position of the holder 6 simplifies the operation process of the electron microscope and saves the observer's time.
  • the sample carrying positions 61 are arranged at equal intervals along the edge of the main body, so that the sample holder 6 can be switched to the next sample carrying position 61 by rotating the same angle, which can simplify the mechanical and electronic circuit design of the rotating mechanism and make it easier to realize sample carrying Automation of bit switching and improved positioning accuracy.
  • the sample holder 6 can be provided with more than ten sample holding positions 61 on the edge of the disk-shaped or hollow disk-shaped main body or in a circle with the geometric center of the main body as the center. There are more than 50 sample holders 61 with sample holders 61, so that the number of samples that the sample holder 6 can carry is much higher than the sample holder of the existing electron microscope, which greatly reduces the operation of changing samples. The number of times simplifies the operation process of the electron microscope, and is especially suitable for the application scenario of observing a large number of small-sized samples.
  • the sample holder 6 further includes a first identification mark 62, a second identification mark 63, and a third identification mark 64 arranged on the main body, wherein:
  • the first identification mark 62 and the second identification mark 63 are arranged on the upper surface of the main body; and/or
  • the upper surfaces of the first identification mark 62 and the second identification mark 63 are provided with one or more positioning scribe lines or raised stripes; and/or
  • the first identification mark 62 is combined with the second identification mark 63 to construct a positioning coordinate system of the sample holder 6; and/or
  • the third identification mark 64 is used to indicate the placement direction of the sample holder.
  • the first identification mark 62 and the second identification mark 63 are engraved with positioning scribe lines or raised stripes with nanometer-level precision on the marks surface.
  • the positional relationship between each pixel of the entire image of the sample holder 6 is recorded, and the pixel positions of the first identification mark and the second identification mark in the image are used to determine the entire image.
  • the third identification mark 64 indicates the position of the initial sample carrying position 61 , and the current placement direction of the sample holder 6 can be identified by the third identification mark 64 .
  • the first identification mark 62 and the second identification mark 63 may be made of silicon wafers or metal sheets.
  • the sample holder 6 further includes a temperature control structure disposed on the main body, and the temperature control structure includes any one or more of the following: pipelines, dark tanks , Resistor paste pattern.
  • the pipeline or dark tank is filled with refrigerant or hot liquid, and the temperature of the sample holder 6 is controlled by the flow of the refrigerant or hot liquid; the resistance slurry is sprayed on the main body to form a fixed shape, and the resistance slurry is energized to The sample holder 6 is heated to control the temperature of the sample holder 6, so that some samples with special preservation requirements can be better observed.
  • the pipeline comprises an annular pipeline arranged along a circle with the geometric center of the main body as the center;
  • the undercut comprises an annular undercut arranged along a circle with the geometric center of the main body as the center;
  • the resistive paste pattern is an annular shape arranged along a circle with the geometric center of the main body as the center, and includes a first insulating layer, a resistive paste pattern, and a second insulating layer sequentially stacked from the surface of the main body .
  • the pipeline, the dark groove and the resistive material pattern are arranged in a circle with the geometric center of the main body as the center, and the heat can be conducted through the main body, and the entire main body can be uniformly temperature controlled.
  • the resistive paste is a metal material, so it needs to be insulated, that is, an insulating layer is used to wrap the resistive paste pattern.
  • an included angle between the first direction, the second direction, and the third direction in the sample stage is between 60° and 120°; or the first direction is between 60° and 120°.
  • the direction, the second direction and the third direction are orthogonal to each other.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

一种显微镜样品台，包括：底座（1）；设置于底座（1）上的三维运动机构，三维运动机构能够沿着第一方向、第二方向、以及第三方向运动；设置在三维运动机构上的并能绕与第三方向平行的轴旋转的支撑结构；设置于支撑结构上的样品托放置部（51）；支撑结构包括锁定机构，通过锁定机构以固定样品托（6）。样品台占用空间小、样品容量大、可三维调整样品位置、可自动锁定及解锁样品托（6）、可控制样品温度。

Description

一种显微镜样品台 技术领域
本发明涉及显微镜技术领域，特别涉及一种显微镜样品台。
背景技术
电子显微技术是利用电子光学系统进行显微成像与原位分析的技术。电子显微镜的特点在于：在极高的放大倍率下，可以直接观察样品的形貌结构和样品成分；具有很高的分辨率，可直接分辨原子，进行纳米尺度的晶体结构及成分分析；发展方向趋向多功能、综合性。
电子显微镜样品台是电子显微镜系统中用于承载待测样品的装置。现有技术的电子显微镜样品台大多是通过使用较大的XY轴移动行程实现一次对多个样品进行观测，导致电子显微镜体积较大，尤其样品室体积较大。同时，现有技术的样品台承载的样品数量依然有限，当观测样品数量较多时，需要人工频繁更换样品，并在每次更换样品之后重新进行设备抽真空、重新调试样品观测位置及焦距等操作；另外现有技术在更换样品过程中，仍需人工进行锁定并确认样品安装是否稳固，防止观测过程中样品托脱落，缺少可以将样品托自动锁定、解锁及夹紧的装置，导致影响观测效果、效率低下、浪费时间和人力。
发明内容
为解决上述现有技术中存在的问题，本发明提出一种显微镜的样品台，该样品台占用空间小、样品容量大、可三维调整样品位置、可控制样品温度，通过锁定结构可以实现将样品台与样品托自动锁定和解锁，并可实时检测锁定状态，可实现全自动解锁更换样品托并对更换后样品托进行自动锁定，无需人工参与特别适合于电子显微镜的应用场景。
本发明提出了一种显微镜的样品台，包括：
底座；
设置于底座上的三维运动机构，所述三维运动机构能够沿着第一方向、第二方向、以及第三方向运动；
设置在三维运动机构上的并能绕与所述第三方向平行的轴旋转的支撑结构；
设置于所述支撑结构上的样品托放置部；
所述支撑结构包括锁定机构，通过所述锁定机构以固定所述样品托。
可选的，所述支撑结构包括：设置于所述三维运动机构上并能绕与所述第三方向平行的轴旋转的第四支撑结构。
可选的，所述锁定机构包括至少两个爪头和分别与所述爪头连接的复位部件。
可选的，所述支撑结构包括第五驱动机构，所述第五驱动机构用于驱动锁定结构的锁定或解锁。
可选的，所述第五驱动机构包括传动部件、转向部件、动力部件，所述传动部件的一端在锁定状态下与爪头接触并驱动爪头沿支撑结构的截面中心向外移动，在解锁状态下脱离爪头，传动部件的另一端与转向部件连接，转向部件一端与传动部件连接，另一端连接动力部件。
可选的，所述三维运动机构包括第一运动机构和第二运动机构，所述第一运动机构能够驱动所述支撑结构沿着第一方向和第二方向运动，所述第二运动机构能够驱动所述支撑结构沿着第三方向运动。
可选的，所述三维运动机构更具体的一个包括：设置于所述底座上且能够相对于所述底座在第一方向上移动的第一支撑结构；
设置于所述第一支撑结构上且能够相对于所述第一支撑结构在第二方向上移动的第二支撑结构；
设置于所述第二支撑结构上且能够相对于所述第二支撑结构在第三方向上移动的第三支撑结构；
可选的，所述底座的上表面具有向内凹陷的形状，并且包括在所述凹陷的两个相对侧壁上沿所述第一方向设置的第一导轨，所述第一支撑结构的下表面具有与所述第一导轨相配合的第一滑动部件。
可选的，所述底座的一侧壁设置有第一驱动机构，用于驱动所述第一支撑结构移动；和/或
所述底座的另一侧壁设置有第一光栅尺，第一支撑结构对应位置的下表面设置有光栅尺读数头，用于测量底座与第一支撑结构的相对位移。
可选的，所述第一支撑结构的上表面具有向内凹陷的形状，并且包括在所述凹陷的两个相对侧壁上沿所述第二方向设置的第二导轨，所述第二支撑结构的下表面具有与所述第二导轨相配合的第二滑动部件。
可选的，所述第一支撑结构的侧壁设置有第二驱动机构，用于驱动所述第二支撑结构移动；和/或
所述第一支撑结构的另一侧壁设置有第一光栅尺，第二支撑结构对应位置的下表面设置有光栅尺读数头，用于测量第一支撑结构与第二支撑结构的相对位移。
可选的，所述第三支撑结构通过固定到所述第二支撑结构的固定部可移动地连接到所述第二支撑结构。
可选的，所述固定部与安装所述第三支撑结构的表面相对的另一表面设置有第三驱动机构，用于驱动所述第三支撑结构移动。
可选的，所述第三支撑结构的上表面设置有第四驱动机构，用于驱动所述第四支撑结构旋转。
可选的，所述第五驱动机构还包括传感器。
可选的，所述样品台还包括样品托，所述样品托包括：
主体；
沿所述主体的边缘设置的多个样品承载位。
可选的，所述主体为圆盘状或空心圆盘状；和/或
所述样品承载位沿以所述主体的几何中心为圆心的圆形设置；和/或
所述样品承载位沿所述主体的边缘等间距设置；和/或
所述样品托包括多于十个样品承载位。
可选的，所述样品托还包括设置于所述主体上的第一识别标识、第二识别标识、第三识别标识，其中：
所述第一识别标识与第二识别标识粘合在所述主体上表面；和/或
所述第一识别标识与第二识别标识上表面设有一条或多条定位刻线或凸起条纹；和/或
所述第一识别标识与第二识别标识结合用于构建样品托定位坐标系；和/或
所述第三识别标识用于指示样品托的放置方向。
可选的，所述样品托还包括设置于所述主体上的温度控制结构，所述温度控制结构包括以下中的任意一种或多种：管路、暗槽、电阻浆料图案。
可选的，所述管路包括沿以所述主体的几何中心为圆心的圆形设置的环形管路；
所述暗槽包括沿以所述主体的几何中心为圆心的圆形设置的环形暗槽；
所述电阻浆料图案为沿以所述主体的几何中心为圆心的圆形设置的环形，并且包括从所述主体表面开始依次层叠设置的第一绝缘层、电阻浆料图案、第二绝缘层。
可选的，所述第一方向、所述第二方向和所述第三方向彼此夹角为60°至120°之间；或者
所述第一方向、所述第二方向和所述第三方向彼此正交。
本发明提出的电子显微镜样品台具有以下优点：
在本公开实施例的方案中，通过底座与第一支撑结构、第二支撑结构、第三支撑结构、第四支撑结构相互可移动连接，使得样品台上放置的样品可在三维空间内位移调整，使得观测者可以简便的观测样品的各个部分；通过设置可活动的样品托放置部，可以灵活快速的将样品托取放。
在本公开实施例的方案中，通过在各个支撑结构连接处设置导轨与驱动机构相互配合，可以通过蜗轴蜗杆进行传动，并设置了光栅尺测量各平台之间相对位移的距离，免去了手动调节样品台的过程，使得样品台位移调整更加便捷精确。
在本公开实施例的方案中，通过锁定结构可以实现将样品台与样品托自动锁定和解锁，并可实时检测锁定状态，可实现全自动解锁更换样品托并对更换后样品托进行自动锁定，无需人工参与。
在本公开实施例的方案中，通过将样品承载位设置在样品托边缘或圆环状设置样品承载位，可明显增大样品位承载的样品数量，使得观测人员一次更换观测样品托后可以观测到更多的样品，大大节约了观测人员的时间和人力成本。通过第一至第四支撑结构及样品托的协同，使得样品可以在三维空间内任意调节以适应显微镜的观测要求，并且在同一观测要求下，可以让观测人员仅仅通过一次调试样品托的水平或竖直位置对一个样 品进行定位，随后的观测通过旋转样品托即可在不改变样本观测位相对显微镜空间位置的情况下切换观测样本，避免频繁调试样品托的水平或竖直位置，简化电子显微镜的操作流程并节约观测者的时间。
在本公开实施例的方案中，通过在样品托上设置第一识别标识、第二识别标识，当需要对样品做图像记录存档时，可以对样品托进行光学拍照后的图像进行坐标化处理，并对每个样品的图像特征进行精确定位和样品测量；第三识别标识用于告知观测人员样品托的放置方向，并指示初始样品承载位的位置。
在本公开实施例的方案中，所述样品托的温度控制结构可以对样品托及样品托上的样品进行加热或降温，可以适用于具有特殊要求样品的观测需求。
附图说明
图1是本发明一实施方式的显微镜样品台的结构图；
图2是本发明另一实施方式的显微镜样品台的结构图；
图3是本发明再一实施方式的显微镜样品台的结构图；
图4是本发明又一实施方式的显微镜样品台的结构图；
图5-6是本发明一实施方式的显微镜样品台第四支撑结构的结构图；
图7是本发明一实施方式的样品托结构图。
具体实施方式
为使本发明的目的、技术方案和优点更加清楚明白，以下结合具体实施例，并参照附图，对本发明进一步详细说明。
在本实施例的一种实施方式中，显微镜样品台包括：
底座1；
设置于底座1上的三维运动机构，所述三维运动机构能够沿着第一方向、第二方向、以及第三方向运动；
设置在三维运动机构上的并能绕与所述第三方向平行的轴旋转的支撑结构；
设置于所述支撑结构上的样品托放置部；
所述支撑结构包括锁定机构，通过所述锁定机构以固定所述样品托。
底座1位于三维运动机构下方，用于支撑三维运动机构。三维运动机构可以相对于底座向第一方向、第二方向和第三方向运动，支撑结构位于三维运动机构的顶部或内部，可由三维运动机构驱动向第一方向、第二方向和第三方向运动。支撑结构可相对于三维运动机构和/或底座绕与第三方向平行的轴旋转，其中，支撑结构可相对于三维运动机构旋转或支撑结构及三维运动机构共同相对于底座旋转。支撑结构顶部固定设置有样品托放置部，用于放置样品托。支撑结构包括锁定机构，锁定机构设置于支撑结构内部，其一端位于样品托放置部，用于锁定或解锁放置在样品托放置部的样品托。
在一个具体的实施方式中，支撑结构包括设置于所述三维运动机构上并能绕与所述第三方向平行的轴旋转的第四支撑结构5。
在本实施例的一种实施方式中，第四支撑结构5包括锁定机构，锁定机构包括复位部件52和至少两个爪头53。第四支撑结构5还包括外壳50、和第五驱动机构，锁定机构位于外壳50内部，第五驱动机构位于所述锁定机构远离样品托放置部51的一端，第五驱动机构用于驱动锁定机构相对于第四支撑结构的截面中心扩张或收缩，使锁定机构实现对所述样品托的锁定和解锁功能。锁定机构远离第五驱动机构的一端与样品托6可拆卸连接，通过锁定机构将样品托6固定在锁定机构上。
在本实施例的一种实施方式中，如图5及图6所示，外壳50为中空结构，锁定机构的复位部件52和至少两个爪头53设置在外壳50内。例如，锁定机构可以被样品托放置部51封装在外壳50内。
爪头53设置在所述第四支撑结构靠近所述样品托放置部的一端。在外壳50靠近样品托放置部51的一端设置有与所述爪头53相配合的槽531，爪头53能够相对于所述槽531沿第四支撑结构的截面中心作径向移动。爪头53外侧设置有凸起，例如紧定螺钉58，用于抵持在样品托的底部凸起，以加强与样品托的锁定效果。
复位部件52一端固定到爪头53，另一端固定到外壳50。爪头53可沿所述第四支撑结构的截面中心作方向不同的径向移动。其中，在锁定状态中，爪头53相对第四支撑结构的截面中心向外移动，紧定螺钉58与样 品托底部凸起接触并锁定样品托；在解锁状态中，复位部件52驱动爪头53向第四支撑结构截面中心方向向内移动，紧定螺钉58与样品托底部凸起脱离接触并解锁样品托。复位部件52可以为弹簧、弹性橡胶、弹片等弹性部件，在此不做限定。
在本实施例的一种实施方式中，所述第五驱动机构包括传动部件54、转向部件55、动力部件56，所述传动部件54的一端在锁定状态下与爪头53接触并驱动爪头53沿第四支撑结构的截面中心向外移动，在解锁状态下脱离爪头53，传动部件54的另一端与转向部件55连接，转向部件55一端与传动部件54连接，另一端连接动力部件56。
例如，传动部件54靠近爪头53的一端为锥体。转向部件55可以为万向球或万向接头等，其作用为在样品托6、锁定机构及传动部件54需要水平旋转时，动力部件56无需跟随旋转并可以不间断地控制锁定机构的锁定状态。其工作原理为：当需锁定样品托6时，所述动力部件56驱动所述传动部件54及转向部件55，使其向所述锁定机构方向移动，传动部件54的锥体一端推动所述锁定机构，使其进入锁定状态。当需解锁样品托6时，所述动力部件56驱动所述传动部件54及转向部件55，使其向远离所述锁定机构的方向移动，复位部件52驱动所述锁定机构，使其进入解锁状态。
在本实施例的一种实施方式中，所述第五驱动机构还包括传感器57及传感器安装座571，所述传感器安装座571一端固定在所述动力部件56的一侧，另一端靠近所述传动部件54。传感器57安装在所述传感器安装座571靠近所述传动部件54的一侧。所述传感器57用于检测传动部件54的位置以判断所述锁定机构的状态。
在本实施例的一种实施方式中，三维运动机构包括第一运动机构和第二运动机构，所述第一运动机构能够驱动支撑结构沿着第一方向和第二方向运动，所述第二运动机构能够驱动支撑结构沿着第三方向运动。第一运动机构包括两条相互不平行的第一轨道和第二轨道，第一轨道与第一方向平行，第二轨道与第二方向平行，第一轨道位于第二轨道下方且上下叠放，使得第二轨道可沿第一方向往返移动。第二运动机构可以位于第二轨道的顶部，用于驱动支撑结构沿第三方向运动，在此不做具体限制，只要是能 够实现三维运动即可，如公告号为CN202061777U、公开号为CN105575240A中的三维运动机构也可以引入到本申请中。
在本实施例的一种更具体的实施方式中，所述显微镜样品台，如图1所示，所述三维运动机构包括：
设置于底座1上且能够相对于所述底座1在第一方向上移动的第一支撑结构2；
设置于所述第一支撑结构2上且能够相对于所述第一支撑结构2在第二方向上移动的第二支撑结构3；
设置于所述第二支撑结构3上且能够相对于所述第二支撑结构3在第三方向上移动的第三支撑结构4；
所述支撑结构包括：
设置于所述第三支撑结构4上并能绕与所述第三方向平行的轴旋转的第四支撑结构5；
其中，所述第一方向、所述第二方向和所述第三方向彼此不平行。
在本实施例的一种实施方式中，所述底座1与第一支撑结构2相互连接，并通过滑动装置连接使得第一支撑结构2可以相对于底座1在第一方向上往复运动，其往复运动的距离小于底座1在第一方向上的长度；所述第一支撑结构2与第二支撑结构3相互连接，并通过滑动装置连接使得第二支撑结构3可以相对于第一支撑结构2在第二方向上往复运动，其往复运动的距离小于第一支撑结构2在第二方向上的长度；所述第三支撑结构4与第四支撑结构5结合，第三支撑结构4能够将第四支撑结构5在第三方向上往复运动；所述第四支撑结构5设置有竖直放置的转轴，其可以在水平面旋转。所述第一方向、第二方向和第三方向彼此不平行，即构成一个三维移动平台。
在本实施例中，所述第四支撑结构5上设有样品托放置部51。所述放置部用于放置并固定样品托6，以便观察。
在本实施例的一种实施方式中，所述底座1的上表面具有向内凹陷的形状，并且包括在所述凹陷的两个相对侧壁上沿所述第一方向设置的第一导轨11，所述第一支撑结构2的下表面具有与所述第一导轨11相配合的第一滑动部件12。
在本实施例的一种实施方式中，所述底座1的一侧壁设置有第一驱动机构13，用于驱动所述第一支撑结构2移动；和/或
所述底座上表面凹陷1在远离第一驱动机构13的另一侧外侧壁设置有第一光栅尺14，第一支撑结构2对应位置的下表面设置有光栅尺读数头，用于测量底座1与第一支撑结构2的相对位移。
在本实施方式中，所述底座1的上表面向内凹陷，所述凹陷的两个相对侧壁上，沿侧壁延长方向的内侧壁或侧壁顶面设置有第一导轨11，所述第一支撑结构2的下表面设有与第一导轨11配合的第一滑动部件12。所述第一导轨11与第一滑动部件12包括滚轮式导轨、滚珠式导轨、齿轮式导轨等，在此不做限定。所述底座1的一侧壁设有第一驱动机构13，所述第一驱动机构13固定在底座1上表面凹陷的一侧外侧壁，并且通过蜗轮蜗杆或其他传动结构与第一支撑结构2下表面连接，可以精细调节所述底座1与第一支撑结构2的位移，更加适用于在电子显微镜观测微小样品的应用场景。所述底座1上表面凹陷在远离第一驱动机构13的另一侧外侧壁与第一支撑结构2对应位置设置有第一光栅尺14，所述第一光栅尺14包括设置在底座1外侧壁的标尺光栅和第一支撑结构2下表面对应位置设置的光栅尺读数头。第一光栅尺14与第一导轨11平行设置。在电子显微镜领域，所观察的对象都是极其微小的，因此在标本移动时，特别是需要电脑自动控制移动时，需要准确的得到相对位移的数据，为了准确的测量平台位移的距离，并方便将位移的数据传输给观测者，设置光栅尺将底座1与第一支撑结构2的位移数据传输给控制部件。
在本实施例的一种实施方式中，所述样品台还包括控制器，用于自动控制所述底座1与所述第一支撑结构2的移动。所述控制器与所述第一驱动机构13、第一光栅尺14构成闭环控制，闭环控制方法如下。所述控制器首先接收目标位置指令，控制器将接收到的目标位置与光栅当前位置进行对比，得到初始位移数据，然后将初始位移数据传输到所述第一驱动机构13。所第一述驱动机构13根据初始位移数据驱动第一支撑结构2相对于底座1进行位移，位移完成后所述第一光栅尺14将实际位移数据传输到所述控制器进行比较，如实际位移数据与初始位移数据不一致，则重复上述步骤进行进一步位移，直到初始位移数据与实际位移数据一致。例如， 当控制器接收到目标位置指令为第一位置，当前位置为第二位置，控制器将接收到的第一位置与第二位置进行对比，得到的第一差值为初始位移数据，然后将第一差值输入第一驱动机构13，驱动第一支撑结构2相对于底座1进行位移，位移完成后将实际位移数据传输到控制器进行比较，如实际位移数据为第二差值，位移后位置为第三位置，则将第三位置与第一位置重新对比并重复上述步骤。
在本实施例的一种实施方式中，如图2所示，所述第一支撑结构2的上表面具有向内凹陷的形状，并且包括在所述凹陷的两个相对侧壁上沿所述第二方向设置的第二导轨21，所述第二支撑结构3的下表面具有与所述第二导轨21相配合的第二滑动部件22。
在本实施例的一种实施方式中，所述第一支撑结构2上表面的中间凹陷内设置有第二驱动机构23，用于驱动所述第二支撑结构3移动；和/或
所述第一支撑结构2上凹陷的一侧外侧壁设置有第二光栅尺24，第二支撑结构3对应位置的下表面设置有光栅尺读数头，用于测量第一支撑结构2与第二支撑结构3的相对位移。
在本实施方式中，所述第一支撑结构2的上表面向内凹陷，所述凹陷的两个相对侧壁上，沿两个内侧壁延长方向设置有第二导轨21，所述第二支撑结构3的下表面设有与第二导轨21配合的第二滑动部件22。所述第二导轨21与第二滑动部件22包括滚轮式导轨、滚珠式导轨、齿轮式导轨等，在此不做限定。所述第一支撑结构2的上表面的中间凹陷内设有第二驱动机构23，所述第二驱动机构23固定在第一支撑结构2上表面的中间凹陷内，并且通过蜗轮蜗杆或其他传动结构与第二支撑结构3对应位置下表面连接，可以精细调节所述第一支撑结构2与第二支撑结构3的位移，更加适用于在电子显微镜观测微小样品的应用场景。所述第一支撑结构2上表面凹陷的一侧外侧壁与第二支撑结构3对应位置设置有第二光栅尺24，所述第二光栅尺24包括设置在第一支撑结构2上表面凹陷的一侧外侧壁的标尺光栅和第二支撑结构3下表面对应位置设置的光栅尺读数头。第二光栅尺24与第二导轨21平行设置。在电子显微镜领域，所观察的对象都是极其微小的，因此在标本移动时，特别是需要电脑自动控制移动时，需要准确的得到相对位移的数据，为了准确的测量平台位移的距离，并方 便将位移的数据传输给观测者，通过光栅尺将第一支撑结构2与第二支撑结构3位移数据传输给控制部件。
在本实施例的一种实施方式中，如图3所示，所述第三支撑结构4通过固定到所述第二支撑结构3的固定部31可移动地连接到所述第二支撑结构3。固定部31为一侧具有向内凹陷的板状结构，竖直固定在第二支撑结构上表面的一侧，所述凹陷方向为竖直方向，朝向第三支撑结构4。
在本实施例的一种实施方式中，所述固定部31与安装所述第三支撑结构4的表面相对的另一表面设置有第三驱动机构34，用于驱动所述第三支撑结构4移动。
在本实施例的一种实施方式中，如图3和图4所示，所述固定部31竖直设置，固定在所述第二支撑结构3上表面的一侧，其朝向第三支撑结构4的侧表面向内凹陷，凹陷方向为竖直方向，所述凹陷的两个相对侧壁上沿竖直方向设置有第三导轨32，所述第三支撑结构4的侧面设有与第三导轨配合的第三滑动部件33，使得第三支撑结构4可相对于固定部31和第二支撑结构3沿竖直方向往复运动。所述固定部31远离第三支撑结构4的侧表面设置有第三驱动机构34，其与第三支撑结构4通过蜗轮蜗杆或其他传动结构连接，用于驱动第三支撑结构4移动。
在本实施例的一种实施方式中，如图3所示，所述第三支撑结构4的上表面设置有第四驱动机构41，用于驱动所述第四支撑结构5旋转。所述第四驱动机构41设置在所述第三支撑结构4上表面的边缘，通过蜗轮蜗杆或其他传动结构与第四支撑结构5连接，可以驱动所述第四支撑结构5在水平面方向旋转。
在本实施例的一种实施方式中，所述第一驱动机构13、第二驱动机构23、第三驱动机构34、第四驱动机构41为电机、压电陶瓷、手动旋钮等驱动装置中的任一驱动装置。除了上文描述的方案之外，第一、第二、第三、第四驱动机构的具体形式和位置也可以根据实际需要自行设定。
在本实施例的一种实施方式中，如图7所示，所述样品台还包括样品托6，所述样品托6包括：主体；沿所述主体的边缘设置的多个样品承载位61。为了解决现有电子显微镜样品台承载样品数量过少，导致观测人员需要频繁更换样品，观测效率低下的问题，在样品托6主体边缘设置样品 承载位61，通过旋转和/或平移样品托6的方式切换观测样品，使得观测人员一次更换观测样品托6后可以观测到更多的样品，大大节约了观测人员的时间和人力成本。
在本实施例的一种实施方式中，所述主体为圆盘状或空心圆盘状；和/或
所述样品承载位61沿以所述主体的几何中心为圆心的圆形设置；和/或
所述样品承载位61沿所述主体的边缘等间距设置；和/或
所述样品托6包括多于十个样品承托位。
在本实施例中，所述主体为圆盘状或空心圆盘状和/或所述样品承载位61沿以所述主体的几何中心为圆心的圆形设置。在实际应用场景中，这样的设置可以让观测人员仅仅通过一次调试样品托6的水平或竖直位置对一个样品进行定位，随后的观测通过旋转样品托6即可切换观测样本，避免频繁调试样品托6的水平或竖直位置，简化电子显微镜的操作流程并节约观测者的时间。
所述样品承载位61沿主体的边缘等间距设置，使得样品托6通过旋转相同的角度即可切换到下一个样品承载位61，可以简化旋转机构的机械和电子电路设计，更容易实现样品承载位切换的自动化并提高定位精度。
所述样品托6通过在圆盘状或空心圆盘状主体边缘设置样品承载位61或以所述主体的几何中心为圆心的圆形设置样品承载位61，可以根据主体的尺寸设置多于十个样品承载位61的样品托6，甚至多达50个以上的样品承载位61，使得样品托6可承载的样品数量远远高于现有电子显微镜的样品托，大大降低了更换样品的操作次数，简化了电子显微镜的操作流程，特别适用于观测数量较大的小尺寸样品的应用场景。
在本实施例的一种实施方式中，所述样品托6还包括设置于所述主体上的第一识别标识62、第二识别标识63、第三识别标识64，其中：
所述第一识别标识62与第二识别标识63设置在所述主体上表面；和/或
所述第一识别标识62与第二识别标识63上表面设有一条或多条定位刻线或凸起条纹；和/或
所述第一识别标识62与第二识别标识63结合用于构建样品托6定位坐标系；和/或
所述第三识别标识64用于指示样品托的放置方向。
在本实施方式中，所述第一识别标识62与第二识别标识63，标识表面刻有精度为纳米级别的定位刻线或凸起条纹。通过对整个样品托6进行光学拍照的方式，记录样品托6的整幅图像每个像素之间的位置关系，并使用第一识别标记与第二识别标记在图像中的像素位置确定整幅图像的直角坐标系，进而确定图像中所有的像素在坐标系中的位置；通过对定位刻线或凸起条纹在图像中像素的位置关系，确定图像与实际物品的大小比例，进行精确定位及样品测量。所述第三识别标识64指示初始样品承载位61的位置，可以通过第三识别标识64识别样品托6的当前放置方向。所述第一识别标识62与第二识别标识63可以由硅片或金属片制成。
在本实施例的一种实施方式中，所述样品托6还包括设置于所述主体上的温度控制结构，所述温度控制结构包括以下中的任意一种或多种：管路、暗槽、电阻浆料图案。所述管路或暗槽内灌注冷媒或热液，通过冷媒或热液的流动对样品托6的温度进行控制；所述电阻浆料喷涂在所述主体上形成固定形状，电阻浆料通电对所述样品托6进行加热，控制样品托6的温度，进而可以对某些具有特殊保存要求的样品进行更好的观测。
在本实施例的一种实施方式中，所述管路包括沿以所述主体的几何中心为圆心的圆形设置的环形管路；
所述暗槽包括沿以所述主体的几何中心为圆心的圆形设置的环形暗槽；
所述电阻浆料图案为沿以所述主体的几何中心为圆心的圆形设置的环形，并且包括从所述主体表面开始依次层叠设置的第一绝缘层、电阻浆料图案、第二绝缘层。将所述管路、暗槽及电阻材料图案以所述主体的几何中心为圆心的圆形设置，热量可以通过所述主体进行传导，将整个所述主体进行均匀的温度控制。所述电阻浆料为金属材料，因此需要对其进行绝缘处理，即使用绝缘层将电阻浆料图案包裹起来。
在本实施例的一种实施方式中，所述样品台中所述第一方向、所述第二方向和所述第三方向彼此的夹角在60°至120°之间；或者所述第一方 向、所述第二方向和所述第三方向彼此正交。
以上所述的具体实施例，对本发明的目的、技术方案和有益效果进行了进一步详细说明，所应理解的是，以上所述仅为本发明的具体实施例而已，并不用于限制本发明，凡在本发明的精神和原则之内，所做的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。

Claims (21)

  1. 一种显微镜的样品台，其特征在于，包括：
    底座；
    设置于底座上的三维运动机构，所述三维运动机构能够沿着第一方向、第二方向、以及第三方向运动；
    设置在三维运动机构上的并能绕与所述第三方向平行的轴旋转的支撑结构；
    设置于所述支撑结构上的样品托放置部；
    所述支撑结构包括锁定机构，通过所述锁定机构以固定样品托。
  2. 根据权利要求1所述的样品台，其特征在于，所述支撑结构包括：
    设置于所述三维运动机构上并能绕与所述第三方向平行的轴旋转的第四支撑结构。
  3. 根据权利要求1-2任一项权利要求所述的样品台，其特征在于：所述锁定机构包括至少两个爪头和分别与所述爪头连接的复位部件。
  4. 根据权利要求3所述的样品台，其特征在于：所述支撑结构包括第五驱动机构，所述第五驱动机构用于驱动锁定结构的锁定或解锁。
  5. 根据权利要求4所述的样品台，其特征在于：所述第五驱动机构包括传动部件、转向部件、动力部件，所述传动部件的一端在锁定状态下与所述爪头接触并驱动所述爪头沿所述支撑结构的截面中心向外移动，在解锁状态下脱离爪头，传动部件的另一端与转向部件连接，转向部件一端与传动部件连接，另一端连接动力部件。
  6. 根据权利要求1-5任一项权利要求所述的样品台，其特征在于，所述三维运动机构包括第一运动机构和第二运动机构，所述第一运动机构能够驱动所述支撑结构沿着第一方向和第二方向运动，所述第二运动机构能够驱动所述支撑结构沿着第三方向运动。
  7. 根据权利要求1-6任一项权利要求所述的样品台，其特征在于，所述三维运动机构包括：
    设置于所述底座上且能够相对于所述底座在第一方向上移动的第一支撑结构；
    设置于所述第一支撑结构上且能够相对于所述第一支撑结构在第二 方向上移动的第二支撑结构；
    设置于所述第二支撑结构上且能够相对于所述第二支撑结构在第三方向上移动的第三支撑结构。
  8. 根据权利要求7所述的样品台，其特征在于：
    所述底座的上表面具有向内凹陷的形状，并且包括在所述凹陷的两个相对侧壁上沿所述第一方向设置的第一导轨，所述第一支撑结构的下表面具有与所述第一导轨相配合的第一滑动部件。
  9. 根据权利要求8所述的样品台，其特征在于：
    所述底座的一侧壁设置有第一驱动机构，用于驱动所述第一支撑结构移动；和/或
    所述底座的另一侧壁设置有第一光栅尺，第一支撑结构对应位置的下表面设置有光栅尺读数头，用于测量底座与第一支撑结构的相对位移。
  10. 根据权利要求7所述的样品台，其特征在于：
    所述第一支撑结构的上表面具有向内凹陷的形状，并且包括在所述凹陷的两个相对侧壁上沿所述第二方向设置的第二导轨，所述第二支撑结构的下表面具有与所述第二导轨相配合的第二滑动部件。
  11. 根据权利要求10所述的样品台，其特征在于：
    所述第一支撑结构上表面的中间凹陷内设置有第二驱动机构，用于驱动所述第二支撑结构移动；和/或
    所述第一支撑结构的另一侧壁设置有第一光栅尺，第二支撑结构对应位置的下表面设置有光栅尺读数头，用于测量第一支撑结构与第二支撑结构的相对位移。
  12. 根据权利要求7所述的样品台，其特征在于：
    所述第三支撑结构通过固定到所述第二支撑结构的固定部可移动地连接到所述第二支撑结构。
  13. 根据权利要求12所述的样品台，其特征在于：
    所述固定部与安装所述第三支撑结构的表面相对的另一表面设置有第三驱动机构，用于驱动所述第三支撑结构移动。
  14. 根据权利要求13所述的样品台，其特征在于：
    所述第三支撑结构的上表面设置有第四驱动机构，用于驱动所述第四 支撑结构旋转。
  15. 根据权利要求4或5所述的样品台，其特征在于：所述第五驱动机构还包括传感器。
  16. 根据权利要求1-15任一项所述的样品台，其特征在于，还包括样品托，所述样品托包括：
    主体；
    沿所述主体的边缘设置的多个样品承载位。
  17. 根据权利要求16所述的样品台，其特征在于：
    所述主体为圆盘状或空心圆盘状；和/或
    所述样品承载位沿以所述主体的几何中心为圆心的圆形设置；和/或
    所述样品承载位沿所述主体的边缘等间距设置；和/或
    所述样品托包括多于十个样品承载位。
  18. 根据权利要求16所述的样品台，其特征在于，还包括设置于所述主体上的第一识别标识、第二识别标识、第三识别标识，其中：
    所述第一识别标识与第二识别标识设置在所述主体上表面；和/或
    所述第一识别标识与第二识别标识上表面设有一条或多条定位刻线或凸起条纹；和/或
    所述第一识别标识与第二识别标识结合用于构建样品托定位坐标系；和/或
    所述第三识别标识用于指示样品托的放置方向。
  19. 根据权利要求16所述的样品台，其特征在于：
    所述样品托还包括设置于所述主体上的温度控制结构，所述温度控制结构包括以下中的任意一种或多种：管路、暗槽、电阻浆料图案。
  20. 根据权利要求19所述的样品台，其特征在于：
    所述管路包括沿以所述主体的几何中心为圆心的圆形设置的环形管路；
    所述暗槽包括沿以所述主体的几何中心为圆心的圆形设置的环形暗槽；
    所述电阻浆料图案为沿以所述主体的几何中心为圆心的圆形设置的环形，并且包括从所述主体表面开始依次层叠设置的第一绝缘层、电阻浆 料涂层、第二绝缘层。
  21. 根据前述任一项所述的样品台，所述第一方向、所述第二方向和所述第三方向彼此夹角为60°至120°之间；或者
    所述第一方向、所述第二方向和所述第三方向彼此正交。
PCT/CN2020/140426 2020-12-28 2020-12-28 一种显微镜样品台 WO2022141001A1 (zh)

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CN201845126U (zh) * 2010-09-07 2011-05-25 北京全景多媒体信息系统公司 用于展示的数字光学显微镜
CN202061777U (zh) 2011-05-05 2011-12-07 北京市电加工研究所 三维精密工作台
CN105575240A (zh) 2016-03-02 2016-05-11 苏州大学 一种由呼吸引起的人体脊柱三维运动模拟装置
CN105789004A (zh) * 2016-04-20 2016-07-20 兰州大学 一种全温区热电两场扫描电镜原位物性测量台
CN107516624A (zh) * 2017-07-14 2017-12-26 聚束科技（北京）有限公司 一种样品位置校准方法和装置
CN211602993U (zh) * 2019-10-15 2020-09-29 洛阳理工学院 扫描电镜样品台
CN212180829U (zh) * 2019-10-31 2020-12-18 费勉仪器科技(南京)有限公司 一种适用于超高真空领域快速进样系统的样品停放装置

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US20030140691A1 (en) * 2002-01-30 2003-07-31 Lee Sang-Eun Apparatus for rotating a sample
CN201845126U (zh) * 2010-09-07 2011-05-25 北京全景多媒体信息系统公司 用于展示的数字光学显微镜
CN202061777U (zh) 2011-05-05 2011-12-07 北京市电加工研究所 三维精密工作台
CN105575240A (zh) 2016-03-02 2016-05-11 苏州大学 一种由呼吸引起的人体脊柱三维运动模拟装置
CN105789004A (zh) * 2016-04-20 2016-07-20 兰州大学 一种全温区热电两场扫描电镜原位物性测量台
CN107516624A (zh) * 2017-07-14 2017-12-26 聚束科技（北京）有限公司 一种样品位置校准方法和装置
CN211602993U (zh) * 2019-10-15 2020-09-29 洛阳理工学院 扫描电镜样品台
CN212180829U (zh) * 2019-10-31 2020-12-18 费勉仪器科技(南京)有限公司 一种适用于超高真空领域快速进样系统的样品停放装置

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