WO2022127426A1 - Magnetic memory and performance adjustment method therefor - Google Patents

Magnetic memory and performance adjustment method therefor Download PDF

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Publication number
WO2022127426A1
WO2022127426A1 PCT/CN2021/128922 CN2021128922W WO2022127426A1 WO 2022127426 A1 WO2022127426 A1 WO 2022127426A1 CN 2021128922 W CN2021128922 W CN 2021128922W WO 2022127426 A1 WO2022127426 A1 WO 2022127426A1
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parallel state
magnetic
voltage
switching voltage
tunnel junction
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PCT/CN2021/128922
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French (fr)
Chinese (zh)
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韩谷昌
张恺烨
杨晓蕾
刘波
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浙江驰拓科技有限公司
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Publication of WO2022127426A1 publication Critical patent/WO2022127426A1/en

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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/161Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect

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  • the present application relates to the technical field of magnetic memory, and in particular, to a magnetic memory and a method for adjusting its performance.
  • STT-MRAM Spin Transfer Torque Magnetic Random Access Memory
  • CMOS Complementary Metal-Oxide-Semiconductor, Complementary Metal-Oxide-Semiconductor
  • the integration method of STT-MRAM and CMOS circuit is to connect the magnetic tunnel junctions (MTJ) of the basic storage unit of STT-MRAM to one or more sources of one or more CMOS circuits in series, and the drain electrode is connected to the external word.
  • the reversal of MTJ is driven by current. Due to the huge difference between the resistance values of the parallel state and the anti-parallel state, and the reversal current of the two states is also different, and is affected by the current supply capability of CMOS, the reversal voltage of the two states of the MTJ is also very high. Large gap, as shown in Figure 2, in the figure, the abscissa is the voltage, and the ordinate is the resistance.
  • the CMOS voltage divider When switching from BL, the CMOS voltage divider is small, the drain voltage is low, the source is grounded, the V gate -V drain is high, the CMOS current capacity is strong, the CMOS resistance is small, and the MTJ voltage divider is more;
  • the pressure is turned over, due to the MTJ voltage division, the CMOS source-drain voltage is high, the V gate -V drian is low, the CMOS current capacity is weak, the CMOS resistance increases, and the MTJ voltage division is small.
  • the source line voltage increases to a certain level, the voltage on the MTJ will remain basically unchanged. Therefore, the voltage division of the MTJ in the two inversion states is quite different, and the writing difficulty of the MTJ is high.
  • the endurance of MTJ in one direction will be significantly lower than the other direction. , or, the endurance times from the parallel state to the anti-parallel state are significantly greater than those from the anti-parallel state to the parallel state, resulting in a low overall endurance times of the MTJ.
  • the purpose of the present application is to provide a magnetic memory and a method for adjusting its performance to optimize the performance of the magnetic memory.
  • the present application provides a method for adjusting the performance of a magnetic memory, including:
  • the parallel state switching voltage or the anti-parallel state switching voltage is adjusted to adjust the performance of the magnetic tunnel junction.
  • the adjusting the parallel state switching voltage or the anti-parallel state switching voltage to adjust the performance of the magnetic tunnel junction includes:
  • the parallel state inversion voltage is increased or the anti-parallel state inversion voltage is decreased, and the magnetic bias field of the magnetic tunnel junction is adjusted to the forward direction , to balance the parallel state switching voltage and the anti-parallel state switching voltage;
  • the parallel state inversion voltage is decreased or the anti-parallel state inversion voltage is increased, and the magnetic bias field is adjusted in a negative direction to balance all the the parallel state inversion voltage and the anti-parallel state inversion voltage;
  • the magnetic tunnel junction at least includes a pinned layer, a reference layer, a tunnel layer and a free layer, and the direction of the magnetic bias field is a positive direction in the same direction as the magnetic moment pointing to the reference layer.
  • the adjusting the parallel state switching voltage or the anti-parallel state switching voltage to adjust the performance of the magnetic tunnel junction includes:
  • the parallel state switching voltage is increased or the anti-parallel state switching voltage is decreased, and the magnetic field of the magnetic tunnel junction is adjusted to the positive direction. a bias field to balance the first endurance times and the second endurance times;
  • the parallel state switching voltage is decreased or the anti-parallel state switching voltage is increased, and the magnetic bias field is adjusted in a negative direction, to balance the first number of endurance times and the second number of endurance times;
  • the magnetic tunnel junction at least includes a pinned layer, a reference layer, a tunnel layer and a free layer, and the direction of the magnetic bias field is a positive direction in the same direction as the magnetic moment pointing to the reference layer.
  • the increasing the parallel state inversion voltage or reducing the anti-parallel state inversion voltage includes:
  • the increasing the parallel state inversion voltage or reducing the anti-parallel state inversion voltage includes:
  • the etching angle of the magnetic tunnel junction is reduced, wherein the thickness of the reference layer is greater than the thickness of the pinning layer.
  • the increasing the parallel state inversion voltage or reducing the anti-parallel state inversion voltage includes:
  • the first material of the first ferromagnetic repeating unit or the second material of the second ferromagnetic repeating unit is adjusted so that the saturation magnetization of the first material is smaller than the saturation magnetization of the second material.
  • the reducing the parallel state inversion voltage or increasing the anti-parallel state inversion voltage includes:
  • the reducing the parallel state inversion voltage or increasing the anti-parallel state inversion voltage includes:
  • the etching angle of the magnetic tunnel junction is increased, wherein the thickness of the reference layer is not greater than the thickness of the pinning layer.
  • the reducing the parallel state inversion voltage or increasing the anti-parallel state inversion voltage includes:
  • the first material of the first ferromagnetic repeating unit or the second material of the second ferromagnetic repeating unit is adjusted so that the saturation magnetization of the first material is greater than the saturation magnetization of the second material.
  • the thickness of the first ferromagnetic repeating unit is thinned or the thickness of the second ferromagnetic repeating unit is increased.
  • the thickness of the first ferromagnetic repeating unit is increased or the thickness of the second ferromagnetic repeating unit is thinned.
  • obtaining the parallel state switching voltage and the anti-parallel switching voltage of the magnetic tunnel junction when the magnetic tunnel junction is connected in series with the CMOS circuit includes:
  • circuit simulation is performed on a series circuit of the magnetic tunnel junction and a CMOS circuit, and electrical parameters of the magnetic tunnel junction are input to obtain the parallel state switching voltage and the antiparallel state switching voltage.
  • the reference layer is a coupling structure layer of CoxFeyBz and (CoPt)n , where n ⁇ 1 ;
  • the pinned layer is a (CoPt) m magnetic layer, where m ⁇ 1 and m >n.
  • the present application also provides a magnetic memory, which is used to implement any one of the above-mentioned methods for adjusting the performance of a magnetic memory.
  • a method for adjusting the performance of a magnetic memory includes receiving a performance adjustment instruction; acquiring the parallel state switching voltage and the anti-parallel switching voltage of the magnetic tunnel junction when the magnetic tunnel junction is connected in series with a CMOS circuit; and adjusting the parallel state switching voltage Alternatively, the antiparallel state flips the voltage to tune the performance of the magnetic tunnel junction.
  • the magnetic memory performance adjustment method in this application obtains the parallel state switching voltage and the anti-parallel state switching voltage of the magnetic tunnel junction when the magnetic tunnel junction is connected in series with the CMOS circuit after receiving the performance adjustment command.
  • the parallel state inversion voltage is adjusted, so as to adjust the performance of the magnetic memory, and optimize the writing difficulty and the number of times of erasing and writing of the magnetic memory.
  • the present application also provides a magnetic memory.
  • Fig. 1 is a circuit diagram of a magnetic tunnel junction and a CMOS circuit in series
  • FIG. 2 is a schematic diagram of the switching voltage of the parallel state and the antiparallel state of the magnetic tunnel junction
  • FIG. 3 is a flowchart of a method for adjusting the performance of a magnetic memory provided by an embodiment of the present application
  • FIG. 4 is a flowchart of another method for adjusting the performance of a magnetic memory provided by an embodiment of the present application.
  • FIG. 5 is a schematic structural diagram of a magnetic tunnel junction
  • FIG. 6 is a schematic diagram of a magnetic bias field
  • FIG. 7 is a schematic structural diagram of a magnetic tunnel junction at a small etching angle
  • FIG. 8 is a schematic diagram of the structure of the magnetic tunnel junction at a large etching angle
  • FIG. 9 is a flowchart of another method for adjusting the performance of a magnetic memory provided by an embodiment of the present application.
  • FIG. 10 is a schematic diagram of the adjustment of the magnetic bias field when the first number of times of resistance to erasing and writing is greater than the number of times of resistance to erasing and writing;
  • FIG. 11 is a schematic diagram of adjustment of the anti-parallel state inversion voltage adjustment when the first number of endurance times is greater than the second number of endurance times.
  • the CMOS voltage divider is small, the drain voltage is low, the source is grounded, the V gate -V drain is high, the CMOS current capacity is strong, and the CMOS resistance is relatively high.
  • the MTJ voltage divides more; when the SL is pressurized and turned over, due to the MTJ voltage division, the CMOS source-drain voltage is high, the V gate -V drian is low, the CMOS current capacity is weak, the CMOS resistance increases, and the MTJ voltage divider is relatively low. Small.
  • the source line voltage increases to a certain level, the voltage on the MTJ will remain basically unchanged.
  • the voltage division of the MTJ in the two inversion states is quite different, and the writing difficulty of the MTJ is high.
  • the endurance of MTJ in one direction is significantly lower than that in the other direction, resulting in a low overall endurance of MTJ.
  • FIG. 3 is a flowchart of a method for adjusting the performance of a magnetic memory provided by an embodiment of the present application, and the method includes:
  • Step S101 Receive a performance adjustment instruction.
  • Step S102 acquiring the parallel state switching voltage and the antiparallel switching voltage of the magnetic tunnel junction when the magnetic tunnel junction is connected in series with the CMOS circuit.
  • the magnetic tunnel junction at least includes a pinned layer, a reference layer, a tunnel layer and a free layer.
  • the reference layer and the pinned layer are formed by an antiferromagnetic coupling layer to form a strong antiferromagnetic coupling so that their magnetic moments are aligned antiparallel.
  • the parallel state flip voltage is the voltage required to flip the magnetic moment of the free layer from the direction parallel to the magnetic moment of the reference layer to the antiparallel direction
  • the antiparallel state flip voltage is the magnetic moment of the free layer from antiparallel to the reference layer The voltage required to flip the direction of the magnetic moment of the layer to the parallel direction.
  • obtaining the parallel state switching voltage and the anti-parallel switching voltage of the magnetic tunnel junction when the magnetic tunnel junction is connected in series with the CMOS circuit includes:
  • the magnetic tunnel junction is measured in series with the CMOS circuit testkey to obtain the parallel state inversion voltage and the antiparallel state inversion voltage.
  • circuit simulation is performed on a series circuit of the magnetic tunnel junction and a CMOS circuit, and electrical parameters of the magnetic tunnel junction are input to obtain the parallel state switching voltage and the anti-parallel state switching voltage.
  • the electrical parameters of the magnetic tunnel junction include, but are not limited to, the parallel-state switching voltage V cP to AP , the anti-parallel switching voltage V c-AP to P , the parallel-state resistance R p , the anti-parallel switching voltage when the magnetic tunnel junction is not connected to the CMOS circuit On-state resistance R ap , coercive force Hc, Hoff value.
  • the applied gate voltage V WL may be 1.6V.
  • the parallel state switching voltage of the magnetic tunnel junction is recorded as V SL-P to AP
  • the anti-parallel state switching voltage is recorded as V BL-AP to P .
  • Step S103 adjusting the parallel state switching voltage or the anti-parallel switching voltage to adjust the performance of the magnetic tunnel junction.
  • the magnetic memory performance adjustment method in the present application obtains the parallel state switching voltage and antiparallel state switching voltage of the magnetic tunnel junction when the magnetic tunnel junction is connected in series with the CMOS circuit after receiving the performance adjustment instruction.
  • the inversion voltage is adjusted, thereby adjusting the performance of the magnetic memory, and optimizing the writing difficulty and the number of times of erasing and writing of the magnetic memory.
  • FIG. 4 is a flowchart of another magnetic memory performance adjustment method provided by an embodiment of the present application, and the method includes:
  • Step S201 Receive a performance adjustment instruction.
  • Step S202 Acquire the parallel state switching voltage and the antiparallel switching voltage of the magnetic tunnel junction when the magnetic tunnel junction is connected in series with the CMOS circuit.
  • Step S203 Determine the magnitude relationship between the parallel state inversion voltage and the anti-parallel state inversion voltage.
  • Step S204 when the anti-parallel state inversion voltage is greater than the parallel state inversion voltage, increase the parallel state inversion voltage or decrease the anti-parallel state inversion voltage, and adjust the magnetic field of the magnetic tunnel junction in a forward direction. a bias field to balance the parallel state flip voltage and the antiparallel state flip voltage.
  • the magnetic tunnel junction includes a free layer 1, a reference layer 2 and a pinned layer 3.
  • the magnetization directions of the free layer 1, the reference layer 2 and the pinned layer 3 are perpendicular magnetization; the magnetic bias field is freed by the magnetic tunnel junction.
  • the synthesis of stray fields generated by other magnetic layers outside the layer is equivalent to a static magnetic field applied to the free layer. Due to the directionality of the magnetic bias field, the MTJ will be more stable in a certain state, please refer to Figure 6 .
  • the magnetic bias field will affect the electrical inversion. When the MTJ magnetic bias field is biased towards a certain state, the inversion voltage of this state will increase, and vice versa.
  • the direction of the stray field of the reference layer is the same as the direction of the magnetic moment of the reference layer, that is, the reference layer generates
  • the direction of the stray field is positive, and the Hoff value is adjusted to the positive direction, so the magnetic bias field is adjusted to the positive direction, the parallel state switching voltage V SL-P to AP becomes larger, and the anti-parallel state switching voltage V BL-AP to P becomes small, the difference between V SL-P to AP and V BL-AP to P is reduced, so that V SL-P to AP and V BL-AP to P are substantially equal in size.
  • the etching angle of the magnetic tunnel junction is reduced, wherein the thickness of the reference layer is greater than the thickness of the pinning layer.
  • the reference layer is the same as the other parameters of the pinned layer, and the thickness is a single variable.
  • the volume of the reference layer is larger than that of the pinned layer, the direction of the stray field generated by the pinned layer is negative, the direction of the stray field generated by the reference layer is positive, and the Hoff value Adjust to the positive direction, so the magnetic bias field is adjusted to the positive direction, the anti-parallel state switching voltage V BL-AP to P becomes smaller, and the parallel state switching voltage V SL-P to AP becomes larger, so as to realize V SL-P to AP It is basically the same size as V BL-AP to P.
  • the third method is to adjust the first material of the first ferromagnetic repeating unit or the second material of the second ferromagnetic repeating unit, so that the saturation magnetization of the first material is smaller than the saturation magnetization of the second material.
  • the types of the first material and the second material are not specifically limited in this application, as long as the saturation magnetization of the first material is less than that of the second material.
  • the saturation magnetization of the first material is smaller than that of the second material, so that the total magnetic moment of the pinned layer is less than
  • the Hoff value is adjusted to the positive direction, so the magnetic bias field is adjusted to the positive direction.
  • the reference layer is a coupling structure layer of Co x Fe y B z and (CoPt) n , where n ⁇ 1; the pinned layer is (CoPt) m magnetic layers, where m ⁇ 1 and m>n.
  • the ferromagnetic repeating unit is a CoPt thin film layer.
  • Step S205 when the anti-parallel state inversion voltage is smaller than the parallel state inversion voltage, reduce the parallel state inversion voltage or increase the anti-parallel state inversion voltage, and adjust the magnetic bias field in a negative direction, in order to balance the parallel state switching voltage and the anti-parallel state switching voltage; wherein, the magnetic tunnel junction at least includes a pinned layer, a reference layer, a tunnel layer and a free layer, and the direction of the magnetic bias field is directed to the The same direction of the magnetic moment of the reference layer is the positive direction.
  • Increasing the number of layers of the first ferromagnetic repeating unit in the pinned layer can increase the stray field generated by the pinned layer.
  • the direction of the stray field generated by the pinned layer is opposite to the direction of the magnetic moment of the reference layer, that is, the stray field generated by the pinned layer.
  • the direction is negative. Reducing the number of layers of the second ferromagnetic repeating unit in the reference layer can reduce the stray field generated by the reference layer.
  • the direction of the stray field of the reference layer is the same as the direction of the magnetic moment of the reference layer, that is, the The direction of the stray field is positive, the Hoff value is adjusted in the negative direction, so the magnetic bias field is adjusted in the negative direction, the parallel state switching voltage V SL-P to AP becomes smaller, and the anti-parallel state switching voltage V BL-AP to P becomes larger , the difference between V SL-P to AP and V BL-AP to P is reduced, so that V SL-P to AP and V BL-AP to P are substantially equal in size.
  • the etching angle of the magnetic tunnel junction is increased, wherein the thickness of the reference layer is not greater than the thickness of the pinning layer.
  • the third method is to adjust the first material of the first ferromagnetic repeating unit or adjust the second material of the second ferromagnetic repeating unit, so that the saturation magnetization of the first material is greater than the saturation magnetization of the second material.
  • the types of the first material and the second material are not specifically limited in this application, as long as the saturation magnetization of the first material is greater than that of the second material.
  • the saturation magnetization of the first material is greater than that of the second material, so that the total magnetic moment of the pinned layer is greater than The total magnetic moment of the reference layer, the Hoff value is adjusted to the negative direction, so the magnetic bias field is adjusted to the negative direction.
  • the reference layer is a coupling structure layer of Co x Fe y B z and (CoPt) n , where n ⁇ 1; the pinned layer is (CoPt) m magnetic layers, where m ⁇ 1 and m>n.
  • the ferromagnetic repeating unit is a CoPt thin film layer.
  • the parallel state switching voltage and the antiparallel switching voltage are adjusted to balance the parallel switching voltage and the antiparallel switching voltage, thereby reducing the difficulty of switching between the parallel and antiparallel states and reducing the magnetic memory. writing difficulty.
  • the difference between the parallel state inversion voltage and the anti-parallel state inversion voltage of the adjusted magnetic memory is less than 10%.
  • the thickness of the first ferromagnetic repeating unit is thinned or the thickness of the second ferromagnetic repeating unit is increased.
  • hours including:
  • the thickness of the first ferromagnetic repeating unit is increased or the thickness of the second ferromagnetic repeating unit is thinned.
  • the composition of the first ferromagnetic repeating unit and the second ferromagnetic repeating unit is fixed, increasing or decreasing the number of layers of the first ferromagnetic repeating unit and the second ferromagnetic repeating unit may make the adjustment of the Hoff value too large, so that continuous adjustment cannot be achieved. Therefore, the continuous adjustment of the magnetic bias field cannot be realized.
  • the step size of adjusting the Hoff value can be reduced, and the parallel state switching voltage V SL-P to AP It is closer to the anti-parallel state switching voltage V BL-AP to P.
  • the thickness adjustment needs to be within a certain range to maintain magnetic stability.
  • FIG. 9 is a flowchart of another magnetic memory performance adjustment method provided by an embodiment of the present application, and the method includes:
  • Step S301 Receive a performance adjustment instruction.
  • Step S302 Acquire the parallel state switching voltage and the antiparallel switching voltage of the magnetic tunnel junction when the magnetic tunnel junction is connected in series with the CMOS circuit.
  • Step S303 Obtain the first time of erasing and writing of the magnetic tunnel junction from the parallel state to the anti-parallel state and the second time of erasing and writing of the magnetic tunnel junction from the anti-parallel state to the parallel state.
  • Step S304 Determine the magnitude relationship between the first number of times of erasing and writing and the second number of times of erasing and writing.
  • Step S305 when the first number of endurance times is greater than the second number of endurance times, increase the parallel state inversion voltage or decrease the anti-parallel state inversion voltage, and adjust the magnetic tunnel to the positive direction
  • the magnetic bias field of the junction is used to balance the first endurance times and the second endurance times.
  • the direction of the stray field of the reference layer is the same as the direction of the magnetic moment of the reference layer, that is, the reference layer generates
  • the direction of the stray field is positive, and the Hoff value is adjusted to the positive direction, so the magnetic bias field is adjusted to the positive direction, the parallel state switching voltage V SL-P to AP becomes larger, and the anti-parallel state switching voltage V BL-AP to P becomes small, the difference between V SL-P to AP and V BL-AP to P is reduced, so that V SL-P to AP and V BL-AP to P are substantially equal in size.
  • the etching angle of the magnetic tunnel junction is reduced, wherein the thickness of the reference layer is greater than the thickness of the pinning layer.
  • the reference layer is the same as the other parameters of the pinned layer, and the thickness is a single variable.
  • the direction of the stray field generated by the pinned layer is negative, the direction of the stray field generated by the reference layer is positive, and the Hoff value Adjust to the positive direction, so the magnetic bias field is adjusted to the positive direction, the anti-parallel state switching voltage V BL-AP to P becomes smaller, and the parallel state switching voltage V SL-P to AP becomes larger, so as to realize V SL-P to AP It is basically the same size as V BL-AP to P.
  • the types of the first material and the second material are not specifically limited in this application, as long as the saturation magnetization of the first material is less than that of the second material.
  • the first material uses a material with low saturation magnetization, such as inserting a non-magnetic metal layer in CoFeB or incorporating a non-magnetic material
  • the second material uses a material with high saturation magnetization, such as CoFe alloy or (Cox Fe 1 -x ) y B 1-y , where x is between 0.2 and 0.7 and y is between 0.5 and 1.
  • the saturation magnetization of the first material is smaller than that of the second material, so that the total magnetic moment of the pinned layer is less than
  • the Hoff value is adjusted to the positive direction, so the magnetic bias field is adjusted to the positive direction.
  • the reference layer is a coupling structure layer of Co x Fe y B z and (CoPt) n , where n ⁇ 1; the pinned layer is (CoPt) m magnetic layers, where m ⁇ 1 and m>n.
  • the ferromagnetic repeating unit is a CoPt thin film layer.
  • FIG. 10 and FIG. 11 for adjustment diagrams of the magnetic bias field and the adjustment of the anti-parallel state inversion voltage, respectively.
  • Step S306 when the first number of endurance times is less than the second number of endurance times, reduce the parallel state switching voltage or increase the anti-parallel state switching voltage, and adjust the magnetic bias in a negative direction setting a field to balance the first and second endurance times; wherein, the magnetic tunnel junction at least includes a pinned layer, a reference layer, a tunnel layer and a free layer, and the magnetic bias The direction of the field is positive in the same direction as the magnetic moment pointing to the reference layer.
  • Increasing the number of layers of the first ferromagnetic repeating unit in the pinned layer can increase the stray field generated by the pinned layer.
  • the direction of the stray field generated by the pinned layer is opposite to the direction of the magnetic moment of the reference layer, that is, the stray field generated by the pinned layer.
  • the direction is negative. Reducing the number of layers of the second ferromagnetic repeating unit in the reference layer can reduce the stray field generated by the reference layer.
  • the direction of the stray field of the reference layer is the same as the direction of the magnetic moment of the reference layer, that is, the The direction of the stray field is positive, the Hoff value is adjusted in the negative direction, so the magnetic bias field is adjusted in the negative direction, the parallel state switching voltage V SL-P to AP becomes smaller, and the anti-parallel state switching voltage V BL-AP to P becomes larger , the difference between V SL-P to AP and V BL-AP to P is reduced, so that V SL-P to AP and V BL-AP to P are substantially equal in size.
  • the second is to increase the etching angle of the magnetic tunnel junction, wherein the thickness of the reference layer is not greater than the thickness of the pinning layer.
  • the types of the first material and the second material are not specifically limited in this application, as long as the saturation magnetization of the first material is greater than that of the second material.
  • the saturation magnetization of the first material is greater than that of the second material, so that the total magnetic moment of the pinned layer is greater than The total magnetic moment of the reference layer, the Hoff value is adjusted to the negative direction, so the magnetic bias field is adjusted to the negative direction.
  • the reference layer is a coupling structure layer of Co x Fe y B z and (CoPt) n , where n ⁇ 1; the pinned layer is (CoPt) m magnetic layers, where m ⁇ 1 and m>n.
  • the ferromagnetic repeating unit is a CoPt thin film layer.
  • the parallel state switching voltage and the anti-parallel state switching voltage are also adjusted. It should be pointed out that when the first and second endurance times are When the two endurance times reach a balance, the parallel state switching voltage and the anti-parallel state switching voltage are not close or equal, that is, at this time, the purpose is to balance the size of the first and second endurance times. It is not necessary to pay attention to the magnitude relationship between the parallel state inversion voltage and the antiparallel state inversion voltage. Balancing the first and second endurance times can effectively improve the overall endurance times of the magnetic memory.
  • the present application further provides a magnetic memory, which is used in the method for adjusting the performance of the magnetic memory according to any one of the above embodiments.
  • the parallel state switching voltage and the anti-parallel state switching voltage of the magnetic memory are balanced, and a power supply can be shared.
  • the writing difficulty of magnetic memory is reduced.

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Abstract

A magnetic memory and a performance adjustment method therefor. The method comprises: receiving a performance adjustment instruction (S101); acquiring a parallel-state reversal voltage and an anti-parallel-state reversal voltage of a magnetic tunnel junction when the magnetic tunnel junction is connected to a CMOS circuit in series (S102); and adjusting the parallel-state reversal voltage or the anti-parallel-state reversal voltage, so as to adjust the performance of the magnetic tunnel junction (S103). It can be seen that in the present performance adjustment method for a magnetic memory, after a performance adjustment instruction is received, a parallel-state reversal voltage and an anti-parallel-state reversal voltage of a magnetic tunnel junction when the magnetic tunnel junction is connected to a CMOS circuit in series are acquired, and the performance of the magnetic memory is adjusted by means of adjusting the parallel-state reversal voltage or the anti-parallel-state reversal voltage, such that the writing difficulty of the magnetic memory and the number of times of same resisting erasure are optimized.

Description

一种磁存储器及其性能调节方法A kind of magnetic memory and its performance adjustment method
本申请要求于2020年12月14日提交中国专利局、申请号为202011465986.1、发明名称为“一种磁存储器及其性能调节方法”的中国专利申请的优先权,其全部内容通过引用结合在本申请中。This application claims the priority of the Chinese patent application filed on December 14, 2020 with the application number 202011465986.1 and the invention titled "A magnetic memory and a method for adjusting its performance", the entire contents of which are incorporated herein by reference Applying.
技术领域technical field
本申请涉及磁存储器技术领域,特别是涉及一种磁存储器及其性能调节方法。The present application relates to the technical field of magnetic memory, and in particular, to a magnetic memory and a method for adjusting its performance.
背景技术Background technique
自旋转移力矩磁性随机存储器(Spin Transfer Torque Magnetic Random Access Memory,简称STT-MRAM)是一种新型存储器,使用时需要与CMOS(Complementary Metal-Oxide-Semiconductor,互补型金属氧化物半导体)电路进行整合。STT-MRAM与CMOS电路的整合方式为将STT-MRAM的基本存储单元磁隧道结(Magnetic Tunnel Junctions,MTJ)与一个或多个CMOS电路的一侧源极串联,漏极(drain electrode)外接字线(bite line,BL),栅极(gate electrode)接位线(word line,WL),源极(source electrode)接源线(source line,SL),如图1所示。Spin Transfer Torque Magnetic Random Access Memory (STT-MRAM) is a new type of memory that needs to be integrated with CMOS (Complementary Metal-Oxide-Semiconductor, Complementary Metal-Oxide-Semiconductor) circuits when used. . The integration method of STT-MRAM and CMOS circuit is to connect the magnetic tunnel junctions (MTJ) of the basic storage unit of STT-MRAM to one or more sources of one or more CMOS circuits in series, and the drain electrode is connected to the external word. Line (bite line, BL), gate (gate electrode) to bit line (word line, WL), source (source electrode) to source line (source line, SL), as shown in Figure 1.
MTJ的翻转由电流驱动,由于平行态和反平行态的电阻值差距巨大,且两种状态的翻转电流也有所不同,同时受到CMOS供流能力影响,所以MTJ两个态的翻转电压也存在很大差距,如图2所示,图中,横坐标为电压,纵坐标为电阻。从BL加压进行翻转时,CMOS分压小,漏极电压低,源极接地,V gate-V drain较高,CMOS通流能力较强,CMOS电阻较小,MTJ分压较多;从SL加压进行翻转时,由于MTJ分压,CMOS源漏极电压高,V gate-V drian低,CMOS通流能力弱,CMOS电阻增大,MTJ分压较小。当源线电压增加到一定程度后,继续加压MTJ上电压基本不变,所以,两种翻转状态的MTJ分压相差较大,MTJ的写入难度高。另一方面,通常情况下MTJ的耐擦写次数在某一方向上会明显低于另一方向,例如,由平行态到反平行态下的耐擦写次数明显小于由反平行态到平行态下的耐擦写次数,或者,由平行 态到反平行态下的耐擦写次数明显大于由反平行态到平行态下的耐擦写次数,导致MTJ的整体耐擦写次数低。但是,目前并无法对MTJ的这两种性能进行优化调节。 The reversal of MTJ is driven by current. Due to the huge difference between the resistance values of the parallel state and the anti-parallel state, and the reversal current of the two states is also different, and is affected by the current supply capability of CMOS, the reversal voltage of the two states of the MTJ is also very high. Large gap, as shown in Figure 2, in the figure, the abscissa is the voltage, and the ordinate is the resistance. When switching from BL, the CMOS voltage divider is small, the drain voltage is low, the source is grounded, the V gate -V drain is high, the CMOS current capacity is strong, the CMOS resistance is small, and the MTJ voltage divider is more; When the pressure is turned over, due to the MTJ voltage division, the CMOS source-drain voltage is high, the V gate -V drian is low, the CMOS current capacity is weak, the CMOS resistance increases, and the MTJ voltage division is small. When the source line voltage increases to a certain level, the voltage on the MTJ will remain basically unchanged. Therefore, the voltage division of the MTJ in the two inversion states is quite different, and the writing difficulty of the MTJ is high. On the other hand, under normal circumstances, the endurance of MTJ in one direction will be significantly lower than the other direction. , or, the endurance times from the parallel state to the anti-parallel state are significantly greater than those from the anti-parallel state to the parallel state, resulting in a low overall endurance times of the MTJ. However, it is not currently possible to optimize these two properties of the MTJ.
因此,如何解决上述技术问题应是本领域技术人员重点关注的。Therefore, how to solve the above technical problems should be the focus of those skilled in the art.
发明内容SUMMARY OF THE INVENTION
本申请的目的是提供一种磁存储器及其性能调节方法,以优化磁存储器性能。The purpose of the present application is to provide a magnetic memory and a method for adjusting its performance to optimize the performance of the magnetic memory.
为解决上述技术问题,本申请提供一种磁存储器性能调节方法,包括:In order to solve the above technical problems, the present application provides a method for adjusting the performance of a magnetic memory, including:
接收性能调节指令;Receive performance adjustment instructions;
获取磁隧道结与CMOS电路串联时所述磁隧道结的平行态翻转电压和反平行态翻转电压;acquiring the parallel state switching voltage and the antiparallel switching voltage of the magnetic tunnel junction when the magnetic tunnel junction is connected in series with the CMOS circuit;
调节平行态翻转电压或者反平行态翻转电压,以调节所述磁隧道结的性能。The parallel state switching voltage or the anti-parallel state switching voltage is adjusted to adjust the performance of the magnetic tunnel junction.
可选的,当所述性能调节指令为降低写入难度时,所述调节平行态翻转电压或者反平行态翻转电压,以调节所述磁隧道结的性能包括:Optionally, when the performance adjustment command is to reduce the difficulty of writing, the adjusting the parallel state switching voltage or the anti-parallel state switching voltage to adjust the performance of the magnetic tunnel junction includes:
确定所述平行态翻转电压和所述反平行态翻转电压的大小关系;determining the magnitude relationship between the parallel state inversion voltage and the antiparallel state inversion voltage;
当所述反平行态翻转电压大于所述平行态翻转电压时,增大所述平行态翻转电压或者减小所述反平行态翻转电压,向正向调节所述磁隧道结的磁偏置场,以平衡所述平行态翻转电压与所述反平行态翻转电压;When the anti-parallel state inversion voltage is greater than the parallel state inversion voltage, the parallel state inversion voltage is increased or the anti-parallel state inversion voltage is decreased, and the magnetic bias field of the magnetic tunnel junction is adjusted to the forward direction , to balance the parallel state switching voltage and the anti-parallel state switching voltage;
当所述反平行态翻转电压小于所述平行态翻转电压时,减小所述平行态翻转电压或者增大所述反平行态翻转电压,向负向调节所述磁偏置场,以平衡所述平行态翻转电压与所述反平行态翻转电压;When the anti-parallel state inversion voltage is smaller than the parallel state inversion voltage, the parallel state inversion voltage is decreased or the anti-parallel state inversion voltage is increased, and the magnetic bias field is adjusted in a negative direction to balance all the the parallel state inversion voltage and the anti-parallel state inversion voltage;
其中,所述磁隧道结至少包括钉扎层、参考层,隧道层及自由层,所述磁偏置场的方向以指向所述参考层的磁矩相同的方向为正方向。Wherein, the magnetic tunnel junction at least includes a pinned layer, a reference layer, a tunnel layer and a free layer, and the direction of the magnetic bias field is a positive direction in the same direction as the magnetic moment pointing to the reference layer.
可选的,当所述性能调节指令为提升耐擦写次数时,所述调节平行态翻转电压或者反平行态翻转电压,以调节所述磁隧道结的性能包括:Optionally, when the performance adjustment instruction is to increase the number of times of resistance to erasing and writing, the adjusting the parallel state switching voltage or the anti-parallel state switching voltage to adjust the performance of the magnetic tunnel junction includes:
获得所述磁隧道结由平行态到反平行态下的第一耐擦写次数以及由反平行态到平行态下的第二耐擦写次数;obtaining the first time of erasing and writing of the magnetic tunnel junction from the parallel state to the anti-parallel state and the second time of erasing and writing from the anti-parallel state to the parallel state;
确定所述第一耐擦写次数和所述第二耐擦写次数的大小关系;Determine the magnitude relationship between the first number of times of erasing and writing and the second number of times of erasing and writing;
当所述第一耐擦写次数大于所述第二耐擦写次数时,增大所述平行态翻转电压或者减小所述反平行态翻转电压,向正向调节所述磁隧道结的磁偏置场,以平衡所述第一耐擦写次数与所述第二耐擦写次数;When the first number of times of erasing and writing is greater than the number of times of resistance to erasing and writing, the parallel state switching voltage is increased or the anti-parallel state switching voltage is decreased, and the magnetic field of the magnetic tunnel junction is adjusted to the positive direction. a bias field to balance the first endurance times and the second endurance times;
当所述第一耐擦写次数小于所述第二耐擦写次数时,减小所述平行态翻转电压或者增大所述反平行态翻转电压,向负向调节所述磁偏置场,以平衡所述第一耐擦写次数与所述第二耐擦写次数;When the first number of times of erasing and writing is less than the second number of times of resistance to erasing and writing, the parallel state switching voltage is decreased or the anti-parallel state switching voltage is increased, and the magnetic bias field is adjusted in a negative direction, to balance the first number of endurance times and the second number of endurance times;
其中,所述磁隧道结至少包括钉扎层、参考层,隧道层及自由层,所述磁偏置场的方向以指向所述参考层的磁矩相同的方向为正方向。Wherein, the magnetic tunnel junction at least includes a pinned layer, a reference layer, a tunnel layer and a free layer, and the direction of the magnetic bias field is a positive direction in the same direction as the magnetic moment pointing to the reference layer.
可选的,所述增大所述平行态翻转电压或者减小所述反平行态翻转电压包括:Optionally, the increasing the parallel state inversion voltage or reducing the anti-parallel state inversion voltage includes:
减小钉扎层中第一铁磁性重复单元的层数或者增加参考层中第二铁磁性重复单元的层数。Decrease the number of layers of the first ferromagnetic repeating unit in the pinned layer or increase the number of layers of the second ferromagnetic repeating unit in the reference layer.
可选的,所述增大所述平行态翻转电压或者减小所述反平行态翻转电压包括:Optionally, the increasing the parallel state inversion voltage or reducing the anti-parallel state inversion voltage includes:
减小所述磁隧道结的刻蚀角度,其中,所述参考层的厚度大于所述钉扎层的厚度。The etching angle of the magnetic tunnel junction is reduced, wherein the thickness of the reference layer is greater than the thickness of the pinning layer.
可选的,所述增大所述平行态翻转电压或者减小所述反平行态翻转电压包括:Optionally, the increasing the parallel state inversion voltage or reducing the anti-parallel state inversion voltage includes:
调整第一铁磁性重复单元的第一材料或调整第二铁磁性重复单元的第二材料,以使所述第一材料的饱和磁化强度小于所述第二材料的饱和磁化强度。The first material of the first ferromagnetic repeating unit or the second material of the second ferromagnetic repeating unit is adjusted so that the saturation magnetization of the first material is smaller than the saturation magnetization of the second material.
可选的,所述减小所述平行态翻转电压或者增大所述反平行态翻转电压包括:Optionally, the reducing the parallel state inversion voltage or increasing the anti-parallel state inversion voltage includes:
增加钉扎层中第一铁磁性重复单元的层数或者减小参考层中第二铁磁性重复单元的层数。Increase the number of layers of the first ferromagnetic repeating unit in the pinned layer or decrease the number of layers of the second ferromagnetic repeating unit in the reference layer.
可选的,所述减小所述平行态翻转电压或者增大所述反平行态翻转电压包括:Optionally, the reducing the parallel state inversion voltage or increasing the anti-parallel state inversion voltage includes:
增加所述磁隧道结的刻蚀角度,其中,所述参考层的厚度不大于所述钉扎层的厚度。The etching angle of the magnetic tunnel junction is increased, wherein the thickness of the reference layer is not greater than the thickness of the pinning layer.
可选的,所述减小所述平行态翻转电压或者增大所述反平行态翻转电压包括:Optionally, the reducing the parallel state inversion voltage or increasing the anti-parallel state inversion voltage includes:
调整第一铁磁性重复单元的第一材料或调整第二铁磁性重复单元的第二材料,以使所述第一材料的饱和磁化强度大于所述第二材料的饱和磁化强度。The first material of the first ferromagnetic repeating unit or the second material of the second ferromagnetic repeating unit is adjusted so that the saturation magnetization of the first material is greater than the saturation magnetization of the second material.
可选的,还包括:Optionally, also include:
减薄所述第一铁磁性重复单元的厚度或者增加所述第二铁磁性重复单元的厚度。The thickness of the first ferromagnetic repeating unit is thinned or the thickness of the second ferromagnetic repeating unit is increased.
可选的,还包括:Optionally, also include:
增加所述第一铁磁性重复单元的厚度或者减薄所述第二铁磁性重复单元的厚度。The thickness of the first ferromagnetic repeating unit is increased or the thickness of the second ferromagnetic repeating unit is thinned.
可选的,所述获取磁隧道结与CMOS电路串联时所述磁隧道结的平行态翻转电压和反平行态翻转电压包括:Optionally, obtaining the parallel state switching voltage and the anti-parallel switching voltage of the magnetic tunnel junction when the magnetic tunnel junction is connected in series with the CMOS circuit includes:
测量所述磁隧道结与所述CMOS电路串联testkey,得到所述平行态翻转电压和所述反平行态翻转电压;Measuring the magnetic tunnel junction and the CMOS circuit in series testkey to obtain the parallel state switching voltage and the anti-parallel switching voltage;
或者,对所述磁隧道结与CMOS电路的串联电路进行电路仿真,并输入所述磁隧道结的电性参数,以得到所述平行态翻转电压和所述反平行态翻转电压。Alternatively, circuit simulation is performed on a series circuit of the magnetic tunnel junction and a CMOS circuit, and electrical parameters of the magnetic tunnel junction are input to obtain the parallel state switching voltage and the antiparallel state switching voltage.
可选的,所述参考层为Co xFe yB z与(CoPt) n的耦合结构层,其中n≥1;所述钉扎层为(CoPt) m磁性层,其中,m≥1且m>n。 Optionally, the reference layer is a coupling structure layer of CoxFeyBz and (CoPt)n , where n≥1 ; the pinned layer is a (CoPt) m magnetic layer, where m≥1 and m >n.
本申请还提供一种磁存储器,所述磁存储器用于实现上述任一种所述的磁存储器性能调节方法。The present application also provides a magnetic memory, which is used to implement any one of the above-mentioned methods for adjusting the performance of a magnetic memory.
本申请所提供的一种磁存储器性能调节方法,包括接收性能调节指令;获取磁隧道结与CMOS电路串联时所述磁隧道结的平行态翻转电压和反平行态翻转电压;调节平行态翻转电压或者反平行态翻转电压,以调节所述磁隧道结的性能。A method for adjusting the performance of a magnetic memory provided by the present application includes receiving a performance adjustment instruction; acquiring the parallel state switching voltage and the anti-parallel switching voltage of the magnetic tunnel junction when the magnetic tunnel junction is connected in series with a CMOS circuit; and adjusting the parallel state switching voltage Alternatively, the antiparallel state flips the voltage to tune the performance of the magnetic tunnel junction.
可见,本申请中的磁存储器性能调节方法在接收到性能调节指令后,获取磁隧道结与CMOS电路串联时磁隧道结平行态翻转电压和反平行态翻转电压,通过对平行态翻转电压或者反平行态翻转电压进行调节,从而对磁存储器的性能进行调节,优化磁存储器的写入难度、耐擦写次数。It can be seen that the magnetic memory performance adjustment method in this application obtains the parallel state switching voltage and the anti-parallel state switching voltage of the magnetic tunnel junction when the magnetic tunnel junction is connected in series with the CMOS circuit after receiving the performance adjustment command. The parallel state inversion voltage is adjusted, so as to adjust the performance of the magnetic memory, and optimize the writing difficulty and the number of times of erasing and writing of the magnetic memory.
此外,本申请还提供一种磁存储器。In addition, the present application also provides a magnetic memory.
附图说明Description of drawings
为了更清楚的说明本申请实施例或现有技术的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单的介绍,显而易见地,下面描述中的附图仅仅是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to illustrate the technical solutions of the embodiments of the present application or the prior art more clearly, the following briefly introduces the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only For some embodiments of the present application, for those of ordinary skill in the art, other drawings can also be obtained according to these drawings without any creative effort.
图1为磁隧道结与CMOS电路串联的电路图;Fig. 1 is a circuit diagram of a magnetic tunnel junction and a CMOS circuit in series;
图2为磁隧道结平行态和反平行态的翻转电压示意图;FIG. 2 is a schematic diagram of the switching voltage of the parallel state and the antiparallel state of the magnetic tunnel junction;
图3为本申请实施例所提供的一种磁存储器性能调节方法的流程图;3 is a flowchart of a method for adjusting the performance of a magnetic memory provided by an embodiment of the present application;
图4为本申请实施例所提供的另一种磁存储器性能调节方法的流程图;4 is a flowchart of another method for adjusting the performance of a magnetic memory provided by an embodiment of the present application;
图5为磁隧道结的结构示意图;5 is a schematic structural diagram of a magnetic tunnel junction;
图6为磁偏置场的示意图;6 is a schematic diagram of a magnetic bias field;
图7为磁隧道结在小刻蚀角度时的结构示意图;7 is a schematic structural diagram of a magnetic tunnel junction at a small etching angle;
图8为磁隧道结在大刻蚀角度时的结构示意图FIG. 8 is a schematic diagram of the structure of the magnetic tunnel junction at a large etching angle
图9为本申请实施例所提供的另一种磁存储器性能调节方法的流程图;9 is a flowchart of another method for adjusting the performance of a magnetic memory provided by an embodiment of the present application;
图10为当第一耐擦写次数大于第二耐擦写次数时,磁偏置场的调节示意图;10 is a schematic diagram of the adjustment of the magnetic bias field when the first number of times of resistance to erasing and writing is greater than the number of times of resistance to erasing and writing;
图11为当第一耐擦写次数大于第二耐擦写次数时,反平行态翻转电压调节的调节示意图。FIG. 11 is a schematic diagram of adjustment of the anti-parallel state inversion voltage adjustment when the first number of endurance times is greater than the second number of endurance times.
具体实施方式Detailed ways
为了使本技术领域的人员更好地理解本申请方案,下面结合附图和具体实施方式对本申请作进一步的详细说明。显然,所描述的实施例仅仅是 本申请一部分实施例,而不是全部的实施例。基于本申请中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本申请保护的范围。In order to make those skilled in the art better understand the solution of the present application, the present application will be further described in detail below with reference to the accompanying drawings and specific embodiments. Obviously, the described embodiments are only a part of the embodiments of the present application, but not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.
正如背景技术部分所述,当从BL加压对MTJ进行翻转时,CMOS分压小,漏极电压低,源极接地,V gate-V drain较高,CMOS通流能力较强,CMOS电阻较小,MTJ分压较多;从SL加压进行翻转时,由于MTJ分压,CMOS源漏极电压高,V gate-V drian低,CMOS通流能力弱,CMOS电阻增大,MTJ分压较小。当源线电压增加到一定程度后,继续加压MTJ上电压基本不变,所以,两种翻转状态的MTJ分压相差较大,MTJ的写入难度高。另一方面,通常情况下MTJ的耐擦写次数在某一方向上会明显低于另一方向,导致MTJ的整体耐擦写次数低。但是,目前并无法对MTJ的这两种性能进行优化调节。 As mentioned in the Background section, when the MTJ is turned over from the BL, the CMOS voltage divider is small, the drain voltage is low, the source is grounded, the V gate -V drain is high, the CMOS current capacity is strong, and the CMOS resistance is relatively high. When the voltage is small, the MTJ voltage divides more; when the SL is pressurized and turned over, due to the MTJ voltage division, the CMOS source-drain voltage is high, the V gate -V drian is low, the CMOS current capacity is weak, the CMOS resistance increases, and the MTJ voltage divider is relatively low. Small. When the source line voltage increases to a certain level, the voltage on the MTJ will remain basically unchanged. Therefore, the voltage division of the MTJ in the two inversion states is quite different, and the writing difficulty of the MTJ is high. On the other hand, under normal circumstances, the endurance of MTJ in one direction is significantly lower than that in the other direction, resulting in a low overall endurance of MTJ. However, it is not currently possible to optimize these two properties of the MTJ.
有鉴于此,本申请提供一种磁存储器性能调节方法,请参考图3,图3为本申请实施例所提供的一种磁存储器性能调节方法的流程图,该方法包括:In view of this, the present application provides a method for adjusting the performance of a magnetic memory. Please refer to FIG. 3 , which is a flowchart of a method for adjusting the performance of a magnetic memory provided by an embodiment of the present application, and the method includes:
步骤S101:接收性能调节指令。Step S101: Receive a performance adjustment instruction.
步骤S102:获取磁隧道结与CMOS电路串联时所述磁隧道结的平行态翻转电压和反平行态翻转电压。Step S102 : acquiring the parallel state switching voltage and the antiparallel switching voltage of the magnetic tunnel junction when the magnetic tunnel junction is connected in series with the CMOS circuit.
磁隧道结至少包括钉扎层、参考层、隧道层及自由层,参考层与钉扎层由一层反铁磁耦合层形成强的反铁磁耦合使它们的磁矩成反平行排列。其中,平行态翻转电压为把自由层的磁矩从平行于参考层的磁矩方向翻转到反平行方向所需要加的电压;反平行态翻转电压为把自由层的磁矩从反平行于参考层的磁矩方向翻转到平行方向所需要加的电压。The magnetic tunnel junction at least includes a pinned layer, a reference layer, a tunnel layer and a free layer. The reference layer and the pinned layer are formed by an antiferromagnetic coupling layer to form a strong antiferromagnetic coupling so that their magnetic moments are aligned antiparallel. Among them, the parallel state flip voltage is the voltage required to flip the magnetic moment of the free layer from the direction parallel to the magnetic moment of the reference layer to the antiparallel direction; the antiparallel state flip voltage is the magnetic moment of the free layer from antiparallel to the reference layer The voltage required to flip the direction of the magnetic moment of the layer to the parallel direction.
可选的,所述获取磁隧道结与CMOS电路串联时所述磁隧道结的平行态翻转电压和反平行态翻转电压包括:Optionally, obtaining the parallel state switching voltage and the anti-parallel switching voltage of the magnetic tunnel junction when the magnetic tunnel junction is connected in series with the CMOS circuit includes:
测量所述磁隧道结与所述CMOS电路串联testkey,得到所述平行态翻转电压和所述反平行态翻转电压。The magnetic tunnel junction is measured in series with the CMOS circuit testkey to obtain the parallel state inversion voltage and the antiparallel state inversion voltage.
或者,对所述磁隧道结与CMOS电路的串联电路进行电路仿真,并输入所述磁隧道结的电性参数,以得到所述平行态翻转电压和所述反平行态 翻转电压。Alternatively, circuit simulation is performed on a series circuit of the magnetic tunnel junction and a CMOS circuit, and electrical parameters of the magnetic tunnel junction are input to obtain the parallel state switching voltage and the anti-parallel state switching voltage.
磁隧道结的电性参数包括但不限于磁隧道结未与CMOS电路连接时的平行态翻转电压V c-P to AP、反平行态翻转电压V c-AP to P、平行态电阻R p、反平行态电阻R ap、矫顽力Hc、Hoff值。 The electrical parameters of the magnetic tunnel junction include, but are not limited to, the parallel-state switching voltage V cP to AP , the anti-parallel switching voltage V c-AP to P , the parallel-state resistance R p , the anti-parallel switching voltage when the magnetic tunnel junction is not connected to the CMOS circuit On-state resistance R ap , coercive force Hc, Hoff value.
具体的,外加栅极电压V WL可以为1.6V。 Specifically, the applied gate voltage V WL may be 1.6V.
磁隧道结与CMOS电路串联时磁隧道结的平行态翻转电压记为V SL-P to  AP,反平行态翻转电压记为V BL-AP to PWhen the magnetic tunnel junction is connected in series with the CMOS circuit, the parallel state switching voltage of the magnetic tunnel junction is recorded as V SL-P to AP , and the anti-parallel state switching voltage is recorded as V BL-AP to P .
步骤S103:调节平行态翻转电压或者反平行态翻转电压,以调节所述磁隧道结的性能。Step S103 : adjusting the parallel state switching voltage or the anti-parallel switching voltage to adjust the performance of the magnetic tunnel junction.
本申请中的磁存储器性能调节方法在接收到性能调节指令后,获取磁隧道结与CMOS电路串联时磁隧道结平行态翻转电压和反平行态翻转电压,通过对平行态翻转电压或者反平行态翻转电压进行调节,从而对磁存储器的性能进行调节,优化磁存储器的写入难度、耐擦写次数。The magnetic memory performance adjustment method in the present application obtains the parallel state switching voltage and antiparallel state switching voltage of the magnetic tunnel junction when the magnetic tunnel junction is connected in series with the CMOS circuit after receiving the performance adjustment instruction. The inversion voltage is adjusted, thereby adjusting the performance of the magnetic memory, and optimizing the writing difficulty and the number of times of erasing and writing of the magnetic memory.
下面根据不同的性能调节指令对本申请中的磁存储器性能调节方法进行详细阐述。The method for adjusting the performance of the magnetic memory in the present application will be described in detail below according to different performance adjusting instructions.
第一种,当所述性能调节指令为降低写入难度时,请参考图4,图4为本申请实施例所提供的另一种磁存储器性能调节方法的流程图,该方法包括:First, when the performance adjustment instruction is to reduce the difficulty of writing, please refer to FIG. 4 , which is a flowchart of another magnetic memory performance adjustment method provided by an embodiment of the present application, and the method includes:
步骤S201:接收性能调节指令。Step S201: Receive a performance adjustment instruction.
步骤S202:获取磁隧道结与CMOS电路串联时所述磁隧道结的平行态翻转电压和反平行态翻转电压。Step S202: Acquire the parallel state switching voltage and the antiparallel switching voltage of the magnetic tunnel junction when the magnetic tunnel junction is connected in series with the CMOS circuit.
步骤S203:确定所述平行态翻转电压和所述反平行态翻转电压的大小关系。Step S203: Determine the magnitude relationship between the parallel state inversion voltage and the anti-parallel state inversion voltage.
步骤S204:当所述反平行态翻转电压大于所述平行态翻转电压时,增大所述平行态翻转电压或者减小所述反平行态翻转电压,向正向调节所述磁隧道结的磁偏置场,以平衡所述平行态翻转电压与所述反平行态翻转电压。Step S204 : when the anti-parallel state inversion voltage is greater than the parallel state inversion voltage, increase the parallel state inversion voltage or decrease the anti-parallel state inversion voltage, and adjust the magnetic field of the magnetic tunnel junction in a forward direction. a bias field to balance the parallel state flip voltage and the antiparallel state flip voltage.
如图5所示,磁隧道结包括自由层1、参考层2和钉扎层3,自由层1,参考层2和钉扎层3磁化方向为垂直磁化;磁偏置场由磁隧道结自由层外其他 磁性层产生的杂散场的综合,等效于一种外加在自由层上的静磁场,由于磁偏置场的方向性,会使MTJ在某一个状态更为稳定,请参考图6。磁偏置场会影响电翻转,当MTJ磁偏置场偏向于某一个态,此态的翻转电压会升高,反之则会降低。As shown in Figure 5, the magnetic tunnel junction includes a free layer 1, a reference layer 2 and a pinned layer 3. The magnetization directions of the free layer 1, the reference layer 2 and the pinned layer 3 are perpendicular magnetization; the magnetic bias field is freed by the magnetic tunnel junction The synthesis of stray fields generated by other magnetic layers outside the layer is equivalent to a static magnetic field applied to the free layer. Due to the directionality of the magnetic bias field, the MTJ will be more stable in a certain state, please refer to Figure 6 . The magnetic bias field will affect the electrical inversion. When the MTJ magnetic bias field is biased towards a certain state, the inversion voltage of this state will increase, and vice versa.
可选的,所述增大所述平行态翻转电压或者减小所述反平行态翻转电压有三种方式,下面分别进行介绍。Optionally, there are three ways to increase the parallel state inversion voltage or decrease the anti-parallel state inversion voltage, which will be introduced separately below.
第一种,减小钉扎层中第一铁磁性重复单元的层数或者增加参考层中第二铁磁性重复单元的层数。此时,Hoff值向正向调整,磁偏置场向正向调节。First, reduce the number of layers of the first ferromagnetic repeating unit in the pinning layer or increase the number of layers of the second ferromagnetic repeating unit in the reference layer. At this time, the Hoff value is adjusted to the positive direction, and the magnetic bias field is adjusted to the positive direction.
当反平行态翻转电压V BL-AP to P大于平行态翻转电压V SL-P to AP时,需减小磁隧道结未与CMOS电路连接时的反平行态翻转电压V c-AP to P,减小钉扎层中第一铁磁性重复单元的层数可以减小钉扎层产生的杂散场,钉扎层产生的杂散场的方向与参考层的磁矩方向相反,即钉扎层产生的杂散场方向为负向,增加参考层中第二铁磁性重复单元的层数可以增大参考层产生的杂散场,参考层的杂散场的方向与参考层的磁矩方向相同,即参考层产生的杂散场方向为正向,Hoff值向正向调整,所以磁偏置场向正向调节,平行态翻转电压V SL-P to AP变大,反平行态翻转电压V BL-AP to P变小,V SL-P to AP和V BL-AP to P两者的差值减小,以实现V SL-P to AP和V BL-AP to P大小基本相等。 When the anti-parallel state inversion voltage V BL-AP to P is greater than the parallel state inversion voltage V SL-P to AP , it is necessary to reduce the anti-parallel state inversion voltage V c-AP to P when the magnetic tunnel junction is not connected to the CMOS circuit, Reducing the number of layers of the first ferromagnetic repeating unit in the pinning layer can reduce the stray field generated by the pinning layer. The direction of the stray field generated by the pinning layer is opposite to the direction of the magnetic moment of the reference layer. The direction of the stray field is negative. Increasing the number of layers of the second ferromagnetic repeating unit in the reference layer can increase the stray field generated by the reference layer. The direction of the stray field of the reference layer is the same as the direction of the magnetic moment of the reference layer, that is, the reference layer generates The direction of the stray field is positive, and the Hoff value is adjusted to the positive direction, so the magnetic bias field is adjusted to the positive direction, the parallel state switching voltage V SL-P to AP becomes larger, and the anti-parallel state switching voltage V BL-AP to P becomes small, the difference between V SL-P to AP and V BL-AP to P is reduced, so that V SL-P to AP and V BL-AP to P are substantially equal in size.
第二种,减小所述磁隧道结的刻蚀角度,其中,所述参考层的厚度大于所述钉扎层的厚度。Second, the etching angle of the magnetic tunnel junction is reduced, wherein the thickness of the reference layer is greater than the thickness of the pinning layer.
可以理解的是,这种情况下,参考层与钉扎层其他参数指标相同,厚度为单一变量。It can be understood that in this case, the reference layer is the same as the other parameters of the pinned layer, and the thickness is a single variable.
当反平行态翻转电压V BL-AP to P大于平行态翻转电压V SL-P to AP时,在磁隧道结中参考层的厚度大于钉扎层的厚度条件下,通过减小刻蚀角度,磁隧道结的结构示意图如图7所示,可以实现参考层的体积大于钉扎层的体积,钉扎层产生的杂散场方向为负向,参考层产生的杂散场方向为正向,Hoff值向正向调整,所以磁偏置场向正向调节,反平行态翻转电压V BL-AP to P变小,平行态翻转电压V SL-P to AP变大,以实现V SL-P to AP和V BL-AP to P大小基本相等。 When the anti-parallel state switching voltage V BL-AP to P is greater than the parallel state switching voltage V SL-P to AP , under the condition that the thickness of the reference layer in the magnetic tunnel junction is greater than the thickness of the pinning layer, by reducing the etching angle, The schematic diagram of the structure of the magnetic tunnel junction is shown in Figure 7. It can realize that the volume of the reference layer is larger than that of the pinned layer, the direction of the stray field generated by the pinned layer is negative, the direction of the stray field generated by the reference layer is positive, and the Hoff value Adjust to the positive direction, so the magnetic bias field is adjusted to the positive direction, the anti-parallel state switching voltage V BL-AP to P becomes smaller, and the parallel state switching voltage V SL-P to AP becomes larger, so as to realize V SL-P to AP It is basically the same size as V BL-AP to P.
第三种,调整第一铁磁性重复单元的第一材料或调整第二铁磁性重复单元的第二材料,以使所述第一材料的饱和磁化强度小于所述第二材料的饱和磁化强度。The third method is to adjust the first material of the first ferromagnetic repeating unit or the second material of the second ferromagnetic repeating unit, so that the saturation magnetization of the first material is smaller than the saturation magnetization of the second material.
需要指出的是,本申请中对第一材料与第二材料的种类并不做具体限定,只要保证第一材料的饱和磁化强度小于第二材料的饱和磁化强度即可。It should be pointed out that the types of the first material and the second material are not specifically limited in this application, as long as the saturation magnetization of the first material is less than that of the second material.
当反平行态翻转电压V BL-AP to P大于平行态翻转电压V SL-P to AP时,第一材料的饱和磁化强度小于第二材料的饱和磁化强度,使得钉扎层的总磁矩小于参考层的总磁矩,Hoff值向正向调整,所以磁偏置场向正向调节。 When the anti-parallel state switching voltage V BL-AP to P is greater than the parallel state switching voltage V SL-P to AP , the saturation magnetization of the first material is smaller than that of the second material, so that the total magnetic moment of the pinned layer is less than For the total magnetic moment of the reference layer, the Hoff value is adjusted to the positive direction, so the magnetic bias field is adjusted to the positive direction.
可选的,对于上述第一种和第二种方式,所述参考层为Co xFe yB z与(CoPt) n的耦合结构层,其中n≥1;所述钉扎层为(CoPt) m磁性层,其中,m≥1且m>n。相应的,铁磁性重复单元为CoPt薄膜层。 Optionally, for the first and second methods above, the reference layer is a coupling structure layer of Co x Fe y B z and (CoPt) n , where n≥1; the pinned layer is (CoPt) m magnetic layers, where m≧1 and m>n. Correspondingly, the ferromagnetic repeating unit is a CoPt thin film layer.
步骤S205:当所述反平行态翻转电压小于所述平行态翻转电压时,减小所述平行态翻转电压或者增大所述反平行态翻转电压,向负向调节所述磁偏置场,以平衡所述平行态翻转电压与所述反平行态翻转电压;其中,所述磁隧道结至少包括钉扎层、参考层,隧道层及自由层,所述磁偏置场的方向以指向所述参考层的磁矩相同的方向为正方向。Step S205: when the anti-parallel state inversion voltage is smaller than the parallel state inversion voltage, reduce the parallel state inversion voltage or increase the anti-parallel state inversion voltage, and adjust the magnetic bias field in a negative direction, in order to balance the parallel state switching voltage and the anti-parallel state switching voltage; wherein, the magnetic tunnel junction at least includes a pinned layer, a reference layer, a tunnel layer and a free layer, and the direction of the magnetic bias field is directed to the The same direction of the magnetic moment of the reference layer is the positive direction.
可选的,所述减小所述平行态翻转电压或者增大所述反平行态翻转电压有三种方式,下面分别进行介绍。Optionally, there are three ways to reduce the parallel state inversion voltage or increase the anti-parallel state inversion voltage, which will be introduced separately below.
第一种,增加钉扎层中第一铁磁性重复单元的层数或者减小参考层中第二铁磁性重复单元的层数。First, increase the number of layers of the first ferromagnetic repeating unit in the pinned layer or decrease the number of layers of the second ferromagnetic repeating unit in the reference layer.
增加钉扎层中第一铁磁性重复单元的层数可以增加钉扎层产生的杂散场,钉扎层产生的杂散场的方向与参考层的磁矩方向相反,即钉扎层产生的杂散场方向为负向,减小参考层中第二铁磁性重复单元的层数可以减小参考层产生的杂散场,参考层的杂散场的方向与参考层的磁矩方向相同,即参考层产生的杂散场方向为正向,Hoff值向负向调整,所以磁偏置场向负向调节,平行态翻转电压V SL-P to AP变小,反平行态翻转电压V BL-AP to P变大,V SL-P to AP和V BL-AP to P两者的差值减小,以实现V SL-P to AP和V BL-AP to P大小基本相等。 Increasing the number of layers of the first ferromagnetic repeating unit in the pinned layer can increase the stray field generated by the pinned layer. The direction of the stray field generated by the pinned layer is opposite to the direction of the magnetic moment of the reference layer, that is, the stray field generated by the pinned layer. The direction is negative. Reducing the number of layers of the second ferromagnetic repeating unit in the reference layer can reduce the stray field generated by the reference layer. The direction of the stray field of the reference layer is the same as the direction of the magnetic moment of the reference layer, that is, the The direction of the stray field is positive, the Hoff value is adjusted in the negative direction, so the magnetic bias field is adjusted in the negative direction, the parallel state switching voltage V SL-P to AP becomes smaller, and the anti-parallel state switching voltage V BL-AP to P becomes larger , the difference between V SL-P to AP and V BL-AP to P is reduced, so that V SL-P to AP and V BL-AP to P are substantially equal in size.
第二种,增加所述磁隧道结的刻蚀角度,其中,所述参考层的厚度不 大于所述钉扎层的厚度。Second, the etching angle of the magnetic tunnel junction is increased, wherein the thickness of the reference layer is not greater than the thickness of the pinning layer.
当反平行态翻转电压V BL-AP to P小于平行态翻转电压V SL-P to AP时,在参考层的厚度不大于钉扎层的厚度条件下,增加磁隧道结的刻蚀角度,磁隧道结的结构示意图如图8所示,刻蚀角度越大,钉扎层与参考层的体积差越大,钉扎层产生的杂散场方向为负向,参考层产生的杂散场方向为正向,Hoff值向负向调整,所以磁偏置场向负向调节,反平行态翻转电压V BL-AP to P变大,平行态翻转电压V SL-P to AP变小,以实现V SL-P to AP和V BL-AP to P大小基本相等。 When the anti-parallel state switching voltage V BL-AP to P is smaller than the parallel state switching voltage V SL-P to AP , and under the condition that the thickness of the reference layer is not greater than that of the pinned layer, increasing the etching angle of the magnetic tunnel junction, the magnetic The schematic diagram of the tunnel junction structure is shown in Figure 8. The larger the etching angle, the larger the volume difference between the pinned layer and the reference layer, the direction of the stray field generated by the pinned layer is negative, and the direction of the stray field generated by the reference layer is positive The Hoff value is adjusted in the negative direction, so the magnetic bias field is adjusted in the negative direction . -P to AP and V BL-AP to P are basically equal in size.
第三种,调整第一铁磁性重复单元的第一材料或调整第二铁磁性重复单元的第二材料,以使所述第一材料的饱和磁化强度大于所述第二材料的饱和磁化强度。The third method is to adjust the first material of the first ferromagnetic repeating unit or adjust the second material of the second ferromagnetic repeating unit, so that the saturation magnetization of the first material is greater than the saturation magnetization of the second material.
需要指出的是,本申请中对第一材料与第二材料的种类并不做具体限定,只要保证第一材料的饱和磁化强度大于第二材料的饱和磁化强度即可。It should be pointed out that the types of the first material and the second material are not specifically limited in this application, as long as the saturation magnetization of the first material is greater than that of the second material.
当反平行态翻转电压V BL-AP to P小于平行态翻转电压V SL-P to AP时,第一材料的饱和磁化强度大于第二材料的饱和磁化强度,使得钉扎层的总磁矩大于参考层的总磁矩,Hoff值向负向调整,所以磁偏置场向负向调节。 When the anti-parallel state switching voltage V BL-AP to P is less than the parallel state switching voltage V SL-P to AP , the saturation magnetization of the first material is greater than that of the second material, so that the total magnetic moment of the pinned layer is greater than The total magnetic moment of the reference layer, the Hoff value is adjusted to the negative direction, so the magnetic bias field is adjusted to the negative direction.
可选的,对于上述第一种和第二种方式,所述参考层为Co xFe yB z与(CoPt) n的耦合结构层,其中n≥1;所述钉扎层为(CoPt) m磁性层,其中,m≥1且m>n。相应的,铁磁性重复单元为CoPt薄膜层。 Optionally, for the first and second methods above, the reference layer is a coupling structure layer of Co x Fe y B z and (CoPt) n , where n≥1; the pinned layer is (CoPt) m magnetic layers, where m≧1 and m>n. Correspondingly, the ferromagnetic repeating unit is a CoPt thin film layer.
本实施例中通过对平行态翻转电压与反平行态翻转电压进行调节,平衡平行态翻转电压与反平行态翻转电压,降低平行态和反平行态两种状态翻转的难易程度,降低磁存储器的写入难度。其中,调节后的磁存储器的平行态翻转电压和反平行态翻转电压之间的差值小于10%。In this embodiment, the parallel state switching voltage and the antiparallel switching voltage are adjusted to balance the parallel switching voltage and the antiparallel switching voltage, thereby reducing the difficulty of switching between the parallel and antiparallel states and reducing the magnetic memory. writing difficulty. Wherein, the difference between the parallel state inversion voltage and the anti-parallel state inversion voltage of the adjusted magnetic memory is less than 10%.
进一步地,在上述实施例的基础上,在本申请的一个实施例中,当采用减小钉扎层中第一铁磁性重复单元的层数或者增加参考层中第二铁磁性重复单元的层数这种方式进行调节时,还包括:Further, on the basis of the above embodiment, in an embodiment of the present application, when the number of layers of the first ferromagnetic repeating unit in the pinned layer is reduced or the layer of the second ferromagnetic repeating unit in the reference layer is increased, When adjusted in this way, it also includes:
减薄所述第一铁磁性重复单元的厚度或者增加所述第二铁磁性重复单元的厚度。The thickness of the first ferromagnetic repeating unit is thinned or the thickness of the second ferromagnetic repeating unit is increased.
进一步地,在上述实施例的基础上,在本申请的一个实施例中,当采用增加钉扎层中第一铁磁性重复单元的层数或者减小参考层中第二铁磁性重复单元的层数时,还包括:Further, on the basis of the above embodiment, in an embodiment of the present application, when the number of layers of the first ferromagnetic repeating unit in the pinned layer is increased or the layer of the second ferromagnetic repeating unit in the reference layer is decreased, hours, including:
增加所述第一铁磁性重复单元的厚度或者减薄所述第二铁磁性重复单元的厚度。The thickness of the first ferromagnetic repeating unit is increased or the thickness of the second ferromagnetic repeating unit is thinned.
由于第一铁磁性重复单元、第二铁磁性重复单元成分固定,增加或者减少第一铁磁性重复单元、第二铁磁性重复单元层数,使Hoff值的调整可能过大,无法实现连续调整,也就无法实现磁偏置场的连续调节,通过第一铁磁性重复单元、第二铁磁性重复单元单元的厚度调节,可以降低调节Hoff值的步长,平行态翻转电压V SL-P to AP和反平行态翻转电压V BL-AP to P两者更加接近。 Since the composition of the first ferromagnetic repeating unit and the second ferromagnetic repeating unit is fixed, increasing or decreasing the number of layers of the first ferromagnetic repeating unit and the second ferromagnetic repeating unit may make the adjustment of the Hoff value too large, so that continuous adjustment cannot be achieved. Therefore, the continuous adjustment of the magnetic bias field cannot be realized. By adjusting the thickness of the first ferromagnetic repeating unit and the second ferromagnetic repeating unit, the step size of adjusting the Hoff value can be reduced, and the parallel state switching voltage V SL-P to AP It is closer to the anti-parallel state switching voltage V BL-AP to P.
需要指出的是,在对第一铁磁性重复单元、第二铁磁性重复单元的厚度进行调节时,厚度调节需要在一定范围内以维持磁性稳定。It should be pointed out that when adjusting the thickness of the first ferromagnetic repeating unit and the second ferromagnetic repeating unit, the thickness adjustment needs to be within a certain range to maintain magnetic stability.
第二种,当所述性能调节指令为提升耐擦写次数时,请参考图9,图9为本申请实施例所提供的另一种磁存储器性能调节方法的流程图,该方法包括:Second, when the performance adjustment instruction is to increase the number of times of erasing and writing, please refer to FIG. 9 , which is a flowchart of another magnetic memory performance adjustment method provided by an embodiment of the present application, and the method includes:
步骤S301:接收性能调节指令。Step S301: Receive a performance adjustment instruction.
步骤S302:获取磁隧道结与CMOS电路串联时所述磁隧道结的平行态翻转电压和反平行态翻转电压。Step S302: Acquire the parallel state switching voltage and the antiparallel switching voltage of the magnetic tunnel junction when the magnetic tunnel junction is connected in series with the CMOS circuit.
步骤S303:获得所述磁隧道结由平行态到反平行态下的第一耐擦写次数以及由反平行态到平行态下的第二耐擦写次数。Step S303: Obtain the first time of erasing and writing of the magnetic tunnel junction from the parallel state to the anti-parallel state and the second time of erasing and writing of the magnetic tunnel junction from the anti-parallel state to the parallel state.
步骤S304:确定所述第一耐擦写次数和所述第二耐擦写次数的大小关系。Step S304: Determine the magnitude relationship between the first number of times of erasing and writing and the second number of times of erasing and writing.
步骤S305:当所述第一耐擦写次数大于所述第二耐擦写次数时,增大所述平行态翻转电压或者减小所述反平行态翻转电压,向正向调节所述磁隧道结的磁偏置场,以平衡所述第一耐擦写次数与所述第二耐擦写次数。Step S305 : when the first number of endurance times is greater than the second number of endurance times, increase the parallel state inversion voltage or decrease the anti-parallel state inversion voltage, and adjust the magnetic tunnel to the positive direction The magnetic bias field of the junction is used to balance the first endurance times and the second endurance times.
可选的,所述增大所述平行态翻转电压或者减小所述反平行态翻转电压有三种方式,下面分别进行介绍。Optionally, there are three ways to increase the parallel state inversion voltage or decrease the anti-parallel state inversion voltage, which will be introduced separately below.
第一种,减小钉扎层中第一铁磁性重复单元的层数或者增加参考层中第二铁磁性重复单元的层数。此时,Hoff值向正向调整,磁偏置场向正向调节。First, reduce the number of layers of the first ferromagnetic repeating unit in the pinning layer or increase the number of layers of the second ferromagnetic repeating unit in the reference layer. At this time, the Hoff value is adjusted to the positive direction, and the magnetic bias field is adjusted to the positive direction.
当反平行态翻转电压V BL-AP to P大于平行态翻转电压V SL-P to AP时,需减小磁隧道结未与CMOS电路连接时的反平行态翻转电压V c-AP to P,减小钉扎层中第一铁磁性重复单元的层数可以减小钉扎层产生的杂散场,钉扎层产生的杂散场的方向与参考层的磁矩方向相反,即钉扎层产生的杂散场方向为负向,增加参考层中第二铁磁性重复单元的层数可以增大参考层产生的杂散场,参考层的杂散场的方向与参考层的磁矩方向相同,即参考层产生的杂散场方向为正向,Hoff值向正向调整,所以磁偏置场向正向调节,平行态翻转电压V SL-P to AP变大,反平行态翻转电压V BL-AP to P变小,V SL-P to AP和V BL-AP to P两者的差值减小,以实现V SL-P to AP和V BL-AP to P大小基本相等。 When the anti-parallel state inversion voltage V BL-AP to P is greater than the parallel state inversion voltage V SL-P to AP , it is necessary to reduce the anti-parallel state inversion voltage V c-AP to P when the magnetic tunnel junction is not connected to the CMOS circuit, Reducing the number of layers of the first ferromagnetic repeating unit in the pinning layer can reduce the stray field generated by the pinning layer. The direction of the stray field generated by the pinning layer is opposite to the direction of the magnetic moment of the reference layer. The direction of the stray field is negative. Increasing the number of layers of the second ferromagnetic repeating unit in the reference layer can increase the stray field generated by the reference layer. The direction of the stray field of the reference layer is the same as the direction of the magnetic moment of the reference layer, that is, the reference layer generates The direction of the stray field is positive, and the Hoff value is adjusted to the positive direction, so the magnetic bias field is adjusted to the positive direction, the parallel state switching voltage V SL-P to AP becomes larger, and the anti-parallel state switching voltage V BL-AP to P becomes small, the difference between V SL-P to AP and V BL-AP to P is reduced, so that V SL-P to AP and V BL-AP to P are substantially equal in size.
第二种,减小所述磁隧道结的刻蚀角度,其中,所述参考层的厚度大于所述钉扎层的厚度。Second, the etching angle of the magnetic tunnel junction is reduced, wherein the thickness of the reference layer is greater than the thickness of the pinning layer.
可以理解的是,这种情况下,参考层与钉扎层其他参数指标相同,厚度为单一变量。It can be understood that in this case, the reference layer is the same as the other parameters of the pinned layer, and the thickness is a single variable.
当反平行态翻转电压V BL-AP to P大于平行态翻转电压V SL-P to AP时,在磁隧道结中参考层的厚度大于钉扎层的厚度条件下,通过减小刻蚀角度,磁隧道结的结构示意图如图7所示,可以实现参考层的体积大于钉扎层的体积,钉扎层产生的杂散场方向为负向,参考层产生的杂散场方向为正向,Hoff值向正向调整,所以磁偏置场向正向调节,反平行态翻转电压V BL-AP to P变小,平行态翻转电压V SL-P to AP变大,以实现V SL-P to AP和V BL-AP to P大小基本相等。 When the anti-parallel state switching voltage V BL-AP to P is greater than the parallel state switching voltage V SL-P to AP , under the condition that the thickness of the reference layer in the magnetic tunnel junction is greater than that of the pinning layer, by reducing the etching angle, The schematic diagram of the structure of the magnetic tunnel junction is shown in Figure 7. The volume of the reference layer can be larger than that of the pinned layer. The direction of the stray field generated by the pinned layer is negative, the direction of the stray field generated by the reference layer is positive, and the Hoff value Adjust to the positive direction, so the magnetic bias field is adjusted to the positive direction, the anti-parallel state switching voltage V BL-AP to P becomes smaller, and the parallel state switching voltage V SL-P to AP becomes larger, so as to realize V SL-P to AP It is basically the same size as V BL-AP to P.
第三种,调整所述第一铁磁性重复单元的第一材料或调整所述第二铁磁性重复单元的第二材料,以使所述第一材料的饱和磁化强度小于所述第二材料的饱和磁化强度。Third, adjust the first material of the first ferromagnetic repeating unit or adjust the second material of the second ferromagnetic repeating unit, so that the saturation magnetization of the first material is smaller than that of the second material Saturation magnetization.
需要指出的是,本申请中对第一材料与第二材料的种类并不做具体限定,只要保证第一材料的饱和磁化强度小于第二材料的饱和磁化强度即可。例如,当第一材料使用低饱和磁化强度的材料,如在CoFeB中插入非磁性 金属层或掺入非磁性材料时,第二材料使用高饱和磁化强度材料,如CoFe合金或(Co xFe 1-x) yB 1-y,其中x在0.2~0.7之间,y在0.5~1之间。 It should be pointed out that the types of the first material and the second material are not specifically limited in this application, as long as the saturation magnetization of the first material is less than that of the second material. For example, when the first material uses a material with low saturation magnetization, such as inserting a non-magnetic metal layer in CoFeB or incorporating a non-magnetic material, the second material uses a material with high saturation magnetization, such as CoFe alloy or (Cox Fe 1 -x ) y B 1-y , where x is between 0.2 and 0.7 and y is between 0.5 and 1.
当反平行态翻转电压V BL-AP to P大于平行态翻转电压V SL-P to AP时,第一材料的饱和磁化强度小于第二材料的饱和磁化强度,使得钉扎层的总磁矩小于参考层的总磁矩,Hoff值向正向调整,所以磁偏置场向正向调节。 When the antiparallel state switching voltage V BL-AP to P is greater than the parallel state switching voltage V SL-P to AP , the saturation magnetization of the first material is smaller than that of the second material, so that the total magnetic moment of the pinned layer is less than For the total magnetic moment of the reference layer, the Hoff value is adjusted to the positive direction, so the magnetic bias field is adjusted to the positive direction.
可选的,对于上述第一种和第二种方式,所述参考层为Co xFe yB z与(CoPt) n的耦合结构层,其中n≥1;所述钉扎层为(CoPt) m磁性层,其中,m≥1且m>n。相应的,铁磁性重复单元为CoPt薄膜层。 Optionally, for the first and second methods above, the reference layer is a coupling structure layer of Co x Fe y B z and (CoPt) n , where n≥1; the pinned layer is (CoPt) m magnetic layers, where m≧1 and m>n. Correspondingly, the ferromagnetic repeating unit is a CoPt thin film layer.
当第一耐擦写次数大于第二耐擦写次数时,磁偏置场和反平行态翻转电压调节的调节示意图请分别参考图10和图11。When the first erasing and writing endurance times are greater than the second erasing and writing endurance times, please refer to FIG. 10 and FIG. 11 for adjustment diagrams of the magnetic bias field and the adjustment of the anti-parallel state inversion voltage, respectively.
步骤S306:当所述第一耐擦写次数小于所述第二耐擦写次数时,减小所述平行态翻转电压或者增大所述反平行态翻转电压,向负向调节所述磁偏置场,以平衡所述第一耐擦写次数与所述第二耐擦写次数;其中,所述磁隧道结至少包括钉扎层、参考层,隧道层及自由层,所述磁偏置场的方向以指向所述参考层的磁矩相同的方向为正方向。Step S306 : when the first number of endurance times is less than the second number of endurance times, reduce the parallel state switching voltage or increase the anti-parallel state switching voltage, and adjust the magnetic bias in a negative direction setting a field to balance the first and second endurance times; wherein, the magnetic tunnel junction at least includes a pinned layer, a reference layer, a tunnel layer and a free layer, and the magnetic bias The direction of the field is positive in the same direction as the magnetic moment pointing to the reference layer.
可选的,所述减小所述平行态翻转电压或者增大所述反平行态翻转电压有三种方式,下面分别进行介绍。Optionally, there are three ways to reduce the parallel state inversion voltage or increase the anti-parallel state inversion voltage, which will be introduced separately below.
第一种,增加钉扎层中第一铁磁性重复单元的层数或者减小参考层中第二铁磁性重复单元的层数。First, increase the number of layers of the first ferromagnetic repeating unit in the pinned layer or decrease the number of layers of the second ferromagnetic repeating unit in the reference layer.
增加钉扎层中第一铁磁性重复单元的层数可以增加钉扎层产生的杂散场,钉扎层产生的杂散场的方向与参考层的磁矩方向相反,即钉扎层产生的杂散场方向为负向,减小参考层中第二铁磁性重复单元的层数可以减小参考层产生的杂散场,参考层的杂散场的方向与参考层的磁矩方向相同,即参考层产生的杂散场方向为正向,Hoff值向负向调整,所以磁偏置场向负向调节,平行态翻转电压V SL-P to AP变小,反平行态翻转电压V BL-AP to P变大,V SL-P to AP和V BL-AP to P两者的差值减小,以实现V SL-P to AP和V BL-AP to P大小基本相等。 Increasing the number of layers of the first ferromagnetic repeating unit in the pinned layer can increase the stray field generated by the pinned layer. The direction of the stray field generated by the pinned layer is opposite to the direction of the magnetic moment of the reference layer, that is, the stray field generated by the pinned layer. The direction is negative. Reducing the number of layers of the second ferromagnetic repeating unit in the reference layer can reduce the stray field generated by the reference layer. The direction of the stray field of the reference layer is the same as the direction of the magnetic moment of the reference layer, that is, the The direction of the stray field is positive, the Hoff value is adjusted in the negative direction, so the magnetic bias field is adjusted in the negative direction, the parallel state switching voltage V SL-P to AP becomes smaller, and the anti-parallel state switching voltage V BL-AP to P becomes larger , the difference between V SL-P to AP and V BL-AP to P is reduced, so that V SL-P to AP and V BL-AP to P are substantially equal in size.
第二种,增加所述磁隧道结的刻蚀角度,其中,所述参考层的厚度不大于所述钉扎层的厚度。The second is to increase the etching angle of the magnetic tunnel junction, wherein the thickness of the reference layer is not greater than the thickness of the pinning layer.
当反平行态翻转电压V BL-AP to P小于平行态翻转电压V SL-P to AP时,在参考层的厚度不大于钉扎层的厚度条件下,增加磁隧道结的刻蚀角度,磁隧道结的结构示意图如图8所示,刻蚀角度越大,钉扎层与参考层的体积差越大,钉扎层产生的杂散场方向为负向,参考层产生的杂散场方向为正向,Hoff值向负向调整,所以磁偏置场向负向调节,反平行态翻转电压V BL-AP to P变大,平行态翻转电压V SL-P to AP变小,以实现V SL-P to AP和V BL-AP to P大小基本相等。 When the anti-parallel state switching voltage V BL-AP to P is smaller than the parallel state switching voltage V SL-P to AP , and under the condition that the thickness of the reference layer is not greater than that of the pinned layer, increasing the etching angle of the magnetic tunnel junction, the magnetic The schematic diagram of the tunnel junction structure is shown in Figure 8. The larger the etching angle, the larger the volume difference between the pinned layer and the reference layer, the direction of the stray field generated by the pinned layer is negative, and the direction of the stray field generated by the reference layer is positive The Hoff value is adjusted in the negative direction, so the magnetic bias field is adjusted in the negative direction . -P to AP and V BL-AP to P are basically equal in size.
第三种,调整所述第一铁磁性重复单元的第一材料或调整所述第二铁磁性重复单元的第二材料,以使所述第一材料的饱和磁化强度大于所述第二材料的饱和磁化强度。Third, adjust the first material of the first ferromagnetic repeating unit or adjust the second material of the second ferromagnetic repeating unit, so that the saturation magnetization of the first material is greater than that of the second material Saturation magnetization.
需要指出的是,本申请中对第一材料与第二材料的种类并不做具体限定,只要保证第一材料的饱和磁化强度大于第二材料的饱和磁化强度即可。It should be pointed out that the types of the first material and the second material are not specifically limited in this application, as long as the saturation magnetization of the first material is greater than that of the second material.
当反平行态翻转电压V BL-AP to P小于平行态翻转电压V SL-P to AP时,第一材料的饱和磁化强度大于第二材料的饱和磁化强度,使得钉扎层的总磁矩大于参考层的总磁矩,Hoff值向负向调整,所以磁偏置场向负向调节。 When the anti-parallel state switching voltage V BL-AP to P is less than the parallel state switching voltage V SL-P to AP , the saturation magnetization of the first material is greater than that of the second material, so that the total magnetic moment of the pinned layer is greater than The total magnetic moment of the reference layer, the Hoff value is adjusted to the negative direction, so the magnetic bias field is adjusted to the negative direction.
可选的,对于上述第一种和第二种方式,所述参考层为Co xFe yB z与(CoPt) n的耦合结构层,其中n≥1;所述钉扎层为(CoPt) m磁性层,其中,m≥1且m>n。相应的,铁磁性重复单元为CoPt薄膜层。 Optionally, for the first and second methods above, the reference layer is a coupling structure layer of Co x Fe y B z and (CoPt) n , where n≥1; the pinned layer is (CoPt) m magnetic layers, where m≧1 and m>n. Correspondingly, the ferromagnetic repeating unit is a CoPt thin film layer.
本实施例中平衡第一耐擦写次数和第二耐擦写次数时,也是通过对平行态翻转电压、反平行态翻转电压进行调节,需要指出的是,当第一耐擦写次数和第二耐擦写次数达到平衡时,平行态翻转电压与反平行态翻转电压并不接近或者相等,即此时以第一耐擦写次数和第二耐擦写次数两者的大小平衡为目的,并不需要关注平行态翻转电压与反平行态翻转电压的大小关系。平衡第一耐擦写次数和第二耐擦写次数,可以有效提高磁存储器整体的耐擦写次数。In this embodiment, when balancing the first and second endurance times, the parallel state switching voltage and the anti-parallel state switching voltage are also adjusted. It should be pointed out that when the first and second endurance times are When the two endurance times reach a balance, the parallel state switching voltage and the anti-parallel state switching voltage are not close or equal, that is, at this time, the purpose is to balance the size of the first and second endurance times. It is not necessary to pay attention to the magnitude relationship between the parallel state inversion voltage and the antiparallel state inversion voltage. Balancing the first and second endurance times can effectively improve the overall endurance times of the magnetic memory.
本申请还提供一种磁存储器,所述磁存储器用于上述任一实施例所述的磁存储器性能调节方法。The present application further provides a magnetic memory, which is used in the method for adjusting the performance of the magnetic memory according to any one of the above embodiments.
当对磁存储器执行上述降低写入难度的调节后,磁存储器的平行态翻 转电压与反平行态翻转电压平衡,可以共用一个电源,平行态和反平行态两种状态翻转的难易程度低,磁存储器的写入难度降低。When the above-mentioned adjustment to reduce the difficulty of writing is performed on the magnetic memory, the parallel state switching voltage and the anti-parallel state switching voltage of the magnetic memory are balanced, and a power supply can be shared. The writing difficulty of magnetic memory is reduced.
当对磁存储器执行上述提高耐擦写次数的调节后,磁存储器的整体奶耐擦写次数提升。After the above adjustment for increasing the number of times of erasing and writing is performed on the magnetic memory, the overall number of times of resistance to erasing and writing of the magnetic memory is increased.
本说明书中各个实施例采用递进的方式描述,每个实施例重点说明的都是与其它实施例的不同之处,各个实施例之间相同或相似部分互相参见即可。对于实施例公开的装置而言,由于其与实施例公开的方法相对应,所以描述的比较简单,相关之处参见方法部分说明即可。The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments, and the same or similar parts between the various embodiments may be referred to each other. As for the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant part can be referred to the description of the method.
以上对本申请所提供的磁存储器及其翻转电压调节方法进行了详细介绍。本文中应用了具体个例对本申请的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本申请的方法及其核心思想。应当指出,对于本技术领域的普通技术人员来说,在不脱离本申请原理的前提下,还可以对本申请进行若干改进和修饰,这些改进和修饰也落入本申请权利要求的保护范围内。The magnetic memory and the method for adjusting the inversion voltage provided by the present application are described in detail above. Specific examples are used herein to illustrate the principles and implementations of the present application, and the descriptions of the above embodiments are only used to help understand the methods and core ideas of the present application. It should be pointed out that for those of ordinary skill in the art, without departing from the principles of the present application, several improvements and modifications can also be made to the present application, and these improvements and modifications also fall within the protection scope of the claims of the present application.

Claims (14)

  1. 一种磁存储器性能调节方法,其特征在于,包括:A method for adjusting the performance of a magnetic memory, comprising:
    接收性能调节指令;Receive performance adjustment instructions;
    获取磁隧道结与CMOS电路串联时所述磁隧道结的平行态翻转电压和反平行态翻转电压;acquiring the parallel state switching voltage and the antiparallel switching voltage of the magnetic tunnel junction when the magnetic tunnel junction is connected in series with the CMOS circuit;
    调节平行态翻转电压或者反平行态翻转电压,以调节所述磁隧道结的性能。The parallel state switching voltage or the anti-parallel state switching voltage is adjusted to adjust the performance of the magnetic tunnel junction.
  2. 如权利要求1所述的磁存储器性能调节方法,其特征在于,当所述性能调节指令为降低写入难度时,所述调节平行态翻转电压或者反平行态翻转电压,以调节所述磁隧道结的性能包括:The method for adjusting the performance of a magnetic memory according to claim 1, wherein when the performance adjusting command is to reduce the difficulty of writing, the parallel state switching voltage or the anti-parallel switching voltage is adjusted to adjust the magnetic tunnel. The properties of the junction include:
    确定所述平行态翻转电压和所述反平行态翻转电压的大小关系;determining the magnitude relationship between the parallel state inversion voltage and the antiparallel state inversion voltage;
    当所述反平行态翻转电压大于所述平行态翻转电压时,增大所述平行态翻转电压或者减小所述反平行态翻转电压,向正向调节所述磁隧道结的磁偏置场,以平衡所述平行态翻转电压与所述反平行态翻转电压;When the anti-parallel state inversion voltage is greater than the parallel state inversion voltage, the parallel state inversion voltage is increased or the anti-parallel state inversion voltage is decreased, and the magnetic bias field of the magnetic tunnel junction is adjusted to the forward direction , to balance the parallel state switching voltage and the anti-parallel state switching voltage;
    当所述反平行态翻转电压小于所述平行态翻转电压时,减小所述平行态翻转电压或者增大所述反平行态翻转电压,向负向调节所述磁偏置场,以平衡所述平行态翻转电压与所述反平行态翻转电压;When the anti-parallel state inversion voltage is smaller than the parallel state inversion voltage, the parallel state inversion voltage is decreased or the anti-parallel state inversion voltage is increased, and the magnetic bias field is adjusted in a negative direction to balance all the the parallel state inversion voltage and the anti-parallel state inversion voltage;
    其中,所述磁隧道结至少包括钉扎层、参考层,隧道层及自由层,所述磁偏置场的方向以指向所述参考层的磁矩相同的方向为正方向。Wherein, the magnetic tunnel junction at least includes a pinned layer, a reference layer, a tunnel layer and a free layer, and the direction of the magnetic bias field is a positive direction in the same direction as the magnetic moment pointing to the reference layer.
  3. 如权利要求1所述的磁存储器性能调节方法,其特征在于,当所述性能调节指令为提升耐擦写次数时,所述调节平行态翻转电压或者反平行态翻转电压,以调节所述磁隧道结的性能包括:The method for adjusting the performance of a magnetic memory according to claim 1, wherein when the performance adjusting command is to increase the number of times of resistance to erasing and writing, adjusting the parallel state switching voltage or the anti-parallel switching voltage to adjust the magnetic Tunnel junction capabilities include:
    获得所述磁隧道结由平行态到反平行态下的第一耐擦写次数以及由反平行态到平行态下的第二耐擦写次数;obtaining the first time of erasing and writing of the magnetic tunnel junction from the parallel state to the anti-parallel state and the second time of erasing and writing from the anti-parallel state to the parallel state;
    确定所述第一耐擦写次数和所述第二耐擦写次数的大小关系;Determine the magnitude relationship between the first number of times of erasing and writing and the second number of times of erasing and writing;
    当所述第一耐擦写次数大于所述第二耐擦写次数时,增大所述平行态翻转电压或者减小所述反平行态翻转电压,向正向调节所述磁隧道结的磁偏置场,以平衡所述第一耐擦写次数与所述第二耐擦写次数;When the first number of times of erasing and writing is greater than the second number of times of resistance to erasing and writing, the parallel state switching voltage is increased or the anti-parallel state switching voltage is decreased, and the magnetic field of the magnetic tunnel junction is adjusted to the positive direction. a bias field to balance the first endurance times and the second endurance times;
    当所述第一耐擦写次数小于所述第二耐擦写次数时,减小所述平行态翻转电压或者增大所述反平行态翻转电压,向负向调节所述磁偏置场,以平衡所述第一耐擦写次数与所述第二耐擦写次数;When the first number of endurance times is less than the second number of endurance times, the parallel state switching voltage is decreased or the anti-parallel state switching voltage is increased, and the magnetic bias field is adjusted in a negative direction, to balance the first number of endurance times and the second number of endurance times;
    其中,所述磁隧道结至少包括钉扎层、参考层,隧道层及自由层,所述磁偏置场的方向以指向所述参考层的磁矩相同的方向为正方向。Wherein, the magnetic tunnel junction at least includes a pinned layer, a reference layer, a tunnel layer and a free layer, and the direction of the magnetic bias field is a positive direction in the same direction as the magnetic moment pointing to the reference layer.
  4. 如权利要求2或3所述的磁存储器性能调节方法,其特征在于,所述增大所述平行态翻转电压或者减小所述反平行态翻转电压包括:The method for adjusting the performance of a magnetic memory according to claim 2 or 3, wherein the increasing the parallel state switching voltage or reducing the anti-parallel state switching voltage comprises:
    减小钉扎层中第一铁磁性重复单元的层数或者增加参考层中第二铁磁性重复单元的层数。Decrease the number of layers of the first ferromagnetic repeating unit in the pinned layer or increase the number of layers of the second ferromagnetic repeating unit in the reference layer.
  5. 如权利要求2或3所述的磁存储器性能调节方法,其特征在于,所述增大所述平行态翻转电压或者减小所述反平行态翻转电压包括:The method for adjusting the performance of a magnetic memory according to claim 2 or 3, wherein the increasing the parallel state switching voltage or reducing the anti-parallel state switching voltage comprises:
    减小所述磁隧道结的刻蚀角度,其中,所述参考层的厚度大于所述钉扎层的厚度。The etching angle of the magnetic tunnel junction is reduced, wherein the thickness of the reference layer is greater than the thickness of the pinning layer.
  6. 如权利要求2或3所述的磁存储器性能调节方法,其特征在于,所述增大所述平行态翻转电压或者减小所述反平行态翻转电压包括:The method for adjusting the performance of a magnetic memory according to claim 2 or 3, wherein the increasing the parallel state switching voltage or reducing the anti-parallel state switching voltage comprises:
    调整第一铁磁性重复单元的第一材料或调整第二铁磁性重复单元的第二材料,以使所述第一材料的饱和磁化强度小于所述第二材料的饱和磁化强度。The first material of the first ferromagnetic repeating unit or the second material of the second ferromagnetic repeating unit is adjusted so that the saturation magnetization of the first material is smaller than the saturation magnetization of the second material.
  7. 如权利要求2或3所述的磁存储器性能调节方法,其特征在于,所述减小所述平行态翻转电压或者增大所述反平行态翻转电压包括:The method for adjusting the performance of a magnetic memory according to claim 2 or 3, wherein the reducing the parallel state inversion voltage or increasing the anti-parallel state inversion voltage comprises:
    增加钉扎层中第一铁磁性重复单元的层数或者减小参考层中第二铁磁性重复单元的层数。Increase the number of layers of the first ferromagnetic repeating unit in the pinned layer or decrease the number of layers of the second ferromagnetic repeating unit in the reference layer.
  8. 如权利要求2或3所述的磁存储器性能调节方法,其特征在于,所述减小所述平行态翻转电压或者增大所述反平行态翻转电压包括:The method for adjusting the performance of a magnetic memory according to claim 2 or 3, wherein the reducing the parallel state inversion voltage or increasing the anti-parallel state inversion voltage comprises:
    增加所述磁隧道结的刻蚀角度,其中,所述参考层的厚度不大于所述钉扎层的厚度。The etching angle of the magnetic tunnel junction is increased, wherein the thickness of the reference layer is not greater than the thickness of the pinning layer.
  9. 如权利要求2或3所述的磁存储器性能调节方法,其特征在于,所述减小所述平行态翻转电压或者增大所述反平行态翻转电压包括:The method for adjusting the performance of a magnetic memory according to claim 2 or 3, wherein the reducing the parallel state inversion voltage or increasing the anti-parallel state inversion voltage comprises:
    调整第一铁磁性重复单元的第一材料或调整第二铁磁性重复单元的第二材料,以使所述第一材料的饱和磁化强度大于所述第二材料的饱和磁化强度。The first material of the first ferromagnetic repeating unit or the second material of the second ferromagnetic repeating unit is adjusted so that the saturation magnetization of the first material is greater than the saturation magnetization of the second material.
  10. 如权利要求4所述的磁存储器性能调节方法,其特征在于,还包括:The method for adjusting the performance of a magnetic memory according to claim 4, further comprising:
    减薄所述第一铁磁性重复单元的厚度或者增加所述第二铁磁性重复单元的厚度。The thickness of the first ferromagnetic repeating unit is thinned or the thickness of the second ferromagnetic repeating unit is increased.
  11. 如权利要求7所述的磁存储器性能调节方法,其特征在于,还包括:The method for adjusting the performance of a magnetic memory according to claim 7, further comprising:
    增加所述第一铁磁性重复单元的厚度或者减薄所述第二铁磁性重复单元的厚度。The thickness of the first ferromagnetic repeating unit is increased or the thickness of the second ferromagnetic repeating unit is thinned.
  12. 如权利要求1所述的磁存储器性能调节方法,其特征在于,所述获取磁隧道结与CMOS电路串联时所述磁隧道结的平行态翻转电压和反平行态翻转电压包括:The method for adjusting the performance of a magnetic memory according to claim 1, wherein the acquiring the parallel state switching voltage and the antiparallel switching voltage of the magnetic tunnel junction when the magnetic tunnel junction is connected in series with the CMOS circuit comprises:
    测量所述磁隧道结与所述CMOS电路串联testkey,得到所述平行态翻转电压和所述反平行态翻转电压;Measuring the magnetic tunnel junction and the CMOS circuit in series testkey to obtain the parallel state switching voltage and the anti-parallel state switching voltage;
    或者,对所述磁隧道结与CMOS电路的串联电路进行电路仿真,并输入所述磁隧道结的电性参数,以得到所述平行态翻转电压和所述反平行态翻转电压。Alternatively, circuit simulation is performed on a series circuit of the magnetic tunnel junction and a CMOS circuit, and electrical parameters of the magnetic tunnel junction are input to obtain the parallel state switching voltage and the anti-parallel state switching voltage.
  13. 如权利要求2或3所述的磁存储器性能调节方法,其特征在于,所述参考层为Co xFe yB z与(CoPt) n的耦合结构层,其中n≥1;所述钉扎层为(CoPt) m磁性层,其中,m≥1且m>n。 The method for adjusting the performance of a magnetic memory according to claim 2 or 3, wherein the reference layer is a coupling structure layer of CoxFeyBz and (CoPt)n , wherein n≥1 ; the pinned layer is a (CoPt) m magnetic layer, where m≧1 and m>n.
  14. 一种磁存储器,其特征在于,所述磁存储器用于实现如权利要求1至13任一项所述的磁存储器性能调节方法。A magnetic memory, characterized in that the magnetic memory is used to implement the method for adjusting the performance of a magnetic memory according to any one of claims 1 to 13.
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CN104282327A (en) * 2009-03-02 2015-01-14 高通股份有限公司 Reducing source loading effect in spin torque transfer magnetoresitive random access memory (stt-mram)
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