WO2022127188A1 - 一种薄膜太阳能电池真空蒸镀掩膜板卡具 - Google Patents

一种薄膜太阳能电池真空蒸镀掩膜板卡具 Download PDF

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WO2022127188A1
WO2022127188A1 PCT/CN2021/115058 CN2021115058W WO2022127188A1 WO 2022127188 A1 WO2022127188 A1 WO 2022127188A1 CN 2021115058 W CN2021115058 W CN 2021115058W WO 2022127188 A1 WO2022127188 A1 WO 2022127188A1
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Prior art keywords
baffles
film solar
vacuum evaporation
mask plate
card slot
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PCT/CN2021/115058
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English (en)
French (fr)
Inventor
熊继光
赵志国
秦校军
肖平
赵东明
邬俊波
董超
刘家梁
王百月
冯笑丹
梁思超
王森
张�杰
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中国华能集团清洁能源技术研究院有限公司
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Application filed by 中国华能集团清洁能源技术研究院有限公司 filed Critical 中国华能集团清洁能源技术研究院有限公司
Priority to DE212021000288.9U priority Critical patent/DE212021000288U1/de
Publication of WO2022127188A1 publication Critical patent/WO2022127188A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042—PV modules or arrays of single PV cells
    • H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells

Definitions

  • the utility model belongs to the technical field of mask plate clamps, in particular to a mask plate clamp for vacuum evaporation of thin-film solar cells.
  • perovskite solar cell As a new type of solar cell, perovskite solar cell is developing very rapidly, and many domestic universities and research institutes have research topics related to it. Since its discovery in 2009, the photoelectric conversion efficiency of perovskite solar cells has increased from 3.8% to more than 25% today, and its photoelectric conversion efficiency has approached or exceeded the traditional crystalline silicon, copper indium gallium selenide and cadmium telluride cells on the market. . Compared with traditional crystalline silicon cells, the advantages of perovskite solar cells are that the process is simple and the cost is greatly reduced. Perovskite solar cells are usually composed of multiple layers of material films with different functions, which can be prepared by spin coating, vacuum evaporation, magnetron sputtering and other processes.
  • metal electrodes such as gold, silver, aluminum, etc. as electrodes
  • vapor deposition method a method for coating metal electrodes (such as gold, silver, aluminum, etc. as electrodes)
  • only one thickness of electrodes can be obtained by one evaporation. It is necessary to perform multiple evaporations, which wastes time and materials.
  • the purpose of this utility model is to provide a mask plate fixture for vapor deposition coating of thin-film solar cells, which can reduce the number of times of evaporation and evaporation when electrodes of different thicknesses need to be evaporated. Plating losses to save time and cost.
  • a thin-film solar cell vacuum evaporation mask plate clamp comprising a clamp frame and several baffles connected to the clamp frame, and the adjacent two baffles are A set of support steps with the same height is provided on the opposite surface, the support steps are used to support and place the mask plate, and all the support steps provided by the plurality of baffles include at least two sets of support steps with different heights.
  • an active connection is adopted between the clamp frame and the baffle, a card slot is opened on the clamp frame, the top of the baffle is matched with the card slot to be inserted into the card slot, and the top of the baffle can be inserted into the card slot. Sliding in the slot.
  • cross-sectional shape of the card slot is an inverted trapezoid.
  • clamping frame is provided with openings, the openings are opened just above the card slots, the baffle is provided with countersinks, the countersinks correspond to the openings, and the fixing pins pass through the openings. Connect with counterbore.
  • baffles there are three baffles in total, and the intervals between the three baffles are the same.
  • two sets of support steps are arranged between the three baffles, and the heights of the two support steps are different.
  • Another object of the present utility model is to provide a method for making a film solar cell vacuum evaporation mask plate fixture, comprising the following steps:
  • the top of the baffle corresponds to the card slot made in step 1), and the top of the baffle is provided with a countersink, and the countersink corresponds to the top opening of the card slot;
  • the card slot is opened on the bottom surface of the jig frame.
  • the clamp frame is provided with a plurality of clamping slots, and a plurality of baffles divide the clamp frame into a plurality of positions for the mask plate to be placed. There is a height difference between the mask placement positions between the baffles. Due to the difference in the distance between the evaporation source and the different mask placement positions, the deposition speed of the electrodes during evaporation is different, and a single evaporation can be obtained.
  • the utility model can also control the thickness of the evaporation electrode by selecting baffles with different mask plate placement positions and adjusting the evaporation speed, so as to achieve the purpose of obtaining electrodes with various thicknesses by one evaporation, and save the experiment time and cost.
  • the beneficial effect of the present invention is that the mask plate fixture is designed by using discrete components and assembled and combined, and when electrodes of different thicknesses need to be obtained, the mask plate with different placement positions is selected according to actual needs.
  • the thickness of the evaporation electrode is controlled by the baffle plate and the adjustment of the evaporation speed, so as to achieve the purpose of obtaining electrodes of various thicknesses by one evaporation, and save the experiment time and cost.
  • the evaporation source should preferably be located directly below the fixture frame, otherwise the baffle in the middle may block the high placement position and affect the thickness of the electrode.
  • FIG. 1 is an exemplary schematic diagram of a fixture frame 1 according to the present invention.
  • FIG. 2 is a schematic diagram of the utility model and the baffle.
  • FIG. 3 is a schematic diagram showing an example of the combination of the mask jig for the vapor deposition coating of the thin film solar cell according to the present invention.
  • 11 is a clamp frame
  • 12 is a clamping slot
  • 13 is an opening at the end of the clamping slot
  • 21, 22, and 23 are baffles
  • 21 is a first baffle
  • 22 is a second baffle
  • 23 is a third baffle
  • 24 is a countersunk hole
  • 31 is a fixing pin.
  • a film solar cell vacuum evaporation mask plate clamp of the present invention includes a clamp frame 11 and several baffles connected to the clamp frame 11 .
  • adjacent A set of support steps with the same height is provided on the opposite surfaces of the two baffles, the support steps are used to support and place the mask plate, and all the support steps provided by the plurality of baffles include at least two sets of support steps with different heights; the The clamping frame 11 is provided with an opening 13, the opening 13 is opened directly above the card slot 12, the baffle is provided with a countersink, the countersink corresponds to the opening 13, and the fixing pin 31 passes through the opening.
  • the hole 13 is connected to the counterbore.
  • the clamp frame 11 and the baffle are movably connected, the clamp frame 11 is provided with a card slot 12 , and the top of the baffle cooperates with the card slot 12 to be inserted into the card slot 12 , and the top of the baffle can slide in the card slot 12.
  • the cross-sectional shape of the card slot 12 is an inverted trapezoid.
  • FIG. 2 there are three baffles in total, and the intervals between the three baffles are the same, and two sets of supports are arranged between the three baffles steps, and the two support steps have different heights.
  • the manufacturing method of the present utility model comprises the following steps:
  • the clamp frame 11 is provided with a card slot 12, and the card slot 12 is opened on the bottom surface of the clamp frame 11;
  • the top of the baffle corresponds to the card slot 12 made in step 1), and the top of the baffle is provided with a counterbore 24, and the counterbore 24 corresponds to the top opening 13 of the card slot 12;
  • the clamp frame is provided with a plurality of clamping slots, and a plurality of baffles divide the clamp frame into a plurality of positions for the mask plate to be placed. There is a height difference between the mask placement positions between the baffles. Due to the difference in the distance between the evaporation source and the different mask placement positions, the deposition speed of the electrodes during evaporation is different, and a single evaporation can be obtained.
  • the utility model can also control the thickness of the evaporation electrode by selecting baffles with different mask plate placement positions and adjusting the evaporation speed, so as to achieve the purpose of obtaining electrodes with various thicknesses by one evaporation, and save the experiment time and cost.
  • the utility model adopts discrete components to design mask plate clamps by assembling and combining.
  • baffle plates with different mask plate placement positions are selected and the evaporation speed is adjusted to control the evaporation electrodes.
  • the thickness of the electrode can be achieved by one-time evaporation to obtain electrodes of various thicknesses, and the experiment time and cost can be saved.
  • the evaporation source is located directly below the jig frame, which can effectively prevent the baffle plate in the middle from being placed in a high position and affecting the thickness of the electrode.

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  • Condensed Matter Physics & Semiconductors (AREA)
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  • Life Sciences & Earth Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
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Abstract

一种薄膜太阳能电池真空蒸镀掩膜板卡具，其特征在于，包括卡具骨架(11)和连接在卡具骨架(11)上的若干挡板(21，22，23)，相邻两挡板的相对面上设置有高度相同的一套支撑台阶，支撑台阶用于支撑放置掩膜板，若干挡板(21，22，23)提供的所有支撑台阶中至少包含两套高度不同的支撑台阶。

Description

一种薄膜太阳能电池真空蒸镀掩膜板卡具 技术领域
本实用新型属于掩膜板卡具技术领域，具体涉及一种薄膜太阳能电池真空蒸镀掩膜板卡具。
背景技术
钙钛矿太阳能电池作为一种新型太阳能电池发展非常迅速，目前国内很多高校和研究所都有与之相关的研究课题。钙钛矿太阳能电池自从2009年发现以来其光电转换效率已从3.8％提升到如今的25％以上，其光电转换效率已接近或超过市面上传统晶硅、铜铟镓硒以和碲化镉电池。与传统晶硅电池相比，钙钛矿太阳能电池的优势在于工艺简单，且成本大幅降低。钙钛矿太阳能电池通常由多层不同功能的材料薄膜组成，薄膜的制备可采用旋涂、真空蒸镀、磁控溅射等工艺进行制备。但就现有技术而言，金属电极(例如作为电极的金、银、铝等)采用气相沉积法镀膜，一次蒸镀只能得到一种厚度的电极，如果需要不同厚度的电极进行对比试验，就要进行多次蒸镀，浪费时间和材料。
实用新型内容
本为解决现有技术中存在的上述问题，本实用新型的目的在于提供一种薄膜太阳能电池气相沉积镀膜的掩膜板卡具，可以在需要蒸镀不同厚度电极时，减少蒸镀次数和蒸镀损耗，以节省时间和成本。
为达上述目的，本实用新型的具体技术方案是：一种薄膜太阳能电池真空蒸镀掩膜板卡具，包括卡具骨架和连接在卡具骨架上的若干挡板，相邻两挡板的相对面上设置有高度相同的一套支撑台阶，所述支撑台阶用于支撑放置掩膜板，若干挡板提供的所有支撑台阶中至少包含两套高度不同的支撑台阶。
进一步的，所述卡具骨架与挡板之间采用活动连接，所述卡具骨架上开设有卡槽，挡板顶部与卡槽配合用于卡入卡槽内，且挡板顶部可在卡槽内滑动。
进一步的，所述卡槽的截面形状为倒梯形。
进一步的，所述卡具骨架上开设有开孔，所述开孔开设在卡槽正上方，所述挡板上开设有沉孔，所述沉孔与开孔对应，固定销穿过开孔与沉孔连接。
进一步的，所述挡板共设置有三个，且三个挡板之间间隔相同。
进一步的，所述三个挡板之间设置有两套支撑台阶，且两个支撑台阶高度不同。
本实用新型的另一目的是提供一种薄膜太阳能电池真空蒸镀掩膜板卡具的制作方法，包括以下步骤：
1)制作卡具骨架，卡具骨架上带有卡槽；
2)在步骤1)制作的卡具骨架上的卡槽两端顶部开孔；
3)制作挡板，所述挡板的顶部与步骤1)制作的卡槽对应，且挡板的顶部开设有沉孔，沉孔和卡槽顶部开孔对应；
4)制作与开孔与沉孔尺寸对应的固定销；
5)将卡具骨架、若干挡板和固定销组合在一起，得到薄膜太阳能电池掩膜板卡具。
进一步的，所述卡槽开设在卡具骨架的底面上。
本实用新型的薄膜太阳能电池真空蒸镀掩膜板卡具，根据不同需求，卡具骨架设有若干卡槽，若干挡板将卡具骨架分隔成若干供掩膜板放置的位置，挡板与挡板之间的掩膜板放置位存在高度差，由于蒸发源与不同的掩膜板放置位之间存在距离差异，蒸镀时电极的沉积速度不同，一次蒸镀可以得到不同厚度电极的电池；当然，本实用新型还可以通过选用掩膜板放置位不同的挡板和调节蒸镀速度来控制蒸镀电极的厚度，达到一次蒸镀得到多种厚度电极的目的，节约实验时间和成本。
与现有技术相比，本实用新型的有益效果在于，采用离散构件，拼装组合的方式设计掩膜板卡具，在需要得到不同厚度电极时，根据实际需求，选用掩膜板放置位不同的挡板和调节蒸镀速度来控制蒸镀电极的厚度，达到一次蒸镀得到多种厚度电极的目的，节约实验时间和成本。
蒸发源最好位于卡具骨架正下方，否则处在中间的挡板可能对处于高位的放置位形成一定的遮挡，影响电极厚度。
附图说明
图1为本实用新型所述的卡具骨架1的一种范例示意图。
图2为本实用新型所述的与挡板示意图。
图3为本实用新型所述的薄膜太阳能电池气相沉积镀膜的掩膜板卡具的组合范例示意图。
附图中，11为卡具骨架，12卡槽，13为卡槽端部开孔；21，22，23为挡板，21为第一挡板，22为第二挡板，23为第三挡板，24为沉孔，31为固定销。
具体实施方式
下面结合附图和具体实施方式对本实用新型做进一步说明。
如图1所示，本实用新型的一种薄膜太阳能电池真空蒸镀掩膜板卡具，包括卡具骨架11和连接在卡具骨架11上的若干挡板，如图2所示，相邻两挡板的相对面上设置有高度相同的一套支撑台阶，所述支撑台阶用于支撑放置掩膜板，若干挡板提供的所有支撑台阶中至少包含两套高度不同的支撑台阶；所述卡具骨架11上开设有开孔13，所述开孔13开设在卡槽12正上方，所述挡板上开设有沉孔，所述沉孔与开孔13对应，固定销31穿过开孔13与沉孔连接。
如图3所示，所述卡具骨架11与挡板之间采用活动连接，所述卡具骨架11上开设有卡槽12，挡板顶部与卡槽12配合用于卡入卡槽12内，且挡板顶部可在卡槽12内滑动，在本实用新型的某一优选实施例中，所述卡槽12的截面形状为倒梯形。
在本实用新型的某一具体实施例中，如图2所示，所述挡板共设置有三个，且三个挡板之间间隔相同，所述三个挡板之间设置有两套支撑台阶，且两个支撑台阶高度不同。
本实用新型的制作方法，包括以下步骤：
1)制作卡具骨架11，卡具骨架11上带有卡槽12，所述卡槽12开设在卡具骨架11的底面上；
2)在步骤1)制作的卡具骨架11上的卡槽12两端顶部开孔；
3)制作挡板，所述挡板的顶部与步骤1)制作的卡槽12对应，且挡板的顶部开设有沉孔24，沉孔24和卡槽12顶部开孔13对应；
4)制作与开孔与沉孔尺寸对应的固定销31；
5)将卡具骨架11、若干挡板和固定销31组合在一起，得到薄膜太阳能电池掩膜板卡具。
本实用新型的薄膜太阳能电池真空蒸镀掩膜板卡具，根据不同需求，卡具骨架设有若干卡槽，若干挡板将卡具骨架分隔成若干供掩膜板放置的位置，挡板与挡板之间的掩膜板放置位存在高度差，由于蒸发源与不同的掩膜板放置位之间存在距离差异，蒸镀时电极的沉积速度不同，一次蒸镀可以得到不同厚度电极的电池；当然，本实用新型还可以通过选用掩膜板放置位不同的挡板和调节蒸镀速度来控制蒸镀电极的厚度，达到一次蒸镀得到多种厚度电极的目的，节约实验时间和成本。本实用新型采用离散构件，拼装组合的方式设计掩膜板卡具，在需要得到不同厚度电极时，根据实际需求，选用掩膜板放置位不同的挡板和调节蒸镀速度来控制蒸镀电极的厚度，达到一次蒸镀得到多种厚度电极的目的，节约实验时间和成本。
在优选实施例中，蒸发源位于卡具骨架正下方，能够有效避免处在中间的挡板可能对处于高位的放置，影响电极厚度。

Claims (6)

  1. 一种薄膜太阳能电池真空蒸镀掩膜板卡具，其特征在于，包括卡具骨架(11)和连接在卡具骨架(11)上的若干挡板，相邻两挡板的相对面上设置有高度相同的一套支撑台阶，所述支撑台阶用于支撑放置掩膜板，若干挡板提供的所有支撑台阶中至少包含两套高度不同的支撑台阶。
  2. 根据权利要求1所述的一种薄膜太阳能电池真空蒸镀掩膜板卡具，其特征在于，所述卡具骨架(11)与挡板之间采用活动连接，所述卡具骨架(11)上开设有卡槽(12)，挡板顶部与卡槽(12)配合用于卡入卡槽(12)内，且挡板顶部可在卡槽(12)内滑动。
  3. 根据权利要求2所述的一种薄膜太阳能电池真空蒸镀掩膜板卡具，其特征在于，所述卡槽(12)的截面形状为倒梯形。
  4. 根据权利要求1所述的一种薄膜太阳能电池真空蒸镀掩膜板卡具，其特征在于，所述卡具骨架(11)上开设有开孔(13)，所述开孔(13)开设在卡槽(12)正上方，所述挡板上开设有沉孔，所述沉孔与开孔(13)对应，固定销(31)穿过开孔(13)与沉孔连接。
  5. 根据权利要求1所述的一种薄膜太阳能电池真空蒸镀掩膜板卡具，其特征在于，所述挡板共设置有三个，且三个挡板之间间隔相同。
  6. 根据权利要求5所述的一种薄膜太阳能电池真空蒸镀掩膜板卡具，其特征在于，所述三个挡板之间设置有两套支撑台阶，且两个支撑台阶高度不同。
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CN213977855U (zh) * 2020-12-15 2021-08-17 华能新能源股份有限公司 一种薄膜太阳能电池真空蒸镀掩膜板卡具

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