WO2022121116A1 - Optical tweezer and spin defect-based multi-physical parameter sensing device and method - Google Patents

Optical tweezer and spin defect-based multi-physical parameter sensing device and method Download PDF

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WO2022121116A1
WO2022121116A1 PCT/CN2021/077311 CN2021077311W WO2022121116A1 WO 2022121116 A1 WO2022121116 A1 WO 2022121116A1 CN 2021077311 W CN2021077311 W CN 2021077311W WO 2022121116 A1 WO2022121116 A1 WO 2022121116A1
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laser
photodetector
diamond particles
optical
fluorescence
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French (fr)
Chinese (zh)
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李翠红
刘承
陈志明
蒋静
李楠
胡慧珠
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之江实验室
浙江大学
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/032—Measuring direction or magnitude of magnetic fields or magnetic flux using magneto-optic devices, e.g. Faraday or Cotton-Mouton effect
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/20—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using thermoluminescent materials

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  • the invention relates to the field of sensing, navigation and mapping, and in particular to a device and method for sensing multiple physical parameters based on optical tweezers and spin defects.
  • sensing equipment including gyroscopes, gravimeters, magnetometers and temperature detectors.
  • gyroscopes Gravimeters, magnetometers and temperature detectors.
  • gravity sensing equipment and angular velocity sensor gyroscope for attitude control and navigation are necessary for navigation; the measurement of temperature and magnetic field are important parameters in the field of aerial surveying, which are important for ensuring the normal flight of spacecraft and studying the space environment. value.
  • the detection of various physical quantities is realized by carrying a plurality of single-function sensors in the navigation cabin.
  • Using this solution requires many sensors, the corresponding volume is large, and the energy consumption is high; secondly, the physical parameters measured by using multiple sensors come from different spatial locations, and it is difficult to analyze multiple physical quantities in the same spatial location.
  • the present invention proposes a device and method for multi-physical parameter sensing based on optical tweezers and spin defects.
  • the specific technical solutions are as follows:
  • a device for multi-physical parameter sensing based on optical tweezers and spin defects includes a first laser, a second laser, a first optical modulator, a second optical modulator, a beam splitter, a beam combiner, and an objective lens , lens, first photodetector, second photodetector, microwave source, microwave modulator, microwave antenna, dichroic film, fluorescence detector, control display system;
  • the first laser emits and captures laser light, passes through the first optical modulator, and then enters the beam splitter to separate the first beam and the second beam; the first beam enters the second photodetector, which is connected to the second photodetector. Control display system connection;
  • the second laser emits an optical signal for exciting diamond spin defects, and after passing through the second optical modulator and the dichroic plate in sequence, it enters the objective lens together with the second beam through the beam combiner, and the light from the first laser enters the objective. After the signal is converged by the objective lens, an optical trap that captures the diamond particles of micro-nano scale is formed, that is, optical tweezers are formed.
  • a detector, the first photodetector is connected to the control and display system;
  • the laser light generated by the second laser is collected by the objective lens to form an optical signal for excitation of spin defects of diamond particles in micro-nano scale, and the fluorescence generated by irradiating the defects of the diamond particles is collected by the objective lens, and is reflected by the beam combiner in the same way. , and then separated from the original optical path by the two-color film, and collected by the fluorescence detector;
  • the microwave signal generated by the microwave source is transmitted to the microwave antenna through the microwave modulator, which is used for the quantum state manipulation of the spin defect of the diamond particles of micro-nano scale;
  • the multi-physical parameter sensing device is used in a vacuum environment, or a vacuum cavity is set in the light trap area formed by the objective lens;
  • the control display system is used for the output of each signal source in the whole device and the collection and processing of photoelectric signals, so as to obtain various physical parameters.
  • the device also includes a second beam splitter, a polarizing beam splitter, a third photodetector, and a fourth photodetector, the second beam splitter is located between the lens and the first photodetector, from The light beam emitted by the lens is divided into two beams by the second beam splitter, which respectively enter the first photodetector and the polarizing beam splitter, and the two beams split by the polarizing beam splitter enter the third photodetector and the third photodetector respectively.
  • Four photoelectric detectors and then enter the control display system.
  • the spin defects of the diamond particles are nitrogen holes, silicon holes, and germanium holes.
  • the wavelength of the light emitted by the second laser is related to the spin defect of the selected diamond.
  • the second laser emits excitation light of 480-550 nm.
  • a method for multi-physical parameter sensing using the above-mentioned device firstly turning on a first laser to form an optical trap, suspending micro-nano-sized diamond particles containing spin defects in the optical trap, and obtaining each physical parameter through the following operations :
  • the movement process of the particles in the optical trap is tracked, thereby realizing the detection of the environmental force field and the linear acceleration field;
  • the spin defect of the diamond particle is excited by the optical signal emitted by the second laser, so that it emits fluorescence, the fluorescence detector collects the fluorescence signal, and uses microwave scanning resonance to detect the intensity change of diamond fluorescence to obtain the energy level change of the spin ground state, Then, the magnetic field strength at the location of the diamond particles is obtained;
  • the spin defect in the diamond particle is excited by the optical signal emitted by the second laser, so that it emits fluorescence
  • the fluorescence detector collects the fluorescence signal, and uses microwave scanning resonance to detect the intensity change of diamond fluorescence, and obtain the energy level change of the spin ground state. , and then obtain the temperature at the location of the diamond particle; or directly by detecting the change of the fluorescence spectrum corresponding to the energy difference between the excited state and the ground state of the spin defect of the diamond particle, to obtain the temperature at the location of the diamond particle.
  • a method for sensing multiple physical parameters using the above-mentioned device firstly turning on a first laser to form an optical trap, suspending diamond particles of micro-nano scale containing spin defects in the optical trap, the length of the diamond particles is The width ratio is 1 to 5, and it is non-spherical.
  • the physical parameters are obtained by the following operations:
  • the movement process of the particles in the optical trap is tracked, thereby realizing the detection of the environmental force field and the linear acceleration field;
  • the spin defect of the diamond particle is excited by the optical signal emitted by the second laser, so that it emits fluorescence, the fluorescence detector collects the fluorescence signal, and uses microwave scanning resonance to detect the intensity change of diamond fluorescence to obtain the energy level change of the spin ground state, Then, the magnetic field strength at the location of the diamond particles is obtained;
  • the spin defect in the diamond particle is excited by the optical signal emitted by the second laser, so that it emits fluorescence
  • the fluorescence detector collects the fluorescence signal, and uses microwave scanning resonance to detect the intensity change of diamond fluorescence, and obtain the energy level change of the spin ground state , and then obtain the temperature at the location of the diamond particle; or directly by detecting the fluorescence spectrum change corresponding to the difference between the excited state of the spin defect of the diamond particle and the ground state energy, obtain the temperature at the location of the diamond particle;
  • the device and method of the present invention can realize multi-physical parameter sensing at the same spatial position, avoiding the gradient difference of information;
  • the device of the present invention integrates the systems required for different detection objects, realizes multi-physical parameter detection of a single device, saves load space and saves costs.
  • FIG. 1 is a schematic diagram of a multi-physical parameter sensing device of the present invention
  • Fig. 2 is a schematic diagram of a multi-physical parameter sensing device capable of further detecting angular velocity on the basis of Fig. 1;
  • FIG. 3 is a schematic diagram of a method for multi-physical parameter sensing according to the present invention.
  • Figure 4 is the energy level of the electron spin in the ground state of the diamond nitrogen hole (NV) color center defect and the corresponding resonance spectrum;
  • the left image in Figure 4 is the three energy levels
  • Figure 5 shows the relationship between the energy level of the NV color center electron spin ground state with temperature and magnetic field; the left picture is the relationship between the zero-field splitting D in the spin ground state energy level with temperature, and the right picture is caused by the magnetic field
  • the device for multi-physical parameter sensing based on optical tweezers and spin defects of the present invention includes a first laser 1, a second laser 2, a first optical modulator 3, a second optical modulator 4, Beam splitter 5, beam combiner 6, objective lens 7, lens 9, first photodetector 10, second photodetector 11, microwave source 12, microwave modulator 13, microwave antenna 14, dichroic plate 15, fluorescence detector 16.
  • the first laser 1 emits and captures laser light, passes through the first optical modulator 3 and then enters the beam splitter 5 to separate the first beam and the second beam; the first beam enters the second photodetector 11, and the second beam enters the second photodetector 11.
  • the photodetector 11 is connected with the control display system 17;
  • the second laser 2 emits an optical signal used for diamond spin defect excitation, passes through the second optical modulator 4 and the dichroic plate 15 in turn, and enters the objective lens 7 together with the second beam through the beam combiner 6;
  • the optical signal of the first laser 1 is converged by the objective lens 7 to form an optical trap that captures the diamond particles of micro-nano scale, that is, optical tweezers are formed, and its forward light passes through the diamond particles of the micro-nano scale and the lens 9 in turn to enter for use.
  • the first photodetector 10 for diamond particle position detection, the first photodetector 10 is connected with the control display system 17;
  • the laser light generated by the second laser 2 passes through the objective lens 7 and is converged into an optical signal for excitation of spin defects of diamond particles of micro-nano scale.
  • the beamer 6 is reflected, and then separated from the original optical path through the dichroic plate 15, and collected by the fluorescence detector 16;
  • the first optical modulator 3 and the second optical modulator 4 are respectively used to control the intensity or switch modulation of the laser signals generated by the first laser 1 and the second laser 2;
  • the signal reflects the light intensity change caused by the movement of the diamond particles.
  • the position information of the diamond particles can be output to track the movement process of the particles in the optical trap, thereby realizing the detection of the environmental force field and acceleration field;
  • the microwave signal generated by the microwave source 12 is transmitted to the microwave antenna 14 through the microwave modulator 13, which is used for quantum state manipulation of spin defects of the diamond particles of micro-nano scale;
  • the microwave modulator 13 is used to control the intensity or switch modulation of the microwave signal generated by the microwave source 12;
  • the multi-physical parameter sensing device is used in a vacuum environment, or a vacuum cavity is set in the light trap area formed by the objective lens 7;
  • the control display system 17 is used for the output of each signal source in the whole device and the collection and processing of photoelectric signals, thereby obtaining various physical parameters.
  • a second beam splitter 19 is added between the device lens 9 and the first photodetector 10, and a polarizing beam splitter 20 and a third photodetector are added on another optical path of the second beam splitter 19. 21 and the fourth photodetector 22, so that the light beam emitted by the lens 9 is split into two beams by the second beam splitter 19, and then enter the first photodetector 10 and the polarization beam splitter 20 respectively.
  • the two beams of light separated by the detector 20 enter the third photodetector 21 and the fourth photodetector 22 respectively, and then enter the control and display system 17 .
  • Figure 2 Specifically as shown in Figure 2.
  • the method for sensing multiple physical parameters by using the device of the present invention is as follows: firstly, the micro-nano-sized diamond particles containing spin defects are suspended in the optical trap by the atomization spray method or other methods. , the physical parameters are obtained by the following operations:
  • the movement process of the particles in the optical trap is tracked, thereby realizing the detection of the environmental force field and the linear acceleration field;
  • the spin defect of the diamond particle is excited by the optical signal emitted by the second laser 2, so that it emits fluorescence, the fluorescence detector 16 collects the fluorescence signal, and uses microwave scanning resonance to detect the intensity change of diamond fluorescence, and obtain the energy level of the spin ground state change, and then obtain the magnetic field strength at the location of the diamond particles;
  • the spin defect in the diamond particle is excited by the optical signal emitted by the second laser 2, so that it emits fluorescence, the fluorescence detector 16 collects the fluorescence signal, and uses the microwave frequency scanning resonance method to detect the intensity change of diamond fluorescence to obtain the spin ground state
  • the energy level change of the diamond particles can be obtained to obtain the temperature at the location of the diamond particles.
  • the above-mentioned diamond particles are replaced by non-spherical diamond particles with an aspect ratio of 1 to 5, suspended in the optical trap, and detected by the first photodetector 10 and the second photodetector 11
  • the light intensity changes caused by the movement of the diamond particles track the movement process of the particles in the optical trap, and obtain the polarization differential signal according to the light intensity changes detected by the third photodetector 21 and the fourth photodetector 22 to realize the detection of the environmental angular velocity .
  • FIG 4 it is the energy level of the ground state electron spin of the diamond nitrogen hole (NV) color center defect and the corresponding resonance spectrum.
  • the figure on the left shows the three energy levels of the ground state spin of the NV color center
  • Fig. 5 shows the change of the zero-field splitting D corresponding to the two transition channels extracted from the right-hand image of Fig. 4 and the change of the frequency interval ⁇ of the

Abstract

An optical tweezer and spin defect-based multi-physical parameter sensing device and method, comprising a first laser (1), a second laser (2), a first light modulator (3), a second light modulator (4), a beam splitter (5), a beam combiner (6), an objective lens (7), a lens (9), and a first photoelectric detector (10), a second photoelectric detector (11), a microwave source (12), a microwave modulator (13), a microwave antenna (14), a double-color sheet (15), a fluorescence detector (16), and a control and display system (17). By enabling micro-nano-sized diamond particles having spin defects to be suspended in a light trap, various physical parameters are obtained according to the motion of the diamond particles. Multi-physical parameter sensing at the same spatial position can be achieved, and a gradient difference of information is avoided.

Description

基于光镊和自旋缺陷的多物理参数传感的装置和方法Device and method for multi-physical parameter sensing based on optical tweezers and spin defects 技术领域technical field
本发明涉及传感领域、导航测绘领域，具体涉及一种基于光镊和自旋缺陷的多物理参数传感的装置和方法。The invention relates to the field of sensing, navigation and mapping, and in particular to a device and method for sensing multiple physical parameters based on optical tweezers and spin defects.
背景技术Background technique
在航空、航天、航海、探潜等相关领域，为了兼顾安全导航和科学探测要求，飞船、航空器或者潜艇上需要搭载多种传感设备，其中陀螺仪、重力仪、磁强计和温度探测仪是常备载荷。其中用于姿态控制和导航的重力传感设备和角速度传感器陀螺仪是导航所必须的；温度和磁场的测量是航测领域关注的重要参数，对于保证航天器的正常飞行以及研究空间环境都具有重要价值。In aviation, aerospace, navigation, diving and other related fields, in order to take into account the requirements of safe navigation and scientific detection, spacecraft, aircraft or submarines need to be equipped with a variety of sensing equipment, including gyroscopes, gravimeters, magnetometers and temperature detectors. is a standing load. Among them, gravity sensing equipment and angular velocity sensor gyroscope for attitude control and navigation are necessary for navigation; the measurement of temperature and magnetic field are important parameters in the field of aerial surveying, which are important for ensuring the normal flight of spacecraft and studying the space environment. value.
在现有的技术方案中，多种物理量的探测，是通过在航行舱体中搭载多个单一功能传感器实现的。采用这种方案需要的传感器多，对应的体积大，能耗高；其次采用多传感器测量到的各物理参量来自于不同空间位置，难以做到同一空间位置的多物理量分析。In the existing technical solution, the detection of various physical quantities is realized by carrying a plurality of single-function sensors in the navigation cabin. Using this solution requires many sensors, the corresponding volume is large, and the energy consumption is high; secondly, the physical parameters measured by using multiple sensors come from different spatial locations, and it is difficult to analyze multiple physical quantities in the same spatial location.
发明内容SUMMARY OF THE INVENTION
针对现有技术的不足，本发明提出一种基于光镊和自旋缺陷的多物理参数传感的装置和方法，具体技术方案如下：In view of the deficiencies of the prior art, the present invention proposes a device and method for multi-physical parameter sensing based on optical tweezers and spin defects. The specific technical solutions are as follows:
一种基于光镊和自旋缺陷的多物理参数传感的装置，该装置包括第一激光器、第二激光器、第一光调制器、第二光调制器、分束器、合束器、物镜、透镜、第一光电探测器、第二光电探测器、微波源、微波调制器、微波天线、双色片、荧光探测器、控制显示系统；A device for multi-physical parameter sensing based on optical tweezers and spin defects, the device includes a first laser, a second laser, a first optical modulator, a second optical modulator, a beam splitter, a beam combiner, and an objective lens , lens, first photodetector, second photodetector, microwave source, microwave modulator, microwave antenna, dichroic film, fluorescence detector, control display system;
其中，第一激光器出射捕获激光，经过第一光调制器后进入分束器，分出第一路光束和第二路光束；第一路光束进入第二光电探测器，第二光电探测器与控制显示系统连接；The first laser emits and captures laser light, passes through the first optical modulator, and then enters the beam splitter to separate the first beam and the second beam; the first beam enters the second photodetector, which is connected to the second photodetector. Control display system connection;
第二激光器出射用于金刚石自旋缺陷激发的光信号，依次经过第二光调制器、双色片后，与所述的第二路光束一起经合束器合束进入物镜，第一激光器的光信号经物镜汇聚后形成捕获微纳米级尺寸的金刚石颗粒的光阱，也即形成光镊，其前向光依次经过微纳米级尺寸的金刚石颗粒、透镜进入用于金刚石颗粒位置探测的第一光电探测器，第一光电探测器与控制显示系统连接；The second laser emits an optical signal for exciting diamond spin defects, and after passing through the second optical modulator and the dichroic plate in sequence, it enters the objective lens together with the second beam through the beam combiner, and the light from the first laser enters the objective. After the signal is converged by the objective lens, an optical trap that captures the diamond particles of micro-nano scale is formed, that is, optical tweezers are formed. a detector, the first photodetector is connected to the control and display system;
第二激光器产生的激光经过经物镜后汇聚成用于微纳米级尺寸的金刚石颗粒自旋缺陷激发的光信号，其照射金刚石颗粒的缺陷产生的荧光被物镜收集，原路返回经过合束器反射， 再经过双色片与原光路分离，被荧光探测器收集；The laser light generated by the second laser is collected by the objective lens to form an optical signal for excitation of spin defects of diamond particles in micro-nano scale, and the fluorescence generated by irradiating the defects of the diamond particles is collected by the objective lens, and is reflected by the beam combiner in the same way. , and then separated from the original optical path by the two-color film, and collected by the fluorescence detector;
微波源产生的微波信号经过微波调制器传输到微波天线上，用于微纳米级尺寸的金刚石颗粒的自旋缺陷的量子态操纵；The microwave signal generated by the microwave source is transmitted to the microwave antenna through the microwave modulator, which is used for the quantum state manipulation of the spin defect of the diamond particles of micro-nano scale;
所述的多物理参数传感的装置放在真空环境中使用，或者在物镜形成的光阱区域设置真空腔；The multi-physical parameter sensing device is used in a vacuum environment, or a vacuum cavity is set in the light trap area formed by the objective lens;
控制显示系统用于整个装置中各信号源的输出以及光电信号的采集和处理，从而得到各个物理参数。The control display system is used for the output of each signal source in the whole device and the collection and processing of photoelectric signals, so as to obtain various physical parameters.
进一步地，该装置还包括第二分束器、偏振分束器、第三光电探测器、第四光电探测器，所述的第二分束器位于透镜、第一光电探测器之间，从透镜出射的光束被第二分束器分成两束，分别进入第一光电探测器和偏振分束器，经所述的偏振分束器分出的两束光分别进入第三光电探测器、第四光电探测器，进而进入控制显示系统。Further, the device also includes a second beam splitter, a polarizing beam splitter, a third photodetector, and a fourth photodetector, the second beam splitter is located between the lens and the first photodetector, from The light beam emitted by the lens is divided into two beams by the second beam splitter, which respectively enter the first photodetector and the polarizing beam splitter, and the two beams split by the polarizing beam splitter enter the third photodetector and the third photodetector respectively. Four photoelectric detectors, and then enter the control display system.
进一步地，所述的金刚石颗粒的自旋缺陷为氮空穴、硅空穴、锗空穴。Further, the spin defects of the diamond particles are nitrogen holes, silicon holes, and germanium holes.
进一步地，所述的第二激光器出射的光的波长与所选金刚石的自旋缺陷相关。Further, the wavelength of the light emitted by the second laser is related to the spin defect of the selected diamond.
进一步地，当所述的金刚石颗粒选用NV色心缺陷时，所述的第二激光器出射480～550nm的激发光。Further, when the NV color center defect is selected for the diamond particles, the second laser emits excitation light of 480-550 nm.
一种利用上述的装置进行多物理参数传感的方法，首先开启第一激光器形成光阱，将含有自旋缺陷的微纳米级尺寸的金刚石颗粒悬浮在光阱中，通过如下操作得到各个物理参数：A method for multi-physical parameter sensing using the above-mentioned device, firstly turning on a first laser to form an optical trap, suspending micro-nano-sized diamond particles containing spin defects in the optical trap, and obtaining each physical parameter through the following operations :
根据第一光电探测器和第二光电探测器探测到的金刚石颗粒运动引起的光强变化，追踪颗粒在光阱中的运动过程，进而实现对环境力场和直线加速度场的探测；According to the light intensity change caused by the movement of the diamond particles detected by the first photodetector and the second photodetector, the movement process of the particles in the optical trap is tracked, thereby realizing the detection of the environmental force field and the linear acceleration field;
通过第二激光器出射的光信号激发金刚石颗粒的自旋缺陷，使之发射荧光，荧光探测器收集荧光信号，利用微波扫描共振，探测金刚石荧光的强弱变化，得到自旋基态的能级变化，进而得到金刚石颗粒所在位置的磁场强度；The spin defect of the diamond particle is excited by the optical signal emitted by the second laser, so that it emits fluorescence, the fluorescence detector collects the fluorescence signal, and uses microwave scanning resonance to detect the intensity change of diamond fluorescence to obtain the energy level change of the spin ground state, Then, the magnetic field strength at the location of the diamond particles is obtained;
通过第二激光器出射的光信号激发金刚石颗粒中的自旋缺陷，使之发射荧光，荧光探测器收集荧光信号，利用微波扫描共振，探测金刚石荧光的强弱变化，得到自旋基态的能级变化，进而得到金刚石颗粒所在位置的温度；或者直接通过探测金刚石颗粒的自旋缺陷的激发态与基态能极差对应的荧光光谱变化，得到金刚石颗粒所在位置的温度。The spin defect in the diamond particle is excited by the optical signal emitted by the second laser, so that it emits fluorescence, the fluorescence detector collects the fluorescence signal, and uses microwave scanning resonance to detect the intensity change of diamond fluorescence, and obtain the energy level change of the spin ground state. , and then obtain the temperature at the location of the diamond particle; or directly by detecting the change of the fluorescence spectrum corresponding to the energy difference between the excited state and the ground state of the spin defect of the diamond particle, to obtain the temperature at the location of the diamond particle.
一种利用上述的装置进行多物理参数传感的方法，首先开启第一激光器形成光阱，将含有自旋缺陷的微纳米级尺寸的金刚石颗粒悬浮在光阱中，所述的金刚石颗粒的长宽比为1～5，且为非球形，通过如下操作得到各个物理参数：A method for sensing multiple physical parameters using the above-mentioned device, firstly turning on a first laser to form an optical trap, suspending diamond particles of micro-nano scale containing spin defects in the optical trap, the length of the diamond particles is The width ratio is 1 to 5, and it is non-spherical. The physical parameters are obtained by the following operations:
根据第一光电探测器和第二光电探测器探测到的金刚石颗粒运动引起的光强变化，追踪颗粒在光阱中的运动过程，进而实现对环境力场和直线加速度场的探测；According to the light intensity change caused by the movement of the diamond particles detected by the first photodetector and the second photodetector, the movement process of the particles in the optical trap is tracked, thereby realizing the detection of the environmental force field and the linear acceleration field;
通过第二激光器出射的光信号激发金刚石颗粒的自旋缺陷，使之发射荧光，荧光探测器收集荧光信号，利用微波扫描共振，探测金刚石荧光的强弱变化，得到自旋基态的能级变化，进而得到金刚石颗粒所在位置的磁场强度；The spin defect of the diamond particle is excited by the optical signal emitted by the second laser, so that it emits fluorescence, the fluorescence detector collects the fluorescence signal, and uses microwave scanning resonance to detect the intensity change of diamond fluorescence to obtain the energy level change of the spin ground state, Then, the magnetic field strength at the location of the diamond particles is obtained;
通过第二激光器出射的光信号激发金刚石颗粒中的自旋缺陷，使之发射荧光，荧光探测器收集荧光信号，利用微波扫描共振，探测金刚石荧光的强弱变化，得到自旋基态的能级变化，进而得到金刚石颗粒所在位置的温度；或者直接通过探测金刚石颗粒的自旋缺陷的激发态与基态能极差对应的荧光光谱变化，得到金刚石颗粒所在位置的温度；The spin defect in the diamond particle is excited by the optical signal emitted by the second laser, so that it emits fluorescence, the fluorescence detector collects the fluorescence signal, and uses microwave scanning resonance to detect the intensity change of diamond fluorescence, and obtain the energy level change of the spin ground state , and then obtain the temperature at the location of the diamond particle; or directly by detecting the fluorescence spectrum change corresponding to the difference between the excited state of the spin defect of the diamond particle and the ground state energy, obtain the temperature at the location of the diamond particle;
通过根据第一光电探测器和第二光电探测器探测到的金刚石颗粒运动引起的光强变化，追踪颗粒在光阱中的运动过程，根据第三光电探测器和第四光电探测器探测的光强变化，得到偏振差分信号，实现环境角速度的探测。By tracking the movement process of the particles in the optical trap according to the light intensity changes caused by the movement of the diamond particles detected by the first photodetector and the second photodetector, according to the light intensity detected by the third photodetector and the fourth photodetector Strong changes, the polarization differential signal is obtained, and the detection of the environmental angular velocity is realized.
本发明的有益效果如下：The beneficial effects of the present invention are as follows:
(1)本发明的装置和方法可以实现同一空间位置的多物理参数传感，避免了信息的梯度差；(1) The device and method of the present invention can realize multi-physical parameter sensing at the same spatial position, avoiding the gradient difference of information;
(2)本发明的装置将不同探测对象所需的系统集成到一起，实现单个设备的多物理参数探测，节省载荷空间、节约成本。(2) The device of the present invention integrates the systems required for different detection objects, realizes multi-physical parameter detection of a single device, saves load space and saves costs.
附图说明Description of drawings
图1为本发明的多物理参数传感的装置示意图；1 is a schematic diagram of a multi-physical parameter sensing device of the present invention;
图2为在图1基础上能进一步探测角速度的多物理参数传感的装置示意图；Fig. 2 is a schematic diagram of a multi-physical parameter sensing device capable of further detecting angular velocity on the basis of Fig. 1;
图3为本发明的多物理参数传感的方法示意图；3 is a schematic diagram of a method for multi-physical parameter sensing according to the present invention;
图4为金刚石氮空穴(NV)色心缺陷基态电子自旋的能级以及对应的共振谱图；图4中的左图为NV色心基态自旋的三能级|0>、|-1>、|+1>示意图，右图为NV色心荧光强度与扫描微波频率的关系图；Figure 4 is the energy level of the electron spin in the ground state of the diamond nitrogen hole (NV) color center defect and the corresponding resonance spectrum; the left image in Figure 4 is the three energy levels |0>, |- of the ground state spin of the NV color center 1>, |+1> schematic diagram, the right picture is the relationship between the fluorescence intensity of the NV color center and the scanning microwave frequency;
图5为NV色心电子自旋基态能级随温度和磁场的变化关系图；其中左图为自旋基态能级中零场劈裂D随温度变化的关系图，右图为磁场导致的|-1>、|+1>的频率劈裂间隔Δ随磁场强度B的变化关系图。Figure 5 shows the relationship between the energy level of the NV color center electron spin ground state with temperature and magnetic field; the left picture is the relationship between the zero-field splitting D in the spin ground state energy level with temperature, and the right picture is caused by the magnetic field | The relationship between the frequency splitting interval Δ of -1>, |+1> and the magnetic field strength B.
图中，第一激光器1、第二激光器2、第一光调制器3、第二光调制器4、分束器5、合束器6、物镜7、金刚石颗粒8、透镜9、第一光电探测器10、第二光电探测器11、微波源 12、微波调制器13、微波天线14、双色片15、荧光探测器16、控制显示系统17、真空腔18、第二分束器19、偏振分束器20、第三光电探测器21、第四光电探测器22。In the figure, the first laser 1, the second laser 2, the first optical modulator 3, the second optical modulator 4, the beam splitter 5, the beam combiner 6, the objective lens 7, the diamond particles 8, the lens 9, the first photoelectric Detector 10, second photodetector 11, microwave source 12, microwave modulator 13, microwave antenna 14, dichroic plate 15, fluorescence detector 16, control display system 17, vacuum cavity 18, second beam splitter 19, polarization Beam splitter 20 , third photodetector 21 , fourth photodetector 22 .
具体实施方式Detailed ways
下面根据附图和优选实施例详细描述本发明，本发明的目的和效果将变得更加明白，应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。The present invention will be described in detail below according to the accompanying drawings and preferred embodiments, and the purpose and effects of the present invention will become clearer.
如图1所示，本发明的基于光镊和自旋缺陷的多物理参数传感的装置，包括第一激光器1、第二激光器2、第一光调制器3、第二光调制器4、分束器5、合束器6、物镜7、透镜9、第一光电探测器10、第二光电探测器11、微波源12、微波调制器13、微波天线14、双色片15、荧光探测器16、控制显示系统17；As shown in FIG. 1, the device for multi-physical parameter sensing based on optical tweezers and spin defects of the present invention includes a first laser 1, a second laser 2, a first optical modulator 3, a second optical modulator 4, Beam splitter 5, beam combiner 6, objective lens 7, lens 9, first photodetector 10, second photodetector 11, microwave source 12, microwave modulator 13, microwave antenna 14, dichroic plate 15, fluorescence detector 16. Control display system 17;
其中，第一激光器1出射捕获激光，经过第一光调制器3后进入分束器5，分出第一路光束和第二路光束；第一路光束进入第二光电探测器11，第二光电探测器11与控制显示系统17连接；The first laser 1 emits and captures laser light, passes through the first optical modulator 3 and then enters the beam splitter 5 to separate the first beam and the second beam; the first beam enters the second photodetector 11, and the second beam enters the second photodetector 11. The photodetector 11 is connected with the control display system 17;
第二激光器2出射用于金刚石自旋缺陷激发的光信号，依次经过第二光调制器4、双色片15后，与所述的第二路光束一起经合束器6合束进入物镜7；The second laser 2 emits an optical signal used for diamond spin defect excitation, passes through the second optical modulator 4 and the dichroic plate 15 in turn, and enters the objective lens 7 together with the second beam through the beam combiner 6;
第一激光器1的光信号经物镜7汇聚后形成捕获微纳米级尺寸的金刚石颗粒的光阱，也即形成光镊，其前向光依次经过微纳米级尺寸的金刚石颗粒、透镜9进入用于金刚石颗粒位置探测的第一光电探测器10，第一光电探测器10与控制显示系统17连接；The optical signal of the first laser 1 is converged by the objective lens 7 to form an optical trap that captures the diamond particles of micro-nano scale, that is, optical tweezers are formed, and its forward light passes through the diamond particles of the micro-nano scale and the lens 9 in turn to enter for use. The first photodetector 10 for diamond particle position detection, the first photodetector 10 is connected with the control display system 17;
第二激光器2产生的激光经过经物镜7后汇聚成用于微纳米级尺寸的金刚石颗粒自旋缺陷激发的光信号，其照射金刚石颗粒的缺陷产生的荧光被物镜7收集，原路返回经过合束器6反射，再经过双色片15与原光路分离，被荧光探测器16收集；The laser light generated by the second laser 2 passes through the objective lens 7 and is converged into an optical signal for excitation of spin defects of diamond particles of micro-nano scale. The beamer 6 is reflected, and then separated from the original optical path through the dichroic plate 15, and collected by the fluorescence detector 16;
第一光调制器3和第二光调制器4分别用于控制第一激光器1和第二激光器2产生的激光信号的强度或开关调制；第一光电探测器10和第二光电探测器11的信号反映金刚石颗粒运动引起的光强变化，经过控制显示系统17处理后可以输出金刚石颗粒位置信息，用于追踪颗粒在光阱中的运动过程，进而实现对环境力场和加速度场的探测；The first optical modulator 3 and the second optical modulator 4 are respectively used to control the intensity or switch modulation of the laser signals generated by the first laser 1 and the second laser 2; The signal reflects the light intensity change caused by the movement of the diamond particles. After being processed by the control display system 17, the position information of the diamond particles can be output to track the movement process of the particles in the optical trap, thereby realizing the detection of the environmental force field and acceleration field;
微波源12产生的微波信号经过微波调制器13传输到微波天线14上，用于微纳米级尺寸的金刚石颗粒的自旋缺陷的量子态操纵；The microwave signal generated by the microwave source 12 is transmitted to the microwave antenna 14 through the microwave modulator 13, which is used for quantum state manipulation of spin defects of the diamond particles of micro-nano scale;
微波调制器13用于控制微波源12产生的微波信号的强度或开关调制；The microwave modulator 13 is used to control the intensity or switch modulation of the microwave signal generated by the microwave source 12;
所述的多物理参数传感的装置放在真空环境中使用，或者在物镜7形成的光阱区域设置真空腔；The multi-physical parameter sensing device is used in a vacuum environment, or a vacuum cavity is set in the light trap area formed by the objective lens 7;
控制显示系统17用于整个装置中各信号源的输出以及光电信号的采集和处理，从而得到各个物理参数。The control display system 17 is used for the output of each signal source in the whole device and the collection and processing of photoelectric signals, thereby obtaining various physical parameters.
为了进一步探测环境角速度，在装置透镜9、第一光电探测器10之间增加第二分束器19，在第二分束器19的另一光路上增加偏振分束器20、第三光电探测器21、第四光电探测器22，进而使透镜9出射的光束被第二分束器19分成两束，分别进入第一光电探测器10和偏振分束器20，经所述的偏振分束器20分出的两束光分别进入第三光电探测器21、第四光电探测器22，然后进入控制显示系统17。具体如图2所示。In order to further detect the ambient angular velocity, a second beam splitter 19 is added between the device lens 9 and the first photodetector 10, and a polarizing beam splitter 20 and a third photodetector are added on another optical path of the second beam splitter 19. 21 and the fourth photodetector 22, so that the light beam emitted by the lens 9 is split into two beams by the second beam splitter 19, and then enter the first photodetector 10 and the polarization beam splitter 20 respectively. The two beams of light separated by the detector 20 enter the third photodetector 21 and the fourth photodetector 22 respectively, and then enter the control and display system 17 . Specifically as shown in Figure 2.
如图3所示，利用本发明的装置进行多物理参数传感的方法具体为：首先通过雾化喷雾法或者其他的方法将含有自旋缺陷的微纳米级尺寸的金刚石颗粒悬浮在光阱中，通过如下操作得到各个物理参数：As shown in FIG. 3 , the method for sensing multiple physical parameters by using the device of the present invention is as follows: firstly, the micro-nano-sized diamond particles containing spin defects are suspended in the optical trap by the atomization spray method or other methods. , the physical parameters are obtained by the following operations:
根据第一光电探测器10和第二光电探测器11探测到的金刚石颗粒运动引起的光强变化，追踪颗粒在光阱中的运动过程，进而实现对环境力场和直线加速度场的探测；According to the light intensity change caused by the movement of the diamond particles detected by the first photodetector 10 and the second photodetector 11, the movement process of the particles in the optical trap is tracked, thereby realizing the detection of the environmental force field and the linear acceleration field;
通过第二激光器2出射的光信号激发金刚石颗粒的自旋缺陷，使之发射荧光，荧光探测器16收集荧光信号，利用微波扫描共振，探测金刚石荧光的强弱变化，得到自旋基态的能级变化，进而得到金刚石颗粒所在位置的磁场强度；The spin defect of the diamond particle is excited by the optical signal emitted by the second laser 2, so that it emits fluorescence, the fluorescence detector 16 collects the fluorescence signal, and uses microwave scanning resonance to detect the intensity change of diamond fluorescence, and obtain the energy level of the spin ground state change, and then obtain the magnetic field strength at the location of the diamond particles;
通过第二激光器2出射的光信号激发金刚石颗粒中的自旋缺陷，使之发射荧光，荧光探测器16收集荧光信号，利用微波频率扫描共振方法，探测金刚石荧光的强弱变化，得到自旋基态的能级变化，进而得到金刚石颗粒所在位置的温度；或者直接通过探测金刚石颗粒的自旋缺陷的激发态与基态能极差对应的荧光光谱变化，得到金刚石颗粒所在位置的温度。The spin defect in the diamond particle is excited by the optical signal emitted by the second laser 2, so that it emits fluorescence, the fluorescence detector 16 collects the fluorescence signal, and uses the microwave frequency scanning resonance method to detect the intensity change of diamond fluorescence to obtain the spin ground state The energy level change of the diamond particles can be obtained to obtain the temperature at the location of the diamond particles.
当需要探测环境角速度时，采用长宽比为1～5的非球形的金刚石颗粒替换上述的金刚石颗粒，悬浮在光阱中，通过根据第一光电探测器10和第二光电探测器11探测到的金刚石颗粒运动引起的光强变化，追踪颗粒在光阱中的运动过程，根据第三光电探测器21和第四光电探测器22探测的光强变化，得到偏振差分信号，实现环境角速度的探测。When the ambient angular velocity needs to be detected, the above-mentioned diamond particles are replaced by non-spherical diamond particles with an aspect ratio of 1 to 5, suspended in the optical trap, and detected by the first photodetector 10 and the second photodetector 11 The light intensity changes caused by the movement of the diamond particles, track the movement process of the particles in the optical trap, and obtain the polarization differential signal according to the light intensity changes detected by the third photodetector 21 and the fourth photodetector 22 to realize the detection of the environmental angular velocity .
如图4所示，为金刚石氮空穴(NV)色心缺陷基态电子自旋的能级以及对应的共振谱图，左侧的图展示了NV色心基态自旋的三能级|0>、|-1>、|+1>，其中处于|0>态的NV色心受激发后荧光强度高于处于|-1>、|+1>态的NV色心，因此可以通过荧光光强探测NV色心的自旋态，NV色心的自旋态在激发光的作用下会被初始化到|0>态，处于|0>态的NV色心可以被共振微波调控到荧光强度低的|-1>、|+1>态；也即通过扫描施加微波信号检测荧光强度变 化，得到两个共振峰，如图4中的右侧的图所示，从中可以得到三个基态能级差的变化。As shown in Figure 4, it is the energy level of the ground state electron spin of the diamond nitrogen hole (NV) color center defect and the corresponding resonance spectrum. The figure on the left shows the three energy levels of the ground state spin of the NV color center |0> , |-1>, |+1>, where the fluorescence intensity of the NV color center in the |0> state is higher than that of the NV color center in the |-1>, |+1> state, so the fluorescence intensity can be passed through Detect the spin state of the NV color center, the spin state of the NV color center will be initialized to the |0> state under the action of the excitation light, and the NV color center in the |0> state can be controlled by resonant microwave to a low fluorescence intensity. |-1>, |+1> state; that is, the change of fluorescence intensity is detected by scanning and applying a microwave signal, and two resonance peaks are obtained, as shown in the figure on the right in Figure 4, from which three ground state energy levels can be obtained. Variety.
图5展示的是从图4右侧图中提取的两个跃迁通道对应的零场劈裂D的变化和|-1>、|+1>两个能级的频率间隔Δ的变化；零场劈裂D所对应的频率与温度相关，具体关系如图5的左侧图所示；|-1>、|+1>两个能级的频率间隔Δ所对应的频率与NV色心轴向的磁场强度成线性关系，具体关系如图5右图所示。Fig. 5 shows the change of the zero-field splitting D corresponding to the two transition channels extracted from the right-hand image of Fig. 4 and the change of the frequency interval Δ of the |-1>, |+1> energy levels; the zero-field The frequency corresponding to the splitting D is related to temperature, and the specific relationship is shown in the left figure of Fig. 5; The magnetic field strength is linearly related, and the specific relationship is shown in the right figure of Figure 5.
本领域普通技术人员可以理解，以上所述仅为发明的优选实例而已，并不用于限制发明，尽管参照前述实例对发明进行了详细的说明，对于本领域的技术人员来说，其依然可以对前述各实例记载的技术方案进行修改，或者对其中部分技术特征进行等同替换。凡在发明的精神和原则之内，所做的修改、等同替换等均应包含在发明的保护范围之内。Those of ordinary skill in the art can understand that the above are only preferred examples of the invention and are not intended to limit the invention. Although the invention has been described in detail with reference to the foregoing examples, those skilled in the art can still understand the Modifications are made to the technical solutions described in the foregoing examples, or equivalent replacements are made to some of the technical features. All modifications and equivalent replacements made within the spirit and principle of the invention shall be included within the protection scope of the invention.

Claims (6)

  1. 一种基于光镊和自旋缺陷的多物理参数传感的装置，其特征在于，该装置包括第一激光器(1)、第二激光器(2)、第一光调制器(3)、第二光调制器(4)、分束器(5)、合束器(6)、物镜(7)、透镜(9)、第一光电探测器(10)、第二光电探测器(11)、微波源(12)、微波调制器(13)、微波天线(14)、双色片(15)、荧光探测器(16)、控制显示系统(17)；A device for sensing multiple physical parameters based on optical tweezers and spin defects, characterized in that the device comprises a first laser (1), a second laser (2), a first optical modulator (3), a second laser Optical modulator (4), beam splitter (5), beam combiner (6), objective lens (7), lens (9), first photodetector (10), second photodetector (11), microwave a source (12), a microwave modulator (13), a microwave antenna (14), a dichroic film (15), a fluorescence detector (16), and a control display system (17);
    其中，第一激光器(1)出射捕获激光，经过第一光调制器(3)后进入分束器(5)，分出第一路光束和第二路光束；第一路光束进入第二光电探测器(11)，第二光电探测器(11)与控制显示系统(17)连接；Wherein, the first laser (1) emits the capture laser, passes through the first optical modulator (3) and then enters the beam splitter (5) to separate the first beam and the second beam; the first beam enters the second photoelectric The detector (11), the second photodetector (11) is connected with the control and display system (17);
    第二激光器(2)出射用于金刚石颗粒自旋缺陷激发的光信号，依次经过第二光调制器(4)、双色片(15)后，与所述的第二路光束一起经合束器(6)合束进入物镜(7)，第一激光器(1)的光信号经物镜(7)汇聚后形成捕获微纳米级尺寸的金刚石颗粒的光阱，也即形成光镊，其前向光依次经过微纳米级尺寸的金刚石颗粒、透镜(9)进入用于金刚石颗粒位置探测的第一光电探测器(10)，第一光电探测器(10)与控制显示系统(17)连接；The second laser (2) emits an optical signal for excitation of spin defects of diamond particles, passes through the second optical modulator (4) and the dichroic plate (15) in sequence, and passes through the beam combiner together with the second beam of light (6) The combined beam enters the objective lens (7), and the optical signal of the first laser (1) is converged by the objective lens (7) to form an optical trap for capturing micro-nano-sized diamond particles, that is, optical tweezers are formed, and its forward light Entering the first photodetector (10) for detecting the position of the diamond particles through the diamond particles and the lens (9) of micro-nano scale in turn, and the first photodetector (10) is connected with the control display system (17);
    第二激光器(2)产生的激光经过经物镜(7)后汇聚成用于微纳米级尺寸的金刚石颗粒自旋缺陷激发的光信号，其照射金刚石颗粒的缺陷产生的荧光被物镜(7)收集，原路返回经过合束器(6)反射，再经过双色片(15)与原光路分离，被荧光探测器(16)收集；The laser light generated by the second laser (2) passes through the objective lens (7) and is converged into an optical signal for excitation of spin defects of diamond particles of micro-nano scale, and the fluorescence generated by irradiating the defects of the diamond particles is collected by the objective lens (7). , the original path returns and is reflected by the beam combiner (6), and then separated from the original optical path through the dichroic film (15), and collected by the fluorescence detector (16);
    微波源(12)产生的微波信号经过微波调制器(13)传输到微波天线(14)上，用于微纳米级尺寸的金刚石颗粒的自旋缺陷的量子态操纵；The microwave signal generated by the microwave source (12) is transmitted to the microwave antenna (14) through the microwave modulator (13), and is used for quantum state manipulation of spin defects of the diamond particles of micro-nano scale;
    所述的多物理参数传感的装置放在真空环境中使用，或者在物镜(7)形成的光阱区域设置真空腔；The device for sensing multiple physical parameters is used in a vacuum environment, or a vacuum cavity is set in the light trap area formed by the objective lens (7);
    控制显示系统(17)用于整个装置中各信号源的输出控制以及光电信号的采集和处理，从而得到各个物理参数；The control and display system (17) is used for the output control of each signal source in the whole device and the collection and processing of photoelectric signals, thereby obtaining each physical parameter;
    该装置还包括第二分束器(19)、偏振分束器(20)、第三光电探测器(21)、第四光电探测器(22)，所述的第二分束器(19)位于透镜(9)、第一光电探测器(10)之间，从透镜(9)出射的光束被第二分束器(19)分成两束，分别进入第一光电探测器(10)和偏振分束器(20)，经所述的偏振分束器(20)分出的两束光分别进入第三光电探测器(21)、第四光电探测器(22)，进而进入控制显示系统(17)。The device further comprises a second beam splitter (19), a polarization beam splitter (20), a third photodetector (21), a fourth photodetector (22), and the second beam splitter (19) Located between the lens (9) and the first photodetector (10), the light beam emerging from the lens (9) is split into two beams by the second beam splitter (19), entering the first photodetector (10) and the polarized beam respectively A beam splitter (20), the two beams of light split by the polarizing beam splitter (20) respectively enter the third photodetector (21) and the fourth photodetector (22), and then enter the control display system ( 17).
  2. 根据权利要求1所述的基于光镊和自旋缺陷的多物理参数传感的装置，其特征在于，所述的金刚石颗粒的自旋缺陷为氮空穴或硅空穴或锗空穴。The device for multi-physical parameter sensing based on optical tweezers and spin defects according to claim 1, wherein the spin defects of the diamond particles are nitrogen holes, silicon holes or germanium holes.
  3. 根据权利要求1所述的基于光镊和自旋缺陷的多物理参数传感的装置，其特征在于，所述的第二激光器(2)出射的光的波长与所选金刚石颗粒的自旋缺陷相关。The device for multi-physical parameter sensing based on optical tweezers and spin defects according to claim 1, characterized in that the wavelength of the light emitted by the second laser (2) is related to the spin defects of the selected diamond particles related.
  4. 根据权利要求2所述的基于光镊和自旋缺陷的多物理参数传感的装置，其特征在于，当所述的金刚石颗粒选用NV色心缺陷时，所述的第二激光器(2)出射480～550nm的激发光。The device for multi-physical parameter sensing based on optical tweezers and spin defects according to claim 2, characterized in that, when the diamond particles select NV color center defects, the second laser (2) emits 480 ~ 550nm excitation light.
  5. 一种利用权利要求1所述的装置进行多物理参数传感的方法，其特征在于，首先开启第一激光器(1)形成光阱，将含有自旋缺陷的微纳米级尺寸的金刚石颗粒悬浮在光阱中，所述的金刚石颗粒的长宽比为1～5，且为非球形，通过如下操作得到各个物理参数：A method for sensing multiple physical parameters using the device according to claim 1, characterized in that, firstly, a first laser (1) is turned on to form an optical trap, and diamond particles of micro-nano scale containing spin defects are suspended in the In the optical trap, the diamond particles have an aspect ratio of 1 to 5 and are non-spherical, and each physical parameter is obtained by the following operations:
    根据第一光电探测器(10)和第二光电探测器(11)探测到的金刚石颗粒运动引起的光强变化，追踪颗粒在光阱中的运动过程，进而实现对环境力场和直线加速度场的探测；According to the light intensity change caused by the movement of the diamond particles detected by the first photodetector (10) and the second photodetector (11), the movement process of the particles in the optical trap is tracked, thereby realizing the environmental force field and linear acceleration field. detection;
    通过第二激光器(2)出射的光信号激发金刚石颗粒的自旋缺陷，使之发射荧光，荧光探测器(16)收集荧光信号，利用微波扫描共振，探测金刚石颗粒荧光的强弱变化，得到自旋基态的能级变化，进而得到金刚石颗粒所在位置的磁场强度；The spin defect of the diamond particle is excited by the optical signal emitted by the second laser (2), so that it emits fluorescence, the fluorescence detector (16) collects the fluorescence signal, and uses microwave scanning resonance to detect the intensity change of the diamond particle's fluorescence, and obtains the self- The energy level of the spin ground state changes, and then the magnetic field strength at the location of the diamond particles is obtained;
    通过第二激光器(2)出射的光信号激发金刚石颗粒中的自旋缺陷，使之发射荧光，荧光探测器(16)收集荧光信号，利用微波扫描共振，探测金刚石颗粒荧光的强弱变化，得到自旋基态的能级变化，进而得到金刚石颗粒所在位置的温度；或者直接通过探测金刚石颗粒的自旋缺陷的激发态与基态能极差对应的荧光光谱变化，得到金刚石颗粒所在位置的温度；The spin defect in the diamond particle is excited by the optical signal emitted by the second laser (2), so that it emits fluorescence, the fluorescence detector (16) collects the fluorescence signal, and uses microwave scanning resonance to detect the intensity change of the diamond particle's fluorescence, thus obtaining The energy level change of the spin ground state, and then the temperature at the location of the diamond particle; or directly by detecting the change of the fluorescence spectrum corresponding to the energy difference between the excited state of the spin defect of the diamond particle and the ground state, the temperature at the location of the diamond particle is obtained;
    通过根据第一光电探测器(10)和第二光电探测器(11)探测到的金刚石颗粒运动引起的光强变化，追踪颗粒在光阱中的运动过程，根据第三光电探测器(21)和第四光电探测器(22)探测的光强变化，得到偏振差分信号，实现环境角速度的探测。By tracking the movement process of the particles in the optical trap according to the light intensity changes caused by the movement of the diamond particles detected by the first photodetector (10) and the second photodetector (11), according to the third photodetector (21) The light intensity change detected by the fourth photodetector (22) is used to obtain a polarization differential signal, so as to realize the detection of the environmental angular velocity.
  6. 一种基于光镊和自旋缺陷的多物理参数传感的装置进行多物理参数传感的方法，其特征在于，所述装置包括第一激光器(1)、第二激光器(2)、第一光调制器(3)、第二光调制器(4)、分束器(5)、合束器(6)、物镜(7)、透镜(9)、第一光电探测器(10)、第二光电探测器(11)、微波源(12)、微波调制器(13)、微波天线(14)、双色片(15)、荧光探测器(16)、控制显示系统(17)；A method for multi-physical parameter sensing based on a device for multi-physical parameter sensing of optical tweezers and spin defects, characterized in that the device comprises a first laser (1), a second laser (2), a first Light modulator (3), second light modulator (4), beam splitter (5), beam combiner (6), objective lens (7), lens (9), first photodetector (10), two photodetectors (11), a microwave source (12), a microwave modulator (13), a microwave antenna (14), a dichroic film (15), a fluorescence detector (16), and a control display system (17);
    其中，第一激光器(1)出射捕获激光，经过第一光调制器(3)后进入分束器(5)，分出第一路光束和第二路光束；第一路光束进入第二光电探测器(11)，第二光电探测器(11)与控制显示系统(17)连接；Wherein, the first laser (1) emits the capture laser, passes through the first optical modulator (3) and then enters the beam splitter (5) to separate the first beam and the second beam; the first beam enters the second photoelectric The detector (11), the second photodetector (11) is connected with the control and display system (17);
    第二激光器(2)出射用于金刚石颗粒自旋缺陷激发的光信号，依次经过第二光调制器(4)、双色片(15)后，与所述的第二路光束一起经合束器(6)合束进入物镜(7)，第一 激光器(1)的光信号经物镜(7)汇聚后形成捕获微纳米级尺寸的金刚石颗粒的光阱，也即形成光镊，其前向光依次经过微纳米级尺寸的金刚石颗粒、透镜(9)进入用于金刚石颗粒位置探测的第一光电探测器(10)，第一光电探测器(10)与控制显示系统(17)连接；The second laser (2) emits an optical signal for excitation of spin defects of diamond particles, passes through the second optical modulator (4) and the dichroic plate (15) in sequence, and passes through the beam combiner together with the second beam of light (6) The combined beam enters the objective lens (7), and the optical signal of the first laser (1) is converged by the objective lens (7) to form an optical trap for capturing micro-nano-sized diamond particles, that is, optical tweezers are formed, and its forward light Entering the first photodetector (10) for detecting the position of the diamond particles through the diamond particles and the lens (9) of micro-nano scale in turn, and the first photodetector (10) is connected with the control display system (17);
    第二激光器(2)产生的激光经过经物镜(7)后汇聚成用于微纳米级尺寸的金刚石颗粒自旋缺陷激发的光信号，其照射金刚石颗粒的缺陷产生的荧光被物镜(7)收集，原路返回经过合束器(6)反射，再经过双色片(15)与原光路分离，被荧光探测器(16)收集；The laser light generated by the second laser (2) passes through the objective lens (7) and is converged into an optical signal for excitation of spin defects of diamond particles of micro-nano scale, and the fluorescence generated by irradiating the defects of the diamond particles is collected by the objective lens (7). , the original path returns and is reflected by the beam combiner (6), and then separated from the original optical path through the dichroic film (15), and collected by the fluorescence detector (16);
    微波源(12)产生的微波信号经过微波调制器(13)传输到微波天线(14)上，用于微纳米级尺寸的金刚石颗粒的自旋缺陷的量子态操纵；The microwave signal generated by the microwave source (12) is transmitted to the microwave antenna (14) through the microwave modulator (13), and is used for quantum state manipulation of spin defects of the diamond particles of micro-nano scale;
    所述的多物理参数传感的装置放在真空环境中使用，或者在物镜(7)形成的光阱区域设置真空腔；The device for sensing multiple physical parameters is used in a vacuum environment, or a vacuum cavity is set in the light trap area formed by the objective lens (7);
    控制显示系统(17)用于整个装置中各信号源的输出控制以及光电信号的采集和处理，从而得到各个物理参数；The control and display system (17) is used for the output control of each signal source in the whole device and the collection and processing of photoelectric signals, thereby obtaining each physical parameter;
    所述方法具体包括如下步骤：The method specifically includes the following steps:
    首先开启第一激光器(1)形成光阱，将含有自旋缺陷的微纳米级尺寸的金刚石颗粒悬浮在光阱中，通过如下操作得到各个物理参数：First, turn on the first laser (1) to form an optical trap, suspend diamond particles of micro-nano scale containing spin defects in the optical trap, and obtain various physical parameters through the following operations:
    根据第一光电探测器(10)和第二光电探测器(11)探测到的金刚石颗粒运动引起的光强变化，追踪颗粒在光阱中的运动过程，进而实现对环境力场和直线加速度场的探测；According to the light intensity change caused by the movement of the diamond particles detected by the first photodetector (10) and the second photodetector (11), the movement process of the particles in the optical trap is tracked, thereby realizing the environmental force field and linear acceleration field. detection;
    通过第二激光器(2)出射的光信号激发金刚石颗粒的自旋缺陷，使之发射荧光，荧光探测器(16)收集荧光信号，利用微波扫描共振，探测金刚石颗粒荧光的强弱变化，得到自旋基态的能级变化，进而得到金刚石颗粒所在位置的磁场强度；The spin defect of the diamond particle is excited by the optical signal emitted by the second laser (2), so that it emits fluorescence, the fluorescence detector (16) collects the fluorescence signal, and uses microwave scanning resonance to detect the intensity change of the diamond particle's fluorescence, and obtains the self- The energy level of the spin ground state changes, and then the magnetic field strength at the location of the diamond particles is obtained;
    通过第二激光器(2)出射的光信号激发金刚石颗粒中的自旋缺陷，使之发射荧光，荧光探测器(16)收集荧光信号，利用微波扫描共振，探测金刚石颗粒荧光的强弱变化，得到自旋基态的能级变化，进而得到金刚石颗粒所在位置的温度；或者直接通过探测金刚石颗粒的自旋缺陷的激发态与基态能极差对应的荧光光谱变化，得到金刚石颗粒所在位置的温度。The spin defect in the diamond particle is excited by the optical signal emitted by the second laser (2), so that it emits fluorescence, the fluorescence detector (16) collects the fluorescence signal, and uses microwave scanning resonance to detect the intensity change of the diamond particle's fluorescence, thus obtaining The energy level of the spin ground state changes, and then the temperature at the location of the diamond particles is obtained; or the temperature at the location of the diamond particles is obtained directly by detecting the fluorescence spectrum change corresponding to the energy difference between the excited state of the spin defect of the diamond particle and the ground state.
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