CN108385163A - Diamond crystal and inertia motion measuring device based on diamond quantum defect center - Google Patents
Diamond crystal and inertia motion measuring device based on diamond quantum defect center Download PDFInfo
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- CN108385163A CN108385163A CN201710154562.5A CN201710154562A CN108385163A CN 108385163 A CN108385163 A CN 108385163A CN 201710154562 A CN201710154562 A CN 201710154562A CN 108385163 A CN108385163 A CN 108385163A
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- 239000010432 diamond Substances 0.000 title claims abstract description 78
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 78
- 239000013078 crystal Substances 0.000 title claims abstract description 50
- 230000033001 locomotion Effects 0.000 title claims abstract description 32
- 230000007547 defect Effects 0.000 title claims abstract description 31
- 230000003287 optical effect Effects 0.000 claims abstract description 31
- 238000004435 EPR spectroscopy Methods 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims description 38
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 25
- 230000001678 irradiating effect Effects 0.000 claims description 6
- 238000005259 measurement Methods 0.000 abstract description 6
- 238000003384 imaging method Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 11
- 230000001133 acceleration Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 230000005284 excitation Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000005358 geomagnetic field Effects 0.000 description 4
- 125000004433 nitrogen atom Chemical group N* 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000005283 ground state Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000387 optically detected magnetic resonance Methods 0.000 description 2
- OEMCLQLAWYKPRK-OQLLNIDSSA-N N-[(E)-(5-bromo-2-hydroxyphenyl)methylideneamino]benzenesulfonamide Chemical compound Oc1ccc(Br)cc1\C=N\NS(=O)(=O)c2ccccc2 OEMCLQLAWYKPRK-OQLLNIDSSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000002189 fluorescence spectrum Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000001646 magnetic resonance method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- ZRHANBBTXQZFSP-UHFFFAOYSA-M potassium;4-amino-3,5,6-trichloropyridine-2-carboxylate Chemical compound [K+].NC1=C(Cl)C(Cl)=NC(C([O-])=O)=C1Cl ZRHANBBTXQZFSP-UHFFFAOYSA-M 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 239000011034 rock crystal Substances 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V3/00—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation
- G01V3/40—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation specially adapted for measuring magnetic field characteristics of the earth
Abstract
The present invention discloses a kind of inertia motion measuring device based on diamond quantum defect center.Described device includes:Diamond crystal, microwave antenna, electromagnetic coil, laser, optical sensor and signal processor;Wherein, the diamond crystal includes the first area for being respectively provided with several defect centers NV, second area and third region, projection non-overlapping copies of first, second, and third region at least one perspective plane;The imaging plane of the optical sensor is parallel with the perspective plane, for sense because first, second, and third region respectively the defect centers NV electron spin resonance generation optical signal;The signal processor is used to handle the optical signal of the optical sensor sensing.After implementing the present invention, same diamond crystal can be utilized to sense multiple inertia motion parameters simultaneously, relative to conventional inertia sensor, the present invention has higher integrated level, stability and measurement accuracy.
Description
Technical field
The technology that diamond quantum defect center measures inertia motion parameter is the present invention relates to the use of, is especially used for simultaneously
Measure the diamond crystal of multiple inertia motion parameters and the inertia motion measuring device using the diamond crystal.
Background technology
With unmanned plane, internet of things equipment in the ascendant and various, the machine man-based development of pilotless automobile, work
More stringent requirements are proposed for the volume of inertia motion sensor, precision, stability and integrated level for industry.And conventional inertia passes
Sensor is increasingly difficult to there are many limitations to meet actual needs.
Diamond nitrogen vacancy center (centers Nitrogen-Vacancy center, NV) is common in diamond crystal
Defects, the vacancy on a nitrogen-atoms and neighboring lattice points by replacing carbon atom in lattice are constituted.This defect
Structure forms unique quantum level:In the case of no external electromagnetic field, it is decomposed into m_s=0's according to electron spin
The energy level of energy level and m_s=+1 or -1, energy level spacing is 2.87GHz between the two.Scientific research discovery, the centers NV quantum level
Structure is all highly sensitive to magnetic field, electric field, external force, acceleration and rotation.For example, stress can make the energy level at the centers NV shift
And mixing, acceleration and linear movement can be derived by measuring this energy level variations by optical signalling.Simultaneously as Buddha's warrior attendant
The excellent physical characteristic of stone, this quantum level structure (including at room temperature) can keep stablizing within a wide temperature range,
More inertia motions based on diamond quantum defect with high integration, high stability, high-precision, small size are allowed in this way
Parameter detecting technology is possibly realized.
Invention content
It is an advantage of the invention to provide a kind of diamond for being used for while measuring multiple inertia motion parameters is brilliant
Body.
The present invention is achieved through the following technical solutions:Construct a kind of diamond crystal, which is characterized in that the diamond is brilliant
Body includes the multiple first areas for being respectively provided with several defect centers NV, multiple second areas and multiple third regions, and described
One, second and projection non-overlapping copies of the third region at least one perspective plane.
Further, the diamond crystal include substrate, it is multiple by the outwardly extending pedestal of substrate and multiple by pedestal
Outwardly extending ennation, and the first area is located in the ennation, and the second area is located in the pedestal,
The third region is located in the substrate.
Optionally, the ennation is bullet.
Preferably, the first area is located at the top of the ennation.
It is a further object of the invention to provide it is a kind of and meanwhile measure multiple inertia motion parameters based on diamond amount
The inertia motion measuring device of sub- defect center.
The present invention is achieved through the following technical solutions:Construct a kind of inertia motion survey based on diamond quantum defect center
Measure device, which is characterized in that described device includes:Diamond crystal, for the microwave to the diamond crystal irradiating microwaves
Antenna, the electromagnetic coil for generating stationary magnetic field, laser, optical sensor for irradiating laser to the diamond crystal
And signal processor;Wherein, the diamond crystal includes the first area for being respectively provided with several defect centers NV, the secondth area
Domain and third region, projection non-overlapping copies of first, second, and third region at least one perspective plane;The light passes
Sensor be used for sense because first, second, and third region respectively the defect centers NV electron spin resonance generate light believe
Number;The signal processor is used to handle the optical signal of the optical sensor sensing.
Preferably, the diamond crystal include substrate, it is multiple from the outwardly extending pedestal of substrate and it is multiple from pedestal to
The ennation of outer extension, and the third region is located in the substrate, and the second area is located in the pedestal, described
First area is located in the ennation.
Preferably, the ennation can be bullet.Since the spot size that bullet bottom is connect with pedestal is smaller,
Therefore base interior easy tos produce larger stress under the influence of extraneous acceleration, in order to measure.
Preferably, the third region is located at the top of the ennation.
Preferably, the electromagnetic coil is embedded in the substrate of the diamond crystal.
Preferably, the microwave antenna is embedded in the substrate of the diamond crystal.
The beneficial effects of the invention are as follows:1) centers NV in the first area of diamond ennation structural top are transported in rotation
To keep the fixed magnetic field of the opposite electromagnetic coil of conservation of angular momentum meeting to move when dynamic, to which energy level obtains extra phase, by right
The phase information of the nuclear spin of the nitrogen-atoms at the centers NV, which measures, can derive angular velocity information.It is obtained because of angular movement
The measurement of Spin Echo methods may be used in the extra phase obtained.2) connect with substrate since the pedestal is located at diamond ennation
Place is met, therefore the centers NV of the second area at pedestal can be made described second in the case where the external world accelerates by larger stress, stress
The energy level at the centers NV is shifted and is mixed in region.Therefore Spin Echo methods detection level shift may be used, to push away
Export acceleration and linear movement parameter.3) centers NV in the third region in diamond substrate can be used for measuring earth's magnetic field
And temperature change.The centers NV of diamond substrate will not be influenced by moving, and geomagnetic field intensity is proportional to the centers NV of substrate
Energy level difference, so as to by the distance of two troughs of ESR under continuous microwave, measure earth's magnetic field absolute value, earth's magnetic field letter
Breath can be used as absolute location information for positioning.Since the first, second, and third region is in the imaging plane of sensor
Non-overlapping copies are projected, therefore sensor can capture the fluorescence that the first, second, and third region is respectively sent out simultaneously, without going out
It now interferes with each other, therefore device can utilize the diamond crystal to measure the inertia such as acceleration, angular speed and earth's magnetic field simultaneously
Kinematic parameter.
Description of the drawings
Fig. 1 is diamond crystal structures schematic diagram according to an embodiment of the invention;
Fig. 2 is the schematic diagram of projection of the diamond crystal in perspective plane in Fig. 1.;
Fig. 3 is the inertia motion measuring device according to an embodiment of the invention based on diamond quantum defect center
Structural schematic diagram.
Figure label meaning is as follows:
Diamond crystal 10;
Bullet 101;
Pedestal 102;
Substrate 103;
Fluorescence 104;
First area 111;
Second area 112;
Third region 113;
Perspective plane 120;
Projection 121;
Microwave antenna 20;
Electromagnetic coil 30;
Laser 40;
Laser 401;
Optical sensor 50;
Optical element 60;
Signal processor 80.
Specific implementation mode
Below in conjunction with attached drawing in the embodiment of the present invention, technical solution in the embodiment of the present invention carries out clear, complete
Ground describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Usually exist
The component of the embodiment of the present invention described and illustrated in attached drawing can be arranged and be designed with a variety of different configurations herein.Cause
This, the detailed description of the embodiment of the present invention to providing in the accompanying drawings is not intended to limit claimed invention below
Range, but it is merely representative of the selected embodiment of the present invention.Based on the embodiment of the present invention, those skilled in the art are not doing
The every other embodiment obtained under the premise of going out creative work, shall fall within the protection scope of the present invention.
Fig. 1 is diamond crystal structures schematic diagram according to an embodiment of the invention.
As shown in Figure 1, diamond crystal 10 includes bullet 101, pedestal 102 and substrate 103.Diamond crystal 10 includes
It is respectively provided with first area 111, second area 112 and the third region 113 of several defect centers NV, with reference to Fig. 2, first
121 non-overlapping copies of projection of region 111, second area 112 and third region 113 at least one perspective plane 120.At some
In embodiment, diamond crystal 10 includes substrate 103, multiple by 103 outwardly extending pedestal 102 of substrate and multiple by pedestal
102 outwardly extending bullets 101, and third region 111 is located in substrate 103, and second area 112 is located in pedestal 102,
First area 113 is located in bullet 101.Since the spot size that 101 bottom of bullet is connect with pedestal 102 is smaller,
Under the influence of extraneous acceleration, larger stress is easy tod produce inside pedestal 102, convenient for measuring, it is advantageous to use bullet
101.It is easily understood that the ennation of other shapes can also be used to substitute bullet 101.
Diamond crystal 10 can by growth, depositing operation be formed on substrate 103 multiple pedestals and bullet 101 come
It realizes, 103 size of substrate can be about 1mm x 1mm x 100um.Due to the different location directly on the big substrate 103 of monoblock
Bullet-pedestal the diamond lattic structure for growing the proper height that can be matched with the wavefront of laser 401 with detection is more difficult to
It realizes, entire substrate 103 can also be divided into fritter one by one, be given birth to respectively on 103 fritter of a part of substrate wherein
Then long bullet-pedestal diamond lattic structure is placed on according to the height to grow out on its suitable position.Also, according to need
The defect centers NV, the defect centers diamond NV of these different zones are formed by doping in bullet, pedestal and substrate 103
It is respectively used to measure different inertia motion parameters.
Since pedestal 102 is located at diamond ennation and 103 junction of substrate, the second area 112 at pedestal 102
The centers NV the energy level at the centers NV in second area 112 can be made to shift by larger stress, stress in the case where the external world accelerates
And mixing.Therefore Spin Echo methods detection level shift may be used, to derive acceleration and linear movement parameter.
For the ease of measuring angular speed parameter, first area 111 is preferably placed at the top of bullet 101.It in this way can be
Larger momentum is generated during angular movement.The centers NV in the first area at 101 top of bullet of diamond crystal 10 exist
To keep the fixed magnetic field movement of conservation of angular momentum meeting electromagnetic coil 30 relatively when rotary motion, to which energy level obtains additional phase
Position, angular velocity information can be derived by being measured by the phase information of the nuclear spin of the nitrogen-atoms to the centers NV.Cause
Angular movement and the measurement of Spin Echo methods still may be used in the extra phase that obtains.
The centers NV in third region 113 in diamond substrate 103 can be used for measuring earth's magnetic field and temperature change.Gold
The centers NV of hard rock substrate 103 will not be influenced by moving, and geomagnetic field intensity is proportional to the energy level at the centers NV of substrate 103
Difference, so as to by the distance of two troughs of ESR under continuous microwave, measure earth's magnetic field absolute value, geomagnetic field information can be with
As absolute location information for positioning.
Fig. 2 is the schematic diagram of projection of the diamond crystal 10 in perspective plane in Fig. 1.First area 111, second area
112 and projection 121 of the third region 113 in perspective plane 120 be not overlapped mutually.When optical sensor 50 is parallel with perspective plane 120
When, the picture non-overlapping copies of first area 111, second area 112 and third region 113 in the imaging plane of sensor, therefore
Optical sensor 50 can capture the fluorescence 104 that first area 111, second area 112 and third region 113 are respectively sent out simultaneously,
Without interfering with each other, therefore diamond crystal 10 can be used for measuring the inertia such as acceleration, angular speed and earth's magnetic field fortune
Dynamic parameter.
Fig. 3 is the inertia motion measuring device according to an embodiment of the invention based on diamond quantum defect center
Structural schematic diagram.As shown in figure 3, the inertia motion measuring device based on diamond quantum defect center of the present invention includes:Gold
Hard rock crystal 10, for the microwave antenna 20 to 10 irradiating microwaves of diamond crystal, the electromagnetic coil for generating stationary magnetic field
30, laser 40, the optical sensor 50 for irradiating laser 401 to diamond crystal 10, optical element 60 and signal processing
Device 80.
Diamond crystal 10 includes first area 111, second area 112 and the third for being respectively provided with several defect centers NV
Region 113, the projection non-overlapping copies of first area 111, second area 112 and third region 113 on the projection surface;Laser 40
The laser 401 of generation irradiates diamond crystal 10 and excites the defect centers NV in diamond vigilant 10 to excite electron spin total
It shakes and generates fluorescence 104.Optical element 60 may include spectroscope and optical filter, the laser that spectroscope is used to generate in laser 40
401 are refracted to diamond crystal direction, and optical filter is used to filter out the optical signal other than the fluorescence 104 of electron spin resonance generation.
The sensitized lithography of optical sensor 50 is parallel with perspective plane 120, for sensing because of first area 111, second area 112 and third area
The fluorescence 104 that the electron spin resonance of the 113 respective defect centers NV of domain generates;Signal processor 80 is for handling optical sensor 50
Sensing result calculates separately out corresponding inertia motion parameter according to algorithm above-mentioned.
In some embodiments, electromagnetic coil 30 and microwave antenna 20 can be embedded in the substrate 103 of diamond crystal 10
In.To further increase the integrated level and reliability of system.
The fundamental measurement principle of the present invention is, the 532nm laser 401 sent out using laser 40 is by the centers NV from quantum base
State | g>(i.e. track singlet-Spin-triplet) is excited by absorbing (off-resonance) pump of a phonon off-resonance to it
State | e>.Then the atom in excitation state will attempt to rebuild ANALOGY OF BOLTZMANN DISTRIBUTION and relaxation (optical relaxation) returns
To ground state, launch~the fluorescence 104 of 640-800nm in the process.This optical signal is then after spectroscope, optical filter etc.
It is sensed by optical sensor 50.
On the other hand, two-phonon process can keep spin conservation, therefore in excitation state | e, ms=0>State and | e, ms=+-1
>State can distinguish relaxation and arrive | g, ms=0>State and | g, ms=+-1>State, but | e, ms=+-1>Have more can first relaxations to metastable
State | s>Ground state is arrived again, and elapsed-time standards is longer.After the excitation of laser 401, the fluorescence intensity of the two can differ 30%, therefore can be with
How much initial stage after the excitation of laser 401 is distinguished according to the light intensity of fluorescence 104 in ms=0 states or ms=+-1 states.The electricity of substrate
The stationary magnetic field that magnetic coil 30 generates can detach ms=-1 and ms=+1 states, this is Zeemen effect (Zeeman Effect).This
When optical detection magnetic resonance method, i.e. Optically Detected Magnetic Resonance (ODMR) method may be used,
The microwave antenna 20 being embedded in using substrate is emitted microwave signal irradiation diamond crystal 10 and adjusts microwave frequency, is measured simultaneously
Electron spin resonance Electron Spin Resonance (EPR) fluorescence intensity.In no external magnetic field, when microwave frequency and
When ms=0 states are identical as the difference on the frequency D=2.87GHz of ms=+-1 states, fluorescence spectrum can weaken (because more polyatom is by microwave
It is transferred to ms=+-1 states);And if there is externally-applied magnetic field, there will be two troughs by EPR, are spaced corresponding Zeeman Effect and generate
Ms=-1 and ms=+1 state energy level differences.
Continuous microwave or Ramsey the or Spin Echo with different pulse microwave sequences can be used in the specific energy shift that measures
Method.Ramsey methods be in detectable signal are not in atom by laser 401 again blowback compared to the benefit of continuous microwave
The interference of excitation state, therefore time of measuring tau is determined by decoherence time (decoherence time) T*_2 of electron spin,
In musec order under this room temperature.The deficiency of Ramsey methods is the shadow that measuring signal nevertheless suffers from stationary magnetic field itself fluctuation
It rings.And the method for Spin Echo be then the increase in a Pi pulse can eliminate external magnetic field fluctuation interference, precision determine
Determine that this is up in musec orders up to a hundred in AC decoherence times T_2 of electron spin.
In conclusion the small-sized IMU elements (~1mmx1mmx100um) based on the centers NV quantum effect of the present invention, energy
Enough while realizing various linear, angular motion and absolute position high-acruracy surveys, stress measurement precision<1aN/Hz1/2, angle
Measurement accuracy<10-4degree/sHz1/2, geomagnetic field measuring precision<1pT/Hz1/2, while controlling temperature drift<100mK/
Hz1/2。
Although an embodiment of the present invention has been shown and described, it will be understood by those skilled in the art that:Not
In the case of being detached from the principle of the present invention and objective a variety of change, modification, replacement and modification can be carried out to these embodiments, this
The range of invention is limited by claim and its equivalent.
Claims (10)
1. a kind of diamond crystal, which is characterized in that the diamond crystal includes be respectively provided with several defect centers NV more
A first area, multiple second areas and multiple third regions, first, second, and third region is at least one perspective plane
On projection non-overlapping copies.
2. diamond crystal according to claim 1, which is characterized in that the diamond crystal includes substrate, Duo Geyou
The outwardly extending pedestal of substrate and multiple by the outwardly extending ennation of pedestal, and the first area is located at the ennation
In, the second area is located in the pedestal, and the third region is located in the substrate.
3. diamond crystal according to claim 2, which is characterized in that the ennation is bullet.
4. diamond crystal according to claim 2, which is characterized in that the third region is located at the top of the ennation
Portion.
5. a kind of inertia motion measuring device based on diamond quantum defect center, which is characterized in that
Described device includes:Diamond crystal, for the diamond crystal irradiating microwaves microwave antenna, for generating perseverance
The electromagnetic coil of fixed-field, laser, optical sensor and signal processor for irradiating laser to the diamond crystal;
Wherein, the diamond crystal includes the first area for being respectively provided with several defect centers NV, second area and third area
Domain, projection non-overlapping copies of first, second, and third region at least one perspective plane;
The optical sensor is used to sense the electron spin resonance because of the respective defect centers NV in first, second, and third region
The optical signal of generation;
The signal processor is used to handle the optical signal of the optical sensor sensing.
6. diamond crystal according to claim 7, which is characterized in that the diamond crystal includes substrate, Duo Geyou
The outwardly extending pedestal of substrate and multiple by the outwardly extending ennation of pedestal, and the third region is located at the substrate
In, the second area is located in the pedestal, and the first area is located in the ennation.
7. the inertia motion measuring device according to claim 8 based on diamond quantum defect center, which is characterized in that
The ennation is bullet.
8. the inertia motion measuring device according to claim 8 based on diamond quantum defect center, which is characterized in that
The third region is located at the top of the ennation.
9. the inertia motion measuring device according to claim 8 based on diamond quantum defect center, which is characterized in that
The electromagnetic coil is embedded in the substrate of the diamond crystal.
10. the inertia motion measuring device according to claim 1 based on diamond quantum defect center, feature exist
In the microwave antenna is embedded in the substrate of the diamond crystal.
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CN114279590A (en) * | 2021-12-28 | 2022-04-05 | 哈尔滨工业大学 | Temperature sensor and temperature measuring device based on diamond NV color center |
WO2022121116A1 (en) * | 2020-12-08 | 2022-06-16 | 之江实验室 | Optical tweezer and spin defect-based multi-physical parameter sensing device and method |
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