WO2022119165A1 - 자연 대류 유도형 방열판 및 이를 구비한 반도체 패키지 - Google Patents
자연 대류 유도형 방열판 및 이를 구비한 반도체 패키지 Download PDFInfo
- Publication number
- WO2022119165A1 WO2022119165A1 PCT/KR2021/016404 KR2021016404W WO2022119165A1 WO 2022119165 A1 WO2022119165 A1 WO 2022119165A1 KR 2021016404 W KR2021016404 W KR 2021016404W WO 2022119165 A1 WO2022119165 A1 WO 2022119165A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- heat sink
- silicon die
- substrate
- openings
- heat
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims description 38
- 230000006698 induction Effects 0.000 title description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 47
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 47
- 239000010703 silicon Substances 0.000 claims abstract description 47
- 239000000758 substrate Substances 0.000 claims abstract description 47
- 238000001816 cooling Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 9
- 238000007599 discharging Methods 0.000 claims 1
- 230000017525 heat dissipation Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000004100 electronic packaging Methods 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012552 review Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000012761 high-performance material Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3675—Cooling facilitated by shape of device characterised by the shape of the housing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3672—Foil-like cooling fins or heat sinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/467—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing gases, e.g. air
Definitions
- the present invention relates to a natural convection induction type heat sink and a semiconductor package having the same.
- the electronic packaging distributes power, distributes signals, dissipates heat, and performs functions of protecting the semiconductor chip from the outside.
- the function of effectively dissipating heat from the semiconductor chip is one of the important functions of electronic packaging.
- the increase in heat generated from the devices acts as a cause of reducing the reliability of semiconductor devices.
- a problem of shortening the lifespan of the electronic packaging device may occur by increasing the thermal stress applied to the solder and the device connecting the materials.
- the present invention provides a natural convection induction heat sink that easily dissipates heat generated from a silicon die by deforming the external shape of the heat sink, and a semiconductor package having the same.
- a heat sink which is a feature of the present invention for achieving the technical problem of the present invention
- It includes a heat sink body that is larger than or equal to the area of the substrate, is formed in the center of the heat sink body, and is in direct or indirect contact with the silicon die formed on the substrate, is formed outside the heat sink body, It includes a plurality of fixing parts in direct contact with the substrate, and a plurality of openings formed between the plurality of fixing parts on the outside of the heat sink body and forming a space at a predetermined height from the substrate.
- the heat sink body may be implemented in a rectangular shape.
- the plurality of fixing parts may be respectively formed on four sides of the outer side of the heat sink body.
- the plurality of openings may be respectively formed at four vertices of the outer edge of the heat sink body.
- the plurality of fixing parts may be respectively formed at four vertices of the outer edge of the heat sink body.
- the plurality of openings may be respectively formed on four sides of the outer side of the heat sink body.
- At least one of the plurality of openings may be an inlet through which wind generated by a cooling fan is introduced, and at least one of the plurality of openings may be an outlet through which the introduced wind is discharged together with the heat of the silicon die. have.
- the outlet may radiate heat generated in the silicon die to the outside through natural convection as a difference between a temperature of the silicon die and a temperature difference around the silicon die.
- Another feature of the present invention for achieving the technical problem of the present invention is a semiconductor package
- a rectangular flat substrate having a circuit pattern, a silicon die formed on the substrate and electrically connected to the substrate, and a heat sink formed on the silicon die and dissipating heat generated in the silicon die to the outside;
- the heat sink is formed between a plurality of fixing parts generated by direct contact with the substrate by a predetermined length or a partial length of four sides based on four vertices of the outer edge of the heat sink, and each fixing part, and is formed between the substrate It includes a plurality of openings formed at a height apart.
- a cooling fan operable to introduce wind into any one of the plurality of openings may be further included.
- the heat sink through a contact region in direct or indirect contact with the silicon die, radiates heat generated in the silicon die to the outside through natural convection with a temperature difference between the temperature of the silicon die and the periphery of the silicon die, Wind flowing into at least one of the openings of the , may be discharged together with the heat of the silicon die through at least one of the plurality of openings.
- the heat dissipation effect of the semiconductor chip can be improved by applying natural convection and forced convection by a cooling fan at the same time by applying an open shape structure without changing the material and size of the heat sink.
- FIG. 1 is an exemplary view of a semiconductor package to which a general hermetic heat sink is applied.
- FIG. 2 is an exemplary view of a semiconductor package to which a general open heat sink is applied.
- FIG 3 is an exemplary view illustrating a semiconductor package according to an embodiment of the present invention.
- FIGS. 4 and 5 are exemplary views of an open heat sink according to an embodiment of the present invention.
- FIG. 6 is an exemplary view illustrating a heat flow in a heat sink according to an embodiment of the present invention.
- FIGS. 1 and 2 Before describing the embodiment of the present invention, a general heat sink will be first described with reference to FIGS. 1 and 2 .
- FIG. 1 is an exemplary view of a semiconductor package to which a general hermetic heat sink is applied.
- a silicon die 12 which is a semiconductor chip, is attached to a substrate 11 .
- the heat sink 13 is configured to be in direct or indirect contact with the silicon die 12 . Since the silicon die 12 and the heat sink 13 are in contact, heat generated from the silicon die 12 may be transferred through the contact region to be radiated to the outside.
- the heat sink 13 is in contact with the substrate 11 and four surfaces. Accordingly, conductive heat generated in the silicon die 12 may be transferred to the substrate 11 through the contact surfaces of the four surfaces in contact with the substrate 11 to be radiated to the outside.
- a cooling fan 20 added for heat dissipation is implemented as a set with the semiconductor package 10 .
- the cooling fan 20 due to the forced convection of the cooling fan 20 , there is a restriction in heat dissipation inside the semiconductor package 10 .
- FIG. 2 is an exemplary view of a semiconductor package to which a general open heat sink is applied.
- the open heat sink 32 As shown in FIG. 2 , two facing surfaces of the open heat sink 32 are in close contact with the substrate 31 , and the other facing two surfaces are separated from the substrate 31 to form an open area.
- the semiconductor package 30 to which such an open heat sink 32 is applied can expect the effectiveness of natural convection and forced convection by a cooling fan compared to the semiconductor package 10 provided with the hermetic heat sink 13 of FIG. 1 described above. .
- the structure of the open type heat sink is maintained through the heat sink having the deformed fixed points on four sides and the heat sink formed with four openings, while the fixing portion between the semiconductor package and the heat sink is increased, so that distortion in the low and high temperature regions
- An open heat sink that can minimize the occurrence is proposed.
- FIG 3 is an exemplary view illustrating a semiconductor package according to an embodiment of the present invention.
- the semiconductor package 100 is provided with a circuit pattern like a general substrate, a rectangular flat substrate 111, epoxy or adhesive and a silicon die 112 formed on a substrate 111 with an adhesive member such as a film.
- the silicon die 112 may be electrically connected to the substrate 111 using a wire (not shown) or may be electrically connected to the substrate 111 by a flip-chip bonding method.
- the open heat sink includes a heat sink body 113 and a fixing module 114 .
- the heat sink body 113 is larger than or equal to the area of the substrate 111 and is installed on the upper surface of the silicon die 112 to protect the silicon die 112 .
- the heat sink is provided at the bottom of the rectangular heat sink body 113 and the heat sink body 113, and a plurality of fixing parts 114 of a certain length fixed to the substrate 111 and It is illustrated as including a plurality of openings 115 that are not fixed to the substrate 111 .
- the heat sink body 113 will be described as an example of a quadrangle, but if it is installed on the upper surface of the silicon die 112 and is larger than or equal to the area of the substrate 111, it can also be implemented as a polygon.
- the heat sink body 113 is described as an example in which nickel (Ni) is coded on a copper (Cu) material, a separate restriction is not placed on the material of the heat sink body 113 .
- the section at the position 1 in Fig. 3 (a) is as shown in Fig. 3 (b), and the section at the position 2 in Fig. 3 (a) is as shown in Fig. 3 (c).
- the fixing part 114 is provided at the position, so that the fixing part 114 is positioned between the substrate 111 and the heat sink body 113 as shown in FIG. 3(b).
- the position 2 is implemented as an open part 115, a space is formed between the substrate 111 and the heat sink body 113 as shown in FIG.
- FIGS. 4 and 5 are exemplary views of an open heat sink according to an embodiment of the present invention.
- the open heat sink of the semiconductor package 100 has a heat sink body 113 having a rectangular shape that is larger than or equal to the area of the substrate 111 .
- Fixing parts 114 and 114-1 to 114-4 of a certain length are formed in certain areas of four sides of the heat sink body 113, and the fixing parts 114 are formed based on the vertices of the heat sink body 113.
- Open portions 115 and 115-1 to 115-4 are formed up to the formed side.
- the fixing part 114 is a region in direct contact with the substrate 111 and is formed to have a predetermined length based on the center of each side of the heat sink body 113 .
- the fixing part 114 is formed with a predetermined length based on the center of each side of the heat sink body 113 as an example, but it may be formed close to one vertex.
- the fixing part 114 is formed at four points of the heat sink body 113 as an example, but it may be formed at four or more points.
- the opening 115 does not come into contact with the substrate 111 so that heat generated from the silicon die 112 is naturally convected to the outside and discharged. To this end, the opening 115 is implemented to be separated from the substrate 111 by a predetermined height.
- At least one of the first openings 115 - 1 to the fourth openings 115 - 4 is an inlet through which wind generated by a cooling fan installed for forced convection is introduced, and the other opening is the silicon die 112 . ) is the outlet where the heat generated is discharged together with the wind.
- the first opening 115-1 and the third opening 115-3 are implemented to face each other, and the second opening 115-2 and the fourth opening 115-4 are An example implemented in a form facing each other will be described. However, it may be implemented by varying the length or position of the opening according to the wind direction of the cooling fan installed for forced convection.
- the first part of the first opening 115-1 is formed by the first fixing part 114- around the vertex of the heat sink body 113. 1), and the second part of the first opening 115-1 is formed to be connected to one side of the second fixing part 114-2. Similarly, the second opening 115-2 to the fourth opening 115-4 are formed in the same shape.
- the length of the fixed portion or the height of the open portion is not limited to any one numerical value.
- fixing parts 114 and 114-5 to 114-8 of a certain length are formed based on the vertices of the heat sink body 113 of the semiconductor package 100 according to another embodiment. and opening portions 115 and 115-5 to 115-8 are formed in certain areas of four sides of the heat sink body 113 .
- the openings 115 and 115 - 5 to 115 - 8 do not come into contact with the substrate 211 so that heat generated from the silicon die 212 is naturally convected to the outside and discharged. To this end, the opening 115 is implemented to be separated from the substrate 211 by a predetermined height.
- the opening 115 is formed to have a predetermined length based on the center of each side of the heat sink body 113 .
- the opening 115 is formed with a predetermined length based on the center of each side of the heat sink body 113 as an example, but may be formed close to one vertex.
- the fixing parts 114 and 114-5 to 114-8 are regions in direct contact with the substrate 111 and are formed to have a predetermined length based on the vertex of the heat sink body 113 .
- the first fixing part 114-5 has a vertex portion of the heat sink body 113 as a center, and the first part is the first opening part 115- 5), and the second part of the first fixing part 114-5 is formed to be connected to one side of the second opening part 115-6.
- the second fixing part 114-6 to the fourth fixing part 114-8 are formed in the same shape.
- FIG. 6 a case in which a heat sink having an open portion implemented at a vertex is included in a semiconductor package will be described as an example.
- FIG. 6 is an exemplary view illustrating a heat flow in a heat sink according to an embodiment of the present invention.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
Description
Claims (11)
- 기판의 면적보다 크거나 동일하게 구현되어 있는 방열판 바디를 포함하고,상기 방열판 바디의 중심에 형성되며, 상기 기판 상에 형성된 실리콘 다이와 직간접적으로 접촉되는 접촉 영역,상기 방열판 바디의 외곽에 형성되며, 상기 기판에 직접 접촉되는 복수의 고정부들, 그리고상기 방열판 바디의 외곽에 상기 복수의 고정부들 사이에 형성되며, 상기 기판으로부터 일정 높이의 공간을 형성되는 복수의 개방부들을 포함하는 방열판.
- 제1항에 있어서,상기 방열판 바디는 사각형으로 구현되는, 방열판.
- 제2항에 있어서,상기 복수의 고정부들은,상기 방열판 바디의 외곽의 네 변에 각각 형성되는, 방열판.
- 제3항에 있어서,상기 복수의 개방부들은,상기 방열판 바디의 외곽의 네 꼭지점에 각각 형성되는, 방열판.
- 제2항에 있어서,상기 복수의 고정부들은,상기 방열판 바디의 외곽의 네 꼭지점에 각각 형성되는, 방열판.
- 제5항에 있어서,상기 복수의 개방부들은,상기 방열판 바디의 외곽의 네 변에 각각 형성되는, 방열판.
- 제1항에 있어서,상기 복수의 개방부들 중 적어도 하나의 개방부는 냉각 팬에 의해 발생한 바람이 유입되는 입구이고,상기 복수의 개방부들 중 적어도 하나의 개방부는 상기 유입된 바람이 상기 실리콘 다이의 열과 함께 배출되는 출구인, 방열판.
- 제7항에 있어서,상기 출구는,상기 실리콘 다이의 온도와 상기 실리콘 다이의 주변의 온도 차로, 상기 실리콘 다이에서 발생된 열을 자연 대류를 통해 외부로 방출하는, 방열판.
- 회로 패턴이 구비되어 있으며 사각형의 평면인 기판,상기 기판 상이 형성되며 상기 기판과 전기적으로 접속되는 실리콘 다이,상기 실리콘 다이 상부에 형성되며 상기 실리콘 다이에서 발생한 열을 외부로 방출하는 방열판을 포함하고,상기 방열판은,상기 방열판의 외곽의 네 개의 꼭지점을 기준으로 일정 길이만큼 또는 네 변의 일부 길이가 상기 기판에 직접 접촉되어 생성된 복수의 고정부들과, 각 고정부들 사이에 형성되며 상기 기판으로부터 일정 높이 떨어져 형성되는 복수의 개방부들을 포함하는, 반도체 패키지.
- 제9항에 있어서,상기 복수의 개방부들 중 어느 하나의 개방부에 바람이 유입되도록 동작하는 냉각팬을 더 포함하는, 반도체 패키지.
- 상기 방열판은,상기 실리콘 다이와 직간접적으로 접촉되는 접촉 영역을 통해 상기 실리콘 다이의 온도와 상기 실리콘 다이의 주변의 온도 차로, 상기 실리콘 다이에서 발생된 열을 자연 대류를 통해 외부로 방출하고,상기 복수의 개방부들 중 적어도 하나의 개방부로 유입되는 바람이 상기 복수의 개방부들 중 적어도 하나의 개방부를 통해 상기 실리콘 다이의 열과 함께 배출하는, 반도체 패키지.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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JP2023533705A JP2023551930A (ja) | 2020-12-02 | 2021-11-11 | 自然対流誘導型放熱板およびこれを備えた半導体パッケージ |
US18/255,415 US20230386962A1 (en) | 2020-12-02 | 2021-11-11 | Natural convection induction heat slug design and semiconductor package equipped with the same |
DE112021006271.9T DE112021006271T5 (de) | 2020-12-02 | 2021-11-11 | Natürliche Konvektions-Induktions-Wärmeblockgestaltung und mit dieser ausgestattetes Halbleiterpaket |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
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KR10-2020-0167003 | 2020-12-02 | ||
KR20200167003 | 2020-12-02 | ||
KR1020210039958A KR102515014B1 (ko) | 2020-12-02 | 2021-03-26 | 자연 대류 유도형 방열판 및 이를 구비한 반도체 패키지 |
KR10-2021-0039958 | 2021-03-26 |
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WO2022119165A1 true WO2022119165A1 (ko) | 2022-06-09 |
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PCT/KR2021/016404 WO2022119165A1 (ko) | 2020-12-02 | 2021-11-11 | 자연 대류 유도형 방열판 및 이를 구비한 반도체 패키지 |
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US (1) | US20230386962A1 (ko) |
JP (1) | JP2023551930A (ko) |
DE (1) | DE112021006271T5 (ko) |
WO (1) | WO2022119165A1 (ko) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010258263A (ja) * | 2009-04-27 | 2010-11-11 | Funai Electric Co Ltd | 電子機器の放熱機構 |
KR20130058858A (ko) * | 2011-11-28 | 2013-06-05 | 삼성전자주식회사 | 모바일 장치용 반도체 패키지 |
KR20130095896A (ko) * | 2012-02-21 | 2013-08-29 | 주식회사 휘닉스소재 | 슬러그브릿지가 구비된 히트슬러그 |
JP2018116957A (ja) * | 2017-01-16 | 2018-07-26 | 日本電気株式会社 | 冷却装置および冷却方法 |
CN211062709U (zh) * | 2019-12-26 | 2020-07-21 | 惠州视维新技术有限公司 | 一种散热片及电路板散热装置 |
-
2021
- 2021-11-11 US US18/255,415 patent/US20230386962A1/en active Pending
- 2021-11-11 WO PCT/KR2021/016404 patent/WO2022119165A1/ko active Application Filing
- 2021-11-11 DE DE112021006271.9T patent/DE112021006271T5/de active Pending
- 2021-11-11 JP JP2023533705A patent/JP2023551930A/ja active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010258263A (ja) * | 2009-04-27 | 2010-11-11 | Funai Electric Co Ltd | 電子機器の放熱機構 |
KR20130058858A (ko) * | 2011-11-28 | 2013-06-05 | 삼성전자주식회사 | 모바일 장치용 반도체 패키지 |
KR20130095896A (ko) * | 2012-02-21 | 2013-08-29 | 주식회사 휘닉스소재 | 슬러그브릿지가 구비된 히트슬러그 |
JP2018116957A (ja) * | 2017-01-16 | 2018-07-26 | 日本電気株式会社 | 冷却装置および冷却方法 |
CN211062709U (zh) * | 2019-12-26 | 2020-07-21 | 惠州视维新技术有限公司 | 一种散热片及电路板散热装置 |
Also Published As
Publication number | Publication date |
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JP2023551930A (ja) | 2023-12-13 |
DE112021006271T5 (de) | 2024-01-18 |
US20230386962A1 (en) | 2023-11-30 |
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