WO2022114549A1 - Appareil de collecte de poussière fine du type à aspiration, écoénergétique, doté d'un filtre de réduction d'ozone - Google Patents

Appareil de collecte de poussière fine du type à aspiration, écoénergétique, doté d'un filtre de réduction d'ozone Download PDF

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Publication number
WO2022114549A1
WO2022114549A1 PCT/KR2021/015195 KR2021015195W WO2022114549A1 WO 2022114549 A1 WO2022114549 A1 WO 2022114549A1 KR 2021015195 W KR2021015195 W KR 2021015195W WO 2022114549 A1 WO2022114549 A1 WO 2022114549A1
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WO
WIPO (PCT)
Prior art keywords
reduction filter
frame
ozone reduction
ozone
suction
Prior art date
Application number
PCT/KR2021/015195
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English (en)
Korean (ko)
Inventor
이동훈
이병준
박진철
이민호
설동규
Original Assignee
(주)선재하이테크
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by (주)선재하이테크 filed Critical (주)선재하이테크
Publication of WO2022114549A1 publication Critical patent/WO2022114549A1/fr

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B03SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03CMAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/02Plant or installations having external electricity supply
    • B03C3/04Plant or installations having external electricity supply dry type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D46/00Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D46/00Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0027Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions
    • B01D46/0032Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions using electrostatic forces to remove particles, e.g. electret filters
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B03SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03CMAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34Constructional details or accessories or operation thereof
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B03SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03CMAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34Constructional details or accessories or operation thereof
    • B03C3/36Controlling flow of gases or vapour
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B03SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03CMAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34Constructional details or accessories or operation thereof
    • B03C3/40Electrode constructions
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B03SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03CMAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34Constructional details or accessories or operation thereof
    • B03C3/40Electrode constructions
    • B03C3/45Collecting-electrodes
    • B03C3/51Catch- space electrodes, e.g. slotted-box form
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B03SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03CMAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34Constructional details or accessories or operation thereof
    • B03C3/74Cleaning the electrodes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2257/00Components to be removed
    • B01D2257/10Single element gases other than halogens
    • B01D2257/106Ozone

Definitions

  • the present invention relates to an energy-saving suction type fine dust collecting device having an ozone reduction filter, and more particularly, it can collect fine dust generated during the process, and includes an ozone reduction filter to be generated during the dust collection process. It relates to an energy-saving suction type fine dust collecting device having an ozone reduction filter capable of removing ozone.
  • Electrostatic precipitators are actively used as a method of collecting suspended matter such as very fine particles of dust in a clean room for a display manufacturing process such as a semiconductor or LCD (Liquid Crystal Display device).
  • the principle of the electrostatic precipitator is to generate a corona discharge from an electrode, flow a gas containing dust in the space, and ionize it to collect and collect the ionized dust at each electrode.
  • Ozone has a great effect on product yield, quality and reliability by growing a natural oxide film on the wafer surface, especially in the diffusion process.
  • the electric dust collector may generate ozone during the dust collection process, and such ozone not only leads to product defects, but also has a problem that is harmful to the human body.
  • An object of the present invention is to solve the above problems, and it is equipped with a filter for reducing ozone that may be generated during the dust collection process, and an energy-saving suction type fine dust equipped with an ozone reduction filter that can minimize harmfulness to the human body. To provide a collection device.
  • an energy-saving suction type fine dust collecting device having an ozone reduction filter includes a cover housing in which a space is formed therein and a plurality of fan insertion holes are formed on one surface, and corresponding to the fan insertion hole.
  • a suction assembly including a suction fan formed at a position to guide the flow of air rearward, a first frame that is formed behind the suction assembly and is a frame having an internal space, and a plurality of holes arranged in a line inside the first frame
  • a collector electrode part including the perforated plate-shaped electrode, a second frame having a shape corresponding to the first frame, and a plurality of spaced apart and parallel to each other across the inside of the second frame are arranged to correspond to the center point of the hole
  • a cell assembly having an emitter electrode part including a wire electrode of Includes filters.
  • it further includes a protective panel formed of an insulating material formed behind the emitter electrode portion, a plurality of through-holes for guiding the air flow is formed.
  • the ozone reduction filter includes a pipe for transferring the air introduced through the suction fan, and reduces and removes the ozone introduced through the pipe.
  • an ozone reduction filter cover coupled to the outer surface of the cover housing in which the fan insertion hole is formed, wherein the ozone reduction filter cover has a first air inlet hole formed at a position corresponding to the fan insertion hole, and the ozone reduction filter cover is formed inside
  • An accommodating space bracket for accommodating the filter is formed, and the accommodating space bracket is characterized in that a second air inlet hole is formed at a position corresponding to the fan insertion hole and the first air inlet hole.
  • the energy-saving suction type fine dust collecting device having an ozone reduction filter according to the present invention includes an ozone reduction filter capable of removing ozone that may be generated during the electrostatic precipitation process, so that ozone generated during the electrostatic precipitation process is released into the air. Random emission can be prevented, and this has the effect of minimizing harm to the human body due to ozone.
  • FIG. 1 is a perspective view showing an energy-saving suction type fine dust collecting device having an ozone reduction filter according to the present invention.
  • FIG. 2 is a rear side view (a) and an upper side view (b) showing an energy-saving suction type fine dust collecting device equipped with an ozone reduction filter according to the present invention.
  • FIG 3 is an exploded perspective view illustrating the internal configuration of the cover housing of the energy-saving suction type fine dust collecting device having an ozone reduction filter according to the present invention.
  • FIG. 4 is a conceptual diagram for explaining a cell assembly constituting an energy-saving suction type fine dust collecting device having an ozone reduction filter according to the present invention.
  • FIG. 5 is an exploded perspective view illustrating the ozone reduction filter cover constituting the energy-saving suction type fine dust collecting device having the ozone reduction filter according to the present invention.
  • FIG. 6 is a conceptual diagram for explaining an ozone reduction filter constituting an energy-saving suction type fine dust collecting device having an ozone reduction filter according to the present invention.
  • FIG. 1 is a perspective view showing an energy saving suction type fine dust collecting device having an ozone reduction filter according to the present invention
  • FIG. 2 is an energy saving suction type fine dust collecting device having an ozone reducing filter according to the present invention. It is a side view (a) and an upper side view (b)
  • FIG. 3 is an exploded perspective view for explaining the internal configuration of the cover housing of the energy-saving suction type fine dust collecting device equipped with the ozone reduction filter according to the present invention.
  • the energy-saving suction type fine dust collecting device having an ozone reduction filter according to the present invention is largely divided into a cover housing 100 , a suction assembly 200 , a cell assembly 300 , a power supply unit 400 , and an ozone reduction filter 500 . ) is included.
  • the cover housing 100 has a space (not shown) formed therein, and a plurality of fan insertion holes 121 are formed on one surface.
  • the rear cover part 120 in which the plurality of fan insertion holes 121 are formed, and the front cover part (not shown) spaced apart from the rear cover part and a lower cover part (not shown) and a side cover part 130 and an upper part of the rear cover part 120 and the front cover part connecting the rear cover part 120 and the lower part and the side edges of the front cover part, respectively. and an upper cover part 110 formed on the .
  • the front cover part may have a frame-like shape in which a hollow part (not shown) is formed so that external air can be introduced into the cell assembly 300 to be described later.
  • the upper cover part 110 or the lower cover part may be configured to be selectively opened and closed, but is not limited thereto, and includes repair and replacement of each component formed in the cover housing 100 .
  • it can be made of any combination structure for easy maintenance.
  • a coupling part, a support part, etc. may be formed inside the cover housing 100 to fix or couple each component.
  • a high voltage input terminal 131 capable of supplying a high voltage to each of a collector electrode part 310 and an emitter electrode part 320 to be described later is formed on one side of the side cover part 130 .
  • the high voltage input terminal 131 is connected to the collector electrode part 310 and the emitter electrode part 320 and respectively to receive high voltage power from a power supply, which will be described later, and is a medium capable of delivering it to the cell assembly 300 . .
  • the suction assembly 200 is based on forming a predetermined air flow so that the dust collection process of the cell assembly 300 to be described later can be performed more efficiently.
  • the suction assembly 200 is formed inside the cover housing 100 , and is formed on the rear surface of the rear cover part 120 .
  • the suction assembly 200 includes a suction fan 210 that is formed at a position corresponding to the fan insertion hole 121 to guide the flow of air rearward.
  • the suction assembly 200 further includes a fan cover 320 formed to cover the fan insertion hole 121 between the rear cover part 120 and the suction fan 210 .
  • the fan cover 320 is formed to cover the fan insertion hole 121 to cover the exposure of the suction fan 310, and also has a filter performance that can block the external discharge of foreign substances to a certain level. formed to have
  • FIG. 4 is a conceptual diagram for explaining a cell assembly constituting an energy-saving suction type fine dust collecting device having an ozone reduction filter according to the present invention.
  • the cell assembly 300 will be described with further reference to FIG. 4 .
  • the cell assembly 300 includes a collector electrode part 310 formed behind the suction assembly 200 and an emitter electrode part 320 formed behind the collector electrode part 310 .
  • the collector electrode part 310 includes a first frame 311 which is a frame formed in a frame shape to have an internal space therein, and a plate-shaped electrode 312 formed in the internal space of the first frame 311 .
  • a plurality of holes 313 arranged in a line are perforated.
  • the hole 313 can form an ion wind in the surrounding air and collect suspended matter in the air, and in order to enable efficient charging, the plate-shaped electrode 312 is electrically conductive such as a metal such as stainless steel or a conductive polymer material. It is made of a material, and the shape of the hole 313 is preferably a circular shape with a diameter of about 10 mm, but may be changed to another shape.
  • a (+) power is applied to the plate-shaped electrode 312 via a high voltage transformer (not shown) formed in a power supply unit (not shown) provided externally, thereby being charged as a + electrode.
  • the load electrode has -5 kV , it is preferable to apply +5 kV to the plate-shaped electrode 312 to have a potential difference of 10 kV.
  • the emitter electrode part 320 is formed at a rear point spaced apart from the plate-shaped electrode 312 by a predetermined distance, and includes a second frame 321 having a shape corresponding to that of the first frame 311 , and the second It crosses the inside of the frame 321 and includes wire electrodes 322 spaced apart from each other in parallel.
  • the wire electrode 322 is disposed to correspond to the center point 313 - 1 of the hole 313 when viewed from the front as shown in FIG. 4 .
  • Each of the wire electrodes 322 is made of a conductive material such as a metal such as stainless steel or a conductive polymer material, and is preferably a SUS wire having a diameter of 0.15 mm which is easy to concentrate an electric field due to its fine thickness, and a high voltage formed outside. (-) power is applied via a transformer (not shown), so that it is charged with the (-) electrode.
  • the discharge of the wire electrode 322 is concentrated at the point P in FIG. 4 which is the electric field concentration point, and the electric charge moves to the peak of the hole 313 in the plate-shaped electrode 312, and the wire by the Coulomb force An ion wind is formed in which air around the electrode 322 is directed toward the hole 313 of the plate-shaped electrode 312 .
  • corona discharge is made by the potential difference (10 kV) between the wire electrode 322 functioning as an emitter and the plate-shaped electrode 312 functioning as a collector, and by charging a basically neutral floating object.
  • the (-) polarity wire electrode 322 attracts the (+) polarity float
  • the (+) polarity plate-shaped electrode 122 attracts the (-) polarity float
  • the suspended matter such as dust in the air will collect
  • the collector electrode part 310 and the emitter electrode part 320 are combined so that the rear surface of the first frame 311 and the front surface of the second frame 321 are in contact with each other to be integrally assembled as one structure. And, it is possible to be detached from the cover housing 100 by itself.
  • the wire electrode 322 and the plate-shaped electrode 312 should be guaranteed to be spaced apart slightly from each other. Based on the plate-shaped electrode 312 is disposed in the rearmost side in the inner periphery of the first frame 311, the wire electrode 322 is disposed in the frontmost side in the inner periphery of the second frame 321, the first, 2 It would be desirable to make the most of the thickness of the frame to ensure the spacing between the electrodes.
  • the power supply unit (not shown) basically applies power of opposite polarities to the plate-shaped electrode 312 and the wire electrode 322, and for this purpose, the power supply unit is provided with an input terminal, Power is supplied to the DC converter via a fuse that blocks overload and the main power switch. In addition, an output terminal may be connected to one side of the input terminal.
  • the ozone reduction filter 500 is formed in front of the suction fan 210 , and is based on removing ozone generated in the dust collecting process of the cell assembly 300 .
  • the ozone reduction filter 500 will be described in more detail below.
  • the ozone reduction filter 500 may be configured to be included in the suction assembly 200, but is coupled to the outer surface of the cover housing 100 in which the fan insertion hole 121 is formed, that is, the rear cover part 120.
  • An ozone reduction filter cover 700 is further formed, and is formed inside the ozone reduction filter cover 700 .
  • FIG. 5 is an exploded perspective view illustrating the ozone reduction filter cover constituting the energy-saving suction type fine dust collecting device having the ozone reduction filter according to the present invention.
  • the ozone reduction filter cover 700 will be described.
  • the ozone reduction filter cover 700 has a filter cover upper surface 710 having a first air inlet hole 711 formed at a position corresponding to the fan insertion hole 121 is spaced apart from the rear cover part 120 do.
  • a first filter cover side portion 720 having a height corresponding to the spaced apart arrangement is formed at both ends of the filter cover upper surface 710 .
  • the first filter cover side portion 720 may be formed in a structure capable of being coupled to the rear cover portion 120 as shown in FIG. 5 , but is not limited thereto.
  • An accommodating space bracket 750 for accommodating the ozone reduction filter 500 is formed inside the filter cover upper surface 710 .
  • a second air inlet 751 is formed at a position corresponding to the fan insertion hole 121 and the first air inlet 711 .
  • the accommodation space bracket 750 is preferably formed in a number corresponding to the fan insertion hole 121 .
  • the ozone reduction filter cover 700 accommodates the ozone reduction filter 500 inside the accommodation space bracket 750 , and a second filter cover side part 730 for preventing the ozone reduction filter 500 from being separated. is formed
  • FIG. 6 is a conceptual diagram for explaining an ozone reduction filter constituting an energy-saving suction type fine dust collecting device having an ozone reduction filter according to the present invention.
  • the ozone reduction filter 500 is to remove ozone contained in the air introduced through the accommodation space bracket 750, and is a space that provides a certain level of high temperature and high pressure conditions for natural reduction and extinction, or It may be a catalytic filter that decomposes ozone into oxygen by catalysis of transition metal oxides.
  • a pipe (not shown) may be further provided between the ozone reduction filter 500 and the suction fan 310 so that internal air can be collected by the ozone reduction filter 500 without outflow.
  • the energy-saving suction type fine dust collecting device equipped with the ozone reduction filter of the present invention can minimize harmfulness to the body, so it can be used not only for industrial purposes but also for home use. It can be applied stably.
  • the energy-saving suction type fine dust collecting device having an ozone reduction filter according to the present invention is a protective panel ( 600) is further included.
  • the protective panel 600 is an insulating panel in which a plurality of through holes 610 are formed to ensure air flow, and is formed behind the emitter electrode part 320 .
  • the protection panel 600 may be configured such that a separate bracket is provided on the front cover part to be coupled to the bracket. In this case, in the process of separating the cell assembly 300 from the cover housing 100 for cleaning, the protection panel 600 is coupled to the front cover part, so that no separate operation is applied to the protection panel 600 . This simplifies the maintenance process.
  • the bracket is designed so that the distance between the wire electrode 322 and the protection panel 600 is spaced apart by the thickness of the bracket so that there is no restriction on the flow of air.
  • the energy-saving suction type fine dust collecting device having an ozone reduction filter according to the present invention is used to collect not only neutral general organic substances using the above-described cell assembly 300 but also metal suspended substances from the outside. It may further include a permanent magnet (not shown) for generating and maintaining a stable magnetic field without receiving electrical energy.
  • a plurality of permanent magnets may be attached to the front cover part along an outer circumferential portion, and the floating metal material introduced along the airflow by the suction fan 210 may be attached to the permanent magnets.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrostatic Separation (AREA)
  • Control Or Security For Electrophotography (AREA)

Abstract

La présente invention concerne un appareil de collecte de poussière fine du type à aspiration, écoénergétique, doté d'un filtre de réduction d'ozone, lequel appareil comprend : un logement de couvercle ayant une partie espace formée dans celui-ci et une pluralité de trous d'insertion de ventilateur formés dans une surface de celui-ci ; un ensemble d'aspiration comprenant des ventilateurs d'aspiration qui sont formés à des positions correspondant aux trous d'insertion de ventilateur et induisent un écoulement d'air vers l'arrière ; un ensemble cellule comprenant un premier cadre qui est formé sur la partie arrière de l'ensemble d'aspiration et a un espace interne dans celui-ci, une unité d'électrode collectrice comprenant une électrode en forme de plaque dans laquelle une pluralité de trous sont ponctués et agencés en une rangée dans le premier cadre, un second cadre ayant une forme correspondant au premier cadre, et une unité d'électrode émettrice comprenant une pluralité de fils-électrodes qui sont espacés les uns des autres en parallèle à travers l'intérieur du second cadre et sont agencés pour correspondre aux parties centrales des trous ; une unité d'alimentation électrique qui fournit de l'énergie électrique de polarités opposées à l'électrode en forme de plaque et aux fils-électrodes ; et un filtre de réduction d'ozone qui est formé devant les ventilateurs d'aspiration et peut éliminer l'ozone.
PCT/KR2021/015195 2020-11-30 2021-10-27 Appareil de collecte de poussière fine du type à aspiration, écoénergétique, doté d'un filtre de réduction d'ozone WO2022114549A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020200163607A KR20220075491A (ko) 2020-11-30 2020-11-30 오존 환원 필터를 구비한 에너지절감형 흡입식 미세먼지포집장치
KR10-2020-0163607 2020-11-30

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WO2022114549A1 true WO2022114549A1 (fr) 2022-06-02

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KR (1) KR20220075491A (fr)
CN (1) CN114570527A (fr)
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101183228B1 (ko) * 2010-07-08 2012-09-14 주식회사 맥스텍 전기식 집진기
US20130047858A1 (en) * 2011-08-31 2013-02-28 John R. Bohlen Electrostatic precipitator with collection charge plates divided into electrically isolated banks
KR20130005974U (ko) * 2012-04-03 2013-10-14 웨이 순 오일 미스트 필터 장치
KR20150050851A (ko) * 2013-11-01 2015-05-11 삼성전자주식회사 공조용 필터장치
KR101849916B1 (ko) * 2016-03-18 2018-04-18 (주)선재하이테크 흡입형 부유물 포집 장치

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JP2000005628A (ja) * 1998-06-24 2000-01-11 Matsushita Electric Ind Co Ltd 空気清浄器および空質調和装置
KR101119078B1 (ko) * 2009-04-14 2012-03-20 (주)선재하이테크 부유물 포집장치
CN205048592U (zh) * 2015-10-23 2016-02-24 苏州瓷气时代净化设备有限公司 一种带拉板的静电式空气净化装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101183228B1 (ko) * 2010-07-08 2012-09-14 주식회사 맥스텍 전기식 집진기
US20130047858A1 (en) * 2011-08-31 2013-02-28 John R. Bohlen Electrostatic precipitator with collection charge plates divided into electrically isolated banks
KR20130005974U (ko) * 2012-04-03 2013-10-14 웨이 순 오일 미스트 필터 장치
KR20150050851A (ko) * 2013-11-01 2015-05-11 삼성전자주식회사 공조용 필터장치
KR101849916B1 (ko) * 2016-03-18 2018-04-18 (주)선재하이테크 흡입형 부유물 포집 장치

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KR20220075491A (ko) 2022-06-08

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