WO2022100839A1 - Composant optique et son procédé de production - Google Patents

Composant optique et son procédé de production Download PDF

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Publication number
WO2022100839A1
WO2022100839A1 PCT/EP2020/081971 EP2020081971W WO2022100839A1 WO 2022100839 A1 WO2022100839 A1 WO 2022100839A1 EP 2020081971 W EP2020081971 W EP 2020081971W WO 2022100839 A1 WO2022100839 A1 WO 2022100839A1
Authority
WO
WIPO (PCT)
Prior art keywords
embossing
diffraction
optical component
pixel
diffraction element
Prior art date
Application number
PCT/EP2020/081971
Other languages
German (de)
English (en)
Inventor
Jonas KHAN
Jacek GASIOROWSKI
Original Assignee
Ev Group E. Thallner Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ev Group E. Thallner Gmbh filed Critical Ev Group E. Thallner Gmbh
Priority to PCT/EP2020/081971 priority Critical patent/WO2022100839A1/fr
Publication of WO2022100839A1 publication Critical patent/WO2022100839A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
    • G02B5/1819—Plural gratings positioned on the same surface, e.g. array of gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • G02B6/0033—Means for improving the coupling-out of light from the light guide
    • G02B6/0035—Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it
    • G02B6/0036—2-D arrangement of prisms, protrusions, indentations or roughened surfaces
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping

Definitions

  • the invention relates to an optical component, an embossing stamp, a method for producing an optical component and a waveguide.
  • the optical component is in particular a multi-wavelength diffraction element, preferably produced by means of imprint lithography.
  • optical elements whose task is to couple light in or out of a waveguide. These optical elements are mainly used for optical light, i.e. light in the visible wavelength range.
  • the decoupling takes place regularly via diffraction elements, in particular diffraction gratings, within a number of planes, in particular ones lying one above the other.
  • a diffraction grating is used for a specific wavelength or a very narrow wavelength range.
  • a number of diffraction gratings must therefore be connected in series.
  • each diffraction grating has a certain mass and the use of multiple diffraction gratings increases the mass of the optical component. Furthermore, the manufacturing process of the optical component is more complicated, since the diffraction grating of each level is specially manufactured, in particular have to be stamped.
  • a further disadvantage is that the light from the covered diffraction grating has a lower intensity since it has to pass through at least one further diffraction grating. As a result, some diffraction gratings can obscure underlying diffraction gratings, resulting in a loss of intensity of the light diffracted by an obscured diffraction grating.
  • an optical component an embossing die for producing an optical component, a method for producing an optical component and a waveguide which at least partially eliminate, in particular completely eliminate, the disadvantages listed in the prior art.
  • an improved optical component, an improved embossing die for producing an optical component, an improved method for producing an optical component and an improved waveguide are to be shown.
  • the invention relates to an optical component, preferably produced by means of imprint lithography, having at least one first diffraction element for diffraction of light of a first wavelength and at least one second diffraction element for diffraction of light of a second wavelength, the at least one first diffraction element and the at least one second diffraction element are arranged in the same area, in particular next to one another.
  • the optical component can generally also be curved, so that the at least one first diffraction element and the at least one second diffraction element are arranged next to one another along a curved or at least partially curved surface.
  • the diffraction elements are correspondingly arranged along the surface or next to one another.
  • a flat, two-dimensional surface i.e. a plane
  • the invention is not limited to embodiments in which the diffractive elements are arranged in a flat surface. Rather, the surface can also be curved, in particular convex, concave or wavy.
  • the diffraction elements can very well also be produced on or in a curved surface or arranged in a planar manner. It is of particular importance that the diffraction gratings for different wavelengths are arranged next to one another in relation to a surface, in particular a curved, curved or flat surface. In this case, the diffraction elements for diffraction of different wavelengths are preferably manufactured or produced on the same surface.
  • the diffraction elements are preferably arranged next to one another along a surface, which in turn can be curved or arched, and can therefore have a partially corrugated contour or surface.
  • the optical component is preferably formed flat along the surface. However, it is also conceivable that the area or the surface spanned by the optical component is curved. In particular, it is crucial that the diffraction elements for diffracting light of different wavelengths are not arranged one above the other. The light hitting the diffraction elements becomes like this diffracted that targeted light of a specific wavelength or a specific wavelength range can be coupled out.
  • the first diffraction element and the second diffraction element are each designed for diffracting light of a specific (first and second) wavelength.
  • the first and the second wavelength are preferably different and are particularly preferably in the range of visible light.
  • the diffraction elements are produced or stacked one on top of the other.
  • the height of the optical component is reduced by arranging the diffraction elements for different wavelengths in one area or next to one another.
  • the mass of the optical component can be reduced in this way and consequently the weight can be reduced.
  • errors can be reduced since superimpositions can occur when diffraction elements are stacked on top of one another.
  • a targeted bending of the light by means of diffraction elements arranged next to one another or along the same surface is significantly less susceptible to errors, since the position of a stack of diffraction elements does not represent a source of errors during production.
  • the light intensity can be increased or the light loss can be reduced, since several diffraction elements do not have to be transmitted. Since the photons are all emitted from the same surface and in particular not from diffraction elements stacked on top of one another, the intensity of the coupled-out light of a specific wavelength is the same. The light intensity is thus advantageously the same for the different wavelengths and no measures need to be taken to compensate or adjust the light intensity for different wavelengths.
  • the invention relates to an embossing stamp, in particular for embossing an embossing compound, at least having at least one first embossing structure for embossing the at least one first diffraction element for diffracting light of the first wavelength and at least one second embossing structure for embossing the at least one second diffraction element for diffracting light of the second wavelength, wherein the at least one first embossing structure and the at least one second embossing structure are arranged in one area.
  • the embossed structures each correspond to the negative of the diffraction elements for a particular wavelength or a wavelength range, so that the embossing compound has the structure of the diffraction elements after embossing with the embossing die.
  • the diffraction elements for different wavelengths can advantageously be produced with one stamp.
  • the embossing die can advantageously produce the diffraction elements along a surface. In this way, multiple embossing stamps for multiple diffraction elements of a specific wavelength are not necessary during production.
  • a method for embossing an optical component can be carried out particularly simply and efficiently with the embossing stamp.
  • the invention relates to a method for producing an optical component with at least the following steps: i) providing the embossing die, ii) embossing an embossing compound with the embossing die.
  • the method provides an embossing die that has the corresponding negatives of the structures that form the diffraction elements on the optical component. In this way, an optical component can be produced in a particularly simple and efficient manner.
  • the invention relates to a waveguide for coupling in and/or coupling out light, having at least one optical component according to the invention, in particular produced by the method for producing an optical component. on the waveguide vorzugswei se the optical component produced, preferably embossed.
  • the optical component can also be mounted on a waveguide material.
  • the waveguide material is preferably a metamaterial, so that the light can be coupled in or out in a targeted and undistorted manner.
  • the waveguide preferably has at least two optical components. The light can be guided between the optical components, for example through the waveguide material.
  • the waveguide between the two optical components can also have other optical components, in particular those that change, influence or measure the light from the first optical component to the second optical component.
  • the optical component also has at least one third diffraction element for diffraction of light of a third wavelength.
  • a plurality of wavelengths can advantageously be diffracted at the respective diffraction elements.
  • the three important primary colors red, green and blue can advantageously be decoupled in a targeted manner.
  • the at least one third diffraction element is arranged in the surface.
  • the third diffraction element for the third wavelength is thus also arranged in the surface or along the same surface or is located next to the first and/or the second diffraction element.
  • the diffraction elements are designed as diffraction gratings.
  • the first diffraction element, the second diffraction element and/or the third diffraction element are consequently designed as a diffraction grating.
  • the diffraction gratings each have a periodically repeating structure for diffracting light of a specific wavelength.
  • the wavelength to be diffracted can advantageously be set by the period lengths (distances between the repeating structures; for example a lattice spacing).
  • the different diffraction gratings can have any shape and, if necessary, be formed on the optical component rotated about themselves.
  • the at least one first diffraction element and the at least one second diffraction element and/or the at least one third diffraction element together form a pixel.
  • a pixel thus has at least two diffraction elements for diffraction of at least two different wavelengths.
  • a pixel preferably has exactly one first diffraction element, one second diffraction element and one third diffraction element.
  • the pixel is thus a local area in which diffraction elements for different wavelengths are arranged.
  • the diffraction elements of a pixel are arranged in the surface.
  • the diffraction elements and thus the coupled-out light of the corresponding wavelengths can advantageously be ordered by the arrangement in pixels and correspondingly coupled out in a targeted manner.
  • the diffraction elements of a pixel are arranged in a predetermined orientation relative to one another.
  • the orientation of the respective periodic structures of the diffraction elements relative to one another can thus be set advantageously.
  • This embodiment includes at least one pixel at least two diffraction elements, which are arranged along the same surface or are arranged next to each other.
  • the optical component has a multiplicity of pixels, the individual pixels being arranged equidistantly from one another in a first direction along the surface and in a second direction along the surface, the first direction and the second direction are preferably perpendicular to each other.
  • the optical component thus has a plurality of pixels, each preferably consisting of at least two diffraction elements for diffracting light of different wavelengths. Each pixel is preferably formed from the same diffraction elements. Further optical elements can be arranged between the pixels.
  • the pixels are particularly preferably arranged uniformly on the optical component.
  • the distances between the pixels along the surface are preferably equidistant.
  • the distance in the first direction along the surface and the distance in the second direction along the surface between the pixels is thus in each case s the same size.
  • the surface is a flat surface, particularly a plane, the pixels will be equidistant and juxtaposed.
  • the pixels are arranged equidistantly along the respective sections along the surface and can be arranged side by side, slightly offset from one another, perpendicularly to the surface, corresponding to the curvature.
  • the pixels can also advantageously be spaced such that, from a specific viewing angle of the surface, the pixels have approximately the same distance from one another.
  • the decoupled light can thus be used advantageously for the display of specific and evenly arranged pixels.
  • a preferred embodiment of the invention provides that the pixels and/or the diffraction elements of a pixel are not distributed uniformly along the surface.
  • the position and/or orientation of the pixels and/or the diffraction elements of a pixel are preferably calculated by software and/or hardware, in particular numerically.
  • Such software and/or hardware is designed for the calculation of such complex optical systems.
  • An optimal positioning and orientation of the pixels along the surface can thus be calculated.
  • the arrangement of the pixels or the diffraction elements is preferably calculated in such a way that the emerging light intensity and, at the same time, the resolution are particularly high.
  • the diffraction elements can be made of any material suitable for scattering photons.
  • the following materials or combinations of the following materials are preferably used:
  • PDMS Polydimethylsiloxane
  • TEOS Tetraethyl Orthosilicate
  • the materials of the diffraction elements are preferably as homogeneous as possible.
  • the refractive index of the materials should be selected in such a way that the physical task can be fulfilled.
  • the refractive index is preferably between 1.00 and 5.00, more preferably between 1.00 and 4.00, most preferably between 1.00 and 3.00, most preferably between 1.00 and 2.50.
  • the transmittance of the materials is greater than 5%, preferably greater than 20%, more preferably greater than 50%, most preferably greater than 70%, most preferably 100%.
  • a preferred embodiment of the invention provides that the embossing die has at least one third embossing structure for embossing the at least one third diffraction element for diffracting light of a third wavelength.
  • the embossing die has at least one third embossing structure for embossing the at least one third diffraction element for diffracting light of a third wavelength.
  • the at least one first embossed structure and the at least one second embossed structure and/or the at least one third embossed structure of the embossing die together form a pixel embossed structure.
  • the pixel embossing structure is thus suitable for transferring a pixel with the corresponding diffraction elements onto the embossing compound. In this way, multiple embossing structures (for the corresponding diffraction elements) are generated or embossed.
  • the embossing die has a multiplicity of pixel embossing structures.
  • the multiplicity of pixel embossing structures are preferably arranged uniformly on the embossing die, so that a plurality of pixels can be transferred or produced simultaneously onto the embossing compound. In this way, an optical component can be produced in a particularly simple and efficient manner using an embossing die with a large number of pixel embossing structures.
  • the individual pixel embossing structures are arranged equidistantly from one another in a vertical direction of the embossing stamp and in a horizontal direction of the embossing stamp.
  • the individual embossed pixel structures of the multiplicity of embossed pixel structures are thus arranged particularly regularly and evenly with respect to one another. Accordingly, the multiplicity of pixels can be embossed particularly efficiently on the embossing mass with such an embossing die.
  • the individual pixel embossing structures of the embossing die are also not evenly distributed.
  • the pixel embossing structures are preferably distributed according to the numerical calculations described above. It is also conceivable that the embossing die is designed as a step-and-repeat embossing die. The embossing stamp thus has the smallest number of embossing structures that are necessary to form part of an embossing mass shape.
  • the embossing die is removed from the embossing compound and there is a relative movement between the embossing die and the embossing compound. Then it is minted again. This process is repeated until the entire embossing compound has been embossed. The embossing die area is therefore smaller than the area of the embossing compound.
  • diffraction gratings are mentioned as the preferred diffraction elements, since they are the easiest and most clear way to describe the physical principles. However, everything that has been said applies in general to any diffraction elements.
  • a core of the invention consists in particular in producing diffraction gratings for different wavelengths within one area, in particular in order not to obtain a stacked arrangement of the diffraction gratings or diffraction elements. This is preferably achieved with the help of imprint lithography and a stamp that has all the corresponding diffraction gratings or their structures.
  • the diffraction gratings are produced by optical lithography, laser writing, electron beam writing, deposition processes, etching processes or a combination thereof.
  • An advantage of the invention is a weight saving. By using only a single planar arrangement of diffraction gratings, preferably next to one another, one can save further diffraction gratings and thus weight. This is particularly advantageous for use in augmented reality or virtual reality wearables such as glasses that have to be worn by a person. This makes wearables lighter and more comfortable to wear.
  • a further advantage is that the diffracted photons are all emitted from the same surface and not from different surfaces, in particular not from surfaces lying on top of one another, and do not have to be transmitted through any other diffraction grating. This can at least ensure that the intensity of the emitted photons is the same for each wavelength with the same density for all diffraction gratings or diffraction elements for different wavelengths.
  • a diffraction grating is understood to mean an, in particular, periodic structure at which light of a specific wavelength is scattered in such a way that at least one diffraction order is produced.
  • the diffraction elements are diffraction gratings.
  • Diffraction element is therefore a generic term for diffraction grating and is to be interpreted further than s diffraction grating.
  • diffraction gratings are mentioned in the disclosure, since they are the easiest to explain the physical principles.
  • any diffraction element can be used.
  • photons of any wavelength can be diffracted, provided the optical structures of the diffraction elements, in particular diffraction gratings, are designed for the respective wavelength.
  • the diffraction elements or the diffraction gratings are particularly preferably designed for photons with a wavelength between the infrared and the X-ray range.
  • a pixel is a locally defined area containing at least one diffraction grating.
  • a pixel can therefore consist of a diffraction grating for a specific wavelength. However, it is preferred that there are several diffraction gratings for different wavelengths in one pixel. At least exactly three different diffraction gratings are then particularly preferably located or diffraction elements for the wavelengths red, green and blue in one pixel.
  • a pixel is a locally defined area.
  • the diffraction gratings can be of any shape, but are preferably
  • the optical component consists of a number of pixels which are distributed, in particular regularly, over the entire surface.
  • an optimal arrangement of the diffraction elements or the pixels can be determined on the basis of the numerical calculations.
  • non-round diffraction gratings can be rotated along the arrangement, so that the rotation of the diffraction grating also causes a change in the optical properties.
  • the diffraction gratings that are combined in a pixel can also be rotated as a function of the location on the optical component relative to the origin of the respective pixel, for example the center of gravity of all diffraction gratings of a pixel.
  • the pixels are arranged in a statistically distributed manner in terms of position and/or orientation.
  • each pixel there is exactly one diffraction grating in each pixel.
  • the pixels are then referred to as r-pixel, g-pixel and b-pixel.
  • each pixel there are at least two diffraction gratings in each pixel.
  • Such a pixel is simply referred to as an rgb pixel in the further course of the publication.
  • the pixels are arranged regularly, they are spaced apart from one another in a well-defined manner. In general, a vertical and a horizontal spacing are specified.
  • the positions of the pixels relative to each other, as well as their alignment and shape and thus the positions, alignments and shapes of the diffraction gratings are preferably optimized by optics software in such a way that the light yield, but preferably the resolution, is optimal. Therefore, optimal positions, orientations and shapes cannot be specified, since numerical methods must be used to evaluate them.
  • the individual pixels are spaced equidistantly from one another in the horizontal and vertical direction and have a simple, preferably rectangular, even more preferred square or circular shape and all have the same rotation to each other.
  • the diffraction gratings for different wavelengths are in the same area.
  • a first product is in particular an optical component, preferably produced using the method according to the invention.
  • the optical component is preferably produced or produced multiple times on a substrate.
  • the substrate can then be separated.
  • the optical component is then applied to other components by appropriate transfer processes.
  • the optical component is characterized in that several pixels are generated next to one another in the area or along the area.
  • diffraction gratings for different wavelengths are not embossed and/or stacked one on top of the other, but the production, in particular embossing, of all diffraction gratings for all wavelengths takes place in or within or along the same surface.
  • the optical component can also be produced, in particular embossed, directly on another product, in particular a waveguide.
  • a second product is a waveguide according to the invention, which has an optical component according to the invention, in particular on the input side and the output side.
  • the optical component can either be produced directly on the input and/or output side of the waveguide, ie it can be embossed. This manufacturing variant is the most preferred. However, it is also conceivable that the optical component is manufactured separately and then applied to the input and/or output side of the waveguide. On the input side, the optical component is used to couple the light into the waveguide. The waveguide then transports the light to the exit page. On the output side, the light is also decoupled with an optical component and thus reaches a detector, in particular the human eye. In particular, further optical components can also be located between the first and the second optical component.
  • a stamp is produced whose embossed structures on the surface represent the negative of the pixels that are to be embossed into the embossing compound. Diffraction gratings for several wavelengths are created on the stamp.
  • the stamp is preferably a soft stamp.
  • the soft stamp is produced by molding the soft stamp from a master stamp.
  • the stamp is a hard stamp whose embossing surface has been produced by more complex processes, in particular electron beam lithography.
  • an embossing compound is deposited on a substrate.
  • the embossing compound is preferably applied centrally to a substrate and distributed over the substrate surface by a centrifugal process. However, it is also conceivable that the embossing compound is distributed by the subsequent contacting process.
  • the stamp is aligned with the substrate.
  • Alignment marks can be located on the stamp and on the substrate, which are aligned with one another. This is particularly necessary when structures that have already been produced on the substrate, in particular functional units such as MEMs, chips, etc. are located. In this context, it would also be conceivable for the diffraction gratings to be embossed with functional units on a substrate. This makes the end product even more versatile.
  • the embossing compound is embossed on the substrate by the stamp. This leads to a relative approach of the embossing compound on the substrate and the stamp.
  • the embossing compound is cured on the substrate.
  • Curing can take place thermally or by electromagnetic radiation. Curing by means of electromagnetic radiation, in particular UV light, is particularly preferred, since no or at most very little thermal expansion occurs as a result of this curing.
  • the hardening is preferably carried out by the stamp. The stamp is thus thermally conductive and/or transparent to the electromagnetic radiation used.
  • the stamp is demoulded from the embossing compound.
  • Demolding preferably takes place in a process step in which the stamp is not detached from the embossing compound over the entire surface, but step by step, preferably from one side, more preferably radially symmetrically from the edge.
  • FIG. 1 three exemplary diffraction elements in the form of diffraction gratings according to the prior art in different views,
  • FIG. 2 shows a pixel from three diffraction gratings, which are arranged in a surface according to the invention
  • FIG. 3 shows an optical component according to the invention in a plan view, the area or surface consisting of a plurality of pixels,
  • FIG. 4 shows a waveguide according to the invention with two optical components according to the invention for coupling light in and out.
  • the diffraction gratings for the different colors red, green and blue are shown in different colors.
  • the coloring is only used for representation and better differentiation and has nothing to do with the actual embossed structure.
  • the actually embossed structures only differ in terms of their lattice parameters.
  • FIG. 1 shows several first diffraction elements, in particular diffraction gratings, 1, 1′, 1′′.
  • diffraction gratings are always used as an example of a diffraction element.
  • Each diffraction element 1, 1', 1'' is thus produced in the illustrated figures in such a way that it acts as a diffraction grating.
  • the diffraction elements 1, 1′, 1′′ are therefore in general different diffraction gratings, with different ones shapes and orientations.
  • FIG. 1 always shows three diffraction gratings with different shapes per line from above (left) and, by way of example, the cross-sectional representations of the rectangular, third diffraction grating (right).
  • the display is in the colors black (r), gray (g) and white (b).
  • the diffraction gratings shown differ in terms of shape and orientation. The three shapes circle, triangle and rectangle were selected as examples.
  • the different shapes are primarily intended to clarify and reveal that a diffraction grating can have any shape.
  • the different orientation of the triangles indicates that the diffraction gratings can be rotated arbitrarily in the area.
  • the exaggerated rectangle serves as a starting point for the sectional drawing shown on the right to show the diffraction grating. It can be seen that the grating parameters ar, ag and ab differ for the different diffraction gratings, which is necessary in order to be able to be wavelength-sensitive.
  • FIG. 2 shows a pixel, in the present case a set of exactly three diffraction gratings 1, 1′, 1′′, which differ in their grating parameters but have the same shape. They are combined into one pixel. Whether the diffraction gratings of the different embossed structures have the same orientation cannot be seen due to the monochrome or circular representation. The expert in the field is however, it is clear that the orientation of the diffraction gratings can be the same or different from one another. Correspondingly, this group of embossed structures would scatter white light, which has at least photons with a red, a green and a blue wavelength. According to the invention, the diffraction gratings of the pixel are all located in the same area and are not arranged one behind the other, ie not stacked.
  • FIG. 3 shows a very simply constructed, rectangular optical component 3 according to the invention, consisting of a number of pixels 2, each of which consists of three diffraction gratings 1, 1′, 1′′.
  • the optical component 3 has a length L and a width B .
  • the component 3 can of course have any shape. In particular, it can also be curved. It is of particular importance that the diffraction gratings 1, 1', 1'' are all arranged in or along the same surface. All diffraction gratings 1, 1', 1'' of each pixel 2 are located in one area. In the present case, it is a level or flat surface. However, in other embodiments, the pixels 2 and thus the diffraction elements 1, 1', 1'' arranged therein can be arranged along a curved or curved surface.
  • FIG. 4 shows a waveguide 4 according to the invention, consisting of a first optical component 3e according to the invention for coupling in light and a second optical component 3a according to the invention for coupling out light.
  • All diffraction gratings 1, 1', 1'' (not shown) of each pixel 2 (not shown) are located in one area.
  • the diffraction gratings, in particular also for different wavelengths, are not embossed one behind the other and are also not stacked.
  • the representation of the structures that are responsible for the transmission of the light between the components 3e and 3a is not discussed in detail.
  • Such waveguides are known to those skilled in the art. In particular, these are metamaterials. reference sign list

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)

Abstract

L'invention concerne un composant optique fabriqué de préférence par lithographie par empreinte, comprenant au moins un premier élément de diffraction pour la diffraction de la lumière ayant une première longueur d'onde et au moins un second élément de diffraction pour la diffraction de la lumière ayant une seconde longueur d'onde. L'invention concerne également une matrice de gaufrage destinée à gaufrer un composé de gaufrage, un procédé de fabrication d'un composant optique et un guide d'ondes, comprenant au moins un composant optique.
PCT/EP2020/081971 2020-11-12 2020-11-12 Composant optique et son procédé de production WO2022100839A1 (fr)

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PCT/EP2020/081971 WO2022100839A1 (fr) 2020-11-12 2020-11-12 Composant optique et son procédé de production

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150355403A1 (en) * 2013-01-30 2015-12-10 Hewlett-Packard Development Company, L.P. Directional grating-based backlighting
US20190235142A1 (en) * 2018-01-26 2019-08-01 Applied Materials, Inc. Controlling grating outcoupling strength for ar waveguide combiners
US20200033619A1 (en) * 2017-04-04 2020-01-30 Leia Inc. Multilayer multiview display and method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150355403A1 (en) * 2013-01-30 2015-12-10 Hewlett-Packard Development Company, L.P. Directional grating-based backlighting
US20200033619A1 (en) * 2017-04-04 2020-01-30 Leia Inc. Multilayer multiview display and method
US20190235142A1 (en) * 2018-01-26 2019-08-01 Applied Materials, Inc. Controlling grating outcoupling strength for ar waveguide combiners

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