WO2022073351A1 - Aluminum nitride nanopowder synthesis production line - Google Patents
Aluminum nitride nanopowder synthesis production line Download PDFInfo
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- WO2022073351A1 WO2022073351A1 PCT/CN2021/096745 CN2021096745W WO2022073351A1 WO 2022073351 A1 WO2022073351 A1 WO 2022073351A1 CN 2021096745 W CN2021096745 W CN 2021096745W WO 2022073351 A1 WO2022073351 A1 WO 2022073351A1
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- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
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- the material collection system is connected with the outlet of the cooling unit for gas-powder separation, recovery and packaging of materials.
- the material collection system includes a gas powder separation device, a packaging device and a recovered gas storage tank; the gas powder separation device is connected to the outlet of the cooling unit, and the packaging device and the recovered gas storage tank are respectively connected with the gas powder separation device The powder outlet and the gas outlet are connected; the recovered gas storage tank also provides power gas for the packaging device and the spray unit (aluminum feeding mechanism).
- the reaction unit is erected on the bottom of the shell through a bottom bracket; the bottom bracket is made of metal,
- the refrigeration system is used for circulating supply of the cooling medium of the spray unit, the gasification unit and the cooling unit, and a delivery pump is arranged in the pipeline.
- the production line of the present invention is compared with peers (equivalent equipment investment), and the data are as follows:
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Abstract
An aluminum nitride nanopowder synthesis production line is provided. The production line comprises an aluminum nitride nanopowder synthesis apparatus (1), a material collection system, a nitrogen supply system, a refrigeration system (2), and an argon supply system (3). The aluminum nitride nanopowder synthesis apparatus comprises: an outer casing (100), a spray unit, a gasification unit, a reaction unit, and a cooling unit. The material collection system is connected to an outlet of the cooling unit and is used for gas-powder separation, recovery, and packaging of a material. The nitrogen supply system is used to supply nitrogen gas for the spray unit, the reaction unit, and the cooling unit. The refrigeration system is used for supplying, in a circulatory manner, a coolant medium for the spray unit, the gasification unit, the reaction unit, and the cooling unit. The argon supply system is in communication with spray unit and the outer casing, and is used for supplying argon gas. The present production line allows for the complete reaction of a raw material, an aluminum nitride powder obtained has high purity, is uniform in particle size, is nanoscale in size, and is not prone to agglomeration, said production line can implement continuous production, has high yield and rapid output, little ancillary equipment is necessary, and is low cost.
Description
本发明涉及氮化铝合成领域,尤其涉及一种纳米氮化铝粉体合成生产线。The invention relates to the field of aluminum nitride synthesis, in particular to a nanometer aluminum nitride powder synthesis production line.
人类进入21世纪,材料、信息、能源被誉为科学三大支柱,材料是人类生产生活的物质基础,是人类进步与人类文明的标志。随着空间技术、红外技术、传感技术、能源技术等新技术的出现和发展,要求材料必须有耐高温、抗腐蚀、高绝缘等优越性能才能在苛刻环境中使用。氮化铝材料由于期独特优异的明显特征而从新材料中脱颖而出,日益受到各国科学家高度重视。氮化铝自然界不存在,人工合成而来,属工业特种陶瓷材料,氮化铝具有优良的热、电、力学性能,耐高温、导热好(仅次于铝)、高绝缘、高硬度、耐磨、低膨胀、耐腐蚀,是理想的大规模集成电路散热基板、熔炼坩埚、浇铸模具、导热等材料。目前大多数企业生产的氮化铝粉体的纯度在95%以内,粒径在0.5微米以上。目前制备方法主要包括以下几大类:Human beings have entered the 21st century. Materials, information and energy are known as the three pillars of science. Materials are the material basis of human production and life, and the symbol of human progress and human civilization. With the emergence and development of new technologies such as space technology, infrared technology, sensing technology, and energy technology, materials are required to have superior properties such as high temperature resistance, corrosion resistance, and high insulation before they can be used in harsh environments. Aluminum nitride materials stand out from new materials due to their unique and excellent characteristics, and are increasingly valued by scientists from all over the world. Aluminum nitride does not exist in nature and is artificially synthesized. It is an industrial special ceramic material. Aluminum nitride has excellent thermal, electrical and mechanical properties, high temperature resistance, good thermal conductivity (second only to aluminum), high insulation, high hardness, resistance to Grinding, low expansion, corrosion resistance, it is an ideal material for large-scale integrated circuit heat dissipation substrates, melting crucibles, casting molds, heat conduction and other materials. At present, the purity of aluminum nitride powder produced by most enterprises is within 95%, and the particle size is above 0.5 microns. The current preparation methods mainly include the following categories:
(1)直接氮化法:铝粉直接氮化法是在持续流动N
2(或NH
3)气氛条件下(或封闭的氮气气氛容器内),铝粉与N
2(或NH
3)在较高温度下直接发生化学反应来制备AlN粉体的方法,反应方程式为:
(1) Direct nitriding method: The direct nitriding method of aluminum powder is under the condition of continuous flowing N 2 (or NH 3 ) atmosphere (or in a closed nitrogen atmosphere container), and the aluminum powder and N 2 (or NH 3 ) are relatively The method for preparing AlN powder by direct chemical reaction at high temperature, the reaction equation is:
2Al+N
2→2AlN
2Al+N 2 →2AlN
该方法的缺点是:铝的熔点为660℃,氮化温度为1000-1600℃,氮化时在铝水(液)表面会产生氮化铝层,会阻止N
2进一步向铝水(液)内部的渗透,氮化时释放的热量导致产物呈大块状,且纯度低。
The disadvantage of this method is that the melting point of aluminum is 660°C, and the nitriding temperature is 1000-1600°C. During nitriding, an aluminum nitride layer will be formed on the surface of the aluminum water (liquid), which will prevent N2 from further migrating to the aluminum water (liquid). Internal infiltration, the heat released during nitridation results in a bulky product with low purity.
(2)热还原法:将Al
2O
3粉末和过量的C(活性炭)粉末在一定温度(1200-1800℃)的流动N
2气氛条件下进行氮还原反应制备AlN粉末,反应方程式为:
(2) Thermal reduction method: AlN powder is prepared by nitrogen reduction reaction of Al 2 O 3 powder and excess C (activated carbon) powder under flowing N 2 atmosphere at a certain temperature (1200-1800°C). The reaction equation is:
Al
20
3+3C+N
2→AlN+3CO↑
Al 2 0 3 +3C+N 2 →AlN+3CO↑
该方法的缺点是:合成时间长,温度高,合成后的过量C和CO的分离进行处理导致低成本高。The disadvantages of this method are: long synthesis time, high temperature, separation of excess C and CO after synthesis and high cost.
(3)电弧等离子火炬气化法:在密闭容器内将铝放在坩埚中熔化成铝水(液),等离子火炬的火焰对着铝水(液)喷烧,使铝气化升华流入反应室,同时通入氮气降温反应合成。(3) Arc plasma torch gasification method: Put aluminum in a crucible in a closed container and melt it into aluminum water (liquid), and the flame of the plasma torch is sprayed against the aluminum water (liquid), so that the aluminum vaporizes and sublimates into the reaction chamber , while introducing nitrogen to cool the reaction synthesis.
该方法的缺点是:等离子火炬热转化率低于20﹪、高能耗、设备投资大;产生电弧的电极为紫铜和钨合金,超过5千度温度很快被烧蚀气化,被气化钨铜与铝气体混合在一起影响纯度;钨铜电极约100小时更换,耗材成本大;火炬电极水冷却,铜极在超高温下一旦烧 蚀穿孔冷却水喷进坩埚引起瞬间水蒸汽膨胀而爆炸;由于生产成本过高,目前尚未形成工业化生产。The disadvantages of this method are: the thermal conversion rate of the plasma torch is lower than 20%, high energy consumption, and large equipment investment; the electrodes for generating the arc are copper and tungsten alloys, which are quickly ablated and gasified when the temperature exceeds 5,000 degrees, and the gasified tungsten The mixing of copper and aluminum gas affects the purity; the tungsten-copper electrode is replaced in about 100 hours, and the cost of consumables is high; the torch electrode is cooled by water, and the copper electrode is ablated and perforated at ultra-high temperature. Once the cooling water is sprayed into the crucible, the instantaneous water vapor expands and explodes; Due to the high production cost, industrial production has not yet been formed.
(4)电弧雾化法:可均匀同向移动的二根铝线作电极,铝线两头接近时产生电弧(高温),瞬间铝线端部雾化,氮气喷射到电弧中间将铝雾喷出,铝雾与氮气在反应釜反应合成。(4) Arc atomization method: two aluminum wires that can move evenly in the same direction are used as electrodes. When the two ends of the aluminum wires are close to each other, an arc (high temperature) is generated, and the ends of the aluminum wires are instantly atomized, and nitrogen is sprayed into the middle of the arc to spray the aluminum mist. , aluminum mist and nitrogen are synthesized in the reaction kettle.
该方法的缺点是:由于铝雾粒子大小、温度不一、有些粒子表面氮化,中间未氮化,纯度也不高。The disadvantage of this method is that due to the size and temperature of the aluminum mist particles, the surface of some particles is nitrided, the middle is not nitrided, and the purity is not high.
综上所述,现有技术中几种方法的技术难度主要在于:To sum up, the technical difficulties of several methods in the prior art mainly lie in:
(1)原料不能完全反应,或含杂质、纯度低。(1) The raw materials cannot be completely reacted, or contain impurities and have low purity.
(2)国内大都采用直接氮化法、热还原法,产品团聚块状,粉碎研磨是最大难题、成本高、粗细不均、磨料损耗进入粉体、研磨后颗粒难以达细度,对深加工品质受到很大影响。(2) The direct nitriding method and thermal reduction method are mostly used in China. The products are agglomerated and lumpy. Pulverization and grinding are the biggest problems. The cost is high, the thickness is uneven, the abrasive loss enters the powder, and the particles after grinding are difficult to reach the fineness. greatly affected.
(3)目前大多数生产工艺不能达到高纯纳米粉体。(3) Most of the current production processes cannot achieve high-purity nano-powders.
(4)间歇性生产:进料→预热→加热→反应→保温→冷却→出料→粉碎→分离→研磨→分离→干燥→分级→包装,一炉一炉来,设备利用率低。(4) Intermittent production: feeding→preheating→heating→reaction→heat preservation→cooling→discharging→crushing→separation→grinding→separation→drying→classification→packaging, one furnace for one furnace, the equipment utilization rate is low.
(5)生产管理难:设备多、厂房大、环节多、工艺多、投资大、人员多。(5) Difficulty in production management: there are many equipment, large workshops, many links, many processes, large investment, and many personnel.
(6)配套设施多:除粉尘、防静电、隔震动、清噪音等辅助设施。(6) There are many supporting facilities: auxiliary facilities such as dust removal, anti-static, vibration isolation, and noise reduction.
为此,有必要开发出一种氮化铝粉体生产的新技术以解决上述技术难题。To this end, it is necessary to develop a new technology for aluminum nitride powder production to solve the above-mentioned technical problems.
发明内容SUMMARY OF THE INVENTION
为了解决上述技术问题,本发明提供了一种纳米氮化铝粉体合成生产线,通过本发明生产线进行氮化铝粉体合成,原料反应完全,合成所得氮化铝粉体纯度高(可达99.99%以上),粉体粒径均匀为纳米级且不易团聚,可实现连续化生产,产量高、产出快,所需配套设备少、成本低。In order to solve the above technical problems, the present invention provides a production line for synthesizing nano-aluminum nitride powder. Through the production line of the present invention, the synthesis of aluminum nitride powder is carried out, the raw materials are fully reacted, and the synthesized aluminum nitride powder has high purity (up to 99.99 % or more), the particle size of the powder is uniform in nano-scale and not easy to agglomerate, which can realize continuous production, high output, fast output, less supporting equipment and low cost.
本发明的具体技术方案为:The specific technical scheme of the present invention is:
一种纳米氮化铝粉体合成生产线,包括:纳米氮化铝粉体合成装置、物料收集系统、供氮系统、制冷系统和供氩系统。A nano-aluminum nitride powder synthesis production line comprises: a nano-aluminum nitride powder synthesis device, a material collection system, a nitrogen supply system, a refrigeration system and an argon supply system.
所述纳米氮化铝粉体合成装置包括:外壳、设于外壳内的喷雾单元、设于外壳内且衔接于喷雾单元下方的气化单元、设于外壳内且衔接于气化单元下方的反应单元和衔接于气化单元下方的冷却单元。The nano-aluminum nitride powder synthesis device includes: a casing, a spray unit arranged in the casing, a gasification unit arranged in the casing and connected below the spray unit, and a reaction unit arranged in the casing and connected below the gasification unit unit and a cooling unit connected below the gasification unit.
本发明是基于铝气化反应来制备氮化铝合成,反应方程式为:2Al+N
2→2AlN+热量。合成工艺流程可概括为:
The invention prepares the synthesis of aluminum nitride based on the aluminum gasification reaction, and the reaction equation is: 2Al+N 2 →2AlN+heat. The synthesis process can be summarized as:
在喷雾单元中,固态铝颗粒(优选脱氧、高纯、相同尺寸的铝圆粒)加热熔化(1500℃以上),氮气将铝液以铝雾形式输送到气化单元。In the spraying unit, solid aluminum particles (preferably deoxidized, high-purity, aluminum pellets of the same size) are heated and melted (above 1500° C.), and nitrogen gas transports the aluminum liquid to the gasification unit in the form of aluminum mist.
在气化单元中,铝雾、氮气在气化室加热(2500℃左右)成铝气体(单原子),铝气体、氮气体继续通向反应单元。In the gasification unit, the aluminum mist and nitrogen gas are heated in the gasification chamber (about 2500° C.) to form aluminum gas (monatomic), and the aluminum gas and nitrogen gas continue to lead to the reaction unit.
在反应单元中,通入氮气用来降温至1300-1500℃,铝气体(单原子)和氮气发生反应合成氮化铝。In the reaction unit, nitrogen is introduced to cool down to 1300-1500°C, and aluminum gas (monatomic) reacts with nitrogen to synthesize aluminum nitride.
在冷却单元中,对合成所得的氮化铝进一步冷却,出料。In the cooling unit, the synthesized aluminum nitride is further cooled and discharged.
通过本发明装置进行氮化铝粉体合成,原料反应完全,合成所得氮化铝粉体纯度高(可达99.99%以上),粉体粒径均匀为纳米级且不易团聚,可实现连续化生产,产量高、产出快,所需配套设备少、成本低。The device of the invention is used to synthesize aluminum nitride powder, the raw materials are completely reacted, the purity of the synthesized aluminum nitride powder is high (up to 99.99% or more), the particle size of the powder is uniform in nano-scale and not easy to agglomerate, and continuous production can be realized. , high output, fast output, less supporting equipment and low cost.
所述物料收集系统与冷却单元的出口连接用于物料的气粉分离、回收和包装。The material collection system is connected with the outlet of the cooling unit for gas-powder separation, recovery and packaging of materials.
所述供氮系统用于喷雾单元、反应单元和冷却单元的氮气供应。The nitrogen supply system is used for nitrogen supply of spray unit, reaction unit and cooling unit.
所述制冷系统用于喷雾单元、气化单元和冷却单元的冷媒介质循环供应。The refrigeration system is used for the circulating supply of the cooling medium of the spraying unit, the gasification unit and the cooling unit.
所述供氩系统与喷雾单元(铝液仓顶部)、外壳连通用于氩气供应。The argon supply system is communicated with the spray unit (the top of the aluminum liquid silo) and the outer shell for argon gas supply.
作为优选,所述物料收集系统包括气粉分离装置、包装装置和回收气体储罐;所述气粉分离装置与冷却单元的出口连接,所述包装装置和回收气体储罐分别与气粉分离装置的粉料出口和气体出口连接;回收气体储罐还分别为包装装置、喷雾单元(送铝机构)提供动力用气。Preferably, the material collection system includes a gas powder separation device, a packaging device and a recovered gas storage tank; the gas powder separation device is connected to the outlet of the cooling unit, and the packaging device and the recovered gas storage tank are respectively connected with the gas powder separation device The powder outlet and the gas outlet are connected; the recovered gas storage tank also provides power gas for the packaging device and the spray unit (aluminum feeding mechanism).
作为优选,所述供氮系统包括制氮装置、氮气罐、氮气冷冻机和液氨罐;所述制氮装置与氮气罐连接,氮气罐分别与喷雾单元、反应单元和冷却单元连接,且氮气罐与反应单元和冷却单元连接的管路上设有所述氮气冷冻机;所述液氨罐与反应单元连接。Preferably, the nitrogen supply system includes a nitrogen generator, a nitrogen tank, a nitrogen freezer and a liquid ammonia tank; the nitrogen generator is connected to the nitrogen tank, the nitrogen tank is respectively connected to the spray unit, the reaction unit and the cooling unit, and the nitrogen The nitrogen refrigerator is provided on the pipeline connecting the tank with the reaction unit and the cooling unit; the liquid ammonia tank is connected with the reaction unit.
本发明对反应单元同时采用氮气和液氨输送氮源,其好处在于:①在装置外微量液氨添加到氮气中输入反应单元,液氨在反应单元升温后分解为氢原子和氮原子,由于铝材料和氮气中含微量氧原子,氢原子与气化单元下行的气体中氧原子结合为水,起脱氧作用;②氮气输入反应单元与气化单元下行的气体混合后降温至1300-1500°后氮气与铝气体反应合成氮化铝,氮气为反应原料;③在反应单元氮气与铝气体反应合成氮化铝粉体是气体变固体、降温800-1000°,压力迅速下降,输入的氮气使气压保持。The present invention simultaneously adopts nitrogen gas and liquid ammonia to transport nitrogen source to the reaction unit, and its advantages are: (1) a trace amount of liquid ammonia is added to the nitrogen gas outside the device to be input into the reaction unit, and the liquid ammonia is decomposed into hydrogen atoms and nitrogen atoms after the temperature of the reaction unit is heated up. The aluminum material and nitrogen contain trace oxygen atoms, and the hydrogen atoms combine with the oxygen atoms in the gas going down the gasification unit to form water, which plays a role in deoxidation; ② the nitrogen input to the reaction unit is mixed with the gas going down the gasification unit and then cooled to 1300-1500° Then nitrogen reacts with aluminum gas to synthesize aluminum nitride, and nitrogen is the raw material for the reaction; ③In the reaction unit, nitrogen reacts with aluminum gas to synthesize aluminum nitride powder. The gas becomes solid, and the temperature is lowered by 800-1000°, and the pressure drops rapidly. Air pressure maintained.
本发明中供氩系统的氩气通入喷雾单元的铝液仓,与铝液仓内氮气输送管同步加压,使铝液通过喷嘴喷出;氩气通入外壳内,起保压作用。In the present invention, the argon gas of the argon supply system is passed into the aluminum liquid silo of the spray unit, and is pressurized synchronously with the nitrogen conveying pipe in the aluminum liquid silo, so that the aluminum liquid is ejected through the nozzle;
本发明制冷系统中的冷媒介质的分布走向:①一路通入喷雾单元顶盖;②二路通入气 化单元、反应单元的测压口的连接管冷却;③一路通入感应线圈冷却;④二路通入冷却单元的上下段部。The distribution trend of the refrigerant medium in the refrigeration system of the present invention: (1) one channel leads to the top cover of the spray unit; (2) two channels lead to the connecting pipe of the gasification unit and the pressure measuring port of the reaction unit for cooling; (3) one channel leads to the induction coil for cooling; (4) The two paths lead to the upper and lower sections of the cooling unit.
本发明中氮气罐中的氮气分五路分布走向:①通入送铝机构,用作保护气体;②通入喷雾单元的氮气喷管,气载喷雾;③通入反应单元,起降温、反应、增压作用;④通入冷却单元,起降温、增压作用;⑤通入氮气冷冻机,制冷后的氮气分二路通向反应单元和冷却单元。本发明中的液氨通入反应单元。In the present invention, the nitrogen in the nitrogen tank is divided into five distribution directions: 1) pass into the aluminum feeding mechanism, which is used as protective gas; 2) pass into the nitrogen nozzle of the spray unit for air-borne spray; 3) pass into the reaction unit to cool down and react , pressurization; ④ Pass into the cooling unit, play the role of cooling and pressurization; The liquid ammonia in the present invention is passed into the reaction unit.
本发明中从冷却单元出口的气粉经气粉分离后,气体经增压泵回收,气粉25-30℃。In the present invention, after the gas powder from the outlet of the cooling unit is separated by the gas powder, the gas is recovered by the booster pump, and the gas powder is 25-30°C.
本发明中回收气体使用及分布走向为:①包装设备动力用气;②送铝机构动力用气;③送铝机构下料阀动力用气。The use and distribution trends of the recovered gas in the present invention are: ① power gas for packaging equipment; ② power gas for aluminum feeding mechanism; ③ power gas for blanking valve of aluminum feeding mechanism.
作为优选,所述喷雾单元包括:送铝机构、保温壳体、加热罩、铝液仓、氮气喷管和绝缘盖座。所述加热罩设于保温壳体内,加热罩内壁上布设有电热丝;所述铝液仓的中下段设于加热罩内且与加热罩内壁之间设有间隙,铝液仓的底部延伸出加热罩底部且设有向下的雾化喷嘴;所述氮气喷管通入铝液仓内中央且其出气口朝向所述雾化喷嘴;所述送铝机构设于铝液仓的顶部;所述绝缘盖座设于保温壳体和加热罩的下方,绝缘盖座的内圈与铝液仓的底部外壁之间设有间隙。Preferably, the spraying unit includes: an aluminum feeding mechanism, a thermal insulation shell, a heating cover, an aluminum liquid silo, a nitrogen nozzle and an insulating cover seat. The heating cover is arranged in the heat preservation shell, and the inner wall of the heating cover is provided with electric heating wires; the middle and lower sections of the aluminum liquid silo are arranged in the heating cover and have a gap with the inner wall of the heating cover, and the bottom of the aluminum liquid silo extends out The bottom of the heating mantle is provided with a downward atomizing nozzle; the nitrogen nozzle is passed into the center of the aluminum liquid silo and its air outlet faces the atomizing nozzle; the aluminum feeding mechanism is arranged on the top of the aluminum liquid silo; The insulating cover seat is arranged below the heat preservation shell and the heating cover, and a gap is provided between the inner ring of the insulating cover seat and the bottom outer wall of the aluminum liquid silo.
本发明喷雾单元的工作原理为:铝液仓内通氩气加压至0.5-0.55MPa(5-5.5公斤),加热罩分部加热、分部控温,在铝液仓上部将固态铝颗粒加热至700-800℃,中下部以不同的电功率将铝液加热至1600-1700℃;氮气喷管内通入氮气加压0.55-0.6MPa(5.5-6公斤)作喷雾输送气体,通过雾化喷嘴喷出铝雾进入气化单元。The working principle of the spraying unit of the present invention is as follows: the aluminum liquid silo is pressurized with argon gas to 0.5-0.55MPa (5-5.5 kg), the heating cover is heated in parts, the temperature is controlled in parts, and solid aluminum particles are placed on the upper part of the aluminum liquid silo. Heating to 700-800 ℃, heating the aluminum liquid to 1600-1700 ℃ with different electric power in the middle and lower part; feeding nitrogen into the nitrogen nozzle to pressurize 0.55-0.6MPa (5.5-6 kg) as a spraying gas, through the atomizing nozzle The aluminum mist is sprayed into the gasification unit.
作为优选,所述喷雾单元通过托架固定于外壳内。具体地,托架可以是由四支金属条相互垂直与中间圆环(陶瓷材质)连结而成,托架金属条置放在外壳内壁的挡块上,使托架悬挂。发热罩挂于托架上,底部嵌入绝缘盖座。铝液仓从外壳顶部的法兰口插入发热罩内,与发热罩的发热丝之间设有间隙,喷雾单元上部法兰固定在外壳顶部的法兰上。Preferably, the spray unit is fixed in the housing through a bracket. Specifically, the bracket may be formed by connecting four metal bars perpendicular to each other with the middle ring (ceramic material), and the bracket metal bars are placed on the stopper on the inner wall of the housing to make the bracket hang. The heating cover is hung on the bracket, and the bottom is embedded with an insulating cover. The aluminum liquid silo is inserted into the heating hood from the flange port on the top of the housing, and there is a gap between the heating wire of the heating hood and the upper flange of the spray unit is fixed on the flange on the top of the housing.
作为优选,所述绝缘盖座的内圈与铝液仓的底部外壁之间的间隙为1-2mm。Preferably, the gap between the inner ring of the insulating cover seat and the bottom outer wall of the aluminum liquid silo is 1-2 mm.
喷雾单元底部隔着嵌入气化单元内的绝缘盖座内圈,绝缘盖座安置于气化单元上方。需要特别注意的是,圆环形绝缘盖座的内圈与铝液仓的底部外壁留有1-2mm间隙,间隙能够确保铝液仓加热膨胀后有足够的伸缩预留空间。而绝缘盖座的作用是:气化单元采用中频感应加热,发热体内层中设有发热体内层,会产生感应电,铝液仓为钨合金材质,绝缘盖座可隔绝发热体内层、铝液仓等热膨胀后接触导电。The bottom of the spray unit is separated from the inner ring of the insulating cover seat embedded in the vaporizing unit, and the insulating cover seat is arranged above the vaporizing unit. It should be noted that there is a gap of 1-2mm between the inner ring of the annular insulating cover base and the bottom outer wall of the aluminum liquid silo. The gap can ensure that the aluminum liquid silo has enough space for expansion and contraction after heating and expansion. The function of the insulating cover is: the gasification unit adopts intermediate frequency induction heating, the heating inner layer is provided with a heating inner layer, which will generate induced electricity, the aluminum liquid silo is made of tungsten alloy, and the insulating cover can isolate the heating inner layer and aluminum liquid. After the thermal expansion of the warehouse, etc., the contact is conductive.
作为优选,所述外壳上设有氩气入口,所述铝液仓的顶部设有氩气进口。Preferably, the shell is provided with an argon gas inlet, and the top of the aluminum liquid silo is provided with an argon gas inlet.
本发明对外壳内部通氩气的作用在于:①由于本发明装置中的发热填充体、隔热层以及隔热板等优选石墨及石墨硬毡等材质,因此在高温下容易散发出碳微粒。为此,本发明有针对性地向外壳内通氩气起保护作用,使碳微粒不散发,保持耐用;防止碳微粒渗透进入气化单元、反应单元使氮化铝纯度降低。②由于绝缘盖座与铝液仓之间存在间隙,因此气化单元中铝气化后膨胀产生气压会向该间隙缝溢出,而控制通入氩气的压力≥气化室的压力,可使室内外气压保持相平稳。The effects of the present invention on the argon flow inside the casing are: 1. Since the heating filler, the heat insulating layer and the heat insulating plate in the device of the present invention are preferably made of graphite and graphite hard felt, carbon particles are easily emitted at high temperatures. For this reason, the present invention provides a protective effect by directing argon gas into the shell, so that the carbon particles do not emit and maintain durability; and the carbon particles are prevented from infiltrating into the gasification unit and the reaction unit, so that the purity of the aluminum nitride is reduced. ②Because there is a gap between the insulating cover and the aluminum liquid silo, the air pressure generated by the expansion of aluminum in the gasification unit will overflow into the gap, and the pressure of the argon gas to be controlled ≥ the pressure of the gasification chamber can make The indoor and outdoor air pressure remained relatively stable.
作为优选,铝液仓顶部设有氩气进口。本发明对铝液仓顶部通氩气的作用在于:①由于喷雾嘴的口径小于0.5mm,铝液流动性差、阻力大,氮气喷管口对着喷雾嘴口喷气时,氮气从铝液中冒上铝液仓上部空间,一是喷出铝液不能雾化、上部温度过高,二是上部铝液面与氮气氮化合成一层氮化铝膜,以致铝液化、雾化终止。②上部通入氩气与氮气喷管同时加压,氮气带着铝液从喷嘴喷出形成雾状,氩气为惰性气体,不与铝液发生反应。Preferably, an argon gas inlet is provided at the top of the aluminum liquid silo. The effect of the present invention on the top of the liquid aluminum silo vented with argon is as follows: (1) Since the diameter of the spray nozzle is less than 0.5mm, the liquid aluminum has poor fluidity and large resistance, and when the nitrogen nozzle is sprayed against the spray nozzle, nitrogen gas is emitted from the aluminum liquid. In the upper space of the upper aluminum liquid silo, one is that the sprayed aluminum liquid cannot be atomized, and the upper temperature is too high, and the other is that the upper aluminum liquid surface and nitrogen are nitrided to form a layer of aluminum nitride film, so that the aluminum liquefaction and atomization are terminated. ②Introduce argon gas into the upper part and pressurize the nitrogen nozzle at the same time. The nitrogen gas is sprayed from the nozzle with the aluminum liquid to form a mist. The argon gas is an inert gas and does not react with the aluminum liquid.
作为优选,所述送铝机构与铝液仓之间的管道上设有串联且交错开关的两道阀门。Preferably, the pipeline between the aluminum feeding mechanism and the aluminum liquid silo is provided with two valves which are connected in series and are switched on and off in a staggered manner.
在现有技术中,送铝机构与加热熔融机构之间的管道中通常只设有一道阀门,或者即使设有多道阀门但也只是作为备用,并未进行有针对性的联动配合。而本发明在送铝机构与铝液仓之间的管道上设有串联且交错开关的两道阀门。两道阀门相隔间装铝圆粒,当下阀门打开时,铝圆粒自动脱落至喷雾单元内;当上阀门打开时铝圆粒从料仓中落入管内,可根据需要例如每2-3秒上下阀门开关一次,进料一次。通过该小量、频繁的特殊进料方式能够有效减小喷雾单元内压力脉冲波动,使喷雾均匀。In the prior art, there is usually only one valve in the pipeline between the aluminum feeding mechanism and the heating and melting mechanism, or even if there are multiple valves, it is only used as a backup, and no targeted linkage is performed. In the present invention, two valves which are connected in series and staggered are provided on the pipeline between the aluminum feeding mechanism and the aluminum liquid silo. The two valves are separated by aluminum pellets. When the lower valve is opened, the aluminum pellets will automatically fall off into the spray unit; when the upper valve is opened, the aluminum pellets will fall into the pipe from the silo, for example, every 2-3 seconds as required. The upper and lower valves are switched on and off once, and the material is fed once. The small and frequent special feeding method can effectively reduce the pressure pulse fluctuation in the spray unit and make the spray uniform.
作为优选,所述送铝机构上设有氮气入口。Preferably, the aluminum feeding mechanism is provided with a nitrogen inlet.
该生产线的装置内是在全封闭中进行,发明人在实践中发现,现有技术的固态铝送料装置,由于在上料时有空气带人,物料之间发生摩擦,容易产生静电和铝氧化。为此,本发明在送铝机构的料仓以及输送管道中通氮气将空气排出,在氮气的保护中工作,能够避免摩擦产生静电和铝氧化。The production line is carried out in a fully enclosed device. The inventor found in practice that the solid aluminum feeding device in the prior art is prone to static electricity and aluminum oxidation due to friction between the materials due to air being carried during feeding. . Therefore, in the present invention, nitrogen is passed through the silo and the conveying pipeline of the aluminum feeding mechanism to discharge the air, and works under the protection of nitrogen, which can avoid static electricity generated by friction and aluminum oxidation.
作为优选,所述雾化喷嘴喷出的物料形状为圆锥形,内角90-120°、边长30-40mm、雾粒径3-5微米。喷出铝雾每秒1.5-2克重,喷雾输送氮气每秒0.8-1立方分米。Preferably, the shape of the material sprayed from the atomizing nozzle is conical, with an inner angle of 90-120°, a side length of 30-40 mm, and a mist particle size of 3-5 microns. The sprayed aluminum mist weighs 1.5-2 grams per second, and the spray conveys nitrogen gas at 0.8-1 cubic decimeter per second.
本发明将铝雾喷出的条件具体限制在上述条件的原因在于:①当喷雾角度小于90°时雾锥体体积缩小,雾粒分布密度增大,颗粒增大,不易气化;②当喷雾角度小于90°时雾锥体体积缩小,雾锥体的高度增加,铝雾接近缩腰结构,缩腰口部位温度相对较低,随着铝雾氮气热膨胀、气化塞(室)和反应塞(室)的压力差,未雾气化的铝雾直接流进反应塞(室),以致反应不完全。The reason why the present invention specifically limits the conditions for the spraying of aluminum mist to the above-mentioned conditions is that: (1) when the spray angle is less than 90°, the volume of the mist cone decreases, the distribution density of the mist particles increases, the particles increase, and it is not easy to gasify; (2) when the spray angle is smaller than 90° When the angle is less than 90°, the volume of the fog cone decreases, the height of the fog cone increases, the aluminum fog is close to the waist shrinking structure, and the temperature of the waist shrinking port is relatively low. (chamber) pressure difference, the non-atomized aluminum mist flows directly into the reaction plug (chamber), so that the reaction is not complete.
作为优选,所述加热罩和铝液仓的上段口径大于下段口径。Preferably, the diameter of the upper section of the heating mantle and the liquid aluminum silo is larger than the diameter of the lower section.
作为优选,所述铝液仓的顶壁上设有上冷媒夹套。Preferably, an upper refrigerant jacket is provided on the top wall of the aluminum liquid silo.
所述铝液仓、雾化喷嘴和氮气喷管为钨合金材料;所述加热罩、绝缘盖座为陶瓷材料。The aluminum liquid silo, the atomizing nozzle and the nitrogen nozzle are made of tungsten alloy material; the heating cover and the insulating cover seat are made of ceramic material.
作为优选,所述气化单元包括:由上保温绝缘外层、隔热中层和发热体内层依次构成的气化室、感应线圈。所述气化室的顶部中央设有用于安置绝缘盖座的开口;气化室的底部中央设有连通反应单元的开口;所述感应线圈包裹于上保温绝缘外层的外侧;所述发热体内层的底部呈口径递减的锥形,所述锥形与隔热中层之间的空隙处填充有发热填充体和隔热板;所述隔热板位于气化室的底部位置。Preferably, the gasification unit includes: a gasification chamber and an induction coil sequentially formed by an upper heat-insulating and insulating outer layer, a heat-insulating middle layer and a heating inner layer. The center of the top of the gasification chamber is provided with an opening for placing the insulating cover; the center of the bottom of the gasification chamber is provided with an opening to communicate with the reaction unit; the induction coil is wrapped on the outer side of the upper thermal insulation outer layer; the heating body is The bottom of the layer is a cone with a decreasing diameter, and the space between the cone and the heat insulating middle layer is filled with a heating filler and a heat insulating plate; the heat insulating plate is located at the bottom of the gasification chamber.
本发明气化单元的工作原理为:采用中频感应线圈将发热体内层感应加热至2500℃左右,使气化室内空间温度超过2327℃(铝气化温度2327℃),气化室内的铝气体、氮气体加热后体积膨胀,铝雾连续喷入,气化室内产生一定的气压,气流向下通入反应单元。The working principle of the gasification unit of the present invention is as follows: the intermediate frequency induction coil is used to inductively heat the inner layer of the heating body to about 2500°C, so that the space temperature in the gasification chamber exceeds 2327°C (aluminum gasification temperature is 2327°C), and the aluminum gas in the gasification chamber, After the nitrogen gas is heated, the volume expands, the aluminum mist is continuously sprayed, and a certain air pressure is generated in the gasification chamber, and the air flow downwards into the reaction unit.
气化单元的底部与反应单元之间设计有呈沙漏状的缩腰结构。该结构的作用是:①起保温作用,缩腰后上下气体流速减慢,使铝雾在气化室停留时间增长,达到铝雾完全气化;②气化室温度要求2500℃,反应室温度要求1300-1500℃,温差1000-1200℃,通过缩腰结构将其隔开,可控制上下两室温度。An hourglass-shaped waisted structure is designed between the bottom of the gasification unit and the reaction unit. The function of this structure is: ①It plays a role of heat preservation. After shrinking the waist, the flow rate of the upper and lower gas slows down, so that the residence time of the aluminum mist in the gasification chamber is increased, and the aluminum mist is completely gasified; ②The temperature of the gasification chamber is required to be 2500℃, and the temperature of the reaction chamber is 2500℃. It is required to be 1300-1500 ℃ and the temperature difference is 1000-1200 ℃. It is separated by a waist shrinking structure, and the temperature of the upper and lower chambers can be controlled.
由于缩腰结构处的发热体内层离感应线圈较远,感应加热效果较差。为此本发明在该结构内部填充发热填充体,发热填充体传热至缩腰部,感应加热时先对发热填充体加热,然后发热填充体再传热至发热体内层,确保气化室底部的温度。Since the inner layer of the heating body at the waist-shrinking structure is far away from the induction coil, the induction heating effect is poor. For this reason, the present invention fills the heat-generating filler inside the structure, and the heat-generating filler transfers heat to the waist shrinking portion. During induction heating, the heat-generating filler is first heated, and then the heat-generating filler transfers heat to the inner layer of the heat-generating body to ensure the bottom of the gasification chamber. temperature.
气化室与反应室的温差达到900-1000℃,为了使各自区域保持相应的温度,本发明缩腰结构的底部设置有隔热板,使上下不传热。The temperature difference between the gasification chamber and the reaction chamber reaches 900-1000°C. In order to maintain the corresponding temperature in the respective areas, the bottom of the waist-reduced structure of the present invention is provided with a heat insulation board to prevent heat transfer from top to bottom.
作为优选,所述反应单元包括:由下保温绝缘外层和耐热内层构成的反应室、涡旋喷管。所述耐热内层的底部呈口径递减的锥形,锥形底部中央连接有出料管,所述涡旋喷管通过出料管由反应室外伸入反应室内,且涡旋喷管的出气端设有涡旋喷嘴,所述涡旋喷嘴位于气化室底部开口正下方且喷气方向向上。Preferably, the reaction unit includes: a reaction chamber composed of a lower thermal insulation outer layer and a heat-resistant inner layer, and a vortex nozzle. The bottom of the heat-resistant inner layer is in the shape of a cone with a decreasing diameter, and a discharge pipe is connected in the center of the cone bottom. The end is provided with a vortex nozzle, the vortex nozzle is located just below the bottom opening of the gasification chamber and the air jet direction is upward.
本发明反应单元的工作原理为:铝气体、氮气体流入反应室时温度>2327℃,此时的铝气体、氮气体(部分离解单原子)非常活泼,而反应最佳温度为1300-1500℃,为了实现快速降温,本发明采用通氮气方式降温至反应温度,反应原料快速反应合成氮化铝。The working principle of the reaction unit of the present invention is as follows: when the aluminum gas and nitrogen gas flow into the reaction chamber, the temperature is greater than 2327° C. At this time, the aluminum gas and nitrogen gas (partially dissociated single atoms) are very active, and the optimum reaction temperature is 1300-1500° C. , In order to achieve rapid cooling, the present invention adopts the method of passing nitrogen to cool down to the reaction temperature, and the reaction raw materials are rapidly reacted to synthesize aluminum nitride.
然而,发明人在试验过程中发现了新的技术问题:该合成反应是一个气体变固体过程,气体体积急剧收缩,压力迅速缩小,导致气化室与反应室产生压差,上下流速会过快。为此,本发明将外部氮气通过涡旋喷嘴以螺旋形式向下行气流对吹,对吹的气流向四周螺旋扩散, 使气体分布均匀、气温均匀、反应均匀、反应完全。通入氮气为过量氮气,过量氮气带动粉体流动。以该方式将外部氮气后输入后可保持气化室和反应室上下气压均衡、物料流速减慢。However, the inventor discovered a new technical problem during the test: the synthesis reaction is a process of gas becoming solid, the gas volume shrinks rapidly, and the pressure shrinks rapidly, resulting in a pressure difference between the gasification chamber and the reaction chamber, and the up and down flow rate will be too fast . To this end, the present invention blows the external nitrogen gas downward in a spiral form through the vortex nozzle, and the oppositely blown gas spreads spirally around, so that the gas distribution is uniform, the temperature is uniform, the reaction is uniform, and the reaction is complete. The incoming nitrogen is excess nitrogen, and the excess nitrogen drives the flow of the powder. In this way, after the external nitrogen is input, the upper and lower pressures of the gasification chamber and the reaction chamber can be kept balanced, and the material flow rate can be slowed down.
作为优选,所述涡旋喷嘴喷出的气流呈扇形50-70°内角螺旋。Preferably, the air flow ejected from the swirl nozzle is a fan-shaped spiral with an internal angle of 50-70°.
本发明将气流具体限制在上述角度的原因在于:①内角小于50°时,扇形弧短,气流喷射力大,容易将下行的铝气体喷射到反应室顶部,顶部温度过高,反弹下来的气流快速流入冷却单元,导致降温不均匀,反应不完全;②内角大于70°时,扇形弧长长,气体密度小,喷射力小,不易将下行的铝气体吹散,铝气体包裹在涡旋喷嘴周围,降温不均匀,反应也不完全。The reason why the present invention specifically limits the airflow to the above-mentioned angle is: 1. when the inner angle is less than 50°, the fan arc is short, and the jetting force of the airflow is large, and it is easy to spray the descending aluminum gas to the top of the reaction chamber, the top temperature is too high, and the rebounded airflow Rapidly flowing into the cooling unit, resulting in uneven cooling and incomplete reaction; ②When the inner angle is greater than 70°, the fan arc is long, the gas density is small, and the spray force is small, and it is not easy to blow the descending aluminum gas, and the aluminum gas is wrapped in the vortex nozzle. Around, the cooling is uneven and the reaction is not complete.
作为优选,所述上保温绝缘外层和下保温绝缘外层为一体成型;所述发热体内层和耐热内层为分开成型,插入连接。Preferably, the upper thermal insulation outer layer and the lower thermal insulation outer layer are integrally formed; the heating inner layer and the heat-resistant inner layer are separately formed and connected by insertion.
作为优选,所述上、下保温绝缘外层为保温棉材质;所述隔热中层和隔热板为石墨硬毡材质;所述发热填充体为石墨材质。所述发热体内层、耐热内层为钨合金材料。Preferably, the upper and lower heat-insulating outer layers are made of heat-insulating cotton; the heat-insulating middle layer and the heat-insulating plate are made of graphite hard felt; and the heat-generating filler is made of graphite. The heating inner layer and the heat-resistant inner layer are made of tungsten alloy material.
作为优选,所述反应单元通过底托座架设于外壳底部;所述底托座为金属材质,Preferably, the reaction unit is erected on the bottom of the shell through a bottom bracket; the bottom bracket is made of metal,
作为优选,喷雾单元、气化单元、反应单元安装在同一不锈钢材质外壳中,采用组织式层层叠放安装,安装时在陶瓷底托座上放置耐热内层、耐热内层上叠放隔热板,隔热板上放置发热填充体,发热填充体上放置气化单元的发热体内层,发热体内层上放置隔热板,隔热板上同时放置绝缘盖座,在气化单元和反应单元安装隔热保温材料,在气化单元外壁四周安装感应线圈,在外壳上部安装托架,发热罩从托架圆环内圈插入放置在圆环上,盖上外壳上盖,铝液仓从上盖顶部法兰口经发热罩内圈插入绝缘盖座内圈,铝液仓法兰与上盖法兰固定,组装式安装不需要焊接,在使用过程需要部件更换、修理、清理带来极大方便。Preferably, the spraying unit, the gasification unit and the reaction unit are installed in the same stainless steel shell, and are installed in layers in a structured way. During installation, the heat-resistant inner layer is placed on the ceramic base bracket, and the heat-resistant inner layer is stacked on the inner layer. The heating plate, the heat-generating filler is placed on the heat-insulating plate, the heating inner layer of the gasification unit is placed on the heating-filling body, the heat insulating plate is placed on the heating body layer, and the insulating cover is placed on the heat insulating plate at the same time. The unit is installed with thermal insulation materials, an induction coil is installed around the outer wall of the gasification unit, a bracket is installed on the upper part of the casing, the heating cover is inserted from the inner ring of the bracket ring and placed on the ring, and the upper cover of the outer casing is covered. The flange port on the top of the upper cover is inserted into the inner ring of the insulating cover seat through the inner ring of the heating cover. The flange of the aluminum liquid tank is fixed with the flange of the upper cover. The assembled installation does not require welding. It needs to be replaced, repaired and cleaned during use. Great convenience.
作为优选,所述冷却单元包括:冷却室壳体、螺旋喷嘴和下冷媒夹套;冷却室壳体的顶部中央设有开口,所述螺旋喷嘴设于开口处且通过连接法兰与反应单元的出料管连接,螺旋喷嘴方向向下;冷却室壳体上设有氮气进口,冷却室壳体的底部呈口径递减的锥形,锥形底部中央为气粉出口;所述下冷媒夹套设于冷却室壳体的外侧。Preferably, the cooling unit includes: a cooling chamber casing, a spiral nozzle and a lower refrigerant jacket; an opening is provided in the center of the top of the cooling chamber casing, and the spiral nozzle is arranged at the opening and is connected to the reaction unit through the connecting flange. The discharge pipe is connected, and the direction of the spiral nozzle is downward; the cooling chamber shell is provided with a nitrogen inlet, the bottom of the cooling chamber shell is in the shape of a cone with decreasing diameter, and the center of the cone bottom is the gas powder outlet; the lower refrigerant jacket is provided with on the outside of the cooling chamber housing.
本发明的冷却单元采用冷媒夹套(优选水冷)和氮气冷却两种方式联合冷却,该联合冷却的优点在于:①从反应室流入冷却单元的气粉温度需要由约1450℃降至50℃左右,温差达1400℃,在短时间内无法快速冷却,水冷却相对氮气冷却成本低,但时长,冷却不均匀,冷却速率慢,且颗粒还容易团聚黏合;而配合氮气冷却不仅可降低冷却时间,且可有效冲散团聚颗粒。②气粉在冷却单元内迅速冷却后,压力迅速缩小,导致反应室与冷却室的压力差加大,使气粉流动过快,在冷却室内通入氮气冷却,可增加冷却室的压力,使反应室流向冷 却室气粉流速减慢,气粉减速的同时也为其冷却争取了更多时间。The cooling unit of the present invention adopts two methods of combined cooling: refrigerant jacket (preferably water cooling) and nitrogen cooling. The advantages of this combined cooling are: 1. The temperature of the gas powder flowing into the cooling unit from the reaction chamber needs to be reduced from about 1450°C to about 50°C , the temperature difference reaches 1400 °C, and it cannot be quickly cooled in a short period of time. Compared with nitrogen cooling, water cooling has lower cost, but the time is long, the cooling is uneven, the cooling rate is slow, and the particles are easy to agglomerate and bond; and the combination of nitrogen cooling can not only reduce the cooling time, but also And can effectively disperse agglomerated particles. ②After the gas powder is rapidly cooled in the cooling unit, the pressure decreases rapidly, resulting in an increase in the pressure difference between the reaction chamber and the cooling chamber, which makes the gas powder flow too fast. The flow rate of the gas powder from the reaction chamber to the cooling chamber slows down, and the gas powder slows down and also buys more time for its cooling.
作为优选,冷却单元采用上下二段分体法兰连接,优点:卸掉下段时,从敞开口安装、更换蜗旋喷管、螺旋喷嘴、修复、清理极为方便。As an option, the cooling unit adopts the upper and lower two-section split flange connection. The advantages are: when the lower section is removed, it is extremely convenient to install, replace, repair and clean the spiral nozzle and spiral nozzle from the open port.
本发明冷却单元设置有朝向反应室底部开口的螺旋喷嘴,其作用在于:①气粉通过螺旋喷嘴中螺旋条的阻挡,降低气粉直喷下沉速度,从而有效减轻粉末对内壁的冲击。②反应室合成粉末经出料口时,颗粒受到挤压,密度增大容易产生团聚,经螺旋喷嘴螺旋条撞击后可将其打散。③经螺旋喷嘴喷出的螺旋气粉在冷却室分布均匀,冷却快速、均匀。The cooling unit of the present invention is provided with a spiral nozzle that opens toward the bottom of the reaction chamber, and its functions are: (1) The gas powder passes through the helical bar in the spiral nozzle to reduce the sinking speed of the gas powder direct injection, thereby effectively reducing the impact of the powder on the inner wall. ②When the synthetic powder in the reaction chamber passes through the discharge port, the particles are extruded, and the density increases easily to agglomerate, which can be broken up after being hit by the spiral strip of the spiral nozzle. ③The spiral gas powder sprayed by the spiral nozzle is evenly distributed in the cooling chamber, and the cooling is fast and uniform.
本发明冷却单元的螺旋喷嘴通过连接法兰与反应室底部的出料管紧密连接,可起到控制气粉流量作用(选择连接管不同的内径)。The spiral nozzle of the cooling unit of the present invention is tightly connected with the discharge pipe at the bottom of the reaction chamber through the connecting flange, which can play the role of controlling the flow of gas and powder (selecting different inner diameters of the connecting pipe).
作为优选,气粉从所述螺旋喷嘴的螺旋条间隙喷出,形成内角90-120°扇形螺旋旋转气流。Preferably, the air powder is ejected from the spiral strip gap of the spiral nozzle to form a fan-shaped spiral rotating airflow with an inner angle of 90-120°.
本发明将螺旋旋转气流具体限制在上述角度的原因在:①颗粒通过喷嘴管道时容易团聚,内角大于120°时,气粉在喷嘴螺旋条喷射力减小,不易打散团聚颗粒;②内角小于90°时,喷射力大,流速过快,降温不均匀,颗粒还会产生团聚。The reason why the present invention specifically limits the spiral rotating airflow to the above-mentioned angle is: 1. the particles are easy to agglomerate when passing through the nozzle pipe, and when the inner angle is greater than 120°, the jet force of the air powder on the nozzle spiral is reduced, and it is difficult to disperse the agglomerated particles; 2. the inner angle is less than At 90°, the ejection force is large, the flow rate is too fast, the cooling is uneven, and the particles will agglomerate.
作为优选,所述出料管、连接法兰为钨合金材料;螺旋喷嘴为陶瓷材料。Preferably, the discharge pipe and the connecting flange are made of tungsten alloy material; the spiral nozzle is made of ceramic material.
作为优选,所述外壳、喷雾单元、气化单元、反应单元和冷却单元的不同位置上设有测温口和测压口。Preferably, a temperature measuring port and a pressure measuring port are provided at different positions of the casing, the spraying unit, the gasification unit, the reaction unit and the cooling unit.
综上,本发明装置在实施过程中,需做好以下几点:①控制喷雾单元中的铝水的压力、温度,氮气喷管中的气压、气流量,确保铝雾粒径在3-5微米之间。②气化室温度>2327℃,反应室为1300-1500℃。③为了促进反应,气体、气粉流速稳定,需采取分部气压存在压差。④为了理想反应,需要降温至1300-1500℃;而反应合成又是放热反应,下落时容易产生团聚大颗粒;此外铝气体与氮气反应合成氮化铝粉体是降温后反应、是气体变固体,反应室内压力减少。因此需要控制好向反应室通入氮气的方式以及工艺来实现降温、补气、匀温、增压、防止颗粒团聚。To sum up, in the implementation process of the device of the present invention, the following points need to be done: 1. Control the pressure and temperature of the aluminum water in the spray unit, the air pressure and air flow in the nitrogen nozzle, and ensure that the particle size of the aluminum mist is 3-5 between microns. ②The temperature of the gasification chamber is more than 2327℃, and the reaction chamber is 1300-1500℃. ③In order to promote the reaction and keep the flow rate of gas and gas powder stable, it is necessary to adopt the partial pressure to exist pressure difference. ④ In order to achieve an ideal reaction, it is necessary to cool down to 1300-1500 °C; and the reaction synthesis is an exothermic reaction, and it is easy to produce large agglomerated particles when falling; in addition, the reaction of aluminum gas and nitrogen to synthesize aluminum nitride powder is a reaction after cooling, and the gas changes. solid, the pressure in the reaction chamber decreases. Therefore, it is necessary to control the method and process of introducing nitrogen into the reaction chamber to achieve cooling, air supply, uniform temperature, pressurization, and prevention of particle agglomeration.
本发明在反应室的出料管中通入一支出口为涡旋喷嘴的涡旋喷管,喷嘴居中向上与气化室下行气体对吹,涡旋喷嘴喷出气流成扇形螺旋,与下行气体混合均匀,降温至1300-1500℃产生反应,降温后使气压减小、铝气体与氮气反应合成氮化铝粒子,过量氮气与粒子比重增大,使氮气与粒子慢速下沉,边反应边下落进入冷却单元。反应室为漏斗形,进入冷却单元气粉经过缩径管道时温度1300-1500℃,气粉密度增大而产生碰撞团聚。因此反应室下端出料管延伸至冷却单元,气粉经过螺旋喷嘴的螺旋条撞击后打散并经螺旋条之间的间隙喷出,形 成扇形旋转气流,经水、冷氮气急冷降温,不产生团聚大颗粒。无需后道的粉碎研磨,保证了直接形成高纯度、高细度、纳米级粉体,粉体易深加工,烧结活性好。In the present invention, a vortex nozzle whose outlet is a vortex nozzle is introduced into the discharge pipe of the reaction chamber. The nozzle is centered upward and blows against the downward gas in the gasification chamber. Mix evenly, cool down to 1300-1500 ℃ to produce reaction, after cooling, reduce the air pressure, aluminum gas reacts with nitrogen to synthesize aluminum nitride particles, the proportion of excess nitrogen and particles increases, and nitrogen and particles sink slowly, while reacting Drop into the cooling unit. The reaction chamber is funnel-shaped. When the gas powder enters the cooling unit and passes through the reducing pipe, the temperature is 1300-1500 ℃, and the density of the gas powder increases, resulting in collision and agglomeration. Therefore, the discharge pipe at the lower end of the reaction chamber extends to the cooling unit, and the gas powder is broken up after being hit by the spiral strips of the spiral nozzle and is ejected through the gap between the spiral strips to form a fan-shaped rotating airflow. Agglomerate large particles. There is no need for subsequent crushing and grinding, which ensures the direct formation of high-purity, high-fineness, nano-scale powder, which is easy to further process and has good sintering activity.
与现有技术对比,本发明的有益效果是:Compared with the prior art, the beneficial effects of the present invention are:
(1)通过本发明生产线通过各系统和合成装置中各单元间协同配合以及优化设计,用于氮化铝合成,不仅原料反应完全,而合成所得氮化铝纯度高(可达99.99%以上),粉体粒径均匀为纳米级且不易团聚。(1) The production line of the present invention is used for the synthesis of aluminum nitride through the synergistic cooperation and optimal design of the various systems and units in the synthesis device. Not only the raw materials are reacted completely, but the purity of the synthesized aluminum nitride is high (up to 99.99% or more) , the powder particle size is uniform in nano-scale and not easy to agglomerate.
(2)本发明纳米氮化铝粉体合成装置从喷雾单元的送铝机构连续进料,从冷却单元底部连续出料,形成连续流水生产,可实现连续化生产,产量高、产出快。(2) The nano aluminum nitride powder synthesis device of the present invention continuously feeds from the aluminum feeding mechanism of the spray unit, and continuously discharges from the bottom of the cooling unit to form continuous flow production, which can realize continuous production with high output and fast output.
(3)本发明生产线所需配套设备少、成本低。(3) The production line of the present invention requires less supporting equipment and low cost.
图1为本发明生产线的一种连接示意图;Fig. 1 is a kind of connection schematic diagram of the production line of the present invention;
图2为本发明纳米氮化铝粉体合成装置的一种内部结构剖视图;2 is a cross-sectional view of an internal structure of the nano-aluminum nitride powder synthesis device of the present invention;
图3为本发明纳米氮化铝粉体合成装置中用于悬挂喷雾单元的托架的一种俯视图;Fig. 3 is a kind of top view of the bracket used for suspending the spray unit in the nano-aluminum nitride powder synthesis device of the present invention;
图4为本发明纳米氮化铝粉体合成装置喷雾单元中铝液仓和氮气喷管的一种结构示意图;Fig. 4 is a kind of structural schematic diagram of the aluminum liquid silo and nitrogen nozzle in the spray unit of the nano-aluminum nitride powder synthesis device of the present invention;
图5为本发明纳米氮化铝粉体合成装置喷雾单元中发热罩的一种结构示意图;5 is a schematic structural diagram of a heating cover in the spray unit of the nano-aluminum nitride powder synthesis device of the present invention;
图6为本发明纳米氮化铝粉体合成装置喷雾单元中铝液仓和绝缘盖座之间间隙的一种结构示意图;6 is a schematic structural diagram of the gap between the aluminum liquid silo and the insulating cover seat in the spray unit of the nano-aluminum nitride powder synthesis device of the present invention;
图7为本发明纳米氮化铝粉体合成装置气化单元的一种结构示意图;7 is a schematic structural diagram of the gasification unit of the nano-aluminum nitride powder synthesis device of the present invention;
图8为本发明纳米氮化铝粉体合成装置反应单元的一种结构示意图;8 is a schematic structural diagram of the reaction unit of the nano-aluminum nitride powder synthesis device of the present invention;
图9为本发明纳米氮化铝粉体合成装置冷却单元的一种结构示意图;9 is a schematic structural diagram of the cooling unit of the nano-aluminum nitride powder synthesis device of the present invention;
图10为本发明纳米氮化铝粉体合成装置中反应单元出料管、连接法兰和冷却单元螺旋喷嘴的一种拆分示意图。Fig. 10 is a schematic diagram of a disassembly of the discharge pipe of the reaction unit, the connecting flange and the spiral nozzle of the cooling unit in the nano-aluminum nitride powder synthesis device of the present invention.
附图标记为:The reference numbers are:
纳米氮化铝粉体合成装置1、制冷系统2、供氩系统3、气粉分离装置4、包装装置5、回收气体储罐6、制氮装置7、氮气罐8、氮气冷冻机9、液氨罐10;Nano aluminum nitride powder synthesis device 1, refrigeration system 2, argon supply system 3, gas powder separation device 4, packaging device 5, recovery gas storage tank 6, nitrogen generator 7, nitrogen tank 8, nitrogen refrigerator 9, liquid Ammonia tank 10;
外壳100、氩气入口101、托架102、底托座103、测温口104、测压口105; housing 100, argon gas inlet 101, bracket 102, bottom bracket 103, temperature measuring port 104, pressure measuring port 105;
送铝机构201、保温壳体202、加热罩203、铝液仓204、氮气喷管205、绝缘盖座206、电热丝207、氩气进口208、雾化喷嘴209、阀门210、氮气入口211、上冷媒夹套212; Aluminum feeding mechanism 201, thermal insulation shell 202, heating cover 203, aluminum liquid silo 204, nitrogen nozzle 205, insulating cover seat 206, electric heating wire 207, argon gas inlet 208, atomizing nozzle 209, valve 210, nitrogen gas inlet 211, Upper refrigerant jacket 212;
上保温绝缘外层301、隔热中层302、发热体内层303、感应线圈304、发热填充体305、隔热板306;The upper thermal insulation outer layer 301, the thermal insulation middle layer 302, the heating inner layer 303, the induction coil 304, the heating filler 305, and the thermal insulation board 306;
下保温绝缘外层401、耐热内层402、涡旋喷管403、出料管404、涡旋喷嘴405;Lower thermal insulation outer layer 401, heat-resistant inner layer 402, vortex nozzle 403, discharge pipe 404, vortex nozzle 405;
冷却室壳体501、螺旋喷嘴502、下冷媒夹套503、连接法兰504、氮气进口505、气粉出口506。Cooling chamber shell 501 , spiral nozzle 502 , lower refrigerant jacket 503 , connecting flange 504 , nitrogen inlet 505 , gas powder outlet 506 .
下面结合实施例对本发明作进一步的描述。The present invention will be further described below in conjunction with the examples.
实施例1Example 1
如图1所示,一种纳米氮化铝粉体合成生产线,包括:纳米氮化铝粉体合成装置1、物料收集系统、供氮系统、制冷系统2和供氩系统3。As shown in FIG. 1 , a nano-aluminum nitride powder synthesis production line includes: a nano-aluminum nitride powder synthesis device 1 , a material collection system, a nitrogen supply system, a refrigeration system 2 and an argon supply system 3 .
具体地:specifically:
如图2所示,所述纳米氮化铝粉体合成装置包括:外壳100、设于外壳内的喷雾单元、设于外壳内且衔接于喷雾单元下方的气化单元、设于外壳内且衔接于气化单元下方的反应单元和衔接于气化单元下方的冷却单元。As shown in FIG. 2 , the nano-aluminum nitride powder synthesis device includes: a casing 100 , a spray unit disposed in the casing, a vaporization unit disposed in the casing and connected below the spray unit, disposed in the casing and connected The reaction unit below the gasification unit and the cooling unit connected below the gasification unit.
如图1所示,所述物料收集系统与冷却单元的出口连接用于物料的气粉分离、回收和包装。物料收集系统包括气粉分离装置4、包装装置5和回收气体储罐6。所述气粉分离装置与冷却单元的出口连接,所述包装装置和回收气体储罐分别与气粉分离装置的粉料出口和气体出口连接(在回收气体储罐与气粉分离装置之间的管路上设有增压泵);回收气体储罐还分别与包装装置和喷雾单元(送铝机构)连接以供应动力用氮气。如图1所示,所述供氮系统包括制氮装置7、氮气罐8、氮气冷冻机9和液氨罐10。所述制氮装置与氮气罐连接,氮气罐分别与喷雾单元、反应单元和冷却单元连接,且氮气罐与反应单元和冷却单元连接的管路上设有氮气冷冻机;所述液氨罐与反应单元连接。As shown in Figure 1, the material collection system is connected to the outlet of the cooling unit for the separation, recovery and packaging of the material. The material collection system includes a gas-powder separation device 4 , a packaging device 5 and a recovered gas storage tank 6 . The gas-powder separation device is connected with the outlet of the cooling unit, and the packaging device and the recovered gas storage tank are respectively connected with the powder outlet and the gas outlet of the gas-powder separation device (between the recovered gas storage tank and the gas-powder separation device). There is a booster pump on the pipeline); the recovered gas storage tank is also connected with the packaging device and the spray unit (aluminum feeding mechanism) to supply nitrogen for power. As shown in FIG. 1 , the nitrogen supply system includes a nitrogen generator 7 , a nitrogen tank 8 , a nitrogen refrigerator 9 and a liquid ammonia tank 10 . The nitrogen generator is connected with the nitrogen tank, the nitrogen tank is respectively connected with the spray unit, the reaction unit and the cooling unit, and a nitrogen refrigerator is provided on the pipeline connecting the nitrogen tank with the reaction unit and the cooling unit; the liquid ammonia tank is connected with the reaction unit and the cooling unit. unit connection.
如图1所示,所述制冷系统用于喷雾单元、气化单元和冷却单元的冷媒介质循环供应,管路中设有输送泵。As shown in FIG. 1 , the refrigeration system is used for circulating supply of the cooling medium of the spray unit, the gasification unit and the cooling unit, and a delivery pump is arranged in the pipeline.
如图1所示,所述供氩系统与喷雾单元(铝液仓顶部)、外壳连通用于氩气供应。As shown in FIG. 1 , the argon supply system is communicated with the spray unit (the top of the aluminum liquid silo) and the outer shell for argon supply.
更具体地,纳米氮化铝粉体合成装置中:More specifically, in the nano-aluminum nitride powder synthesis device:
如图2所示,所述外壳的侧壁上部设有氩气入口101。As shown in FIG. 2 , an argon gas inlet 101 is provided on the upper part of the side wall of the casing.
如图2及图4-5所示,喷雾单元包括:送铝机构201、保温壳体202、加热罩203、铝液仓204、氮气喷管205和绝缘盖座206。所述送铝机构设于铝液仓的顶部,送铝机构与铝液仓之间的管道上设有串联且交错开关的两道阀门210。送铝机构上设有氮气入口211。所述加热罩设于保温壳体内,加热罩内壁上布设有电热丝207;所述铝液仓的中下段设于加热罩内且与加热罩内壁之间设有间隙,加热罩和铝液仓的上段口径大于下段口径。铝液仓的顶部 设有氩气进口208,铝液仓的顶壁上设有上冷媒夹套212,铝液仓的底部延伸出加热罩底部且设有向下的雾化喷嘴209;所述氮气喷管通入铝液仓内中央且其出气口朝向所述雾化喷嘴;所述绝缘盖座设于保温壳体和加热罩的下方,如图5所示,绝缘盖座的内圈与铝液仓的底部外壁之间设有间隙(优选1-2mm)。其中,雾化喷嘴喷出的物料形状为圆锥形,内角90-120°、边长30-40mm、雾粒径3-5微米。As shown in FIG. 2 and FIGS. 4-5 , the spraying unit includes: an aluminum feeding mechanism 201 , a thermal insulation shell 202 , a heating cover 203 , an aluminum liquid silo 204 , a nitrogen nozzle 205 and an insulating cover seat 206 . The aluminum feeding mechanism is arranged on the top of the aluminum liquid silo, and two valves 210 which are connected in series and staggered are provided on the pipeline between the aluminum feeding mechanism and the aluminum liquid silo. A nitrogen gas inlet 211 is provided on the aluminum feeding mechanism. The heating cover is arranged in the heat preservation shell, and the inner wall of the heating cover is provided with electric heating wires 207; the middle and lower sections of the aluminum liquid silo are arranged in the heating cover and there is a gap between the heating cover and the aluminum liquid silo. The diameter of the upper section is larger than the diameter of the lower section. The top of the aluminum liquid silo is provided with an argon gas inlet 208, the top wall of the aluminum liquid silo is provided with an upper refrigerant jacket 212, and the bottom of the aluminum liquid silo extends out of the bottom of the heating cover and is provided with a downward atomizing nozzle 209; the The nitrogen nozzle is passed into the center of the aluminum liquid silo and its air outlet faces the atomizing nozzle; the insulating cover seat is arranged below the heat preservation shell and the heating cover, as shown in Figure 5, the inner ring of the insulating cover seat is connected to the There is a gap (preferably 1-2mm) between the bottom outer walls of the aluminum liquid silo. Among them, the shape of the material sprayed by the atomizing nozzle is conical, the inner angle is 90-120°, the side length is 30-40mm, and the mist particle size is 3-5 microns.
喷雾单元通过金属材质的托架102固定于外壳内。如图3所示,托架由四支金属条相互垂直与陶瓷材质的中间圆环连结而成,托架金属条置放在外壳内壁的挡块上,使托架悬挂,将发热罩上部挂在圆环上,圆环垫有隔热材料,发热罩底部嵌入放置于气化单元上的、起定位作用的绝缘盖座,。在喷雾单元中,铝液仓、雾化喷嘴和氮气喷管、发热丝为钨合金材料;所述发热罩、绝缘盖座为陶瓷材料。The spray unit is fixed in the casing through a bracket 102 made of metal. As shown in Figure 3, the bracket is made of four metal strips that are perpendicular to each other and connected to the middle ring of ceramic material. The metal strips of the bracket are placed on the block on the inner wall of the shell, so that the bracket is suspended, and the upper part of the heating cover is hung. On the ring, the ring is cushioned with heat insulating material, and the bottom of the heating cover is embedded with an insulating cover seat that is placed on the gasification unit and plays a positioning role. In the spray unit, the aluminum liquid silo, the atomizing nozzle, the nitrogen nozzle, and the heating wire are made of tungsten alloy material; the heating cover and the insulating cover seat are made of ceramic material.
如图2及图7所示,气化单元包括:由上保温绝缘外层301、隔热中层302和发热体内层303依次构成的气化室、感应线圈304。气化室的顶部中央设有用于安置绝缘盖座的开口;气化室的底部中央设有连通反应单元的开口;所述感应线圈包裹于上保温绝缘外层的外侧;所述发热体内层的底部呈口径递减的锥形,所述锥形与隔热中层之间的空隙处填充有发热填充体305和隔热板306;所述隔热板位于气化室的底部位置。As shown in FIG. 2 and FIG. 7 , the gasification unit includes: a gasification chamber and an induction coil 304 sequentially formed by an upper thermal insulation outer layer 301 , a thermal insulation middle layer 302 and a heating inner layer 303 . The top center of the gasification chamber is provided with an opening for arranging the insulating cover; the bottom center of the gasification chamber is provided with an opening for communicating with the reaction unit; the induction coil is wrapped on the outer side of the upper thermal insulation outer layer; The bottom is in the shape of a cone with decreasing diameter, and the space between the cone and the heat insulating middle layer is filled with a heating filler 305 and a heat insulating plate 306; the heat insulating plate is located at the bottom of the gasification chamber.
如图2及图8所示,反应单元通过陶瓷材质的底托座103架设于外壳底部。反应单元包括:由下保温绝缘外层401和耐热内层402构成的反应室、涡旋喷管403。所述耐热内层的底部呈口径递减的锥形,锥形底部中央连接有出料管404,所述涡旋喷管通过出料管由反应室外伸入反应室内,且涡旋喷管的出气端设有涡旋喷嘴405,所述涡旋喷嘴位于气化室底部开口正下方且喷气方向向上。涡旋喷嘴喷出的气流呈扇形50-70°内角螺旋。As shown in FIG. 2 and FIG. 8 , the reaction unit is erected on the bottom of the casing through a base bracket 103 made of ceramic material. The reaction unit includes: a reaction chamber composed of a lower heat-insulating and insulating outer layer 401 and a heat-resistant inner layer 402 , and a vortex nozzle 403 . The bottom of the heat-resistant inner layer is in the shape of a cone with a decreasing diameter, and a discharge pipe 404 is connected to the center of the conical bottom. The gas outlet end is provided with a vortex nozzle 405, and the vortex nozzle is located just below the opening at the bottom of the gasification chamber and the air blowing direction is upward. The airflow ejected from the vortex nozzle is a fan-shaped 50-70° internal angle spiral.
上保温绝缘外层和下保温绝缘外层为一体成型;所述发热体内层和耐热内层为分体式插入连接。上、下保温绝缘外层为保温棉材质;隔热中层和隔热板为石墨硬毡材质;发热填充体为石墨材质。发热体内层、耐热内层为钨合金材料。The upper thermal insulation outer layer and the lower thermal insulation outer layer are integrally formed; the heating inner layer and the heat-resistant inner layer are in a split-type insertion connection. The upper and lower thermal insulation outer layers are made of thermal insulation cotton; the thermal insulation middle layer and the thermal insulation board are made of graphite hard felt; the heating filler is made of graphite. The heating inner layer and the heat-resistant inner layer are made of tungsten alloy material.
如图2及图9所示,冷却单元包括:冷却室壳体501、螺旋喷嘴502和下冷媒夹套503。冷却室壳体的顶部中央设有开口。如图10所示,所述螺旋喷嘴设于开口处且通过连接法兰504与反应单元的出料管连接,螺旋喷嘴方向向下,气粉从所述螺旋喷嘴的螺旋条间隙喷出,形成扇形(优选60-90°)螺旋旋转气流。冷却室壳体上设有氮气进口505,冷却室壳体的底部呈口径递减的锥形,锥形底部中央为气粉出口506;所述下冷媒夹套设于冷却室壳体的外侧。其中,出料管、连接法兰为钨合金材料;螺旋喷嘴为陶瓷材料。As shown in FIGS. 2 and 9 , the cooling unit includes a cooling chamber casing 501 , a spiral nozzle 502 and a lower refrigerant jacket 503 . The top center of the cooling chamber housing is provided with an opening. As shown in FIG. 10 , the spiral nozzle is located at the opening and is connected to the discharge pipe of the reaction unit through the connecting flange 504. The spiral nozzle is directed downward, and the gas powder is ejected from the gap between the spiral strips of the spiral nozzle to form Fan-shaped (preferably 60-90°) helical swirling airflow. The cooling chamber shell is provided with a nitrogen inlet 505, the bottom of the cooling chamber shell is a cone with decreasing diameter, and the center of the cone bottom is a gas powder outlet 506; the lower refrigerant jacket is sleeved on the outer side of the cooling chamber shell. Among them, the discharge pipe and the connecting flange are made of tungsten alloy material; the spiral nozzle is made of ceramic material.
此外,外壳、喷雾单元、气化单元、反应单元和冷却单元的不同位置上设有测温口104 和测压口105。In addition, a temperature measuring port 104 and a pressure measuring port 105 are provided at different positions of the casing, the spray unit, the gasification unit, the reaction unit and the cooling unit.
本发明生产线中,控制纳米氮化铝粉体合成装置内气压1.2-1.5公斤、气化室气压1-1.3公斤、反应室气压0.9-1.2公斤、冷却单元内气压0.7-1公斤。控制喷雾单元的铝液仓700-800℃、氮气喷管1600-1700℃、气化室2400-2500℃、反应室1300-1500℃、冷却单元温度40-60℃。In the production line of the invention, the air pressure in the nano aluminum nitride powder synthesis device is controlled to be 1.2-1.5 kg, the air pressure of the gasification chamber to be 1-1.3 kg, the air pressure of the reaction chamber to be 0.9-1.2 kg, and the air pressure in the cooling unit to be 0.7-1 kg. Control the aluminum liquid silo of the spray unit at 700-800°C, nitrogen nozzle at 1600-1700°C, gasification chamber at 2400-2500°C, reaction chamber at 1300-1500°C, and cooling unit temperature at 40-60°C.
本发明生产线与同行比较(同等设备投资),数据如下:The production line of the present invention is compared with peers (equivalent equipment investment), and the data are as follows:
本发明中所用原料、设备,若无特别说明,均为本领域的常用原料、设备;本发明中所用方法,若无特别说明,均为本领域的常规方法。The raw materials and equipment used in the present invention, unless otherwise specified, are the common raw materials and equipment in the art; the methods used in the present invention, unless otherwise specified, are the conventional methods in the art.
以上所述,仅是本发明的较佳实施例,并非对本发明作任何限制,凡是根据本发明技术实质对以上实施例所作的任何简单修改、变更以及等效变换,均仍属于本发明技术方案的保护范围。The above are only preferred embodiments of the present invention and do not limit the present invention. Any simple modifications, changes and equivalent transformations made to the above embodiments according to the technical essence of the present invention still belong to the technical solutions of the present invention. scope of protection.
Claims (10)
- 一种纳米氮化铝粉体合成生产线,其特征在于包括:纳米氮化铝粉体合成装置(1)、物料收集系统、供氮系统、制冷系统(2)和供氩系统(3);A nano-aluminum nitride powder synthesis production line, characterized by comprising: a nano-aluminum nitride powder synthesis device (1), a material collection system, a nitrogen supply system, a refrigeration system (2) and an argon supply system (3);所述纳米氮化铝粉体合成装置包括:外壳(100)、设于外壳内的喷雾单元、设于外壳内且衔接于喷雾单元下方的气化单元、设于外壳内且衔接于气化单元下方的反应单元和衔接于气化单元下方的冷却单元;The nano-aluminum nitride powder synthesis device comprises: a casing (100), a spray unit disposed in the casing, a gasification unit disposed in the casing and connected to the lower part of the spray unit, disposed in the casing and connected to the gasification unit The lower reaction unit and the cooling unit connected to the lower part of the gasification unit;所述物料收集系统与冷却单元的出口连接用于物料的气粉分离、回收和包装;The material collection system is connected with the outlet of the cooling unit for gas-powder separation, recovery and packaging of materials;所述供氮系统用于喷雾单元、反应单元和冷却单元的氮气供应;The nitrogen supply system is used for the nitrogen supply of the spraying unit, the reaction unit and the cooling unit;所述制冷系统用于反应单元、冷却单元的冷媒介质循环供应;The refrigeration system is used for the circulating supply of the cooling medium of the reaction unit and the cooling unit;所述供氩系统与喷雾单元、外壳连通用于氩气供应。The argon supply system is communicated with the spray unit and the housing for argon supply.
- 如权利要求1所述的生产线,其特征在于:所述物料收集系统包括气粉分离装置(4)、包装装置(5)和回收气体储罐(6);所述气粉分离装置与冷却单元的出口连接,所述包装装置和回收气体储罐分别与气粉分离装置的粉料出口和气体出口连接;回收气体储罐还分别与包装装置、喷雾单元连接以供应动力用气。The production line according to claim 1, characterized in that: the material collection system comprises a gas-powder separation device (4), a packaging device (5) and a recovered gas storage tank (6); the gas-powder separation device and a cooling unit The packaging device and the recovered gas storage tank are respectively connected with the powder outlet and the gas outlet of the gas-powder separation device; the recovered gas storage tank is also connected with the packaging device and the spray unit to supply power gas.
- 如权利要求1所述的生产线,其特征在于:所述供氮系统包括制氮装置(7)、氮气罐(8)、氮气冷冻机(9)和液氨罐(10);所述制氮装置与氮气罐连接,氮气罐分别与喷雾单元、反应单元和冷却单元连接,且氮气罐与反应单元和冷却单元连接的管路上设有所述氮气冷冻机;所述液氨罐与反应单元连接。The production line according to claim 1, characterized in that: the nitrogen supply system comprises a nitrogen generator (7), a nitrogen tank (8), a nitrogen freezer (9) and a liquid ammonia tank (10); the nitrogen generator The device is connected with a nitrogen tank, the nitrogen tank is respectively connected with the spray unit, the reaction unit and the cooling unit, and the nitrogen refrigerator is provided on the pipeline connecting the nitrogen tank with the reaction unit and the cooling unit; the liquid ammonia tank is connected with the reaction unit .
- 如权利要求1所述的生产线,其特征在于:所述外壳上设有氩气入口(101)、所述铝液仓的顶部设有氩气进口(208)。The production line according to claim 1, characterized in that: an argon gas inlet (101) is arranged on the outer shell, and an argon gas inlet (208) is arranged on the top of the aluminum liquid silo.
- 如权利要求1所述的生产线,其特征在于:所述喷雾单元包括:送铝机构(201)、保温壳体(202)、加热罩(203)、铝液仓(204)、氮气喷管(205)和绝缘盖座(206);所述加热罩设于保温壳体内,加热罩内壁上布设有电热丝(207);所述铝液仓的中下段设于加热罩内且与加热罩内壁之间设有间隙,铝液仓的顶部设有氩气进口(208),铝液仓的底部延伸出加热罩底部且设有向下的雾化喷嘴(209);所述氮气喷管通入铝液仓内中央且其出气口朝向所述雾化喷嘴;所述送铝机构设于铝液仓的顶部;所述绝缘盖座设于保温壳体和加热罩的下方,绝缘盖座的内圈与铝液仓的底部外壁之间设有间隙;The production line according to claim 1, characterized in that: the spraying unit comprises: an aluminum feeding mechanism (201), a thermal insulation shell (202), a heating mantle (203), an aluminum liquid silo (204), a nitrogen nozzle ( 205) and an insulating cover seat (206); the heating cover is arranged in the thermal insulation shell, and the inner wall of the heating cover is provided with electric heating wires (207); There is a gap between them, an argon gas inlet (208) is arranged on the top of the aluminum liquid silo, and the bottom of the aluminum liquid silo extends out of the bottom of the heating mantle and is provided with a downward atomizing nozzle (209); The center of the aluminum liquid silo and its air outlet faces the atomizing nozzle; the aluminum feeding mechanism is arranged on the top of the aluminum liquid silo; the insulating cover seat is arranged under the heat preservation shell and the heating cover, There is a gap between the ring and the bottom outer wall of the aluminum liquid silo;所述气化单元包括:由上保温绝缘外层(301)、隔热中层(302)和发热体内层(303)依次构成的气化室、感应线圈(304);所述气化室的顶部中央设有用于安置绝缘盖座的开口;气化室的底部中央设有连通反应单元的开口;所述感应线圈包裹于上保温绝缘外层的外侧;所述发热体内层的底部呈口径递减的锥形,所述锥形与隔热中层之间的空隙处填充有发热填充 体(305)和隔热板(306);所述隔热板位于气化室的底部位置;The gasification unit includes: a gasification chamber and an induction coil (304) sequentially formed by an upper heat-insulating and insulating outer layer (301), an insulating middle layer (302) and a heating inner layer (303); the top of the gasification chamber The center is provided with an opening for placing the insulating cover; the center of the bottom of the gasification chamber is provided with an opening to communicate with the reaction unit; the induction coil is wrapped on the outer side of the upper thermal insulation outer layer; A cone, the space between the cone and the heat insulating middle layer is filled with a heating filler (305) and a heat insulating plate (306); the heat insulating plate is located at the bottom of the gasification chamber;所述反应单元包括:由下保温绝缘外层(401)和耐热内层(402)构成的反应室、涡旋喷管(403);所述耐热内层的底部呈口径递减的锥形,锥形底部中央连接有出料管(404),所述涡旋喷管通过出料管由反应室外伸入反应室内,且涡旋喷管的出气端设有涡旋喷嘴(405),所述涡旋喷嘴位于气化室底部开口正下方且喷气方向向上。The reaction unit comprises: a reaction chamber composed of a lower thermal insulation outer layer (401) and a heat-resistant inner layer (402), and a vortex nozzle (403); the bottom of the heat-resistant inner layer is in the shape of a cone with decreasing diameter , the center of the conical bottom is connected with a discharge pipe (404), the vortex nozzle extends from the reaction chamber into the reaction chamber through the discharge pipe, and the gas outlet end of the vortex nozzle is provided with a vortex nozzle (405), so The swirl nozzle is located just below the bottom opening of the gasification chamber and the air blowing direction is upward.
- 如权利要求5所述的生产线,其特征在于:The production line of claim 5, wherein:所述绝缘盖座的内圈与铝液仓的底部外壁之间的间隙为1-2mm;和/或The gap between the inner ring of the insulating cover base and the bottom outer wall of the aluminum liquid silo is 1-2mm; and/or所述送铝机构与铝液仓之间的管道上设有串联且交错开关的两道阀门(210);和/或Two valves (210) connected in series and staggered are provided on the pipeline between the aluminum feeding mechanism and the aluminum liquid silo; and/or所述雾化喷嘴喷出的物料形状为圆锥形,内角90-120°、边长30-40mm、雾粒径3-5微米;和/或The shape of the material sprayed by the atomizing nozzle is conical, with an inner angle of 90-120°, a side length of 30-40mm, and a mist particle size of 3-5 microns; and/or所述送铝机构上设有氮气入口(211);和/或A nitrogen gas inlet (211) is provided on the aluminum feeding mechanism; and/or所述加热罩和铝液仓的上段口径大于下段口径;和/或The diameter of the upper section of the heating mantle and the liquid aluminum silo is larger than that of the lower section; and/or所述铝液仓的顶壁上设有上冷媒夹套(212);和/或An upper refrigerant jacket (212) is provided on the top wall of the aluminum liquid silo; and/or所述电热丝、铝液仓、雾化喷嘴和氮气喷管为钨合金材料;所述加热罩、绝缘盖座为陶瓷材料。The electric heating wire, the aluminum liquid silo, the atomizing nozzle and the nitrogen nozzle are made of tungsten alloy material; the heating cover and the insulating cover seat are made of ceramic material.
- 如权利要求5所述的生产线,其特征在于:The production line of claim 5, wherein:所述涡旋喷嘴喷出的气流呈扇形50-70°内角螺旋;和/或The airflow ejected from the vortex nozzle is a fan-shaped 50-70° internal angle spiral; and/or所述上保温绝缘外层和下保温绝缘外层为一体成型;所述发热体内层和耐热内层为分体连接;和/或The upper thermal insulation outer layer and the lower thermal insulation outer layer are integrally formed; the heating inner layer and the heat-resistant inner layer are connected separately; and/or所述上、下保温绝缘外层为保温棉材质;所述隔热中层和隔热板为石墨硬毡材质;所述发热填充体为石墨材质;所述发热体内层、耐热内层为钨合金材料;和/或The upper and lower heat-insulating and insulating outer layers are made of heat-insulating cotton; the heat-insulating middle layer and the heat-insulating plate are made of graphite hard felt; the heating filler is made of graphite; the heating inner layer and the heat-resistant inner layer are tungsten alloy material; and/or所述喷雾单元通过托架(102)固定于外壳内上部;所述反应单元通过底托座(103)架设于外壳底部;所述托架和底托座为陶瓷材质。The spraying unit is fixed on the inner and upper part of the casing through a bracket (102); the reaction unit is erected on the bottom of the casing through a base bracket (103); the bracket and the base bracket are made of ceramic materials.
- 如权利要求5所述的生产线,其特征在于:所述冷却单元包括:冷却室壳体(501)、螺旋喷嘴(502)和下冷媒夹套(503);The production line according to claim 5, characterized in that: the cooling unit comprises: a cooling chamber shell (501), a spiral nozzle (502) and a lower refrigerant jacket (503);冷却室壳体的顶部中央设有开口,所述螺旋喷嘴设于开口处且通过连接法兰(504)与反应单元的出料管连接,螺旋喷嘴方向向下;冷却室壳体上设有氮气进口(505),冷却室壳体的底部呈口径递减的锥形,锥形底部中央为气粉出口(506);所述下冷媒夹套设于冷却室壳体的外侧。The top center of the cooling chamber shell is provided with an opening, and the spiral nozzle is arranged at the opening and is connected with the discharge pipe of the reaction unit through a connecting flange (504), and the spiral nozzle is directed downward; the cooling chamber shell is provided with nitrogen gas In the inlet (505), the bottom of the cooling chamber shell is in the shape of a cone with decreasing diameter, and the center of the cone bottom is the gas powder outlet (506); the lower refrigerant jacket is sleeved on the outer side of the cooling chamber shell.
- 如权利要求8所述的生产线,其特征在于:The production line of claim 8, wherein:气粉从所述螺旋喷嘴的螺旋条间隙喷出,形成60-90°扇形螺旋旋转气流;和/或Air powder is ejected from the spiral strip gap of the spiral nozzle to form a 60-90° fan-shaped spiral rotating airflow; and/or所述出料管、连接法兰为钨合金材料;螺旋喷嘴为陶瓷材料。The discharge pipe and the connecting flange are made of tungsten alloy material; the spiral nozzle is made of ceramic material.
- 如权利要求1所述的生产线,其特征在于:所述外壳、喷雾单元、气化单元、反应单元和冷却单元的不同位置上设有测温口(104)和测压口(105)。The production line according to claim 1, characterized in that: a temperature measuring port (104) and a pressure measuring port (105) are provided at different positions of the casing, the spray unit, the gasification unit, the reaction unit and the cooling unit.
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CN112299384B (en) * | 2020-10-10 | 2022-02-11 | 浙江宇耀新材料有限公司 | Nano aluminum nitride powder synthesis device based on aluminum gasification reaction |
CN112299385B (en) * | 2020-10-10 | 2021-05-07 | 浙江宇耀新材料有限公司 | Nano aluminum nitride powder synthesis production line |
CN113003550B (en) * | 2021-03-19 | 2024-09-27 | 尹克胜 | Special aluminum ingot melter for synthesizing aluminum nitride powder by melting and atomizing aluminum ingot |
Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01153511A (en) * | 1987-12-11 | 1989-06-15 | Toshiba Ceramics Co Ltd | Production of aluminum nitride |
CN1526497A (en) * | 2003-09-25 | 2004-09-08 | 昆明理工大学 | Apparatus and method for producing high and medium melting point metal and its oxide or nitride powder |
CN103072961A (en) * | 2012-10-15 | 2013-05-01 | 宁波广博纳米新材料股份有限公司 | Production method of nano aluminum nitride powder |
CN103539089A (en) * | 2013-11-11 | 2014-01-29 | 袁志刚 | Method for producing high-purity aluminum nitride powder by using superfine metal aluminum powder |
CN105271139A (en) * | 2015-04-21 | 2016-01-27 | 四川展祥特种合金科技有限公司 | Method and device for preparing aluminum nitride powder through atomization |
CN106268543A (en) * | 2015-05-27 | 2017-01-04 | 南京杰博宏镓新型材料有限公司 | A kind of preparation facilities of infusible compound dusty material and preparation method thereof |
CN107663092A (en) * | 2017-09-26 | 2018-02-06 | 上海东洋炭素有限公司 | A kind of AlN raw powder's production technologies |
CN108059134A (en) * | 2017-12-07 | 2018-05-22 | 四川义结科技有限责任公司 | A kind of method that hydrogen hot plasma method prepares high-purity nm aluminium nitride |
CN108557780A (en) * | 2018-04-27 | 2018-09-21 | 浙江东瓷新材料有限公司 | A kind of preparation method of beta-silicon nitride powder |
CN111633215A (en) * | 2020-04-21 | 2020-09-08 | 武汉科技大学 | Method for preparing superfine spherical aluminum powder by high-pressure atomization |
CN112265973A (en) * | 2020-10-10 | 2021-01-26 | 浙江宇耀新材料有限公司 | Preparation method of nano aluminum nitride powder |
CN112299384A (en) * | 2020-10-10 | 2021-02-02 | 浙江宇耀新材料有限公司 | Nano aluminum nitride powder synthesis device based on aluminum gasification reaction |
CN112299385A (en) * | 2020-10-10 | 2021-02-02 | 浙江宇耀新材料有限公司 | Nano aluminum nitride powder synthesis production line |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6345105A (en) * | 1986-08-08 | 1988-02-26 | Akira Tazaki | Production of aluminum nitride fine powder |
JPH01308812A (en) * | 1988-06-06 | 1989-12-13 | Showa Alum Corp | Continuous production of aluminum nitride powder and unit therefor |
US5525320A (en) * | 1994-07-11 | 1996-06-11 | University Of Cincinnati | Process for aluminum nitride powder production |
JP3891076B2 (en) * | 2001-11-13 | 2007-03-07 | 株式会社茨木研究所 | Method for producing aluminum nitride |
CN104370278B (en) * | 2014-10-23 | 2016-07-06 | 西安理工大学 | A kind of preparation method of high-purity nano AlN powder |
KR101766004B1 (en) * | 2015-03-20 | 2017-08-24 | 오씨아이 주식회사 | Apparatus and method of manufacturing aluminum nitride powder and aluminum nitride powder prepared thereby |
CN107903069A (en) * | 2017-12-29 | 2018-04-13 | 苏州图纳新材料科技有限公司 | Aluminium nitride powder and preparation method thereof |
CN108862216B (en) * | 2018-09-26 | 2021-09-17 | 湖南大学 | Preparation method of high-purity spheroidal nano aluminum nitride particles |
-
2020
- 2020-10-10 CN CN202011081582.2A patent/CN112299385B/en active Active
-
2021
- 2021-05-28 WO PCT/CN2021/096745 patent/WO2022073351A1/en active Application Filing
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01153511A (en) * | 1987-12-11 | 1989-06-15 | Toshiba Ceramics Co Ltd | Production of aluminum nitride |
CN1526497A (en) * | 2003-09-25 | 2004-09-08 | 昆明理工大学 | Apparatus and method for producing high and medium melting point metal and its oxide or nitride powder |
CN103072961A (en) * | 2012-10-15 | 2013-05-01 | 宁波广博纳米新材料股份有限公司 | Production method of nano aluminum nitride powder |
CN103539089A (en) * | 2013-11-11 | 2014-01-29 | 袁志刚 | Method for producing high-purity aluminum nitride powder by using superfine metal aluminum powder |
CN105271139A (en) * | 2015-04-21 | 2016-01-27 | 四川展祥特种合金科技有限公司 | Method and device for preparing aluminum nitride powder through atomization |
CN106268543A (en) * | 2015-05-27 | 2017-01-04 | 南京杰博宏镓新型材料有限公司 | A kind of preparation facilities of infusible compound dusty material and preparation method thereof |
CN107663092A (en) * | 2017-09-26 | 2018-02-06 | 上海东洋炭素有限公司 | A kind of AlN raw powder's production technologies |
CN108059134A (en) * | 2017-12-07 | 2018-05-22 | 四川义结科技有限责任公司 | A kind of method that hydrogen hot plasma method prepares high-purity nm aluminium nitride |
CN108557780A (en) * | 2018-04-27 | 2018-09-21 | 浙江东瓷新材料有限公司 | A kind of preparation method of beta-silicon nitride powder |
CN111633215A (en) * | 2020-04-21 | 2020-09-08 | 武汉科技大学 | Method for preparing superfine spherical aluminum powder by high-pressure atomization |
CN112265973A (en) * | 2020-10-10 | 2021-01-26 | 浙江宇耀新材料有限公司 | Preparation method of nano aluminum nitride powder |
CN112299384A (en) * | 2020-10-10 | 2021-02-02 | 浙江宇耀新材料有限公司 | Nano aluminum nitride powder synthesis device based on aluminum gasification reaction |
CN112299385A (en) * | 2020-10-10 | 2021-02-02 | 浙江宇耀新材料有限公司 | Nano aluminum nitride powder synthesis production line |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116768636A (en) * | 2023-06-06 | 2023-09-19 | 衡阳凯新特种材料科技有限公司 | Continuous nitriding method silicon nitride powder production line |
CN116768636B (en) * | 2023-06-06 | 2024-03-29 | 衡阳凯新特种材料科技有限公司 | Continuous nitriding method silicon nitride powder production line |
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