WO2022050319A1 - 液晶回折素子、光学素子、画像表示ユニット、ヘッドマウントディスプレイ、ビームステアリング、および、センサー - Google Patents
液晶回折素子、光学素子、画像表示ユニット、ヘッドマウントディスプレイ、ビームステアリング、および、センサー Download PDFInfo
- Publication number
- WO2022050319A1 WO2022050319A1 PCT/JP2021/032176 JP2021032176W WO2022050319A1 WO 2022050319 A1 WO2022050319 A1 WO 2022050319A1 JP 2021032176 W JP2021032176 W JP 2021032176W WO 2022050319 A1 WO2022050319 A1 WO 2022050319A1
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- Prior art keywords
- liquid crystal
- anisotropic layer
- optically anisotropic
- region
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133504—Diffusing, scattering, diffracting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1833—Diffraction gratings comprising birefringent materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3016—Polarising elements involving passive liquid crystal elements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133528—Polarisers
- G02F1/133541—Circular polarisers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/133753—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers with different alignment orientations or pretilt angles on a same surface, e.g. for grey scale or improved viewing angle
- G02F1/133761—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers with different alignment orientations or pretilt angles on a same surface, e.g. for grey scale or improved viewing angle with different pretilt angles
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3083—Birefringent or phase retarding elements
Definitions
- the concentric pattern is a pattern in which the lines connecting the liquid crystal compounds whose optical axes are oriented in the same direction are circular, and the circular line segments are concentric.
- the liquid crystal alignment pattern of the optically anisotropic layer 36a shown in FIG. 2 one direction in which the direction of the optical axis of the liquid crystal compound 40 changes while continuously rotating is provided radially from the center of the liquid crystal layer 36. It is a liquid crystal alignment pattern.
- the dark portion 44 is inclined to the right in the upper region in the figure, and in the lower region in the figure, the dark portion 44 is inclined to the right.
- the dark portion 44 is inclined to the left.
- the dark portion 44 is inclined to the left in the upper region in the figure, and the dark portion 44 is tilted to the right in the lower region in the figure. It is tilted.
- FIG. 3 is a conceptual diagram showing an enlarged portion shown by A in FIG. 1
- FIG. 4 is a conceptual diagram showing an enlarged portion shown by B in FIG. That is, FIG. 3 is a conceptual diagram showing an enlarged central portion of the optically anisotropic layer 36a, and FIG. 4 is a conceptual diagram showing an enlarged outer portion of the optically anisotropic layer 36a. Further, in FIGS.
- the liquid crystal diffractive element of the present invention has such an optically anisotropic layer 36a, that is, a bright portion 42 and a dark portion 44 extending from one surface to the other surface in a cross-sectional SEM image, and the dark portion 44.
- an optically anisotropic layer 36a that is, a bright portion 42 and a dark portion 44 extending from one surface to the other surface in a cross-sectional SEM image, and the dark portion 44.
- each dark portion 44 other than the dark portion 44 located at the center in the left-right direction has one inflection point in which the inclination direction is folded back in the opposite direction.
- the inclination direction in the region 37a and the inclination direction in the region 37b are opposite directions. Therefore, the inflection point located at the interface between the region 37a and the region 37b is the inflection point where the inclination direction is folded back in the opposite direction.
- the optically anisotropic layer 36b has a bright portion 42 and a dark portion 44 extending from one surface to the other surface in the SEM image, and the dark portion 44 has three angles.
- the dark portion 44 has a region in which the tilt direction of the dark portion 44 is different in the thickness direction, and the average tilt angle of the dark portion 44 changes while the direction of the optical axis of the liquid crystal compound 40 continuously rotates. It is gradually changing along one direction.
- the optically anisotropic layer 36b has a structure in which the bright portion 42 and the dark portion 44 have a substantially W shape and have three bending points that are folded back in the opposite direction of the inclination direction, the light is emitted in the plane.
- a configuration having different diffraction angles it is possible to obtain a liquid crystal diffractive element having high diffraction efficiency regardless of the diffraction angle and having a uniform amount of transmitted light.
- the shapes of the bright part and the dark part with respect to the center line in the thickness direction of the optically anisotropic layer in the cross section of the concentric central portion Is symmetric, and the shape of the bright part and the dark part is asymmetric with respect to the center line in the thickness direction of the optically anisotropic layer in the cross section of the concentric end, but the present invention is not limited to this.
- the shapes of the bright and dark areas are asymmetric with respect to the center line in the thickness direction of the optically anisotropic layer in the cross section of the central portion of the concentric circle, and the optically anisotropic layer is formed in the cross section of the concentric end portion.
- the shape of the bright part and the dark part may be asymmetric with respect to the center line in the thickness direction.
- Alignment film An alignment film 32 is formed on the surface of the support 30.
- the alignment film 32 is an alignment film for orienting the liquid crystal compound 40 in a predetermined liquid crystal alignment pattern when forming the optically anisotropic layer 36a.
- the liquid crystal compound 40 forming the optically anisotropic layer 36a has the orientation of the optical axis 40A in the Y direction orthogonal to the D direction of the arrangement axis, that is, the Y direction orthogonal to one direction in which the optical axis 40A continuously rotates.
- the liquid crystal compounds 40 having the same optics are arranged at equal intervals.
- the angles formed by the direction of the optical axis 40A and the direction of the arrangement axis D are equal between the liquid crystal compounds 40 arranged in the Y direction.
- the optically anisotropic layer of the present invention is an example in which the optical axis derived from the liquid crystal compound is not inclined with respect to the interface of the optically anisotropic layer at the interface of the optically anisotropic layer.
- the optically anisotropic layer of the present invention may have an inclined optical axis derived from the liquid crystal compound.
- the optical axis derived from the liquid crystal compound may have a pretilt angle with respect to the interface of the optically anisotropic layer.
- a liquid crystal diffractive element and a circular polarizing plate (a retardation plate and a linear polarizing plate (polarizer) are arranged in this order) will be described.
- the right circular polarization is incident on the liquid crystal diffractive element, the incident right circular polarization is diffracted and emitted from the liquid crystal diffractive element. Further, when diffracted, the right circular polarization is converted into the left circular polarization.
- the left circular polarization (that is, primary light) diffracted by the liquid crystal diffractive element is converted into linear polarization by the retardation plate (1/4 wave plate) of the circular polarizing plate.
- the linearly polarized light converted by the retardation plate is transmitted through the linearly polarizing plate and emitted.
- a depolarization layer that eliminates the polarization state of light in at least a part of the wavelength range may be used.
- a depolarization layer a high retardation film (in-plane retardation of 3000 nm or more), a light scattering layer, or the like can be used.
- an optical element that deflects light may be arranged downstream of the circular polarizing plate.
- the ⁇ n 550 ⁇ thickness (Re (550)) of the liquid crystal finally becomes 170 nm, and the helix angle in the thickness direction is about 2 mm from the center.
- the helix angle is 78 ° clockwise, the helix angle at a distance of 25 mm from the center is 41 ° clockwise, the helix angle at a distance of 30 mm from the center is 19 ° clockwise, and the helix angle is outward.
- an optically anisotropic layer having three regions was formed.
- the ⁇ n 550 of the liquid crystal layer (liquid crystal compound) of Example 3 was 0.15
- the ⁇ n 550 of the liquid crystal layer of Example 4 was 0.25
- the ⁇ n 550 of the liquid crystal layer of Example 8 was 0.32. ..
- the average value of the diffraction efficiency was obtained from the measured values of the wavelengths of 405 nm, 450 nm, 532 nm, and 650 nm, and the wavelength dependence of the diffraction efficiency was evaluated according to the following criteria.
- the light was vertically incident on a circular polarizing plate corresponding to the wavelength of the laser light to obtain circular polarization, and then the light was incident on the manufactured liquid crystal diffractive element for evaluation.
- evaluation was performed at two locations, the center of the concentric circles and the vicinity of the center of the concentric circles (1 cycle is 10 ⁇ m) and the vicinity of the ends (1 cycle is 1 ⁇ m) of the liquid crystal alignment pattern in the manufactured liquid crystal diffractive element.
- diffracted light diffracted in a desired direction from the liquid crystal diffractometer
- 0th-order light emitted in the same direction as incident light
- -1st-order light emitted in other directions.
- Diffraction efficiency 1st order light / (1st order light + 0th order light + (-1st order light)
- a diffractive element in which a liquid crystal diffractive element and a newly prepared support are laminated can be manufactured. Further, by changing the support to another liquid crystal diffractive element and repeating the steps (1) to (4), it is possible to manufacture a diffractive element in which two layers or three or more layers of liquid crystal diffractive elements are laminated.
- a laminated body of a liquid crystal diffractive element and another optical member can be manufactured.
- a laminated body of a liquid crystal diffractive element, a retardation plate, and a polarizing plate was produced by the following method.
- a silicon oxide layer (SiOx layer) was formed on the liquid crystal layer side of the liquid crystal diffractive element having the support, the alignment film and the liquid crystal layer to be laminated, and on the bonding surface side of the retardation plate to be bonded to the liquid crystal diffractive element.
- the method for forming the silicon oxide layer is not limited, but vacuum deposition is preferably exemplified.
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Liquid Crystal (AREA)
- Polarising Elements (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022546951A JP7515601B2 (ja) | 2020-09-02 | 2021-09-01 | 液晶回折素子、光学素子、画像表示ユニット、ヘッドマウントディスプレイ、ビームステアリング、および、センサー |
| CN202180054106.8A CN116157711B (zh) | 2020-09-02 | 2021-09-01 | 液晶衍射元件、光学元件、图像显示单元、头戴式显示器、光束转向器及传感器 |
| US18/176,529 US11977290B2 (en) | 2020-09-02 | 2023-03-01 | Liquid crystal diffraction element, optical element, image display unit, head-mounted display, beam steering, and sensor |
| US18/628,527 US20240272470A1 (en) | 2020-09-02 | 2024-04-05 | Liquid crystal diffraction element, optical element, image display unit, head-mounted display, beam steering, and sensor |
| JP2024104954A JP7854009B2 (ja) | 2020-09-02 | 2024-06-28 | 液晶回折素子、光学素子、画像表示ユニット、ヘッドマウントディスプレイ、ビームステアリング、および、センサー |
Applications Claiming Priority (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020-147455 | 2020-09-02 | ||
| JP2020147455 | 2020-09-02 | ||
| JP2020177293 | 2020-10-22 | ||
| JP2020-177293 | 2020-10-22 | ||
| JP2021035617 | 2021-03-05 | ||
| JP2021-035617 | 2021-03-05 | ||
| JP2021065238 | 2021-04-07 | ||
| JP2021-065238 | 2021-04-07 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US18/176,529 Continuation US11977290B2 (en) | 2020-09-02 | 2023-03-01 | Liquid crystal diffraction element, optical element, image display unit, head-mounted display, beam steering, and sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2022050319A1 true WO2022050319A1 (ja) | 2022-03-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| PCT/JP2021/032176 Ceased WO2022050319A1 (ja) | 2020-09-02 | 2021-09-01 | 液晶回折素子、光学素子、画像表示ユニット、ヘッドマウントディスプレイ、ビームステアリング、および、センサー |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US11977290B2 (https=) |
| JP (2) | JP7515601B2 (https=) |
| CN (1) | CN116157711B (https=) |
| WO (1) | WO2022050319A1 (https=) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024070693A1 (ja) * | 2022-09-30 | 2024-04-04 | 富士フイルム株式会社 | 偏光回折素子、光学素子および光学装置 |
| WO2024135728A1 (ja) * | 2022-12-20 | 2024-06-27 | 富士フイルム株式会社 | 保護フィルム付き回折光学フィルム、保護フィルム付き回折光学フィルムのレーザー刻印方法、および、保護フィルム付き回折光学フィルムの識別方法 |
| JP2024120956A (ja) * | 2020-09-02 | 2024-09-05 | 富士フイルム株式会社 | 液晶回折素子、光学素子、画像表示ユニット、ヘッドマウントディスプレイ、ビームステアリング、および、センサー |
| WO2025047594A1 (ja) * | 2023-08-25 | 2025-03-06 | 富士フイルム株式会社 | 光学異方性層、光学素子、画像表示装置 |
| WO2025164777A1 (ja) * | 2024-02-02 | 2025-08-07 | 富士フイルム株式会社 | 光学素子、導光素子、表示光学システム、ニアアイディスプレイ、測定光学システム、画像表示装置 |
| WO2025183175A1 (ja) * | 2024-03-01 | 2025-09-04 | 富士フイルム株式会社 | 導光素子、および、ar表示デバイス |
| WO2025205114A1 (ja) * | 2024-03-28 | 2025-10-02 | 富士フイルム株式会社 | 積層体 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118465902B (zh) * | 2024-06-28 | 2024-09-03 | 东南大学 | 实现不同衍射效率的偏振体全息光栅的制备方法 |
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| WO2006092758A2 (en) * | 2005-03-01 | 2006-09-08 | Dutch Polymer Institute | Polarization gratings in mesogenic films |
| WO2008130555A1 (en) * | 2007-04-16 | 2008-10-30 | North Carolina State University | Low-twist chiral liquid crystal polarization gratings and related fabrication methods |
| WO2019182052A1 (ja) * | 2018-03-23 | 2019-09-26 | 富士フイルム株式会社 | コレステリック液晶層の製造方法、コレステリック液晶層、液晶組成物、硬化物、光学異方体、反射層 |
| WO2019189852A1 (ja) * | 2018-03-29 | 2019-10-03 | 富士フイルム株式会社 | 光学素子、導光素子および画像表示装置 |
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| KR20070024781A (ko) * | 2005-08-30 | 2007-03-08 | 주식회사 엘지화학 | 광시야각 특성이 개선된 액정표시장치 |
| DE102007023560B4 (de) * | 2007-05-21 | 2009-02-05 | Ovd Kinegram Ag | Mehrschichtkörper |
| WO2014037036A1 (en) * | 2012-09-05 | 2014-03-13 | Seereal Technologies S.A. | Controllable diffraction device for a light modulator device |
| WO2017169696A1 (ja) * | 2016-03-28 | 2017-10-05 | 富士フイルム株式会社 | 反射層の製造方法および反射層 |
| WO2020122127A1 (ja) * | 2018-12-11 | 2020-06-18 | 富士フイルム株式会社 | コレステリック液晶層およびコレステリック液晶層の形成方法、ならびに、積層体、導光素子および画像表示装置 |
| CN116157711B (zh) * | 2020-09-02 | 2026-02-27 | 富士胶片株式会社 | 液晶衍射元件、光学元件、图像显示单元、头戴式显示器、光束转向器及传感器 |
| CN116235085A (zh) * | 2020-09-02 | 2023-06-06 | 富士胶片株式会社 | 液晶衍射元件、光学元件、图像显示单元、头戴式显示器、光束转向器及传感器 |
-
2021
- 2021-09-01 CN CN202180054106.8A patent/CN116157711B/zh active Active
- 2021-09-01 WO PCT/JP2021/032176 patent/WO2022050319A1/ja not_active Ceased
- 2021-09-01 JP JP2022546951A patent/JP7515601B2/ja active Active
-
2023
- 2023-03-01 US US18/176,529 patent/US11977290B2/en active Active
-
2024
- 2024-04-05 US US18/628,527 patent/US20240272470A1/en active Pending
- 2024-06-28 JP JP2024104954A patent/JP7854009B2/ja active Active
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| WO2008130555A1 (en) * | 2007-04-16 | 2008-10-30 | North Carolina State University | Low-twist chiral liquid crystal polarization gratings and related fabrication methods |
| WO2019182052A1 (ja) * | 2018-03-23 | 2019-09-26 | 富士フイルム株式会社 | コレステリック液晶層の製造方法、コレステリック液晶層、液晶組成物、硬化物、光学異方体、反射層 |
| WO2019189852A1 (ja) * | 2018-03-29 | 2019-10-03 | 富士フイルム株式会社 | 光学素子、導光素子および画像表示装置 |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2024120956A (ja) * | 2020-09-02 | 2024-09-05 | 富士フイルム株式会社 | 液晶回折素子、光学素子、画像表示ユニット、ヘッドマウントディスプレイ、ビームステアリング、および、センサー |
| JP7854009B2 (ja) | 2020-09-02 | 2026-04-30 | 富士フイルム株式会社 | 液晶回折素子、光学素子、画像表示ユニット、ヘッドマウントディスプレイ、ビームステアリング、および、センサー |
| WO2024070693A1 (ja) * | 2022-09-30 | 2024-04-04 | 富士フイルム株式会社 | 偏光回折素子、光学素子および光学装置 |
| WO2024135728A1 (ja) * | 2022-12-20 | 2024-06-27 | 富士フイルム株式会社 | 保護フィルム付き回折光学フィルム、保護フィルム付き回折光学フィルムのレーザー刻印方法、および、保護フィルム付き回折光学フィルムの識別方法 |
| WO2025047594A1 (ja) * | 2023-08-25 | 2025-03-06 | 富士フイルム株式会社 | 光学異方性層、光学素子、画像表示装置 |
| WO2025164777A1 (ja) * | 2024-02-02 | 2025-08-07 | 富士フイルム株式会社 | 光学素子、導光素子、表示光学システム、ニアアイディスプレイ、測定光学システム、画像表示装置 |
| WO2025183175A1 (ja) * | 2024-03-01 | 2025-09-04 | 富士フイルム株式会社 | 導光素子、および、ar表示デバイス |
| WO2025205114A1 (ja) * | 2024-03-28 | 2025-10-02 | 富士フイルム株式会社 | 積層体 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20240272470A1 (en) | 2024-08-15 |
| CN116157711B (zh) | 2026-02-27 |
| JP2024120956A (ja) | 2024-09-05 |
| JP7515601B2 (ja) | 2024-07-12 |
| CN116157711A (zh) | 2023-05-23 |
| JPWO2022050319A1 (https=) | 2022-03-10 |
| JP7854009B2 (ja) | 2026-04-30 |
| US11977290B2 (en) | 2024-05-07 |
| US20230229038A1 (en) | 2023-07-20 |
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