WO2022028260A1 - Plate-forme de mouvement à accouplement rigide-flexible commutable de type à rail de guidage flottant dans l'air - Google Patents
Plate-forme de mouvement à accouplement rigide-flexible commutable de type à rail de guidage flottant dans l'air Download PDFInfo
- Publication number
- WO2022028260A1 WO2022028260A1 PCT/CN2021/108024 CN2021108024W WO2022028260A1 WO 2022028260 A1 WO2022028260 A1 WO 2022028260A1 CN 2021108024 W CN2021108024 W CN 2021108024W WO 2022028260 A1 WO2022028260 A1 WO 2022028260A1
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- Prior art keywords
- platform
- air
- guide rail
- rigid
- frame
- Prior art date
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Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
- F16C32/067—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play
Abstract
La présente invention concerne une plate-forme de mouvement à accouplement rigide-flexible commutable de type à rail de guidage flottant dans l'air, comprenant : un rail de guidage flottant dans l'air (1), une plateforme à accouplement rigide-flexible (2), un composant d'entraînement (3), un composant de détection (4) et un dispositif de commutation de contact (5), la plate-forme à accouplement rigide-flexible (2) comprenant un cadre (21), une plate-forme de travail (22) et un composant formant charnière flexible (23) ; et la plate-forme de travail (22) étant reliée au cadre (21) au moyen de l'ensemble formant charnière flexible (23). Lors du fonctionnement, un mouvement à longue course est réalisé au moyen du rail de guidage flottant dans l'air (1), et un positionnement de niveau nanométrique est réalisé au moyen de la déformation élastique d'une charnière flexible de la plate-forme à accouplement rigide-flexible (2). Lorsque la course de mouvement est supérieure à la déformation maximale de la charnière flexible, le dispositif de commutation de contact (5) commande le cadre (21) et le rail de guidage flottant dans l'air (1) de telle sorte que ceux-ci sont commutés sur un état sans contact, et la plate-forme à accouplement rigide-flexible (2) se déplace librement ; et lorsque l'erreur de déplacement de la plate-forme de mouvement est inférieure à la déformation maximale de la charnière flexible, le cadre (21) et le rail de guidage flottant dans l'air (1) sont commutés sur un état de contact, de telle sorte que la fluctuation, sur le rail de guidage flottant dans l'air (1), du cadre (21) de la plate-forme à accouplement rigide-flexible (2) est éliminée, de telle sorte que la précision d'une nano-plateforme peut être obtenue.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010778968.2 | 2020-08-05 | ||
| CN202010778968.2A CN112096739B (zh) | 2020-08-05 | 2020-08-05 | 一种气浮导轨式可切换刚柔耦合运动平台 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2022028260A1 true WO2022028260A1 (fr) | 2022-02-10 |
Family
ID=73749924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/CN2021/108024 WO2022028260A1 (fr) | 2020-08-05 | 2021-07-23 | Plate-forme de mouvement à accouplement rigide-flexible commutable de type à rail de guidage flottant dans l'air |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN112096739B (fr) |
| WO (1) | WO2022028260A1 (fr) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116759361A (zh) * | 2023-08-21 | 2023-09-15 | 深圳市联得自动化装备股份有限公司 | 线性模组和半导体设备 |
| CN116967796A (zh) * | 2023-09-22 | 2023-10-31 | 无锡星微科技有限公司杭州分公司 | 一种气浮直线平台的移动组件 |
| CN117108633A (zh) * | 2023-10-23 | 2023-11-24 | 上海隐冠半导体技术有限公司 | 气浮台 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112096739B (zh) * | 2020-08-05 | 2021-12-21 | 佛山市华道超精科技有限公司 | 一种气浮导轨式可切换刚柔耦合运动平台 |
| CN113059537B (zh) * | 2021-02-26 | 2022-07-15 | 佛山市华道超精科技有限公司 | 柔性铰链机构、超精密直线运动平台及双工件工作台 |
| WO2023078788A1 (fr) * | 2021-11-03 | 2023-05-11 | Asml Netherlands B.V. | Couplage de platine porte-objet d'appareil lithographique |
Citations (10)
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|---|---|---|---|---|
| US4569562A (en) * | 1982-10-27 | 1986-02-11 | Canon Kabushiki Kaisha | Method of and apparatus for controlling a fluid bearing |
| CN201763815U (zh) * | 2010-07-30 | 2011-03-16 | 东华大学 | 无漂移的高精度开式静压导轨 |
| CN103062285A (zh) * | 2012-12-19 | 2013-04-24 | 哈尔滨工业大学 | 共面气浮正交解耦与柔性膜角度解耦的零刚度隔振器 |
| CN103573815A (zh) * | 2012-07-31 | 2014-02-12 | 上海微电子装备有限公司 | 微动台及气浮轴承 |
| CN103836070A (zh) * | 2014-03-18 | 2014-06-04 | 华中科技大学 | 一种主动式气浮支承装置 |
| CN105202028A (zh) * | 2015-10-16 | 2015-12-30 | 西安工业大学 | 带有弹性阻尼气室的静压空气轴承 |
| CN106002312A (zh) * | 2016-06-29 | 2016-10-12 | 广东工业大学 | 一种单驱动刚柔耦合精密运动平台及其实现方法及应用 |
| CN110281036A (zh) * | 2019-06-14 | 2019-09-27 | 广东工业大学 | 一种双测量的单驱动刚柔耦合运动平台 |
| CN209578822U (zh) * | 2018-11-30 | 2019-11-05 | 广东工业大学 | 带摩擦式刚度切换装置的刚柔耦合平台及运动平台 |
| CN112096739A (zh) * | 2020-08-05 | 2020-12-18 | 佛山市华道超精科技有限公司 | 一种气浮导轨式可切换刚柔耦合运动平台 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101235849B (zh) * | 2007-01-30 | 2012-07-18 | 西安爱德华测量设备股份有限公司 | 一种空气轴承及其加工工艺 |
| JP4835504B2 (ja) * | 2007-05-01 | 2011-12-14 | 株式会社ジェイテクト | 軸受装置 |
| JP6948928B2 (ja) * | 2017-12-08 | 2021-10-13 | 芝浦機械株式会社 | 主軸装置および工作機械 |
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2020
- 2020-08-05 CN CN202010778968.2A patent/CN112096739B/zh active Active
-
2021
- 2021-07-23 WO PCT/CN2021/108024 patent/WO2022028260A1/fr active Application Filing
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4569562A (en) * | 1982-10-27 | 1986-02-11 | Canon Kabushiki Kaisha | Method of and apparatus for controlling a fluid bearing |
| CN201763815U (zh) * | 2010-07-30 | 2011-03-16 | 东华大学 | 无漂移的高精度开式静压导轨 |
| CN103573815A (zh) * | 2012-07-31 | 2014-02-12 | 上海微电子装备有限公司 | 微动台及气浮轴承 |
| CN103062285A (zh) * | 2012-12-19 | 2013-04-24 | 哈尔滨工业大学 | 共面气浮正交解耦与柔性膜角度解耦的零刚度隔振器 |
| CN103836070A (zh) * | 2014-03-18 | 2014-06-04 | 华中科技大学 | 一种主动式气浮支承装置 |
| CN105202028A (zh) * | 2015-10-16 | 2015-12-30 | 西安工业大学 | 带有弹性阻尼气室的静压空气轴承 |
| CN106002312A (zh) * | 2016-06-29 | 2016-10-12 | 广东工业大学 | 一种单驱动刚柔耦合精密运动平台及其实现方法及应用 |
| CN209578822U (zh) * | 2018-11-30 | 2019-11-05 | 广东工业大学 | 带摩擦式刚度切换装置的刚柔耦合平台及运动平台 |
| CN110281036A (zh) * | 2019-06-14 | 2019-09-27 | 广东工业大学 | 一种双测量的单驱动刚柔耦合运动平台 |
| CN112096739A (zh) * | 2020-08-05 | 2020-12-18 | 佛山市华道超精科技有限公司 | 一种气浮导轨式可切换刚柔耦合运动平台 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116759361A (zh) * | 2023-08-21 | 2023-09-15 | 深圳市联得自动化装备股份有限公司 | 线性模组和半导体设备 |
| CN116759361B (zh) * | 2023-08-21 | 2024-03-22 | 深圳市联得自动化装备股份有限公司 | 线性模组和半导体设备 |
| CN116967796A (zh) * | 2023-09-22 | 2023-10-31 | 无锡星微科技有限公司杭州分公司 | 一种气浮直线平台的移动组件 |
| CN116967796B (zh) * | 2023-09-22 | 2023-12-29 | 无锡星微科技有限公司杭州分公司 | 一种气浮直线平台的移动组件 |
| CN117108633A (zh) * | 2023-10-23 | 2023-11-24 | 上海隐冠半导体技术有限公司 | 气浮台 |
| CN117108633B (zh) * | 2023-10-23 | 2024-01-02 | 上海隐冠半导体技术有限公司 | 气浮台 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112096739B (zh) | 2021-12-21 |
| CN112096739A (zh) | 2020-12-18 |
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