WO2022025655A1 - Microwave plasma nozzle for deposition of powder aerosol for coating and coating apparatus using powder aerosol for coating using same - Google Patents

Abstract

A nozzle for deposition of powder aerosol for coating is disclosed. The nozzle for deposition of powder aerosol for coating comprises: an entrance part through which carrier gas and the powder aerosol for coating are injected, and a discharge part through which the powder aerosol for coating is discharged, wherein the discharge part comprises: a discharge pipe that is connected so that the powder aerosol for coating is discharged into a vacuum chamber in which a substrate to be deposited is accommodated; and a plasma generation means for generating plasma between the entrance part and the discharge part.

Description

Microwave plasma nozzle for powder aerosol deposition for coating and coating device by powder aerosol for coating using the same

The present invention relates to a microwave plasma nozzle for powder aerosol deposition for coating, and a coating device using the powder aerosol for coating using the same, and more particularly, to a powder aerosol for coating in which the coating efficiency of powder onto a substrate to be deposited can be improved. It relates to a microwave plasma nozzle for deposition and a coating apparatus using the same for coating powder aerosol.

The process of applying ceramic coating to the existing semiconductor device components to improve plasma and corrosion resistance includes anodizing and thermal spray coating.

When anodizing is used, the density, hardness, and corrosiveness of the ceramic coating film are lowered, and there is also a problem of environmental damage because toxic acid is used.

Due to these problems, an Atmospheric Plasma Spray (APS) method is used as a corrosion-resistant coating technology for semiconductor device components.

Plasma thermal spray coating is a method in which spherical ceramic powder with a particle size of 30-50 μm is supplied to the center of the plasma jet, melted, and sprayed on the surface of the product for lamination.

This plasma spray coating method has the advantages of large area and easy film thickening, but in the case of powder that does not pass through the center of the plasma jet during powder spraying, only the surface of the powder is melted to form a coating layer, so the microstructure and reproducibility are insufficient, The disadvantage is that it is difficult to control.

In addition, there is a disadvantage in that hardness, density, and withstand voltage characteristics are lowered due to problems such as microcracks and pores of the thin film due to high-temperature plasma.

In order to compensate for the shortcomings of the plasma spray coating method, Suspension Plasma Spray (SPS) technology is being developed, which disperses particles of several μm in size in a solvent and supplies them to the plasma jet, but this also supplies powder to the plasma jet. In the process, there are disadvantages in that the heat source is lost due to solvent evaporation, unmelted particles are generated, making it difficult to control the coating film, and the coating film properties are deteriorated due to thermal shock caused by high-temperature plasma.

In order to overcome these shortcomings, aerosol deposition (AD), which has been actively developed recently, is a technology that forms an ultra-high-density ceramic layer by loading ceramic powder in a transport gas at room temperature and spraying it on the base material in a vacuum state in an aerosol state. .

In the room temperature spray coating technology, the kinetic energy of the particles colliding with the surface of the base material and the ceramic powder is converted into plastic deformation without external energy, and strong adhesion and attractive force between the particles is induced. Since the spray coating is made, it is possible to prevent deterioration of the powder, it is possible to control the composition ratio, and there are advantages of high reproducibility.

However, the room temperature spray coating technology has the disadvantages that the coating proceeds only with the kinetic energy of the powder, so the coating speed is very slow compared to the plasma spray coating, and it is difficult to make a thick film.

Therefore, the problem to be solved by the present invention is that the coating efficiency of the powder on the substrate to be deposited is improved, the thickness of the film is possible, and the discharge tube in which plasma is generated is firmly fixed in the vacuum chamber, and the vacuum environment of the vacuum chamber is improved. It is possible to connect the nozzle to be maintained, and furthermore, to provide a microwave plasma nozzle for powder aerosol deposition for coating and a coating device by powder aerosol for coating so that microwaves can be used as a plasma generating means.

In addition, the annular seal that maintains the airtightness around the discharge part of the discharge tube is easily cooled, and heat loss of the annular seal due to the high temperature of the plasma is prevented, so that it can operate for a long time. To provide a coating device by a powder aerosol.

In addition, it is an object to make it possible to stably operate a coating device by a powder aerosol for coating for a long time.

The nozzle for depositing powder aerosol for coating according to an embodiment of the present invention includes an inlet into which a carrier gas and a powder aerosol for coating are injected, and a discharge part through which the powder aerosol for coating is discharged, the discharge part having a substrate to be deposited therein. a discharge tube connected to the vacuum chamber to discharge the powder aerosol for coating into the vacuum chamber; and plasma generating means for generating plasma between the inlet part and the discharge part.

In one embodiment, the plasma generating means, microwave generating means; a waveguide through which microwaves are input from the microwave generating means and through which the discharge tube vertically passes; and an ignition unit supplying electrons for ignition of plasma in the discharge tube, wherein the discharge tube may be a quartz tube or a ceramic tube.

In one embodiment, the discharge tube includes a flange portion formed in an annular shape around the discharge portion, the microwave plasma nozzle for powder aerosol deposition for the coating is an annular seal; a first flange; and a plurality of flange fixing bolts, wherein the annular seal is interposed between the flange portion and an outer surface of the vacuum chamber facing the flange portion to cover the circumference of the flange portion, and the first flange is the annular seal Covering the flange portion and the annular seal on the opposite side of the opposite side to the outer surface of the vacuum chamber, the flange fixing bolt may be coupled to the first flange through the outer surface of the vacuum chamber from the inside of the vacuum chamber.

In an embodiment, the annular seal may be disposed proximate to the edge of the flange portion and spaced apart from the plasma.

In one embodiment, the vacuum chamber further comprises a second flange coupled through the flange fixing bolt between the first flange and the outer surface of the vacuum chamber to receive the annular seal, the second flange is the circumferential direction of the annular seal and a first cooling water channel for circulating the cooling fluid along

In an embodiment, the cooling jacket may further include a cooling jacket disposed coaxially with the discharge tube to accommodate the discharge tube, and including a second cooling water channel surrounding the discharge tube and through which a cooling fluid circulates.

In an embodiment, the cooling fluid circulating in the second cooling water channel may be oil having a permittivity to transmit electromagnetic waves.

In one embodiment, it may further include a shielding jacket for accommodating the discharge tube and the cooling jacket.

In one embodiment, it may further include a terminal nozzle installed on the inner surface of the vacuum chamber to be disposed coaxially with the discharge tube to discharge the powder aerosol for coating transmitted through the discharge tube toward the deposition target substrate.

In one embodiment, the inside of the terminal nozzle through which the powder aerosol for coating passes may decrease in diameter toward the end of the terminal nozzle.

In one embodiment, the inner diameter of the discharge tube may be 10 ~ 15mm or less, the inner diameter of the end of the terminal nozzle may be 5mm ~ 10mm.

In one embodiment, the ignition portion has a truncated cone-shaped inner surface, and forms an annular pointed portion in the truncated portion, and the pointed portion is adjacent to an area through which the discharge tube of the waveguide is passed and surrounds the discharge tube. An annular conductive ring to be installed; It may include a power applying member conductively connected to the annular conductive ring and to which power for ignition of plasma is applied in the discharge tube.

A coating apparatus by a powder aerosol for coating according to an embodiment of the present invention includes a vacuum chamber accommodating a substrate to be deposited therein; The nozzle according to any one of claims 1 to 12, which is mounted in the vacuum chamber to face the vapor-deposited substrate and discharges a powder aerosol for coating toward the vapor-deposited substrate; And characterized in that it comprises an aerosol supply for supplying a powder aerosol for coating to the inlet of the nozzle.

In one embodiment, the aerosol supply unit, containing the powder for coating, the powder chamber of a higher pressure than the vacuum chamber; a carrier gas supply unit supplying a carrier gas to the powder chamber; and an aerosol transport channel connected between the powder chamber and the nozzle to supply the powder aerosol for coating from the powder chamber to the nozzle.

In one embodiment, the carrier gas may be argon or nitrogen.

Using the microwave plasma nozzle for powder aerosol deposition for coating according to the present invention, and a coating device by powder aerosol for coating using this nozzle, the powder aerosol for coating accelerated toward the substrate to be deposited is accelerated by obtaining plasma energy. Since it is discharged, the coating efficiency of the powder onto the substrate to be deposited can be improved.

In addition, in the microwave plasma nozzle for powder aerosol deposition for coating, the discharge part of the discharge tube is firmly fixed to the vacuum chamber, and the nozzle can be connected so that the vacuum environment of the vacuum chamber is maintained. There are advantages to making microwaves available.

In addition, since the annular seal maintaining the airtightness around the discharge part of the discharge tube can be easily cooled, heat loss of the annular seal due to the high temperature of the plasma is prevented, thereby enabling long-term operation.

In addition, since the discharge tube of the nozzle is surrounded by a shielding jacket and shielded from the external space, leakage of electromagnetic waves flowing into the discharge tube is prevented. There is an advantage.

1 is a cross-sectional view showing the configuration of a microwave plasma nozzle for powder aerosol deposition for coating according to an embodiment of the present invention.

FIG. 2 is an enlarged perspective view of the conductive ring of the ignition unit shown in FIG. 1 .

3 is a cross-sectional view showing the configuration of a microwave plasma nozzle for powder aerosol deposition for coating according to another embodiment of the present invention.

4 is a cross-sectional view showing the configuration of a microwave plasma nozzle for powder aerosol deposition for coating according to another embodiment of the present invention.

5 is an external perspective view of FIG. 4 ;

6 is a view for explaining the configuration of a coating device by a powder aerosol for coating according to an embodiment of the present invention.

Hereinafter, with reference to the accompanying drawings, a microwave plasma nozzle for powder aerosol deposition for coating according to an embodiment of the present invention and a coating device by powder aerosol for coating using the same will be described in detail. Since the present invention can have various changes and can have various forms, specific embodiments are illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to the specific disclosed form, it should be understood to include all modifications, equivalents and substitutes included in the spirit and scope of the present invention. In describing each figure, like reference numerals have been used for like elements. In the accompanying drawings, the dimensions of the structures are enlarged than the actual size for clarity of the present invention.

Terms such as first, second, etc. may be used to describe various elements, but the elements should not be limited by the terms. The above terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, a first component may be referred to as a second component, and similarly, a second component may also be referred to as a first component.

The terms used in the present application are only used to describe specific embodiments, and are not intended to limit the present invention. The singular expression includes the plural expression unless the context clearly dictates otherwise. In the present application, terms such as "comprise" or "have" are intended to designate that a feature, number, step, operation, component, part, or a combination thereof described in the specification exists, but one or more other features It is to be understood that it does not preclude the possibility of the presence or addition of numbers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical and scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related art, and should not be interpreted in an ideal or excessively formal meaning unless explicitly defined in the present application. does not

1 is a cross-sectional view showing the configuration of a microwave plasma nozzle for powder aerosol deposition for coating according to an embodiment of the present invention.

Referring to FIG. 1 , the microwave plasma nozzle for powder aerosol deposition for coating according to an embodiment of the present invention may include a discharge tube 110 and a plasma generating means 120 .

The discharge tube 110 may include an inlet part 111 and a discharge part 112 . A carrier gas and powder aerosol for coating may be injected into the inlet part 111 , and powder aerosol for coating injected into the inlet part 111 may be discharged through the discharge part 112 . In the discharge tube 110 , the discharge unit 112 is connected to the vacuum chamber 200 so that the discharge unit 112 discharges the powder aerosol for coating into the vacuum chamber 200 in which the vapor-deposited substrate 10 is accommodated. The discharge tube 110 may be a quartz tube or a ceramic tube.

As the diameter of the discharge tube 110 decreases, the flow rate of the powder aerosol for coating passing through the discharge tube 110 may increase. To this end, the inner diameter of the discharge tube 110 may be set to 10mm ~ 15mm or less. If it is less than 10 mm, the diameter of the discharge tube 110 is significantly reduced, so there is a problem in maintaining the strength of the discharge tube 110, and if it exceeds 15 mm, the plasma generated by the plasma generating means 120 in the discharge tube 110 is hollow. It may be generated by plasma, and in this case, there is a problem in that the powder aerosol for coating that passes through the discharge tube 110 passes through without contacting the plasma. Accordingly, the inner diameter of the discharge tube 110 is set not to exceed 15 mm in order to generate plasma filled in the discharge tube 110 .

The plasma generating means 120 generates plasma between the inlet 111 and the outlet 112 of the discharge tube 110 . That is, plasma is generated between the inlet part 111 and the discharge part 112 so that the powder aerosol for coating that proceeds from the inlet part 111 to the discharge part 112 passes through the plasma.

The plasma may be plasma by microwave plasma discharge. To this end, the plasma generating means 120 may include a microwave generating means (not shown), a waveguide 122 and an ignition unit 123 .

Although not specifically shown, the microwave generating means may include a magnetron, a power supply, a circulator, a directional coupler, and a stub tuner. The magnetron may be a magnetron that oscillates an electromagnetic wave in a band of 10 MHz to 10 GHz, and preferably may be configured to oscillate an electromagnetic wave at 2.45 GHz. The power supply unit may be configured to supply power to the magnetron by being composed of a radio voltage multiplier and a pulse and direct current (DC) device. The circulator may be configured to output electromagnetic waves oscillated from the magnetron and to protect the magnetron by dissipating electromagnetic wave energy reflected by impedance mismatch. The directional coupler may output the electromagnetic wave transmitted through the circulator. The stub tuner may be configured such that the electric field induced by the electromagnetic wave exhibits the strongest phenomenon in the discharge tube 110 by inducing impedance matching by adjusting the intensity of the incident wave and the reflected wave with respect to the radio wave input from the directional coupler.

The waveguide 122 receives electromagnetic waves from the microwave generating means, and the discharge tube 110 vertically passes through it.

The ignition unit 123 supplies electrons for ignition of plasma in the discharge tube 110 . For example, the ignition unit 123 may include an annular conductive ring 1231 and a power applying member 1232 .

FIG. 2 is an enlarged perspective view of the conductive ring of the ignition unit shown in FIG. 1 . 1 and 2 , the annular conductive ring 1231 may have a truncated cone-shaped inner surface, and an annular pointed portion 1231a may be formed in the truncated portion. The annular conductive ring 1231 may be installed such that the pointed portion 1231a is adjacent to the region through which the discharge tube 110 of the waveguide 122 passes, and the pointed portion 1231a surrounds the discharge tube 110 .

The annular conductive ring 1231 is in linear contact with the discharge tube 110 when the annular pointed part 1231a wraps around the discharge tube 110, which is the annular conductive ring 1231 is in contact with the discharge tube 110. Since the area is minimized and the power for supplying electrons is concentrated on the sharp part 1231a, electrons are always supplied adjacent to the region through which the discharge tube 110 of the waveguide 122 is penetrated, and stable electron supply can be achieved. .

The power applying member 1232 is conductively connected to the annular conductive ring 1231 , and power for ignition of plasma in the discharge tube 110 may be applied from an external power supply means.

As an example, the power applying member 1232 may include a power output terminal 1232a and a power input unit 1232b opposite to the power output terminal 1232a, so that the power output terminal 1232a penetrates one side of the conductive ring 1231 . It may be installed on one side of the conductive ring 1231 . The power input unit 1232b may be electrically connected to an external power supply means to receive power from the power supply means.

When power is applied to the power applying member 1232 to the ignition unit 123, power is applied from the power output terminal 1232a in the direction of the pointed portion 1231a of the conductive ring 1231, and the conductive ring 1231 The electric power applied to the sharp part 1231a is transferred to the inside of the discharge tube 110 , and electrons for plasma discharge are input to the electromagnetic waves flowing into the inside of the discharge tube 110 to initiate plasma discharge, and accordingly, the discharge tube 110 ) in which plasma can be generated.

On the other hand, when the discharge tube 110 is connected to the vacuum chamber 200, a strong airtightness must be maintained in order to maintain a vacuum in the vacuum chamber 200 and to prevent leakage of a powder aerosol for coating.

To this end, the microwave plasma nozzle for powder aerosol deposition for coating according to an embodiment of the present invention is an annular seal 130 and a first flange 141 and a plurality of flange fixing bolts as shown in FIG. 1 . 190 may be included, and the discharge tube 110 may include a flange portion 113 formed in an annular shape around the discharge portion 112 . 2 is a cross-sectional view showing an embodiment in which a microwave plasma nozzle for powder aerosol deposition for coating according to an embodiment of the present invention is fixed to a vacuum chamber.

The annular seal 130 may be formed of an O-ring made of a rubber material having heat resistance. The annular seal 130 may be interposed between the flange part 113 and the outer surface of the vacuum chamber 200 facing the flange part 113 so as to cover the circumference of the flange part 113 . At this time, the annular seal 130 may be disposed to be as close to the edge of the flange portion 113 as possible. For example, the annular seal 130 may be in close contact with the flange portion 113 to cover the edge of the flange portion 113 to seal the circumference of the discharge portion 112 . In this case, the annular seal 130 may be spaced away from the plasma, thereby preventing thermal damage due to the high temperature of the plasma.

The first flange 141 may face the outer surface of the vacuum chamber 200 by covering the flange portion 113 and the annular seal 130 from the opposite side of the annular seal 130 .

The flange fixing bolt 190 may be coupled to the first flange 141 through the outer surface of the vacuum chamber 200 from the inside of the vacuum chamber 200 . At this time, the flange fixing bolt 190 is tightened to the first flange 141 and pulls the first flange 141 in the direction of the vacuum chamber 200 to firmly attach the first flange 141 to the outer surface of the vacuum chamber 200 . can be fixed

Hereinafter, for convenience of description, the outer surface of the vacuum chamber 200 to which the discharge tube 110 is fixed will be described as a 'nozzle mounting surface 210'.

3 is a cross-sectional view showing the configuration of a microwave plasma nozzle for powder aerosol deposition for coating according to another embodiment of the present invention.

Referring to FIG. 3 , the microwave plasma nozzle for powder aerosol deposition for coating according to another embodiment of the present invention may further include a second flange 142 .

The second flange 142 is coupled through a flange fixing bolt 190 between the nozzle mounting surface 210 and the first flange 141 to accommodate the annular seal 130 . That is, the flange fixing bolt 190 is screwed to the nozzle mounting surface 210, the second flange 142 and the first flange 141 so that the second flange 142 is the nozzle mounting surface 210 and the first flange. It may be fixed between the 141 , and the annular seal 130 and the flange portion 113 of the discharge tube 110 may be accommodated between the first flange 141 and the second flange 142 .

In addition, the second flange 142 may include a fluid passage hole 1421 formed in the center. The fluid passage hole 1421 may be disposed coaxially with the discharge tube 110 to face the discharge tube 110 in fluid communication with the interior of the discharge tube 110 , and a nozzle mounting surface to which the second flange 142 is fixed. A through hole 211 capable of fluid communication with the fluid passage hole 1421 may be formed in the 210 .

For example, a flange accommodating groove 1411 is formed on the surface of the first flange 141 in close contact with the second flange 142 to accommodate the flange portion 113 of the discharge tube 110 in the flange accommodating groove 1411 . And, an annular seal accommodating groove 1422 is formed around the fluid passage hole 1421 of the second flange 142 to accommodate the annular seal 130 in the annular seal accommodating groove 1422 . At this time, the annular seal 130 may cover the edge of the flange portion 113 to be in close contact with the flange portion 113 .

Meanwhile, in order to more effectively prevent thermal damage due to the high temperature of the plasma of the annular seal 130 , the second flange 142 may include a first cooling water channel 1423 . The first cooling water channel 1423 may be formed along the circumferential direction of the annular seal 130 accommodated in the interior of the second flange 142 , and the cooling fluid may be injected and circulated. For example, the first cooling water channel 1423 is formed to be located inside the annular seal accommodating groove 1422 in which the annular seal 130 is accommodated, and the annular seal 130 is accommodated in the annular seal accommodating groove 1422 . may be in contact with the cooling fluid. The cooling fluid may be injected into the first cooling water channel 1423 by connecting the cooling fluid supply means to the first flange 141 . Although not shown, for example, the cooling fluid supply means includes a cooling fluid storage tank storing a cooling fluid, a first cooling water channel 1423, an injection pipe and a recovery pipe connected to the storage tank in fluid communication, and a cooling fluid. It may include a pump that does.

4 is a cross-sectional view showing the configuration of a microwave plasma nozzle for powder aerosol deposition for coating according to another embodiment of the present invention, and FIG. 5 is an external perspective view of FIG. 4 .

On the other hand, as mentioned above, since the plasma generated in the discharge tube 110 is generated as a full plasma in the discharge tube 110 , the heat of the plasma is not dispersed but is concentrated in the discharge tube 110 , so it is necessary to cool the discharge tube 110 . there is To this end, the microwave plasma nozzle for powder aerosol deposition for coating according to another embodiment of the present invention may further include a cooling jacket 150 as shown in FIG. 4 .

The cooling jacket 150 may be disposed coaxially with the discharge tube 110 to accommodate the discharge tube 110 , surround the discharge tube 110 , and include a second cooling water channel 151 through which a cooling fluid circulates. The second cooling water channel 151 may be formed along the longitudinal direction of the discharge tube 110 .

The cooling jacket 150 may accommodate the discharge tube 110 and vertically penetrate the waveguide 122 together with the discharge tube 110 . At this time, the cooling jacket 150 may be a quartz tube or a ceramic tube so that the cooling jacket 150 does not block the inflow of electromagnetic waves into the discharge tube 110 , and the cooling fluid circulated along the second cooling water channel 151 is It may be an oil having a permittivity capable of transmitting electromagnetic waves.

In addition, a third flange 143 disposed coaxially with the cooling jacket 150 in a direction opposite to the first flange 141 for injection and circulation of the cooling fluid into the second cooling water channel 151 may be further included. , The first flange 141 and the third flange 143 have central holes 1412 and 1431 having a diameter equal to or greater than the diameter of the second cooling water passage 151 for injection and discharge of cooling fluid and the central hole 1412; The fluid inlets 1413 and 1432 penetrating through the 1431 may be formed.

In this case, the inlet 111 of the discharge tube 110 may be accommodated in the central hole 1432 of the third flange 143 , and the inlet 111 of the discharge tube 110 is located at the rear of the third flange 143 . ) and the adapter 160 having an aerosol injection hole 161 for injecting the powder aerosol for coating into the inlet 111 of the discharge tube 110 in fluid communication can be coupled thereto.

Although not shown, a cooling fluid supply means may be connected to the first flange 141 and the third flange 143 to inject the cooling fluid into the second cooling channel 151 . Since the cooling fluid supply means is the same as or similar to the cooling fluid supply means connected to the second flange 142 , a detailed description thereof will be omitted.

Here, since the cooling jacket 150 is a quartz tube or a ceramic tube and accommodates the discharge tube 110 , the annular conductive ring 1231 of the ignition unit 123 of the plasma generating means 120 is a pointed portion 1231a). may be provided to surround the cooling jacket 150 .

On the other hand, the coating powder of the powder aerosol for coating discharged toward the deposition target substrate 10 must be attached to the deposition target substrate 10 with a strong adhesive force. It should be strongly discharged to the , and for this purpose, the smaller the diameter of the tip of the nozzle through which the powder aerosol for coating is discharged, the better.

To achieve this, the microwave plasma nozzle for powder aerosol deposition for coating according to another embodiment of the present invention may further include a terminal nozzle 170 as shown in FIG. 4 .

The terminal nozzle 170 is installed on the inner surface of the vacuum chamber 200, that is, the inner surface of the nozzle mounting surface 210 to be disposed coaxially with the discharge tube 110 to avoid the powder aerosol for coating transmitted through the discharge tube 110. It is discharged toward the vapor deposition substrate 10 .

It is preferable that the terminal nozzle 170 has an inner diameter of the distal end at which the powder aerosol for coating is discharged is smaller than the diameter of the discharge tube 110 . To this end, the inside of the terminal nozzle 170 is provided in a form that the diameter decreases toward the end of the terminal nozzle 170, the inner diameter of the end of the terminal nozzle 170 may be set to 5mm ~ 10mm. In this way, if the inner diameter of the end of the terminal nozzle 170 is formed smaller than the inner diameter of the discharge tube 110, the flow rate of the powder aerosol for coating increases toward the end of the terminal nozzle 170, and at the end of the terminal nozzle 170 Powder aerosol for coating may be strongly discharged toward the deposition target substrate (10).

Meanwhile, the microwave plasma nozzle for powder aerosol deposition for coating according to another embodiment of the present invention may further include a shielding jacket 180 as shown in FIG. 4 .

The shielding jacket 180 accommodates the discharge tube 110 and the cooling jacket 150 . For example, the shielding jacket 180 may include a first shielding tube 181 and a second shielding tube 182 .

The first shielding tube 181 is connected between the waveguide 122 and the first flange 141 and is positioned between the waveguide 122 and the first flange 141 , and a part of the cooling jacket 150 and the discharge tube 110 . length can be covered.

The second shielding pipe 182 is connected between the waveguide 122 and the third flange 143 on the opposite side of the first shielding pipe 181 and is located between the waveguide 122 and the third flange 143 , the cooling jacket. 150 and some other lengths of the discharge tube 110 may be shielded.

Here, the shielding jacket 180 may be made of a metal material, and the vacuum chamber 200 , the first flange 141 , the second flange 142 , the third flange 143 , and the adapter 160 may all be made of a metal material. have. Accordingly, the discharge tube 110 and the cooling jacket 150 may be shielded from the outside by being surrounded by a metal material.

Using a microwave plasma nozzle for depositing powder aerosol for coating according to an embodiment of the present invention, a coating apparatus by powder aerosol for coating to which microwave plasma energy is applied can be configured.

6 is a view for explaining the configuration of a coating device by a powder aerosol for coating according to an embodiment of the present invention.

Referring to FIG. 6 , the coating apparatus by powder aerosol for coating according to an embodiment of the present invention may include a vacuum chamber 200 , an aerosol nozzle 100 , and an aerosol supply unit 300 .

The vacuum chamber 200 has a vacuum inside, provides a space for the coating powder aerosol to be deposited on the vapor-deposited substrate 10, and accommodates the vapor-deposited substrate 10 therein.

The aerosol nozzle 100 discharges a powder aerosol for coating toward the vapor-deposited substrate 10 in the vacuum chamber 200 . Here, the powder included in the powder aerosol for coating may be a ceramic powder. The aerosol nozzle 100 is a microwave plasma nozzle for powder aerosol deposition for coating according to an embodiment of the present invention.

The aerosol supply unit 300 supplies a powder aerosol for coating to the inlet 111 of the aerosol nozzle 100 . The aerosol supply unit 300 may include a powder chamber 310 , a carrier gas supply unit 320 , and an aerosol transport channel 330 .

The powder chamber 310 contains the powder for coating, and may have a higher pressure than the vacuum chamber 200 .

The carrier gas supply unit 320 supplies the carrier gas to the powder chamber 310 . For example, the carrier gas supply unit 320 is installed on the gas tank 321 storing the carrier gas, the gas supply pipe 322 connected from the gas tank 321 to the powder chamber 310 and the gas supply pipe 322 . and may include a mass flow controller 323 to control the supply of carrier gas. The carrier gas may be argon or nitrogen.

The aerosol transport channel 330 allows the powder aerosol for coating to be supplied from the powder chamber 310 to the aerosol nozzle 100 . For example, the aerosol transport channel 330 may be a hollow pipe having one end connected to the powder chamber 310 and the other end connected to the aerosol nozzle 100 .

Hereinafter, a process of discharging powder to a vapor-deposited substrate and coating the vapor-deposited substrate using a coating apparatus by a powder aerosol for coating according to an embodiment of the present invention will be described.

First, the carrier gas is supplied to the powder chamber 310 through the aerosol supply unit 300 .

Subsequently, when the carrier gas flows into the powder chamber 310 , the carrier gas and the coating powder are mixed to form an aerosol of the coating powder, and the powder chamber 310 has a higher pressure than the vacuum chamber 200 , so the pressure After the aerosol of the powder for coating flows into the aerosol transport channel 330 by the difference, it is supplied to the aerosol nozzle 100 along the aerosol transport channel 330 .

In the aerosol nozzle 100 , the powder aerosol for coating flows into the inlet 111 of the discharge tube 110 , and proceeds from the inlet 111 to the discharge portion 112 along the longitudinal direction of the discharge tube 110 . At this time, plasma is generated in the discharge tube 110 through the plasma generating means 120 .

An electromagnetic wave is input to the waveguide 122 through a micro generating means for plasma generation, and the electromagnetic wave input to the waveguide 122 passes through the waveguide 122, made of a quartz tube, a discharge tube 110 and a cooling jacket It passes through 150 and is supplied to the inside of the discharge tube 110 . At this time, when power is applied to the power applying member 1232 of the ignition unit 123 , power is applied to the conductive ring 1231 through the power output terminal 1232a of the power applying member 1232 , and the applied power is cooled After being applied to the sharp part 1231a of the conductive ring 1231 surrounding the jacket 150 and the discharge tube 110 , the electrons are transferred to the inside of the discharge tube 110 to ignite the plasma in the electromagnetic wave in the discharge tube 110 . is input Accordingly, microwave plasma discharge is started in the discharge tube 110 to generate plasma in the discharge tube 110 .

The plasma generated in the discharge tube 110 is generated as plasma filled in the discharge tube 110 because the discharge tube 110 has an inner diameter of 10 mm to 15 mm or less, and for coating proceeding toward the discharge part 112 of the discharge tube 110 As the powder aerosol passes through the plasma, the energy of the plasma is imparted to the powder aerosol for coating.

The powder aerosol for coating obtained by plasma energy passes through the discharge part 112 of the aerosol nozzle 100 and then through the end of the terminal nozzle 170 located in the vacuum chamber 200 vacuum chamber 200 and the powder chamber ( 310 is strongly discharged to the surface of the vapor-deposited substrate 10 by the pressure difference.

By strong discharge, the powder aerosol for coating collides with the substrate 10 to be deposited, and as the collision energy is converted into plastic deformation of the powder for coating, for example, ceramic, strong adhesion and attractive force between particles is induced, and the ceramic powder is As it collapses into nano-sized fine particles, it is attached to the surface of the vapor-deposited substrate 10 with a strong adhesive force.

During the discharge process of the powder aerosol for coating, the annular seal 130 and the discharge tube 110 of the aerosol nozzle 100 are cooled. That is, the cooling fluid is injected and circulated into the first cooling water passage 1423 inside the second flange 142 of the aerosol nozzle 100 and the second cooling water passage 151 inside the cooling jacket 150 to form the annular seal 130 ) and the discharge tube 110 may be cooled.

Using the microwave plasma nozzle for powder aerosol deposition for coating according to an embodiment of the present invention described above, and a coating device by powder aerosol for coating using the same, powder for coating accelerated toward the substrate 10 to be deposited , for example, since the ceramic powder aerosol obtains energy of plasma and is accelerated and discharged, the coating efficiency of the powder onto the substrate 10 to be deposited can be improved.

In addition, the microwave plasma nozzle for powder aerosol deposition for coating is a discharge tube ( The discharge part 112 of 110) is not only firmly fixed to the vacuum chamber 200, but also the connection of the nozzle is possible so that the vacuum environment of the vacuum chamber 200 is maintained, and further, this advantage is the plasma generating means 120 As a result, there is an advantage of making microwaves available.

In addition, since the annular seal 130 that maintains the airtightness around the discharge part 112 of the discharge tube 110 can be easily cooled, heat loss of the annular seal 130 due to the high temperature of the plasma can be prevented. have.

In addition, since the discharge tube 110 of the nozzle is surrounded by a metal material and shielded from the external space, leakage of electromagnetic waves flowing into the discharge tube 110 is prevented, and the electronic shielding with the external space is made. It has the advantage of being able to drive stably for a long time.

The description of the presented embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the scope of the invention. Thus, the present invention is not to be limited to the embodiments presented herein but should be construed in the widest scope consistent with the principles and novel features presented herein.

Claims (15)

1. It includes a mouth 111 into which a carrier gas and a powder aerosol for coating are injected and a discharge part 112 through which the powder aerosol for coating is discharged, wherein the discharge part 112 is a vacuum chamber in which the substrate 10 to be deposited is accommodated ( 200) a discharge tube 110 connected to the vacuum chamber 200 so that the powder aerosol for coating is discharged into the; and

   Plasma generating means (120) for generating plasma between the inlet part (111) and the discharge part (112) characterized in that it comprises,

   Nozzles for powder aerosol deposition for coatings.
2. The method of claim 1,

   The plasma generating means 120 is,

   microwave generating means;

   a waveguide 122 through which the microwave is input from the microwave generating means and through which the discharge tube vertically passes; and

   and an ignition unit 123 for supplying electrons for ignition of plasma in the discharge tube,

   The aerosol discharge tube is characterized in that the quartz tube or ceramic tube,

   Microwave plasma nozzle for powder aerosol deposition for coating.
3. The method of claim 1,

   The discharge tube 110 includes a flange portion 113 formed in an annular shape around the discharge portion 112,

   The microwave plasma nozzle for powder aerosol deposition for the coating is an annular seal (seal) 130; a first flange 141; and a plurality of flange fixing bolts 190,

   The annular seal 130 is interposed between the flange portion 113 and the outer surface of the vacuum chamber 200 facing the flange portion 113 to cover the circumference of the flange portion 113,

   The first flange 141 is opposite to the outer surface of the vacuum chamber 200 by covering the flange portion 113 and the annular seal 130 on the opposite side of the annular seal 130,

   The flange fixing bolt 190 is coupled to the first flange 141 through the outer surface of the vacuum chamber 200 from the inside of the vacuum chamber 200,

   Microwave plasma nozzle for powder aerosol deposition for coating.
4. 4. The method of claim 3,

   The annular seal 130 is disposed close to the edge of the flange portion 113, characterized in that it is spaced apart from the plasma,

   Microwave plasma nozzle for powder aerosol deposition for coating.
5. 4. The method of claim 3,

   Further comprising a second flange 142 coupled through the flange fixing bolt 190 between the outer surface of the vacuum chamber 200 and the first flange 141 to accommodate the annular seal 130,

   The second flange 142 includes a first cooling water channel 1423 for circulating a cooling fluid along the circumferential direction of the annular seal 130,

   The annular seal 130 is characterized in that it is indirectly cooled by a cooling fluid circulated along the first cooling water channel 1423,

   Microwave plasma nozzle for powder aerosol deposition for coating.
6. 6. The method of claim 1 or 5,

   It further includes a cooling jacket 150 disposed coaxially with the discharge tube 110 to accommodate the discharge tube 110 and including a second cooling water channel 151 in which a cooling fluid circulates around the discharge tube 110 . characterized in that

   Microwave plasma nozzle for powder aerosol deposition for coating.
7. 7. The method of claim 6,

   The cooling fluid circulating in the second cooling water channel 151 is characterized in that the oil having a permittivity to transmit electromagnetic waves,

   Microwave plasma nozzle for powder aerosol deposition for coating.
8. 6. The method of claim 5,

   Characterized in that it further comprises a shielding jacket (180) for accommodating the discharge tube (110) and the cooling jacket (150),

   Microwave plasma nozzle for powder aerosol deposition for coating.
9. According to claim 1,

   A terminal nozzle 170 installed on the inner surface of the vacuum chamber 200 so as to be coaxial with the discharge tube 110 and discharging the powder aerosol for coating transmitted through the discharge tube 110 toward the deposition target substrate 10 . ) characterized in that it further comprises,

   Microwave plasma nozzle for powder aerosol deposition for coating.
10. 10. The method of claim 9,

    The inside of the terminal nozzle 170 through which the powder aerosol for coating passes is characterized in that the diameter decreases toward the end of the terminal nozzle 170,

    Microwave plasma nozzle for powder aerosol deposition for coating.
11. 11. The method of claim 10,

    The inner diameter of the discharge tube 110 is 10mm ~ 15mm or less,

    The inner diameter of the end of the terminal nozzle 170 is characterized in that 5mm ~ 10mm,

    Microwave plasma nozzles for powder aerosol deposition for coatings.
12. 3. The method of claim 2,

    The ignition unit,

    It has a truncated cone-shaped inner surface, an annular sharp portion 1231a is formed in the truncated portion, and the sharp portion 1231a is adjacent to the region through which the discharge tube 110 of the waveguide 122 passes. Annular conductive ring 1231 installed to surround the discharge tube 110;

    It characterized in that it includes a power applying member 1232 that is conductively connected to the annular conductive ring 1231 and to which power for ignition of plasma is applied in the discharge tube 110 ,

    Microwave plasma nozzle for powder aerosol deposition for coating.
13. a vacuum chamber 200 for accommodating the vapor-deposited substrate 10 therein;

    The nozzle 100 according to any one of claims 1 to 11, which is mounted in the vacuum chamber 200 to face the vapor-deposited substrate 10 and discharges a powder aerosol for coating toward the vapor-deposited substrate 10. ; and

    Characterized in that it comprises an aerosol supply part 300 for supplying a powder aerosol for coating to the inlet part 111 of the nozzle 100,

    Coating device by powder aerosol for coating.
14. 14. The method of claim 13,

    The aerosol supply unit 300,

    It contains the powder for coating, the powder chamber 310 of a higher pressure than the vacuum chamber 200;

    a carrier gas supply unit 320 for supplying a carrier gas to the powder chamber 310; and

    An aerosol transport channel 330 connected between the powder chamber 310 and the nozzle 100 to supply a powder aerosol for coating from the powder chamber 310 to the nozzle 100, characterized in that it comprises an aerosol transport channel 330 ,

    Coating device by powder aerosol for coating.
15. 15. The method of claim 14,

    The carrier gas is characterized in that argon or nitrogen,

    Coating device by powder aerosol for coating.

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