CN220528267U

CN220528267U - Plasma generating device

Info

Publication number: CN220528267U
Application number: CN202322129001.3U
Authority: CN
Inventors: 何艾华; 庞爱锁; 林佳继; 刘群
Original assignee: Laplace New Energy Technology Co ltd
Current assignee: Laplace New Energy Technology Co ltd
Priority date: 2023-08-09
Filing date: 2023-08-09
Publication date: 2024-02-23
Anticipated expiration: 2033-08-09

Abstract

The utility model discloses a plasma generating device, which comprises a shielding cover, a discharge part, a first air injection part and a second air injection part, wherein an outlet is formed on one surface of the shielding cover, the shielding cover is of an equal-width structure, the discharge part is positioned in the shielding cover, the first air injection part is positioned above the discharge part, and the second air injection part is arranged on the shielding cover and is arranged close to the outlet of the shielding cover. The plasma generating device can improve the interaction between the plasma generated by the directly ionized first gas and the indirectly ionized second gas, improves the mixing uniformity degree of the plasma and the second gas, and is beneficial to improving the process uniformity of the substrate material.

Description

Plasma generating device

Technical Field

The utility model relates to the technical field of semiconductor equipment, in particular to a plasma generating device.

Background

The semiconductor or photovoltaic material is widely applied to industries such as electronics, new energy and the like, the processing of the semiconductor or photovoltaic material is generally realized by sending a sheet material into a furnace to react under the condition of certain temperature and pressure, and in the process of processing the semiconductor or photovoltaic material, deposition, etching and cleaning are generally enhanced by adopting a plurality of plasma generating devices, wherein the more common plasma generating devices comprise an ICP (Inductively Coupled Plasma ) discharging device, the working principle of the device is that electromagnetic waves are generated through inductance, a first gas (gas incapable of forming a coating layer on the sheet material) can generate plasma in a shielding cover under the action of the electromagnetic waves, and the plasma can be mixed with a second gas (gas capable of forming the coating layer on the sheet material) when moving to an outlet of the shielding cover, so that the deposition reaction can realize the function of coating on the sheet material. In the prior art, the problem that the coating film on the sheet material is uneven due to uneven mixing of the plasma and the second gas exists.

Disclosure of Invention

The utility model aims to provide a plasma generating device which can improve the interaction between plasma generated by directly ionized first gas and indirectly ionized second gas, improve the mixing uniformity degree of the plasma and the second gas and is beneficial to improving the process uniformity of sheet materials.

The utility model discloses a plasma generating device, comprising: the shielding cover is provided with an outlet on one surface, and is of an equal-width structure; a discharge member located within the shield; a first jet member positioned above the discharge member; and the second air injection piece is arranged on the shielding cover and is arranged close to the outlet of the shielding cover.

In some embodiments, the first air-injecting member is a multi-layer tube structure, each layer tube structure of the multi-layer tube structure is provided with an air hole, and the innermost layer tube structure is connected with an air source.

In some embodiments, the plurality of discharge elements are spaced apart along a height direction of the shielding case and/or the plurality of discharge elements are spaced apart along a width direction of the shielding case.

In some embodiments, the first jet is located in the middle of the shield in the width direction of the shield; wherein: the discharge member is positioned right below the first air injection member, or a plurality of discharge members are symmetrically arranged with respect to the first air injection member.

In some embodiments, the second air-jet member includes an air-jet cover and an air-jet member body, the air-jet cover is connected with the shielding cover, and an opening is disposed on a side of the air-jet cover facing the shielding cover, and the air-jet member body is mounted inside the air-jet cover.

In some embodiments, the open end of the shield extends into the opening to conceal a portion of the opening, and the jet housing has an extension angled with respect to a width direction of the shield, the extension being capable of intersecting an extension of a sidewall of the shield.

In some specific embodiments, the air-jet cover is an arc-shaped cover, and the extending direction of the opening forms an included angle with the height direction of the shielding cover.

In some embodiments, the second air injecting members are two groups, and the two groups of the second air injecting members are respectively connected to two sides of the shielding case.

In some embodiments, the discharge member includes a dielectric tube and an inductor disposed within the dielectric tube.

In some embodiments, a flow-homogenizing plate is further disposed within the shield, the flow-homogenizing plate being located between the first jet member and the discharge member.

The plasma generating device has the beneficial effects that: it will be appreciated that in actual operation, the first gas jet member is capable of jetting a first gas (a gas that does not generate solid deposits after ionization, such as argon, hydrogen, nitrogen, ammonia, etc.) into the shield, the first gas is ionized and generates plasma under the action of electromagnetic waves emitted from the discharge member, and when the plasma flows to the outlet position of the shield, the first gas jet member is capable of mixing with a second gas (a gas that can generate solid deposits after ionization, such as silane, etc.) jetted from the second gas jet member with the plasma, and reacting with a sheet material on the substrate near the outlet of the shield to form a film of solid deposits after ionization, or directly using the plasma to perform processes such as cleaning, etching, grafting modification of the surface of the substrate material. Because the shielding cover is of an equal-width structure, plasma flows to the position close to the outlet of the shielding cover and is distributed relatively uniformly, so that the plasma can be in uniform contact with the second gas, the second gas is uniformly ionized, and the process uniformity of the sheet-shaped material is improved.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

Fig. 1 is a schematic structural view of a plasma generating apparatus according to a first embodiment of the present utility model;

fig. 2 is a schematic structural view of a plasma generating device according to a second embodiment of the present utility model;

fig. 3 is a schematic structural view of a plasma generating apparatus according to a third embodiment of the present utility model;

fig. 4 is a schematic structural view of a plasma generating apparatus according to a fourth embodiment of the present utility model;

fig. 5 is a schematic structural view of a plasma generating apparatus according to a fifth embodiment of the present utility model;

fig. 6 is a schematic structural view of a plasma generating apparatus according to a sixth embodiment of the present utility model.

Reference numerals:

100. a shield; 110. an outlet;

200. a discharge member; 210. a medium pipe; 220. an inductance coil;

300. a first air jet; 310. air holes;

400. a second air jet; 410. a gas-spraying cover; 411. an opening; 412. an extension; 420. a jet body;

500. and a flow homogenizing plate.

Detailed Description

In order to make the technical problems solved, the technical scheme adopted and the technical effects achieved by the utility model more clear, the technical scheme of the utility model is further described below by a specific embodiment in combination with the attached drawings.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, features defining "first", "second" may include one or more such features, either explicitly or implicitly, for distinguishing between the descriptive features, and not sequentially, and not lightly. In the description of the present utility model, unless otherwise indicated, the meaning of "plurality" is two or more groups.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be the communication between two groups of elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

The specific structure of the plasma generating apparatus according to the embodiment of the present utility model will be described below with reference to fig. 1 to 6.

The utility model discloses a plasma generating device, as shown in fig. 1, which comprises a shielding cover 100, a discharge part 200, a first air injection part 300 and a second air injection part 400, wherein an outlet 110 is formed at one end of the shielding cover 100, the shielding cover 100 is of an equal-width structure, the discharge part 200 is positioned in the shielding cover 100, the first air injection part 300 is positioned above the discharge part 200, and the second air injection part 400 is arranged on the shielding cover 100 and is arranged close to the outlet 110 of the shielding cover 100. It will be appreciated that, during actual operation, the first gas injector 300 can inject the first gas (gas that does not generate solid deposits after ionization, such as argon, hydrogen, nitrogen, ammonia, etc.) into the shield can 100, the first gas ionizes and generates plasma under the action of electromagnetic waves emitted from the discharge element 200, and when the plasma flows to the position of the outlet 110 of the shield can 100, the first gas can mix with the second gas (such as silane) injected from the second gas injector 400, and the ionized substrate material near the outlet 110 of the shield can 100 reacts to form a film of solid deposits, or the plasma is directly used to perform processes of cleaning, etching, graft modification of the material surface, etc. on the substrate material. Because the shield 100 is of an equal width structure, the plasma flows relatively uniformly when reaching the position close to the outlet 110 of the shield 100, so that the plasma can be in uniform contact with the second gas, the second gas is uniformly ionized, and the process uniformity of the substrate material is improved.

In some embodiments, as shown in fig. 1-6, the first gas injection member 300 is a multi-layered tube structure, each of which has a gas hole 310 formed therein, and the innermost tube structure is connected to a gas source. It can be understood that, in the actual working process, the innermost tube structure is firstly filled with the first gas rapidly through the air holes 310 arranged on the tube wall, the first gas in the gap between the inner tube structure and the outer tube structure is rapidly filled through diffusion under the action of the internal air pressure difference, and then is sprayed into the shielding cover 100 through the air holes 310 of the outer tube structure, so that the first gas is sprayed into the shielding cover 100 relatively uniformly, and the plasma generated by the first gas under the action of the discharge element 200 is relatively uniform.

Alternatively, the air holes 310 are spaced apart along the length of the tube structure. Therefore, the first gas in the gap between the inner pipe structure and the outer pipe structure is uniformly distributed by diffusion under the action of the internal air pressure difference, so that the uniformity of the first gas ejected by the first air ejection member 300 in the shielding cover 100 is improved.

Optionally, the air holes 310 are spaced circumferentially of the tube structure. Therefore, the first gas in the gap between the inner pipe structure and the outer pipe structure is uniformly distributed by diffusion under the action of the internal air pressure difference, so that the uniformity of the first gas ejected by the first air ejection member 300 in the shielding cover 100 is improved.

In some embodiments, the plurality of discharge elements 200 are plural, the plurality of discharge elements 200 are spaced apart along the height direction of the shield can 100 and/or the plurality of discharge elements 200 are spaced apart along the width direction of the shield can 100. It can be appreciated that the number of the discharge elements 200 is plural, and in the actual working process, the discharge elements 200 can be arranged according to actual needs, so that the plasma in the shielding cover 100 is more uniformly distributed in the shielding cover 100, thereby being beneficial to improving the product yield.

It should be noted that, in some embodiments, as shown in fig. 1 and fig. 3 to fig. 4, the plurality of first air jets 300 are spaced apart along the height direction of the shielding case 100; in some embodiments, as shown in fig. 2 and 5, the plurality of first air jets 300 are spaced apart along the width of the shield 100, and in some embodiments, as shown in fig. 6, the plurality of first air jets 300 are spaced apart along both the height and width of the shield 100. The specific distribution of the first jet 300 may be selected according to actual needs.

In some embodiments, the first jet 300 is located in the middle of the shield 100 along the width direction of the shield 100; wherein: the discharge member 200 is positioned directly under the first gas injection member 300, or a plurality of discharge members 200 are symmetrically disposed with respect to the first gas injection member 300. It can be appreciated that the discharge member 200 is located directly below the first gas injection member 300, and the plurality of discharge members 200 are symmetrically disposed about the first gas injection member 300, so that the uniformity of the plasma in the shielding cover 100 can be better ensured, and the phenomenon that the plasma cannot be uniformly mixed with the second gas due to uneven plasma distribution in the shielding cover 100 is avoided.

In some embodiments, as shown in fig. 1-6, the second air ejection member 400 includes an air ejection cover 410 and an air ejection member body 420, the air ejection cover 410 is connected to the shielding cover 100, and an opening 411 is disposed on a side of the air ejection cover 410 facing the shielding cover 100, and the air ejection member body 420 is installed inside the air ejection cover 410. It can be appreciated that the second gas sprayed from the gas spraying member body 420 can be sprayed to the outlet 110 of the shielding cover 100 through the opening 411 by the gas spraying cover 410, so that the mixing of the plasma and the second gas is realized, the second gas spraying member 400 is prevented from spraying the gas in other directions, and the utilization rate of the second gas is improved.

In some specific embodiments, as shown in fig. 1, the open end of the shield 100 extends into the opening 411 to block a portion of the opening 411. It can be appreciated that the opening end of the shielding case 100 extends into the opening 411 to shield part of the opening 411, so that the size of the opening 411 can be reduced, so that the second gas has a higher speed and pressure after being ejected from the opening 411, which is beneficial to improving the uniformity of mixing of the second gas and the plasma.

Alternatively, as shown in fig. 3, the gas-jet cover 410 has an extension 412 that makes an angle with the width direction of the shield cover 100, and the extension 412 can intersect with an extension line of the side wall of the shield cover 100. It will be appreciated that the extension 412 may provide a certain barrier to the plasma, so that the second gas ejected from the opening 411 may be fully mixed with the plasma, which is beneficial to improving the utilization rate of the second gas.

In some embodiments, as shown in fig. 4, the gas-spraying cover 410 is an arc-shaped cover, and the extending direction of the opening 411 is disposed at an angle to the height direction of the shielding cover 100. It can be understood that in the actual working process, the jet direction of the second gas and the flowing direction of the plasma form a certain included angle, so that the second gas and the plasma collide, further ionization of the second gas under the action of the plasma is facilitated, and the product yield is improved.

In some embodiments, the second air injecting members 400 are two sets, and the two sets of second air injecting members 400 are respectively connected to two sides of the shielding case 100. It can be appreciated that, compared to the single-side arrangement of the second air injection member 400, the double-side arrangement of the second air injection member 400 is beneficial to improving the uniformity of the mixing of the second gas and the plasma, thereby being beneficial to improving the yield of the product.

In some embodiments, the discharge 200 includes a dielectric tube 210 and an inductor 220 disposed within the dielectric tube 210. It can be appreciated that the added dielectric tube 210 can protect the inductor 220 on the one hand, and prevent the inductor 220 from being adversely affected by the gas in the shielding can 100, such as parasitic deposition, so that the dielectric tube 210 loses the effect of penetrating the high-frequency electromagnetic field, and thus the normal stable discharge cannot be achieved. On the other hand, the dielectric tube 210 can also change its material and its thickness in the linear direction to match the variation of the discharge intensity through the dielectric material, so as to maintain the uniformity of the plasma in the linear direction.

It should be noted that, a quartz glass tube with high temperature resistance, corrosion resistance or plasma etching resistance and good strength is selected as the medium tube 210. In order to cool the inductance coil 220 conveniently, copper tubes can be selected as the inductance coil 220, and circulating cooling water is introduced into the inner wall for cooling protection, so that the temperature of the inductance coil 220 is prevented from being too high.

In some embodiments, as shown in fig. 6, a flow-homogenizing plate 500 is further disposed in the shielding can 100, and the flow-homogenizing plate 500 is located between the first air injection member 300 and the discharge member 200. It can be appreciated that, in the actual working process, the gas sprayed from the first gas spraying member 300 can be more uniformly sprayed to the discharge member 200 on the uniform flow plate 500, so that the plasma generated by the gas under the action of the discharge member 200 is more uniform.

The specific structure of the plasma generating apparatus according to six embodiments of the present utility model will be described below with reference to fig. 1 to 6.

Embodiment one:

as shown in fig. 1, the plasma generating apparatus includes a shielding case 100, a discharge member 200, a first gas injection member 300 and a second gas injection member 400, wherein an outlet 110 is formed at one end of the shielding case 100, the shielding case 100 has an equal-width structure, the first gas injection member 300 has a double-layer tube structure, an inner-layer tube is provided with gas holes 310 arranged at intervals along the length and width directions thereof, and an outer-layer tube is provided with gas holes 310 arranged at intervals along the length direction thereof and injecting downward. The first air injection member 300 is located at a middle position of the shielding case 100 along a width direction of the shielding case 100, and two discharge members 200 are spaced apart from each other along a height direction of the shielding case 100 and located right under the first air injection member 300. The second air injecting members 400 are two groups, the two groups of second air injecting members 400 are respectively arranged at two sides of the air injecting cover 410, each group of second air injecting members 400 comprises an air injecting cover 410 and an air injecting member body 420, the air injecting cover 410 is connected with the shielding cover 100, an opening 411 is arranged at one side of the air injecting cover 410 facing the shielding cover 100, and the open end of the shielding cover 100 stretches into the opening 411 to shield part of the opening 411. The discharge member 200 includes a dielectric tube 210 and an inductance coil 220 provided in the dielectric tube 210. The inductance coil 220 is a copper tube through which a coolant flows, and the dielectric tube 210 is a quartz tube.

Embodiment two:

as shown in fig. 2, the plasma generating apparatus of the present embodiment is substantially the same as that of the first embodiment except that the number of discharge members 200 is two, and the two discharge members 200 are spaced apart in the width direction of the shield can 100 and symmetrically distributed about the first gas spraying member 300.

Embodiment III:

as shown in fig. 3, the plasma generating apparatus of the present embodiment is substantially the same as that of the first embodiment except that the gas ejection cover 410 has an extension 412 forming an angle with the width direction of the shield cover 100, and the extension 412 can intersect with an extension line of a side wall of the shield cover 100.

Embodiment four:

as shown in fig. 4, the plasma generating apparatus of the present embodiment is substantially the same as that of the first embodiment, except that the gas spraying cover 410 is an arc-shaped cover, and the extending direction of the opening 411 is disposed at an angle with respect to the height direction of the shielding cover 100.

Fifth embodiment:

as shown in fig. 5, the plasma generating apparatus of the present embodiment is substantially the same as that of the first embodiment, the number of the discharge members 200 is two, the two discharge members 200 are spaced apart along the width direction of the shielding case 100 and symmetrically distributed about the first air injection member 300, and a uniform flow plate 500 is disposed between the first air injection member 300 and the discharge member 200.

Example six:

as shown in fig. 6, the plasma generating apparatus of the present embodiment is substantially the same as that of the first embodiment, the number of the discharge elements 200 is four, the four discharge elements 200 are divided into two groups, the two groups of discharge elements 200 are arranged at intervals along the width direction of the shielding case 100, the two discharge elements 200 in each group of discharge elements 200 are distributed at intervals along the width direction of the shielding case 100 and symmetrically distributed about the first air injection element 300, and a uniform flow plate 500 is provided between the first air injection element 300 and the discharge elements 200.

In the description of the present specification, reference to the term "some embodiments," "other embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The foregoing is merely exemplary of the present utility model, and those skilled in the art should not be considered as limiting the utility model, since modifications may be made in the specific embodiments and application scope of the utility model in light of the teachings of the present utility model.

Claims

1. A plasma generating apparatus, comprising:

a shielding cover (100), wherein an outlet (110) is formed on one surface of the shielding cover (100), and the shielding cover (100) has an equal-width structure;

-a discharge member (200), said discharge member (200) being located within said shield (100);

-a first jet (300), said first jet (300) being located above said discharge (200);

and a second air jet (400), wherein the second air jet (400) is arranged on the shielding cover (100) and is arranged close to the outlet (110) of the shielding cover (100).

2. The plasma generator of claim 1, wherein the first gas injection member (300) is a multi-layered tube structure, each of the multi-layered tube structure being provided with a gas hole (310), and an innermost tube structure being connected to a gas source.

3. The plasma generator according to claim 1, wherein the number of the discharge members (200) is plural, the plurality of the discharge members (200) are spaced apart in a height direction of the shield (100) and/or the plurality of the discharge members (200) are spaced apart in a width direction of the shield (100).

4. A plasma generator according to claim 3, wherein the first gas jet member (300) is located in the middle of the shield case (100) in the width direction of the shield case (100); wherein:

the discharge member (200) is positioned directly under the first air injection member (300), or a plurality of discharge members (200) are symmetrically disposed with respect to the first air injection member (300).

5. The plasma generating device according to claim 1, wherein the second gas injection member (400) comprises a gas injection cover (410) and a gas injection member body (420), the gas injection cover (410) is connected with the shielding cover (100), an opening (411) is arranged at one side of the gas injection cover (410) facing the shielding cover (100), and the gas injection member body (420) is installed inside the gas injection cover (410).

6. The plasma generator according to claim 5, wherein the open end of the shield can (100) protrudes into the opening (411) to shield a part of the opening (411), and the gas ejection cover (410) has an extension (412) forming an angle with the width direction of the shield can (100), the extension (412) being capable of intersecting with an extension line of a side wall of the shield can (100).

7. The plasma generator according to claim 5, wherein the gas-injection cap (410) is an arc-shaped cap, and the extending direction of the opening (411) is disposed at an angle to the height direction of the shield cap (100).

8. The plasma generator of claim 1, wherein the second gas injecting members (400) are arranged in two groups, and the two groups of second gas injecting members (400) are respectively connected to two sides of the shielding case (100).

9. The plasma-generating device according to claim 1, characterized in that the discharge member (200) comprises a dielectric tube (210) and an inductor (220) arranged inside the dielectric tube (210).

10. The plasma generator of claim 1, wherein a flow-homogenizing plate (500) is further provided in the shield (100), the flow-homogenizing plate (500) being located between the first gas-injecting member (300) and the discharge member (200).