WO2022025233A1 - Pump, and fluid control device - Google Patents

Abstract

This pump is provided with an actuator element having a first main surface and a second main surface that oppose one another, and an interior space which faces at least one main surface among the first main surface and the second main surface of the actuator element, wherein: the actuator element vibrates in a direction perpendicular to the first main surface and the second main surface; and the interior space includes an expanded portion in which the cross-sectional area in a direction perpendicular to the first main surface and the second main surface is expanded.

Description

Pump and fluid control device

The present disclosure relates to pumps and fluid control devices.
The present application claims priority based on Japanese Patent Application No. 2020-130734 filed in Japan on July 31, 2020, the contents of which are incorporated herein by reference.

As a small pump for transporting a fluid such as gas or liquid, a pump having a housing having a fluid inlet and a fluid discharge port and an actuator element arranged inside the housing is known. Further, a fluid control device that combines this small pump and a container capable of temporarily storing the fluid sent from the small pump is known. This fluid control device is used, for example, as a sphygmomanometer (Patent Document 1).

In the above small pump, the fluid introduced into the housing from the fluid inlet due to the vibration (bending motion) of the actuator element flows along the surface of the actuator element and is discharged to the outside from the fluid discharge port. In the actuator element used in the above-mentioned small pump, those having a resonance frequency of the human audible band or higher (20 kHz or higher) are widely used in consideration of the generation of sound during use.

International Publication No. 2016/063710

It is desired that the small pump using the actuator element be further miniaturized. Therefore, further miniaturization of the actuator element and the housing of the pump is being studied. However, according to the study of the inventor of the present disclosure, it has been found that when the actuator element or the housing is made smaller, the displacement of the actuator element becomes smaller and the characteristics such as the suction capacity of the pump may be deteriorated.

The technique according to the present disclosure is made in consideration of such circumstances, and an object of the present invention is to provide a pump and a fluid control device having a configuration in which the suction capacity does not easily decrease even if the size is reduced.

In one aspect of the present disclosure, the pump comprises an actuator element having a first and second main surfaces facing each other, and at least one of the first and second main surfaces of the actuator element. The actuator element vibrates in a direction perpendicular to the first main surface and the second main surface, and the internal space comprises the first main surface and the second main surface. Includes an extension with an expanded cross section in the direction perpendicular to the main surface.

According to the technique according to the present disclosure, it is possible to provide a pump and a fluid control device having a configuration in which the suction capacity does not easily decrease even if the size is reduced.

FIG. 1 is a perspective view of the fluid control device according to the first embodiment. FIG. 2 is a sectional view taken along line II-II of FIG. FIG. 3 is a sectional view taken along line III-III of FIG. FIG. 4 is a sectional view taken along line IV-IV of FIG. FIG. 5 is a sectional view taken along line VV of FIG. FIG. 6 is a schematic cross-sectional view illustrating an operating state of the actuator element shown in FIG. FIG. 7A is a graph showing the frequency response characteristics of the generated air pressure of the pump when the size of the expansion portion is changed in the fluid control device of the first embodiment, and FIG. 7B is a graph showing FIG. 7A. It is a graph which expanded the range of the frequency in 22kHz to 26kHz. FIG. 8 is a diagram showing a manufacturing process of the fluid control device according to the first embodiment. FIG. 9 is a diagram showing a manufacturing process of the fluid control device according to the first embodiment. FIG. 10 is a cross-sectional view showing a first modification of the fluid control device according to the first embodiment. FIG. 11 is a sectional view taken along line XI-XI of FIG. FIG. 12 is a cross-sectional view showing a second modification of the fluid control device according to the first embodiment. FIG. 13 is a cross-sectional view showing a third modification of the fluid control device according to the first embodiment. FIG. 14 is a sectional view taken along line XIV-XIV of FIG. FIG. 15 is a cross-sectional view showing a fourth modification of the fluid control device according to the first embodiment. FIG. 16 is a cross-sectional view showing a fifth modification of the fluid control device according to the first embodiment. FIG. 17 is a sectional view taken along line XVII-XVII of FIG. FIG. 18 is a diagram showing a manufacturing process of the fluid control device according to the fifth modification. FIG. 19 is a diagram showing a manufacturing process of the fluid control device according to the fifth modification. FIG. 20 is a diagram showing a manufacturing process of the fluid control device according to the fifth modification. FIG. 21 is a perspective view of the pump according to the second embodiment. FIG. 22 is a cross-sectional view taken along the line XXII-XXII of FIG. FIG. 23 is a perspective view of a support member of the actuator element used in the pump according to the second embodiment. FIG. 24 is a cross-sectional view showing a first modification of the pump according to the second embodiment. FIG. 25 is a cross-sectional view showing a second modification of the pump according to the second embodiment. FIG. 26 is a cross-sectional view showing a third modification of the pump according to the second embodiment. FIG. 27 is a cross-sectional view of the fluid control device according to the third embodiment. 28 (A) is a sectional view taken along line AA of FIG. 27, (B) is a sectional view taken along line BB of FIG. 27, and (C) is a sectional view taken along line CC of FIG. 27. be.

Hereinafter, embodiments of the technology according to the present disclosure will be described with reference to the drawings. In each of the following embodiments, components that are the same or equal to each other may be designated by the same reference numerals in the drawings to omit or simplify duplicate explanations. Further, in the drawings used in the following description, the featured portion may be enlarged for convenience in order to make the feature easy to understand, and the dimensional ratio of each component may not be the same as the actual one. Further, the materials, dimensions, etc. exemplified in the following description are examples, and the present disclosure is not limited thereto, and can be appropriately modified and carried out within the range in which the effects of the present disclosure are exhibited. .. The configuration shown in one embodiment can also be applied to other embodiments.

[First Embodiment]
FIG. 1 is a perspective view of the fluid control device according to the first embodiment. FIG. 2 is a sectional view taken along line II-II of FIG. 3 is a sectional view taken along line III-III of FIG. 2, FIG. 4 is a sectional view taken along line IV-IV of FIG. 2, and FIG. 5 is a sectional view taken along line VV of FIG. FIG. 6 is a schematic cross-sectional view illustrating an operating state of the actuator element shown in FIG.

As shown in FIGS. 1 to 5, the fluid control device 101a according to the first embodiment includes a pump 11a and a container 70 for temporarily storing the fluid sent from the pump 11a. The pump 11a includes a housing 20, an actuator element 30, a flow path plate 40 (first plate), and a support member 50 that supports the actuator element 30.

The housing 20 has a first opening portion 21 and a second opening portion 22. The first opening portion 21 is connected to the outside, and the second opening portion 22 is connected to the container 70. When the fluid is stored in the container 70, the first opening portion 21 serves as a fluid introduction port, and the second opening portion 22 serves as a fluid discharge port. When the fluid stored in the container 70 is discharged to the outside, the first opening portion 21 serves as a fluid discharge port, and the second opening portion 22 serves as a fluid introduction port. The housing 20 has a first member 23 which is a bottomed square cylinder having a second opening portion 22, a second member 24 which is a square cylinder, and a bottomed square cylinder having a first opening portion 21. It is composed of a third member 25 which is a state body. The third member 25 is arranged in an annular shape around the first opening portion 21 and has a protrusion 26 protruding inward. In the present embodiment, the protrusion 26 is integrally formed with the third member 25 as a configuration included in the third member 25, but the protrusion 26 is formed of a member different from the third member 25. It doesn't matter if it is done.

A flow path plate 40 is arranged between the first member 23 and the second member 24 of the housing 20. As a result, the flow path plate 40 is fixed to the housing 20. Further, a support member 50 is arranged between the second member 24 and the third member 25. That is, the support member 50 is sandwiched between the second member 24 and the third member 25. As a result, the support member 50 is fixed to the housing 20. However, the method of fixing the flow path plate 40 and the support member 50 to the housing 20 is not limited to this. For example, the flow path plate 40 may be fixed to the inner wall of the housing 20 with an adhesive.

The housing 20 has a square outer cross section and an inner cross section, respectively. However, the shape of the housing 20 is not limited to this. The housing 20 may have, for example, a square outer cross section and a circular inner cross section, a circular outer cross section and a circular inner cross section, or a circular outer cross section and a square inner cross section. May be. As the material of the housing 20, for example, an insulating material such as resin or ceramics can be used.

The actuator element 30 has a first main surface 32a and a second main surface 32b facing each other. The actuator element 30 preferably vibrates (bends) at a predetermined frequency in a direction perpendicular to the first main surface 32a and the second main surface 32b. The actuator element 30 preferably has a resonance frequency (natural frequency). The resonance frequency (natural frequency) of the actuator element 30 is preferably 20 kHz or higher, for example.

The actuator element 30 has a through hole 31. The through hole 31 communicates with the first opening portion 21 of the housing 20. The actuator element 30 has a disk shape, and the through hole 31 is arranged in the center of the disk-shaped actuator element 30. However, the shape of the actuator element 30 is not limited to this. The actuator element 30 may have a square plate shape, for example. However, the shape of the actuator element 30 is preferably a disk shape from the viewpoint of suppressing the appearance of unnecessary resonance frequencies.

The actuator element 30 may be configured to include an elastic substrate (board) 35 and a vibration element 36 arranged on the surface (lower surface) of the elastic substrate 35. The elastic substrate 35 is preferably made of a material that can be flexed by the vibration of the vibrating element 36 and does not easily attenuate the vibration energy of the vibrating element 36. Examples of the material of the elastic substrate 35 include silicon and iron. Phosphor bronze, resin, etc. can be used. As an example of the resin, a polyimide resin can be mentioned. The vibrating element 36 includes a plate-shaped piezoelectric body 37, a first electrode 38a arranged on the surface of the plate-shaped piezoelectric body 37 on the elastic substrate 35 side, and a second electrode 38a arranged on the surface opposite to the elastic substrate 35 side. It is a piezoelectric vibrator including an electrode 38b. As the piezoelectric vibrator, for example, as the material of the plate-shaped piezoelectric body 37, a PZT-based piezoelectric vibrator using lead zirconate titanate-based ceramics can be used. As the material of the first electrode 38a and the second electrode 38b, for example, platinum can be used. The piezoelectric vibrator may be a bulk type or a thin film type. Two or more vibrating elements 36 may be laminated on the surface of the elastic substrate 35. The vibrating element 36 may be arranged on both upper and lower surfaces of the elastic substrate 35. Further, an electrostraining oscillator may be used instead of the piezoelectric oscillator. Further, the actuator element 30 does not have to include the elastic substrate 35, and may be, for example, a piezoelectric vibrator laminated body in which two piezoelectric vibrators having their polarization directions opposite to each other are laminated.

In the actuator element 30, the first main surface 32a (the surface on the vibration element 36 side) is connected to the protrusion 26 of the housing 20 via the support member 50, and the through hole 31 is the first opening portion 21 of the housing 20. It is arranged so that it can vibrate at a position where it communicates with. The actuator element 30 and the support member 50 are connected around the through hole 31 of the actuator element 30, and a gap 39 between the actuator element 30 and the support member 50 is formed at the peripheral edge of the actuator element 30. In the present embodiment, the actuator element 30 and the protrusion 26 are connected at a position where the node (node) portion N generated when the actuator element 30 vibrates is slightly outside the protrusion 26 (FIG. 6). That is, the protrusion 26 and the actuator element 30 are connected at a position closer to the center of the actuator element 30 than the node portion N generated when the actuator element 30 vibrates. In FIG. 6, the support member 50 is omitted. Hereinafter, in the present embodiment, the surface of the actuator element 30 on the side of the first opening 21 of the housing 20 may be referred to as a first main surface 32a, and the surface on the opposite side thereof may be referred to as a second main surface 32b. In the present embodiment, the first main surface 32a of the actuator element 30 is the surface on the vibration element 36 side, and the second main surface 32b is the surface on the elastic substrate 35 side, but the present invention is limited to this. It's not a thing. The surface on the elastic substrate 35 side may be the first main surface 32a, and the surface on the vibrating element 36 side may be the second main surface 32b.

The flow path plate 40 is arranged at a position facing the second main surface 32b of the actuator element 30 via the internal space 1. The internal space 1 is a space facing the second main surface 32b of the actuator element 30, and extends from the center to the outside along the second main surface 32b of the actuator element 30, and the first opening portion 21 And through the through hole 31, it becomes a flow path of the fluid introduced into the inside of the housing 20. That is, the internal space 1 is a flow path through which the fluid flows due to the vibration of the actuator element 30. The flow path plate 40 has a recess 42 (recess) on the surface 41 on the actuator element 30 side. The recessed portion 42 is formed in an annular shape (doughnut shape) centered on the through hole 31 of the actuator element 30. Due to the recessed portion 42, the internal space 1 is located in a region inside the outer peripheral end portion of the actuator element 30 in a direction perpendicular to the second main surface 32b of the actuator element 30 and at the outer peripheral end portion of the actuator element 30. The expansion portion 2 whose cross-sectional area is expanded in the direction along the above is formed. The fluid introduced inside the housing 20 flows in a direction across the expansion portion 2. That is, the expansion portion 2 sets the opening height h2 of the expansion portion (distance between the second main surface 32b of the actuator element 30 and the recessed portion 42 of the flow path plate 40) to the opening height h1 of the internal space 1 (actuator element). By making it higher than the distance between the second main surface 32b of 30 and the flow path plate 40), the cross-sectional area is expanded in the direction perpendicular to the direction in which the fluid flows. The recessed portion 42 may be a curved surface having an arcuate cross section. In this case, the flow of the fluid to the expansion portion 2 becomes smoother. It is preferable that the inner radius of the recessed portion 42 is larger than the radius of the through hole 31 and the outer radius of the recessed portion 42 is equal to or less than the radius of the protrusion 26. In the present embodiment, the outer radius of the recess 42 coincides with the radius of the protrusion 26. That is, the outer edge of the recess 42 faces the protrusion 26.

The flow path plate 40 has a through hole 43 in an outer region that does not face the actuator element 30. The through hole 43 is a flow path through which the fluid flows. A plurality of through holes 43 may be arranged concentrically with the actuator element 30 at equal intervals. As the material of the flow path plate 40, for example, a resin, a metal, a metalloid, or the like can be used.

The support member 50 supports the actuator element in a vibrable manner. The support member 50 includes a first wiring 51a and a second wiring 51b. The first wiring 51a and the second wiring 51b extend in opposite directions to each other. The length of the support member 50 in the width direction (direction perpendicular to the direction in which the first wiring 51a and the second wiring 51b extend) is the same as the length of the housing 20, and the second actuator element 30 has a second length. The entire main surface 32b is fixed to the support member 50. The support member 50 may be formed of a flexible resin sheet so as not to interfere with the vibration (bending motion) of the actuator element 30. Further, the flexible resin sheet may have an insulating property. As the flexible resin sheet having an insulating property, for example, a polyimide sheet can be used.

The first wiring 51a connects the first electrode 38a of the vibrating element 36 and the power supply (not shown) via the first through hole 52a penetrating the support member 50, the second electrode 38b, and the plate-shaped piezoelectric body 37. .. The periphery of the first through hole 52a of the second electrode 38b is cut so that the first wiring 51a and the second electrode 38b do not come into contact with each other. The second wiring 51b connects the second electrode 38b of the vibrating element 36 and the power supply (not shown) via the second through hole 52b penetrating the support member 50.

The pump 11a having the above configuration transports the fluid as follows.
A voltage having an operating frequency is applied to the first electrode 38a and the second electrode 38b of the vibrating element 36 via the first wiring 51a and the second wiring 51b. As a result, the vibrating element 36 vibrates. When the vibrating element 36 vibrates, the actuator element 30 including the elastic substrate 35 vibrates (flexing motion). When the actuator element 30 vibrates, the fluid flows from the first opening portion 21 through the through hole 31 of the actuator element 30 and is introduced into the inside of the housing 20. The fluid flows in the internal space 1 between the actuator element 30 and the flow path plate 40 along the second main surface 32b of the actuator element 30. The fluid that has passed through the expansion portion 2 of the internal space 1 then flows through the through hole 43 of the flow path plate 40 and is supplied to the container 70 via the second opening portion 22. This fluid flow causes the fluid that crosses the extension 2 of the interior space 1 to resonate with Helmholtz. By matching the frequency of the Helmholtz resonance with the vibrating element 36 and the operating frequency, the suction capacity of the pump 11a is improved.

FIG. 7A is a graph showing the frequency response characteristic of the generated air pressure of the pump when the size of the expansion unit 2 is changed in the fluid control device 101a of the first embodiment. In FIG. 7A, the horizontal axis represents frequency (Frequency (kHz)), and the vertical axis represents the air suction pressure (Air pressure (kPa)) of the pump. The suction pressure is a value calculated by simulation.
In the simulation, the actuator element 30 has a disk shape (diameter: 6 mm). The resonance frequency (natural frequency) of the actuator element 30 was set to 21 kHz. The opening height h1 of the internal space 1 (distance between the second main surface 32b of the actuator element 30 and the flow path plate 40) is 58.5 μm, and the opening height h2 of the expansion portion 2 (second main surface of the actuator element 30). The distance between 32b and the recessed portion 42 of the flow path plate 40) is 225 μm (166.5 μm), 200 μm (141.5 μm), 175 μm (116.5 μm), 150 μm (91.5 μm), 125 μm (66.5 μm). , 100 μm (41.5 μm) and 58.5 μm (0 μm). The numerical value in parentheses is the difference (h2-h1) between the opening height h2 of the expansion portion 2 and the opening height h1 of the internal space 1.

From the graph of FIG. 7A, it can be seen that the frequency of Helmholtz resonance fluctuates by changing the opening height h2 of the expansion portion 2 (that is, the cross-sectional area in the direction perpendicular to the direction in which the fluid flows). From this result, even when the size of the pump 11a is reduced, the operating frequency of the actuator element and the specifications (applied voltage) of the power supply can be changed by changing the size of the expansion unit 2 and using the Helmholtz resonance. It can be seen that the suction capacity of the pump 11a can be increased without this. Here, the operating frequency of the actuator element 30 is preferably set between the resonance frequency (natural frequency) of the actuator element 30 and the resonance frequency of Helmholtz resonance. FIG. 7 (b) is a graph in which the frequency in FIG. 7 (a) is expanded in the range of 22 kHz to 26 kHz. As shown in FIG. 7B, for example, when the operating frequency of the actuator element 30 is set to the vicinity of 23 kHz, the air suction pressure of the pump changes by changing the size of the expansion unit 2.

Next, a method of manufacturing the fluid control device 101a of the first embodiment will be described.
8 to 9 are views showing a method of manufacturing the fluid control device 101a of the first embodiment.

First, as shown in FIG. 8A, a disk-shaped vibrating element 36 having a through hole 31 in the center is formed on the elastic substrate forming material 135. The vibrating element 36 can be formed, for example, as follows. First, the first electrode, the plate-shaped piezoelectric body, and the second electrode are laminated in this order on the elastic substrate forming material 135 to form a piezoelectric vibration film. The first electrode, the plate-shaped piezoelectric body, and the second electrode can be formed into a film by using, for example, a sputtering method. Next, the piezoelectric vibrating membrane is formed into a disk shape having a through hole in the center by using an etching process.

Next, as shown in FIG. 8B, the vicinity of the peripheral edge of the vibrating element 36 is covered with the positive resist film pattern 139. The positive resist film pattern 139 can be formed, for example, as follows. First, a positive resist is applied on the vibrating element 36 and the elastic substrate forming material 135 to form a positive resist film. Next, with the photomask placed near the peripheral edge of the vibrating element 36, the positive resist film is irradiated with ultraviolet rays to develop a positive resist film that covers the portion other than the peripheral edge of the vibrating element 36. It is easily soluble in liquid. Then, the positive resist film that has been altered to be easily soluble is dissolved with a developing solution.

Next, as shown in FIG. 8C, a support member forming film 150 is formed on the vibrating element 36 and the positive resist film pattern 139. As a film forming method for the support member forming film 150, for example, a spin coating method can be used.

Next, as shown in FIG. 8D, a wiring pattern is formed on the support member forming film 150. The wiring pattern forms a first wiring 51a connected to the first electrode of the vibrating element 36 and a second wiring 51b connected to the second electrode of the vibrating element 36. The first wiring 51a is connected to the first electrode of the vibrating element 36 via the first through hole 52a. The second wiring 51b is connected to the second electrode of the vibrating element 36 via the second through hole 52b.

Next, as shown in FIG. 9E, the support member forming film 150 is cut into the shape of the support member 50, and the positive resist film pattern 139 is removed. The positive resist film pattern can be removed, for example, by irradiating the positive resist film pattern with ultraviolet rays to easily change the positive resist film pattern into a developing solution and then dissolving the positive resist film pattern in the developing solution. .. By removing the positive resist film pattern 139, a gap 39 is formed between the peripheral edge of the vibrating element 36 and the support member forming film 150.

Next, as shown in FIG. 9F, the temporary substrate 162 is bonded to the surface of the support member 50 on the side opposite to the vibrating element 36 side via the adhesive 161 to obtain a bonded body 170. The material of the temporary substrate is not particularly limited, and a glass substrate or a metal substrate can be used.

Next, as shown in FIG. 9 (G), the joint body 170 is inverted so that the temporary substrate 162 is on the lower side, the elastic substrate forming material 135 is processed into the shape of the elastic substrate 35, and the support member 50 has a through hole. 31 is formed.

Then, as shown in FIG. 9 (H), the adhesive 161 of the bonded body 170 and the temporary substrate 162 are removed. In this way, the actuator element 30 with the support member 50 is obtained. The obtained actuator element 30 with the support member 50 and the flow path plate 40 are fixed by the housing 20 to form the pump 11a. Next, the fluid control device 101a is obtained by joining the container 70 to the second opening portion 22 of the pump 11a.

In the fluid control device 101a of the present embodiment configured as described above, in the actuator element 30 of the pump 11a, the first main surface 32a is connected to the protrusion 26 of the housing 20 via the support member 50, and the through hole is formed. 31 is arranged at a position facing the first opening portion 21 of the housing 20, and the flow path plate 40 is arranged at a position facing the second main surface 32b of the actuator element 30 via the internal space 1. .. Further, the flow path plate 40 is provided with a recess 42 on the surface 41 on the actuator element 30 side, and the internal space 1 is in a direction perpendicular to the second main surface 32b of the actuator element 30, that is, a fluid flows. Includes an expansion portion 2 whose cross-sectional area is expanded in a direction perpendicular to the direction. The pump 11a having such a configuration can lower the Helmholtz resonance frequency in the audible band or higher (20 kHz or higher) even when the size of the housing 20 or the actuator element 30 of the pump 11a is reduced. Therefore, even when the size of the pump 11a is reduced, the suction capacity of the pump 11a can be increased by using the Helmholtz resonance without changing the operating frequency of the actuator element or the specifications of the power supply.

In the fluid control device 101a, the recess forming the expansion portion 2 of the internal space 1 is formed by the recess portion 42 provided in the flow path plate 40. However, the position of the recess is not limited to this. The recess may be provided on the second main surface 32b of the actuator element 30, or may be provided on both the flow path plate 40 and the second main surface 32b of the actuator element 30. Further, instead of the recessed portion 42, a protrusion may be provided in a region other than the region forming the expansion portion 2, so that the region forming the expansion portion 2 may be relatively recessed. The recess may be provided in a region corresponding to the expansion portion 2 from the outside of the through hole 31 of the actuator element 30 to the outer peripheral end portion of the actuator element 30, or the actuator element of the flow path plate 40 facing this range may be provided. It may be provided in the region of the surface 41 on the 30 side. By forming the recess at this position, Helmholtz resonance is more likely to occur at a low resonance frequency at 20 kHz or higher.

FIG. 10 is a cross-sectional view showing a first modification of the fluid control device according to the first embodiment, and is a cross-sectional view of the fluid control device cut in the same direction as in FIG. FIG. 11 is a sectional view taken along line XI-XI of FIG.
The fluid control device 101b shown in FIGS. 10 and 11 differs from the fluid control device 101a in that a recess 33 is provided on the second main surface 32b (the surface of the elastic substrate 35) of the actuator element 30. According to the fluid control device 101b, the same effect as that of the fluid control device 101a according to the first embodiment can be obtained.

FIG. 12 is a cross-sectional view showing a second modification of the fluid control device according to the first embodiment, and is a cross-sectional view of the fluid control device cut in the same direction as in FIG.
The fluid control device 101c shown in FIG. 12 differs from the fluid control device 101a in that a recess 42 is provided in the flow path plate 40 and a recess 33 is provided in the second main surface 32b of the actuator element 30. .. By providing the recessed portion in both the flow path plate 40 and the actuator element 30, the depth of the recessed portion provided in each of the flow path plate 40 and the actuator element 30 can be made shallow. Therefore, according to the fluid control device 101c, the same effect as that of the fluid control device 101a according to the first embodiment can be obtained.

FIG. 13 is a cross-sectional view showing a third modification of the fluid control device according to the first embodiment, and is a cross-sectional view of the fluid control device cut in the same direction as in FIG. FIG. 14 is a sectional view taken along line XIV-XIV of FIG.
The fluid control device 101d shown in FIGS. 13 and 14 is a fluid in that the first protrusion 34a and the second protrusion 34b are provided on the second main surface 32b (the surface of the elastic substrate 35) of the actuator element 30. It is different from the control device 101a. The first protrusion 34a is provided around the through hole 31 of the actuator element 30. The second protrusion 34b is provided around the outer peripheral end of the actuator element 30. The region of the second main surface 32b where the first protrusion 34a and the second protrusion 34b are not provided is relatively a recess. Therefore, according to the fluid control device 101d, the same effect as that of the fluid control device 101a according to the first embodiment can be obtained.

FIG. 15 is a cross-sectional view showing a fourth modification of the fluid control device according to the first embodiment, and is a cross-sectional view of the fluid control device cut in the same direction as in FIG.
In the fluid control device 101e shown in FIG. 15, the connection position between the protrusion 26 of the housing 20 and the actuator element 30 connected via the support member 50 is outside the node portion N when the actuator element 30 vibrates at a natural frequency. It is different from the fluid control device 101a in that the recessed portion 42 provided in the flow path plate 40 has a circular shape. When the protrusion 26 is located outside the node portion N, the vibration of the actuator element 30 is greater at the inner portion than at the position where it is connected to the protrusion 26 than at the outer portion. Therefore, in the fluid control device 101e, the recessed portion 42 of the flow path plate 40 is concave, including the portion facing the through hole 31 of the actuator element 30. Therefore, according to the fluid control device 101e, the same effect as that of the fluid control device 101a according to the first embodiment can be obtained. In the fluid control device 101e, the recessed portion 42 of the flow path plate 40 in the portion facing the through hole 31 of the actuator element 30 may be lower than the surface of the outer peripheral edge of the actuator element 30. It does not have to be flat with the rest of 42. In other words, the recessed portion 42 of the flow path plate 40 has an annular shape (doughnut shape) centered on the portion facing the through hole 31 of the actuator element 30, and is slightly deeper in the center than the outer portion of the annular shape. It may have a shallow shape.

When the connection position between the protrusion 26 of the housing 20 connected via the support member 50 and the actuator element 30 is the position inside the node portion N when the actuator element 30 vibrates at a natural frequency, the actuator element The vibration of 30 can be substantially the same in the portion inside and the portion outside the position where the protrusion 26 is connected. Therefore, in this case, the recessed portion 42 of the flow path plate 40 is an annular shape (doughnut shape) centered on the portion of the actuator element 30 facing the through hole 31, and has a central height and an outer peripheral edge of the actuator element. It can have the same shape as the height.

In this modification, the connection position between the protrusion 26 of the housing 20 connected via the support member 50 and the actuator element 30 is the position outside the node portion N when the actuator element 30 vibrates at a natural frequency. However, it may be the position of the node portion N.

FIG. 16 is a cross-sectional view showing a fifth modification of the fluid control device according to the first embodiment, and is a cross-sectional view of the fluid control device cut in the same direction as in FIG. FIG. 17 is a sectional view taken along line XVII-XVII of FIG.
In the fluid control device 101f shown in FIGS. 16 and 17, the flow path plate 40 has a flow path substrate 44 and a first convex portion 45a and a second convex portion arranged on the surface of the flow path substrate 44 on the actuator element 30 side. It differs from the fluid control device 101a in that it is composed of 45b. The expansion portion 2 is formed in the internal space 1 by the recessed portion 42 located between the first convex portion 45a and the second convex portion 45b. The first convex portion 45a is provided at a position where the first protrusion 34a faces the through hole 31 of the actuator element 30. The second convex portion 45b is provided at a position facing the peripheral edge portion of the actuator element 30.

The fluid control device 101f differs from the fluid control device 101a in that the surface of the actuator element 30 on the elastic substrate 35 side is the first main surface 32a and the surface on the vibration element 36 side is the second main surface 32b. do. The support member 50 is connected to the elastic substrate 35. The first wiring 51a is connected to the first electrode (not shown) of the vibrating element 36 via the support member 50, the elastic substrate 35, and the first through hole 52a formed in the vibrating element 36. The second wiring 51b is connected to the second electrode (not shown) of the vibrating element 36 via the support member 50 and the second through hole 52b formed in the elastic substrate 35.

The support member 50 is provided with a resin film 53 on the surface opposite to the vibration element 36 side. As the material of the resin film 53, for example, polyimide can be used. An annular vibration adjusting plate 54 is arranged around the through hole 31 of the resin film 53. As the material of the vibration adjusting plate 54, for example, a metal such as nickel can be used. The metallic vibration adjusting plate 54 can be formed by electroplating via the seed layer 55. The vibration adjusting plate 54 serves as a weight that applies a load to the actuator element 30, and adjusts the operating frequency of the actuator element 30.

In the fluid control device 101f, the second member 24 of the housing 20 is formed of a hard member 60 and an elastic member 61. As the material of the hard member 60, for example, silicon can be used. As the material of the elastic member 61, a resin material can be used. Further, a metal member 62 is arranged between the resin film 53 and the third member 25. As the material of the metal member 62, for example, a metal that can be formed by electroplating such as nickel can be used.

According to the fluid control device 101f, since the expansion portion 2 is formed in the internal space 1, the same effect as that of the fluid control device 101a according to the first embodiment can be obtained. Further, by using the vibration adjusting plate 54, the operating frequency of the actuator element 30 can be made lower than the resonance frequency peculiar to the actuator element 30. Generally, with the miniaturization of the actuator element 30, the resonance frequency peculiar to the actuator element 30 tends to be high, but the operating frequency is adjusted by using the vibration adjusting plate 54 regardless of the size of the actuator element 30. It becomes possible.

The fluid control device 101f of the fifth modification can be manufactured, for example, by using the manufacturing methods shown in FIGS. 18 to 20.
First, as shown in FIG. 18A, a disk-shaped vibrating element 36 having a through hole 31 in the center is formed on the hard substrate 160. The vibrating element 36 is, for example, a laminated body in which the first electrode, the plate-shaped piezoelectric body, and the second electrode are laminated in this order from the hard substrate 160 side. The method of forming the vibrating element 36 is the same as that of the fluid control device 101a according to the first embodiment.

Next, as shown in FIG. 18B, an elastic substrate 35 is formed on the surface of the vibrating element 36 opposite to the hard substrate 160 side, and is elastic on the surface of the hard substrate 160 at intervals around the vibrating element 36. The member 61 is formed. The elastic substrate 35 and the elastic member 61 can be formed, for example, as follows. First, an elastic film is formed on the vibrating element 36 and the hard substrate 160. Next, the elastic film around the vibrating element 36 is removed, and the elastic film is separated into the elastic substrate 35 and the elastic member 61.

Next, as shown in FIG. 18C, the vicinity of the peripheral edge of the vibrating element 36 is covered with the positive resist film pattern 139. The method for forming the positive resist film pattern 139 is the same as that for the fluid control device 101a according to the first embodiment.

Next, as shown in FIG. 18D, a support member forming film 150 is formed on the elastic substrate 35, the elastic member 61, and the positive resist film pattern 139, and a wiring pattern is formed on the support member forming film 150. do. The method for forming the support member forming film 150 is the same as that for the fluid control device 101a according to the first embodiment. The wiring pattern forms a first wiring 51a connected to the first electrode of the vibrating element 36 and a second wiring 51b connected to the second electrode of the vibrating element 36. The first wiring 51a is connected to the first electrode of the vibrating element 36 via the first through hole 52a. The second wiring 51b is connected to the second electrode of the vibrating element 36 via the second through hole 52b.

Next, as shown in FIG. 19E, a resin film 153 is formed on the support member forming film 150. As a film forming method for the resin film 153, for example, a spin coating method can be used. In this way, a laminated body 190 in which the vibrating element 36, the support member forming film 150, and the resin film 153 are laminated in this order is obtained on the hard substrate 160.

Next, as shown in FIG. 19F, a seed layer 55 is formed on the resin film 153 of the laminated body 190, and a metal layer is formed on the seed layer 55 by electroplating. The seed layer 55 is formed around a position facing the through hole 31 of the vibrating element 36 and a region facing the elastic member 61. The metal layer formed around the position facing the through hole 31 of the vibrating element 36 is the vibration adjusting plate 54, and the metal layer formed in the region facing the elastic member 61 is the metal member 62.

Next, as shown in FIG. 19 (G), through holes are provided in the elastic substrate 35, the support member forming film 150, and the resin film 153 along the vibrating element 36 through hole 31, and the elastic member 61 of the hard substrate 160 is provided with through holes. The hard member 60 is formed by removing the portions other than the facing regions. As a result, the vibrating element 36 of the laminated body 190 and the positive resist film pattern 139 are exposed.

Next, as shown in FIG. 20 (H), the laminated body 190 is inverted so that the vibration adjusting plate 54 and the metal member 62 are on the lower side, and the positive resist film pattern 139 is removed. The method for removing the positive resist film pattern is the same as that for the fluid control device 101a according to the first embodiment.

Next, as shown in FIG. 20 (I), a flow path plate forming member 140 is prepared, and the flow path plate forming member 140 and the hard member 60 of the laminated body 190 are joined to form a joined body 192. The flow path plate forming member 140 is composed of a flow path substrate 44, a first convex portion 45a and a second convex portion 45b arranged on the surface of the flow path substrate 44. The flow path plate forming member 140 and the laminated body 190 are joined so that the first convex portion 45a of the flow path plate forming member 140 and the through hole 31 of the actuator element 30 of the laminated body 190 face each other.

Next, as shown in FIG. 20 (J), the joint body 192 is cut to obtain a structure 193 in which the actuator element 30 with the support member 50 and the flow path plate 40 are integrated. The pump 11a is formed by joining the flow path plate 40 of the obtained structure 193 and the first member 23, and joining the metal member 62 and the third member 25 of the structure 193. Next, the fluid control device 101a is obtained by joining the container 70 to the second opening portion 22 of the pump 11a.

In the pumps 11a to 11e of the fluid control devices 101a to 101e according to the first embodiment and its modification, the first main surface 32a of the actuator element 30 is connected to the protrusion 26 of the housing 20 via the support member 50. However, the configuration of the pump is not limited to this. For example, the actuator element 30 may be supported by a support member so as not to come into contact with the housing 20.

[Second Embodiment]
FIG. 21 is a perspective view of the pump according to the second embodiment. FIG. 22 is a sectional view taken along line XXII-XXII of FIG. FIG. 23 is a perspective view of an actuator element and a support member thereof used in the fluid control device according to the second embodiment.

As shown in FIGS. 21 to 23, the pump 12a according to the second embodiment includes a housing 20', an actuator element 30', and a support member 50'that supports the actuator element 30'.

The housing 20'has a first opening portion 21 and a second opening portion 22. The first opening portion 21 is a fluid introduction port, and the second opening portion 22 is a fluid discharge port. The housing 20'consists of a fourth member 27 which is a bottomed square cylinder having a second opening portion 22 and a fifth member 28 which is a bottomed square cylinder having a first opening portion 21. Has been done.

A support member 50'is arranged between the fourth member 27 and the fifth member 28 of the housing 20'. That is, the support member 50'is sandwiched between the fourth member 27 and the fifth member 28. As a result, the support member 50'is fixed to the housing 20. The method of fixing the support member 50'to the housing 20' is not limited to this.

The fourth member 27 can have the same configuration as the first member 23 of the fluid control device 101a of the first embodiment. The fifth member 28 can have the same configuration as the third member 25 of the fluid control device 101a of the first embodiment, except that the recessed portion 29 is provided around the first opening portion 21. .. The recessed portion 29 is formed in an annular shape (doughnut shape) centered on the first opening portion 21. The recessed portion 29 may be a curved surface having an arcuate cross section.

The actuator element 30'can have the same configuration as the actuator element 30 of the fluid control device 101a of the first embodiment except that it does not have a through hole 31.

The actuator element 30'is arranged via the internal space 1 at a position where the elastic substrate 35 faces the first opening portion 21 of the housing 20'. Hereinafter, in the present embodiment, the surface of the actuator element 30'on the side facing the first opening portion 21 of the housing 20 is referred to as a first main surface 32a, and the surface on the opposite side thereof is referred to as a second main surface 32b. There is. In the present embodiment, the first main surface 32a of the actuator element 30'is the surface on the elastic substrate 35 side, and the second main surface 32b is the surface on the vibration element 36 side, but the present invention is limited to this. It's not something. The surface on the vibrating element 36 side may be the first main surface 32a, and the surface on the elastic substrate 35 side may be the second main surface 32b.

The internal space 1 is a space facing the first main surface 32a of the actuator element 30', and extends from the center to the outside along the first main surface 32a of the actuator element 30', and is formed in the housing 20'. It becomes the flow path of the fluid introduced inside. That is, the internal space 1 is a flow path through which the fluid flows due to the vibration of the actuator element 30'. The recessed portion 29 provided in the fifth member 28 forms an expanded portion 2 in the internal space 1 in which the cross-sectional area in the direction perpendicular to the direction in which the fluid flows is expanded.

The support member 50'is in a strip shape whose length in the width direction (direction perpendicular to the direction in which the first wiring 51a and the second wiring 51b extend) is smaller than the diameter of the actuator element 30. Has the same configuration as the support member 50 of the fluid control device 101a of the first embodiment.

The pump 12a having the above configuration transports the fluid as follows.
A voltage is applied to the first electrode 38a and the second electrode 38b of the vibrating element 36 via the first wiring 51a and the second wiring 51b. As a result, the vibrating element 36 vibrates. When the vibrating element 36 vibrates, the actuator element 30'including the elastic substrate 35 vibrates. When the actuator element 30'vibrates, the fluid is introduced into the housing 20'from the first opening portion 21. The fluid flows in the internal space 1 between the actuator element 30'and the fifth member 28 along the first main surface 32a of the actuator element 30'. The fluid that has passed through the expansion portion 2 of the internal space 1 is then discharged from the second opening portion 22. This fluid flow causes the fluid that crosses the extension 2 of the interior space 1 to resonate with Helmholtz. By matching the frequency of this Helmholtz resonance with the vibrating element and the operating frequency, the suction capacity of the pump 12a is improved.

In the pump 12a of the present embodiment configured as described above, the actuator element 30'is arranged via the internal space 1 at a position where the first main surface 32a faces the first opening portion 21 of the housing 20'. ing. Further, a recess 29 is provided on the surface of the fifth member 28 of the housing 20'on the actuator element 30' side, and the internal space 1 has an expanded cross-sectional area in a direction perpendicular to the direction in which the fluid flows. Includes expansion unit 2. The pump 12a having such a configuration tends to generate Helmholtz resonance at a low frequency at 20 kHz or higher even when the size of the housing 20'or the actuator element 30' of the pump 12a is reduced. Therefore, even when the size of the pump 12a is reduced, the suction capacity of the pump 12a can be increased.

In the pump 12a, the recess forming the expansion portion 2 of the internal space 1 is formed by the recess 29 provided in the fifth member 28 of the housing 20'. However, the position of the recess is not limited to this. The recess may be provided on the first main surface 32a of the actuator element 30', or may be provided on both the fifth member 28 of the housing 20' and the first main surface 32a of the actuator element 30'. Further, instead of the recessed portion 29, a protrusion may be provided in a region other than the region forming the expanded portion 2, so that the region forming the expanded portion 2 becomes a relatively recessed portion. The recess may be provided in a region corresponding to the expansion portion 2 from the outside of the through hole 31 of the actuator element 30 to the outer peripheral end portion of the actuator element 30', or the actuator of the fifth member 28 facing this range may be provided. It may be provided in the area of the surface on the element 30 side. By forming the recess at this position, Helmholtz resonance is more likely to occur at a low resonance frequency at 20 kHz or higher. The inner radius of the recessed portion 29 is larger than the radius of the first opening portion 21, and the outer radius of the recessed portion 29 is preferably equal to or less than the radius of the node portion generated when the actuator element 30 vibrates at the natural frequency. .. In the present embodiment, the outer radius of the recessed portion 29 coincides with the radius of the node portion. That is, the outer edge of the recessed portion 29 faces the node portion generated when the actuator element 30 vibrates at the natural frequency.

FIG. 24 is a cross-sectional view showing a first modification of the pump according to the second embodiment, and is a cross-sectional view of the pump cut in the same direction as in FIG. 22.
The pump 12b shown in FIG. 24 differs from the pump 12a in that a recess 33 is provided on the first main surface 32a (the surface of the elastic substrate 35) of the actuator element 30'. According to the pump 12b, the same effect as that of the pump 12a according to the second embodiment can be obtained.

FIG. 25 is a cross-sectional view showing a second modification of the pump according to the second embodiment, and is a cross-sectional view of the pump cut in the same direction as in FIG. 22.
The pump 12c shown in FIG. 25 differs from the pump 12a in that a recess 29 is provided in the fifth member 28 of the housing 20'and a recess 33 is provided in the first main surface 32a of the actuator element 30. .. By providing the recessed portion in both the fifth member 28 of the housing 20'and the actuator element 30, the depth of the recessed portion provided in each of the fifth member 28 of the housing 20'and the actuator element 30'can be made shallow. .. Therefore, according to the pump 12c, it is possible to suppress a decrease in the strength of the fifth member 28 of the housing 20'and the actuator element 30' due to the provision of the recessed portion, as well as the same effect as that of the pump 12a according to the second embodiment. can.

FIG. 26 is a cross-sectional view showing another modification of the pump according to the first embodiment, and is a cross-sectional view of the pump cut in the same direction as in FIG. 22.
The pump 12d shown in FIG. 26 differs from the pump 12a in that the first protrusion 34a and the second protrusion 34b are provided on the first main surface 32a (the surface of the elastic substrate 35) of the actuator element 30'. .. The first protrusion 34a is provided around the through hole 31 of the actuator element 30'. The second protrusion 34b is provided around the outer peripheral end of the actuator element 30'. The region of the first main surface 32a where the first protrusion 34a and the second protrusion 34b are not provided is relatively a recess. Therefore, according to the pump 12d, the same effect as that of the pump 12a according to the second embodiment can be obtained.

[Third Embodiment]
FIG. 27 is a cross-sectional view of the fluid control device according to the third embodiment. 28A is a sectional view taken along line AA of FIG. 27, FIG. 28B is a sectional view taken along line BB of FIG. 27, and FIG. 28C is a sectional view taken along line CC of FIG. 27. be.

As shown in FIGS. 27 to 28, the fluid control device 103 according to the third embodiment connects the pump 12a, the container 70 for temporarily storing the fluid sent from the pump 12a, and the pump 12a and the container 70. The valve 80 is provided. The pump 12a of the fluid control device 103 has the same configuration as the pump 12a according to the second embodiment.

The valve 80 includes a tubular tube 81 that opens in the vertical direction, has a circular outer cross section, and has a quadrangular inner cross section, and a valve 83 and a ball 86 arranged inside the tubular tube 81. The tube 81 has an outlet 82 connected to the outside. The valve 83 has a first flow path hole 84 that opens in the vertical direction, and a second flow path hole 85 that has one end opened downward and the other end connects to the outlet 82. The ball 86 is located below the valve 83.

When the pump 12a is driven to store the fluid in the container 70, the ball 86 is pushed upward by the fluid sent from the pump 12a and moves upward to close the opening below the second flow path hole 85. .. As a result, the fluid is sent to the container 70 through the first flow path hole 84. On the other hand, when the pump 12a is stationary and the fluid stored in the container 70 is taken out to the outside, the ball 86 moves downward and closes the second opening portion 22 of the pump 12a. As a result, the fluid flows below the valve 83 through the first flow path hole 84, and the fluid flowing below the valve 83 passes through the second flow path hole 85 and goes out through the outlet 82. Taken out to.

Since the fluid control device 103 of the present embodiment configured as described above includes the valve 80 for connecting the pump 12a and the container 70, the fluid stored in the container 70 can be taken out to the outside through the valve 80. can.

In the above embodiment, the pumps 11a to 11d and 12a to 12d are spaces facing the first main surface 32a or the second main surface 32b of the actuator elements 30 and 30', and are the spaces of the actuator elements 30 and 30'. The internal space 1 has an internal space 1 through which a fluid flows along the first main surface 32a or the second main surface 32b, and the internal space 1 is a direction perpendicular to the second main surface 32b of the actuator element 30, that is, a direction in which the fluid flows. Includes an extension 2 with an expanded cross section in the direction perpendicular to. By adjusting the cross-sectional area of this extended portion, Helmholtz resonance is likely to occur at a low frequency at 20 kHz or higher even when the sizes of the housings 20 and 20'and the actuator elements 30 and 30' are reduced. .. Therefore, even when the sizes of the pumps 11a to 11d and 12a to 12d are reduced, the suction capacity of the pumps 11a to 11d and 12a to 12d can be increased. The pumps 11a to 11d and 12a to 12d of the present embodiment have high suction capacity even when the maximum diameter of the actuator elements 30 and 30'is in the range of 5 mm or more and 10 mm or less, for example.

[Configuration example]
A configuration example of the present disclosure will be described below.
(1) As a configuration example, the pump has an actuator element having a first main surface and a second main surface facing each other, and at least one of the first main surface and the second main surface of the actuator element. The actuator element has an internal space facing the surface, and the actuator element vibrates in a direction perpendicular to the first main surface and the second main surface.
The internal space includes an expansion portion having an expanded cross-sectional area in a direction perpendicular to the first main surface and the second main surface.

(2) As a configuration example, in the pump described in (1) above, the actuator element may include a substrate and a vibration element arranged on at least one surface of the substrate.

(3) As a configuration example, the pump according to the above (1) or (2) may further include a support member that oscillateably supports the actuator element.

(4) As an example of the configuration, in the pump according to any one of (1) to (3) above, the actuator element is formed on at least one of the first main surface and the second main surface of the actuator element. A vibration adjusting plate for adjusting the operating frequency of the above may be further provided.

(5) As an example of the configuration, in the pump according to any one of (1) to (4) above, a housing having at least one opening and a housing arranged around the opening are provided. The actuator element has a through hole penetrating between the first main surface and the second main surface, further comprising a protrusion protruding inward and a first plate. The first main surface is connected to the protrusion and the through hole is arranged at a position facing the opening of the housing, and the internal space is a space facing the second main surface of the actuator element. The first plate is arranged at a position facing the second main surface of the actuator element via the internal space, and the expansion portion is the second main surface of the actuator element and the first surface. It may be formed by recesses provided in at least one of the surfaces of the actuator element of one plate facing the second main surface.

(6) As an example of the configuration, in the pump described in (5) above, the protrusion of the actuator element is located closer to the center of the actuator element than the node portion generated when the actuator element vibrates. It may be connected to the first main surface.

(7) As an example of the configuration, in the pump according to (5) or (6) above, the outer edge of the recess may face the protrusion.

(8) As an example of the configuration, in the pump according to any one of (5) to (7) above, the recess may include a curved surface having an arcuate cross section.

(9) As an example of the configuration, the pump according to any one of (1) to (4) is further provided with a housing having at least one opening, and the first main surface of the actuator element is provided. The housing is arranged at a position facing the opening portion via the internal space, the internal space is a space facing the first main surface of the actuator element, and the expansion portion is the actuator. It may be formed by recesses provided in at least one of the first main surface of the element and the surface of the actuator element of the housing facing the first main surface.

(10) As an example of the configuration, in the pump described in (9) above, the outer edge of the recess may face the node portion generated when the actuator element vibrates.

(11) As an example of the configuration, in the pump according to (9) or (10) above, the recess may include a curved surface having an arcuate cross section.

(12) As a configuration example, the fluid control device may include the pump according to any one of (1) to (11) above and a container connected to the pump.

(13) As an example of the configuration, in the fluid control device described in (12) above, the pump and the container may be connected via a valve.

In the above embodiment, the pumps 11a to 11d and 12a to 12d are used as pumps for the fluid control devices 101a to 101d and 103 connected to the container 70. However, the uses of the pumps 11a to 11d and 12a to 12d are not limited to these. The pumps 11a to 11d and 12a to 12d can be used for various purposes, for example, as an air transport pump for supplying air to an air-based device such as a sphygmomanometer or an air jack. Further, the pump according to the present embodiment can also be used as a substitute for a blower such as a cooling fan.

1 Internal space 2 Expansion part 11a, 11b, 11c, 11d, 11e, 11f, 12a, 12b, 12c, 12d Pump 20, 20'Housing 21 First opening part 22 Second opening part 23 First member 24 Second Member 25 3rd member 26 Protrusion 27 4th member 28 5th member 29 Recess 30, 30'Actuator element 31 Through hole 32a 1st main surface 32b 2nd main surface 33 Recess 34a 1st protrusion 34b 2nd projection Part 35 Elastic substrate 36 Vibrating element 37 Plate-shaped piezoelectric body 38a First electrode 38b Second electrode 39 Void 40 Flow board 41 Surface 42 Recessed part 43 Through hole 50, 50'Support member 51a First wiring 51b Second wiring 52a First 1 through hole 52b 2nd through hole 53 resin film 54 vibration adjustment plate 55 seed layer 60 hard member 61 elastic member 62 metal member 70 container 80 valve 81 cylinder tube 82 outlet 83 valve 84 first flow path hole 85 second flow path Holes 86 Balls 101a, 101b, 101c, 101d, 101e, 101f, 103 Fluid control device 135 Elastic substrate forming material 139 Positive resist film pattern 140 Flow path plate forming member 150 Support member forming film 153 Resin film 160 Hard substrate 161 Adhesive 162 Temporary substrate 170 Joined body 190 Laminated body 192 Joined body 193 Structure

Claims (13)

1. An actuator element having a first main surface and a second main surface facing each other,
   An internal space facing at least one main surface of the first main surface and the second main surface of the actuator element is provided.
   The actuator element vibrates in a direction perpendicular to the first main surface and the second main surface, and the actuator element vibrates.
   The internal space is characterized by including an expansion portion having an expanded cross-sectional area in a direction perpendicular to the first main surface and the second main surface.
2. The pump according to claim 1, wherein the actuator element includes a substrate and a vibration element arranged on at least one surface of the substrate.
3. The pump according to claim 1 or 2, further comprising a support member that oscillateably supports the actuator element.
4. The invention according to any one of claims 1 to 3, further comprising a vibration adjusting plate for adjusting the operating frequency of the actuator element on at least one of the first main surface and the second main surface of the actuator element. Pump.
5. A housing with at least one perforation and
   A protrusion arranged around the opening and projecting inward of the housing,
   With the first board,
   The actuator element has a through hole penetrating between the first main surface and the second main surface, the first main surface is connected to the protrusion, and the through hole is the housing. Arranged at a position facing the opening,
   The internal space is a space facing the second main surface of the actuator element.
   The first plate is arranged at a position facing the second main surface of the actuator element via the internal space.
   The expansion portion is formed by recesses provided on at least one of the second main surface of the actuator element and the surface of the first plate facing the second main surface of the actuator element. The pump according to any one of 4 to 4.
6. The pump according to claim 5, wherein the protrusion is connected to the first main surface of the actuator element at a position closer to the center of the actuator element than a node portion generated when the actuator element vibrates. ..
7. The pump according to claim 5 or 6, wherein the outer edge of the recess faces the protrusion.
8. The pump according to any one of claims 5 to 7, wherein the recess includes a curved surface having an arcuate cross section.
9. Further comprising a housing with at least one perforation,
   The first main surface of the actuator element is arranged at a position facing the opening of the housing via the internal space.
   The internal space is a space facing the first main surface of the actuator element.
   Claims 1 to 4 are formed by a recess provided in at least one of the first main surface of the actuator element and the surface of the housing facing the first main surface of the actuator element. The pump according to any one of the above.
10. The pump according to claim 9, wherein the outer edge of the recess faces the node portion generated when the actuator element vibrates.
11. The pump according to claim 9 or 10, wherein the recess includes a curved surface having an arcuate cross section.
12. A fluid control device including the pump according to any one of claims 1 to 11 and a container connected to the pump.
13. The fluid control device according to claim 12, wherein the pump and the container are connected via a valve.

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