WO2022017199A1 - 一种基于超构透镜阵列的大视场集成显微成像装置 - Google Patents

一种基于超构透镜阵列的大视场集成显微成像装置 Download PDF

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WO2022017199A1
WO2022017199A1 PCT/CN2021/105491 CN2021105491W WO2022017199A1 WO 2022017199 A1 WO2022017199 A1 WO 2022017199A1 CN 2021105491 W CN2021105491 W CN 2021105491W WO 2022017199 A1 WO2022017199 A1 WO 2022017199A1
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metalens
lens array
polarized light
array
linear polarizer
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French (fr)
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李涛
徐贝贝
祝世宁
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Nanjing University
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Nanjing University
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/361—Optical details, e.g. image relay to the camera or image sensor

Definitions

  • the invention relates to the field of microscopic imaging, in particular to a large field of view integrated microscopic imaging device based on a metal lens array.
  • the purpose of the present invention is to provide an integrated microscopic imaging device with a large field of view based on a metal lens array, so as to expand the imaging field of view without sacrificing the resolution and increasing the working distance.
  • the present invention provides the following scheme:
  • a large field of view integrated microscopic imaging device based on a metalens array comprising: a light source, a metalens array, a linear polarizer and an image sensor;
  • the linear polarizer is fixed behind the light source, and the linear polarizer is located on the outgoing light path of the light source;
  • the metalens array is fixed behind the linear polarizer, and the metalens is The array is located on the outgoing light path of the linear polarizer;
  • the object to be imaged is located between the linear polarizer and the metal lens array;
  • the image sensor is located behind the metal lens array;
  • the meta-lens array includes a plurality of meta-lenses arranged periodically, and the phase distribution of the meta-lenses in the first polarized light and the second polarized light satisfies: in, is the phase of metalens p in the first polarized light, ⁇ p1 is the wavelength of metalens p in the first polarized light, f p1 is the focal length of metalens p in the first polarized light, and metalens p is in the first polarized light
  • the center coordinate of polarized light is (0,0), and (x,y) is the in-plane coordinate of metalens p; is the phase of the metalens p in the second polarized light; ⁇ p2 is the wavelength of the metalens p in the second polarized light, f p2 is the focal length of the metalens p in the second polarized light, (a, b) represents the superstructure The relative offset position between the center of the structuring lens
  • the method further includes: a quarter-wave plate; the quarter-wave plate is fixed behind the linear polarizer and is located between the linear polarizer and the meta-lens array.
  • the polarization state of the outgoing light from the quarter-wave plate is adjusted; the polarization of the outgoing light is adjusted.
  • States include; linearly polarized light, elliptically polarized light, and circularly polarized light.
  • the periodic arrangement of the metalens in the metalens array includes: tetragonal lattice arrangement and hexagonal lattice arrangement.
  • the arrangement period of the lenses in the first lens array is the same as the arrangement period of the lenses in the second lens array; the first lens array is the metal lens array when the first polarized light is incident.
  • the arrangement period of the lenses in the first lens array is different from the arrangement period of the lenses in the second lens array; the first lens array is the metal lens array when the first polarized light is incident.
  • the geometric shapes of the metalens in the metalens array include circles, ellipses and polygons.
  • the present invention discloses the following technical effects:
  • the invention adopts the nested meta-lens array of polarization multiplexing, and can obtain two sets of single lens arrays with complementary fields of view by switching the polarization, can eliminate the blind area of the field of view generated by the array composed of single lenses, and can obtain the full range of vision without mechanical movement.
  • the information of the field of view using the arrangement of the lens array to break the contradiction between the field of view and the resolution in the traditional microscope system, realize the large field of view and high-resolution microscopic imaging without sacrificing the resolution and increasing the working distance.
  • the present invention has expansibility, the designed and processed lens array area is the field of view of the microscope, and the resolution will not be degraded while expanding the field of view.
  • the present invention has a simple design, only involves a single-layer polarization multiplexing metal lens array, and does not need to align and assemble the multi-layer lenses.
  • the polarization multiplexing meta-lens array used in the present invention belongs to the flat lens array, which is ultra-thin in volume, compatible with microelectronics preparation technology, suitable for mass production, and the flat-plate ultra-thin structure is convenient for integration with image sensors.
  • FIG. 1 is a schematic structural diagram of a large field of view integrated microscopic imaging device based on a metalens array according to the present invention
  • FIG. 2 is a schematic diagram of the periodic arrangement of the metalens array
  • FIG. 3 is a schematic diagram of the lens array of the meta-lens array of Embodiment 1 when two polarized lights are incident;
  • Fig. 4 is the focusing simulation result diagram of the metal lens array of embodiment 1 when two polarized lights are incident;
  • FIG. 6 is a schematic diagram of a large field of view imaging obtained by a large field of view integrated microscopic imaging device based on a metalens array according to the present invention
  • FIG. 7 is a comparison diagram of an optical micrograph of a biological sample and a large-field-of-view micrograph obtained by the large-field-of-view integrated microscopic imaging device based on the metalens array of the present invention.
  • Light source-1 metal lens array-2, linear polarizer-3, quarter-wave plate-4, image sensor-5, object to be imaged-6.
  • FIG. 1 is a schematic structural diagram of a large field of view integrated microscopic imaging device based on a metalens array according to the present invention.
  • the large field of view integrated microscopic imaging device based on the metalens array of the present invention includes: a light source 1 , a metalens array 2 , a linear polarizer 3 and an image sensor 5 .
  • the linear polarizer 3 is fixed behind the light source 1, and the linear polarizer 3 is located on the outgoing light path of the light source 1; the metal lens array 2 is fixed behind the linear polarizer 3, And the meta-lens array 2 is located on the outgoing light path of the linear polarizer 3; the object to be imaged 6 is located between the linear polarizer 3 and the meta-lens array 2; the image sensor 5 is located in the The rear of metal lens array 2.
  • the metal lens array 2 and the image sensor 5 are directly integrated together to form a large field of view microscopic imaging system, which can be integrated by, for example, external glue mounting, clamping and fixing, tape-out packaging, and the like.
  • Metal lens array 2 is a nested metal lens array, which eliminates the blind spot of the field of view in a single lens array by switching polarization, breaks the limitation of the imaging space bandwidth product, and expands the imaging field of view without sacrificing resolution and increasing working distance. , to achieve large field of view, high-resolution imaging without mechanical movement.
  • the meta-lens array 2 includes a plurality of meta-lenses arranged periodically, and the phase distribution of each meta-lens in the first polarized light and the second polarized light satisfies:
  • the large field of view integrated microscopic imaging device based on the metalens array of the present invention further comprises a quarter-wave plate 4, and the quarter-wave plate 4 is fixed on the line
  • the rear side of the polarizer 3 is located between the linear polarizer 3 and the meta-lens array 2 .
  • the polarization states of the outgoing light include: linearly polarized light, elliptically polarized light and circularly polarized light.
  • the optical axis of the quarter-wave plate 4 when the optical axis of the quarter-wave plate 4 is oriented as follows: the e-axis or the o-axis is consistent with the polarization direction of the linear polarizer 3, the outgoing polarized light is linearly polarized light; when the quarter-wave plate 4 The orientation of the optical axis is: when the e-axis or the o-axis is at an angle of 45 degrees to the polarization direction of the linear polarizer 3, the polarized light emitted is circularly polarized light; when the optical axis of the quarter-wave plate 4 is oriented at other angles , the outgoing polarized light is elliptically polarized light.
  • the geometric shapes of the metalens in the metalens array 2 described in the present invention may be circles, ellipses or polygons.
  • the periodic arrangement of the metal lenses in the metal lens array 2 may be a tetragonal lattice arrangement or a hexagonal lattice arrangement.
  • the arrangement period of the lenses of the metal lens array 2 when the first polarized light is incident may be the same as or different from the arrangement period of the lenses of the metal lens array 2 when the second polarized light is incident.
  • part (a) in Figure 2 is a tetragonal lattice arrangement period
  • part (b) in Figure 2 is a hexagonal lattice arrangement period
  • part (c) in Figure 2 is a hexagonal lattice
  • the arrangement period of the metal lens array is different when the two polarized lights are incident.
  • the meta-lens array is a 2 ⁇ 2 meta-lens Array
  • the lens A array is formed when the polarization 1 (left-hand circularly polarized light) is incident
  • the lens B array is formed when the polarization 2 (right-hand circularly polarized light) is incident.
  • the metal lens adopts a square geometric shape, and its focal length and design wavelength are both f and ⁇ , then the phase distribution of each metal lens under two polarizations is specifically:
  • D is the side length of the lens
  • the actual processing is set to 200 ⁇ m
  • the working wavelength ⁇ is 630nm.
  • the performance of the designed polarization multiplexing metalens array is first evaluated by using simulation software. Because commercial simulation software (Lumerical FDTD Solutions) requires large computing resources and long computing time to simulate large-aperture metalens arrays, the numerical aperture of the polarization multiplexing metalens is guaranteed to remain unchanged during the actual simulation, and the diameter of the lens is reduced. Therefore, the final simulation parameters are set as the diameter of the polarization multiplexing metalens is 10.0 ⁇ m and the focal length is 12.5 m.
  • the simulation results are shown in FIG. 4 , and part (a) in FIG. 4 is a schematic diagram of the arrangement of the xy-plane structure of the metal lens array.
  • Part (b) in Figure 4 is the normalized electric field intensity distribution of the left-handed circularly polarized incident light (the upper image) and the right-handed circularly polarized incident light (the lower image) of the metal lens array focal plane. It can be clearly seen that the left-handed circular The focal spot of 4 lenses when polarized light is incident and the focal spot of 1 complete lens when right-handed circularly polarized light is incident, the focal spot of 4 1/2 lenses on the side and the focal spot of 4 1/4 lenses on the corner spot, and the crosstalk between the two polarized metalens is small. Part (c) in Fig.
  • FIG. 5 shows the optical microscope photo corresponding to the 6 ⁇ 6 metalens array, in which the side length of a single polarization multiplexing lens is 200 ⁇ m, the focal length of the lenses corresponding to the two polarizations is 250 ⁇ m, and the working wavelength is 630 nm.
  • the lens array is integrated into the image sensor according to the method of the present invention, and the US Air Force target is imaged as an imaging object, and the imaging diagrams of the left-handed circularly polarized incident light and the right-handed circularly polarized incident light are collected by switching the polarization as shown in Figure 6 ( shown in part a) and part (b) in FIG. 6 .
  • FIG. 7 are the cervical cells in the Pap smear (part (a) in Figure 7) and the fly wing sample ( Fig. 7(b)), tongue longitudinal section specimen (Fig. 7(c)) and myocardial longitudinal section (Fig. 7(d)), Fig. 7(a) , Part (b) in Figure 7, Part (c) in Figure 7 and Part (d) in Figure 7, the left image is an optical microscope photo, and the right image is a large field of view micrograph obtained by the present invention . It can be seen that, compared with the optical microscope photos of the same field of view, the microscopic images obtained by the large field of view integrated microscopic imaging technology based on the metalens array shown in the present invention have good contrast and clear details.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
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  • Lenses (AREA)

Abstract

一种基于超构透镜阵列（2）的大视场集成显微成像装置，包括：光源（1）、超构透镜阵列（2）、线偏振片（3）和图像传感器（5）；线偏振片（3）固定于光源（1）的后方，且线偏振片（3）位于光源（1）的出射光路上；超构透镜阵列（2）固定于线偏振片（3）的后方，且超构透镜阵列（2）位于线偏振片（3）的出射光路上；待成像物体（6）位于线偏振片（3）和超构透镜阵列（2）之间；图像传感器（5）位于超构透镜阵列（2）的后方；超构透镜阵列（2）中包括周期性排布的多个超构透镜。可以实现在不牺牲分辨率不增加工作距离的条件下，扩大成像视场。

Description

一种基于超构透镜阵列的大视场集成显微成像装置
本申请要求于2020年07月22日提交中国专利局、申请号为202010709243.8、发明名称为“一种基于超构透镜阵列的大视场集成显微成像装置”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本发明涉及显微成像领域，特别是涉及一种基于超构透镜阵列的大视场集成显微成像装置。
背景技术
在光学显微成像领域，同时获得大视场和高分辨率是光学显微成像的重要目标之一。然而，传统光学显微镜因其成像原理空间带宽积的限制，在使用高倍率物镜时视场范围必然减小，无法同时实现高分辨率和大视场成像。另一方面，复杂的光学系统也使得显微镜变得越来越复杂、笨重和昂贵，极大地限制了显微镜的推广和应用。为了打破透镜成像单一光轴导致的放大倍率和视场范围相耦合的瓶颈，人们提出了无透镜显微成像和仿生复眼结构透镜阵列来实现大视场、高分辨的成像。但无透镜成像过程不是直接可视化的，且最终图像质量取决于图像处理算法，近年来人们通过提出各种改进的算法提高重建图像的效果，但仍然依赖于图像的后处理；人工复眼装置要么需要弯曲的光电探测器，要么图像失真严重，要么缺乏自调节能力，因此亟需改善这些问题。
发明内容
本发明的目的是提供一种基于超构透镜阵列的大视场集成显微成像装置，以实现在不牺牲分辨率不增加工作距离的条件下，扩大成像视场。
为实现上述目的，本发明提供了如下方案：
一种基于超构透镜阵列的大视场集成显微成像装置，包括：光源、超构透镜阵列、线偏振片和图像传感器；
所述线偏振片固定于所述光源的后方，且所述线偏振片位于所述光源的出射光路上；所述超构透镜阵列固定于所述线偏振片的后方，且所述超构透镜阵列位于所述线偏振片的出射光路上；待成像物体位于所述线偏振片和所述超构透镜阵列之间；所述图像传感器位于所述超构透镜阵列的后方；
所述超构透镜阵列中包括周期性排布的多个超构透镜，所述超构透镜在第一偏振光和第二偏振光的相位分布满足：
Figure PCTCN2021105491-appb-000001
其中，
Figure PCTCN2021105491-appb-000002
为超构透镜p在第一偏振光的相位，λ p1为超构透镜p在第一偏振光的波长，f p1为超构透镜p在第一偏振光的焦距，超构透镜p在第一偏振光的中心坐标为(0,0)，(x,y)是超构透镜p的面内坐标；
Figure PCTCN2021105491-appb-000003
为超构透镜p在第二偏振光的相位；λ p2为超构透镜p在第二偏振光的波长，f p2为超构透镜p在第二偏振光的焦距，(a,b)表示超构透镜p在第二偏振光下的中心与超构透镜p在第一偏振光下的中心之间的相对偏移位置。
可选的，还包括：四分之一波片；所述四分之一波片固定于所述线偏振片的后方，且位于所述线偏振片和所述超构透镜阵列之间。
可选的，通过调节所述四分之一波片的光轴与所述线偏振片偏振方向的空间关系，调节所述四分之一波片出射光的偏振状态；所述出射光的偏振状态包括；线偏振光、椭圆偏振光和圆偏振光。
可选的，所述超构透镜阵列中超构透镜的周期性排布方式包括；四方晶格排布和六角晶格排布。
可选的，第一透镜阵列中透镜的排布周期与第二透镜阵列中透镜的排布周期相同；所述第一透镜阵列为所述超构透镜阵列在所述第一偏振光入射时的透镜阵列，所述第二透镜阵列为所述超构透镜阵列在所述第二偏振光入射时的透镜阵列。
可选的，第一透镜阵列中透镜的排布周期与第二透镜阵列中透镜的排布周期不同；所述第一透镜阵列为所述超构透镜阵列在所述第一偏振光入射时的透镜阵列，所述第二透镜阵列为所述超构透镜阵列在所述第二偏振光入射时的透镜阵列。
可选的，所述超构透镜阵列中超构透镜的几何形状包括圆形、椭圆形和多边形。
根据本发明提供的具体实施例，本发明公开了以下技术效果：
本发明采用偏振复用的嵌套型超构透镜阵列，通过切换偏振即可获得两组视场互补的单一透镜阵列，可以消除单一透镜组成阵列产生的视场盲区，无需机械移动即可获得全视场的信息，利用透镜阵列的排布打破传统显微系统中视场和分辨率耦合的矛盾，在不牺牲分辨率和不增加工作距离条件下实现大视场、高分辨显微成像。其次，本发明具有可拓展性，设计加工的透镜阵列区域即为显微的视场范围，而扩大视场的同时分辨率不会退化。
并且，本发明设计简单，仅涉及单层偏振复用超构透镜阵列，无需对多层透镜进行对准、装配等。而且，本发明使用的偏振复用超构透镜阵列属于平板透镜阵列，体积超薄，与微电子制备工艺兼容，适合大规模生产，平板超薄结构便于与图像传感器集成。
说明书附图
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动性的前提下，还可以根据这些附图获得其他的附图。
图1为本发明基于超构透镜阵列的大视场集成显微成像装置的结构示意图；
图2为超构透镜阵列的周期性排布示意图；
图3为实施例1的超构透镜阵列在两个偏振光入射时的透镜阵列示意图；
图4为实施例1的超构透镜阵列在两个偏振光入射时的聚焦仿真结果图；
图5为实施例2的超构透镜阵列的光学显微图；
图6为本发明基于超构透镜阵列的大视场集成显微成像装置所得大视场成像示意图；
图7为生物样本光学显微图和本发明基于超构透镜阵列的大视场集成显微成像装置所得大视场显微图的对比图。
符号说明：
光源-1，超构透镜阵列-2，线偏振片-3，四分之一波片-4，图像传感器-5，待成像物体-6。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
为使本发明的上述目的、特征和优点能够更加明显易懂，下面结合附图和具体实施方式对本发明作进一步详细的说明。
图1为本发明基于超构透镜阵列的大视场集成显微成像装置的结构示意图。如图1所示，本发明基于超构透镜阵列的大视场集成显微成像装置包括：光源1、超构透镜阵列2、线偏振片3和图像传感器5。
所述线偏振片3固定于所述光源1的后方，且所述线偏振片3位于所述光源1的出射光路上；所述超构透镜阵列2固定于所述线偏振片3的后方，且所述超构透镜阵列2位于所述线偏振片3的出射光路上；待成像物体6位于所述线偏振片3和所述超构透镜阵列2之间；所述图像传感器5位于所述超构透镜阵列2的后方。超构透镜阵列2和图像传感器5直接集成在一起，构成大视场显微成像系统，例如可以采用外部胶装、夹持固定、流片封装等方式集成。超构透镜阵列2为嵌套型超构透镜阵列，通过切换偏振消除单一透镜阵列中的视场盲区，打破成像空间带宽积限制，在不牺牲分辨率和不增加工作距离条件下扩大成像视场，实现无需进行机械移动的大视场、高分辨成像。
所述超构透镜阵列2中包括周期性排布的多个超构透镜，每个超构透镜在第一偏振光和第二偏振光的相位分布满足：
Figure PCTCN2021105491-appb-000004
其中，
Figure PCTCN2021105491-appb-000005
为超构透镜p在第一偏振光的相位，λ p1为超构透镜p在第一偏 振光的波长，f p1为超构透镜p在第一偏振光的焦距，超构透镜p在第一偏振光的中心坐标为(0,0)，(x,y)是超构透镜p的面内坐标；
Figure PCTCN2021105491-appb-000006
为超构透镜p在第二偏振光的相位；λ p2为超构透镜p在第二偏振光的波长，f p2为超构透镜p在第二偏振光的焦距，(a,b)表示超构透镜p在第二偏振光下的中心与超构透镜p在第一偏振光下的中心之间的相对偏移位置。
为了更丰富地调节偏振光的状态，本发明基于超构透镜阵列的大视场集成显微成像装置还包括四分之一波片4，所述四分之一波片4固定于所述线偏振片3的后方，且位于所述线偏振片3和所述超构透镜阵列2之间。通过调节所述四分之一波片4的光轴与所述线偏振片3偏振方向的空间关系，可以调节所述四分之一波片4出射光的偏振状态。所述出射光的偏振状态包括：线偏振光、椭圆偏振光和圆偏振光。具体的，当四分之一波片4的光轴取向为：e轴或o轴与线偏振片3的偏振方向一致时，出射的偏振光为线偏振光；当四分之一波片4的光轴取向为：e轴或o轴与线偏振片3的偏振方向呈45度角时，出射的偏振光为圆偏振光；当四分之一波片4的光轴取向为其它角度时，出射的偏振光为椭圆偏振光。
本发明中所述超构透镜阵列2中超构透镜的几何形状可以为圆形、椭圆形或多边形。超构透镜阵列2中超构透镜的周期性排布方式可以为四方晶格排布或六角晶格排布。而且，超构透镜阵列2在所述第一偏振光入射时透镜的排布周期与超构透镜阵列2在所述第二偏振光入射时透镜的排布周期可以相同，也可以不同。如图2所示，图2中的(a)部分为四方晶格排布周期，图2中的(b)部分为六角晶格排布周期，图2中的(c)部分为六角晶格排布周期，且超构透镜阵列在两个偏振光入射时透镜的排布周期不同。
为了更好的理解本发明的方案，下面结合具体实施例进一步进行说明。
实施例1
图3为实施例1的超构透镜阵列在两个偏振光入射时的透镜阵列示意图，如图3中的(a)部分所示，本实施例中超构透镜阵列为2×2的超构透镜阵列，在偏振1(左旋圆偏振光)入射时形成透镜A阵列，如图3中的(b)部分所示，在偏振2(右旋圆偏振光)入射时形成透镜B阵列。本实施例中，超构透镜采用方形的几何形状，其焦距、设计波长均为f和λ，则每个超构透镜在两 个偏振下的相位分布具体为：
Figure PCTCN2021105491-appb-000007
其中D为透镜的边长，实际加工定为200μm，工作波长λ为630nm。
为了验证实施例1中设计的准确性和可行性，首先利用仿真模拟软件对设计的偏振复用超构透镜阵列的性能进行评估。由于商用仿真软件(Lumerical FDTD Solutions)仿真大口径超构透镜阵列所需计算资源较大、计算时间较长，实际仿真时保证偏振复用超构透镜的数值孔径不变，减小透镜的直径，因此将最终的仿真参数定为偏振复用超构透镜直径为10.0μm、焦距12.5m。仿真结果如图4所示，图4中的(a)部分为超构透镜阵列xy面结构排布示意图。图4中的(b)部分为左旋圆偏振入射光(上图)和右旋圆偏振入射光(下图)超构透镜阵列焦平面归一化的电场强度分布图，可以明显看到左旋圆偏振光入射时4个透镜的聚焦焦斑和右旋圆偏振光入射时1个完整透镜的聚焦焦斑、边上4个1/2透镜的焦斑以及角上4个1/4透镜的焦斑，并且两种偏振超构透镜之间的串扰很小。图4中的(c)部分为左旋圆偏振入射光(上图)和右旋圆偏振入射光(下图)偏振复用超构透镜阵列焦平面与入射光正交偏振分量归一化的电场强度分布图，可以看到进行检偏之后，透镜聚焦的信噪比更高。
实施例2
本实施例利用电子束曝光和干法刻蚀加工得到超构透镜阵列。图5所示为超构透镜6×6阵列对应的光学显微镜照片，其中单个偏振复用透镜边长200μm，两偏振对应的透镜焦距均为250μm，工作波长为630nm。将该透镜阵列按本发明方法集成到图像传感器，并将美国空军标靶作为成像物体进行成像，切换偏振采集到左旋圆偏振入射光和右旋圆偏振入射光的成像图如图6中的(a)部分和图6中的(b)部分所示。通过后续图像拼接，最终可以获得全视场成像图如图6中的(c)部分所示，其中分辨率和单个透镜成像相当(≈1.74μm)，而视场相对于单个透镜扩大36倍。
用本发明所示的基于超构透镜阵列的大视场集成显微成像技术对一些生 物样本进行成像。生物样本的光学显微镜照片和本发明所述成像技术所得显微图片的对比如图7所示，分别是巴氏涂片中的宫颈细胞(图7中的(a)部分)，苍蝇翅膀样本(图7中的(b)部分)，舌纵切切片标本(图7中的(c)部分)和心肌纵切切片标本(图7中的(d)部分)，图7中的(a)部分、图7中的(b)部分、图7中的(c)部分和图7中的(d)部分中，左侧图像为光学显微镜照片，右侧图像为本发明所得大视场显微图。可以看到，相比于同样视场范围的光学显微镜照片，本发明所示的基于超构透镜阵列的大视场集成显微成像技术所得显微图片对比度好，细节清晰。
本说明书中各个实施例采用递进的方式描述，每个实施例重点说明的都是与其他实施例的不同之处，各个实施例之间相同相似部分互相参见即可。
本文中应用了具体个例对本发明的原理及实施方式进行了阐述，以上实施例的说明只是用于帮助理解本发明的方法及其核心思想；同时，对于本领域的一般技术人员，依据本发明的思想，在具体实施方式及应用范围上均会有改变之处。综上所述，本说明书内容不应理解为对本发明的限制。

Claims (7)

  1. 一种基于超构透镜阵列的大视场集成显微成像装置，其特征在于，包括：光源、超构透镜阵列、线偏振片和图像传感器；
    所述线偏振片固定于所述光源的后方，且所述线偏振片位于所述光源的出射光路上；所述超构透镜阵列固定于所述线偏振片的后方，且所述超构透镜阵列位于所述线偏振片的出射光路上；待成像物体位于所述线偏振片和所述超构透镜阵列之间；所述图像传感器位于所述超构透镜阵列的后方；
    所述超构透镜阵列中包括周期性排布的多个超构透镜，所述超构透镜在第一偏振光和第二偏振光的相位分布满足：
    Figure PCTCN2021105491-appb-100001
    其中，
    Figure PCTCN2021105491-appb-100002
    为超构透镜p在第一偏振光的相位，λ p1为超构透镜p在第一偏振光的波长，f p1为超构透镜p在第一偏振光的焦距，超构透镜p在第一偏振光的中心坐标为( 0 , 0)，(x,y)是超构透镜p的面内坐标；
    Figure PCTCN2021105491-appb-100003
    为超构透镜p在第二偏振光的相位；λ p2为超构透镜p在第二偏振光的波长，f p2为超构透镜p在第二偏振光的焦距，(a,b)表示超构透镜p在第二偏振光下的中心与超构透镜p在第一偏振光下的中心之间的相对偏移位置。
  2. 根据权利要求1所述的基于超构透镜阵列的大视场集成显微成像装置，其特征在于，还包括：四分之一波片；所述四分之一波片固定于所述线偏振片的后方，且位于所述线偏振片和所述超构透镜阵列之间。
  3. 根据权利要求2所述的基于超构透镜阵列的大视场集成显微成像装置，其特征在于，通过调节所述四分之一波片的光轴与所述线偏振片偏振方向的空间关系，调节所述四分之一波片出射光的偏振状态；所述出射光的偏振状态包括：线偏振光、椭圆偏振光和圆偏振光。
  4. 根据权利要求1所述的基于超构透镜阵列的大视场集成显微成像装置，其特征在于，所述超构透镜阵列中超构透镜的周期性排布方式包括：四方晶格排布和六角晶格排布。
  5. 根据权利要求1所述的基于超构透镜阵列的大视场集成显微成像装置， 其特征在于，第一透镜阵列中透镜的排布周期与第二透镜阵列中透镜的排布周期相同；所述第一透镜阵列为所述超构透镜阵列在所述第一偏振光入射时的透镜阵列，所述第二透镜阵列为所述超构透镜阵列在所述第二偏振光入射时的透镜阵列。
  6. 根据权利要求1所述的基于超构透镜阵列的大视场集成显微成像装置，其特征在于，第一透镜阵列中透镜的排布周期与第二透镜阵列中透镜的排布周期不同；所述第一透镜阵列为所述超构透镜阵列在所述第一偏振光入射时的透镜阵列，所述第二透镜阵列为所述超构透镜阵列在所述第二偏振光入射时的透镜阵列。
  7. 根据权利要求1所述的基于超构透镜阵列的大视场集成显微成像装置，其特征在于，所述超构透镜阵列中超构透镜的几何形状包括圆形、椭圆形和多边形。
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