WO2022016872A1 - 干扰磁场下电机正弦误差的出力补偿方法及装置 - Google Patents

干扰磁场下电机正弦误差的出力补偿方法及装置 Download PDF

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WO2022016872A1
WO2022016872A1 PCT/CN2021/079104 CN2021079104W WO2022016872A1 WO 2022016872 A1 WO2022016872 A1 WO 2022016872A1 CN 2021079104 W CN2021079104 W CN 2021079104W WO 2022016872 A1 WO2022016872 A1 WO 2022016872A1
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motor
signal
error
compensation
magnetic field
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French (fr)
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朱煜
杨开明
刘涛
成荣
李鑫
鲁森
雷声
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Tsinghua University
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Tsinghua University
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P5/00—Arrangements specially adapted for regulating or controlling the speed or torque of two or more electric motors
    • H02P5/46—Arrangements specially adapted for regulating or controlling the speed or torque of two or more electric motors for speed regulation of two or more dynamo-electric motors in relation to one another
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P5/00—Arrangements specially adapted for regulating or controlling the speed or torque of two or more electric motors
    • H02P5/46—Arrangements specially adapted for regulating or controlling the speed or torque of two or more electric motors for speed regulation of two or more dynamo-electric motors in relation to one another
    • H02P5/48—Arrangements specially adapted for regulating or controlling the speed or torque of two or more electric motors for speed regulation of two or more dynamo-electric motors in relation to one another by comparing mechanical values representing the speeds
    • H02P5/485—Arrangements specially adapted for regulating or controlling the speed or torque of two or more electric motors for speed regulation of two or more dynamo-electric motors in relation to one another by comparing mechanical values representing the speeds using differential movement of the two motors, e.g. using differential gearboxes

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  • the present invention relates to the technical field of semiconductor equipment, and more particularly, to a method and device for compensating the sinusoidal error of a motor under an interference magnetic field.
  • the nano-scale high-precision lithography machine is the core equipment for manufacturing integrated circuits.
  • the workpiece table directly affects the production efficiency and exposure quality of wafers.
  • the ultra-precision motion platform has gradually developed from the air-floating to the magnetic-levitation type.
  • the magnetic levitation workpiece table has the advantages of no friction, high precision, fast response and high reliability.
  • the micro-movement stage with magnetic levitation and electromagnetic force drive structure is widely used in the ultra-precision workpiece stage system. As a key sub-unit of the workpiece stage, improving its control accuracy is of great significance to the development of lithography machines.
  • the existing ultra-precision workpiece table system generally adopts a coarse-micro laminated structure
  • the coarse motion table adopts a magnetic levitation plane motor
  • the coil fixed on the coarse motion table is used as the plane motor mover
  • the bottom magnetic steel array is used as the plane motor stator.
  • the distribution of the magnetic steel array makes there exist alternating magnetic fields in the entire range of motion.
  • the motor of the micro-moving table superimposed on the upper layer will be affected by the magnetic field of the permanent magnet array, which reduces the tracking accuracy of the trajectory on each degree of freedom of the micro-moving table. , thereby affecting the motion performance of the micro-movement table.
  • the purpose of the present invention is to provide a method and device for compensating the sinusoidal error of the motor under the interference magnetic field, so as to solve the problem that the tracking accuracy of the trajectory in each degree of freedom of the micro-moving table is reduced, thereby affecting the movement of the micro-moving table. performance issues.
  • the output compensation method for the sinusoidal error of the motor under the interference magnetic field includes: collecting the control signal and the displacement signal of the motor in the constant speed stage; creating a spatial domain sin-cosine signal based on the control signal and the displacement signal, and converting the sin-cosine signal into a corresponding
  • the compensation matrix is created according to the time domain signal; the compensation signal corresponding to the compensation matrix is determined according to the compensation matrix; the compensation signal is superimposed into the control signal to compensate the displacement error of the motor.
  • a preferred technical solution is to collect the displacement signal of the motor again after superimposing the compensation signal into the control signal, and detect whether the motion error of the motor is within the preset range; when the motion error is within the preset range, it indicates the displacement Error compensation is completed.
  • a preferred technical solution is that when the motion error exceeds a preset range, the number of iterations for performing displacement error compensation on the motor is increased, and the spatial domain sine and cosine signals are recreated.
  • a preferred technical solution is that collecting the control signals of the motor in the constant speed stage includes: the acceleration range of the motor is within ⁇ 10m/s 2 ; the speed range of the motor is within ⁇ 100mm/s.
  • the spatial domain sine and cosine signals include:
  • the space domain sinusoidal signal is expressed as:
  • the spatial domain cosine signal is expressed as:
  • p represents the pole pitch of the magnetic steel
  • x represents the displacement signal
  • k represents the number of iterations
  • k 1, 2, 3,...,n.
  • the time domain signal includes:
  • the time domain sinusoidal signal is expressed as:
  • the time domain cosine signal is expressed as:
  • a k (t) represents the time-domain sine signal of the k-th iteration
  • b k (t) represents the time-domain cosine signal of the k-th iteration
  • p represents the magnetic pole distance
  • x represents the displacement signal
  • t represents the time.
  • M [a 1 ,b 1 ,a 2 ,b 2 ,...,a n ,b n ]
  • a n denotes the n th iteration time domain sinusoidal signal
  • b n represents the time domain signal of the cosine iteration n.
  • the acquisition formula of the compensation signal is:
  • F COMP represents the compensation signal
  • ⁇ represents the compensation coefficient matrix
  • ⁇ (M T M) -1 M T f
  • f represents the control signal connected to the motor
  • M represents the compensation matrix
  • k represents the number of iterations
  • k 1, 2, 3, ..., n
  • p represents the pole pitch of the magnet
  • x represents the displacement signal.
  • the preset range is that the peak-to-peak value of the error of the motor is within ⁇ 10 nm.
  • an output compensation device for motor sinusoidal error under interference magnetic field comprising a magnetic steel array, a micro-movement stage, a coarse-motion stage arranged between the magnetic steel array and the fine-moving stage, and a Y-direction motor, X-direction motor and Z-direction motor on the micro-movement stage; wherein, the micro-movement stage includes a coil motor, the magnetic steel array is used to provide an alternating magnetic field that drives the movement of the coil motor, and the coarse-moving stage follows the micro-moving stage in the magnetic steel.
  • the micro-movement table interacts with the magnetic steel array to control the movement of the Y-direction motor, the X-direction motor and the Z-direction motor;
  • the output of Y-direction motor, X-direction motor and Z-direction motor are automatically compensated.
  • the characteristics of the error waveform can be tracked, and the signal compensation can be performed based on the error waveform. , so as to effectively compensate the error caused by the magnetic field disturbance.
  • FIG. 1 is a flowchart 1 of a method for compensating for the output force of a motor sinusoidal error under a disturbance magnetic field according to an embodiment of the present invention
  • FIG. 2 is a flowchart 2 of a method for compensating for the output force of the motor sinusoidal error under the disturbance magnetic field according to an embodiment of the present invention
  • FIG. 3 is a control structure diagram of an output compensation method for motor sinusoidal error under a disturbance magnetic field according to an embodiment of the present invention
  • FIG. 4 is a schematic structural diagram of an output compensation device for sinusoidal error of a motor under a disturbance magnetic field according to an embodiment of the present invention.
  • the reference signs therein include: magnetic steel array 1 , coarse motion stage 2 , fine motion stage 3 , Y-direction motor 4 , X-direction motor 5 , and Z-direction motor 6 .
  • FIG. 1 and FIG. 2 respectively show the flow of the output compensation method for the sinusoidal error of the motor under the disturbance magnetic field according to the embodiment of the present invention from different angles.
  • the output compensation method for the sinusoidal error of the motor under the interference magnetic field includes the following steps:
  • S110 Collect the control signal and the displacement signal of the motor in the constant speed stage.
  • the motor can be understood as the X-direction motor, Y-direction motor and Z-direction motor on the micro-movement stage.
  • the control signal is generated by the controller to control each motor on the micro-moving stage.
  • the displacement signal represents each The output displacement of the motor during the uniform motion phase.
  • the magnetic field interference is not obvious; and in the uniform speed stage, the magnetic field interference is the main source of the motor output error, so the trajectory tracking experiment is carried out at low speed or low acceleration. in order to effectively compensate for the error.
  • low speed mainly means that the speed range of the motor is within ⁇ 100mm/s
  • low acceleration mainly means that the acceleration range of the motor is within ⁇ 10m/s 2 .
  • the speed or acceleration range can be determined according to specific applications. The scene or detection accuracy is adjusted, and is not limited to the above specific numerical range.
  • S120 Create a space-domain sine-cosine signal based on the control signal and the displacement signal, and convert the sine-cosine signal into a corresponding time-domain signal.
  • the control signal of the motor in the constant speed stage is collected, denoted as f
  • the displacement information of the motor is collected, denoted as x
  • the space domain sinusoidal signal is expressed as:
  • the spatial domain cosine signal is expressed as:
  • p represents the pole pitch of the magnetic steel
  • x represents the displacement signal
  • k represents the number of iterations
  • k 1, 2, 3, ..., n
  • n represents a natural number.
  • the spatial domain sine and cosine signals are converted into corresponding time domain signals, including:
  • the time domain sinusoidal signal is expressed as:
  • the time domain cosine signal is expressed as:
  • a k (t) represents the time-domain sine signal of the k-th iteration
  • b k (t) represents the time-domain cosine signal of the k-th iteration
  • p represents the magnetic pole distance
  • x represents the displacement signal
  • t represents the time.
  • the compensation matrix is created on the basis of the above two steps.
  • the expression formula of the compensation matrix is:
  • M [a 1 ,b 1 ,a 2 ,b 2 ,...,a n ,b n ]
  • a n denotes the n th iteration time domain sinusoidal signal
  • b n represents the time domain signal of the cosine iteration n.
  • S140 Determine a compensation signal corresponding to the compensation matrix according to the compensation matrix.
  • F COMP represents the compensation signal
  • ⁇ represents the compensation coefficient matrix
  • M represents the compensation matrix
  • k represents the number of iterations
  • k 1, 2, 3, ..., n
  • p represents the magnetic steel pole distance
  • x represents the displacement signal.
  • the compensation signal after the compensation signal is obtained again, the compensation signal can be superimposed into the control signal, and the motor is controlled again by the control signal after superimposing the compensation signal, so as to realize the displacement error compensation of the motor.
  • the displacement signal of the motor is collected again, and it is detected whether the motion error of the motor is within the preset range; when the motion error is within the preset range, Indicates that the displacement error compensation is completed. Otherwise, it indicates that the error compensation effect is not good.
  • the preset range can be set so that the peak-to-peak value of the error of the motor is within ⁇ 10 nm, and the value can also be adjusted according to the detection accuracy or requirements.
  • FIG. 3 shows the control structure of the output compensation method for the sinusoidal error of the motor under the disturbance magnetic field according to the embodiment of the present invention.
  • the controller is used to generate a control signal to control the motor, and control each motor on the micro-moving table through the control signal.
  • the object shown in the figure is the control object, which can also be understood as the micro-moving table.
  • Signal compensation is performed. After that, the output or displacement of the motor can be measured by the measurement system, and the measurement results are fed back to the controller.
  • the controller adjusts the compensation signal according to the detection results, and then compensates again until the displacement error of the motor is controlled within the preset value. within the range.
  • the measuring system can use grating ruler, capacitive grating ruler, eddy current sensor, laser interferometer and so on.
  • the present invention also provides an output compensating device for the sine error of the motor under the disturbance magnetic field.
  • FIG. 4 shows a schematic structure of an output compensation device for sinusoidal error of a motor under a disturbance magnetic field according to an embodiment of the present invention.
  • the output compensation device for the sinusoidal error of the motor under the interference magnetic field includes a magnetic steel array 1 , a micro-movement table 3 , and a coarse motion table arranged between the magnetic steel array 1 and the micro-movement table 3 .
  • the coil is located in the two-layer magnetic steel interlayer, under the action of the magnetic field, the energized coil will drive the movement of the micro-moving table 3 by the long-term Lorentz force.
  • the magnetic steel array 1 is used to provide an alternating magnetic field for driving the movement of the coil motor, and the coarse motion stage 2 follows the fine motion stage 3 to move in the magnetic steel array 1; the fine motion stage 3 interacts with the magnetic steel array 1 to control the Y The movement to the motor 4, the X-direction motor 5 and the Z-direction motor 6; and, using the output compensation method of the sinusoidal error of the motor under the above-mentioned interference magnetic field, the Y-direction motor 4, the X-direction motor 5 and the Z-direction motor on the micro-movement stage 3 are used. 6 outputs are automatically compensated.
  • the micro-moving table 3 moves along the track, because it passes through the magnetic field of the magnetic steel array 1, the eight motors (permanent magnets) of the micro-moving table 3 are all disturbed by the external magnetic field.
  • the coarse motion table 2 follows the micro motion table 3 to move back and forth in the magnetic field of the magnetic steel array 1, and the leakage magnetic field of the micro motion table motor interacts with the magnetic steel array magnetic field, so that the eight motors of the fine motion table 3 are all affected by the position
  • the related magnetic field disturbance force affects the six-degree-of-freedom precision motion control of the micro-movement stage 3 . Since the control error of the micro-motion stage 3 presents a sinusoidal change, in order to offset this error, a compensation force can be added to the output end of the controller to perform signal compensation.
  • the automatic compensation of the motor output of the micro-moving table is realized by effectively fitting the interference force; in addition, in the compensation process, the compensation signal is iterated. Correction can realize reliable estimation of electromagnetic disturbance, and can accurately compensate the error caused by magnetic field disturbance, so as to ensure the motion accuracy of the micro-movement table and the quality of the processed products.

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Abstract

本发明提供一种干扰磁场下电机正弦误差的出力补偿方法及装置，其中的方法包括：采集电机在匀速阶段的控制信号以及位移信号；基于控制信号和位移信号创建空间域正余弦信号，并将正余弦信号转换为对应的时域信号；根据时域信号创建补偿矩阵；根据补偿矩阵确定与补偿矩阵对应的补偿信号；将补偿信号叠加至控制信号内，以对电机进行位移误差补偿。利用上述发明能够提高对电机的跟踪精度，并对电机的出力进行有效补偿，以提高电机的运动控制性能。

Description

干扰磁场下电机正弦误差的出力补偿方法及装置 技术领域
本发明涉及半导体装备技术领域，更为具体地，涉及一种干扰磁场下电机正弦误差的出力补偿方法及装置。
背景技术
目前，纳米级高精度光刻机是用于制造集成电路的核心设备，工件台作为光刻机设备的关键部件，直接影响晶圆的生产效率及曝光质量。随着光刻技术的深入研究，超精密运动平台由气浮式逐渐向磁浮式发展。磁浮式工件台具有无摩擦，精度高，响应快，可靠性高等优点。采用磁浮与电磁力驱动结构的微动台被广泛应用于超精密工件台系统中，作为工件台的关键子单元，提高它的控制精度对光刻机的发展有重要意义。
现有的超精密工件台系统一般采用粗微叠层结构，粗动台采用磁浮平面电机，固定在粗动台上的线圈作为平面电机动子，底部磁钢阵列作为平面电机定子。磁钢阵列的分布使得在整个运动范围内存在交替的磁场，这时叠加在上层的微动台电机将受到永磁阵列磁场的影响，使得在微动台的各自由度上的轨迹跟踪精度降低，从而影响微动台的运动性能。
发明内容
鉴于上述问题，本发明的目的是提供一种干扰磁场下电机正弦误差的出力补偿方法及装置，以解决目前在微动台的各自由度上的轨迹跟踪精度降低，从而影响微动台的运动性能等问题。
本发明提供的干扰磁场下电机正弦误差的出力补偿方法，包括：采集电机在匀速阶段的控制信号以及位移信号；基于控制信号和位移信号创建空间域正余弦信号，并将正余弦信号转换为对应的时域信号；根据时域信号创建补偿矩阵；根据补偿矩阵确定与补偿矩阵对应的补偿信号；将补偿信号叠加至控制信号内，以对电机进行位移误差补偿。
此外，优选的技术方案是，将补偿信号叠加至控制信号内后，再次采集电机的位移信号，并检测电机的运动误差是否在预设范围内；当运动误差在预设范围内时，表明位移误差补偿完成。
此外，优选的技术方案是，当运动误差超出预设范围时，增加对电机进行位移误差补偿的迭代次数，并重新创建空间域正余弦信。
此外，优选的技术方案是，采集电机在匀速阶段的控制信号包括：电机的加速度范围在±10m/s 2以内；电机的速度范围在±100mm/s以内。
此外，优选的技术方案是，空间域正余弦信号包括：
空间域正弦信号表示为：
Figure PCTCN2021079104-appb-000001
空间域余弦信号表示为：
Figure PCTCN2021079104-appb-000002
其中，p表示磁钢极距，x表示位移信号，k表示迭代次数，k＝1，2，3，...,n。
此外，优选的技术方案是，时域信号包括：
时域正弦信号表示为：
Figure PCTCN2021079104-appb-000003
时域余弦信号表示为：
Figure PCTCN2021079104-appb-000004
其中，a k(t)表示第k次迭代的时域正弦信号，b k(t)表示第k次迭代的时域余弦信号，p表示磁钢极距，x表示位移信号，t表示时间。
此外，优选的技术方案是，补偿矩阵的表示公式为：
M＝[a 1,b 1,a 2,b 2,...,a n,b n]
其中，a n表示第n次迭代的时域正弦信号，b n表示第n次迭代的时域余弦信号。
此外，优选的技术方案是，补偿信号的获取公式为：
Figure PCTCN2021079104-appb-000005
其中，F COMP表示补偿信号，θ表示补偿系数矩阵，θ＝(M TM) -1M Tf，f表示与电机连接的控制信号，M表示补偿矩阵，k表示迭代次数，k＝1，2，3，...,n，p表示磁钢极距，x表示位移信号。
此外，优选的技术方案是，预设范围为电机的误差峰峰值在±10nm以内。
根据本发明的另一方面，提供一种干扰磁场下电机正弦误差的出力补偿装置，包括磁钢阵列、微动台、设置在磁钢阵列和微动台之间的粗动台，以及设置在微动台上的Y向电机、X向电机和Z向电机；其中，微动台包括线圈电机，磁钢阵列用于提供驱动线圈电机运动的交替磁场，粗动台跟随微动台在磁钢阵列中运动；微动台与磁钢阵列相互作用，以控制Y向电机、X向电机和Z向电机的运动；并且，利用上述干扰磁场下电机正弦误差的出力补偿方法对微动台上的Y向电机、X向电机和Z向电机的输出进行自动补偿。
利用上述干扰磁场下电机正弦误差的出力补偿方法及装置，能够对误差波形的特征进行跟踪，并基于误差波形进行信号补偿，补偿信号可进行多次迭代修改正，能够实现对电磁扰动的可靠预测，进而实现对磁场扰动产生的误差进行有效补偿。
为了实现上述以及相关目的，本发明的一个或多个方面包括后面将详细说明的特征。下面的说明以及附图详细说明了本发明的某些示例性方面。然而，这些方面指示的仅仅是可使用本发明的原理的各种方式中的一些方式。此外，本发明旨在包括所有这些方面以及它们的等同物。
附图说明
通过参考以下结合附图的说明，并且随着对本发明的更全面理解，本发明的其它目的及结果将更加明白及易于理解。在附图中：
图1为根据本发明实施例的干扰磁场下电机正弦误差的出力补偿方法的流程图一；
图2为根据本发明实施例的干扰磁场下电机正弦误差的出力补偿方法的流程图二；
图3为根据本发明实施例的干扰磁场下电机正弦误差的出力补偿方法的控制结构图；
图4为根据本发明实施例的根据本发明实施例的干扰磁场下电机正弦误差的出力补偿装置结构示意图。
其中的附图标记包括：磁钢阵列1、粗动台2、微动台3、Y向电机4、X 向电机5、Z向电机6。
在所有附图中相同的标号指示相似或相应的特征或功能。
具体实施方式
在下面的描述中，出于说明的目的，为了提供对一个或多个实施例的全面理解，阐述了许多具体细节。然而，很明显，也可以在没有这些具体细节的情况下实现这些实施例。在其它例子中，为了便于描述一个或多个实施例，公知的结构和设备以方框图的形式示出。
为详细描述本发明的干扰磁场下电机正弦误差的出力补偿方法及装置，以下将结合附图对本发明的具体实施例进行详细描述。
图1和图2分别从不同角度示出了根据本发明实施例的干扰磁场下电机正弦误差的出力补偿方法的流程。
如图1和图2共同所示，本发明实施例的干扰磁场下电机正弦误差的出力补偿方法，包括以下步骤：
S110：采集电机在匀速阶段的控制信号以及位移信号。
在该步骤中，电机可以理解为微动台上的X向电机、Y向电机和Z向电机，控制信号由控制器产生，用于对微动台上的各电机进行控制，位移信号表示各电机在匀速运动阶段的输出位移。
由于在电机的加减速段的误差主要受轨迹跟踪影响，磁场干扰体现并不明显；而在匀速阶段，磁场干扰为电机出力误差的主要来源，故选取在低速或低加速度下进行轨迹跟踪实验，以对误差进行有效补偿。
在本发明的一个具体实施方式中，低速主要指电机的速度范围在±100mm/s以内，低加速度主要指电机的加速度范围在±10m/s 2以内，该速度或者加速度范围可根据具体的应用场景或者检测精度进行调整，并不限于上述具体数值范围。
S120：基于控制信号和位移信号创建空间域正余弦信号，并将正余弦信号转换为对应的时域信号。
作为具体示例，采集电机在匀速阶段的控制信号，记为f，采集电机的位移信息，记为x，设定迭代次数n＝1，据此建立空间正余弦信号如下所示：
空间域正弦信号表示为：
Figure PCTCN2021079104-appb-000006
空间域余弦信号表示为：
Figure PCTCN2021079104-appb-000007
其中，p表示磁钢极距，x表示位移信号，k表示迭代次数，k＝1，2，3，...,n，n表示自然数。
然后，将空间域正余弦信号转换为对应的时域信号，具体包括：
时域正弦信号表示为：
Figure PCTCN2021079104-appb-000008
时域余弦信号表示为：
Figure PCTCN2021079104-appb-000009
其中，a k(t)表示第k次迭代的时域正弦信号，b k(t)表示第k次迭代的时域余弦信号，p表示磁钢极距，x表示位移信号，t表示时间。
S130：根据时域信号创建补偿矩阵。
在上述两步骤的基础上创建补偿矩阵，补偿矩阵的表示公式为：
M＝[a 1,b 1,a 2,b 2,...,a n,b n]
其中，a n表示第n次迭代的时域正弦信号，b n表示第n次迭代的时域余弦信号。
S140：根据补偿矩阵确定与补偿矩阵对应的补偿信号。
补偿信号的获取公式为：
F COMP＝M·θ
可知，当M·θ＝f时，电机输出的正弦误差可以基本消除，为此可根据该公式求解系数矩阵θ，θ＝(M TM) -1M Tf，f表示控制信号(反馈加前馈的控制信号)并将求解的系数矩阵θ代入上述公式中，可获取最终的补偿信号公式为：
Figure PCTCN2021079104-appb-000010
其中，F COMP表示补偿信号，θ表示补偿系数矩阵，M表示补偿矩阵，k表示迭代次数，k＝1，2，3，...,n，p表示磁钢极距，x表示位移信号。
S150：将补偿信号叠加至控制信号内，以对电机进行位移误差补偿。
其中，再获取补偿信号后，可将该补偿信号叠加至控制信号内，通过叠加补偿信号后的控制信号再次控制电机，实现电机的位移误差补偿。
在本发明的一个具体实施方式中，将补偿信号叠加至控制信号内后，再次采集电机的位移信号，并检测电机的运动误差是否在预设范围内；当运动误差在预设范围内时，表明位移误差补偿完成。否则，表明误差补偿效果不佳，当运动误差不属于或超出预设范围时，增加对电机进行位移误差补偿的迭代次数，即令n＝n+1，重新创建空间域正余弦信，循环执行步骤S110至S150。
具体地，预设范围可设置为电机的误差峰峰值在±10nm以内，该数值也可根据检测精度或者要求进行调整。
图3示出了根据本发明实施例的干扰磁场下电机正弦误差的出力补偿方法的控制结构。
如图3所示，控制器用于产生控制电机的控制信号，通过控制信号控制微动台上的各电机，该图中所示对象为控制对象，也可理解为微动台，在进行信号补偿后，可通过测量系统对电机的出力或者位移情况进行测量，并将测量结果反馈至控制器，控制器根据检测结果对补偿信号进行调整，然后再次进行补偿，直至电机的位移误差控制在预设范围内。其中，测量系统可采用光栅尺、容栅尺、电涡流传感器、激光干涉仪等。
与上述干扰磁场下电机正弦误差的出力补偿方法相对应，本发明还提供一种干扰磁场下电机正弦误差的出力补偿装置。
图4示出了根据本发明实施例的干扰磁场下电机正弦误差的出力补偿装置的示意结构。
如图4所示，本发明实施例的干扰磁场下电机正弦误差的出力补偿装置，包括磁钢阵列1、微动台3、设置在磁钢阵列1和微动台3之间的粗动台2，以及设置在微动台3上的2个Y向电机4，2个X向电机5和4个Z向电机6；其中，微动台3包括线圈电机，线圈电机包括上下两层永磁磁钢，线圈位于两层磁钢夹层中，在磁场的作用下，通电线圈会长生洛伦兹力驱动微动台3运动。
其中，磁钢阵列1则用于提供驱动线圈电机运动的交替磁场，粗动台2跟随微动台3在磁钢阵列1中运动；微动台3与磁钢阵列1相互作用，以控制Y向电机4、X向电机5和Z向电机6的运动；并且，利用上述干扰磁场 下电机正弦误差的出力补偿方法对微动台3上的Y向电机4、X向电机5和Z向电机6的输出进行自动补偿。
换言之，当微动台3走轨迹运动时，由于其穿过磁钢阵列1磁场，使得微动台3的八个电机(永磁体)均受到外界磁场干扰。此时，粗动台2跟随微动台3在磁钢阵列1的磁场内来回运动，微动台电机的漏磁场与磁钢阵列磁场相互作用，使得微动台3的八个电机均受到位置相关的磁场扰动力，从而影响微动台3的六个自由度精密运动控制。由于，微动台3的控制误差呈现正弦规律变化，为抵消这种误差，可以在控制器输出端加入补偿力进行信号补偿。
利用上述根据本发明的干扰磁场下电机正弦误差的出力补偿方法及装置，通过对干扰力的有效拟合实现对微动台电机出力的自动补偿；另外，在补偿过程中，对补偿信号进行迭代修正，可实现对电磁扰动的可靠估计，能够精准的对磁场扰动产生的误差进行补偿，确保微动台的运动精度及所加工产品的质量。
如上参照附图以示例的方式描述根据本发明的干扰磁场下电机正弦误差的出力补偿方法及装置。但是，本领域技术人员应当理解，对于上述本发明所提出的干扰磁场下电机正弦误差的出力补偿方法及装置，还可以在不脱离本发明内容的基础上做出各种改进。因此，本发明的保护范围应当由所附的权利要求书的内容确定。

Claims (10)

  1. 一种干扰磁场下电机正弦误差的出力补偿方法，其特征在于，包括：
    采集电机在匀速阶段的控制信号以及位移信号；
    基于所述控制信号和所述位移信号创建空间域正余弦信号，并将所述正余弦信号转换为对应的时域信号；
    根据所述时域信号创建补偿矩阵；
    根据所述补偿矩阵确定与所述补偿矩阵对应的补偿信号；
    将所述补偿信号叠加至所述控制信号内，以对所述电机进行位移误差补偿。
  2. 如权利要求1所述的干扰磁场下电机正弦误差的出力补偿方法，其特征在于，
    将所述补偿信号叠加至所述控制信号内后，再次采集所述电机的位移信号，并检测所述电机的运动误差是否在预设范围内；
    当所述运动误差在所述预设范围内时，表明所述位移误差补偿完成。
  3. 如权利要求2所述的干扰磁场下电机正弦误差的出力补偿方法，其特征在于，
    当所述运动误差超出所述预设范围时，增加对所述电机进行位移误差补偿的迭代次数，并重新创建空间域正余弦信号。
  4. 如权利要求1所述的干扰磁场下电机正弦误差的出力补偿方法，其特征在于，所述采集电机在匀速阶段的控制信号包括：
    所述电机的加速度范围在±10m/s 2以内；
    所述电机的速度范围在±100mm/s以内。
  5. 如权利要求1所述的干扰磁场下电机正弦误差的出力补偿方法，其特征在于，所述空间域正余弦信号包括：
    空间域正弦信号：
    Figure PCTCN2021079104-appb-100001
    空间域余弦信号：
    Figure PCTCN2021079104-appb-100002
    其中，p表示磁钢极距，x表示位移信号，k表示迭代次数，k＝1，2，3，...,n。
  6. 如权利要求5所述的干扰磁场下电机正弦误差的出力补偿方法，其特征在于，所述时域信号包括：
    时域正弦信号：
    Figure PCTCN2021079104-appb-100003
    时域余弦信号：
    Figure PCTCN2021079104-appb-100004
    其中，a k(t)表示第k次迭代的时域正弦信号，b k(t)表示第k次迭代的时域余弦信号，p表示磁钢极距，x表示位移信号，t表示时间。
  7. 如权利要求6所述的干扰磁场下电机正弦误差的出力补偿方法，其特征在于，所述补偿矩阵的表示公式为：
    M＝[a 1,b 1,a 2,b 2,...,a n,b n]
    其中，a n表示第n次迭代的时域正弦信号，b n表示第n次迭代的时域余弦信号。
  8. 如权利要求7所述的干扰磁场下电机正弦误差的出力补偿方法，其特征在于，所述补偿信号的获取公式为：
    Figure PCTCN2021079104-appb-100005
    其中，F COMP表示补偿信号，θ表示补偿系数矩阵，θ＝(M TM) -1M Tf，f表示与所述电机连接的控制信号，M表示补偿矩阵，k表示迭代次数，k＝1，2，3，...,n，p表示磁钢极距，x表示位移信号。
  9. 如权利要求1所述的干扰磁场下电机正弦误差的出力补偿方法，其特征在于，
    所述预设范围为所述电机的误差峰峰值在±10nm以内。
  10. 一种干扰磁场下电机正弦误差的出力补偿装置，其特征在于，包括磁钢阵列、微动台、设置在所述磁钢阵列和所述微动台之间的粗动台，以及设置在所述微动台上的Y向电机、X向电机和Z向电机；其中，
    所述微动台包括线圈电机，所述磁钢阵列用于提供驱动所述线圈电机运动的交替磁场，所述粗动台跟随所述微动台在所述磁钢阵列中运动；
    所述微动台与所述磁钢阵列相互作用，以控制所述Y向电机、所述X向电机和所述Z向电机的运动；并且，
    利用如权利要求1至9任一项所述的干扰磁场下电机正弦误差的出力补偿方法对所述微动台上的Y向电机、X向电机和Z向电机的输出进行自动补偿。
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