WO2022014285A1 - Conductor connecting structure, and probe provided with said conductor connecting structure - Google Patents

Conductor connecting structure, and probe provided with said conductor connecting structure Download PDF

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Publication number
WO2022014285A1
WO2022014285A1 PCT/JP2021/023800 JP2021023800W WO2022014285A1 WO 2022014285 A1 WO2022014285 A1 WO 2022014285A1 JP 2021023800 W JP2021023800 W JP 2021023800W WO 2022014285 A1 WO2022014285 A1 WO 2022014285A1
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WO
WIPO (PCT)
Prior art keywords
conductor
probe
central
external
connection structure
Prior art date
Application number
PCT/JP2021/023800
Other languages
French (fr)
Japanese (ja)
Inventor
聖人 荒木
真一 剱崎
幸裕 北市
Original Assignee
株式会社村田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Priority to CN202180047100.8A priority Critical patent/CN115803969A/en
Priority to JP2022536212A priority patent/JP7243925B2/en
Publication of WO2022014285A1 publication Critical patent/WO2022014285A1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/62—Means for facilitating engagement or disengagement of coupling parts or for holding them in engagement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R24/00—Two-part coupling devices, or either of their cooperating parts, characterised by their overall structure
    • H01R24/38—Two-part coupling devices, or either of their cooperating parts, characterised by their overall structure having concentrically or coaxially arranged contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R4/00—Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation
    • H01R4/02—Soldered or welded connections

Definitions

  • the present invention relates to a conductor connection structure and a probe provided with the conductor connection structure.
  • Patent Document 1 discloses an inspection coaxial connector connected to the tip of a coaxial cable.
  • the central conductor and the outer conductor of the coaxial cable are electrically connected to the socket for the coaxial connector and connected to the inspection coaxial connector via the socket for the coaxial connector, respectively. Has been done.
  • Patent Document 1 describes that a coaxial cable is electrically connected to a socket for a coaxial connector, it does not specifically disclose what kind of structure the electrical connection has.
  • the current density is concentrated on the conductor surface due to the skin effect.
  • the current path has a return path. Complicates the current path. When the current path becomes complicated, unnecessary resonance occurs, which hinders accurate measurement of the electrical characteristics of the object to be measured.
  • the technical problem to be solved by the present invention is to provide a conductor connection structure for accurately measuring the electrical characteristics of the object to be measured and a probe having the conductor connection structure.
  • the conductor connection structure according to the present invention is A probe extending from the proximal end side to the distal end side having a measuring pin to which a coaxial cable in which a central conductor, a dielectric and an outer conductor are arranged coaxially is connected and electrically connected to the central conductor of the coaxial cable.
  • It is a conductor connection structure in A conductive outer cover member that covers the outer conductor with a gap, It is provided with a conductive external connection portion for fixing and electrically connecting the external conductor to the external cover member.
  • the external connection end, which is the distal end of the probe in the external connection is either flush with the external conductor end, which is the distal end of the probe in the external conductor, or the probe. It is characterized by being located on the tip side of.
  • the current path does not have a return path, unnecessary resonance is suppressed, so that the electrical characteristics of the object to be measured can be measured with high accuracy.
  • FIG. 3 is a cross-sectional view taken along the line III-III of the probe shown in FIG. It is an exploded perspective view of the probe shown in FIG. FIG. 3 is an enlarged cross-sectional view of a main part of the probe shown in FIG. It is an enlarged sectional view of the main part of the probe which concerns on 2nd Embodiment of this invention. It is an enlarged sectional view of the main part of the probe which concerns on 3rd Embodiment of this invention. It is an enlarged sectional view of the main part of the probe which concerns on 4th Embodiment of this invention.
  • FIG. 1 is a perspective view of the probe 1 according to the first embodiment of the present invention.
  • FIG. 2 is a top view of the probe 1 shown in FIG.
  • FIG. 3 is a cross-sectional view taken along the line III-III of probe 1 shown in FIG.
  • FIG. 4 is an exploded perspective view of the probe 1 shown in FIG.
  • FIG. 5 is an enlarged cross-sectional view of a main part of the probe 1 shown in FIG.
  • the probe 1 includes a barrel 10, a measuring pin 20, a first bushing 30, a second bushing 40, a socket 50, and a coaxial cable 70.
  • the probe 1 extends from the proximal end side A (that is, the one end side A) to the distal end side B (that is, the other end side B) in the extending direction of the probe 1 (in the X-axis direction in FIGS. 2 and 3).
  • the probe 1 measures the electrical characteristics of the connector (measured object) 2 by elastically contacting the connector terminal (measured terminal) 3 of the connector (measured object) 2, for example.
  • the barrel 10 has a barrel body 12 having a cylindrical shape extending in the X-axis direction, and a first accommodating portion 14 formed inside the barrel body 12.
  • the tip end side B of the barrel body 12 is opened by the tip through hole 15, and the measurement end portion 22 of the measurement pin 20 is inserted through the tip through hole 15.
  • the base end side of the barrel body 12 has a base end opening that is larger than the tip through hole 15, and the coaxial cable 70 is inserted through the base end opening.
  • the barrel 10 is a conductive material, such as a metallic material, such as phosphor bronze.
  • a first accommodating portion 14 is formed inside the barrel 10.
  • the first accommodating portion 14 accommodates a measuring pin 20, a first bushing 30, a second bushing 40, a socket 50, and a coaxial cable 70. Since the barrel 10 covers the outer conductor 76 while having an outer gap 16 with respect to the outer conductor 76 of the coaxial cable 70 described later, it acts as a conductive outer cover member.
  • the barrel 10 is formed with an external through hole 18 extending in the thickness direction of the barrel body 12.
  • the two external through holes 18 are arranged to face each other at an angle of 180 degrees. The arrangement and number of the external through holes 18 are not limited to this.
  • the external through hole 18 has an opening tip portion 19 on the tip end side B of the probe 1.
  • the measuring pin 20 is a rod-shaped (needle-shaped) electrode having a built-in spring and can be expanded and contracted, and is also called a contact probe, a spring pin, or a pogo pin.
  • the measuring pin 20 has a measuring end 22 on its tip side B and a connecting end 24 on its base end side.
  • the measuring pin 20 is a conductive material, for example, a metal material.
  • the first bushing 30 is arranged on the tip end side B of the barrel 10.
  • the first bushing 30 has a cylindrical shape and is locked to the tip through hole 15 of the barrel 10.
  • the first bushing 30 is an electrically insulating material, for example, a resin material.
  • the measurement end 22 of the measurement pin 20 is inserted into the first insertion hole of the first bushing 30. Through the first bushing 30, the measuring pin 20 is set in the barrel 10 in an electrically isolated state.
  • the second bushing 40 is arranged on the center side of the barrel 10.
  • the second bushing 40 is locked by a step portion formed in the central portion of the first accommodating portion 14 of the barrel 10.
  • the second bushing 40 has a cylindrical shape.
  • the second bushing 40 is an electrically insulating material, for example, a resin material.
  • the connection end 24 of the measuring pin 20 is inserted into the small diameter hole of the second insertion hole of the second bushing 40.
  • a socket 50 is inserted into the large-diameter hole of the second insertion hole of the second bushing 40.
  • the connection end 24 of the measuring pin 20 is in contact with the socket 50.
  • the measuring pin 20 is electrically connected to the socket 50 while being supported by the second bushing 40.
  • the socket 50 is arranged in the large diameter hole of the second insertion hole of the second bushing 40.
  • the socket 50 has a bottomed cylindrical shape.
  • the socket 50 is a conductive material, such as a metallic material, such as phosphor bronze. Since the socket 50 covers the central conductor 72 while having a central gap 56 with respect to the central conductor 72 of the coaxial cable 70 described later, it acts as a conductive center cover member.
  • a second accommodating portion 54 is formed inside the socket 50.
  • the socket 50 has a socket end 57 on the base end side A.
  • the socket end 57 serves as a center cover end.
  • the socket 50 is formed with a central through hole 58 extending in the thickness direction of the socket 50.
  • the two central through holes 58 are arranged to face each other at an angle of 180 degrees. The arrangement and number of the central through holes 58 are not limited to this.
  • the coaxial cable 70 has a conductive center conductor 72, a dielectric 74 covering the center conductor 72, an outer conductor 76 covering the dielectric 74, and an electrically insulating outer skin 78 covering the outer conductor 76.
  • the tip of the center conductor 72 is exposed from the dielectric 74.
  • the dielectric 74 has a dielectric end 75 at the distal end side B of the probe 1.
  • the outer conductor 76 has an outer conductor end 77 at the tip end side B of the probe 1.
  • the tip of the dielectric 74 including the dielectric end 75 projects from the outer conductor end 77 to the tip side B and is exposed from the outer conductor 76.
  • the tip of the outer conductor 76 including the outer conductor end 77 is exposed from the outer skin 78.
  • the dielectric end 75 of the dielectric 74 is locked by the base end portion of the second bushing 40.
  • the outer conductor end 77 is separated from the tip end side B of the center conductor 72 by the proximal end side A. Thereby, the short circuit prevention effect in the central conductor 72 and the outer conductor 76 can be enhanced.
  • the corner portion of the dielectric end 75 of the dielectric 74 is in contact with the edge portion of the second bushing 40 which is the end portion of the proximal end side A and has a tapered shape defining the socket insertion portion 44.
  • the loading area of the solder 61 and the loading area of the solder 64 can be partitioned, so that it is possible to prevent the solder 61 and the solder 64 from coming into contact with each other and short-circuiting.
  • an external gap 16 is formed between the outer peripheral surface of the conductor of the outer conductor 76 and the inner peripheral surface 13 of the barrel of the barrel body 12.
  • the tip of the center conductor 72 is inserted into and accommodated in the second accommodating portion 54 of the socket 50.
  • a central gap 56 is formed between the outer peripheral surface of the central conductor 72 of the central conductor 72 and the inner peripheral surface of the socket of the socket 50.
  • a central conductor connecting structure (conductor connecting structure) 7 is provided for the central conductor 72 of the coaxial cable 70, and an external conductor connecting structure (conductor connecting structure) 8 is provided for the outer conductor 76. Is provided.
  • the socket 50 that acts as a center cover member is configured to cover the center conductor 72 while having a center gap 56 with respect to the center conductor 72 in order to insert the tip end portion of the center conductor 72 into the socket insertion portion 44. ..
  • Solder 64 is arranged to fix and electrically connect the tip of the center conductor 72 to the socket 50. This facilitates fixing and electrical connection of the tip of the center conductor 72 to the socket 50.
  • the solder 64 acts as a central connecting portion and also as a central connecting member. The solder 64 is supplied from the central through hole 58 to fill the central gap 56. This makes it easy to supply the solder 64 to the central gap 56.
  • the central through hole 58 serves as a solder supply unit.
  • the central through hole 58 is, for example, a round through hole when viewed from the Z-axis direction.
  • the central through hole 58 is arranged on the base end side A, that is, on the side of the socket end 57.
  • the solder 64 supplied from the central through hole 58 fills at least the proximal end side A of the central gap 56.
  • the solder 64 disposed in the central gap 56 has a central connection end 65 on the base end side A.
  • the center connection end 65 of the solder 64 is located from the socket end 57 of the socket 50 to the proximal end side A, and is located between the socket end 57 and the dielectric end 75.
  • the center connection end 65 is flush with, for example, the socket end 57.
  • the center connection end 65 of the solder 64 is configured to be flush with the socket end 57 of the socket 50.
  • the current path from the center conductor 72 to the socket 50 is the center conductor outer peripheral surface 82 of the center conductor 72, the center connection end 65 of the solder 64, the socket end 57 of the socket 50, and the socket. It becomes the socket outer peripheral surface 51 of 50. Therefore, in the above-mentioned central conductor connection structure 7, since the current path does not have a return path, unnecessary resonance is suppressed, and the electrical characteristics of the object 2 to be measured can be measured accurately.
  • the barrel 10 that acts as an outer cover member is configured to cover the outer conductor 76 while having an outer gap 16 with respect to the outer conductor 76 in order to insert the coaxial cable 70 into the first accommodating portion 14.
  • Solder 61 is arranged to fix and electrically connect the barrel 10 to the outer conductor 76. This facilitates the fixation and electrical connection of the outer conductor 76 to the barrel 10.
  • the solder 61 works as an external connecting portion and also as an external connecting member.
  • the solder 61 is supplied from the external through hole 18 to fill the external gap 16. This makes it easy to supply the solder 61 to the external gap 16. Therefore, the external through hole 18 functions as a solder supply unit.
  • the external through hole 18 is, for example, a round through hole when viewed from the Z-axis direction.
  • the external through hole 18 is arranged on the tip end side B in the barrel main body 12.
  • the solder 61 supplied from the external through hole 18 fills at least the tip side B of the external gap 16.
  • the solder 61 disposed in the external gap 16 has an external connection end 62 on the tip end side B.
  • the outer connection end 62 of the solder 61 is located on the tip end side B from the outer conductor end 77 of the outer conductor 76, and is located between the outer conductor end 77 and the dielectric end 75. ..
  • the external connection end 62 is displaced toward the tip end side B with respect to the external conductor end 77, for example.
  • the outer conductor end 77 is located on the base end side A of the outer through hole 18 with respect to the opening tip portion 19 formed on the tip side B, and is at a position facing the outer through hole 18. As a result, the outer conductor end 77 is covered with the solder 61, and the external connection end 62 is displaced toward the tip side B from the outer conductor end 77, so that the formation of a return path can be prevented.
  • the outer connection end 62 of the solder 61 is configured to be located on the tip side B with respect to the outer conductor end 77 of the outer conductor 76.
  • the current path from the outer conductor 76 to the barrel 10 is the outer conductor inner peripheral surface 86 of the outer conductor 76, the outer connection end 62 of the solder 61, and the barrel inner peripheral surface of the barrel 10. It becomes 13. Therefore, in the above-mentioned external conductor connection structure 8, since the current path does not have a return path, unnecessary resonance is suppressed, and the electrical characteristics of the object 2 to be measured can be measured accurately.
  • the probe 1 shown in FIG. 6 has the same central conductor connection structure 7 as in the first embodiment, and the external connection end 62 of the solder 61 supplied from the external through hole 18 is connected to the external conductor end 77 of the external conductor 76. On the other hand, it has a central conductor connection structure 7 that is flush with each other.
  • an external through hole 18 is arranged on the tip side B.
  • the outer through hole 18 is arranged so that the opening tip portion 19 on the tip end side B is aligned with the outer conductor end 77 of the outer conductor 76.
  • the solder 61 supplied from the external through hole 18 fills at least the tip side B of the external gap 16.
  • the solder 61 disposed in the external gap 16 has an external connection end 62 on the tip end side B.
  • the external connection end 62 of the solder 61 is located from the outer conductor end 77 of the outer conductor 76 to the tip end side B, and is located between the outer conductor end 77 and the dielectric end 75. ..
  • the external connection end 62 is, for example, flush with respect to the external conductor end 77.
  • the current path from the outer conductor 76 to the barrel 10 is the outer conductor inner peripheral surface 86 of the outer conductor 76, the outer conductor end 77 of the outer conductor 76, and the outer connection end 62 of the solder 61. , And the barrel inner peripheral surface 13 of the barrel 10. Therefore, in the above-mentioned external conductor connection structure 8, since the current path does not have a return path, unnecessary resonance is suppressed, and the electrical characteristics of the object 2 to be measured can be measured accurately.
  • the probe 1 shown in FIG. 7 has an outer conductor connection structure 8 similar to that of the first embodiment, and the center connection end 65 of the solder 64 supplied from the center notch 59 is closer to the base end side A than the socket end 57. It has a misaligned center conductor connection structure 7.
  • the center notch 59 is arranged so as to be aligned with the socket end 57.
  • Solder 64 is arranged to fix and electrically connect the tip of the center conductor 72 to the socket 50.
  • the solder 64 acts as a central connecting portion and also as a central connecting member.
  • the central notch 59 has a shape such as a semicircle or an ellipse when viewed from the Z-axis direction, and extends in the thickness direction of the socket 50.
  • the central notch 59 serves as a solder supply unit.
  • the solder 64 supplied from the central notch 59 fills at least the proximal end side A of the central gap 56. This facilitates fixing and electrical connection of the tip of the center conductor 72 to the socket 50.
  • the solder 64 disposed in the central gap 56 has a central connection end 65 on the base end side A.
  • the center connection end 65 of the solder 64 is located from the socket end 57 of the socket 50 to the proximal end side A, and is located between the socket end 57 and the dielectric end 75.
  • the center connection end 65 is displaced from the socket end 57 to the base end side A, for example.
  • the current path from the center conductor 72 to the socket 50 is the center conductor outer peripheral surface 82 of the center conductor 72, the center connection end 65 of the solder 64, the socket end 57 of the socket 50, and It becomes the socket outer peripheral surface 51 of the socket 50. Therefore, in the above-mentioned central conductor connection structure 7, since the current path does not have a return path, unnecessary resonance is suppressed, and the electrical characteristics of the object 2 to be measured can be measured accurately.
  • the probe 1 shown in FIG. 8 has an outer conductor connection structure 8 similar to that of the second embodiment, and the center connection end 65 of the solder 64 supplied from the center notch 59 is flush with the socket end 57. It has a central conductor connection structure 7.
  • the central notch 59 is arranged so as to be aligned with the socket end 57.
  • the central notch 59 has a shape such as a semicircle or an ellipse when viewed from the Z-axis direction, and extends in the thickness direction of the socket 50.
  • the solder 64 supplied from the central notch 59 fills at least the proximal end side A of the central gap 56.
  • the solder 64 disposed in the central gap 56 has a central connection end 65 on the base end side A.
  • the central connection end 65 of the solder 64 is located from the socket end 57 of the socket 50 to the proximal end side A, and is located between the socket end 57 and the dielectric end 75.
  • the center connection end 65 is flush with, for example, the socket end 57.
  • the current path from the center conductor 72 to the socket 50 is the center conductor outer peripheral surface 82 of the center conductor 72, the center connection end 65 of the solder 64, the socket end 57 of the socket 50, and It becomes the socket outer peripheral surface 51 of the socket 50. Therefore, in the above-mentioned central conductor connection structure 7, since the current path does not have a return path, unnecessary resonance is suppressed, and the electrical characteristics of the object 2 to be measured can be measured accurately.
  • the probe 1 shown in FIG. 9 has an outer conductor connection structure 8 similar to that of the first embodiment, and also has a center conductor connection structure 7 in which the solder 64 fills the center gap 56.
  • the socket 50 is arranged so as to fill the central gap 56 without having the central through hole 58 or the central notch 59.
  • the solder 64 disposed in the central gap 56 has a central connection end 65 on the base end side A.
  • the center connection end 65 of the solder 64 is located from the socket end 57 of the socket 50 to the proximal end side A, and is located between the socket end 57 and the dielectric end 75.
  • the center connection end 65 is flush with, for example, the socket end 57.
  • the center connection end 65 of the solder 64 may be displaced from the socket end 57 of the socket 50 to the base end side A.
  • the current path from the center conductor 72 to the socket 50 is the center conductor outer peripheral surface 82 of the center conductor 72, the center connection end 65 of the solder 64, the socket end 57 of the socket 50, and It becomes the socket outer peripheral surface 51 of the socket 50. Therefore, in the above-mentioned central conductor connection structure 7, since the current path does not have a return path, unnecessary resonance is suppressed, and the electrical characteristics of the object 2 to be measured can be measured accurately.
  • the probe 1 shown in FIG. 10 has an outer conductor connection structure 8 similar to that of the second embodiment, and also has a center conductor connection structure 7 in which the solder 64 fills the center gap 56.
  • the socket 50 is arranged so as to fill the central gap 56 without having the central through hole 58 or the central notch 59.
  • the solder 64 disposed in the central gap 56 has a central connection end 65 on the base end side A.
  • the center connection end 65 of the solder 64 is located from the socket end 57 of the socket 50 to the proximal end side A, and is located between the socket end 57 and the dielectric end 75.
  • the center connection end 65 is displaced from the socket end 57 to the base end side A, for example.
  • the center connection end 65 of the solder 64 may be flush with the socket end 57 of the socket 50.
  • the probe 1 shown in FIG. 11 has the same central conductor connection structure 7 as in the first embodiment, and the outer conductor 76 of the coaxial cable 70 is fixed to the barrel 10 by the conductive fitting member 67 and is electrically operated. It has an outer conductor connection structure 8 to be connected.
  • a conductive fitting member 67 that works as an external connection portion and also works as an external connection member is fitted in the external gap 16.
  • the outer gap 16 is formed between the outer conductor inner peripheral surface 86 of the outer conductor 76 and the barrel inner peripheral surface 13 of the barrel body 12.
  • the conductive fitting member 67 is arranged so as to abut on the outer conductor end 77 of the outer conductor 76 and the barrel inner peripheral surface 13 of the barrel 10, respectively. This facilitates the fixation and electrical connection of the outer conductor 76 to the barrel 10.
  • the fitting member 67 is a conductive material, for example, a metallic material, for example, phosphor bronze.
  • the fitting member 67 has, for example, an annular shape, and has a contact end surface 68, a contact peripheral surface 69, a fitting inner peripheral surface 87, and an external connection end 88.
  • the contact end surface 68 is formed on the proximal end side A
  • the external connection end 88 is formed on the distal end side B.
  • the fitting member 67 is fitted between the outer conductor 76 of the coaxial cable 70 and the second bushing 40, and is press-fitted into the first accommodating portion 14. As a result, the contact end surface 68 abuts on the outer conductor end 77, and the contact peripheral surface 69 abuts on the barrel inner peripheral surface 13.
  • the outer conductor 76 of the coaxial cable 70 is fixed and electrically connected to the barrel 10 by the conductive fitting member 67.
  • the external connection end 88 of the fitting member 67 is located on the tip end side B from the outer conductor end 77 of the outer conductor 76, and is located between the outer conductor end 77 and the dielectric end 75.
  • the external connection end 88 is displaced toward the tip end side B with respect to the outer conductor end 77, for example.
  • the current path from the outer conductor 76 to the barrel 10 is the outer conductor inner peripheral surface 86 of the outer conductor 76, the fitting inner peripheral surface 87 of the fitting member 67, the outer connecting end 88, and the outer connecting end 88. , It becomes the barrel inner peripheral surface 13 of the barrel 10. Therefore, in the above-mentioned external conductor connection structure 8, since the current path does not have a return path, unnecessary resonance is suppressed, and the electrical characteristics of the object 2 to be measured can be measured accurately.
  • the contact end surface 68 is located on the proximal end side A of the external through hole 18 with respect to the opening tip portion 19 formed on the distal end side B, and is at a position facing the external through hole 18.
  • the position of the fitting member 67 can be visually recognized through the external through hole 18.
  • the solder 61 can be supplied from the external through hole 18 to electrically connect the external conductor 76 and the fitting member 67. This can reinforce the electrical connection.
  • the fitting member 67 may be configured to be integrated with the barrel 10.
  • the central through hole 58 is arranged on the proximal end side A.
  • the solder 64 supplied from the central through hole 58 fills at least the proximal end side A of the central gap 56.
  • the solder 64 disposed in the central gap 56 has a central connection end 65 on the base end side A.
  • the center connection end 65 of the solder 64 is located from the socket end 57 of the socket 50 to the proximal end side A, and is located between the socket end 57 and the dielectric end 75.
  • the center connection end 65 is flush with, for example, the socket end 57.
  • the current path from the center conductor 72 to the socket 50 is the center conductor outer peripheral surface 82 of the center conductor 72, the center connection end 65 of the solder 64, the socket end 57 of the socket 50, and It becomes the socket outer peripheral surface 51 of the socket 50. Therefore, in the above-mentioned central conductor connection structure 7, since the current path does not have a return path, unnecessary resonance is suppressed, and the electrical characteristics of the object 2 to be measured can be measured accurately.
  • the probe 1 shown in FIG. 12 has an outer conductor connection structure 8 similar to that of the seventh embodiment, and the solder 64 supplied from the center notch 59 fills the base end side A of the center gap 56 with the center conductor connection structure 7. Has.
  • the center notch 59 is arranged so as to be aligned with the socket end 57.
  • the central notch 59 has a shape such as a semicircle or an ellipse when viewed from the Z-axis direction, and extends in the thickness direction of the socket 50.
  • the socket end 57 is in contact with the dielectric end 75.
  • the solder 64 supplied from the central notch 59 fills at least the proximal end side A of the central gap 56.
  • the solder 64 disposed in the central gap 56 has a central connection end 65 on the base end side A.
  • the central connection end 65 of the solder 64 is located from the socket end 57 of the socket 50 to the proximal end side A, and is located between the socket end 57 and the dielectric end 75.
  • the center connection end 65 is flush with, for example, the socket end 57.
  • the current path from the center conductor 72 to the socket 50 is the center conductor outer peripheral surface 82 of the center conductor 72, the center connection end 65 of the solder 64, the socket end 57 of the socket 50, and It becomes the socket outer peripheral surface 51 of the socket 50. Therefore, in the above-mentioned central conductor connection structure 7, since the current path does not have a return path, unnecessary resonance is suppressed, and the electrical characteristics of the object 2 to be measured can be measured accurately.
  • the probe 1 shown in FIG. 13 has an outer conductor connection structure 8 similar to that of the seventh embodiment, and also has a center conductor connection structure 7 in which the solder 64 fills the center gap 56.
  • the socket 50 is arranged so as to fill the central gap 56 without the central through hole 58 or the central notch 59.
  • the socket end 57 is in contact with the dielectric end 75.
  • the solder 64 disposed in the central gap 56 has a central connection end 65 on the base end side A.
  • the center connection end 65 of the solder 64 is located from the socket end 57 of the socket 50 to the proximal end side A, and is located between the socket end 57 and the dielectric end 75.
  • the center connection end 65 is flush with, for example, the socket end 57.
  • the current path from the center conductor 72 to the socket 50 is the center conductor outer peripheral surface 82 of the center conductor 72, the center connection end 65 of the solder 64, the socket end 57 of the socket 50, and It becomes the socket outer peripheral surface 51 of the socket 50. Therefore, in the above-mentioned central conductor connection structure 7, since the current path does not have a return path, unnecessary resonance is suppressed, and the electrical characteristics of the object 2 to be measured can be measured accurately.
  • the probe 1 includes both the central conductor connection structure 7 and the outer conductor connection structure 8, but can include at least one of the center conductor connection structure 7 and the outer conductor connection structure 8.
  • the above embodiment is an example, and the central conductor connection structure 7 and the outer conductor connection structure 8 in the above embodiment can be appropriately combined.
  • the external connection portions 61 and 67 are separate members from the external cover member 10. As a result, the external connection ends 62 and 88 can be positioned with high accuracy. However, the external connection portion can be a part of the external cover member 10.
  • the outer cover member 10 has, as an external connecting portion,, for example, an external protruding portion that projects toward the external conductor 76 and presses against the external conductor 76 at a location corresponding to the external through hole 18. Such an external protrusion is formed by caulking. As a result, the external protrusion is joined to the external conductor 76 and is electrically connected to the external conductor 76.
  • the external protrusion has, for example, a circular or rectangular shape when viewed from the Z-axis direction, and has a rectangular cross section.
  • the external protrusion has an external connection end on the other end side (tip side) B.
  • the external connection end of the external protrusion is located on the other end side (tip side) B from the external conductor end 77.
  • the external connection end of the external protrusion is displaced toward the other end side (tip side) B from the external conductor end 77, or is a surface with respect to the external conductor end 77, similarly to the external connection ends 62 and 88 described above. It is one.
  • the central connection portion 64 is a member separate from the central cover member 50.
  • the center connection end 65 can be positioned with high accuracy.
  • the central connection portion 64 can be a part of the central cover member 50.
  • the central cover member 50 has, for example, a central protruding portion that projects toward the central conductor 72 and presses against the central conductor 72 at a position corresponding to the central through hole 58 or the central notch 59.
  • Such a central protrusion is formed by caulking.
  • the central protrusion is joined to the central conductor 72 and is electrically connected to the central conductor 72.
  • the central protrusion has, for example, a circular or rectangular shape when viewed from the Z-axis direction, and has a rectangular cross section.
  • the central protrusion has a central connection end on the proximal end side A.
  • the central connection end of the central protrusion is located on the base end side A from the central cover end 57.
  • the central connection end of the central protrusion is displaced toward the proximal end side A from the central cover end 57 or is flush with the central cover end 57, similarly to the central connection end 65 described above.
  • the shapes of the central through hole 58, the central notch 59, and the external through hole 18 that act as solder feeders are exemplary and, when viewed from the Z-axis direction, are, for example, square, rectangular, trapezoidal, parallelogram, oval, egg. It can have various shapes such as shape, semi-oval, and semi-oval.
  • the solder 64 may be present in the central through hole 58 and the central notch 59, and the solder 61 may be present in the external through hole 18.
  • the tip of the central conductor 72 protrudes from the dielectric 74
  • the tip of the dielectric 74 protrudes from the outer conductor 76
  • the tip of the outer conductor 76 protrudes from the outer skin 78. ing.
  • the short circuit prevention effect in the central conductor 72 and the outer conductor 76 can be enhanced.
  • the conductor connection structure 8 is Base end side A having a measuring pin 20 to which a coaxial cable 70 in which a central conductor 72, a dielectric 74 and an outer conductor 76 are coaxially arranged is connected, and which is electrically connected to the central conductor 72 of the coaxial cable 70.
  • the conductor connection structure 8 in the probe 1 extending from the tip side B to the tip side B.
  • a conductive outer cover member 10 that covers the outer conductor 76 while having a gap 16.
  • a conductive external connecting portion 61, 67 for fixing and electrically connecting the external conductor 76 to the external cover member 10 is provided.
  • the external connection ends 62, 88 which are the ends of the tip side B of the probe 1 in the external connection portions 61, 67, are relative to the outer conductor end 77, which is the end of the tip side B of the probe 1 in the outer conductor 76. , It is located flush with each other, or is located on the distal end side B of the probe 1.
  • the external connection ends 62, 88 are located on the other end side (tip side) B from the outer conductor end 77, which means that the external connection ends 62, 88 are on the other end side (tip side) of the outer conductor end 77. ) It means that it is located offset from B or is flush with respect to the outer conductor end 77.
  • the external connection ends 62, 88 are located between the dielectric end 75, which is the end of the tip end side B of the probe 1 in the dielectric 74, and the external conductor end 77.
  • the short circuit prevention effect of the central conductor 72 and the outer conductor 76 can be enhanced.
  • the outer cover member 10 has an outer through hole 18 extending in the thickness direction thereof.
  • the outer conductor end 77 is located on the proximal end side A of the probe 1 with respect to the opening tip 19 formed on the distal end side B of the probe 1 in the external through hole 18, and faces the outer through hole 18. Is in a position to do.
  • the position of the external conductor end 77 can be confirmed through the external through hole 18, and it can be confirmed whether or not the external conductor 76 and the external connecting portions 61 and 67 are electrically connected.
  • the external connection portion is solder 61, and is The external through hole 18 serves as a solder supply unit for supplying the solder 61.
  • the external connection portion 61 is a fitting member 67 that is fitted into the gap 16.
  • the outer conductor end 77 is separated from the distal end side B of the probe 1 in the central conductor 72 to the proximal end side A of the probe 1.
  • the short circuit prevention effect of the central conductor 72 and the outer conductor 76 can be enhanced.
  • the object 2 to be measured measured by the probe 1 is the connector 2.
  • the electrical characteristics of the connector 2 can be measured with high accuracy.
  • the probe 1 according to another aspect of the present invention is It is characterized by including the conductor connection structure 8 described above.
  • the conductor connection structure 7 is Base end side A having a measuring pin 20 to which a coaxial cable 70 in which a central conductor 72, a dielectric 74 and an outer conductor 76 are coaxially arranged is connected, and which is electrically connected to the central conductor 72 of the coaxial cable 70.
  • the conductor connection structure 7 in the probe 1 extending from the tip side B to the tip side B.
  • a conductive center cover member 50 that covers the center conductor 72 while having a gap 56,
  • a conductive center connecting portion 64 for fixing and electrically connecting the center conductor 72 to the center cover member 50 is provided.
  • the central connection end 65 which is the end of the proximal end side A of the probe 1 in the central connection portion 64, is relative to the central cover end 57, which is the end of the proximal end side A of the probe 1 in the central cover member 50. It is located flush with each other or on the proximal end side A of the probe 1.
  • the center connection end 65 is located on the base end side A from the center cover end 57 means that the center connection end 65 is displaced from the center cover end 57 to the base end side A, or the center cover end. It means that it is flush with 57.
  • the center connection end 65 is located between the dielectric end 75, which is the end of the tip end side B of the probe 1 in the dielectric 74, and the center cover end 57.
  • the short circuit prevention effect of the central conductor 72 and the outer conductor 76 can be enhanced.
  • the central cover member has a central through hole 58 or a central notch 59 extending in the thickness direction of the central cover member 50.
  • the central connection portion 64 is supplied through the central through hole 58 or the central notch 59.
  • the central connection portion 64 is a solder 64.
  • the outer conductor end 77 which is the end of the distal end side B of the probe 1 in the outer conductor 76, is separated from the distal end side B of the probe 1 in the central conductor 72 with respect to the proximal end side A of the probe 1. There is.
  • the short circuit prevention effect of the central conductor 72 and the outer conductor 76 can be enhanced.
  • the object 2 to be measured measured by the probe 1 is the connector 2.
  • the electrical characteristics of the connector 2 can be measured with high accuracy.
  • the probe 1 according to another aspect of the present invention is It is characterized by including the conductor connection structure 7 described above.
  • Probe 2 Connector (measured object) 3: Connector terminal (measured terminal) 7: Center conductor connection structure (conductor connection structure) 8: External conductor connection structure (conductor connection structure) 10: Barrel (external cover member) 12: Barrel body 13: Barrel inner peripheral surface 14: First accommodating part 15: Tip through hole 16: External gap (gap) 18: External through hole (solder supply part) 19: Opening tip 20: Measuring pin 22: Measuring end 24: Connection end 30: First bushing 40: Second bushing 44: Socket insertion part 50: Socket (center cover member) 51: Socket outer peripheral surface 54: Second accommodating part 56: Center gap (gap) 57: Socket end (center cover end) 58: Central through hole (solder supply part) 59: Central notch (solder supply section) 61: Solder (external connection part, external connection member) 62: External connection end 64: Solder (center connection part, center connection member) 65: Center connection end end

Abstract

Provided is a conductor connecting structure for accurately measuring an electrical property of an object being measured. A conductor connecting structure 8 of a probe 1 which extends from a base end side A to a tip end side B, to which a coaxial cable 70 comprising a central conductor 72, a dielectric 74 and an outer conductor 76 that are arranged coaxially is connected, and which has a measuring pin 20 that is electrically connected to the central conductor of the coaxial cable, is provided with an electrically conductive outer cover member 10 which covers the outer conductor across a gap 16, and an electrically conductive outer connecting portion 61, 67 which fixes and electrically connects the outer conductor to the outer cover member, wherein an outer connecting end 62, 88, which is the end of the outer connecting portion on the probe tip end side, is positioned flush with an outer conductor end 77, which is the end of the outer conductor on the probe tip end side, or is positioned on the probe tip end side of the outer conductor end 77.

Description

導体接続構造および該導体接続構造を備えるプローブA conductor connection structure and a probe having the conductor connection structure
　この発明は、導体接続構造および該導体接続構造を備えるプローブに関する。 The present invention relates to a conductor connection structure and a probe provided with the conductor connection structure.
　例えば、特許文献１は、同軸ケーブルの先端に接続される検査用同軸コネクタを開示する。特許文献１の検査用同軸コネクタでは、同軸ケーブルの中心導体および外部導体が、それぞれ、同軸コネクタ用のソケットに電気的に接続されるとともに、同軸コネクタ用のソケットを介して検査用同軸コネクタに接続されている。 For example, Patent Document 1 discloses an inspection coaxial connector connected to the tip of a coaxial cable. In the inspection coaxial connector of Patent Document 1, the central conductor and the outer conductor of the coaxial cable are electrically connected to the socket for the coaxial connector and connected to the inspection coaxial connector via the socket for the coaxial connector, respectively. Has been done.
特開２０１４－１２３４８２号公報Japanese Unexamined Patent Publication No. 2014-123482
　特許文献１では、同軸ケーブルが同軸コネクタ用のソケットに電気的に接続されると記載されているものの、電気的接続がどのような構造であるかについて具体的に開示されていない。 Although Patent Document 1 describes that a coaxial cable is electrically connected to a socket for a coaxial connector, it does not specifically disclose what kind of structure the electrical connection has.
　ところで、導体を流れる信号が、マイクロ波やミリ波のような高周波の帯域になると、表皮効果により電流密度が導体表面に集中する。導体と、導体に対して隙間を有しながら導体を覆う導電性のカバー部材とを導電性の接続部材で接続する場合、接続部材の位置が適切ではないと、電流経路が戻り経路を有することによって電流経路が複雑になる。電流経路が複雑になると不要な共振が発生することによって、被測定物の電気特性を精度良く測定することが妨げられる。 By the way, when the signal flowing through the conductor is in the high frequency band such as microwaves and millimeter waves, the current density is concentrated on the conductor surface due to the skin effect. When connecting a conductor and a conductive cover member that covers the conductor with a gap with respect to the conductor with a conductive connecting member, if the position of the connecting member is not appropriate, the current path has a return path. Complicates the current path. When the current path becomes complicated, unnecessary resonance occurs, which hinders accurate measurement of the electrical characteristics of the object to be measured.
　したがって、この発明の解決すべき技術的課題は、被測定物の電気特性を精度良く測定する導体接続構造および該導体接続構造を備えるプローブを提供することである。 Therefore, the technical problem to be solved by the present invention is to provide a conductor connection structure for accurately measuring the electrical characteristics of the object to be measured and a probe having the conductor connection structure.
　上記技術的課題を解決するために、この発明によれば、以下の導体接続構造が提供される。 In order to solve the above technical problems, according to the present invention, the following conductor connection structure is provided.
　すなわち、この発明に係る導体接続構造は、
　中心導体、誘電体および外部導体が同軸に配置された同軸ケーブルが接続され、前記同軸ケーブルの前記中心導体に電気的に接続される測定ピンを有する、基端側から先端側に延在するプローブにおける導体接続構造であって、
　前記外部導体に対して隙間を有しながら覆う導電性の外部カバー部材と、
　前記外部導体を前記外部カバー部材に対して固定し且つ電気的に接続する導電性の外部接続部とを備え、
　前記外部接続部における前記プローブの先端側の端である外部接続端は、前記外部導体における前記プローブの先端側の端である外部導体端に対して、面一に位置するか、または、前記プローブの先端側に位置することを特徴とする。 That is, the conductor connection structure according to the present invention is
A probe extending from the proximal end side to the distal end side having a measuring pin to which a coaxial cable in which a central conductor, a dielectric and an outer conductor are arranged coaxially is connected and electrically connected to the central conductor of the coaxial cable. It is a conductor connection structure in
A conductive outer cover member that covers the outer conductor with a gap,
It is provided with a conductive external connection portion for fixing and electrically connecting the external conductor to the external cover member.
The external connection end, which is the distal end of the probe in the external connection, is either flush with the external conductor end, which is the distal end of the probe in the external conductor, or the probe. It is characterized by being located on the tip side of.
　この発明によれば、電流経路が戻り経路を有さないことによって、不要な共振が抑制されるので、被測定物の電気特性を精度良く測定できる。 According to the present invention, since the current path does not have a return path, unnecessary resonance is suppressed, so that the electrical characteristics of the object to be measured can be measured with high accuracy.
この発明の第１実施形態に係るプローブの斜視図である。It is a perspective view of the probe which concerns on 1st Embodiment of this invention. 図１に示したプローブの上面図である。It is a top view of the probe shown in FIG. 図２に示したプローブのIII－III線に沿った断面図である。FIG. 3 is a cross-sectional view taken along the line III-III of the probe shown in FIG. 図１に示したプローブの分解斜視図である。It is an exploded perspective view of the probe shown in FIG. 図３に示したプローブの要部拡大断面図である。FIG. 3 is an enlarged cross-sectional view of a main part of the probe shown in FIG. この発明の第２実施形態に係るプローブの要部拡大断面図である。It is an enlarged sectional view of the main part of the probe which concerns on 2nd Embodiment of this invention. この発明の第３実施形態に係るプローブの要部拡大断面図である。It is an enlarged sectional view of the main part of the probe which concerns on 3rd Embodiment of this invention. この発明の第４実施形態に係るプローブの要部拡大断面図である。It is an enlarged sectional view of the main part of the probe which concerns on 4th Embodiment of this invention. この発明の第５実施形態に係るプローブの要部拡大断面図である。It is an enlarged sectional view of the main part of the probe which concerns on 5th Embodiment of this invention. この発明の第６実施形態に係るプローブの要部拡大断面図である。It is an enlarged sectional view of the main part of the probe which concerns on 6th Embodiment of this invention. この発明の第７実施形態に係るプローブの要部拡大断面図である。It is an enlarged sectional view of the main part of the probe which concerns on 7th Embodiment of this invention. この発明の第８実施形態に係るプローブの要部拡大断面図である。It is an enlarged sectional view of the main part of the probe which concerns on 8th Embodiment of this invention. この発明の第９実施形態に係るプローブの要部拡大断面図である。It is an enlarged sectional view of the main part of the probe which concerns on 9th Embodiment of this invention.
　以下、この発明に係る、導体接続構造７，８および該導体接続構造７，８を備えるプローブ１の実施形態について、図面を参照しながら説明する。 Hereinafter, an embodiment of the probe 1 having the conductor connection structures 7 and 8 and the conductor connection structures 7 and 8 according to the present invention will be described with reference to the drawings.
　〔第１実施形態〕
　図１～図５を参照しながら、第１実施形態に係るプローブ１を説明する。図１は、この発明の第１実施形態に係るプローブ１の斜視図である。図２は、図１に示したプローブ１の上面図である。図３は、図２に示したプローブ１のIII－III線に沿った断面図である。図４は、図１に示したプローブ１の分解斜視図である。図５は、図３に示したプローブ１の要部拡大断面図である。 [First Embodiment]
The probe 1 according to the first embodiment will be described with reference to FIGS. 1 to 5. FIG. 1 is a perspective view of the probe 1 according to the first embodiment of the present invention. FIG. 2 is a top view of the probe 1 shown in FIG. FIG. 3 is a cross-sectional view taken along the line III-III of probe 1 shown in FIG. FIG. 4 is an exploded perspective view of the probe 1 shown in FIG. FIG. 5 is an enlarged cross-sectional view of a main part of the probe 1 shown in FIG.
　図１～図４に示すように、プローブ１は、バレル１０と、測定ピン２０と、第１ブッシング３０と、第２ブッシング４０と、ソケット５０と、同軸ケーブル７０とを備える。プローブ１は、基端側Ａ（すなわち一端側Ａ）から先端側Ｂ（すなわち他端側Ｂ）に、プローブ１の延在方向（図２および図３ではＸ軸方向）に延在する。プローブ１は、例えば、コネクタ（被測定物）２のコネクタ端子（被測定端子）３に対して弾性的に当接することによって、コネクタ（被測定物）２の電気特性を測定する。 As shown in FIGS. 1 to 4, the probe 1 includes a barrel 10, a measuring pin 20, a first bushing 30, a second bushing 40, a socket 50, and a coaxial cable 70. The probe 1 extends from the proximal end side A (that is, the one end side A) to the distal end side B (that is, the other end side B) in the extending direction of the probe 1 (in the X-axis direction in FIGS. 2 and 3). The probe 1 measures the electrical characteristics of the connector (measured object) 2 by elastically contacting the connector terminal (measured terminal) 3 of the connector (measured object) 2, for example.
　バレル１０は、Ｘ軸方向に延びる円筒形状を有するバレル本体１２と、バレル本体１２の内部に形成される第１収容部１４とを有する。バレル本体１２の先端側Ｂは、先端貫通孔１５によって開口しており、先端貫通孔１５には測定ピン２０の測定端部２２が挿通される。バレル本体１２の基端側は、先端貫通孔１５よりも大きく開口した基端開口を有しており、基端開口には同軸ケーブル７０が挿通される。バレル１０は、導電性材料、例えば金属材料であり、例えばリン青銅である。 The barrel 10 has a barrel body 12 having a cylindrical shape extending in the X-axis direction, and a first accommodating portion 14 formed inside the barrel body 12. The tip end side B of the barrel body 12 is opened by the tip through hole 15, and the measurement end portion 22 of the measurement pin 20 is inserted through the tip through hole 15. The base end side of the barrel body 12 has a base end opening that is larger than the tip through hole 15, and the coaxial cable 70 is inserted through the base end opening. The barrel 10 is a conductive material, such as a metallic material, such as phosphor bronze.
　バレル１０の内部には、第１収容部１４が形成される。第１収容部１４には、測定ピン２０、第１ブッシング３０、第２ブッシング４０、ソケット５０および同軸ケーブル７０が収容される。バレル１０は、後述する同軸ケーブル７０の外部導体７６に対して外部隙間１６を有しながら外部導体７６を覆うので、導電性の外部カバー部材として働く。バレル１０には、バレル本体１２の厚み方向に延在する外部貫通孔１８が形成されている。例えば、２つの外部貫通孔１８が、１８０度の角度で対向配置される。外部貫通孔１８の配置や個数は、これに限定されるものではない。外部貫通孔１８は、プローブ１の先端側Ｂにおいて、開口先端部１９を有する。 A first accommodating portion 14 is formed inside the barrel 10. The first accommodating portion 14 accommodates a measuring pin 20, a first bushing 30, a second bushing 40, a socket 50, and a coaxial cable 70. Since the barrel 10 covers the outer conductor 76 while having an outer gap 16 with respect to the outer conductor 76 of the coaxial cable 70 described later, it acts as a conductive outer cover member. The barrel 10 is formed with an external through hole 18 extending in the thickness direction of the barrel body 12. For example, the two external through holes 18 are arranged to face each other at an angle of 180 degrees. The arrangement and number of the external through holes 18 are not limited to this. The external through hole 18 has an opening tip portion 19 on the tip end side B of the probe 1.
　測定ピン２０は、バネが内蔵されていて伸縮可能な棒状(針状)の電極であり、コンタクトプローブ、スプリングピンまたはポゴピンとも呼ばれる。測定ピン２０は、その先端側Ｂに測定端部２２を有するとともに、その基端側に接続端部２４を有する。測定ピン２０は、導電性材料、例えば金属材料である。 The measuring pin 20 is a rod-shaped (needle-shaped) electrode having a built-in spring and can be expanded and contracted, and is also called a contact probe, a spring pin, or a pogo pin. The measuring pin 20 has a measuring end 22 on its tip side B and a connecting end 24 on its base end side. The measuring pin 20 is a conductive material, for example, a metal material.
　第１ブッシング３０は、バレル１０の先端側Ｂに配設される。第１ブッシング３０は、円筒形状を有し、バレル１０の先端貫通孔１５に係止される。第１ブッシング３０は、電気絶縁性材料、例えば樹脂材料である。第１ブッシング３０の第１挿入孔には、測定ピン２０の測定端部２２が挿通される。第１ブッシング３０を介することにより、測定ピン２０は、電気的に絶縁された状態でバレル１０にセットされる。 The first bushing 30 is arranged on the tip end side B of the barrel 10. The first bushing 30 has a cylindrical shape and is locked to the tip through hole 15 of the barrel 10. The first bushing 30 is an electrically insulating material, for example, a resin material. The measurement end 22 of the measurement pin 20 is inserted into the first insertion hole of the first bushing 30. Through the first bushing 30, the measuring pin 20 is set in the barrel 10 in an electrically isolated state.
　第２ブッシング４０は、バレル１０の中央側に配設される。第２ブッシング４０は、バレル１０の第１収容部１４の中央部に形成された段差部によって係止される。第２ブッシング４０は、円筒形状を有する。第２ブッシング４０は、電気絶縁性材料、例えば樹脂材料である。第２ブッシング４０の第２挿入孔の小径孔には、測定ピン２０の接続端部２４が挿通される。第２ブッシング４０の第２挿入孔の大径孔には、ソケット５０が挿通される。測定ピン２０の接続端部２４がソケット５０に接触している。測定ピン２０は、第２ブッシング４０に支持された状態でソケット５０に電気的に接続される。 The second bushing 40 is arranged on the center side of the barrel 10. The second bushing 40 is locked by a step portion formed in the central portion of the first accommodating portion 14 of the barrel 10. The second bushing 40 has a cylindrical shape. The second bushing 40 is an electrically insulating material, for example, a resin material. The connection end 24 of the measuring pin 20 is inserted into the small diameter hole of the second insertion hole of the second bushing 40. A socket 50 is inserted into the large-diameter hole of the second insertion hole of the second bushing 40. The connection end 24 of the measuring pin 20 is in contact with the socket 50. The measuring pin 20 is electrically connected to the socket 50 while being supported by the second bushing 40.
　ソケット５０は、第２ブッシング４０の第２挿入孔の大径孔に配設される。ソケット５０は、有底円筒形状を有する。ソケット５０は、導電性材料、例えば金属材料であり、例えばリン青銅である。ソケット５０は、後述する同軸ケーブル７０の中心導体７２に対して中心隙間５６を有しながら中心導体７２を覆うので、導電性の中心カバー部材として働く。ソケット５０の内部には、第２収容部５４が形成されている。ソケット５０は、基端側Ａに、ソケット端５７を有する。ソケット端５７は、中心カバー端として働く。ソケット５０には、ソケット５０の厚み方向に延在する中心貫通孔５８が形成されている。例えば、２つの中心貫通孔５８が、１８０度の角度で対向配置される。中心貫通孔５８の配置や個数は、これに限定されるものではない。 The socket 50 is arranged in the large diameter hole of the second insertion hole of the second bushing 40. The socket 50 has a bottomed cylindrical shape. The socket 50 is a conductive material, such as a metallic material, such as phosphor bronze. Since the socket 50 covers the central conductor 72 while having a central gap 56 with respect to the central conductor 72 of the coaxial cable 70 described later, it acts as a conductive center cover member. A second accommodating portion 54 is formed inside the socket 50. The socket 50 has a socket end 57 on the base end side A. The socket end 57 serves as a center cover end. The socket 50 is formed with a central through hole 58 extending in the thickness direction of the socket 50. For example, the two central through holes 58 are arranged to face each other at an angle of 180 degrees. The arrangement and number of the central through holes 58 are not limited to this.
　同軸ケーブル７０は、導電性の中心導体７２と、中心導体７２を覆う誘電体７４と、誘電体７４を覆う外部導体７６と、外部導体７６を覆う電気絶縁性の外皮７８とを有する。中心導体７２の先端部は、誘電体７４から露出している。誘電体７４は、プローブ１の先端側Ｂにおいて、誘電端７５を有する。外部導体７６は、プローブ１の先端側Ｂにおいて、外部導体端７７を有する。誘電端７５を含む誘電体７４の先端部は、外部導体端７７から先端側Ｂに突出するとともに外部導体７６から露出している。外部導体端７７を含む外部導体７６の先端部は、外皮７８から露出している。外皮７８を含む同軸ケーブル７０が、バレル１０の第１収容部１４に挿入されると、誘電体７４の誘電端７５は、第２ブッシング４０の基端部によって係止される。外部導体端７７が、中心導体７２の先端側Ｂに対して、基端側Ａに離間している。これにより、中心導体７２および外部導体７６における短絡防止効果を高めることができる。 The coaxial cable 70 has a conductive center conductor 72, a dielectric 74 covering the center conductor 72, an outer conductor 76 covering the dielectric 74, and an electrically insulating outer skin 78 covering the outer conductor 76. The tip of the center conductor 72 is exposed from the dielectric 74. The dielectric 74 has a dielectric end 75 at the distal end side B of the probe 1. The outer conductor 76 has an outer conductor end 77 at the tip end side B of the probe 1. The tip of the dielectric 74 including the dielectric end 75 projects from the outer conductor end 77 to the tip side B and is exposed from the outer conductor 76. The tip of the outer conductor 76 including the outer conductor end 77 is exposed from the outer skin 78. When the coaxial cable 70 including the outer skin 78 is inserted into the first accommodating portion 14 of the barrel 10, the dielectric end 75 of the dielectric 74 is locked by the base end portion of the second bushing 40. The outer conductor end 77 is separated from the tip end side B of the center conductor 72 by the proximal end side A. Thereby, the short circuit prevention effect in the central conductor 72 and the outer conductor 76 can be enhanced.
　誘電体７４の誘電端７５のコーナー部は、第２ブッシング４０において基端側Ａの端部であってソケット挿入部４４を画定するテーパー形状を有する縁部に当接している。これにより、ハンダ６１の装填領域とハンダ６４の装填領域とを仕切ることができるので、ハンダ６１およびハンダ６４が接触して短絡することを防止できる。 The corner portion of the dielectric end 75 of the dielectric 74 is in contact with the edge portion of the second bushing 40 which is the end portion of the proximal end side A and has a tapered shape defining the socket insertion portion 44. As a result, the loading area of the solder 61 and the loading area of the solder 64 can be partitioned, so that it is possible to prevent the solder 61 and the solder 64 from coming into contact with each other and short-circuiting.
　同軸ケーブル７０が、バレル１０の第１収容部１４に挿入されるとき、外部導体７６の導体外周面とバレル本体１２のバレル内周面１３との間には、外部隙間１６が形成される。中心導体７２の先端部が、ソケット５０の第２収容部５４に挿入されて収容される。このとき、中心導体７２の中心導体外周面８２とソケット５０のソケット内周面との間には、中心隙間５６が形成される。 When the coaxial cable 70 is inserted into the first accommodating portion 14 of the barrel 10, an external gap 16 is formed between the outer peripheral surface of the conductor of the outer conductor 76 and the inner peripheral surface 13 of the barrel of the barrel body 12. The tip of the center conductor 72 is inserted into and accommodated in the second accommodating portion 54 of the socket 50. At this time, a central gap 56 is formed between the outer peripheral surface of the central conductor 72 of the central conductor 72 and the inner peripheral surface of the socket of the socket 50.
　図５を参照しながら、第１実施形態に係るプローブ１の導体接続構造７，８を説明する。 The conductor connection structures 7 and 8 of the probe 1 according to the first embodiment will be described with reference to FIG.
　図５に示すように、同軸ケーブル７０の中心導体７２に対して中心導体接続構造（導体接続構造）７が設けられているとともに、外部導体７６に対して外部導体接続構造（導体接続構造）８が設けられている。 As shown in FIG. 5, a central conductor connecting structure (conductor connecting structure) 7 is provided for the central conductor 72 of the coaxial cable 70, and an external conductor connecting structure (conductor connecting structure) 8 is provided for the outer conductor 76. Is provided.
　まず、中心導体接続構造（導体接続構造）７を説明する。中心カバー部材として働くソケット５０は、中心導体７２の先端部をソケット挿入部４４に挿入するために、中心導体７２に対して中心隙間５６を有しながら中心導体７２を覆うように構成されている。ソケット５０に対して中心導体７２の先端部を固定し且つ電気的に接続するために、ハンダ６４が配設されている。これにより、ソケット５０に対する中心導体７２の先端部の固定および電気的な接続が容易である。ハンダ６４は、中心接続部として働くとともに中心接続部材として働く。ハンダ６４は、中心貫通孔５８から供給されて、中心隙間５６を埋める。これにより、中心隙間５６へのハンダ６４の供給が容易である。したがって、中心貫通孔５８は、ハンダ供給部として働く。中心貫通孔５８は、Ｚ軸方向から見て、例えば丸い貫通孔である。中心貫通孔５８が基端側Ａに、すなわち、ソケット端５７の側に配設されている。 First, the central conductor connection structure (conductor connection structure) 7 will be described. The socket 50 that acts as a center cover member is configured to cover the center conductor 72 while having a center gap 56 with respect to the center conductor 72 in order to insert the tip end portion of the center conductor 72 into the socket insertion portion 44. .. Solder 64 is arranged to fix and electrically connect the tip of the center conductor 72 to the socket 50. This facilitates fixing and electrical connection of the tip of the center conductor 72 to the socket 50. The solder 64 acts as a central connecting portion and also as a central connecting member. The solder 64 is supplied from the central through hole 58 to fill the central gap 56. This makes it easy to supply the solder 64 to the central gap 56. Therefore, the central through hole 58 serves as a solder supply unit. The central through hole 58 is, for example, a round through hole when viewed from the Z-axis direction. The central through hole 58 is arranged on the base end side A, that is, on the side of the socket end 57.
　中心貫通孔５８から供給されるハンダ６４は、中心隙間５６のうち、少なくとも、基端側Ａを埋める。中心隙間５６に配設されるハンダ６４は、基端側Ａに、中心接続端６５を有する。図５に示す中心導体接続構造７では、ハンダ６４の中心接続端６５は、ソケット５０のソケット端５７から基端側Ａに位置し、ソケット端５７と誘電端７５との間に位置する。中心接続端６５は、例えば、ソケット端５７に対して面一である。 The solder 64 supplied from the central through hole 58 fills at least the proximal end side A of the central gap 56. The solder 64 disposed in the central gap 56 has a central connection end 65 on the base end side A. In the center conductor connection structure 7 shown in FIG. 5, the center connection end 65 of the solder 64 is located from the socket end 57 of the socket 50 to the proximal end side A, and is located between the socket end 57 and the dielectric end 75. The center connection end 65 is flush with, for example, the socket end 57.
　中心導体７２を流れる信号が、マイクロ波やミリ波のような高周波の帯域になると、表皮効果により電流密度が中心導体７２の表面に集中する。図５に示す中心導体接続構造７では、ハンダ６４の中心接続端６５がソケット５０のソケット端５７に対して面一であるように構成されている。当該中心導体接続構造７によれば、中心導体７２からソケット５０への電流経路が、中心導体７２の中心導体外周面８２、ハンダ６４の中心接続端６５、ソケット５０のソケット端５７、および、ソケット５０のソケット外周面５１になる。したがって、上記の中心導体接続構造７では、電流経路が戻り経路を有さないので、不要な共振が抑制されて、被測定物２の電気特性を精度良く測定できる。 When the signal flowing through the central conductor 72 is in a high frequency band such as microwaves and millimeter waves, the current density is concentrated on the surface of the central conductor 72 due to the skin effect. In the center conductor connection structure 7 shown in FIG. 5, the center connection end 65 of the solder 64 is configured to be flush with the socket end 57 of the socket 50. According to the center conductor connection structure 7, the current path from the center conductor 72 to the socket 50 is the center conductor outer peripheral surface 82 of the center conductor 72, the center connection end 65 of the solder 64, the socket end 57 of the socket 50, and the socket. It becomes the socket outer peripheral surface 51 of 50. Therefore, in the above-mentioned central conductor connection structure 7, since the current path does not have a return path, unnecessary resonance is suppressed, and the electrical characteristics of the object 2 to be measured can be measured accurately.
　次に、外部導体接続構造（導体接続構造）８を説明する。外部カバー部材として働くバレル１０は、同軸ケーブル７０を第１収容部１４に挿入するために、外部導体７６に対して外部隙間１６を有しながら外部導体７６を覆うように構成されている。外部導体７６に対してバレル１０を固定し且つ電気的に接続するために、ハンダ６１が配設されている。これにより、バレル１０に対する外部導体７６の固定および電気的な接続が容易である。ハンダ６１は、外部接続部として働くとともに外部接続部材として働く。ハンダ６１は、外部貫通孔１８から供給されて、外部隙間１６を埋める。これにより、外部隙間１６へのハンダ６１の供給が容易である。したがって、外部貫通孔１８は、ハンダ供給部として働く。外部貫通孔１８は、Ｚ軸方向から見て、例えば丸い貫通孔である。外部貫通孔１８が、バレル本体１２において、先端側Ｂに配設されている。 Next, the outer conductor connection structure (conductor connection structure) 8 will be described. The barrel 10 that acts as an outer cover member is configured to cover the outer conductor 76 while having an outer gap 16 with respect to the outer conductor 76 in order to insert the coaxial cable 70 into the first accommodating portion 14. Solder 61 is arranged to fix and electrically connect the barrel 10 to the outer conductor 76. This facilitates the fixation and electrical connection of the outer conductor 76 to the barrel 10. The solder 61 works as an external connecting portion and also as an external connecting member. The solder 61 is supplied from the external through hole 18 to fill the external gap 16. This makes it easy to supply the solder 61 to the external gap 16. Therefore, the external through hole 18 functions as a solder supply unit. The external through hole 18 is, for example, a round through hole when viewed from the Z-axis direction. The external through hole 18 is arranged on the tip end side B in the barrel main body 12.
　外部貫通孔１８が、外部導体端７７の上に配設されているので、外部貫通孔１８から供給されるハンダ６１は、外部隙間１６のうち、少なくとも、先端側Ｂを埋める。外部隙間１６に配設されるハンダ６１は、先端側Ｂに、外部接続端６２を有する。図５に示す外部導体接続構造８では、ハンダ６１の外部接続端６２は、外部導体７６の外部導体端７７から先端側Ｂに位置し、外部導体端７７と誘電端７５との間に位置する。外部接続端６２は、例えば、外部導体端７７よりも先端側Ｂにずれている。外部導体端７７が、外部貫通孔１８において先端側Ｂに形成される開口先端部１９よりも基端側Ａに位置するとともに、外部貫通孔１８に対面する位置にある。これにより、外部導体端７７がハンダ６１で覆われて、外部接続端６２が、外部導体端７７よりも先端側Ｂにずれるので、戻り経路の形成を防止できる。 Since the external through hole 18 is arranged on the outer conductor end 77, the solder 61 supplied from the external through hole 18 fills at least the tip side B of the external gap 16. The solder 61 disposed in the external gap 16 has an external connection end 62 on the tip end side B. In the outer conductor connection structure 8 shown in FIG. 5, the outer connection end 62 of the solder 61 is located on the tip end side B from the outer conductor end 77 of the outer conductor 76, and is located between the outer conductor end 77 and the dielectric end 75. .. The external connection end 62 is displaced toward the tip end side B with respect to the external conductor end 77, for example. The outer conductor end 77 is located on the base end side A of the outer through hole 18 with respect to the opening tip portion 19 formed on the tip side B, and is at a position facing the outer through hole 18. As a result, the outer conductor end 77 is covered with the solder 61, and the external connection end 62 is displaced toward the tip side B from the outer conductor end 77, so that the formation of a return path can be prevented.
　外部導体７６を流れる信号が、マイクロ波やミリ波のような高周波の帯域になると、表皮効果により電流密度が外部導体７６の表面に集中する。図５に示す外部導体接続構造８では、ハンダ６１の外部接続端６２が外部導体７６の外部導体端７７に対して先端側Ｂに位置するように構成されている。このような外部導体接続構造８によれば、外部導体７６からバレル１０への電流経路が、外部導体７６の外部導体内周面８６、ハンダ６１の外部接続端６２、バレル１０のバレル内周面１３になる。したがって、上記の外部導体接続構造８では、電流経路が戻り経路を有さないので、不要な共振が抑制されて、被測定物２の電気特性を精度良く測定できる。 When the signal flowing through the outer conductor 76 is in the high frequency band such as microwaves and millimeter waves, the current density is concentrated on the surface of the outer conductor 76 due to the skin effect. In the outer conductor connection structure 8 shown in FIG. 5, the outer connection end 62 of the solder 61 is configured to be located on the tip side B with respect to the outer conductor end 77 of the outer conductor 76. According to such an outer conductor connection structure 8, the current path from the outer conductor 76 to the barrel 10 is the outer conductor inner peripheral surface 86 of the outer conductor 76, the outer connection end 62 of the solder 61, and the barrel inner peripheral surface of the barrel 10. It becomes 13. Therefore, in the above-mentioned external conductor connection structure 8, since the current path does not have a return path, unnecessary resonance is suppressed, and the electrical characteristics of the object 2 to be measured can be measured accurately.
　したがって、上記構成によれば、電流経路が戻り経路を有さないことによって、不要な共振が抑制されるので、被測定物２の電気特性を精度良く測定できる。 Therefore, according to the above configuration, since the current path does not have a return path, unnecessary resonance is suppressed, so that the electrical characteristics of the object 2 to be measured can be measured with high accuracy.
　〔第２実施形態〕
　図６を参照しながら、第２実施形態に係るプローブ１の導体接続構造７，８を説明するが、上記第１実施形態との相違点を中心に説明する。 [Second Embodiment]
The conductor connection structures 7 and 8 of the probe 1 according to the second embodiment will be described with reference to FIG. 6, but the differences from the first embodiment will be mainly described.
　図６に示すプローブ１は、第１実施形態と同様の中心導体接続構造７を有するとともに、外部貫通孔１８から供給されるハンダ６１の外部接続端６２が、外部導体７６の外部導体端７７に対して面一である中心導体接続構造７を有する。 The probe 1 shown in FIG. 6 has the same central conductor connection structure 7 as in the first embodiment, and the external connection end 62 of the solder 61 supplied from the external through hole 18 is connected to the external conductor end 77 of the external conductor 76. On the other hand, it has a central conductor connection structure 7 that is flush with each other.
　図６に示すように、外部貫通孔１８が、先端側Ｂに配設されている。詳細には、外部貫通孔１８は、その先端側Ｂの開口先端部１９が、外部導体７６の外部導体端７７に対して並ぶように配設されている。 As shown in FIG. 6, an external through hole 18 is arranged on the tip side B. Specifically, the outer through hole 18 is arranged so that the opening tip portion 19 on the tip end side B is aligned with the outer conductor end 77 of the outer conductor 76.
　外部貫通孔１８から供給されるハンダ６１は、外部隙間１６のうち、少なくとも、先端側Ｂを埋める。外部隙間１６に配設されるハンダ６１は、先端側Ｂに、外部接続端６２を有する。図６に示す外部導体接続構造８では、ハンダ６１の外部接続端６２は、外部導体７６の外部導体端７７から先端側Ｂに位置し、外部導体端７７と誘電端７５との間に位置する。外部接続端６２は、例えば、外部導体端７７に対して面一である。 The solder 61 supplied from the external through hole 18 fills at least the tip side B of the external gap 16. The solder 61 disposed in the external gap 16 has an external connection end 62 on the tip end side B. In the external conductor connection structure 8 shown in FIG. 6, the external connection end 62 of the solder 61 is located from the outer conductor end 77 of the outer conductor 76 to the tip end side B, and is located between the outer conductor end 77 and the dielectric end 75. .. The external connection end 62 is, for example, flush with respect to the external conductor end 77.
　上記の外部導体接続構造８によれば、外部導体７６からバレル１０への電流経路が、外部導体７６の外部導体内周面８６、外部導体７６の外部導体端７７、ハンダ６１の外部接続端６２、および、バレル１０のバレル内周面１３になる。したがって、上記の外部導体接続構造８では、電流経路が戻り経路を有さないので、不要な共振が抑制されて、被測定物２の電気特性を精度良く測定できる。 According to the above-mentioned outer conductor connection structure 8, the current path from the outer conductor 76 to the barrel 10 is the outer conductor inner peripheral surface 86 of the outer conductor 76, the outer conductor end 77 of the outer conductor 76, and the outer connection end 62 of the solder 61. , And the barrel inner peripheral surface 13 of the barrel 10. Therefore, in the above-mentioned external conductor connection structure 8, since the current path does not have a return path, unnecessary resonance is suppressed, and the electrical characteristics of the object 2 to be measured can be measured accurately.
　したがって、上記構成によれば、電流経路が戻り経路を有さないことによって、不要な共振が抑制されるので、被測定物２の電気特性を精度良く測定できる。 Therefore, according to the above configuration, since the current path does not have a return path, unnecessary resonance is suppressed, so that the electrical characteristics of the object 2 to be measured can be measured with high accuracy.
　〔第３実施形態〕
　図７を参照しながら、第３実施形態に係るプローブ１の導体接続構造７，８を説明するが、上記第１実施形態との相違点を中心に説明する。 [Third Embodiment]
The conductor connection structures 7 and 8 of the probe 1 according to the third embodiment will be described with reference to FIG. 7, but the differences from the first embodiment will be mainly described.
　図７に示すプローブ１は、第１実施形態と同様の外部導体接続構造８を有するとともに、中心切り欠き５９から供給されるハンダ６４の中心接続端６５がソケット端５７よりも基端側Ａにずれている中心導体接続構造７を有する。 The probe 1 shown in FIG. 7 has an outer conductor connection structure 8 similar to that of the first embodiment, and the center connection end 65 of the solder 64 supplied from the center notch 59 is closer to the base end side A than the socket end 57. It has a misaligned center conductor connection structure 7.
　図７に示すように、中心切り欠き５９がソケット端５７と並ぶように配設されている。ソケット５０に対して中心導体７２の先端部を固定し且つ電気的に接続するために、ハンダ６４が配設されている。ハンダ６４は、中心接続部として働くとともに中心接続部材として働く。中心切り欠き５９は、Ｚ軸方向から見て、例えば半円や楕円などの形状を有し、ソケット５０の厚み方向に延在する。中心切り欠き５９は、ハンダ供給部として働く。 As shown in FIG. 7, the center notch 59 is arranged so as to be aligned with the socket end 57. Solder 64 is arranged to fix and electrically connect the tip of the center conductor 72 to the socket 50. The solder 64 acts as a central connecting portion and also as a central connecting member. The central notch 59 has a shape such as a semicircle or an ellipse when viewed from the Z-axis direction, and extends in the thickness direction of the socket 50. The central notch 59 serves as a solder supply unit.
　中心切り欠き５９から供給されるハンダ６４は、中心隙間５６のうち、少なくとも、基端側Ａを埋める。これにより、ソケット５０に対する中心導体７２の先端部の固定および電気的な接続が容易である。中心隙間５６に配設されるハンダ６４は、基端側Ａに、中心接続端６５を有する。図７に示す中心導体接続構造７では、ハンダ６４の中心接続端６５は、ソケット５０のソケット端５７から基端側Ａに位置し、ソケット端５７と誘電端７５との間に位置する。中心接続端６５は、例えば、ソケット端５７よりも基端側Ａにずれている。 The solder 64 supplied from the central notch 59 fills at least the proximal end side A of the central gap 56. This facilitates fixing and electrical connection of the tip of the center conductor 72 to the socket 50. The solder 64 disposed in the central gap 56 has a central connection end 65 on the base end side A. In the center conductor connection structure 7 shown in FIG. 7, the center connection end 65 of the solder 64 is located from the socket end 57 of the socket 50 to the proximal end side A, and is located between the socket end 57 and the dielectric end 75. The center connection end 65 is displaced from the socket end 57 to the base end side A, for example.
　上記の中心導体接続構造７によれば、中心導体７２からソケット５０への電流経路が、中心導体７２の中心導体外周面８２、ハンダ６４の中心接続端６５、ソケット５０のソケット端５７、および、ソケット５０のソケット外周面５１になる。したがって、上記の中心導体接続構造７では、電流経路が戻り経路を有さないので、不要な共振が抑制されて、被測定物２の電気特性を精度良く測定できる。 According to the above-mentioned center conductor connection structure 7, the current path from the center conductor 72 to the socket 50 is the center conductor outer peripheral surface 82 of the center conductor 72, the center connection end 65 of the solder 64, the socket end 57 of the socket 50, and It becomes the socket outer peripheral surface 51 of the socket 50. Therefore, in the above-mentioned central conductor connection structure 7, since the current path does not have a return path, unnecessary resonance is suppressed, and the electrical characteristics of the object 2 to be measured can be measured accurately.
　したがって、上記構成によれば、電流経路が戻り経路を有さないことによって、不要な共振が抑制されるので、被測定物２の電気特性を精度良く測定できる。 Therefore, according to the above configuration, since the current path does not have a return path, unnecessary resonance is suppressed, so that the electrical characteristics of the object 2 to be measured can be measured with high accuracy.
　〔第４実施形態〕
　図８を参照しながら、第４実施形態に係るプローブ１の導体接続構造７，８を説明するが、上記第２実施形態との相違点を中心に説明する。 [Fourth Embodiment]
The conductor connection structures 7 and 8 of the probe 1 according to the fourth embodiment will be described with reference to FIG. 8, but the differences from the second embodiment will be mainly described.
　図８に示すプローブ１は、第２実施形態と同様の外部導体接続構造８を有するとともに、中心切り欠き５９から供給されるハンダ６４の中心接続端６５がソケット端５７に対して面一である中心導体接続構造７を有する。 The probe 1 shown in FIG. 8 has an outer conductor connection structure 8 similar to that of the second embodiment, and the center connection end 65 of the solder 64 supplied from the center notch 59 is flush with the socket end 57. It has a central conductor connection structure 7.
　図８に示すように、中心切り欠き５９がソケット端５７と並ぶように配設されている。中心切り欠き５９は、Ｚ軸方向から見て、例えば半円や楕円など形状を有し、ソケット５０の厚み方向に延在する。 As shown in FIG. 8, the central notch 59 is arranged so as to be aligned with the socket end 57. The central notch 59 has a shape such as a semicircle or an ellipse when viewed from the Z-axis direction, and extends in the thickness direction of the socket 50.
　中心切り欠き５９から供給されるハンダ６４は、中心隙間５６のうち、少なくとも、基端側Ａを埋める。中心隙間５６に配設されるハンダ６４は、基端側Ａに、中心接続端６５を有する。図８に示す中心導体接続構造７では、ハンダ６４の中心接続端６５は、ソケット５０のソケット端５７から基端側Ａに位置し、ソケット端５７と誘電端７５との間に位置する。中心接続端６５は、例えば、ソケット端５７に対して面一である。 The solder 64 supplied from the central notch 59 fills at least the proximal end side A of the central gap 56. The solder 64 disposed in the central gap 56 has a central connection end 65 on the base end side A. In the central conductor connection structure 7 shown in FIG. 8, the central connection end 65 of the solder 64 is located from the socket end 57 of the socket 50 to the proximal end side A, and is located between the socket end 57 and the dielectric end 75. The center connection end 65 is flush with, for example, the socket end 57.
　上記の中心導体接続構造７によれば、中心導体７２からソケット５０への電流経路が、中心導体７２の中心導体外周面８２、ハンダ６４の中心接続端６５、ソケット５０のソケット端５７、および、ソケット５０のソケット外周面５１になる。したがって、上記の中心導体接続構造７では、電流経路が戻り経路を有さないので、不要な共振が抑制されて、被測定物２の電気特性を精度良く測定できる。 According to the above-mentioned center conductor connection structure 7, the current path from the center conductor 72 to the socket 50 is the center conductor outer peripheral surface 82 of the center conductor 72, the center connection end 65 of the solder 64, the socket end 57 of the socket 50, and It becomes the socket outer peripheral surface 51 of the socket 50. Therefore, in the above-mentioned central conductor connection structure 7, since the current path does not have a return path, unnecessary resonance is suppressed, and the electrical characteristics of the object 2 to be measured can be measured accurately.
　したがって、上記構成によれば、電流経路が戻り経路を有さないことによって、不要な共振が抑制されるので、被測定物２の電気特性を精度良く測定できる。 Therefore, according to the above configuration, since the current path does not have a return path, unnecessary resonance is suppressed, so that the electrical characteristics of the object 2 to be measured can be measured with high accuracy.
　〔第５実施形態〕
　図９を参照しながら、第５実施形態に係るプローブ１の導体接続構造７，８を説明するが、上記第１実施形態との相違点を中心に説明する。 [Fifth Embodiment]
The conductor connection structures 7 and 8 of the probe 1 according to the fifth embodiment will be described with reference to FIG. 9, but the differences from the first embodiment will be mainly described.
　図９に示すプローブ１は、第１実施形態と同様の外部導体接続構造８を有するとともに、ハンダ６４が中心隙間５６を埋める中心導体接続構造７を有する。 The probe 1 shown in FIG. 9 has an outer conductor connection structure 8 similar to that of the first embodiment, and also has a center conductor connection structure 7 in which the solder 64 fills the center gap 56.
　図９に示すように、ソケット５０が中心貫通孔５８や中心切り欠き５９を有さずに、ハンダ６４が中心隙間５６を埋めるように配設されている。中心隙間５６に配設されるハンダ６４は、基端側Ａに、中心接続端６５を有する。図９に示す中心導体接続構造７では、ハンダ６４の中心接続端６５は、ソケット５０のソケット端５７から基端側Ａに位置し、ソケット端５７と誘電端７５との間に位置する。中心接続端６５は、例えば、ソケット端５７に対して面一である。なお、ハンダ６４の中心接続端６５は、ソケット５０のソケット端５７よりも基端側Ａにずれていてもよい。 As shown in FIG. 9, the socket 50 is arranged so as to fill the central gap 56 without having the central through hole 58 or the central notch 59. The solder 64 disposed in the central gap 56 has a central connection end 65 on the base end side A. In the center conductor connection structure 7 shown in FIG. 9, the center connection end 65 of the solder 64 is located from the socket end 57 of the socket 50 to the proximal end side A, and is located between the socket end 57 and the dielectric end 75. The center connection end 65 is flush with, for example, the socket end 57. The center connection end 65 of the solder 64 may be displaced from the socket end 57 of the socket 50 to the base end side A.
　上記の中心導体接続構造７によれば、中心導体７２からソケット５０への電流経路が、中心導体７２の中心導体外周面８２、ハンダ６４の中心接続端６５、ソケット５０のソケット端５７、および、ソケット５０のソケット外周面５１になる。したがって、上記の中心導体接続構造７では、電流経路が戻り経路を有さないので、不要な共振が抑制されて、被測定物２の電気特性を精度良く測定できる。 According to the above-mentioned center conductor connection structure 7, the current path from the center conductor 72 to the socket 50 is the center conductor outer peripheral surface 82 of the center conductor 72, the center connection end 65 of the solder 64, the socket end 57 of the socket 50, and It becomes the socket outer peripheral surface 51 of the socket 50. Therefore, in the above-mentioned central conductor connection structure 7, since the current path does not have a return path, unnecessary resonance is suppressed, and the electrical characteristics of the object 2 to be measured can be measured accurately.
　したがって、上記構成によれば、電流経路が戻り経路を有さないことによって、不要な共振が抑制されるので、被測定物２の電気特性を精度良く測定できる。 Therefore, according to the above configuration, since the current path does not have a return path, unnecessary resonance is suppressed, so that the electrical characteristics of the object 2 to be measured can be measured with high accuracy.
　〔第６実施形態〕
　図１０を参照しながら、第６実施形態に係るプローブ１の導体接続構造７，８を説明するが、上記第２実施形態との相違点を中心に説明する。 [Sixth Embodiment]
The conductor connection structures 7 and 8 of the probe 1 according to the sixth embodiment will be described with reference to FIG. 10, but the differences from the second embodiment will be mainly described.
　図１０に示すプローブ１は、第２実施形態と同様の外部導体接続構造８を有するとともに、ハンダ６４が中心隙間５６を埋める中心導体接続構造７を有する。 The probe 1 shown in FIG. 10 has an outer conductor connection structure 8 similar to that of the second embodiment, and also has a center conductor connection structure 7 in which the solder 64 fills the center gap 56.
　図１０に示すように、ソケット５０が中心貫通孔５８や中心切り欠き５９を有さずに、ハンダ６４が中心隙間５６を埋めるように配設されている。中心隙間５６に配設されるハンダ６４は、基端側Ａに、中心接続端６５を有する。図１０に示す中心導体接続構造７では、ハンダ６４の中心接続端６５は、ソケット５０のソケット端５７から基端側Ａに位置し、ソケット端５７と誘電端７５との間に位置する。中心接続端６５は、例えば、ソケット端５７よりも基端側Ａにずれている。したがって、上記の中心導体接続構造７では、電流経路が戻り経路を有さないので、不要な共振が抑制されて、被測定物２の電気特性を精度良く測定できる。なお、ハンダ６４の中心接続端６５は、ソケット５０のソケット端５７に対して面一であってもよい。 As shown in FIG. 10, the socket 50 is arranged so as to fill the central gap 56 without having the central through hole 58 or the central notch 59. The solder 64 disposed in the central gap 56 has a central connection end 65 on the base end side A. In the center conductor connection structure 7 shown in FIG. 10, the center connection end 65 of the solder 64 is located from the socket end 57 of the socket 50 to the proximal end side A, and is located between the socket end 57 and the dielectric end 75. The center connection end 65 is displaced from the socket end 57 to the base end side A, for example. Therefore, in the above-mentioned central conductor connection structure 7, since the current path does not have a return path, unnecessary resonance is suppressed, and the electrical characteristics of the object 2 to be measured can be measured accurately. The center connection end 65 of the solder 64 may be flush with the socket end 57 of the socket 50.
　したがって、上記構成によれば、電流経路が戻り経路を有さないことによって、不要な共振が抑制されるので、被測定物２の電気特性を精度良く測定できる。 Therefore, according to the above configuration, since the current path does not have a return path, unnecessary resonance is suppressed, so that the electrical characteristics of the object 2 to be measured can be measured with high accuracy.
　〔第７実施形態〕
　図１１を参照しながら、第７実施形態に係るプローブ１の導体接続構造７，８を説明するが、上記第１実施形態との相違点を中心に説明する。 [7th Embodiment]
The conductor connection structures 7 and 8 of the probe 1 according to the seventh embodiment will be described with reference to FIG. 11, but the differences from the first embodiment will be mainly described.
　図１１に示すプローブ１は、第１実施形態と同様の中心導体接続構造７を有するとともに、同軸ケーブル７０の外部導体７６が、導電性の嵌め込み部材６７によって、バレル１０に対して固定され且つ電気的に接続される外部導体接続構造８を有する。 The probe 1 shown in FIG. 11 has the same central conductor connection structure 7 as in the first embodiment, and the outer conductor 76 of the coaxial cable 70 is fixed to the barrel 10 by the conductive fitting member 67 and is electrically operated. It has an outer conductor connection structure 8 to be connected.
　図１１に示すように、外部接続部として働くとともに外部接続部材として働く導電性の嵌め込み部材６７が、外部隙間１６に嵌め込まれている。外部隙間１６は、外部導体７６の外部導体内周面８６とバレル本体１２のバレル内周面１３との間に形成される。導電性の嵌め込み部材６７は、外部導体７６の外部導体端７７およびバレル１０のバレル内周面１３にそれぞれ当接するように配設されている。これにより、バレル１０に対する外部導体７６の固定および電気的な接続が容易である。嵌め込み部材６７は、導電性材料、例えば金属材料であり、例えばリン青銅である。 As shown in FIG. 11, a conductive fitting member 67 that works as an external connection portion and also works as an external connection member is fitted in the external gap 16. The outer gap 16 is formed between the outer conductor inner peripheral surface 86 of the outer conductor 76 and the barrel inner peripheral surface 13 of the barrel body 12. The conductive fitting member 67 is arranged so as to abut on the outer conductor end 77 of the outer conductor 76 and the barrel inner peripheral surface 13 of the barrel 10, respectively. This facilitates the fixation and electrical connection of the outer conductor 76 to the barrel 10. The fitting member 67 is a conductive material, for example, a metallic material, for example, phosphor bronze.
　嵌め込み部材６７は、例えば、円環形状を有し、当接端面６８、当接周面６９、嵌め込み内周面８７および外部接続端８８を有する。当接端面６８は基端側Ａに形成され、外部接続端８８は先端側Ｂに形成される。嵌め込み部材６７は、同軸ケーブル７０の外部導体７６と第２ブッシング４０との間に嵌め込まれて、第１収容部１４に圧入される。これにより、当接端面６８が外部導体端７７に当接するとともに当接周面６９がバレル内周面１３に当接する。同軸ケーブル７０の外部導体７６が、導電性の嵌め込み部材６７によって、バレル１０に対して固定され且つ電気的に接続される。嵌め込み部材６７の外部接続端８８は、外部導体７６の外部導体端７７から先端側Ｂに位置し、外部導体端７７と誘電端７５との間に位置する。外部接続端８８は、例えば、外部導体端７７よりも先端側Ｂにずれている。 The fitting member 67 has, for example, an annular shape, and has a contact end surface 68, a contact peripheral surface 69, a fitting inner peripheral surface 87, and an external connection end 88. The contact end surface 68 is formed on the proximal end side A, and the external connection end 88 is formed on the distal end side B. The fitting member 67 is fitted between the outer conductor 76 of the coaxial cable 70 and the second bushing 40, and is press-fitted into the first accommodating portion 14. As a result, the contact end surface 68 abuts on the outer conductor end 77, and the contact peripheral surface 69 abuts on the barrel inner peripheral surface 13. The outer conductor 76 of the coaxial cable 70 is fixed and electrically connected to the barrel 10 by the conductive fitting member 67. The external connection end 88 of the fitting member 67 is located on the tip end side B from the outer conductor end 77 of the outer conductor 76, and is located between the outer conductor end 77 and the dielectric end 75. The external connection end 88 is displaced toward the tip end side B with respect to the outer conductor end 77, for example.
　上記の外部導体接続構造８によれば、外部導体７６からバレル１０への電流経路が、外部導体７６の外部導体内周面８６、嵌め込み部材６７の嵌め込み内周面８７と外部接続端８８、および、バレル１０のバレル内周面１３になる。したがって、上記の外部導体接続構造８では、電流経路が戻り経路を有さないので、不要な共振が抑制されて、被測定物２の電気特性を精度良く測定できる。 According to the above-mentioned outer conductor connection structure 8, the current path from the outer conductor 76 to the barrel 10 is the outer conductor inner peripheral surface 86 of the outer conductor 76, the fitting inner peripheral surface 87 of the fitting member 67, the outer connecting end 88, and the outer connecting end 88. , It becomes the barrel inner peripheral surface 13 of the barrel 10. Therefore, in the above-mentioned external conductor connection structure 8, since the current path does not have a return path, unnecessary resonance is suppressed, and the electrical characteristics of the object 2 to be measured can be measured accurately.
　なお、当接端面６８が、外部貫通孔１８において先端側Ｂに形成される開口先端部１９よりも基端側Ａに位置するとともに、外部貫通孔１８に対面する位置にある。これにより、外部貫通孔１８を通じて、嵌め込み部材６７の位置を視認できる。また、外部貫通孔１８からハンダ６１を供給して、外部導体７６および嵌め込み部材６７を電気的に接続することができる。これにより、電気的接続を補強できる。また、嵌め込み部材６７は、バレル１０と一体化された構成にすることもできる。 The contact end surface 68 is located on the proximal end side A of the external through hole 18 with respect to the opening tip portion 19 formed on the distal end side B, and is at a position facing the external through hole 18. As a result, the position of the fitting member 67 can be visually recognized through the external through hole 18. Further, the solder 61 can be supplied from the external through hole 18 to electrically connect the external conductor 76 and the fitting member 67. This can reinforce the electrical connection. Further, the fitting member 67 may be configured to be integrated with the barrel 10.
　図１１に示すように、中心貫通孔５８が基端側Ａに配設されている。中心貫通孔５８から供給されるハンダ６４は、中心隙間５６のうち、少なくとも、基端側Ａを埋める。中心隙間５６に配設されるハンダ６４は、基端側Ａに、中心接続端６５を有する。図１１に示す中心導体接続構造７では、ハンダ６４の中心接続端６５は、ソケット５０のソケット端５７から基端側Ａに位置し、ソケット端５７と誘電端７５との間に位置する。中心接続端６５は、例えば、ソケット端５７に対して面一である。 As shown in FIG. 11, the central through hole 58 is arranged on the proximal end side A. The solder 64 supplied from the central through hole 58 fills at least the proximal end side A of the central gap 56. The solder 64 disposed in the central gap 56 has a central connection end 65 on the base end side A. In the center conductor connection structure 7 shown in FIG. 11, the center connection end 65 of the solder 64 is located from the socket end 57 of the socket 50 to the proximal end side A, and is located between the socket end 57 and the dielectric end 75. The center connection end 65 is flush with, for example, the socket end 57.
　上記の中心導体接続構造７によれば、中心導体７２からソケット５０への電流経路が、中心導体７２の中心導体外周面８２、ハンダ６４の中心接続端６５、ソケット５０のソケット端５７、および、ソケット５０のソケット外周面５１になる。したがって、上記の中心導体接続構造７では、電流経路が戻り経路を有さないので、不要な共振が抑制されて、被測定物２の電気特性を精度良く測定できる。 According to the above-mentioned center conductor connection structure 7, the current path from the center conductor 72 to the socket 50 is the center conductor outer peripheral surface 82 of the center conductor 72, the center connection end 65 of the solder 64, the socket end 57 of the socket 50, and It becomes the socket outer peripheral surface 51 of the socket 50. Therefore, in the above-mentioned central conductor connection structure 7, since the current path does not have a return path, unnecessary resonance is suppressed, and the electrical characteristics of the object 2 to be measured can be measured accurately.
　したがって、上記構成によれば、電流経路が戻り経路を有さないことによって、不要な共振が抑制されるので、被測定物２の電気特性を精度良く測定できる。 Therefore, according to the above configuration, since the current path does not have a return path, unnecessary resonance is suppressed, so that the electrical characteristics of the object 2 to be measured can be measured with high accuracy.
　〔第８実施形態〕
　図１２を参照しながら、第８実施形態に係るプローブ１の導体接続構造７，８を説明するが、上記第７実施形態との相違点を中心に説明する。 [Eighth Embodiment]
The conductor connection structures 7 and 8 of the probe 1 according to the eighth embodiment will be described with reference to FIG. 12, but the differences from the seventh embodiment will be mainly described.
　図１２に示すプローブ１は、第７実施形態と同様の外部導体接続構造８を有するとともに、中心切り欠き５９から供給されるハンダ６４が中心隙間５６の基端側Ａを埋める中心導体接続構造７を有する。 The probe 1 shown in FIG. 12 has an outer conductor connection structure 8 similar to that of the seventh embodiment, and the solder 64 supplied from the center notch 59 fills the base end side A of the center gap 56 with the center conductor connection structure 7. Has.
　図１２に示すように、中心切り欠き５９がソケット端５７と並ぶように配設されている。中心切り欠き５９は、Ｚ軸方向から見て、例えば半円や楕円などの形状を有し、ソケット５０の厚み方向に延在する。ソケット端５７は、誘電端７５に当接している。 As shown in FIG. 12, the center notch 59 is arranged so as to be aligned with the socket end 57. The central notch 59 has a shape such as a semicircle or an ellipse when viewed from the Z-axis direction, and extends in the thickness direction of the socket 50. The socket end 57 is in contact with the dielectric end 75.
　中心切り欠き５９から供給されるハンダ６４は、中心隙間５６のうち、少なくとも、基端側Ａを埋める。中心隙間５６に配設されるハンダ６４は、基端側Ａに、中心接続端６５を有する。図８に示す中心導体接続構造７では、ハンダ６４の中心接続端６５は、ソケット５０のソケット端５７から基端側Ａに位置し、ソケット端５７と誘電端７５との間に位置する。中心接続端６５は、例えば、ソケット端５７に対して面一である。 The solder 64 supplied from the central notch 59 fills at least the proximal end side A of the central gap 56. The solder 64 disposed in the central gap 56 has a central connection end 65 on the base end side A. In the central conductor connection structure 7 shown in FIG. 8, the central connection end 65 of the solder 64 is located from the socket end 57 of the socket 50 to the proximal end side A, and is located between the socket end 57 and the dielectric end 75. The center connection end 65 is flush with, for example, the socket end 57.
　上記の中心導体接続構造７によれば、中心導体７２からソケット５０への電流経路が、中心導体７２の中心導体外周面８２、ハンダ６４の中心接続端６５、ソケット５０のソケット端５７、および、ソケット５０のソケット外周面５１になる。したがって、上記の中心導体接続構造７では、電流経路が戻り経路を有さないので、不要な共振が抑制されて、被測定物２の電気特性を精度良く測定できる。 According to the above-mentioned center conductor connection structure 7, the current path from the center conductor 72 to the socket 50 is the center conductor outer peripheral surface 82 of the center conductor 72, the center connection end 65 of the solder 64, the socket end 57 of the socket 50, and It becomes the socket outer peripheral surface 51 of the socket 50. Therefore, in the above-mentioned central conductor connection structure 7, since the current path does not have a return path, unnecessary resonance is suppressed, and the electrical characteristics of the object 2 to be measured can be measured accurately.
　したがって、上記構成によれば、電流経路が戻り経路を有さないことによって、不要な共振が抑制されるので、被測定物２の電気特性を精度良く測定できる。 Therefore, according to the above configuration, since the current path does not have a return path, unnecessary resonance is suppressed, so that the electrical characteristics of the object 2 to be measured can be measured with high accuracy.
　〔第９実施形態〕
　図１３を参照しながら、第９実施形態に係るプローブ１の導体接続構造７，８を説明するが、上記第７実施形態との相違点を中心に説明する。 [9th Embodiment]
The conductor connection structures 7 and 8 of the probe 1 according to the ninth embodiment will be described with reference to FIG. 13, but the differences from the seventh embodiment will be mainly described.
　図１３に示すプローブ１は、第７実施形態と同様の外部導体接続構造８を有するとともに、ハンダ６４が中心隙間５６を埋める中心導体接続構造７を有する。図１３に示す中心導体接続構造７では、ソケット５０が中心貫通孔５８や中心切り欠き５９を有さずに、ハンダ６４が中心隙間５６を埋めるように配設されている。 The probe 1 shown in FIG. 13 has an outer conductor connection structure 8 similar to that of the seventh embodiment, and also has a center conductor connection structure 7 in which the solder 64 fills the center gap 56. In the central conductor connection structure 7 shown in FIG. 13, the socket 50 is arranged so as to fill the central gap 56 without the central through hole 58 or the central notch 59.
　ソケット端５７は、誘電端７５に当接している。中心隙間５６に配設されるハンダ６４は、基端側Ａに、中心接続端６５を有する。図９に示す中心導体接続構造７では、ハンダ６４の中心接続端６５は、ソケット５０のソケット端５７から基端側Ａに位置し、ソケット端５７と誘電端７５との間に位置する。中心接続端６５は、例えば、ソケット端５７に対して面一である。 The socket end 57 is in contact with the dielectric end 75. The solder 64 disposed in the central gap 56 has a central connection end 65 on the base end side A. In the center conductor connection structure 7 shown in FIG. 9, the center connection end 65 of the solder 64 is located from the socket end 57 of the socket 50 to the proximal end side A, and is located between the socket end 57 and the dielectric end 75. The center connection end 65 is flush with, for example, the socket end 57.
　上記の中心導体接続構造７によれば、中心導体７２からソケット５０への電流経路が、中心導体７２の中心導体外周面８２、ハンダ６４の中心接続端６５、ソケット５０のソケット端５７、および、ソケット５０のソケット外周面５１になる。したがって、上記の中心導体接続構造７では、電流経路が戻り経路を有さないので、不要な共振が抑制されて、被測定物２の電気特性を精度良く測定できる。 According to the above-mentioned center conductor connection structure 7, the current path from the center conductor 72 to the socket 50 is the center conductor outer peripheral surface 82 of the center conductor 72, the center connection end 65 of the solder 64, the socket end 57 of the socket 50, and It becomes the socket outer peripheral surface 51 of the socket 50. Therefore, in the above-mentioned central conductor connection structure 7, since the current path does not have a return path, unnecessary resonance is suppressed, and the electrical characteristics of the object 2 to be measured can be measured accurately.
　したがって、上記構成によれば、電流経路が戻り経路を有さないことによって、不要な共振が抑制されるので、被測定物２の電気特性を精度良く測定できる。 Therefore, according to the above configuration, since the current path does not have a return path, unnecessary resonance is suppressed, so that the electrical characteristics of the object 2 to be measured can be measured with high accuracy.
　この発明の具体的な実施の形態について説明したが、この発明は、上記実施形態に限定されるものではなく、この発明の範囲内で種々変更して実施することができる。 Although the specific embodiment of the present invention has been described, the present invention is not limited to the above embodiment, and can be variously modified and carried out within the scope of the present invention.
　上記の実施形態では、プローブ１が、中心導体接続構造７および外部導体接続構造８の両方を備えているが、中心導体接続構造７および外部導体接続構造８の少なくとも一方を備えることができる。 In the above embodiment, the probe 1 includes both the central conductor connection structure 7 and the outer conductor connection structure 8, but can include at least one of the center conductor connection structure 7 and the outer conductor connection structure 8.
　上記実施の形態は例示であり、上記実施の形態における中心導体接続構造７および外部導体接続構造８を適宜に組み合わせることができる。 The above embodiment is an example, and the central conductor connection structure 7 and the outer conductor connection structure 8 in the above embodiment can be appropriately combined.
　上述した実施形態では、外部接続部６１，６７は、外部カバー部材１０とは別体の部材である。これにより、外部接続端６２，８８を高精度に位置決めできる。しかしながら、外部接続部は、外部カバー部材１０の一部分とすることができる。外部カバー部材１０は、外部接続部として、例えば、外部貫通孔１８に対応するところにおいて、外部導体７６に向けて突出して外部導体７６に圧接する外部突出部を有する。このような外部突出部は、カシメ加工によって形成される。これにより、外部突出部は、外部導体７６に対して接合されるとともに、外部導体７６に電気的に接続される。外部突出部は、例えば、Ｚ軸方向から見て、円形や矩形形状を有するとともに、断面が矩形形状を有する。外部突出部は、他端側（先端側）Ｂにおいて、外部接続端を有する。外部突出部の外部接続端は、外部導体端７７から他端側（先端側）Ｂに位置する。外部突出部の外部接続端は、上述した外部接続端６２，８８と同様に、外部導体端７７よりも他端側（先端側）Ｂにずれているか、または、外部導体端７７に対して面一である。 In the above-described embodiment, the external connection portions 61 and 67 are separate members from the external cover member 10. As a result, the external connection ends 62 and 88 can be positioned with high accuracy. However, the external connection portion can be a part of the external cover member 10. The outer cover member 10 has, as an external connecting portion,, for example, an external protruding portion that projects toward the external conductor 76 and presses against the external conductor 76 at a location corresponding to the external through hole 18. Such an external protrusion is formed by caulking. As a result, the external protrusion is joined to the external conductor 76 and is electrically connected to the external conductor 76. The external protrusion has, for example, a circular or rectangular shape when viewed from the Z-axis direction, and has a rectangular cross section. The external protrusion has an external connection end on the other end side (tip side) B. The external connection end of the external protrusion is located on the other end side (tip side) B from the external conductor end 77. The external connection end of the external protrusion is displaced toward the other end side (tip side) B from the external conductor end 77, or is a surface with respect to the external conductor end 77, similarly to the external connection ends 62 and 88 described above. It is one.
　上述した実施形態では、中心接続部６４は、中心カバー部材５０とは別体の部材である。これにより、中心接続端６５を高精度に位置決めできる。しかしながら、中心接続部６４は、中心カバー部材５０の一部分とすることができる。中心カバー部材５０は、例えば、中心貫通孔５８または中心切り欠き５９に対応するところにおいて、中心導体７２に向けて突出して中心導体７２に圧接する中心突出部を有する。このような中心突出部は、カシメ加工によって形成される。これにより、中心突出部は、中心導体７２に対して接合されるとともに、中心導体７２に電気的に接続される。中心突出部は、例えば、Ｚ軸方向から見て、円形や矩形形状を有するとともに、断面が矩形形状を有する。中心突出部は、基端側Ａにおいて、中心接続端を有する。中心突出部の中心接続端は、中心カバー端５７から前記基端側Ａに位置する。中心突出部の中心接続端は、上述した中心接続端６５と同様に、中心カバー端５７よりも基端側Ａにずれているか、または、中心カバー端５７に対して面一である。 In the above-described embodiment, the central connection portion 64 is a member separate from the central cover member 50. As a result, the center connection end 65 can be positioned with high accuracy. However, the central connection portion 64 can be a part of the central cover member 50. The central cover member 50 has, for example, a central protruding portion that projects toward the central conductor 72 and presses against the central conductor 72 at a position corresponding to the central through hole 58 or the central notch 59. Such a central protrusion is formed by caulking. As a result, the central protrusion is joined to the central conductor 72 and is electrically connected to the central conductor 72. The central protrusion has, for example, a circular or rectangular shape when viewed from the Z-axis direction, and has a rectangular cross section. The central protrusion has a central connection end on the proximal end side A. The central connection end of the central protrusion is located on the base end side A from the central cover end 57. The central connection end of the central protrusion is displaced toward the proximal end side A from the central cover end 57 or is flush with the central cover end 57, similarly to the central connection end 65 described above.
　ハンダ供給部として働く中心貫通孔５８、中心切り欠き５９および外部貫通孔１８の形状は、例示であり、Ｚ軸方向から見て、例えば、正方形、長方形、台形、平行四辺形、長円形、卵形、半長円形、半卵形などの様々な形状を有することができる。 The shapes of the central through hole 58, the central notch 59, and the external through hole 18 that act as solder feeders are exemplary and, when viewed from the Z-axis direction, are, for example, square, rectangular, trapezoidal, parallelogram, oval, egg. It can have various shapes such as shape, semi-oval, and semi-oval.
　ハンダ６４が、中心貫通孔５８および中心切り欠き５９の中に存在してもよく、ハンダ６１が、外部貫通孔１８の中に存在してもよい。 The solder 64 may be present in the central through hole 58 and the central notch 59, and the solder 61 may be present in the external through hole 18.
　上述した実施形態の同軸ケーブル７０では、中心導体７２の先端部が、誘電体７４から突出し、誘電体７４の先端部が、外部導体７６から突出し、外部導体７６の先端部が、外皮７８から突出している。これにより、中心導体７２および外部導体７６における短絡防止効果を高めることができる。しかしながら、誘電体７４の先端部および外部導体７６の先端部が面一であって、中心導体７２の先端部が、誘電体７４の先端部および外部導体７６の先端部から突出する、同軸ケーブル７０の構成にすることもできる。 In the coaxial cable 70 of the above-described embodiment, the tip of the central conductor 72 protrudes from the dielectric 74, the tip of the dielectric 74 protrudes from the outer conductor 76, and the tip of the outer conductor 76 protrudes from the outer skin 78. ing. Thereby, the short circuit prevention effect in the central conductor 72 and the outer conductor 76 can be enhanced. However, the coaxial cable 70 in which the tip of the dielectric 74 and the tip of the outer conductor 76 are flush with each other and the tip of the center conductor 72 projects from the tip of the dielectric 74 and the tip of the outer conductor 76. It can also be configured as.
　この発明および実施形態をまとめると、次のようになる。 The present invention and embodiments can be summarized as follows.
　この発明の一態様に係る導体接続構造８は、
　中心導体７２、誘電体７４および外部導体７６が同軸に配置された同軸ケーブル７０が接続され、前記同軸ケーブル７０の前記中心導体７２に電気的に接続される測定ピン２０を有する、基端側Ａから先端側Ｂに延在するプローブ１における導体接続構造８であって、
　前記外部導体７６に対して隙間１６を有しながら覆う導電性の外部カバー部材１０と、
　前記外部導体７６を前記外部カバー部材１０に対して固定し且つ電気的に接続する導電性の外部接続部６１，６７とを備え、
　前記外部接続部６１，６７における前記プローブ１の先端側Ｂの端である外部接続端６２，８８は、前記外部導体７６における前記プローブ１の先端側Ｂの端である外部導体端７７に対して、面一に位置するか、または、前記プローブ１の先端側Ｂに位置することを特徴とする。 The conductor connection structure 8 according to one aspect of the present invention is
Base end side A having a measuring pin 20 to which a coaxial cable 70 in which a central conductor 72, a dielectric 74 and an outer conductor 76 are coaxially arranged is connected, and which is electrically connected to the central conductor 72 of the coaxial cable 70. The conductor connection structure 8 in the probe 1 extending from the tip side B to the tip side B.
A conductive outer cover member 10 that covers the outer conductor 76 while having a gap 16.
A conductive external connecting portion 61, 67 for fixing and electrically connecting the external conductor 76 to the external cover member 10 is provided.
The external connection ends 62, 88, which are the ends of the tip side B of the probe 1 in the external connection portions 61, 67, are relative to the outer conductor end 77, which is the end of the tip side B of the probe 1 in the outer conductor 76. , It is located flush with each other, or is located on the distal end side B of the probe 1.
　上記構成によれば、電流経路が戻り経路を有さないことによって、不要な共振が抑制されるので、被測定物２の電気特性を精度良く測定できる。なお、外部接続端６２，８８は、外部導体端７７から他端側（先端側）Ｂに位置するということは、外部接続端６２，８８は、外部導体端７７よりも他端側（先端側）Ｂにずれて位置するか、または、外部導体端７７に対して面一であることを意味している。 According to the above configuration, since the current path does not have a return path, unnecessary resonance is suppressed, so that the electrical characteristics of the object 2 to be measured can be measured with high accuracy. The external connection ends 62, 88 are located on the other end side (tip side) B from the outer conductor end 77, which means that the external connection ends 62, 88 are on the other end side (tip side) of the outer conductor end 77. ) It means that it is located offset from B or is flush with respect to the outer conductor end 77.
　また、一実施形態の導体接続構造８では、
　前記外部接続端６２，８８が、前記誘電体７４における前記プローブ１の先端側Ｂの端である誘電端７５と、前記外部導体端７７との間に位置する。 Further, in the conductor connection structure 8 of one embodiment,
The external connection ends 62, 88 are located between the dielectric end 75, which is the end of the tip end side B of the probe 1 in the dielectric 74, and the external conductor end 77.
　上記実施形態によれば、中心導体７２および外部導体７６における短絡防止効果を高めることができる。 According to the above embodiment, the short circuit prevention effect of the central conductor 72 and the outer conductor 76 can be enhanced.
　また、一実施形態の導体接続構造８では、
　前記外部カバー部材１０が、その厚み方向に延在する外部貫通孔１８を有し、
　前記外部導体端７７が、前記外部貫通孔１８における前記プローブ１の先端側Ｂに形成される開口先端部１９よりも前記プローブ１の基端側Ａに位置するとともに、前記外部貫通孔１８に対面する位置にある。 Further, in the conductor connection structure 8 of one embodiment,
The outer cover member 10 has an outer through hole 18 extending in the thickness direction thereof.
The outer conductor end 77 is located on the proximal end side A of the probe 1 with respect to the opening tip 19 formed on the distal end side B of the probe 1 in the external through hole 18, and faces the outer through hole 18. Is in a position to do.
　上記実施形態によれば、外部貫通孔１８を通じて、外部導体端７７の位置確認が可能であり、外部導体７６および外部接続部６１，６７が電気的に接続されているか否かを確認できる。 According to the above embodiment, the position of the external conductor end 77 can be confirmed through the external through hole 18, and it can be confirmed whether or not the external conductor 76 and the external connecting portions 61 and 67 are electrically connected.
　また、一実施形態の導体接続構造８では、
　前記外部接続部が、ハンダ６１であり、
　前記外部貫通孔１８が、前記ハンダ６１を供給するハンダ供給部として働く。 Further, in the conductor connection structure 8 of one embodiment,
The external connection portion is solder 61, and is
The external through hole 18 serves as a solder supply unit for supplying the solder 61.
　上記実施形態によれば、固定および電気的な接続が容易である。 According to the above embodiment, fixed and electrical connection is easy.
　また、一実施形態の導体接続構造８では、
　前記外部接続部６１が、前記隙間１６に嵌め込まれる嵌め込み部材６７である。 Further, in the conductor connection structure 8 of one embodiment,
The external connection portion 61 is a fitting member 67 that is fitted into the gap 16.
　上記実施形態によれば、固定および電気的な接続が容易である。 According to the above embodiment, fixed and electrical connection is easy.
　また、一実施形態の導体接続構造８では、
　前記外部導体端７７が、前記中心導体７２における前記プローブ１の先端側Ｂに対して、前記プローブ１の基端側Ａに離間している。 Further, in the conductor connection structure 8 of one embodiment,
The outer conductor end 77 is separated from the distal end side B of the probe 1 in the central conductor 72 to the proximal end side A of the probe 1.
　上記実施形態によれば、中心導体７２および外部導体７６における短絡防止効果を高めることができる。 According to the above embodiment, the short circuit prevention effect of the central conductor 72 and the outer conductor 76 can be enhanced.
　また、一実施形態の導体接続構造８では、
　前記プローブ１によって測定される被測定物２が、コネクタ２である。 Further, in the conductor connection structure 8 of one embodiment,
The object 2 to be measured measured by the probe 1 is the connector 2.
　上記実施形態によれば、コネクタ２の電気特性を精度良く測定できる。 According to the above embodiment, the electrical characteristics of the connector 2 can be measured with high accuracy.
　この発明の別の局面に係るプローブ１は、
　上述した導体接続構造８を備えることを特徴とする。 The probe 1 according to another aspect of the present invention is
It is characterized by including the conductor connection structure 8 described above.
　上記構成によれば、電流経路が戻り経路を有さないことによって、不要な共振が抑制されるので、被測定物２の電気特性を精度良く測定できる。 According to the above configuration, since the current path does not have a return path, unnecessary resonance is suppressed, so that the electrical characteristics of the object 2 to be measured can be measured with high accuracy.
　この発明の別の局面に係る導体接続構造７は、
　中心導体７２、誘電体７４および外部導体７６が同軸に配置された同軸ケーブル７０が接続され、前記同軸ケーブル７０の前記中心導体７２に電気的に接続される測定ピン２０を有する、基端側Ａから先端側Ｂに延在するプローブ１における導体接続構造７であって、
　前記中心導体７２に対して隙間５６を有しながら覆う導電性の中心カバー部材５０と、
　前記中心導体７２を前記中心カバー部材５０に対して固定し且つ電気的に接続する導電性の中心接続部６４とを備え、
　前記中心接続部６４における前記プローブ１の基端側Ａの端である中心接続端６５は、前記中心カバー部材５０における前記プローブ１の基端側Ａの端である中心カバー端５７に対して、面一に位置するか、または、前記プローブ１の基端側Ａに位置する。 The conductor connection structure 7 according to another aspect of the present invention is
Base end side A having a measuring pin 20 to which a coaxial cable 70 in which a central conductor 72, a dielectric 74 and an outer conductor 76 are coaxially arranged is connected, and which is electrically connected to the central conductor 72 of the coaxial cable 70. The conductor connection structure 7 in the probe 1 extending from the tip side B to the tip side B.
A conductive center cover member 50 that covers the center conductor 72 while having a gap 56,
A conductive center connecting portion 64 for fixing and electrically connecting the center conductor 72 to the center cover member 50 is provided.
The central connection end 65, which is the end of the proximal end side A of the probe 1 in the central connection portion 64, is relative to the central cover end 57, which is the end of the proximal end side A of the probe 1 in the central cover member 50. It is located flush with each other or on the proximal end side A of the probe 1.
　上記構成によれば、電流経路が戻り経路を有さないことによって、不要な共振が抑制されるので、被測定物２の電気特性を精度良く測定できる。なお、中心接続端６５は、中心カバー端５７から基端側Ａに位置するということは、中心接続端６５は、中心カバー端５７よりも基端側Ａにずれているか、または、中心カバー端５７に対して面一であることを意味している。 According to the above configuration, since the current path does not have a return path, unnecessary resonance is suppressed, so that the electrical characteristics of the object 2 to be measured can be measured with high accuracy. The fact that the center connection end 65 is located on the base end side A from the center cover end 57 means that the center connection end 65 is displaced from the center cover end 57 to the base end side A, or the center cover end. It means that it is flush with 57.
　また、一実施形態の導体接続構造７では、
　前記中心接続端６５が、前記誘電体７４における前記プローブ１の先端側Ｂの端である誘電端７５と、前記中心カバー端５７との間に位置する。 Further, in the conductor connection structure 7 of one embodiment,
The center connection end 65 is located between the dielectric end 75, which is the end of the tip end side B of the probe 1 in the dielectric 74, and the center cover end 57.
　上記実施形態によれば、中心導体７２および外部導体７６における短絡防止効果を高めることができる。 According to the above embodiment, the short circuit prevention effect of the central conductor 72 and the outer conductor 76 can be enhanced.
　また、一実施形態の導体接続構造７では、
　前記中心カバー部材が、前記中心カバー部材５０の厚み方向に延在する中心貫通孔５８または中心切り欠き５９を有し、
　前記中心貫通孔５８または前記中心切り欠き５９を通じて、前記中心接続部６４が供給される。 Further, in the conductor connection structure 7 of one embodiment,
The central cover member has a central through hole 58 or a central notch 59 extending in the thickness direction of the central cover member 50.
The central connection portion 64 is supplied through the central through hole 58 or the central notch 59.
　上記実施形態によれば、隙間５６への中心接続部６４の供給が容易である。 According to the above embodiment, it is easy to supply the central connection portion 64 to the gap 56.
　また、一実施形態の導体接続構造７では、
　前記中心接続部６４が、ハンダ６４である。 Further, in the conductor connection structure 7 of one embodiment,
The central connection portion 64 is a solder 64.
　上記実施形態によれば、固定および電気的な接続が容易である。 According to the above embodiment, fixed and electrical connection is easy.
　また、一実施形態の導体接続構造７では、
　前記外部導体７６における前記プローブ１の先端側Ｂの端である外部導体端７７が、前記中心導体７２における前記プローブ１の先端側Ｂに対して、前記プローブ１の基端側Ａに離間している。 Further, in the conductor connection structure 7 of one embodiment,
The outer conductor end 77, which is the end of the distal end side B of the probe 1 in the outer conductor 76, is separated from the distal end side B of the probe 1 in the central conductor 72 with respect to the proximal end side A of the probe 1. There is.
　上記実施形態によれば、中心導体７２および外部導体７６における短絡防止効果を高めることができる。 According to the above embodiment, the short circuit prevention effect of the central conductor 72 and the outer conductor 76 can be enhanced.
　また、一実施形態の導体接続構造７では、
　前記プローブ１によって測定される被測定物２が、コネクタ２である。 Further, in the conductor connection structure 7 of one embodiment,
The object 2 to be measured measured by the probe 1 is the connector 2.
　上記実施形態によれば、コネクタ２の電気特性を精度良く測定できる。 According to the above embodiment, the electrical characteristics of the connector 2 can be measured with high accuracy.
　この発明の別の局面に係るプローブ１は、
　上述した導体接続構造７を備えることを特徴とする。 The probe 1 according to another aspect of the present invention is
It is characterized by including the conductor connection structure 7 described above.
　上記構成によれば、電流経路が戻り経路を有さないことによって、不要な共振が抑制されるので、被測定物２の電気特性を精度良く測定できる。 According to the above configuration, since the current path does not have a return path, unnecessary resonance is suppressed, so that the electrical characteristics of the object 2 to be measured can be measured with high accuracy.
　　１：プローブ
　　２：コネクタ（被測定物）
　　３：コネクタ端子（被測定端子）
　　７：中心導体接続構造（導体接続構造）
　　８：外部導体接続構造（導体接続構造）
　１０：バレル（外部カバー部材）
　１２：バレル本体
　１３：バレル内周面
　１４：第１収容部
　１５：先端貫通孔
　１６：外部隙間（隙間）
　１８：外部貫通孔（ハンダ供給部）
　１９：開口先端部
　２０：測定ピン
　２２：測定端部
　２４：接続端部
　３０：第１ブッシング
　４０：第２ブッシング
　４４：ソケット挿入部
　５０：ソケット（中心カバー部材）
　５１：ソケット外周面
　５４：第２収容部
　５６：中心隙間（隙間）
　５７：ソケット端（中心カバー端）
　５８：中心貫通孔（ハンダ供給部）
　５９：中心切り欠き（ハンダ供給部）
　６１：ハンダ（外部接続部、外部接続部材）
　６２：外部接続端
　６４：ハンダ（中心接続部、中心接続部材）
　６５：中心接続端
　６７：嵌め込み部材（外部接続部、外部接続部材）
　６８：当接端面
　６９：当接周面
　７０：同軸ケーブル
　７２：中心導体
　７３：中心導体端
　７４：誘電体
　７５：誘電端
　７６：外部導体
　７７：外部導体端
　７８：外皮
　８２：中心導体外周面
　８６：外部導体内周面
　８７：嵌め込み内周面
　８８：外部接続端
　　Ａ：基端側（一端側）
　　Ｂ：先端側（他端側） 1: Probe 2: Connector (measured object)
3: Connector terminal (measured terminal)
7: Center conductor connection structure (conductor connection structure)
8: External conductor connection structure (conductor connection structure)
10: Barrel (external cover member)
12: Barrel body 13: Barrel inner peripheral surface 14: First accommodating part 15: Tip through hole 16: External gap (gap)
18: External through hole (solder supply part)
19: Opening tip 20: Measuring pin 22: Measuring end 24: Connection end 30: First bushing 40: Second bushing 44: Socket insertion part 50: Socket (center cover member)
51: Socket outer peripheral surface 54: Second accommodating part 56: Center gap (gap)
57: Socket end (center cover end)
58: Central through hole (solder supply part)
59: Central notch (solder supply section)
61: Solder (external connection part, external connection member)
62: External connection end 64: Solder (center connection part, center connection member)
65: Center connection end 67: Fitting member (external connection part, external connection member)
68: Contact end surface 69: Contact peripheral surface 70: Coaxial cable 72: Center conductor 73: Center conductor end 74: Dielectric 75: Dielectric end 76: Outer conductor 77: Outer conductor end 78: Outer skin 82: Center conductor outer peripheral surface 86: Inner peripheral surface of outer conductor 87: Inner peripheral surface of fitting 88: External connection end A: Base end side (one end side)
B: Tip side (other end side)

Claims (15)

  1. 　中心導体、誘電体および外部導体が同軸に配置された同軸ケーブルが接続され、前記同軸ケーブルの前記中心導体に電気的に接続される測定ピンを有する、基端側から先端側に延在するプローブにおける導体接続構造であって、
    　前記外部導体に対して隙間を有しながら覆う導電性の外部カバー部材と、
    　前記外部導体を前記外部カバー部材に対して固定し且つ電気的に接続する導電性の外部接続部とを備え、
    　前記外部接続部における前記プローブの先端側の端である外部接続端は、前記外部導体における前記プローブの先端側の端である外部導体端に対して、面一に位置するか、または、前記プローブの先端側に位置する、導体接続構造。     A probe extending from the proximal end side to the distal end side having a measuring pin to which a coaxial cable in which a central conductor, a dielectric and an outer conductor are arranged coaxially is connected and electrically connected to the central conductor of the coaxial cable. It is a conductor connection structure in
    A conductive outer cover member that covers the outer conductor with a gap,
    It is provided with a conductive external connection portion for fixing and electrically connecting the external conductor to the external cover member.
    The external connection end, which is the distal end of the probe in the external connection, is either flush with the external conductor end, which is the distal end of the probe in the external conductor, or the probe. Conductor connection structure located on the tip side of.
  2. 　前記外部接続端が、前記誘電体における前記プローブの先端側の端である誘電端と、前記外部導体端との間に位置する、請求項１に記載の導体接続構造。 The conductor connection structure according to claim 1, wherein the external connection end is located between the dielectric end of the dielectric, which is the end on the distal end side of the probe, and the external conductor end.
  3. 　前記外部カバー部材が、その厚み方向に延在する外部貫通孔を有し、
    　前記外部導体端が、前記外部貫通孔における前記プローブの先端側に形成される開口先端部よりも前記プローブの基端側に位置するとともに、前記外部貫通孔に対面する位置にある、請求項１または請求項２に記載の導体接続構造。     The outer cover member has an external through hole extending in the thickness direction thereof.
    1 Alternatively, the conductor connection structure according to claim 2.
  4. 　前記外部接続部が、ハンダであり、
    　前記外部貫通孔が、前記ハンダを供給するハンダ供給部として働く、請求項３に記載の導体接続構造。     The external connection portion is solder and is
    The conductor connection structure according to claim 3, wherein the external through hole acts as a solder supply unit for supplying the solder.
  5. 　前記外部接続部が、前記隙間に嵌め込まれる嵌め込み部材である、請求項１から請求項３のいずれか１項に記載の導体接続構造。 The conductor connection structure according to any one of claims 1 to 3, wherein the external connection portion is a fitting member that is fitted into the gap.
  6. 　前記外部導体端が、前記中心導体における前記プローブの先端側に対して、前記プローブの基端側に離間している、請求項１から請求項５のいずれか１項に記載の導体接続構造。 The conductor connection structure according to any one of claims 1 to 5, wherein the outer conductor end is separated from the tip end side of the probe in the center conductor to the base end side of the probe.
  7. 　前記プローブによって測定される被測定物が、コネクタである、請求項１から請求項６いずれか１項に記載の導体接続構造。 The conductor connection structure according to any one of claims 1 to 6, wherein the object to be measured measured by the probe is a connector.
  8. 　請求項１から請求項７のいずれか１項に記載の前記導体接続構造を備える、プローブ。 A probe having the conductor connection structure according to any one of claims 1 to 7.
  9. 　中心導体、誘電体および外部導体が同軸に配置された同軸ケーブルが接続され、前記同軸ケーブルの前記中心導体に電気的に接続される測定ピンを有する、基端側から先端側に延在するプローブにおける導体接続構造であって、
    　前記中心導体に対して隙間を有しながら覆う導電性の中心カバー部材と、
    　前記中心導体を前記中心カバー部材に対して固定し且つ電気的に接続する導電性の中心接続部とを備え、
    　前記中心接続部における前記プローブの基端側の端である中心接続端は、前記中心カバー部材における前記プローブの基端側の端である中心カバー端に対して、面一に位置するか、または、前記プローブの基端側に位置する、導体接続構造。     A probe extending from the proximal end side to the distal end side having a measuring pin to which a coaxial cable in which a central conductor, a dielectric and an outer conductor are arranged coaxially is connected and electrically connected to the central conductor of the coaxial cable. It is a conductor connection structure in
    A conductive center cover member that covers the center conductor with a gap,
    It is provided with a conductive center connection portion for fixing and electrically connecting the center conductor to the center cover member.
    The central connection end, which is the end of the probe on the proximal end side of the central connection portion, is located flush with respect to the central cover end, which is the distal end of the probe in the central cover member. , A conductor connection structure located on the proximal end side of the probe.
  10. 　前記中心接続端が、前記誘電体における前記プローブの先端側の端である誘電端と、前記中心カバー端との間に位置する、請求項９に記載の導体接続構造。 The conductor connection structure according to claim 9, wherein the center connection end is located between the dielectric end of the dielectric, which is the end on the tip end side of the probe, and the center cover end.
  11. 　前記中心カバー部材が、その厚み方向に延在する中心貫通孔または中心切り欠きを有し、
    　前記中心貫通孔または前記中心切り欠きを通じて、前記中心接続部が供給される、請求項９または請求項１０に記載の導体接続構造。     The central cover member has a central through hole or central notch extending in the thickness direction thereof.
    The conductor connection structure according to claim 9 or 10, wherein the center connection portion is supplied through the center through hole or the center notch.
  12. 　前記中心接続部が、ハンダである、請求項９に記載の導体接続構造。 The conductor connection structure according to claim 9, wherein the central connection portion is solder.
  13. 　前記外部導体における前記プローブの先端側の端である外部導体端が、前記中心導体における前記プローブの先端側に対して、前記プローブの基端側に離間している、請求項９から請求項１２のいずれか１項に記載の導体接続構造。 Claims 9 to 12 wherein the end of the outer conductor, which is the end on the tip end side of the probe in the outer conductor, is separated from the tip end side of the probe in the center conductor toward the proximal end side of the probe. The conductor connection structure according to any one of the above items.
  14. 　前記プローブによって測定される被測定物が、コネクタである、請求項９から請求項１３のいずれか１項に記載の導体接続構造。 The conductor connection structure according to any one of claims 9 to 13, wherein the object to be measured measured by the probe is a connector.
  15. 　請求項９から請求項１４のいずれか１項に記載の前記導体接続構造を備える、プローブ。 A probe having the conductor connection structure according to any one of claims 9 to 14.
PCT/JP2021/023800 2020-07-16 2021-06-23 Conductor connecting structure, and probe provided with said conductor connecting structure WO2022014285A1 (en)

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61118984A (en) * 1984-11-06 1986-06-06 エーデイーシー　テレコミユニケーシヨンズ，インコーポレイテイド Plug and manufacture thereof
JP2014123482A (en) * 2012-12-21 2014-07-03 Murata Mfg Co Ltd Coaxial connector for inspection
JP2014225345A (en) * 2013-05-15 2014-12-04 日立金属株式会社 Termination structure, termination method and termination terminal of high speed transmission line
JP2015225766A (en) * 2014-05-28 2015-12-14 Smk株式会社 Airtight coaxial connector
CN105337122A (en) * 2014-08-13 2016-02-17 吉佳蓝科技股份有限公司 Coaxial connector for inspection
US20170302042A1 (en) * 2016-04-13 2017-10-19 Trisimian, Llc Dc solderless connector
JP2019153465A (en) * 2018-03-02 2019-09-12 日本圧着端子製造株式会社 Coaxial connector
WO2020175347A1 (en) * 2019-02-27 2020-09-03 株式会社村田製作所 Probe element and probe unit

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61118984A (en) * 1984-11-06 1986-06-06 エーデイーシー　テレコミユニケーシヨンズ，インコーポレイテイド Plug and manufacture thereof
JP2014123482A (en) * 2012-12-21 2014-07-03 Murata Mfg Co Ltd Coaxial connector for inspection
JP2014225345A (en) * 2013-05-15 2014-12-04 日立金属株式会社 Termination structure, termination method and termination terminal of high speed transmission line
JP2015225766A (en) * 2014-05-28 2015-12-14 Smk株式会社 Airtight coaxial connector
CN105337122A (en) * 2014-08-13 2016-02-17 吉佳蓝科技股份有限公司 Coaxial connector for inspection
US20170302042A1 (en) * 2016-04-13 2017-10-19 Trisimian, Llc Dc solderless connector
JP2019153465A (en) * 2018-03-02 2019-09-12 日本圧着端子製造株式会社 Coaxial connector
WO2020175347A1 (en) * 2019-02-27 2020-09-03 株式会社村田製作所 Probe element and probe unit

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