WO2022007101A1 - Mems 陀螺仪及电子产品 - Google Patents

Mems 陀螺仪及电子产品 Download PDF

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Publication number
WO2022007101A1
WO2022007101A1 PCT/CN2020/108373 CN2020108373W WO2022007101A1 WO 2022007101 A1 WO2022007101 A1 WO 2022007101A1 CN 2020108373 W CN2020108373 W CN 2020108373W WO 2022007101 A1 WO2022007101 A1 WO 2022007101A1
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WO
WIPO (PCT)
Prior art keywords
electrode
ring member
annular
annular member
mems gyroscope
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Ceased
Application number
PCT/CN2020/108373
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English (en)
French (fr)
Inventor
马昭
占瞻
杨珊
李杨
谭秋喻
洪燕
黎家健
张睿
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AAC Technologies Holdings Shenzhen Co Ltd
AAC Technologies Holdings Nanjing Co Ltd
Original Assignee
AAC Acoustic Technologies Shenzhen Co Ltd
AAC Technologies Holdings Nanjing Co Ltd
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Application filed by AAC Acoustic Technologies Shenzhen Co Ltd, AAC Technologies Holdings Nanjing Co Ltd filed Critical AAC Acoustic Technologies Shenzhen Co Ltd
Publication of WO2022007101A1 publication Critical patent/WO2022007101A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Definitions

  • the invention relates to the technical field of gyroscopes, in particular to a MEMS gyroscope and electronic products.
  • Micro mechanical gyroscope namely MEMS (Micro Electron Mechanical systems) gyroscope, which is a typical angular velocity microsensor, has a very wide range of applications in the consumer electronics market due to its advantages of small size, low power consumption and convenient processing. In recent years, with the gradual improvement of the performance of MEMS gyroscopes, they are widely used in automotive, industrial, virtual reality and other fields.
  • MEMS Micro Electron Mechanical systems
  • the geometric structure of the ring gyroscope is highly symmetrical, the driving/detecting modes of the gyroscope are exactly the same, the sensitivity is high, and the structure is simple.
  • the existing ring gyroscope is limited in structure and space layout, and the capacitance that can be accommodated is small, and there are application limitations.
  • the invention mainly provides a MEMS gyroscope and an electronic product, which can improve the capacitance of the gyroscope and improve the sensitivity and quality factor.
  • a technical solution adopted by the present invention is to provide a MEMS gyroscope, the MEMS gyroscope comprises: a base; a first annular member is in the shape of a positive 8N-pointed star and is suspended on the base, N is a positive integer; the second ring member, in the shape of a positive 8N-pointed star, is sleeved on the outside of the first ring member and is spaced from the first ring member, and is suspended on the base; the first connecting member , respectively connecting the first ring member and the second ring member; a fixing member, fixedly connected to the base, sleeved on the outside of the second ring member and spaced from the second ring member; the second ring member a connecting piece, which is respectively connected to the second annular piece and the fixing piece; an electrode assembly, which is fixedly connected to the base, and used to form a capacitor with at least one of the first annular piece and the second annular piece
  • the electrode assembly includes a first electrode group and a second electrode group, the first electrode group includes a first driving electrode and a first detection electrode, the first driving electrode and the first
  • the ring members are arranged at intervals to form a first capacitor, and the first capacitor is used to drive the first ring member to vibrate along the first direction and the second direction to form a first vibration mode;
  • the second electrode group It includes a second drive electrode and a second detection electrode, the second drive electrode and the second ring member are spaced apart to form a third capacitor, and the third capacitor is used to drive the second ring member along the first direction and The second direction vibrates to form a second vibration mode; the first vibration mode and the second vibration mode vibrate asynchronously.
  • the first detection electrode and the first ring member are spaced apart to form a second capacitor, and the second capacitor is used to detect the first ring member along the 45-degree direction or the Vibration displacement in the direction of 135 degrees, the second detection electrode is spaced from the second ring member to form a fourth capacitor, and the fourth capacitor is used to detect the second ring member along the 45 degree direction or the 135 degree Vibration displacement in the direction.
  • the first electrode group is annularly arranged on the inner side of the first annular member
  • the second electrode group is annularly arranged on the outer side of the second annular member.
  • the number of the first electrode group and the second electrode group are both two, and the two first electrode groups are annularly arranged on the inner side and the outer side of the first annular member, respectively,
  • the two second electrode groups are annularly arranged on the inner side and the outer side of the second annular member, respectively.
  • first connecting member and the second connecting member are both elastic connecting members.
  • the number of the first connector and the second connector are multiple, and the plurality of first connectors and the plurality of second connectors are arranged in a circular array.
  • the electrode assembly has a positive 8N star shape.
  • At least one of the first electrode group and the second electrode group further includes functional electrodes, and the functional electrodes include a plurality of electrodes for frequency modulation or elimination of quadrature errors.
  • a technical solution adopted by the present invention is to provide an electronic product, and the electronic product includes the above-mentioned MEMS gyroscope.
  • the MEMS gyroscope provided by the present invention includes a base; the first annular member is in the shape of a positive 8N star and is suspended on the base; the second annular member is in the form of a positive 8N angle
  • the star shape is sleeved on the outside of the first ring member and is spaced from the first ring member, and is suspended on the base;
  • the first connecting member is respectively connected to the first ring member and the second ring member;
  • the fixing member is fixed to the base connection, sleeved on the outside of the second ring member and spaced from the second ring member;
  • the second connection member is respectively connected with the second ring member and the fixing member;
  • the electrode assembly is fixedly connected with the base and used for connecting with the first ring member and the fixing member.
  • At least one of the second ring members forms a capacitor, so as to drive the first ring member and the second ring member to vibrate in the first and second directions that are perpendicular to each other, and detect that the first ring member and the second ring member are parallel to the first ring member and the second ring member.
  • the angle of the direction is 45 degrees or the vibration displacement of the first direction is 135 degrees.
  • the geometric structure of the star-shaped gyroscope is highly symmetrical, and through the first ring member and the second ring member. At least one of them forms a capacitor with the electrode assembly, which improves the capacitance of the gyroscope and improves the sensitivity.
  • the use of the star-shaped easy-to-deform characteristic reduces the thermal elastic loss during vibration and improves the quality factor of the gyroscope.
  • FIG. 1 is a schematic structural diagram of a MEMS gyroscope 1 provided by the present invention.
  • FIG. 2 is a schematic three-dimensional structural diagram of the MEMS gyroscope 1 shown in FIG. 1 with the substrate removed.
  • FIG. 3 is a schematic front view of the three-dimensional structure shown in FIG. 2 .
  • FIG. 4 is a schematic diagram of a driving mode simulation of the MEMS gyroscope 1 in FIG. 1 .
  • FIG. 5 is a schematic diagram of a detection mode simulation of the MEMS gyroscope 1 in FIG. 1 .
  • FIG. 6 is an enlarged schematic view of part A in FIG. 3 .
  • FIG. 7 is an enlarged schematic view of part B in FIG. 3 .
  • the MEMS gyroscope 1 in this embodiment includes a substrate 10 , a first annular member 11 , a second annular member 12 , a first connecting member 13 , a fixing member 14 , and a second connecting member 15 and electrode assembly 16.
  • the base 10 is used to provide fixed support.
  • the first annular member 11 is a positive 8N-pointed star, and N is a positive integer.
  • the first annular member 11 is a positive 16-pointed star.
  • the first annular member 11 is suspended on the base 10 .
  • the second ring member 12 is sleeved on the outer side of the first ring member 11 and is spaced from the first ring member 11, and is suspended on the base 10, that is, the first ring member 11 is located inside the second ring member 12 and is adjacent to the first ring member 11.
  • the two ring members 12 are arranged at intervals.
  • the second annular member 12 is in the shape of a positive 8N-pointed star, and N is a positive integer.
  • the second annular member 12 is a positive 16-pointed star.
  • the first connecting member 13 is respectively connected to the first annular member 11 and the second annular member 12, that is, the first connecting member 13 is disposed between the first annular member 11 and the second annular member 12, and one end of the first connecting member 13 is connected to The first ring member 11 is connected to the second ring member 12 at the other end.
  • the number of the first connecting pieces 13 is plural, and the plural first connecting pieces 13 are arranged in a circular array.
  • the circumferential direction of 11 is arranged in a circular array.
  • the number of the first connectors 13 is 4M, and M is a positive integer.
  • M is 8.
  • the first connecting member 13 is an elastic connecting member, for example, a coil spring.
  • the fixing member 14 is fixedly connected with the base 10 to provide fixed support, the base 10 and the fixing member 14 are fixedly connected by gluing, or, the two are integrally formed, and the outer contour of the fixing member 14 can be a circle or a regular polygonal star, In this embodiment, a regular polygonal star is used as an example.
  • the fixing member 14 is sleeved on the outer side of the second ring member 12 and is spaced from the second ring member 12 .
  • the second connecting member 15 is respectively connected to the second annular member 12 and the fixing member 14 , that is, the second connecting member 15 is disposed between the second annular member 12 and the fixing member 14 , and one end of the second connecting member 15 is connected to the second annular member 12, the other end is connected to the fixing piece 14.
  • the number of the second connecting members 15 is multiple, and the multiple second connecting members 15 are arranged in a circular array. Circular array arrangement.
  • the number of second connectors 15 is 4M, and M is a positive integer.
  • M is 8.
  • the second connecting member 15 is an elastic connecting member, for example, a spring.
  • the electrode assembly 16 is fixedly connected to the base 10 for forming a capacitance with at least one of the first annular member 11 and the second annular member 12, so as to drive the first annular member 11 and the second annular member 12 along a first direction perpendicular to each other Vibrate in and the second direction, and detect the vibration displacement of the first ring member 11 and the second ring member 12 along a direction of 45 degrees with the first direction or a direction of 135 degrees with the first direction.
  • the X-axis direction is the first direction and the Y-axis direction is the second direction.
  • the first direction is not limited to the X-axis direction only, and the second direction is only the X-axis direction.
  • Y-axis direction is only the X-axis direction.
  • the electrode assembly 16 includes a first electrode group 161 and a second electrode group 162 .
  • the first electrode group 161 includes a first driving electrode 1611 and a first detection electrode 1612 .
  • the first driving electrode 1611 is spaced apart from the first annular member 11 to form a first capacitor 1601 .
  • an alternating current is applied to the first driving electrode 1611, so that the first capacitor 1601 generates a driving force to drive the first ring member 11 to vibrate along the first direction X and the second direction Y to form the first vibration mode S1.
  • the first detection electrode 1612 is spaced apart from the first annular member 11 to form a second capacitor 1602 .
  • the second electrode group 162 includes a second driving electrode 1621 and a second detection electrode 1622 .
  • the second driving electrode 1621 and the second ring member 12 are spaced apart to form a third capacitor 1603.
  • an alternating current is input to the third capacitor 1603, so that the third capacitor 1603 drives the second ring member 12 along the first direction X and the second ring member 12.
  • Two-direction Y vibration forms a second vibration form S2, and the first vibration form S1 and the second vibration form S2 vibrate asynchronously.
  • the second detection electrode 1622 is spaced apart from the second annular member 12 to form a fourth capacitor 1604 .
  • the gyroscope 1 is generally used in electronic products.
  • the first annular member 11 is driven by the driving force generated by the first capacitor 1601 along the first direction X and the second Vibrating in the direction Y, the second annular member 12 vibrates along the first direction X and the second direction Y under the driving action of the driving force generated by the third capacitor 1063, forming a vibration mode as shown in FIG. 4 .
  • asynchronous vibration means that when the first ring member 11 and the second ring member 12 vibrate, the vibration directions are opposite, and the vibration phases differ by 180°.
  • the vibration directions are opposite, and the vibration phases differ by 180°.
  • the first ring member when the 11 vibrates outward, the second ring member 12 vibrates inward, and in the Y direction, the first ring member 11 vibrates inward, and the second ring member 12 vibrates outward.
  • the angular velocity of the electronic product rotation generates the first Coriolis force F3 of the first ring member 11 along the 45-degree direction D and the 135-degree direction M, and the second ring member 12 along the 45-degree direction M.
  • the second Coriolis force F4 in the direction D and the 135-degree direction M, the first Coriolis force F3 and the second Coriolis force F4 force the first ring member 11 and the second ring member 12 along the 45-degree directions D and F4 respectively.
  • the 135-degree direction M vibrates to form the detection mode as shown in Figure 5.
  • the second capacitor 1602 is used to detect the vibration displacement of the first ring member 11 along the 45-degree direction D or the 135-degree direction M, that is, the vibration is calculated according to the change in capacitance. Displacement; the fourth capacitor 1604 is used to detect the vibration displacement of the second ring member 12 along the 45-degree direction D or the 135-degree direction M, that is, the vibration displacement is calculated according to the change in capacitance, and the angular velocity of the electronic product can be obtained through arithmetic processing. .
  • first connecting member 13 and the second connecting member 15 are both elastic connecting members, therefore , when the first ring member 11 and the second ring member 12 are deformed, the first connecting member 13 and the second connecting member 15 are also deformed, so that the gyroscope 10 in this embodiment has greater rigidity , the higher the modal frequency, the better anti-vibration characteristics.
  • the first ring member 11 is driven to vibrate by the first driving electrode 1611, the vibration displacement is detected by the first detection electrode 1612, the second ring member 12 is driven to vibrate by the second driving electrode 1621, and the vibration displacement is detected by the first detection electrode 1612.
  • the second detection electrode 1622 detects the vibration displacement of the second ring member 12.
  • the first ring member 11 and the second ring member 12 may be driven to vibrate by only one driving electrode.
  • the first capacitor 1602 formed by the first ring member 11 or the third capacitor 1603 formed by the second driving electrode 1621 and the second ring member 12 drives the first ring member 11 and the second ring member 12 to vibrate in the first and second directions
  • the vibration displacement of the first ring member 11 and the second ring member 12 can also be detected by only one detection electrode, for example, the third capacitor 1603 formed by the first detection electrode 1612 and the first ring member 11 or the second drive electrode 1622 and the
  • the fourth capacitor 1604 formed by the second annular member 12 detects the vibration displacement of the first annular member 11 and the second annular member 12 along the 45-degree direction or the 135-degree direction, and finally obtains the magnitude of the angular velocity of the rotation of the electronic product.
  • the principle is the same as the above The description is the same and will not be repeated here.
  • first electrode assembly 161 and the second electrode assembly 162 in this embodiment further includes a functional electrode 1613
  • the functional electrode 1613 includes a plurality of electrodes that can be respectively used for frequency modulation or elimination of quadrature errors.
  • both the first electrode assembly 161 and the second electrode assembly 162 include a plurality of functional electrodes 1613 .
  • the first electrode group 161 is annularly arranged on the inner side of the first annular member 11
  • the second electrode group 162 is annularly arranged on the outer side of the second annular member 12
  • the arrangement of the first electrode group 161 and the second electrode group 162 is not limited to this.
  • the number of the first electrode group 161 and the second electrode group 162 is two, and the two first electrode groups 161 are respectively arranged in a ring shape.
  • the two second electrode groups 162 are annularly arranged on the inner and outer sides of the second annular member 12 , respectively.
  • the electrode assembly 16 is in the shape of a positive 8N-pointed star, and N is a positive integer.
  • the electrode assembly 16 is in the shape of a positive 16-pointed star.
  • This embodiment also provides an electronic product, and the electronic product includes the MEMS gyroscope 1 in the above embodiment.
  • the MEMS gyroscope includes a base; a first annular member is in the shape of a positive 8N star and is suspended on the base; the second annular member is in the shape of a positive 8N star and is sleeved on the first annular
  • the outer side of the component is spaced from the first annular component and suspended on the base; the first connecting component is connected to the first annular component and the second annular component respectively; the fixing component is fixedly connected to the base and sleeved on the second annular component
  • the outer side is arranged at intervals from the second annular member; the second connecting member is respectively connected to the second annular member and the fixing member; the electrode assembly is fixedly connected to the base and used to form with at least one of the first annular member and the second annular member Capacitance to drive the first ring member and the second ring member to vibrate in the first and second directions perpendicular to each other, and detect that the first ring member and the second ring member are
  • the vibration displacement in the 135-degree direction with the included angle of the first direction utilizes the highly symmetrical feature of the star-shaped gyroscope geometric structure, and forms a capacitance with the electrode assembly through at least one of the first ring member and the second ring member,
  • the capacitance of the gyroscope is increased, and the sensitivity is improved.
  • the use of the star-shaped easy-to-deform property reduces the thermoelastic loss during vibration and improves the quality factor of the gyroscope.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
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Abstract

一种MEMS陀螺仪(1)及电子产品，陀螺仪(1)包括基底(10)、悬置于基底(10)上的第一环形件(11)、套设于第一环形件(11)外侧并与第一环形件(11)间隔设置的第二环形件(12)、连接第一环形件(11)及第二环形件(12)的第一连接件(13)、固定件(14)、连接第二环形件(12)及固定件(14)的第二连接件(15)及与第一环形件(11)及第二环形件(12)形成电容的电极组件(16)。陀螺仪(10)一方面利用星形陀螺仪几何结构高度对称的特征，且通过第一环形件(11)与第二环形件(12)中的至少一个与电极组件(16)形成电容，提高陀螺仪(10)的电容，提高灵敏度，另一方面利用星形易变形的特性，振动时热弹性损失较小，提高陀螺仪(10)的品质因数。

Description

MEMS陀螺仪及电子产品 技术领域
本发明涉及陀螺仪技术领域，特别是涉及一种MEMS陀螺仪及电子产品。
 背景技术
微机械陀螺仪，即MEMS（Micro Electro Mechanical systems）陀螺仪，是一种典型的角速度微传感器，由于其尺寸小、功耗低和加工方便等优势在消费电子市场有着非常广泛的应用。近年来随着MEMS陀螺仪性能的逐步提升，广泛应用于汽车、工业、虚拟现实等领域。
环形陀螺仪的几何结构高度对称，陀螺的驱/检模态完全相同，灵敏度高，且结构简单，逐步成为实用较为广泛的高性能陀螺仪。但是，现有的环形陀螺仪受限于结构和空间布局，可够容纳的电容量较小，存在着应用的局限。
因而，有必要提供一种新的MEMS陀螺仪以解决上述的问题。
 技术问题
本发明主要是提供一种MEMS陀螺仪及电子产品，能够提高陀螺仪的电容，提高灵敏度及品质因数。
 技术解决方案
为解决上述技术问题，本发明采用的一个技术方案是：提供一种MEMS陀螺仪，所述MEMS陀螺仪包括：基底；第一环形件，呈正8N角星形且悬置于所述基底上，N为正整数；第二环形件，呈正8N角星形，套设于所述第一环形件外侧并与所述第一环形件间隔设置，且悬置于所述基底上；第一连接件，分别连接所述第一环形件及所述第二环形件；固定件，与所述基底固定连接，套设于所述第二环形件外侧并与所述第二环形件间隔设置；第二连接件，分别连接所述第二环形件及所述固定件；电极组件，与所述基底固定连接，用于与所述第一环形件及所述第二环形件中的至少一个形成电容，以驱动所述第一环形件及所述第二环形件沿相互垂直的第一方向和第二方向振动，并检测所述第一环形件及所述第二环形件沿与所述第一方向的夹角呈45度方向或与所述第一方向的夹角呈135度方向的振动位移。
在一具体实施方式中，所述电极组件包括第一电极组及第二电极组，所述第一电极组包括第一驱动电极及第一检测电极，所述第一驱动电极与所述第一环形件间隔设置形成第一电容，所述第一电容用于驱动所述第一环形件沿所述第一方向及所述第二方向振动，形成第一振动模态；所述第二电极组包括第二驱动电极和第二检测电极，所述第二驱动电极与所述第二环形件间隔设置形成第三电容，第三电容用于驱动所述第二环形件沿所述第一方向及所述第二方向振动，形成第二振动模态；所述第一振动模态与所述第二振动模态异步振动。
在一具体实施方式中，所述第一检测电极与所述第一环形件间隔设置形成第二电容，所述第二电容用于检测所述第一环形件沿所述45度方向或所述135度方向的振动位移，所述第二检测电极与第二环形件间隔设置形成第四电容，所述第四电容用于检测所述第二环形件沿所述45度方向或所述135度方向的振动位移。
在一具体实施方式中，所述第一电极组环形布设于所述第一环形件的内侧，所述第二电极组环形布设于所述第二环形件的外侧。
在一具体实施方式中，所述第一电极组及所述第二电极组的数量均为两个，所述两个第一电极组分别环形布设于所述第一环形件的内侧及外侧，所述两个第二电极组分别环形布设于所述第二环形件的内侧及外侧。
在一具体实施方式中，所述第一连接件与所述第二连接件均为弹性连接件。
在一具体实施方式中，所述第一连接件与所述第二连接件的数量均为多个，所述多个第一连接件及所述多个第二连接件均呈圆周阵列设置。
在一具体实施方式中，所述电极组件呈正8N角星形。
在一具体实施方式中，所述第一电极组及所述第二电极组中的至少一个还包括功能电极，所述功能电极包括用于调频或消除正交误差的多个电极。
为解决上述技术问题，本发明采用的一个技术方案是：提供一种电子产品，所述电子产品包括上述的MEMS陀螺仪。
 有益效果
本发明的有益效果是：区别于现有技术的情况，本发明提供的MEMS陀螺仪包括基底；第一环形件，呈正8N角星形且悬置于基底上；第二环形件，呈正8N角星形，套设于第一环形件外侧并与第一环形件间隔设置，且悬置于基底上；第一连接件，分别连接第一环形件及第二环形件；固定件，与基底固定连接，套设于第二环形件外侧并与第二环形件间隔设置；第二连接件，分别连接第二环形件及固定件；电极组件，与基底固定连接，用于与第一环形件及第二环形件中的至少一个形成电容，以驱动第一环形件及第二环形件沿相互垂直的第一方向和第二方向振动，并检测第一环形件及第二环形件沿与第一方向的夹角呈45度方向或与第一方向的夹角呈135度方向的振动位移，一方面利用星形陀螺仪几何结构高度对称的特征，且通过第一环形件与第二环形件中的至少一个与电极组件形成电容，提高陀螺仪的电容，提高灵敏度，另一方面利用星形易变形的特性，振动时热弹性损失较小，提高陀螺仪的品质因数。
 附图说明
为了更清楚地说明本发明实施例中的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图，其中。
图1是本发明提供的MEMS陀螺仪1的结构示意图。
图2是图1中所示的MEMS陀螺仪1去除基底的立体结构示意图。
图3是图2所示立体结构的正面示意图。
图4是图1中MEMS陀螺仪1的驱动模态仿真示意图。
图5是图1中MEMS陀螺仪1的检测模态仿真示意图。
图6是图3中A部分的放大示意图。
图7是图3中B部分的放大示意图。
 本发明的实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅是本发明的一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
需要说明，本发明实施例中所有方向性指示（诸如上、下、左、右、前、后……）仅用于解释在某一特定姿态（如附图所示）下各部件之间的相对位置关系、运动情况等，如果该特定姿态发生改变时，则该方向性指示也相应地随之改变。
还需要说明的是，当元件被称为“固定于”或“设置于”另一个元件上时，它可以直接在另一个元件上或者可能同时存在居中元件。当一个元件被称为是“连接”另一个元件，它可以是直接连接另一个元件或者可能同时存在居中元件。
另外，在本发明中涉及“第一”、“第二”等的描述仅用于描述目的，而不能理解为指示或暗示其相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。另外，各个实施例之间的技术方案可以相互结合，但是必须是以本领域普通技术人员能够实现为基础，当技术方案的结合出现相互矛盾或无法实现时应当认为这种技术方案的结合不存在，也不在本发明要求的保护范围之内。
请参阅图1、图2及图3，本实施方式中的MEMS陀螺仪1包括基底10、第一环形件11、第二环形件12、第一连接件13、固定件14、第二连接件15及电极组件16。
其中，基底10用于提供固定支撑。
第一环形件11为正8N角星形，N为正整数，比如在本实施方式中，第一环形件11为正16角星。
其中，第一环形件11悬置于基底10上。
第二环形件12套设于第一环形件11外侧并与第一环形件11间隔设置，且悬置于基底10上，也即第一环形件11位于第二环形件12的内侧并于第二环形件12间隔设置。
其中，第二环形件12呈正8N角星形，N为正整数，比如在本实施方式中，第二环形件12为正16角星。
第一连接件13分别连接第一环形件11及第二环形件12，也即第一连接件13设置于第一环形件11与第二环形件12之间，第一连接件13的一端连接第一环形件11，另一端连接第二环形件12。
其中，第一连接件13的数量为多个，多个第一连接件13呈圆周阵列设置，在本实施方式中，也即多个第一连接件13沿正8N角星的第一环形件11的周向呈圆周阵列排布。
可选地，第一连接件13的数量为4M个，M为正整数，比如在本实施方式中，第一连接件13的数量为8个。
进一步的，在本实施方式中，第一连接件13为弹性连接件，例如，可以为螺旋弹簧。
固定件14与基底10固定连接用于提供固定支撑，基底10与固定件14通过胶粘固定连接，或，两者一体成型，该固定件14的外轮廓可以是圆形或正多角星形，本实施例图示中以正多角星形为例。
其中，固定件14套设于第二环形件12外侧并与第二环形件12间隔设置。
第二连接件15分别连接第二环形件12及固定件14，也即第二连接件15设置于第二环形件12与固定件14之间，第二连接件15的一端连接第二环形件12，另一端连接固定件14。
其中，第二连接件15的数量为多个，多个第二连接件15呈圆周阵列设置，在本实施方式中，也即多个第二连接件15沿第二环形件12的周向呈圆周阵列排布。
可选地，第二连接件15的数量为4M个，M为正整数，比如在本实施方式中，第二连接件15的数量为8个。
进一步的，在本实施方式中，第二连接件15为弹性连接件，例如，可以是弹簧。
电极组件16与基底10固定连接，用于与第一环形件11及第二环形件12中的至少一个形成电容，以驱动第一环形件11及第二环形件12沿相互垂直的第一方向和第二方向振动，并检测第一环形件11及第二环形件12沿与第一方向的夹角呈45度方向或与第一方向的夹角呈135度方向的振动位移。
在本实施方式中，以如图3所示X轴方向为第一方向、Y轴方向为第二方向为例进行说明，但不局限于第一方向仅为X轴方向、第二方向仅为Y轴方向。
共同参阅图4至图7，其中，电极组件16包括第一电极组161及第二电极组162。
其中，第一电极组161包括第一驱动电极1611及第一检测电极1612。第一驱动电极1611与第一环形件11间隔设置形成第一电容1601。工作时，在第一驱动电极1611上施以交流电，从而使得第一电容1601产生驱动力驱动第一环形件11沿第一方向X和第二方向Y振动，形成第一振动形态S1。第一检测电极1612与第一环形件11间隔设置形成第二电容1602。第二电极组162包括第二驱动电极1621及第二检测电极1622。第二驱动电极1621与第二环形件12间隔设置形成第三电容1603，工作时，向所述第三电容1603输入交流电从而使得第三电容1603驱动第二环形件12沿第一方向X和第二方向Y振动形成第二振动形态S2，第一振动形态S1与第二振动形态S2异步振动。第二检测电极1622与第二环形件12间隔设置形成第四电容1604。
具体的，陀螺仪1一般应用于电子产品，在使用时，电子产品没有转动的情况下，第一环形件11在第一电容1601产生的驱动力的驱动作用下沿第一方向X及第二方向Y振动，第二环形件12在第三电容1063产生的驱动力的驱动作用下沿第一方向X及第二方向Y振动，形成如图4所示的振动模态。
其中，上述的异步振动是指第一环形件11与第二环形件12在振动时，振动方向相反，振动相位相差180°，比如如图4所示的，在X方向上，第一环形件11向外振动时，第二环形件12向内振动，在Y方向上，第一环形件11向内振动，第二环形件12向外振动。
当电子产品发生转动时，根据哥氏原理，电子产品转动的角速度产生第一环形件11沿45度方向D和135度方向M的第一哥氏力合力F3及第二环形件12沿45度方向D和135度方向M的第二哥氏力合力F4，第一哥氏力合力F3及第二哥氏力合力F4分别迫使第一环形件11及第二环形件12沿45度方向D和135度方向M振动，形成如图5所示的检测模态，第二电容1602用于检测第一环形件11沿45度方向D或135度方向M的振动位移，即根据电容的变化计算振动位移；第四电容1604用于检测第二环形件12沿45度方向D或135度方向M的振动位移，即根据电容的变化计算振动位移，经过运算处理即可获得电子产品转动的角速度的大小。
其中，当第一环形件11与第二环形件12如发生上述的振动时，会产生形变，在本实施方式中，由于第一连接件13及第二连接件15均为弹性连接件，因此，当第一环形件11与第二环形件12发生形变时，第一连接件13与第二连接件15也会随之发生形变，从而使得本实施方式中的陀螺仪10具有更大的刚度，更高的模态频率，即具有更佳的抗振动特性。
可以理解的，本实施例方式中通过第一驱动电极1611驱动第一环形件11振动，并通过第一检测电极1612检测振动位移，通过第二驱动电极1621驱动第二环形件12振动，并通过第二检测电极1622检测第二环形件12的振动位移，在其他实施方式中，也可以仅通过一个驱动电极驱动第一环形件11及第二环形件12振动，比如通过第一驱动电极1611与第一环形件11形成的第一电容1602或第二驱动电极1621与第二环形件12形成的第三电容1603驱动第一环形件11与第二环形件12沿第一方向和第二方向振动，也可以仅通过一个检测电极检测第一环形件11与第二环形件12的振动位移，比如通过第一检测电极1612与第一环形件11形成的第三电容1603或第二驱动电极1622与第二环形件12形成的第四电容1604检测第一环形件11及第二环形件12沿45度方向或135度方向的振动位移，并最终获得电子产品转动的角速度的大小，其原理与上述描述的相同，在此不再赘述。
进一步的，本实施方式中的第一电极组件161及第二电极组件162中的至少一个还包括功能电极1613，功能电极1613包括可以分别用于调频或消除正交误差多个电极，在本实施方式中，第一电极组件161及第二电极组件162均包括多个功能电极1613。
可选地，本实施方式中的第一电极组161环形布设于第一环形件11的内侧，第二电极组162环形布设于第二环形件12的外侧，当然，在其他实施方式中，比如，第一电极组161与第二电极组162的排布方式不限于此，比如第一电极组161及第二电极组162的数量均为两个，两个第一电极组161分别环形布设于第一环形件11的内侧及外侧，两个第二电极组162分别环形布设于第二环形件12的内侧及外侧。
可选地，电极组件16呈正8N角星形，N为正整数，比如在本实施方式中，电极组件16呈正16角星。
本实施方式还提供了一种电子产品，该电子产品包括上述实施例中的MEMS陀螺仪1。
区别于现有技术，本发明提供的MEMS陀螺仪包括基底；第一环形件，呈正8N角星形且悬置于基底上；第二环形件，呈正8N角星形，套设于第一环形件外侧并与第一环形件间隔设置，且悬置于基底上；第一连接件，分别连接第一环形件及第二环形件；固定件，与基底固定连接，套设于第二环形件外侧并与第二环形件间隔设置；第二连接件，分别连接第二环形件及固定件；电极组件，与基底固定连接，用于与第一环形件及第二环形件中的至少一个形成电容，以驱动第一环形件及第二环形件沿相互垂直的第一方向和第二方向振动，并检测第一环形件及第二环形件沿与第一方向的夹角呈45度方向或与第一方向的夹角呈135度方向的振动位移，一方面利用星形陀螺仪几何结构高度对称的特征，且通过第一环形件与第二环形件中的至少一个与电极组件形成电容，提高陀螺仪的电容，提高灵敏度，另一方面利用星形易变形的特性，振动时热弹性损失较小，提高陀螺仪的品质因数。
以上所述仅为本发明的实施例，并非因此限制本发明的专利范围，凡是利用本发明说明书及附图内容所作的等效结构或等效流程变换，或直接或间接运用在其他相关的技术领域，均同理包括在本发明的专利保护范围内。

Claims (10)

  1. 一种MEMS陀螺仪，其特征在于，所述MEMS陀螺仪包括：
    基底；
    第一环形件，呈正8N角星形且悬置于所述基底上，N为正整数；
    第二环形件，呈正8N角星形，套设于所述第一环形件外侧并与所述第一环形件间隔设置，且悬置于所述基底上；
    第一连接件，分别连接所述第一环形件及所述第二环形件；
    固定件，与所述基底固定连接，套设于所述第二环形件外侧并与所述第二环形件间隔设置；
    第二连接件，分别连接所述第二环形件及所述固定件；
    电极组件，与所述基底固定连接，用于与所述第一环形件及所述第二环形件中的至少一个形成电容，以驱动所述第一环形件及所述第二环形件沿相互垂直的第一方向和第二方向振动，并检测所述第一环形件及所述第二环形件沿与所述第一方向的夹角呈45度方向或与所述第一方向的夹角呈135度方向的振动位移。
  2. 根据权利要求1所述的MEMS陀螺仪，其特征在于，所述电极组件包括第一电极组及第二电极组，所述第一电极组包括第一驱动电极及第一检测电极，所述第一驱动电极与所述第一环形件间隔设置形成第一电容，所述第一电容用于驱动所述第一环形件沿所述第一方向及所述第二方向振动，形成第一振动模态；
    所述第二电极组包括第二驱动电极和第二检测电极，所述第二驱动电极与所述第二环形件间隔设置形成第三电容，第三电容用于驱动所述第二环形件沿所述第一方向及所述第二方向振动，形成第二振动模态；
    所述第一振动模态与所述第二振动模态异步振动。
  3. 根据权利要求2所述的MEMS陀螺仪，其特征在于，所述第一检测电极与所述第一环形件间隔设置形成第二电容，所述第二电容用于检测所述第一环形件沿所述45度方向或所述135度方向的振动位移，所述第二检测电极与第二环形件间隔设置形成第四电容，所述第四电容用于检测所述第二环形件沿所述45度方向或所述135度方向的振动位移。
  4. 根据权利要求2所述的MEMS陀螺仪，其特征在于，所述第一电极组环形布设于所述第一环形件的内侧，所述第二电极组环形布设于所述第二环形件的外侧。
  5. 根据权利要求2所述的MEMS陀螺仪，其特征在于，所述第一电极组及所述第二电极组的数量均为两个，所述两个第一电极组分别环形布设于所述第一环形件的内侧及外侧，所述两个第二电极组分别环形布设于所述第二环形件的内侧及外侧。
  6. 根据权利要求2所述的MEMS陀螺仪，其特征在于，所述第一连接件与所述第二连接件均为弹性连接件。
  7. 根据权利要求1所述的MEMS陀螺仪，其特征在于，所述第一连接件与所述第二连接件的数量均为多个，所述多个第一连接件及所述多个第二连接件均呈圆周阵列设置。
  8. 根据权利要求1所述的MEMS陀螺仪，其特征在于，所述电极组件呈正8N角星形。
  9. 根据权利要求2所述的MEMS陀螺仪，其特征在于，所述第一电极组及所述第二电极组中的至少一个还包括功能电极，所述功能电极包括用于调频或消除正交误差的多个电极。
  10. 一种电子产品，其特征在于，所述电子产品包括权利要求1至9任一项所述的MEMS陀螺仪。
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