WO2022001905A1 - Horizontal two-degree-of-freedom electromagnetic vibration isolation apparatus based on parallel connection of positive and negative stiffness of magnetic attraction force - Google Patents

Horizontal two-degree-of-freedom electromagnetic vibration isolation apparatus based on parallel connection of positive and negative stiffness of magnetic attraction force Download PDF

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Publication number
WO2022001905A1
WO2022001905A1 PCT/CN2021/102571 CN2021102571W WO2022001905A1 WO 2022001905 A1 WO2022001905 A1 WO 2022001905A1 CN 2021102571 W CN2021102571 W CN 2021102571W WO 2022001905 A1 WO2022001905 A1 WO 2022001905A1
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magnet
moving magnet
moving
horizontal
stationary
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PCT/CN2021/102571
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French (fr)
Chinese (zh)
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崔俊宁
赵亚敏
邹丽敏
边星元
程钟义
金明睿
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哈尔滨工业大学
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Publication of WO2022001905A1 publication Critical patent/WO2022001905A1/en

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/03Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F6/00Magnetic springs; Fluid magnetic springs, i.e. magnetic spring combined with a fluid
    • F16F6/005Magnetic springs; Fluid magnetic springs, i.e. magnetic spring combined with a fluid using permanent magnets only
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2222/00Special physical effects, e.g. nature of damping effects
    • F16F2222/06Magnetic or electromagnetic
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2228/00Functional characteristics, e.g. variability, frequency-dependence
    • F16F2228/06Stiffness
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2228/00Functional characteristics, e.g. variability, frequency-dependence
    • F16F2228/06Stiffness
    • F16F2228/063Negative stiffness

Definitions

  • the invention belongs to the technical field of precision vibration isolation, in particular to a horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction.
  • Low-frequency vibration isolators mostly use positive and negative stiffness structures in parallel or in series to achieve vertical low-frequency vibration isolation effects, while horizontal low-frequency vibration isolators, especially electromagnetic vibration isolation devices that can achieve horizontal two-degree-of-freedom low-frequency vibration isolation effects are rare. .
  • Patent No. CN200910273183.3 discloses a horizontal two-degree-of-freedom vibration isolation mechanism.
  • the horizontal two-degree-of-freedom vibration isolation mechanism is composed of four magnetic levitation units arrayed along the circumference of a disk.
  • Each maglev unit is composed of a single-degree-of-freedom low-frequency vibration isolation structure composed of two positive and negative stiffness structures in parallel.
  • the features of this technical solution are: 1) Both the positive stiffness structure and the negative stiffness structure of the magnetic levitation unit only use the force between the magnets to achieve positive stiffness characteristics or negative stiffness characteristics in a specific direction, and the utilization rate of magnetic materials is low.
  • a motion guiding mechanism is required to constrain the movement of other degrees of freedom of the positive stiffness structure and the negative stiffness structure.
  • the structure is complex, the volume is large, and the manufacturing cost is high; 2)
  • the positive stiffness characteristics of the magnetic levitation unit are determined by the same pole magnets (electromagnets and permanent magnets). ) is realized by the repulsive force between ), and the negative stiffness characteristic is realized by the attractive force between the heteropolar magnets.
  • Patent No. CN201811427114.9 discloses a multi-dimensional magnetic negative stiffness mechanism and a multi-dimensional magnetic negative stiffness vibration reduction system composed thereof.
  • the multi-dimensional vibration reduction system is composed of a positive stiffness mechanism and a multi-dimensional negative stiffness mechanism in parallel.
  • the positive stiffness mechanism is a traditional elastic element used to connect the damped body and the mounting base, providing X-, Y- and Z-direction support and basic vibration damping functions;
  • the multi-dimensional negative stiffness mechanism is a one-dimensional structure composed of homopolar magnets.
  • the negative stiffness magnetic group is formed in series with the two-dimensional negative stiffness magnetic group.
  • the features of this technical solution are: 1) The one-dimensional negative stiffness magnetic group utilizes the repulsive force between the magnets to generate negative stiffness characteristics in the Z direction, and its movement along the X and Y directions is restricted by a motion guiding mechanism such as a linear guide, and the magnetic material has a negative stiffness.
  • the utilization rate is low, the structure is complex, the volume is large, and the manufacturing cost is high; 2)
  • the negative stiffness characteristics of the one-dimensional negative stiffness magnetic group and the positive stiffness characteristics and negative stiffness characteristics of the two-dimensional negative stiffness magnetic group all use the repulsive force between the magnets of the same pole Realization, the positive stiffness value is large, and the natural frequency is high; 3)
  • the one-dimensional negative stiffness magnetic group and the two-dimensional negative stiffness magnetic group can only be magnetized along a specific direction, and the structure design of the negative stiffness magnetic group is single.
  • Electromagnetic vibration isolation device in the horizontal X direction, the negative stiffness generated by the X-direction magnetic spring and the positive stiffness generated by the Y-direction magnetic spring are used in parallel to achieve low-frequency vibration isolation effect; in the horizontal Y-direction, the positive stiffness generated by the X-direction magnetic spring and the The negative stiffness generated by the Y-direction magnetic spring is connected in parallel to realize the low-frequency vibration isolation effect.
  • the positive stiffness generated by the X-direction magnetic spring and the positive stiffness generated by the Y-direction magnetic spring are used in parallel to achieve the effect of stably supporting the vibration isolation load.
  • the horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction can effectively isolate the low-frequency micro-amplitude vibration interference of horizontal two-degree-of-freedom in the environment where the precision instrument is located, and further improve the precision of the precision instrument.
  • a horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction comprising a connection structure and a magnetic circuit structure
  • the connection structure includes a fixed magnet fixing frame, a load connecting piece and a moving magnet mounting frame
  • the fixed magnet fixing frame A cube structure with fixed holes at the top
  • the moving magnet mounting frame is a cube structure with a hole at the bottom
  • the top of the moving magnet mounting frame is fixedly connected to the bottom of the load connector
  • the top of the load connector is fixedly connected to the vibration isolation load
  • the magnetic The circuit structure includes an X-direction magnetic spring and a Y-direction magnetic spring, the X-direction magnetic spring and the Y-direction magnetic spring are arranged vertically
  • the X-direction magnetic spring includes a first fixed magnet, a first moving magnet, a second magnetic spring arranged in an array along the horizontal X axis in sequence The moving magnet and the second fixed magnet.
  • the first fixed magnet, the first moving magnet, the second moving magnet and the second fixed magnet are cubic permanent magnets. There is an attractive force between the magnet and the second fixed magnet.
  • the X-direction gap between the first fixed magnet and the first moving magnet is equal to the X-direction gap between the second moving magnet and the second fixed magnet.
  • the Y-direction magnetic spring includes a sequence along the horizontal Y-axis.
  • the third fixed magnet, the third moving magnet, the fourth moving magnet and the fourth fixed magnet are arranged in an array, the third fixed magnet, the third moving magnet, the fourth moving magnet and the fourth fixed magnet are cubic permanent magnets, and the third fixed magnet There is an attractive force between the magnet and the third moving magnet, and there is an attractive force between the fourth moving magnet and the fourth stationary magnet.
  • the Y-direction gap between the third stationary magnet and the third moving magnet is equal to the fourth moving magnet and the fourth stationary magnet.
  • the Y-direction gap of the moving magnet; the first moving magnet, the second moving magnet, the third moving magnet and the fourth moving magnet are respectively fixedly connected to the four outer walls of the moving magnet mounting frame, the first fixed magnet, the second fixed magnet, the third fixed magnet.
  • the magnet and the fourth fixed magnet are respectively fixedly connected to the four inner walls of the fixed magnet fixing frame.
  • the moving magnet installation frame is nested in the fixing hole at the top of the fixed magnet fixing frame in a way that the axes overlap, and the bottom of the moving magnet installation frame is fixed with the fixed magnet. There is a gap at the top of the rack.
  • the first fixed magnet, the first moving magnet, the second moving magnet and the second fixed magnet are magnetized in the same direction along the horizontal X-axis.
  • the first fixed magnet, the first moving magnet, the second moving magnet and the second fixed magnet are all magnetized along the horizontal Y-axis or Z-axis, and the magnetization direction of the first fixed magnet is the same as the magnetization direction of the second fixed magnet The same, and the magnetization directions of the first moving magnet and the second moving magnet are opposite.
  • the third stationary magnet, the third moving magnet, the fourth moving magnet and the fourth stationary magnet are magnetized in the same direction along the horizontal Y axis.
  • the third stationary magnet, the third moving magnet, the fourth moving magnet and the fourth stationary magnet are all magnetized along the horizontal X-axis or Z-axis, and the magnetization direction of the third stationary magnet is the same as the magnetization direction of the fourth stationary magnet The same, and the magnetization directions of the third moving magnet and the fourth moving magnet are opposite.
  • the overall structure of the horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction is axisymmetric, and the fixing hole is a square hole.
  • the vibration isolation technical solution adopts the vertical arrangement and parallel connection of magnetic springs to realize the electromagnetic vibration isolation of horizontal two degrees of freedom, and at the same time realizes the high utilization rate of magnetic materials and the structural design of no guiding mechanism.
  • the stiffness characteristics of the X-direction magnetic spring and the Y-direction magnetic spring with three degrees of freedom are connected in parallel to realize the parallel connection of positive and negative stiffness structures with two horizontal degrees of freedom and the effect of stably supporting the vibration isolation load in the Z-direction.
  • the stiffness characteristics of the three degrees of freedom of the magnetic spring are all used.
  • the technical solution constructs a positive stiffness structure based on the gravitational action between the heteropolar magnets, which can realize the low stiffness characteristic of the horizontal two degrees of freedom and thus possess the low frequency vibration isolation capability of the horizontal two degrees of freedom.
  • the positive stiffness characteristics of the X-direction magnetic spring and the Y-direction magnetic spring are both generated by the gravitational force between the magnets, which can solve the problem of the vibration isolation device caused by the large rigidity value of the positive stiffness structure of the magnetic repulsion force in the existing horizontal two-degree-of-freedom electromagnetic vibration isolation technical solution.
  • the problem of high natural frequency can significantly reduce the stiffness of the vibration isolation device and the initial vibration isolation frequency, and achieve near-zero stiffness characteristics and near-zero frequency vibration isolation effects. This is the second innovative point of the present invention which is different from the prior art.
  • the present invention can significantly improve the design flexibility of the magnetic spring.
  • the X-direction magnetic spring can be composed of an array of magnets that are magnetized in the same direction along the horizontal X-axis and different in the horizontal Y-axis or Z-axis. It is composed of a magnet array; the magnetization directions of the magnetic springs are various, which breaks through the limitation of the single magnetization direction of the magnetic springs in the prior art solutions, and is suitable for occasions requiring different magnet shapes, magnetization processes and stiffness characteristics. This is the third innovative point of the present invention which is different from the prior art.
  • Fig. 1 is the top view of the horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction;
  • Fig. 2 is a three-dimensional schematic diagram of a horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction;
  • Fig. 3 is the embodiment 1 of the sectional view of Fig. 1A-A;
  • Fig. 4 is the embodiment 1 of the sectional view of Fig. 1B-B;
  • Fig. 5 is the embodiment 2 of the sectional view of Fig. 1A-A;
  • Fig. 6 is the embodiment 3 of the sectional view of Fig. 1A-A;
  • Fig. 7 is the embodiment 2 of the sectional view of Fig. 1B-B;
  • FIG. 8 is Embodiment 3 of the cross-sectional view of FIG. 1B-B.
  • a horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction comprising a connecting structure and a magnetic circuit structure
  • the connecting structure includes a fixed magnet fixing frame 1, a load connecting piece 5 and a moving magnet mounting frame 4,
  • the magnet fixing frame 1 is a cube structure with fixing holes at the top
  • the moving magnet mounting frame 4 is a cube structure with holes at the bottom.
  • the vibration load is fixedly connected;
  • the magnetic circuit structure includes an X-direction magnetic spring 2 and a Y-direction magnetic spring 3, and the X-direction magnetic spring 2 and the Y-direction magnetic spring 3 are arranged vertically;
  • the X-direction magnetic spring 2 includes an array along the horizontal X axis.
  • the first fixed magnet 21, the first moving magnet 22, the second moving magnet 23 and the second fixed magnet 24, the first fixed magnet 21, the first moving magnet 22, the second moving magnet 23 and the second fixed magnet 24 are cubic
  • the X of the first fixed magnet 21 and the first moving magnet 22 The directional gap is equal to the X-directional gap between the second moving magnet 23 and the second fixed magnet 24;
  • the Y-directional magnetic spring 3 includes a third fixed magnet 31, a third moving magnet 32, and a fourth moving magnet 33 arranged in an array along the horizontal Y axis in sequence and the fourth fixed magnet 34, the third fixed magnet 31, the third moving magnet 32, the fourth moving magnet 33 and the fourth fixed magnet 34 are cubic permanent magnets, and there is an attractive force between the third fixed magnet 31 and the third moving magnet 32 There is an attractive force between the fourth moving magnet 33 and the fourth stationary magnet 34 , and the Y-direction gap between the third stationary magnet 31 and the third moving magnet 32 is equal to the Y-direction gap between the fourth moving magnet 33 and the fourth stationary magnet 34 ;
  • the first moving magnet 22, the second moving magnet 23, the third moving magnet 32 and the fourth moving magnet 33 are respectively fixedly connected with the four outer walls of the moving magnet mounting frame 4, the first fixed magnet 21, the second fixed magnet 24, The
  • the first fixed magnet 21 , the first moving magnet 22 , the second moving magnet 23 and the second fixed magnet 24 are magnetized in the same direction along the horizontal X-axis.
  • the first fixed magnet 21 , the first moving magnet 22 , the second moving magnet 23 and the second fixed magnet 24 are all magnetized along the horizontal Y-axis or Z-axis, and the first fixed magnet 21 is magnetized along the horizontal Y-axis or Z-axis.
  • the magnetization direction is the same as the magnetization direction of the second stationary magnet 24 and opposite to the magnetization directions of the first moving magnet 22 and the second moving magnet 23 .
  • the third fixed magnet 31 , the third moving magnet 32 , the fourth moving magnet 33 and the fourth fixed magnet 34 are magnetized in the same direction along the horizontal Y axis.
  • the third stationary magnet 31 , the third moving magnet 32 , the fourth moving magnet 33 and the fourth stationary magnet 34 are all magnetized along the horizontal X-axis or Z-axis, and the third stationary magnet 31 is magnetized along the horizontal X-axis or Z-axis.
  • the magnetization direction is the same as the magnetization direction of the fourth stationary magnet 34 and opposite to the magnetization directions of the third moving magnet 32 and the fourth moving magnet 33 .
  • the overall structure of the horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction is axisymmetric, and the fixing hole is a square hole.
  • FIGS. 1 to 4 An embodiment of the present invention is given below with reference to FIGS. 1 to 4 .
  • Fig. 1 is a top view of a horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction
  • Fig. 2 is a three-dimensional model of Embodiment 1 of the horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction
  • the fixed magnet 21 is a 4mm ⁇ 10mm ⁇ 10mm cubic permanent magnet
  • the permanent magnet material is N44H grade NdFeB
  • the residual magnetic induction intensity Br 1.34T
  • the relative magnetic permeability ⁇ r 1.03.
  • the first fixed magnets 21 are arrayed at intervals of 8.5 mm, 27.5 mm and 36 mm along the positive direction of the X-axis to obtain the first moving magnets 22 , the second moving magnets 23 and the second fixed magnets 24 .
  • the third fixed magnet 31 is arrayed at intervals of 8.5 mm, 27.5 mm and 36 mm along the negative direction of the Y-axis to obtain the third moving magnet 32, the fourth moving magnet 33 and the fourth fixed magnet 34, the first moving magnet 22, the second moving magnet 34,
  • the magnet 23 , the third moving magnet 32 and the fourth moving magnet 33 are respectively fixedly connected to the four outer walls of the moving magnet mounting frame 4 .
  • the first fixed magnet 21 , the second fixed magnet 24 , the third fixed magnet 31 and the fourth fixed magnet 34 are respectively fixedly connected with the four inner walls of the fixed magnet holder 1;
  • the size of the square hole at the top of the fixed magnet holder 1 is 40mm ⁇ 40mm ⁇ 16.5mm, and the material is hard aluminum alloy;
  • the moving magnet installation frame 4 is 15mm ⁇ 15mm ⁇ 12mm cube structure, the bottom end is opened with a round hole with a diameter of 10mm and a depth of 8mm to reduce the mass;
  • the moving magnet mounting frame 4 is nested in the fixing hole at the top of the fixed magnet fixing frame 1 in a way that the axes overlap, and the bottom of the moving magnet mounting frame 4 is smaller than
  • the top of the fixed magnet fixing frame 1 is 5mm high to ensure that the moving magnet installation frame 4 does not contact the fixed magnet fixing frame 1, so as to avoid the nonlinear effect of mechanical friction on the precision vibration isolation;
  • the top of the moving magnet installation frame 4 is fixed with the load connector 5 The top end of the
  • FIG. 3 is a cross-sectional view of FIG. 1A-A, the first fixed magnet 21, the first moving magnet 22, the second moving magnet 23 and the second fixed magnet 24 are all magnetized along the positive direction of the X-axis, as shown by the arrows in FIG. 3;
  • 4 is a cross-sectional view of FIG. 1B-B, the third stationary magnet 31, the third moving magnet 32, the fourth moving magnet 33 and the fourth stationary magnet 34 are magnetized along the negative direction of the Y-axis, as shown by the arrows in FIG. 4 .
  • the negative stiffness generated by the X-direction magnetic spring 2 and the positive stiffness generated by the Y-direction magnetic spring 3 are connected in parallel to achieve low-frequency vibration isolation; in the Y direction, the positive stiffness generated by the X-direction magnetic spring 2 and the Y-direction magnetic spring 3 In the Z direction, the positive stiffness generated by the X-direction magnetic spring 2 is connected in parallel with the positive stiffness generated by the Y-direction magnetic spring 3 to stably support the vibration isolation load.
  • FIG. 5 is the second embodiment of the cross-sectional view of FIG. 1A-A, the first fixed magnet 21 and the second fixed magnet 24 are magnetized along the negative Y-axis direction, and the first moving magnet 22 and the second moving magnet 23 are magnetized along the positive Y-axis direction.
  • FIG. 6 is the third embodiment of the cross-sectional view of FIG. 1A-A, the first fixed magnet 21 and the second fixed magnet 24 are magnetized along the positive Z-axis direction, and the first moving magnet 22 and the second moving magnet 23 are magnetized along the negative Z-axis direction.
  • FIG. 7 is the second embodiment of the cross-sectional view of FIG. 1B-B.
  • the third stator 31 and the fourth stator 34 are magnetized along the negative X-axis direction, and the third moving magnet 32 and the fourth moving magnet 33 are magnetized along the positive X-axis direction.
  • FIG. 8 is the third embodiment of the cross-sectional view of FIG. 1B-B.
  • the third stator 31 and the fourth stator 34 are magnetized along the positive Z-axis direction, and the third moving magnet 32 and the fourth moving magnet 33 are magnetized along the negative Z-axis direction.

Abstract

A horizontal two-degree-of-freedom electromagnetic vibration isolation apparatus based on a parallel connection of positive and negative stiffness of a magnetic attraction force, comprising a stationary magnet fixing support (1), an X-direction magnetic spring (2), a Y-direction magnetic spring (3), a moving magnet mounting frame (4), and a load connecting member (5); the X-direction magnetic spring (2) and the Y-direction magnetic spring (3) are arranged vertical to each other and are connected in parallel; the X-direction magnetic spring (2) consists of a first stationary magnet (21), a first moving magnet (22), a second moving magnet (23), and a second stationary magnet (24) that are sequentially arranged in an array along an X axis, the first stationary magnet (21) and the first moving magnet (22) have an attractive effect, and the second moving magnet (23) and the second stationary magnet (24) have an attractive effect; and the Y-direction magnetic spring (3) consists of a third stationary magnet (31), a third moving magnet (32), a fourth moving magnet (33), and a fourth stationary magnet (34) that are sequentially arranged in an array along a Y axis, the third stationary magnet (31) and the third moving magnet (32) have an attractive effect, and the fourth moving magnet (33) and the fourth stationary magnet (34) have an attractive effect. The electromagnetic vibration isolation apparatus uses the design of a suspension structure without a guide mechanism, is low in natural frequency, high in magnetic material utilization rate, and high in design flexibility of the magnetic spring, and can achieve a horizontal two-degree-of-freedom low -frequency or ultra-low-frequency vibration isolation effect of a precise instrument.

Description

基于磁引力正负刚度并联的水平二自由度电磁隔振装置Horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction 技术领域technical field
本发明属于精密隔振技术领域,特别是一种基于磁引力正负刚度并联的水平二自由度电磁隔振装置。The invention belongs to the technical field of precision vibration isolation, in particular to a horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction.
背景技术Background technique
在精密仪器设备的装调、测试和实验过程中,环境中的低频微幅振动干扰成为影响研究效果的重点问题之一,为精密仪器设备配备低频隔振器逐渐成为精密工程领域抑制环境微振动的主要技术手段。低频隔振器多采用正负刚度结构并联或者串联的方式实现垂向低频隔振效果,而水平向低频隔振器,尤其是能够实现水平二自由度低频隔振效果的电磁隔振装置较少。In the process of installation, testing and experimentation of precision instruments and equipment, the interference of low-frequency micro-amplitude vibration in the environment has become one of the key issues affecting the research results. Equipping precision instruments and equipment with low-frequency vibration isolators has gradually become the field of precision engineering to suppress environmental micro-vibration. main technical means. Low-frequency vibration isolators mostly use positive and negative stiffness structures in parallel or in series to achieve vertical low-frequency vibration isolation effects, while horizontal low-frequency vibration isolators, especially electromagnetic vibration isolation devices that can achieve horizontal two-degree-of-freedom low-frequency vibration isolation effects are rare. .
专利号为CN200910273183.3公开了一种水平二自由度隔振机构,该水平二自由度隔振机构由四个磁浮单元沿圆盘圆周阵列构成。每个磁浮单元由两个正负刚度结构并联构成的单自由度低频隔振结构组成。该技术方案的特征在于:1)磁浮单元的正刚度结构与负刚度结构均只利用磁铁间的作用力实现某一特定方向的正刚度特性或负刚度特性,磁材料的利用率低,在实际使用过程中需要运动导向机构以约束正刚度结构与负刚度结构其它自由度的运动,结构复杂、体积大、制造成本高;2)磁浮单元的正刚度特性由同极磁铁(电磁铁和永磁体)间的斥力作用实现,负刚度特性由异极磁铁间的引力作用实现。Patent No. CN200910273183.3 discloses a horizontal two-degree-of-freedom vibration isolation mechanism. The horizontal two-degree-of-freedom vibration isolation mechanism is composed of four magnetic levitation units arrayed along the circumference of a disk. Each maglev unit is composed of a single-degree-of-freedom low-frequency vibration isolation structure composed of two positive and negative stiffness structures in parallel. The features of this technical solution are: 1) Both the positive stiffness structure and the negative stiffness structure of the magnetic levitation unit only use the force between the magnets to achieve positive stiffness characteristics or negative stiffness characteristics in a specific direction, and the utilization rate of magnetic materials is low. In the process of use, a motion guiding mechanism is required to constrain the movement of other degrees of freedom of the positive stiffness structure and the negative stiffness structure. The structure is complex, the volume is large, and the manufacturing cost is high; 2) The positive stiffness characteristics of the magnetic levitation unit are determined by the same pole magnets (electromagnets and permanent magnets). ) is realized by the repulsive force between ), and the negative stiffness characteristic is realized by the attractive force between the heteropolar magnets.
专利号为CN201811427114.9公开了一种多维磁负刚度机构及其构成的多维磁负刚度减振系统,该多维减振系统由正刚度机构和多维负刚度机构并联构成。正刚度机构是传统的弹性元件,用于连接被减振体和安装基座,提供X向、Y向和Z向的支撑和基本减振功能;多维负刚度机构由同极磁铁构成的一维负刚度磁组与二维负刚度磁组串联构成。该技术方案的特征在于:1)一维负刚度磁组利用磁铁间的斥力作用在Z向产生负刚度特性,而其沿X、Y向的运动被直线导轨等运动导向机构限制,磁材料的利用率低,结构复杂、体积大、制造成本高;2)一维负刚度磁组的负刚度特性与二维负刚度磁组的正刚度特性、负刚度特性均利用同极磁铁间的斥力作用实现,正刚度值大,固有频率高;3)一维负刚度磁组与二维负刚度磁组均只能沿着某一特定的方向磁化,负刚度磁组的结构设计单一。Patent No. CN201811427114.9 discloses a multi-dimensional magnetic negative stiffness mechanism and a multi-dimensional magnetic negative stiffness vibration reduction system composed thereof. The multi-dimensional vibration reduction system is composed of a positive stiffness mechanism and a multi-dimensional negative stiffness mechanism in parallel. The positive stiffness mechanism is a traditional elastic element used to connect the damped body and the mounting base, providing X-, Y- and Z-direction support and basic vibration damping functions; the multi-dimensional negative stiffness mechanism is a one-dimensional structure composed of homopolar magnets. The negative stiffness magnetic group is formed in series with the two-dimensional negative stiffness magnetic group. The features of this technical solution are: 1) The one-dimensional negative stiffness magnetic group utilizes the repulsive force between the magnets to generate negative stiffness characteristics in the Z direction, and its movement along the X and Y directions is restricted by a motion guiding mechanism such as a linear guide, and the magnetic material has a negative stiffness. The utilization rate is low, the structure is complex, the volume is large, and the manufacturing cost is high; 2) The negative stiffness characteristics of the one-dimensional negative stiffness magnetic group and the positive stiffness characteristics and negative stiffness characteristics of the two-dimensional negative stiffness magnetic group all use the repulsive force between the magnets of the same pole Realization, the positive stiffness value is large, and the natural frequency is high; 3) The one-dimensional negative stiffness magnetic group and the two-dimensional negative stiffness magnetic group can only be magnetized along a specific direction, and the structure design of the negative stiffness magnetic group is single.
综上,如何通过电磁隔振装置的结构与原理创新,提供一种高磁材料利用率且无需运动导向机构的水平二自由度电磁隔振装置对降低环境中的低频微幅振动干扰,保证精密仪器设备工作环境最优,进一步提高精密仪器设备的精度具有重大意义。To sum up, how to provide a horizontal two-degree-of-freedom electromagnetic vibration isolator with high utilization of magnetic materials and no need for a motion guide mechanism through the innovation of the structure and principle of the electromagnetic vibration isolator to reduce the interference of low-frequency and micro-amplitude vibration in the environment and ensure the precision The working environment of instruments and equipment is optimal, and it is of great significance to further improve the accuracy of precision instruments and equipment.
发明内容SUMMARY OF THE INVENTION
本发明针对环境振动干扰影响精密仪器设备的研究,且目前能够实现水平二自由度低频隔振效果的电磁隔振装置较少的问题,提出一种基于磁引力正负刚度并联的水平二自由度电磁隔振装置,在水平X方向,利用X向磁弹簧产生的负刚度与Y向磁弹簧产生的正刚度并联实现低频隔振效果;在水平Y方向,利用X向磁弹簧产生的正刚度与Y向磁弹簧产生的负刚度并联实现低频隔振效果,在Z方向,利用X向磁弹簧产生的正刚度与Y向磁弹簧产生的正刚度并联实现稳定支撑隔振负载的作用。该基于磁引力正负刚度并联的水平二自由度电磁隔振装置能够有效隔离精密仪器设备所处环境中水平二自由度的低频微幅振动干扰,进一步提高精密仪器设备的精度。Aiming at the research on the influence of environmental vibration interference on precision instruments and equipment, and the problem that there are few electromagnetic vibration isolation devices that can realize the low-frequency vibration isolation effect of horizontal two degrees of freedom at present, the invention proposes a horizontal two degrees of freedom based on the parallel connection of positive and negative stiffness of magnetic attraction. Electromagnetic vibration isolation device, in the horizontal X direction, the negative stiffness generated by the X-direction magnetic spring and the positive stiffness generated by the Y-direction magnetic spring are used in parallel to achieve low-frequency vibration isolation effect; in the horizontal Y-direction, the positive stiffness generated by the X-direction magnetic spring and the The negative stiffness generated by the Y-direction magnetic spring is connected in parallel to realize the low-frequency vibration isolation effect. In the Z-direction, the positive stiffness generated by the X-direction magnetic spring and the positive stiffness generated by the Y-direction magnetic spring are used in parallel to achieve the effect of stably supporting the vibration isolation load. The horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction can effectively isolate the low-frequency micro-amplitude vibration interference of horizontal two-degree-of-freedom in the environment where the precision instrument is located, and further improve the precision of the precision instrument.
本发明的技术解决方案是:The technical solution of the present invention is:
一种基于磁引力正负刚度并联的水平二自由度电磁隔振装置,包括连接结构与磁路结构,所述连接结构包括定磁铁固定架、负载连接件和动磁铁安装框,定磁铁固定架为顶端设置固定孔的立方体结构,动磁铁安装框为底部开孔的立方体结构,动磁铁安装框顶端与负载连接件的底部固定连接,负载连接件的顶端与隔振负载固定连接;所述磁路结构包括X向磁弹簧与Y向磁弹簧,X向磁弹簧与Y向磁弹簧垂直布置;X向磁弹簧包括沿水平X轴依次阵列布置的第一定磁铁、第一动磁铁、第二动磁铁和第二定磁铁,第一定磁铁、第一动磁铁、第二动磁铁和第二定磁铁为立方永磁体,第一定磁铁与第一动磁铁之间呈引力作用,第二动磁铁与第二定磁铁之间呈引力作用,第一定磁铁与第一动磁铁的X向间隙等于第二动磁铁与第二定磁铁的X向间隙;Y向磁弹簧包括沿水平Y轴依次阵列布置的第三定磁铁、第三动磁铁、第四动磁铁和第四定磁铁,第三定磁铁、第三动磁铁、第四动磁铁和第四定磁铁为立方永磁体,第三定磁铁与第三动磁铁之间呈引力作用,第四动磁铁与第四定磁铁之间呈引力作用,第三定磁铁与第三动磁铁的Y向间隙等于第四动磁铁与第四定磁铁的Y向间隙;第一动磁铁、第二动磁铁、第三动磁铁和第四动磁铁分别与动磁铁安装框的四个外壁固定连接,第一定磁铁、第二定磁铁、第三定磁铁和第四定磁铁分别与定磁铁固定架的四个内壁固定连接,动磁铁安装框以轴线重合的方式嵌套在定磁铁固定架顶端的固定孔中,动磁铁安装框底部与定磁铁固定架顶端设有间隙。A horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction, comprising a connection structure and a magnetic circuit structure, wherein the connection structure includes a fixed magnet fixing frame, a load connecting piece and a moving magnet mounting frame, and the fixed magnet fixing frame A cube structure with fixed holes at the top, the moving magnet mounting frame is a cube structure with a hole at the bottom, the top of the moving magnet mounting frame is fixedly connected to the bottom of the load connector, and the top of the load connector is fixedly connected to the vibration isolation load; the magnetic The circuit structure includes an X-direction magnetic spring and a Y-direction magnetic spring, the X-direction magnetic spring and the Y-direction magnetic spring are arranged vertically; the X-direction magnetic spring includes a first fixed magnet, a first moving magnet, a second magnetic spring arranged in an array along the horizontal X axis in sequence The moving magnet and the second fixed magnet. The first fixed magnet, the first moving magnet, the second moving magnet and the second fixed magnet are cubic permanent magnets. There is an attractive force between the magnet and the second fixed magnet. The X-direction gap between the first fixed magnet and the first moving magnet is equal to the X-direction gap between the second moving magnet and the second fixed magnet. The Y-direction magnetic spring includes a sequence along the horizontal Y-axis. The third fixed magnet, the third moving magnet, the fourth moving magnet and the fourth fixed magnet are arranged in an array, the third fixed magnet, the third moving magnet, the fourth moving magnet and the fourth fixed magnet are cubic permanent magnets, and the third fixed magnet There is an attractive force between the magnet and the third moving magnet, and there is an attractive force between the fourth moving magnet and the fourth stationary magnet. The Y-direction gap between the third stationary magnet and the third moving magnet is equal to the fourth moving magnet and the fourth stationary magnet. The Y-direction gap of the moving magnet; the first moving magnet, the second moving magnet, the third moving magnet and the fourth moving magnet are respectively fixedly connected to the four outer walls of the moving magnet mounting frame, the first fixed magnet, the second fixed magnet, the third fixed magnet The magnet and the fourth fixed magnet are respectively fixedly connected to the four inner walls of the fixed magnet fixing frame. The moving magnet installation frame is nested in the fixing hole at the top of the fixed magnet fixing frame in a way that the axes overlap, and the bottom of the moving magnet installation frame is fixed with the fixed magnet. There is a gap at the top of the rack.
优选的,所述第一定磁铁、第一动磁铁、第二动磁铁和第二定磁铁沿水平X轴同向磁化。Preferably, the first fixed magnet, the first moving magnet, the second moving magnet and the second fixed magnet are magnetized in the same direction along the horizontal X-axis.
优选的,所述第一定磁铁、第一动磁铁、第二动磁铁和第二定磁铁均沿水平Y轴或Z轴磁化,且第一定磁铁的磁化方向与第二定磁铁的磁化方向相同,与第一动磁铁、第二动磁铁的磁化方向相反。Preferably, the first fixed magnet, the first moving magnet, the second moving magnet and the second fixed magnet are all magnetized along the horizontal Y-axis or Z-axis, and the magnetization direction of the first fixed magnet is the same as the magnetization direction of the second fixed magnet The same, and the magnetization directions of the first moving magnet and the second moving magnet are opposite.
优选的,所述第三定磁铁、第三动磁铁、第四动磁铁和第四定磁铁沿水平Y轴同向磁化。Preferably, the third stationary magnet, the third moving magnet, the fourth moving magnet and the fourth stationary magnet are magnetized in the same direction along the horizontal Y axis.
优选的,所述第三定磁铁、第三动磁铁、第四动磁铁和第四定磁铁均沿水平X轴或Z轴磁化,且第三定磁铁的磁化方向与第四定磁铁的磁化方向相同,与第三动磁铁、第四动磁铁的磁化方向相反。Preferably, the third stationary magnet, the third moving magnet, the fourth moving magnet and the fourth stationary magnet are all magnetized along the horizontal X-axis or Z-axis, and the magnetization direction of the third stationary magnet is the same as the magnetization direction of the fourth stationary magnet The same, and the magnetization directions of the third moving magnet and the fourth moving magnet are opposite.
优选的,所述基于磁引力正负刚度并联的水平二自由度电磁隔振装置的整体结构成轴对称,所述固定孔为方形孔。Preferably, the overall structure of the horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction is axisymmetric, and the fixing hole is a square hole.
本发明的技术创新性及产生的良好效果在于:The technical innovation of the present invention and the good effect produced are:
(1)该隔振技术方案采用磁弹簧的垂直布置、并联连接实现水平二自由度的电磁隔振,同时实现了高磁材料利用率及无导向机构的结构设计。X向磁弹簧与Y向磁弹簧三自由度的刚度特性并联实现水平二自由度的正负刚度结构并联及Z向稳定支撑隔振负载的效果,磁弹簧三自由度的刚度特性均得到利用,从而显著地提高了磁材料的利用率;实际使用过程中不需要运动导向机构约束磁弹簧的运动,无导向机构的结构设计降低了隔振装置的复杂度、体积及制造成本。这是本发明区别于现有技术的创新点之一。(1) The vibration isolation technical solution adopts the vertical arrangement and parallel connection of magnetic springs to realize the electromagnetic vibration isolation of horizontal two degrees of freedom, and at the same time realizes the high utilization rate of magnetic materials and the structural design of no guiding mechanism. The stiffness characteristics of the X-direction magnetic spring and the Y-direction magnetic spring with three degrees of freedom are connected in parallel to realize the parallel connection of positive and negative stiffness structures with two horizontal degrees of freedom and the effect of stably supporting the vibration isolation load in the Z-direction. The stiffness characteristics of the three degrees of freedom of the magnetic spring are all used. Therefore, the utilization rate of the magnetic material is significantly improved; the motion guide mechanism does not need to constrain the movement of the magnetic spring during actual use, and the structure design without the guide mechanism reduces the complexity, volume and manufacturing cost of the vibration isolation device. This is one of the innovative points of the present invention which is different from the prior art.
(2)本技术方案基于异极磁铁间的引力作用构建正刚度结构可实现水平二自由度的低刚度特性从而具备了水平二自由度的低频隔振能力。X向磁弹簧和Y向磁弹簧的正刚度特性均由磁铁间的引力作用产生,因而可解决现有水平二自由度电磁隔振技术方案中磁斥力正刚度结构刚度值大而导致隔振装置固有频率高的问题,可显著降低隔振装置的刚度及起始隔振频率,实现近零刚度特性及近零频率隔振效果。这是本发明区别于现有技术的创新点之二。(2) The technical solution constructs a positive stiffness structure based on the gravitational action between the heteropolar magnets, which can realize the low stiffness characteristic of the horizontal two degrees of freedom and thus possess the low frequency vibration isolation capability of the horizontal two degrees of freedom. The positive stiffness characteristics of the X-direction magnetic spring and the Y-direction magnetic spring are both generated by the gravitational force between the magnets, which can solve the problem of the vibration isolation device caused by the large rigidity value of the positive stiffness structure of the magnetic repulsion force in the existing horizontal two-degree-of-freedom electromagnetic vibration isolation technical solution. The problem of high natural frequency can significantly reduce the stiffness of the vibration isolation device and the initial vibration isolation frequency, and achieve near-zero stiffness characteristics and near-zero frequency vibration isolation effects. This is the second innovative point of the present invention which is different from the prior art.
(3)本发明可显著提高磁弹簧的设计灵活性。X向磁弹簧可由沿水平X轴同向磁化、水平Y轴或Z轴不同向磁化的磁铁阵列构成,Y向磁弹簧可由沿水平Y轴同向磁化、水平X轴或Z轴不同向磁化的磁铁阵列构成;磁弹簧的磁化方向多样,突破现有技术方案中磁弹簧的磁化方向单一的限制,适用于不同磁铁形状、磁化工艺、刚度特性需求的场合。这是本发明区别于现有技术的创新点之三。(3) The present invention can significantly improve the design flexibility of the magnetic spring. The X-direction magnetic spring can be composed of an array of magnets that are magnetized in the same direction along the horizontal X-axis and different in the horizontal Y-axis or Z-axis. It is composed of a magnet array; the magnetization directions of the magnetic springs are various, which breaks through the limitation of the single magnetization direction of the magnetic springs in the prior art solutions, and is suitable for occasions requiring different magnet shapes, magnetization processes and stiffness characteristics. This is the third innovative point of the present invention which is different from the prior art.
附图说明Description of drawings
图1为基于磁引力正负刚度并联的水平二自由度电磁隔振装置的俯视图;Fig. 1 is the top view of the horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction;
图2为基于磁引力正负刚度并联的水平二自由度电磁隔振装置的三维示意图;Fig. 2 is a three-dimensional schematic diagram of a horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction;
图3为图1A-A剖面视图的实施例1;Fig. 3 is the embodiment 1 of the sectional view of Fig. 1A-A;
图4为图1B-B剖面视图的实施例1;Fig. 4 is the embodiment 1 of the sectional view of Fig. 1B-B;
图5为图1A-A剖面视图的实施例2;Fig. 5 is the embodiment 2 of the sectional view of Fig. 1A-A;
图6为图1A-A剖面视图的实施例3;Fig. 6 is the embodiment 3 of the sectional view of Fig. 1A-A;
图7为图1B-B剖面视图的实施例2;Fig. 7 is the embodiment 2 of the sectional view of Fig. 1B-B;
图8为图1B-B剖面视图的实施例3。FIG. 8 is Embodiment 3 of the cross-sectional view of FIG. 1B-B.
图中件号说明:1定磁铁固定架、2 X向磁弹簧、21第一定磁铁、22第一动磁铁、23第二动磁铁、24第二定磁铁、3 Y向磁弹簧、31第三定磁铁、32第三动磁铁、33第四动磁铁、34第四定磁铁、4动磁铁安装框、5负载连接件。Description of the part number in the figure: 1 fixed magnet fixing frame, 2 X magnetic spring, 21 first fixed magnet, 22 first moving magnet, 23 second moving magnet, 24 second fixed magnet, 3 Y magnetic spring, 31 first Three stationary magnets, 32 third moving magnets, 33 fourth moving magnets, 34 fourth stationary magnets, 4 moving magnet mounting frames, and 5 load connectors.
具体实施方式detailed description
下面结合附图对本发明的具体实施方式进行详细说明。The specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
一种基于磁引力正负刚度并联的水平二自由度电磁隔振装置,包括连接结构与磁路结构,所述连接结构包括定磁铁固定架1、负载连接件5和动磁铁安装框4,定磁铁固定架1为顶端设置固定孔的立方体结构,动磁铁安装框4为底部开孔的立方体结构,动磁铁安装框4顶端与负载连接件5的底部固定连接,负载连接件5的顶端与隔振负载固定连接;所述磁路结构包括X向磁弹簧2与Y向磁弹簧3,X向磁弹簧2与Y向磁弹簧3垂直布置;X向磁弹簧2包括沿水平X轴依次阵列布置的第一定磁铁21、第一动磁铁22、第二动磁铁23和第二定磁铁24,第一定磁铁21、第一动磁铁22、第二动磁铁23和第二定磁铁24为立方永磁体,第一定磁铁21与第一动磁铁22之间呈引力作用,第二动磁铁23与第二定磁铁24之间呈引力作用,第一定磁铁21与第一动磁铁22的X向间隙等于第二动磁铁23与第二定磁铁24的X向间隙;Y向磁弹簧3包括沿水平Y轴依次阵列布置的第三定磁铁31、第三动磁铁32、第四动磁铁33和第四定磁铁34,第三定磁铁31、第三动磁铁32、第四动磁铁33和第四定磁铁34为立方永磁体,第三定磁铁31与第三动磁铁32之间呈引力作用,第四动磁铁33与第四定磁铁34之间呈引力作用,第三定磁铁31与第三动磁铁32的Y向间隙等于第四动磁铁33与第四定磁铁34的Y向间隙;第一动磁铁22、第二动磁铁23、第三动磁铁32和第四动 磁铁33分别与动磁铁安装框4的四个外壁固定连接,第一定磁铁21、第二定磁铁24、第三定磁铁31和第四定磁铁34分别与定磁铁固定架1的四个内壁固定连接,动磁铁安装框4以轴线重合的方式嵌套在定磁铁固定架1顶端的固定孔中,动磁铁安装框4底部与定磁铁固定架1顶端设有间隙,从而使得动磁铁安装框4底部与定磁铁固定架1顶端不接触,以避免机械摩擦给精密隔振带来非线性影响。A horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction, comprising a connecting structure and a magnetic circuit structure, the connecting structure includes a fixed magnet fixing frame 1, a load connecting piece 5 and a moving magnet mounting frame 4, The magnet fixing frame 1 is a cube structure with fixing holes at the top, and the moving magnet mounting frame 4 is a cube structure with holes at the bottom. The vibration load is fixedly connected; the magnetic circuit structure includes an X-direction magnetic spring 2 and a Y-direction magnetic spring 3, and the X-direction magnetic spring 2 and the Y-direction magnetic spring 3 are arranged vertically; the X-direction magnetic spring 2 includes an array along the horizontal X axis. The first fixed magnet 21, the first moving magnet 22, the second moving magnet 23 and the second fixed magnet 24, the first fixed magnet 21, the first moving magnet 22, the second moving magnet 23 and the second fixed magnet 24 are cubic For permanent magnets, there is an attractive force between the first fixed magnet 21 and the first moving magnet 22, and an attractive force between the second moving magnet 23 and the second fixed magnet 24. The X of the first fixed magnet 21 and the first moving magnet 22 The directional gap is equal to the X-directional gap between the second moving magnet 23 and the second fixed magnet 24; the Y-directional magnetic spring 3 includes a third fixed magnet 31, a third moving magnet 32, and a fourth moving magnet 33 arranged in an array along the horizontal Y axis in sequence and the fourth fixed magnet 34, the third fixed magnet 31, the third moving magnet 32, the fourth moving magnet 33 and the fourth fixed magnet 34 are cubic permanent magnets, and there is an attractive force between the third fixed magnet 31 and the third moving magnet 32 There is an attractive force between the fourth moving magnet 33 and the fourth stationary magnet 34 , and the Y-direction gap between the third stationary magnet 31 and the third moving magnet 32 is equal to the Y-direction gap between the fourth moving magnet 33 and the fourth stationary magnet 34 ; The first moving magnet 22, the second moving magnet 23, the third moving magnet 32 and the fourth moving magnet 33 are respectively fixedly connected with the four outer walls of the moving magnet mounting frame 4, the first fixed magnet 21, the second fixed magnet 24, The third fixed magnet 31 and the fourth fixed magnet 34 are respectively fixedly connected to the four inner walls of the fixed magnet fixing frame 1 , and the moving magnet mounting frame 4 is nested in the fixing hole at the top of the fixed magnet fixing frame 1 in a way that the axes overlap, and the moving magnet mounting frame 4 There is a gap between the bottom of the magnet mounting frame 4 and the top of the fixed magnet fixing frame 1 , so that the bottom of the moving magnet mounting frame 4 does not contact the top of the fixed magnet fixing frame 1 , so as to avoid the nonlinear effect of mechanical friction on the precision vibration isolation.
作为一种具体的实施方式,所述第一定磁铁21、第一动磁铁22、第二动磁铁23和第二定磁铁24沿水平X轴同向磁化。As a specific embodiment, the first fixed magnet 21 , the first moving magnet 22 , the second moving magnet 23 and the second fixed magnet 24 are magnetized in the same direction along the horizontal X-axis.
作为一种具体的实施方式,所述第一定磁铁21、第一动磁铁22、第二动磁铁23和第二定磁铁24均沿水平Y轴或Z轴磁化,且第一定磁铁21的磁化方向与第二定磁铁24的磁化方向相同,与第一动磁铁22、第二动磁铁23的磁化方向相反。As a specific implementation manner, the first fixed magnet 21 , the first moving magnet 22 , the second moving magnet 23 and the second fixed magnet 24 are all magnetized along the horizontal Y-axis or Z-axis, and the first fixed magnet 21 is magnetized along the horizontal Y-axis or Z-axis. The magnetization direction is the same as the magnetization direction of the second stationary magnet 24 and opposite to the magnetization directions of the first moving magnet 22 and the second moving magnet 23 .
作为一种具体的实施方式,所述第三定磁铁31、第三动磁铁32、第四动磁铁33和第四定磁铁34沿水平Y轴同向磁化。As a specific embodiment, the third fixed magnet 31 , the third moving magnet 32 , the fourth moving magnet 33 and the fourth fixed magnet 34 are magnetized in the same direction along the horizontal Y axis.
作为一种具体的实施方式,所述第三定磁铁31、第三动磁铁32、第四动磁铁33和第四定磁铁34均沿水平X轴或Z轴磁化,且第三定磁铁31的磁化方向与第四定磁铁34的磁化方向相同,与第三动磁铁32、第四动磁铁33的磁化方向相反。As a specific implementation manner, the third stationary magnet 31 , the third moving magnet 32 , the fourth moving magnet 33 and the fourth stationary magnet 34 are all magnetized along the horizontal X-axis or Z-axis, and the third stationary magnet 31 is magnetized along the horizontal X-axis or Z-axis. The magnetization direction is the same as the magnetization direction of the fourth stationary magnet 34 and opposite to the magnetization directions of the third moving magnet 32 and the fourth moving magnet 33 .
作为一种具体的实施方式,所述基于磁引力正负刚度并联的水平二自由度电磁隔振装置的整体结构成轴对称,所述固定孔为方形孔。As a specific embodiment, the overall structure of the horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction is axisymmetric, and the fixing hole is a square hole.
下面结合图1~图4给出本发明的一个实施例。An embodiment of the present invention is given below with reference to FIGS. 1 to 4 .
图1为基于磁引力正负刚度并联的水平二自由度电磁隔振装置的俯视图,图2为基于磁引力正负刚度并联的水平二自由度电磁隔振装置实施例1的三维模型,第一定磁铁21为4mm×10mm×10mm的立方永磁体,永磁体材料为N44H牌号钕铁硼,剩余磁感应强度Br=1.34T,相对磁导率μ r=1.03。第一定磁铁21沿X轴正方向分别按照8.5mm、27.5mm、36mm的间距阵列得到第一动磁铁22、第二动磁铁23和第二定磁铁24。第三定磁铁31为10mm×4mm×10mm的立方永磁体,永磁体材料为N44H牌号钕铁硼,剩余磁感应强度Br=1.34T,相对磁导率μ r=1.03。第三定磁铁31沿Y轴负方向分别按照8.5mm、27.5mm、36mm的间距阵列得到第三动磁铁32、第四动磁铁33和第四定磁铁34,第一动磁铁22、第二动磁铁23、第三动磁铁32和第四动磁铁33分别与动磁铁安装框4的四个外壁固定连接,第一定磁铁21、第二定磁铁24、第三定磁铁31和第四定磁铁34分别与定磁铁固定架1的四个内壁固定连接; 定磁铁固定架1顶端方形孔的尺寸为40mm×40mm×16.5mm,材料为硬质铝合金;动磁铁安装框4为15mm×15mm×12mm立方体结构,底端开直径10mm,深8mm的圆孔以减轻质量;动磁铁安装框4以轴线重合的方式嵌套在定磁铁固定架1顶端的固定孔中,动磁铁安装框4底部比定磁铁固定架1顶端高5mm,保证动磁铁安装框4与定磁铁固定架1不接触,以避免机械摩擦给精密隔振带来非线性影响;动磁铁安装框4顶部与负载连接件5固定连接,负载连接件5顶端连接隔振负载。 Fig. 1 is a top view of a horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction, Fig. 2 is a three-dimensional model of Embodiment 1 of the horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction, the first The fixed magnet 21 is a 4mm×10mm×10mm cubic permanent magnet, the permanent magnet material is N44H grade NdFeB, the residual magnetic induction intensity Br=1.34T, and the relative magnetic permeability μ r =1.03. The first fixed magnets 21 are arrayed at intervals of 8.5 mm, 27.5 mm and 36 mm along the positive direction of the X-axis to obtain the first moving magnets 22 , the second moving magnets 23 and the second fixed magnets 24 . The third fixed magnet 31 is a 10mm×4mm×10mm cubic permanent magnet, the permanent magnet material is N44H NdFeB, the residual magnetic induction intensity Br=1.34T, and the relative magnetic permeability μ r =1.03. The third fixed magnet 31 is arrayed at intervals of 8.5 mm, 27.5 mm and 36 mm along the negative direction of the Y-axis to obtain the third moving magnet 32, the fourth moving magnet 33 and the fourth fixed magnet 34, the first moving magnet 22, the second moving magnet 34, The magnet 23 , the third moving magnet 32 and the fourth moving magnet 33 are respectively fixedly connected to the four outer walls of the moving magnet mounting frame 4 . The first fixed magnet 21 , the second fixed magnet 24 , the third fixed magnet 31 and the fourth fixed magnet 34 are respectively fixedly connected with the four inner walls of the fixed magnet holder 1; the size of the square hole at the top of the fixed magnet holder 1 is 40mm×40mm×16.5mm, and the material is hard aluminum alloy; the moving magnet installation frame 4 is 15mm×15mm× 12mm cube structure, the bottom end is opened with a round hole with a diameter of 10mm and a depth of 8mm to reduce the mass; the moving magnet mounting frame 4 is nested in the fixing hole at the top of the fixed magnet fixing frame 1 in a way that the axes overlap, and the bottom of the moving magnet mounting frame 4 is smaller than The top of the fixed magnet fixing frame 1 is 5mm high to ensure that the moving magnet installation frame 4 does not contact the fixed magnet fixing frame 1, so as to avoid the nonlinear effect of mechanical friction on the precision vibration isolation; the top of the moving magnet installation frame 4 is fixed with the load connector 5 The top end of the load connector 5 is connected to the vibration isolation load.
图3为图1A-A剖面视图,第一定磁铁21、第一动磁铁22、第二动磁铁23和第二定磁铁24均沿X轴正方向磁化,如图3中箭头所示;图4为图1B-B剖面视图,第三定磁铁31、第三动磁铁32、第四动磁铁33和第四定磁铁34均沿Y轴负方向磁化,如图4中箭头所示。在X方向,X向磁弹簧2产生的负刚度与Y向磁弹簧3产生的正刚度并联实现低频隔振效果;在Y方向,X向磁弹簧2产生的正刚度与Y向磁弹簧3产生的负刚度并联实现低频隔振效果;在Z方向,X向磁弹簧2产生的正刚度与Y向磁弹簧3产生的正刚度并联以稳定支撑隔振负载。3 is a cross-sectional view of FIG. 1A-A, the first fixed magnet 21, the first moving magnet 22, the second moving magnet 23 and the second fixed magnet 24 are all magnetized along the positive direction of the X-axis, as shown by the arrows in FIG. 3; 4 is a cross-sectional view of FIG. 1B-B, the third stationary magnet 31, the third moving magnet 32, the fourth moving magnet 33 and the fourth stationary magnet 34 are magnetized along the negative direction of the Y-axis, as shown by the arrows in FIG. 4 . In the X direction, the negative stiffness generated by the X-direction magnetic spring 2 and the positive stiffness generated by the Y-direction magnetic spring 3 are connected in parallel to achieve low-frequency vibration isolation; in the Y direction, the positive stiffness generated by the X-direction magnetic spring 2 and the Y-direction magnetic spring 3 In the Z direction, the positive stiffness generated by the X-direction magnetic spring 2 is connected in parallel with the positive stiffness generated by the Y-direction magnetic spring 3 to stably support the vibration isolation load.
图5为图1A-A剖面视图的实施例2,第一定磁铁21与第二定磁铁24沿Y轴负方向磁化,第一动磁铁22与第二动磁铁23沿Y轴正方向磁化。5 is the second embodiment of the cross-sectional view of FIG. 1A-A, the first fixed magnet 21 and the second fixed magnet 24 are magnetized along the negative Y-axis direction, and the first moving magnet 22 and the second moving magnet 23 are magnetized along the positive Y-axis direction.
图6为图1A-A剖面视图的实施例3,第一定磁铁21与第二定磁铁24沿Z轴正方向磁化,第一动磁铁22与第二动磁铁23沿Z轴负方向磁化。6 is the third embodiment of the cross-sectional view of FIG. 1A-A, the first fixed magnet 21 and the second fixed magnet 24 are magnetized along the positive Z-axis direction, and the first moving magnet 22 and the second moving magnet 23 are magnetized along the negative Z-axis direction.
图7为图1B-B剖面视图的实施例2,第三定磁铁31与第四定磁铁34沿X轴负方向磁化,第三动磁铁32与第四动磁铁33沿X轴正方向磁化。7 is the second embodiment of the cross-sectional view of FIG. 1B-B. The third stator 31 and the fourth stator 34 are magnetized along the negative X-axis direction, and the third moving magnet 32 and the fourth moving magnet 33 are magnetized along the positive X-axis direction.
图8为图1B-B剖面视图的实施例3,第三定磁铁31与第四定磁铁34沿Z轴正方向磁化,第三动磁铁32与第四动磁铁33沿Z轴负方向磁化。8 is the third embodiment of the cross-sectional view of FIG. 1B-B. The third stator 31 and the fourth stator 34 are magnetized along the positive Z-axis direction, and the third moving magnet 32 and the fourth moving magnet 33 are magnetized along the negative Z-axis direction.

Claims (6)

  1. 一种基于磁引力正负刚度并联的水平二自由度电磁隔振装置,包括连接结构与磁路结构,所述连接结构包括定磁铁固定架(1)、负载连接件(5)和动磁铁安装框(4),定磁铁固定架(1)为顶端设置固定孔的立方体结构,动磁铁安装框(4)为底部开孔的立方体结构,动磁铁安装框(4)顶端与负载连接件(5)的底部固定连接,负载连接件(5)的顶端与隔振负载固定连接;其特征在于:所述磁路结构包括X向磁弹簧(2)与Y向磁弹簧(3),X向磁弹簧(2)与Y向磁弹簧(3)垂直布置;X向磁弹簧(2)包括沿水平X轴依次阵列布置的第一定磁铁(21)、第一动磁铁(22)、第二动磁铁(23)和第二定磁铁(24),第一定磁铁(21)、第一动磁铁(22)、第二动磁铁(23)和第二定磁铁(24)为立方永磁体,第一定磁铁(21)与第一动磁铁(22)之间呈引力作用,第二动磁铁(23)与第二定磁铁(24)之间呈引力作用,第一定磁铁(21)与第一动磁铁(22)的X向间隙等于第二动磁铁(23)与第二定磁铁(24)的X向间隙;Y向磁弹簧(3)包括沿水平Y轴依次阵列布置的第三定磁铁(31)、第三动磁铁(32)、第四动磁铁(33)和第四定磁铁(34),第三定磁铁(31)、第三动磁铁(32)、第四动磁铁(33)和第四定磁铁(34)为立方永磁体,第三定磁铁(31)与第三动磁铁(32)之间呈引力作用,第四动磁铁(33)与第四定磁铁(34)之间呈引力作用,第三定磁铁(31)与第三动磁铁(32)的Y向间隙等于第四动磁铁(33)与第四定磁铁(34)的Y向间隙;第一动磁铁(22)、第二动磁铁(23)、第三动磁铁(32)和第四动磁铁(33)分别与动磁铁安装框(4)的四个外壁固定连接,第一定磁铁(21)、第二定磁铁(24)、第三定磁铁(31)和第四定磁铁(34)分别与定磁铁固定架(1)的四个内壁固定连接,动磁铁安装框(4)以轴线重合的方式嵌套在定磁铁固定架(1)顶端的固定孔中,动磁铁安装框(4)底部与定磁铁固定架(1)顶端设有间隙。A horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction, comprising a connection structure and a magnetic circuit structure, wherein the connection structure comprises a fixed magnet fixing frame (1), a load connection piece (5) and a moving magnet installation Frame (4), the fixed magnet fixing frame (1) is a cube structure with fixing holes at the top, the moving magnet mounting frame (4) is a cube structure with holes at the bottom, and the top of the moving magnet mounting frame (4) is connected to the load connector (5). ) is fixedly connected to the bottom of the load connector (5), and the top of the load connector (5) is fixedly connected to the vibration isolation load; it is characterized in that: the magnetic circuit structure includes an X-direction magnetic spring (2) and a Y-direction magnetic spring (3), and the X-direction magnetic The spring (2) is vertically arranged with the Y-direction magnetic spring (3); the X-direction magnetic spring (2) comprises a first fixed magnet (21), a first moving magnet (22), a second moving magnet (22) and a second moving magnet (21) arranged in an array along the horizontal X-axis The magnet (23) and the second fixed magnet (24), the first fixed magnet (21), the first moving magnet (22), the second moving magnet (23) and the second fixed magnet (24) are cubic permanent magnets. There is an attractive force between the fixed magnet (21) and the first moving magnet (22), and there is an attractive force between the second moving magnet (23) and the second fixed magnet (24). The X-direction gap of a moving magnet (22) is equal to the X-direction gap between the second moving magnet (23) and the second stationary magnet (24); the Y-direction magnetic spring (3) includes third fixed magnets arranged in an array along the horizontal Y-axis in sequence. Magnet (31), third moving magnet (32), fourth moving magnet (33) and fourth stationary magnet (34), third stationary magnet (31), third moving magnet (32), fourth moving magnet ( 33) and the fourth stationary magnet (34) are cubic permanent magnets, the third stationary magnet (31) and the third moving magnet (32) act as gravitational forces, and the fourth moving magnet (33) and the fourth stationary magnet (34) ), the Y-direction gap between the third stationary magnet (31) and the third moving magnet (32) is equal to the Y-direction gap between the fourth moving magnet (33) and the fourth stationary magnet (34). The magnet (22), the second moving magnet (23), the third moving magnet (32) and the fourth moving magnet (33) are respectively fixedly connected to the four outer walls of the moving magnet mounting frame (4). The first fixed magnet (21) ), the second fixed magnet (24), the third fixed magnet (31) and the fourth fixed magnet (34) are respectively fixedly connected to the four inner walls of the fixed magnet fixing frame (1), and the moving magnet mounting frame (4) is connected with the axis It is nested in the fixing hole at the top of the fixed magnet fixing frame (1) in a overlapping manner, and a gap is provided between the bottom of the moving magnet installation frame (4) and the top of the fixed magnet fixing frame (1).
  2. 根据权利要求1所述的基于磁引力正负刚度并联的水平二自由度电磁隔振装置,其特征在于:所述第一定磁铁(21)、第一动磁铁(22)、第二动磁铁(23)和第二定磁铁(24)沿水平X轴同向磁化。The horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction according to claim 1, characterized in that: the first fixed magnet (21), the first moving magnet (22), and the second moving magnet (23) and the second stationary magnet (24) are magnetized in the same direction along the horizontal X-axis.
  3. 根据权利要求1所述的基于磁引力正负刚度并联的水平二自由度电磁隔振装置,其特征在于:所述第一定磁铁(21)、第一动磁铁(22)、第二动磁铁(23)和第二定磁铁(24)均沿水平Y轴或Z轴磁化,且第一定磁铁(21)的磁化方向与第二定磁铁(24)的磁化方向相同,与第一动磁铁(22)、第二动磁铁(23)的磁化方向相反。The horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction according to claim 1, characterized in that: the first fixed magnet (21), the first moving magnet (22), and the second moving magnet (23) and the second stationary magnet (24) are both magnetized along the horizontal Y-axis or Z-axis, and the magnetization direction of the first stationary magnet (21) is the same as that of the second stationary magnet (24), which is the same as that of the first moving magnet. (22), the magnetization directions of the second moving magnet (23) are opposite.
  4. 根据权利要求1、2或3所述的基于磁引力正负刚度并联的水平二自由度电磁隔振装置,其特征在于:所述第三定磁铁(31)、第三动磁铁(32)、第四动磁铁(33)和第四定磁铁(34) 沿水平Y轴同向磁化。The horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction according to claim 1, 2 or 3, characterized in that: the third fixed magnet (31), the third moving magnet (32), The fourth moving magnet (33) and the fourth stationary magnet (34) are magnetized in the same direction along the horizontal Y axis.
  5. 根据权利要求1、2或3所述的基于磁引力正负刚度并联的水平二自由度电磁隔振装置,其特征在于:所述第三定磁铁(31)、第三动磁铁(32)、第四动磁铁(33)和第四定磁铁(34)均沿水平X轴或Z轴磁化,且第三定磁铁(31)的磁化方向与第四定磁铁(34)的磁化方向相同,与第三动磁铁(32)、第四动磁铁(33)的磁化方向相反。The horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction according to claim 1, 2 or 3, characterized in that: the third fixed magnet (31), the third moving magnet (32), Both the fourth moving magnet (33) and the fourth stationary magnet (34) are magnetized along the horizontal X-axis or Z-axis, and the magnetization direction of the third stationary magnet (31) is the same as that of the fourth stationary magnet (34), which is the same as that of the fourth stationary magnet (34). The magnetization directions of the third moving magnet (32) and the fourth moving magnet (33) are opposite.
  6. 根据权利要求1所述的基于磁引力正负刚度并联的水平二自由度电磁隔振装置,其特征在于:所述基于磁引力正负刚度并联的水平二自由度电磁隔振装置的整体结构成轴对称,所述固定孔为方形孔。The horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction according to claim 1, wherein the overall structure of the horizontal two-degree-of-freedom electromagnetic vibration isolation device based on the parallel connection of positive and negative stiffness of magnetic attraction is composed of: Axisymmetric, the fixing hole is a square hole.
PCT/CN2021/102571 2020-06-29 2021-06-26 Horizontal two-degree-of-freedom electromagnetic vibration isolation apparatus based on parallel connection of positive and negative stiffness of magnetic attraction force WO2022001905A1 (en)

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