WO2021254082A1 - Dispositif de coupe à fil et équipement de traitement de tige de silicium - Google Patents

Dispositif de coupe à fil et équipement de traitement de tige de silicium Download PDF

Info

Publication number
WO2021254082A1
WO2021254082A1 PCT/CN2021/094831 CN2021094831W WO2021254082A1 WO 2021254082 A1 WO2021254082 A1 WO 2021254082A1 CN 2021094831 W CN2021094831 W CN 2021094831W WO 2021254082 A1 WO2021254082 A1 WO 2021254082A1
Authority
WO
WIPO (PCT)
Prior art keywords
cutting
wire
silicon rod
wire cutting
cutting unit
Prior art date
Application number
PCT/CN2021/094831
Other languages
English (en)
Chinese (zh)
Inventor
苏静洪
吴张琪
梁文
卢建伟
潘雪明
曹奇峰
钱春军
Original Assignee
天通日进精密技术有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 天通日进精密技术有限公司 filed Critical 天通日进精密技术有限公司
Publication of WO2021254082A1 publication Critical patent/WO2021254082A1/fr

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
    • B28D7/04—Accessories specially adapted for use with machines or devices of the preceding groups for supporting or holding work or conveying or discharging work

Definitions

  • This application relates to the technical field of silicon rod processing, and in particular to a wire cutting device and silicon rod processing equipment.
  • the usual crystalline silicon solar cells are made on high-quality silicon wafers, which are cut from solar silicon materials by wire saws.
  • wire cutting technology represented by diamond wire is widely used in the production of silicon material cutting due to its high production efficiency, low operating cost, and high operating accuracy.
  • the silicon material can be, for example, a single crystal silicon material or a polycrystalline silicon material.
  • the silicon material cutting operations include but are not limited to cutting operations, square root operations, slicing operations, and the like.
  • the silicon rod to be cut is placed vertically and positioned, and then the wire cutting device is used to enter from the top of the silicon rod to be cut and extend along the length direction of the silicon rod. Feed down until the bottom of the silicon rod to be cut and then pass through, thereby cutting out four parallel shaft sections in the circumferential direction of the silicon rod.
  • commonly used wire cutting devices include single wire cutting devices and multi-wire cutting devices.
  • an adjustment shim (such as Chinese patent documents CN205588494U and CN205522032U) is provided.
  • the distance between the two wire grooves is equal.
  • the wire groove can be replaced by adding or reducing the adjusting shim.
  • adding or reducing an adjusting shim can realize the replacement from the current wire groove to the next adjacent wire groove.
  • steps such as loosening the screws, adding or removing adjustment pads, re-tightening the screws, and final calibration are still required, and there are still problems such as cumbersome operation and low efficiency.
  • the purpose of the present application is to provide a wire cutting device and silicon rod processing equipment to solve the problems in the prior art that the wire cutting device is worn out and the slot changing process is cumbersome and inefficient.
  • the silicon ingot processing equipment includes: a base with a silicon ingot processing platform;
  • the silicon rod processing platform is used to carry the silicon rods to be cut;
  • the wire cutting device includes: a cutting frame arranged on the base; at least one wire cutting unit movably arranged on the cutting frame;
  • the wire cutting unit includes : A plurality of cutting wheels arranged in sequence along the first direction, each cutting wheel has at least two cutting line grooves; the cutting line is wound around the plurality of cutting wheels in sequence to form at least one cutting wire saw; at least one
  • the pitch adjustment mechanism is provided on the at least one wire cutting unit, and is used to drive the plurality of cutting wheels in the at least one wire cutting unit to move in the second direction to adjust the cutting of the at least one wire saw in the at least one wire cutting unit Position or change the cutting line around the cutting line grooves of the plurality of cutting wheels in the at least one line cutting unit.
  • this application also discloses a silicon rod processing equipment, including: a base with a silicon rod processing platform; a silicon rod carrying device, which is provided on the silicon rod processing platform, and is used to carry the silicon rods to be cut;
  • the wire cutting device according to any one of the embodiments of the first aspect of the present application.
  • the wire cutting device and silicon rod processing equipment provided by the present application have the following beneficial effects: the wire cutting device includes at least one pitch adjustment mechanism and is arranged on at least one wire cutting unit, and the distance adjustment mechanism Under the action, the multiple cutting wheels of at least one wire cutting unit in the wire cutting device can be driven to move in the second direction, and the at least one cutting wire saw formed around the multiple cutting wheels can thus be acted on by the pitch adjusting mechanism.
  • FIG. 1 shows a schematic diagram of the structure of the silicon rod loading and unloading device in an embodiment of the present application.
  • Fig. 2a shows a partial structural diagram of the silicon rod loading and unloading device in a state of clamping the silicon rod to be cut in an embodiment.
  • Fig. 2b shows a bottom view of a part of the structure of the silicon rod loading and unloading device in a state where the silicon rod to be cut is clamped in an embodiment.
  • Fig. 3a shows a partial structural diagram of the silicon rod loading and unloading device in a state of clamping a cut silicon rod in an embodiment.
  • Fig. 3b shows a bottom view of a part of the structure of the silicon rod loading and unloading device in a state of clamping a cut silicon rod in an embodiment.
  • FIG. 4 is a schematic diagram showing the structure of a silicon rod holder in an embodiment of the silicon rod loading and unloading device of the present application.
  • FIG. 5 shows a schematic diagram of the structure of the silicon rod loading and unloading device in an embodiment of the present application.
  • Fig. 6 shows a schematic structural view of a lifting drive mechanism in an embodiment of the silicon rod loading and unloading device of the present application.
  • Figures 7a-7b show schematic structural diagrams of the lifting drive mechanism in an embodiment of the silicon rod loading and unloading device in different states.
  • Figures 8a-8d show schematic diagrams of the silicon rod loading and unloading device of this application in different transport states in an embodiment.
  • FIG. 9 shows a schematic diagram of the structure of the silicon rod moving device of the silicon rod processing equipment of this application in an embodiment.
  • FIG. 10 shows a schematic diagram of an embodiment of the elastic push rod structure of the silicon rod processing equipment of the present application.
  • FIG. 11 shows a schematic diagram of a part of the structure of the silicon rod conveying device of the silicon rod processing equipment of this application in an embodiment.
  • FIG. 12 shows a schematic diagram of the structure of the silicon rod conveying device of the silicon rod processing equipment of this application in an embodiment.
  • FIG. 13 shows a schematic structural view of an embodiment of the silicon rod pressing device of the present application.
  • Fig. 14a shows a schematic structural view of an embodiment of the silicon rod pressing device of the present application.
  • Figures 14b-14c show enlarged schematic diagrams of B in Figure 14a in different locked states.
  • Fig. 15 is an enlarged schematic diagram of the position A in Fig. 13.
  • FIG. 16 shows a schematic diagram of the structure of the wire cutting device according to an embodiment of the present application.
  • FIG. 17 is implemented as a schematic structural diagram of the wire cutting device of the present application applied to a silicon rod square-out device in an embodiment.
  • FIG. 18 is a schematic diagram showing the structure of the wire cutting device of the present application applied to a silicon rod square-out device in an embodiment.
  • FIG. 19 shows a schematic diagram of the structure of the wire cutting unit in an embodiment of the wire cutting device of the present application.
  • Fig. 20 is a schematic diagram showing the structure of the middle cutting wheel and the transition wheel beside it in an embodiment of the wire cutting device.
  • FIG. 21 shows a schematic diagram of a part of the structure of a silicon rod processing device which is a silicon rod cutting device according to an embodiment of the present application.
  • FIG. 22 shows a schematic diagram of a part of the structure of the silicon rod processing equipment of the silicon rod cutting and grinding integrated machine in an embodiment.
  • FIG. 23 shows a schematic diagram of the structure of the wire cutting device in an embodiment of the present application.
  • FIG. 24 shows a schematic diagram of the structure of the transition wheel and the bracket in an embodiment of the wire cutting device of the present application.
  • FIG. 25 is an enlarged schematic diagram of C in FIG. 23.
  • Fig. 26 is an enlarged schematic diagram of D in Fig. 17.
  • Fig. 27 shows a top view of the wire cutting device in an embodiment of the present application.
  • Fig. 28 shows a side view of the wire cutting device in an embodiment of the present application.
  • FIG. 29 is a schematic diagram showing the enlarged structure at E in FIG. 28.
  • FIG. 30 shows a schematic diagram of the structure of the side skin unloading device of the present application applied to a silicon rod square opener in an embodiment.
  • Fig. 31 shows a schematic diagram of the structure of the edge skin unloading device in an embodiment of the present application.
  • Fig. 32 shows a schematic structural diagram of a side skin supporting mechanism in an embodiment of the side skin unloading device of the present application.
  • Fig. 33 shows a schematic structural diagram of a side skin lifting unit in an embodiment of the side skin unloading device of the present application.
  • FIG. 34 shows a schematic diagram of the structure of the clamping assembly in an embodiment of the edge skin unloading device of the present application.
  • 35 shows a schematic cross-sectional view of the clamping assembly in an embodiment of the edge skin unloading device of the present application.
  • FIG. 36 shows a schematic cross-sectional view of the clamping assembly of the edge skin unloading device of the present application in another embodiment.
  • Figures 37a-37e are schematic diagrams showing different states of the side skin unloading device performing side skin transfer in an embodiment.
  • first, second, etc. are used herein to describe various elements or parameters in some examples, these elements or parameters should not be limited by these terms. These terms are only used to distinguish one element or parameter from another element or parameter.
  • first wire groove may be referred to as the second wire groove, and similarly, the second wire groove may be referred to as the first wire groove without departing from the scope of the various described embodiments.
  • the first slot and the second slot are both describing a slot, but unless the context clearly indicates otherwise, they are not the same slot. Similar situations also include the first wire cutting unit and the second wire cutting unit, or the first cutting wheel set and the second cutting wheel set.
  • crystalline silicon is usually processed into the form of silicon wafers and then used in product manufacturing.
  • the original silicon rods include single crystal silicon rods and polycrystalline silicon rods.
  • Single crystal silicon rods are melted by Czochralski method or suspension zone Method to grow rod-shaped single crystal silicon from the melt.
  • single crystal silicon rods with a length of 5000 mm or 5360 mm are common in silicon rod processing, or single crystal silicon rods with a length of about 800 mm.
  • Polycrystalline silicon is used Precipitation technology such as chemical vapor deposition technology to make silicon precipitate on the surface of the silicon core wire silicon rod.
  • the current production process of silicon wafers is generally to first pull the polycrystalline silicon brittle material into a single crystal silicon rod, and then use a square rooting machine to square the square; at this time, the cutting mechanism feeds along the length of the silicon rod and runs around the silicon rod. Cut four parallel planes up by two to make the cross section of the silicon rod resemble a rectangle; after the square is finished, the squared silicon rod is sliced along the length direction with a multi-line slicing machine to obtain the required silicon wafer.
  • the silicon rods to be cut (that is, the silicon rods that have not yet been prescribed) need to be loaded to the preset bearing position on the silicon rod prescribing equipment, so as to cooperate with the wire cutting device to preset
  • the silicon rods are cut with the specifications of the square, after the completion of the square, the cut silicon rods need to be transported away from the bearing structure of the machine base so that the silicon rod square-cutting equipment can continue to cut and process the silicon rods to be cut.
  • the present application provides a silicon ingot loading and unloading device for silicon ingot square-out equipment.
  • the silicon ingot square-out equipment includes a base, a silicon ingot carrying structure, and a wire cutting device.
  • the silicon ingot carrying structure is used to carry the vertical
  • the silicon rod loading and unloading device includes: a first bracket, which is hoisted on the base through a mounting frame; a silicon rod clamp, which is arranged on the first bracket, and is used to hold the silicon to be cut Rods or cut silicon rods; a displacement mechanism for driving the first support and the silicon rod clamps on the mounting frame to shift in at least one direction, so that the silicon rod clamps move to the first predetermined The position is to clamp the to-be-cut silicon rod or the cut silicon rod and move the clamped to-be-cut silicon rod or the cut silicon rod to the second predetermined position.
  • the first predetermined position and the second predetermined position are not limited to a fixed position or area established in the established coordinate system.
  • the loading and unloading device is determined to be
  • the transfer path conforms to the time sequence of the transfer, and takes the start position of the first bracket in the silicon rod handling device in the transfer path as the first predetermined position, and the end position of the first bracket as the second predetermined position.
  • the silicon rod loading and unloading device is performing the loading process, the position where the silicon rod holder clamps the silicon rod to be cut is the first predetermined position, and the moving mechanism moves to move the silicon rod to be cut to the silicon rod.
  • the position where the silicon rod to be cut is placed on the silicon rod supporting structure above the supporting surface of the supporting structure is the second predetermined position; on the contrary, when the silicon rod loading and unloading device executes the cut silicon rod after the square extraction is completed During the unloading process of the transfer out of the machine base, the first bracket is located adjacent to the silicon rod bearing structure, and the position where the cut silicon rod is clamped is used as the starting position, that is, the first predetermined position. The cut silicon rod is transported away from the machine by the silicon rod clamp. The position where it is seated and released is the second predetermined position.
  • FIG. 1 shows a schematic diagram of the structure of the silicon rod loading and unloading device in an embodiment of the present application.
  • the first bracket 31 is hoisted on the base by a mounting frame 33.
  • the first support 31 can be used as a supporting structure for the silicon rod holder 32, and the first support 31 is movably arranged on the mounting frame 33 and can be moved in at least one direction under the action of a displacement mechanism, thereby The movement of the silicon rod to be cut or the silicon rod to be cut clamped by the silicon rod clamp 32 is realized.
  • the mounting frame 33 is arranged above the machine base.
  • the mounting frame 33 can be used to determine the path and range span of the first bracket 31 to move along the mounting frame 33.
  • the mounting frame 33 is arranged above the silicon rod bearing structure of the loading and unloading area in the silicon rod processing platform of the machine base, and at the same time, the length of the mounting frame 33 in the first direction is larger than the loading and unloading area, or, The end of the length of the mounting frame 33 in the first direction is located outside the silicon rod bearing structure in the loading and unloading area, so that the first bracket 31 can move to any silicon rod bearing structure adjacent to the loading and unloading area when moving along the mounting frame 33.
  • the silicon rods to be cut are arranged on the corresponding silicon rod supporting structure or the cut silicon rods on the silicon rod supporting structure are transported away from the loading and unloading area.
  • the loading and unloading area is an area where loading and unloading are performed on the silicon ingot processing platform of the silicon ingot square-out equipment.
  • the mounting frame 33 is arranged parallel to the wire cutting support of the silicon rod square-cutting equipment, so as to make full use of the vacant equipment space above the machine base.
  • the silicon ingot loading and unloading device 3 can be installed on the base of the silicon ingot square-out equipment through the mounting frame 33.
  • the silicon ingot loading and unloading device 3 can also be used as a separate component to be detached from the silicon ingot square-out device. Points, for example as an independent sales device.
  • the mounting frame 33 is detachably connected to the silicon ingot square-out device, and the installation frame 33, the first support 31 and the silicon ingot clamp 32 can be set on the silicon ingot square-out device; for another example, the first The bracket 31 and the mounting frame 33 are detachably connected, and the first bracket 31 and the silicon rod holder 32 can be set on the silicon rod square-out equipment including the mounting frame 33 or the lifting frame.
  • the silicon rod holder 32 is arranged on the first support 31.
  • the silicon rod holder 32 includes a silicon rod holder, and the silicon rod holder contacts the surface of the silicon rod and performs clamping or release. action.
  • the silicon rod holder 32 includes a silicon rod holder.
  • the clamping surface of the silicon rod holder can be set to have a certain height to ensure the clamping state. The contact area between the silicon rod holder and the side surface of the vertically placed silicon rod can be clamped.
  • FIG. 2a shows a schematic diagram of the structure of the first bracket 31 and the silicon rod holder of the silicon rod loading and unloading device of this application in an example.
  • any one of the silicon rod clamping members on the first support 31 includes a first clamping arm 321 and a second clamping arm 322 that are arranged oppositely, and a clamping arm driving mechanism 320 for driving the The first clamping arm 321 and the first clamping arm 321 perform opening and closing actions.
  • the first clamping arm 321 and the second clamping arm 322 can be arranged in a mirror image or symmetrically.
  • first clamping arm 321 and the second clamping arm 322 When the first clamping arm 321 and the second clamping arm 322 perform a closing action, they can be used to approach and clamp the silicon rod; When the first clamping arm 321 and the second clamping arm 322 perform an opening action, they can be used to release the clamped silicon rod.
  • the first clamping arm and the second clamping arm have a clamping arc surface and a clamping plane.
  • the silicon rod clamping member can be used to clamp the silicon rod to be cut or the silicon rod that has been cut, in order to realize the vertical placement of the clamped silicon rod on the silicon rod supporting structure or the clamping from the silicon rod supporting structure.
  • the first clamping arm and the first clamping arm are clamped on the side of the silicon rod by opening and closing actions, that is, the silicon rod is vertical in the clamping state.
  • the first clamping arm and the first clamping arm have a clamping arc surface adapted to the arc surface of the silicon rod to be cut, and a clamping plane adapted to the side surface of the cut silicon rod.
  • the clamping arc surfaces of the first clamping arm and the second clamping arm are not limited to arc surfaces for contacting silicon rods provided on the clamping arms.
  • FIGS. 2a to 3b are shown as The side view and bottom view of the silicon rod holder of the present application in different clamping states, wherein Figures 2a and 2b are the three-dimensional schematic diagram and bottom view of the silicon rod holder holding the silicon rod to be cut with arc-shaped sides
  • Figures 3a and 3b are a three-dimensional schematic diagram and a bottom view of a silicon rod holder clamping a cut silicon rod.
  • the first clamping arm and the second clamping arm are symmetrically provided with a clamping arc surface and a clamping plane.
  • the clamping arc may be a contact plane set in different directions to conform to the curvature of the silicon rod surface.
  • the planes in different directions on a single clamping arm are symmetrical.
  • the diameter of the cross section of the silicon rod makes the pressure applied to the silicon rod by the first clamping arm 321 and the second clamping arm 322 converge at the center of the cross section of the silicon rod during clamping, so as to prevent the extension of the resultant force of the pressure on the silicon rod in the clamping state
  • the wire is outside of the clamping arc, so that the silicon rod has a tendency to escape from the silicon rod clamping member.
  • the clamping arc surface of the first clamping arm and the second clamping arm exceeds a quarter of the arc of the side surface of the silicon rod to be cut, and the clamping contact surface formed during clamping exceeds the silicon rod.
  • the cushioning pad is made of, for example, elastic rubber materials, or silicone or other materials with elastic deformation, damping characteristics or cushioning characteristics, so as to prevent the surface of the silicon rods to be cut or cut silicon rods from being clamped during transportation. Scratched or bumped into pieces.
  • the clamping arm drive mechanism includes: an opening and closing gear, a rack, and a driving source (not shown); wherein, the first clamping arm and the second clamping arm are respectively provided with opening and closing gears , The opposite sides of the rack are respectively provided with tooth patterns corresponding to the opening and closing gears on the first clamping arm and the second clamping arm, and the driving source is connected with the gear driving member for driving The gear driving member moves.
  • the gear drive member is a rack
  • the rack is located between the first clamping arm and the second clamping arm
  • the two outer surfaces of the clamping arms facing on both sides of the rack are respectively provided with and
  • the opening and closing gears on the first clamping arm and the second clamping arm mesh with corresponding tooth patterns
  • the driving source may be, for example, a driving motor or an air cylinder.
  • the gear rotates externally, and the opening and closing gear drives the clamping arm (the opening and closing gear and the clamping arm can be connected by a shaft) to move down to turn from the loosening state to the clamping state; on the contrary, when the clamping arm needs to be loosened
  • the drive motor or air cylinder
  • the drive source drives the rack as the gear drive to move downwards, and the opening and closing gears meshed on both sides are driven by the rack to rotate internally, and the opening and closing gears are driven during the internal rotation.
  • the clamping arm (the opening and closing gear and the clamping arm can be connected by a rotating shaft) perform an upward movement to turn from the clamping state to the unclamping state.
  • FIG. 4 shows a schematic structural view of a silicon rod holding member of the silicon rod loading and unloading device of this application in an embodiment.
  • the clamping arm drive mechanism 320 includes: a first rack 3201, a second rack 3202, a clamping cylinder 3203, and a transmission gear 3204; the first rack 3201 is linked to the first clamping arm , The second rack 3202 is linked to the second clamping arm, and the transmission gear 3204 meshes with the first rack 3201 and the second rack 3202 for driving the all
  • the first clamping arm and the second clamping arm move toward each other to perform a closing action, and when rotating in a reverse direction, the first clamping arm and the second clamping arm are driven to move back to perform an opening action.
  • the first rack 3201 moves in a direction opposite to the linear velocity of the upper tooth portion of the transmission gear 3204;
  • the two racks 3202 move in the opposite direction of the linear velocity of the lower tooth portion of the transmission gear 3204.
  • the first rack 3201 and the second rack 3202 which are symmetrical about the center of the gear, must satisfy the relationship of the linear velocity in the opposite direction, that is, they appear to move closer to each other or move away from each other.
  • the clamping cylinder 3203 pushes the first rack 3201 or the second rack 3202 to move to drive the transmission gear 3204 to rotate
  • the first rack 3201 and the second rack The racks 3202 approach each other to drive the first clamping arm and the second clamping arm toward each other to perform a closing action
  • the transmission gear 3204 is in the reverse state
  • the first rack 3201 and the second rack 3202 move away from each other to drive
  • the first clamping arm and the second clamping arm are away from each other to perform an opening action.
  • the clamping arm drive mechanism includes a first rack, a second rack, and a drive gear; the first rack is linked to the first clamping arm, and the second rack is linked to
  • the drive gear is connected to the power output shaft (not shown) of the drive motor and meshes with the first rack and the second rack for rotating in the forward direction
  • the first clamping arm and the second clamping arm are driven to move back to perform an opening action.
  • the first rack and the second rack can be meshed on both sides of the driving gear, so that when the driving gear rotates, the linear velocity directions at the first rack and the second rack are opposite, and the driving motor drives the driving gear.
  • the gear rotates so that when the drive gear rotates forward, the first rack and the second rack move toward each other, that is, drive the first clamping arm and the second clamping arm to move toward each other to perform a closing action.
  • the driving gear is driven to rotate in the reverse direction, the first rack and The second rack moves backwards to drive the first clamping arm and the second clamping arm to move backwards to perform an opening action.
  • the silicon rod holder in the silicon rod holder is fixedly arranged on the first support in the lifting direction, and is used to hold the same specification or a preset specification range (for example, a length of 500mm to 800mm). ) Within the silicon rod.
  • multiple sets of silicon rod clamping members may be provided on the first support to ensure that the silicon rods that can be clamped by the silicon rod handling device cover various length specifications.
  • the single-wafer silicon rods are formed by cutting the original long silicon rods, which will inevitably make the size difference between the single-wafer silicon rods very different.
  • the silicon rod holders are used to erect The single-wafer silicon rod in the placed state or the cut silicon rod after the square is clamped. Therefore, for the silicon rod fixture, the influence of the aforementioned size difference is mainly manifested in the difference in the length of the single-wafer silicon rod. Whether the silicon rod holder in the silicon rod holder can be clamped to a single-wafer silicon rod corresponding to the hidden worry.
  • the silicon rod holder In order to reduce or even avoid the risk that the silicon rod holder may not be able to clamp the silicon rod, the silicon rod holder has different design schemes.
  • the silicon rod holder includes at least two silicon rod holders, wherein the two silicon rod holders are arranged on the first support at an interval.
  • the main body of the first support 31 is vertical, and the two silicon rod clamping members in the silicon rod clamp are arranged on the first support 31 at an upper and lower interval.
  • the silicon rod holder can be installed on the first bracket 31 by a holder mounting seat.
  • the holder mounting seat is movably installed on the first bracket 31.
  • a bracket 31 is used to adjust the distance between the silicon rod clamping parts and the silicon rod clamping parts or the silicon rod clamping parts arranged at intervals.
  • the first bracket 31 is provided with a lifting rail, and the clamping member mounting seat can be set as a sliding block movably arranged on the lifting rail, thereby achieving up and down along the first bracket 31 move.
  • the spacing between different silicon rod holding parts can be adjusted, and the clamping of silicon rods of different specifications can be realized based on a small number of silicon rod holding parts such as two.
  • the silicon rod holder further includes a lift drive mechanism, and at least one silicon rod holder of the at least two silicon rod holders is driven by the lift drive mechanism to move along the first support.
  • Lifting movement For example, when the silicon rod holder includes two silicon rod holders, one of the silicon rod holders can be fixed to the first support, and the other silicon rod holder can be movably arranged on the first support. And driven by the lifting drive mechanism to move up and down along the first support; for another example, the two silicon rod clamping members in the silicon rod clamp can be movably arranged on the first support, and the lifting drive mechanism Seek to drive down the first support to move up and down.
  • the lifting drive mechanism includes: a drive chain and at least one locking device; wherein the drive chain is wound around two drive sprockets arranged up and down, and of the two drive sprockets At least one transmission sprocket is axially connected to the sprocket drive source, and the at least one locking device is provided on at least one silicon rod clamping member for switching the lock between the at least one silicon rod clamping member and the transmission chain There are two states: stop and activity.
  • the at least one locking device corresponds to at least one silicon rod holding member.
  • the locking device when there is one locking device, that is, it is set on one silicon rod holding member, when the locking device is two One is set on the two silicon rod clamping pieces, and each locking device is used to control the locking or movable state between a silicon rod clamping piece and the transmission chain, so as to realize the compliance of the silicon rod clamping piece
  • the drive chain is moved or stopped at the preset height of the first bracket to switch.
  • FIG. 5 shows a schematic diagram of the structure of the silicon rod loading and unloading device according to an embodiment of the present application.
  • the lifting drive mechanism 323 is provided with a transmission chain 3231.
  • the transmission chain 3231 can be set as an endless chain (shown in the embodiment shown in FIG. 5) or an open sprocket with an end point.
  • At least one of the 3232 is driven to rotate by a sprocket drive source 3233 such as a drive motor, thereby driving the transmission chain 3231 meshed with the transmission sprocket 3232 to move.
  • the direction of movement of the transmission chain 3231 is determined by the position of the transmission sprocket 3232 set up and down. It is determined, for example, that when the transmission sprockets 3232 arranged up and down are located on the same vertical line, the transmission chain 3231 between the two transmission sprockets 3232 moves in the lifting direction.
  • the locking device 3234 includes a locking sprocket 32341 and a locking mechanism 32340.
  • the locking sprocket 32341 is rotatably arranged on the silicon rod holder and engaged with the silicon rod holder.
  • the transmission chain 3231, the locking mechanism 32340 is provided on the silicon rod holder, and is used to lock the locking sprocket 32341 so that the locking sprocket 32341 is stationary relative to the transmission chain 3231, so that the The silicon rod holder connected to the locking sprocket 32341 and the transmission chain 3231 are switched from the active state to the locked state.
  • the locking sprocket 32341 can be connected to the silicon rod holder through the sprocket shaft.
  • the locking sprocket 32341 is driven by the meshing transmission chain 3231 to wind the chain.
  • the wheel shaft rotates; when the locking mechanism 32340 is in the working state, the locking mechanism 32340 restricts the rotation of the locking sprocket 32341 to lock the sprocket 32341 and the silicon rod holder by driving the movement of the chain 3231 in the lifting direction
  • the force of the movement in the lifting direction therefore, in a state where the movement of the locking sprocket 32341 relative to the transmission chain is stationary, the silicon rod holder can be driven by the transmission chain 3231 to move up and down along the first bracket.
  • the locking mechanism 32340 can restrict the rotation of the locking sprocket 32341 by clamping the teeth of the locking sprocket 32341, for example.
  • the locking mechanism 32340 includes a locking cylinder 32342 and a locking portion 32343, the locking portion 32343 is connected to the telescopic end of the locking cylinder 32342, and The locking cylinder 32342 drives the teeth of the locking sprocket 32341 to lock the locking sprocket 32341.
  • the detailed structure of the locking mechanism 32340 includes a locking cylinder 32342 fixedly installed on the silicon rod holder, and the telescopic rod of the locking cylinder 32342 can lock the sprocket along the 32341 expands and contracts in the radial direction.
  • a locking part 32343 is fixed on the end of the telescopic rod of the locking cylinder 32342.
  • the outer contour of the locking part 32343 is a rectangular block structure.
  • the locking part 32343 is close to the locking sprocket 32341 There is a latch on one side.
  • the locking portion 32343 When the locking portion 32343 is driven by the locking cylinder 32342 to extend into the locking sprocket 32341, the locking portion 32343 is locked to the locking sprocket 32341 so that it no longer faces the transmission chain 3231 Rotate (in the state shown in Figure 7b). At this time, the silicon rod holder connected to the locking mechanism 32340 moves up and down synchronously with the drive chain 3231.
  • the locking portion 32343 shrinks and retreats, so that the locking sprocket 32341 is restored to the state of being rotatably engaged with the transmission chain 3231 (as shown in Figure 7a (Showing state), the silicon rod holder loses the force in the lifting direction transmitted by the locking sprocket 32341, and can be stabilized at a preset height.
  • a holding part is fixed on the silicon rod holding part.
  • the holding part is composed of two pressing plates.
  • a sliding channel parallel to the expansion and contraction direction of the locking cylinder is formed therebetween, and the locking part is slidably arranged in the sliding channel.
  • the holding portion 3235 may also be a rectangular block arranged along the direction of the movement track of the locking portion, in which a sliding groove is arranged, and the locking portion is slidably arranged in the sliding groove, and Movement along the radial direction of the locking sprocket.
  • the drive chain 3231 may shake during transmission, causing the drive chain 3231 to disengage from the locking sprocket 32341, so that the silicon rod holder and the drive chain 3231 are always active state.
  • an anti-separation mechanism 3235 is also provided in the lifting drive mechanism 323. As shown in the embodiment of FIG. 5, the anti-separation mechanism 3235 has a U-shaped structure. The two parallel sides are fixed on the silicon rod holder to follow the silicon rod holder to move up and down synchronously, and the groove bottom of the anti-separation mechanism 3235 at the bottom of the U-shaped structure is close to the drive chain 3231.
  • the locked state of the silicon rod holder following the synchronous movement of the transmission chain 3231 or the switching of the relative active state of the silicon rod holder and the transmission chain 3231 can be realized.
  • the preset adjustment height of the silicon rod holder makes the locking device 3234 lock the silicon rod holder and the drive chain 3231.
  • the stop device 3234 restores the movable state between the silicon rod holding member and the transmission chain 3231, so that the silicon rod holding member can be stabilized at the preset height position of the first bracket 31.
  • the movable range of the silicon rod holding member is related to the first bracket 31, and the silicon rod holding member is movably arranged, and the length specification range of the silicon rod that can be held by the silicon rod holder is increased.
  • the first support 31 and the silicon rod clamp 32 provided on the first support 31 can be displaced on the mounting frame 30 in at least one direction under the action of the displacement mechanism 33, After the silicon rod holder 32 is clamped from the first predetermined position, the silicon rod is transferred to the second predetermined position.
  • the displacement mechanism 33 includes a first direction displacement mechanism
  • the first direction displacement mechanism includes a first direction guide rail 3310 and a first driving device (not shown in the figure).
  • the first direction guide rail 3310 is disposed on the mounting frame 30, and the first driving device is used to drive the first bracket 31 to move along the first direction guide rail on the mounting frame 30.
  • the first bracket is connected to the mounting frame 30 based on a first sliding block 3311 adapted to the first direction guide rail 3310 to form a degree of freedom of movement 3310 along the first direction guide rail.
  • the first bracket 31 is hoisted to the machine base through the installation frame 30, and can move along the installation frame 30 located above the machine base under the driving of the first driving device.
  • the mounting frame 30 is provided with a first direction guide rail 3310 for hoisting the first bracket 31, and the first direction guide rail 3310 can be set to cross the two ends of the base in the first direction, or The length of the first direction guide rail 3310 can cover every silicon rod bearing structure in the loading and unloading area, so that the first frame 31 arranged on the first direction guide rail 3310 can move along the first direction under the driving of the first driving device.
  • the guide rail 3310 moves to the adjacent position of each silicon rod bearing structure in the loading and unloading area.
  • the silicon rod supporting structure of the loading and unloading area of the silicon rod processing platform is arranged on the same straight line in the first direction, and the first direction guide rail 3310 may be arranged above the straight line connecting the silicon rod supporting structure to facilitate The first frame 31 moves above the supporting part of the silicon rod supporting structure to clamp the cut silicon rods carried on the silicon rod supporting structure or to place the to-be-cut silicon rods on the silicon rod supporting structure.
  • the first driving device is, for example, a traveling motor
  • the first bracket may be connected to the first direction guide rail through a traveling screw, and the traveling screw is laid on the first direction rail and connected to the traveling motor at the same time, thereby The first bracket can be driven to move along the guide rail in the first direction under the drive of the traveling motor.
  • the first driving device may also be a driving motor that drives the first support to move by a ball screw, which is not limited in this application.
  • the first bracket 31 can be moved along the mounting frame 30 to realize loading and unloading in the equipment space above the base.
  • the first frame 31 can be moved to The upper part of the machine base can be accommodated, thereby reducing the inconvenience of operation caused by the excessive space occupied by the equipment in the process flow, and then increasing the efficiency of the process flow in the silicon rod processing.
  • the displacement mechanism further includes a second direction displacement mechanism
  • the second direction displacement mechanism includes a second direction guide rail and a second drive device
  • the second direction guide rail is used to set the For the first bracket
  • the second driving device is used to drive the first bracket to move along the guide rail in the second direction.
  • the second driving device is, for example, a traveling motor, which drives the first bracket to move along the guide rail in the second direction through a traveling screw.
  • the second driving device can also be set as another device that can push the first frame to move, such as The movement of the first frame is driven by the chain conveying mechanism, which is not limited in this application.
  • the first bracket 31 is disposed on the first direction rail 3310 of the mounting frame through the second direction rail 3320.
  • the first bracket 31 may pass through the second direction rail 3320.
  • the two sliding blocks 3321 are connected to the second direction guide 3320, and the first bracket 31 can be driven by the first driving device to move in the first direction, that is, the length direction of the base.
  • it can also be driven by the second driving device (Not shown in the figure) Driven by the guide rail 3320 in the second direction to move in the second direction, the moving range of the first bracket 31 and the silicon rod holder 32 in the space is increased, which can be applied to the second position with different spatial relationship.
  • the silicon rod is transferred between a preset position and a second preset position. For example, when the first preset position and the second preset position have a certain distance in the second direction, the silicon rod holder 32 can pass through The guide rail 3320 moves in the second direction to reach the target position.
  • the second preset position is the supporting position of the silicon rod bearing structure
  • the first bracket is at Driven by the first driving device, it moves to a straight line connecting with the first preset position in the second direction, and then approaches the first preset position by the second driving device; of course, it can also be driven by Driven by the second driving device, it moves until the line connecting the first bracket and the first preset position is on a straight line in the first direction, and then is driven by the first driving device to move to the first preset position; it should be explained here ,
  • the first driving device and the second driving device are independent.
  • the moving path of the first bracket and the silicon rod holder can also be a multi-segment broken line, for example, move a certain distance in the first direction first, and then move in the second direction. Move, move again along the first direction to the preset position.
  • the aforementioned movement direction is only an example to illustrate some achievable movement paths.
  • the first bracket only needs to move to the preset position; at the same time, in the actual scene , In accordance with the device layout and the direction of the moving guide rail of the moving mechanism, the moving path can also be changed accordingly.
  • the movement path from the first preset position to the second preset position can also be set based on the movement range determined by the shifting mechanism. The transfer can be realized when the range package can cover the first preset position and the second preset position.
  • the moving path has a variety of alternative ways, but based on the setting of the silicon rod loading and unloading device of the present application, the moving path is used for silicon rod transfer through a straight path or a broken line path, and at the same time, the equipment above the machine base is used.
  • the space can be transferred and the equipment space can be used as the accommodating space of the silicon ingot loading and unloading device, which can reduce the occupation of the space outside the silicon ingot square-out equipment base during transportation, and the silicon ingot loading and unloading device can be integrated with the silicon ingot square.
  • the equipment setting eliminates the equipment call procedure of the silicon rod loading and unloading device, making the transfer process easier.
  • FIGS. 8a to 8d show the schematic structural diagrams of the silicon rod loading and unloading device of this application in different transport states.
  • the process of clamping the silicon rod to be cut by the silicon rod loading and unloading device is as follows:
  • the silicon ingot holder moves along the mounting frame 30 under the drive of the first support 31 by the displacement mechanism in the first direction.
  • the silicon ingot holder and the first support 31 can be driven by a first driving device, for example, to move along the mounting frame 30.
  • the first-direction guide rail provided on the mounting frame 30 moves; at the same time, in some scenarios, the first bracket 31 and the silicon rod holder can be driven by a second-direction displacement mechanism, for example, driven by a second driving device Move along the guide rail in the second direction; through the first shifting mechanism or/and the second shifting mechanism, the silicon rod holder moves with the first bracket 31 to approach the silicon rod to be cut located at the first predetermined position ( (Shown in the state shown in Figure 8a); Moreover, in the process of the silicon rod holding member following the movement of the first support, the silicon rod holding member can control the silicon rod based on the moving state (or moving position).
  • the first clamping arm and the second clamping arm of the clamping member perform an opening or closing action.
  • the driving gear of the silicon rod clamping member is driven by the motor to reverse, so that the The first clamping arm is separated from the second clamping arm until the clamping space between the clamping arms is larger than the diameter of the silicon rod or there is a gap between the silicon rod and the silicon rod to form an accommodating space for the silicon rod to be cut.
  • the first bracket 31 drives the silicon rod clamp
  • the holding member moves to the accommodating space between the first clamping arm and the second clamping arm
  • the drive gear rotates forward to control the first clamping arm and the second clamping arm to approach each other, that is, to approach each other.
  • the first clamping arm and the second clamping arm stop moving towards each other when they contact and clamp the silicon rod.
  • the silicon rod holder is held in a clamped state after the silicon rod is clamped.
  • the first direction displacement mechanism or/and the second direction displacement mechanism are driven by the corresponding displacement mechanism.
  • the first bracket 31 and the silicon rod clamping member move the silicon rods along a preset path, until the clamped silicon rods are transported to a second predetermined position (in the state shown in FIG. 8b), the first clamping arm Perform an opening action with the second clamping arm to release the silicon rod.
  • the second predetermined position is, for example, that the clamped silicon rod to be cut is located in front of the supporting surface for supporting the silicon rod in the silicon rod supporting structure.
  • the silicon rod holder performs the process of loading the silicon rod to be cut into the silicon rod supporting structure. It should be understood that after the completion of the transportation of a silicon rod to be cut (In the state shown in Figure 8b), the silicon rod holding member conforms to the drive of the first support in the first direction displacement mechanism or/and the second direction displacement mechanism to return to the first predetermined position (shown in Figure 8a Display status) to continue loading and transporting the next silicon rods to be cut; when the silicon rod loading and unloading device loads all the silicon rods to be cut in the corresponding prescribing operation, for example, as shown in Figure 8a or Figure 8b In the silicon rod squaring equipment in the view, after the silicon rod loading and unloading device has loaded the corresponding silicon rods to be cut on the multiple silicon rod bearing structures in the loading and unloading area on the machine base, the first support 31 and the silicon rod clamping piece It can also be driven by the first direction displacement mechanism or/and the second direction displacement mechanism to return
  • the initial position is, for example, the waiting area of the silicon rod loading and unloading device in the non-working state.
  • the initial position is set based on the layout of the silicon rod prescribing equipment. For example, in the example shown in FIG. 8a or FIG. 8b, the initial position may be set at the end of the mounting frame 30.
  • the silicon rod loading and unloading device performs the unloading process of the cut silicon rods
  • the silicon rod clamp and the first bracket 31 move along the mounting frame 30 in response to the displacement mechanism. Therefore, the movement is stopped at a position adjacent to the silicon rod carrying structure carrying the cut silicon rod, that is, at the first predetermined position (in the state shown in FIG.
  • the first clamping arm and the second clamping arm are close to each other That is, the silicon rods to be clamped are approached to each other, and when the silicon rods are contacted and clamped, they stop moving toward each other; the silicon rod clamp and the first bracket 31 are shifted in the first direction and the second direction shift mechanism according to the second predetermined position Drive down to move along a straight line or a broken line to transfer the cut silicon rods out of the processing platform of the machine base, and transfer the cut silicon rods to a second predetermined position for blanking (in the state shown in FIG. 8d). After the unloading operation is completed, the first bracket 31 and the silicon rod holding member can also return to the aforementioned initial position.
  • the present application also provides a silicon rod square-out equipment, including a base, a silicon rod bearing structure, a wire cutting device, and any one of the embodiments shown in FIGS. 1 to 8d suspended on the base
  • the silicon rod loading and unloading device described in the embodiment wherein, the silicon rod carrying structure is used to carry the silicon rods placed vertically, and the silicon rod loading and unloading device is used to clamp the silicon rods to be cut or the cut silicon rods and hold the silicon rods to be cut or the cut silicon rods. The silicon rod is moved to a predetermined position.
  • the wire cutting device includes a wire cutting support that can be raised and lowered and a wire cutting unit provided on the wire cutting support.
  • the wire cutting unit has a cutting wire saw, which can pass the wire
  • the lifting movement of the cutting support drives the cutting wire saw to cut the silicon rods vertically placed on the silicon rod bearing structure.
  • the silicon rod loading and unloading The device can transfer the silicon rods to be transported from the first predetermined position to the second predetermined position, so as to cooperate with the wire cutting device to cut different silicon rods.
  • the silicon rod loading and unloading device is hoisted on the machine base, and the silicon rod clamp is converted from a first predetermined position to a second predetermined position by a shift mechanism.
  • the silicon rod to be cut is The storage area and the area where the cut silicon rods are placed are far away from the machine base. For example, the silicon rods to be cut need to be transferred to the first predetermined position, and then the silicon rods to be cut are transferred to the silicon by the silicon rod loading and unloading device.
  • the silicon rod loading and unloading device transfers the cut silicon rod from the silicon rod bearing structure to the second predetermined position after the cutting wire saw has completed the square of the silicon rod, and then the second predetermined position The cut silicon rods are transferred to the preset placement area of the cut silicon rods or transferred to the next process equipment.
  • the first predetermined position and the second predetermined position are not limited to the fixed position or area established in the established coordinate system.
  • the transfer path conforms to the time sequence of the transfer, and takes the start position of the first bracket in the silicon rod handling device in the transfer path as the first predetermined position, and the end position of the first bracket as the second predetermined position.
  • the silicon rod loading and unloading device is performing the loading process, the position where the silicon rod holder clamps the silicon rod to be cut is the first predetermined position, and the moving mechanism moves to move the silicon rod to be cut to the silicon rod.
  • the position where the silicon rod to be cut is placed on the silicon rod supporting structure above the supporting surface of the supporting structure is the second predetermined position; on the contrary, when the silicon rod loading and unloading device executes the cut silicon rod after the square extraction is completed During the unloading process of the transfer out of the machine base, the first bracket is located adjacent to the silicon rod bearing structure, and the position where the cut silicon rod is clamped is used as the starting position, that is, the first predetermined position. The cut silicon rod is transported away from the machine by the silicon rod clamp. The position where it is seated and released is the second predetermined position.
  • the silicon rod formulating equipment further includes a silicon rod conveying device, the silicon rod conveying device includes a feeding transfer part and a feeding driving source, wherein the feeding transfer part is used for conveying the to-be-cut Silicon rods, the feeding driving source is used to drive the feeding transfer part to move to drive the silicon rods to be cut to move.
  • the loading transfer part transfers the carried silicon rods to be cut to the first predetermined position under the driving of the loading driving source, and the silicon rod loading and unloading device can realize silicon rod transfer.
  • the end of the loading transfer part is set at the first predetermined position where the silicon rod loading and unloading device performs the loading process.
  • the loading and transferring part 41 includes a carrying part 411 for carrying the silicon rods to be cut and a chain conveying mechanism 412; wherein, the carrying part 411 has two rows of rollers arranged oppositely, and the chain conveys
  • the mechanism 412 includes a conveyor chain 4121 and also includes a sprocket 4122 which is arranged at least at both ends of the conveyor chain 4121 and engages with the conveyor chain 4121.
  • the supporting portion 411 is a part for supporting the silicon rods, and the silicon rods to be cut are contacted with the silicon rods to be cut through oppositely arranged rollers to realize the horizontal transportation of the silicon rods.
  • At least one of the sprocket 4122 engaged by the conveyor chain is connected to the sprocket driving source as a driving sprocket.
  • the driving sprocket 4122 is connected to a power output shaft of a motor to drive the conveyor chain 4121 to rotate.
  • the conveying distance of the loading transfer part 41 is relatively long, and the corresponding conveying chain 4121 is relatively long.
  • the mechanism 412 is provided with a plurality of sprockets 4122, and the plurality of sprockets 4122 may be arranged at equal intervals, for example, to ensure the tension of the conveying chain 4121 everywhere.
  • the loading transfer part further includes at least one elastic push rod structure connected to the conveying chain for pushing the silicon rod to be cut along the loading transfer part move.
  • FIG. 10 is a schematic diagram showing the structure of the elastic push rod structure 413 in an embodiment.
  • the elastic push rod structure 413 includes a push rod 4131, a torsion spring 4132.
  • the elastic push rod structure 413 is arranged on the conveying chain 4121, and abuts against the end surface of the silicon rod when the conveying chain 4121 of the loading transfer part moves forward (in the arrow direction as shown in FIG.
  • the torsion spring 4132 is located below the push rod 4131 to cooperate with the rotation of the push rod 4131.
  • the push rod 4131 includes a swing rod as the main body, a roller provided at the distal end of the swing rod for contacting the silicon rod to be cut, and a rotation shaft at the proximal end of the swing rod, and the swing rod can rotate along the rotation shaft;
  • the torsion spring 4132 is sleeved on the rotating shaft to provide the torque for the swinging rod to be positioned at a certain angle. For example, when the swinging rod is not subjected to external force, the torsion spring 4132 can be used to stabilize the swinging rod in an upright position.
  • the elastic push rod structure 413 also includes a support base 4133, which is fixedly connected to the conveying chain 4121, and is used to set the push rod 4131 and the spring.
  • the support base 4133 also includes a limit baffle, such as As shown in the figure, when the swing rod rotates counterclockwise, it will abut the limit baffle to reach the maximum rotation angle.
  • a limit baffle such as As shown in the figure, when the swing rod rotates counterclockwise, it will abut the limit baffle to reach the maximum rotation angle.
  • the elastic push rod structure 413 as a whole conforms to the forward movement of the conveying chain 4121, it swings
  • the roller at the far end of the rod touches the end face of the silicon rod to be cut and has a tendency to rotate counterclockwise relative to the shaft. After abutting against the limiting baffle, the rotation stops.
  • the push rod 4131 can be treated based on the limiting effect of the limiting baffle. The thrust of cutting the silicon rod, thereby pushing the silicon rod to be cut to move along the carrying part in the forward direction.
  • FIG. 11 shows a schematic diagram of a part of the structure of an example of the silicon rod conveying device of this application.
  • the carrying portion 411 includes vertical plates 4111 arranged on opposite sides of the conveyor chain 4121, and two rows of rollers 4112 are arranged opposite to each other on the two vertical plates 4111.
  • the silicon rod to be cut and the roller 4112 are in point contact.
  • the two rows of rollers 4112 arranged oppositely are rotatably arranged on the vertical plate 4111 above the conveyor chain 4121.
  • the elastic push rod structure moves with the conveying chain 4121.
  • the push rod abuts against the end surface of the silicon rod to be cut to provide thrust for the silicon rod to be cut to move in the axial direction of the silicon rod.
  • the supporting part 411 including the roller 4112 is arranged in cooperation with the elastic push rod. When the silicon rod to be cut moves along the supporting part 411, the thrust only needs to overcome the rolling friction with the roller 4112 to realize the silicon rod transmission. There is less resistance to overcome.
  • the loading transfer part includes a carrying part and a conveyor belt structure
  • the elastic push rod structure is fixedly arranged on the transmission belt to follow the movement of the conveyor belt, so as to abut against the end surface of the silicon rod to be cut when the conveyor belt moves forward to drive it. Wait for the silicon rod to move in the forward direction.
  • the elastic push rod structure can also be set to abut the silicon rod during the retreat movement of the conveyor chain or conveyor belt.
  • the end surface is used to transport the tape-cut silicon rod to the first predetermined position during the feeding process.
  • the silicon rod transfer device further includes a blanking transfer part and a blanking driving source.
  • the blanking transfer part is used for conveying the cut silicon rods
  • the blanking driving source is used for driving the blanking transfer part to move to drive the cut silicon rods to move.
  • the starting end of the blanking transfer part can be set at the second predetermined position during the blanking process of the silicon rod loading and unloading device, and the silicon rod loading and unloading device removes the cut silicon rod from the silicon rod carrying structure. It is clamped and transported to the unloading transfer part, so that the silicon rod transport device transfers the cut silicon rod to the next process position or the placement area of the cut silicon rod.
  • the material transfer part 42 is a conveyor belt mechanism.
  • the cut silicon rod is a rectangular parallelepiped with a flat side after the square is completed, and the cut silicon rod is placed horizontally on the conveyor belt, which can be formed on the surface of the transmission belt by the weight of the cut silicon rod. Friction for transportation.
  • the unloading driving source is, for example, a driving motor, which rotates the conveyor belt by driving at least one synchronous pulley in the conveyor belt mechanism to rotate.
  • the silicon rod conveying device further includes a turning device for turning the carried silicon rods to be cut from the horizontal state to the vertical state and turning the carried cut silicon rods from the vertical state. To the horizontal state.
  • the silicon rod loading and unloading device in the silicon rod square-out equipment can be used to clamp the vertically placed silicon rods to be cut or the cut silicon rods.
  • the turning device 43 can be used for the silicon rods to be cut from the horizontal state. Turn over to the vertical state so that the silicon rod loading and unloading device performs the loading and transportation of the silicon rods to be cut, or can be used to turn the cut silicon rods transported from the silicon rod carrying structure to the silicon rod transfer device from the vertical state to the horizontal type State to realize the subsequent conveyance of the cut silicon rods.
  • the turning device 43 is docked with the end of the loading transfer part or the starting end of the unloading transfer part.
  • the loading transfer part and the unloading transfer part are arranged on the same side of the machine seat, so that the The silicon rod loading and unloading device moves on the same side of the machine base to reach the loading transfer part and the unloading transfer part.
  • the turning device 43 is provided on the linear movement mechanism 44 to move from the loading transfer part to docking with the unloading transfer part, that is, the turning device 43 can be used between the loading transfer part and the unloading part. Move between transfer departments.
  • the loading transfer part and the unloading transfer part are arranged on the same side of the machine base and are arranged in parallel, and the turning device 43 is arranged on the linear motion mechanism 44 laid in the second direction,
  • the linear motion mechanism 44 includes, for example, a linear guide in the second direction, a traveling motor, and a traveling screw.
  • the traveling screw connects the linear guide and the turning device 43, and the turning device 43 is driven by the traveling motor along the second direction.
  • the movement of the linear guide rail in each direction can make the loading transfer part and the unloading transfer part share the same turning device 43.
  • the turning device 43 turns the silicon rods placed horizontally to be cut into a vertical position at the loading and transferring part, it can move to the docking and unloading transfer part in accordance with the linear guide rail in the second direction. Turn the cut silicon rod placed vertically to a horizontal type.
  • the loading transfer part and the unloading transfer part can also be arranged on both sides of the machine base.
  • the silicon rod processing platform provided with the silicon rod bearing structure is set on the translation mechanism, One side is set as the loading area for loading.
  • the silicon rods are cut by squaring, they are translated toward the side away from the loading area to move the cut silicon rods to the unloading area.
  • the loading transfer part and the unloading transfer part are Corresponding to the loading area and unloading area respectively.
  • the turning device 43 includes a turning table 431, and the turning table 431 is provided with a turning motor for driving the turning table 431 to rotate.
  • the turning table 431 includes: a turning part and a turning shaft.
  • the turning shaft is arranged at the turning part and is pivotally connected to a turning motor, thereby driving the turning part to rotate by a predetermined angle under the driving of the turning motor;
  • the turning part is used to carry the silicon rods to be cut or the silicon rods that have been cut, and the silicon rods to be cut during turning or the silicon rods to be cut are always attached to the turning part by clamping, adsorbing, or limiting.
  • the turning part includes a lifting seat provided on the carrying plate of the turning part and a pressing block or a pressing plate provided on the lifting seat.
  • the turning part may also include Clamping arm or hoop is used as a limiting structure.
  • the turning shaft is arranged on the right side of the turning part.
  • the turning part is driven by the turning motor to rotate 90° clockwise around the turning shaft.
  • Turn the carried silicon rod to be cut into a vertical placement;
  • the turning part is driven by the turning motor to rotate 90° counterclockwise around the turning shaft to transfer the loaded silicon rods.
  • the cutting silicon rod is turned over and placed horizontally.
  • the silicon rod to be cut is transported to the first predetermined position by the silicon rod conveying device, and the silicon rod loading and unloading device can be moved along the mounting frame above the base through the shifting mechanism to reach the The first predetermined position and movable along the mounting frame to transfer the silicon rods to be cut to the silicon rod carrying structure.
  • the transfer between different processes is automated, which can reduce labor costs and is beneficial to avoid silicon rods being damaged by bumps during the transfer and circulation; furthermore, the transfer path of the silicon rod loading and unloading device can be a straight line or a broken line path, and the lifting setting is adopted
  • the method is to place a silicon rod movement device on the ground to reserve equipment space, and the silicon rod square-out equipment can realize the automated process flow in the silicon rod square-out operation by occupying a small equipment space.
  • the existing single crystal silicon rods are generally cylindrical.
  • the weight of the silicon rod is generally set on the silicon rod supporting structure.
  • the cutting line is along the silicon rod.
  • the lengthwise cutting process will cause the jitter of the silicon rod, which makes the cutting surface uneven and the quality of the finished product is poor. Therefore, it is necessary to provide a silicon rod square-out device to ensure that the silicon rod is stably standing on the silicon rod supporting structure during the cutting process.
  • the silicon rod mentioned in this application is a single crystal silicon rod.
  • the application discloses a silicon rod compaction device and a silicon rod square-out device provided with the silicon rod compaction device.
  • the silicon rod compaction device can perform an online cutting device on a single crystal silicon rod on a silicon rod bearing structure.
  • the top of the monocrystalline silicon rod is pressed tightly during cutting, so that the silicon rod is stably standing on the silicon rod supporting structure, and the stability of the silicon rod is ensured during the cutting operation, and the cutting quality of the silicon rod is ensured.
  • the silicon rod pressing device of the present application can be used in the silicon rod square-drawing equipment, and the silicon rod pressing device can be detachably installed in the silicon rod square-drawing equipment as an independent unit to cooperate with the silicon rod square-drawing equipment
  • the silicon rod is compressed during the square root cutting process, so that the silicon rod is in a stable state during the cutting process; of course, it should be understood that in some embodiments, the silicon rod may also be compressed
  • the device is arranged in the silicon rod square-making equipment to form an integrated structure.
  • FIG. 13 shows a schematic diagram of the structure of the silicon rod pressing device in one embodiment.
  • the equipment includes a base 10, a silicon rod carrying structure (not shown in the figure), and a wire cutting device;
  • the silicon rod pressing device includes a pressing support 61 and a plurality of independent pressing components 60, wherein the The pressing bracket 60 is movably arranged on the cutting frame 20, and the plurality of mutually independent pressing components 60 are respectively arranged on the pressing bracket 61 for pressing on the to-be-cut bearing structure carried by the silicon rod
  • each pressing assembly 60 includes a pressing head 601 and a driving mechanism 602 that drives the pressing head 601 to move up and down relative to the pressing support 61.
  • the base 10 is set as the main part of the silicon rod square-out equipment of this application, and is used to provide a square-out work platform.
  • the base 10 has a relatively large volume and weight to provide greater installation. Surface and firmer stability of the whole machine.
  • the silicon rod bearing structure is arranged on the silicon rod processing platform, and is used for supporting the vertically placed silicon rods to be cut.
  • the wire cutting device is provided with at least one wire cutting unit 21, and the wire cutting unit is provided with a cutting wheel, a transition wheel, and a cutting wire wound between the cutting wheel and the transition wheel, so that the wire cutting unit 21 A cutting wire saw for cutting silicon rods is formed.
  • the silicon rod pressing device includes a pressing support 61 and a pressing assembly 60 provided on the pressing support 61 and corresponding to the silicon rod carrying structure located in the cutting area.
  • a sliding block that cooperates with the lifting rail 22 is fixed on the pressing bracket 61, and the pressing bracket 61 is vertically erected on the lifting rail 22 through its sliding block and the lifting rail 22.
  • the pressing assembly 60 is arranged on the pressing support 61 and can be lifted and lowered with the pressing support 61 to release or compress the silicon to be cut located on the silicon rod bearing structure in the cutting zone Great.
  • the pressing support 61 is provided with a plurality of independent pressing assemblies 60, and each pressing assembly 60 includes a pressing head 601 and a pressing head 601 that drives the pressing The driving mechanism 602 for the head 601 to move up and down along the pressing bracket 61, that is, each pressing assembly 60 has the freedom to follow the pressing bracket 61 to move along the cutting frame and the freedom to move up and down relative to the pressing bracket 61 Spend.
  • Each pressing component 60 can be used to perform a pressing operation on a silicon rod placed vertically on a silicon rod bearing structure.
  • the silicon rod pressing device may, for example, adjust the pressing bracket 61 and the setting In the overall lifting position of each pressing assembly 60 on the pressing support 61, after the pressing head 601 of the pressing assembly 60 is within a preset range from the upper end surface of the silicon rod to be cut, based on the silicon rod bearing structure The height of the upper end surface of each silicon rod to be cut is adjusted by the height of the corresponding pressing head 601 so that the pressing head 601 contacts and presses the silicon rod to be cut.
  • the wire cutting unit 21 in the wire cutting device is movably installed on the cutting frame 20 through a lifting mechanism
  • the lifting mechanism includes a lifting rail 22 and a lifting motor
  • the pressing bracket 61 is movably installed on the cutting frame 20 through the lifting rail 22. That is, here, the lifting and pressing device and the wire cutting unit 21 can share a lifting rail 22 to realize movement in the lifting direction, and the lifting rail 22 is arranged on the cutting frame 20.
  • the silicon rod pressing device is attached to the mounting beam 214 for supporting the wire cutting unit 21 by its own weight.
  • the lifting motor drives the mounting beam 214 to drive the wire cutting unit 21 to descend along the lifting rail 22, and the silicon rod pressing device is attached to the mounting beam 214 and also descends along the lifting rail 22 to a position in the cutting area.
  • the mechanism 602 drives the wire cutting unit 21 to descend to perform the cutting operation of the silicon rod to be cut.
  • the wire cutting unit and the silicon rod pressing device are respectively equipped with a lifting drive device, and the wire cutting unit may be driven by a lifting motor provided on a mounting beam carrying the wire cutting unit, for example, Follow the installation beam to move up and down; the pressing bracket in the silicon rod pressing device moves along the lifting guide rail of the cutting frame under the driving of the lifting driving device arranged on the pressing bracket.
  • the silicon rod prescribing equipment provided with the silicon rod pressing device includes a first lifting driving mechanism and a second lifting driving mechanism, wherein the first lifting driving mechanism is used to drive the wire
  • the cutting unit moves along the lifting rail; the second lifting drive mechanism is used to drive the silicon rod pressing device to move up and down along the lifting rail.
  • the silicon rod pressing device no longer relies on gravity to attach to the mounting beam, but is driven by the second lifting drive mechanism to move up and down along the lifting rail, and the second lifting drive mechanism is configured as a cylinder assembly Or a screw assembly driven by a motor.
  • the first lifting drive mechanism drives the mounting beam to lower the wire cutting unit carrying the wire cutting unit
  • the second lifting drive mechanism stops driving the silicon rod pressing device so that The silicon rod pressing device is positioned at a predetermined position to compress the silicon rods to be cut
  • the first lifting drive mechanism continues to drive the mounting beam to descend with the wire cutting unit to complete the cutting of the silicon rods to be cut and complete the cutting operation of the silicon rods to be cut
  • the first lifting drive mechanism drives the mounting beam to raise the wire cutting unit
  • the second lifting drive mechanism drives the silicon rod pressing device to rise.
  • the wire cutting unit in the wire cutting device is movably installed on the cutting frame through a first lifting mechanism
  • the silicon rod pressing device is movably installed on the cutting frame through a second lifting mechanism.
  • the first lifting mechanism includes a first lifting rail and a first driving motor
  • the second lifting mechanism includes a second lifting rail and a second driving motor
  • the first lifting guide rail and the second lifting guide rail are respectively guide rails arranged in the vertical direction, that is, the direction of the heavy vertical line, and the first lifting guide rail and the second lifting guide rail are both arranged on both sides of the cutting frame, so
  • the wire cutting unit is arranged on the mounting beam, and the two ends of the mounting beam are respectively connected to the first lifting guide rails on the cutting frame on both sides of the machine base, and driven by the first drive motor to drive the wire cutting unit to move in the lifting direction, Therefore, the cutting line segment in the wire cutting unit moves up and down accordingly, and the silicon rod cutting process can be realized under the control of the first driving motor; the two ends of the pressing support of the silicon rod pressing device are arranged on both sides of the cutting frame Driven by the second driving motor on the second lifting rail, the compression bracket carries the compression component to move along the lifting rail, and the compression head of the compression component can be compressed to the top of the silicon rod.
  • a rail locking mechanism is provided on the compression bracket.
  • a rail locking mechanism is provided on the pressing support of the silicon rod pressing device; for another example, in order to prevent silicon rods from being compressed
  • the device cannot be stabilized at a preset height when moving along the lifting rail or the second lifting rail for setting the compression bracket under the action of the second driving motor, and the compression bracket is provided with a rail locking mechanism.
  • the rail locking mechanism can be used to position the silicon rod pressing device at a predetermined position on the lifting rail (or the second lifting rail), for example, the predetermined position is that the pressing component of the silicon rod pressing device is located corresponding to it.
  • the top of the silicon rod to be cut is 0 to 5cm, but not limited to this, only the pressing assembly is located above the corresponding silicon rod to be cut, and the pressing head in the pressing assembly can be pressed down when it is driven down. It corresponds to the top surface of the silicon rod to be cut.
  • the guide rail locking mechanism includes a locking clamp block and an air cylinder, the locking clamp block is arranged on a compression bracket, and the air cylinder is used to provide a clamping lift rail or a cylinder for the locking clamp block.
  • the locking clamp With the force of the second lifting rail, when the cylinder is pushed out, the locking clamp is pressed against the lifting rail or the second lifting rail connected to the compression bracket. Based on the force of the cylinder in the pushing state, the locking clip is locked After the block abuts against the lifting rail or the second lifting rail, it remains relatively stationary with the rail against which it abuts.
  • Figure 14a shows a schematic structural view of the silicon rod pressing device 6 of this application in an embodiment.
  • Figures 14b and 14c show the silicon rod pressing device 6 in different motion states.
  • the rail locking mechanism 62 is, for example, the pneumatic rail locking mechanism 62 shown in the figure.
  • the silicon rod pressing device 6 is arranged on the lifting rail 22, thereby achieving Movement in the lifting direction to achieve compaction of the silicon rod.
  • the pneumatic rail locking mechanism 62 in this embodiment includes a locking clamp block 621 that cooperates with the lifting rail 22, a cylinder 622 that drives the locking clamp block 621 to act, and a spring 623.
  • the locking clip block 621 and the lifting rail 22 are respectively provided with a rack in the lifting direction, that is, along the rail direction, and the locking clip block 621 is arranged on the compression bracket in the silicon rod compression device 6, and In a moving state, the silicon rod pressing device 6 descends with the mounting beam (in the state shown in Figure 14b).
  • the air cylinder 622 is in a resting state, and the locking clamp block 621 and the lifting rail 22 are The rack in the middle is separated by the elastic force of the spring 623, whereby the silicon rod pressing device 6 can move along the lifting rail 22.
  • the air cylinder 622 drives the locking clamp block 621 on the pressing bracket to move.
  • the propelling action of the air cylinder 622 overcomes the elastic force of the spring 623, so that the locking clamp block 621 hugs the lifting rail 22 to position the silicon rod pressing device 6 at a predetermined position (shown in the state shown in FIG.
  • the locking clamp block 621 and The racks of the lifting rail 22 engage and bite, thereby fixing the silicon rod pressing device 6 on the lifting rail 22 to position the silicon rod pressing device 6 to a predetermined position.
  • the pressing component in the silicon rod pressing device 6 presses its corresponding silicon rod to be cut, and the mounting beam continues to be driven to drive the wire cutting unit to descend to complete the cutting of the silicon rod to be cut, and the cutting of the silicon rod to be cut is completed
  • the air cylinder 622 drives the locking clamp block 621 on the pressing bracket to loosen the lifting rail 22 So that the silicon rod pressing device 6 continues to attach to the mounting beam and rises (in the state shown in Fig. 14b).
  • the pressing bracket 61 is provided with a rail clamp (in the embodiment shown in FIG. 13), and the rail clamp may be arranged at both ends of the pressing bracket 61 to compress the
  • the bracket 61 is connected to the lifting rail 22 or the second lifting rail.
  • the rail clamper 221 can be configured as four, respectively
  • a compression bracket 61 is connected to the double rail on the side.
  • the pressing bracket 61 can be attached to the cutting frame 20 to move along the lifting rail 22 or along the second lifting rail under the action of the second driving motor, and is pressed by the rail clamper 221 after reaching a predetermined position. Tightening the guide rail makes the pressing bracket 61 stabilize at a preset height.
  • the multiple independent pressing components provided on the pressing support can move along the lifting rail under the driving of the pressing support, and at the same time, the pressing head of each lifting component can be in the driving mechanism. Drive down to move up and down along the lifting bracket.
  • the driving mechanism includes a power structure and a guide rail
  • the compression head is linked with the power structure and controlled by the power structure to move up and down along the guide rail.
  • FIG. 15 is shown as an enlarged schematic diagram of A in FIG. 13.
  • the pressing bracket 61 is provided with a plurality of pressing components 60, which respectively correspond to the silicon rods with a plurality of silicon rod bearing structures in the cutting area, each of which is provided with a pressing component 60.
  • the driving mechanism 602 includes a guide rail 6022 arranged in the lifting direction on the pressing support 61, and a power structure 6021 as the lifting driving source of the pressing head 601.
  • the pressing head 601 can be driven by the power structure 6021 along the lower edge.
  • the guide rail 6022 moves.
  • the power structure 6021 includes: a cylinder or a hydraulic pump and a telescopic element, wherein the telescopic element is connected to the cylinder or the hydraulic pump, and the compression head 601 is arranged on the telescopic element bottom.
  • the telescopic element moves in the lifting direction under the propulsion of the cylinder.
  • the telescopic element is connected to the cylinder piston rod, and the compression head 601 is arranged at the bottom of the telescopic element (ie, the telescopic element).
  • the air cylinder drives the telescopic member to carry the compression head 601 to move up and down to release or compress the silicon rods to be cut located on the silicon rod bearing structure in the cutting zone.
  • the telescopic element is connected to a hydraulic pump, for example, the telescopic element is a rod connected to a piston of a hydraulic cylinder or a lifting cylinder connected to a hydraulic pump, and the telescopic element can be driven by the hydraulic pump. It moves up and down along the guide rail 6022, and drives the pressing head 601 at the bottom of the telescopic member to move up and down to adjust the distance from the pressing head 601 to the end surface of the silicon rod to be cut.
  • the driving mechanism includes a guide rail and a lifting motor (not shown), the guide rail is arranged on a pressing bracket along the lifting direction, and the pressing head is driven by the lifting motor.
  • the relative pressing bracket moves up and down to adjust the distance from the pressing head to the top of the silicon rod to be cut.
  • the power structure includes a lifting motor and a telescopic element, wherein the telescopic element is connected to the lifting motor, and the compression head is arranged at the bottom of the telescopic element.
  • the telescopic member is, for example, a connecting rod between a lifting motor and the compression head
  • the lifting motor is, for example, a traveling motor that can move along a guide rail.
  • the telescopic member is an electric push rod driven by a lifting motor, and the extension end of the electric push rod is connected to the compression head, and the compression is driven by the lifting motor. Head up and down movement.
  • the pressing head is connected to the driving mechanism through an extension arm.
  • the proximal end of the extension arm 6011 is connected to the driving mechanism 602, and the distal end is connected to the pressing head 601, so that the extension arm is driven by the driving mechanism 602 6011 drives the compression head 601 at the distal end to move up and down relative to the compression bracket.
  • the extension arm 6011 can be connected to the telescopic part of the power structure 6021; for example, the distal end of the extension arm 6011 is connected to a slider that can move along the guide rail 6022, and the slider The movement is driven by the lifting motor.
  • the length of the extension arm 6011 can also be adjusted, and the distal end of the extension arm 6011 is the free end when the length is adjusted; here, the guide rail in each pressing assembly 60 is arranged on the side of the silicon rod bearing structure, The guide rail 6022 and its extension direction are outside the corresponding silicon rod to be cut.
  • the guide rail 6022 shown in the view of FIG. The head 601 is located directly above the end surface of the silicon rod to be cut.
  • the extension arm 6011 is, for example, a telescopic rod provided with a telescopic drive device.
  • the extension arm 6011 can be provided with a linear guide rail, and the pressing head 601 is arranged on the linear guide rail, which can equivalently achieve the effect of adjusting the length of the extension arm 6011 to ensure the pressing head 601 Press the silicon rod at the center of the end face of the silicon rod to be cut.
  • the compression head is a rotary compression head.
  • the silicon rod bearing structure has a rotating mechanism that can drive the silicon rod to be cut on it to rotate to adjust the surface to be cut.
  • the pressing head is connected to the driving structure through a rotating shaft (not shown).
  • a bearing (not shown) is provided at the bottom of the telescopic part connected to the cylinder
  • the compression head has a rotating shaft adapted to the bearing
  • the compression head is rotatably mounted on the shaft through the rotating shaft.
  • each compression head is rotatably arranged at the distal end of the extension arm, and the compression head can be connected to the extension arm via a rotating shaft, and the rotating shaft is arranged in the third direction, that is, the lifting direction.
  • the pressing head In a state where the pressing head is pressing the silicon rod to be cut, the pressing head can rotate along the rotating shaft when the silicon rod bearing structure drives the silicon rod to rotate.
  • a buffer pad (not shown) may be provided between the pressing head and the silicon rods to be cut, and the buffer pad is fixed to the pressing head.
  • the pressing surface (the pressing surface is the lower surface of the pressing head).
  • a detection device (not shown) is further provided at the bottom of the pressing head for detecting the contact state of the silicon rod to be cut by the pressing head.
  • the detection device includes a pressure sensor, which is provided on the lower surface of the pressing head for contacting the silicon rod to be cut.
  • the pressure sensitive element of the pressure sensor contacts the silicon rod to be cut and outputs a contact signal.
  • the pressure sensor can also be used to detect the pressure value to determine that the pressing force of the silicon rod to be cut is within a preset range .
  • the lifting range of the pressing head moving up and down along the pressing support is 200 mm to 400 mm.
  • the silicon rods to be cut may have different lengths and specifications.
  • the silicon rods to be cut are usually the rod-shaped single crystal silicon rods that are grown from the melt by the Czochralski method or the suspension zone melting method. There may be a certain height difference between different silicon rod sections, as shown in Figure 13.
  • the length of the guide rail can be set to 200 mm to 400 mm, or the telescopic distance of the telescopic element can be set to 200 mm to 400 mm.
  • the height difference of the compression heads in the compression assembly arranged on the same compression support can reach 200 mm to 400 mm, and the silicon ingot compression device can compress different silicon ingot bearing structures in the cutting area.
  • silicon rods to be cut with a long length there is no need to group the silicon rods to be cut based on the same length before loading and cutting, which makes the square-out process easier.
  • the silicon rods to be cut can be grouped based on the length and then loaded and cut. For example, in the silicon rod shown in FIG. In the square-cutting equipment, there are 4 silicon rod bearing structures corresponding to the cutting area. Here, the silicon rods to be cut can be divided into four groups, so that the length difference between the silicon rods to be cut in each group is less than 400 mm.
  • the silicon rod pressing device can be used for pressing each group of silicon rods to be cut. Since each group of silicon rods to be cut may have a length difference, there is no need to accurately measure the length when determining the length, which simplifies the prescribing process for silicon rods of different length specifications.
  • the silicon rod pressing device provided in the present application can cooperate with the wire cutting device provided in the silicon rod square-out equipment.
  • the silicon rod pressing device can share a lifting rail with the wire cutting device or move along a lifting rail respectively.
  • the silicon rod pressing device is simply set above the silicon rod to be cut with the aid of the mounting beam in the wire cutting device, or the silicon rod pressing device is equipped with a second driving mechanism to drive the silicon rod pressing device to move in the lifting direction along the lifting rail ;
  • each lifting component in the silicon rod pressing device can move up and down along the pressing support to adapt to pressing different specifications of silicon rods to be cut; before square cutting, the silicon rod pressing device presses Immediately after cutting the top of the silicon rod, make sure that the silicon rod is stably placed vertically on the silicon rod bearing structure to effectively reduce or avoid the jitter, displacement or even overturning of the silicon rod due to disturbance during the subsequent cutting process, and to improve the prescribing process The quality of the finished product.
  • This application also provides a silicon rod square-out device, including a machine base, a silicon rod bearing structure, a wire cutting device, and the silicon rod pressing device according to any one of the embodiments shown in FIGS. 13 to 15 .
  • the machine base has a processing platform, and the silicon rod bearing structure is arranged on the silicon rod processing platform and used to carry the silicon rods placed vertically.
  • the wire cutting device includes a cutting frame arranged on the machine base, and a wire cutting unit movably arranged on the cutting frame; wherein, the wire cutting unit includes a cutting wheel, a transition wheel, and a cutting line, the cutting line At least one cutting wire saw is formed by winding the cutting wheel and the transition wheel in sequence, and the cutting wire saw can be used for square cutting of the silicon rod to be cut.
  • the silicon rod pressing device may cooperate with the wire cutting device for cutting the silicon rod carried by the silicon rod bearing structure in the wire cutting device Press the top of the silicon rod, that is, the upper end surface of the silicon rod, to ensure that the silicon rod is stably placed on the silicon rod supporting structure during the cutting process, thereby avoiding the lack of cutting quality caused by the displacement of the silicon rod. Good, silicon rod overturning and other conditions.
  • wire cutting technology is used in multiple processes of silicon ingot processing, such as cutting operation, square rooting and slicing for silicon ingots.
  • Wire cutting technology is currently the most advanced silicon material processing technology in the world. Its principle is that the high-speed running steel wire drives the cutting edge material attached to the steel wire or directly uses diamond wire to rub the workpiece to be processed, so as to achieve wire cutting. the goal of. In the cutting process, the steel wire or diamond wire is guided by the wire wheel to form a wire saw or a wire net on the cutting roller, and the workpiece to be processed is realized by the rise and fall of the worktable or the rise and fall of the wire saw or the wire net. The feed of the workpiece.
  • the automatic cooling water spray device installed on the equipment sprays the cold water to the cutting parts of the steel wire or diamond wire and the processed parts, and the cutting is generated by the reciprocating movement of the steel wire or diamond wire to remove the material to be processed. Cut into multiple pieces at the same time.
  • Wire cutting technology has the advantages of high efficiency, high productivity, and high precision compared with traditional blade saw blades, grinding wheel blades and internal circular cutting.
  • the polycrystalline silicon brittle material is first pulled into single crystal silicon rods, and the originally obtained single crystal silicon rods are truncated to obtain silicon rod sections with predetermined length specifications, and then open
  • the square machine performs square extraction; at this time, the cutting mechanism feeds along the length of the silicon rod and cuts four parallel planes in the circumferential direction of the silicon rod, so that the cross-section of the silicon rod is almost rectangular; after the square is completed, use more The wire slicer slices the squared silicon rod along the length direction to obtain the required silicon wafer.
  • multiple links in silicon rod processing need to be completed with the help of a wire cutting device.
  • the high-speed running steel wire drives the cutting edge material attached to the steel wire or directly uses the diamond wire to rub the workpiece to be processed, so as to achieve the purpose of wire cutting.
  • multiple cutting wheels and transition wheels are configured in multi-wire cutting equipment.
  • the cutting wire is wound on the slot of the cutting wheel and the slot of the transition wheel corresponding to the cutting wheel to form multiple cutting wire saws.
  • the wire saw is used to cut the silicon rods to be cut. After a long time of use, the wire groove on the cutting wheel will be worn, which affects the cutting effect. Therefore, it is necessary to replace the groove position of the cutting wheel.
  • the silicon rod is cut to a preset specification, it will be replaced after the groove is changed.
  • the moving distance of the cutting wheel needs to be adjusted.
  • the positional relationship between the multiple cutting wheels after installation is not easy to change. After one of the wire cutting wheels is worn out, the position of the cutting wheel or other parts needs to be adjusted to change the groove as a whole , And need to further calibrate the parts to adjust the position, the operation is cumbersome and the efficiency is low.
  • the present application also provides a wire cutting device for silicon ingot processing equipment.
  • the silicon ingot processing equipment includes: a machine base with a silicon ingot processing platform; and a silicon ingot carrying device arranged on the silicon ingot processing platform
  • the wire cutting device is used to carry the silicon rods to be cut;
  • the wire cutting device includes: a cutting frame arranged on the base; at least one wire cutting unit movably arranged on the cutting frame;
  • the wire cutting unit includes: A plurality of cutting wheels arranged in sequence in the direction, each of which has at least two cutting line grooves; the cutting line is sequentially wound around the plurality of cutting wheels to form at least one cutting wire saw; at least one pitch adjustment mechanism, Set on the at least one wire cutting unit, and used to drive the plurality of cutting wheels in the at least one wire cutting unit to move in the second direction to adjust the cutting position of the at least one wire saw in the at least one wire cutting unit, or to change
  • the cutting wire is wound around the cutting grooves of the plurality of cutting wheels in the at least
  • the wire cutting device can switch the cutting wire between different cutting grooves of the cutting wheel based on the pitch adjustment mechanism, or adjust the position of the cutting wire saw to change the cutting position (or processing specification) relative to the silicon rod, using the
  • the silicon rod processing equipment of the wire cutting device can be silicon rod square-out equipment, silicon rod cutting equipment, silicon rod cutting and grinding integrated equipment, etc. It should be understood that the wire cutting device is realized by a pitch adjustment mechanism to change the slot or adjust the position of the cutting wire saw It only needs to be realized by a certain structure and winding method of the wire cutting device itself, and is not limited by the specific type of silicon rod processing equipment.
  • the cutting wire saw is a line segment in a certain position area of the cutting line that can be used to feed the silicon rod. It should be understood that the cutting line is in high-speed operation during the cutting process.
  • the position of the cutting wire saw is usually determined by the winding method of the cutting wheel and the cutting wire.
  • the wire cutting of the present application is applied to the silicon rod square preparation equipment as an example for description, but it is not used to limit the application scenarios of the wire cutting device of the present application.
  • FIG. 16 shows a schematic structural diagram of the wire cutting device of this application in an embodiment
  • FIG. 17 realizes that the wire cutting device of this application is applied to silicon rods in an embodiment of the application.
  • the wire cutting device includes a cutting frame 20, at least one wire cutting unit 21, and at least one pitch adjusting mechanism 23.
  • the cutting frame 20 is installed on the machine base 10.
  • the cutting frame 20 is installed on both ends of the machine base 10 to ensure that the cutting frame 20 is installed on the wire cutting unit 21 of the cutting frame 20.
  • the cutting wire saw can cover different processing stations. For example, in the example shown in FIG. A silicon rod supporting structure, and the span of the wire cutting unit 21 includes each silicon rod supporting structure in the cutting area.
  • the at least one wire cutting unit 21 is movably installed on the cutting frame 20; the wire cutting unit 21 includes a plurality of cutting wheels 211 and a cutting wire 213 arranged in sequence along a first direction. In some implementations, as shown in the embodiment shown in FIG.
  • the wire cutting unit 21 is provided on the cutting frame 20 by a wire cutting support 24, and the wire cutting support 24 is provided on the cutting frame 20 and It includes a guide rail arranged in the second direction, and the wire cutting unit 21 is arranged on the guide rail of the wire cutting support 24 to form a degree of freedom of movement in the second direction; of course, the wire cutting support 24 can also be provided
  • the guide groove in the second direction, the sliding rod in the second direction, or other second-direction limiting structure or guide structure are used to set the at least one wire cutting unit 21, which is not limited in this application.
  • the wire cutting unit 21 includes a first-direction mounting beam 214, and both ends of the mounting beam 214 are movable. Connected to the cutting frame 20, a plurality of cutting wheels 211 are sequentially arranged on each mounting beam 214. That is, the one-line cutting unit 21 is composed of a plurality of cutting wheels 211, a cutting line 213, and a supporting structure of the cutting wheels 211 arranged in the same direction (or the same straight line).
  • the multiple cutting wheels 211 in the wire cutting unit 21 are installed on the cutting frame 20 through a bracket, a connecting plate, or a mounting frame.
  • the wire cutting unit 21 provides The carriers of the plurality of cutting wheels 211 can be in different forms, which are not limited in this application.
  • wire cutting device when the wire cutting device is provided with a plurality of wire cutting units 21, different wire cutting units 21 are located on different straight lines, and the two wire cutting units 21 as shown in FIG. 2 are respectively parallel. In some examples, the extension directions of different wire cutting units 21 may also intersect.
  • the first direction is the direction in which the multiple cutting wheels in the wire cutting unit are arranged, for example, the direction of the mounting beam of the wire cutting unit in some examples.
  • the cutting wire saw formed by the cutting wire around the cutting wheel is also in the first direction;
  • the second direction is the orthogonal direction of the first direction, and the at least one pitch adjusting mechanism drives the at least one wire cutting unit along the second direction.
  • Directional movement that is, the cutting wire saw in the wire cutting unit moves along its orthogonal direction.
  • the wire cutting device can realize the cutting processing of the silicon rod based on the lifting movement of the wire cutting unit 21 along the cutting frame 20, and the control of the cutting specification is achieved by adjusting the relative position between the cutting wire saw and the silicon rod in the second direction.
  • the cutting wire saw is moved in the second direction by the pitch adjustment mechanism 23, and the at least one wire cutting can be adjusted.
  • the cutting position of at least one cutting wire saw in the unit 21 can be used to control the cutting amount of the silicon rod.
  • the at least one wire cutting unit further includes at least one transition wheel, and each transition wheel has at least two wire grooves; wherein, a plurality of the at least one wire cutting unit is driven by the at least one pitch adjustment mechanism When the cutting wheel moves in the second direction, the at least one transition wheel and the plurality of cutting wheels in the at least one wire cutting unit remain relatively stationary.
  • the wire cutting unit 21 includes at least one transition wheel 212, and the at least one transition wheel 212 is used To realize the direction guidance or tension adjustment of the cutting line 213 when it is wound around different cutting wheels 211.
  • the at least one transition wheel 212 can be arranged on a carrier carrying a plurality of cutting wheels 211 as shown in the mounting beam 214 shown in FIG.
  • the transition wheel 212 and the plurality of cutting wheels 211 together follow the carrier to move in the second direction.
  • the at least one transition wheel 212 and the plurality of cutting wheels 211 are relatively stationary, that is, the transition wheel 212 and the cutting wheels
  • the positional relationship between 211 remains unchanged.
  • the pitch adjusting mechanism 23 When the pitch adjusting mechanism 23 is used to adjust the cutting position of at least one wire saw in the at least one wire cutting unit 21, the positional relationship of the cutting wire saw relative to the cutting wheel 211 and the transition wheel 212 remains unchanged, that is, only Move in the second direction to adjust the cutting position.
  • a plurality of cutting wheels 211 belonging to the same wire cutting unit 21 are arranged on the mounting beam 214 arranged along the first direction, and the at least one transition wheel 212 is arranged on the mounting beam 214 via a bracket .
  • the pitch adjusting mechanism 23 may be configured to be connected to the mounting beam 214 to drive the plurality of cutting wheels 211 carried by the mounting beam 214 to move in the second direction, and the bracket moves in accordance with the mounting beam 214 and drives at least one transition.
  • the wheel 212 moves in the second direction, so that at least one transition wheel 212 and the plurality of cutting wheels 211 in the wire cutting unit 21 remain relatively stationary.
  • the at least one transition wheel 212 has at least two wire grooves.
  • the at least one pitch adjusting mechanism 23 is used to change the cutting wire 213 around the cutting wire groove positions of the plurality of cutting wheels 211 in the at least one wire cutting unit 21
  • the position of the cutting line 213 corresponding to the at least one transition wheel 212 on the wire groove is changed so that the cutting line around the transition wheel and the wire wheel is still located in a plumb surface after the groove is changed.
  • the commonly used winding method requires that the cutting line between the transition wheel and the cutting wheel is located in the plumb surface.
  • the cutting line groove and the wire groove for winding the cutting line are not in the same plane after the groove is changed, the cutting line has a component force in the second direction on the transition wheel and the cutting wheel, which is not conducive to the efficient operation of the cutting line.
  • setting the transition wheel 212 as at least two wire grooves can be used to realize the direction adjustment of the cutting line 213 after the groove is changed.
  • Each cutting wheel 211 has at least two cutting grooves, the different cutting grooves are parallel to each other and the projection of the cutting groove plane on the horizontal plane is along the first direction, and the different cutting grooves have a cutting offset in the second direction.
  • the cutting line 213 changes to the position of the slot on the cutting wheel 211, the cutting line 213 has a second direction displacement relative to the cutting wheel 211.
  • the transition wheel 212 is opposite to the cutting wheel 211 At rest, if the cutting wire 213 is changed to the slot position of the cutting wheel 211, the cutting wire saw that is wound around the transition wheel and the wire wheel is still in a plumb surface, then the cutting wire 213 is wound around the wire of the transition wheel 212 The slot position also needs to be changed.
  • Each transition wheel 212 has at least two wire grooves, and the at least two wire grooves are parallel to each other, and the projection of the plane where the wire grooves are located on the horizontal plane is along the first direction, and the transition deviation between different wire grooves is in the second direction.
  • the amount of movement, based on the at least two wire grooves, can be used to change the wire groove of the cutting line 213 in the transition wheel 212, so that the cutting wire saw wound around the transition wheel and the wire wheel after the adjustment of the groove is still located in a plumb surface .
  • the transition offset between adjacent wire grooves in the transition wheel 212 is equal to the cutting offset between adjacent cutting line grooves in the cutting wheel 211, so as to realize cutting according to a preset position.
  • Line 213 changes slots.
  • the cutting wheel 211 and the wire wheel can be set in the wire cutting unit 21 in a form of one-to-one correspondence between the wire groove and the cutting wire groove (the correspondence means that the cutting wire groove and the wire groove are coplanar), and the transition The number of wire grooves of the wheel 212 is equal to the number of the cutting wheel 211, or it can be different.
  • the cutting wheel 211 and the transition wheel 212 in the wire cutting unit 21 can be arranged in different positional relationships and configured with different winding methods.
  • a plurality of cutting wheels belonging to the same wire cutting unit form at least two cutting wheel groups in a paired manner, and there are also two adjacent cutting wheel groups in two adjacent cutting wheel groups.
  • a transition wheel is provided, the transition wheel has at least two wire grooves, and the cutting is sequentially wound on the cutting wheel and the transition wheel to form a cutting line between the two cutting wheels in each cutting wheel group Saw, wherein, when the cutting line is wound around two adjacent cutting wheels in the two adjacent cutting wheel sets, it passes through the cutting line groove of the next cutting wheel in the previous cutting wheel set and passes through all the cutting lines.
  • the wire groove of the transition wheel is then passed into the cutting groove of the preceding cutting wheel in the following cutting wheel group; wherein, the at least one pitch adjusting mechanism drives the plurality of cutting wheels in the at least one wire cutting unit along the first When moving in two directions, at least one transition wheel and a plurality of cutting wheels in the at least one wire cutting unit remain relatively stationary.
  • FIG. 18 shows a schematic diagram of the wire cutting device of this application applied to a silicon rod square-out device in an embodiment
  • FIG. 19 shows a wire cutting unit in the wire cutting device.
  • the wire cutting unit in the wire cutting device is provided with 4 cutting wheel sets.
  • a transition wheel 212 is provided between two adjacent cutting wheel sets.
  • the cutting line 213 is wound on the cutting wheel 211 and the transition wheel 212 in sequence to connect the two cutting wheels of each cutting wheel set.
  • a cutting wire saw is formed on the 211, wherein the cutting wire 213 is wound by the cutting wheel 211 of the previous cutting wheel group when it is wound around the two adjacent cutting wheels 211 of the two adjacent cutting wheel groups.
  • the cutting line groove of ⁇ is passed into the cutting line groove of the preceding cutting wheel 211 in the next cutting wheel group.
  • every two adjacent cutting wheel sets share the same transition wheel 212 for guiding, which can reduce the length of the cutting line 213 used for tension adjustment and guiding, so that the cutting line 213 is used to form the cutting of the cutting wire saw.
  • the length ratio of the wire 213 is increased, while simplifying the winding method, the utilization rate of the cutting wire 213 is improved, and the production cost is reduced.
  • Each cutting wire saw can cut a silicon rod corresponding to a silicon rod carrying structure 11. It should be understood that the position distance of the cutting wheel 211 in the first direction is changed, and any cutting line
  • the number of silicon rod bearing structures 11 corresponding to the saw can also be 2, 3, 4, etc.
  • the distance between the two cutting wheels 211 in each cutting wheel group in the first direction can be increased, or , The distance between the silicon rod supporting structure 11 in the first direction is reduced, so that the two cutting wheels 211 in the cutting wheel set are respectively located on two, 3, or 4 silicon rod supporting structures 11 in the second direction.
  • each cutting wire saw can simultaneously cut the silicon rods placed on its corresponding multiple silicon rod bearing structures 11.
  • the number of silicon rod supporting structures 11 corresponding to each cutting wire saw can be selected according to actual conditions to stabilize the processing quality.
  • the multiple cutting wheels belonging to the same wire cutting unit include a first cutting wheel, a tail cutting wheel, and at least one intermediate cutting wheel located between the first cutting wheel and the tail cutting wheel. At least one intermediate cutting wheel is also provided with a transition wheel beside it. The transition wheel has at least two wire grooves.
  • a cutting wire saw is formed on the upper side, wherein when the cutting wire is wound around the middle cutting wheel, it passes through one of the at least two cutting wire grooves on the middle cutting wheel and passes through the side After the transition wheel is penetrated by another cutting line groove of the at least two cutting line grooves on the intermediate cutting wheel, so that any two adjacent cutting line saws have a cutting offset in the second direction ,
  • the cutting offset corresponds to the distance between the two related cutting grooves; wherein, when the plurality of cutting wheels in the at least one wire cutting unit are driven to move in the second direction by the at least one pitch adjusting mechanism, The at least one transition wheel and the plurality of cutting wheels in the at least one wire cutting unit are kept relatively stationary.
  • FIG. 20 shows a schematic structural diagram of an intermediate cutting wheel and a transition wheel arranged beside it in an embodiment of the wire cutting device of the present application.
  • 17 and 20 illustrate the winding method adopted by the wire cutting unit 21 in this example.
  • each intermediate cutting wheel 211 undergoes two windings.
  • the cutting wheel 211 undergoes at least one winding.
  • the cutting line 213 is wound around the middle cutting wheel 211, it passes through the first cutting line groove 2111 of the at least two cutting line grooves on the middle cutting wheel 211 and passes through the side (in the embodiment shown in FIG.
  • the transition wheel 212 on the upper side of the cutting wheel 211 is then penetrated by the second cutting line groove 2112 of the at least two cutting line grooves on the intermediate cutting wheel 211, so that any two adjacent cutting line saws There is a cutting offset in the first direction, and the cutting offset corresponds to the distance between the first cutting groove 2111 and the second cutting groove 2112.
  • the line connecting the axis of the transition wheel and the axis of the cutting wheel is parallel to the heavy vertical line.
  • the length of the cutting lines on both sides of the transition wheel is equal or approximately the same, and the force state during the cutting process is approximately the same, which helps prevent the cutting lines on both sides of the transition wheel from being partially or unilaterally continuously stressed or insufficient. The problem.
  • the transition wheel 212 is set directly above the cutting wheel, and the cutting line 213 passes through the first cutting line groove 2111 of the cutting wheel 211 and is guided through the transition wheel 212 to wind around.
  • the projections of the cutting lines 213 on both sides of the transition wheel 212 formed on the plumb-direction plane are line segments of equal length.
  • the formed cutting wire saw is the tangent line below the cutting line groove of the cutting wheel 211.
  • the transition wheel may also be arranged directly below the cutting wheel, that is, the line connecting the axis of the transition wheel and the cutting wheel is a heavy vertical line.
  • the cutting line winds down from the first cutting groove of the cutting wheel to the transition wheel, and is guided by the transition wheel and then passes upward from the second cutting groove of the cutting wheel.
  • the formed cutting wire saw is a cutting wheel cutting The tangent above the wire slot.
  • the side is mainly used to determine the corresponding relationship between the intermediate cutting wheel and the transition wheel, rather than a specific position.
  • the side can also be the left side, right side, upper side, lower side, or oblique side of the cutting wheel. Fang, etc., this application is not restricted.
  • the arrangement of the multiple cutting wheels, the intermediate cutting wheels, and the cutting line in the wire cutting unit may adopt the method described in Chinese patent application CN2020204403178 (title of invention: silicon rod square preparation equipment).
  • the multiple cutting wheels in the wire cutting unit can be moved along the second line under the action of the at least one pitch adjustment mechanism. Move in the direction to realize the adjustment of the cutting position of the cutting wire saw or change the slot.
  • the cutting wheels 211 belonging to the same wire cutting unit can move in the second direction under the drive of the pitch adjusting mechanism 23. Therefore, the cutting wire saw formed between the cutting wheels 211 is in the first Moving in two directions, the cutting position adjustment of the cutting wire saw can be realized; when the wire cutting unit further includes a transition wheel 212, the at least one pitch adjustment mechanism 23 drives the plurality of cutting wheels 211 in the at least one wire cutting unit along When moving in the second direction, the transition wheel 212 and the cutting wheel 211 remain relatively stationary, and the corresponding cutting wire saw moves in the second direction to realize the adjustment of the cutting position of the cutting wire saw.
  • the cutting line positions before and after the groove change can be determined in advance. Respectively correspond to the cutting line grooves, for example, the position of the cutting line before changing the groove is the cutting line groove a1, and the cutting line is wound around the cutting line groove a2 after the groove is changed, based on the cutting offset between the cutting line groove a1 and the cutting line groove a2
  • the amount of displacement determines the displacement of the plurality of cutting wheels 211 in the wire cutting unit driven by the at least one pitch adjusting mechanism 23 in the second direction, that is, the displacement is set as the cutting between the cutting line groove a1 and the cutting line groove a2.
  • the offset can be used to realize the replacement of the cutting line slot a1 to the cutting line slot a2; it should be noted that the at least one pitch adjustment mechanism 23 drives the multiple cutting wheels 211 in the wire cutting unit in the second direction
  • the moving direction is the direction that the cutting line slot a2 points to the cutting line slot a1.
  • the cutting position of the cutting wire saw in the space remains unchanged, so the step of further calibrating the position of the cutting wheel 211 or other components is omitted.
  • the silicon rod is cut according to the preset cutting amount, so that the slot changing process is simplified.
  • the present application provides the following embodiments.
  • the specific form of the at least one pitch adjusting mechanism can be changed accordingly.
  • the wire cutting device includes a single wire cutting unit; the pitch adjusting mechanism includes: a screw rod arranged along the second direction and threadedly connected with the single wire cutting unit; a driving source for driving the wire The rod turns.
  • the single wire cutting unit is a wire cutting unit
  • the single wire cutting unit in the wire cutting device includes a plurality of cutting wheels arranged along a first direction, and the cutting wire is wound around the plurality of cutting wheels to form at least one cutting Wire saw, and the at least one cutting wire saw is along the same straight line direction.
  • the screw rod of the pitch adjusting mechanism has a distal end and a proximal end.
  • the proximal end of the screw rod can be connected to a driving source and rotated under the driving of the driving source, and the distal end of the screw rod is threadedly connected to the
  • the single-wire cutting unit by means of the connection between the two ends of the screw, the screw can rotate based on the drive source transmission and convert the rotation of the screw into an axial displacement by means of a threaded connection.
  • the axial displacement direction is the setting direction of the screw.
  • the second direction; the single-wire cutting unit can be displaced in the second direction by driving the lead screw in the pitch adjusting mechanism, and the single-wire cutting unit can be displaced in the second direction when the lead screw is driven to rotate in a different direction Forward or backward.
  • the wire cutting device includes a single wire cutting unit; the pitch adjusting mechanism includes: a telescopic member arranged in a second direction and associated with the single wire cutting unit; a driving source for driving the telescopic The piece telescopically moves in the second direction.
  • the telescopic element may be configured as a rod structure and the extension direction of the rod is the second direction.
  • the telescopic element can telescopically move along its extension direction under the driving of a driving source, and one end of the telescopic element may be connected to the driving source,
  • the retractable free end is associated with the single wire cutting unit, and can drive the single wire cutting to move in the second direction under the action of a driving source.
  • the telescopic member is, for example, an electric telescopic rod, or a connecting rod connected to the cone rod of the cylinder, and the cylinder can be used as a driving source, which is not limited in this application.
  • the manner in which the telescopic rod is connected to the single-wire cutting unit may be linear connection or indirect connection, for example, it may be directly connected to the single-wire cutting unit mounting beam, or indirectly connected to the single-wire cutting unit through a support or a bearing. It should be understood that the expansion or contraction of the telescopic element corresponds to the advancement or retreat of the single-wire cutting unit in the second direction.
  • the association may be realized by one or more of engagement, screw locking, bonding, and welding.
  • the telescopic rod may be The wire cutting unit is associated by one or more of snapping, screw locking, bonding, and welding; of course, the realization of the association is not limited to this, but is intended to be in the second direction The transmission.
  • the wire cutting device includes a single wire cutting unit; the pitch adjusting mechanism includes: a rack arranged on the single wire cutting unit along a second direction; a transmission gear meshing with the rack; and driving The source is used to drive the transmission gear to rotate.
  • the transmission gear is driven by the drive source to rotate, and the rack meshed with the transmission gear moves in the direction of the rack step accordingly.
  • the drive source can be moved by matching the rack and the transmission gear.
  • the rotational movement of the drive is transformed into a line conveying along the direction of the rack, and the rack is provided in the single-wire cutting unit along the second direction, which can drive the single-wire cutting unit to move in the second direction.
  • the rotation direction of the transmission gear is controlled by the driving source to switch the displacement direction of the single-wire cutting unit forward or backward in the second direction.
  • the pitch adjustment mechanism may be set to one or more.
  • the single wire cutting unit has a large span in the first direction, it is difficult to drive the single wire by setting a pitch adjustment mechanism.
  • multiple pitch adjustment mechanisms can be set to drive.
  • the single-wire cutting unit is provided with a distance adjustment structure at both ends of the single-wire cutting unit along the first direction or arranged at equal intervals along the first direction.
  • the corresponding multiple distance adjustment mechanisms on the single-wire cutting unit can cooperate to ensure that the multiple distance-adjusting mechanisms drive the multiple distance adjustment mechanisms of the single-wire cutting unit with the same displacement (size and direction).
  • the wire cutting wheel moves in the second direction.
  • the wire cutting device includes a first wire cutting unit and a second wire cutting unit that are arranged opposite to each other in a second direction, and at least one of the first wire cutting unit and the second wire cutting unit passes through the At least one pitch adjusting mechanism drives to move in the second direction, and is used to adjust the wire saw distance between the at least one cutting wire saw in the first wire cutting unit and the at least one cutting wire saw in the second wire cutting unit,
  • the cutting line is wound around the cutting line grooves of the multiple cutting wheels in the first line cutting unit and/or the cutting line grooves of the multiple cutting wheels in the second line cutting unit.
  • the wire cutting device includes two wire cutting units such as a first wire cutting unit and a second wire cutting unit.
  • the first wire cutting unit 21a and the second wire cutting unit 21a The units 21b are arranged parallel to each other along the first direction, and the cutting wire saws in the first wire cutting unit 21a and the second wire cutting unit 21b are also parallel.
  • the wire cutting device can be used in, for example, a silicon rod squaring equipment.
  • the silicon rods on each silicon rod carrying structure in the silicon rod squaring equipment correspond to the first cutting unit and the second cutting in the cutting area.
  • the cutting wire saw of the unit can form two parallel cutting planes on the surface of the silicon rod by one lifting and cutting.
  • the cutting amount of the silicon rod can be controlled.
  • the at least one pitch adjusting mechanism 23 can be set to be connected to the first wire cutting unit 21a or the second wire cutting unit 21b, or to be associated with the first wire cutting unit 21a and the second wire cutting unit 21b at the same time to drive
  • the multiple cutting wheels 211 in the connected or associated first wire cutting unit 21a or/and second wire cutting unit 21b move along the second direction, and adjust the connected or associated first wire cutting unit 21a or/and second wire
  • the cutting position of at least one wire saw in the cutting unit 21b or the cutting slot of the multiple cutting wheels 211 in the connected or associated first wire cutting unit 21a or/and the second wire cutting unit 21b is changed.
  • the pitch adjusting mechanism includes: a screw rod arranged in a second direction and threadedly connected to the first wire cutting unit or the second wire cutting unit; and a driving source for driving the wire The rod turns.
  • the screw rod and the driving source drive the first wire cutting unit or the plurality of cutting wheels in the second wire cutting unit to move in the second direction in a manner similar to the foregoing embodiment, and the first cutting unit is driven by the pitch adjusting mechanism
  • the second wire cutting unit can be regarded as a single wire cutting unit, which will not be repeated here. It should be understood that by providing the pitch adjustment mechanism on any wire cutting unit, the parallel cutting wire saw distance formed between the first wire cutting unit and the second wire cutting unit can be increased and decreased, and the wire cutting device is sufficient. Cut the silicon rods into different specifications.
  • the distance adjustment mechanism includes: a telescopic element, which is arranged in a second direction and is associated with the first wire cutting unit or the second wire cutting unit; and a driving source for driving the telescopic element Telescopic movement in the second direction.
  • the first cutting unit or the second wire cutting unit provided with the pitch adjusting mechanism can be regarded as a single wire cutting unit, and the specific implementation manner can refer to the foregoing embodiment, which will not be repeated here.
  • the pitch adjusting mechanism includes: a rack, which is in a second direction and is associated with the first wire cutting unit or the second wire cutting unit; a transmission gear, which meshes with the rack; The source is used to drive the transmission gear to rotate. Through the meshing transmission gear and the rack, the drive source can control the rack to move linearly along the rack direction, and the first wire cutting unit or the second wire cutting unit associated with the rack can use the tooth The strip drives the plurality of cutting wheels to move in the second direction.
  • the pitch adjusting mechanism includes: a bidirectional screw rod arranged in a second direction and threadedly connected to the first wire cutting unit and the second wire cutting unit; and a driving source for driving the The screw rod rotates to make the first wire cutting unit and the second wire cutting unit move toward or away from each other in a second direction.
  • the bidirectional screw rod 231 is a double-threaded screw rod, and both ends of the bidirectional screw rod 231 are respectively provided with threads and the thread directions are opposite.
  • the driving source 232 It can be set at either end of the bidirectional screw rod 231 to drive the bidirectional screw rod 231 to rotate along the axis of the screw rod 231.
  • the two-way screw rod 231 is driven by the driving source 232 by the threads of opposite directions at both ends of the bidirectional screw rod 231
  • the movement of the two ends of the bidirectional screw rod 231 during rotation is converted into an axial linear movement in the opposite direction, and the axial direction is the second direction in which the bidirectional screw rod 231 is set.
  • the first wire cutting unit 21a and the second wire cutting unit 21b can move toward or away from each other.
  • the pitch adjusting mechanism includes: a first rack, which is in the second direction and is associated with the first wire cutting unit; and a second rack, which is in the second direction and is associated with the second wire cutting unit Associated; transmission gear, meshed with the first and second racks; drive source, used to drive the transmission gear to rotate so that the first wire cutting unit and the second wire cutting unit along the second direction Move towards or away from each other.
  • the first rack is linked to the first wire cutting unit
  • the second rack is linked to the second wire cutting unit
  • the transmission gear is connected to a driving source such as a power output of a servo motor.
  • Shaft and meshes with the first rack and the second rack, and is used to drive the first wire cutting unit and the second wire cutting unit to move toward each other when rotating in a forward direction to perform a closing action, and rotate in a reverse direction When driving the first wire cutting unit and the second wire cutting unit to move back.
  • the first rack and the second rack can be meshed on both sides of the transmission gear, so that when the transmission gear rotates, the linear velocities at the first rack and the second rack are in opposite directions, and the drive motor drives the transmission
  • the gear rotates the first rack and the second rack move toward each other when the transmission gear rotates forward, which drives the first wire cutting unit and the second wire cutting unit to move toward each other.
  • the transmission gear is driven to rotate in the reverse direction, the first rack and the second tooth
  • the strip moves back to drive the first wire cutting unit and the second wire cutting unit to move back.
  • the transmission gear may be axially connected to the power output shaft of the driving source, or may be indirectly connected to the power output shaft, for example, the shaft is connected to the rotating part connected to the power output shaft.
  • the wire cutting device may be provided with one or more pitch adjustment mechanisms, each of which is connected to the first wire cutting unit and the second wire cutting unit, and the number of the distance adjustment mechanisms may be based on the drive
  • the power requirements, the force of the screw rod, the smoothness of the movement of the multiple cutting wheels in the drive wire cutting unit, and the equipment space of the wire cutting device are comprehensively determined. For example, when the first wire cutting unit and the second wire cutting unit are in The span in the first direction is small. Only one pitch adjustment mechanism can be used to adjust the cutting position of the cutting wire saw in the cutting unit or to change the cutting line.
  • the first wire cutting unit and the second wire cutting unit move toward or away from each other in the second direction; for another example, when the first wire cutting unit and the second wire cutting unit have a longer span in the first direction, the wire
  • the cutting unit needs to be driven by a relatively large power and needs to satisfy that the power is within the force strength range of the transmission connecting parts such as the screw rod or the rack.
  • the mechanism cooperates to ensure that the multiple pitch adjusting mechanisms drive the multiple wire cutting wheels of the first wire cutting unit and the second wire cutting unit with the same displacement amount (size and direction) to move toward or away from each other in the second direction move.
  • the pitch adjusting mechanism is a servo motor provided in the at least one wire cutting unit.
  • a servo motor is provided on at least one wire cutting unit or each wire cutting unit of the wire cutting device, and the servo motor controls the displacement of the corresponding wire cutting unit in the second direction.
  • the wire cutting unit can pre-determine the cutting offset for slot change or the adjustment amount of the cutting line to change the cutting position, and the precise positioning function of the servo motor drives the multiple cutting wheels in the wire cutting unit to a preset displacement amount Move in the second direction.
  • the wire cutting device is provided with a single wire cutting unit, and the single wire cutting unit is provided with a servo motor to drive the single wire cutting unit to move in the second direction; for another example, the wire cutting device is provided with a first The wire cutting unit and the second wire cutting unit, the first wire cutting unit or/and the second wire cutting unit are relatively independently moved in the second direction under the drive of their corresponding servo motors.
  • the servo motor can also be replaced with a traveling motor and a traveling screw, and the wire cutting unit can be driven by the traveling motor to move on the wire cutting support in the second direction.
  • the wire cutting device of silicon rod processing equipment includes at least one pitch adjustment mechanism and is arranged on at least one wire cutting unit. Under the action of the pitch adjustment mechanism, at least one of the wire cutting devices can be driven The multiple cutting wheels of a wire cutting unit move in the second direction, and at least one cutting wire saw formed around the multiple cutting wheels can thus change the cutting position in the second direction under the action of the pitch adjustment mechanism, or, Based on the movement of the plurality of cutting wheels in the second direction, the position of the cutting line around the grooves of the plurality of cutting wheels can be changed, and the process of changing the position of the cutting line or changing the groove based on the pitch adjustment mechanism is simple, easy to implement, and The operation is convenient, which is helpful to improve the operation efficiency.
  • the present application also provides a silicon rod processing equipment, which includes a base, a silicon rod bearing structure, and a wire cutting device.
  • the machine base has a silicon rod processing platform;
  • the silicon rod carrying device is arranged on the silicon rod processing platform and is used to carry the silicon rods to be cut;
  • the wire cutting device includes a cutting frame, which is arranged on the machine Seat; at least one wire cutting unit, movably installed in the cutting frame;
  • the wire cutting unit includes: a plurality of cutting wheels arranged in sequence along a first direction, each cutting wheel has at least two cutting grooves; cutting line , Sequentially wound around the plurality of cutting wheels to form at least one cutting wire saw;
  • at least one pitch adjustment mechanism is provided on the at least one wire cutting unit, and is used to drive the plurality of cutting wheels in the at least one wire cutting unit along Move in the second direction to adjust the cutting position of the at least one wire saw in the at least one wire cutting unit, or to change the cutting wire around the cutting grooves of the multiple cutting wheels in the
  • the silicon rod processing equipment is a silicon rod squaring equipment
  • the silicon rod supporting device is a silicon rod supporting structure.
  • the silicon rod processing platform may be provided with one or more silicon rod supporting structures, and each silicon rod supporting structure may be used to carry a single silicon rod.
  • the silicon rod processing platform in the cutting area The number of silicon rod bearing structures can correspond to the number of wire saws in the wire cutting unit of the wire cutting device.
  • a wire cutting unit 21 in the wire cutting device includes a multi-segment cutting wire saw to correspond to a plurality of silicon rod supporting structures 11 respectively.
  • the silicon rod processing platform is set on the base 10 through a worktable conversion mechanism.
  • the worktable conversion mechanism may be, for example, a rotation mechanism or a translation mechanism.
  • the rotation mechanism may include, for example, a rotation shaft and a rotation drive unit, the rotation shaft is axially connected to the silicon ingot processing platform, and the rotation drive unit drives the rotation shaft to rotate to drive the silicon ingot processing platform to rotate.
  • the translation mechanism may include, for example, a translation guide rail, a sliding block and a translation drive unit.
  • the translational guide rail is laid on the machine base, the sliding block is arranged at the bottom of the silicon ingot processing platform and is adapted to the translational guide rail to provide translational guidance for the silicon ingot processing platform, and the translational driving unit is used for driving
  • the silicon ingot processing platform moves along the translational guide rail so that the silicon ingot carrying structure on the silicon ingot processing platform is switched between the cutting area and the loading and unloading area.
  • the translation driving unit may adopt a cylinder assembly or a wire driven by a motor. Rod assembly. In other embodiments, the translation mechanism may also be geared.
  • the translation mechanism includes a translation rack and a rotating gear that is driven by a motor and adapted to the translation rack.
  • the translation gear The rail is arranged at the bottom of the silicon ingot processing platform, and may be, for example, at least one rack with a certain length.
  • each rack is fitted with at least two rotating gears arranged at intervals, and a motor The rotating gear is driven to rotate to drive the silicon ingot processing platform to move so that the silicon ingot carrying structure on the silicon ingot processing platform is switched between the cutting area and the loading and unloading area.
  • the position of the silicon rod carried by the silicon rod bearing structure in the second direction can be controlled by the translation mechanism, and the silicon rod determined by the translation mechanism
  • the position and the position of the cutting wire saw determined by the pitch adjusting mechanism of the wire cutting device can determine the cutting amount of the silicon rod; for example, when the wire cutting device is provided with a first wire cutting unit and a second wire cutting unit, The first wire cutting unit or the second wire cutting unit is provided with the pitch adjustment mechanism, and when the pitch adjustment mechanism adjusts the cutting position of at least one wire saw in the first wire cutting unit or the second wire cutting unit,
  • the translation mechanism can adjust the silicon rod position based on the adjusted cutting wire saw position until the silicon rod axis is located on the symmetry line of the cutting wire saws of the first wire cutting unit and the second wire cutting unit, because the cross section of the silicon rod is usually similar. Circular shape, so that the distance between the cutting wire saws of the first wire cutting unit and the second wire cutting unit from the center of the silicon rod cross-
  • the silicon rod squaring equipment may be, for example, the silicon rod squaring equipment of the embodiment shown in FIG. 17 or FIG. 18. Of course, it may also be other types of silicon rod squaring equipment, for example, the center line of the silicon rod squaring equipment
  • the cutting device can be set as a single-wire cutting unit; for another example, the cutting wire saw in the wire cutting unit of the wire cutting device of the silicon rod square rooting equipment is one segment. Of course, the cutting wire saw can also be two-stage, three-stage, or four-stage. Sections, etc., are not limited in this application.
  • the number of silicon ingot carrying structures on the silicon ingot processing platform can be changed accordingly; for another example, each of the wire cutting units in the wire cutting device of the silicon ingot squaring equipment
  • the number of silicon rod bearing structures corresponding to a cutting wire saw can be one, two, three, and so on.
  • the silicon rod square-cutting equipment when the silicon rod square-cutting equipment is provided with the wire cutting device described in any one of the embodiments shown in FIGS. 16 to 20, the silicon rod square-cutting equipment can be based on the
  • the at least one pitch adjusting mechanism adjusts the cutting position of the cutting wire saw to determine the cutting amount of the silicon rod, or the cutting wheel of the silicon rod square-cutting device is worn out during the long-term cutting operation, which can be based on the at least one adjustment
  • the distance mechanism changes the position of the wire groove of the cutting line to ensure the processing accuracy of the silicon rod square-out equipment to continue the square-out operation.
  • the silicon rod cutting machine when the silicon rod processing equipment is a silicon rod cutting machine, the silicon rod cutting machine includes a base, a silicon rod carrying device, and a wire cutting device.
  • the machine base has a silicon rod processing platform, and the silicon rod carrying device is arranged on the silicon rod processing platform.
  • the silicon rod carrying device can be used, for example, to horizontally carry the silicon rods to be cut;
  • the wire cutting device includes a cutting frame arranged on the machine base; at least one wire cutting unit is movably arranged on the cutting frame;
  • the wire cutting unit includes: a plurality of cutting wheels arranged in sequence along a first direction, and each cutting wheel has at least two cutting line grooves; a cutting line is sequentially wound around the plurality of cutting wheels to form at least one cutting wheel Wire saw; at least one pitch adjustment mechanism, provided on the at least one wire cutting unit, used to drive the plurality of cutting wheels in the at least one wire cutting unit to move in the second direction to adjust at least one wire in the at least one wire cutting unit The cutting position of the wire saw, or changing the cutting wire around the cutting slot of the plurality of cutting wheels in the at least one wire cutting unit.
  • the wire cutting unit in the wire cutting device moves up and down
  • the wire cutting device of the silicon rod cutting machine is provided with a plurality of parallel wire cutting units, and the plurality of parallel wire cutting units move up and down along the cutting frame, that is, in one cutting The silicon rod to be cut is cut into multiple silicon rod sections. Adjusting the cutting position of at least one cutting wire saw in the wire cutting unit in the second direction based on the at least one pitch adjusting mechanism of the wire cutting device can cut the silicon rod to be cut into silicon rod sections of different length specifications.
  • the arrangement of the wire cutting device of the silicon rod cutting machine and the form of the silicon rod carrying device can refer to the arrangement disclosed in Chinese Patent CN105196433B.
  • the wire cutting device of the silicon rod cutting machine includes The at least one pitch adjustment mechanism is used to adjust the cutting position of at least one wire saw in the at least one wire cutting unit of the silicon rod cutting machine, or to change the cutting wire around the multiple cutting wheels in the at least one wire cutting unit Trunking.
  • the silicon rod cutting machine is, for example, a double silicon rod cutting device.
  • the silicon rod carrying device of the silicon rod cutting machine is provided with a first processing station and a second processing station, To respectively carry the first silicon rod to be cut and the second silicon rod to be cut.
  • FIG. 21 shows a schematic structural diagram of the wire cutting device of the silicon rod cutting machine in an embodiment.
  • the wire cutting support 24 is provided on the cutting frame 20, and at least one wire cutting unit 21 is respectively provided on both sides of the wire cutting support 24 along the first direction, located on both sides of the wire cutting support 24 The at least one wire cutting unit 21 can respectively cut the silicon rods to be cut at the first processing station and the second processing station.
  • the wire cutting unit 21 is provided with a plurality of cutting wheels 211 and a cutting wire 213 wound around the cutting wheel 211.
  • the wire cutting unit 21 is also provided with a transition wheel 212.
  • the cutting wheel 211 has at least two cutting grooves
  • the transition wheel 212 has at least two wire grooves.
  • either side of the wire cutting support 24 further includes the at least one pitch adjusting mechanism (not shown in the figure), and the pitch adjusting mechanism can be set as the embodiment shown in FIGS. 16 to 20, for example.
  • the pitch adjustment mechanism described in any of the implementations is, for example, connected to the first wire cutting unit or the second wire cutting unit by a screw rod, or connected to the first wire cutting unit and the second wire cutting unit by a bidirectional screw rod , Or if the pitch adjusting mechanism is a servo motor, etc., it will not be repeated here.
  • the distance adjustment mechanism by using the distance adjustment mechanism, the cutting position of the at least one wire saw in the at least one wire cutting unit 21 can be adjusted, or the cutting wire 213 can be changed to cut around the plurality of cutting wheels 211 in the at least one wire cutting unit 21. Trunking.
  • the pitch adjusting mechanism When the pitch adjusting mechanism is used to adjust the position of the at least one cutting wire saw or to change the cutting wire 213 around the cutting wire groove in the cutting wheel 211, the transition wheel 212 and the cutting wheel 211 in the wire cutting unit 21 remain relatively stationary
  • the pitch adjusting mechanism may, for example, drive the cutting wheel 211 and the transition wheel 212 on the wire cutting unit 21 to move in the second direction, and the cutting wire
  • the positional relationship of the saw relative to the cutting wheel 211 and the transition wheel 212 remains unchanged, that is, the cutting position adjustment can be realized only by moving in the second direction;
  • the position of the wire groove in the wheel 211 the position of the wire groove for winding the cutting line 213 in the transition wheel 212 is also changed accordingly, that is, the wire groove and the cutting line used for winding the cutting line 213 after the cutting line 213 is changed.
  • the groove is still in the same plane.
  • the wire cutting units 21 on both sides of the wire cutting support 24 can also form at least a pair of wire cutting units 21, for example, the wire cutting units 21 on both sides of the wire cutting support 24 are in one-to-one correspondence.
  • the connection forms at least a pair of wire cutting units 21, the pair of wire cutting units 21 are located on the same straight line in the first direction, in this example, based on the same pitch adjustment mechanism can drive the pair of wire cutting units 21
  • the plurality of cutting wheels 211 move in the second direction.
  • the pair of wire cutting units 21 can also be driven by a plurality of pitch adjustment mechanisms.
  • the specific form of the silicon rod cutting machine is not limited to the foregoing embodiment.
  • each of the silicon rod cutting machine The cutting wire saw can cut multiple silicon rods at the same time; another example is that the wire cutting device of the silicon rod cutting machine only includes a cutting wire saw, and the cutting wire saw is used to cut a single or multiple silicon rods.
  • the silicon rod cut in one cutting operation during cutting is divided into a silicon rod section; this application is not limited, it should be noted that the wire cutting device of the silicon rod cutting machine includes at least one pitch adjustment mechanism, which can be used The plurality of cutting wheels in the at least one wire cutting unit of the driving wire cutting device are moved along the second direction to adjust the cutting position of the at least one wire saw in the at least one wire cutting unit, or to change the cutting wire around the at least one wire cutting The cutting grooves of multiple cutting wheels in the unit.
  • the silicon rod processing equipment is an integrated silicon rod cutting and grinding machine.
  • the silicon rod cutting and grinding integrated machine includes a base, a silicon rod carrying device, a wire cutting device, and a grinding device.
  • the machine base has a silicon rod processing platform, and in the silicon rod cutting and grinding integrated machine, the silicon rod processing platform can be set as a processing location that performs different processing functions, for example, is composed of a cutting station and a grinding station .
  • the silicon rod carrying device is used to carry the silicon rods to be processed.
  • the wire cutting device includes a cutting frame arranged on the machine base; at least one wire cutting unit is movably arranged on the cutting frame; the wire cutting unit includes: a plurality of cutting wheels arranged in sequence along a first direction, each One cutting wheel has at least two cutting line grooves; the cutting line is sequentially wound around the plurality of cutting wheels to form at least one cutting wire saw; at least one pitch adjustment mechanism is provided on the at least one wire cutting unit for Driving the plurality of cutting wheels in the at least one wire cutting unit to move in the second direction to adjust the cutting position of the at least one wire saw in the at least one wire cutting unit, or to change the cutting wire around the at least one wire cutting unit Cutting grooves for multiple cutting wheels.
  • the silicon rod cutting and grinding integrated machine includes a machine base with a silicon rod processing platform;
  • the silicon rod in the first processing area of the silicon rod is cut in the first direction and the silicon rod in the second processing area of the silicon rod processing platform is cut in the second direction to form a square silicon rod;
  • the grinding device is arranged at The machine base is used to grind and chamfer the square silicon rods on the third processing position of the silicon rod processing platform;
  • a silicon rod conversion device is provided on the silicon rod processing platform, It is used for converting the silicon rods in the first processing location, the second processing location and the third processing location.
  • the wire cutting device includes: a cutting frame 20, a wire cutting support 24, a first cutting unit group, and a second cutting unit group, and the first cutting unit group and the second cutting unit group are used to respectively align The silicon rods in the first processing area and the second processing area are cut.
  • the wire cutting support 24 can be configured with the first cutting unit group and the second cutting unit group, that is, the first cutting unit group and the second cutting unit group share the wire cutting support 24. Therefore, in this embodiment, on the one hand, the cutting frame 20 and the wire cutting support 24 in the wire cutting device are arranged in a middle position between the first processing position and the second processing position. On the other hand, the wire cutting support 24 is specially designed. As shown in Fig. 22, the wire cutting support 24 in this embodiment may include a support main body and a first support side wing and a second support side wing located on opposite sides of the support main body.
  • the support body in the wire cutting support 24 is arranged at 45° to the X axis or the Y axis, and the first support side wing and the support body form an angle of 145° along the Y axis.
  • the angle between the side wings of the second support and the main body of the support is 145° and is arranged along the X axis.
  • the first cutting unit group may include at least four first cutting wheels 211a, and the four first cutting wheels 211a may be combined into a pair of first cutting wheel groups, that is, arranged oppositely along the X axis
  • the two first cutting wheels 211a form a first cutting wheel set
  • the two first cutting wheel sets along the Y axis form a pair of first cutting wheel sets, that is, two parallel first cutting wheel sets are formed along the X direction.
  • the cutting wire 213 is sequentially wound around each first cutting wheel set in the first cutting unit group to form a cutting wire net.
  • the cutting line 213 is sequentially wound around the four first cutting wheels 211a in the first cutting unit group to form two cutting wire saws.
  • the two cutting wire saws are arranged along the X axis and mutually Parallel to form a cutting line network.
  • the cutting line 213 is wound around two first cutting wheels 211a arranged along the X axis in a first cutting wheel set to form a cutting wire saw, and the cutting line 213 is wound around another first cutting wheel set.
  • the two first cutting wheels 211a arranged along the X-axis direction form another cutting wire saw.
  • the second cutting unit group may include at least four second cutting wheels 211b.
  • Two second cutting wheels 211b are arranged opposite to each other along the Y axis to form a second cutting wheel group.
  • the two second cutting wheel sets form a pair of second cutting wheel sets, that is, two parallel wire cutting units 21 arranged in the Y direction;
  • the four second cutting wheels 211b in the unit group form two cutting wire saws.
  • the two cutting wire saws are arranged along the Y-axis direction and are parallel to each other.
  • the silicon rod conversion device is provided in the center area of the silicon rod processing platform, and is used to place the silicon rods on the waiting area, the first processing area, and the second processing area on the silicon rod processing platform. , And the conversion between the third processing zone.
  • the silicon rod conversion device is rotatably arranged on the silicon rod processing platform, and the silicon rod conversion device may further include: a conveying body, which is in the shape of a disc, a square disc, or other similar shapes; and is arranged on the conveying body
  • the silicon rod positioning mechanism ie silicon rod bearing device
  • the conversion drive mechanism is used to drive the rotation of the conveying body to drive the silicon rods to be positioned by the silicon rod positioning mechanism to switch positions.
  • the silicon rod positioning mechanism further includes a rotating structure for driving the silicon rod carried on the silicon rod positioning mechanism to rotate along the silicon rod axis to adjust the cutting surface of the silicon rod.
  • the silicon rod to be cut is moved from the first cutting line in the X-axis direction of the wire cutting device at the first processing area.
  • the net is cut to form two axial cut planes along the X axis; then, the conversion drive mechanism drives the conveying body to drive the silicon rod positioning mechanism to position the silicon rod to the second processing position, which is formed by the wire cutting device along the Y axis direction.
  • the wire cutting device further includes at least one pitch adjustment mechanism (not shown in the figure).
  • the The first cutting unit group and the second cutting unit group at the second processing location include at least one pitch adjustment mechanism, which is provided on at least one wire cutting unit in the corresponding cutting unit group, and is used to drive the at least one wire cutting unit A plurality of cutting wheels in the cutting wheel group move along the second direction.
  • the first direction and the second direction are defined based on the carrier coordinate system of the wire cutting unit. Therefore, when the silicon rod processing equipment (in this example, the silicon rod cutting and grinding integrated machine), the direction of multiple wire cutting units Different, the first directions corresponding to the multiple wire cuttings are not the same direction in the external space; correspondingly, the second direction is orthogonal to the first direction, therefore, the driving movement direction performed by the at least one pitch adjustment mechanism It is the orthogonal direction relative to the driven wire cutting unit.
  • the wire cutting unit and the cutting wire saw are arranged along the X axis direction, the first direction in the first cutting unit group is the X axis direction, and the second direction is the Y axis direction;
  • the wire cutting unit and the cutting wire saw are arranged along the Y axis direction, and the first direction in the second cutting unit group is the Y axis direction, and the second direction is the X axis direction.
  • the pitch adjustment mechanism can be associated with the first wire cutting unit or the second wire cutting unit of the two wire cutting units, or both
  • the pitch adjusting mechanism can be configured as the pitch adjusting mechanism described in any implementation of the embodiment shown in FIGS. 16 to 20, for example, a screw rod and a second A wire cutting unit or a second wire cutting unit is connected, another example is connected to the first wire cutting unit and the second wire cutting unit by a bidirectional screw rod, or the pitch adjusting mechanism is a servo motor, etc., which will not be repeated here.
  • the first wire cutting unit Or/and the second wire cutting unit when the at least one pitch adjusting mechanism drives the plurality of cutting wheels in the first wire cutting unit or/and the second wire cutting unit to move in the second direction, the first wire cutting unit Or/and the second wire cutting unit, for example, can move along the flanks of the first support, that is, along the second direction (Y-axis direction) in the first cutting unit group; it can be used to adjust the first wire cutting unit or/and the first cutting unit group.
  • the structure of the second cutting unit group is similar to that of the first cutting unit group.
  • the main difference is that the arrangement position and direction are different in the silicon rod cutting and grinding integrated machine; but in the second cutting unit group, it is used to drive the first wire.
  • the structure and function of the at least one pitch adjusting mechanism in which the cutting unit or/and the plurality of cutting wheels in the second wire cutting unit move in the second direction are similar to the first cutting unit group, and will not be repeated here.
  • the positional relationship between the first processing location and the second processing location can be changed.
  • the first processing location and the second processing location are set as the silicon rod conversion device carrying the silicon rod to rotate. 60° can switch between the two processing positions, and the direction of the wire cutting unit in the corresponding first cutting unit group and the second cutting unit group may also change.
  • the first cutting unit group and The wire cutting units of the second cutting unit group respectively correspond to the first direction change, but the position adjustment or slot change of the cutting wire saw can still be achieved by at least one pitch adjustment mechanism in the cutting unit group;
  • the different processing stations in the integrated silicon rod cutting and grinding machine include, for example, only single-wire cutting units; in some embodiments, the integrated silicon rod cutting and grinding machine is provided with, for example, only one station for cutting processing.
  • the positional relationship between the multiple cutting wheels in the related wire cutting device is not easily changed after installation. After one of the wire cutting wheels is worn out, it is necessary to adjust the position of the cutting wheel or other parts to change the groove as a whole. The parts to adjust the position need to be further calibrated, the operation is cumbersome and the efficiency is low.
  • the present application also provides a wire cutting device for silicon ingot processing equipment.
  • the silicon ingot processing equipment includes a base with a silicon ingot processing platform; and a silicon ingot carrier device, which is arranged on the silicon ingot processing platform,
  • the wire cutting device is used to carry the silicon rods to be cut;
  • the wire cutting device includes: a cutting frame arranged on the machine base; at least one wire cutting unit is movably arranged on the cutting frame;
  • the wire cutting unit includes: A plurality of cutting wheels arranged in sequence, each cutting wheel has at least two cutting grooves; at least one transition wheel, each transition wheel has a wire groove; the cutting line is wound around the plurality of cutting wheels and
  • the transition wheel is used to form at least one cutting wire saw; at least one shift mechanism is used to drive the at least one transition wheel to move in the second direction, so that the current wire groove that is cut and wound in the at least one transition wheel is in the second Moving in the direction from the first wire groove corresponding to the cutting wheel to the second wire groove corresponding to
  • the high-speed running steel wire drives the cutting blade material attached to the steel wire or directly uses the diamond wire to rub the workpiece to be processed, so as to achieve the purpose of wire cutting.
  • the steel wire or diamond wire is guided by the transition wheel to form a wire saw or a wire net on the cutting wheel, and the workpiece to be processed is realized by the rise and fall of the worktable or the rise and fall of the wire saw or the wire net.
  • the feed of the workpiece In the long-term cutting operation, the cutting wire groove of the cutting wheel and the wire groove of the transition wheel are inevitably worn out, which affects the positioning accuracy of the cutting wire, which leads to the need to change the groove.
  • the wire cutting device includes at least one wire cutting unit, and a plurality of cutting wheels in the wire cutting unit are arranged along a first direction, that is, the planes where the cutting grooves of the plurality of cutting wheels are parallel In the first direction, for any one of the plurality of cutting wheels, there is an offset in the second direction between different cutting line grooves; the at least one displacement mechanism can be used to drive at least one transition wheel relative to the line
  • the cutting unit moves in the second direction to move the current wire groove cut and wound in the transition wheel in the second direction from the first wire groove corresponding to the cutting wheel to the second wire groove corresponding to the cutting wheel .
  • first wire groove also referred to as the first cutting wire groove in this application
  • second wire groove also referred to as the second cutting wire groove in this application
  • the cut and wound wire grooves before and after the displacement mechanism is driven to move in the wheel respectively correspond to the cutting grooves of the cutting wheel.
  • the number of cutting grooves of the cutting wheel is not limited to two.
  • the first wire The groove and the second wire groove need not be adjacent cutting wire grooves on the cutting wheel, but only when they are different cutting wire grooves.
  • the silicon rod processing equipment to which the wire cutting device is applied can be silicon rod square-out equipment, silicon rod cutting equipment, silicon rod cutting and grinding integrated equipment, etc.
  • the wire cutting of this application is applied to silicon rods.
  • the prescription equipment is taken as an example for description, but it is not used to limit the application scenarios of the wire cutting device of this application.
  • FIG. 23 shows a schematic structural diagram of the wire cutting device of this application in an embodiment
  • FIG. 17 shows that the wire cutting device of this application is applied to a silicon rod in an embodiment.
  • the wire cutting device includes a cutting frame 20 and at least one wire cutting unit 21.
  • the cutting frame 20 is installed on the machine base.
  • the cutting frame 20 is installed on both ends of the machine base to ensure the cutting line formed on the wire cutting unit 21 of the cutting frame 20.
  • the saw can cover different processing stations.
  • the cutting frame 20 is a column arranged at both ends of the base, and in the silicon rod square-out equipment, a plurality of silicon rods are provided on the base. Structure, the span of the wire cutting unit 21 includes each silicon rod carrying structure in the cutting area.
  • the wire cutting unit 21 includes a plurality of cutting wheels 211, at least one transition wheel 212, a cutting wire 213, and at least one displacement mechanism 215.
  • the wire cutting unit 21 includes a first-direction mounting beam 214, and both ends of the mounting beam 214 are movable. Connected to the cutting frame 20, a plurality of cutting wheels 211 are sequentially arranged on each mounting beam 214. That is, the one-line cutting unit 21 is composed of a plurality of cutting wheels 211, a cutting line 213, and a supporting structure of the cutting wheel 211 arranged in the same direction (or the same straight line); the plurality of cutting wheels 211 are arranged along the direction in which the mounting beam 214 is arranged. It is the wheel surface of the cutting wheel 211 (or the plane where the cutting line groove is located) along the direction of the mounting beam 214 (that is, the first direction).
  • the wire cutting device when the wire cutting device is provided with a plurality of wire cutting units 21, different wire cutting units 21 are located on different straight lines, as shown in FIG. 23, the two wire cutting units 21 are parallel respectively, In some examples, the extension directions of different wire cutting units 21 may also intersect.
  • the first direction is the direction in which the multiple cutting wheels 211 in the wire cutting unit 21 are set, for example, the direction of the wire cutting unit 21 in some examples.
  • the cutting wire saw formed by the cutting wire 213 around the cutting wheel 211 is also the first direction;
  • the second direction is the orthogonal direction of the first direction, and the at least one pitch adjusting mechanism drives the at least one A wire cutting unit 21 moves in the second direction, that is, the cutting wire saw in the wire cutting unit 21 moves in its orthogonal direction.
  • the at least one transition wheel 212 is used to realize direction guidance or tension adjustment when the cutting line 213 is wound around different cutting wheels 211.
  • a wire cutting unit 21 is taken as an example for description.
  • the wire cutting unit 21 includes at least one transition wheel 212, and the at least one transition wheel 212 can be movably disposed on a carrier that carries a plurality of cutting wheels 211.
  • the plurality of cutting wheels 211 need to be attached to the carrier provided by the wire cutting unit 21.
  • the plurality of cutting wheels 211 belonging to the same wire cutting unit 21 are installed in the installation along the first direction.
  • the two ends of the mounting beam 214 can be movably connected to the cutting frame 20, and each mounting beam 214 is provided with a plurality of cutting wheels 211 in sequence. That is, the one-line cutting unit 21 is composed of a plurality of cutting wheels 211 arranged in the same direction (or the same straight line), a cutting line 213, and a mounting beam 214 on which the cutting wheels 211 are arranged.
  • the multiple cutting wheels 211 in the wire cutting unit 21 are installed on the cutting frame 20 through a mounting frame, a connecting plate, or a frame.
  • the wire cutting unit 21 provides The carriers of the plurality of cutting wheels 211 may be in different forms, which are not limited in this application.
  • a plurality of cutting wheels 211 in the same wire cutting unit 21 are arranged on a mounting beam 214, and the mounting beam 214 is arranged along the first direction and arranged on the at least one displacement mechanism.
  • the positioning mechanism 215 controls the displacement of the transition wheel 212, which can realize that the current wire groove cut and wound in the at least one transition wheel 212 moves in the second direction from the first wire groove corresponding to the cutting wheel 211 to corresponding The second wire groove of the cutting wheel 211.
  • changing the position of the cutting groove corresponding to the wire groove of the at least one transition wheel 212 can realize the slot change of the cutting line 213 on the cutting wheel 211 without adjusting the transition wheel 212, which can effectively simplify Change slot operation.
  • the process of changing the groove can be completed under the condition that the wire groove wound by the cutting wire 213 does not change.
  • the transition wheel 212 is a single wire groove transition wheel 212.
  • the at least one transition wheel is detachably provided in the wire cutting unit.
  • the transition wheel can be set as a replaceable transition wheel, for example, the axle corresponding to the transition wheel is provided in the wire cutting unit, and the tread of the transition wheel is detachably sleeved on the transition wheel corresponding
  • the transition wheel tread can be set as a consumable transition wheel made of plastic material. After the transition wheel is worn out in use, the transition wheel can be disassembled and replaced with a new one.
  • transition wheel can also be integrally detachably provided on the transition wheel support of the online cutting unit,
  • the material of the transition wheel can also be rubber or similar materials, which is not limited in this application.
  • the transition wheel when the transition wheel is a consumable transition wheel, the transition wheel can be set as a single wire groove transition wheel.
  • the transition wheel can also be configured as a transition wheel with at least two wire grooves.
  • the number of wire grooves in the transition wheel can be determined based on the positional relationship between the transition wheel and the cutting wheel and the winding method of the cutting line.
  • the wire wheel is set such that the projection of the plane where the wire groove is located on the horizontal plane is along the first direction, There is a second direction transition offset between different wire grooves.
  • the transition offset between adjacent wire grooves in the transition wheel is equal to the cutting offset between adjacent cutting line grooves in the cutting wheel; in this example, the cutting wheel and The wire wheel on-line cutting unit can be set in the form of a one-to-one correspondence between the wire groove and the cutting wire groove (the correspondence means that the cutting wire groove and the wire groove are coplanar), and the number of wire grooves of the transition wheel is equal to the number of cutting wheels. Can not wait.
  • the wire cutting unit can be configured in different forms.
  • this application provides The wire cutting unit is applied to the following embodiments in the silicon rod square-making equipment:
  • a plurality of cutting wheels belonging to the same wire cutting unit form at least two cutting wheel groups in a paired manner, and there are two adjacent cutting wheel groups in the two adjacent cutting wheel groups.
  • There is a transition wheel the cutting line is wound on the cutting wheel and the transition wheel in sequence to form a cutting wire saw between the two cutting wheels in each cutting wheel group, wherein the cutting line is wound around
  • two adjacent cutting wheels in the two adjacent cutting wheel groups are passed through the cutting line groove of the cutting wheel behind in the previous cutting wheel group, they pass through the wire groove of the transition wheel and then pass into the next one.
  • the cutting groove of the cutting wheel in front of the cutting wheel group.
  • FIG. 18 shows a schematic diagram of the wire cutting device of this application applied to a silicon rod square-out device in an embodiment
  • FIG. 19 shows a wire cutting unit in the wire cutting device.
  • the wire cutting unit 21 in the wire cutting device is provided with 4 cutting wheel sets.
  • a transition wheel 212 is provided between two adjacent cutting wheel sets.
  • the cutting line 213 is wound on the cutting wheel 211 and the transition wheel 212 in sequence to connect the two cutting wheels of each cutting wheel set.
  • a cutting wire saw is formed on the 211, wherein the cutting wire 213 is wound by the cutting wheel 211 of the previous cutting wheel group when it is wound around the two adjacent cutting wheels 211 of the two adjacent cutting wheel groups.
  • the cutting line groove of ⁇ is passed into the cutting line groove of the preceding cutting wheel 211 in the next cutting wheel group.
  • every two adjacent cutting wheel sets share the same transition wheel 212 for guiding, which can reduce the length of the cutting line 213 used for tension adjustment and guiding, so that the cutting line 213 is used to form the cutting of the cutting wire saw.
  • the length ratio of the wire 213 is increased, while simplifying the winding method, the utilization rate of the cutting wire 213 is improved, and the production cost is reduced.
  • any cutting wire saw can be used to correspond to 1 (the embodiment shown in Figure 18), 2, 3, 4, etc. silicon rods.
  • the silicon rod bearing structure is cut.
  • the number of silicon rod bearing structures corresponding to each cutting wire saw can be selected according to the actual situation , In order to stabilize the processing quality.
  • the multiple cutting wheels 211 belonging to the same wire cutting unit 21 include a first cutting wheel 211, a tail cutting wheel 211, and the first cutting wheel 211 and the tail cutting wheel 211.
  • At least one intermediate cutting wheel 211 between the at least one intermediate cutting wheel 211 is also provided with a transition wheel 212 on the side of the at least one intermediate cutting wheel 211, the transition wheel 212 has at least two wire grooves, the cutting wire 213 is sequentially wound around
  • the cutting wheel 211 and the transition wheel 212 are used to form a cutting wire saw on any two adjacent cutting wheels 211, wherein when the cutting wire 213 is wound around the middle cutting wheel 211, the cutting wire 213 is cut by the middle cutting wheel 211
  • One of the at least two cutting grooves on the wheel 211 passes through and passes through the transition wheel 212 on the side by the other of the at least two cutting grooves on the intermediate cutting wheel 211.
  • the cutting offset corresponds
  • the transition wheel and the at least one displacement mechanism can be directly connected or indirectly connected.
  • each of the transition wheels is provided on a bracket, and the bracket moves along the second direction with the transition wheel through the at least one displacement mechanism.
  • the wire cutting unit is provided with a bracket for carrying the transition wheel, the bracket is movably arranged on the mounting beam of the wire cutting unit, and the bracket is driven by the at least one shift mechanism Moving in the second direction, the transition wheel provided on the support follows the support to move in the second direction relative to the mounting beam.
  • FIG. 24 shows a schematic diagram of the structure of the transition wheel and the bracket in an embodiment of the wire cutting device of the present application.
  • the bracket 2121 used to set the transition wheel 212 can be set as a triangular bracket or a truss structure, of course, the bracket 2121 can also be set as other structures such as a vertical bearing plate, etc.
  • the transition wheel 212 It is rotatably arranged on the bracket 2121. When the at least one displacement mechanism drives the bracket 2121 to move in the second direction, the transition wheel 212 carried by the bracket 2121 can be driven to follow the movement.
  • the at least one transition wheel is equipped with mutually independent shift mechanisms, and each transition wheel is driven by a corresponding shift mechanism to move in the second direction; or, the at least one transition wheel
  • the brackets are connected together by connecting beams, and the connecting beams move along the second direction with the at least one transition wheel through the at least one displacement mechanism.
  • each of the at least one transition wheel may be configured with a shift mechanism to independently drive the corresponding transition wheel to move in the second direction, and the shift mechanism may be connected to the transition wheel support; for example,
  • the brackets of the at least one transition wheel are connected together by a connecting beam, and the specific form of the connecting beam is not limited by the beam structure.
  • the connecting beam may be a beam body, a truss structure, a frame structure, etc., and the connecting beam Only when the brackets of the different transition wheels in the wire cutting unit are connected, the at least one displacement mechanism drives the connecting beam to move in the second direction, and each transition wheel and its relative fixed by the connecting beam can be realized.
  • the corresponding support follows the connecting beam to move in the second direction.
  • the shifting mechanism is used to drive the at least one transition wheel to move in the second direction, and at the same time, the shifting mechanism can also movably set the at least one transition wheel in the wire cutting unit .
  • the displacement mechanism includes: a displacement guide rail arranged along the second direction; and a power source for driving the at least one transition wheel to move along the displacement guide rail.
  • FIG. 25 shows a schematic diagram of the enlarged structure at C in FIG. 23.
  • the displacement guide rail 2151 can be arranged on the mounting beam, for example, and used to carry the transition wheel 212 so that the transition wheel 212 is driven by the power source along the guide rail. Move; or used to carry the transition wheel bracket 2121 or the connecting beam 2122 connected to each transition wheel bracket 2121, correspondingly, the power source can drive the transition wheel 212 on the bracket 2121 or the connecting beam 2122.
  • the transition wheel 212, the bracket 2121 or the connecting beam 2122 can be provided on the shift guide rail 2151 through a sliding block, for example, under the action of a power source, the transition wheel 212 carried on the shift guide rail 2151
  • the bracket 2121 or the connecting beam 2122 can be displaced in the second direction under the restriction of the displacement guide 2151.
  • the shift mechanism corresponds to a transition wheel
  • the power source corresponds to the transition wheel provided on the driving shift guide rail
  • the shift guide rail is correspondingly provided with the connecting beam
  • the number of the displacement guide rails can be one, two, three, etc. In actual scenes, the displacement can be determined comprehensively based on factors such as the span length of the connecting beam and the total weight of the connecting beam and the transition wheel carried by it. Number of rails.
  • the power source is a cylinder assembly, including a cylinder or a hydraulic pump, and a telescopic rod; wherein the telescopic rod is connected to the bracket of the transition wheel or the connecting beam.
  • the telescopic rod is arranged in the second direction, one end of the telescopic rod is connected to the cylinder or the hydraulic pump, and the other end, the free end, is connected to the bracket of the transition wheel or the connecting beam.
  • the end is driven by a cylinder or a hydraulic pump to expand and contract, that is, move forward or backward in the second direction, thereby driving the transition wheel bracket or the connecting beam connected to the free end to advance or retreat in the second direction.
  • the position of the wire groove of the transition wheel corresponding to the wheel bracket or the connecting beam thus moves relative to the cutting groove in the second direction.
  • the current wire groove of is moved in the second direction from the first wire groove corresponding to the cutting wheel to the second wire groove corresponding to the cutting wheel.
  • the power source includes: a screw rod and a driving source; wherein the screw rod is connected to the bracket of the transition wheel or the connecting beam.
  • the screw rod is arranged in the second direction, one end of the screw rod is connected to the driving source to rotate along the screw shaft under the driving of the driving source, and the other end of the screw rod is screwed to the transition wheel support or
  • the connecting beam is used to convert the rotation driven by the driving source into a linear motion along the setting direction of the threaded rod by the threaded rod, and the transition wheel support or the connecting beam is driven by the threaded rod to move along the shift guide rail.
  • one end of the screw rod is connected to the driving source, and the other end is connected to the transition wheel bracket or the connecting beam, and the screw rod is driven by the driving source to move in the second direction, for example, the screw rod is connected to
  • the cylinder piston rod is also connected to other mechanisms that can generate linear motion.
  • the screw rod is driven by the driving source to linearly move in the second direction and drives the bracket or connecting beam of the connected transition wheel to move in the second direction.
  • the at least one transition wheel can move in the second direction under the action of the at least one shift mechanism, and by controlling the moving distance of the at least one transition wheel, the at least one transition wheel can be cut and wound.
  • the current wire groove moves in the second direction from the first wire groove corresponding to the cutting wheel to the second wire groove corresponding to the cutting wheel, so that the cutting wheel can be changed grooves, and there is no need to switch grooves. Transitional slot changing and calibration are performed, and the slot changing process is simplified.
  • the wire cutting device further includes: at least one pitch adjustment mechanism, which is provided on the at least one wire cutting unit, and is used to drive the plurality of cutting wheels in the at least one wire cutting unit along the second direction. Move to adjust the cutting position of the at least one wire saw in the at least one wire cutting unit, or to change the cutting wire around the cutting grooves of the multiple cutting wheels in the at least one wire cutting unit.
  • at least one pitch adjustment mechanism which is provided on the at least one wire cutting unit, and is used to drive the plurality of cutting wheels in the at least one wire cutting unit along the second direction. Move to adjust the cutting position of the at least one wire saw in the at least one wire cutting unit, or to change the cutting wire around the cutting grooves of the multiple cutting wheels in the at least one wire cutting unit.
  • the wire cutting device can switch the cutting wire between different cutting grooves of the cutting wheel based on the at least one pitch adjustment mechanism, or adjust the position of the cutting wire saw to change the cutting position (or processing specification) relative to the silicon rod .
  • the wire cutting unit 21 can be provided on the cutting frame 20 by a wire cutting support 24, the wire cutting support 24 is provided on the cutting frame 20 and includes a guide rail arranged along the second direction
  • the wire cutting unit 21 is provided on the guide rail of the wire cutting support 24 to form a degree of freedom of movement in the second direction; of course, the wire cutting support 24 can also be provided with a guide groove in the second direction,
  • the second-direction sliding rod or other second-direction limiting structure or guiding structure is used to set the at least one wire cutting unit 21, which is not limited in this application.
  • the at least one pitch adjusting mechanism 23 adjusts the position of the wire cutting unit 21 in the second direction on the wire cutting support 24 by this.
  • the wire cutting device can realize the cutting processing of the silicon rod based on the lifting movement of the wire cutting unit 21 along the cutting frame 20, and the control of the cutting specification is achieved by adjusting the relative position between the cutting wire saw and the silicon rod in the second direction. . 17 and 26 in combination, when the silicon rod is placed on the silicon rod carrying structure, the position is fixed, and the at least one wire cutting can be adjusted by moving the cutting wire saw in the second direction through the pitch adjusting mechanism 23
  • the cutting position of at least one wire saw in the unit 21 can be used to control the cutting amount of the silicon rod.
  • the cutting line can be changed grooves and the position of the cutting wire saw in the second direction before and after the groove change is controlled to remain unchanged.
  • the wire cutting device includes a single wire cutting unit
  • the pitch adjusting mechanism includes: a screw rod arranged in a second direction and threadedly connected to the single wire cutting unit; and a driving source for driving the single wire cutting unit. The screw rotates.
  • the single wire cutting unit is a wire cutting unit
  • the single wire cutting unit in the wire cutting device includes a plurality of cutting wheels arranged along a first direction, and the cutting wire is wound around the plurality of cutting wheels to form at least one cutting Wire saw, and the at least one cutting wire saw is along the same straight line direction.
  • the screw rod of the pitch adjusting mechanism has a distal end and a proximal end.
  • the proximal end of the screw rod can be connected to a driving source and rotated under the driving of the driving source, and the distal end of the screw rod is threadedly connected to the
  • the single-wire cutting unit by means of the connection between the two ends of the screw, the screw can rotate based on the drive source transmission and convert the rotation of the screw into an axial displacement by means of a threaded connection.
  • the axial displacement direction is the setting direction of the screw.
  • the second direction; the single-wire cutting unit can be displaced in the second direction by driving the lead screw in the pitch adjusting mechanism, and the single-wire cutting unit can be displaced in the second direction when the lead screw is driven to rotate in a different direction Forward or backward.
  • the wire cutting device includes a single wire cutting unit; the pitch adjusting mechanism includes: a telescopic member arranged in a second direction and associated with the single wire cutting unit; a driving source for driving the telescopic The piece telescopically moves in the second direction.
  • the telescopic element may be configured as a rod structure and the extension direction of the rod is the second direction.
  • the telescopic element can telescopically move along its extension direction under the driving of a driving source, and one end of the telescopic element may be connected to the driving source,
  • the retractable free end is associated with the single wire cutting unit, and can drive the single wire cutting to move in the second direction under the action of a driving source.
  • the telescopic member is, for example, an electric telescopic rod, or a connecting rod connected to the cone rod of the cylinder, and the cylinder can be used as a driving source, which is not limited in this application.
  • the manner in which the telescopic rod is connected to the single-wire cutting unit may be linear connection or indirect connection, for example, it may be directly connected to the single-wire cutting unit mounting beam, or indirectly connected to the single-wire cutting unit through a support or a bearing. It should be understood that the expansion or contraction of the telescopic element corresponds to the advancement or retreat of the single-wire cutting unit in the second direction.
  • the association may be realized by one or more of engagement, screw locking, bonding, and welding.
  • the telescopic rod may be The wire cutting unit is associated by one or more of snapping, screw locking, bonding, and welding; of course, the realization of the association is not limited to this, but is intended to be in the second direction The transmission.
  • the wire cutting device includes a single wire cutting unit; the pitch adjusting mechanism includes: a rack arranged on the single wire cutting unit along a second direction; a transmission gear meshing with the rack; and driving The source is used to drive the transmission gear to rotate.
  • the transmission gear is driven by the drive source to rotate, and the rack meshed with the transmission gear moves in the direction of the rack step accordingly.
  • the drive source can be moved by matching the rack and the transmission gear.
  • the rotational movement of the drive is transformed into a line conveying along the direction of the rack, and the rack is provided in the single-wire cutting unit along the second direction, which can drive the single-wire cutting unit to move in the second direction.
  • the rotation direction of the transmission gear is controlled by the driving source to switch the displacement direction of the single-wire cutting unit forward or backward in the second direction.
  • the pitch adjustment mechanism may be set to one or more.
  • the single wire cutting unit has a large span in the first direction, it is difficult to drive the single wire by setting a pitch adjustment mechanism.
  • multiple pitch adjustment mechanisms can be set to drive.
  • the single-wire cutting unit is provided with a distance adjustment structure at both ends of the single-wire cutting unit along the first direction or arranged at equal intervals along the first direction.
  • the corresponding multiple distance adjustment mechanisms on the single-wire cutting unit can cooperate to ensure that the multiple distance-adjusting mechanisms drive the multiple distance adjustment mechanisms of the single-wire cutting unit with the same displacement (size and direction).
  • the wire cutting wheel moves in the second direction.
  • the wire cutting device includes a first wire cutting unit and a second wire cutting unit that are arranged opposite to each other in a second direction, and at least one of the first wire cutting unit and the second wire cutting unit passes through the
  • the at least one pitch adjusting mechanism drives to move in the second direction, and is used to adjust the wire saw distance between the at least one cutting wire saw in the first wire cutting unit and the at least one cutting wire saw in the second wire cutting unit , Or change the cutting line around the cutting line grooves of the multiple cutting wheels in the first line cutting unit and/or the cutting line grooves of the multiple cutting wheels in the second line cutting unit.
  • the wire cutting device includes two wire cutting units such as a first wire cutting unit and a second wire cutting unit, for example, in the embodiment shown in FIG. 23, the first wire cutting unit and the second wire cutting unit They are arranged parallel to each other along the first direction, and the cutting wire saws in the first wire cutting unit and the second wire cutting unit are also parallel to each other.
  • the wire cutting device can be used in, for example, a silicon rod squaring equipment.
  • the silicon rods on each silicon rod carrying structure in the silicon rod squaring equipment correspond to the first cutting unit and the second cutting in the cutting area.
  • the cutting wire saw of the unit can form two parallel cutting planes on the surface of the silicon rod by one lifting and cutting.
  • the cutting amount of the silicon rod can be controlled.
  • the at least one pitch adjusting mechanism can be set to be connected to the first wire cutting unit or the second wire cutting unit, or to associate the first wire cutting unit and the second wire cutting unit at the same time, so as to drive the connected or associated The plurality of cutting wheels in the first wire cutting unit or/and the second wire cutting unit move in the second direction, and realize the adjustment of at least one wire saw in the connected or associated first wire cutting unit or/and the second wire cutting unit Cutting position, or changing the cutting line grooves of multiple cutting wheels in the connected or associated first wire cutting unit or/and second wire cutting unit.
  • the pitch adjusting mechanism includes: a screw rod arranged in a second direction and threadedly connected to the first wire cutting unit or the second wire cutting unit; and a driving source for driving the wire The rod turns.
  • the screw rod and the driving source drive the first wire cutting unit or the plurality of cutting wheels in the second wire cutting unit to move in the second direction in a manner similar to the foregoing embodiment, and the first cutting unit is driven by the pitch adjusting mechanism
  • the second wire cutting unit can be regarded as a single wire cutting unit, which will not be repeated here. It should be understood that by providing the pitch adjustment mechanism on any wire cutting unit, the parallel cutting wire saw distance formed between the first wire cutting unit and the second wire cutting unit can be increased and decreased, and the wire cutting device is sufficient. Cut the silicon rods into different specifications.
  • the distance adjustment mechanism includes: a telescopic element, which is arranged in a second direction and is associated with the first wire cutting unit or the second wire cutting unit; and a driving source for driving the telescopic element Telescopic movement in the second direction.
  • the first cutting unit or the second wire cutting unit provided with the pitch adjusting mechanism can be regarded as a single wire cutting unit, and the specific implementation manner can refer to the foregoing embodiment, which will not be repeated here.
  • the pitch adjusting mechanism includes: a rack, which is in a second direction and is associated with the first wire cutting unit or the second wire cutting unit; a transmission gear, which meshes with the rack; The source is used to drive the transmission gear to rotate. Through the meshing transmission gear and the rack, the drive source can control the rack to move linearly along the rack direction, and the first wire cutting unit or the second wire cutting unit associated with the rack can use the tooth The strip moves to move in the second direction.
  • the pitch adjusting mechanism includes: a bidirectional screw rod arranged in a second direction and threadedly connected to the first wire cutting unit and the second wire cutting unit; and a driving source for driving the The screw rod rotates to make the first wire cutting unit and the second wire cutting unit move toward or away from each other in a second direction.
  • the two-way screw is a double-threaded screw, the two ends of the two-way screw are respectively provided with threads and the thread directions are opposite, and the driving source can be arranged at either end of the two-way screw. Drive the two-way screw to rotate along the screw shaft.
  • the axial direction is the second direction in which the bidirectional screw rod is set.
  • the first wire cutting unit and the second wire cutting unit can move toward or away from each other.
  • the pitch adjusting mechanism includes: a first rack, which is in the second direction and is associated with the first wire cutting unit; and a second rack, which is in the second direction and is associated with the second wire cutting unit Associated; transmission gear, meshed with the first and second racks; drive source, used to drive the transmission gear to rotate so that the first wire cutting unit and the second wire cutting unit along the second direction Move towards or away from each other.
  • the first rack is linked to the first wire cutting unit
  • the second rack is linked to the second wire cutting unit
  • the transmission gear is connected to a driving source such as a power output of a servo motor.
  • Shaft (not shown), and meshes with the first rack and the second rack, for driving the first wire cutting unit and the second wire cutting unit to move toward each other when rotating forward
  • the closing action drives the first wire cutting unit and the second wire cutting unit to move back when rotating in the reverse direction.
  • the first rack and the second rack can be meshed on both sides of the transmission gear, so that when the transmission gear rotates, the linear velocities at the first rack and the second rack are in opposite directions, and the drive motor drives the transmission
  • the gear rotates the first rack and the second rack move toward each other when the transmission gear rotates forward, which drives the first wire cutting unit and the second wire cutting unit to move toward each other.
  • the transmission gear is driven to rotate in the reverse direction, the first rack and the second tooth
  • the strip moves back to drive the first wire cutting unit and the second wire cutting unit to move back.
  • the transmission gear may be axially connected to the power output shaft of the driving source, or may be indirectly connected to the power output shaft, for example, the shaft is connected to the rotating part connected to the power output shaft.
  • one or more pitch adjustment mechanisms may be provided in the wire cutting device, each of which is connected to the first wire cutting unit and the second wire cutting unit, and the number of the distance adjustment mechanisms may be based on The driving power requirements, the force state of the transmission mechanism such as the screw rod, the smoothness of the movement of the multiple cutting wheels in the driving wire cutting unit, and the equipment space of the wire cutting device are comprehensively determined. For example, when the first wire cutting The unit and the second wire cutting unit have a small span in the first direction. Only one pitch adjustment mechanism can be used to adjust the cutting position of the cutting wire saw in the cutting unit or to change the groove of the cutting line.
  • the pitch adjusting mechanism drives the first wire cutting unit and the second wire cutting unit to move toward or away from each other in the second direction; for another example, when the first wire cutting unit and the second wire cutting unit are in the first direction
  • the span of the wire cutting unit is longer, and the wire cutting unit needs to be driven by a larger power and the power needs to be within the force strength range of the transmission connecting parts such as the screw rod or the rack.
  • the wire cutting device can be provided with multiple pitch adjustment mechanisms , The multiple pitch adjusting mechanisms cooperate to ensure that the multiple pitch adjusting mechanisms drive the multiple wire cutting wheels of the first wire cutting unit and the second wire cutting unit with the same displacement (size and direction) in the first The two directions move towards or away from each other.
  • the pitch adjusting mechanism is a servo motor provided in the at least one wire cutting unit.
  • a servo motor is provided on at least one wire cutting unit or each wire cutting unit of the wire cutting device, and the servo motor controls the displacement of the corresponding wire cutting unit in the second direction.
  • the wire cutting unit can pre-determine the cutting offset for slot change or the adjustment amount of the cutting line to change the cutting position, and the precise positioning function of the servo motor drives the multiple cutting wheels in the wire cutting unit to a preset displacement amount Move in the second direction.
  • the wire cutting device is provided with a single wire cutting unit, and the single wire cutting unit is provided with a servo motor to drive the single wire cutting unit to move in the second direction; for another example, the wire cutting device is provided with a first The wire cutting unit and the second wire cutting unit, the first wire cutting unit or/and the second wire cutting unit are relatively independently moved in the second direction under the drive of their corresponding servo motors.
  • the servo motor can also be replaced with a traveling motor and a traveling screw, and the wire cutting unit can be driven by the traveling motor to move on the wire cutting support in the second direction.
  • the at least one pitch adjusting mechanism drives the lower thread cutting unit to move in a second direction, and the at least one transition wheel and a plurality of cutting wheels together follow the mounting beam to move in the second direction
  • the at least one transition wheel and the plurality of cutting wheels are relatively stationary, that is, the positional relationship between the transition wheel and the cutting wheels remains unchanged.
  • the pitch adjusting mechanism is used to adjust the cutting position of at least one wire saw in the at least one wire cutting unit, the positional relationship of the cutting wire saw relative to the cutting wheel and the transition wheel remains unchanged, that is, it only occurs in the second direction. , You can adjust the cutting position.
  • FIG. 27 shows a top view of the wire cutting device in an embodiment of this application
  • FIG. 28 shows a side view of the wire cutting device in an embodiment of this application
  • FIG. 29 Shown as a schematic diagram of the enlarged structure at E in Figure 28.
  • the at least one pitch adjusting mechanism drives the wire cutting unit 21 to move in the second direction
  • the at least one transition wheel 212 and the plurality of cutting wheels 211 The joint follow the mounting beam 214 to move in the second direction (in the direction of the arrow as shown in FIG. 27)
  • the at least one shifting mechanism 215 drives the at least one transition wheel 212 or is used to connect the transition wheel bracket 2121
  • the connecting beam 2122 moves in the second direction (in the direction of the arrow shown above the bracket 2121 in FIG.
  • the wire groove of the transition wheel 212 can be switched to correspond to different cutting grooves.
  • the distance that the distance adjusting mechanism drives the wire cutting unit 21 to move in the second direction is the same as the distance that the at least one shifting mechanism 215 drives the at least one transition wheel 212 to move in the second direction.
  • the silicon rod can be cut according to the preset before the slot change.
  • the specification continues to perform the silicon rod cutting.
  • the groove changing adjustment of the transition wheel 212 and the position calibration operation of the cutting line 213 and the cutting wheel 211 can be omitted during the groove changing process in this example.
  • the cutting line slot corresponding to the cutting line before and after the slot change can be determined in advance.
  • the position of the cutting line before the slot change is the cutting line slot a1, and the cutting line is wound around the cutting line slot a2 after the slot change.
  • the cutting offset between the cutting groove a1 and the cutting groove a2 determines the displacement of the plurality of cutting wheels in the at least one pitch adjusting mechanism driving the cutting wheels in the second direction, that is, the displacement is set to
  • the cutting offset between the cutting line groove a1 and the cutting line groove a2 can be used to realize the replacement of the cutting line groove a1 to the cutting line groove a2 for the cutting line; it should be noted that the at least one pitch adjusting mechanism drive line
  • the direction in which the plurality of cutting wheels in the cutting unit move in the second direction is the direction in which the cutting line groove a2 points to the cutting line groove a1; at the same time, the shifting mechanism drives the at least one transition wheel to move relative to the wire cutting unit in the second direction ,
  • the moving distance is the cutting offset between the cutting slot a1 and the cutting slot a2
  • the displacement direction of the at least one transition wheel relative to the wire cutting unit is the direction in which the cutting slot a1 points to the cutting slot a2, Before and after the
  • the wire cutting unit includes at least one shift mechanism for driving the at least one transition wheel to move in the second direction, so that the at least one transition wheel The current wire groove wound by the middle warp is moved in the second direction from the first wire groove corresponding to the cutting wheel to the second wire groove corresponding to the cutting wheel.
  • the wire cutting device provided in the present application can use the at least one shifting mechanism to adjust the slot position of the cutting wire around the wire groove during the slot changing process, and the adjustment and calibration of the transition wheel can be omitted after the slot is changed. ;
  • the transition wheel can adopt a single-slot transition wheel to realize the slot change.
  • the transition wheel can also be set as a replaceable consumable transition wheel. When the wire groove of the transition wheel is worn out, it can be replaced directly The transition wheel is sufficient, which simplifies the equipment maintenance process for equipment wear caused by cutting.
  • the present application also provides a silicon rod processing equipment, which includes a machine base, a silicon rod carrying structure, and a wire cutting device according to any one of the embodiments shown in 23 to 29.
  • the machine base has a silicon rod processing platform
  • the silicon rod carrying device is provided on the silicon rod processing platform and is used to carry the silicon rods to be cut.
  • the silicon rod processing equipment is a silicon rod squaring equipment
  • the silicon rod supporting device is a silicon rod supporting structure.
  • the silicon rod processing platform may be provided with one or more silicon rod supporting structures, and each silicon rod supporting structure may be used to carry a single silicon rod.
  • the silicon rod processing platform in the cutting area The number of silicon rod bearing structures can correspond to the number of wire saws in the wire cutting unit of the wire cutting device.
  • a wire cutting unit 21 in the wire cutting device includes a multi-segment cutting wire saw to correspond to a plurality of silicon rod supporting structures 11 respectively.
  • the silicon rod processing platform is set on the base 10 through a worktable conversion mechanism.
  • the worktable conversion mechanism may be, for example, a rotation mechanism or a translation mechanism.
  • the rotation mechanism may include, for example, a rotation shaft and a rotation drive unit, the rotation shaft is axially connected to the silicon ingot processing platform, and the rotation drive unit drives the rotation shaft to rotate to drive the silicon ingot processing platform to rotate.
  • the translation mechanism may include, for example, a translation guide rail, a sliding block and a translation drive unit.
  • the translational guide rail is laid on the machine base, the sliding block is arranged at the bottom of the silicon ingot processing platform and is adapted to the translational guide rail to provide translational guidance for the silicon ingot processing platform, and the translational driving unit is used for driving
  • the silicon rod processing platform moves along the translational guide rail so that the silicon rod bearing structure is switched between the cutting area and the loading and unloading area; in other embodiments, the translation mechanism may also be geared, specifically, the The translation mechanism includes a translation rack and a rotating gear driven by a motor that is adapted to the translation rack.
  • the translation rack is arranged at the bottom of the silicon rod processing platform, and may be, for example, at least one rack with a certain length.
  • each rack is fitted with at least two rotating gears arranged at intervals, and the motor drives the rotating gears to rotate to drive the silicon ingot bearing structure on the silicon ingot processing platform in the cutting area and loading and unloading. Zone switch.
  • the silicon rod squaring equipment may be, for example, the silicon rod squaring equipment of the embodiment shown in FIG. 17 or FIG. 18. Of course, it may also be other types of silicon rod squaring equipment, for example, the center line of the silicon rod squaring equipment
  • the cutting device can be set as a single-wire cutting unit; for another example, the cutting wire saw in the wire cutting unit of the wire cutting device of the silicon rod square rooting equipment is one segment. Of course, the cutting wire saw can also be two-stage, three-stage, or four-stage. Sections, etc., are not limited in this application.
  • the number of silicon ingot carrying structures on the silicon ingot processing platform can be changed accordingly; for another example, each of the wire cutting units in the wire cutting device of the silicon ingot squaring equipment
  • the number of silicon rod bearing structures corresponding to a cutting wire saw can be one, two, three, and so on.
  • the silicon rod squaring equipment is provided with the wire cutting device described in any one of the embodiments shown in FIGS. 23 to 29.
  • the cutting wheel in the silicon rod squaring equipment performs the square extraction operation to make
  • the shifting mechanism can be used to omit the adjustment of the transition groove and the transition wheel during the groove changing process, so that the groove changing process is easier; some embodiments are provided in Figures 23 to 29
  • at least one pitch adjusting mechanism may be further provided, and the cutting position of the cutting wire saw can be adjusted based on the at least one pitch adjusting mechanism to determine the cutting amount of the silicon rod, and
  • the cutting wheel of the silicon rod square-cutting equipment can change the slot position of the cutting line based on the at least one pitch adjustment mechanism after the groove is worn out during the long-term cutting operation, so as to ensure that the silicon rod square-cutting equipment continues the square-cutting operation At the same time, when the at least one pitch adjusting mechanism and the at least one shifting mechanism
  • the silicon rod cutting machine when the silicon rod processing equipment is a silicon rod cutting machine, the silicon rod cutting machine includes a base, a silicon rod carrying device, and a wire cutting device.
  • the machine base has a silicon rod processing platform
  • the silicon rod carrying device is arranged on the silicon rod processing platform.
  • the silicon rod carrying device can be used to horizontally carry the silicon rods to be cut
  • the wire cutting device includes: a cutting frame arranged on the machine base; at least one wire cutting unit is movably arranged on the cutting frame;
  • the wire cutting unit includes: a plurality of cutting wheels arranged in sequence along a first direction, each cutting wheel has at least two cutting grooves; at least one transition wheel, each of the transition wheels has a wire groove; a cutting line , Sequentially winding around the plurality of cutting wheels and transition wheels to form at least one cutting wire saw; at least one shift mechanism for driving the at least one transition wheel to move in the second direction, so that the at least one transition wheel
  • the current wire groove cut and wound in the wheel moves in the second direction from the first wire groove corresponding to the cutting wheel to the second wire groove corresponding to the cutting wheel.
  • the wire cutting unit moves up and down relative to the cutting frame to realize the feed
  • the wire cutting device of the silicon rod cutting machine is provided with a plurality of parallel wire cutting units, and the plurality of parallel wire cutting units move up and down along the cutting frame, that is, in one cutting
  • the silicon rod to be cut is cut into multiple silicon rod sections.
  • the cutting slot of the at least one cutting wire saw in the wire cutting unit in the cutting wheel can be adjusted, so that the cutting wheel worn during the cutting operation can be changed after the cutting slot is replaced. Continue to use, at the same time, the process of changing the groove can be realized without adjusting the position of the cutting line on the transition wheel.
  • the arrangement of the wire cutting device of the silicon rod cutting machine and the form of the silicon rod carrying device can refer to the arrangement disclosed in Chinese Patent CN105196433B.
  • the wire cutting device of the silicon rod cutting machine includes The at least one shifting mechanism is used to drive the at least one transition wheel to move in a second direction, so that the current wire groove that has been cut and wound in the at least one transition wheel changes from corresponding to the cutting in the second direction.
  • the first wire groove of the wheel moves to the second wire groove corresponding to the cutting wheel.
  • the silicon rod cutting machine is, for example, a double silicon rod cutting device.
  • the silicon rod carrying device of the silicon rod cutting machine is provided with a first processing station and a second processing station, To respectively carry the first silicon rod to be cut and the second silicon rod to be cut.
  • FIG. 21 shows a schematic structural diagram of the wire cutting device of the silicon rod cutting machine in an embodiment.
  • the wire cutting support 24 is provided on the cutting frame 20, and at least one wire cutting unit 21 is respectively provided on both sides of the wire cutting support 24 along the first direction, located on both sides of the wire cutting support 24 The at least one wire cutting unit 21 can respectively cut the silicon rods to be cut at the first processing station and the second processing station.
  • the wire cutting unit 21 of the wire cutting support 24 includes a cutting wheel 211, a transition wheel 212, a cutting wire 213 wound around the cutting wheel 211, and at least one shift mechanism; wherein, the cutting wheel There are at least two cutting grooves on the 211, and the at least one shifting mechanism is used to drive the at least one transition wheel 212 to move in the second direction, so that the current wire groove that is cut and wound in the at least one transition wheel 212 Move in the second direction from the first wire groove corresponding to the cutting wheel 211 to the second wire groove corresponding to the cutting wheel 211.
  • the relative position between the transition wheel 212 and the cutting wheel 211 in the wire cutting unit of the silicon rod cutting machine can be adjusted in the second direction, and the wire of the transition wheel is driven by the at least one displacement mechanism
  • the grooves can be aligned to different cutting line grooves in the cutting wheel.
  • the form of the at least one displacement mechanism can also refer to the displacement mechanism described in any one of the embodiments shown in FIG. 23 to FIG. 29.
  • the wire cutting units 21 on both sides of the wire cutting support 24 can also form at least a pair of wire cutting units 21, for example, the wire cutting units 21 on both sides of the wire cutting support 24 are in one-to-one correspondence.
  • the connection forms at least a pair of wire cutting units 21, which are located on the same straight line in the first direction.
  • the transition wheels on the pair of wire cutting units 21 can be driven based on the same displacement mechanism. 212 moves in the second direction, for example, when the brackets of the transition wheels 212 of a pair of wire cutting units 21 are connected together by connecting beams; of course, the pair of wire cutting units 21 can also be driven by a plurality of displacement mechanisms, or Each transition wheel 212 is driven by a mutually independent displacement mechanism.
  • the specific form of the displacement mechanism can refer to the implementation manners provided in the embodiments shown in FIG. 23 to FIG. 29, which will not be repeated here.
  • the wire cutting unit may also be provided with the distance adjustment mechanism described in the embodiment provided in the embodiment shown in FIGS. 23 to 29; here, the distance adjustment mechanism and the shift mechanism are For the implementation manner of performing coordinated cooperation with each other to adjust the position of the cutting wire saw or to change the cutting wire around the cutting line groove in the cutting wheel, refer to the implementation manner provided in the embodiments shown in FIGS. 23 to 29.
  • the specific form of the silicon rod cutting machine is not limited to the foregoing embodiment.
  • each of the silicon rod cutting machine The cutting wire saw can cut multiple silicon rods at the same time; another example is that the wire cutting device of the silicon rod cutting machine only includes a cutting wire saw, and the cutting wire saw is used to cut a single or multiple silicon rods.
  • the silicon rod cut in one cutting operation during cutting is divided into a silicon rod section; this application is not limited, it should be noted that the wire cutting device of the silicon rod cutting machine includes the wire cutting device shown in Figure 23 to Figure 29
  • the shift mechanism described in any one of the embodiments is shown to adjust the position of the transition wheel in the wire cutting device relative to the cutting wheel in the second direction.
  • the silicon rod processing equipment is an integrated silicon rod cutting and grinding machine.
  • the silicon rod cutting and grinding integrated machine includes a base, a silicon rod carrying device, a wire cutting device, and a grinding device.
  • the machine base has a silicon rod processing platform, and in the silicon rod cutting and grinding integrated machine, the silicon rod processing platform can be set to a processing location that performs different processing functions, for example, is composed of a cutting station and a grinding station;
  • the silicon rod carrying device is used to carry the silicon rods to be processed;
  • the wire cutting device includes: a cutting frame arranged on the machine base; at least one wire cutting unit movably arranged on the cutting frame; the wire cutting unit includes: A plurality of cutting wheels arranged in sequence along the first direction, each cutting wheel has at least two cutting line grooves; at least one transition wheel, each transition wheel has a wire groove; the cutting line is sequentially wound around the A plurality of cutting wheels and transition wheels to form at least one cutting wire saw; at least one shift mechanism for driving the at least one transition wheel to move in the second direction, so that the current cutting and winding of the at least one transition wheel The wire groove moves in the second direction from the first wire groove corresponding to the cutting wheel to the second wire groove corresponding to the cutting wheel.
  • the silicon rod cutting and grinding integrated machine includes a machine base with a silicon rod processing platform;
  • the silicon rod in the first processing area of the silicon rod is cut in the first direction and the silicon rod in the second processing area of the silicon rod processing platform is cut in the second direction to form a square silicon rod;
  • the grinding device is arranged at The machine base is used to grind and chamfer the square silicon rods on the third processing position of the silicon rod processing platform;
  • a silicon rod conversion device is provided on the silicon rod processing platform, It is used for converting the silicon rods in the first processing location, the second processing location and the third processing location.
  • the wire cutting device includes: a cutting frame 20, a wire cutting support 24, a first cutting unit group, and a second cutting unit group, and the first cutting unit group and the second cutting unit group are used to respectively align The silicon rods in the first processing area and the second processing area are cut.
  • the wire cutting support 24 can be configured with the first cutting unit and the second cutting unit, that is, the first cutting unit and the second cutting unit share the wire cutting support 24. Therefore, in this embodiment, on the one hand, the cutting frame 20 and the wire cutting support 24 in the wire cutting device are arranged in a middle position between the first processing position and the second processing position. On the other hand, the wire cutting support 24 is specially designed. As shown in FIG. 22, the wire cutting support 24 in this embodiment may include a support main body and a first support side wing and a second support side wing located on opposite sides of the support main body.
  • the support body in the wire cutting support 24 is arranged at 45° to the X axis or the Y axis, and the first support side wing and the support body form an angle of 145° along the Y axis.
  • the angle between the side wings of the second support and the main body of the support is 145° and is arranged along the X axis.
  • the first cutting unit group may include at least four first cutting wheels 211a and two first transition wheels.
  • the four first cutting wheels 211a can be combined into a pair of first cutting wheel groups, that is, Two first cutting wheels 211a are arranged opposite to each other along the X axis to form a first cutting wheel group, and the two first cutting wheel groups along the Y axis form a pair of first cutting wheel groups.
  • the cutting wire 213 is sequentially wound around each first cutting wheel 211a in the first cutting unit group to form a cutting wire net. In practical applications, the cutting line 213 is sequentially wound around the four first cutting wheels 211a in the first cutting unit group to form two cutting wire saws.
  • the first transition wheel is used for reversing or tension adjustment of the cutting line 213.
  • the first transition wheel is parallel to the cutting wheel 211 of the corresponding first cutting wheel set, that is, both are parallel to the first direction. .
  • Two first cutting wheels 211a, a cutting line 213 around them, and a first transition wheel are arranged oppositely along the X axis to form a wire cutting unit.
  • the first cutting unit group Two wire cutting units 21 parallel to each other are formed.
  • the second cutting unit group may include at least four second cutting wheels 211b and two second transition wheels.
  • Two second cutting wheels 211b are arranged opposite to each other along the Y axis to form a second cutting wheel group.
  • a pair of second cutting wheel sets are formed by two second cutting wheel sets along the X axis; in practical applications, the cutting line 213 is sequentially wound around the four second cutting wheels in the second cutting unit set After 211b, two cutting wire saws are formed.
  • the two cutting wire saws are arranged along the Y-axis direction and are parallel to each other.
  • the second transition wheel corresponds to The cutting wheels 211 of the second cutting wheel set are parallel to each other, that is, they are all parallel to the first direction. Two first cutting wheels 211a, a cutting line 213 around them, and a second transition wheel are arranged oppositely along the Y axis to form a wire cutting unit. In this embodiment, the second cutting unit group Two wire cutting units 21 parallel to each other are formed.
  • first direction and the second direction are defined based on the carrier coordinate system of the wire cutting unit. Therefore, when the silicon rod processing equipment (in this example, the silicon rod cutting and grinding machine) has multiple wire cutting units The first directions corresponding to the multiple wire cuttings are not the same in the external space; correspondingly, the second direction is orthogonal to the first direction. Therefore, the driving performed by the at least one displacement mechanism The moving direction of the at least one transition wheel is orthogonal to the driven wire cutting unit.
  • the wire cutting unit and the cutting wire saw are arranged along the X axis direction, the first direction in the first cutting unit group is the X axis direction, and the second direction is the Y axis direction;
  • the wire cutting unit and the cutting wire saw are arranged along the Y axis direction, and the first direction in the second cutting unit group is the Y axis direction, and the second direction is the X axis direction.
  • the number of cutting wheels and transition wheels in any one of the wire cutting units can be changed accordingly.
  • the number of cutting wheels in one wire cutting unit can also be three. , Four, etc.
  • the number of transition wheels can also be two or more.
  • the silicon rod conversion device is provided in the center area of the silicon rod processing platform, and is used to place the silicon rods on the waiting area, the first processing area, and the second processing area on the silicon rod processing platform. , And the conversion between the third processing zone.
  • the silicon rod conversion device is rotatably arranged on the silicon rod processing platform, and the silicon rod conversion device may further include: a conveying body, which is in the shape of a disc, a square disc, or other similar shapes; and is arranged on the conveying body
  • the silicon rod positioning mechanism ie silicon rod bearing device
  • the conversion drive mechanism is used to drive the rotation of the conveying body to drive the silicon rods to be positioned by the silicon rod positioning mechanism to switch positions.
  • the silicon rod positioning mechanism further includes a rotating structure for driving the silicon rod carried on the silicon rod positioning mechanism to rotate along the silicon rod axis to adjust the cutting surface of the silicon rod.
  • the silicon rod to be cut is moved from the first cutting line in the X-axis direction of the wire cutting device at the first processing area.
  • the net is cut to form two axial cut planes along the X axis; then, the conversion drive mechanism drives the conveying body to drive the silicon rod positioning mechanism to position the silicon rods to the second processing position, which is formed by the wire cutting device along the Y axis direction.
  • each cutting wheel in the wire cutting unit has at least two cutting wire grooves.
  • any wire cutting unit of the wire cutting device further includes At least one shifting mechanism is used to drive the at least one transition wheel to move in the second direction, so that the current wire groove of the at least one transition wheel that has been cut and wound in the second direction moves from the one corresponding to the cutting wheel in the second direction.
  • the first wire groove is moved to the second wire groove corresponding to the cutting wheel.
  • the transition wheel can be a single wire groove transition wheel or a multiple wire groove transition wheel. Based on the driving action of the at least one displacement mechanism, the cutting wire is wound around the wire groove position of the transition wheel Without changing, the cutting line can be changed grooves on the cutting wheel.
  • the cutting wire wound around the cutting wheel is replaced by the shift mechanism
  • the position of the cutting line slot can make the cutting wheel multiplexed.
  • the arrangement of the displacement mechanism can refer to the displacement mechanism described in any implementation of the embodiment shown in FIG. 23 to FIG. 29.
  • the first processing location and the second processing location include two parallel wire cutting units.
  • the first processing location and the second processing location also include at least one Pitch adjustment mechanism, which can be associated with the first wire cutting unit or the second wire cutting unit of the two wire cutting units, or both the first wire cutting unit and the second wire cutting unit at the same time.
  • the mechanism can be set to, for example, the pitch adjustment mechanism described in any implementation of the embodiment shown in FIGS. 23 to 29, for example, by connecting a screw rod with the first wire cutting unit or the second wire cutting unit, or by The bidirectional screw rod is connected to the first wire cutting unit and the second wire cutting unit, or the pitch adjusting mechanism is a servo motor, etc., which will not be repeated here.
  • the first wire cutting unit or/and the second wire cutting unit may be, for example, Move along the flanks of the first support, that is, move along the second direction (Y-axis direction) in the first cutting unit group; it can be used to adjust at least one wire saw in the first wire cutting unit or/and the second wire cutting unit Cutting position, or changing the cutting line around the cutting line grooves of the plurality of cutting wheels in the first line cutting unit or/and the second line cutting unit; at least one of the at least one pitch adjusting mechanism and the line cutting unit is shifted
  • the mechanism is matched, and the slot can be changed without changing the wire slot used for winding the cutting wire in the transition wheel, and the position of the cutting wire saw in the second direction before and after the slot change is unchanged.
  • the structure of the second cutting unit group is similar to that of the first cutting unit group.
  • the main difference is that the arrangement position and direction are different in the silicon rod cutting and grinding integrated machine; but the at least one displacement mechanism at the second cutting unit group And the structure and function of the at least one distance adjustment mechanism are similar to the at least one displacement mechanism and the at least one distance adjustment mechanism in the first cutting unit group, and will not be repeated here.
  • the positional relationship between the first processing location and the second processing location can be changed.
  • the first processing location and the second processing location are set as the silicon rod conversion device carrying the silicon rod to rotate. 60° can switch between the two processing positions, and the direction of the wire cutting unit in the corresponding first cutting unit group and the second cutting unit group may also change.
  • the first cutting unit group and The wire cutting units of the second cutting unit group respectively correspond to the first direction change, but the wire cutting unit in any cutting unit group can still use at least one of the embodiments described in any one of the embodiments shown in FIGS.
  • the silicon rod In the silicon rod squaring operation, the silicon rod will form a side skin after the square cutting. Therefore, the formed side skin needs to be unloaded first.
  • Most of the existing side skin unloading methods are manually operated by the operator to remove the side skin. It is not only inefficient to remove the cut silicon rods and move them out of the silicon rod formulating equipment, but also will cause the side skins to collide with the cut silicon rods during the handling process, which increases the risk of damage to the cut silicon rods. Therefore, it is necessary to provide a silicon rod square-out equipment and a side skin unloading device applied to the silicon rod square-out equipment, so that the side skin can be unloaded in time and improve work efficiency.
  • the present application provides a side skin unloading device.
  • the side skin unloading device is provided with a side skin clamping mechanism for transferring the side skin.
  • the side skin clamping mechanism can transfer the side skin by rotating the swing arm, and can also store the side skin clamping mechanism by rotating the swing arm in the non-transported state, so that the side skin unloading device occupies less equipment space and the transfer path Simplified and improved transfer efficiency.
  • a side skin unloading device applied to a silicon rod square-cutting equipment.
  • the silicon rod square-cutting equipment includes a base, a wire cutting device, and a silicon rod bearing structure.
  • the rod bearing structure is used to carry silicon rods placed vertically, and the wire cutting device includes a wire cutting support that can be raised and lowered and a wire cutting unit provided on the wire cutting support.
  • the wire cutting unit has a cutting A wire saw, wherein the cutting wire saw cuts the silicon rod to form a cut silicon rod and a side skin;
  • the side skin unloading device includes: a side skin lifting unit for lifting the side skin so that the top of the side skin protrudes The cut silicon rod;
  • a side skin clamping unit for clamping and transporting the side skin,
  • the side skin clamping unit includes: a support column, which is arranged on the base; a first mounting part, which is arranged on On the support column; at least one set of edge skin clamping mechanisms, connected to the first mounting portion through a swing arm, for clamping the edge skin and lifting the edge skin from the cut silicon rod, and controlled Rotate around the swing arm shaft to transfer the side skins to the side skin unloading area.
  • Figure 30 shows a schematic structural diagram of the side skin unloading device of this application applied to a silicon rod square opener in an embodiment
  • Figure 31 shows the side skin unloading of this application
  • the silicon rod square-out equipment has a silicon rod carrying structure 11, which can be used to carry the silicon rods placed vertically.
  • the wire saw in the wire cutting device cuts the silicon rods, the formed edge Due to its own gravity and the limiting effect of the silicon rod supporting structure 11, it continues to stay on the silicon rod supporting structure 11 and close to the cut silicon rod. Therefore, it is necessary to make the edge skin formed after cutting and the cut silicon rod have a relative displacement.
  • the protruding parts formed by the staggered displacements clamp the side skin, and then carry out the side skin transfer.
  • the side skin lifting unit described in the present application is used to lift the side skin so that the top of the side skin protrudes from the cut silicon rod .
  • the supporting surface of the silicon rod bearing structure in the silicon rod square-out equipment equipped with the edge skin unloading device is a flat structure, and the edge skin formed after being cut may not have corresponding support.
  • the edge skin unloading device also includes a edge skin supporting mechanism for supporting the edge skin formed after the silicon rod to be cut is squared and cut ,
  • the edge leather lifting unit lifts the mechanism supported by the edge leather supporting machine.
  • the side skin top support mechanism can also be used as a component of the silicon rod square-out equipment, or, the side skin top support mechanism is not in the side skin unloading device or the silicon rod square-out equipment Necessary institutions.
  • the side leather supporting mechanism 53 includes a supporting member, and the supporting member includes a connecting member.
  • the base 531 may also be configured as a flat plate structure, a curved plate structure or other special-shaped structures that are adapted to the side surface of the silicon rod carrying structure 11, which is not limited in this application.
  • the top support portion 532 is configured as two top pillars located on both sides of the base 531, and the extension height of the top pillar is the same as the height of the bearing surface of the silicon rod supporting structure 11.
  • the top support portion 532 It can also be used as a top plate or a top rod extending upward from the base 531.
  • the supporting member can support the corresponding edge skin, thereby effectively preventing the cutting line in the wire cutting device from passing through the silicon rod to be cut.
  • the edge collapse occurs when the rod is used, and the edge skin can be prevented from falling and overturning.
  • the leather top support mechanism includes a movable support member and a locking control member.
  • the movable supporting member includes a movable base connected to one side of the silicon rod bearing structure, a top supporting portion extending upward from the movable base, and a power generating structure that provides the top supporting portion to move up and down .
  • the movable base may be, for example, a flat plate structure adapted to the side surface of the silicon rod bearing structure, but is not limited to this.
  • the movable base may also be, for example, a curved panel structure or other special shapes. structure.
  • the top support portion is at least two top rods extending upward from the movable base, but it is not limited thereto.
  • the top support portion may also be, for example, a top plate or a top post extending upward from the movable base.
  • the power generation structure includes two legs provided at the movable base and two springs respectively sleeved on the two legs, but it is not limited thereto.
  • the power generation structure may also adopt, for example, torsion springs, Shrapnel and other structures. Utilizing the elastic force of the spring, the supporting foot and the connected top rod can move up and down relative to the silicon rod bearing structure.
  • the locking control member is used to control the movable supporting member in a locked state when the movable supporting member is against the bottom of the silicon rod to be cut.
  • the locking control member may be, for example, Electromagnetic lock.
  • the ejector rod protrudes from the bearing surface of the silicon rod bearing structure under the action of the feet and the spring.
  • the ejector rod is After the silicon rod is pressed, it overcomes the elastic force of the spring and moves downward until the silicon rod to be cut is completely placed on the bearing surface of the silicon rod bearing structure.
  • the electromagnetic lock as the locking control member is energized and generates magnetism through electricity.
  • the strong magnetic force generated by the principle tightly adsorbs the movable base in the movable supporting member, thereby controlling the ejector rod in the locked state.
  • the movable supporting member in the locked state can support the corresponding edge skin , It can effectively prevent the cutting wire mesh in the wire cutting unit from chipping when passing through the silicon rod to be cut, and can prevent the edge skin from falling and overturning.
  • the edge skin lifting unit and the edge skin clamping unit can be used to project and transfer the edge skin on the silicon rod carrying structure from the cut silicon rod.
  • the side skin lifting unit includes a lifting member that can move up and down, and the jacking member is controlled to support the side skin to lift the side skin.
  • the side skin lifting unit is arranged on the machine base through a lifting guide rail. After the side skin is formed by cutting, the side skin lifting unit is controlled to be lifted to the bottom of the silicon rod bearing structure and from the bottom of the side skin. The edge skin is raised so that the edge skin protrudes from the cut silicon rod.
  • the edge skin lifting unit is moved up and down by attaching to the wire cutting support that can be raised and lowered in the wire cutting device.
  • FIG. 33 shows an embodiment of the edge skin unloading device of this application.
  • the lifting member 511 supports the bottom of the side skin to lift the side skin after a controlled stretching exercise.
  • the jacking member 511 includes an abutment plate and a support plate, the abutment plate extends upward from the bottom of the support plate, and further, the abutment plate may be a side wall When the abutment plate abuts against the curved surface of the curved surface of the curved plate, it can fully contact with the curved surface of the side skin, and the contact part of the abutment plate and the side skin is of a smooth design Alternatively, a cushioning pad should be added to the inner surface of the abutment plate that is in contact with the edge skin.
  • the supporting plate is used to support the bottom of the side skin, and further, the supporting plate may be an arcuate plate that matches the bottom surface of the side skin. In other embodiments, bumps can be added to the chord side of the arcuate plate as the supporting plate to increase the contact area with the bottom surface of the side skin.
  • the telescopic component 512 is, for example, an air cylinder with a telescopic rod, wherein the telescopic rod can be connected to the supporting plate in the jacking member 511 through a connecting structure, and the air cylinder can drive the telescopic rod.
  • the rod drives the jacking member 511 to expand and contract.
  • the telescopic movement of the jacking member 511 includes contraction and extension of the jacking member 511.
  • the contraction movement of the jacking member 511 is for the air cylinder to drive the telescopic rod to contract to drive
  • the jacking member 511 is far away from the side skin, and the stretching movement of the jacking member 511 specifically refers to that the air cylinder drives the telescopic rod to extend to drive the jacking member 511 to approach the side skin.
  • the aforementioned telescopic component 512 can also be implemented in other ways.
  • the telescopic component 512 can also be, for example, a servo motor with a screw.
  • the screw is connected to the jacking member 511, and the servo motor is To drive the lead screw to rotate to drive the connected jacking member 511 to expand and contract, for example, to drive the lead screw to rotate in a forward direction to drive the jacking member 511 to make a contraction movement, and to drive the lead screw to rotate in a reverse direction Drive the jacking member 511 to extend, or drive the lead screw to rotate in the forward direction to drive the jacking member 511 to extend and drive the lead screw to rotate in the reverse direction to drive the jacking member 511 to move in contraction.
  • the telescopic rod drives the jacking member 511 to be in a contracted state, and the wire cutting unit is driven to descend with the wire cutting support so that the cutting line pairs formed by each cutting line segment in the wire cutting unit
  • the silicon rod to be cut located in the cutting area is subjected to square cutting until the cutting line segment penetrates the silicon rod to be cut to complete a complete cutting of the silicon rod to be cut and form a side skin.
  • the side skin lifting mechanism has followed the wire cutting support.
  • the seat is lowered to the bottom, and the air cylinder drives the telescopic rod to extend to drive the jacking member 511 to approach the side skin until the abutment plate in the jacking member 511 contacts the side skin and achieves abutment, and subsequently, the wire cutting unit is driven to follow
  • the edge skin lifting mechanism follows the wire cutting support to rise, driving the edge skin to rise relative to the silicon rod that has been cut once, so that the top of the edge skin protrudes from the silicon rod to be cut, which is the top of the edge skin.
  • the wire cutting support can be controlled to stop rising.
  • the air cylinder drives the telescopic rod to contract to drive the jacking member 511 back to the initial state while controlling the wire cutting support to drive the wire cutting unit and the edge skin lifting mechanism to continue to rise above the silicon rod to be cut to prepare for the next cutting operation.
  • the side leather lifting unit includes a retractable suction member, and the suction member is controlled to stretch and abut the side leather to lift the side leather.
  • the side skin lifting mechanism may include a suction member and a telescopic member that drives the suction member to expand and contract.
  • the suction member is controlled by the telescopic member to abut the side skin and adsorb the side. Skin.
  • the suction member may further include an abutting plate and a suction element.
  • the abutment plate may be, for example, an arc-shaped plate that fits with the arc-shaped surface of the edge skin, and when the abutment plate is against the edge skin, it can interact with the arc-shaped surface of the edge skin. Full contact.
  • the suction element may be, for example, a vacuum suction cup, and a plurality of vacuum suction cups may be arranged on the contact surface of the abutment plate to be in contact with the edge skin.
  • the telescopic component may be, for example, a cylinder with a telescopic rod or a servo motor with a lead screw. Taking the cylinder with a telescopic rod as an example, the telescopic rod can be connected to the jacking member through a connecting structure.
  • the air cylinder can drive the telescopic rod to shrink to drive the abutment plate away from the side skin, and the air cylinder can drive the telescopic rod to extend to drive the abutment plate to approach the side skin and After the abutment plate is in contact with the edge skin, the suction element adsorbs the edge skin. Subsequently, the wire cutting support is driven to rise, the side skin lifting mechanism and the wire cutting device follow the wire cutting support to rise, and the side skin lifting mechanism uses the adsorption force to drive the side skin to move upward relative to the cut silicon rod. , So that the top end of the edge skin protrudes from the silicon rod that has undergone a cutting operation.
  • the silicon rod squaring equipment is provided with multiple cutting wheel sets to simultaneously cut multiple silicon rods to be cut, so the on-line cutting support is provided with multiple cutting wheel sets corresponding to the multiple cutting wheel sets.
  • Multiple edge skin lifting mechanisms simultaneously discharge multiple silicon rods that have undergone cutting operations.
  • the wire cutting device includes a wire cutting unit
  • the wire cutting device is pressed down to form a side skin at a time
  • the wire cutting support is provided above a pair of cutting wheels corresponding to each silicon rod bearing structure.
  • An edge skin lifting mechanism can discharge the edge skin formed in the cutting operation in time.
  • the wire cutting device can form two side skins by one press-cutting, and the wire cutting support is provided with two sides corresponding to each silicon rod bearing structure.
  • the edge skin lifting mechanism is used to protrude the edge skin top support formed in the cutting operation from the cut silicon rod to realize timely unloading of the edge skin.
  • the side skin clamping unit After forming the protruding part of the side skin relative to the cut silicon rod by the side skin lifting unit, the side skin clamping unit continues to displace the side skin based on the protruding part to clamp the side skin And transfer the side skins to the unloading area.
  • the edge skin clamping unit 52 includes a support column 521 disposed on the silicon rod square-out equipment base 10, and the support column 521 is, for example, as shown in FIG. At least one guide post set in the first direction is shown.
  • the supporting column 521 is provided with a first mounting portion 522 and a side leather clamping mechanism 523 connected to the first mounting portion 522.
  • the supporting column 521 is arranged in the middle of the first direction of the silicon rod square-out device, so as to reduce the distance from the side skin clamping mechanism 523 to the side skin.
  • the supporting column 521 is provided The location is not limited to this.
  • the first mounting portion 522 is disposed on the supporting column 521, and the first mounting portion 522 can be used as a transition part between the edge leather clamping mechanism 523 and the supporting column 521.
  • the first mounting portion 522 A mounting portion 522 is, for example, a bearing block movably or fixedly arranged on the supporting column 521.
  • the at least one set of edge leather clamping mechanism 523 is connected to the first mounting portion 522 through a swing arm 524.
  • the first mounting portion 522 is fixed at a predetermined height of the supporting column 521, and the predetermined height is, for example, the top of the supporting column 521 to ensure that it is connected to the side of the first mounting portion 522.
  • the leather clamping mechanism 523 can lift the edge leather away from the cut silicon rod after clamping the edge leather.
  • the edge skin unloading device further includes a first lifting drive device (not shown) for driving the first mounting portion 522 to move up and down on the support column 521.
  • a first lifting drive device (not shown) for driving the first mounting portion 522 to move up and down on the support column 521.
  • the side leather clamping mechanism 523 connected to the first mounting portion 522 can be driven to move up and down in space.
  • the holding mechanism 523 can thereby realize the clamping and lifting of the side skin.
  • the first lifting driving device drives the first mounting portion 522 to descend so that the side skin clamping mechanism 523 contacts And to clamp the edge skin protruding from the cut silicon rod by being lifted, the first lifting drive device can then drive the edge skin clamping mechanism 523 in the clamped state to rise so that the edge skin separates from the cut silicon rod.
  • the side skin clamping mechanism 523 is a component for carrying out the clamping and transfer of the side skin.
  • the at least one set of the side skin clamping mechanism 523 is connected to the first mounting portion 522 through a swing arm 524, wherein the The swing arm 524 has a proximal end and a distal end.
  • the proximal end of the swing arm 524 is provided at the first mounting portion 522, and the side leather clamping mechanism 523 is provided at the distal end, that is, the extension end, of the swing arm 524.
  • the side leather clamping mechanism 523 is controlled to rotate around the swing arm shaft 525.
  • the set of side leather clamping mechanisms 523 are the extension ends of different swing arms 524 that are commonly used for the same swing arm shaft 525.
  • the set of side leather clamping mechanisms 523 includes two side leather clamping mechanisms 523, and each of the side leather clamping mechanisms 523 is provided on a swing arm 524.
  • the extension ends, and the proximal ends of different swing arms 524 in a group of edge leather clamping mechanisms 523 are connected to the same swing arm rotating shaft 525.
  • the different swing arms 524 connected to the swing arm shaft 525 of the set of edge leather clamping mechanisms 523 can be of equal length (shown as an example shown in FIG.
  • the included angle between different swing arms 524, the length of the swing arm 524, and the position of the swing arm axis 525 can be determined based on the position of the silicon rod bearing structure 11, where the edge skin is on the horizontal plane The position is determined by the silicon rod bearing structure 11 and the position of the cutting wire saw. It should be understood that an edge skin clamping mechanism 523 can be used to clamp the edge skin formed after the silicon rod on the silicon rod bearing structure 11 is cut.
  • the side skin clamping mechanism 523 includes a plurality of side skin clamping mechanisms 523.
  • Each side skin clamping mechanism 523 corresponds to a silicon rod on a silicon rod supporting structure 11, which can be based on the position (or vertical) of the silicon rod supporting structure 11
  • the position of the silicon rod placed in a conventional manner determines the position of the swing arm shaft 525, the length of the swing arm 524, and the angle between the swing arms 524.
  • the position of the swing arm shaft 525 is pre-set based on the first mounting part when the edge is lifted.
  • the connection line between the position of the swing arm rotating shaft 525 and the different silicon rod supporting structures 11 determines the length of each swing arm 524 and the angle between the swing arm 524.
  • the silicon rod supporting structure 11 on the silicon rod square-out device is arranged at equal intervals, and each group of edge skin clamping mechanism 523 is used for the cut silicon rods on the two silicon rod supporting structures 11
  • the formed side skins are clamped and transported.
  • the swing arm shaft 525 is on the vertical plane of the two silicon rod supporting structures 11, and the two corresponding swing arm shafts 525 are connected to each other.
  • the two swing arms 524 are equal in length.
  • each of the at least one set of edge skin clamping mechanisms includes at least one edge skin clamping mechanism, that is, the edge skin included in the silicon rod discharging device
  • the clamping mechanism can be one group, two groups, three groups, four groups, etc.; among them, the number of the side skin clamping mechanisms in a group of side skin clamping mechanisms can be one, two, three, etc.
  • each group of side skin clamping mechanisms includes two side skin clamping mechanisms, which are located in the first A set of edge skin clamping mechanisms on both sides of the mounting part respectively remove the edge skins of the cut silicon rods on the two silicon rod bearing structures on the left and right sides of the machine base in the view.
  • the support column may be set at the midpoint of the length of the base, that is, the projection of the first mounting portion on the horizontal plane is located in the middle of the base, and a set of edge gripping mechanisms on opposite sides may be It is symmetrical. It should be understood that based on the symmetrical structure of the silicon rod carrying structure of the silicon rod square-out device, the space occupied by the device can be reduced under this setting.
  • the swing arm shaft 525 further includes a rotation drive device (not shown) for driving the edge gripping mechanism 523 connected to the extension end of the swing arm of the swing arm shaft 525 to clamp Holding the side skins and driving the side skins away from the cut silicon rods and then rotates at a predetermined angle, so as to transfer the side skins to the side skin unloading area.
  • a rotation drive device (not shown) for driving the edge gripping mechanism 523 connected to the extension end of the swing arm of the swing arm shaft 525 to clamp Holding the side skins and driving the side skins away from the cut silicon rods and then rotates at a predetermined angle, so as to transfer the side skins to the side skin unloading area.
  • the swing arm shaft 525 is connected to the power output shaft of a drive motor, and the drive motor controls the swing arm shaft 525 to rotate, thereby driving the swing arm connected to the swing arm shaft 525 to rotate
  • the side skin clamping mechanism 523 at the extension end of the swing arm is transferred to the side skin unloading area through an arc-shaped path formed by the continuous rotation.
  • the side skin clamping mechanism 523 can rotate around the swing arm shaft 525, and through the space above the machine base 10, when the side skin does not need to be transported, for example, when the silicon rod square-out device is in a resting state, it can be based on rotating the swing arm shaft 525.
  • the side leather clamping mechanism 523 can be stored above the machine base 10 to reduce equipment space; furthermore, the side leather clamping mechanism 523 has a degree of freedom of rotation based on the rotation of the swing arm shaft 525, which is compared with a straight path. , Carrying out the side skin transportation through the arc path can reduce the transportation distance, thereby increasing the transportation efficiency of the side skin.
  • the swing arm rotating shafts 525 on both sides rotate in opposite directions in the side skin transfer state, for example, in the state shown in FIG. 30 .
  • the horizontal projection of the side skin clamping mechanism 523 on both sides of the first mounting part 522 is located on the silicon rod bearing structure 11, the left side group of the side skin clamping mechanism 523 in the view rotates around the swing arm shaft 525 during transportation
  • the side leather clamping mechanism 523 is far away from the machine base within a certain angle range in compliance with the direction of rotation; correspondingly, a group of side leather clamping mechanisms 523 on the right side of the view is in transit
  • the direction of rotation around the swing arm shaft 525 is shown by the arrow on the right side in FIG.
  • each group of the side leather clamping mechanisms 523 is respectively equipped with a rotation driving device corresponding to the swing arm shaft 525, and the side leather
  • the direction in which the clamping mechanism 523 rotates around the corresponding swing arm rotation shaft 525 is not limited by this.
  • the method described here includes: based on the position of the swing arm rotation shaft 525, the side skin clamping mechanism 523 corresponding to the swing arm rotation shaft 525 is set at The rotation direction of the side skin is the direction away from the first mounting portion 522 (or the supporting column) when the side skin is transported.
  • the first mounting portion further includes at least one movement mechanism that provides movement in at least one direction, and is used to set the swing arm shaft.
  • the swing arm connected to the swing arm rotating shaft and the edge skin clamping mechanism at the extension end of the swing arm can follow the swing arm rotating shaft and move in at least one direction provided by the at least one moving mechanism.
  • the degree of freedom of movement of the side leather clamping mechanism can be increased to extend the moving range, so as to ensure that the moving range of the side leather clamping mechanism can transfer the side leather to the unloading area; at the same time, the first installation
  • the part and at least one moving mechanism included in it are located above the base, which can be used to save equipment space.
  • opposite sides of the first mounting portion are respectively provided with a set of edge gripping mechanisms through a swing arm rotating shaft.
  • a moving mechanism 5221 is provided on both sides of the first mounting portion 522.
  • the illustrated embodiment shows a linear motion mechanism.
  • the linear motion mechanism includes a linear guide 52211.
  • the guide rail 52211 is arranged along the width direction of the silicon rod square-out device, and the swing arm rotating shaft 525 moves along the linear guide rail 52211 to drive its corresponding set of edge gripping mechanisms to move away from or approach the silicon rod supporting structure 11.
  • the moving mechanism 5221 further includes a moving drive device, such as a traveling motor, provided on the swing arm shaft 525.
  • the traveling motor may be connected to the linear guide 52211 through a traveling screw, for example, by traveling The motor drives the swing arm shaft 525 to move along the linear guide 52211.
  • the moving mechanism 5221 includes a linear guide 52211 and a mobile driving device, wherein the mobile driving device includes a telescopic rod 52212 arranged along the direction of the linear guide 52211 and a driving source.
  • the linear guide 52211 is provided on the first mounting portion 522 and arranged along the width direction of the base; the telescopic rod 52212 and the linear guide 52211 are arranged collinearly, and the telescopic rod 52212 has a distal end and The proximal end, wherein the proximal end of the telescopic rod 52212 is connected to the driving source, the distal end of the telescopic rod 52212 is connected to the swing arm shaft 525, and the distal end of the telescopic rod 52212 is driven by the driving source to move along the axial direction of the telescopic rod 52212 In order to drive the swing arm rotating shaft 525 to move along the linear guide 52211.
  • the telescopic rod can also be replaced with a screw rod that is threadedly connected to the swing arm shaft.
  • the screw rod rotates along the screw shaft to transform into the axial direction of the screw rod at the swing arm shaft.
  • the rotation axis of the swing arm is driven by a servo motor to move along a linear guide rail, which is not limited in this application.
  • each of the at least one set of side skin clamping mechanisms includes: a clamping assembly for clamping or releasing the top end of the side skin; a second lifting drive structure for To drive the lifting and lowering movement of the clamping assembly.
  • the side skin clamping mechanism 523 includes a second lifting driving structure 5232 and a clamping assembly 5231 provided at the bottom of the second lifting driving structure 5232.
  • the second lifting drive structure 5232 is used to drive the clamping assembly 5231 for lifting movement.
  • the second lifting drive structure 5232 may be, for example, a lifting cylinder with a lifting rod, which is connected to the clamping unit 5232.
  • the components 5231 are connected, and the lifting cylinder can be used to control the expansion and contraction of the lifting rod to drive the clamping component 5231 to move up and down, but it is not limited to this.
  • the second lifting driving structure 5232 may also be a screw assembly driven by a motor, the screw assembly is connected to the clamping assembly 5231, and the motor drives the screw assembly to lift to drive the clamping assembly 5231 to move up and down.
  • the clamping assembly is a part for clamping the edge skin.
  • the clamping assembly includes a cover and a retractable clamping member.
  • the cover body is used to cover the side skin
  • the retractable clamping member is provided inside the cover body
  • the clamping member and the cover body are formed to clamp the side skin Clamping space.
  • Figure 34 shows a structural schematic diagram of the clamping assembly in an embodiment of the edge skin unloading device of this application
  • Figure 35 shows the clip of the edge skin unloading device of this application
  • the clamping assembly 5231 includes a cover 52311 and a retractable clamping member 52312.
  • the retractable clamping member 52312 is provided inside the cover 52311, and the clamping member 52312 is connected to the A clamping space for clamping the side skin is formed between the cover bodies 52311.
  • the cover body 52311 is used to cover the edge skin, the cover body 52311 can cover the size slightly larger than the cross-sectional circle of the silicon rod to be cut, and the cover body 52311 is set to be closed or non-closed Round cover, but not limited to this.
  • the top of the main body of the cover body 52311 has an opening for the side skin to be raised to protrude from the cover body 52311. It should be understood that when the side skin protrudes from the cover body 52311, it fits into the cover
  • the contact area of the clamping member 52312 clamped by the body 52311 and the edge skin reaches the maximum, which can be used to ensure the stability of the clamping component 5231 to clamp the edge skin.
  • the inner wall of the cover body 52311 is provided with a nylon toothed strip 523111 for contacting the clamped side skin, so that the friction force between the outer side of the side skin and the cover body 52311 is increased, so as to facilitate the side skinning. The promotion.
  • the clamping assembly includes an arc-shaped plate and a retractable clamping member, and the clamping member is between the arc-shaped plate and the arc-shaped plate. A clamping space for clamping the edge skin is formed.
  • the clamping member is a movable pressure block controlled by an air cylinder, and the movable pressure block is connected to the air cylinder through a rotating arm.
  • the rotating arm has a first rotating shaft, a first cantilever, and a first connecting portion located in the middle of the first cantilever, wherein the proximal end of the first cantilever is connected to the first rotating shaft, and the first cantilever A movable pressure block is connected to the distal end of a cantilever, and the first connecting portion is connected to the piston rod of the cylinder.
  • the cover 52311 is provided with a base 523112 for supporting the clamping member, and the base 523112 carries the clamping member into the cut silicon rod.
  • the air cylinder 52324 is fixed on the side wall of the base 523112 and has a piston rod, and the first rotating shaft 52322 of the rotating arm is hinged to a support seat fixed at the bottom of the base 523112.
  • the second cantilever can rotate around the first rotation axis 52322, and the first rotation axis 52322 is provided at the proximal end of the first cantilever 52321, and the movable pressing block 52321 is fixedly connected to the distal end of the first cantilever 52321 ,
  • the first connecting portion 52323 located between the proximal and distal ends of the first cantilever 52321 is hinged with the piston rod of the air cylinder 52324, and the air cylinder 52324 pushes the piston rod to telescopically move to drive the first cantilever 52321 to rotate around the first rotation axis 52322 That is, here, with the first rotating shaft 52322 as the fulcrum, the piston rod of the cylinder 52324 as the force acting point, and the first cantilever 52321 force lever, the movable pressure block 523121 at the distal end of the first cantilever 52321 can be driven to move.
  • the movable pressure block 52321 at the distal end of the first cantilever 52321 approaches or moves away from the cover 52311, and the clamping space between the movable pressure block 52321 and the cover 52311 can be adjusted.
  • the first rotating shaft 52322 which is set as the force application point of the first cantilever 52321, is located at the proximal end of the cantilever, and the first connecting portion 52323, which is the force point for the movement of the piston rod of the transmission cylinder, is provided in the middle of the first cantilever 52321.
  • the first connecting portion 52323 which is the force point for the movement of the piston rod of the transmission cylinder
  • the cylinder 52324 drives the piston rod to extend to drive the proximal end of the first cantilever 52321 to move down around the first shaft 52322, and the proximal end of the first cantilever 52321 descends around the first shaft 52322 to drive the movable pressing block 523121 to approach
  • the cover body 52311 is abutted against the side skin, the cylinder piston rod is kept stretched to maintain the side skin in a clamped state.
  • the first connecting portion may also be connected to a screw assembly or a telescopic rod driven by a motor, thereby driving the first cantilever to rotate around the first rotating shaft to realize the pressing or releasing of the side skin by the movable pressing block .
  • the rotating arm has a second cantilever, a second connecting portion, and a second rotating shaft located in the middle of the second cantilever, wherein the second connecting portion is provided at the proximal end of the second cantilever and connected to The piston rod of the cylinder and the distal end of the second cantilever are connected to the movable pressure block.
  • FIG. 36 shows a schematic cross-sectional structure diagram of the clamping assembly in another embodiment.
  • the cover body 52311 is provided with a base 523112 for carrying the clamping member 52312, and the base 52312 carries the clamping member 52312 to penetrate between the cut silicon rod and the edge skin.
  • the cylinder 52334 is fixed on the side wall of the base 523112 and has a piston rod.
  • the second rotating shaft 52332 of the rotating arm is hinged with a support seat fixed at the bottom of the base 52311 so that the second cantilever 52331
  • the movable pressing block 523121 is fixedly connected with the distal end of the second cantilever 52331, and the proximal end of the second cantilever 52331 of the rotary arm is hinged with the piston rod of the air cylinder 52334.
  • the cylinder 52334 pushes the piston rod to expand and contract to drive the second cantilever 52331 to rotate around the second rotation shaft 52332, that is, here, the second rotation shaft 52332 is the fulcrum of the force lever of the second cantilever 52331, and the piston rod of the cylinder 52334 acts as a force.
  • the movable pressure block 523121 at the distal end of the second cantilever 52331 approaches or moves away from the cover 52311 when the second cantilever 52331 rotates around the second rotation axis 52332. That is, the clamping space between the movable pressure block 523121 and the cover 52311 can be adjusted.
  • the second connecting portion 52333 connecting the cylinder piston rod, which is set as the force application point of the second cantilever 52331, is located at the proximal end of the cantilever.
  • the proximal end of the second cantilever 52331 receives an upward lifting force, and the distal end of the second cantilever 52331 moves downward and makes the movable pressing block 523121 close to the cover 52311 so as to press the side skin against the cover 52311 (as shown in Figure 36 The direction of the arrow).
  • the air cylinder 52334 drives the piston rod to extend to drive the proximal end of the second cantilever 52331 to move down around the second shaft 52332, and the proximal end of the second cantilever 52331 rises around the second shaft 52332 to drive the movable pressure block 523121 away from all sides.
  • the cover body 52311 returns to the initial state, and the clamping space between the movable pressing block 523121 and the cover body 52311 is increased to facilitate the release of the side skin.
  • the cylinder piston rod is connected above the proximal end of the second cantilever 52331, and the piston rod is contracted to drive the movable pressing block 523121 to compress the side skin; in other examples, when the cylinder piston rod is connected to the second cantilever Below the proximal end of the 52331, the piston rod of the cylinder stretches to lift the proximal end of the second cantilever 52331 upward and rotates upwards, so that the movable pressure block 523121 approaches and compresses the side skin during the downward movement.
  • the second connecting portion can also be connected to a screw assembly or a telescopic rod driven by a motor, thereby driving the second cantilever to rotate around the second rotating shaft to realize the pressing or releasing of the side skin by the movable pressing block .
  • the number of clamping members in the edge skin clamping mechanism can be changed correspondingly based on the form of the wire cutting device in the silicon ingot square rooting equipment.
  • the wire cutting device of the silicon ingot square rooting device has Single wire cutting unit, based on the cutting wire saw formed in the single wire cutting unit, the cutting operation of the silicon rod to be cut requires four single-axis face cutting steps.
  • the number of the clamping members is set to one .
  • each wire cutting device includes two wire cutting units, and the two wire cutting units form relatively parallel cutting wire saws. In one cutting operation, two parallel shaft surfaces are formed by cutting.
  • the clamping members are arranged as two oppositely arranged. Perform the first cutting of two parallel axis surfaces to form two side skins. The two side skins formed at the corresponding positions are clamped and transported to the unloading area with the two clamping parts, and then the silicon rods to be cut are adjusted. Cut the surface (for example, make the silicon rod bearing structure rotate 90 degrees around the silicon rod axis), perform a second cutting to form two parallel axis surfaces and form two side skins, and again use two clamps to set the corresponding positions The formed two side skins are clamped and transferred out.
  • the movable pressure block in order to prevent the movable pressure block from contacting the side skin during long-term clamping, causing wear and damage to each other, in some embodiments, is provided with a cushion for contacting the side skin.
  • the cushioning pad is made of, for example, an elastic rubber material, or silica gel or other materials with elastic deformation, damping characteristics or cushioning characteristics, so as to prevent the surface of the edge skin from being scratched or bumped during the clamping and transportation. Shattered.
  • the side skin unloading device further includes a side skin tube arranged in the side skin unloading area.
  • the barrel mouth of the side leather barrel can be designed to be larger or a bell mouth to facilitate the placement of the side leather without obstacles, and the height of the barrel arm of the side leather barrel is also relatively high to ensure The inserted side skin will not overturn and so on. In this way, the side skin is moved from the cutting area to the side skin tube by the clamping and transfer unit, and then the side skin can be taken out of the side skin tube by the operator.
  • FIGS. 37a to 37e Schematic diagram of the different states of carrying out the side skin transfer in the equipment.
  • the side skin clamping mechanism transfers the side skin to the side skin unloading area by rotating the swing arm around the rotation axis of the swing arm by a preset angle, and the preset angle can be determined based on the position of the side skin unloading area, as shown in Fig. 37a As shown in Fig.
  • the edge skin clamping mechanism 523 is driven by the first driving device to follow the first mounting portion 522 and descend to the end surface of the silicon rod ( As shown in Figure 37a), the side skin is protruded from the end surface of the silicon rod by the side skin lifting unit, the side skin clamping mechanism 523 can thereby clamp the side skin, and the movable pressing block in the clamping assembly presses the side skin against the end surface of the silicon rod. Lean against the cover body or the arc-shaped plate, and then the first driving device drives each side skin clamping mechanism 523 connected to the mounting portion to rise (in the state shown in FIG.
  • the rotation driving device drives the side leather clamping mechanism 523 to rotate a predetermined angle.
  • a set of side leather clamping mechanisms 523 are respectively provided on both sides of the first mounting portion 522, each The side leather clamping mechanism 523 is driven by its corresponding rotating drive device to rotate 120° in a direction away from the first mounting portion 522 to reach above the side leather unloading area, and then the side leather clamping mechanism 523 follows the first
  • the mounting part 522 is driven down by the first lifting driving device, the movable pressing block in the clamping assembly is far away from the side skin to increase the clamping space, and the clamped side skin is placed in the side skin collection device in the side skin unloading area, such as the side skin.
  • the side skin clamping mechanism 523 is driven to rise in accordance with the first mounting portion 522, and rotates a certain angle to return to the waiting position (as shown in Figure 37e). After cutting to form a new edge skin, repeat the aforementioned transfer process to unload the edge skin again.
  • the ascending and descending of the side skin clamping mechanism 523 in the foregoing process can also be driven by the second lifting drive structure, or simultaneously driven by the first lifting drive device and the second lifting drive structure.
  • the side skin unloading device includes a side skin conveying structure, the side skin conveying structure is arranged in the side skin unloading area, and is used for conveying the side skin that has been operated by the side skin clamping mechanism.
  • the edge skin conveying structure may be, for example, a conveyor belt.
  • the side skin unloading area is the area where the side skins are unloaded in the silicon rod opener device. Specifically, the side skin unloading area is the area underneath after the side skin clamping mechanism removes the side skins from the cutting area. Corresponding area.
  • the side skin is transferred from the cutting area to the side skin unloading area by the side skin clamping mechanism, and the clamping component in the side skin clamping mechanism is loosened to release the side skin to the conveyor belt as the side skin conveying structure On top, the side skins are transported out by the conveyor belt.
  • the side skin unloading device may include a side skin tube and a side skin conveying structure at the same time, wherein the side skin conveying structure may be, for example, a conveyor belt, and the side skin tube is disposed adjacent to the side skin tube.
  • the starting end of the conveyor belt for example, the side skin tube is located beside the starting end of the conveyor belt or directly above the starting end of the conveyor belt, etc.
  • the barrel mouth of the side leather tube can be designed to be larger or a flared mouth, so that the side leather can be inserted without obstacles, and the height of the barrel arm of the side leather tube is also relatively high, which can ensure the inserted side The skin will not overturn and so on.
  • the side skin tube may be of a reversible design. By turning over the side skin tube, each side skin in the side skin tube can be smoothly transferred to the conveyor belt.
  • the bottom of the side skin tube is provided with a turning drive mechanism, and the turning drive mechanism may include a turning plate, a rotating shaft, and a turning drive source (such as a turning motor or a turning cylinder, etc.).
  • the side skin tube is turned over to drive the side skin in the tube to transfer to the conveyor belt, and the side skin is transferred to the conveyor belt by the conveying The belt transports the side skins out.
  • the present application provides a side skin unloading device for silicon rod square-out equipment.
  • the side skin discharge device can be stored in the space above the base of the silicon rod square-out equipment in an idle state to save silicon.
  • the side skin clamping mechanism can be rotated by the swing arm around the swing arm axis to transfer the clamped side skin to the side skin unloading area, thereby shortening the transfer
  • the side skin unloading device can be provided with multiple sets of side skin clamping mechanisms in one-to-one correspondence with the silicon rod bearing structure of the silicon rod square-out equipment, so as to improve the efficiency of the side skin clamping and transportation and reduce the time cost.
  • the application also provides a silicon rod square-out equipment, which includes a base; a silicon rod bearing structure for supporting silicon rods placed vertically; and a wire cutting device, which is arranged above at least two silicon rod bearing structures, It includes a plurality of cutting wheels and at least one cutting line of a cutting wire saw formed around the plurality of cutting wheels; as shown in Fig. 30 to Fig. 37e, the edge skin unloading device according to any one of the embodiments is implemented.
  • the base is set as the main part of the silicon rod square-out equipment of this application, and is used to provide a square-out work platform.
  • the base has a larger volume and weight to provide a larger mounting surface and a firmer The stability of the whole machine.
  • the silicon rod carrying structure is used to carry silicon rods placed vertically, each of the silicon rod supporting structures has a rotating mechanism, and the rotating mechanism is used to drive the silicon rods placed on the silicon rod carrying structure to rotate for adjustment The surface to be cut.
  • the rotating mechanism is configured as a rotating turntable located at the bottom of the silicon rod carrying structure, and the rotating turntable is controlled by a driving device (not shown).
  • the driving device may be, for example, a driving rotating turntable. Rotating servo motor, but not limited to this.
  • the rotating mechanism may adopt a lifting design, that is, the rotating turntable at the bottom of the silicon rod bearing structure can be telescopic after being controlled to drive the silicon rod bearing structure to move up and down, thereby adjusting the silicon rod bearing The height of the silicon rod to be cut on the structure.
  • the wire cutting device includes a cutting frame and a liftable wire cutting support set on the cutting frame.
  • a plurality of cutting wheels are arranged on the wire cutting support and at least one cutting wheel is formed around the plurality of cutting wheels.
  • the cutting line of the wire saw drives the cutting wire saw to lift and feed the silicon rods arranged on the silicon rod carrying structure when the online cutting support moves up and down to cut the silicon rods.
  • the side skin unloading device and the wire cutting device in the silicon rod square-out equipment can cooperate with each other. After the on-line cutting device cuts the silicon rod to form a side skin, the side skin is lifted by the side skin unloading device to protrude and clamp the cut silicon rod.
  • the side skin clamping mechanism in the side skin unloading device can be rotated around the swing arm shaft through the swing arm to transfer the clamped side skin to the side skin unloading area, thereby shortening the transfer path, and at the same time,
  • the side skin unloading device can be provided with multiple sets of side skin clamping mechanisms corresponding to the silicon rod bearing structure of the silicon rod square-out equipment, so as to improve the efficiency of the side skin clamping and transportation, reduce the time cost, and the side skin is transferred and placed. After that, the cut silicon rods are unloaded, and the silicon rod square extraction equipment can continue the square extraction operation of the silicon rods to be cut. Reduce labor costs and improve processing efficiency.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)

Abstract

La présente invention concerne un dispositif de coupe à fil, comprenant au moins un mécanisme de réglage de pas (23) disposé sur au moins une unité de coupe à fil (21). Le mécanisme de réglage de pas peut entraîner une pluralité de roues de coupe (211) des une ou plusieurs unités de coupe dans le dispositif de coupe à fil pour qu'elles se déplacent dans une seconde direction, de telle sorte qu'une position de coupe dans la seconde direction d'au moins une scie à fil de coupe formée par enroulement autour de la pluralité de roues de coupe peut être changée sous l'action du mécanisme de réglage de pas, ou que la position dans laquelle un fil de coupe est enroulé autour de rainures de fil de la pluralité de roues de coupe peut être modifiée sur la base du mouvement de la pluralité de roues de coupe dans la seconde direction. L'invention concerne également un équipement de traitement de tige de silicium, comprenant le dispositif de coupe à fil. Le procédé de modification de la position du fil de coupe ou de replacement de rainures sur la base du mécanisme de réglage de pas est simple, facile à mettre en œuvre et pratique à réaliser, et l'efficacité de fonctionnement est améliorée.
PCT/CN2021/094831 2020-06-15 2021-05-20 Dispositif de coupe à fil et équipement de traitement de tige de silicium WO2021254082A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202010544531.2 2020-06-15
CN202010544531.2A CN113799278A (zh) 2020-06-15 2020-06-15 线切割装置及硅棒加工设备

Publications (1)

Publication Number Publication Date
WO2021254082A1 true WO2021254082A1 (fr) 2021-12-23

Family

ID=78944375

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2021/094831 WO2021254082A1 (fr) 2020-06-15 2021-05-20 Dispositif de coupe à fil et équipement de traitement de tige de silicium

Country Status (2)

Country Link
CN (1) CN113799278A (fr)
WO (1) WO2021254082A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114953222A (zh) * 2022-04-13 2022-08-30 大连连城数控机器股份有限公司 一种用于金刚线单线截断机的分体式切割头及其切割方法
CN115148414A (zh) * 2022-06-17 2022-10-04 皖缆集团股份有限公司 一种电缆加工用通用形快调机构
CN116026264A (zh) * 2023-01-05 2023-04-28 扬州晶樱光电科技有限公司 一种单多晶硅棒检测装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016203303A (ja) * 2015-04-22 2016-12-08 信越半導体株式会社 ワイヤソー装置
CN205915542U (zh) * 2016-08-25 2017-02-01 上海日进机床有限公司 硅锭切割机及其工作台
CN208148231U (zh) * 2018-02-09 2018-11-27 天通日进精密技术有限公司 硅棒多线切割设备和硅棒转运系统
CN110126109A (zh) * 2018-02-09 2019-08-16 浙江集英精密机器有限公司 硅棒多线切割设备及方法、硅棒转运系统
CN209682649U (zh) * 2018-09-03 2019-11-26 天通日进精密技术有限公司 多线切割设备及其换槽机构

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016203303A (ja) * 2015-04-22 2016-12-08 信越半導体株式会社 ワイヤソー装置
CN205915542U (zh) * 2016-08-25 2017-02-01 上海日进机床有限公司 硅锭切割机及其工作台
CN208148231U (zh) * 2018-02-09 2018-11-27 天通日进精密技术有限公司 硅棒多线切割设备和硅棒转运系统
CN110126109A (zh) * 2018-02-09 2019-08-16 浙江集英精密机器有限公司 硅棒多线切割设备及方法、硅棒转运系统
CN209682649U (zh) * 2018-09-03 2019-11-26 天通日进精密技术有限公司 多线切割设备及其换槽机构

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114953222A (zh) * 2022-04-13 2022-08-30 大连连城数控机器股份有限公司 一种用于金刚线单线截断机的分体式切割头及其切割方法
CN115148414A (zh) * 2022-06-17 2022-10-04 皖缆集团股份有限公司 一种电缆加工用通用形快调机构
CN115148414B (zh) * 2022-06-17 2024-04-02 皖缆集团股份有限公司 一种电缆加工用通用形快调机构
CN116026264A (zh) * 2023-01-05 2023-04-28 扬州晶樱光电科技有限公司 一种单多晶硅棒检测装置
CN116026264B (zh) * 2023-01-05 2023-09-26 扬州晶樱光电科技有限公司 一种单多晶硅棒检测装置

Also Published As

Publication number Publication date
CN113799278A (zh) 2021-12-17

Similar Documents

Publication Publication Date Title
WO2021254085A1 (fr) Appareil de déchargement de matériau résiduel et dispositif d'équerrage de tige de silicium
WO2021254084A1 (fr) Dispositif de chargement et de déchargement de tige de silicium et appareil d'équerrage de tige de silicium
WO2021254082A1 (fr) Dispositif de coupe à fil et équipement de traitement de tige de silicium
WO2021254083A1 (fr) Dispositif coupe-fil et appareil de traitement de tige de silicium
CN212578936U (zh) 应用于硅棒开方设备的边皮卸料装置及硅棒开方设备
WO2020221132A1 (fr) Appareil d'équerrage à stations multiples et procédé de coupe associé
CN109129947B (zh) 硅棒开方设备、硅棒开方方法及边皮卸载装置
WO2021027326A1 (fr) Appareillage de coupe de barreau de silicium
WO2020221134A1 (fr) Dispositif d'ouverture de barreau de silicium et appareil de déchargement de peau latérale appliqué à un dispositif de découpe de barreau de silicium
CN208148230U (zh) 硅棒开方设备和边皮卸载装置
CN217196246U (zh) 硅棒切磨一体机
CN110126108A (zh) 硅棒开方设备、硅棒开方方法及边皮卸载装置
CN212554512U (zh) 硅棒装卸装置及硅棒开方设备
WO2020221133A1 (fr) Dispositif de coupe à fils multiples et mécanisme de changement de fente automatique appliqué à celui-ci
CN209832246U (zh) 硅棒开方设备及边皮卸载装置
CN213563660U (zh) 硅棒压紧装置及硅棒开方设备
CN210999509U (zh) 线切割装置
CN214562090U (zh) 边皮卸料装置及多工位开方设备
CN112388851A (zh) 线切割装置
CN212554514U (zh) 线切割装置及硅棒加工设备
CN212602668U (zh) 线切割装置及硅棒加工设备
CN115432410A (zh) 一种超大盘管换盘机构
CN212498399U (zh) 硅棒开方机
CN210999510U (zh) 硅棒上料装置
CN113071854A (zh) 一种全自动皮带上料装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 21825547

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 21825547

Country of ref document: EP

Kind code of ref document: A1