WO2021229960A1 - Tracking-type inspection device and tracking-type inspection method - Google Patents

Tracking-type inspection device and tracking-type inspection method Download PDF

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Publication number
WO2021229960A1
WO2021229960A1 PCT/JP2021/014765 JP2021014765W WO2021229960A1 WO 2021229960 A1 WO2021229960 A1 WO 2021229960A1 JP 2021014765 W JP2021014765 W JP 2021014765W WO 2021229960 A1 WO2021229960 A1 WO 2021229960A1
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WO
WIPO (PCT)
Prior art keywords
inspection
drive motor
follow
lighting device
rotating
Prior art date
Application number
PCT/JP2021/014765
Other languages
French (fr)
Japanese (ja)
Inventor
平三郎 加藤
学 山下
Original Assignee
テクノダイナミックス株式会社
株式会社京都製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by テクノダイナミックス株式会社, 株式会社京都製作所 filed Critical テクノダイナミックス株式会社
Publication of WO2021229960A1 publication Critical patent/WO2021229960A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/80—Turntables carrying articles or materials to be transferred, e.g. combined with ploughs or scrapers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/90—Investigating the presence of flaws or contamination in a container or its contents

Definitions

  • the present invention relates to a follow-up inspection device and a follow-up inspection method.
  • An inspection table that supports an object to be inspected and can rotate around a central axis, an inner table that supports one of an inspection device and a lighting device and can rotate around the central axis, an inspection device, and an inspection device.
  • a follow-up inspection device in which the other device of the lighting device is supported and has an outer table rotatable about the central axis and a drive motor for driving these tables is already well known. In such a follow-up type device, the inspection is performed by rotating the inner table and the outer table according to the rotation of the inspection table and moving the inspection device and the lighting device to follow the movement of the inspection object.
  • the present invention has been made in view of the above problems, and an object of the present invention is to suppress vibration of the follow-up inspection device as much as possible when the inspection process is executed to improve the inspection accuracy of the follow-up inspection device. To let you.
  • the main invention for achieving the above object is An inspection table that supports the inspection object and can rotate around the central axis, An inspection table drive motor for rotating the inspection table, An inner table in which one of the inspection device and the lighting device is supported and is attached to the inspection table via a bearing inside the inspection table in the radial direction and is rotatable about the central axis. An inner table drive motor for rotating the inner table, and An outer table in which the other device of the inspection device and the lighting device is supported and is attached to the inspection table via a bearing on the radial side of the inspection table and is rotatable about the central axis.
  • An outer table drive motor for rotating the outer table, and By driving the inspection table drive motor and stopping the inner table drive motor and the outer table drive motor, the inspection table, the outer table, and the inner table are integrally rotated, and the lighting device is used.
  • the inspection process of inspecting the inspection object illuminated by the inspection device with the inspection device A change process in which the inner table drive motor and the outer table drive motor are driven to move the inner table and the outer table relative to the inspection table to change the inspection object to be inspected by the inspection device.
  • the control unit that repeats It is a follow-up type inspection apparatus characterized by having.
  • An inspection table that supports the inspection object and can rotate around the central axis, An inspection table drive motor for rotating the inspection table, An inner table in which one of the inspection device and the lighting device is supported and is attached to the inspection table via a bearing inside the inspection table in the radial direction and is rotatable about the central axis. An inner table drive motor for rotating the inner table, and An outer table in which the other device of the inspection device and the lighting device is supported and is attached to the inspection table via a bearing on the radial side of the inspection table and is rotatable about the central axis.
  • An outer table drive motor for rotating the outer table, and By driving the inspection table drive motor and stopping the inner table drive motor and the outer table drive motor, the inspection table, the outer table, and the inner table are integrally rotated, and the lighting device is used.
  • the inspection process of inspecting the inspection object illuminated by the inspection device with the inspection device A change process in which the inner table drive motor and the outer table drive motor are driven to move the inner table and the outer table relative to the inspection table to change the inspection object to be inspected by the inspection device.
  • the control unit that repeats A follow-up inspection device characterized by having.
  • the inner table is provided with the inner table drive motor.
  • the inspection table is provided with gear teeth for the inner table.
  • the inner table drive gear that meshes with the inner table gear teeth, It may have an inner table input shaft connected to the inner table drive motor and provided with the inner table drive gear.
  • the vibration of the follow-up type inspection device can be further suppressed, and the inspection accuracy of the follow-up type inspection device can be further improved.
  • the outer table is provided with the outer table drive motor.
  • the inspection table is provided with gear teeth for the outer table.
  • the outer table drive gear that meshes with the outer table gear teeth, It may have an outer table input shaft that is connected to the outer table drive motor and is provided with the outer table drive gear.
  • the vibration of the follow-up type inspection device can be further suppressed, and the inspection accuracy of the follow-up type inspection device can be further improved.
  • the inspection table drive motor for rotating the inspection table on which the inspection object is supported and rotatable about the central axis is driven, and An inner table in which one of the inspection device and the lighting device is supported and is attached to the inspection table via a bearing inside the inspection table in the radial direction and is rotatable about the central axis.
  • An inner table drive motor for rotation and the other device of the inspection device and the lighting device are supported and attached to the inspection table on the radial outside of the inspection table via bearings, said center.
  • An inspection step in which the inspection table, the outer table, and the inner table are integrally rotated to inspect the inspection object illuminated by the lighting device with the inspection device.
  • a follow-up inspection method characterized by having.
  • FIG. 1 is a top view of the follow-up inspection device 10.
  • FIG. 2 is a vertical cross-sectional view of the follow-up inspection device 10.
  • FIG. 3 is a schematic block diagram of the follow-up inspection device 10.
  • FIG. 4 will be described later.
  • the follow-up inspection device 10 is a device for inspecting an inspection object 1 (for example, a liquid filling device such as a vial, an ampoule, or a syringe). That is, the follow-up inspection device 10 detects items required for quality of the inspection object 1, that is, appearance scratches, deformations, cracks, chips, foreign substances in the liquid, abnormal liquid volume, discoloration of the liquid, and the like. inspect.
  • an inspection object 1 for example, a liquid filling device such as a vial, an ampoule, or a syringe. That is, the follow-up inspection device 10 detects items required for quality of the inspection object 1, that is, appearance scratches, deformations, cracks, chips, foreign substances in the liquid, abnormal liquid volume, discoloration of the liquid, and the like. inspect.
  • the follow-up inspection device 10 includes a fixed portion 12, an inspection table 20, a cap installation table 25, a main input shaft 50, an inspection table drive motor 60, an inner table 30, an inner table input shaft 53, and an inner side.
  • a table drive motor 61, an outer table 40, an outer table input shaft 55, an outer table drive motor 62, a spin drive unit 73, a supply unit 80, a discharge unit 82, and a control unit 90 are provided. There is.
  • the fixing portion 12 is for fixing the inspection object 1 when the inspection is executed (for maintaining the state in which the inspection object 1 is fixed).
  • the fixing portion 12 includes an installation portion 13 and a cap portion 15.
  • the installation unit 13 is a portion where the inspection object 1 is installed.
  • a plurality of the installation portions 13 are provided on the upper surface of the inspection table 20 described later.
  • the plurality of installation portions 13 are provided so as to be lined up in the circumferential direction of the inspection table 20.
  • the cap portion 15 is for pressing the inspection target object 1 installed in the installation portion 13 from above to make the inspection target object 1 more appropriately fixed.
  • a plurality of the cap portions 15 are installed on the cap installation table 25 described later.
  • the plurality of cap portions 15 are provided so as to be lined up in the circumferential direction of the cap installation table 25.
  • the inspection table 20 is a table that is rotatable about the central axis C and in which the inspection object 1 is supported via the fixing portion 12 (installation portion 13). Then, the inspection table 20 is adapted to continuously rotate the inspection object 1 installed in the installation unit 13 by continuously rotating the inspection table 20.
  • the inspection table 20 has a circular shape when viewed from above, and is rotatably attached to a fixed shaft 18 attached to the base portion 70 via an inspection table bearing 22.
  • gear teeth (referred to as inspection table outer gear teeth 20a (corresponding to outer table gear teeth) for convenience) are provided on the outermost side of the inspection table 20 in the radial direction, and the inspection table outer gear teeth are provided. 20a meshes with the inspection table drive gear 51 and the outer table drive gear 56, which will be described later. Further, inside the inspection table outer gear tooth 20a, a gear tooth different from the inspection table outer gear tooth 20a (for convenience, referred to as an inspection table inner gear tooth 20b (corresponding to an inner table gear tooth)) is provided inside the inspection table outer gear tooth 20a. The gear tooth 20b in the inspection table meshes with the drive gear 54 for the inner table, which will be described later.
  • the cap installation table 25 is a table that is rotatable about the central axis C and in which the inspection object 1 is supported via the fixing portion 12 (cap portion 15). Then, the cap installation table 25 continuously rotates in synchronization with the inspection table 20 (at the same speed as the inspection table 20). As a result, the inspection object 1 installed in the installation unit 13 is continuously rotated in cooperation with the inspection table 20.
  • the inspection table 20 has a circular shape when viewed from above, and is rotatably attached to a fixing member 71 fixed to the fixed shaft 18 via a cap mounting table bearing 27.
  • a gear tooth (referred to as a cap installation table gear tooth 25a for convenience) is provided on the outermost side of the cap installation table 25 in the radial direction, and the cap installation table gear tooth 25a is a cap installation table described later. It meshes with the drive gear 52.
  • cap portion 15, fixing member 71, cap installation table 25, and cap installation table bearing 27 provided in the present embodiment are for making the inspection object 1 more appropriate to be fixed. Yes, it is not always a necessary member. In particular, when the length (height) of the inspection object 1 in the vertical direction is small, it can be easily omitted.
  • the main input shaft 50 is connected to the inspection table drive motor 60 to be described later, and the inspection table drive gear 51 that meshes with the inspection table outer gear tooth 20a and the cap installation table drive gear that meshes with the cap installation table gear tooth 25a. 52 is a provided (attached) shaft.
  • the main input shaft 50 is rotatably attached to a fixed arm 72 fixed to the fixed shaft 18. When the main input shaft 50 rotates, the inspection table drive gear 51 and the cap installation table drive gear 52 also rotate integrally, so that the inspection table 20 and the cap installation table 25 can be rotated. ..
  • the inspection table drive motor 60 is for rotating the inspection table 20. Further, the inspection table drive motor 60 also plays a role of rotating the cap installation table 25 when the cap installation table 25 is provided as in the present embodiment.
  • the inspection table drive motor 60 is a servo motor and is installed on the base portion 70.
  • the inner table 30 is rotatable about the central axis C, and one of the camera 65 and the lighting device 66 (in the present embodiment, the lighting device 66) as an example of the inspection device is supported. It's a table.
  • the inner table 30 is attached to the inspection table 20 via a bearing (referred to as an inner table bearing 32 for convenience) inside the inspection table 20 in the radial direction.
  • the inner table 30 moves relative to the inspection table 20 in the circumferential direction by rotating.
  • the inspection object 1 facing the lighting device 66 in the radial direction is changed. That is, the inspection object 1 illuminated by the lighting device 66 is changed to another inspection object 1.
  • the inner table 30 has a circular shape when viewed from above.
  • the input shaft 53 for the inner table is a rotatable shaft connected to the inner table drive motor 61 and provided with (attached) the inner table drive gear 54 that meshes with the gear teeth 20b in the inspection table.
  • the inner table drive motor 61 is for rotating the inner table 30.
  • the inner table drive motor 61 is a servo motor and is provided on the inner table 30.
  • the drive gear 54 for the inner table is also rotated integrally.
  • the inner table 30 moves relative to the inspection table 20 in the circumferential direction.
  • the lighting device 66 (and the inner table drive motor 61) on the inspection table 20 also moves relative to each other in the circumferential direction.
  • the outer table 40 is a table that is rotatable about the central axis C and supports the other device (camera 65 in the present embodiment) of the camera 65 and the lighting device 66.
  • the outer table 40 is attached to the inspection table 20 via a bearing (referred to as an outer table bearing 42 for convenience) on the outer side of the inspection table 20 in the radial direction.
  • the outer table 40 moves relative to the inspection table 20 in the circumferential direction by rotating.
  • the inspection object 1 facing the camera 65 in the radial direction is changed. That is, the inspection object 1 photographed by the camera 65 is changed to another inspection object 1.
  • the outer table 40 has a substantially semicircular shape when viewed from above. The reason why the shape is not circular is to avoid physical interference with the supply unit 80 and the discharge unit 82, which will be described later.
  • the outer table input shaft 55 is a rotatable shaft connected to the outer table drive motor 62 and provided (attached) with the outer table drive gear 56 that meshes with the inspection table outer gear teeth 20a.
  • the outer table drive motor 62 is for rotating the outer table 40.
  • the outer table drive motor 62 is a servo motor and is provided on the outer table 40.
  • the drive gear 56 for the outer table is also rotated integrally.
  • the outer table 40 moves relative to the inspection table 20 in the circumferential direction.
  • the camera 65 (and the outer table drive motor 62) on the inspection table 20 also moves relative to each other in the circumferential direction.
  • the spin drive unit 73 is for spinning the inspection object 1 installed in the installation unit 13 when the inspection is executed.
  • the spin drive unit 73 includes a spin motor 73a, a spin shaft 73b connected to the spin motor 73a, and a belt 73c mounted on the spin shaft 73b and in contact with the installation unit 13.
  • the belt 73c also rotates, and the rotating belt 73c spins the installation portion 13 (inspection object 1).
  • the three installation portions 13 (inspection object 1) are spun at the same time.
  • the supply unit 80 is for supplying the inspection object 1 to the inspection table 20.
  • the supply unit 80 is rotated by the driving force of the supply unit drive motor 83 (FIG. 3) to send the inspection object 1 to the inspection table 20.
  • the discharge unit 82 is for discharging the inspection object 1 received from the inspection table 20 to the outside of the follow-up inspection device 10.
  • the discharge unit 82 is rotated by the driving force of the discharge unit drive motor 84 (FIG. 3) to send the inspection object 1 out of the follow-up inspection device 10.
  • the control unit 90 is for controlling the operation of the follow-up type inspection device 10 (in other words, for realizing the follow-up type inspection method). That is, the control unit 90 controls various motors (that is, the inspection table drive motor 60, the inner table drive motor 61, the outer table drive motor 62, the spin motor 73a, the supply unit drive motor 83, and the discharge unit drive motor 84). , Perform the inspection of the inspection object 1.
  • the follow-up inspection device 10 (control unit 90) has a process (process) described below, that is, an inspection process (inspection process) in which the inspection object 1 illuminated by the lighting device 66 is inspected by the camera 65 and the camera 65.
  • the change process (change process) for changing the inspection object 1 to be inspected is repeated.
  • the control unit 90 drives the inspection table drive motor 60 (continues the drive). Then, the main input shaft 50 rotates, and the inspection table drive gear 51 and the cap installation table drive gear 52 attached to the main input shaft 50 also rotate. Then, the inspection table 20 is rotated by the rotation of these drive gears.
  • the control unit 90 stops the inner table drive motor 61 and the outer table drive motor 62 (note that the drive motor is energized). Therefore, the inner table 30 and the outer table 40 do not move relative to the inspection table 20. That is, the inner table 30 and the outer table 40 rotate integrally with the inspection table 20.
  • the camera 65 and the illuminating device 66 face each other (in other words, the camera 65, the inspection object 1, and the illuminating device 66) with respect to the inspection object 1 indicated by the reference numeral A. They are arranged in a straight line). Then, when the inner table 30, the outer table 40, and the inspection table 20 rotate integrally in such a state, the camera 65 and the lighting device 66 face each other (opposite) to the inspection object 1 (camera 65, inspection object). 1.
  • the camera 65, the lighting device 66, and the inspection object 1 move (rotate) while maintaining the state in which the lighting device 66 is arranged in a straight line). That is, the camera 65 and the lighting device 66 move following the movement of the inspection object 1.
  • the inner table 30, the outer table 40, and the inspection table 20 are integrated until the inspection object 1 moves to the position indicated by the reference numeral B and the camera 65 and the lighting device 66 move to the positions indicated by the dotted lines. Rotate. Then, while this integrated rotation is being performed (that is, while the inspection object 1 moves from the position A to the position B), the inspection object 1 illuminated by the lighting device 66 is inspected by the camera 65. The inspection process is performed.
  • the control unit 90 maintains the drive of the inspection table drive motor 60 during the change process. Therefore, even during the change process, the main input shaft 50 rotates, and the inspection table drive gear 51 and the cap installation table drive gear 52 attached to the main input shaft 50 also rotate. Then, the rotation of these drive gears causes the inspection table 20 to rotate (the rotation of the inspection table 20 is maintained following the inspection process).
  • the control unit 90 drives the inner table drive motor 61 and the outer table drive motor 62. Then, the input shaft 53 for the inner table and the input shaft 55 for the outer table rotate, and the drive gear 54 for the inner table and the drive gear 56 for the outer table attached to the input shaft 53 for the inner table and the input shaft 55 for the outer table also rotate. Rotate. Then, due to the rotation of these drive gears, the inner table 30 and the outer table 40 move relative to the inspection table 20 in the circumferential direction.
  • the change process is started. That is, the inner table 30 and the outer table 40 are moved relative to the inspection table 20 in the circumferential direction. Therefore, the camera 65 and the lighting device 66 move relative to the inspection object 1 in the circumferential direction. Then, after the relative movement is performed for a while, the camera 65 and the lighting device 66 are in a state of facing (opposing) to the inspection object 1 (indicated by reference numeral X in FIG. 1) to be inspected next. The camera 65, the inspection object 1 to be inspected next, and the lighting device 66 are arranged in a straight line). In this way, the inspection object 1 to be inspected by the camera 65 is changed.
  • the inspection table 20 rotates during the change process. More specifically, during the change process, the state in which the (inspected) inspection object 1 is located at the position indicated by the reference numeral B to the state in which the next inspection object X is located at the position indicated by the reference numeral A.
  • the inspection table 20 rotates until the result becomes. Then, during the rotation of the inspection table 20, the camera 65 and the lighting device 66 return to the position facing (opposing) the next inspection object X at the position A (the position shown by the solid line in FIG. 2). It has become like. That is, the inner table 30 and the outer table 40 rotate in the direction opposite to the rotation direction of the inspection table 20 and return from the dotted line position in FIG. 1 to the solid line position.
  • FIG. 4 shows the relationship between the elapsed time and the rotation angle of the inner table drive motor 61 (outer table drive motor 62). As shown in FIG. 4, the motor is stopped every time the inspection process is performed, and the motor is driven every time the change process is performed.
  • the inspection object 1 is sequentially sent (set) to the inspection table 20 by driving the supply unit drive motor 83 and rotating the supply unit 80. Further, the inspected object 1 is sent out (discharged) to the outside of the follow-up type inspection device 10 by driving the discharge unit drive motor 84 and rotating the discharge unit 82. Further, the spin operation of the inspection object 1 is executed by driving the spin motor 73a and rotating the belt 73c at least when the inspection process is performed.
  • the inspection table 20 in which the inspection object 1 is supported and can rotate about the central axis C, and the inspection table drive for rotating the inspection table 20.
  • a motor 60 and one of the inspection device (camera 65) and the lighting device 66 are supported, and are attached to the inspection table 20 in the radial direction of the inspection table 20 via the inner table bearing 32, and are centered.
  • the inner table 30 rotatable about the axis C, the inner table drive motor 61 for rotating the inner table 30, and the other device of the camera 65 and the lighting device 66 are supported, and the inspection table 20 is supported.
  • An outer table 40 that is attached to the inspection table 20 on the outer side in the radial direction via an outer table bearing 42 and can rotate about the central axis C, an outer table drive motor 62 for rotating the outer table 40, and an inspection table.
  • an outer table drive motor 62 for rotating the outer table 40
  • an inspection table By driving the drive motor 60 and stopping the inner table drive motor 61 and the outer table drive motor 62, the inspection table 20, the outer table 40, and the inner table 30 are integrally rotated and illuminated by the lighting device 66.
  • the inspection process of inspecting the inspected object 1 with the camera 65 and the inner table drive motor 61 and the outer table drive motor 62 are driven to move the inner table 30 and the outer table 40 relative to the inspection table 20 to move the camera.
  • the inspection table (inspection object) is moved (rotated) by being driven by the inspection table drive motor, and the inner table and the outer table (inspection device and lighting device) are inspected.
  • the inspection table By driving with a drive motor different from the drive motor for the table, it was moved (swinged) according to the movement of the inspection table.
  • the inspection when the inspection is executed, not only the drive motor for the inspection table but also the other drive motor must be driven, and the vibration of the follow-up type inspection device becomes remarkable and the follow-up is performed. It cannot be said that the inspection accuracy of the type inspection device was good.
  • the inner table drive motor 61 (outer table drive) for rotating the inner table 30 (outer table 40) is separated from the inspection table drive motor 60 for rotating the inspection table 20.
  • the motor 62 is prepared, the inner table drive motor 61 (outer table drive motor 62) is driven only during the change process, and the inner table drive motor 61 (outer table drive) is driven during the inspection process.
  • the motor 62) is stopped. Therefore, when the inspection is executed, the vibration of the follow-up inspection device 10 is suppressed as compared with the conventional example because the inner table drive motor 61 (outer table drive motor 62) is not driven.
  • the follow-up type inspection device 10 according to the present embodiment, it is possible to suppress the vibration of the follow-up type inspection device 10 as much as possible when the inspection process is executed, and improve the inspection accuracy of the follow-up type inspection device 10. It will be possible.
  • the inner table 30 is provided with the inner table drive motor 61, and the inspection table 20 is provided with the gear teeth 20b in the inspection table. It has an inner table drive gear 54 that meshes with the inspection table inner gear tooth 20b, and an inner table input shaft 53 that is connected to the inner table drive motor 61 and is provided with the inner table drive gear 54. And said.
  • the outer table 40 is provided with the outer table drive motor 62
  • the inspection table 20 is provided with the inspection table outer gear teeth 20a.
  • the outer table drive gear 56 that meshes with the inspection table outer gear teeth 20a, and the outer table input shaft 55 that is connected to the outer table drive motor 62 and is provided with the outer table drive gear 56. Therefore, when the inspection process is executed, not only the outer table drive motor 62 but also the outer table input shaft 55 provided with the outer table drive gear 56 is stopped. Therefore, the vibration of the follow-up type inspection device 10 can be further suppressed, and the inspection accuracy of the follow-up type inspection device 10 can be further improved.
  • the camera 65 and the lighting device 66 are placed in a state of facing (opposing) the inspection target 1 to be inspected next at the time of the change processing, but the next inspection is performed. It was decided that the target was the one to be inspected one step ahead (one feed).
  • the present invention is not limited to this, and may be the following example. That is, by placing a plurality of cameras 65 and the lighting device 66 so as to be able to cover a wide range, two inspection objects may be inspected at the same time. Then, in this case, the camera 65 and the lighting device 66 are placed in a state of facing (opposing) the next inspection object 1 to be inspected at the time of the change processing.
  • the inspection target may be two inspection targets two ahead (two feeds).

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Abstract

The present invention is characterized by comprising: an inspection table which supports an inspection target and which is capable of rotation about a central axis; an inspection table driving motor which is for rotating the inspection table; an inner table which supports one of an inspection device and a lighting device, which is mounted to the inspection table so as to be radially inward of the inspection table with a bearing therebetween, and which is capable of rotation about the central axis; an inner table driving motor which is for rotating the inner table; an outer table which supports the other one of the inspection device and the lighting device, which is mounted to the inspection table so as to be radially outward of the inspection table with a bearing therebetween, and which is capable of rotation about the central axis; an outer table driving motor which is for rotating the outer table; and a control unit which repeatedly performs an inspection process of driving the inspection table driving motor and stopping the inner table driving motor and the outer table driving motor so as to rotate the inspection table, the outer table, and the inner table in an integrated manner and inspecting, with the inspection device, the inspection target that is illuminated by the lighting device, and a change process of driving the inner table driving motor and the outer table driving motor while maintaining the driving of the inspection table driving motor, so as to move the inner table and the outer table relatively to the rotating inspection table and change the inspection target to be inspected by the inspection device.

Description

追従型検査装置、及び、追従型検査方法Follow-up inspection device and follow-up inspection method
　本発明は、追従型検査装置、及び、追従型検査方法に関する。 The present invention relates to a follow-up inspection device and a follow-up inspection method.
　検査対象物が支持され、中心軸を中心として回転可能な検査テーブルと、検査装置及び照明装置のうちの一方の装置が支持され、前記中心軸を中心として回転可能な内側テーブルと、検査装置及び照明装置のうちの他方の装置が支持され、前記中心軸を中心として回転可能な外側テーブルと、これらのテーブルを駆動する駆動モーターを有する追従型検査装置は、既によく知られている。このような追従型装置では、検査テーブルの回転に応じて内側テーブル及び外側テーブルを回転させ、検査装置や照明装置を検査対象物の移動に追従させて移動させることにより、検査が行われる。 An inspection table that supports an object to be inspected and can rotate around a central axis, an inner table that supports one of an inspection device and a lighting device and can rotate around the central axis, an inspection device, and an inspection device. A follow-up inspection device in which the other device of the lighting device is supported and has an outer table rotatable about the central axis and a drive motor for driving these tables is already well known. In such a follow-up type device, the inspection is performed by rotating the inner table and the outer table according to the rotation of the inspection table and moving the inspection device and the lighting device to follow the movement of the inspection object.
特開平９－２９４９６４号公報Japanese Unexamined Patent Publication No. 9-294964
　近年、追従型検査装置の検査精度の要求が厳しくなってきている。そして、検査精度を向上させるためには、検査処理が実行される際に、追従型検査装置になるべく振動が生じないようにすることが要請される。 In recent years, the demand for inspection accuracy of follow-up inspection equipment has become stricter. Then, in order to improve the inspection accuracy, it is required that the follow-up inspection device be as small as possible in vibration when the inspection process is executed.
　本発明は、かかる課題に鑑みてなされたものであり、その目的とするところは、検査処理が実行される際に追従型検査装置の振動をなるべく抑えて、追従型検査装置の検査精度を向上させることにある。 The present invention has been made in view of the above problems, and an object of the present invention is to suppress vibration of the follow-up inspection device as much as possible when the inspection process is executed to improve the inspection accuracy of the follow-up inspection device. To let you.
　上記目的を達成するための主たる発明は、
　検査対象物が支持され、中心軸を中心として回転可能な検査テーブルと、
　前記検査テーブルを回転させるための検査テーブル駆動モーターと、
　検査装置及び照明装置のうちの一方の装置が支持され、かつ、前記検査テーブルの径方向における内側において前記検査テーブルに軸受を介して取り付けられ、前記中心軸を中心として回転可能な内側テーブルと、
　前記内側テーブルを回転させるための内側テーブル駆動モーターと、
　検査装置及び照明装置のうちの他方の装置が支持され、かつ、前記検査テーブルの径方向における外側において前記検査テーブルに軸受を介して取り付けられ、前記中心軸を中心として回転可能な外側テーブルと、
　前記外側テーブルを回転させるための外側テーブル駆動モーターと、
　前記検査テーブル駆動モーターを駆動させ、かつ、前記内側テーブル駆動モーター及び前記外側テーブル駆動モーターを停止させることにより、前記検査テーブルと前記外側テーブルと前記内側テーブルとを一体的に回転させ、前記照明装置に照らされた前記検査対象物を前記検査装置で検査する検査処理と、
　前記内側テーブル駆動モーター及び前記外側テーブル駆動モーターを駆動させて、前記検査テーブルに対し前記内側テーブル及び前記外側テーブルを相対移動させて前記検査装置で検査する検査対象物を変更する変更処理と、
　を繰り返す制御部と、
　を有することを特徴とする追従型検査装置である。 The main invention for achieving the above object is
An inspection table that supports the inspection object and can rotate around the central axis,
An inspection table drive motor for rotating the inspection table,
An inner table in which one of the inspection device and the lighting device is supported and is attached to the inspection table via a bearing inside the inspection table in the radial direction and is rotatable about the central axis.
An inner table drive motor for rotating the inner table, and
An outer table in which the other device of the inspection device and the lighting device is supported and is attached to the inspection table via a bearing on the radial side of the inspection table and is rotatable about the central axis.
An outer table drive motor for rotating the outer table, and
By driving the inspection table drive motor and stopping the inner table drive motor and the outer table drive motor, the inspection table, the outer table, and the inner table are integrally rotated, and the lighting device is used. The inspection process of inspecting the inspection object illuminated by the inspection device with the inspection device,
A change process in which the inner table drive motor and the outer table drive motor are driven to move the inner table and the outer table relative to the inspection table to change the inspection object to be inspected by the inspection device.
And the control unit that repeats
It is a follow-up type inspection apparatus characterized by having.
　本発明の他の特徴については、本明細書及び添付図面の記載により明らかにする。 Other features of the present invention will be clarified by the description in the present specification and the accompanying drawings.
追従型検査装置１０の上面図である。It is a top view of the follow-up type inspection apparatus 10. 追従型検査装置１０の縦断面図である。It is a vertical sectional view of the follow-up type inspection apparatus 10. 追従型検査装置１０の概略ブロック図である。It is a schematic block diagram of the follow-up type inspection apparatus 10. 経過時間と内側テーブル駆動モーター６１（外側テーブル駆動モーター６２）の回転角との関係を示した模式図である。It is a schematic diagram which showed the relationship between the elapsed time and the rotation angle of the inner table drive motor 61 (the outer table drive motor 62).
　本明細書及び添付図面の記載により、少なくとも、以下の事項が明らかとなる。 At least the following matters will be clarified by the description in this specification and the attached drawings.
　検査対象物が支持され、中心軸を中心として回転可能な検査テーブルと、
　前記検査テーブルを回転させるための検査テーブル駆動モーターと、
　検査装置及び照明装置のうちの一方の装置が支持され、かつ、前記検査テーブルの径方向における内側において前記検査テーブルに軸受を介して取り付けられ、前記中心軸を中心として回転可能な内側テーブルと、
　前記内側テーブルを回転させるための内側テーブル駆動モーターと、
　検査装置及び照明装置のうちの他方の装置が支持され、かつ、前記検査テーブルの径方向における外側において前記検査テーブルに軸受を介して取り付けられ、前記中心軸を中心として回転可能な外側テーブルと、
　前記外側テーブルを回転させるための外側テーブル駆動モーターと、
　前記検査テーブル駆動モーターを駆動させ、かつ、前記内側テーブル駆動モーター及び前記外側テーブル駆動モーターを停止させることにより、前記検査テーブルと前記外側テーブルと前記内側テーブルとを一体的に回転させ、前記照明装置に照らされた前記検査対象物を前記検査装置で検査する検査処理と、
　前記内側テーブル駆動モーター及び前記外側テーブル駆動モーターを駆動させて、前記検査テーブルに対し前記内側テーブル及び前記外側テーブルを相対移動させて前記検査装置で検査する検査対象物を変更する変更処理と、
　を繰り返す制御部と、
　を有することを特徴とする追従型検査装置。 An inspection table that supports the inspection object and can rotate around the central axis,
An inspection table drive motor for rotating the inspection table,
An inner table in which one of the inspection device and the lighting device is supported and is attached to the inspection table via a bearing inside the inspection table in the radial direction and is rotatable about the central axis.
An inner table drive motor for rotating the inner table, and
An outer table in which the other device of the inspection device and the lighting device is supported and is attached to the inspection table via a bearing on the radial side of the inspection table and is rotatable about the central axis.
An outer table drive motor for rotating the outer table, and
By driving the inspection table drive motor and stopping the inner table drive motor and the outer table drive motor, the inspection table, the outer table, and the inner table are integrally rotated, and the lighting device is used. The inspection process of inspecting the inspection object illuminated by the inspection device with the inspection device,
A change process in which the inner table drive motor and the outer table drive motor are driven to move the inner table and the outer table relative to the inspection table to change the inspection object to be inspected by the inspection device.
And the control unit that repeats
A follow-up inspection device characterized by having.
　かかる場合には、検査処理が実行される際に追従型検査装置の振動をなるべく抑えて、追従型検査装置の検査精度を向上させることが可能となる。 In such a case, it is possible to suppress the vibration of the follow-up type inspection device as much as possible when the inspection process is executed, and improve the inspection accuracy of the follow-up type inspection device.
　また、前記内側テーブルには、前記内側テーブル駆動モーターが設けられており、
　前記検査テーブルには、内側テーブル用ギア歯が備えられており、
　前記内側テーブル用ギア歯と噛合する内側テーブル用駆動ギアと、
　前記内側テーブル駆動モーターに連結され、かつ、前記内側テーブル用駆動ギアが設けられた内側テーブル用入力軸と、を有することとしてもよい。 Further, the inner table is provided with the inner table drive motor.
The inspection table is provided with gear teeth for the inner table.
The inner table drive gear that meshes with the inner table gear teeth,
It may have an inner table input shaft connected to the inner table drive motor and provided with the inner table drive gear.
　かかる場合には、追従型検査装置の振動をより一層抑えることができ、追従型検査装置の検査精度をより向上させることが可能となる。 In such a case, the vibration of the follow-up type inspection device can be further suppressed, and the inspection accuracy of the follow-up type inspection device can be further improved.
　また、前記外側テーブルには、前記外側テーブル駆動モーターが設けられており、
　前記検査テーブルには、外側テーブル用ギア歯が備えられており、
　前記外側テーブル用ギア歯と噛合する外側テーブル用駆動ギアと、
　前記外側テーブル駆動モーターに連結され、かつ、前記外側テーブル用駆動ギアが設けられた外側テーブル用入力軸と、を有することとしてもよい。 Further, the outer table is provided with the outer table drive motor.
The inspection table is provided with gear teeth for the outer table.
The outer table drive gear that meshes with the outer table gear teeth,
It may have an outer table input shaft that is connected to the outer table drive motor and is provided with the outer table drive gear.
　かかる場合には、追従型検査装置の振動をより一層抑えることができ、追従型検査装置の検査精度をより向上させることが可能となる。 In such a case, the vibration of the follow-up type inspection device can be further suppressed, and the inspection accuracy of the follow-up type inspection device can be further improved.
　次に、検査対象物が支持され、中心軸を中心として回転可能な検査テーブルを、回転させるための検査テーブル駆動モーターを駆動させ、かつ、
　検査装置及び照明装置のうちの一方の装置が支持され、かつ、前記検査テーブルの径方向における内側において前記検査テーブルに軸受を介して取り付けられ、前記中心軸を中心として回転可能な内側テーブルを、回転させるための内側テーブル駆動モーター、及び、検査装置及び照明装置のうちの他方の装置が支持され、かつ、前記検査テーブルの径方向における外側において前記検査テーブルに軸受を介して取り付けられ、前記中心軸を中心として回転可能な外側テーブル、を回転させるための外側テーブル駆動モーターを停止させることにより、
　前記検査テーブルと前記外側テーブルと前記内側テーブルとを一体的に回転させ、前記照明装置に照らされた前記検査対象物を前記検査装置で検査する検査工程と、
　前記内側テーブル駆動モーター及び前記外側テーブル駆動モーターを駆動させて、前記検査テーブルに対し前記内側テーブル及び前記外側テーブルを相対移動させて前記検査装置で検査する検査対象物を変更する変更工程と、
　を有することを特徴とする追従型検査方法。 Next, the inspection table drive motor for rotating the inspection table on which the inspection object is supported and rotatable about the central axis is driven, and
An inner table in which one of the inspection device and the lighting device is supported and is attached to the inspection table via a bearing inside the inspection table in the radial direction and is rotatable about the central axis. An inner table drive motor for rotation and the other device of the inspection device and the lighting device are supported and attached to the inspection table on the radial outside of the inspection table via bearings, said center. By stopping the outer table drive motor for rotating the outer table, which is rotatable about the axis.
An inspection step in which the inspection table, the outer table, and the inner table are integrally rotated to inspect the inspection object illuminated by the lighting device with the inspection device.
A change step of driving the inner table drive motor and the outer table drive motor to move the inner table and the outer table relative to the inspection table to change the inspection object to be inspected by the inspection device.
A follow-up inspection method characterized by having.
　かかる場合には、検査処理が実行される際に追従型検査装置の振動をなるべく抑えて、追従型検査装置の検査精度を向上させることが可能となる。 In such a case, it is possible to suppress the vibration of the follow-up type inspection device as much as possible when the inspection process is executed, and improve the inspection accuracy of the follow-up type inspection device.
　＝＝＝本実施の形態に係る追従型検査装置１０及び追従型検査方法について＝＝＝
　ここでは、追従型検査装置１０及び追従型検査方法の一例について、図１乃至図４を参照しながら説明する。図１は、追従型検査装置１０の上面図である。図２は、追従型検査装置１０の縦断面図である。図３は、追従型検査装置１０の概略ブロック図である。図４については、後述する。 === About the follow-up type inspection device 10 and the follow-up type inspection method according to the present embodiment ===
Here, an example of the follow-up type inspection device 10 and the follow-up type inspection method will be described with reference to FIGS. 1 to 4. FIG. 1 is a top view of the follow-up inspection device 10. FIG. 2 is a vertical cross-sectional view of the follow-up inspection device 10. FIG. 3 is a schematic block diagram of the follow-up inspection device 10. FIG. 4 will be described later.
　＜＜＜追従型検査装置１０の構成例について＞＞＞
　追従型検査装置１０は、検査対象物１（例えば、バイアル、アンプル、シリンジ等の液体充填装置）を検査する装置である。すなわち、追従型検査装置１０は、検査対象物１について品質上必要とされる項目、すなわち、外観上の傷、変形、割れ、欠け、液中の異物、液量の異常、液の変色等を検査する。 <<< Configuration example of follow-up inspection device 10 >>>
The follow-up inspection device 10 is a device for inspecting an inspection object 1 (for example, a liquid filling device such as a vial, an ampoule, or a syringe). That is, the follow-up inspection device 10 detects items required for quality of the inspection object 1, that is, appearance scratches, deformations, cracks, chips, foreign substances in the liquid, abnormal liquid volume, discoloration of the liquid, and the like. inspect.
　追従型検査装置１０は、固定部１２と、検査テーブル２０と、キャップ設置テーブル２５と、メイン入力軸５０と、検査テーブル駆動モーター６０と、内側テーブル３０と、内側テーブル用入力軸５３と、内側テーブル駆動モーター６１と、外側テーブル４０と、外側テーブル用入力軸５５と、外側テーブル駆動モーター６２と、スピン駆動部７３と、供給部８０と、排出部８２と、制御部９０と、を備えている。 The follow-up inspection device 10 includes a fixed portion 12, an inspection table 20, a cap installation table 25, a main input shaft 50, an inspection table drive motor 60, an inner table 30, an inner table input shaft 53, and an inner side. A table drive motor 61, an outer table 40, an outer table input shaft 55, an outer table drive motor 62, a spin drive unit 73, a supply unit 80, a discharge unit 82, and a control unit 90 are provided. There is.
　固定部１２は、検査が実行される際に、検査対象物１を固定するためのもの（検査対象物１が固定された状態を維持するためのもの）である。この固定部１２は、設置部１３とキャップ部１５とを備えている。 The fixing portion 12 is for fixing the inspection object 1 when the inspection is executed (for maintaining the state in which the inspection object 1 is fixed). The fixing portion 12 includes an installation portion 13 and a cap portion 15.
　設置部１３は、検査対象物１が設置される部分である。この設置部１３は、後述する検査テーブル２０の上面に複数設けられている。そして、複数の設置部１３は、検査テーブル２０の周方向において並ぶように備えられている。 The installation unit 13 is a portion where the inspection object 1 is installed. A plurality of the installation portions 13 are provided on the upper surface of the inspection table 20 described later. The plurality of installation portions 13 are provided so as to be lined up in the circumferential direction of the inspection table 20.
　キャップ部１５は、設置部１３に設置された検査対象物１を上方から押さえつけて、検査対象物１の固定をより適切にするためのものである。このキャップ部１５は、後述するキャップ設置テーブル２５に複数設置されている。そして、複数のキャップ部１５は、キャップ設置テーブル２５の周方向において並ぶように備えられている。 The cap portion 15 is for pressing the inspection target object 1 installed in the installation portion 13 from above to make the inspection target object 1 more appropriately fixed. A plurality of the cap portions 15 are installed on the cap installation table 25 described later. The plurality of cap portions 15 are provided so as to be lined up in the circumferential direction of the cap installation table 25.
　検査テーブル２０は、中心軸Ｃを中心として回転可能であり、検査対象物１が前記固定部１２（設置部１３）を介して支持されるテーブルである。そして、当該検査テーブル２０は、連続的に回転することにより設置部１３に設置された検査対象物１を連続的に回転させるようになっている。この検査テーブル２０は、上面視において円形状を有しており、ベース部７０に取り付けられた固定軸１８に検査テーブル軸受２２を介して回転自在に取り付けられている。 The inspection table 20 is a table that is rotatable about the central axis C and in which the inspection object 1 is supported via the fixing portion 12 (installation portion 13). Then, the inspection table 20 is adapted to continuously rotate the inspection object 1 installed in the installation unit 13 by continuously rotating the inspection table 20. The inspection table 20 has a circular shape when viewed from above, and is rotatably attached to a fixed shaft 18 attached to the base portion 70 via an inspection table bearing 22.
　また、当該検査テーブル２０の径方向における最も外側には、ギア歯（便宜上、検査テーブル外ギア歯２０ａ（外側テーブル用ギア歯に相当）と呼ぶ）が設けられており、当該検査テーブル外ギア歯２０ａは、後述する検査テーブル用駆動ギア５１及び外側テーブル用駆動ギア５６と噛合している。また、検査テーブル外ギア歯２０ａよりも内側には、検査テーブル外ギア歯２０ａとは異なるギア歯（便宜上、検査テーブル内ギア歯２０ｂ（内側テーブル用ギア歯に相当）と呼ぶ）が設けられており、当該検査テーブル内ギア歯２０ｂは、後述する内側テーブル用駆動ギア５４と噛合している。 Further, gear teeth (referred to as inspection table outer gear teeth 20a (corresponding to outer table gear teeth) for convenience) are provided on the outermost side of the inspection table 20 in the radial direction, and the inspection table outer gear teeth are provided. 20a meshes with the inspection table drive gear 51 and the outer table drive gear 56, which will be described later. Further, inside the inspection table outer gear tooth 20a, a gear tooth different from the inspection table outer gear tooth 20a (for convenience, referred to as an inspection table inner gear tooth 20b (corresponding to an inner table gear tooth)) is provided. The gear tooth 20b in the inspection table meshes with the drive gear 54 for the inner table, which will be described later.
　キャップ設置テーブル２５は、中心軸Ｃを中心として回転可能であり、検査対象物１が前記固定部１２（キャップ部１５）を介して支持されるテーブルである。そして、当該キャップ設置テーブル２５は、検査テーブル２０に同期して（検査テーブル２０と同様の速度で）連続的に回転する。そして、このことにより、検査テーブル２０と協働して、設置部１３に設置された検査対象物１を連続的に回転させるようになっている。この検査テーブル２０は、上面視において円形状を有しており、固定軸１８に固定された固定部材７１にキャップ設置テーブル軸受２７を介して回転自在に取り付けられている。 The cap installation table 25 is a table that is rotatable about the central axis C and in which the inspection object 1 is supported via the fixing portion 12 (cap portion 15). Then, the cap installation table 25 continuously rotates in synchronization with the inspection table 20 (at the same speed as the inspection table 20). As a result, the inspection object 1 installed in the installation unit 13 is continuously rotated in cooperation with the inspection table 20. The inspection table 20 has a circular shape when viewed from above, and is rotatably attached to a fixing member 71 fixed to the fixed shaft 18 via a cap mounting table bearing 27.
　また、当該キャップ設置テーブル２５の径方向における最も外側には、ギア歯（便宜上、キャップ設置テーブルギア歯２５ａと呼ぶ）が設けられており、当該キャップ設置テーブルギア歯２５ａは、後述するキャップ設置テーブル用駆動ギア５２と噛合している。 Further, a gear tooth (referred to as a cap installation table gear tooth 25a for convenience) is provided on the outermost side of the cap installation table 25 in the radial direction, and the cap installation table gear tooth 25a is a cap installation table described later. It meshes with the drive gear 52.
　なお、本実施の形態において設けられている上述したキャップ部１５、固定部材７１、キャップ設置テーブル２５、及び、キャップ設置テーブル軸受２７は、検査対象物１の固定をより適切にするためのものであり、必ずしも必要な部材ではない。特に、検査対象物１の上下方向の長さ（高さ）が小さい場合には、容易に省略することが可能である。 The above-mentioned cap portion 15, fixing member 71, cap installation table 25, and cap installation table bearing 27 provided in the present embodiment are for making the inspection object 1 more appropriate to be fixed. Yes, it is not always a necessary member. In particular, when the length (height) of the inspection object 1 in the vertical direction is small, it can be easily omitted.
　メイン入力軸５０は、後述する検査テーブル駆動モーター６０に連結され、かつ、検査テーブル外ギア歯２０ａと噛合する検査テーブル用駆動ギア５１及びキャップ設置テーブルギア歯２５ａと噛合するキャップ設置テーブル用駆動ギア５２が設けられた（取り付けられた）軸である。このメイン入力軸５０は、固定軸１８に固定された固定アーム７２に、回転自在に取り付けられている。そして、メイン入力軸５０が回転すると、検査テーブル用駆動ギア５１及びキャップ設置テーブル用駆動ギア５２も一体的に回転し、検査テーブル２０とキャップ設置テーブル２５を回転させることができるようになっている。 The main input shaft 50 is connected to the inspection table drive motor 60 to be described later, and the inspection table drive gear 51 that meshes with the inspection table outer gear tooth 20a and the cap installation table drive gear that meshes with the cap installation table gear tooth 25a. 52 is a provided (attached) shaft. The main input shaft 50 is rotatably attached to a fixed arm 72 fixed to the fixed shaft 18. When the main input shaft 50 rotates, the inspection table drive gear 51 and the cap installation table drive gear 52 also rotate integrally, so that the inspection table 20 and the cap installation table 25 can be rotated. ..
　検査テーブル駆動モーター６０は、検査テーブル２０を回転させるためのものである。また、検査テーブル駆動モーター６０は、本実施の形態のようにキャップ設置テーブル２５が設けられているときには、キャップ設置テーブル２５を回転させる役割も果たす。この検査テーブル駆動モーター６０は、サーボモーターであり、ベース部７０に設置されている。 The inspection table drive motor 60 is for rotating the inspection table 20. Further, the inspection table drive motor 60 also plays a role of rotating the cap installation table 25 when the cap installation table 25 is provided as in the present embodiment. The inspection table drive motor 60 is a servo motor and is installed on the base portion 70.
　内側テーブル３０は、中心軸Ｃを中心として回転可能であり、検査装置の一例としてのカメラ６５及び照明装置６６のうちの一方の装置（本実施の形態においては、照明装置６６）が支持されるテーブルである。この内側テーブル３０は、検査テーブル２０の径方向における内側において検査テーブル２０に軸受（便宜上、内側テーブル軸受３２と呼ぶ）を介して取り付けられている。 The inner table 30 is rotatable about the central axis C, and one of the camera 65 and the lighting device 66 (in the present embodiment, the lighting device 66) as an example of the inspection device is supported. It's a table. The inner table 30 is attached to the inspection table 20 via a bearing (referred to as an inner table bearing 32 for convenience) inside the inspection table 20 in the radial direction.
　そして、当該内側テーブル３０は、回転することにより検査テーブル２０に対し周方向において相対移動する。このことにより、径方向において照明装置６６と正対する検査対象物１が変更される。つまり、照明装置６６で照らされる検査対象物１が別の検査対象物１に変わるようになっている。 Then, the inner table 30 moves relative to the inspection table 20 in the circumferential direction by rotating. As a result, the inspection object 1 facing the lighting device 66 in the radial direction is changed. That is, the inspection object 1 illuminated by the lighting device 66 is changed to another inspection object 1.
　なお、内側テーブル３０は、上面視において円形状を有している。 The inner table 30 has a circular shape when viewed from above.
　内側テーブル用入力軸５３は、内側テーブル駆動モーター６１に連結され、かつ、検査テーブル内ギア歯２０ｂと噛合する内側テーブル用駆動ギア５４が設けられた（取り付けられた）回転可能な軸である。 The input shaft 53 for the inner table is a rotatable shaft connected to the inner table drive motor 61 and provided with (attached) the inner table drive gear 54 that meshes with the gear teeth 20b in the inspection table.
　内側テーブル駆動モーター６１は、内側テーブル３０を回転させるためのものである。この内側テーブル駆動モーター６１は、サーボモーターであり、内側テーブル３０に設けられている。 The inner table drive motor 61 is for rotating the inner table 30. The inner table drive motor 61 is a servo motor and is provided on the inner table 30.
　そして、内側テーブル駆動モーター６１の駆動力により内側テーブル用入力軸５３が回転すると、内側テーブル用駆動ギア５４も一体的に回転する。そうすると、内側テーブル３０が、検査テーブル２０に対し周方向に相対移動する。そして、このことにより、検査テーブル２０上の照明装置６６（及び内側テーブル駆動モーター６１）も周方向に相対移動する。 Then, when the input shaft 53 for the inner table is rotated by the driving force of the inner table drive motor 61, the drive gear 54 for the inner table is also rotated integrally. Then, the inner table 30 moves relative to the inspection table 20 in the circumferential direction. As a result, the lighting device 66 (and the inner table drive motor 61) on the inspection table 20 also moves relative to each other in the circumferential direction.
　外側テーブル４０は、中心軸Ｃを中心として回転可能であり、カメラ６５及び照明装置６６のうちの他方の装置（本実施の形態においては、カメラ６５）が支持されるテーブルである。この外側テーブル４０は、検査テーブル２０の径方向における外側において検査テーブル２０に軸受（便宜上、外側テーブル軸受４２と呼ぶ）を介して取り付けられている。 The outer table 40 is a table that is rotatable about the central axis C and supports the other device (camera 65 in the present embodiment) of the camera 65 and the lighting device 66. The outer table 40 is attached to the inspection table 20 via a bearing (referred to as an outer table bearing 42 for convenience) on the outer side of the inspection table 20 in the radial direction.
　そして、当該外側テーブル４０は、回転することにより検査テーブル２０に対し周方向において相対移動する。このことにより、径方向においてカメラ６５と正対する検査対象物１が変更される。つまり、カメラ６５によって撮影される検査対象物１が別の検査対象物１に変わるようになっている。 Then, the outer table 40 moves relative to the inspection table 20 in the circumferential direction by rotating. As a result, the inspection object 1 facing the camera 65 in the radial direction is changed. That is, the inspection object 1 photographed by the camera 65 is changed to another inspection object 1.
　なお、外側テーブル４０は、上面視において略半円形状を有している。円形状としなかったのは、後述する供給部８０及び排出部８２との物理的干渉を回避するためである。 The outer table 40 has a substantially semicircular shape when viewed from above. The reason why the shape is not circular is to avoid physical interference with the supply unit 80 and the discharge unit 82, which will be described later.
　外側テーブル用入力軸５５は、外側テーブル駆動モーター６２に連結され、かつ、検査テーブル外ギア歯２０ａと噛合する外側テーブル用駆動ギア５６が設けられた（取り付けられた）回転可能な軸である。 The outer table input shaft 55 is a rotatable shaft connected to the outer table drive motor 62 and provided (attached) with the outer table drive gear 56 that meshes with the inspection table outer gear teeth 20a.
　外側テーブル駆動モーター６２は、外側テーブル４０を回転させるためのものである。この外側テーブル駆動モーター６２は、サーボモーターであり、外側テーブル４０に設けられている。 The outer table drive motor 62 is for rotating the outer table 40. The outer table drive motor 62 is a servo motor and is provided on the outer table 40.
　そして、外側テーブル駆動モーター６２の駆動力により外側テーブル用入力軸５５が回転すると、外側テーブル用駆動ギア５６も一体的に回転する。そうすると、外側テーブル４０が、検査テーブル２０に対し周方向に相対移動する。そして、このことにより、検査テーブル２０上のカメラ６５（及び外側テーブル駆動モーター６２）も周方向に相対移動する。 Then, when the input shaft 55 for the outer table is rotated by the driving force of the outer table drive motor 62, the drive gear 56 for the outer table is also rotated integrally. Then, the outer table 40 moves relative to the inspection table 20 in the circumferential direction. As a result, the camera 65 (and the outer table drive motor 62) on the inspection table 20 also moves relative to each other in the circumferential direction.
　スピン駆動部７３は、検査が実行される際に、設置部１３に設置された検査対象物１をスピンさせるためのものである。このスピン駆動部７３は、スピンモーター７３ａと、スピンモーター７３ａに連結されたスピン軸７３ｂと、スピン軸７３ｂに架けられ、設置部１３と接触するベルト７３ｃと、を備えている。そして、スピンモーター７３ａの駆動力によりスピン軸７３ｂが回転するとベルト７３ｃも回転し、回転するベルト７３ｃが設置部１３（検査対象物１）をスピンさせるようになっている。なお、本実施の形態においては、図から明らかなように、３つの設置部１３（検査対象物１）を同時にスピンさせるようになっている。 The spin drive unit 73 is for spinning the inspection object 1 installed in the installation unit 13 when the inspection is executed. The spin drive unit 73 includes a spin motor 73a, a spin shaft 73b connected to the spin motor 73a, and a belt 73c mounted on the spin shaft 73b and in contact with the installation unit 13. When the spin shaft 73b is rotated by the driving force of the spin motor 73a, the belt 73c also rotates, and the rotating belt 73c spins the installation portion 13 (inspection object 1). In the present embodiment, as is clear from the figure, the three installation portions 13 (inspection object 1) are spun at the same time.
　供給部８０は、検査対象物１を検査テーブル２０に供給するためのものである。この供給部８０は、供給部駆動モーター８３（図３）の駆動力により回転して、検査対象物１を検査テーブル２０に送り込むようになっている。 The supply unit 80 is for supplying the inspection object 1 to the inspection table 20. The supply unit 80 is rotated by the driving force of the supply unit drive motor 83 (FIG. 3) to send the inspection object 1 to the inspection table 20.
　排出部８２は、検査テーブル２０から受け取った検査対象物１を追従型検査装置１０外へ排出するためのものである。この排出部８２は、排出部駆動モーター８４（図３）の駆動力により回転して、検査対象物１を追従型検査装置１０外へ送り出すようになっている。 The discharge unit 82 is for discharging the inspection object 1 received from the inspection table 20 to the outside of the follow-up inspection device 10. The discharge unit 82 is rotated by the driving force of the discharge unit drive motor 84 (FIG. 3) to send the inspection object 1 out of the follow-up inspection device 10.
　制御部９０は、追従型検査装置１０の動作を制御するためのもの（換言すれば、追従型検査方法を実現するためのもの）である。つまり、制御部９０は、各種モーター（すなわち、検査テーブル駆動モーター６０、内側テーブル駆動モーター６１、外側テーブル駆動モーター６２、スピンモーター７３ａ、供給部駆動モーター８３、排出部駆動モーター８４）を制御して、検査対象物１の検査を実行する。 The control unit 90 is for controlling the operation of the follow-up type inspection device 10 (in other words, for realizing the follow-up type inspection method). That is, the control unit 90 controls various motors (that is, the inspection table drive motor 60, the inner table drive motor 61, the outer table drive motor 62, the spin motor 73a, the supply unit drive motor 83, and the discharge unit drive motor 84). , Perform the inspection of the inspection object 1.
　＜＜＜追従型検査装置１０の動作例について＞＞＞
　次に、追従型検査装置１０の動作例について説明する。なお、以下に説明する追従型検査装置１０の各種動作は、主として制御部９０により実現される。 <<< Operation example of follow-up inspection device 10 >>>
Next, an operation example of the follow-up inspection device 10 will be described. The various operations of the follow-up inspection device 10 described below are mainly realized by the control unit 90.
　追従型検査装置１０（制御部９０）は、以下で説明する処理（工程）、すなわち、照明装置６６に照らされた検査対象物１をカメラ６５で検査する検査処理（検査工程）とカメラ６５で検査する検査対象物１を変更する変更処理（変更工程）とを繰り返す。 The follow-up inspection device 10 (control unit 90) has a process (process) described below, that is, an inspection process (inspection process) in which the inspection object 1 illuminated by the lighting device 66 is inspected by the camera 65 and the camera 65. The change process (change process) for changing the inspection object 1 to be inspected is repeated.
　検査処理の実行の際に、制御部９０は検査テーブル駆動モーター６０を駆動させる（駆動を継続する）。すると、メイン入力軸５０が回転し、メイン入力軸５０に取り付けられた検査テーブル用駆動ギア５１及びキャップ設置テーブル用駆動ギア５２も回転する。そして、これらの駆動ギアの回転により、検査テーブル２０が回転する。 When executing the inspection process, the control unit 90 drives the inspection table drive motor 60 (continues the drive). Then, the main input shaft 50 rotates, and the inspection table drive gear 51 and the cap installation table drive gear 52 attached to the main input shaft 50 also rotate. Then, the inspection table 20 is rotated by the rotation of these drive gears.
　一方で、検査処理の実行の際に、制御部９０は内側テーブル駆動モーター６１及び外側テーブル駆動モーター６２を停止させる（なお、駆動モーターへの通電は行っている）。そのため、内側テーブル３０や外側テーブル４０は、検査テーブル２０に対して相対移動を行わない。つまり、内側テーブル３０及び外側テーブル４０は、検査テーブル２０と一体的に回転することとなる。 On the other hand, when the inspection process is executed, the control unit 90 stops the inner table drive motor 61 and the outer table drive motor 62 (note that the drive motor is energized). Therefore, the inner table 30 and the outer table 40 do not move relative to the inspection table 20. That is, the inner table 30 and the outer table 40 rotate integrally with the inspection table 20.
　例えば、図１において、符号Ａで示した検査対象物１には、カメラ６５と照明装置６６が正対（対向）している（換言すれば、カメラ６５、検査対象物１、照明装置６６が一直線上に配置されている）。そして、かかる状態で、内側テーブル３０、外側テーブル４０、検査テーブル２０が一体的に回転すると、カメラ６５と照明装置６６が検査対象物１に正対（対向）した状態（カメラ６５、検査対象物１、照明装置６６が一直線上に配置された状態）を維持しつつ、カメラ６５、照明装置６６、及び、検査対象物１が移動する（回転する）。すなわち、カメラ６５と照明装置６６が検査対象物１の移動に追従して移動する。そして、検査対象物１が符号Ｂで示した位置に、また、カメラ６５及び照明装置６６が点線で示された位置に移動するまで、内側テーブル３０、外側テーブル４０、検査テーブル２０が一体的に回転する。そして、この一体的な回転が行われている間に（つまり、検査対象物１が位置Ａから位置Ｂまで移動する間に）、照明装置６６に照らされた検査対象物１をカメラ６５で検査する検査処理が行われる。 For example, in FIG. 1, the camera 65 and the illuminating device 66 face each other (in other words, the camera 65, the inspection object 1, and the illuminating device 66) with respect to the inspection object 1 indicated by the reference numeral A. They are arranged in a straight line). Then, when the inner table 30, the outer table 40, and the inspection table 20 rotate integrally in such a state, the camera 65 and the lighting device 66 face each other (opposite) to the inspection object 1 (camera 65, inspection object). 1. The camera 65, the lighting device 66, and the inspection object 1 move (rotate) while maintaining the state in which the lighting device 66 is arranged in a straight line). That is, the camera 65 and the lighting device 66 move following the movement of the inspection object 1. Then, the inner table 30, the outer table 40, and the inspection table 20 are integrated until the inspection object 1 moves to the position indicated by the reference numeral B and the camera 65 and the lighting device 66 move to the positions indicated by the dotted lines. Rotate. Then, while this integrated rotation is being performed (that is, while the inspection object 1 moves from the position A to the position B), the inspection object 1 illuminated by the lighting device 66 is inspected by the camera 65. The inspection process is performed.
　次に、変更処理が実行される。本実施の形態においては、当該変更処理の際に、制御部９０が検査テーブル駆動モーター６０の駆動を維持する。したがって、変更処理の際にも、メイン入力軸５０が回転し、メイン入力軸５０に取り付けられた検査テーブル用駆動ギア５１及びキャップ設置テーブル用駆動ギア５２も回転する。そして、これらの駆動ギアの回転により、検査テーブル２０が回転する（検査テーブル２０の回転が、検査処理に引き続いて維持される）。 Next, the change process is executed. In the present embodiment, the control unit 90 maintains the drive of the inspection table drive motor 60 during the change process. Therefore, even during the change process, the main input shaft 50 rotates, and the inspection table drive gear 51 and the cap installation table drive gear 52 attached to the main input shaft 50 also rotate. Then, the rotation of these drive gears causes the inspection table 20 to rotate (the rotation of the inspection table 20 is maintained following the inspection process).
　また、変更処理の実行の際には、制御部９０は内側テーブル駆動モーター６１及び外側テーブル駆動モーター６２を駆動させる。すると、内側テーブル用入力軸５３及び外側テーブル用入力軸５５が回転し、内側テーブル用入力軸５３及び外側テーブル用入力軸５５に取り付けられた内側テーブル用駆動ギア５４及び外側テーブル用駆動ギア５６も回転する。そして、これらの駆動ギアの回転により、内側テーブル３０及び外側テーブル４０が、検査テーブル２０に対し周方向に相対移動する。 Further, when the change process is executed, the control unit 90 drives the inner table drive motor 61 and the outer table drive motor 62. Then, the input shaft 53 for the inner table and the input shaft 55 for the outer table rotate, and the drive gear 54 for the inner table and the drive gear 56 for the outer table attached to the input shaft 53 for the inner table and the input shaft 55 for the outer table also rotate. Rotate. Then, due to the rotation of these drive gears, the inner table 30 and the outer table 40 move relative to the inspection table 20 in the circumferential direction.
　例えば、図１において、検査対象物１が符号Ｂで示した位置に、また、カメラ６５及び照明装置６６が点線で示された位置に移動すると、変更処理が開始される。すなわち、内側テーブル３０及び外側テーブル４０が、検査テーブル２０に対し周方向に相対移動される。そのため、検査対象物１に対しカメラ６５及び照明装置６６が周方向に相対移動する。そして、当該相対移動が暫く行われると、やがて、カメラ６５及び照明装置６６は、次の検査対象となる検査対象物１（図１において、符号Ｘで示す）に正対（対向）した状態（カメラ６５、次の検査対象となる検査対象物１、照明装置６６が一直線上に配置された状態）となる。このように、カメラ６５で検査する検査対象物１が変更されることとなる。 For example, in FIG. 1, when the inspection object 1 moves to the position indicated by the reference numeral B and the camera 65 and the lighting device 66 move to the position indicated by the dotted line, the change process is started. That is, the inner table 30 and the outer table 40 are moved relative to the inspection table 20 in the circumferential direction. Therefore, the camera 65 and the lighting device 66 move relative to the inspection object 1 in the circumferential direction. Then, after the relative movement is performed for a while, the camera 65 and the lighting device 66 are in a state of facing (opposing) to the inspection object 1 (indicated by reference numeral X in FIG. 1) to be inspected next. The camera 65, the inspection object 1 to be inspected next, and the lighting device 66 are arranged in a straight line). In this way, the inspection object 1 to be inspected by the camera 65 is changed.
　なお、本実施の形態においては、上述した通り、当該変更処理の際に、検査テーブル２０が回転する。より具体的には、変更処理の際に、（検査済みの）検査対象物１が符号Ｂで示した位置に位置する状態から次の検査対象物Ｘが符号Ａで示した位置に位置する状態となるまで検査テーブル２０が回転する。そして、この検査テーブル２０の回転の間に、カメラ６５及び照明装置６６が、位置Ａの次の検査対象物Ｘに正対（対向）する位置（図２において実線で示された位置）まで戻るようになっている。つまり、内側テーブル３０及び外側テーブル４０は、検査テーブル２０の回転方向とは逆方向に回転して、図１の点線位置から実線位置へ戻ることとなる。 In the present embodiment, as described above, the inspection table 20 rotates during the change process. More specifically, during the change process, the state in which the (inspected) inspection object 1 is located at the position indicated by the reference numeral B to the state in which the next inspection object X is located at the position indicated by the reference numeral A. The inspection table 20 rotates until the result becomes. Then, during the rotation of the inspection table 20, the camera 65 and the lighting device 66 return to the position facing (opposing) the next inspection object X at the position A (the position shown by the solid line in FIG. 2). It has become like. That is, the inner table 30 and the outer table 40 rotate in the direction opposite to the rotation direction of the inspection table 20 and return from the dotted line position in FIG. 1 to the solid line position.
　そして、上述した検査処理及び変更処理が繰り返されることにより、周方向に並んだ複数の検査対象物１の各々を順次検査することができるようになっている。なお、図４に、経過時間と内側テーブル駆動モーター６１（外側テーブル駆動モーター６２）の回転角との関係を示している。図４に示されているように、検査処理が行われる毎にモーターが停止され、変更処理が行われる毎にモーターが駆動される。 Then, by repeating the above-mentioned inspection process and change process, it is possible to sequentially inspect each of the plurality of inspection objects 1 arranged in the circumferential direction. Note that FIG. 4 shows the relationship between the elapsed time and the rotation angle of the inner table drive motor 61 (outer table drive motor 62). As shown in FIG. 4, the motor is stopped every time the inspection process is performed, and the motor is driven every time the change process is performed.
　なお、検査対象物１は、供給部駆動モーター８３が駆動され供給部８０が回転することにより、検査テーブル２０に順次送り込まれる（セットされる）。また、検査済みの検査対象物１は、排出部駆動モーター８４が駆動され排出部８２が回転することにより、追従型検査装置１０外へ送り出される（排出される）。また、検査対象物１のスピン動作は、少なくとも検査処理が行われる際に、スピンモーター７３ａが駆動されベルト７３ｃが回転することにより実行される。 The inspection object 1 is sequentially sent (set) to the inspection table 20 by driving the supply unit drive motor 83 and rotating the supply unit 80. Further, the inspected object 1 is sent out (discharged) to the outside of the follow-up type inspection device 10 by driving the discharge unit drive motor 84 and rotating the discharge unit 82. Further, the spin operation of the inspection object 1 is executed by driving the spin motor 73a and rotating the belt 73c at least when the inspection process is performed.
　＝＝＝本実施の形態に係る追従型検査装置１０等の有効性について＝＝＝
　上述した通り、本実施の形態に係る追従型検査装置１０は、検査対象物１が支持され、中心軸Ｃを中心として回転可能な検査テーブル２０と、検査テーブル２０を回転させるための検査テーブル駆動モーター６０と、検査装置（カメラ６５）及び照明装置６６のうちの一方の装置が支持され、かつ、検査テーブル２０の径方向における内側において検査テーブル２０に内側テーブル軸受３２を介して取り付けられ、中心軸Ｃを中心として回転可能な内側テーブル３０と、内側テーブル３０を回転させるための内側テーブル駆動モーター６１と、カメラ６５及び照明装置６６のうちの他方の装置が支持され、かつ、検査テーブル２０の径方向における外側において検査テーブル２０に外側テーブル軸受４２を介して取り付けられ、中心軸Ｃを中心として回転可能な外側テーブル４０と、外側テーブル４０を回転させるための外側テーブル駆動モーター６２と、検査テーブル駆動モーター６０を駆動させ、かつ、内側テーブル駆動モーター６１及び外側テーブル駆動モーター６２を停止させることにより、検査テーブル２０と外側テーブル４０と内側テーブル３０とを一体的に回転させ、照明装置６６に照らされた検査対象物１をカメラ６５で検査する検査処理と、内側テーブル駆動モーター６１及び外側テーブル駆動モーター６２を駆動させて、検査テーブル２０に対し内側テーブル３０及び外側テーブル４０を相対移動させてカメラ６５で検査する検査対象物１を変更する変更処理と、を繰り返す制御部９０と、を有することとした。そのため、検査処理が実行される際に追従型検査装置１０の振動をなるべく抑えて、追従型検査装置１０の検査精度を向上させることが可能となる。 === About the effectiveness of the follow-up inspection device 10 and the like according to the present embodiment ===
As described above, in the follow-up inspection device 10 according to the present embodiment, the inspection table 20 in which the inspection object 1 is supported and can rotate about the central axis C, and the inspection table drive for rotating the inspection table 20. A motor 60 and one of the inspection device (camera 65) and the lighting device 66 are supported, and are attached to the inspection table 20 in the radial direction of the inspection table 20 via the inner table bearing 32, and are centered. The inner table 30 rotatable about the axis C, the inner table drive motor 61 for rotating the inner table 30, and the other device of the camera 65 and the lighting device 66 are supported, and the inspection table 20 is supported. An outer table 40 that is attached to the inspection table 20 on the outer side in the radial direction via an outer table bearing 42 and can rotate about the central axis C, an outer table drive motor 62 for rotating the outer table 40, and an inspection table. By driving the drive motor 60 and stopping the inner table drive motor 61 and the outer table drive motor 62, the inspection table 20, the outer table 40, and the inner table 30 are integrally rotated and illuminated by the lighting device 66. The inspection process of inspecting the inspected object 1 with the camera 65 and the inner table drive motor 61 and the outer table drive motor 62 are driven to move the inner table 30 and the outer table 40 relative to the inspection table 20 to move the camera. It is decided to have a control unit 90 that repeats a change process for changing the inspection object 1 to be inspected in 65. Therefore, it is possible to suppress the vibration of the follow-up type inspection device 10 as much as possible when the inspection process is executed, and improve the inspection accuracy of the follow-up type inspection device 10.
　すなわち、従来においても、検査対象物が支持され、中心軸を中心として回転可能な検査テーブルと、検査装置及び照明装置のうちの一方の装置が支持され、前記中心軸を中心として回転可能な内側テーブルと、検査装置及び照明装置のうちの他方の装置が支持され、前記中心軸を中心として回転可能な外側テーブルと、これらのテーブルを駆動する駆動モーターを有する追従型検査装置はあったが、以下の点で、本実施の形態に係る追従型検査装置１０とは異なっていた。 That is, even in the past, an inspection table in which an inspection object is supported and can rotate about a central axis, and an inner side in which one of an inspection device and a lighting device is supported and can rotate around the central axis. There was a follow-up inspection device that supported a table and the other of the inspection and lighting devices, had an outer table rotatable about the central axis, and a drive motor to drive these tables. It was different from the follow-up inspection device 10 according to the present embodiment in the following points.
　従来例においては、検査を実行する際に、検査テーブル（検査対象物）を検査テーブル用駆動モーターで駆動することにより移動（回転）させ、内側テーブル及び外側テーブル（検査装置及び照明装置）を検査テーブル用駆動モーターとは別の駆動モーターで駆動することにより検査テーブルの移動に応じて移動（揺動）させていた。そして、このような従来例においては、検査を実行する際に、検査テーブル用駆動モーターだけではなく、前記別の駆動モーターも駆動しなければならず、追従型検査装置の振動が顕著となり、追従型検査装置の検査精度が良好とは言えなかった。 In the conventional example, when the inspection is executed, the inspection table (inspection object) is moved (rotated) by being driven by the inspection table drive motor, and the inner table and the outer table (inspection device and lighting device) are inspected. By driving with a drive motor different from the drive motor for the table, it was moved (swinged) according to the movement of the inspection table. In such a conventional example, when the inspection is executed, not only the drive motor for the inspection table but also the other drive motor must be driven, and the vibration of the follow-up type inspection device becomes remarkable and the follow-up is performed. It cannot be said that the inspection accuracy of the type inspection device was good.
　これに対し、本実施の形態においては、検査テーブル２０を回転させるための検査テーブル駆動モーター６０とは別に、内側テーブル３０（外側テーブル４０）を回転させるための内側テーブル駆動モーター６１（外側テーブル駆動モーター６２）が用意されるものの、内側テーブル駆動モーター６１（外側テーブル駆動モーター６２）が駆動されるのは変更処理のときのみであり、検査処理の際には内側テーブル駆動モーター６１（外側テーブル駆動モーター６２）は停止される。そのため、検査を実行する際に、内側テーブル駆動モーター６１（外側テーブル駆動モーター６２）の駆動がない分、追従型検査装置１０の振動が、従来例に比べて抑えられることとなる。つまり、本実施の形態に係る追従型検査装置１０によれば、検査処理が実行される際に追従型検査装置１０の振動をなるべく抑えて、追従型検査装置１０の検査精度を向上させることが可能となる。 On the other hand, in the present embodiment, the inner table drive motor 61 (outer table drive) for rotating the inner table 30 (outer table 40) is separated from the inspection table drive motor 60 for rotating the inspection table 20. Although the motor 62) is prepared, the inner table drive motor 61 (outer table drive motor 62) is driven only during the change process, and the inner table drive motor 61 (outer table drive) is driven during the inspection process. The motor 62) is stopped. Therefore, when the inspection is executed, the vibration of the follow-up inspection device 10 is suppressed as compared with the conventional example because the inner table drive motor 61 (outer table drive motor 62) is not driven. That is, according to the follow-up type inspection device 10 according to the present embodiment, it is possible to suppress the vibration of the follow-up type inspection device 10 as much as possible when the inspection process is executed, and improve the inspection accuracy of the follow-up type inspection device 10. It will be possible.
　また、本実施の形態に係る追従型検査装置１０においては、内側テーブル３０には、内側テーブル駆動モーター６１が設けられており、検査テーブル２０には、検査テーブル内ギア歯２０ｂが備えられており、検査テーブル内ギア歯２０ｂと噛合する内側テーブル用駆動ギア５４と、内側テーブル駆動モーター６１に連結され、かつ、内側テーブル用駆動ギア５４が設けられた内側テーブル用入力軸５３と、を有することとした。 Further, in the follow-up inspection device 10 according to the present embodiment, the inner table 30 is provided with the inner table drive motor 61, and the inspection table 20 is provided with the gear teeth 20b in the inspection table. It has an inner table drive gear 54 that meshes with the inspection table inner gear tooth 20b, and an inner table input shaft 53 that is connected to the inner table drive motor 61 and is provided with the inner table drive gear 54. And said.
　そのため、検査処理が実行される際に、内側テーブル駆動モーター６１のみならず、内側テーブル用駆動ギア５４が設けられた内側テーブル用入力軸５３も停止されることとなる。したがって、追従型検査装置１０の振動をより一層抑えることができ、追従型検査装置１０の検査精度をより向上させることが可能となる。 Therefore, when the inspection process is executed, not only the inner table drive motor 61 but also the inner table input shaft 53 provided with the inner table drive gear 54 is stopped. Therefore, the vibration of the follow-up type inspection device 10 can be further suppressed, and the inspection accuracy of the follow-up type inspection device 10 can be further improved.
　また、本実施の形態に係る追従型検査装置１０においては、外側テーブル４０には、外側テーブル駆動モーター６２が設けられており、検査テーブル２０には、検査テーブル外ギア歯２０ａが備えられており、検査テーブル外ギア歯２０ａと噛合する外側テーブル用駆動ギア５６と、外側テーブル駆動モーター６２に連結され、かつ、外側テーブル用駆動ギア５６が設けられた外側テーブル用入力軸５５と、を有することとした
　そのため、検査処理が実行される際に、外側テーブル駆動モーター６２のみならず、外側テーブル用駆動ギア５６が設けられた外側テーブル用入力軸５５も停止されることとなる。したがって、追従型検査装置１０の振動をより一層抑えることができ、追従型検査装置１０の検査精度をより向上させることが可能となる。 Further, in the follow-up inspection device 10 according to the present embodiment, the outer table 40 is provided with the outer table drive motor 62, and the inspection table 20 is provided with the inspection table outer gear teeth 20a. The outer table drive gear 56 that meshes with the inspection table outer gear teeth 20a, and the outer table input shaft 55 that is connected to the outer table drive motor 62 and is provided with the outer table drive gear 56. Therefore, when the inspection process is executed, not only the outer table drive motor 62 but also the outer table input shaft 55 provided with the outer table drive gear 56 is stopped. Therefore, the vibration of the follow-up type inspection device 10 can be further suppressed, and the inspection accuracy of the follow-up type inspection device 10 can be further improved.
　＝＝＝その他の実施の形態＝＝＝
　以上、上記実施の形態に基づき本発明に係る追従型検査装置等を説明したが、上記した発明の実施の形態は、本発明の理解を容易にするためのものであり、本発明を限定するものではない。本発明は、その趣旨を逸脱することなく、変更、改良され得ると共に、本発明にはその等価物が含まれることはもちろんである。 === Other embodiments ===
The follow-up inspection device and the like according to the present invention have been described above based on the above-described embodiment, but the above-described embodiment of the invention is for facilitating the understanding of the present invention and limits the present invention. It's not a thing. The present invention can be modified and improved without departing from the spirit thereof, and it goes without saying that the present invention includes an equivalent thereof.
　上記実施の形態においては、変更処理の際に、カメラ６５及び照明装置６６を、次の検査対象となる検査対象物１に正対（対向）した状態とすることとしたが、当該次の検査対象は、一つ先の検査対象物であることとした（一本送り）。 In the above embodiment, the camera 65 and the lighting device 66 are placed in a state of facing (opposing) the inspection target 1 to be inspected next at the time of the change processing, but the next inspection is performed. It was decided that the target was the one to be inspected one step ahead (one feed).
　しかしながら、これに限定されるものではなく、以下の例であってもよい。すなわち、カメラ６５や照明装置６６を、複数置いたり広範囲をカバーできるものとしたりすることにより、二つの検査対象物を同時に検査するようにしてもよい。そして、この場合には、変更処理の際に、カメラ６５及び照明装置６６を、次の検査対象となる検査対象物１に正対（対向）した状態とするが、この場合に、当該次の検査対象を、二つ先の二つの検査対象物とすることとしてもよい（二本送り）。 However, the present invention is not limited to this, and may be the following example. That is, by placing a plurality of cameras 65 and the lighting device 66 so as to be able to cover a wide range, two inspection objects may be inspected at the same time. Then, in this case, the camera 65 and the lighting device 66 are placed in a state of facing (opposing) the next inspection object 1 to be inspected at the time of the change processing. The inspection target may be two inspection targets two ahead (two feeds).
　なお、同様にして、三本送りや四本送り以上としてもよい。 In the same way, three feeds or four feeds or more may be used.
　１　検査対象物
１０　追従型検査装置
１２　固定部
１３　設置部
１５　キャップ部
１８　固定軸
２０　検査テーブル
２０ａ　検査テーブル外ギア歯
２０ｂ　検査テーブル内ギア歯
２２　検査テーブル軸受
２５　キャップ設置テーブル
２５ａ　キャップ設置テーブルギア歯
２７　キャップ設置テーブル軸受
３０　内側テーブル
３２　内側テーブル軸受
４０　外側テーブル
４２　外側テーブル軸受
５０　メイン入力軸
５１　検査テーブル用駆動ギア
５２　キャップ設置テーブル用駆動ギア
５３　内側テーブル用入力軸
５４　内側テーブル用駆動ギア
５５　外側テーブル用入力軸
５６　外側テーブル用駆動ギア
６０　検査テーブル駆動モーター
６１　内側テーブル駆動モーター
６２　外側テーブル駆動モーター
６５　カメラ
６６　照明装置
７０　ベース部
７１　固定部材
７２　固定アーム
７３　スピン駆動部
７３ａ　スピンモーター
７３ｂ　スピン軸
７３ｃ　ベルト
８０　供給部
８２　排出部
８３　供給部駆動モーター
８４　排出部駆動モーター
９０　制御部 1 Inspection object 10 Follow-up inspection device 12 Fixed part 13 Installation part 15 Cap part 18 Fixed shaft 20 Inspection table 20a Inspection table Outer gear teeth 20b Inspection table Inner gear teeth 22 Inspection table bearing 25 Cap installation table 25a Cap installation table Gear teeth 27 Cap installation table bearing 30 Inner table 32 Inner table bearing 40 Outer table 42 Outer table bearing 50 Main input shaft 51 Drive gear for inspection table 52 Drive gear for cap installation table 53 Input shaft for inner table 54 Drive gear for inner table 55 Outside Table input shaft 56 Outer table drive gear 60 Inspection table drive motor 61 Inner table drive motor 62 Outer table drive motor 65 Camera 66 Lighting device 70 Base 71 Fixed member 72 Fixed arm 73 Spin drive 73a Spin motor 73b Spin shaft 73c Belt 80 Supply unit 82 Discharge unit 83 Supply unit drive motor 84 Discharge unit drive motor 90 Control unit

Claims (4)

  1. 　検査対象物が支持され、中心軸を中心として回転可能な検査テーブルと、
    　前記検査テーブルを回転させるための検査テーブル駆動モーターと、
    　検査装置及び照明装置のうちの一方の装置が支持され、かつ、前記検査テーブルの径方向における内側において前記検査テーブルに軸受を介して取り付けられ、前記中心軸を中心として回転可能な内側テーブルと、
    　前記内側テーブルを回転させるための内側テーブル駆動モーターと、
    　検査装置及び照明装置のうちの他方の装置が支持され、かつ、前記検査テーブルの径方向における外側において前記検査テーブルに軸受を介して取り付けられ、前記中心軸を中心として回転可能な外側テーブルと、
    　前記外側テーブルを回転させるための外側テーブル駆動モーターと、
    　前記検査テーブル駆動モーターを駆動させ、かつ、前記内側テーブル駆動モーター及び前記外側テーブル駆動モーターを停止させることにより、前記検査テーブルと前記外側テーブルと前記内側テーブルとを一体的に回転させ、前記照明装置に照らされた前記検査対象物を前記検査装置で検査する検査処理と、
    　前記内側テーブル駆動モーター及び前記外側テーブル駆動モーターを駆動させて、前記検査テーブルに対し前記内側テーブル及び前記外側テーブルを相対移動させて前記検査装置で検査する検査対象物を変更する変更処理と、
    　を繰り返す制御部と、
    　を有することを特徴とする追従型検査装置。     An inspection table that supports the inspection object and can rotate around the central axis,
    An inspection table drive motor for rotating the inspection table,
    An inner table in which one of the inspection device and the lighting device is supported and is attached to the inspection table via a bearing inside the inspection table in the radial direction and is rotatable about the central axis.
    An inner table drive motor for rotating the inner table, and
    An outer table in which the other device of the inspection device and the lighting device is supported and is attached to the inspection table via a bearing on the radial side of the inspection table and is rotatable about the central axis.
    An outer table drive motor for rotating the outer table, and
    By driving the inspection table drive motor and stopping the inner table drive motor and the outer table drive motor, the inspection table, the outer table, and the inner table are integrally rotated, and the lighting device is used. The inspection process of inspecting the inspection object illuminated by the inspection device with the inspection device,
    A change process in which the inner table drive motor and the outer table drive motor are driven to move the inner table and the outer table relative to the inspection table to change the inspection object to be inspected by the inspection device.
    And the control unit that repeats
    A follow-up inspection device characterized by having.
  2. 　請求項１に記載の追従型検査装置であって、
    　前記内側テーブルには、前記内側テーブル駆動モーターが設けられており、
    　前記検査テーブルには、内側テーブル用ギア歯が備えられており、
    　前記内側テーブル用ギア歯と噛合する内側テーブル用駆動ギアと、
    　前記内側テーブル駆動モーターに連結され、かつ、前記内側テーブル用駆動ギアが設けられた内側テーブル用入力軸と、を有することを特徴とする追従型検査装置。     The follow-up inspection device according to claim 1.
    The inner table is provided with the inner table drive motor.
    The inspection table is provided with gear teeth for the inner table.
    The inner table drive gear that meshes with the inner table gear teeth,
    A follow-up inspection device which is connected to the inner table drive motor and has an inner table input shaft provided with the inner table drive gear.
  3. 　請求項１又は請求項２に記載の追従型検査装置であって、
    　前記外側テーブルには、前記外側テーブル駆動モーターが設けられており、
    　前記検査テーブルには、外側テーブル用ギア歯が備えられており、
    　前記外側テーブル用ギア歯と噛合する外側テーブル用駆動ギアと、
    　前記外側テーブル駆動モーターに連結され、かつ、前記外側テーブル用駆動ギアが設けられた外側テーブル用入力軸と、を有することを特徴とする追従型検査装置。     The follow-up inspection device according to claim 1 or 2.
    The outer table is provided with the outer table drive motor.
    The inspection table is provided with gear teeth for the outer table.
    The outer table drive gear that meshes with the outer table gear teeth,
    A follow-up inspection device which is connected to the outer table drive motor and has an outer table input shaft provided with the outer table drive gear.
  4. 　検査対象物が支持され、中心軸を中心として回転可能な検査テーブルを、回転させるための検査テーブル駆動モーターを駆動させ、かつ、
    　検査装置及び照明装置のうちの一方の装置が支持され、かつ、前記検査テーブルの径方向における内側において前記検査テーブルに軸受を介して取り付けられ、前記中心軸を中心として回転可能な内側テーブルを、回転させるための内側テーブル駆動モーター、及び、検査装置及び照明装置のうちの他方の装置が支持され、かつ、前記検査テーブルの径方向における外側において前記検査テーブルに軸受を介して取り付けられ、前記中心軸を中心として回転可能な外側テーブル、を回転させるための外側テーブル駆動モーターを停止させることにより、
    　前記検査テーブルと前記外側テーブルと前記内側テーブルとを一体的に回転させ、前記照明装置に照らされた前記検査対象物を前記検査装置で検査する検査工程と、
    　前記内側テーブル駆動モーター及び前記外側テーブル駆動モーターを駆動させて、前記検査テーブルに対し前記内側テーブル及び前記外側テーブルを相対移動させて前記検査装置で検査する検査対象物を変更する変更工程と、
    　を有することを特徴とする追従型検査方法。     An inspection table drive motor for rotating an inspection table that supports the inspection object and can rotate around the central axis is driven, and
    An inner table in which one of the inspection device and the lighting device is supported and is attached to the inspection table via a bearing inside the inspection table in the radial direction and is rotatable about the central axis. An inner table drive motor for rotation and the other device of the inspection device and the lighting device are supported and attached to the inspection table on the radial outside of the inspection table via bearings, said center. By stopping the outer table drive motor for rotating the outer table, which is rotatable about the axis.
    An inspection step in which the inspection table, the outer table, and the inner table are integrally rotated to inspect the inspection object illuminated by the lighting device with the inspection device.
    A change step of driving the inner table drive motor and the outer table drive motor to move the inner table and the outer table relative to the inspection table to change the inspection object to be inspected by the inspection device.
    A follow-up inspection method characterized by having.
PCT/JP2021/014765 2020-05-15 2021-04-07 Tracking-type inspection device and tracking-type inspection method WO2021229960A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09294964A (en) * 1996-05-02 1997-11-18 Sankyo Seisakusho:Kk Sorting apparatus
JP2009069099A (en) * 2007-09-18 2009-04-02 Hitachi Information & Control Solutions Ltd Foreign matter detector and foreign matter detecting method in vessel
KR101067641B1 (en) * 2011-01-31 2011-09-27 주식회사 서울금속 Parts sorting system
JP2013044688A (en) * 2011-08-25 2013-03-04 Mutual Corp Air bubble discrimination and examination apparatus and air bubble discrimination and examination method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09294964A (en) * 1996-05-02 1997-11-18 Sankyo Seisakusho:Kk Sorting apparatus
JP2009069099A (en) * 2007-09-18 2009-04-02 Hitachi Information & Control Solutions Ltd Foreign matter detector and foreign matter detecting method in vessel
KR101067641B1 (en) * 2011-01-31 2011-09-27 주식회사 서울금속 Parts sorting system
JP2013044688A (en) * 2011-08-25 2013-03-04 Mutual Corp Air bubble discrimination and examination apparatus and air bubble discrimination and examination method

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