WO2021215767A1

WO2021215767A1 - Fluid shut-off valve

Info

Publication number: WO2021215767A1
Application number: PCT/KR2021/004890
Authority: WO
Inventors: 신경순
Original assignee: Shin Gyeong Soon
Priority date: 2020-04-19
Filing date: 2021-04-19
Publication date: 2021-10-28
Also published as: TW202146795A; KR20210128861A

Abstract

Disclosed is a fluid shut-off valve comprising: a valve housing having a fluid channel, which is formed between an upper housing hole and a lower housing hole and has a fluid flowing therein, and an accommodation space which is formed on one side of the fluid channel and is connected to the fluid channel; a shut-off module positioned in an atmosphere position in the accommodation space and having a shut-off plate which moves to a shut-off position of the fluid channel to shut off the fluid channel; and a cleaning gas injection module for injecting a cleaning gas on the upper surface of the shut-off plate positioned in the shut-off position.

Description

fluid shutoff valve

The present invention relates to a fluid shutoff valve that is installed in a waste gas exhaust pipe of a semiconductor manufacturing line or a display manufacturing line and temporarily blocks the exhaust pipe through which a fluid containing waste gas or reaction by-products flows.

Equipment used in a semiconductor manufacturing line or a display manufacturing line includes a process chamber, an exhaust pipe, and a vacuum pump, and the inside of the vacuum chamber is formed in a vacuum by the vacuum pump. The vacuum chambers perform unit processes such as deposition or etching in a vacuum state, and maintain the atmospheric pressure and vacuum separately by using a fluid shutoff valve during equipment PM or when replacing parts mounted on vacuum lines or vacuum pumps. do. Therefore, the shielding property when shutting off the fluid shutoff valve is very important, and even a small leak when shutting off can cause problems in the process and setbacks in the progress of necessary work.

More specifically, there is a case in which the process chamber must be repeatedly maintained in a vacuum state and an atmospheric pressure state during the manufacturing process, and maintenance of the parts coupled between the process chamber and the vacuum pump is often required. In this case, the fluid shutoff valve located on the upper part of the vacuum pump is sealed to maintain the pressure above and below the fluid shutoff valve at atmospheric pressure and vacuum.

In addition, unlike the above case, the fluid shutoff valve is blocked during replacement and maintenance of the vacuum pump to keep the upper part of the fluid shutoff valve in a vacuum state. Therefore, in the above cases, the fluid shutoff valve should repeatedly open and close, and in particular, when the fluid shutoff valve is shut off, a leak should not occur. That is, the shielding function of the fluid shutoff valve is very important.

The fluid shutoff valve is installed in the exhaust pipe between the process chamber and the vacuum pump, and the shielding plate performing the shielding function moves to the shielding position through the shielding plate itself or the carrier transporting the shielding plate through a linear motion or a rotational motion.

In addition, the fluid shutoff valve is also used in a process in which a lot of process reaction by-products (process powder) are generated, and also in such a process, the fluid shutoff valve must be accurately shielded so that a leak does not occur when shutting off in performing the opening and closing. However, when using a conventional fluid shutoff valve in a process with a lot of reaction byproducts, the reaction byproducts accumulate or stick to the sealing part (upper part) of the valve shield plate that blocks the fluid passing through the valve. In many cases, it can cause problems in the process progress.

An object of the present invention is to provide a fluid shutoff valve capable of maintaining a repeated shielding function by removing reaction by-product particles accumulated on the upper surface of the shielding plate.

The fluid shutoff valve of the present invention includes: a valve housing formed between a housing upper hole and a housing lower hole and having a fluid passage through which a fluid is introduced and flowing, and an accommodation space formed on one side of the fluid passage and connected to the fluid passage; A shielding module positioned at a standby position of the receiving space and having a shielding plate moving to a shielding position of the fluid passage to shield the fluid passage, and a cleaning gas spraying cleaning gas onto an upper surface of the shielding plate located in the shielding position It is characterized in that it includes a spray module.

Also, the cleaning gas spraying module may spray the cleaning gas from immediately before the shield plate moves from the shielding position to the standby position until it completely leaves the fluid passage.

In addition, the cleaning gas spraying module may spray the cleaning gas inclined inward to the outside on the upper surface of the shielding plate.

In addition, the shielding plate includes a shielding O-ring groove formed in a ring shape along an outer side from an upper surface and a shielding O-ring inserted into the shielding O-ring groove, and the cleaning gas injection module is located outside the shielding O-ring groove on the upper surface of the shielding plate. It is possible to inject the cleaning gas inclined inwardly.

In addition, the cleaning gas injection module includes a cleaning gas injection passage formed in a ring shape on the outside of the fluid passage inside the valve housing, and the cleaning gas injection passage passing through the shielding bottom area of the accommodation space of the valve housing. It may include a cleaning gas injection nozzle and a cleaning gas supply passage for supplying a cleaning gas to the cleaning gas injection passage.

In addition, the cleaning gas injection nozzle may be formed in a ring shape having a predetermined width and inclined from an outer upper portion to an inner lower portion.

In addition, the cleaning gas spray nozzle may have a plurality of holes spaced apart from each other and arranged in a circular shape, and may be formed to be inclined from an outer upper portion to an inner lower portion.

In addition, the cleaning gas injection module includes a cleaning gas injection passage formed in a semicircular arc shape outside the fluid passage inside the valve housing, and a shielding bottom area of the accommodating space of the valve housing from the cleaning gas injection passage. It may include a cleaning gas injection nozzle passing through and a cleaning gas supply passage for supplying the cleaning gas to the cleaning gas injection passage.

The cleaning gas injection nozzle may have a semicircular arc shape having a predetermined width, and may be inclined from an outer upper portion to an inner lower portion.

In addition, the cleaning gas injection nozzle may have a plurality of holes spaced apart from each other and arranged in a semicircular arc shape, and may be formed to be inclined from an outer upper portion to an inner lower portion.

Since the fluid shutoff valve of the present invention sprays cleaning gas from before the shield plate moves from the shielding position to the time it completely leaves the shielding position, cleaning efficiency can be increased.

In addition, the fluid shutoff valve of the present invention can maintain the shielding function of the shielding plate by removing reaction by-product particles accumulated on the upper surface of the shielding plate.

In addition, since the fluid shutoff valve of the present invention injects or sucks the cleaning gas to the upper surface of the shielding plate, it may be possible to remove reaction byproduct particles accumulated on the upper surface of the shielding plate without being separated from the vacuum pipe.

In addition, the fluid shutoff valve of the present invention can remove reaction by-product particles from the upper surface of the shield plate during the manufacturing process, thereby increasing process efficiency.

1 is a plan view of a fluid shutoff valve according to an embodiment of the present invention.

FIG. 2 is a vertical cross-sectional view taken along line A-A of FIG. 1 .

3 is an enlarged view of “B” of FIG. 2 .

4 is an enlarged view of “C” of FIG. 2 .

FIG. 5 is a partial horizontal cross-sectional view taken along line D-D of FIG. 2 .

6 is a plan view of the shielding module of FIG. 1 .

FIG. 7 is a vertical cross-sectional view taken along line E-E of FIG. 6 .

8 is a horizontal cross-sectional view of the pneumatic cylinder of FIG. 1 ;

9A to 9C are partial horizontal cross-sectional views corresponding to FIG. 5 of a fluid shutoff valve according to another embodiment.

10 is a plan view of a fluid shutoff valve according to another embodiment of the present invention.

11 is a vertical cross-sectional view taken along line F-F of FIG. 10 .

12 is a vertical cross-sectional view illustrating a state in which the shield module is positioned in a standby position in the fluid shutoff valve of FIG. 10 .

13 is a vertical cross-sectional view of a fluid shutoff valve according to another embodiment of the present invention.

Hereinafter, a fluid shutoff valve according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

First, a fluid shutoff valve according to an embodiment of the present invention will be described.

1 is a plan view of a fluid shutoff valve according to an embodiment of the present invention. FIG. 2 is a vertical cross-sectional view taken along line A-A of FIG. 1 . 3 is an enlarged view of “B” of FIG. 2 . 4 is an enlarged view of “C” of FIG. 2 . FIG. 5 is a partial horizontal cross-sectional view taken along line D-D of FIG. 2 . 6 is a plan view of the shielding module of FIG. 1 . FIG. 7 is a vertical cross-sectional view taken along line E-E of FIG. 6 . 8 is a horizontal cross-sectional view of the pneumatic cylinder of FIG. 1 ;

1 to 8 , the fluid shutoff valve 100 according to an embodiment of the present invention includes a valve housing 110 , a shield module 120 , a cleaning gas injection module 130 , and an inflow prevention cylinder 140 . ) may be included. In addition, the fluid shutoff valve 100 may further include a lower outlet pipe 150 and a bypass passage module 160 .

The fluid shutoff valve 100 may have a fluid passage 110a penetrating from the top to the bottom in the center of the valve housing 110 . The fluid shutoff valve 100 may be coupled to the process pipe so that the fluid path 110a communicates with an internal path of the process pipe (not shown).

The fluid shutoff valve 100 may temporarily block the fluid passage 110a using the shielding module 120 . The shielding module 120 may be repeatedly transferred between the shielding position (a) and the standby position (b) in a configuration that shields the fluid passage 110a. Here, the shielding position (a) is a position at which the shielding module 120 is moved to shield the fluid passageway 110a. In addition, the shielding position (a) is a position where the shielding module 120 is cleaned by the cleaning gas sprayed from the cleaning gas spraying module 130 . Also, the standby position (b) is a standby position when the shielding module 120 does not shield the fluid passage 110a.

The valve housing 110 may include a fluid passage 110a extending vertically therein and an accommodation space 110b extending to one side or the outside from the fluid passage 110a. That is, the accommodating space 110b may be formed on one side or outside of the fluid passage 110a to be connected to the fluid passage 110a. The valve housing 110 may be provided with a housing upper hole 110c and a housing lower hole 110d that are respectively opened upward and downward from the fluid passage 110a. In addition, the valve housing 110 may include a housing shielding hole 110e.

The valve housing 110 may be formed by combining an upper housing 111 and a lower housing 112 that are vertically separated from each other in a horizontal direction. In addition, the valve housing 110 may further include an upper connection pipe 115 .

The fluid passage 110a extends vertically inside the valve housing 110 and may be formed between an upper housing upper hole 110c and a lower housing lower hole 110d. The fluid passage 110a provides a passage through which a fluid including exhaust gas and reaction by-product particles generated in a semiconductor process line flows from the top to the bottom. The housing upper hole 110c provides a path through which the fluid flows into the fluid passage 110a, and the lower outlet hole 110d provides a path through which the fluid flows into the lower portion of the fluid passage 110a. The housing lower hole 110d may have a larger diameter than the upper housing hole 110c. In addition, the lower outlet hole 110d may provide a space to which the upper portion of the inflow prevention cylinder 140 is coupled. That is, the inlet cylinder 140 may be coupled to the lower portion of the valve housing 110 through the lower outlet hole 110d.

The accommodating space 110b is formed in a shape surrounding the outer side of the fluid passage 110a, and may be integrally formed with the fluid passage 110a to communicate with each other. The accommodation space 110b may be formed as a space extending outwardly of the fluid passage 110a in the valve housing 110 . More specifically, the accommodating space 110b provides a space in which the shielding module 120 located in the standby position (b) is accommodated. In addition, the accommodating space 110b provides a space for the path through which the shielding module 120 moves from the standby position (b) to the shielding position (a). In addition, the accommodating space 110b may provide a space in which a part of the shielding module 120 positioned at the shielding position (a) is accommodated.

The housing upper hole 110c may be opened to an upper portion of the valve housing 110 . The housing upper hole 110c is located above the fluid passage 110a.

The housing lower hole 110d may be opened to a lower portion of the valve housing 110 . The housing lower hole 110d is located below the fluid passage 110a.

The housing shielding hole 110e may be formed to penetrate into the accommodating space 110b at an upper portion of one side of the valve housing 110 with respect to the fluid passage 110a. The housing shielding hole 110e may provide a space to which a part of the shielding module 120 is coupled.

The upper connection pipe 115 is coupled to the housing upper hole 110c so as to extend upward. The upper connection pipe 115 may be connected to a process pipe. The upper connection pipe 115 may provide a path through which the fluid flows into the fluid passage 110a.

The shielding module 120 may include a shielding pneumatic cylinder 121 , a shielding rotation shaft 124 , a shielding carrier 125 , and a shielding plate 128 .

The shielding module 120 may be located on one side of the valve housing 110 with respect to the fluid passage 110a. In the shielding module 120 , the shielding pneumatic cylinder 121 rotates the shielding rotation shaft 124 to move the shielding plate 128 from the standby position (b) to the shielding position (a).

The shielded pneumatic cylinder 121 has a shielded pneumatic housing 122 and a shielded pneumatic piston 123 . The shielding pneumatic cylinder 121 may rotate the shielding rotation shaft 124 by linearly moving the shielding pneumatic piston 123 by pneumatic pressure supplied from the outside. The shielding pneumatic cylinder 121 may be located on one side of the valve housing 110 with respect to the fluid passage 110a. The shielding pneumatic cylinder 121 may be located at an outer upper portion of the valve housing 110 .

The shielding pneumatic housing 122 may include a shielding piston passageway 122a and a shielding rotation hole 122b. The shielding pneumatic housing 122 may be formed in a substantially rectangular block shape. The shielding pneumatic housing 122 is coupled to the upper surface of the valve housing 110 so that the shielding piston passage 122a is horizontal, and the shielding rotation hole 122b passes through the housing shielding hole 110e of the valve housing 110 . can be

The shielding piston passage (122a) may be formed in a U-shape, and may be formed in a horizontal direction inside the shielding pneumatic housing (122). The shielding piston passage (122a) may be formed so that both ends are opened to one side of the shielding pneumatic housing (122). Separate

pneumatic pipes

10 and 20 are connected to both ends of the shielding piston passage 122a, and pneumatic pressure may be supplied or discharged through the

pneumatic pipes

10 and 20 .

The shielding rotation hole 122b may be formed as a hole extending from the lower surface of the shielding pneumatic housing 122 upward to a predetermined height. The shielding rotation hole 122b may be formed to extend to a height higher than the height of the shielding piston passage 122a. The shielding rotation hole 122b is connected to the housing shielding hole 110e of the valve housing 110 , and may provide a path through which the shielding rotation shaft 124 is inserted.

The shielding pneumatic piston 123 may be formed as a block having a cross-sectional area smaller than the vertical cross-sectional area of the shielding piston passage 122a and a predetermined length. The shielding pneumatic piston 123 may be formed to a length required to rotate the shielding rotation shaft 124 from the standby position (b) to the shielding position (a). The shielding pneumatic piston 123 may have teeth formed in the longitudinal direction on a surface opposite to the shielding rotation hole 122b.

The shielding pneumatic piston 123 may move from one side to the other side by pneumatic pressure inside the shielding piston passage 122a. The shielding pneumatic piston 123 may be formed in one piece. When the shielding pneumatic piston 123 is formed as one, it may be positioned in any one of the shielding piston passages 122a located on one side or the other side of the shielding rotation hole 122b to move forward and backward. In addition, when the shielding pneumatic piston 123 is formed in two, it may be located in the shielding piston passage 122a of one side and the other side. That is, the shielding piston passage 122a is located on both sides of the shielding rotation hole 122b to move in opposite directions.

The shielding rotation shaft 124 may be formed in a cylindrical shape having a predetermined length. In addition, the shielding rotation shaft 124 may have teeth formed on a circumferential surface of the upper portion opposite to the shielding pneumatic piston 123 . One side of the shielding rotation shaft 124 is connected to the shielding pneumatic cylinder 121 to rotate, and the other end may extend into the accommodation space 110b of the valve housing 110 . More specifically, the shielding rotation shaft 124 has an upper portion inserted into the shielding rotation hole 122b and the shielding shielding hole to rotate, and the lower portion may extend into the receiving space 110b. A portion of the outer peripheral surface of the shielding rotation shaft 124 may be exposed to the shielding piston passage 122a through one side and the other side of the shielding rotation hole 122b. In addition, the shielding rotation shaft 124 may be engaged with the teeth of the shielding pneumatic piston 123, the teeth formed on the exposed circumferential surface. The shielding rotation shaft 124 may rotate at a predetermined angle according to the forward and backward movement of the shielding pneumatic piston 123 . That is, the shielding rotation shaft 124 may convert the linear motion of the shielding pneumatic piston 123 into a rotational motion.

The shielding transfer member 125 may include a shielding transfer bar 126 and a shielding transfer ring 127 . The shielding carrier 125 may rotate so that one side is coupled to the shielding rotation shaft 124 and the other side has an arc-shaped trajectory. The shielding transfer member 125 may repeatedly move between the shielding transfer ring 127 between the standby position (b) and the shielding position (a) by rotation of the shielding rotation shaft 124 . The shielding transfer bar 126 and the shielding transfer ring 127 may be integrally formed.

The shielding transfer bar 126 has a bar shape having a predetermined length, and may be formed in an arc shape that increases in width from one side to the other. One side of the shielding transfer bar 126 may be coupled to a lower portion of the shielding rotation shaft 124 . In addition, the other side of the shielding transfer bar 126 may extend in the direction of the standby position (b).

The shielding transport ring 127 may be formed in a ring shape having a predetermined inner diameter. The shield transfer ring 127 may be coupled to the outside of the shield transfer bar 126 . That is, the shielding transfer ring 127 is formed to have a lower thickness than the shielding transfer bar 126 , and an upper surface thereof may be positioned lower than the upper surface of the shielding transfer bar 126 . The shielding transfer ring 127 may be formed to be stepped in a boundary region with the shielding transfer bar 126 .

The shielding plate 128 is formed in a disk shape, and an outer diameter may be formed to have a diameter corresponding to the outer diameter of the shielding transfer ring 127 . The shielding plate 128 may further include a shielding coupling ring 128a extending to a predetermined height in a downward direction from a lower surface. The shield coupling ring 128a may have an outer diameter corresponding to the inner diameter of the shielding transport ring 127 , and a height corresponding to the height of the shielding transport ring 127 . The shield coupling ring 128a may be integrally formed with the shield plate 128 .

The shielding plate 128 is seated on the upper surface of the shielding transfer ring 127 , and the shielding coupling ring 128a may be inserted and fixed inside the shielding transfer ring 127 . In addition, the upper surface of the shielding plate 128 may form the same plane as the upper surface of the shielding transfer bar 126 . The shielding plate 128 has a shielding coupling ring 128a inserted into the shielding transfer ring 127 and one outer peripheral surface is supported by the step difference between the shielding transfer bar 126 and the shielding transfer ring 127, so the transfer process It can be stably fixed to the shielding carrier 125 in the.

In addition, the shielding plate 128 may be formed with a ring-shaped shielding O-ring groove 128b along the outer side from the upper surface. The shielding O-ring groove 128b may be formed to have an inner diameter greater than an inner diameter of the housing upper hole 110c. A shielding O-ring 129 may be inserted and fixed into the shielding O-ring groove 128b. The shielding O-ring 129 may protrude from the upper surface of the shielding plate 128 when it is inserted and fixed in the shielding O-ring groove 128b.

The shielding plate 128 may be moved between the standby position (b) and the shielding position (a) by the shielding transfer member 125 . The shield plate 128 is moved to the upper part of the shield transport ring 127 after being transported to the shielding position (a) to contact the periphery of the housing upper hole 110c of the valve housing 110 to close the fluid passage 110a. can be shielded. More specifically, the shielding plate 128 may be in contact with the shielding bottom region c on the upper and lower surfaces of the valve housing 110 in the accommodating space 110b adjacent in the circumferential direction of the fluid passage 110a. Here, the shielding bottom region (c) is a region facing the shielding plate 128 on the upper bottom surface of the accommodation space 110b of the valve housing 110 when the shielding plate 128 is positioned at the shielding position (a). can mean In addition, the shielding bottom area may include a predetermined area outside the area facing the shielding plate 128 .

The shielding plate 128 may have an outer peripheral surface in contact with the shielding bottom surface region c of the valve housing 110 . At this time, the shielding plate 128 seals between the upper surface of the shielding plate 128 and the upper and lower surfaces of the valve housing 110 while the shielding O-ring 129 comes into contact with the shielding bottom region c of the valve housing 110 . can In addition, the shielding plate 128 may be separated from the housing upper hole 110c and seated on the upper surface of the shielding carrier 125 to open the fluid passage 110a.

Meanwhile, the shielding O-ring groove 128b and the shielding O-ring 129 formed in the shielding plate 128 may be formed in the shielding bottom area c of the valve housing 110 . In this case, the shield plate 128 may seal the fluid passage 110a while the upper surface contacts the shield O-ring coupled to the valve housing 110 .

The cleaning gas injection module 130 may include a cleaning gas injection passage 131 , a cleaning gas injection nozzle 132 , and a cleaning gas supply passage 133 . The cleaning gas injection module 130 may be formed adjacent to the outside of the fluid passage 110a inside the valve housing 110 . The cleaning gas injection module 130 may be formed in the shielding bottom area c of the valve housing 110 adjacent in the circumferential direction of the fluid passage 110a in the accommodation space 110b of the valve housing 110 . That is, the cleaning gas injection module 130 may be formed on the shielding plate 128 positioned at the shielding position (a). That is, the cleaning gas injection module 130 shields the receiving space 110b of the valve housing 110 corresponding to the outer upper surface of the shielding plate 128 when the shielding plate 128 is positioned at the shielding position (a). It may be located in the bottom area (c). In addition, the cleaning spray module 130 may be formed in a region corresponding to the outside of the region where the shielding O-ring groove 128b of the shielding plate 128 is formed. The cleaning gas injection module 130 may be formed by directly processing the valve housing 110 . In addition, the cleaning gas injection module 130 may be formed by having a separate injection pipe, an injection nozzle, and a supply pipe.

The cleaning gas spraying module 130 may spray cleaning gas to the upper surface of the shielding plate 128 located at the shielding position (a) to remove contaminant particles attached to the upper surface of the shielding plate 128 . The contaminant particles may include reaction by-product particles included in the waste gas discharged from the process chamber.

The cleaning gas injection module 130 sprays the cleaning gas to the upper portion of the shielding plate 128 immediately before the shielding plate 128 moves from the shielding position (a) to the standby position (b), and the shielding plate 128 . The cleaning gas can be sprayed until it completely leaves this shielding position (a). That is, the cleaning gas spraying module 130 may spray the cleaning gas immediately before the shielding plate 128 is separated from the lower surface of the valve housing 110 . Also, the cleaning gas spraying module 130 may spray the cleaning gas until the shielding plate 128 is completely removed from the fluid passage 110a. Accordingly, the cleaning gas spraying module 130 may more efficiently clean the upper surface of the shielding plate 128 by spraying the cleaning gas to the shielding plate 128 for a maximum period of time to remove contaminant particles.

The cleaning gas spraying module 130 may spray the cleaning gas to the upper surface of the shielding plate 128 corresponding to the outer side of the fluid passage 110a. More specifically, the cleaning gas dispensing module 130 provides cleaning gas in the upper surface area of the shielding plate 128 corresponding to the outer position of the fluid passage 110a when the shielding plate 128 is positioned at the shielding position (a). can be sprayed. Also, the cleaning gas spraying module 130 may spray the cleaning gas from the outside of the shielding O-ring 129 . The cleaning gas spraying module 130 may spray the cleaning gas obliquely from the outside to the inside. Also, the cleaning gas spraying module 130 may spray the cleaning gas from the outside of the shielding O-ring 129 to the shielding O-ring 129 . After the cleaning gas collides with the upper surface of the shielding plate 128 , the cleaning gas flows toward the center of the fluid passage 110a. More specifically, the cleaning gas sprayed from the cleaning gas injection module 130 may remove the contaminant particles attached to the top surface while flowing from the outside to the center direction of the top surface of the shielding plate 128 . In addition, the cleaning gas may remove contaminant particles attached to the surface of the shielding O-ring 129 while flowing along the surface of the shielding O-ring 129 protruding from the upper surface of the shielding plate 128 . In addition, the cleaning gas injection module 130 may directly spray the cleaning gas on the outer peripheral surface of the shielding O-ring 129 . Contaminant particles separated from the upper surface of the shielding plate 128 by the cleaning gas are introduced into the fluid passage 110a and discharged to the process pipe, and the inflow into the accommodation space 110b of the valve housing 110 can be minimized. have.

The cleaning gas injection passage 131 may be formed in a ring shape in an outer region of the fluid passage 110a inside the valve housing 110 . The cleaning gas injection passage 131 may be formed in the valve housing 110 at an upper portion of the shielding plate 128 when the shielding plate 128 is positioned at the shielding position (a).

Also, the cleaning gas injection passage 131 may be directly formed by the valve housing 110 . That is, the cleaning gas injection passage 131 may be formed by processing the inside of the valve housing 110 in a ring shape. In addition, the cleaning gas injection passage 131 may be formed by inserting a separate ring-shaped tube therein. Also, although not specifically illustrated, the cleaning gas injection passage 131 may be formed as a tube coupled to the lower surface of the valve housing 110 in a ring shape.

The cleaning gas injection nozzle 132 may be formed through the cleaning gas injection passage 131 to the lower surface of the valve housing 110 . The cleaning gas injection nozzle 132 may be formed in a ring shape penetrating the entire cleaning gas injection passage 131 to the lower surface of the valve housing 110 . The cleaning gas injection nozzle 132 has a ring shape having a predetermined width, an upper end is connected to the cleaning gas injection passage 131 , and a lower end is a shielding bottom area c of the accommodation space 110b of the valve housing 110 . ) may be formed to penetrate. The cleaning gas injection nozzle 132 allows an end penetrating through the shield bottom region c of the valve housing 110 to be exposed to the upper outer region of the shield plate 128 . The cleaning gas injection nozzle 132 is preferably exposed to the outer region of the shielding O-ring 129 . Also, the cleaning gas spray nozzle 132 may be inclined from an outer upper portion to an inner lower portion.

The cleaning gas injection nozzle 132 may spray the cleaning gas flowing through the cleaning gas injection passage 131 onto the upper surface of the shielding plate 128 . The cleaning gas spray nozzle 132 may spray the cleaning gas from the outside of the shielding O-ring 129 to the upper surface of the shielding plate 128 . In addition, the cleaning gas injection module 130 may directly inject the cleaning gas to the outer peripheral surface of the shielding O-ring 129 . The cleaning gas spray nozzle 132 may spray the cleaning gas to the upper surface of the shielding plate 128 in an inclined direction from the outer upper portion to the inner lower portion of the shielding plate 128 . The cleaning gas spray nozzle 132 may spray the cleaning gas from the outside of the shielding plate 128 toward the center. The cleaning gas may be sprayed to form a ring shape as a whole and a shape inclined in the lower inner direction. That is, the cleaning gas may be sprayed in an upside-down state. Accordingly, the cleaning gas injection nozzle 132 may block the contaminant particles separated from the shielding plate 128 from flowing into the accommodation space 110b of the valve housing 110 .

On the other hand, when the shielding O-ring groove 128b is formed in the valve housing 110, the shielding plate 128 and the shielding O-ring 129 of the shielding O-ring groove 128b are predetermined before the shielding plate 128 moves. The cleaning gas may be sprayed for a predetermined time while maintaining the interval. When the shielding O-ring 129 is positioned in the valve housing 110 , the contact between the cleaning gas and the shielding O-ring 129 may not be sufficient. Therefore, when the cleaning gas is sprayed while the shielding plate 128 and the shielding O-ring 129 maintain a predetermined distance, the cleaning gas passes through the gap between the shielding plate 128 and the shielding O-ring 129 and is shielded. Contaminant particles adhering to the surface of the O-ring 129 may be sufficiently removed.

Meanwhile, the cleaning gas injection nozzle 132 may be formed by processing the valve housing 110 in the same manner as the cleaning gas injection passage 131 , or may be formed by inserting a separate nozzle tube into the valve housing 110 . In addition, when the cleaning gas injection passage 131 is formed as a separate tube at the lower portion of the valve housing 110 , the cleaning gas injection nozzle 132 is also formed as a separate nozzle tube to be connected to the cleaning gas injection passage 131 . It can be formed by combining.

The cleaning gas supply passage 133 may be formed as a passage in which one end is opened to the cleaning gas injection passage 131 and the other end is opened to the outer surface of the valve housing 110 . The cleaning gas supply passage 133 may pass through an outer surface or an upper surface of the valve housing 110 according to a shape of the valve housing 110 . The cleaning gas supply passage 133 may provide a path through which the cleaning gas is supplied to the cleaning gas injection passage 131 .

Meanwhile, the cleaning gas supply passage 133 may be formed by processing the valve housing 110 in the same manner as the cleaning gas injection passage 131 , or may be formed by inserting a separate supply pipe into the valve housing 110 . In addition, when the cleaning gas injection passage 131 is formed as a separate tube under the valve housing 110 , the cleaning gas supply passage 133 is also formed as a separate supply tube and is coupled to the cleaning gas injection passage 131 . can be formed.

The inflow prevention cylinder 140 may include an inflow prevention housing 141 , an inflow prevention piston 142 , a prevention piston body 143 , and an prevention piston rod 144 . In addition, the inflow prevention cylinder 140 may further include an inflow blocking means 146 , an inflow blocking ring 147 and an inflow blocking flange 148 . The inflow prevention cylinder 140 may include a lower fluid passage 140a penetrating from the upper center to the lower portion.

The inflow prevention cylinder 140 may be coupled to the housing lower hole 110d of the valve housing 110 . The lower fluid passage 140a of the inflow prevention cylinder 140 may be positioned below the fluid passage 110a of the valve housing 110 to communicate with each other. The inflow prevention cylinder 140 may support and raise the lower surface of the shielding plate 128 positioned at the shielding position (a) to shield the fluid passageway (110a). In addition, the inflow prevention cylinder 140 may separate the fluid passage 110a from the accommodation space 110b when the manufacturing process is in progress. At this time, the shielding plate 128 may be located in the standby position (b). In the inflow prevention cylinder 140, the fluid flowing through the fluid passage 110a during the manufacturing process is discharged to the process pipe through the lower fluid passage 140a, and the fluid containing the reaction by-product particles is introduced into the receiving space 110b. it can be prevented Accordingly, the inflow prevention cylinder 140 may prevent the shielding module 120 and the cleaning gas injection module 130 accommodated in the accommodation space 110b from being contaminated by the contaminant particles.

The inflow prevention housing 141 may include a prevention piston passage 141a, a prevention passage opening hole 141b, a first prevention passage 141c, and a second prevention passage 141d. In addition, the inflow prevention housing 141 may further include a blocking gas passage 141e.

The inflow prevention housing 141 may be formed in a ring shape as a whole, and may have a lower fluid passage 140a therein. The inflow prevention housing 141 may be coupled to a lower central portion of the valve housing 110 . The lower fluid passage 140a may be positioned under the fluid passage 110a of the valve housing 110 to communicate with each other.

The prevention piston passage 141a may be formed in a ring shape having a predetermined width and height inside the inflow prevention housing 141 . The prevention piston passage 141a may be formed at a height greater than the vertical movement distance of the inflow prevention piston 142 .

The prevention passage opening hole 141b may be formed to open from an upper portion of the prevention piston passage 141a to an upper portion of the inflow prevention housing 141 with a predetermined width. The entire prevention passage opening hole 141b may be formed in a ring shape corresponding to the prevention piston passage 141a.

Meanwhile, in the inflow prevention housing 141 , a piston movement space 141f may be formed inwardly from the upper portion of the prevention passage opening hole 141b. The piston movement space 141f may provide a space in which a part of the inflow prevention piston 142 rises or descends. Accordingly, the piston movement space 141f may be formed in a shape corresponding to the shape of the inflow prevention piston 142 .

The first prevention passage 141c may be formed to be opened from the upper outer peripheral surface of the prevention piston passage 141a to the side surface of the inflow prevention housing 141 . The first prevention passage 141c may provide a path for supplying or discharging pneumatic pressure to the upper portion of the prevention piston passage 141a. That is, the first prevention passage 141c may supply air pressure required to lower the inflow prevention piston 142 . In addition, the first prevention passage 141c provides a path through which the pneumatic pressure supplied to the upper portion of the prevention piston passage 141a is discharged when the hydraulic pressure prevention piston rises. The first prevention passage 141c may be connected to an external pneumatic supply means and may be supplied with pneumatic pressure.

The second prevention passage 141d may be formed to be opened from the lower or lower surface of the outer peripheral surface of the prevention piston passage 141a to the side of the inflow prevention housing 141 . The second prevention passage 141d may provide a path for supplying or discharging pneumatic pressure to the lower portion of the prevention piston passage 141a. The second prevention passage 141d may supply pneumatic pressure required to raise the inflow prevention piston 142 . In addition, the second prevention passage 141d provides a path through which the air pressure supplied to the lower portion of the prevention piston passage 141a is discharged when the inflow prevention piston 142 descends. The second prevention passage 141d may be connected to an external pneumatic supply means and may receive pneumatic pressure.

The blocking gas passage 141e may be formed through the lower portion of the inflow prevention housing 141 from the outer surface to the inner surface. The blocking gas passage 141e blocks the reaction by-product particles from flowing between the inflow prevention housing 141 and the inflow prevention piston 142, and the reaction byproduct particles are formed on the inner circumferential surface of the fluid passage 110a or the lower fluid passage 140a. It can be prevented from adhering to or causing corrosion. More specifically, the inflow prevention housing 141 and the inflow prevention piston 142 may be spaced apart from each other in the fluid passage 110a direction. Accordingly, the blocking gas supplied from the blocking gas passage 141e may flow in a direction perpendicular to the separation gap, thereby preventing reaction by-product particles from flowing into the separation gap. In addition, the blocking gas may prevent reaction byproduct particles from adhering to the inner circumferential surface of the valve housing 110 or the inner circumferential surface of the inflow prevention cylinder 140 .

The inflow prevention piston 142 may include an prevention piston body 143 and an prevention piston rod 144 . The inflow prevention piston 142 may be coupled to the inflow prevention housing 141 to move up and down, and may shield the accommodation space 110b from the fluid passage 110a. The inflow prevention piston 142 supports the lower surface of the shielding plate 128 as it rises so that the shielding plate 128 more firmly contacts the shielding bottom region c of the valve housing 110 .

The prevention piston body 143 may be formed in a ring shape, and may have a width corresponding to the width of the prevention piston passage 141a and a height smaller than the height of the prevention piston passage 141a. The prevention piston body 143 may be formed to have a height smaller than a height obtained by subtracting the movement distance of the inflow prevention piston 142 from the height of the prevention piston passage 141a. Therefore, the prevention piston body 143 can move up and down in the interior of the prevention piston passage (141a). The prevention piston body 143 may move up and down inside the prevention piston passage 141a by pneumatic pressure supplied through the first prevention passage 141c and the second prevention passage 141d.

The prevention piston rod 144 is formed in a ring shape and may be formed to extend upwardly from the prevention piston body 143 . The prevention piston rod 144 may be formed to an appropriate height by reflecting the height from the prevention piston body 143 to the lower surface of the housing upper hole 110c of the valve housing 110 and the movement distance of the inflow prevention piston 142 . can The prevention piston rod 144 may move from the bottom to the top together with the prevention piston body 143 to shield the accommodating space 110b from the fluid passage 110a. The prevention piston rod 144 may support the lower surface of the shield plate 128 while ascending so that the shield plate 128 is in contact with the lower surface of the fluid passage 110a of the valve housing 110 .

The prevention piston rod 144 may have a ring shape having a bent area or a stepped area, and may be formed to have a different thickness for each area. The prevention piston rod 144 may be formed in a ring shape having the same thickness. The prevention piston rod 144 may be formed in various shapes according to the shapes of the inflow prevention housing 141 and the prevention piston passage 141a and the prevention passage opening hole 141b.

The prevention piston rod 144 may have a rod O-ring groove 144a formed on its upper surface in a circumferential direction. A piston O-ring 145 may be coupled to the rod O-ring groove 144a. The piston O-ring 145 may contact the shielding bottom region c of the valve housing 110 to increase the shielding force of the preventive piston rod 144 . In addition, the piston O-ring 145 may be in contact with the lower surface of the shielding plate 128 to increase the shielding force of the preventive piston rod 144 .

The inflow blocking means 146 may include an inflow blocking ring 147 and an inflow blocking flange 148 . The inflow blocking means 146 is located inside the inflow prevention cylinder 140 to block the reaction byproduct particles from flowing into the inflow prevention cylinder 140, and the reaction byproduct particles are introduced into the fluid passageway 110a or the lower fluid passageway ( It is possible to prevent deposition or corrosion on the inner peripheral surface of 140a).

The inflow blocking ring 147 has a ring shape and may be formed to have a height corresponding to the height of the inflow prevention housing 141 and the inflow prevention piston 142 . The inflow blocking ring 147 may be located inside the inflow prevention housing 141 and the inflow prevention piston 142 . The inflow blocking ring 147 may have an outer circumferential surface spaced apart from the inflow prevention housing 141 and the inner circumferential surface of the inflow prevention piston 142 by a predetermined distance. Accordingly, the inflow blocking ring 147 may form a blocking gas flow path 147a through which a blocking gas flows between an outer peripheral surface of the inflow prevention housing 141 and an inner peripheral surface of the inflow prevention piston 142 . The blocking gas passage 147a may be formed in a ring shape along the outer circumferential surface of the inflow blocking ring 147 and may be connected to the blocking gas passage 141e at the lower portion. The blocking gas passage 147a allows the blocking gas supplied from the blocking gas passage 141e to flow between the upper portion of the inflow prevention piston 142 and the upper portion of the inflow blocking ring 147 . The blocking gas blocks the reaction by-product particles flowing through the fluid passage 110a from flowing between the inflow prevention piston 142 and the upper portion and the upper portion of the inflow blocking ring 147 . In addition, the blocking gas may block the reaction by-product particles from flowing between the inflow prevention housing 141 and the inflow prevention piston 142 , and the reaction byproduct particles are formed on the inner circumferential surface of the fluid passage 110a or the lower fluid passage 140a. can be prevented from adhering to

In addition, the inlet blocking ring 147 may have an inner diameter greater than the inner diameter of the housing upper hole 110c. Accordingly, the inflow blocking ring 147 may provide a path through which the inner circumferential surface does not protrude inward than the housing upper hole 110c, and the fluid flowing through the fluid passage 110a flows without being disturbed by the flow.

The inflow blocking flange 148 is formed as a ring-shaped flange, and may be coupled to extend from the lower end of the inflow blocking ring 147 to the outer circumferential direction. The inflow blocking flange 148 may be coupled to a lower portion of the blocking gas passage 141e in the lower portion of the inflow prevention housing 141 . The inflow blocking flange 148 may block the lower end of the blocking gas flow path 147a so that the blocking gas of the blocking gas flow path 147a flows upward.

The lower outlet pipe 150 may have a hollow inside and may be formed in a tubular shape open up and down. The lower outlet pipe 150 may be coupled to a lower portion of the inflow prevention cylinder 140 . The lower outlet pipe 150 may be connected to a process pipe. Accordingly, the lower outlet pipe 150 allows the fluid passage 110a to be connected to the process pipe. Meanwhile, the lower outlet pipe 150 may be integrally formed with the inflow prevention housing 141 of the inflow prevention cylinder 140 .

The lower outlet pipe 150 may further include a lower bypass passage 151 . The lower bypass passage 151 may be formed by penetrating from the inner circumferential surface of the lower outlet pipe 150 to the outer circumferential surface. The lower bypass passage 151 may be connected to the bypass passage module 160 to form a fluid bypass passage.

The bypass passage module 160 may include a bypass housing passage 161 , a bypass connection pipe 162 , and a bypass passage blocking means 163 .

The bypass passage module 160 provides a fluid bypass passage through which the fluid exhausted from the vacuum chamber to the vacuum pump bypasses and flows when the vacuum pump is operated in a state where the fluid passage 110a is shielded by the shielding plate 128 . can That is, the bypass passage module 160 is connected to the fluid passage 110a at the upper portion of the shielding position (a), passes through the receiving space 110b and is connected to the fluid passage 110a at the lower portion of the shielding position (a). and a fluid bypass passage through which a fluid flows in parallel with the fluid passage 110a may be provided. The bypass passage module 160 may provide a path through which the fluid flows to the lower portion of the fluid passage 110a by bypassing the shielding plate 128 from the upper portion of the fluid passage 110a. The bypass passage module 160 may be opened when it is slowly pumped by a vacuum pump at the beginning of a manufacturing process or during a process chamber set-up process. Accordingly, the bypass passage module 160 may introduce a gas that does not contain reaction by-product particles. For example, in the bypass passage module 160 , a fluid including only a purging gas or a process gas may be introduced and flowed.

The bypass housing passage 161 may extend outwardly from the inner circumferential surface of the fluid passage 110a of the valve housing 110 at the upper portion of the shielding position (a). In addition, the bypass housing passage 161 may be bent downward to pass through the accommodating space 110b and then pass through the lower surface of the valve housing 110 . The bypass housing passage 161 may be formed by processing the valve housing 110 itself when it is formed inside the valve housing 110 , or may be formed by additionally inserting a tube into the valve housing 110 . In addition, the bypass housing passage 161 may be formed by a separate pipe when passing through the accommodation space 110b. Also, the bypass housing passage 161 may be formed in an open state in the accommodation space 110b.

The bypass connection pipe 162 may provide a path through which the fluid flowing through the fluid bypass passage flows from the lower portion of the shielding position (a) to the lower portion of the fluid passage 110a. For example, the bypass connection pipe 162 has one end connected to the bypass housing passage 161, and the other end is a fluid passage 110a, a lower fluid passage 140a, and a lower outlet pipe in the lower part of the shielding position (a). 150 or may be connected to the process piping. In addition, the bypass connection pipe 162 may be connected to the lower bypass passage 151 of the lower outlet pipe 150 . Accordingly, the bypass connection pipe 162 may form a fluid bypass passage by connecting the fluid bypass passage formed in the valve housing 110 and the lower bypass passage 151 . On the other hand, the bypass connection pipe 162 may be formed to extend directly to the lower portion of the fluid passage 110a through the lower outlet pipe 150 .

The bypass passage blocking means 163 may be formed as a means for opening and closing the bypass housing passage 161 . For example, the bypass passage blocking means 163 may be formed in a plate shape or a block, and may be installed in the bypass housing passage 161 . The bypass passage blocking means 163 may move up and down inside the bypass housing passage 161 to block the bypass housing passage 161 . Although not specifically shown, the bypass passage blocking means 163 may be moved up and down by a pneumatic cylinder. In addition, the bypass passage blocking means 163 may rotate to block the bypass housing passage 161 . At this time, the bypass passage blocking means 163 may block the bypass housing passage 161 while rotating by the electric motor.

Next, a fluid shutoff valve according to another embodiment of the present invention will be described.

Referring to FIGS. 9A to 9C , in the fluid shutoff valve according to another embodiment of the present invention, the cleaning gas injection module 130 may have a different structure. More specifically, the structures of the cleaning gas injection passage 131 and the cleaning gas injection nozzle 132 of the cleaning gas injection module 130 may be formed differently.

Referring to FIG. 9A , the cleaning gas injection passage 131 of the cleaning gas injection module 130 may be formed in a semicircular arc shape based on a planar shape. In addition, the cleaning gas injection nozzle 132 may also be formed in a semicircular arc shape based on a planar shape. In this case, the vertical cross-sectional structures of the cleaning gas injection passage 131 and the cleaning gas injection nozzle 132 may be the same or similar to those of the cleaning gas injection passage 131 and the cleaning gas injection nozzle 132 of FIG. 5 . can Meanwhile, the cleaning gas injection passage 131 and the cleaning gas injection nozzle 132 may be formed in an arc shape having an arc angle greater than that of a semicircle. In addition, the cleaning gas injection passage 131 and the cleaning gas injection nozzle may be formed in an arc shape having an arc angle smaller than that of a semicircle, and a plurality of them may be formed to be spaced apart in a circumferential direction. For example, the cleaning gas injection passage and the cleaning gas injection nozzle may be formed in four pieces having an arc angle of 45 degrees, and may be formed to be spaced apart from each other by an angle of 45 degrees in the circumferential direction.

Referring to FIG. 9B , the cleaning gas injection passage 131 of the cleaning gas injection module 130 may be formed in a semicircular shape based on a planar shape. That is, the cleaning gas injection passage 131 may be formed in the same manner as the cleaning gas injection passage 131 of FIG. 9A . Also, the cleaning gas injection nozzle 132 may be formed such that a plurality of holes are spaced apart from each other and arranged in a semicircular shape. In this case, the vertical cross-sectional structures of the cleaning gas injection passage 131 and the cleaning gas injection nozzle 132 may be the same or similar to those of the cleaning gas injection passage 131 and the cleaning gas injection nozzle 132 of FIG. 5 . can

Referring to FIG. 9C , the cleaning gas injection passage 131 of the cleaning gas injection module 130 may be formed in a circular shape based on a planar shape. That is, the cleaning gas injection passage 131 may be formed in the same manner as the cleaning gas injection passage 131 of FIG. 5 . Also, the cleaning gas injection nozzle 132 may be formed such that a plurality of holes are spaced apart from each other and arranged in a circular shape. In this case, the vertical cross-sectional structures of the cleaning gas injection passage 131 and the cleaning gas injection nozzle 132 may be the same or similar to those of the cleaning gas injection passage 131 and the cleaning gas injection nozzle 132 of FIG. 5 . can

10 is a plan view of a fluid shutoff valve according to another embodiment of the present invention. 11 is a vertical cross-sectional view taken along line F-F of FIG. 10 . 12 is a vertical cross-sectional view illustrating a state in which the shield module is positioned in a standby position in the fluid shutoff valve of FIG. 10 .

Referring to FIGS. 10 to 12 , the fluid shutoff valve 200 according to another embodiment of the present invention may include a valve housing 210 , a shielding module 220 , and a cleaning gas injection module 130 . In addition, the fluid shutoff valve 200 may further include a lower outlet pipe 150 . Meanwhile, although not specifically illustrated, the fluid shutoff valve 200 may further include a bypass passage module 160 of the fluid shutoff valve 100 according to the embodiment of FIGS. 1 to 8 . In addition, the fluid shutoff valve 200 may have the cleaning gas injection module 130 having the structure shown in FIGS. 9A to 9C .

The fluid shutoff valve 200 may block the shielding position (a) while the shielding plate 228 of the shielding module 220 repeatedly linearly moves between the shielding position (a) and the standby position (b). In the fluid shutoff valve 200 , since the shielding plate 128 of the shielding module 220 moves in a straight line, there may be some differences in the structures of the valve housing 210 and the shielding module 220 . In addition, in the fluid shutoff valve 200 , the structure of the cleaning gas spraying module 130 is the same as or similar to that of the cleaning gas spraying module 130 of the fluid shutoff valve 100 according to the embodiment of FIGS. 1 to 8 . can be formed.

Therefore, hereinafter, the fluid shutoff valve 200 will be described with a focus on differences from the fluid shutoff valve 100 according to the embodiment of FIGS. 1 to 8 . In addition, the same reference numerals may be assigned to the fluid shutoff valve 200 for the same configuration as the fluid shutoff valve 100 according to the embodiment of FIGS. 1 to 8 , and a detailed description thereof may be omitted.

The valve housing 210 may include a fluid passage 110a extending up and down on one side and an accommodating space 110b extending from the fluid passage 110a to the other side. The valve housing 210 may have a substantially rectangular shape since the fluid passage 110a and the receiving space 110b are located on one side and the other side, respectively. Meanwhile, the valve housing 210 may be formed as a cylindrical valve housing 110 shown in FIG. 1 instead of a rectangular one. In this case, the shielding plate 228 may be moved by a linear motion between the standby position and the shielding position.

The valve housing 210 may be provided with a housing upper hole 110c and a housing lower hole 110d that are respectively opened upward and downward from the fluid passage 110a. In addition, the valve housing 210 may include a housing shielding hole 210e. In addition, the valve housing 210 may further include an upper connection pipe 115 .

The housing shielding hole 210e may be formed to penetrate into the receiving space 110b from the other side of the valve housing 210 with respect to the fluid passage 110a. The housing shielding hole 210e may provide a space to which a part of the shielding module 220 is coupled.

In the valve housing 210 , a shielding O-ring groove 210f may be formed in the upper bottom surface of the valve housing 210 at the shielding position (a), that is, in the shielding bottom region (c). The shielding O-ring groove 210f may be formed in a ring shape along the circumference of the fluid passage 110a, and may be formed to open downward of the shielding bottom area c. A shielding O-ring 219 may be coupled to the shielding O-ring groove 210f. Meanwhile, the shielding O-ring groove 210f and the shielding O-ring 219 may be formed in the shielding plate 128 of the shielding module 220 as shown in FIGS. 1 to 8 .

The shielding module 220 may include a shielding pneumatic cylinder 221 , a shielding carrier 225 , and a shielding plate 228 .

The shielding module 220 may be located on the other side with respect to the fluid passage 110a of the valve housing 210 . The shielding module 220 may linearly move the shielding transport body 225 and the shielding plate 228 while the shielding pneumatic cylinder 221 moves forward and backward. That is, the shielding module 220 may linearly move the shielding plate 228 repeatedly to the shielding position (a) and the standby position (b). Meanwhile, the shielding module 220 may include a hydraulic cylinder instead of the shielding pneumatic cylinder 221 . In addition, the shielding module may include a motor and a ball screw instead of the shielding pneumatic cylinder 221 .

The shielding pneumatic cylinder 221 may be formed as a general pneumatic cylinder. For example, the shielding pneumatic cylinder 221 may include a shielding pneumatic housing 222 and a shielding pneumatic piston 223 . The shielding pneumatic housing 222 may be formed in a cylindrical shape having a space in which air pressure flows in and out. The shielding pneumatic piston 223 is formed in a bar shape, one side may flow inside the shielding pneumatic housing 222 , and the other side may flow into the receiving space 110b.

The shielding transfer member 225 may include a shielding transfer bar 226 and a shielding transfer ring 127 . One side of the shielding carrier 225 is coupled to the shielding pneumatic piston 223 , and may be linearly moved in the receiving space 110b in the fluid passage 110a direction. That is, the shielding transfer member 225 may repeatedly move between the shielding transfer ring 127 between the standby position (b) and the shielding position (a) by the forward and backward movement of the shielding pneumatic piston 223 . The shielding transfer bar 226 and the shielding transfer ring 127 may be integrally formed.

The shielding transfer bar 226 may be formed in a bar shape having a predetermined length. One side of the shielding transfer bar 226 may be coupled to the shielding pneumatic cylinder 221 . In addition, the shielding transfer bar 226 may extend in the direction of the other side of the standby position (b).

The shielding transport ring 127 may be formed in a ring shape having a predetermined inner diameter. The shielding transfer ring 127 may be coupled to the outer side of the shielding transfer bar 226 . The shielding conveying ring 127 may be formed so as to have a stepped inside.

The shielding plate 228 is formed in a disk shape, and an outer diameter may be formed to have a diameter corresponding to the outer diameter of the shielding transfer ring 127 . The shielding plate 228 may have a flat top surface. The shield plate 228 may seal the fluid passage 110a while the upper surface of the shield plate 228 is in contact with the shield O-ring 219 of the valve housing 210 . Meanwhile, a shielding O-ring groove 210f may be formed on the upper surface of the shielding plate 128 as in the shielding plate 128 of FIGS. 1 to 8 . In addition, a shielding O-ring 219 may be coupled to the shielding O-ring groove 210f.

13 is a plan view of a fluid shutoff valve according to another embodiment of the present invention.

Referring to FIG. 13 , the fluid shutoff valve 300 according to another embodiment of the present invention includes a valve housing 210 , a shield module 220 , a cleaning gas injection module 130 , and an inflow prevention cylinder 140 . may include In addition, the fluid shutoff valve 300 may further include a lower outlet pipe 150 . Meanwhile, although not specifically illustrated, the fluid shutoff valve 300 may further include a bypass passage module 160 of the fluid shutoff valve 100 according to the embodiment of FIGS. 1 to 8 .

The fluid shutoff valve 300 is a fluid shutoff valve 200 according to the embodiment of FIGS. 10 to 12 coupled to the inflow prevention cylinder 140 of the fluid shutoff valve 100 according to the embodiment of FIGS. 1 to 8 . can be formed. The valve housing 210 of the fluid shutoff valve 300 may be formed to be the same as or similar to the lower structure of the valve housing 110 shown in FIG. 2 so that the inflow prevention cylinder 140 may be coupled thereto. In addition, the fluid shutoff valve 300 may have the cleaning gas injection module 130 having the structure shown in FIGS. 9A to 9C . Meanwhile, a detailed description of the fluid shutoff valve will be omitted.

As described above, embodiments according to the technical idea of the present invention have been described with reference to the accompanying drawings, but those of ordinary skill in the art to which the present invention pertains will have other specific forms without changing the technical spirit or essential features of the present invention. It will be understood that it can be implemented as It should be understood that the embodiments described above are illustrative in all respects and not restrictive.

The fluid shutoff valve of the present invention is installed in a waste gas exhaust pipe of a semiconductor manufacturing line or a display manufacturing line, and can be used to temporarily block an exhaust pipe through which a fluid including waste gas or reaction by-products flows.

Claims

A valve housing formed between the housing upper hole and the housing lower hole and having a fluid passage through which a fluid flows and a receiving space formed at one side of the fluid passage and connected to the fluid passage;

a shielding module located in a standby position of the receiving space and having a shielding plate that moves to a shielding position of the fluid passage to shield the fluid passage; and

and a cleaning gas injection module for spraying cleaning gas on the upper surface of the shielding plate located in the shielding position.
The method of claim 1,

and the cleaning gas injection module sprays the cleaning gas from immediately before the shield plate moves from the shielding position to the standby position until it completely leaves the fluid passage.
The method of claim 1,

The cleaning gas spraying module is a fluid shutoff valve, characterized in that the cleaning gas is sprayed on the upper surface of the shielding plate to be inclined inward to the outside.
The method of claim 1,

The shielding plate includes a shielding O-ring groove formed in a ring shape along the outside from the upper surface and a shielding O-ring inserted into the shielding O-ring groove,

The cleaning gas injection module injects the cleaning gas obliquely inward from the upper surface of the shielding plate to the outside of the shielding O-ring groove.
The method of claim 1,

The cleaning gas injection module is

a cleaning gas injection passage formed in a ring shape outside the fluid passage in the valve housing;

a cleaning gas injection nozzle penetrating from the cleaning gas injection passage to a shielded bottom area of the accommodating space of the valve housing;

and a cleaning gas supply passage for supplying cleaning gas to the cleaning gas injection passage.
6. The method of claim 5,

The cleaning gas injection nozzle is formed in a ring shape having a predetermined width, and is inclined from an outer upper portion to an inner lower portion.
6. The method of claim 5,

The cleaning gas injection nozzle has a plurality of holes spaced apart from each other and arranged in a circular shape, and is formed to be inclined from an outer upper portion to an inner lower portion.
The method of claim 1,

The cleaning gas injection module is

a cleaning gas injection passage formed in a semicircular arc shape outside the fluid passage inside the valve housing;

a cleaning gas injection nozzle penetrating from the cleaning gas injection passage to a shielded bottom area of the accommodating space of the valve housing;

and a cleaning gas supply passage for supplying cleaning gas to the cleaning gas injection passage.
9. The method of claim 8,

The cleaning gas injection nozzle is formed in a semicircular arc shape having a predetermined width, and is inclined from an outer upper portion to an inner lower portion.
9. The method of claim 8,

The cleaning gas injection nozzle has a plurality of holes spaced apart from each other and arranged in a semicircular arc shape, and is formed to be inclined from an outer upper portion to an inner lower portion.