WO2021196422A1 - Laser cleaning system and method for protecting base materials from being burnt and melting - Google Patents

Laser cleaning system and method for protecting base materials from being burnt and melting Download PDF

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Publication number
WO2021196422A1
WO2021196422A1 PCT/CN2020/097980 CN2020097980W WO2021196422A1 WO 2021196422 A1 WO2021196422 A1 WO 2021196422A1 CN 2020097980 W CN2020097980 W CN 2020097980W WO 2021196422 A1 WO2021196422 A1 WO 2021196422A1
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Prior art keywords
module
laser
substrate
cleaning
temperature
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PCT/CN2020/097980
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French (fr)
Chinese (zh)
Inventor
袁和平
陈水宣
洪昭斌
陈杰
姚飞闪
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厦门理工学院
厦门华联电子股份有限公司
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Publication of WO2021196422A1 publication Critical patent/WO2021196422A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0042Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00Accessories or details of general applicability for machines or apparatus for cleaning

Definitions

  • the invention relates to the technical field of laser cleaning, and more specifically, it relates to a laser cleaning system and method for protecting a substrate from being sintered.
  • Pollutant spots such as rust, corrosion, and oil stains often appear on the surface of metal plates.
  • metals There are many ways to clean metals in the prior art. Basically, they use chemical agents and mechanical methods to clean. With people’s increasing awareness of environmental protection and safety Intensified, my country's requirements for industrial environmental protection are getting higher and higher. When the environmental protection requirements are met, the types of chemicals that can be used in industrial cleaning are becoming fewer and fewer.
  • Laser cleaning has the cleaning characteristics of non-grinding, non-contact, non-thermal effect and suitable for objects of various materials, and is considered to be the most reliable and effective solution.
  • laser cleaning can solve problems that cannot be solved by traditional cleaning methods.
  • laser cleaning usually emits a laser directly at the workpiece, so as to use the laser to clean the stains on the workpiece.
  • the base material of each workpiece has a melting point value. If the laser cleaning temperature is too high, it may cause the workpiece to be melted, causing damage to the workpiece, and affecting the cleaning effect.
  • the purpose of the present invention is to provide a laser cleaning system that protects the substrate from being fused, which can adjust the laser temperature according to the melting point of the substrate, protect the substrate from being fused during cleaning, and improve Advantages of cleaning effect.
  • the present invention provides the following technical solutions:
  • a laser cleaning system for protecting a substrate from being fused comprising a control module, a laser cleaning module, a temperature adjustment module, a temperature detection module, and a base material melting point data center all connected to the control module, the laser cleaning module is used to focus the laser And clean the substrate, the temperature detection module is used to detect the temperature of the substrate cleaning point and feed it back to the control module, the substrate melting point data center is used to record the melting point value of each substrate, and the control module is used to The feedback cleaning temperature is compared with the melting point value of the substrate and a control signal is sent.
  • the temperature adjustment module receives the control signal and is used to adjust the laser emission temperature of the laser cleaning module.
  • the laser cleaning module includes a mounting frame, a laser head arranged on the mounting frame, and a moving mechanism for driving the laser head to move closer to or away from the substrate, and the laser head is used to emit toward the cleaning point
  • the moving mechanism is connected to a control module, and the control module controls the moving mechanism to drive the moving stroke value of the laser head according to the temperature feedback from the temperature detection module.
  • the moving mechanism includes a sliding seat slid on the mounting frame and a pushing cylinder for pushing the sliding seat to move, the laser head is mounted on the sliding seat, and a displacement sensor is provided on the sliding seat.
  • the sensor is connected to the control module, the control module sets the stroke value range according to the substrate melting point value determined by the substrate melting point data center, the displacement sensor feeds back the sliding stroke of the sliding seat and feeds it back to the control module, and the control module controls and pushes The pushing stroke value of the cylinder, and the pushing stroke value is within the range of the stroke value.
  • a proportional valve used to precisely control the amount of intake air is provided on the intake end of the pushing cylinder.
  • the temperature adjustment module includes a regulator for adjusting the laser emission power and a cooling module for reducing the temperature of the laser cleaning module, the regulator and the cooling module are both connected to the laser cleaning module, and are controlled by On the control module.
  • the cooling module includes a water cooling pipe arranged in the laser cleaning module, a water chiller connected to the water inlet end of the water cooling pipe, and a water return pipe connected to the water outlet end of the water cooling pipe.
  • the temperature detection module includes an infrared thermal imager, a data transmitter connected to the infrared thermal imager, and a data receiver set on the control module, the data receiver is connected to the data transmitter and used to receive data transmission Data from the device.
  • it also includes a cooling protection device for cooling the substrate, the cooling protection device is located at one side of the laser cleaning device, and the cooling protection device is connected to the control module.
  • the cooling protection device includes a cooling box, a cooling gas filled in the cooling box, and a gas spray head for spraying the cooling gas onto the surface of the substrate, and the gas spray head is connected to the cooling box through a gas pipe.
  • the present invention has the following advantages by adopting the above technical solutions:
  • the temperature detection module detects the temperature value of the substrate during cleaning in real time, and feeds the temperature value back to the control module. If the detected temperature exceeds the melting point of the substrate, the temperature adjustment module adjusts the laser emission temperature to realize the adjustment of the laser The effect of cleaning temperature prevents the substrate from being sintered and has the advantage of improving the cleaning effect;
  • the moving mechanism drives the laser head to move, which can adjust the distance between the laser head and the substrate, thereby adjusting the cleaning temperature of the substrate cleaning point, and avoiding the substrate from being smelted;
  • the cooling protection device provided can cool the cleaned substrate and provide cooling protective gas to prevent oxidation, so as to protect the substrate, facilitate thorough cleaning of the substrate, and have the advantage of improving the cleaning effect.
  • the second object of the present invention is to provide a laser cleaning method for protecting the substrate from being sintered, adjusting the laser temperature according to the melting point of the substrate, protecting the substrate from sintering during cleaning, and having the advantage of improving the cleaning effect.
  • the present invention provides the following technical solutions:
  • a laser cleaning method for protecting a substrate from sintering, using the aforementioned laser cleaning system includes the following steps:
  • the control module compares the feedback cleaning point temperature value with the determined substrate melting point value, and sends a control signal to control the temperature adjustment module to adjust the temperature of the laser cleaning module to prevent the cleaning point temperature value from exceeding the substrate melting point value.
  • the present invention has the following advantages by adopting the above technical solutions:
  • the melting point value is compared with the temperature value of the cleaning point during the cleaning process of the substrate, so as to facilitate the use of the temperature adjustment module to adjust the laser emission temperature and prevent the temperature of the substrate cleaning point from exceeding the melting point of the substrate.
  • the material is not melted and has the advantage of improving the cleaning effect.
  • Figure 1 is a schematic diagram of a laser cleaning system for protecting a substrate from being sintered
  • Figure 2 is a schematic diagram of the structure of the laser cleaning module
  • FIG. 3 is a schematic diagram of the connection relationship between the temperature detection module and the temperature adjustment module connected to the laser cleaning module.
  • Control module 2. Laser cleaning module; 21. Mounting frame; 22. Laser head; 23. Moving mechanism; 231. Sliding seat; 232. Push cylinder; 233. Displacement sensor; 234. Proportional valve; 3. 31. Regulator; 32. Cooling module; 321. Water cooling pipe; 322. Chiller; 323. Return pipe; 324. Heat exchanger; 4. Temperature detection module; 41. Infrared thermal imager; 42 4. Data transmitter; 43. Data receiver; 5. Base material melting point data center; 6. Cooling protection device; 61. Cooling box; 62. Cooling gas; 63. Gas nozzle.
  • the laser cleaning system that protects the substrate from being sintered will be further described with reference to FIGS. 1 to 3.
  • a laser cleaning system for protecting substrates from melting includes a control module 1 and a laser cleaning module 2, a temperature adjustment module 3, a temperature detection module 4, a cooling protection device 6 connected to the control module 1, and
  • the base material melting point data center 5 uses the temperature detection module 4 to detect the temperature of the laser cleaning point, and feeds it back to the control module 1.
  • the control module 1 compares the temperature detected by the temperature detection module 4 with the melting point of the cleaning substrate, and According to the comparison result, a control signal is sent to the temperature adjustment module 3.
  • the temperature adjustment module 3 adjusts the laser emission temperature of the laser cleaning module 2 to ensure that the temperature is lower than the melting point of the substrate, and the cooling protection device 6 provides further protection and cooling for the substrate. In this way, while ensuring the cleaning effect, the substrate is prevented from being sintered.
  • the base material melting point data center 5 is set up as a computer that records the melting point data of various base materials, and the computer has a storage hard disk.
  • the melting point value of the substrate is recorded in the storage hard disk to ensure that it can be directly queried later.
  • the control module 1 is set as a PLC controller. When in use, first operate the substrate melting point data center 5 to query the melting point value of the substrate to be cleaned, and send the value to the control module 1, so that the control module 1 can send out corresponding control signals. Thereby improving the cleaning effect and preventing the substrate from being sintered.
  • the temperature detection module 4 includes an infrared thermal imager 41, a data transmitter 42 connected to the infrared thermal imager 41, and a data receiver 43 arranged on the control module 1, wherein the infrared thermal imager
  • the meter 41 is arranged on the laser cleaning module 2 and can move along with the laser cleaning emission point of the laser cleaning module 2 to accurately and real-time locate the laser cleaning point, so as to detect and image the temperature of the laser cleaning point.
  • the data transmitter 42 is used to send out the data signals tested by the infrared thermal imager 41, and the data receiver 43 is connected to the data transmitter 42 and used to receive the data fed back by the data transmitter 42, specifically, the data receiver 43 and the data transmitter 42 is transmitted through a wireless network signal to facilitate the control module 1 to receive the temperature value of the laser cleaning point during cleaning in real time, so as to facilitate timely adjustment according to the melting point value of the substrate.
  • the laser cleaning module 2 includes a mounting frame 21, a laser head 22 arranged on the mounting frame 21, and a moving mechanism 23 for driving the laser head 22 to move closer to or away from the substrate.
  • the laser head 22 is connected with a laser transmitter.
  • the laser transmitter connects the laser light to the laser head 22 through a polarizer, and the extension direction of the laser beam refracted by the polarizer to the laser head 22 is consistent with the driving direction of the moving mechanism 23 to ensure the laser During the movement, the head 22 can receive laser light and emit it to clean the substrate.
  • the moving mechanism 23 is connected to the control module 1.
  • the control module 1 controls the moving mechanism 23 to drive the movement stroke value of the laser head 22 according to the temperature detection module 4 feedback, thereby adjusting the distance between the laser head 22 and the substrate, so that the laser is emitted
  • the distance between the dot and the cleaning point of the substrate is appropriately adjusted according to temperature changes to further prevent the substrate from being fused.
  • the temperature adjustment module 3 includes a regulator 31 for adjusting the laser emission power and a cooling module 32 for reducing the temperature of the laser cleaning module 2, wherein the regulator 31 and the cooling module 32 are both
  • the laser cleaning module 2 is connected, and the cooling module 32 is arranged on the laser head 22 to cool down the laser head 22, adjust the laser emission temperature, and adjust the laser emission power in conjunction with the regulator 31 to reduce the overall laser emission temperature, so as to prevent the substrate from being damaged. Fuse.
  • the regulator 31 and the cooling module 32 are both controlled by the control module 1.
  • the control module 1 sends out a control signal after comparing the melting point value of the substrate with the temperature detected by the temperature detection module 4 to make the regulator 31 cooperate with the cooling module 32. Adjust the laser emission temperature to a reasonable temperature range to ensure the cleaning effect and avoid the substrate from being fused.
  • the cooling module 32 includes a water cooling tube 321 arranged in the laser head 22 of the laser cleaning module 2, a chiller 322 connected to the water inlet end of the water cooling tube 321, and a water cooling tube 321 connected to the water outlet end of the water cooling tube 321.
  • the water return pipe 323 is cooled by the water chiller 322 and transported to the water cooling pipe 321, so that the water cooling pipe 321 is used for cooling, which is convenient for adjusting the temperature of the laser head 22 and cooling the laser emission temperature.
  • the return pipe 323 is provided with a heat exchanger 324, and the end of the return pipe 323 away from the water-cooled pipe 321 is connected to the chiller 322, so that the water in the return pipe 323 passes through the heat exchanger 324 and then circulates it. Cooling is performed in the chiller 322 to form a circulation loop, which facilitates the continuous use of the cooling water.
  • the cooling protection device 6 includes a cooling box 61, a cooling gas 62 filled in the cooling box 61, and a gas spray head 63 for spraying the cooling gas 62 onto the surface of the substrate, wherein the gas spray head 63 is connected to the cooling box 61 through a gas pipe, and the cooling box 61 cools the gas in the cooling box 61 through a refrigeration system, so that the cooling gas 62 is sprayed onto the substrate through the gas nozzle 63 for cooling and cooling to protect the substrate.
  • the gas is argon or nitrogen
  • the pressure of the cooling gas 62 is 0.3-0.6 MPa, so that the cooling gas 62 can protect the cleaned area of the substrate and prevent the cleaned area of the substrate from reacting with oxygen to generate new oxidation. At the same time, it can speed up the cooling of the cleaned area and protect the substrate from being melted by the second laser.
  • the moving mechanism 23 includes a sliding seat 231 slid on the mounting frame 21 and a push for pushing the sliding seat 231 to move.
  • Air cylinder 232 in which the laser head 22 is mounted on the sliding seat 231, and a displacement sensor 233 is arranged on the sliding seat 231.
  • the displacement sensor 233 is connected to the control module 1.
  • the control module 1 determines the melting point of the substrate according to the melting point of the substrate 5 in the data center 5. Set the stroke value range, the displacement sensor 233 feeds back the sliding stroke of the sliding seat 231 and feeds it back to the control module 1.
  • the control module 1 controls the pushing stroke value of the pushing cylinder 232, and the pushing stroke value is within the range of the stroke value to facilitate the adjustment of the laser The temperature of the cleaning point during cleaning to prevent the substrate from being melted. Further, a proportional valve 234 for accurately controlling the intake air volume is provided on the intake end of the pushing cylinder 232 to improve the accuracy of controlling the stroke of the laser head 22.
  • the laser head 22 When in use, the laser head 22 is positioned at the substrate, and the specific melting point value of the substrate is searched and determined in the substrate melting point data center 5, so that the melting point value of the substrate is fed back to the control module 1 for recording.
  • the control module 1 preliminarily determines the laser emission power according to the melting point of the substrate, and then starts the laser cleaning module 2 to perform laser cleaning on the substrate.
  • the temperature detection module 4 detects the temperature of the laser cleaning point of the substrate in real time and feeds back the temperature.
  • the control module 1 compares the detected temperature with the melting point value of the substrate according to the received detection temperature.
  • the current cleaning parameters are maintained; if it is higher than the melting point of the substrate, it sends a control signal to the temperature adjustment module 3 and the moving mechanism 23.
  • the temperature adjustment module 3 and the moving mechanism 23 By adjusting the laser emission power, the distance between the laser head 22 and the substrate, and cooling the laser head 22, the temperature of the laser cleaning point on the substrate can be adjusted, and the adjusted temperature is consistent with that the substrate is not In the case of the melting point, the laser cleaning temperature can be fully adjusted to ensure the accuracy of the adjustment and improve the cleaning effect while avoiding the substrate from being smelted.
  • the cooling protection device 6 sprays cooling gas 62 to the cleaned part of the substrate to protect the substrate from secondary oxidation, and at the same time cools the cleaned part of the substrate to protect the substrate from sintering.
  • the present invention can adjust the laser temperature according to the melting point of the substrate, protect the substrate from being melted during cleaning, and has the advantage of improving the cleaning effect.
  • the second embodiment the difference between this embodiment and the first embodiment is to provide a laser cleaning method for protecting the substrate from being sintered, using the laser cleaning system mentioned in the first embodiment, including the following steps:
  • the control module 1 compares the feedback cleaning point temperature value with the determined substrate melting point value, and sends a control signal to control the temperature adjustment module 3 to adjust the temperature of the laser cleaning module 2 to prevent the cleaning point temperature value from exceeding the substrate melting point value.

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Abstract

A laser cleaning system for protecting base materials from being burnt and melting, which system relates to the technical field of laser cleaning. The system comprises: a control module (1); and a laser cleaning module (2), a temperature regulation module (3), a temperature detection module (4) and a base material melting-point data center (5), which are all connected to the control module (1), wherein the laser cleaning module (2) is used for focusing a laser and cleaning base materials; the temperature detection module (4) is used for detecting the temperature of cleaning points of the base materials and feeding same back to the control module (1); the base material melting-point data center (5) is used for recording the melting point value of each base material; the control module (1) is used for comparing a cleaning temperature, which is fed back, with the melting point value of the base material and sending a control signal; and the temperature regulation module (3) receives the control signal and is used for regulating the laser emission temperature of the laser cleaning module (2). In the system, a laser temperature can be adjusted according to the melting point value of a base material, so as to protect the base material from being burnt and melting during cleaning. The system has the advantage of improving the cleaning effect.

Description

一种防护基材被烧熔的激光清洗系统及方法Laser cleaning system and method for protecting base material from being sintered 技术领域Technical field
本发明涉及激光清洗技术领域,更具体地说,它涉及一种防护基材被烧熔的激光清洗系统及方法。The invention relates to the technical field of laser cleaning, and more specifically, it relates to a laser cleaning system and method for protecting a substrate from being sintered.
背景技术Background technique
金属板材表面经常会出现锈斑、腐蚀、油渍等污染物斑点,现有技术中对金属清洗的方式有多种,基本上是采用化学药剂和机械方法进行清洗,随着人们环保和安全意识的日益加强,我国对工业环境保护的要求也越来越高,在达到环保要求的情况下,工业生产清洗中可以使用的化学药品种类越来越少。Pollutant spots such as rust, corrosion, and oil stains often appear on the surface of metal plates. There are many ways to clean metals in the prior art. Basically, they use chemical agents and mechanical methods to clean. With people’s increasing awareness of environmental protection and safety Intensified, my country's requirements for industrial environmental protection are getting higher and higher. When the environmental protection requirements are met, the types of chemicals that can be used in industrial cleaning are becoming fewer and fewer.
因此,现有技术中设计了激光清洗的方式,激光清洗具有无研磨、非接触、无热效应和适用于各种材质的物体等清洗特点,被认为是最可靠、最有效的解决办法。同时,激光清洗可以解决采用传统清洗方式无法解决的问题。现有技术中激光清洗通常直接对着工件发射激光,以利用激光对工件上的污渍进行清洗。但是各个工件的基材都具有熔点值,若激光清洗温度过高,可能导致工件被烧熔,对工件造成损坏,影响清洗效果。Therefore, a laser cleaning method is designed in the prior art. Laser cleaning has the cleaning characteristics of non-grinding, non-contact, non-thermal effect and suitable for objects of various materials, and is considered to be the most reliable and effective solution. At the same time, laser cleaning can solve problems that cannot be solved by traditional cleaning methods. In the prior art, laser cleaning usually emits a laser directly at the workpiece, so as to use the laser to clean the stains on the workpiece. However, the base material of each workpiece has a melting point value. If the laser cleaning temperature is too high, it may cause the workpiece to be melted, causing damage to the workpiece, and affecting the cleaning effect.
发明内容Summary of the invention
针对现有技术存在的不足,本发明的目的在于提供一种防护基材被烧熔的激光清洗系统,能够根据基材熔点值调整激光温度,保护基材在清洗时不被烧熔,具有提高清洗效果的优点。In view of the shortcomings of the prior art, the purpose of the present invention is to provide a laser cleaning system that protects the substrate from being fused, which can adjust the laser temperature according to the melting point of the substrate, protect the substrate from being fused during cleaning, and improve Advantages of cleaning effect.
为实现上述目的,本发明提供了如下技术方案:In order to achieve the above objective, the present invention provides the following technical solutions:
一种防护基材被烧熔的激光清洗系统,包括控制模块以及均与控制模块连接的激光清洗模块、温度调节模块、温度探测模块与基材熔点数据中心,所述激光清洗模块用于聚焦激光并清洗基材,所述温度探测模块用于探测基材清洗点的温度并反馈至控制模块上,所述基材熔点数据中心用于记录各个 基材的熔点值,所述控制模块用于根据反馈的清洗温度与基材熔点值对比并发出控制信号,所述温度调节模块接受控制信号并用于调节激光清洗模块的激光发射温度。A laser cleaning system for protecting a substrate from being fused, comprising a control module, a laser cleaning module, a temperature adjustment module, a temperature detection module, and a base material melting point data center all connected to the control module, the laser cleaning module is used to focus the laser And clean the substrate, the temperature detection module is used to detect the temperature of the substrate cleaning point and feed it back to the control module, the substrate melting point data center is used to record the melting point value of each substrate, and the control module is used to The feedback cleaning temperature is compared with the melting point value of the substrate and a control signal is sent. The temperature adjustment module receives the control signal and is used to adjust the laser emission temperature of the laser cleaning module.
进一步设置:所述激光清洗模块包括安装架、设置于安装架上的激光头以及用于带动激光头向靠近基材或远离基材方向移动的移动机构,所述激光头用于向清洗点发射激光,所述移动机构与控制模块连接,所述控制模块根据温度探测模块反馈温度控制移动机构带动激光头的移动行程值。Further arrangement: the laser cleaning module includes a mounting frame, a laser head arranged on the mounting frame, and a moving mechanism for driving the laser head to move closer to or away from the substrate, and the laser head is used to emit toward the cleaning point For the laser, the moving mechanism is connected to a control module, and the control module controls the moving mechanism to drive the moving stroke value of the laser head according to the temperature feedback from the temperature detection module.
进一步设置:所述移动机构包括滑动于安装架上的滑动座以及用于推动滑动座移动的推动气缸,所述激光头安装于滑动座上,所述滑动座上设置有位移传感器,所述位移传感器与控制模块连接,所述控制模块根据基材熔点数据中心确定的基材熔点值设置行程值范围,所述位移传感器反馈滑动座滑动行程并反馈至控制模块上,由所述控制模块控制推动气缸的推动行程值,且推动行程值位于行程值范围内。It is further provided that the moving mechanism includes a sliding seat slid on the mounting frame and a pushing cylinder for pushing the sliding seat to move, the laser head is mounted on the sliding seat, and a displacement sensor is provided on the sliding seat. The sensor is connected to the control module, the control module sets the stroke value range according to the substrate melting point value determined by the substrate melting point data center, the displacement sensor feeds back the sliding stroke of the sliding seat and feeds it back to the control module, and the control module controls and pushes The pushing stroke value of the cylinder, and the pushing stroke value is within the range of the stroke value.
进一步设置:所述推动气缸的进气端上设置有用于精准控制进气量的比例阀。Further arrangement: a proportional valve used to precisely control the amount of intake air is provided on the intake end of the pushing cylinder.
进一步设置:所述温度调节模块包括用于调节激光发射功率的调节器以及用于降低激光清洗模块的温度的冷却模块,所述调节器以及冷却模块均与激光清洗模块连接,并均受控于控制模块上。Further setting: the temperature adjustment module includes a regulator for adjusting the laser emission power and a cooling module for reducing the temperature of the laser cleaning module, the regulator and the cooling module are both connected to the laser cleaning module, and are controlled by On the control module.
进一步设置:所述冷却模块包括设置于激光清洗模块内的水冷管、与水冷管进水端连接的冷水机以及与水冷管出水端连接的回水管。Further arrangement: the cooling module includes a water cooling pipe arranged in the laser cleaning module, a water chiller connected to the water inlet end of the water cooling pipe, and a water return pipe connected to the water outlet end of the water cooling pipe.
进一步设置:所述温度探测模块包括红外热成像仪、与红外热成像仪连接的数据传输器以及设置于控制模块上的数据接收器,所述数据接收器与数据传输器连接并用于接收数据传输器反馈的数据。Further configuration: the temperature detection module includes an infrared thermal imager, a data transmitter connected to the infrared thermal imager, and a data receiver set on the control module, the data receiver is connected to the data transmitter and used to receive data transmission Data from the device.
进一步设置:还包括一用于给基材冷却的冷却保护装置,所述冷却保护装置位于激光清洗装置的一侧,且所述冷却保护装置与控制模块连接。Further arrangement: it also includes a cooling protection device for cooling the substrate, the cooling protection device is located at one side of the laser cleaning device, and the cooling protection device is connected to the control module.
进一步设置:所述冷却保护装置包括冷却箱、填充于冷却箱内的冷却气体以及用于将冷却气体喷至基材表面上的气体喷头,所述气体喷头通过气管与冷却箱连接。It is further provided that the cooling protection device includes a cooling box, a cooling gas filled in the cooling box, and a gas spray head for spraying the cooling gas onto the surface of the substrate, and the gas spray head is connected to the cooling box through a gas pipe.
通过采用上述技术方案,本发明相对现有技术相比,具有以下优点:Compared with the prior art, the present invention has the following advantages by adopting the above technical solutions:
1、通过基材熔点数据中心确定基材的熔点值,由控制模块输出对应的激光功率对工件进行清洗,防止激光清洗温度超过熔点值,以对基材的清洗提供保护,具有提高清洗效果的优点;1. Determine the melting point value of the substrate through the substrate melting point data center, and the control module outputs the corresponding laser power to clean the workpiece to prevent the laser cleaning temperature from exceeding the melting point value to provide protection for the cleaning of the substrate and improve the cleaning effect advantage;
2、通过温度探测模块实时探测基材清洗时的温度值,并将该温度值反馈至控制模块内,若探测的温度超过基材熔点值,则由温度调节模块调整激光发射温度,实现调整激光清洗温度的效果,避免基材被烧熔,具有提高清洗效果的优点;2. The temperature detection module detects the temperature value of the substrate during cleaning in real time, and feeds the temperature value back to the control module. If the detected temperature exceeds the melting point of the substrate, the temperature adjustment module adjusts the laser emission temperature to realize the adjustment of the laser The effect of cleaning temperature prevents the substrate from being sintered and has the advantage of improving the cleaning effect;
3、通过移动机构带动激光头移动,能够调整激光头与基材之间的间距,从而调整基材清洗点的清洗温度,避免基材被烧熔;3. The moving mechanism drives the laser head to move, which can adjust the distance between the laser head and the substrate, thereby adjusting the cleaning temperature of the substrate cleaning point, and avoiding the substrate from being smelted;
4、通过设置的冷却保护装置,能够给清洗完的基材进行冷却并提供冷却保护气体,防止氧化,以对基材提供保护,便于彻底清洗基材,具有提高清洗效果的优点。4. The cooling protection device provided can cool the cleaned substrate and provide cooling protective gas to prevent oxidation, so as to protect the substrate, facilitate thorough cleaning of the substrate, and have the advantage of improving the cleaning effect.
本发明的第二目的在于提供一种防护基材被烧熔的激光清洗方法,根据基材熔点值调整激光温度,保护基材在清洗时不被烧熔,具有提高清洗效果的优点。The second object of the present invention is to provide a laser cleaning method for protecting the substrate from being sintered, adjusting the laser temperature according to the melting point of the substrate, protecting the substrate from sintering during cleaning, and having the advantage of improving the cleaning effect.
为实现上述目的,本发明提供了如下技术方案:In order to achieve the above objective, the present invention provides the following technical solutions:
一种防护基材被烧熔的激光清洗方法,利用前述所述的激光清洗系统,包括如下步骤:A laser cleaning method for protecting a substrate from sintering, using the aforementioned laser cleaning system, includes the following steps:
S1、将基材对位于激光清洗模块上,并将基材信息录入控制模块内,由控制模块比对基材熔点数据中心确定基材熔点值;S1. Position the substrate pair on the laser cleaning module, and enter the substrate information into the control module, and the control module compares the substrate melting point data center to determine the substrate melting point value;
S2、启动激光清洗模块对基材进行清洗,通过温度探测模块检测基材清 洗点处的温度值,并将其实时反馈至控制模块上;S2. Start the laser cleaning module to clean the substrate, detect the temperature value at the cleaning point of the substrate through the temperature detection module, and feed it back to the control module in real time;
S3、控制模块根据反馈的清洗点温度值与确定的基材熔点值比较,并发出控制信号控制温度调节模块调整激光清洗模块的温度,以防止清洗点温度值超过基材熔点值。S3. The control module compares the feedback cleaning point temperature value with the determined substrate melting point value, and sends a control signal to control the temperature adjustment module to adjust the temperature of the laser cleaning module to prevent the cleaning point temperature value from exceeding the substrate melting point value.
通过采用上述技术方案,本发明相对现有技术相比,具有以下优点:Compared with the prior art, the present invention has the following advantages by adopting the above technical solutions:
通过确定基材的熔点值,使得熔点值与基材清洗过程中清洗点的温度值进行比较,从而便于利用温度调节模块调整激光发射温度,防止基材清洗点的温度超过基材熔点,保护基材不被烧熔,具有提高清洗效果的优点。By determining the melting point value of the substrate, the melting point value is compared with the temperature value of the cleaning point during the cleaning process of the substrate, so as to facilitate the use of the temperature adjustment module to adjust the laser emission temperature and prevent the temperature of the substrate cleaning point from exceeding the melting point of the substrate. The material is not melted and has the advantage of improving the cleaning effect.
附图说明Description of the drawings
图1为防护基材被烧熔的激光清洗系统的原理示意图;Figure 1 is a schematic diagram of a laser cleaning system for protecting a substrate from being sintered;
图2为激光清洗模块的结构示意图;Figure 2 is a schematic diagram of the structure of the laser cleaning module;
图3为温度探测模块与温度调节模块连接于激光清洗模块上的连接关系示意图。FIG. 3 is a schematic diagram of the connection relationship between the temperature detection module and the temperature adjustment module connected to the laser cleaning module.
图中:1、控制模块;2、激光清洗模块;21、安装架;22、激光头;23、移动机构;231、滑动座;232、推动气缸;233、位移传感器;234、比例阀;3、温度调节模块;31、调节器;32、冷却模块;321、水冷管;322、冷水机;323、回水管;324、换热器;4、温度探测模块;41、红外热成像仪;42、数据传输器;43、数据接收器;5、基材熔点数据中心;6、冷却保护装置;61、冷却箱;62、冷却气体;63、气体喷头。In the figure: 1. Control module; 2. Laser cleaning module; 21. Mounting frame; 22. Laser head; 23. Moving mechanism; 231. Sliding seat; 232. Push cylinder; 233. Displacement sensor; 234. Proportional valve; 3. 31. Regulator; 32. Cooling module; 321. Water cooling pipe; 322. Chiller; 323. Return pipe; 324. Heat exchanger; 4. Temperature detection module; 41. Infrared thermal imager; 42 4. Data transmitter; 43. Data receiver; 5. Base material melting point data center; 6. Cooling protection device; 61. Cooling box; 62. Cooling gas; 63. Gas nozzle.
具体实施方式Detailed ways
参照图1至图3对防护基材被烧熔的激光清洗系统做进一步说明。The laser cleaning system that protects the substrate from being sintered will be further described with reference to FIGS. 1 to 3.
一种防护基材被烧熔的激光清洗系统,如图1所示,包括控制模块1以及与控制模块1连接的激光清洗模块2、温度调节模块3、温度探测模块4、冷却保护装置6以及基材熔点数据中心5,利用温度探测模块4探测激光清洗点的温度,反馈至控制模块1中,由控制模块1将温度探测模块4探测到的 温度与清洗基材的熔点值进行比较,并根据比较结果发出控制信号给温度调节模块3,由温度调节模块3调整激光清洗模块2的激光发射温度,确保其温度低于基材熔点值,且冷却保护装置6给基材进一步提供保护降温,从而在保证清洗效果的同时,避免基材被烧熔。A laser cleaning system for protecting substrates from melting, as shown in FIG. 1, includes a control module 1 and a laser cleaning module 2, a temperature adjustment module 3, a temperature detection module 4, a cooling protection device 6 connected to the control module 1, and The base material melting point data center 5 uses the temperature detection module 4 to detect the temperature of the laser cleaning point, and feeds it back to the control module 1. The control module 1 compares the temperature detected by the temperature detection module 4 with the melting point of the cleaning substrate, and According to the comparison result, a control signal is sent to the temperature adjustment module 3. The temperature adjustment module 3 adjusts the laser emission temperature of the laser cleaning module 2 to ensure that the temperature is lower than the melting point of the substrate, and the cooling protection device 6 provides further protection and cooling for the substrate. In this way, while ensuring the cleaning effect, the substrate is prevented from being sintered.
如图1所示,基材熔点数据中心5设置为记录有各种基材熔点数据的计算机,且计算机中具有存储硬盘,如若有新增基材,能够通过操作并根据网络检索得知新增基材的熔点值,从而记录在存储硬盘中,确保之后能够直接查询。控制模块1设置为PLC控制器,使用时,先操作基材熔点数据中心5查询待清洗的基材的熔点数值,并将数值发送至控制模块1内,便于控制模块1发出对应的控制信号,从而提高清洗效果,防止基材被烧熔。As shown in Figure 1, the base material melting point data center 5 is set up as a computer that records the melting point data of various base materials, and the computer has a storage hard disk. The melting point value of the substrate is recorded in the storage hard disk to ensure that it can be directly queried later. The control module 1 is set as a PLC controller. When in use, first operate the substrate melting point data center 5 to query the melting point value of the substrate to be cleaned, and send the value to the control module 1, so that the control module 1 can send out corresponding control signals. Thereby improving the cleaning effect and preventing the substrate from being sintered.
如图1和图3所示,温度探测模块4包括红外热成像仪41、与红外热成像仪41连接的数据传输器42以及设置于控制模块1上的数据接收器43,其中,红外热成像仪41设置于激光清洗模块2上,并能跟随激光清洗模块2的激光清洗发射点的带动而移动,从而准确的实时对位于激光清洗点处,以便于对激光清洗点的温度进行探测成像。数据传输器42用于将红外热成像仪41测试的数据信号发出,数据接收器43与数据传输器42连接并用于接收数据传输器42反馈的数据,具体的,数据接收器43与数据传输器42通过无线网络信号传输,以方便控制模块1实时接收激光清洗点清洗时的温度值,从而便于根据基材熔点值进行及时调整。As shown in Figures 1 and 3, the temperature detection module 4 includes an infrared thermal imager 41, a data transmitter 42 connected to the infrared thermal imager 41, and a data receiver 43 arranged on the control module 1, wherein the infrared thermal imager The meter 41 is arranged on the laser cleaning module 2 and can move along with the laser cleaning emission point of the laser cleaning module 2 to accurately and real-time locate the laser cleaning point, so as to detect and image the temperature of the laser cleaning point. The data transmitter 42 is used to send out the data signals tested by the infrared thermal imager 41, and the data receiver 43 is connected to the data transmitter 42 and used to receive the data fed back by the data transmitter 42, specifically, the data receiver 43 and the data transmitter 42 is transmitted through a wireless network signal to facilitate the control module 1 to receive the temperature value of the laser cleaning point during cleaning in real time, so as to facilitate timely adjustment according to the melting point value of the substrate.
如图1和图2所示,激光清洗模块2包括安装架21、设置于安装架21上的激光头22以及用于带动激光头22向靠近基材或远离基材方向移动的移动机构23,激光头22连接有激光发射器,激光发射器通过偏振镜将激光连接至激光头22处发出,且偏振镜折射至激光头22的激光的延伸方向与移动机构23的驱动方向一致,以保证激光头22在移动过程中能够接收激光并发出对基材进行清洗。其中移动机构23与控制模块1连接,由控制模块1根据温度探 测模块4反馈温度控制移动机构23带动激光头22的移动行程值,从而调整激光头22与基材之间的间距,使得激光发射点与基材的清洗点之间的距离根据温度变化而适当进行调整,进一步避免基材被熔断。As shown in Figures 1 and 2, the laser cleaning module 2 includes a mounting frame 21, a laser head 22 arranged on the mounting frame 21, and a moving mechanism 23 for driving the laser head 22 to move closer to or away from the substrate. The laser head 22 is connected with a laser transmitter. The laser transmitter connects the laser light to the laser head 22 through a polarizer, and the extension direction of the laser beam refracted by the polarizer to the laser head 22 is consistent with the driving direction of the moving mechanism 23 to ensure the laser During the movement, the head 22 can receive laser light and emit it to clean the substrate. The moving mechanism 23 is connected to the control module 1. The control module 1 controls the moving mechanism 23 to drive the movement stroke value of the laser head 22 according to the temperature detection module 4 feedback, thereby adjusting the distance between the laser head 22 and the substrate, so that the laser is emitted The distance between the dot and the cleaning point of the substrate is appropriately adjusted according to temperature changes to further prevent the substrate from being fused.
如图1和图3所示,温度调节模块3包括用于调节激光发射功率的调节器31以及用于降低激光清洗模块2的温度的冷却模块32,其中,调节器31以及冷却模块32均与激光清洗模块2连接,冷却模块32设置于激光头22上,以便于给激光头22进行降温,调整激光发射温度,结合调节器31调整激光发射功率,降低整体激光发射温度,从而避免基材被熔断。调节器31以及冷却模块32均受控于控制模块1上,由控制模块1根据基材熔点值与温度探测模块4探测温度比较后发出的控制信号,来使得调节器31与冷却模块32配合,将激光发射温度调节至合理的温度范围内,以保证清洗效果的同时,避免基材被熔断。As shown in Figures 1 and 3, the temperature adjustment module 3 includes a regulator 31 for adjusting the laser emission power and a cooling module 32 for reducing the temperature of the laser cleaning module 2, wherein the regulator 31 and the cooling module 32 are both The laser cleaning module 2 is connected, and the cooling module 32 is arranged on the laser head 22 to cool down the laser head 22, adjust the laser emission temperature, and adjust the laser emission power in conjunction with the regulator 31 to reduce the overall laser emission temperature, so as to prevent the substrate from being damaged. Fuse. The regulator 31 and the cooling module 32 are both controlled by the control module 1. The control module 1 sends out a control signal after comparing the melting point value of the substrate with the temperature detected by the temperature detection module 4 to make the regulator 31 cooperate with the cooling module 32. Adjust the laser emission temperature to a reasonable temperature range to ensure the cleaning effect and avoid the substrate from being fused.
如图1和图3所示,冷却模块32包括设置于激光清洗模块2的激光头22内的水冷管321、与水冷管321进水端连接的冷水机322以及与水冷管321出水端连接的回水管323,由冷水机322将水冷却后输送至水冷管321内,从而利用水冷管321进行冷却,便于调节激光头22温度并给激光发射温度进行降温。其中,回水管323上设置有换热器324,且回水管323远离水冷管321的一端连接至冷水机322上,从而使得回水管323内的水经过换热器324换热冷却后,循环送回冷水机322内进行冷却,形成循环回路,方便冷却水的持续使用。As shown in Figures 1 and 3, the cooling module 32 includes a water cooling tube 321 arranged in the laser head 22 of the laser cleaning module 2, a chiller 322 connected to the water inlet end of the water cooling tube 321, and a water cooling tube 321 connected to the water outlet end of the water cooling tube 321. The water return pipe 323 is cooled by the water chiller 322 and transported to the water cooling pipe 321, so that the water cooling pipe 321 is used for cooling, which is convenient for adjusting the temperature of the laser head 22 and cooling the laser emission temperature. Wherein, the return pipe 323 is provided with a heat exchanger 324, and the end of the return pipe 323 away from the water-cooled pipe 321 is connected to the chiller 322, so that the water in the return pipe 323 passes through the heat exchanger 324 and then circulates it. Cooling is performed in the chiller 322 to form a circulation loop, which facilitates the continuous use of the cooling water.
如图1和图2所示,冷却保护装置6包括冷却箱61、填充于冷却箱61内的冷却气体62以及用于将冷却气体62喷至基材表面上的气体喷头63,其中,气体喷头63通过气管与冷却箱61连接,冷却箱61通过制冷系统给冷却箱61内的气体进行冷却,以便于通过气体喷头63将冷却气体62喷至基材上进行降温冷却,保护基材。具体的,气体采用氩气或者氮气,冷却气体62的气压 为0.3-0.6MPa,使得冷却气体62可以对基材已清洗区域进行气体保护,防止基材已清洗区域与氧气发生反应生成新的氧化物,同时可以加快已清洗区域冷却,保护基材不被二次经过的激光烧熔。As shown in Figures 1 and 2, the cooling protection device 6 includes a cooling box 61, a cooling gas 62 filled in the cooling box 61, and a gas spray head 63 for spraying the cooling gas 62 onto the surface of the substrate, wherein the gas spray head 63 is connected to the cooling box 61 through a gas pipe, and the cooling box 61 cools the gas in the cooling box 61 through a refrigeration system, so that the cooling gas 62 is sprayed onto the substrate through the gas nozzle 63 for cooling and cooling to protect the substrate. Specifically, the gas is argon or nitrogen, and the pressure of the cooling gas 62 is 0.3-0.6 MPa, so that the cooling gas 62 can protect the cleaned area of the substrate and prevent the cleaned area of the substrate from reacting with oxygen to generate new oxidation. At the same time, it can speed up the cooling of the cleaned area and protect the substrate from being melted by the second laser.
如图1和图2所示,激光头22的移动过程中,由移动机构23驱动,具体的,移动机构23包括滑动于安装架21上的滑动座231以及用于推动滑动座231移动的推动气缸232,其中,激光头22安装于滑动座231上,在滑动座231上设置有位移传感器233,位移传感器233与控制模块1连接,控制模块1根据基材熔点数据中心5确定的基材熔点值设置行程值范围,位移传感器233反馈滑动座231滑动行程并反馈至控制模块1上,由控制模块1控制推动气缸232的推动行程值,且推动行程值位于行程值范围内,以便于调整激光清洗点清洗时的温度,防止基材被烧熔。进一步的,推动气缸232的进气端上设置有用于精准控制进气量的比例阀234,以提高控制激光头22行程推动的精准性。As shown in Figures 1 and 2, during the movement of the laser head 22, it is driven by the moving mechanism 23. Specifically, the moving mechanism 23 includes a sliding seat 231 slid on the mounting frame 21 and a push for pushing the sliding seat 231 to move. Air cylinder 232, in which the laser head 22 is mounted on the sliding seat 231, and a displacement sensor 233 is arranged on the sliding seat 231. The displacement sensor 233 is connected to the control module 1. The control module 1 determines the melting point of the substrate according to the melting point of the substrate 5 in the data center 5. Set the stroke value range, the displacement sensor 233 feeds back the sliding stroke of the sliding seat 231 and feeds it back to the control module 1. The control module 1 controls the pushing stroke value of the pushing cylinder 232, and the pushing stroke value is within the range of the stroke value to facilitate the adjustment of the laser The temperature of the cleaning point during cleaning to prevent the substrate from being melted. Further, a proportional valve 234 for accurately controlling the intake air volume is provided on the intake end of the pushing cylinder 232 to improve the accuracy of controlling the stroke of the laser head 22.
工作原理:使用时,将激光头22对位于基材处,并将基材的具体熔点值在基材熔点数据中心5中搜索确定,从而将基材的熔点值反馈至控制模块1中记录。控制模块1根据基材熔点值初步确定激光发射功率,从而启动激光清洗模块2对基材进行激光清洗,清洗过程中,由温度探测模块4实时探测基材激光清洗点的温度,并将温度反馈至控制模块1上。控制模块1根据接收的探测温度与基材熔点值进行比较,若低于基材熔点值,则保持当前清洗参数;若高于基材熔点值,则发出控制信号给温度调节模块3以及移动机构23,通过调整激光发射功率、激光头22与基材之间的间距以及对激光头22进行降温冷却,使得基材上的激光清洗点的温度得以调整,且调整后的温度符合基材不被熔点的情况,能够全面调节激光清洗温度,确保调节精度,提高清洗效果的同时,避免基材被烧熔。且清洗过程中,冷却保护装置6给基材已清洗的部分喷射冷却气体62,保护基材不被二次氧化,同时冷却基材已 清洗的部分,保护基材不被烧熔。通过上述方案,本发明能够根据基材熔点值调整激光温度,保护基材在清洗时不被烧熔,具有提高清洗效果的优点。Working principle: When in use, the laser head 22 is positioned at the substrate, and the specific melting point value of the substrate is searched and determined in the substrate melting point data center 5, so that the melting point value of the substrate is fed back to the control module 1 for recording. The control module 1 preliminarily determines the laser emission power according to the melting point of the substrate, and then starts the laser cleaning module 2 to perform laser cleaning on the substrate. During the cleaning process, the temperature detection module 4 detects the temperature of the laser cleaning point of the substrate in real time and feeds back the temperature. To control module 1. The control module 1 compares the detected temperature with the melting point value of the substrate according to the received detection temperature. If it is lower than the melting point of the substrate, the current cleaning parameters are maintained; if it is higher than the melting point of the substrate, it sends a control signal to the temperature adjustment module 3 and the moving mechanism 23. By adjusting the laser emission power, the distance between the laser head 22 and the substrate, and cooling the laser head 22, the temperature of the laser cleaning point on the substrate can be adjusted, and the adjusted temperature is consistent with that the substrate is not In the case of the melting point, the laser cleaning temperature can be fully adjusted to ensure the accuracy of the adjustment and improve the cleaning effect while avoiding the substrate from being smelted. And during the cleaning process, the cooling protection device 6 sprays cooling gas 62 to the cleaned part of the substrate to protect the substrate from secondary oxidation, and at the same time cools the cleaned part of the substrate to protect the substrate from sintering. Through the above solution, the present invention can adjust the laser temperature according to the melting point of the substrate, protect the substrate from being melted during cleaning, and has the advantage of improving the cleaning effect.
实施例二,本实施例与实施例一的区别在于提供一种防护基材被烧熔的激光清洗方法,利用实施例一中提到的激光清洗系统,包括如下步骤:The second embodiment, the difference between this embodiment and the first embodiment is to provide a laser cleaning method for protecting the substrate from being sintered, using the laser cleaning system mentioned in the first embodiment, including the following steps:
S1、将基材对位于激光清洗模块2上,并将基材信息录入控制模块1内,由控制模块1比对基材熔点数据中心5确定基材熔点值;S1. Position the substrate pair on the laser cleaning module 2, and record the substrate information into the control module 1, and the control module 1 compares the substrate melting point data center 5 to determine the substrate melting point value;
S2、启动激光清洗模块2对基材进行清洗,通过温度探测模块4检测基材清洗点处的温度值,并将其实时反馈至控制模块1上;S2. Start the laser cleaning module 2 to clean the substrate, detect the temperature value at the cleaning point of the substrate through the temperature detection module 4, and feed it back to the control module 1 in real time;
S3、控制模块1根据反馈的清洗点温度值与确定的基材熔点值比较,并发出控制信号控制温度调节模块3调整激光清洗模块2的温度,以防止清洗点温度值超过基材熔点值。S3. The control module 1 compares the feedback cleaning point temperature value with the determined substrate melting point value, and sends a control signal to control the temperature adjustment module 3 to adjust the temperature of the laser cleaning module 2 to prevent the cleaning point temperature value from exceeding the substrate melting point value.
以上所述仅是本发明的优选实施方式,本发明的保护范围并不仅局限于上述实施例,凡属于本发明思路下的技术方案均属于本发明的保护范围。应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理前提下的若干改进和润饰,这些改进和润饰也应视为本发明的保护范围。The above are only the preferred embodiments of the present invention, and the protection scope of the present invention is not limited to the above-mentioned embodiments. All technical solutions under the idea of the present invention belong to the protection scope of the present invention. It should be pointed out that for those of ordinary skill in the art, several improvements and modifications made without departing from the principle of the present invention, these improvements and modifications should also be regarded as the protection scope of the present invention.

Claims (10)

  1. 一种防护基材被烧熔的激光清洗系统,其特征在于,包括控制模块(1)以及均与控制模块(1)连接的激光清洗模块(2)、温度调节模块(3)、温度探测模块(4)与基材熔点数据中心(5),所述激光清洗模块(2)用于聚焦激光并清洗基材,所述温度探测模块(4)用于探测基材清洗点的温度并反馈至控制模块(1)上,所述基材熔点数据中心(5)用于记录各个基材的熔点值,所述控制模块(1)用于根据反馈的清洗温度与基材熔点值对比并发出控制信号,所述温度调节模块(3)接受控制信号并用于调节激光清洗模块(2)的激光发射温度。A laser cleaning system for protecting a substrate from being fused, which is characterized by comprising a control module (1), a laser cleaning module (2), a temperature adjustment module (3), and a temperature detection module all connected to the control module (1) (4) With the substrate melting point data center (5), the laser cleaning module (2) is used to focus the laser and clean the substrate, and the temperature detection module (4) is used to detect the temperature of the substrate cleaning point and feed it back to On the control module (1), the base material melting point data center (5) is used to record the melting point value of each base material, and the control module (1) is used to compare the feedback cleaning temperature with the base material melting point value and issue a control Signal, the temperature adjustment module (3) receives the control signal and is used to adjust the laser emission temperature of the laser cleaning module (2).
  2. 根据权利要求1所述的一种防护基材被烧熔的激光清洗系统,其特征在于,所述激光清洗模块(2)包括安装架(21)、设置于安装架(21)上的激光头(22)以及用于带动激光头(22)向靠近基材或远离基材方向移动的移动机构(23),所述激光头(22)用于向清洗点发射激光,所述移动机构(23)与控制模块(1)连接,所述控制模块(1)根据温度探测模块(4)反馈温度控制移动机构(23)带动激光头(22)的移动行程值。The laser cleaning system for protecting substrates from melting according to claim 1, wherein the laser cleaning module (2) comprises a mounting frame (21), and a laser head arranged on the mounting frame (21) (22) and a moving mechanism (23) for driving the laser head (22) to move closer to or away from the substrate, the laser head (22) is used to emit laser light to the cleaning point, and the moving mechanism (23) ) Is connected to the control module (1), and the control module (1) controls the movement mechanism (23) to drive the movement stroke value of the laser head (22) according to the feedback temperature of the temperature detection module (4).
  3. 根据权利要求2所述的一种防护基材被烧熔的激光清洗系统,其特征在于,所述移动机构(23)包括滑动于安装架(21)上的滑动座(231)以及用于推动滑动座(231)移动的推动气缸(232),所述激光头(22)安装于滑动座(231)上,所述滑动座(231)上设置有位移传感器(233),所述位移传感器(233)与控制模块(1)连接,所述控制模块(1)根据基材熔点数据中心(5)确定的基材熔点值设置行程值范围,所述位移传感器(233)反馈滑动座(231)滑动行程并反馈至控制模块(1)上,由所述控制模块(1)控制推动气缸(232)的推动行程值,且推动行程值位于行程值范围内。The laser cleaning system for protecting substrates from being melted according to claim 2, wherein the moving mechanism (23) comprises a sliding seat (231) slid on the mounting frame (21) and a sliding seat (231) for pushing The sliding seat (231) is moved to push the cylinder (232), the laser head (22) is mounted on the sliding seat (231), and the sliding seat (231) is provided with a displacement sensor (233), and the displacement sensor ( 233) Connected to the control module (1), the control module (1) sets the stroke value range according to the base material melting point value determined by the base material melting point data center (5), and the displacement sensor (233) feeds back the sliding seat (231) The sliding stroke is fed back to the control module (1), and the control module (1) controls the pushing stroke value of the pushing cylinder (232), and the pushing stroke value is within the range of the stroke value.
  4. 根据权利要求3所述的一种防护基材被烧熔的激光清洗系统,其特征在于,所述推动气缸(232)的进气端上设置有用于精准控制进气量的比例阀(234)。The laser cleaning system for protecting substrates from smelting according to claim 3, characterized in that, a proportional valve (234) for precisely controlling the amount of intake air is provided on the intake end of the pushing cylinder (232) .
  5. 根据权利要求1所述的一种防护基材被烧熔的激光清洗系统,其特征在于,所述温度调节模块(3)包括用于调节激光发射功率的调节器(31)以及用于降低激光清洗模块(2)的温度的冷却模块(32),所述调节器(31)以及冷却模块(32)均与激光清洗模块(2)连接,并均受控于控制模块(1)上。The laser cleaning system for protecting substrates from being melted according to claim 1, wherein the temperature adjustment module (3) includes a regulator (31) for adjusting the laser emission power and for reducing the laser emission power. The temperature cooling module (32) of the cleaning module (2), the regulator (31) and the cooling module (32) are all connected to the laser cleaning module (2), and are all controlled by the control module (1).
  6. 根据权利要求5所述的一种防护基材被烧熔的激光清洗系统,其特征在于,所述冷却模块(32)包括设置于激光清洗模块(2)内的水冷管(321)、与水冷管(321)进水端连接的冷水机(322)以及与水冷管(321)出水端连接的回水管(323)。The laser cleaning system for protecting substrates from melting according to claim 5, wherein the cooling module (32) comprises a water-cooled tube (321) arranged in the laser cleaning module (2), and a water-cooled The water chiller (322) connected to the water inlet end of the pipe (321) and the return pipe (323) connected to the water outlet end of the water cooling pipe (321).
  7. 根据权利要求1所述的一种防护基材被烧熔的激光清洗系统,其特征在于,所述温度探测模块(4)包括红外热成像仪(41)、与红外热成像仪(41)连接的数据传输器(42)以及设置于控制模块(1)上的数据接收器(43),所述数据接收器(43)与数据传输器(42)连接并用于接收数据传输器(42)反馈的数据。The laser cleaning system for protecting substrates from being melted according to claim 1, wherein the temperature detection module (4) comprises an infrared thermal imager (41) connected to the infrared thermal imager (41) The data transmitter (42) and the data receiver (43) set on the control module (1), the data receiver (43) is connected with the data transmitter (42) and is used to receive feedback from the data transmitter (42) The data.
  8. 根据权利要求1所述的一种防护基材被熔的激光清洗系统,其特征在于,还包括一用于给基材冷却的冷却保护装置(6),所述冷却保护装置(6)位于激光清洗装置的一侧,且所述冷却保护装置(6)与控制模块(1)连接。The laser cleaning system for protecting the substrate from melting according to claim 1, further comprising a cooling protection device (6) for cooling the substrate, and the cooling protection device (6) is located in the laser One side of the cleaning device, and the cooling protection device (6) is connected with the control module (1).
  9. 根据权利要求5所述的一种防护基材被熔的激光清洗系统,其特征在于,所述冷却保护装置(6)包括冷却箱(61)、填充于冷却箱(61)内的冷却气体(62)以及用于将冷却气体(62)喷至基材表面上的气体喷头(63),所述气体喷头(63)通过气管与冷却箱(61)连接。The laser cleaning system for protecting substrates from being melted according to claim 5, wherein the cooling protection device (6) comprises a cooling box (61), and a cooling gas (6) filled in the cooling box (61). 62) and a gas spray head (63) for spraying cooling gas (62) onto the surface of the substrate, and the gas spray head (63) is connected to the cooling box (61) through a gas pipe.
  10. 一种防护基材被烧熔的激光清洗方法,利用权利要求1-9任意一项所述的激光清洗系统,其特征在于,包括如下步骤:A laser cleaning method for protecting a substrate from melting, using the laser cleaning system according to any one of claims 1-9, characterized in that it comprises the following steps:
    S1、将基材对位于激光清洗模块(2)上,并将基材信息录入控制模块(1)内,由控制模块(1)比对基材熔点数据中心(5)确定基材熔点值;S1. Position the substrate pair on the laser cleaning module (2), and enter the substrate information into the control module (1), and the control module (1) compares the substrate melting point data center (5) to determine the substrate melting point value;
    S2、启动激光清洗模块(2)对基材进行清洗,通过温度探测模块(4)检测基材清洗点处的温度值,并将其实时反馈至控制模块(1)上;S2. Start the laser cleaning module (2) to clean the substrate, detect the temperature value at the cleaning point of the substrate through the temperature detection module (4), and feed it back to the control module (1) in real time;
    S3、控制模块(1)根据反馈的清洗点温度值与确定的基材熔点值比较,并发出控制信号控制温度调节模块(3)调整激光清洗模块(2)的温度,以防止清洗点温度值超过基材熔点值。S3. The control module (1) compares the feedback temperature value of the cleaning point with the determined melting point value of the substrate, and sends a control signal to control the temperature adjustment module (3) to adjust the temperature of the laser cleaning module (2) to prevent the temperature value of the cleaning point Exceeds the melting point of the base material.
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CN115055447A (en) * 2022-07-14 2022-09-16 中国航空制造技术研究院 Laser cleaning device and method for titanium alloy powder

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