WO2021189862A1 - Vad blowtorch cleaning apparatus and cleaning method thereof - Google Patents

Vad blowtorch cleaning apparatus and cleaning method thereof Download PDF

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Publication number
WO2021189862A1
WO2021189862A1 PCT/CN2020/126184 CN2020126184W WO2021189862A1 WO 2021189862 A1 WO2021189862 A1 WO 2021189862A1 CN 2020126184 W CN2020126184 W CN 2020126184W WO 2021189862 A1 WO2021189862 A1 WO 2021189862A1
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Prior art keywords
blowtorch
pipe
cleaning
layer
vad
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PCT/CN2020/126184
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French (fr)
Chinese (zh)
Inventor
沈小平
王兵钦
何炳
范忠阔
谢晓寒
戴杰
陈斌
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通鼎互联信息股份有限公司
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Publication of WO2021189862A1 publication Critical patent/WO2021189862A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02Cleaning by the force of jets, e.g. blowing-out cavities
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00Accessories or details of general applicability for machines or apparatus for cleaning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04Cleaning by suction, with or without auxiliary action
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413Reactant delivery systems
    • C03B37/0142Reactant deposition burners
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/04Multi-nested ports
    • C03B2207/06Concentric circular ports
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/42Assembly details; Material or dimensions of burner; Manifolds or supports
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/50Multiple burner arrangements
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/70Control measures
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/80Feeding the burner or the burner-heated deposition site
    • C03B2207/81Constructional details of the feed line, e.g. heating, insulation, material, manifolds, filters
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

Definitions

  • the invention belongs to the field of optical fiber preform manufacturing, and specifically relates to a VAD blowtorch cleaning device and a cleaning method thereof.
  • the axial vapor deposition method (VAD) is often used to produce the core rod, and then the external vapor deposition method (OVD) is used to produce the two-step method for producing the optical fiber preform.
  • the equipment for mandrel production by the VAD method is mainly composed of six parts: reaction chamber, blowtorch, raw gas supply part, loose body (SOOT body) lifting and rotating part, control computer and waste gas recovery part.
  • the blowtorch group is one of the most critical components.
  • the blowtorch group is usually composed of a core lamp and one or more package lamps. Its function is to spray out mixed gases such as Sicl 4 , Gecl 4 , H 2 , O 2, etc.
  • a hydrolysis reaction occurs after high-temperature combustion to produce SiO 2 , GeO 2 and other powders (1), (2).
  • SiO 2 , GeO 2 and other powders are deposited and attached to the surface of the rotating quartz target rod under the action of the thermophoretic principle to produce a VAD SOOT body.
  • the VAD SOOT body is then vitrified at a high temperature of 1500°C to finally produce a transparent optical fiber preform core rod.
  • quartz blowtorch has been used in VAD process because of its good temperature resistance and no metal impurities.
  • the blowtorch is a place where the raw gas is mixed and reacted.
  • the change of its internal structure directly affects the production cost and quality of the preform.
  • part of the SiO 2 , GeO 2 powder (powder impurity) not recovered by the waste gas recovery unit is easy
  • the powder impurities fall into the torch after being adsorbed on the inner surface of the blowtorch or the SOOT body cracks.
  • the accumulated powder impurities will cause the diameter of the blowtorch to become smaller, and in severe cases, the pores will be blocked.
  • the smaller aperture of the blowtorch will directly affect the flow rate distribution of the raw material gas, resulting in a change in the optical refractive index profile of the preform, and deteriorating the quality of the preform.
  • the accumulated powder impurities will swim to the surface of the SOOT body. After the powder impurities of different densities are agglomerated, bubbles are prone to appear in the preform after high-temperature sintering, and air lines will appear when the bubbles are drawn into optical fibers. Phenomenon, it will also reduce the quality of the preform. Therefore, for the blowtorch, it is necessary to match efficient and regular cleaning operations.
  • the traditional blowtorch cleaning method has the following problems:
  • blowtorch cleaning is usually carried out when the equipment is on standby.
  • N2 high-pressure gas nitrogen
  • CDA compressed air
  • the cleaning of the complex structure of the blowtorch requires higher operation requirements for the on-site personnel, especially the fixed connection operation of the plastic adapter and the quartz blowtorch.
  • the force When manually twisting the internal thread of the plastic adapter, the force must be kept moderate , Excessive force is likely to cause damage to the torch interface, and too little force will easily cause poor airtightness of the raw material gas pipe and the torch connection, and gaseous raw materials may leak during the production process.
  • the VAD torch is composed of 4 to 10 layers of concentric tubes. For the lamp walls with different apertures in each layer of the torch, it is necessary to match the appropriate gas purge flow. In the traditional cleaning method of the torch, it is required Manually adjust the purge flow one by one several times, the overall workload is relatively large.
  • the traditional blowtorch cleaning method lacks timeliness: If the blowtorch cannot be cleaned in time in the early stage, after a long time of high temperature production, the powder impurities accumulated in the blowtorch will firmly adhere to the inner surface of the lamp wall. At this time, use high-pressure gas The effect of purging powder impurities is relatively poor, and it can only be cleaned with chemical reagents such as hydrofluoric acid after the blowtorch is disassembled. The entire process of disassembly, cleaning, installation and commissioning of the blowtorch is also relatively heavy, and the production efficiency is greatly reduced.
  • the technical problem to be solved by the present invention is: in order to solve the disadvantages of the prior art that the blowtorch cleaning method is low in automation and manual disassembly links are likely to cause damage to the blowtorch interface, and the blowtorch is not easy to clean in time, so as to provide a VAD blowtorch cleaning device And its cleaning method.
  • a VAD blowtorch cleaning device including:
  • Sweeping gas supply device used to generate and discharge the gas used for cleaning the blowtorch
  • the air inlet pipe switching mechanism has two air inlet ends and one air outlet, which is used to selectively switch to open one of the two air inlet ends and close the other pipe; one of the air inlet pipe switching mechanisms has an inlet The gas end is used to connect the raw material intake pipe;
  • blower group air inlet pipe One end of the blower group air inlet pipe is connected to the air outlet end of the air intake pipe switching mechanism, and the other end is connected to the blower group air inlet end;
  • the sweeping gas branch pipe has one end connected to the sweeping gas supply device, and the other end connected to the other intake end of the intake pipe switching mechanism;
  • the deposition chamber exhaust pipe is arranged at the exhaust end of the blowtorch group, and is used to suck powder impurities out of the blowtorch group.
  • the intake pipe switching mechanism includes:
  • a three-way pipe the three-way pipe has two inlet ends and one outlet end;
  • An automatic valve is arranged at the raw material intake pipe and the cleaning gas branch pipe, and the automatic valve can control the opening and closing of the pipeline.
  • the deposition chamber exhaust pipe is welded to the side of the deposition chamber and faces the exhaust end of the blowtorch group, and the deposition chamber exhaust pipe passes through a soft guide
  • the exhaust pipe is hermetically connected to the exhaust end of the burner group, and the soft exhaust pipe can be disassembled.
  • the blowtorch group is composed of a package lamp and a core lamp, and both the package lamp and the core lamp have a multi-layer structure, and each layer has an independent air inlet. End; the intake pipe switching mechanism, the blower group intake pipe, the cleaning gas branch pipe are corresponding to each layer of the package lamp and the core lamp.
  • the cleaning gas supply device is provided with a pressure regulating valve, a flow meter, an automatic valve and a pressure gauge respectively; each cleaning gas branch pipe is provided with a separate flow meter and automatic valve.
  • the VAD torch cleaning device of the present invention further includes a programmable logic controller, and the cleaning gas supply device is connected to the programmable logic controller, and the programmable logic controller is used to control the opening and closing of all automatic valves. .
  • a cleaning method of a VAD blowtorch cleaning device includes the following steps:
  • the cleaning method of the VAD torch cleaning device of the present invention is characterized in that: in step S3, a programmable logic controller is used to control the opening and closing of all automatic valves.
  • the cleaning method of the VAD torch cleaning device of the present invention is characterized in that: in step S3, the programmable logic controller controls each automatic valve to open sequentially for a set period of time and then close.
  • the cleaning method of the VAD torch cleaning device of the present invention is characterized in that: before step S3, the purge flow rate of each layer of the torch is set to be proportional to the volume of each layer of space inside the torch, and the flow rate is adjusted in step S3 To adjust the actual flow rate of each layer inside the torch.
  • the beneficial effects of the present invention are: directly switch the raw gas or clean gas at the inlet end of the torch, without disassembling the raw gas pipeline to clean the torch, reduce the number of pipe disassembly and assembly of the inlet pipe of the torch, and reduce the damage of the inlet pipe. Possibility; high degree of automation, eliminating the need for manual disassembly and assembly of the air inlet pipeline, cleaning can be carried out in time, greatly slowing down the fouling rate of the inner layer of the quartz blowtorch, and reducing the risk of bubbles in the optical fiber preform core rod and deterioration of optical parameters , Extend the service life of the torch and greatly improve the production efficiency.
  • the internal space of the VAD torch can be cleaned in time and efficiently, and the internal space of the torch can be accurately cleaned through the flow control.
  • Figure 1 is a schematic diagram of a VAD blowtorch cleaning device
  • FIG. 2 is a schematic diagram of a VAD blowtorch production device
  • FIG. 3 is a schematic diagram of the assembly of the VAD blowtorch production and cleaning device
  • Fig. 4 is a schematic diagram of a device for controlling the flow direction of cleaning gas in the device of Fig. 1;
  • FIG. 5 Schematic diagram of traditional VAD five-layer package lamp
  • Figure 6 Schematic diagram of a traditional VAD five-layer core lamp
  • Figure 7 A cross-sectional view of a traditional VAD five-layer lamp
  • Figure 8 is a cross-sectional view of a traditional VAD five-layer core lamp
  • Fig. 10 is a comparison diagram of the refractive index profile of the optical fiber preform core rod prepared by the cleaning method of the VAD torch and the conventional cleaning method of the present invention.
  • This embodiment provides a VAD blowtorch cleaning device, including:
  • the cleaning gas supply device (specifically, the cleaning gas supply cabinet 21) is used to generate and discharge the gas used for cleaning the blowtorch;
  • the intake pipe switching mechanism (specifically, the three-way pipe and the first to fourteen automatic valves), has two intake ends, one exhaust end, which is used to switch open and close one of the two intake ends.
  • Another pipeline; one of the inlet ends of the inlet pipeline switching mechanism is used to connect the raw material inlet pipe;
  • the air inlet pipe of the blowtorch group (specifically includes the first, second, third, fourth, and fifth-layer air inlet pipes of the package lamp and the first, second, third, fourth, and fifth-layer air inlet pipes of the core lamp), one end is connected with the air inlet pipe switching mechanism The other end is connected to the air inlet end of the blowtorch group;
  • Sweep gas branch pipes (specifically include sweep gas first, second, third, fourth, five, six, seven, eight, nine, ten branch pipes), one end is connected to the sweeping gas supply device, and the other end is connected to the inlet pipe switching mechanism The other intake end;
  • the deposition chamber exhaust pipe 4 is arranged at the exhaust end of the blowtorch group, and is used to suck powder impurities out of the blowtorch group.
  • the intake pipe switching mechanism includes:
  • a three-way pipe the three-way pipe has two inlet ends and one outlet end;
  • An automatic valve is arranged at the raw material intake pipe and the cleaning gas branch pipe, and the automatic valve can control the opening and closing of the pipeline.
  • the deposition chamber exhaust pipe is welded to the side of the deposition chamber and faces the exhaust end of the blowtorch group, and the deposition chamber exhaust pipe passes through a soft
  • the exhaust air duct is sealed to the exhaust end of the burner group, and the soft exhaust air duct can be disassembled.
  • the blowtorch group is composed of a package lamp and a core lamp, and both the package lamp and the core lamp have a multi-layer structure, and each layer has an independent inlet.
  • the gas end; the intake pipe switching mechanism, the blower group intake pipe, and the cleaning gas branch pipe are set corresponding to each layer of the package lamp and the core lamp.
  • the cleaning gas supply device is provided with a pressure regulating valve, a flow meter, an automatic valve and a pressure gauge respectively; each cleaning gas branch pipe is provided with a separate flow meter and automatic valve .
  • the VAD torch cleaning device of this embodiment further includes a programmable logic controller, and the cleaning gas supply device is connected to the programmable logic controller, and the programmable logic controller is used to control the opening of all automatic valves. close.
  • This embodiment provides a method for cleaning a VAD torch cleaning device. Using the above-mentioned VAD torch cleaning device includes the following steps:
  • the cleaning method of the VAD torch cleaning device of this embodiment is characterized in that: in step S3, a programmable logic controller is used to control the opening and closing of all automatic valves.
  • the cleaning method of the VAD torch cleaning device of this embodiment is characterized in that: in step S3, the programmable logic controller controls each automatic valve to open sequentially for a set period of time and then close.
  • the cleaning method of the VAD torch cleaning device of this embodiment is characterized in that: before step S3, the purge flow rate of each layer of space inside the torch is set to be proportional to the volume of each layer of space inside the torch, and in step S3, through adjustment Flow meter to adjust the actual flow rate of each layer inside the torch.
  • a VAD blowtorch cleaning device includes a cleaning gas supply cabinet 21, a cleaning gas supply cabinet main 22, a monitoring computer 15, a lamp 2, a core lamp 3, an air inlet pipe 40 on the first layer of the lamp, and a lamp
  • the third layer of core lamp intake pipe 60, the fourth layer of core lamp intake pipe 75, the fifth layer of core lamp intake pipe 55, the deposition chamber 1, the deposition chamber exhaust pipe 4, the soft guide exhaust pipe 77, And the first branch pipe 37, the second branch pipe 42, the third branch pipe 32, the fourth branch pipe 47, the fifth branch pipe 27 and the core lamp 3 are respectively passed into the cleaning gas supply cabinet main pipe 22 to the package lamp 2
  • the sixth branch pipe 62, the seventh branch pipe 67, the eighth branch pipe 57, the ninth branch pipe 72, and the tenth branch pipe 52 of the main pipe 22 of the gas supply cabinet are cleaned.
  • the main pipe 22 of the cleaning gas supply cabinet is provided with a pressure regulating valve 23, a first float flow meter 24, a first automatic valve 25, a second automatic valve 26 and a pressure gauge 81 respectively.
  • the first branch pipe 37 of the main pipe 22 of the cleaning gas supply cabinet is provided with a fifth automatic valve 38 and a fourth float flowmeter 39, respectively, and the second branch pipe 42 is provided with a sixth automatic valve 43, a fifth float flowmeter 44, and a third branch respectively.
  • the second float flowmeter 29 and the sixth branch pipe 62 are respectively provided with a tenth automatic valve 63 and a ninth float flowmeter 64, and the seventh branch pipe 67 is respectively provided with an eleventh automatic valve 68 and a tenth float flowmeter 69, eighth
  • the branch pipe 57 is provided with a nine automatic valve 58 and an eighth float flow meter 59 respectively, a ninth branch pipe 72 is provided with a twelfth automatic valve 73 and an eleventh float flow meter 74, and the tenth branch pipe 52 is provided with an eighth automatic valve respectively. 53 and the seventh float flow meter 54.
  • the VAD torch is composed of a package lamp 2 and a core lamp 3.
  • the package lamp 2 has a five-layer structure, marked from the inside to the outside as the first layer and the first
  • the second layer, third layer, fourth layer, and fifth layer as shown in Figure 6 and Figure 8
  • the core lamp 3 has a five-layer structure, marked from the inside to the outside as the first layer, the second layer, the third layer, and the first layer.
  • the fourth and fifth floors As shown in Figure 3, the two ends of the first layer of air inlet pipe 40 of the lamp are respectively connected with the first branch pipe 37 of cleaning gas and the first layer of air intake pipe port 5, and the two ends of the air inlet pipe of the second layer of lamp are respectively connected with the first cleaning gas.
  • Both ends of the two branch pipes 42 and the air intake pipe port 6 of the second layer of the lamp and the air intake pipe 35 of the third layer of the lamp are respectively connected with the third branch pipe 32 of the cleaning gas and the third layer of the lamp 7 and the fourth layer of the lamp.
  • Both ends of 50 are respectively connected with the fourth branch pipe 47 of sweeping gas and the inlet port 8 of the fourth layer of the lamp, and the fifth layer intake pipe 30 of the lamp is respectively connected with the fifth branch pipe 27 of the sweeping gas and the fifth layer inlet port 9 of the lamp.
  • the two ends of the first-layer intake pipe 65 of the core lamp are respectively connected with the sixth branch pipe 62 of the cleaning gas and the first layer intake pipe port 10 of the core lamp, and the two ends of the second-layer intake pipe 70 of the core lamp are respectively connected with the seventh branch pipe 67 of the cleaning gas and the core.
  • the two ends of the lamp second layer intake pipe port 11 and the core lamp third layer intake pipe 60 are respectively connected to the sweep gas eighth branch pipe 57, the core lamp third layer intake pipe port 12, and the core lamp fourth layer intake pipe 75 are respectively connected to both ends Both ends of the ninth branch pipe 72 for cleaning gas, the inlet pipe port 13 of the fourth layer of the core lamp, and the inlet pipe 55 of the fifth layer of the core lamp are respectively connected with the tenth branch pipe 52 of the cleaning gas and the fifth layer inlet pipe port 14 of the core lamp.
  • it also includes a PLC controller 16, a production raw gas supply cabinet 19, a production raw gas supply cabinet 20, and a purge gas supply cabinet 21 are connected to the PLC controller 16, and the PLC controller 16 is used to control all Automatic valve opening and closing.
  • the soft guide and exhaust pipe 77 is manually installed.
  • the soft guide and exhaust pipe is provided with opening 78, opening 79, and opening 89. Hole two 79 and opening three 89 are respectively seamlessly wrapped with the lamp socket of the lamp 2 lamp socket, the lamp socket of the core lamp 3, and the nozzle socket 4 of the deposition chamber exhaust pipe, and the air tightness is good.
  • the suction force of the suction pipe 4 of the combined deposition chamber with high pressure gas is used to form a large pressure difference between the inside and outside of the torch to suck the powder impurities out of the torch and enter the exhaust gas recovery part.
  • the PLC controller 16 is triggered by the monitoring computer 15, and the cleaning gas supply cabinet 21 starts to work.
  • the flow of the float flowmeter and the PLC controller 16 to control all automatic valves to open and close, the cleaning gas of different flows can be cleaned one by one. The function of each layer of space inside the lamp.
  • the exhaust pipe 4 of the deposition chamber is welded to the side of the deposition chamber 1 to face the package lamp 2 and the core lamp 3.
  • the exhaust in the exhaust duct 4 of the deposition chamber is kept normally open.
  • it also includes production material gas supply cabinet 1 19 and production material gas supply cabinet 2 20.
  • production material gas supply cabinet 1 19 and production material gas supply cabinet 2 20 work normally, and the production is working. After the end, the blowtorch enters the cleaning process.
  • the production raw gas supply cabinet 20 is provided with a first inlet pipe 41, a second inlet pipe 46, a third inlet pipe 36, a fourth inlet pipe 51, and a fifth inlet pipe 31 for production raw gas, and a first inlet pipe 41 for production raw gas ,
  • the second air inlet pipe 46, the third air inlet pipe 51, the fourth air inlet pipe 46, and the fifth air inlet pipe 31 respectively communicate with the first-layer air-intake pipe 40, the second-layer air-intake pipe 45, the third-layer air-intake pipe 35, and the second air-intake pipe.
  • the fourth-layer intake pipe 50, the fifth-layer intake pipe 30, the production raw gas supply cabinet two 20 are provided with the sixth intake pipe 66, the seventh intake pipe 71, the eighth intake pipe 61, the ninth intake pipe 76, and the second raw gas supply cabinet 20.
  • Ten air inlet pipe 56 which produces raw material gas.
  • the sixth air inlet pipe 66, the seventh air inlet pipe 71, the eighth air inlet pipe 61, the ninth air inlet pipe 76, and the tenth air inlet pipe 56 respectively communicate with the core lamp first layer air inlet pipe 65 and the second air inlet pipe.
  • the material of the VAD package lamp and the VAD core lamp is GE-214 quartz.
  • the soft guide and exhaust pipe 77 is made of PVC steel wire telescopic hose, which has good elasticity, is easy to install, and is detachable.
  • the main pipe 22 of the cleaning gas supply cabinet and all the cleaning gas branch pipes are made of 316 stainless steel, and all the blowtorch air inlet pipes and all the production raw gas inlet pipes are made of Teflon.
  • the main pipe of the cleaning gas supply cabinet has a diameter of 1/2 inch, the diameter of all cleaning gas branch pipes is 1/4 inch, and the diameter of all blowtorch air inlet pipes is 3/8 inch.
  • the invention also discloses a cleaning method of a VAD blowtorch cleaning device, the method includes the following steps:
  • (a) Blowtorch cleaning preparation 1 After the VAD deposition is completed, the thirteenth automatic valve 17 and the fourteenth automatic valve 20 are automatically closed, and the operator removes the SOOT body from the deposition chamber 1, and then installs a soft guide exhaust Tube 77, seamlessly wrap the elastic opening 78, opening 2 79, and opening 3 89 with the lamp socket of the lamp 2, the lamp socket of the core lamp 3, and the nozzle of the deposition chamber exhaust pipe 4 respectively;
  • Blowtorch cleaning preparation 2 Open the N2 supply tank main pressure regulator valve 23, adjust the pressure regulator, the N2 supply tank pressure 0.3Mpa, adjust the first float flowmeter 24, control the N2 supply tank main flow F1: 100 ⁇ 150SLM ,
  • the PLC controller 16 is triggered by the monitoring computer 15 to open the first automatic valve 25 and the second automatic valve 26 synchronously in sequence;
  • N2 flow adjustment As shown in Figure 7, Figure 8 and Table 1, the volume of each layer inside the torch is different. In theory, different layers need to match different purge flows.
  • the setting value of the purge flow of each layer of space inside the torch is proportional to the volume of each layer of space inside the torch
  • the PLC controller 16 works: the PLC controller 16 is triggered by the monitoring computer 15. As shown in Table 3, the PLC controller 16 responds at time T1:1 ⁇ 5s (seconds), T2:10 ⁇ 15s, T3 : 15 ⁇ 25s, T4: 20 ⁇ 35s, T5: 25 ⁇ 45s, T6: 30 ⁇ 55s, T7: 35 ⁇ 65s, T8: 40 ⁇ 75s, T9: 45 ⁇ 85s, T10: 60 ⁇ 100s, T11:100 After ⁇ 120s, the automatic valve is opened and closed synchronously. As shown in Figure 4, the flow direction of N2 from the supply cabinet into the blowtorch air pipe. The cleaning process of each layer inside the blowtorch is in accordance with step 1- Proceed in sequence
  • the automatic valve mark 0 refers to open, and the automatic valve mark 1 refers to closed.
  • the torch is normally used for the deposition of the SOOT body to prepare the core rod of the optical fiber preform
  • the invention also provides several specific implementation scenarios.
  • the thirteenth automatic valve and the fourteenth automatic valve are automatically closed.
  • the operator removes the SOOT body from the deposition chamber, and then installs a soft exhaust pipe to open the elastic opening. Hole two and opening three are seamlessly wrapped with the lamp socket of the lamp, the lamp socket of the core lamp, and the nozzle of the exhaust pipe of the deposition chamber respectively;
  • the torch is normally used for the deposition of the SOOT body to prepare the core rod of the optical fiber preform.
  • the core lamp starts to show a slight scaling phenomenon after 2 months of use, and the scaling is more serious after 3 to 4 months of use.
  • Hydrofluoric acid is required to pickle the scaled parts after 5 months of use.
  • the rate of fouling in the inner layer of the lamp and the core lamp is greatly reduced.
  • the core lamp has a slight structural phenomenon after 6 months of use. The fouling is more serious after 10 to 11 months of use. At 12 months, hydrofluoric acid is required to pickle the fouled parts.
  • the thirteenth automatic valve and the fourteenth automatic valve are automatically closed.
  • the operator removes the SOOT body from the deposition chamber, and then installs a soft exhaust pipe to open the elastic opening. Hole two and opening three are seamlessly wrapped with the lamp socket of the package lamp, the lamp socket of the core lamp, and the nozzle of the exhaust pipe of the deposition chamber;
  • the torch is normally used for the deposition of the SOOT body to prepare the core rod of the optical fiber preform.
  • the fiber preform core rod cladding began to appear more bubbles in about 2 to 3 months, the number of bubbles was 2 to 5, and the core layer began to appear more bubbles in about 3 to 4 months.
  • the number of bubbles is 3 ⁇ 5.
  • the fiber preform mandrel produced by the VAD blowtorch cleaned by the device and cleaning method of the present invention has more air bubbles, and the phenomenon of more air bubbles starting to appear in the core rod cladding about 8 to 10 months.
  • the number is 2 to 4.
  • the core layer starts to appear more bubbles in about 10 to 12 months, and the number of bubbles is 1 to 4.
  • the thirteenth automatic valve and the fourteenth automatic valve are automatically closed.
  • the operator removes the SOOT body from the deposition chamber, and then installs a soft exhaust pipe to open the elastic opening. Hole two and opening three are seamlessly wrapped with the lamp socket of the lamp, the lamp socket of the core lamp, and the nozzle of the exhaust pipe of the deposition chamber respectively;
  • the torch is normally used for the deposition of the SOOT body to prepare the core rod of the optical fiber preform.
  • Figure 10 shows the comparison of the refractive index profile of the optical fiber preform mandrel produced by the embodiment of the present invention and the traditional cleaning method to clean the blowtorch.
  • the refractive index profile is significantly better than the refractive index profile of the core rod after 4 months of continuous production of VAD under the cleaning of the traditional method.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
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  • Cleaning In General (AREA)

Abstract

A VAD blowtorch cleaning apparatus, comprising a sweeping gas supply cabinet (21), a sweeping gas supply cabinet main pipe (22) and branch pipes, a monitoring computer (15), a PLC (16), a soft gas guide and exhaust pipe (77), automatic valves, float flow meters, and blowtorch group gas inlet pipes. By means of auxiliary devices such as the PLC (16) for controlling the automatic valves to open and close at intervals and the soft gas guide and exhaust pipe (77), a cleaning operation for the space of each layer inside a VAD blowtorch can be achieved in time and efficiently, and by means of flow control, the space of each layer inside the blowtorch can be accurately cleaned. In the process of cleaning the blowtorch, a combined deposition cavity gas suction pipe is purged by means of a high-pressure gas to form a large pressure difference between the inside and the outside of the blowtorch, so that powder impurities are synchronously suctioned out of the blowtorch and enter a waste gas recovery portion. The scaling rate at an inner layer of a quartz blowtorch is greatly reduced, the risks of bubble occurrence and optical parameter deterioration of an optical fiber preform core rod are reduced, the service life of the blowtorch is prolonged, and the production efficiency is greatly improved.

Description

一种VAD喷灯清洁装置及其清洁方法A VAD blowtorch cleaning device and its cleaning method
本申请要求专利号为2020102283725,申请日为20200327的优先权,该优先权文件记载内容以援引加入的方式加入本申请文件中。This application claims the priority of the patent number 2020102283725 and the filing date of 20200327. The content of the priority document is added to this application file by reference.
技术领域Technical field
本发明属于光纤预制棒制造领域,具体涉及一种VAD喷灯清洁装置及其清洁方法。The invention belongs to the field of optical fiber preform manufacturing, and specifically relates to a VAD blowtorch cleaning device and a cleaning method thereof.
背景技术Background technique
在现有的光纤预制棒制备工艺中,多采用轴向气相沉积法(VAD)生产芯棒,再用外部气相沉积法(OVD)生产外包层两步法生产光纤预制棒。VAD法生产芯棒的设备主要由反应腔体、喷灯组、原料气体供料部、疏松体(SOOT体)提升旋转部、操控电脑和废气回收部六部分组成。其中喷灯组是最关键的部件之一,喷灯组通常由一只芯灯和一只或多只包灯组成,其作用是喷出Sicl 4、Gecl 4、H 2、O 2等的混合气体,在喷灯灯口区域经高温燃烧发生水解反应生成SiO 2、GeO 2等粉体(1)、(2)。SiO 2、GeO 2等粉体在热泳原理作用下沉积附着到旋转的石英靶棒表面,制造出VAD SOOT体。 In the existing optical fiber preform preparation process, the axial vapor deposition method (VAD) is often used to produce the core rod, and then the external vapor deposition method (OVD) is used to produce the two-step method for producing the optical fiber preform. The equipment for mandrel production by the VAD method is mainly composed of six parts: reaction chamber, blowtorch, raw gas supply part, loose body (SOOT body) lifting and rotating part, control computer and waste gas recovery part. Among them, the blowtorch group is one of the most critical components. The blowtorch group is usually composed of a core lamp and one or more package lamps. Its function is to spray out mixed gases such as Sicl 4 , Gecl 4 , H 2 , O 2, etc. In the burner area of the torch, a hydrolysis reaction occurs after high-temperature combustion to produce SiO 2 , GeO 2 and other powders (1), (2). SiO 2 , GeO 2 and other powders are deposited and attached to the surface of the rotating quartz target rod under the action of the thermophoretic principle to produce a VAD SOOT body.
Sicl 4+O 2+2H 2→SiO 2+4HCl     (1) Sicl 4 +O 2 +2H 2 →SiO 2 +4HCl (1)
GeCl 4+O 2+2H 2→GeO 2+4HCl    (2) GeCl 4 +O 2 +2H 2 →GeO 2 +4HCl (2)
VAD SOOT体再经高温1500℃进行玻璃化,最终制作出透明的光纤预制棒芯棒。对比金属喷灯,石英喷灯由于耐温性好,且无金属杂质等特点,一直被VAD工艺所使用。The VAD SOOT body is then vitrified at a high temperature of 1500°C to finally produce a transparent optical fiber preform core rod. Compared with metal blowtorch, quartz blowtorch has been used in VAD process because of its good temperature resistance and no metal impurities.
喷灯作为原料气体混合和反应的场所,其内部构造的变化直接影响预制棒的生产成本和品质,生产过程中,部分未被废气回收部回收的SiO 2、GeO 2粉体(粉体杂质)容易吸附在喷灯内表面或者SOOT体开裂后粉体杂质掉落喷灯内部,一方面,积聚的粉体杂质会导致喷灯孔径变小,严重时造成气孔堵塞。喷灯孔径变小会直接影响原料气体流速分布,导致预制棒光学折射率剖面发生改变,造成预制棒品质恶化。另一方面,生产过程中,积聚的粉体杂质会泳向SOOT体表面,不同密度的粉体杂质发生团聚后,预制棒经高温烧结后内部容易出现气泡,气泡拉制成光纤会出现气线现象,也会降低预制棒品质。因此针对喷灯,需要匹配高效且规律的清洁作业,但是,实际生产过程中,传统的喷灯清洁方式存在如下几个问题: The blowtorch is a place where the raw gas is mixed and reacted. The change of its internal structure directly affects the production cost and quality of the preform. During the production process, part of the SiO 2 , GeO 2 powder (powder impurity) not recovered by the waste gas recovery unit is easy The powder impurities fall into the torch after being adsorbed on the inner surface of the blowtorch or the SOOT body cracks. On the one hand, the accumulated powder impurities will cause the diameter of the blowtorch to become smaller, and in severe cases, the pores will be blocked. The smaller aperture of the blowtorch will directly affect the flow rate distribution of the raw material gas, resulting in a change in the optical refractive index profile of the preform, and deteriorating the quality of the preform. On the other hand, during the production process, the accumulated powder impurities will swim to the surface of the SOOT body. After the powder impurities of different densities are agglomerated, bubbles are prone to appear in the preform after high-temperature sintering, and air lines will appear when the bubbles are drawn into optical fibers. Phenomenon, it will also reduce the quality of the preform. Therefore, for the blowtorch, it is necessary to match efficient and regular cleaning operations. However, in the actual production process, the traditional blowtorch cleaning method has the following problems:
1.传统的喷灯清洁方式缺乏高效性:喷灯清洁通常在设备待机时进行,当喷灯内部积聚较多粉体杂质时,首先需要拆卸连接喷灯表面的原料气体管路,然后借助高压气体氮气(N2)或者压缩空气(CDA)对准喷灯各层管口逐个吹扫,待喷灯内部粉体杂质吹出灯外,吹扫工作结束后,现场再逐个将原料气体管路通过塑料转接头固定在喷灯各层管口表面。整个过程基本上全是手动操作,复杂结构的喷灯清洁对现场人员操作要求比较高,尤其是塑料转接头与石英喷灯的固定连接操作,人工拧扭塑料转接头内部螺纹时,用力必须要保持适中,用力过大容易造成喷灯接口部位破损,用力过小容易造成原料气管与喷灯连接部位气密性不良,生产过程中出现气体原料泄露。通常,如图5和图6所示,VAD喷灯由4~10层同心筒组成,针对喷灯内部各层不同孔径的灯壁,需要匹配合适的气体吹扫流量,传统的喷灯清洁方式下,需要手动逐个多次调节吹扫流量,整体工作量比较大。1. The traditional blowtorch cleaning method lacks high efficiency: blowtorch cleaning is usually carried out when the equipment is on standby. When there are a lot of powder impurities inside the blowtorch, it is first necessary to disassemble the raw gas pipeline connected to the surface of the blowtorch, and then use the high-pressure gas nitrogen (N2 ) Or compressed air (CDA) aiming at the nozzles of each layer of the torch to blow one by one. After the powder impurities in the torch are blown out of the lamp, after the purge work is completed, the raw gas pipelines are fixed to each of the torches through plastic adapters one by one on site. Layer nozzle surface. The entire process is basically all manual operation. The cleaning of the complex structure of the blowtorch requires higher operation requirements for the on-site personnel, especially the fixed connection operation of the plastic adapter and the quartz blowtorch. When manually twisting the internal thread of the plastic adapter, the force must be kept moderate , Excessive force is likely to cause damage to the torch interface, and too little force will easily cause poor airtightness of the raw material gas pipe and the torch connection, and gaseous raw materials may leak during the production process. Generally, as shown in Figure 5 and Figure 6, the VAD torch is composed of 4 to 10 layers of concentric tubes. For the lamp walls with different apertures in each layer of the torch, it is necessary to match the appropriate gas purge flow. In the traditional cleaning method of the torch, it is required Manually adjust the purge flow one by one several times, the overall workload is relatively large.
2.传统的喷灯清洁方式缺乏及时性:喷灯若前期得不到及时清洁,长时间高温生产之后,喷灯内部积聚的粉体杂质会牢牢粘附灯壁内表面,此时,再借助高压气体吹扫粉体杂质效果比较差,只能拆卸喷灯后借助化学试剂如氢氟酸清洗,喷灯整个拆卸、清洗、安装到工艺调试过程工作量也比较大,生产效率大大降低。2. The traditional blowtorch cleaning method lacks timeliness: If the blowtorch cannot be cleaned in time in the early stage, after a long time of high temperature production, the powder impurities accumulated in the blowtorch will firmly adhere to the inner surface of the lamp wall. At this time, use high-pressure gas The effect of purging powder impurities is relatively poor, and it can only be cleaned with chemical reagents such as hydrofluoric acid after the blowtorch is disassembled. The entire process of disassembly, cleaning, installation and commissioning of the blowtorch is also relatively heavy, and the production efficiency is greatly reduced.
综上所述,针对VAD喷灯,亟需一种高效的自动清洁装置及其清洁方法。In summary, for VAD blowtorches, there is an urgent need for an efficient automatic cleaning device and cleaning method.
发明内容Summary of the invention
本发明要解决的技术问题是:为解决现有技术中喷灯清洁方式自动化程度低、手工拆卸环节多容易造成喷灯接口部位破损、喷灯清洁不容易及时处理的不足,从而提供一种VAD喷灯清洁装置及其清洁方法。The technical problem to be solved by the present invention is: in order to solve the disadvantages of the prior art that the blowtorch cleaning method is low in automation and manual disassembly links are likely to cause damage to the blowtorch interface, and the blowtorch is not easy to clean in time, so as to provide a VAD blowtorch cleaning device And its cleaning method.
本发明解决其技术问题所采用的技术方案是:The technical solutions adopted by the present invention to solve its technical problems are:
一种VAD喷灯清洁装置,包括:A VAD blowtorch cleaning device, including:
清扫气体供应装置,用于产生和排出喷灯清洁用的气体;Sweeping gas supply device, used to generate and discharge the gas used for cleaning the blowtorch;
进气管路切换机构,具有两个进气端,一个出气端,用于选择切换打开两个进气端的其中一个管路,并关闭另一个管路;所述进气管路切换机构的其中一个进气端用于连接原料进气管;The air inlet pipe switching mechanism has two air inlet ends and one air outlet, which is used to selectively switch to open one of the two air inlet ends and close the other pipe; one of the air inlet pipe switching mechanisms has an inlet The gas end is used to connect the raw material intake pipe;
喷灯组进气管,一端连接所述进气管路切换机构的出气端,另一端连接喷灯组进气端;One end of the blower group air inlet pipe is connected to the air outlet end of the air intake pipe switching mechanism, and the other end is connected to the blower group air inlet end;
清扫气体支管,一端连接所述清扫气体供应装置,另一端连接进气管路切换机构的另一个进气端;The sweeping gas branch pipe has one end connected to the sweeping gas supply device, and the other end connected to the other intake end of the intake pipe switching mechanism;
沉积腔体抽风管,设置在喷灯组的排气端,用于将粉体杂质吸出喷灯组外部。The deposition chamber exhaust pipe is arranged at the exhaust end of the blowtorch group, and is used to suck powder impurities out of the blowtorch group.
优选地,本发明的VAD喷灯清洁装置,所述进气管路切换机构包括:Preferably, in the VAD blowtorch cleaning device of the present invention, the intake pipe switching mechanism includes:
三通管,所述三通管具有两个进气端,一个出气端;A three-way pipe, the three-way pipe has two inlet ends and one outlet end;
自动阀,设置在所述原料进气管和所述清扫气体支管处,所述自动阀能够控制管路的开、闭。An automatic valve is arranged at the raw material intake pipe and the cleaning gas branch pipe, and the automatic valve can control the opening and closing of the pipeline.
优选地,本发明的VAD喷灯清洁装置,所述沉积腔体抽风管,焊接于沉积腔体侧面、正对所述喷灯组的排气端,所述沉积腔体抽风管通过软式导排气管密封连接所述喷灯组的排气端,所述软式导排气管能够拆卸。Preferably, in the VAD blowtorch cleaning device of the present invention, the deposition chamber exhaust pipe is welded to the side of the deposition chamber and faces the exhaust end of the blowtorch group, and the deposition chamber exhaust pipe passes through a soft guide The exhaust pipe is hermetically connected to the exhaust end of the burner group, and the soft exhaust pipe can be disassembled.
优选地,本发明的VAD喷灯清洁装置,所述喷灯组由一只包灯和一只芯灯组成,所述包灯和所述芯灯均为多层结构,每层都有独立的进气端;所述进气管路切换机构、所述喷灯组进气管、所述清扫气体支管均对应所述包灯和所述芯灯的每一层设置。Preferably, in the VAD blowtorch cleaning device of the present invention, the blowtorch group is composed of a package lamp and a core lamp, and both the package lamp and the core lamp have a multi-layer structure, and each layer has an independent air inlet. End; the intake pipe switching mechanism, the blower group intake pipe, the cleaning gas branch pipe are corresponding to each layer of the package lamp and the core lamp.
优选地,本发明的VAD喷灯清洁装置,所述清扫气体供应装置上分别设置有调压阀、流量计、自动阀和压力表;每个清扫气体支管上设有单独的流量计和自动阀。Preferably, in the VAD blowtorch cleaning device of the present invention, the cleaning gas supply device is provided with a pressure regulating valve, a flow meter, an automatic valve and a pressure gauge respectively; each cleaning gas branch pipe is provided with a separate flow meter and automatic valve.
优选地,本发明的VAD喷灯清洁装置,还包括可编程逻辑控制器,所述清扫气体供应装置与所述可编程逻辑控制器相连,所述可编程逻辑控制器用于控制所有自动阀的开闭。Preferably, the VAD torch cleaning device of the present invention further includes a programmable logic controller, and the cleaning gas supply device is connected to the programmable logic controller, and the programmable logic controller is used to control the opening and closing of all automatic valves. .
一种VAD喷灯清洁装置的清洁方法,包括以下步骤:A cleaning method of a VAD blowtorch cleaning device includes the following steps:
S1,控制生产原料气体供应柜停止工作;S1, control the production of raw material gas supply cabinet to stop working;
S2,安装软式导排气管,将软式导排气管一端连接到喷灯组的排气端,另一端连接到沉积腔体抽风管;S2, install the soft guide and exhaust pipe, connect one end of the soft guide and exhaust pipe to the exhaust end of the burner group, and the other end to the exhaust pipe of the deposition chamber;
S3,控制生产原料气体供应柜的原料进气管上的自动阀关闭,控制清扫气体供应装置上的自动阀打开,并启动清扫气体供应装置向喷灯组通入清扫气体,同时控制沉积腔体抽风管一端开始抽气,将喷灯组内的粉体杂质吸出喷灯外部,进入废气回收部。S3, control the automatic valve on the raw material inlet pipe of the production raw gas supply cabinet to close, control the automatic valve on the purge gas supply device to open, and start the purge gas supply device to pass the purge gas to the burner group, and at the same time control the exhaust of the deposition chamber One end of the tube starts to pump air, sucking the powder impurities in the blowtorch group out of the blowtorch, and enters the exhaust gas recovery part.
优选地,本发明的VAD喷灯清洁装置的清洁方法,其特征在于:在步骤S3中,采用可编程逻辑控制器控制所有自动阀的开闭。Preferably, the cleaning method of the VAD torch cleaning device of the present invention is characterized in that: in step S3, a programmable logic controller is used to control the opening and closing of all automatic valves.
优选地,本发明的VAD喷灯清洁装置的清洁方法,其特征在于:在步骤S3中,通过可编程逻辑控制器控制各个自动阀按顺序打开一段设定的时间后关闭。Preferably, the cleaning method of the VAD torch cleaning device of the present invention is characterized in that: in step S3, the programmable logic controller controls each automatic valve to open sequentially for a set period of time and then close.
优选地,本发明的VAD喷灯清洁装置的清洁方法,其特征在于:在步骤S3之前,设定喷灯内部各层空间吹扫流量正比于喷灯内部各层空间体积,并在步骤S3中通过调节流量计以调节喷灯内部各层实际的流量。Preferably, the cleaning method of the VAD torch cleaning device of the present invention is characterized in that: before step S3, the purge flow rate of each layer of the torch is set to be proportional to the volume of each layer of space inside the torch, and the flow rate is adjusted in step S3 To adjust the actual flow rate of each layer inside the torch.
本发明的有益效果是:直接在喷灯的进气端切换原料气体或清洁气体,无需拆卸原料气体管路来进行喷灯清洁,减少喷灯进气管口的管路拆装次数,减少进气管口损坏的可能性;自动化程度高,省去了人工拆、装进气管路的步骤,清洁能够及时进行,极大地减缓石英喷灯内层结垢速率,降低光纤预制棒芯棒出现气泡、光学参数恶化的风险,延长喷灯使用寿命,大大提高了生产效率。The beneficial effects of the present invention are: directly switch the raw gas or clean gas at the inlet end of the torch, without disassembling the raw gas pipeline to clean the torch, reduce the number of pipe disassembly and assembly of the inlet pipe of the torch, and reduce the damage of the inlet pipe. Possibility; high degree of automation, eliminating the need for manual disassembly and assembly of the air inlet pipeline, cleaning can be carried out in time, greatly slowing down the fouling rate of the inner layer of the quartz blowtorch, and reducing the risk of bubbles in the optical fiber preform core rod and deterioration of optical parameters , Extend the service life of the torch and greatly improve the production efficiency.
通过借助PLC控制器控制自动阀开闭和导排气管等辅助设备实现VAD喷灯内部各层空 间及时高效地清理作业,通过流量控制精准地清洁喷灯内部各层空间。By using the PLC controller to control the automatic valve opening and closing and the exhaust pipe and other auxiliary equipment, the internal space of the VAD torch can be cleaned in time and efficiently, and the internal space of the torch can be accurately cleaned through the flow control.
下面结合附图和实施例对本申请的技术方案进一步说明。The technical solution of the present application will be further described below with reference to the drawings and embodiments.
图1是VAD喷灯清洁装置示意图;Figure 1 is a schematic diagram of a VAD blowtorch cleaning device;
图2是VAD喷灯生产装置示意图;Figure 2 is a schematic diagram of a VAD blowtorch production device;
图3是VAD喷灯生产与清洁装置组装示意图;Figure 3 is a schematic diagram of the assembly of the VAD blowtorch production and cleaning device;
图4是图1装置中清扫气体流向控制装置示意图;Fig. 4 is a schematic diagram of a device for controlling the flow direction of cleaning gas in the device of Fig. 1;
图5传统的VAD五层包灯示意图;Figure 5 Schematic diagram of traditional VAD five-layer package lamp;
图6传统的VAD五层芯灯示意图;Figure 6 Schematic diagram of a traditional VAD five-layer core lamp;
图7传统的VAD五层包灯剖视图;Figure 7 A cross-sectional view of a traditional VAD five-layer lamp;
图8传统的VAD五层芯灯剖视图;Figure 8 is a cross-sectional view of a traditional VAD five-layer core lamp;
图9软式导排气管;Figure 9 Soft guide exhaust pipe;
图10本发明实施例与传统清洁方法清洁VAD喷灯制备光纤预制棒芯棒折射率剖面对比图。Fig. 10 is a comparison diagram of the refractive index profile of the optical fiber preform core rod prepared by the cleaning method of the VAD torch and the conventional cleaning method of the present invention.
附图符号说明:Description of drawing symbols:
沉积腔体1、VAD包灯2、VAD芯灯3、沉积腔体抽风管4、监控电脑15、PLC控制器16、第一自动阀25、第二自动阀26、第三自动阀28、第四自动阀33、第五自动阀38、第六自动阀43、第七自动阀48、第八自动阀53、第九自动阀58、第十自动阀63、第十一自动阀68、第十二自动阀73、第十三自动阀17、第十四自动阀18、生产原料气体供应柜一19、生产原料气体供应柜二20、清扫气体供应柜21、清扫气体供应柜主管22、清扫气体供应柜主管调压阀23、压力表81、第一浮子流量计24、第二浮子流量计29、第三浮子流量计34、第四浮子流量计39、第五浮子流量计44、第六浮子流量计49、第七浮子流量计54、第八浮子流量计59、第九浮子流量计64、第十浮子流量计69、第十一浮子流量计74、清扫气体第一支管37、清扫气体第二支管42、清扫气体第三支管32、清扫气体第四支管47、清扫气体第五支管27、清扫气体第六支管62、清扫气体第七支管67、清扫气体第八支管57、清扫气体第九支管72、清扫气体第十支管52、生产原料气体第一进气管41、生产原料气体第二进气管46、生产原料气体第三进气管36、生产原料气体第四进气管51、生产原料气体第五进气管31、生产原料气体第六进气管66、生产原料气体第七进气管71、生产原料气体第八进气管61、生产原料气体第九进气管76、生产原料气体第十进气管56、包灯第一层进气管口5、包灯第二层进气管口6、包灯第三层进气管口7、包灯第四层进气管口8、包灯第五层进气管口9、芯灯第一层进气管口10、芯灯第二层进气管口11、芯灯第三层进气管口12、芯灯第四层进气管口13、芯灯第五层进气管口14、包灯第一层进气管40、包灯第二层进气管45、包灯第三层进气管35、包灯第四层进气管50、包灯第五层进气管30、芯灯第一层进气管65、芯灯第二层进气管70、芯灯第三层进气管60、芯灯第四层进气管75、芯灯第五层进气管55、软式导排气管77、软式导排气管开孔一78、软式导排气管开孔二79、软式导排气管开孔三80、包灯第一层管径内径D1、包灯第二层管径内径D2、包灯第三层管径内径D3、包灯第四层管径内径D4、包灯第五层管径内径D5、芯灯第一层管径内径D6、芯灯第二层管径内径D7、芯灯第三层管径内径D8、芯灯第四层管径内径D9、芯灯第五层管径内径D10、包灯第一层相连管底距离L1、包灯第二层相连管底距离L2、包灯第三层相连管底距离L3、包灯第四层相连管底距离L4、包灯第五层相连管底距离L5、芯灯第一层相连管底距离L6、芯灯第二层相连管底距离L7、芯灯第三层相连管底距离L8、芯灯第四层相连管底距离L9、芯灯第五层相连管底距离L10。Deposition chamber 1, VAD package lamp 2, VAD core lamp 3, deposition chamber exhaust pipe 4, monitoring computer 15, PLC controller 16, first automatic valve 25, second automatic valve 26, third automatic valve 28, The fourth automatic valve 33, the fifth automatic valve 38, the sixth automatic valve 43, the seventh automatic valve 48, the eighth automatic valve 53, the ninth automatic valve 58, the tenth automatic valve 63, the eleventh automatic valve 68, the Twelve automatic valve 73, thirteenth automatic valve 17, fourteenth automatic valve 18, production material gas supply cabinet one 19, production material gas supply cabinet two 20, cleaning gas supply cabinet 21, cleaning gas supply cabinet supervisor 22, cleaning Gas supply cabinet main pressure regulating valve 23, pressure gauge 81, first float flow meter 24, second float flow meter 29, third float flow meter 34, fourth float flow meter 39, fifth float flow meter 44, sixth float flow meter Float flow meter 49, seventh float flow meter 54, eighth float flow meter 59, ninth float flow meter 64, tenth float flow meter 69, eleventh float flow meter 74, cleaning gas first branch pipe 37, cleaning gas The second branch pipe 42, the third branch pipe of sweeping gas 32, the fourth branch pipe of sweeping gas 47, the fifth branch pipe of sweeping gas 27, the sixth branch pipe of sweeping gas 62, the seventh branch pipe of sweeping gas 67, the eighth branch pipe of sweeping gas 57, the fourth branch pipe of sweeping gas. Nine branch pipes 72, cleaning gas tenth branch pipe 52, raw material gas production first inlet pipe 41, raw material gas production second inlet pipe 46, raw material gas production third inlet pipe 36, raw material gas production fourth inlet pipe 51, raw material gas production Fifth gas inlet pipe 31, sixth gas inlet pipe 66 for raw material gas production, seventh gas inlet pipe 71 for raw material gas production, eighth gas inlet pipe 61 for raw material gas production, ninth gas inlet pipe 76 for raw material gas production, and tenth gas inlet pipe 56 for raw material gas production , Baodeng first layer of air inlet pipe port 5, Baodeng second layer of air inlet pipe port 6, Baodeng third layer of air inlet pipe port 7, Baodeng fourth layer of air inlet pipe port 8, Baodeng fifth layer of air inlet pipe port 9 , The first layer of core lamp intake pipe port 10, the second layer of core lamp intake pipe port 11, the third layer of core lamp intake pipe port 12, the fourth layer of core lamp intake pipe port 13, the fifth layer of core lamp intake pipe port 14 , Baodeng first layer air intake pipe 40, Baodeng second layer air intake pipe 45, Baodeng third layer air intake pipe 35, Baodeng fourth layer air intake pipe 50, Baodeng fifth layer air intake pipe 30, core lamp first Layer intake pipe 65, core lamp second layer intake pipe 70, core lamp third layer intake pipe 60, core lamp fourth layer intake pipe 75, core lamp fifth layer intake pipe 55, soft guide exhaust pipe 77, soft The opening of the flexible guide and exhaust pipe is 78, the opening of the soft guide and exhaust pipe is 79, the opening of the flexible guide and exhaust pipe is 80, the inner diameter of the first layer of the lamp is D1, the inner diameter of the second layer of the lamp is D2, the inner diameter of the third layer of the lamp D3, the inner diameter of the fourth layer of the lamp D4, the inner diameter of the fifth layer of the lamp D5, the inner diameter of the first layer of the core lamp D6, the inner diameter of the second layer of the core lamp D7, the inner diameter of the third layer of the core lamp is D8, the inner diameter of the fourth layer of the core lamp is D9, the inner diameter of the fifth layer of the core lamp is D10, the distance between the bottom of the first layer of the lamp and the bottom of the tube is L1, the second is the second The distance between the bottom of the connected tube of the layer is L2, the distance of the bottom of the third layer of the lamp is L3, the distance of the bottom of the fourth layer of the lamp is L4, the distance of the bottom of the fifth layer of the lamp is L5, the distance between the bottom of the first layer of the core lamp is L6 , The distance between the bottom of the connected tube of the second layer of the core lamp is L7, the distance of the bottom of the connected tube of the third layer of the core lamp is L8, the bottom distance of the connected tube of the fourth layer of the core lamp is L9, and the bottom distance of the fifth layer of the core lamp is L10.
具体实施方式Detailed ways
需要说明的是,在不冲突的情况下,本申请中的实施例及实施例中的特征可以相互组合。It should be noted that the embodiments in the application and the features in the embodiments can be combined with each other if there is no conflict.
为使本发明实现的技术手段、创作特征、达成目的与功效易于明白了解,下面结合具体实施方式,进一步阐述本发明。In order to make the technical means, creative features, objectives and effects of the present invention easy to understand, the present invention will be further explained below in conjunction with specific implementations.
本实施例提供一种VAD喷灯清洁装置,包括:This embodiment provides a VAD blowtorch cleaning device, including:
清扫气体供应装置(具体的为清扫气体供应柜21),用于产生和排出喷灯清洁用的气体;The cleaning gas supply device (specifically, the cleaning gas supply cabinet 21) is used to generate and discharge the gas used for cleaning the blowtorch;
进气管路切换机构(具体的为三通管和第一~十四自动阀),具有两个进气端,一个出气端,用于选择切换打开两个进气端的其中一个管路,并关闭另一个管路;所述进气管路切换机构的其中一个进气端用于连接原料进气管;The intake pipe switching mechanism (specifically, the three-way pipe and the first to fourteen automatic valves), has two intake ends, one exhaust end, which is used to switch open and close one of the two intake ends. Another pipeline; one of the inlet ends of the inlet pipeline switching mechanism is used to connect the raw material inlet pipe;
喷灯组进气管(具体的包括包灯第一、二、三、四、五层进气管和芯灯第一、二、三、四、五层进气管),一端连接所述进气管路切换机构的出气端,另一端连接喷灯组进气端;The air inlet pipe of the blowtorch group (specifically includes the first, second, third, fourth, and fifth-layer air inlet pipes of the package lamp and the first, second, third, fourth, and fifth-layer air inlet pipes of the core lamp), one end is connected with the air inlet pipe switching mechanism The other end is connected to the air inlet end of the blowtorch group;
清扫气体支管(具体的包括清扫气体第一、二、三、四、五、六、七、八、九、十支管),一端连接所述清扫气体供应装置,另一端连接进气管路切换机构的另一个进气端;Sweep gas branch pipes (specifically include sweep gas first, second, third, fourth, five, six, seven, eight, nine, ten branch pipes), one end is connected to the sweeping gas supply device, and the other end is connected to the inlet pipe switching mechanism The other intake end;
沉积腔体抽风管4,设置在喷灯组的排气端,用于将粉体杂质吸出喷灯组外部。The deposition chamber exhaust pipe 4 is arranged at the exhaust end of the blowtorch group, and is used to suck powder impurities out of the blowtorch group.
优选地,本实施例的VAD喷灯清洁装置,所述进气管路切换机构包括:Preferably, in the VAD torch cleaning device of this embodiment, the intake pipe switching mechanism includes:
三通管,所述三通管具有两个进气端,一个出气端;A three-way pipe, the three-way pipe has two inlet ends and one outlet end;
自动阀,设置在所述原料进气管和所述清扫气体支管处,所述自动阀能够控制管路的开、闭。An automatic valve is arranged at the raw material intake pipe and the cleaning gas branch pipe, and the automatic valve can control the opening and closing of the pipeline.
优选地,本实施例的VAD喷灯清洁装置,所述沉积腔体抽风管,焊接于沉积腔体侧面、正对所述喷灯组的排气端,所述沉积腔体抽风管通过软式导排气管密封连接所述喷灯组的排气端,所述软式导排气管能够拆卸。Preferably, in the VAD blowtorch cleaning device of this embodiment, the deposition chamber exhaust pipe is welded to the side of the deposition chamber and faces the exhaust end of the blowtorch group, and the deposition chamber exhaust pipe passes through a soft The exhaust air duct is sealed to the exhaust end of the burner group, and the soft exhaust air duct can be disassembled.
优选地,本实施例的VAD喷灯清洁装置,所述喷灯组由一只包灯和一只芯灯组成,所述包灯和所述芯灯均为多层结构,每层都有独立的进气端;所述进气管路切换机构、所述喷灯组进气管、所述清扫气体支管均对应所述包灯和所述芯灯的每一层设置。Preferably, in the VAD blowtorch cleaning device of this embodiment, the blowtorch group is composed of a package lamp and a core lamp, and both the package lamp and the core lamp have a multi-layer structure, and each layer has an independent inlet. The gas end; the intake pipe switching mechanism, the blower group intake pipe, and the cleaning gas branch pipe are set corresponding to each layer of the package lamp and the core lamp.
优选地,本实施例的VAD喷灯清洁装置,所述清扫气体供应装置上分别设置有调压阀、流量计、自动阀和压力表;每个清扫气体支管上设有单独的流量计和自动阀。Preferably, in the VAD blowtorch cleaning device of this embodiment, the cleaning gas supply device is provided with a pressure regulating valve, a flow meter, an automatic valve and a pressure gauge respectively; each cleaning gas branch pipe is provided with a separate flow meter and automatic valve .
优选地,本实施例的VAD喷灯清洁装置,还包括可编程逻辑控制器,所述清扫气体供应装置与所述可编程逻辑控制器相连,所述可编程逻辑控制器用于控制所有自动阀的开闭。Preferably, the VAD torch cleaning device of this embodiment further includes a programmable logic controller, and the cleaning gas supply device is connected to the programmable logic controller, and the programmable logic controller is used to control the opening of all automatic valves. close.
本实施例提供一种VAD喷灯清洁装置的清洁方法,采用上述的VAD喷灯清洁装置,包括以下步骤:This embodiment provides a method for cleaning a VAD torch cleaning device. Using the above-mentioned VAD torch cleaning device includes the following steps:
S1,控制生产原料气体供应柜停止工作;S1, control the production of raw material gas supply cabinet to stop working;
S2,安装软式导排气管,将软式导排气管一端连接到喷灯组的排气端,另一端连接到沉积腔体抽风管;S2, install the soft guide and exhaust pipe, connect one end of the soft guide and exhaust pipe to the exhaust end of the burner group, and the other end to the exhaust pipe of the deposition chamber;
S3,控制生产原料气体供应柜的原料进气管上的自动阀关闭,控制清扫气体供应装置上的自动阀打开,并启动清扫气体供应装置向喷灯组通入清扫气体,同时控制沉积腔体抽风管一端开始抽气,将喷灯组内的粉体杂质吸出喷灯外部,进入废气回收部。S3, control the automatic valve on the raw material inlet pipe of the production raw gas supply cabinet to close, control the automatic valve on the purge gas supply device to open, and start the purge gas supply device to pass the purge gas to the burner group, and at the same time control the exhaust of the deposition chamber One end of the tube starts to pump air, sucking the powder impurities in the blowtorch group out of the blowtorch, and enters the exhaust gas recovery part.
优选地,本实施例的VAD喷灯清洁装置的清洁方法,其特征在于:在步骤S3中,采用可编程逻辑控制器控制所有自动阀的开闭。Preferably, the cleaning method of the VAD torch cleaning device of this embodiment is characterized in that: in step S3, a programmable logic controller is used to control the opening and closing of all automatic valves.
优选地,本实施例的VAD喷灯清洁装置的清洁方法,其特征在于:在步骤S3中,通过可编程逻辑控制器控制各个自动阀按顺序打开一段设定的时间后关闭。Preferably, the cleaning method of the VAD torch cleaning device of this embodiment is characterized in that: in step S3, the programmable logic controller controls each automatic valve to open sequentially for a set period of time and then close.
优选地,本实施例的VAD喷灯清洁装置的清洁方法,其特征在于:在步骤S3之前,设定喷灯内部各层空间吹扫流量正比于喷灯内部各层空间体积,并在步骤S3中通过调节流量计以调节喷灯内部各层实际的流量。Preferably, the cleaning method of the VAD torch cleaning device of this embodiment is characterized in that: before step S3, the purge flow rate of each layer of space inside the torch is set to be proportional to the volume of each layer of space inside the torch, and in step S3, through adjustment Flow meter to adjust the actual flow rate of each layer inside the torch.
如图1所示,一种VAD喷灯清洁装置,包括清扫气体供应柜21、清扫气体供应柜主管22、监控电脑15、包灯2、芯灯3、包灯第一层进气管40、包灯第二层进气管45、包灯第三层进气管35、包灯第四层进气管50、包灯第五层进气管30、芯灯第一层进气管65、芯灯 第二层进气管70、芯灯第三层进气管60、芯灯第四层进气管75、芯灯第五层进气管55、沉积腔体1、沉积腔体抽风管4、软式导排气管77,以及分别向所述包灯2通入清扫气体供应柜主管22的第一支管37、第二支管42、第三支管32、第四支管47、第五支管27和向所述芯灯3通入清扫气体供应柜主管22的第六支管62、第七支管67、第八支管57、第九支管72、第十支管52。As shown in Figure 1, a VAD blowtorch cleaning device includes a cleaning gas supply cabinet 21, a cleaning gas supply cabinet main 22, a monitoring computer 15, a lamp 2, a core lamp 3, an air inlet pipe 40 on the first layer of the lamp, and a lamp The second layer air intake pipe 45, the third layer air intake pipe 35 of the package lamp, the fourth layer air intake pipe 50 of the package light, the fifth layer air intake pipe 30 of the package light, the first layer air intake pipe 65 of the core lamp, the second layer air intake pipe of the core lamp 70. The third layer of core lamp intake pipe 60, the fourth layer of core lamp intake pipe 75, the fifth layer of core lamp intake pipe 55, the deposition chamber 1, the deposition chamber exhaust pipe 4, the soft guide exhaust pipe 77, And the first branch pipe 37, the second branch pipe 42, the third branch pipe 32, the fourth branch pipe 47, the fifth branch pipe 27 and the core lamp 3 are respectively passed into the cleaning gas supply cabinet main pipe 22 to the package lamp 2 The sixth branch pipe 62, the seventh branch pipe 67, the eighth branch pipe 57, the ninth branch pipe 72, and the tenth branch pipe 52 of the main pipe 22 of the gas supply cabinet are cleaned.
如图3所示,清扫气体供应柜主管22上分别设置调压阀23、第一浮子流量计24、第一自动阀25、第二自动阀26和压力表81。清扫气体供应柜主管22的第一支管37上分别设置第五自动阀38和第四浮子流量计39、第二支管42上分别设置第六自动阀43和第五浮子流量计44、第三支管32上分别设置第四自动阀33和第三浮子流量计34、第四支管47上分别设置第七自动阀48和第六浮子流量计49、第五支管27上分别设置第三自动阀28和第二浮子流量计29、第六支管62上分别设置第十自动阀63和第九浮子流量计64、第七支管67上分别设置第十一自动阀68和第十浮子流量计69、第八支管57上分别设置九自动阀58和第八浮子流量计59、第九支管72上分别设置第十二自动阀73和第十一浮子流量计74、第十支管52上分别设置第八自动阀53和第七浮子流量计54。As shown in FIG. 3, the main pipe 22 of the cleaning gas supply cabinet is provided with a pressure regulating valve 23, a first float flow meter 24, a first automatic valve 25, a second automatic valve 26 and a pressure gauge 81 respectively. The first branch pipe 37 of the main pipe 22 of the cleaning gas supply cabinet is provided with a fifth automatic valve 38 and a fourth float flowmeter 39, respectively, and the second branch pipe 42 is provided with a sixth automatic valve 43, a fifth float flowmeter 44, and a third branch respectively. 32 is provided with a fourth automatic valve 33 and a third float flowmeter 34, the fourth branch pipe 47 is provided with a seventh automatic valve 48 and a sixth float flowmeter 49, respectively, and the fifth branch pipe 27 is provided with a third automatic valve 28 and The second float flowmeter 29 and the sixth branch pipe 62 are respectively provided with a tenth automatic valve 63 and a ninth float flowmeter 64, and the seventh branch pipe 67 is respectively provided with an eleventh automatic valve 68 and a tenth float flowmeter 69, eighth The branch pipe 57 is provided with a nine automatic valve 58 and an eighth float flow meter 59 respectively, a ninth branch pipe 72 is provided with a twelfth automatic valve 73 and an eleventh float flow meter 74, and the tenth branch pipe 52 is provided with an eighth automatic valve respectively. 53 and the seventh float flow meter 54.
在其中一个实施例中,VAD喷灯由一只包灯2和一只芯灯3组成,如图5和图7所示,包灯2共5层结构,由内往外标记为第一层、第二层、第三层、第四层、第五层,如图6和图8所示,芯灯3共5层结构,由内往外标记为第一层、第二层、第三层、第四层、第五层。如图3所示,包灯第一层进气管40两端分别连通清扫气体第一支管37和包灯第一层进气管口5、包灯第二层进气管45两端分别连通清扫气体第二支管42和包灯第二层进气管口6、包灯第三层进气管35两端分别连通清扫气体第三支管32和包灯第三层进气管口7、包灯第四层进气管50两端分别连通清扫气体第四支管47和包灯第四层进气管口8、包灯第五层进气管30两端分别连通清扫气体第五支管27和包灯第五层进气管口9、芯灯第一层进气管65两端分别连通清扫气体第六支管62和芯灯第一层进气管口10、芯灯第二层进气管70两端分别连通清扫气体第七支管67和芯灯第二层进气管口11、芯灯第三层进气管60两端分别连通清扫气体第八支管57和芯灯第三层进气管口12、芯灯第四层进气管75两端分别连通清扫气体第九支管72和芯灯第四层进气管口13、芯灯第五层进气管55两端分别连通清扫气体第十支管52和芯灯第五层进气管口14。In one of the embodiments, the VAD torch is composed of a package lamp 2 and a core lamp 3. As shown in Figures 5 and 7, the package lamp 2 has a five-layer structure, marked from the inside to the outside as the first layer and the first The second layer, third layer, fourth layer, and fifth layer, as shown in Figure 6 and Figure 8, the core lamp 3 has a five-layer structure, marked from the inside to the outside as the first layer, the second layer, the third layer, and the first layer. The fourth and fifth floors. As shown in Figure 3, the two ends of the first layer of air inlet pipe 40 of the lamp are respectively connected with the first branch pipe 37 of cleaning gas and the first layer of air intake pipe port 5, and the two ends of the air inlet pipe of the second layer of lamp are respectively connected with the first cleaning gas. Both ends of the two branch pipes 42 and the air intake pipe port 6 of the second layer of the lamp and the air intake pipe 35 of the third layer of the lamp are respectively connected with the third branch pipe 32 of the cleaning gas and the third layer of the lamp 7 and the fourth layer of the lamp. Both ends of 50 are respectively connected with the fourth branch pipe 47 of sweeping gas and the inlet port 8 of the fourth layer of the lamp, and the fifth layer intake pipe 30 of the lamp is respectively connected with the fifth branch pipe 27 of the sweeping gas and the fifth layer inlet port 9 of the lamp. The two ends of the first-layer intake pipe 65 of the core lamp are respectively connected with the sixth branch pipe 62 of the cleaning gas and the first layer intake pipe port 10 of the core lamp, and the two ends of the second-layer intake pipe 70 of the core lamp are respectively connected with the seventh branch pipe 67 of the cleaning gas and the core. The two ends of the lamp second layer intake pipe port 11 and the core lamp third layer intake pipe 60 are respectively connected to the sweep gas eighth branch pipe 57, the core lamp third layer intake pipe port 12, and the core lamp fourth layer intake pipe 75 are respectively connected to both ends Both ends of the ninth branch pipe 72 for cleaning gas, the inlet pipe port 13 of the fourth layer of the core lamp, and the inlet pipe 55 of the fifth layer of the core lamp are respectively connected with the tenth branch pipe 52 of the cleaning gas and the fifth layer inlet pipe port 14 of the core lamp.
在其中一个实施例中,还包括PLC控制器16,生产原料气体供应柜一19、生产原料气体供应柜二20和清扫气体供应柜21与PLC控制器16相连,PLC控制器16用于控制所有自动阀的开闭。In one of the embodiments, it also includes a PLC controller 16, a production raw gas supply cabinet 19, a production raw gas supply cabinet 20, and a purge gas supply cabinet 21 are connected to the PLC controller 16, and the PLC controller 16 is used to control all Automatic valve opening and closing.
如图9所示,喷灯清洁前,人工安装所述软式导排气管77,软式导排气管设置开孔一78、开孔二79、开孔三89,开孔一78、开孔二79、开孔三89,且分别与包灯2灯口、芯灯3灯口、沉积腔体抽风管4管口无缝包裹,气密性较好。喷灯清理过程中,借助高压气体吹扫组合沉积腔体抽风管4的吸力在喷灯内外形成较大的压强差将粉体杂质吸出喷灯外部,进入废气回收部。然后,通过监控电脑15触发PLC控制器16,清扫气体供应柜21开始工作,通过调节浮子流量计流量和PLC控制器16控制所有自动阀开闭,实现不同流量的清扫气体逐个清洁包灯和芯灯内部各层空间的功能。As shown in Figure 9, before the blowtorch is cleaned, the soft guide and exhaust pipe 77 is manually installed. The soft guide and exhaust pipe is provided with opening 78, opening 79, and opening 89. Hole two 79 and opening three 89 are respectively seamlessly wrapped with the lamp socket of the lamp 2 lamp socket, the lamp socket of the core lamp 3, and the nozzle socket 4 of the deposition chamber exhaust pipe, and the air tightness is good. During the cleaning process of the torch, the suction force of the suction pipe 4 of the combined deposition chamber with high pressure gas is used to form a large pressure difference between the inside and outside of the torch to suck the powder impurities out of the torch and enter the exhaust gas recovery part. Then, the PLC controller 16 is triggered by the monitoring computer 15, and the cleaning gas supply cabinet 21 starts to work. By adjusting the flow of the float flowmeter and the PLC controller 16 to control all automatic valves to open and close, the cleaning gas of different flows can be cleaned one by one. The function of each layer of space inside the lamp.
在其中一个实施例中,沉积腔体抽风管4焊接于沉积腔体1侧面、正对所述包灯2和所述芯灯3。设备待机和生产时,沉积腔体抽风管4中抽风保持常开。In one of the embodiments, the exhaust pipe 4 of the deposition chamber is welded to the side of the deposition chamber 1 to face the package lamp 2 and the core lamp 3. When the equipment is in standby and in production, the exhaust in the exhaust duct 4 of the deposition chamber is kept normally open.
在其中一个实施例中,还包括生产原料气体供应柜一19和生产原料气体供应柜二20,喷灯生产过程中,生产原料气体供应柜一19和生产原料气体供应柜二20正常工作,生产工作结束后,喷灯进入清理过程。生产原料气体供应柜一20上设置生产原料气体第一进气管41、第二进气管46、第三进气管36、第四进气管51、第五进气管31,生产原料气体第一进气管41、第二进气管46、第三进气管51、第四进气管46、第五进气管31分别连通包灯第 一层进气管40、第二层进气管45、第三层进气管35、第四层进气管50、第五层进气管30,生产原料气体供应柜二20上设置生产原料气体第六进气管66、第七进气管71、第八进气管61、第九进气管76、第十进气管56,生产原料气体第六进气管66、第七进气管71、第八进气管61、第九进气管76、第十进气管56分别连通芯灯第一层进气管65、第二层进气管70、第三层进气管60、第四层进气管75、第五层进气管55。In one of the embodiments, it also includes production material gas supply cabinet 1 19 and production material gas supply cabinet 2 20. During the torch production process, production material gas supply cabinet 1 19 and production material gas supply cabinet 2 20 work normally, and the production is working. After the end, the blowtorch enters the cleaning process. The production raw gas supply cabinet 20 is provided with a first inlet pipe 41, a second inlet pipe 46, a third inlet pipe 36, a fourth inlet pipe 51, and a fifth inlet pipe 31 for production raw gas, and a first inlet pipe 41 for production raw gas , The second air inlet pipe 46, the third air inlet pipe 51, the fourth air inlet pipe 46, and the fifth air inlet pipe 31 respectively communicate with the first-layer air-intake pipe 40, the second-layer air-intake pipe 45, the third-layer air-intake pipe 35, and the second air-intake pipe. The fourth-layer intake pipe 50, the fifth-layer intake pipe 30, the production raw gas supply cabinet two 20 are provided with the sixth intake pipe 66, the seventh intake pipe 71, the eighth intake pipe 61, the ninth intake pipe 76, and the second raw gas supply cabinet 20. Ten air inlet pipe 56, which produces raw material gas. The sixth air inlet pipe 66, the seventh air inlet pipe 71, the eighth air inlet pipe 61, the ninth air inlet pipe 76, and the tenth air inlet pipe 56 respectively communicate with the core lamp first layer air inlet pipe 65 and the second air inlet pipe. Layer intake pipe 70, third layer intake pipe 60, fourth layer intake pipe 75, fifth layer intake pipe 55.
在其中一个实施例中,所述VAD包灯和所述VAD芯灯材质选用GE-214石英。In one of the embodiments, the material of the VAD package lamp and the VAD core lamp is GE-214 quartz.
在其中一个实施例中,所述软式导排气管77材质选用PVC钢丝伸缩软管,具备良好弹性性能,安装轻便,可拆卸。In one of the embodiments, the soft guide and exhaust pipe 77 is made of PVC steel wire telescopic hose, which has good elasticity, is easy to install, and is detachable.
在其中一个实施例中,清扫气体供应柜主管22和所有清扫气体支管材质选用316不锈钢,所有喷灯进气管和所有生产原料气体进气管选用特氟龙材质。清扫气体供应柜主管22孔径1/2英寸,所有清扫气体支管孔径1/4英寸,所有喷灯进气管孔径3/8英寸。In one of the embodiments, the main pipe 22 of the cleaning gas supply cabinet and all the cleaning gas branch pipes are made of 316 stainless steel, and all the blowtorch air inlet pipes and all the production raw gas inlet pipes are made of Teflon. The main pipe of the cleaning gas supply cabinet has a diameter of 1/2 inch, the diameter of all cleaning gas branch pipes is 1/4 inch, and the diameter of all blowtorch air inlet pipes is 3/8 inch.
本发明还公开一种VAD喷灯清洁装置的清洁方法,该方法包含如下步骤:The invention also discloses a cleaning method of a VAD blowtorch cleaning device, the method includes the following steps:
(a)喷灯清洁准备工作1:VAD沉积结束后,第十三自动阀17和第十四自动阀20自动关闭,操作人员将SOOT体从沉积腔体1取走,然后安装软式导排气管77,将弹性开孔一78、开孔二79、开孔三89分别与包灯2灯口、芯灯3灯口、沉积腔体抽风管4管口无缝包裹;(a) Blowtorch cleaning preparation 1: After the VAD deposition is completed, the thirteenth automatic valve 17 and the fourteenth automatic valve 20 are automatically closed, and the operator removes the SOOT body from the deposition chamber 1, and then installs a soft guide exhaust Tube 77, seamlessly wrap the elastic opening 78, opening 2 79, and opening 3 89 with the lamp socket of the lamp 2, the lamp socket of the core lamp 3, and the nozzle of the deposition chamber exhaust pipe 4 respectively;
(b)喷灯清洁准备工作2:打开N2供应柜主管调压阀23,调节调压阀,N2供应柜压力0.3Mpa,调节第一浮子流量计24,控制N2供应柜主管流量F1:100~150SLM,通过监控电脑15触发PLC控制器16依次同步打开第一自动阀25和第二自动阀26;(b) Blowtorch cleaning preparation 2: Open the N2 supply tank main pressure regulator valve 23, adjust the pressure regulator, the N2 supply tank pressure 0.3Mpa, adjust the first float flowmeter 24, control the N2 supply tank main flow F1: 100 ~ 150SLM , The PLC controller 16 is triggered by the monitoring computer 15 to open the first automatic valve 25 and the second automatic valve 26 synchronously in sequence;
(c)N2流量调节:如图7、图8和表1所示,喷灯内部各层空间体积不一样,理论上不同层数需要匹配不同的吹扫流量。(c) N2 flow adjustment: As shown in Figure 7, Figure 8 and Table 1, the volume of each layer inside the torch is different. In theory, different layers need to match different purge flows.
Figure PCTCN2020126184-appb-000001
Figure PCTCN2020126184-appb-000001
如表2所示,喷灯内部各层空间吹扫流量设定值正比于喷灯内部各层空间体积;As shown in Table 2, the setting value of the purge flow of each layer of space inside the torch is proportional to the volume of each layer of space inside the torch;
Figure PCTCN2020126184-appb-000002
Figure PCTCN2020126184-appb-000002
Figure PCTCN2020126184-appb-000003
Figure PCTCN2020126184-appb-000003
(d)PLC控制器16工作:通过监控电脑15触发PLC控制器16,如表3所示,PLC控制器16响应后分别在时间T1:1~5s(秒)、T2:10~15s、T3:15~25s、T4:20~35s、T5:25~45s、T6:30~55s、T7:35~65s、T8:40~75s、T9:45~85s、T10:60~100s、T11:100~120s后同步开闭自动阀,如图4所示为N2从供应柜进入喷灯接气管的流向,喷灯内部各层清洁过程按照步骤①-
Figure PCTCN2020126184-appb-000004
依次进行;
(d) The PLC controller 16 works: the PLC controller 16 is triggered by the monitoring computer 15. As shown in Table 3, the PLC controller 16 responds at time T1:1~5s (seconds), T2:10~15s, T3 : 15~25s, T4: 20~35s, T5: 25~45s, T6: 30~55s, T7: 35~65s, T8: 40~75s, T9: 45~85s, T10: 60~100s, T11:100 After ~120s, the automatic valve is opened and closed synchronously. As shown in Figure 4, the flow direction of N2 from the supply cabinet into the blowtorch air pipe. The cleaning process of each layer inside the blowtorch is in accordance with step ①-
Figure PCTCN2020126184-appb-000004
Proceed in sequence
注:表中自动阀标记0指代打开,自动阀标记1指代关闭。Note: In the table, the automatic valve mark 0 refers to open, and the automatic valve mark 1 refers to closed.
(e)依次同步关闭第一自动阀25和第二自动阀26,拆卸软式导排气管77,将喷灯灯口用塑料灯罩密封,防止粉体杂质二次掉落喷灯内部,整个喷灯清洁工作结束;(e) Close the first automatic valve 25 and the second automatic valve 26 synchronously in sequence, disassemble the soft guide and exhaust pipe 77, and seal the blowtorch lamp port with a plastic lampshade to prevent powder impurities from falling inside the blowtorch, and the entire blowtorch is clean End of work;
(f)喷灯正常用于SOOT体的沉积,制备光纤预制棒芯棒;(f) The torch is normally used for the deposition of the SOOT body to prepare the core rod of the optical fiber preform;
(g)后期生产过程中,待VAD喷灯内部各层空间达到清扫标准,清扫气体主管和支管上浮子流量计的流量大小维持不变。(g) In the later production process, when the space inside each layer of the VAD burner reaches the cleaning standard, the flow rate of the float flowmeter on the cleaning gas main and branch pipes remains unchanged.
本发明还提供若干具体实施情景。The invention also provides several specific implementation scenarios.
Figure PCTCN2020126184-appb-000005
Figure PCTCN2020126184-appb-000005
具体实施情景1:Specific implementation scenario 1:
(a)VAD沉积结束后,第十三自动阀和第十四自动阀自动关闭,操作人员将SOOT体从沉积腔体取走,然后安装软式导排气管,将弹性开孔一、开孔二、开孔三分别与包灯灯口、芯灯灯口、沉积腔体抽风管管口无缝包裹;(a) After the completion of VAD deposition, the thirteenth automatic valve and the fourteenth automatic valve are automatically closed. The operator removes the SOOT body from the deposition chamber, and then installs a soft exhaust pipe to open the elastic opening. Hole two and opening three are seamlessly wrapped with the lamp socket of the lamp, the lamp socket of the core lamp, and the nozzle of the exhaust pipe of the deposition chamber respectively;
(b)打开N2供应柜主管调压阀,手动调节第一浮子流量计,控制N2供应柜主管流量F1:120SLM,通过监控电脑触发PLC控制器依次同步打开第一自动阀和第二自动阀;(b) Open the N2 supply tank main pressure regulating valve, manually adjust the first float flowmeter, control the N2 supply tank main flow F1: 120SLM, and trigger the PLC controller to open the first automatic valve and the second automatic valve synchronously in sequence through the monitoring computer;
(c)如表4和表5所示,为喷灯内部各层N2清扫流量、清扫时间和喷灯各层数清洁次序;(c) As shown in Table 4 and Table 5, it is the N2 cleaning flow rate, cleaning time and cleaning sequence of each layer of the torch inside the torch;
(d)依次同步关闭第一自动阀和第二自动阀,拆卸软式导排气管,将喷灯灯口用塑料灯罩密封,整个喷灯清洁工作结束;(d) Close the first automatic valve and the second automatic valve synchronously in sequence, disassemble the soft guide and exhaust pipe, seal the blowtorch lamp port with a plastic lampshade, and the entire blowtorch cleaning work is over;
(e)喷灯正常用于SOOT体的沉积,制备光纤预制棒芯棒。(e) The torch is normally used for the deposition of the SOOT body to prepare the core rod of the optical fiber preform.
对比传统的清洁方法,芯灯使用2个月开始出现轻微结垢现象,使用3~4个月结垢比较严重,使用5个月时需要氢氟酸酸洗结垢部位。VAD喷灯经过本发明装置和清洁方法清洁后,包灯和芯灯内层结垢的速率大大减缓,芯灯使用6个月后出现轻微结构现象,使用10~11个月结垢比较严重,使用12个月时需要氢氟酸酸洗结垢部位。Compared with the traditional cleaning method, the core lamp starts to show a slight scaling phenomenon after 2 months of use, and the scaling is more serious after 3 to 4 months of use. Hydrofluoric acid is required to pickle the scaled parts after 5 months of use. After the VAD blowtorch is cleaned by the device and cleaning method of the present invention, the rate of fouling in the inner layer of the lamp and the core lamp is greatly reduced. The core lamp has a slight structural phenomenon after 6 months of use. The fouling is more serious after 10 to 11 months of use. At 12 months, hydrofluoric acid is required to pickle the fouled parts.
Figure PCTCN2020126184-appb-000006
Figure PCTCN2020126184-appb-000006
Figure PCTCN2020126184-appb-000007
Figure PCTCN2020126184-appb-000007
Figure PCTCN2020126184-appb-000008
Figure PCTCN2020126184-appb-000008
Figure PCTCN2020126184-appb-000009
Figure PCTCN2020126184-appb-000009
具体实施情景2:Specific implementation scenario 2:
(a)VAD沉积结束后,第十三自动阀和第十四自动阀自动关闭,操作人员将SOOT体从沉积腔体取走,然后安装软式导排气管,将弹性开孔一、开孔二、开孔三分别与包灯灯口、芯灯灯口、沉积腔体抽风管管口无缝包裹;(a) After the completion of VAD deposition, the thirteenth automatic valve and the fourteenth automatic valve are automatically closed. The operator removes the SOOT body from the deposition chamber, and then installs a soft exhaust pipe to open the elastic opening. Hole two and opening three are seamlessly wrapped with the lamp socket of the package lamp, the lamp socket of the core lamp, and the nozzle of the exhaust pipe of the deposition chamber;
(b)打开N2供应柜主管调压阀,手动调节第一浮子流量计,控制N2供应柜主管流量F1:100SLM,通过监控电脑触发PLC控制器依次同步打开第一自动阀和第二自动阀;(b) Open the N2 supply cabinet main pressure regulating valve, manually adjust the first float flowmeter, control the N2 supply cabinet main flow F1:100SLM, and trigger the PLC controller to open the first automatic valve and the second automatic valve synchronously in sequence through the monitoring computer;
(c)如表6和表7所示,为喷灯内部各层N2清扫流量、清扫时间和喷灯各层数清洁次序;(c) As shown in Table 6 and Table 7, it is the N2 cleaning flow rate, cleaning time and cleaning sequence of each layer of the torch inside each layer of the torch;
(d)依次同步关闭第一自动阀和第二自动阀,拆卸软式导排气管,将喷灯灯口用塑料灯罩密封,整个喷灯清洁工作结束;(d) Close the first automatic valve and the second automatic valve synchronously in sequence, disassemble the soft guide and exhaust pipe, seal the blowtorch lamp port with a plastic lampshade, and complete the cleaning of the blowtorch;
(e)喷灯正常用于SOOT体的沉积,制备光纤预制棒芯棒。(e) The torch is normally used for the deposition of the SOOT body to prepare the core rod of the optical fiber preform.
VAD喷灯经过传统的清洁方法下制备的光纤预制棒芯棒包层2~3个月左右开始出现较多气泡,气泡个数2~5,芯层3~4个月左右开始出现较多气泡,气泡个数3~5。对比传统的清洁方法,VAD喷灯经过本发明装置和清洁方法清洁后制备的光纤预制棒芯棒出现较多气泡现象得到有效遏制,芯棒包层8~10个月左右开始出现较多气泡,气泡个数2~4,芯层10~12个月左右开始出现较多气泡,气泡个数1~4。VAD blowtorch prepared by the traditional cleaning method, the fiber preform core rod cladding began to appear more bubbles in about 2 to 3 months, the number of bubbles was 2 to 5, and the core layer began to appear more bubbles in about 3 to 4 months. The number of bubbles is 3~5. Compared with the traditional cleaning method, the fiber preform mandrel produced by the VAD blowtorch cleaned by the device and cleaning method of the present invention has more air bubbles, and the phenomenon of more air bubbles starting to appear in the core rod cladding about 8 to 10 months. The number is 2 to 4. The core layer starts to appear more bubbles in about 10 to 12 months, and the number of bubbles is 1 to 4.
Figure PCTCN2020126184-appb-000010
Figure PCTCN2020126184-appb-000010
Figure PCTCN2020126184-appb-000011
Figure PCTCN2020126184-appb-000011
具体实施情景3:Specific implementation scenario 3:
(a)VAD沉积结束后,第十三自动阀和第十四自动阀自动关闭,操作人员将SOOT体从沉积腔体取走,然后安装软式导排气管,将弹性开孔一、开孔二、开孔三分别与包灯灯口、芯灯灯口、沉积腔体抽风管管口无缝包裹;(a) After the completion of VAD deposition, the thirteenth automatic valve and the fourteenth automatic valve are automatically closed. The operator removes the SOOT body from the deposition chamber, and then installs a soft exhaust pipe to open the elastic opening. Hole two and opening three are seamlessly wrapped with the lamp socket of the lamp, the lamp socket of the core lamp, and the nozzle of the exhaust pipe of the deposition chamber respectively;
(b)打开N2供应柜主管调压阀,手动调节第一浮子流量计,控制N2供应柜主管流量F1:150SLM,通过监控电脑触发PLC控制器依次同步打开第一自动阀和第二自动阀;(b) Open the N2 supply cabinet main pressure regulating valve, manually adjust the first float flowmeter, control the N2 supply cabinet main flow F1: 150SLM, and trigger the PLC controller to open the first automatic valve and the second automatic valve synchronously in sequence through the monitoring computer;
(c)如表8和表9所示,为喷灯内部各层N2清扫流量、清扫时间和喷灯各层数清洁次序;(c) As shown in Table 8 and Table 9, it is the N2 cleaning flow rate, cleaning time and cleaning sequence of each layer of the torch inside the torch;
(d)依次同步关闭第一自动阀和第二自动阀,拆卸软式导排气管,将喷灯灯口用塑料灯罩密封,整个喷灯清洁工作结束;(d) Close the first automatic valve and the second automatic valve synchronously in sequence, disassemble the soft guide and exhaust pipe, seal the blowtorch lamp port with a plastic lampshade, and complete the cleaning of the blowtorch;
(e)喷灯正常用于SOOT体的沉积,制备光纤预制棒芯棒。(e) The torch is normally used for the deposition of the SOOT body to prepare the core rod of the optical fiber preform.
如图10本发明实施例与传统清洁方法清洁喷灯制备光纤预制棒芯棒折射率剖面对比图所示,本发明实施例下,VAD连续生产4个月和8个月后的芯棒光学参数比较理想,符合单模光纤的设计要求。例如,折射率剖面都明显优于传统方法清洁下VAD连续生产4个月后的芯棒折射率剖面。Figure 10 shows the comparison of the refractive index profile of the optical fiber preform mandrel produced by the embodiment of the present invention and the traditional cleaning method to clean the blowtorch. Under the embodiment of the present invention, the comparison of the optical parameters of the mandrel after 4 months and 8 months of continuous production of VAD Ideal and meet the design requirements of single-mode fiber. For example, the refractive index profile is significantly better than the refractive index profile of the core rod after 4 months of continuous production of VAD under the cleaning of the traditional method.
Figure PCTCN2020126184-appb-000012
Figure PCTCN2020126184-appb-000012
Figure PCTCN2020126184-appb-000013
Figure PCTCN2020126184-appb-000013
Figure PCTCN2020126184-appb-000014
Figure PCTCN2020126184-appb-000014
Figure PCTCN2020126184-appb-000015
Figure PCTCN2020126184-appb-000015
Figure PCTCN2020126184-appb-000016
Figure PCTCN2020126184-appb-000016
本行业的技术人员应该了解,本发明不受上述实施例的限制,上述实施例和说明书中描述的只是说明本发明的原理,在不脱离本发明精神和范围的前提下,本发明还会有各种变化和改进,这些变化和改进都落入要求保护的本发明范围内。本发明要求保护范围由所附的权利要求书及其等效物界定。Those skilled in the industry should understand that the present invention is not limited by the above-mentioned embodiments. The above-mentioned embodiments and descriptions only illustrate the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have Various changes and improvements fall within the scope of the claimed invention. The scope of protection claimed by the present invention is defined by the appended claims and their equivalents.

Claims (10)

  1. 一种VAD喷灯清洁装置,其特征在于,包括:A VAD blowtorch cleaning device, which is characterized in that it comprises:
    清扫气体供应装置,用于产生和排出喷灯清洁用的气体;Sweeping gas supply device, used to generate and discharge the gas used for cleaning the blowtorch;
    进气管路切换机构,具有两个进气端,一个出气端,用于选择切换打开两个进气端的其中一个管路,并关闭另一个管路;所述进气管路切换机构的其中一个进气端用于连接原料进气管;The air inlet pipe switching mechanism has two air inlet ends and one air outlet, which is used to selectively switch to open one of the two air inlet ends and close the other pipe; one of the air inlet pipe switching mechanisms has an inlet The gas end is used to connect the raw material intake pipe;
    喷灯组进气管,一端连接所述进气管路切换机构的出气端,另一端连接喷灯组进气端;One end of the blower group air inlet pipe is connected to the air outlet end of the air intake pipe switching mechanism, and the other end is connected to the blower group air inlet end;
    清扫气体支管,一端连接所述清扫气体供应装置,另一端连接进气管路切换机构的另一个进气端;The sweeping gas branch pipe has one end connected to the sweeping gas supply device, and the other end connected to the other intake end of the intake pipe switching mechanism;
    沉积腔体抽风管,设置在喷灯组的排气端,用于将粉体杂质吸出喷灯组外部。The deposition chamber exhaust pipe is arranged at the exhaust end of the blowtorch group, and is used to suck powder impurities out of the blowtorch group.
  2. 根据权利要求1所述的VAD喷灯清洁装置,其特征在于,所述进气管路切换机构包括:The VAD torch cleaning device according to claim 1, wherein the intake pipe switching mechanism comprises:
    三通管,所述三通管具有两个进气端,一个出气端;A three-way pipe, the three-way pipe has two inlet ends and one outlet end;
    自动阀,设置在所述原料进气管和所述清扫气体支管处,所述自动阀能够控制管路的开、闭。An automatic valve is arranged at the raw material intake pipe and the cleaning gas branch pipe, and the automatic valve can control the opening and closing of the pipeline.
  3. 根据权利要求2所述的VAD喷灯清洁装置,其特征在于,所述沉积腔体抽风管,焊接于沉积腔体侧面、正对所述喷灯组的排气端,所述沉积腔体抽风管通过软式导排气管密封连接所述喷灯组的排气端,所述软式导排气管能够拆卸。The VAD blowtorch cleaning device according to claim 2, wherein the deposition chamber exhaust pipe is welded to the side of the deposition chamber and faces the exhaust end of the blowtorch group, and the deposition chamber is exhausted. The pipe is connected to the exhaust end of the burner group in a sealed manner through a soft guide and exhaust pipe, and the soft guide and exhaust pipe can be disassembled.
  4. 根据权利要求1-3任一项所述的VAD喷灯清洁装置,其特征在于,所述喷灯组由一只包灯和一只芯灯组成,所述包灯和所述芯灯均为多层结构,每层都有独立的进气端;所述进气管路切换机构、所述喷灯组进气管、所述清扫气体支管均对应所述包灯和所述芯灯的每一层设置。The VAD blowtorch cleaning device according to any one of claims 1 to 3, wherein the blowtorch group is composed of a package lamp and a core lamp, and the package lamp and the core lamp are both multilayered In the structure, each layer has an independent air inlet end; the air inlet pipe switching mechanism, the blower group air inlet pipe, and the cleaning gas branch pipe are arranged corresponding to each layer of the package lamp and the core lamp.
  5. 根据权利要求4所述的VAD喷灯清洁装置,其特征在于,所述清扫气体供应装置上分别设置有调压阀、流量计、自动阀和压力表;每个清扫气体支管上设有单独的流量计和自动阀。The VAD blowtorch cleaning device according to claim 4, wherein the cleaning gas supply device is respectively provided with a pressure regulating valve, a flow meter, an automatic valve and a pressure gauge; each cleaning gas branch pipe is provided with a separate flow rate Meter and automatic valve.
  6. 根据权利要求5所述的VAD喷灯清洁装置,其特征在于,还包括可编程逻辑控制器,所述清扫气体供应装置与所述可编程逻辑控制器相连,所述可编程逻辑控制器用于控制所有自动阀的开闭。The VAD torch cleaning device according to claim 5, further comprising a programmable logic controller, the cleaning gas supply device is connected to the programmable logic controller, and the programmable logic controller is used to control all Automatic valve opening and closing.
  7. 一种VAD喷灯清洁装置的清洁方法,其特征在于:包括以下步骤:A method for cleaning a VAD blowtorch cleaning device, which is characterized in that it comprises the following steps:
    S1,控制生产原料气体供应柜停止工作;S1, control the production of raw material gas supply cabinet to stop working;
    S2,安装软式导排气管,将软式导排气管一端连接到喷灯组的排气端,另一端连接到沉积腔体抽风管;S2, install the soft guide and exhaust pipe, connect one end of the soft guide and exhaust pipe to the exhaust end of the burner group, and the other end to the exhaust pipe of the deposition chamber;
    S3,控制生产原料气体供应柜的原料进气管上的自动阀关闭,控制清扫气体供应装置上的自动阀打开,并启动清扫气体供应装置向喷灯组通入清扫气体,同时控制沉积腔体抽风管一端开始抽气,将喷灯组内的粉体杂质吸出喷灯外部,进入废气回收部。S3, control the automatic valve on the raw material inlet pipe of the production raw gas supply cabinet to close, control the automatic valve on the purge gas supply device to open, and start the purge gas supply device to pass the purge gas to the burner group, and at the same time control the exhaust of the deposition chamber One end of the tube starts to pump air, sucking the powder impurities in the blowtorch group out of the blowtorch, and enters the exhaust gas recovery part.
  8. 根据权利要求7所述的VAD喷灯清洁装置的清洁方法,其特征在于:在步骤S3中,采用可编程逻辑控制器控制所有自动阀的开闭。8. The cleaning method of the VAD torch cleaning device according to claim 7, characterized in that: in step S3, a programmable logic controller is used to control the opening and closing of all automatic valves.
  9. 根据权利要求8所述的VAD喷灯清洁装置的清洁方法,其特征在于:在步骤S3中,通过可编程逻辑控制器控制各个自动阀按顺序打开一段设定的时间后关闭。The cleaning method of the VAD torch cleaning device according to claim 8, characterized in that: in step S3, the programmable logic controller controls each automatic valve to open sequentially for a set period of time and then close.
  10. 根据权利要求9所述的VAD喷灯清洁装置的清洁方法,其特征在于:在步骤S3之前,设定喷灯内部各层空间吹扫流量正比于喷灯内部各层空间体积,并在步骤S3中通过调节流量计以调节喷灯内部各层实际的流量。The cleaning method of the VAD torch cleaning device according to claim 9, characterized in that: before step S3, the purge flow rate of each layer of space inside the torch is set to be proportional to the volume of each layer of space inside the torch, and in step S3, it is adjusted Flow meter to adjust the actual flow rate of each layer inside the torch.
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