WO2021184717A1 - Method for manufacturing electrically-controlled fiber grating - Google Patents

Method for manufacturing electrically-controlled fiber grating Download PDF

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Publication number
WO2021184717A1
WO2021184717A1 PCT/CN2020/117471 CN2020117471W WO2021184717A1 WO 2021184717 A1 WO2021184717 A1 WO 2021184717A1 CN 2020117471 W CN2020117471 W CN 2020117471W WO 2021184717 A1 WO2021184717 A1 WO 2021184717A1
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Prior art keywords
fiber grating
grating
material layer
electromagnetic induction
fiber
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PCT/CN2020/117471
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French (fr)
Chinese (zh)
Inventor
刘申
王义平
赵媛媛
罗俊贤
陈燕苹
杨勇
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深圳大学
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Publication of WO2021184717A1 publication Critical patent/WO2021184717A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02Optical fibres with cladding with or without a coating
    • G02B6/02057Optical fibres with cladding with or without a coating comprising gratings
    • G02B6/02076Refractive index modulation gratings, e.g. Bragg gratings
    • G02B6/02123Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating

Definitions

  • the invention relates to optical fiber sensing technology, in particular to a method for preparing an electrically controlled optical fiber grating.
  • Fiber grating has the advantages of small size, low splicing loss, full compatibility with optical fibers, and ability to embed smart materials, and its resonance wavelength is sensitive to changes in the external environment such as temperature, strain, refractive index, and concentration. Therefore, it is used in optical fiber communication and The sensing field has been widely used.
  • the existing fiber grating preparation methods mainly include CO2 laser etching, arc discharge, HF wet etching, periodic deformation, amplitude masking, and femtosecond laser direct writing.
  • the typical processing methods are as follows:
  • CO2 laser etching method a single laser pulse passes through a focusing mirror and irradiates the fiber, and an imaging system is set up on the fiber to observe whether the light is deformed during the grating writing process.
  • the grating is written point by point by a single-sided laser, and is controlled by a switch
  • the on-off of the laser after irradiating one position, move the position of the fiber axially to write the next grating area.
  • This writing technology has obvious advantages. It does not need to increase the sensitivity of the optical fiber.
  • the laser movement track can be conveniently controlled by the computer. However, there are certain defects. During the writing process, the computer operates the on and off of the laser and the displacement of the optical fiber, which makes it difficult to ensure the focused laser. The accuracy of each alignment between the light spot and the optical fiber is not conducive to the stability and consistency of grating writing.
  • Amplitude mask method The key to this method is the amplitude reticle.
  • the ultraviolet light passes through the amplitude reticle to expose the optical fiber laterally, it can induce periodic refractive index changes inside the optical fiber to form a long-period grating structure. Since the period of the long-period fiber grating is relatively large, the manufacturing accuracy of the reticle can be ensured, and it is easy to obtain a grating with high consistency that meets the spectral requirements. Therefore, this method has been used and is in the mainstream of the manufacturing process. However, this method also has many disadvantages. First, photosensitive fiber must be used, and the finished product must be unstable at high temperature. Annealing treatment must be adopted for LPG to ensure that it can be used at high temperature. The cycle is fixed, and there is no way to flexibly adjust the cycle length according to the demand, which greatly increases the preparation cost.
  • Femtosecond laser direct writing method The focal point of the femtosecond laser focused by the objective lens is incident into the germanium-doped fiber core, the refractive index of the area irradiated by the laser will increase, and the parallel movement of the fiber will form a periodicity inside the glass The waveguide structure. Using femtosecond lasers to write fiber gratings directly, no phase (amplitude) mask is needed. Any type of fiber grating can be prepared by controlling the relative position of the spot focus on the fiber core, but it is used to prepare long periodicity. The fiber grating process is very complicated, difficult to operate, and costly.
  • the present invention provides a method for preparing an electronically controlled fiber grating system, which does not need to use expensive equipment, greatly saves equipment costs, and simplifies the preparation process. It can be heated in a magnetic field, and the safety factor is greatly improved.
  • the writing spectrum of the fiber grating can be modulated in real time, the yield rate is higher, and the preparation time is controllable, which is conducive to mass production, and the fiber grating components can be recycled and reused for preparation. Different fiber gratings.
  • a method for preparing an electronically controlled fiber grating includes the following steps:
  • Step S1 pre-processing the optical fiber to form an electromagnetic induction material layer on the normal position grating modulation area distributed along the axial direction of the optical fiber to form a fiber grating element;
  • Step S2 Use an alternating magnetic field to interact with the electromagnetic induction material layer to heat the electromagnetic induction material layer to heat the normal grating modulation area of the optical fiber to change the refraction of the normal grating modulation area Rate, forming a fiber grating.
  • the preparation method uses electromagnetic induction material layers with different distribution laws to perform electromagnetic induction, and different fiber gratings can be prepared without the use of expensive equipment, which greatly saves equipment costs and simplifies the preparation process.
  • Fiber grating components can only be heated when placed in an alternating magnetic field. The safety factor is greatly improved.
  • the writing spectrum of fiber gratings can be modulated in real time, yielding higher yields, and controllable preparation time, which is conducive to mass production and can be recycled. Reuse.
  • Fig. 1 is a block diagram of the steps of the method for preparing the electronically controlled fiber grating provided by the present invention
  • FIG. 2 is a schematic diagram of a fiber grating element of a long-period fiber grating provided by the present invention
  • Fig. 3 is a transmission spectrum diagram of the long-period fiber grating shown in Fig. 2;
  • FIG. 4 is a schematic diagram of a fiber grating element of a short-period fiber grating provided by the present invention.
  • Fig. 5 is a reflection spectrum diagram of the short-period fiber grating shown in Fig. 4;
  • FIG. 6 is a schematic diagram of a fiber grating element of aperiodic fiber grating provided by the present invention.
  • FIG. 7 is a reflection spectrum diagram of the aperiodic fiber grating shown in FIG. 6;
  • FIG. 8 is a schematic diagram of the preparation system of the electronically controlled fiber grating provided by the present invention.
  • Fig. 9 is a schematic diagram of another preparation system of an electrically controlled fiber grating provided by the present invention.
  • FIG. 10 is a block diagram of the steps of the preprocessing method of the electronically controlled fiber grating provided by the present invention.
  • FIG. 11 is a block diagram of step S1.2 in the preprocessing method of the electronically controlled fiber grating shown in FIG. 10;
  • FIG. 12 is a block diagram of another step S1.2 in the preprocessing method of the electronically controlled fiber grating shown in FIG. 10;
  • FIG. 13 is a block diagram of another step S1.2 in the preprocessing method of the electronically controlled fiber grating shown in FIG. 10.
  • a method for preparing an electronically controlled fiber grating includes the following steps:
  • Step S1 preprocessing the optical fiber 11 to form an electromagnetic induction material layer 12 on the normal position grating modulation area distributed along the axial direction of the optical fiber 11 to form the optical fiber grating element 1.
  • the electromagnetic induction material layer 12 can be made of metals such as iron, nickel, cobalt, or oxides or alloys containing such metals, such as iron oxide, silicon steel, stainless steel, iron-cobalt alloy, nickel-cobalt alloy, etc. Such metals, metal oxides and alloys not only have good electrical conductivity, but also good magnetic permeability. In addition, rare earths or oxides or alloys containing rare earths can also be used to make the electromagnetic induction material layer 12.
  • Step S2 Use an alternating magnetic field to interact with the electromagnetic induction material layer 12 to cause the electromagnetic induction material layer 12 to generate heat to heat the normal position grating modulation area of the optical fiber 11 to change the normal position grating modulation The refractive index of the region, forming a fiber grating.
  • step S2 when the alternating magnetic field acts on the electromagnetic induction material layer 12, based on the principle of electromagnetic induction, a current eddy current can be formed inside the electromagnetic induction material layer 12, and the current eddy current has a thermal effect.
  • the electromagnetic induction material layer 12 is heated, and based on the photothermal effect of the optical fiber, the refractive index of the normal position grating modulation area changes under the heating of the electromagnetic induction material layer 12 to form the optical fiber grating.
  • the preparation method further includes:
  • Step S3 modulate the real-time writing spectrum of the fiber grating to a required writing spectrum by controlling the alternating magnetic field.
  • the purpose of controlling the alternating magnetic field can be achieved by controlling the alternating current that generates the alternating magnetic field.
  • the current and voltage intensity and alternating frequency of the alternating current respectively correspond to the alternating current.
  • the magnetic field strength and alternating frequency of the magnetic field jointly determine the heat generation of the electromagnetic induction material layer 12, thereby determining the grating modulation amount of the normal position grating modulation area, that is, the resonant peak wavelength and loss peak of the fiber grating
  • the preparation and modulation time is negatively related to the current and voltage intensity and alternating frequency of the alternating current. The greater the current and voltage intensity and the alternating frequency of the alternating current, the longer the preparation and modulation time of the fiber grating Less, and vice versa, the greater.
  • the resonant peak wavelength and loss peak of the fiber grating can be modulated by controlling the current and voltage intensity and/or alternating frequency of the alternating current (that is, the magnetic field intensity and/or alternating frequency of the alternating magnetic field). At least one of intensity and preparation time.
  • step S3 the step of modulating the real-time writing spectrum of the fiber grating to the required writing spectrum is as follows:
  • Step S3.1 Couple a detection beam into the fiber grating element 1.
  • the detection beam coupled into the fiber grating element 1 is preferably a super-continuous broadband beam, and its detection spectrum continuously covers a larger wavelength range.
  • Step S3.2 receiving the light beam transmitted or reflected from the fiber grating element 1 to obtain the real-time writing spectrum of the fiber grating.
  • step S3.2 during the transmission process of the detection beam in the fiber grating element 1, when the detection beam passes through the normal position grating modulation area, a part of the detection beam will be reflected by the fiber grating and return to the original path, forming Reflect the beam to obtain a reflection spectrum, another part of the detection beam can be transmitted through the fiber grating to continue forward to form a transmission beam to obtain a transmission spectrum, wherein the reflection spectrum and the transmission spectrum are complementary, and the complementary constitutes step S3.
  • 1 is the spectrum of the detection beam coupled into the fiber grating element 1.
  • the real-time writing spectrum and the required writing spectrum of the fiber grating can be represented by the reflection spectrum or the transmission spectrum.
  • Step S3.3 Control the alternating magnetic field, and modulate the real-time writing spectrum of the fiber grating to the required writing spectrum.
  • step S3.3 the real-time writing spectrum of the fiber grating is compared with the required writing spectrum, if they are the same, the modulation ends, and if they are different, the alternating magnetic field is controlled to change, and step S3 is repeated. .1-S3.3, until the real-time writing spectrum of the fiber grating is the same as the required writing spectrum, the modulation is ended.
  • the fiber grating Since the refractive index of the normal grating modulation area changes with its temperature, the fiber grating is non-permanent. When the alternating magnetic field is removed, the temperature of the normal grating modulation area returns to normal Later, the fiber grating will also disappear, and the fiber grating element 1 is equivalent to an ordinary optical fiber. Therefore, before each use, the fiber grating element 1 needs to be modulated to have all the characteristics of the fiber grating element 1 through steps S2 and S3.
  • the optical fiber grating of the spectrum needs to be written, and the alternating magnetic field cannot be removed during use.
  • the optical fiber grating needs to be modulated while being used to avoid the temperature change in the modulation area of the normal position grating causing the real-time optical fiber grating.
  • the writing spectrum has deviated.
  • the preparation method can produce long-period fiber gratings, short-period fiber gratings or non-periodic fiber gratings.
  • the long-periodity is first calculated using the phase matching formula
  • the position of the resonant wavelength of the fiber grating to determine the position of the normal position grating modulation area periodically distributed along the axial direction of the optical fiber 11, and then the N method periodically distributed along the axial direction of the optical fiber 11 at 0.5 mm
  • the electromagnetic induction material layer 12 is fabricated on the position grating modulation area to obtain the fiber grating element 1, and then the alternating magnetic field is used to interact with the electromagnetic induction material layer 12 to perform the processing on the normal position grating modulation area.
  • the heating causes the fiber grating element 1 to form a long-period fiber grating, and finally the real-time writing spectrum of the long-period fiber grating is modulated into a transmission spectrum as shown in FIG. 3.
  • the short period is first calculated using the phase matching formula
  • the resonant wavelength position of the optical fiber grating is used to determine the position of the normal position grating modulation area periodically distributed along the axial direction of the optical fiber 11, and then the N number periodically distributed along the axial direction of the optical fiber 11 at 0.1 mm
  • the electromagnetic induction material layer 12 is fabricated on the normal position grating modulation area to obtain the fiber grating element 1, and then the alternating magnetic field is used to interact with the electromagnetic induction material layer 12 to affect the normal position grating modulation area Heating is performed to make the fiber grating element 1 form a short-period fiber grating, and finally the real-time writing spectrum of the short-period fiber grating is modulated into a reflection spectrum as shown in FIG. 5.
  • the fiber grating is a non-periodic fiber grating
  • the aperiodic grating pitch is ⁇ 1, ⁇ 2, ... ⁇ n
  • the grating order is N, and the same
  • the electromagnetic induction material layer 12 is fabricated on the N normal grating modulation regions with a non-periodically distributed pitch of ⁇ 1, ⁇ 2,... ⁇ n in the axial direction of the optical fiber 11 to obtain the fiber grating element 1, and then use the
  • the alternating magnetic field acts on the electromagnetic induction material layer 12 to heat the normal position grating modulation area to make the fiber grating element 1 form a non-periodic fiber grating, and finally the non-periodic fiber grating is real-time
  • the writing spectrum is
  • a pretreatment method for electronically controlled fiber gratings which can be used as step S1 of the preparation method described in the first embodiment, includes the following steps:
  • Step S1.1 According to the phase matching formula, determine the position of the normal position grating modulation area of the required fiber grating distributed along the axial direction of the optical fiber 11.
  • the resonance peak position of the corresponding fiber grating can be calculated.
  • the phase matching formula is common knowledge in the art, so this embodiment only uses a short-period grating fiber for the following description:
  • the central reflection wavelength ⁇ B of the required fiber grating can be calculated, and conversely, after determining the required fiber grating In the case of the central reflection wavelength ⁇ B , the relationship between the grating period ⁇ of the required fiber grating and the grating order m can be calculated.
  • Step S1.2 forming an electromagnetic induction material layer 12 on the normal position grating modulation area of the optical fiber 11 distributed along the axial direction.
  • step S1.2 includes the following steps:
  • Step S1.2.1 making an insulating and heat-insulating material layer on the surface of the optical fiber 11.
  • the insulating and heat-insulating material layer can be, but not limited to, organic materials such as rubber, silica gel, or plastic. Such organic materials not only have good insulating ability, but also have good heat-insulating ability.
  • Step S1.2.2 peel off the insulating and heat-insulating material layer covering the normal position grating modulation area, so that the normal position grating modulation area is exposed from the insulating and heat-insulating material layer.
  • the insulating material layer may be partially peeled off by cutting or CO2 laser etching.
  • Step S1.2.3 forming a layer 12 covering the electromagnetic induction material on the exposed normal position grating modulation area.
  • the electromagnetic induction material layer 12 can be made by vacuum coating, magnetron sputtering or spraying. During production, the electromagnetic induction material layer 12 may only cover the exposed normal grating modulation area, or simultaneously cover the exposed normal grating modulation area and the insulating and heat-insulating material layer. Due to the insulation and heat insulation properties of the insulating and heat-insulating material layer, the current and heat generated by the electromagnetic induction material layer 12 in the alternating magnetic field will not diffuse outward.
  • step S1.2 includes:
  • Step S1.2.1 making a coating material layer on the surface of the optical fiber 11.
  • the coating material layer needs to meet the requirement that the electromagnetic induction material layer 12 can be removed by a different solution, that is, there is a solution that can dissolve or corrode the coating material layer,
  • the electromagnetic induction material layer 12 cannot be dissolved or corroded.
  • the coating material layer is made of organic materials such as rubber, silica gel, or plastic, it will be easily dissolved by organic solvents, while metals such as iron, nickel, cobalt, or other materials are used.
  • the electromagnetic induction material layer 12 of oxides or alloys of this type of metal is difficult to dissolve in organic solvents.
  • Step S1.2.2 peeling off the coating material layer covering the normal position grating modulation area, so that the normal position grating modulation area is exposed from the coating material layer.
  • the coating material layer may be partially peeled off by means of cutting or CO2 laser.
  • Step S1.2.3 forming a layer 12 covering the electromagnetic induction material on the exposed normal position grating modulation area.
  • the electromagnetic induction material layer 12 can be made by vacuum coating, magnetron sputtering or spraying. During production, the electromagnetic induction material layer 12 may only cover the exposed normal grating modulation area, or simultaneously cover the exposed normal grating modulation area and the coating material layer.
  • Step S1.2.4 peel off the remaining coating material layer.
  • the organic solvent can dissolve the coating material layer using organic materials such as rubber, silica gel or plastic, but it is difficult to dissolve the electromagnetic induction material layer 12. Therefore, in this step S1.2.4, an organic solvent can be used to dissolve the remaining The coating material layer is peeled off.
  • step S1.2 includes:
  • Step S1.2.1 forming a layer 12 covering the electromagnetic induction material on the surface of the optical fiber 11.
  • the electromagnetic induction material layer 12 can be made by vacuum coating, magnetron sputtering or spraying.
  • Step S1.2.2 making a photosensitive material layer covering the surface of the electromagnetic induction material layer.
  • the photosensitive material layer can be a positive photoresist or a negative photoresist, which is made by coating.
  • Step S1.2.3 Expose and develop the photosensitive material layer, so that the electromagnetic induction material layer 12 covering the modulation area of the normal position grating is exposed from the photosensitive material layer.
  • the photosensitive material layer is exposed by ultraviolet light through a photolithography mask, and then the exposed or unexposed part of the photosensitive material layer is removed by a developer.
  • the exposed part of the photoresist can be removed by the developer, and the unexposed part of the negative photoresist can be removed by the developer.
  • Step S1.2.4 the exposed electromagnetic induction material layer 12 is etched and removed.
  • the exposed electromagnetic induction material layer 12 can be engraved with an acid solution. It is removed by etching, and the remaining photosensitive material layer is difficult to be corroded by the acid solution.
  • Step S1.2.5 peel off the remaining photosensitive material layer.
  • an alkaline solution can be used to peel off the remaining photosensitive material layer, and the electromagnetic induction material layer 12 using metals such as iron, nickel, cobalt, or oxides or alloys of such metals is difficult to be alkaline Corrosion of the sexual solution.
  • a fiber grating element 1 includes an optical fiber 11 and an electromagnetic induction material layer 12.
  • the electromagnetic induction material layer 12 is prepared to cover the optical fiber 11 along the axial distribution of the normal position grating modulation District.
  • the electromagnetic induction material layer 12 can be made of metals such as iron, nickel, cobalt, or oxides or alloys containing such metals, such as iron oxide, silicon steel, stainless steel, iron-cobalt alloys, nickel-cobalt alloys, etc., such metals and metals Oxides and alloys have both good electrical conductivity and good magnetic permeability.
  • metals such as iron, nickel, cobalt, or oxides or alloys containing such metals, such as iron oxide, silicon steel, stainless steel, iron-cobalt alloys, nickel-cobalt alloys, etc.
  • metals and metals Oxides and alloys have both good electrical conductivity and good magnetic permeability.
  • rare earths or oxides or alloys containing rare earths can also be used to make the electromagnetic induction material layer 12.
  • an electronically controlled fiber grating system includes the fiber grating element 1 and the magnetic field generating device 2 described in the third embodiment.
  • the alternating magnetic field acting together causes the electromagnetic induction material layer 12 to generate heat to heat the normal grating modulation area of the optical fiber 11 to change the refractive index of the normal grating modulation area to form a fiber grating.
  • the electronically controlled fiber grating system also includes an input connector and an output connector.
  • the input connector is provided at one end of the fiber grating element 1
  • the output connector is provided at the other end of the fiber grating element 1, or the input
  • the connector and the output connector are arranged at the same end of the fiber grating element 1.
  • the magnetic field generating device 2 includes a magnetic field transmitter 21 and a power supply control module 22.
  • the power supply control module 22 is electrically connected to the magnetic field transmitter 21 to output an alternating current to the magnetic field transmitter 21 so as to make the The magnetic field transmitter 21 generates the alternating magnetic field.
  • the magnetic field transmitter 21 includes an electromagnetic coil that surrounds the fiber grating element 1 in the axial direction.
  • the input connector is used to connect the light source generating device 3 for the light source generating device 3 to couple the detection beam into the fiber grating element 1;
  • the output connector is used to connect the spectrum detection device 4 to provide the spectrum
  • the detection device 4 receives the light beam transmitted or reflected from the fiber grating element 1 to obtain the real-time writing spectrum of the fiber grating.
  • the electronically controlled fiber grating system further includes a coupling device 5, and the input connector and the output connector are connected to the coupling device 5 through the coupling device 5.
  • the coupling device 5 can couple the incident detection light beam into the fiber grating element 1, and couple the reflected light beam into the spectrum detection device 4.
  • an electronically controlled fiber grating preparation system is not limited to being applied to the preparation method described in Example 1, including the electronically controlled fiber grating system described in Example 4, and
  • the light source generating device 3 is used for coupling a detection light beam into the fiber grating element 1;
  • the spectrum detection device 4 is used to receive the light beam transmitted or reflected from the fiber grating element 1 to obtain the real-time writing spectrum of the fiber grating.
  • the light source generating device 3 is connected to the input connector of the electronically controlled fiber grating system, and the spectrum detection device 4 is connected to the output connector of the electronically controlled fiber grating system.
  • the light source generating device 3 is connected to one end of the fiber grating element 1
  • the spectrum detection device 4 is connected to the other end of the fiber grating element 1.
  • the light source generating device 3 and the spectrum detecting device 4 are connected to the same end of the fiber grating element 1, and the detection beam is in the fiber grating element 1.
  • the spectrum detection device 4 receives the reflected light beam to obtain the reflection spectrum as the value of the fiber grating Write spectrum in real time.
  • the light source generating device 3 and the spectrum detecting device 4 are connected to the same end of the fiber grating element 1 through a coupling device 5, and the coupling device 5 can couple the incident detection beam to the fiber grating In the element 1, the reflected light beam is coupled into the spectrum detection device 4.
  • the technician can manually control the power control module 22 in the magnetic field generating device 2 according to the real-time writing spectrum obtained by the spectrum detection device 4 to control the power supply
  • the alternating current output by the control module 22 further controls the alternating magnetic field generated by the magnetic field transmitter 21, and finally modulates the real-time writing spectrum of the fiber grating to the required writing spectrum.
  • the preparation system may also include a processing control host (not shown in the figure), and the processing control host is communicatively connected between the spectrum detection device 4 and the magnetic field generation device 2, and is used to detect the spectrum according to the spectrum.
  • the obtained real-time writing spectrum automatically controls the power control module 22 of the magnetic field generating device 2 to automatically modulate the real-time writing spectrum of the fiber grating to the required writing spectrum.

Abstract

A method for manufacturing an electrically-controlled fiber grating system, comprising: step S1: pre-processing optical fibers (11), to manufacture and cover an electromagnetic induction material layer (12) on a normal grating modulation region in which the optical fibers (11) are axially distributed, so as to form a fiber grating element (1); step S2: using an alternating magnetic field to interact with the electromagnetic induction material layer (12), so that the electromagnetic induction material layer (12) generates heat, and then heats the normal grating modulation region of the optical fibers (11), so as to change the refractive index of the normal grating modulation region, thereby forming a fiber grating. The method for manufacturing an electrically-controlled fiber grating system does not require an expensive instrument device, greatly reducing device costs and simplifying the manufacturing process; the fiber grating element (1) is heated only when placed in an alternating magnetic field, and then the security coefficient is greatly improved, and the writing spectrum of the fiber grating can be modulated in real time, resulting in a higher yield and a controllable manufacturing time, thereby facilitating batch production as well as the recycling and reuse of fiber grating elements (1) for manufacturing different fiber gratings.

Description

一种电控光纤光栅的制备方法Method for preparing electronically controlled fiber grating 技术领域Technical field
本发明涉及光纤传感技术,尤其涉及一种电控光纤光栅的制备方法。The invention relates to optical fiber sensing technology, in particular to a method for preparing an electrically controlled optical fiber grating.
背景技术Background technique
光纤光栅因具有体积小、熔接损耗小、全兼容于光纤、能埋入智能材料等优点,并且其谐振波长对温度、应变、折射率、浓度等外界环境的变化比较敏感,因此在光纤通信和传感领域得到了广泛的应用。现有的光纤光栅制备方法主要有CO2 激光刻蚀法、电弧放电法、HF湿法刻蚀、周期性形变、振幅掩膜法和飞秒激光直写法等。作为说明,其中比较典型加工方式如下:Fiber grating has the advantages of small size, low splicing loss, full compatibility with optical fibers, and ability to embed smart materials, and its resonance wavelength is sensitive to changes in the external environment such as temperature, strain, refractive index, and concentration. Therefore, it is used in optical fiber communication and The sensing field has been widely used. The existing fiber grating preparation methods mainly include CO2 laser etching, arc discharge, HF wet etching, periodic deformation, amplitude masking, and femtosecond laser direct writing. As an illustration, the typical processing methods are as follows:
CO2 激光刻蚀法:单个激光脉冲通过聚焦镜并照射在光纤上,并且在光纤上架设成像系统来观察光栅刻写过程中光线是否发生形变光栅通过单侧的激光逐点写入,利用开关来控制激光的通断,在一个位置照射后通过轴向移动光纤位置来进行下一个栅区的刻写。此项写制技术优势明显,无需对光纤进行增敏,可以通过电脑方便的控制激光运动轨迹,但是存在一定缺陷,刻写过程中通过电脑操作激光的通断以及光纤的位移,很难保证聚焦激光光斑和光纤每次对准的精确度,不利于光栅刻写的稳定性和一致性。 CO2 laser etching method: a single laser pulse passes through a focusing mirror and irradiates the fiber, and an imaging system is set up on the fiber to observe whether the light is deformed during the grating writing process. The grating is written point by point by a single-sided laser, and is controlled by a switch The on-off of the laser, after irradiating one position, move the position of the fiber axially to write the next grating area. This writing technology has obvious advantages. It does not need to increase the sensitivity of the optical fiber. The laser movement track can be conveniently controlled by the computer. However, there are certain defects. During the writing process, the computer operates the on and off of the laser and the displacement of the optical fiber, which makes it difficult to ensure the focused laser. The accuracy of each alignment between the light spot and the optical fiber is not conducive to the stability and consistency of grating writing.
振幅掩膜法:此种方法的关键在于振幅掩模版,当紫外光透过振幅掩模版对光纤进行横向曝光后,可以诱导光纤内部出现周期性的折射率改变,制成长周期光栅结构。由于长周期性的光纤光栅的周期较大,可以保证掩模版的制作精度,因此容易获得一致性高的符合光谱需求的光栅,故此种方法一直沿用下来并处于制备工艺的主流位置。但是这种方法也存在不少弊端,首先必须采用光敏光纤,而且制成的成品在高温下不稳定,必须对LPG采用退火处理来保证它在高温下能被使用,又因其次振幅掩模版的周期固定,没办法根据需求来灵活的调整周期长度,大大增加了制备成本。Amplitude mask method: The key to this method is the amplitude reticle. When the ultraviolet light passes through the amplitude reticle to expose the optical fiber laterally, it can induce periodic refractive index changes inside the optical fiber to form a long-period grating structure. Since the period of the long-period fiber grating is relatively large, the manufacturing accuracy of the reticle can be ensured, and it is easy to obtain a grating with high consistency that meets the spectral requirements. Therefore, this method has been used and is in the mainstream of the manufacturing process. However, this method also has many disadvantages. First, photosensitive fiber must be used, and the finished product must be unstable at high temperature. Annealing treatment must be adopted for LPG to ensure that it can be used at high temperature. The cycle is fixed, and there is no way to flexibly adjust the cycle length according to the demand, which greatly increases the preparation cost.
飞秒激光直写法:用物镜聚焦后的飞秒激光焦点入射到掺锗的光纤纤芯中, 被激光照射到的区域折射率会增大,同时平行移动光纤,就会在玻璃内部形成周期性的波导结构。利用飞秒激光直接刻写光纤光栅,可以不需要相位(振幅)掩模板,只需通过控制光斑焦点在光纤纤芯上的相对位置,即可制备任意类型的光纤光栅,但是用于制备长周期性的光纤光栅过程十分复杂,且难以操作,成本大。Femtosecond laser direct writing method: The focal point of the femtosecond laser focused by the objective lens is incident into the germanium-doped fiber core, the refractive index of the area irradiated by the laser will increase, and the parallel movement of the fiber will form a periodicity inside the glass The waveguide structure. Using femtosecond lasers to write fiber gratings directly, no phase (amplitude) mask is needed. Any type of fiber grating can be prepared by controlling the relative position of the spot focus on the fiber core, but it is used to prepare long periodicity. The fiber grating process is very complicated, difficult to operate, and costly.
技术解决方案Technical solutions
为了解决上述现有技术的不足,本发明提供一种电控光纤光栅系统的制备方法,无需使用昂贵的仪器设备,极大地节约了设备成本,简化了制备工艺,光纤光栅元件只有放入交变磁场中才会被加热,安全系数大大提高,光纤光栅的写制光谱可实时调制,良品率更高,制备时间可控,有利于实现批量化生产,且可对光纤光栅元件回收重复利用以制备不同的光纤光栅。In order to solve the above-mentioned shortcomings of the prior art, the present invention provides a method for preparing an electronically controlled fiber grating system, which does not need to use expensive equipment, greatly saves equipment costs, and simplifies the preparation process. It can be heated in a magnetic field, and the safety factor is greatly improved. The writing spectrum of the fiber grating can be modulated in real time, the yield rate is higher, and the preparation time is controllable, which is conducive to mass production, and the fiber grating components can be recycled and reused for preparation. Different fiber gratings.
本发明所要解决的技术问题通过以下技术方案予以实现:The technical problem to be solved by the present invention is realized through the following technical solutions:
一种电控光纤光栅的制备方法,包括如下步骤:A method for preparing an electronically controlled fiber grating includes the following steps:
步骤S1:对光纤进行预处理,以在所述光纤沿轴向分布的法位光栅调制区上制作覆盖一电磁感应材料层,形成光纤光栅元件;Step S1: pre-processing the optical fiber to form an electromagnetic induction material layer on the normal position grating modulation area distributed along the axial direction of the optical fiber to form a fiber grating element;
步骤S2:采用交变磁场与所述电磁感应材料层相作用,使所述电磁感应材料层发热进而对所述光纤的法位光栅调制区进行加热,以改变所述法位光栅调制区的折射率,形成光纤光栅。Step S2: Use an alternating magnetic field to interact with the electromagnetic induction material layer to heat the electromagnetic induction material layer to heat the normal grating modulation area of the optical fiber to change the refraction of the normal grating modulation area Rate, forming a fiber grating.
有益效果Beneficial effect
发明具有如下有益效果:该制备方法以不同分布规律的电磁感应材料层进行电磁感应,即可制备出不同的光纤光栅,无需使用昂贵的仪器设备,极大地节约了设备成本,简化了制备工艺,光纤光栅元件只有放入交变磁场中才会被加热,安全系数大大提高,光纤光栅的写制光谱可实时调制,良品率更高,制备时间可控,有利于实现批量化生产,且可回收重复利用。The invention has the following beneficial effects: the preparation method uses electromagnetic induction material layers with different distribution laws to perform electromagnetic induction, and different fiber gratings can be prepared without the use of expensive equipment, which greatly saves equipment costs and simplifies the preparation process. Fiber grating components can only be heated when placed in an alternating magnetic field. The safety factor is greatly improved. The writing spectrum of fiber gratings can be modulated in real time, yielding higher yields, and controllable preparation time, which is conducive to mass production and can be recycled. Reuse.
附图说明Description of the drawings
图1为本发明提供的电控光纤光栅的制备方法的步骤框图;Fig. 1 is a block diagram of the steps of the method for preparing the electronically controlled fiber grating provided by the present invention;
图2为本发明提供的长周期性的光纤光栅的光纤光栅元件的示意图;2 is a schematic diagram of a fiber grating element of a long-period fiber grating provided by the present invention;
图3为图2所示的长周期性的光纤光栅的透射光谱图;Fig. 3 is a transmission spectrum diagram of the long-period fiber grating shown in Fig. 2;
图4为本发明提供的短周期性的光纤光栅的光纤光栅元件的示意图;4 is a schematic diagram of a fiber grating element of a short-period fiber grating provided by the present invention;
图5为图4所示的短周期性的光纤光栅的反射光谱图;Fig. 5 is a reflection spectrum diagram of the short-period fiber grating shown in Fig. 4;
图6为本发明提供的非周期性光纤光栅的光纤光栅元件的示意图;6 is a schematic diagram of a fiber grating element of aperiodic fiber grating provided by the present invention;
图7为图6所示的非周期性光纤光栅的反射光谱图;FIG. 7 is a reflection spectrum diagram of the aperiodic fiber grating shown in FIG. 6;
图8为本发明提供的电控光纤光栅的制备系统的示意图;FIG. 8 is a schematic diagram of the preparation system of the electronically controlled fiber grating provided by the present invention;
图9为本发明提供的电控光纤光栅的另一制备系统的示意图;Fig. 9 is a schematic diagram of another preparation system of an electrically controlled fiber grating provided by the present invention;
图10为本发明提供的电控光纤光栅的预处理方法的步骤框图;FIG. 10 is a block diagram of the steps of the preprocessing method of the electronically controlled fiber grating provided by the present invention; FIG.
图11为图10所示的电控光纤光栅的预处理方法中步骤S1.2的步骤框图;FIG. 11 is a block diagram of step S1.2 in the preprocessing method of the electronically controlled fiber grating shown in FIG. 10;
图12为图10所示的电控光纤光栅的预处理方法中另一步骤S1.2的步骤框图;FIG. 12 is a block diagram of another step S1.2 in the preprocessing method of the electronically controlled fiber grating shown in FIG. 10;
图13为图10所示的电控光纤光栅的预处理方法中又一步骤S1.2的步骤框图。FIG. 13 is a block diagram of another step S1.2 in the preprocessing method of the electronically controlled fiber grating shown in FIG. 10.
本发明的实施方式Embodiments of the present invention
下面结合附图和实施例对本发明进行详细的说明。The present invention will be described in detail below with reference to the drawings and embodiments.
如图1、2、4和6所示,一种电控光纤光栅的制备方法,包括如下步骤:As shown in Figures 1, 2, 4, and 6, a method for preparing an electronically controlled fiber grating includes the following steps:
步骤S1:对光纤11进行预处理,以在所述光纤11沿轴向分布的法位光栅调制区上制作覆盖一电磁感应材料层12,形成光纤光栅元件1。Step S1: preprocessing the optical fiber 11 to form an electromagnetic induction material layer 12 on the normal position grating modulation area distributed along the axial direction of the optical fiber 11 to form the optical fiber grating element 1.
在该步骤S1中,所述电磁感应材料层12可以采用铁、镍、钴等金属或者含有该类金属的氧化物或合金,如:氧化铁、硅钢、不锈钢、铁钴合金、镍钴合金等,这类金属、金属氧化物和合金既具有良好的导电能力,同时也具有良好的导磁能力,另外,稀土或者含有稀土的氧化物或合金也可以用于制作所述电磁感应材料层12。In this step S1, the electromagnetic induction material layer 12 can be made of metals such as iron, nickel, cobalt, or oxides or alloys containing such metals, such as iron oxide, silicon steel, stainless steel, iron-cobalt alloy, nickel-cobalt alloy, etc. Such metals, metal oxides and alloys not only have good electrical conductivity, but also good magnetic permeability. In addition, rare earths or oxides or alloys containing rare earths can also be used to make the electromagnetic induction material layer 12.
步骤S2:采用交变磁场与所述电磁感应材料层12相作用,使所述电磁感应材料层12发热进而对所述光纤11的法位光栅调制区进行加热,以改变所述法位光栅调制区的折射率,形成光纤光栅。Step S2: Use an alternating magnetic field to interact with the electromagnetic induction material layer 12 to cause the electromagnetic induction material layer 12 to generate heat to heat the normal position grating modulation area of the optical fiber 11 to change the normal position grating modulation The refractive index of the region, forming a fiber grating.
在该步骤S2中,所述交变磁场作用于所述电磁感应材料层12时,基于电磁感应原理,可在所述电磁感应材料层12内部形成一电流涡流,所述电流涡流具有热效应,可使所述电磁感应材料层12发热,而基于光纤光热效应,所述法位光栅调制区的折射率在所述电磁感应材料层12的加热下发生改变而形成所述光纤光栅。In this step S2, when the alternating magnetic field acts on the electromagnetic induction material layer 12, based on the principle of electromagnetic induction, a current eddy current can be formed inside the electromagnetic induction material layer 12, and the current eddy current has a thermal effect. The electromagnetic induction material layer 12 is heated, and based on the photothermal effect of the optical fiber, the refractive index of the normal position grating modulation area changes under the heating of the electromagnetic induction material layer 12 to form the optical fiber grating.
由于所述法位光栅调制区的折射率是跟随其温度变化而变化的,故可通过控制所述电磁感应材料层12的发热量来对所述光纤光栅的写制光谱进行调制。因此,该制备方法在步骤S2之后,还包括:Since the refractive index of the modulation area of the normal position grating changes with its temperature change, the writing spectrum of the fiber grating can be modulated by controlling the heating value of the electromagnetic induction material layer 12. Therefore, after step S2, the preparation method further includes:
步骤S3:通过控制所述交变磁场将所述光纤光栅的实时写制光谱调制为所需写制光谱。Step S3: modulate the real-time writing spectrum of the fiber grating to a required writing spectrum by controlling the alternating magnetic field.
在该步骤S3中,可通过控制产生所述交变磁场的交变电流来达到控制所述交变磁场的目的,所述交变电流的电流电压强度和交变频率分别对应于所述交变磁场的磁场强度和交变频率,共同决定了所述电磁感应材料层12的发热量,从而决定了所述法位光栅调制区的光栅调制量,即所述光纤光栅的谐振峰值波长和损耗峰强度,而制备调制时间则与所述交变电流的电流电压强度和交变频率负相关,所述交变电流的电流电压强度和交变频率越大,所述光纤光栅的制备调制时间则越少,反之则越大。In this step S3, the purpose of controlling the alternating magnetic field can be achieved by controlling the alternating current that generates the alternating magnetic field. The current and voltage intensity and alternating frequency of the alternating current respectively correspond to the alternating current. The magnetic field strength and alternating frequency of the magnetic field jointly determine the heat generation of the electromagnetic induction material layer 12, thereby determining the grating modulation amount of the normal position grating modulation area, that is, the resonant peak wavelength and loss peak of the fiber grating The preparation and modulation time is negatively related to the current and voltage intensity and alternating frequency of the alternating current. The greater the current and voltage intensity and the alternating frequency of the alternating current, the longer the preparation and modulation time of the fiber grating Less, and vice versa, the greater.
故而,可通过控制所述交变电流的电流电压强度和/或交变频率(即所述交变磁场的磁场强度和/或交变频率)来调制所述光纤光栅的谐振峰值波长、损耗峰强度和制备调制时间中至少一种。Therefore, the resonant peak wavelength and loss peak of the fiber grating can be modulated by controlling the current and voltage intensity and/or alternating frequency of the alternating current (that is, the magnetic field intensity and/or alternating frequency of the alternating magnetic field). At least one of intensity and preparation time.
具体的,在该步骤S3中,将所述光纤光栅的实时写制光谱调制为所需写制光谱的步骤如下:Specifically, in this step S3, the step of modulating the real-time writing spectrum of the fiber grating to the required writing spectrum is as follows:
步骤S3.1:向所述光纤光栅元件1内耦合进检测光束。Step S3.1: Couple a detection beam into the fiber grating element 1.
在该步骤S3.1中,向所述光纤光栅元件1内耦合进的检测光束优选为超连续的宽带光束,其检测光谱连续覆盖了较大的波长范围。In this step S3.1, the detection beam coupled into the fiber grating element 1 is preferably a super-continuous broadband beam, and its detection spectrum continuously covers a larger wavelength range.
步骤S3.2:接收从所述光纤光栅元件1内透射或反射出来的光束,得到所述光纤光栅的实时写制光谱。Step S3.2: receiving the light beam transmitted or reflected from the fiber grating element 1 to obtain the real-time writing spectrum of the fiber grating.
在该步骤S3.2中,所述检测光束在所述光纤光栅元件1内的传输过程中,经过所述法位光栅调制区时,一部分检测光束会被所述光纤光栅反射原路返回,形成反射光束,得到反射光谱,另一部分检测光束可透过所述光纤光栅继续向前传输,形成透射光束,得到透射光谱,其中,所述反射光谱和透射光谱是互补的,互补后构成步骤S3.1中的耦合进所述光纤光栅元件1内的检测光束的光谱。In this step S3.2, during the transmission process of the detection beam in the fiber grating element 1, when the detection beam passes through the normal position grating modulation area, a part of the detection beam will be reflected by the fiber grating and return to the original path, forming Reflect the beam to obtain a reflection spectrum, another part of the detection beam can be transmitted through the fiber grating to continue forward to form a transmission beam to obtain a transmission spectrum, wherein the reflection spectrum and the transmission spectrum are complementary, and the complementary constitutes step S3. 1 is the spectrum of the detection beam coupled into the fiber grating element 1.
所述光纤光栅的实时写制光谱和所需写制光谱既可采用所述反射光谱来表示,也可采用透射光谱来表示。The real-time writing spectrum and the required writing spectrum of the fiber grating can be represented by the reflection spectrum or the transmission spectrum.
步骤S3.3:控制所述交变磁场,将所述光纤光栅的实时写制光谱调制为所需写制光谱。Step S3.3: Control the alternating magnetic field, and modulate the real-time writing spectrum of the fiber grating to the required writing spectrum.
在该步骤S3.3中,将所述光纤光栅的实时写制光谱与所需写制光谱进行比较,若相同,则结束调制,若不同,则控制所述交变磁场进行变化,重复步骤S3.1-S3.3,直至所述光纤光栅的实时写制光谱与所需写制光谱相同后,结束调制。In this step S3.3, the real-time writing spectrum of the fiber grating is compared with the required writing spectrum, if they are the same, the modulation ends, and if they are different, the alternating magnetic field is controlled to change, and step S3 is repeated. .1-S3.3, until the real-time writing spectrum of the fiber grating is the same as the required writing spectrum, the modulation is ended.
由于所述法位光栅调制区的折射率是跟随其温度变化而变化的,因此,所述光纤光栅是非永久性的,当撤去所述交变磁场而所述法位光栅调制区的温度恢复正常后,所述光纤光栅也会消失,所述光纤光栅元件1等同于普通光纤,因此,在每次使用前,都需要先通过上述步骤S2和步骤S3将所述光纤光栅元件1调制出具有所需写制光谱的光纤光栅,并在使用过程中不能撤去所述交变磁场,所述光纤光栅需要一边使用一边调制,以避免所述法位光栅调制区的温度改变导致所述光纤光栅的实时写制光谱发生偏离。Since the refractive index of the normal grating modulation area changes with its temperature, the fiber grating is non-permanent. When the alternating magnetic field is removed, the temperature of the normal grating modulation area returns to normal Later, the fiber grating will also disappear, and the fiber grating element 1 is equivalent to an ordinary optical fiber. Therefore, before each use, the fiber grating element 1 needs to be modulated to have all the characteristics of the fiber grating element 1 through steps S2 and S3. The optical fiber grating of the spectrum needs to be written, and the alternating magnetic field cannot be removed during use. The optical fiber grating needs to be modulated while being used to avoid the temperature change in the modulation area of the normal position grating causing the real-time optical fiber grating. The writing spectrum has deviated.
该制备方法可以制作出长周期性的光纤光栅、短周期性的光纤光栅或非周期性光纤光栅。The preparation method can produce long-period fiber gratings, short-period fiber gratings or non-periodic fiber gratings.
在一具体实施方式中,如图2所示,所述光纤光栅为长周期性的光纤光栅,其光栅周期Λ=0.5mm,光栅阶数为N,先利用相位匹配公式计算出该长周期性的光纤光栅的谐振波长位置,以确定所述法位光栅调制区沿所述光纤11轴向周期性分布的位置,然后再在沿所述光纤11轴向以0.5mm周期性分布的N个法位光栅调制区上制作覆盖所述电磁感应材料层12,得到所述光纤光栅元件1,接着采用所述交变磁场与所述电磁感应材料层12相作用,对所述法位光栅调制区进行加热使所述光纤光栅元件1形成长周期的光纤光栅,最后将该长周期性的光纤光栅的实时写制光谱调制为如图3所示的透射光谱。In a specific embodiment, as shown in FIG. 2, the fiber grating is a long-period fiber grating, the grating period Λ=0.5mm, and the grating order is N. The long-periodity is first calculated using the phase matching formula The position of the resonant wavelength of the fiber grating to determine the position of the normal position grating modulation area periodically distributed along the axial direction of the optical fiber 11, and then the N method periodically distributed along the axial direction of the optical fiber 11 at 0.5 mm The electromagnetic induction material layer 12 is fabricated on the position grating modulation area to obtain the fiber grating element 1, and then the alternating magnetic field is used to interact with the electromagnetic induction material layer 12 to perform the processing on the normal position grating modulation area. The heating causes the fiber grating element 1 to form a long-period fiber grating, and finally the real-time writing spectrum of the long-period fiber grating is modulated into a transmission spectrum as shown in FIG. 3.
在另一具体实施方式中,如图4所示,所述光纤光栅为短周期性的光纤光栅,其光栅周期Λ=0.1mm,光栅阶数为N,先利用相位匹配公式计算出该短周期性的光纤光栅的谐振波长位置,以确定所述法位光栅调制区沿所述光纤11轴向周期性分布的位置,然后再在沿所述光纤11轴向以0.1mm周期性分布的N个法位光栅调制区上制作覆盖所述电磁感应材料层12,得到所述光纤光栅元件1,接着采用所述交变磁场与所述电磁感应材料层12相作用,对所述法位光栅调制区进行加热使所述光纤光栅元件1形成短周期性的光纤光栅,最后将该短周期性的光纤光栅的实时写制光谱调制为如图5所示的反射光谱。In another specific embodiment, as shown in FIG. 4, the fiber grating is a short-period fiber grating, the grating period Λ=0.1mm, and the grating order is N. The short period is first calculated using the phase matching formula The resonant wavelength position of the optical fiber grating is used to determine the position of the normal position grating modulation area periodically distributed along the axial direction of the optical fiber 11, and then the N number periodically distributed along the axial direction of the optical fiber 11 at 0.1 mm The electromagnetic induction material layer 12 is fabricated on the normal position grating modulation area to obtain the fiber grating element 1, and then the alternating magnetic field is used to interact with the electromagnetic induction material layer 12 to affect the normal position grating modulation area Heating is performed to make the fiber grating element 1 form a short-period fiber grating, and finally the real-time writing spectrum of the short-period fiber grating is modulated into a reflection spectrum as shown in FIG. 5.
在又一具体实施方式中,如图6所示,所述光纤光栅为非周期性的光纤光栅,其非周期性的光栅间距依次为Λ1、Λ2、……Λn,光栅阶数为N,同样的,先利用相位匹配公式计算出该非周期性的光纤光栅的谐振波长位置,以确定所述法位光栅调制区沿所述光纤11轴向非周期性分布的位置,然后再在沿所述光纤11轴向以间距为Λ1、Λ2、……Λn非周期性分布的N个法位光栅调制区上制作覆盖所述电磁感应材料层12,以得到所述光纤光栅元件1,然后采用所述交变磁场与所述电磁感应材料层12相作用,对所述法位光栅调制区进行加热使所述光纤光栅元件1形成非周期性的光纤光栅,最后将该非周期性的光纤光栅的实时写制光谱调制为如图7所示的反射光谱。In another specific embodiment, as shown in FIG. 6, the fiber grating is a non-periodic fiber grating, the aperiodic grating pitch is Λ1, Λ2, ... Λn, and the grating order is N, and the same , First use the phase matching formula to calculate the resonant wavelength position of the non-periodic fiber grating to determine the non-periodically distributed position of the normal grating modulation area along the axis of the optical fiber 11, and then The electromagnetic induction material layer 12 is fabricated on the N normal grating modulation regions with a non-periodically distributed pitch of Λ1, Λ2,...Λn in the axial direction of the optical fiber 11 to obtain the fiber grating element 1, and then use the The alternating magnetic field acts on the electromagnetic induction material layer 12 to heat the normal position grating modulation area to make the fiber grating element 1 form a non-periodic fiber grating, and finally the non-periodic fiber grating is real-time The writing spectrum is modulated as the reflection spectrum shown in Figure 7.
如图10、2、4和6所示,一种电控光纤光栅的预处理方法,可用作实施例一所述的制备方法的步骤S1,包括如下步骤:As shown in Figs. 10, 2, 4, and 6, a pretreatment method for electronically controlled fiber gratings, which can be used as step S1 of the preparation method described in the first embodiment, includes the following steps:
步骤S1.1:根据相位匹配公式,确定所需光纤光栅的法位光栅调制区沿光纤11轴向分布的位置。Step S1.1: According to the phase matching formula, determine the position of the normal position grating modulation area of the required fiber grating distributed along the axial direction of the optical fiber 11.
在该步骤S1.1中,依据长周期性、短周期性或非周期性的光纤光栅对应的相位匹配公式,可计算出对应的光纤光栅的谐振峰值位置。相位匹配公式为本领域的公知常识,故本实施例仅以短周期性的光栅光纤进行如下说明:In this step S1.1, according to the phase matching formula corresponding to the long-period, short-period or aperiodic fiber grating, the resonance peak position of the corresponding fiber grating can be calculated. The phase matching formula is common knowledge in the art, so this embodiment only uses a short-period grating fiber for the following description:
短周期性的光栅光纤的相位匹配公式为m*λ B=2*n eff*Λ,该式中m是所需光纤光栅的光栅阶数,λ B是所需光纤光栅的中心反射波长,n eff是光纤纤芯的有效折射率,Λ为所需光纤光栅的光栅周期(光栅间距)。根据该相位匹配公式,在确定了所需光纤光栅的光栅周期Λ和光栅阶数m的情况下,可计算出所需光纤光栅的中心反射波长λ B,反过来,在确定了所需光纤光栅的中心反射波长λ B的情况下,可计算出所需光纤光栅的光栅周期Λ和光栅阶数m之间的关系。 The phase matching formula of the short-period grating fiber is m*λ B = 2*n eff *Λ, where m is the grating order of the required fiber grating, λ B is the central reflection wavelength of the required fiber grating, n eff is the effective refractive index of the fiber core, and Λ is the grating period (grating pitch) of the required fiber grating. According to the phase matching formula, when the grating period Λ and the grating order m of the required fiber grating are determined, the central reflection wavelength λ B of the required fiber grating can be calculated, and conversely, after determining the required fiber grating In the case of the central reflection wavelength λ B , the relationship between the grating period Λ of the required fiber grating and the grating order m can be calculated.
步骤S1.2:在所述光纤11沿轴向分布的法位光栅调制区上制作覆盖一电磁感应材料层12。Step S1.2: forming an electromagnetic induction material layer 12 on the normal position grating modulation area of the optical fiber 11 distributed along the axial direction.
在一具体实施方式中,如图11所示,步骤S1.2包括如下步骤:In a specific embodiment, as shown in FIG. 11, step S1.2 includes the following steps:
步骤S1.2.1:在所述光纤11表面上制作覆盖一绝缘隔热材料层。Step S1.2.1: making an insulating and heat-insulating material layer on the surface of the optical fiber 11.
在该步骤S1.2.1中,所述绝缘隔热材料层可以但不限于为橡胶、硅胶或塑料等有机材料,这类有机材料既具有良好的绝缘能力,同时也具有良好的隔热能力。In this step S1.2.1, the insulating and heat-insulating material layer can be, but not limited to, organic materials such as rubber, silica gel, or plastic. Such organic materials not only have good insulating ability, but also have good heat-insulating ability.
步骤S1.2.2:将覆盖于所述法位光栅调制区上的绝缘隔热材料层进行剥离,使所述法位光栅调制区从所述绝缘隔热材料层中露出。Step S1.2.2: peel off the insulating and heat-insulating material layer covering the normal position grating modulation area, so that the normal position grating modulation area is exposed from the insulating and heat-insulating material layer.
在该步骤S1.2.2中,所述绝缘隔热材料层可采用切削或CO2激光刻蚀等方式进行局部剥离。In this step S1.2.2, the insulating material layer may be partially peeled off by cutting or CO2 laser etching.
步骤S1.2.3:在露出的法位光栅调制区上制作覆盖所述电磁感应材料层12。Step S1.2.3: forming a layer 12 covering the electromagnetic induction material on the exposed normal position grating modulation area.
在该步骤S1.2.3中,所述电磁感应材料层12可采用真空镀膜、磁控溅射或喷涂等方式进行制作。在制作时,所述电磁感应材料层12既可仅覆盖于露出的法位光栅调制区上,也可同时覆盖于露出的法位光栅调制区和所述绝缘隔热材料层上。由于所述绝缘隔热材料层的绝缘性能和隔热性能,所述电磁感应材料层12在所述交变磁场中产生的电流和热量均不会向外扩散。In this step S1.2.3, the electromagnetic induction material layer 12 can be made by vacuum coating, magnetron sputtering or spraying. During production, the electromagnetic induction material layer 12 may only cover the exposed normal grating modulation area, or simultaneously cover the exposed normal grating modulation area and the insulating and heat-insulating material layer. Due to the insulation and heat insulation properties of the insulating and heat-insulating material layer, the current and heat generated by the electromagnetic induction material layer 12 in the alternating magnetic field will not diffuse outward.
在另一具体实施方式中,如图12所示,步骤S1.2包括:In another specific embodiment, as shown in FIG. 12, step S1.2 includes:
步骤S1.2.1:在所述光纤11表面上制作覆盖一涂覆材料层。Step S1.2.1: making a coating material layer on the surface of the optical fiber 11.
在该步骤S1.2.1中,所述涂覆材料层需满足与所述电磁感应材料层12可被不同的溶液去除的要求,即存在一种溶液可将所述涂覆材料层溶解或腐蚀,而不可将所述电磁感应材料层12溶解或腐蚀,比如若所述涂覆材料层采用橡胶、硅胶或塑料等有机材料,则容易被有机溶剂溶解,而采用铁、镍、钴等金属或者含有该类金属的氧化物或合金的电磁感应材料层12则难以被有机溶剂溶解。In this step S1.2.1, the coating material layer needs to meet the requirement that the electromagnetic induction material layer 12 can be removed by a different solution, that is, there is a solution that can dissolve or corrode the coating material layer, The electromagnetic induction material layer 12 cannot be dissolved or corroded. For example, if the coating material layer is made of organic materials such as rubber, silica gel, or plastic, it will be easily dissolved by organic solvents, while metals such as iron, nickel, cobalt, or other materials are used. The electromagnetic induction material layer 12 of oxides or alloys of this type of metal is difficult to dissolve in organic solvents.
步骤S1.2.2:将覆盖于所述法位光栅调制区上的涂覆材料层进行剥离,使所述法位光栅调制区从所述涂覆材料层中露出。Step S1.2.2: peeling off the coating material layer covering the normal position grating modulation area, so that the normal position grating modulation area is exposed from the coating material layer.
在该步骤S1.2.2中,所述涂覆材料层可采用切削或CO2激光等方式进行局部剥离。In this step S1.2.2, the coating material layer may be partially peeled off by means of cutting or CO2 laser.
步骤S1.2.3:在露出的法位光栅调制区上制作覆盖所述电磁感应材料层12。Step S1.2.3: forming a layer 12 covering the electromagnetic induction material on the exposed normal position grating modulation area.
在该步骤S1.2.3中,所述电磁感应材料层12可采用真空镀膜、磁控溅射或喷涂等方式进行制作。在制作时,所述电磁感应材料层12既可仅覆盖于露出的法位光栅调制区上,也可同时覆盖于露出的法位光栅调制区和所述涂覆材料层上。In this step S1.2.3, the electromagnetic induction material layer 12 can be made by vacuum coating, magnetron sputtering or spraying. During production, the electromagnetic induction material layer 12 may only cover the exposed normal grating modulation area, or simultaneously cover the exposed normal grating modulation area and the coating material layer.
步骤S1.2.4:将剩余的涂覆材料层进行剥离。Step S1.2.4: peel off the remaining coating material layer.
在该步骤S1.2.4中,剩余的涂覆材料层在被剥离的同时,可将覆盖于其上的电磁感应材料层12一同带走,仅留下覆盖于所述法位光栅调制区上的电磁感应材料层12。In this step S1.2.4, while the remaining coating material layer is peeled off, the electromagnetic induction material layer 12 covering it can be taken away, leaving only the layer covering the normal grating modulation area. Electromagnetic induction material layer 12.
如上所述,有机溶剂可将采用橡胶、硅胶或塑料等有机材料的涂覆材料层溶解,而难以将所述电磁感应材料层12溶解,故而该步骤S1.2.4中可采用有机溶剂将剩余的涂覆材料层进行剥离。As mentioned above, the organic solvent can dissolve the coating material layer using organic materials such as rubber, silica gel or plastic, but it is difficult to dissolve the electromagnetic induction material layer 12. Therefore, in this step S1.2.4, an organic solvent can be used to dissolve the remaining The coating material layer is peeled off.
在又一具体实施方式中,如图13所示,步骤S1.2包括:In another specific embodiment, as shown in FIG. 13, step S1.2 includes:
步骤S1.2.1:在所述光纤11表面上制作覆盖所述电磁感应材料层12。Step S1.2.1: forming a layer 12 covering the electromagnetic induction material on the surface of the optical fiber 11.
在该步骤S1.2.1中,所述电磁感应材料层12可采用真空镀膜、磁控溅射或喷涂等方式进行制作。In this step S1.2.1, the electromagnetic induction material layer 12 can be made by vacuum coating, magnetron sputtering or spraying.
步骤S1.2.2:在所述电磁感应材料层表面上制作覆盖一光敏材料层。Step S1.2.2: making a photosensitive material layer covering the surface of the electromagnetic induction material layer.
在该步骤S1.2.2中,所述光敏材料层可为正性光阻或负性光阻,通过涂覆方式制作。In this step S1.2.2, the photosensitive material layer can be a positive photoresist or a negative photoresist, which is made by coating.
步骤S1.2.3:对所述光敏材料层进行曝光显影,使覆盖于所述法位光栅调制区之外的电磁感应材料层12从所述光敏材料层中露出。Step S1.2.3: Expose and develop the photosensitive material layer, so that the electromagnetic induction material layer 12 covering the modulation area of the normal position grating is exposed from the photosensitive material layer.
在该步骤S1.2.3中,采用紫外光透过光刻掩膜版对所述光敏材料层进行曝光,然后通过显影液将所述光敏材料层被曝光的部分或未被曝光的部分去除,正性光阻被曝光的部分可被显影液去除,负性光阻未被曝光的部分可被显影液去除。In this step S1.2.3, the photosensitive material layer is exposed by ultraviolet light through a photolithography mask, and then the exposed or unexposed part of the photosensitive material layer is removed by a developer. The exposed part of the photoresist can be removed by the developer, and the unexposed part of the negative photoresist can be removed by the developer.
步骤S1.2.4:将露出的电磁感应材料层12进行刻蚀去除。Step S1.2.4: the exposed electromagnetic induction material layer 12 is etched and removed.
在该步骤S1.2.4中,若所述电磁感应材料层12采用铁、镍、钴等金属或者含有该类金属的氧化物或合金,则可采用酸性溶液将露出的电磁感应材料层12进行刻蚀去除,而剩余的光敏材料层难以被酸性溶液腐蚀。In this step S1.2.4, if the electromagnetic induction material layer 12 uses metals such as iron, nickel, cobalt, or oxides or alloys containing such metals, the exposed electromagnetic induction material layer 12 can be engraved with an acid solution. It is removed by etching, and the remaining photosensitive material layer is difficult to be corroded by the acid solution.
步骤S1.2.5:将剩余的光敏材料层进行剥离。Step S1.2.5: peel off the remaining photosensitive material layer.
在该步骤S1.2.5中,可采用碱性溶液将剩余的光敏材料层进行剥离,而采用铁、镍、钴等金属或者含有该类金属的氧化物或合金的电磁感应材料层12难以被碱性溶液腐蚀。In this step S1.2.5, an alkaline solution can be used to peel off the remaining photosensitive material layer, and the electromagnetic induction material layer 12 using metals such as iron, nickel, cobalt, or oxides or alloys of such metals is difficult to be alkaline Corrosion of the sexual solution.
如图2、4和6所示,一种光纤光栅元件1,包括光纤11和电磁感应材料层12,所述电磁感应材料层12制备覆盖在所述光纤11沿轴向分布的法位光栅调制区上。As shown in Figures 2, 4 and 6, a fiber grating element 1 includes an optical fiber 11 and an electromagnetic induction material layer 12. The electromagnetic induction material layer 12 is prepared to cover the optical fiber 11 along the axial distribution of the normal position grating modulation District.
所述电磁感应材料层12可以采用铁、镍、钴等金属或者含有该类金属的氧化物或合金,如:氧化铁、硅钢、不锈钢、铁钴合金、镍钴合金等,这类金属、金属氧化物和合金既具有良好的导电能力,同时也具有良好的导磁能力,另外,稀土或者含有稀土的氧化物或合金也可以用于制作所述电磁感应材料层12。The electromagnetic induction material layer 12 can be made of metals such as iron, nickel, cobalt, or oxides or alloys containing such metals, such as iron oxide, silicon steel, stainless steel, iron-cobalt alloys, nickel-cobalt alloys, etc., such metals and metals Oxides and alloys have both good electrical conductivity and good magnetic permeability. In addition, rare earths or oxides or alloys containing rare earths can also be used to make the electromagnetic induction material layer 12.
如图8和9所示,一种电控光纤光栅系统,包括实施例三所述的光纤光栅元件1和磁场发生装置2,所述磁场发生装置2用于产生与所述电磁感应材料层12相作用的交变磁场,使所述电磁感应材料层12发热进而对所述光纤11的法位光栅调制区进行加热,以改变所述法位光栅调制区的折射率,形成光纤光栅。As shown in Figures 8 and 9, an electronically controlled fiber grating system includes the fiber grating element 1 and the magnetic field generating device 2 described in the third embodiment. The alternating magnetic field acting together causes the electromagnetic induction material layer 12 to generate heat to heat the normal grating modulation area of the optical fiber 11 to change the refractive index of the normal grating modulation area to form a fiber grating.
该电控光纤光栅系统还包括输入接头和输出接头,所述输入接头设于所述光纤光栅元件1的一端,所述输出接头设于所述光纤光栅元件1的另一端,或者,所述输入接头和输出接头设于所述光纤光栅元件1的同一端。The electronically controlled fiber grating system also includes an input connector and an output connector. The input connector is provided at one end of the fiber grating element 1, and the output connector is provided at the other end of the fiber grating element 1, or the input The connector and the output connector are arranged at the same end of the fiber grating element 1.
所述磁场发生装置2包括磁场发射器21和电源控制模块22,所述电源控制模块22与所述磁场发射器21电性连接,以向所述磁场发射器21输出交变电流,进而使所述磁场发射器21产生所述交变磁场。The magnetic field generating device 2 includes a magnetic field transmitter 21 and a power supply control module 22. The power supply control module 22 is electrically connected to the magnetic field transmitter 21 to output an alternating current to the magnetic field transmitter 21 so as to make the The magnetic field transmitter 21 generates the alternating magnetic field.
本实施例中,所述磁场发射器21包括一电磁线圈,沿轴向环绕在所述光纤光栅元件1外。In this embodiment, the magnetic field transmitter 21 includes an electromagnetic coil that surrounds the fiber grating element 1 in the axial direction.
所述输入接头用于连接光源发生装置3,以供所述光源发生装置3向所述光纤光栅元件1内耦合进检测光束;所述输出接头用于连接光谱检测装置4,以供所述光谱检测装置4接收从所述光纤光栅元件1内透射或反射出来的光束,得到所述光纤光栅的实时写制光谱。The input connector is used to connect the light source generating device 3 for the light source generating device 3 to couple the detection beam into the fiber grating element 1; the output connector is used to connect the spectrum detection device 4 to provide the spectrum The detection device 4 receives the light beam transmitted or reflected from the fiber grating element 1 to obtain the real-time writing spectrum of the fiber grating.
当所述输入接头和输出接头设于所述光纤光栅元件1的同一端时,该电控光纤光栅系统还包括耦合装置5,所述输入接头和输出接头通过所述耦合装置5连接于所述光纤光栅元件1的同一端,所述耦合装置5可将入射的检测光束耦合至所述光纤光栅元件1内,将反射回来的光束耦合至所述光谱检测装置4内。When the input connector and the output connector are located at the same end of the fiber grating element 1, the electronically controlled fiber grating system further includes a coupling device 5, and the input connector and the output connector are connected to the coupling device 5 through the coupling device 5. At the same end of the fiber grating element 1, the coupling device 5 can couple the incident detection light beam into the fiber grating element 1, and couple the reflected light beam into the spectrum detection device 4.
如8和9图所示,一种电控光纤光栅的制备系统,不限于应用在实施例一所述的制备方法中,包括实施例四所述的电控光纤光栅系统,以及As shown in Figures 8 and 9, an electronically controlled fiber grating preparation system is not limited to being applied to the preparation method described in Example 1, including the electronically controlled fiber grating system described in Example 4, and
光源发生装置3,用于向所述光纤光栅元件1内耦合进检测光束;The light source generating device 3 is used for coupling a detection light beam into the fiber grating element 1;
光谱检测装置4,用于接收从所述光纤光栅元件1内透射或反射出来的光束,得到所述光纤光栅的实时写制光谱。The spectrum detection device 4 is used to receive the light beam transmitted or reflected from the fiber grating element 1 to obtain the real-time writing spectrum of the fiber grating.
所述光源发生装置3连接于所述电控光纤光栅系统的输入接头,所述光谱检测装置4连接于所述电控光纤光栅系统的输出接头。The light source generating device 3 is connected to the input connector of the electronically controlled fiber grating system, and the spectrum detection device 4 is connected to the output connector of the electronically controlled fiber grating system.
在一具体实现方式中,如图8所述,所述光源发生装置3连接于所述光纤光栅元件1的一端,所述光谱检测装置4连接于所述光纤光栅元件1的另一端,所述检测光束在所述光纤光栅元件1内的传输过程中,经过所述法位光栅调制区时,部分检测光束会透过所述光纤光栅继续向前传输,所述光谱检测装置4通过接收透射出来的光束,得到透射光谱作为所述光纤光栅的实时写制光谱。In a specific implementation, as shown in FIG. 8, the light source generating device 3 is connected to one end of the fiber grating element 1, and the spectrum detection device 4 is connected to the other end of the fiber grating element 1. During the transmission process of the detection light beam in the fiber grating element 1, when passing through the normal position grating modulation area, part of the detection light beam will pass through the fiber grating and continue to be transmitted forward, and the spectrum detection device 4 transmits through the reception The transmission spectrum is obtained as the real-time writing spectrum of the fiber grating.
在另一具体实现方式中,如图9所示,所述光源发生装置3和光谱检测装置4连接于所述光纤光栅元件1的同一端,所述检测光束在所述光纤光栅元件1内的传输过程中,经过所述法位光栅调制区时,部分检测光束会被所述光纤光栅反射原路返回,所述光谱检测装置4通过接收反射回来的光束,得到反射光谱作为所述光纤光栅的实时写制光谱。In another specific implementation, as shown in FIG. 9, the light source generating device 3 and the spectrum detecting device 4 are connected to the same end of the fiber grating element 1, and the detection beam is in the fiber grating element 1. During the transmission process, when passing through the normal position grating modulation area, part of the detected light beam will be reflected by the fiber grating and returned. The spectrum detection device 4 receives the reflected light beam to obtain the reflection spectrum as the value of the fiber grating Write spectrum in real time.
此时优选地,所述光源发生装置3和光谱检测装置4通过一耦合装置5连接于所述光纤光栅元件1的同一端,所述耦合装置5可将入射的检测光束耦合至所述光纤光栅元件1内,将反射回来的光束耦合至所述光谱检测装置4内。At this time, preferably, the light source generating device 3 and the spectrum detecting device 4 are connected to the same end of the fiber grating element 1 through a coupling device 5, and the coupling device 5 can couple the incident detection beam to the fiber grating In the element 1, the reflected light beam is coupled into the spectrum detection device 4.
在调制所述光线光栅的实时写制光谱时,技术人员可根据所述光谱检测装置4得到的实时写制光谱,手动控制所述磁场发生装置2中的电源控制模块22,以控制所述电源控制模块22输出的交变电流,进而控制所述磁场发射器21产生的交变磁场,最终将所述光纤光栅的实时写制光谱调制为所需写制光谱。When modulating the real-time writing spectrum of the light grating, the technician can manually control the power control module 22 in the magnetic field generating device 2 according to the real-time writing spectrum obtained by the spectrum detection device 4 to control the power supply The alternating current output by the control module 22 further controls the alternating magnetic field generated by the magnetic field transmitter 21, and finally modulates the real-time writing spectrum of the fiber grating to the required writing spectrum.
当然,该制备系统还可包括一处理控制主机(图中未示出),所述处理控制主机通讯连接于所述光谱检测装置4和磁场发生装置2之间,用于根据所述光谱检测装置4得到的实时写制光谱自动对所述磁场发生装置2的电源控制模块22进行控制,以自动将所述光纤光栅的实时写制光谱调制为所需写制光谱。Of course, the preparation system may also include a processing control host (not shown in the figure), and the processing control host is communicatively connected between the spectrum detection device 4 and the magnetic field generation device 2, and is used to detect the spectrum according to the spectrum. 4 The obtained real-time writing spectrum automatically controls the power control module 22 of the magnetic field generating device 2 to automatically modulate the real-time writing spectrum of the fiber grating to the required writing spectrum.
以上所述实施例仅表达了本发明的实施方式,其描述较为具体和详细,但并不能因此而理解为对本发明专利范围的限制,但凡采用等同替换或等效变换的形式所获得的技术方案,均应落在本发明的保护范围之内。The above-mentioned embodiments only express the implementation of the present invention. The description is more specific and detailed, but it should not be understood as a limitation on the patent scope of the present invention. However, all technical solutions obtained by equivalent substitutions or equivalent transformations , Should fall within the protection scope of the present invention.

Claims (10)

  1. 一种电控光纤光栅的制备方法,其特征在于,包括如下步骤:A method for preparing an electronically controlled fiber grating, which is characterized in that it comprises the following steps:
    S1:对光纤进行预处理,以在所述光纤沿轴向分布的法位光栅调制区上制作覆盖一电磁感应材料层,形成光纤光栅元件;S1: preprocessing the optical fiber to form an electromagnetic induction material layer on the normal grating modulation area distributed along the axial direction of the optical fiber to form a fiber grating element;
    S2:采用交变磁场与所述电磁感应材料层相作用,使所述电磁感应材料层发热进而对所述光纤的法位光栅调制区进行加热,以改变所述法位光栅调制区的折射率,形成光纤光栅。S2: Use an alternating magnetic field to interact with the electromagnetic induction material layer to heat the electromagnetic induction material layer and heat the normal grating modulation area of the optical fiber to change the refractive index of the normal grating modulation area , Forming a fiber grating.
  2. 根据权利要求1所述的电控光纤光栅的制备方法,其特征在于,在S2之后,还包括如下步骤:The method for preparing an electronically controlled fiber grating according to claim 1, characterized in that, after S2, the method further comprises the following steps:
    S3:通过控制所述交变磁场将所述光纤光栅的实时写制光谱调制为所需写制光谱。S3: modulate the real-time writing spectrum of the fiber grating to a required writing spectrum by controlling the alternating magnetic field.
  3. 根据权利要求2所述的电控光纤光栅的制备方法,其特征在于,S3包括如下步骤:The method for preparing an electronically controlled fiber grating according to claim 2, wherein S3 includes the following steps:
    S3.1:向所述光纤光栅元件内耦合进检测光束;S3.1: Couple a detection beam into the fiber grating element;
    S3.2:接收从所述光纤光栅元件内透射或反射出来的光束,得到所述光纤光栅的实时写制光谱;S3.2: receiving the light beam transmitted or reflected from the fiber grating element to obtain the real-time writing spectrum of the fiber grating;
    S3.3:控制所述交变磁场,将所述光纤光栅的实时写制光谱调制为所需写制光谱。S3.3: Control the alternating magnetic field to modulate the real-time writing spectrum of the fiber grating into a required writing spectrum.
  4. 根据权利要求2或3所述的电控光纤光栅的制备方法,其特征在于,通过控制所述交变磁场的磁场强度和/或交变频率,来调制所述光纤光栅的谐振峰值波长、损耗峰强度和制备调制时间中的至少一样。The method for preparing an electronically controlled fiber grating according to claim 2 or 3, wherein the resonant peak wavelength and loss of the fiber grating are modulated by controlling the magnetic field strength and/or the alternating frequency of the alternating magnetic field. The peak intensity is at least the same as the preparation time.
  5. 根据权利要求2或3所述的电控光纤光栅的制备方法,其特征在于,通过控制产生所述交变磁场的交变电流来控制所述交变磁场。The method for preparing an electronically controlled fiber grating according to claim 2 or 3, wherein the alternating magnetic field is controlled by controlling the alternating current that generates the alternating magnetic field.
  6. 根据权利要求5所述的电控光纤光栅的制备方法,其特征在于,通过控制所述交变电流的电流电压强度和/或交变频率,来调制所述光纤光栅的谐振峰值波长、损耗峰强度和制备调制时间中的至少一样。The method for preparing an electronically controlled fiber grating according to claim 5, wherein the resonant peak wavelength and loss peak of the fiber grating are modulated by controlling the current and voltage intensity and/or the alternating frequency of the alternating current. The intensity is at least the same as in the preparation time.
  7. 根据权利要求1所述的电控光纤光栅的制备方法,其特征在于,S1包括如下步骤:The method for preparing an electronically controlled fiber grating according to claim 1, wherein S1 comprises the following steps:
    S1.1:根据相位匹配公式,确定所需光纤光栅的法位光栅调制区沿所述光纤轴向分布的位置;S1.1: According to the phase matching formula, determine the position of the normal position grating modulation area of the required fiber grating distributed along the optical fiber axis;
    S1.2:在所述光纤沿轴向分布的法位光栅调制区上制作覆盖所述电磁感应材料层。S1.2: fabricating a layer covering the electromagnetic induction material on the normal position grating modulation area of the optical fiber distributed along the axial direction.
  8. 根据权利要求7所述的电控光纤光栅的制备方法,其特征在于,S1.2包括如下步骤:The method for preparing an electronically controlled fiber grating according to claim 7, wherein S1.2 comprises the following steps:
    S1.2.1:在所述光纤表面上制作覆盖一绝缘隔热材料层;S1.2.1: Making an insulating and heat-insulating material layer on the surface of the optical fiber;
    S1.2.2:将覆盖于所述法位光栅调制区上的绝缘隔热材料层进行剥离,使所述法位光栅调制区从所述绝缘隔热材料层中露出;S1.2.2: peeling off the insulating and heat-insulating material layer covering the normal position grating modulation area, so that the normal position grating modulation area is exposed from the insulating and heat-insulating material layer;
    S1.2.3:在露出的法位光栅调制区上制作覆盖所述电磁感应材料层。S1.2.3: Making a layer covering the electromagnetic induction material on the exposed normal position grating modulation area.
  9. 根据权利要求7所述的电控光纤光栅的制备方法,其特征在于,S1.2包括如下步骤:The method for preparing an electronically controlled fiber grating according to claim 7, wherein S1.2 comprises the following steps:
    S1.2.1:在所述光纤表面上制作覆盖一涂覆材料层;S1.2.1: Making a coating material layer on the surface of the optical fiber;
    S1.2.2:将覆盖于所述法位光栅调制区上的涂覆材料层进行剥离,使所述法位光栅调制区从所述涂覆材料层中露出;S1.2.2: peeling off the coating material layer covering the normal position grating modulation area, so that the normal position grating modulation area is exposed from the coating material layer;
    S1.2.3:在露出的法位光栅调制区上制作覆盖所述电磁感应材料层;S1.2.3: Making a layer covering the electromagnetic induction material on the exposed normal position grating modulation area;
    S1.2.4:将剩余的涂覆材料层进行剥离。S1.2.4: peel off the remaining coating material layer.
  10. 根据权利要求7所述的电控光纤光栅的制备方法,其特征在于,S1.2包括如下步骤:The method for preparing an electronically controlled fiber grating according to claim 7, wherein S1.2 comprises the following steps:
    S1.2.1:在所述光纤表面上制作覆盖所述电磁感应材料层;S1.2.1: Making a layer covering the electromagnetic induction material on the surface of the optical fiber;
    S1.2.2:在所述电磁感应材料层表面上制作覆盖一光敏材料层;S1.2.2: making a photosensitive material layer covering the surface of the electromagnetic induction material layer;
    S1.2.3:对所述光敏材料层进行曝光显影,使覆盖于所述法位光栅调制区之外的电磁感应材料层从所述光敏材料层中露出;S1.2.3: Expose and develop the photosensitive material layer, so that the electromagnetic induction material layer covering the modulation area of the normal position grating is exposed from the photosensitive material layer;
    S1.2.4:对露出的电磁感应材料层进行刻蚀。S1.2.4: Etch the exposed electromagnetic induction material layer.
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