WO2021184713A1 - Dispositif de frittage et procédé de frittage pour corps de suie de préforme de fibre optique - Google Patents

Dispositif de frittage et procédé de frittage pour corps de suie de préforme de fibre optique Download PDF

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Publication number
WO2021184713A1
WO2021184713A1 PCT/CN2020/115863 CN2020115863W WO2021184713A1 WO 2021184713 A1 WO2021184713 A1 WO 2021184713A1 CN 2020115863 W CN2020115863 W CN 2020115863W WO 2021184713 A1 WO2021184713 A1 WO 2021184713A1
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Prior art keywords
sintering
furnace core
core tube
pressure
optical fiber
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PCT/CN2020/115863
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English (en)
Chinese (zh)
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崔东明
孔明
伍淑坚
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烽火通信科技股份有限公司
武汉烽火锐拓科技有限公司
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Publication of WO2021184713A1 publication Critical patent/WO2021184713A1/fr

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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • C03B37/0146—Furnaces therefor, e.g. muffle tubes, furnace linings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Definitions

  • the application relates to the field of optical fiber preform preparation, and in particular to a sintering device and method for the loose body of an optical fiber preform.
  • Patent CN1174820A introduces a method for degassing the sintered optical fiber preform in a high-temperature furnace using the principle of gas thermal diffusion, but this method requires additional special degassing equipment, and the degassing time is long, thereby increasing The equipment investment has reduced the production cost and efficiency of the optical fiber preform.
  • negative pressure sintering is a sintering method with higher sintering efficiency. Due to the good sealing of the equipment, the vitrification process is carried out under negative pressure, so that there is basically no gas residue in the sintered densified glass body. No additional degassing process is required, and in addition, the amount of He used can be effectively reduced.
  • the design of conventional sintering equipment cannot meet the requirements of high temperature and negative pressure conditions, and the existing negative pressure sintering adopts a long temperature zone, which means that the entire loose body mother rod is placed in a heating furnace and integrated sintered under negative pressure conditions. The actual forming process It is difficult to control and is only suitable for the sintering of core rods and mother rods with smaller dimensions.
  • Patent CN101838114A describes a method for optical fiber deuterium treatment. This method optimizes the deuterium treatment time, but only from the perspective of optical fiber processing, and does not solve this problem from the source of optical fiber preform manufacturing.
  • the embodiments of the application provide a sintering device and method for loose bodies of optical fiber preforms, which integrate dehydroxylation, vitrification sintering and deuteration, which can effectively eliminate the residual gas in the optical fiber preforms and reduce the amount of He in sintering.
  • the optical fiber preform eliminates structural defects at the source of manufacturing, thereby reducing the optical fiber's hydrogen sensitivity.
  • a sintering device for the loose body of an optical fiber preform which includes:
  • Furnace core tube which is assembled in the sintering box
  • a heating assembly which is assembled in the sintering box and located outside the furnace core tube, and the heating assembly forms a heating zone in a partial space of the furnace core tube;
  • a lead rod, the bottom end of the lead rod extends into the furnace core tube and is used to connect the loose body of the preform
  • a rod-feeding mechanism which is connected with the lead rod, and the rod-delivery mechanism is used to drive the lead rod to move in a vertical direction, so that the loose body of the preform is heated in the heating zone;
  • the first tube group which penetrates the walls of the sintering box and the furnace core tube and communicates with the inner cavity of the furnace core tube, and includes a first air inlet tube and a first exhaust tube;
  • the second tube group penetrates the wall surface of the sintering box body and communicates with the inner cavity of the sintering box, and includes a second air inlet pipe and a second exhaust pipe.
  • the sintering device further includes a negative pressure mechanism connected to the second exhaust pipe and the first exhaust pipe.
  • the sintering device further includes:
  • a pressure measuring mechanism which is used to measure the pressure in the furnace core tube and the pressure in the sintering box;
  • a control system which is used to control the rod feeding mechanism to drive the movement of the lead rod, control the opening and closing of the heating assembly, control the pressure measurement mechanism to measure pressure, control the opening and closing of the negative pressure mechanism, and control the on and off of the first tube group and the second tube group .
  • an opening and closing valve is provided on the second air inlet pipe, the opening and closing valve is used to connect a second gas source, and the second gas source is used to provide Ar;
  • the first air inlet pipe is provided with a multi-way valve, the multi-way valve is used to connect to a first gas source, and the first gas source is used to provide Cl 2 , O 2 , He, D 2 and/or Ar;
  • the control system is connected to the opening and closing valve and the multi-way valve, and is used to control the opening and closing valve to control Ar to enter the second intake pipe, and to control the multi-way valve to control the access to the first intake pipe.
  • Type of gas
  • the pressure measurement mechanism includes:
  • the first pressure sensor and the second pressure sensor are separately arranged on the first air inlet pipe and the second air inlet pipe. State the pressure in the furnace core tube and the sintering box;
  • a third pressure sensor and a fourth pressure sensor are separately arranged on the first exhaust pipe and the second exhaust pipe, the third pressure sensor and the fourth pressure sensor are respectively used to measure the furnace core tube and the sintering box The pressure in the furnace core tube and the sintering box during vacuuming.
  • a method for sintering a loose body of an optical fiber preform which includes the following steps:
  • the furnace core tube is pumped to the preset first negative pressure through the first exhaust pipe, and the sintering box is pumped to the preset first negative pressure through the second exhaust pipe.
  • the heating assembly is heated to a preset dehydroxylation temperature, Cl 2 , O 2 and He are introduced into the furnace core tube through the first air inlet pipe, and into the sintering box body through the second air inlet pipe Enter Ar, and make the pressure difference between the inside and outside of the furnace core tube within the preset second pressure range;
  • Heating the heating assembly to a preset vitrification and sintering temperature, and moving the loose body of the preform under the second negative pressure until the sintering of the loose body of the entire preform is completed;
  • it further includes the following steps:
  • the lead rod is driven so that the top or bottom end of the loose body of the preform is located in the heating zone.
  • the flow rates of Cl 2 , O 2 and He are 0.5 to 1.5 L/min, 0.6 to 1.2 L/min, and 15 to 25 L/min.
  • the first pressure range, the second pressure range, the third pressure range, and the fourth pressure range are all -1 to 1 mbar.
  • the sintering device provided in this application has two sealing systems, one of which is a sealing system composed of a furnace core tube, which can be used for dehydroxylation, negative pressure removal of residual gas, negative pressure vitrification sintering and negative pressure deuteration treatment; second It is a sealing system composed of a sintering box, which is synchronized with the furnace core tube by gas or pumped into a negative pressure to balance the pressure difference between the inside and outside of the furnace core tube to protect the furnace core tube.
  • the furnace core tube is first pumped to a negative pressure after the dehydroxylation is completed. Under negative pressure, the loose body of the preform can be removed more completely The residual Cl 2 and O 2 in the carbon dioxide can reduce defects such as bubbles.
  • the vitrification sintering is performed under negative pressure without the use of He.
  • the amount of He is greatly reduced, which effectively reduces the cost of manufacturing the polished rod.
  • the optical fiber preform is deuterated under negative pressure during the cooling time in the furnace core tube, and high temperature conditions are used to accelerate the diffusion of deuterium molecules, so that the structural defects formed in the optical rod are combined with deuterium in advance, thereby reducing its hydrogen Sensitivity and difficulty of subsequent optical fiber deuteration without affecting the overall optical rod manufacturing efficiency.
  • Fig. 1 is a schematic diagram of a sintering device for a loose body of an optical fiber preform provided by an embodiment of the application.
  • A heating zone; 1. sintering box; 2. furnace core tube; 20, second insulation layer; 21, furnace core tube cover plate; 3. heating assembly; 30, first insulation layer; 31, heating body; 32. Muffle tube; 4. Lead rod; 5. Preform loose body; 6. Rod feeding mechanism; 60. Frame body; 61. Slide arm; 7. First intake pipe; 8. First exhaust pipe; 9. 10. Second intake pipe; 10. Second exhaust pipe; 11. Negative pressure mechanism; 12. Dynamic sealing mechanism; 13. Quartz adapter; 14. Pressure measuring mechanism; 140. First pressure sensor; 141. Second pressure Sensor; 142, the third pressure sensor; 143, the fourth pressure sensor.
  • the embodiment of the application provides a sintering device for the loose body of an optical fiber preform, which integrates dehydroxylation, vitrification, sintering and deuteration. It can effectively eliminate the residual gas in the optical fiber preform and reduce the amount of He in sintering. Eliminate structural defects at the source of the preform manufacturing, thereby reducing the fiber's hydrogen sensitivity.
  • the optical fiber preform loose body sintering device includes a sintering box body 1, a furnace core tube 2, a heating assembly 3, a lead rod 4, a rod feeding mechanism 6, a first tube group, and a second tube.
  • the cover plate 21 constitutes a sealed furnace core tube 2.
  • the heating assembly 3 is assembled in the sintering box 1 and located outside the furnace core tube 2.
  • the heating assembly 3 forms a heating zone A in a part of the furnace core tube 2; the bottom end of the lead rod 4 extends into the furnace core tube 2 and is used to connect the prefabricated
  • the rod loose body 5 and the lead rod 4 are sealed at the position where the sintering box body 1 and the furnace core tube 2 penetrate, so as to avoid the sintering box body 1 and the furnace core tube 2 from communicating.
  • the rod feeding mechanism 6 is connected with the lead rod 4, and the rod feeding mechanism 6 is used to drive the lead rod 4 to move in the vertical direction, so that the preform loose body 5 is heated in the heating zone A;
  • the first tube group penetrates the walls of the sintering box 1 and the furnace core tube 2 and communicates with the inner cavity of the furnace core tube 2, which includes a first air inlet pipe 7 and a first exhaust pipe 8, a first air inlet pipe 7 and a first exhaust pipe 8 Seal at the junction with the wall surface of the sintering box 1 and the furnace core tube 2;
  • the second tube group penetrates the wall of the sintering box 1 and communicates with the inner cavity of the sintering box 1, which includes a second air inlet pipe 9 and a second
  • the exhaust pipe 10, the second intake pipe 9 and the second exhaust pipe 10 are sealed at the joint with the wall surface of the sintering box 1.
  • the first air inlet pipe 7 and the second air inlet pipe 9 are used to connect corresponding air sources.
  • the sintering device provided in this application has two sealing systems, one of which is a sealing system composed of a furnace core tube, which can be used for dehydroxylation, negative pressure removal of residual gas, negative pressure vitrification sintering and negative pressure deuteration treatment; second It is a sealing system composed of a sintering box, which is synchronized with the furnace core tube by gas or pumped into a negative pressure to balance the pressure difference between the inside and outside of the furnace core tube to protect the furnace core tube.
  • the furnace core tube is first pumped to a negative pressure after the dehydroxylation is completed. Under negative pressure, the loose body of the preform can be removed more completely The residual Cl 2 and O 2 in the carbon dioxide can reduce defects such as bubbles.
  • the vitrification sintering is performed under negative pressure without the use of He.
  • the amount of He is greatly reduced, which effectively reduces the cost of manufacturing the polished rod.
  • the optical fiber preform is deuterated under negative pressure during the cooling time in the furnace core tube, and high temperature conditions are used to accelerate the diffusion of deuterium molecules, so that the structural defects formed in the optical rod are combined with deuterium in advance, thereby reducing its hydrogen Sensitivity and difficulty of subsequent optical fiber deuteration without affecting the overall optical rod manufacturing efficiency.
  • the length of the heating zone A is less than the length of the preform loose body 5, so that during the heating process, the preform loose body 5 needs to be in the rod feeding mechanism 6 It moves in the vertical direction under the drive of, to complete the heating of the entire preform loose body 5.
  • the length of the heating zone in this application is less than the length of the preform loose body.
  • the heating assembly 3 is configured such that when the preform loose body 5 is connected to the lead 4, the bottom or top end of the preform loose body 5 is located in the heating zone A, so that the preform can be moved The loose body 5 facilitates sintering from one end to the other.
  • the rod feeding mechanism 6 includes a frame body 60 and a sliding arm 61.
  • the sliding arm 61 is movably arranged on the frame body 60 in the vertical direction, and the lead rod 4 is connected to the frame body 60.
  • the rod feeding mechanism 6 is simple in structure and low in cost, and can realize the lifting and lowering of the loose body 5 of the preform.
  • the lead 4 is rotatably arranged on the sliding arm 61, Thereby, the loose body 5 of the preform can be driven to rotate around its own axis.
  • the heating assembly 3 includes a first insulation layer 30, a heating body 31, and a muffle tube 32 all in a ring shape, and the first insulation layer 30, the heating body 31 and the horse
  • the flange tubes 32 are sequentially arranged at intervals from the sintering box body 1 toward the furnace core tube 2.
  • the heating body adopts a graphite heating body.
  • the use of a muffle tube can make the temperature field of the heating zone more stable and uniform, and at the same time isolate and protect the graphite heating body.
  • the graphite heating body directly heats the muffle tube at high temperature. The volatilized carbon on the graphite heating body avoids damage to the furnace core tube due to the existence of the muffle furnace.
  • the sintering device further includes a negative pressure mechanism 11, which is connected to the second exhaust pipe 10 and the first exhaust pipe 8, and is realized by a negative pressure mechanism 11. Vacuuming the furnace core tube and the sintering box body saves the number of equipment, and the negative pressure mechanism 11 can adopt a vacuum pump.
  • the first intake pipe 7 penetrates one of the upper and lower portions of the furnace core tube 2
  • the first exhaust pipe 8 penetrates the furnace core tube The other of the upper part and the lower part of 2; and in order to facilitate the connection through a negative pressure mechanism 11, the second exhaust pipe 10 is arranged close to the first exhaust pipe 8;
  • a second insulation layer 20 is provided on the outer wall of the furnace core tube 2 located outside the heating assembly.
  • the lead rod 4 and the furnace core tube 2 are connected with a dynamic sealing mechanism 12.
  • the dynamic sealing mechanism 12 seals the lead rod 4 and the furnace core tube 2 by means of packing or oil seal.
  • the bottom end of the lead rod 4 is provided with Quartz adapter 13 to which the loose body 5 of the preform is connected.
  • the second air inlet pipe 9 is provided with an opening and closing valve, which is connected to the second air source, and the second air source is used to provide Ar;
  • the first air inlet pipe 7 is provided with a multi-pass Valve, multi-way valve is used to connect the first gas source, the first gas source is used to provide Cl 2 , O 2 , He, D 2 and/or Ar, where D 2 and Ar are usually mixed gas, the control system and the start The closing valve and the multi-way valve are connected.
  • the opening and closing valve is controlled by the control system to control Ar to enter the second air inlet pipe 9, thereby venting or shutting off the sintering box 1, and the multi-way valve is controlled by the control system to control the entry into the first air inlet pipe.
  • the sintering device further includes a pressure measuring mechanism 14 and a control system.
  • the pressure measuring mechanism 14 can be used to measure the pressure in the furnace core tube 2 and the pressure in the sintering box 1.
  • the first intake pipe 7 is provided with a multi-way valve, and the second intake pipe 9, the first exhaust pipe 8 and the second exhaust pipe 10 are provided with opening and closing valves;
  • the measuring mechanism 14, the heating assembly 3, the rod feeding mechanism 6, and the negative pressure mechanism 11 are connected.
  • the control system is used to control the rod feeding mechanism 6 to drive the guide rod 4 to move to make the preform loose body 5 move up and down, and to control the heating assembly 3 to open and close.
  • the second negative pressure or the third negative pressure the pressure measuring mechanism 14 is controlled to perform pressure measurement to ensure that the pressure in the furnace core tube is at the first negative pressure, the second negative pressure or the third negative pressure, and the pressure difference between the inside and outside of the furnace core tube is at a preset
  • the first pressure range, the second pressure range, the third pressure range, or the fourth pressure range is controlled to perform pressure measurement to ensure that the pressure in the furnace core tube is at the first negative pressure, the second negative pressure or the third negative pressure, and the pressure difference between the inside and outside of the furnace core tube is at a preset The first pressure range, the second pressure range, the third pressure range, or the fourth pressure range.
  • the first air inlet pipe 7 penetrates one of the upper and lower portions of the furnace core tube 2, and the first exhaust pipe 8 penetrates the other of the upper and lower portions of the furnace core tube 2.
  • the second intake pipe 9 is located close to the first intake pipe 7, and the second exhaust pipe 10 is located close to the first exhaust pipe 8;
  • the pressure measuring mechanism 14 includes: separately located in the first intake pipe 7 and the second intake pipe 9
  • the first pressure sensor 140 and the second pressure sensor 141, the first pressure sensor 140 and the second pressure sensor 141 are respectively used to measure the furnace core tube 2 and the sintering box 1 when the furnace core tube 2 and the sintering box 1 Pressure; and, a third pressure sensor 142 and a fourth pressure sensor 143 separately provided on the first exhaust pipe 8 and the second exhaust pipe 10, the third pressure sensor 142 and the fourth pressure sensor 143 are used to measure the furnace core tube 2 and the pressure in the furnace core tube 2 and the sintering box 1 when the sintering box 1 is vacuumed.
  • the advantage of using the above four pressure sensors for the layout is that the furnace core tube 2 is usually very long, and there are some differences in the pressure at the upper and lower ends of the furnace core tube 2 during ventilation or vacuuming. Therefore, the first pressure sensor 140 and the second pressure sensor 140 are used for air intake. The second pressure sensor 141 performs measurement, and the third pressure sensor 142 and the fourth pressure sensor 143 are used to measure when vacuuming, to ensure that the measured pressure is more accurate.
  • a method for sintering the loose body of an optical fiber preform includes the following steps:
  • the heating assembly 3 is heated to the preset dehydroxylation temperature, Cl 2 , O 2 and He are introduced into the furnace core tube 2 through the first air inlet pipe 7, and into the sintering box 1 through the second air inlet pipe 9 Ar, the pressure difference between the inside and outside of the furnace core tube 2 is within the preset second pressure range; in this step, the heating element 3 has a heating rate of 25-50°C/min, and a dehydroxylation temperature of 1100-1250°C.
  • the heating assembly 3 is heated to the preset vitrification and sintering temperature, and under the second negative pressure, the preform loose body 5 is moved until the sintering of the entire preform loose body 5 is completed; in this step, the vitrification and sintering temperature is 1500-1600°C, the heating speed of the heating assembly 3 is 25-50°C/min, and the moving speed of the preform loose body 5 is 3-8mm/min.
  • step S5 the second negative pressure has been pumped, and in step S6, when the temperature is raised, on the one hand, since the second negative pressure is close to vacuum and there is less gas, the temperature rise pressure changes little, step S6
  • the pressure in S6 is basically under the second negative pressure.
  • the internal pressure of S6 deviates from the second negative pressure due to the increase in temperature, it can be adjusted by the negative pressure mechanism so that the pressure is at the second negative pressure. Down.
  • the following step is further included: driving the lead 4 so that the top or bottom end of the loose body 5 of the preform is located in the heating zone A.
  • the flow rates of Cl 2 , O 2 and He are 0.5 to 1.5 L/min, 0.6 to 1.2 L/min, and 15 to 25 L/min.
  • the first pressure range, the second pressure range, the third pressure range, and the fourth pressure range are all -1 to 1 mbar.
  • the vacuum pump is turned on to pump the inside and outside of the furnace core tube 2 to 20 mbar to discharge the air in the tube, and the heating body 31 is heated to 1200 °C at a heating rate of 25 °C/min, and the furnace core tube 2 is passed through Into 1slm Cl 2 , 0.8slm O 2 and 15slm He, turn on the rod feeding mechanism 6 to make the preform loose body 5 move downwards at a speed of 15mm/min for dehydroxylation.
  • the heating body 31 is heated to 1550 °C at a heating rate of 25 °C/min, and the rod feeding mechanism 6 is turned on to make the preform loose body 5 under a negative pressure environment.
  • the speed of 4mm/min is gradually sintered from bottom to top to be transparent.
  • the heating body 31 enters the cooling stage, the vacuum pump is turned off, and the volume D 2 is introduced into the furnace core tube 2
  • the D 2 /Ar mixture with a concentration of 1.5% and Ar is introduced into the sintering box 1, when the pressure in the furnace core tube 2 reaches 0.6 bar, the ventilation is stopped and the deuteration is maintained for 3 hours, and then the vacuum pump is turned on to reduce the D 2 in the furnace core tube 2
  • the /Ar mixed gas and Ar in the sintering box 1 are removed, and then a large flow of Ar is passed into the quartz furnace core tube.
  • the rising rod feeding mechanism lifts the sintered optical fiber preform out of the furnace core tube. There are no obvious bubbles in the sintered transparent optical fiber preform.
  • the typical attenuation of the drawn optical fiber at 1383nm is 0.275db/km. Deuterium treatment at 1.5% D 2 volume concentration can effectively reduce its hydrogen sensitivity. .
  • it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, It can also be an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the internal communication between two components.
  • a fixed connection a detachable connection, or an integral connection
  • it can be a mechanical connection, It can also be an electrical connection
  • it can be directly connected, or indirectly connected through an intermediate medium, and it can be the internal communication between two components.

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  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
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  • General Chemical & Material Sciences (AREA)
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Abstract

La présente invention concerne un dispositif de frittage et un procédé de frittage pour un corps de suie de préforme de fibre optique. Le dispositif de frittage comprend une boîte de frittage, un tube central de four, un ensemble de chauffage, une barre ronde, un mécanisme d'alimentation de préforme, un premier groupe de tuyaux et un second groupe de tuyaux. Le tube central de four et l'ensemble de chauffage sont agencés dans la boîte de frittage, l'ensemble de chauffage formant une zone de chauffage. La barre ronde s'étend dans le tube central de four et est utilisée pour raccorder un corps de suie de préforme. Le mécanisme d'alimentation de préforme est raccordé à la barre ronde pour amener la barre ronde à se déplacer de telle sorte que le corps de suie de préforme est chauffé dans la zone de chauffage. Le premier groupe de tuyaux s'étend à travers les parois de la boîte de frittage et du tube central de four et communique avec une cavité interne du tube central de four, et comprend un premier tuyau d'admission et un premier tuyau d'échappement. Le second groupe de tuyaux s'étend à travers la paroi de la boîte de frittage et communique avec une cavité interne de la boîte de frittage, et comprend un second tuyau d'admission et un second tuyau d'échappement. La présente invention intègre la déshydroxylation, le frittage par vitrification, et une deutération, et peut éliminer efficacement un gaz résiduel à l'intérieur d'une préforme de fibre optique, réduire la quantité d'He utilisé, et éliminer les défauts structuraux de la source de fabrication de préforme de fibre optique, ce qui permet de réduire la sensibilité à l'hydrogène d'une fibre optique.
PCT/CN2020/115863 2020-03-17 2020-09-17 Dispositif de frittage et procédé de frittage pour corps de suie de préforme de fibre optique WO2021184713A1 (fr)

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CN202010188691.8A CN111423106A (zh) 2020-03-17 2020-03-17 一种光纤预制棒疏松体的烧结装置及烧结方法
CN202010188691.8 2020-03-17

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Cited By (3)

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Publication number Priority date Publication date Assignee Title
CN113908771A (zh) * 2021-10-15 2022-01-11 中国科学技术大学 一种基于连续分子束源的低压闪热解流动管反应装置
CN115536264A (zh) * 2022-09-27 2022-12-30 浙江富通光纤技术有限公司 一种光纤预制棒烧结工艺自动化供气装置及其控制方法
CN115947537A (zh) * 2022-12-24 2023-04-11 藤仓烽火光电材料科技有限公司 一种石英芯棒的表面处理装置及表面处理方法

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CN111423106A (zh) * 2020-03-17 2020-07-17 烽火通信科技股份有限公司 一种光纤预制棒疏松体的烧结装置及烧结方法
CN112624600B (zh) * 2021-01-12 2023-06-23 江苏法尔胜光子有限公司 一种光纤预制棒制备用烧结炉抽风罩及抽风压力在线调节方法
CN113248132B (zh) * 2021-07-08 2021-09-21 藤仓烽火光电材料科技有限公司 一种用于生产光纤预制棒的加热炉系统及其加热方法

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