WO2021181512A1 - Production method for fe-based amorphous alloy powder - Google Patents

Production method for fe-based amorphous alloy powder Download PDF

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WO2021181512A1
WO2021181512A1 PCT/JP2020/010225 JP2020010225W WO2021181512A1 WO 2021181512 A1 WO2021181512 A1 WO 2021181512A1 JP 2020010225 W JP2020010225 W JP 2020010225W WO 2021181512 A1 WO2021181512 A1 WO 2021181512A1
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amorphous alloy
based amorphous
crushed
crushing
producing
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PCT/JP2020/010225
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French (fr)
Japanese (ja)
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西村 和則
加藤 哲朗
中田 慎一
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日立金属株式会社
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Priority to PCT/JP2020/010225 priority Critical patent/WO2021181512A1/en
Priority to JP2022507040A priority patent/JP7283627B2/en
Publication of WO2021181512A1 publication Critical patent/WO2021181512A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22DCASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D11/00Continuous casting of metals, i.e. casting in indefinite lengths
    • B22D11/06Continuous casting of metals, i.e. casting in indefinite lengths into moulds with travelling walls, e.g. with rolls, plates, belts, caterpillars
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/04Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/147Alloys characterised by their composition
    • H01F1/153Amorphous metallic alloys, e.g. glassy metals

Definitions

  • the present invention relates to a method for producing an Fe-based amorphous alloy powder obtained by crushing a foil-shaped Fe-based amorphous alloy obtained by a liquid quenching method.
  • amorphous alloys Since amorphous alloys have excellent soft magnetic properties, they are used in combination with coils as magnetic cores in inductors of various electronic and electrical equipment such as power supply circuits, and electronic components such as reactors, transformers, and filters.
  • Amorphous alloys are obtained by a liquid quenching method in which the molten metal of the alloy is quenched and solidified.
  • Amorphous alloys in thin thickness foil, 10 6 ° C. / sec about, or band that continuous elongated by the method is more cooling rate called single roll method or a double roll method obtained in (ribbon or film) It is obtained in a state, and is called a thin band, a table, a sheet, or the like because of its form.
  • a foil-like amorphous alloy having a long and band-like shape is referred to as a thin band.
  • the thickness is preferably 50 ⁇ m or less from the viewpoint of amorphization.
  • amorphization includes not only the case where the alloy is amorphous single phase but also the case where the alloy does not contain the crystal phase as much as possible and the obtained magnetic characteristics are close to the amorphous single phase.
  • a foil-shaped amorphous alloy produced by a known means is subjected to secondary processing by, for example, winding a thin band to form a ring-shaped wound magnetic core, or cutting or punching the thin band to obtain a predetermined shape.
  • It is used as a laminated magnetic core made by laminating it.
  • the shape of the magnetic core to be formed is limited even if it is used by secondary processing according to the shape of the laminated magnetic core, and it is difficult to form magnetic cores of various shapes with a high degree of freedom. ..
  • the magnetic core is suppressed so as to suppress the decrease in magnetic permeability and the change with respect to the frequency and DC superimposed current.
  • a gap is provided in the magnetic path of the above.
  • a gap of about 0.5 to 5% of the magnetic path length is formed. Magnetic flux tends to leak from such voids.
  • the coil is arranged so as to cover the gap, an eddy current is generated by the magnetic flux leaking to the lead wire side constituting the coil (leakage magnetic flux), which causes a problem of increasing the eddy current loss of the electronic component.
  • amorphous alloys are used as a powder form.
  • crushed powder obtained by crushing a thin band is known.
  • Tokukousho 60-401 is an amorphous alloy in which an amorphous alloy in the form of a ribbon or the like obtained by quenching a melt of an amorphous alloy is annealed into a brittle state, and the brittle amorphous alloy is crushed into a powder. Describes the method for producing powder.
  • the quenching temperature for embrittlement is preferably in the temperature range of 150 ° C to 50 ° C lower than the glass transition temperature of the amorphous alloy. It is stated that stamp mills, crushers, rolls, etc. are included.
  • the particle size of the obtained powder is not limited, it is described that the amorphous alloy powder having a particle size of about 25 to 100 ⁇ m was obtained from the ribbon-shaped amorphous alloy by the pulverization treatment with a ball mill.
  • Japanese Patent Application Laid-Open No. 2005-57230 preheats and crushes an Fe-based amorphous metal ribbon to obtain an amorphous metal powder, adds a binder to the obtained amorphous metal powder, mixes the mixture, and then forms a core.
  • a method for producing an amorphous soft magnetic core in which a molded core is annealed it only states that a crusher is used, and does not mention a specific method.
  • International Publication No. 2015/008813 discloses a method for producing a crushed powder of an amorphous alloy ribbon.
  • the amorphous alloy strip is subjected to a brittle heat treatment of 320 ° C or higher and 380 ° C or lower.
  • the pulverization step is divided into at least two steps of coarse pulverization and fine pulverization, preferably three steps of coarse pulverization, medium pulverization and fine pulverization. It is described that it is preferable to gradually reduce the particle size in terms of pulverization ability and uniformity of particle size. According to International Publication No.
  • the embrittlement treatment is performed on a spool in which a thin band is wound, a thin band in an unwound state, or a mass formed by pressing a foil body into a predetermined shape. It is described that it is preferable to carry out the process as a method, and when the thin band is in the state of a spool or a shaped mass, it is desirable to crush it before coarse crushing.
  • Amorphous alloys are known to have high hardness and are not easily plastically deformed. Therefore, when the amorphous alloy strip is crushed, a large load is applied to the crusher, so that crushed powder that cannot be processed in an overloaded state may accumulate inside and the crusher may stop. Further, when it takes a long time to pulverize, a large internal stress is accumulated in the obtained pulverized powder, and the pulverized powder tends to be inferior in magnetic characteristics. In order to avoid such a problem, there is a method of reducing the load on the crusher by supplying a processed product which has been cut or sheared with a steel blade or a mold in advance to the crusher.
  • the amorphous alloy is subjected to heat treatment (embrittlement treatment) for embrittlement and pulverized. Measures to make it easier are effective.
  • International Publication No. 2015/008813 describes a method of forming a spool in which a thin band is wound when a large amount of amorphous alloy thin band is to be pulverized.
  • the crusher needs to crush a mixture of a portion that is easy to crush and a portion that is difficult to crush. In this case as well, a large load may be generated on the crusher.
  • an object of the present invention is to provide an optimum production method for obtaining an Fe-based amorphous alloy powder having a small processing strain and a small coercive force.
  • the present inventors have separated the crushed body of the Fe-based amorphous alloy into a foil shape by a sorting means using a cylindrical body or a plate-shaped body having a large number of through holes.
  • a sorting means using a cylindrical body or a plate-shaped body having a large number of through holes.
  • the strain given to the crushed powder can be suppressed by dividing into small pieces and sorting, and a Fe-based amorphous alloy powder having a small processing strain and a small coercive force can be obtained, and the present invention was conceived. bottom.
  • the method of the present invention for producing an Fe-based amorphous alloy powder includes an embrittlement step of heating and embrittlement of a foil-like mass of Fe-based amorphous alloy.
  • the Fe-based amorphous alloy small piece is provided with a pulverization step of dry pulverization by a pulverization means.
  • the sorting means includes a cylindrical body having a large number of through holes. With the crushed body put inside the cylindrical body, the crushed body is rotated around an axis, the crushed body is crushed and separated into a foil shape, and the crushed body is divided into small pieces and formed into the cylindrical body. It is characterized by passing through the through hole.
  • Another method of the present invention for producing Fe-based amorphous alloy powder is an embrittlement step of heating a foil-like mass of Fe-based amorphous alloy to make it brittle.
  • a crushing step of roughly crushing the embrittled agglomerates, and
  • the Fe-based amorphous alloy small piece is provided with a pulverization step of dry pulverization by a pulverization means.
  • the sorting means includes a plate-like body having a large number of through holes, and the sorting means has a plate-like body.
  • the plate-shaped body is vibrated in a state where the crushed body is put on the plate-shaped body, the crushed body is crushed and separated into a foil shape, and the crushed body is divided into small pieces and formed into the plate-shaped body. It is characterized by passing through the through hole.
  • the diameter of the through hole formed in the cylindrical body or plate-like body is preferably 30 to 150 mm.
  • the average particle size of the crushed powder is 50 to 240 ⁇ m.
  • the crushing means in the crushing step is a pin mill or a hammer mill.
  • a lumping step of forming a foil-like Fe-based amorphous alloy into a lump Prior to the embrittlement step, it is preferable to include a lumping step of forming a foil-like Fe-based amorphous alloy into a lump.
  • the pulverization step comprises a first pulverization step and a second pulverization step.
  • first pulverization step small pieces of Fe-based amorphous alloy selected to a predetermined size are roughly pulverized, and in the second pulverization step, It is preferable to finely pulverize the pulverized powder obtained in the first pulverization step.
  • the average particle size of the crushed powder is 0.5 to 10 mm in the first crushing step and the average particle size of the crushed powder is 50 to 240 ⁇ m in the second crushing step.
  • the first crushing step consists of a 1-1 crushing step and a 1-2 crushing step.
  • the 1-1 crushing step small pieces of Fe-based amorphous alloy selected to a predetermined size are roughly crushed.
  • the crushed powder obtained in the 1-1 crushing step is medium crushed, and in the second crushing step, the crushed powder obtained in the 1-2 crushing step is finely divided. It is preferable to grind.
  • the average particle size of the crushed powder was set to 2 to 20 mm in the 1-1 crushing step, the average particle size of the crushed powder was set to 0.5 to 4 mm in the 1-2 crushing step, and the crushed powder was set to 0.5 to 4 mm in the second crushing step.
  • the average particle size of is preferably 50 to 240 ⁇ m.
  • the crushing means in the first crushing step is a crushing and sizing machine
  • the crushing means in the second crushing step is a pin mill or a hammer mill.
  • an oxide film forming step of forming an oxide film on the surface of the pulverized powder it is preferable to include an oxide film forming step of forming an oxide film on the surface of the pulverized powder.
  • the alloy composition of the Fe -based amorphous alloy powder is Fe 100-xy A x X y (where A is Cu and / or Au, X is B, Si, S, C, P, Al, Ge, B, Sn and It is represented by at least one element selected from the group consisting of Cr), and is preferably represented by 0 ⁇ x ⁇ 5 and 10 ⁇ y ⁇ 24 in atomic%.
  • FIG. 5 is a plan view schematically showing a state in which a wound body is arranged in an embrittlement heat treatment furnace in the method for producing an Fe-based amorphous alloy powder of the present invention.
  • FIG. 1 is a flowchart of a manufacturing process in the method for manufacturing a Fe-based amorphous alloy powder of the present invention.
  • a foil-shaped Fe-based amorphous alloy powder is used as a material to form a mass of a predetermined size, which is then heated to embrittle and then dry-ground to obtain a desired particle size. To get. If necessary, an oxide film is further formed on the surface of the Fe-based amorphous alloy powder.
  • each step will be described in detail.
  • a quenching solidification strip obtained by quenching the molten alloy as in the single roll method is used.
  • the Fe-based amorphous alloy strip it is preferable to use a Fe-based amorphous alloy strip having a high saturation magnetic flux density Bs of 1.4 T or more.
  • a Fe-based amorphous alloy strip such as Fe-Si-B system represented by Metglas (registered trademark) 2605SA1 material can be used.
  • a composition such as Fe-Si-BC type or Fe-Si-BC-Cr type containing other elements can be adopted. A part of Fe may be replaced with Co, Ni or the like.
  • the alloy composition is not particularly limited, and can be selected according to the required properties.
  • an amorphous alloy that develops a nanocrystal structure by heat treatment may be used.
  • This is called a nanocrystal alloy, which is in an amorphous state during quenching and solidification, but is subsequently heat-treated to form a nanocrystal structure and exhibits excellent soft magnetic properties.
  • it is produced in the form of a foil-like amorphous alloy, which can be pulverized into pulverized powder and used as a magnetic core material.
  • an amorphous alloy strip which is a Fe-based nanocrystal alloy strip having a high saturation magnetic flux density Bs of 1.2 T or more.
  • Fe-based nanocrystals such as Fe-Si-B-Cu-Nb series, Fe-Cu-Si-B series, Fe-Cu-B series, and Fe-Ni-Cu-Si-B series.
  • Aluminous alloy strips for alloys can be used. A system in which a part of these elements is substituted and a system in which other elements are added may be used.
  • Fe 100-xy A x X y (where A is Cu and / or Au, X is B, Si, S, C, P, Al, Ge, B , At least one element selected from the group consisting of Sn and Cr), and is preferably represented by 0 ⁇ x ⁇ 5, 10 ⁇ y ⁇ 24 in atomic%.
  • the nanocrystal structure is a microcrystal structure having a particle size of 100 nm or less.
  • the heat treatment for expressing nanocrystals can be performed, for example, after forming the magnetic core shape or before forming the magnetic core shape and after pulverization.
  • an amorphous alloy that develops a nanocrystal structure by this heat treatment it is sufficient that the pulverized powder has a nanocrystal structure in the finally obtained dust core or the like. Therefore, at the time of subjecting to pulverization, an amorphous alloy that develops a nanocrystal structure by heat treatment may be used.
  • the thickness of the foil-like amorphous alloy of the present embodiment is preferably in the range of 10 to 50 ⁇ m. If it is less than 10 ⁇ m, the mechanical strength is low and it is difficult to stably cast a long alloy strip. Further, if it exceeds 50 ⁇ m, a part of the alloy is likely to crystallize. In the present embodiment, a part of the alloy may be crystallized, but the magnetic properties may deteriorate such as a large coercive force. Therefore, considering the influence on the magnetic properties, a crystal phase is formed in the alloy structure. It is preferable that the magnetic properties obtained are close to those of an amorphous single phase without containing as much as possible.
  • the thickness of the foil-like amorphous alloy is more preferably 13 to 35 ⁇ m.
  • Foil-shaped amorphous alloy is an amorphous alloy thin band that has a long shape and is distributed as a large wound body, or a piece of piece that is generated by cutting or punching the thin band as a part other than the necessary part. It may be scrap material.
  • the width of the thin band is not particularly limited, and a band having a width that is on the market can be used, and a slit is formed from the width that is on the market.
  • amorphous alloy powder As a material for the amorphous alloy powder, it is possible to use a foil-like Fe-based amorphous alloy as an amorphous alloy strip as a large wound body, or to use scraps.
  • the offcuts are the residue after removing the amorphous alloy strips of the desired shape, and their sizes and shapes are diverse, and they are very bulky in a disjointed state and are not easy to handle.
  • amorphous alloy strips have a long shape and are distributed as large wound bodies, typically wound bodies with an outer diameter of about 1 to 2 m, and their weight exceeds several hundred kg. In this case as well, it may not be easy to handle as it is. Therefore, it is preferable to make the foil-shaped Fe-based amorphous alloy into a mass having a size and weight that is easy to handle.
  • an amorphous alloy strip when used as a material, an amorphous alloy strip is first pulled out from a large roll and then rewound to prepare a lumpy body as a small roll. do. If it is difficult to handle the large wound body as it is due to equipment factors, it is preferable to appropriately prepare a wound body having a suitable size and agglomerate it.
  • the suitable mass thereof When rewinding from a large winding body to a small annular or columnar winding body (mass), the suitable mass thereof is preferably 5 to 50 kg, more preferably 10 to 20 kg, and the outer diameter of the wound body. It is preferably 100 to 400 mm, and more preferably 120 to 150 mm.
  • a normal winding method for winding an amorphous alloy strip may be used as a method for producing the wound body.
  • the tension at the time of winding is preferably 10 to 100 kPa, and the winding speed is preferably 50 to 150 m / min.
  • the offcuts When the material is offcuts, it is preferable to put the offcuts into a mold, press and integrate them to form a lump of offcuts. This facilitates handling.
  • a metal compressor such as a three-way press or a two-way press can be used to produce a lump of offcuts. Further, a one-sided tightening press may be used. By pressing the offcuts with such a press, it is possible to form a lump of offcuts.
  • the size of the lump may be, for example, a rectangular parallelepiped having a side of about 20 cm, and the size of one side is preferably about 10 to 30 cm, more preferably about 15 to 25 cm. If the mass is too small, handling becomes complicated, and if it is too large, the mass increases and handling becomes difficult.
  • the shape of the massive body does not necessarily have to be a rectangular parallelepiped, and may be a polygonal body, a cylindrical body, or a shape close to them. If the shape and mass are easy to handle, the form can be appropriately selected.
  • the pressing force when pressing and integrating the scraps of the amorphous alloy strip is preferably 1 to 500 MPa. If it is less than 1 MPa, it is difficult to make a lump, and if it exceeds 500 MPa, the press becomes large and inefficient, and the amorphous alloy is distorted greatly, and the obtained amorphous alloy powder is obtained.
  • the magnetic characteristics may be inferior.
  • the lower limit of the pressing force is more preferably 5 MPa, still more preferably 10 MPa.
  • the upper limit of the pressing force is more preferably 200 MPa, still more preferably 100 MPa.
  • embrittlement step a2 it is preferable to heat-treat the agglomerates for embrittlement.
  • This embrittlement treatment is not essential when the thin strips and scraps of the Fe-based amorphous alloy are used as they are without being agglomerated, but even in that case, the embrittlement treatment can improve the pulverizability. Therefore, it is preferable.
  • the heat treatment may be performed in the atmosphere or in a non-oxidizing atmosphere. Although it depends on the composition of the Fe-based amorphous alloy, it has the property of being easily crushed due to embrittlement caused by heat treatment at 250 ° C. or higher. Increasing the temperature of the embrittlement process makes it more embrittled and easier to grind.
  • the embrittlement treatment temperature is preferably 100 to 220 ° C. lower than the crystallization temperature, and preferably 300 to 400 ° C.
  • the temperature of the embrittlement treatment is more preferably 300 to 380 ° C, still more preferably 320 to 380 ° C, and most preferably 340 to 380 ° C.
  • the holding time of 1 hour or less is sufficient, preferably 30 minutes or less.
  • the holding time and the reached temperature of each may be different as long as all the wound bodies have reached the above temperature. That is, there may be a difference in temperature depending on the position in the heat treatment furnace, but in that case, it is sufficient that all the wound bodies have reached the predetermined temperature range of the embrittlement treatment, and the respective reached temperature or holding time is It may be different.
  • the temperature of one agglomerate does not have to be uniform as a whole, and at least a part thereof may be in the temperature range of the embrittlement treatment. Depending on the composition of the amorphous alloy, the embrittlement treatment may be omitted.
  • Crushing process a3 it is preferable to perform a crushing treatment on the agglomerates after the embrittlement treatment or the untreated mass.
  • This crushing step is mainly performed on the lumps, and the lumps of the foil-like amorphous alloy that are lumps are roughly crushed.
  • Crushing can be performed by applying an external force using a crushing press or a hammer.
  • the mass is wound in the pressurizing direction of the crushing press machine, it is preferable to press and crush the mass in a state where the winding axis directions are the same. Pressurization may be performed from any direction as long as it is a mass obtained from scraps, but it is preferable that there is a flat surface in the pressurization direction.
  • the pressing force of the press is preferably 0.3 ton / kg or more per mass of the mass.
  • This pressing force is defined as a value obtained by dividing the maximum pressing force when crushing with a crushing press by the mass of the wound body to be charged. If this pressing force is less than 0.3 ton / kg, the crushing force is weak and crushing is not sufficient. If the pressing force is greater than 5 ton / kg, the press will be large and inefficient. Therefore, the pressing force of the press in the crushing step is preferably 0.3 to 5 ton / kg per mass of the mass.
  • Sorting process a4 The morphology of the crushed body after the crushing process of the lump body is in the state of foil-like fragments that are irregularly divided into large and small pieces, or in the state where the foils are stacked in multiple layers and adhere to each other to form a multilayer body. It has become. In particular, when a massive body obtained by rewinding an amorphous alloy strip to form a small wound body is used, many multilayer bodies are present in the crushed body.
  • the crushed body includes a large one having a shape larger than a human fist in a plan view. If the large crushed material cannot be supplied to the crusher in the next crushing process, or the crusher is overloaded due to a large load, unprocessable crushed powder accumulates inside the crusher and the crusher stops.
  • the crushed body in the multi-layered state is disassembled and separated to reduce the overlap of foils, further divided into small pieces, and the small pieces of Fe-based amorphous alloy are sieved and sorted to a predetermined size. To separate. The small pieces sorted and separated in this way are supplied to the next pulverization step.
  • the division of the crushed body of the foil-like Fe-based amorphous alloy, in particular, the separation of the multilayer body in which these foils are laminated in multiple layers can be performed by hand, for example, but a large amount of the crushed body of the Fe-based amorphous alloy can be used. Not efficient when trying to process. Therefore, in the present embodiment, the crushed body is divided, separated and sorted by the sorting means using the sorting device 100 as shown in FIG.
  • the sorting device 100 includes a bottomed cylinder 101, which is tilted at an angle of 45 degrees or less so that its central axis CL is parallel to the horizontal installation surface of the device or the bottom side is low. It is rotatably supported by the central axis CL.
  • the cylinder 101 can be rotated around the central axis CL, for example, by a motor (not shown).
  • the cylindrical body 101 has a side surface 105 through which a large number of through holes 107 are formed, and the diameter of each through hole 107 is preferably 3 to 15 cm. It is preferable that 20 or more through holes 107 are formed per unit area (1 m 2 ) of the side surface 105, and as shown in FIG. 3, they are preferably arranged in a staggered pattern.
  • the crushed body 15 obtained in the crushing step a3 is put into the cylindrical body 101 through the opening on the upper side (left side in the figure) of the cylindrical body 101, and the crushed body 15 is rotationally driven to drive the crushed body 15.
  • Divide, separate and sort Inside the rotating cylinder 101, there are multiple layers due to the impact caused by the collision of the crushed bodies 15 and the frictional resistance due to the contact when the crushed bodies 15 slide along the inside of the side surface 105 of the cylinder 101.
  • the body is unraveled, the overlapping foils are separated, and the pieces are further divided into small pieces.
  • a small piece of Fe-based amorphous alloy having a size capable of passing through the through hole 107 formed on the side surface 105 of the cylindrical body 101 passes through the through hole 107 and cannot pass through the through hole 107.
  • the crushed body 15 of the size is left in the cylindrical body, and the crushed body 15 is continuously crushed and divided.
  • a small piece 20 of an Fe-based amorphous alloy having a size corresponding to the hole diameter of the through hole 107 formed on the side surface 105 can be sorted and separated.
  • a foil-shaped Fe-based amorphous alloy is thrown onto a plate-shaped body 201 having a large number of through holes 107, and the plate-shaped body 201 is vibrated to provide Fe.
  • a sorting device including a vibrating sieve 200 that sifts a basic amorphous alloy through a through hole 107 as a small piece is used as a sorting means.
  • the multilayer body is disassembled by the impact due to the collision between the crushed bodies 15 and the frictional resistance due to the contact between the crushed body 15 and the plate-shaped body 201, the overlapping foils are separated, and the fragments are separated. It is further divided into small pieces.
  • a small piece of Fe-based amorphous alloy having a size capable of passing through the through hole 107 formed in the plate-shaped body 201 passes through the through hole 107 and cannot pass through the through hole 107.
  • the crushed body 15 of the above is left in the plate-like body 201, and the crushed body 15 is continuously crushed and divided. From such a sorting means, a small piece 20 of an Fe-based amorphous alloy having a size corresponding to the hole diameter of the through hole 107 formed in the plate-shaped body 201 can be sorted and separated.
  • the hole diameter of the through hole 107, the number of formations per unit area (1 m 2 ), and the arrangement may be the same as those of the above-mentioned cylindrical body 101.
  • the cylindrical body 101 and the plate-shaped body 201 are preferably formed of a punching metal, an etching metal, an expanded metal or the like made of an iron steel plate, a stainless steel plate, aluminum or the like.
  • small pieces of the Fe-based amorphous alloy obtained in the sorting step a4 are pulverized.
  • the pulverization is preferably carried out using a pin mill or a hammer mill.
  • a pin mill is a device that has two discs facing each other and a large number of pins planted on the surface of the discs so that they mesh with each other.
  • the small pieces of Fe-based amorphous alloy put into the pin mill are supplied to the center of the disc, and move in the circumferential direction by the centrifugal force generated by the high-speed rotation of one disc or both discs, and are driven by the pins. It is crushed and crushed by impact force and shearing force.
  • the hammer mill crushes and crushes small pieces of Fe-based amorphous alloy by the impact force and shearing force of a high-speed rotating hammer.
  • the obtained Fe-based amorphous alloy powder has a flat surface with sharp edges and a surface close to a thin band state, and almost the entire surface is a flaky piece having a flat surface and side surfaces of a fracture surface. It becomes a state.
  • a pulverized powder having an average particle size of about 240 ⁇ m or less and a small processing strain.
  • the processing strain of the pulverized powder can be reduced, an Fe-based amorphous alloy powder having a small coercive force can be obtained.
  • pulverized powder having a small coercive force When pulverized powder having a small coercive force is used for a dust core, it is preferable because a magnetic core having a small magnetic core loss and excellent magnetic characteristics can be obtained.
  • the crushing means it is more preferable to use a pin mill having a short crushing time that receives processing strain.
  • the crushing step a5 may be divided into a first crushing step a5-1 and a second crushing step a5-2.
  • a crushing and sizing machine is a crushing machine having a blade equipped with one or more crushing blades called a cutter or a knife and a cylindrical screen in which the blade is housed. Small pieces of Fe-based amorphous alloy charged into the pulverizer and sizing machine are arranged on the blades that rotate at high speed until they pass through a large number of through holes formed in the screen installed around the rotation axis of the blades.
  • the holes in the screen are rounded or rounded, and if the screen is round, the diameter is smaller than the holes through which the small pieces of Fe-based amorphous alloy pass in the sorting step a4, and the diameter is 1.5 to 12 mm. Is preferable.
  • the crushed powder obtained by the coarse crushing in the first crushing step a5-1 is finely crushed in the second crushing step a5-2.
  • the second crushing step a5-2 it is preferable to use a pin mill or a hammer mill as the crusher, and it is more preferable to use a pin mill.
  • fine pulverization performed using a pin mill or a hammer mill it is preferable to use pulverized powder having an average particle size of 50 to 240 ⁇ m. Further, it is preferable to use a pulverized powder having an average particle size of 50 to 180 ⁇ m.
  • the pulverized powder obtained in the present embodiment has practical fluidity, but if the pulverized powder is flat, its fluidity tends to decrease. Therefore, if good fluidity is to be obtained, the average particle size Is preferably more than 2 times to 6 times or less the thickness of the foil-like amorphous alloy.
  • the crushing step a5 by performing the crushing step a5 separately in the first crushing step a5-1 and the second crushing step a5-2, crushing by coarse crushing is performed in the first crushing step a5-1 to reduce the particle size.
  • the load is reduced to some extent in the crushing in the second crushing step a5-2, but as shown in FIG. 6, the 1-1 crushing step a5-1 is further before the second crushing step a5-2.
  • the coarse pulverization of -1 and the medium pulverization of the first and second crushing steps a5-1-2 may be carried out twice.
  • the first pulverization step a5-1 may be divided into three or more pulverizations to gradually reduce the particle size. If pulverization can be performed under conditions of good pulverization efficiency in each pulverization, the accumulation of internal stress in the pulverized powder can be further suppressed.
  • the holes of the screen used in the medium crushing of the first 1-2 crushing step a5-1-2 are set to be smaller than the holes of the screen used in the coarse crushing of the first 1-1 crushing step a5-1-1. If the screen has a round hole, the diameter is preferably 0.3 to 5 mm.
  • the holes of the screen used in the coarse crushing of the first crushing step a5-1-1 may be the same as the settings of the first crushing step a5-1.
  • a pulverized powder having a coercive force Hc of 2000 A / m or less can be obtained.
  • the coercive force Hc of the pulverized powder is preferably 1500 A / m or less, and more preferably 1000 A / m or less.
  • the coercive force Hc is the value of the pulverized powder after pulverization that has not been subjected to the heat treatment for removing strain.
  • the obtained crushed powder may be classified.
  • the classification method is not particularly limited, but the method using a sieve is simple, and a vibrating sieve is particularly preferable.
  • a crushed powder having an average particle size of 100 ⁇ m or less can be obtained by passing the crushed powder through a sieve having an opening of 106 ⁇ m (diagonal 150 ⁇ m) and removing the large crushed powder remaining on the sieve. It is also possible to pass through a sieve with a mesh size of 106 ⁇ m (diagonal 150 ⁇ m) and put the large pulverized powder remaining on the sieve into the pin mill again for fine pulverization.
  • the pulverized powder passing through with a sieve having a mesh size of 32 ⁇ m (diagonal 45 ⁇ m) can be removed.
  • the size of these sieves may be appropriately set according to the desired size of the pulverized powder.
  • Oxide film forming step a6 An oxide film may be formed on the surface of the pulverized powder that has undergone the pulverization step a5.
  • the formation of an oxide film is not essential, but it is preferable to form it for rust prevention and insulation.
  • TEOS tetraethoxysilane
  • ammonia as a catalyst
  • the heat treatment for oxidation is preferably held in the air at a temperature of 100 to 350 ° C. for 2 to 6 hours, for example.
  • the pulverized powder obtained by the present embodiment (which has undergone the pulverization step a5) has a coercive force Hc of 2000 A / m or less.
  • Hc coercive force
  • the strain removing heat treatment is often performed after the crushed powder is used to form a dust core, and it is not essential to perform the strain removing heat treatment on the crushed powder in advance.
  • the foil-like amorphous alloy is a Fe-based amorphous alloy strip such as the above-mentioned Fe-Si-B type, Fe-Si-BC type, Fe-Si-BC-Cr type, they are used. It is preferably carried out at a temperature lower than the crystallization temperature under a temperature condition that does not crystallize.
  • the temperature is preferably 350 ° C. or higher, more preferably 360 ° C. or higher, and even more preferably 380 ° C. or higher.
  • the strain removing heat treatment Since the higher the temperature, the more effective the strain removing heat treatment is, it is preferably performed at a temperature close to the crystallization temperature of 350 to 420 ° C., more preferably 360 to 410 ° C., and most preferably 380 to 400 ° C. ..
  • the coercive force of the pulverized powder can be reduced to 200 A / m or less.
  • the coercive force of the pulverized powder after the strain removing heat treatment is preferably 180 A / m or less, more preferably 160 A / m or less, and most preferably 150 A / m or less.
  • This strain removing heat treatment may be performed, for example, with a temperature rise time of about 1 to 6 hours and a holding time of about 0.5 to 4 hours.
  • the strain removing heat treatment and the heat treatment that expresses the nanocrystal structure may be performed in combination.
  • the heat treatment temperature is preferably equal to or higher than the crystallization temperature, and is preferably a temperature at which ferromagnetic crystals such as Fe 2 B are not generated.
  • the heat treatment temperature is preferably 400 to 600 ° C, more preferably 450 to 550 ° C, and most preferably 500 to 530 ° C.
  • the strain removing heat treatment may be performed even after the formation of an oxide film on the pulverized powder.
  • FIG. 7 is a flowchart of a powder magnetic core manufacturing process using Fe-based amorphous alloy powder.
  • a granulation step c in which a Fe-based amorphous alloy powder and a binder are mixed to obtain a granulated powder
  • a molding step d in which the obtained granulated powder is pressure-molded to obtain a molded body, and the obtained molded body is heat-treated.
  • the powder magnetic core obtained is obtained by binding flaky Fe-based amorphous alloy powders to each other with a binder.
  • the binder it is preferable to use an acrylic resin, polyvinyl alcohol, or the like in order to obtain the strength of the molded product. It is preferable to use low melting point glass or silicone resin in order to obtain the strength of the dust core after the heat treatment, and it is preferable to use them in an appropriate combination.
  • the granulated powder is pressure-molded into a predetermined shape such as a toroidal shape or a rectangular parallelepiped shape using a molding die, but typically, if it is molded at a pressure of 1 to 3 GPa and a holding time of about several seconds. good. In the molding process, it is preferable to consolidate to 5.3 ⁇ 10 3 kg / m 3 or more.
  • the distortion of the Fe-based amorphous alloy powder due to the pressure applied in the molding process is reduced, and excellent soft magnetic properties can be obtained.
  • Example 1 Material and agglomeration treatment
  • a foil-like amorphous alloy a long Metglas (registered trademark) 2605SA1 material manufactured by Hitachi Metals, Ltd. with a thickness of 25 ⁇ m and a width of 213 mm was used.
  • This 2605SA1 material is a Fe-based amorphous alloy strip of Fe-Si-B based material.
  • This Fe-based amorphous alloy strip is manufactured by continuously casting the molten metal on a single roll that rotates at high speed by the liquid quenching method that quenches and solidifies the molten alloy, and winds the obtained strip on a spool. be.
  • This Fe-based amorphous alloy strip was unwound from the spool and rewound to prepare 18 wound bodies (lumps) having a mass of about 10 kg and an outer diameter of 150 mm.
  • FIGS. 8 and 9 are schematic views viewed in a plane.
  • the winding body 1 was arranged in the heat treatment furnace in three rows on one side, three in each row, and two stages in the vertical direction.
  • An installation stand (not shown) is provided in the vertical direction, and the winding bodies 1 are separated from each other. Note that in FIGS. 8 and 9, only the positional relationship of each winding body 1 is shown, so that the stainless steel container and the installation stand are not shown.
  • the brittle treatment is performed in an air atmosphere, and the temperature of the heat treatment furnace is set to 2 hours from room temperature to the maximum temperature and 4 conditions of maximum temperature of 320 ° C, 340 ° C, 360 ° C and 380 ° C.
  • the holding time at the maximum temperature was set to 4 hours, after which the heating was stopped and the mixture was cooled in the furnace.
  • the inside of the furnace is a circulation type, and when heating is stopped, the temperature of the hot air drops and it is gradually air-cooled.
  • FIG. 10 shows a graph in which the set temperature of the heat treatment furnace and the temperature of the wound body installed in the upper right back and the lower left front are plotted against the elapsed time.
  • a thermocouple was attached to each wound body to measure the temperature.
  • thermocouple was inserted at a position in the middle of the stacking direction of the amorphous alloy strips of the wound body and in the middle of the width direction of the strips. It can be seen that each wound body has almost reached the set temperature, although the temperature change is slightly different due to the different positions in the heat treatment furnace. It was confirmed that there was not much difference in the way these wound bodies were crushed in the subsequent crushing and crushing, and the wound bodies could be crushed without any trouble.
  • Sorting treatment The multilayer part contained in the crushed body obtained by the crushing treatment is crushed to separate the overlapping foils, and the foil-like amorphous alloy that has become fragments is further divided into small pieces. , The following sorting process was performed.
  • the body 15 was thrown in, the cylindrical body 101 was rotated about an axis, and the small pieces of the Fe-based amorphous alloy were sieved by passing through the through holes 107 provided in the side surface 105 of the cylindrical body 101.
  • the Fe-based amorphous alloy small piece 20 falling from the through hole 107 was sent to the next pulverization step by a belt conveyor.
  • the size of the small piece 20 of the Fe-based amorphous alloy (this size is the dimension of the shortest part in the width direction in the direction perpendicular to the thickness direction of the thin band, and if it is rectangular, the width dimension on the shorter side (Corresponding) was about 3 to 10 cm, and also included finer pieces. Since small pieces of Fe-based amorphous alloy are deformable, some of them pass through the 10 cm through hole 107 when bent, but the longest part exceeds 10 cm when stretched into a flat shape. rice field.
  • the obtained Fe-based amorphous alloy small piece 20 has a relationship of approximately L ⁇ 1.5M, where L is the dimension of the longest flat portion and M is the dimension of the longest portion in the direction orthogonal to the longest portion. rice field.
  • a crushing step was carried out in which coarse crushing, medium crushing and fine crushing were sequentially performed.
  • the coarse pulverization corresponds to the 1-1 pulverization step a5-1-1
  • the medium pulverization corresponds to the 1-2 pulverization step a5-1-2
  • the fine pulverization corresponds to the second pulverization step a5-2.
  • the coarse crushing of the first 1-1 crushing step a5-1-1 was carried out by using a crushing and sizing machine.
  • the crushed material was continuously put into a crushing and sizing machine equipped with a screen with a hole with a diameter of 4 mm, and the crushing blade was rotated at high speed for crushing.
  • the size of the pulverized powder obtained by this coarse pulverization is such that it can pass through a hole having a diameter of 4 mm.
  • the same crushing and sizing machine was used, and the coarsely crushed powder obtained by the coarse crushing was crushed and sized with a screen having a hole with a diameter of 1.5 mm.
  • the crushing blade was rotated at high speed for crushing.
  • the size of the crushed powder obtained by pulverization is such that it can pass through a hole having a diameter of 1.5 mm.
  • FIG. 11 shows an SEM observation image of the pulverized powder (embrittlement treatment 360 ° C.) obtained by this pin mill.
  • the pulverized powder crushed by this pin mill had a flat surface with sharp edges and a surface close to the original thin band state.
  • the average particle size of the obtained amorphous alloy crushed powder (crushed powder obtained by crushing in the second crushing step a5-2) was determined.
  • the particle size of the pulverized powder was measured by sieving into a predetermined particle size category using about 20 g of the pulverized powder and measuring the mass of each particle size category.
  • the particle size classification is based on the nominal opening of the JIS test sieve (JIS Z8801-1: 2006) of the sieve used for the sieve, and each particle size classification is 45 ⁇ m or less, 45 ⁇ m or more 63 ⁇ m or less, 63 ⁇ m or more 90 ⁇ m or less, 90 ⁇ m.
  • the range was set to the range of more than 125 ⁇ m, more than 125 ⁇ m, more than 180 ⁇ m, more than 180 ⁇ m and less than 355 ⁇ m, more than 355 ⁇ m and less than 425 ⁇ m, and more than the minimum particle size and less than the maximum particle size. Assuming that all the particles included in each particle size category are the average diameter of the particle size category, the total of (average diameter x mass) was divided by the total mass to obtain the average particle size. In the present invention, the "average particle size" is based on this calculation method.
  • the pulverized powder obtained in Example 1 has an average particle size of 184 ⁇ m at 320 ° C. for embrittlement treatment, 107 ⁇ m at 340 ° C. for embrittlement treatment, 88 ⁇ m at 360 ° C. for embrittlement treatment, and 75 ⁇ m at 380 ° C. for embrittlement treatment.
  • the powder passed through a sieve having an opening of 425 ⁇ m, and there was no powder remaining on the sieve, or even if there was, the amount was so small that it had substantially no effect on determining the average particle size.
  • Figure 12 shows the relationship between the embrittlement treatment temperature and the average particle size. In this example, the average particle size became smaller as the embrittlement heat treatment temperature was increased. This indicates that the higher the temperature of the embrittlement heat treatment, the easier it is to pulverize.
  • Fe-based amorphous alloy powder having an average particle size of 75 to 184 ⁇ m was obtained.
  • Example 2 In the second pulverization step a5-2, an Fe-based amorphous alloy powder was obtained in the same manner as in Powder C of Example 1 (under the conditions of embrittlement treatment 360 ° C.) except that a disk-type vibration mill was used as the pulverizer.
  • the disc-type vibration mill crushes the sample in the container by pressure and grinding by causing planetary motion between the ring and the stone in the sample container that are swung by the motor. The crushing was carried out by adding 50 g of crushed powder and operating for 1 minute.
  • the size of the obtained Fe-based amorphous alloy powder was almost the same as that of powder C.
  • the SEM observation image of the pulverized powder of Example 2 is shown in FIG.
  • the pulverized powder of Example 2 contained a large amount of pulverized powder having rounded corners and a rough surface as compared with powder C crushed by a pin mill.
  • the coercive force of the powder C and the pulverized powder of Example 2 was evaluated by both the pulverized powder which had not been subjected to the strain removing heat treatment and the pulverized powder which had been subjected to the strain removing heat treatment at 420 ° C. The results are shown in Table 1.
  • a vibrating sample magnetometer (model: VSM-5-20) manufactured by Toei Kogyo Co., Ltd. was used, with an outer diameter of 7 mm ⁇ , an inner diameter of 6 mm ⁇ , and a height of 5 mm (sample filling height 2 mm). ) was filled with 100 mg of crushed powder and measured with a measurement magnetic field of 10 kOe (800 kA / m).
  • the crushed powder after crushing in Example 2 has a coercive force of about 4 times as large as that of the crushed powder after crushing in Example 1 (powder C). It is presumed that the force to grind the powder always works in the crushing with the disc type vibration mill, and the residual stress inside the powder is larger than that in the case of crushing with the pin mill. Therefore, it can be seen that it is preferable.
  • the coercive force Hc of Example 2 was relaxed by stress relaxation heat treatment and was greatly improved.
  • Example 3 The embrittlement treatment was performed with the maximum temperature set to 300 ° C and the holding time at the maximum temperature set to 2 hours as the temperature setting of the heat treatment furnace. Grinding with a crushing and sizing machine equipped with a perforated screen; the same conditions as the coarse crushing of the 1-1 crushing step a5-1-1 performed in Example 1) and three types of crushers (disc type vibration). Three types of amorphous alloy pulverized powders were prepared in the same manner as in Example 1 except that the second pulverization step a5-2 was performed using a mill, a hammer mill, and a pin mill).
  • the obtained three types of pulverized powders were classified so as to pass through a sieve having a particle size of 150 ⁇ m and not to pass through a sieve having a particle size of 75 ⁇ m.
  • the pulverized powder which had not been subjected to the strain removing heat treatment and the pulverized powder which had been subjected to the strain removing heat treatment at 360 ° C., 380 ° C. and 400 ° C. were prepared, and the coercive force Hc was measured in the same manner as in Example 2. The results are shown in Table 2.
  • the pulverized powder obtained by finely pulverizing using a hammer mill or a pin mill is retained both after pulverization (without strain removing heat treatment) and after strain removing heat treatment as compared with a disc mill.
  • the magnetic force Hc is extremely small. That is, it can be seen that the hammer mill and the pin mill are crushers that can obtain crushed powder having a small processing strain.
  • the Fe-based amorphous alloy strip is used, it is possible to obtain a crushed powder having a coercive force Hc of 2000 A / m or less in the crushed powder after crushing (without the strain removing heat treatment). Further, after the strain removing heat treatment, pulverized powder having a coercive force Hc of 200 A / m or less can be obtained.
  • the coercive force of the Fe-based amorphous alloy strip (Metglas (registered trademark) 2605SA1 material manufactured by Hitachi Metals Co., Ltd.) used for crushing was measured (average of 5 samples measured), and the coercive force was 60 A / m. there were.
  • the measurement of the coercive force was the same as the measurement of the pulverized powder, and the thin strips cut into a size that fits in the sample case were stacked and filled in the sample case.
  • the Fe-based amorphous alloy powder has a larger coercive force than the thin band before crushing. However, it can be seen that the holding force is improved by the strain removing heat treatment, and the increase in the coercive force is suppressed according to the present invention.
  • Example 4 Using Metglas (registered trademark) 2605SA1 material (thickness 25 ⁇ m) manufactured by Hitachi Metals, Ltd. as the end material of the amorphous alloy thin band, the lump state of the end material of the Fe-based amorphous alloy thin band is as follows. Made. Approximately 10 kg of scrap was compressed with a two-way press to prepare a plurality of rectangular parallelepipeds of approximately 20 ⁇ 15 ⁇ 25 mm. This rectangular parallelepiped is in a state where irregularities are formed on the surface. This rectangular parallelepiped is made into a lump of scraps. The lump state of this offcut was appropriately loaded into a heat treatment furnace in a dry air atmosphere, and embrittlement heat treatment was performed. The embrittlement heat treatment was carried out in the same manner as in Example 1 except that the maximum temperature was set to 360 ° C.
  • crushing treatment was performed on the lump state of the embrittled heat-treated offcuts.
  • a lump of scrap was placed in a crushing press and pressed with a pressing force of 1 ton / kg to crush it.
  • the crushed body obtained by the crushing treatment is put into a cylindrical body having a side surface having a large number of through holes having a diameter of about 10 cm in the same manner as in Example 1, and the cylindrical body is rotated about an axis. Then, it was divided into small pieces of Fe-based amorphous alloy and sorted.
  • the size of the obtained small piece (this size is the dimension of the shortest part in the width direction in the direction perpendicular to the thickness direction of the thin band, and if it is rectangular, it corresponds to the width dimension on the short side).
  • the small pieces of the Fe-based amorphous alloy were crushed in the same manner as in the crushing step performed in Example 1 to obtain crushed powder of the Fe-based amorphous alloy.
  • the average particle size of the obtained pulverized powder was 86 ⁇ m.
  • the coercive force of the pulverized powder was almost the same as that of the powder C of Example 1.
  • Comparative example 1 In the same manner as in Example 4, the crushed body obtained by performing the agglomeration treatment, the embrittlement treatment, and the crushing treatment from the scraps of the amorphous alloy strip is roughly crushed by hand into a disk type vibration mill. The powder was charged and crushed until the average particle size of the crushed powder became 88 ⁇ m to prepare a crushed powder of Fe-based amorphous alloy. Most of the obtained pulverized powder had rounded corners, and the surface was also rough. The coercive force of the crushed powder was as large as 4140 A / m. This pulverized powder was subjected to a strain removing heat treatment at 340 ° C., but the degree of improvement in coercive force was inferior to that of the examples of the present invention.

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Abstract

A method for producing an Fe-based amorphous alloy powder, the method comprising: an embrittlement step for heating and embrittling an aggregate body of a foil-shaped Fe-based amorphous alloy; a disintegrating step for roughly fracturing the aggregate body; a screening step for screening the resultant disintegrated bodies for a predetermined size using a screening means to obtain small pieces of the Fe-based amorphous alloy; and a pulverization step for subjecting the small pieces of the Fe-based amorphous alloy to dry pulverization using a pulverization means, wherein the screening means includes a cylindrical body having a large number of through-holes, the cylindrical body is rotated about an axis with the disintegrated bodies placed inside the cylindrical body so that the disintegrated bodies are disintegrated into separate foils, which are in turn divided into small pieces and are caused to pass through the through-holes formed in the cylindrical body.

Description

Fe基アモルファス合金粉末の製造方法Method for producing Fe-based amorphous alloy powder
 本発明は、液体急冷法で得られた箔状のFe基アモルファス合金を粉砕して得られるFe基アモルファス合金粉末の製造方法に関する。 The present invention relates to a method for producing an Fe-based amorphous alloy powder obtained by crushing a foil-shaped Fe-based amorphous alloy obtained by a liquid quenching method.
 アモルファス合金は、優れた軟磁気特性を有するため、電源回路など、各種電子・電気機器のインダクタ、リアクトルやトランス、又はフィルタといった電子部品に磁心としてコイルと組み合わせて用いられている。アモルファス合金は、合金の溶湯を急冷凝固させる液体急冷法によって得られる。アモルファス合金は厚みが薄くて箔状で、106℃/秒程度、又はそれ以上の冷却速度が得られる単ロール法や双ロール法と呼ばれる方法により長尺に連続する帯(リボン又はフィルム)の状態で得られ、その形態から薄帯状、テーブ状、シート状等と呼ばれる。本願において、以降は、箔状のアモルファス合金で、長尺で帯状の形態を有するものを薄帯と称する。その厚みはアモルファス化の点から50μm以下が好ましい。なおアモルファス化とは、合金がアモルファス単相の場合の他に、結晶相を極力含まず、得られる磁気特性がアモルファス単相に近い状態である場合を含む。 Since amorphous alloys have excellent soft magnetic properties, they are used in combination with coils as magnetic cores in inductors of various electronic and electrical equipment such as power supply circuits, and electronic components such as reactors, transformers, and filters. Amorphous alloys are obtained by a liquid quenching method in which the molten metal of the alloy is quenched and solidified. Amorphous alloys in thin thickness foil, 10 6 ° C. / sec about, or band that continuous elongated by the method is more cooling rate called single roll method or a double roll method obtained in (ribbon or film) It is obtained in a state, and is called a thin band, a table, a sheet, or the like because of its form. In the present application, a foil-like amorphous alloy having a long and band-like shape is referred to as a thin band. The thickness is preferably 50 μm or less from the viewpoint of amorphization. The term "amorphization" includes not only the case where the alloy is amorphous single phase but also the case where the alloy does not contain the crystal phase as much as possible and the obtained magnetic characteristics are close to the amorphous single phase.
 公知の手段で製造された箔状のアモルファス合金は、例えば薄帯を巻き回してリング状の巻磁心としたり、薄帯を切断したり打抜いたりして二次加工を施し、所定の形状として、それを積層してなる積層磁心として利用されている。しかし、薄帯の形態では、積層磁心の形状に合わせて二次加工して使用するにしても形成する磁心形状が制限され、高い自由度で様々な形状の磁心を形成することが困難である。 A foil-shaped amorphous alloy produced by a known means is subjected to secondary processing by, for example, winding a thin band to form a ring-shaped wound magnetic core, or cutting or punching the thin band to obtain a predetermined shape. , It is used as a laminated magnetic core made by laminating it. However, in the form of a thin band, the shape of the magnetic core to be formed is limited even if it is used by secondary processing according to the shape of the laminated magnetic core, and it is difficult to form magnetic cores of various shapes with a high degree of freedom. ..
 また数十kHzまで周波数領域で使用される磁心や、高い直流電流が重畳する条件で使用される磁心では、周波数や直流重畳電流に対して透磁率の減少を抑え変化を少なくするように、磁心の磁路に空隙(ギャップ)を設けることが行われる。例えば、巻磁心や積層磁心などの磁心では磁路長の0.5~5%程度の空隙が形成される。このような空隙からは磁束が漏れ出や易い。空隙を覆うようにコイルを配置する場合に、コイルを構成する導線側に漏れた磁束(漏洩磁束)によって渦電流が生じ、それにより電子部品の渦電流損失を増加させるといった問題が生じる。 In addition, in the magnetic core used in the frequency range up to several tens of kHz and the magnetic core used under the condition that high DC current is superimposed, the magnetic core is suppressed so as to suppress the decrease in magnetic permeability and the change with respect to the frequency and DC superimposed current. A gap is provided in the magnetic path of the above. For example, in a magnetic core such as a wound magnetic core or a laminated magnetic core, a gap of about 0.5 to 5% of the magnetic path length is formed. Magnetic flux tends to leak from such voids. When the coil is arranged so as to cover the gap, an eddy current is generated by the magnetic flux leaking to the lead wire side constituting the coil (leakage magnetic flux), which causes a problem of increasing the eddy current loss of the electronic component.
 このような問題に対しては、アモルファス合金を粉体の形態として利用することが行われている。アモルファス合金粉末としては、薄帯を粉砕した粉砕粉が知られている。 For such problems, amorphous alloys are used as a powder form. As the amorphous alloy powder, crushed powder obtained by crushing a thin band is known.
 特公昭60-401号は、アモルファス合金の溶融体を急冷して得られたリボン等の形態のアモルファス合金を、脆化状態に焼鈍して、脆化したアモルファス合金を粉末状に粉砕するアモルファス合金粉末の製造方法を記載している。脆化のための焼鈍温度はアモルファス合金のガラス転位温度より150℃から50℃低い温度範囲内が好ましいこと、粉砕に適した粉砕装置として、ロッドミル、ボールミル、ハンマーミル等の衝撃ミル、ディスクミル、スタンプミル、クラッシャー類、ロール等が含まれることが記載されている。得られる粉末の粒度の限定は無いが、ボールミルでの粉砕処理によって、リボン状のアモルファス合金から約25~100μmの粒度のアモルファス合金粉末が得られたと記載している。 Tokukousho 60-401 is an amorphous alloy in which an amorphous alloy in the form of a ribbon or the like obtained by quenching a melt of an amorphous alloy is annealed into a brittle state, and the brittle amorphous alloy is crushed into a powder. Describes the method for producing powder. The quenching temperature for embrittlement is preferably in the temperature range of 150 ° C to 50 ° C lower than the glass transition temperature of the amorphous alloy. It is stated that stamp mills, crushers, rolls, etc. are included. Although the particle size of the obtained powder is not limited, it is described that the amorphous alloy powder having a particle size of about 25 to 100 μm was obtained from the ribbon-shaped amorphous alloy by the pulverization treatment with a ball mill.
 特開2005-57230号は、予備熱処理しFe系非晶質金属リボンを粉砕して非晶質金属粉末とし、得られた非晶質金属粉末にバインダーを加えて混合した後、コアを成形し、成形されたコアを焼鈍処理する非晶質軟磁性コアの製造方法を記載している。しかしながら、粉砕については粉砕機を使うと記載しているのみで具体的な方法は言及していない。 Japanese Patent Application Laid-Open No. 2005-57230 preheats and crushes an Fe-based amorphous metal ribbon to obtain an amorphous metal powder, adds a binder to the obtained amorphous metal powder, mixes the mixture, and then forms a core. , Describes a method for producing an amorphous soft magnetic core in which a molded core is annealed. However, regarding crushing, it only states that a crusher is used, and does not mention a specific method.
 国際公開2015/008813号は、アモルファス合金薄帯の粉砕粉末の製造方法を開示しており、(a)粉砕する前に、アモルファス合金薄帯を320℃以上380℃以下の脆化熱処理を行うことで粉砕性を高めることができること、(b)所望の粒径にするために、粉砕工程は、少なくとも粗粉砕及び微粉砕の2工程、好ましくは粗粉砕、中粉砕及び微粉砕の3工程に分けて行い、段階的に粒径を落とすのが粉砕能力及び粒径の均一性の点で好ましいことを記載している。国際公開2015/008813号は、前記脆化処理は、薄帯を巻回したスプールの状態、巻回されていない状態の薄帯、又は箔体を所定形状にプレスして整形された塊の状態として行うのが好ましいこと、薄帯をスプールの状態又は整形された塊の状態とした場合には、粗粉砕の前に解砕するのが望ましいことを記載している。さらに、解砕から粉砕の各工程では異なる機械装置を用い、拳の大きさまでの解砕は圧縮減容機で行い、2~3 cm角の薄片とする粗粉砕はユニバーサルミキサで行い、2~3 mm角の薄片とする中粉砕では破砕整粒機で行い、100μm角程度の薄片とする微粉砕にはピンミルを用いるのが望ましいことを記載している。 International Publication No. 2015/008813 discloses a method for producing a crushed powder of an amorphous alloy ribbon. (a) Before pulverizing, the amorphous alloy strip is subjected to a brittle heat treatment of 320 ° C or higher and 380 ° C or lower. In order to improve the pulverizability in (b), the pulverization step is divided into at least two steps of coarse pulverization and fine pulverization, preferably three steps of coarse pulverization, medium pulverization and fine pulverization. It is described that it is preferable to gradually reduce the particle size in terms of pulverization ability and uniformity of particle size. According to International Publication No. 2015/008813, the embrittlement treatment is performed on a spool in which a thin band is wound, a thin band in an unwound state, or a mass formed by pressing a foil body into a predetermined shape. It is described that it is preferable to carry out the process as a method, and when the thin band is in the state of a spool or a shaped mass, it is desirable to crush it before coarse crushing. Furthermore, different mechanical devices are used in each process from crushing to crushing, crushing to the size of a fist is performed with a compression volume reducer, and coarse crushing into 2 to 3 cm square flakes is performed with a universal mixer, 2 to It is stated that it is desirable to use a crushing and sizing machine for medium crushing of 3 mm square flakes, and to use a pin mill for fine crushing of 100 μm square flakes.
 アモルファス合金は、硬度が高く、塑性変形し難いことが知られている。そのためアモルファス合金薄帯を粉砕処理する際に粉砕機に大きな負荷がかかるため、過負荷となった状態で処理できない粉砕粉が内部に溜まり、粉砕機が停止する場合がある。また、粉砕に長い時間を要した場合には、得られる粉砕粉に大きな内部応力が蓄積され、磁気特性に劣る粉砕粉となりやすい。このような問題を避けるように、予め鋼刃や金型等で切断したり、せん断したりして細かくした処理物を粉砕機へ供給し、粉砕機の負荷を低減する方法がある。しかしながらアモルファス合金を切断及びせん断処理する場合、鋼刃や金型などに摩耗や欠けが生じ易く、その耐久寿命は比較的短くなる。特に、処理物を細かくするほど耐久寿命に対する処理量が低下するため、製造コストの上昇を招くといった問題がある。 Amorphous alloys are known to have high hardness and are not easily plastically deformed. Therefore, when the amorphous alloy strip is crushed, a large load is applied to the crusher, so that crushed powder that cannot be processed in an overloaded state may accumulate inside and the crusher may stop. Further, when it takes a long time to pulverize, a large internal stress is accumulated in the obtained pulverized powder, and the pulverized powder tends to be inferior in magnetic characteristics. In order to avoid such a problem, there is a method of reducing the load on the crusher by supplying a processed product which has been cut or sheared with a steel blade or a mold in advance to the crusher. However, when an amorphous alloy is cut and sheared, the steel blade and the mold are liable to be worn or chipped, and the durable life thereof is relatively short. In particular, the finer the processed material, the lower the processing amount for the durable life, which causes a problem that the manufacturing cost increases.
 特公昭60-401号、特開2005-57230号、及び国際公開2015/008813号に記載されたように、アモルファス合金に対して脆化のための熱処理(脆化処理)を行い、粉砕をし易くする対応が有効である。また国際公開2015/008813号は、前述したように、アモルファス合金薄帯を多量に粉砕処理しようとする場合に、薄帯を巻回したスプールの状態とする方法を記載している。脆化処理においてはアモルファス合金に熱がムラなく均一に加わるのが好ましいが、スプールの状態とされ一塊が大きく、それが稠密である程、表面側と内部側で温度差が大きくなり、内部側は表面側と比べて相対的に低温で脆化処理された状態となり易い。また表面側と内部側で温度分布が均一になるように所定の温度で一定時間保持しても良いが、表面側と内部側とでは所定の温度で保持される時間は異なってしまう。つまり粉砕機は、粉砕し易い部分と粉砕し難い部分が混在したものを粉砕することが必要となる。この場合もまた、粉砕機に大きな負荷を発生させる場合がある。 As described in Japanese Patent Publication No. 60-401, Japanese Patent Application Laid-Open No. 2005-57230, and International Publication No. 2015/008813, the amorphous alloy is subjected to heat treatment (embrittlement treatment) for embrittlement and pulverized. Measures to make it easier are effective. In addition, as described above, International Publication No. 2015/008813 describes a method of forming a spool in which a thin band is wound when a large amount of amorphous alloy thin band is to be pulverized. In the embrittlement treatment, it is preferable that heat is evenly and uniformly applied to the amorphous alloy, but in the state of a spool, the larger the mass, the larger the temperature difference between the surface side and the inner side, and the inner side. Is more likely to be embrittled at a relatively low temperature compared to the surface side. Further, it may be held at a predetermined temperature for a certain period of time so that the temperature distribution becomes uniform on the surface side and the inner side, but the time held at the predetermined temperature differs between the surface side and the inner side. That is, the crusher needs to crush a mixture of a portion that is easy to crush and a portion that is difficult to crush. In this case as well, a large load may be generated on the crusher.
 脆化処理にムラがあると、脆化が不足した部分の粉砕に時間を要し、得られる粉砕粉末の内部応力が大きくなる傾向は一層顕著となり易い。アモルファス合金薄帯を粉砕して粉砕粉を得る際、粉砕時にかかる応力により、粉砕粉に加工歪が蓄積される。別の言い方をすれば、粉砕粉の内部に溜まる応力(内部応力)が大きくなる。加工歪(内部応力)が大きくなると保磁力が大きい粉砕粉となる。特にFe基アモルファス合金においては、合金の磁歪の影響を受けて、保磁力が大きい粉砕粉となってしまう傾向がある。保磁力が大きいとヒステリシス損失の増加から、粉砕粉を用いて磁心とした場合の磁心損失が大きくなり易い。したがって、加工歪が小さい粉砕粉が得られる粉砕方法が望まれている。 If the embrittlement treatment is uneven, it takes time to crush the part where the embrittlement is insufficient, and the tendency that the internal stress of the obtained crushed powder increases becomes more remarkable. When the amorphous alloy strip is crushed to obtain crushed powder, processing strain is accumulated in the crushed powder due to the stress applied during crushing. In other words, the stress accumulated inside the pulverized powder (internal stress) increases. When the processing strain (internal stress) becomes large, the powder becomes pulverized powder having a large coercive force. In particular, Fe-based amorphous alloys tend to be pulverized powder having a large coercive force due to the influence of the magnetostriction of the alloy. If the coercive force is large, the hysteresis loss increases, so that the magnetic core loss when the pulverized powder is used to form the magnetic core tends to increase. Therefore, a pulverization method that can obtain a pulverized powder having a small processing strain is desired.
 従って、本発明の目的は、加工歪が小さく、保磁力の小さいFe基アモルファス合金末を得るための最適な製造方法を提供することである。 Therefore, an object of the present invention is to provide an optimum production method for obtaining an Fe-based amorphous alloy powder having a small processing strain and a small coercive force.
 上記目的に鑑み鋭意研究の結果、本発明者等は、多数の貫通孔を有する円筒体又は板状体を用いた選別手段でFe基アモルファス合金の解砕体を、解して箔状に分離するとともに、小片に分割し、選別することにより、粉砕粉に与える歪みを抑制することができ、加工歪が小さく、保磁力の小さいFe基アモルファス合金末が得られることを見出し、本発明に想到した。 As a result of diligent research in view of the above objectives, the present inventors have separated the crushed body of the Fe-based amorphous alloy into a foil shape by a sorting means using a cylindrical body or a plate-shaped body having a large number of through holes. At the same time, it was found that the strain given to the crushed powder can be suppressed by dividing into small pieces and sorting, and a Fe-based amorphous alloy powder having a small processing strain and a small coercive force can be obtained, and the present invention was conceived. bottom.
 すなわち、Fe基アモルファス合金粉末を製造する本発明の方法は、箔状のFe基アモルファス合金の塊状体を加熱して脆化させる脆化工程と、
 前記脆化した塊状体を粗く破砕させる解砕工程と、
 得られた解砕体を、選別手段で所定の大きさに選別してFe基アモルファス合金の小片を得る選別工程と、
 前記Fe基アモルファス合金の小片を、粉砕手段で乾式粉砕する粉砕工程とを備え、
 前記選別手段は、多数の貫通孔を有する円筒体を備え、
 前記円筒体の内側に前記解砕体を投入した状態で前記円筒体を軸周りに回転させ、前記解砕体を解して箔状に分離するとともに、小片に分割し、前記円筒体に形成された貫通孔を通過させることを特徴とする。
That is, the method of the present invention for producing an Fe-based amorphous alloy powder includes an embrittlement step of heating and embrittlement of a foil-like mass of Fe-based amorphous alloy.
A crushing step of roughly crushing the embrittled agglomerates, and
A sorting step of sorting the obtained crushed material into a predetermined size by a sorting means to obtain small pieces of Fe-based amorphous alloy.
The Fe-based amorphous alloy small piece is provided with a pulverization step of dry pulverization by a pulverization means.
The sorting means includes a cylindrical body having a large number of through holes.
With the crushed body put inside the cylindrical body, the crushed body is rotated around an axis, the crushed body is crushed and separated into a foil shape, and the crushed body is divided into small pieces and formed into the cylindrical body. It is characterized by passing through the through hole.
 Fe基アモルファス合金粉末を製造する本発明のもう一つの方法は、箔状のFe基アモルファス合金の塊状体を加熱して脆化する脆化工程と、
 前記脆化した塊状体を粗く破砕させる解砕工程と、
 得られた解砕体を、選別手段で所定の大きさに選別してFe基アモルファス合金の小片を得る選別工程と、
 前記Fe基アモルファス合金の小片を、粉砕手段で乾式粉砕する粉砕工程とを備え、
 前記選別手段は、多数の貫通孔を有する板状体を備え、
 前記板状体の上に前記解砕体を投入した状態で前記板状体を振動させ、前記解砕体を解して箔状に分離するとともに、小片に分割し、前記板状体に形成された貫通孔を通過させることを特徴とする。
Another method of the present invention for producing Fe-based amorphous alloy powder is an embrittlement step of heating a foil-like mass of Fe-based amorphous alloy to make it brittle.
A crushing step of roughly crushing the embrittled agglomerates, and
A sorting step of sorting the obtained crushed material into a predetermined size by a sorting means to obtain small pieces of Fe-based amorphous alloy.
The Fe-based amorphous alloy small piece is provided with a pulverization step of dry pulverization by a pulverization means.
The sorting means includes a plate-like body having a large number of through holes, and the sorting means has a plate-like body.
The plate-shaped body is vibrated in a state where the crushed body is put on the plate-shaped body, the crushed body is crushed and separated into a foil shape, and the crushed body is divided into small pieces and formed into the plate-shaped body. It is characterized by passing through the through hole.
 前記円筒体又は板状体に形成された貫通孔の直径は30~150 mmであるのが好ましい。 The diameter of the through hole formed in the cylindrical body or plate-like body is preferably 30 to 150 mm.
 前記粉砕工程で、粉砕粉の平均粒径を50~240μmとするのが好ましい。 In the crushing step, it is preferable that the average particle size of the crushed powder is 50 to 240 μm.
 前記粉砕工程の粉砕手段がピンミル又はハンマーミルであるのが好ましい。 It is preferable that the crushing means in the crushing step is a pin mill or a hammer mill.
 前記脆化工程の前に、箔状のFe基アモルファス合金を塊状体とする塊状化工程を備えるのが好ましい。 Prior to the embrittlement step, it is preferable to include a lumping step of forming a foil-like Fe-based amorphous alloy into a lump.
 前記粉砕工程は第1粉砕工程と第2粉砕工程とからなり、前記第1粉砕工程で、所定の大きさで選別されたFe基アモルファス合金の小片を粗粉砕し、前記第2粉砕工程で、前記第1粉砕工程で得られた粉砕粉を微粉砕するのが好ましい。 The pulverization step comprises a first pulverization step and a second pulverization step. In the first pulverization step, small pieces of Fe-based amorphous alloy selected to a predetermined size are roughly pulverized, and in the second pulverization step, It is preferable to finely pulverize the pulverized powder obtained in the first pulverization step.
 前記第1粉砕工程で粉砕粉の平均粒径を0.5~10 mmとし、前記第2粉砕工程で粉砕粉の平均粒径を50~240μmとするのが好ましい。 It is preferable that the average particle size of the crushed powder is 0.5 to 10 mm in the first crushing step and the average particle size of the crushed powder is 50 to 240 μm in the second crushing step.
 前記第1粉砕工程は第1-1粉砕工程と第1-2粉砕工程とからなり、前記第1-1粉砕工程で、所定の大きさで選別されたFe基アモルファス合金の小片を粗粉砕し、前記第1-2粉砕工程で、前記第1-1粉砕工程で得られた粉砕粉を中粉砕し、前記第2粉砕工程で、前記第1-2粉砕工程で得られた粉砕粉を微粉砕するのが好ましい。 The first crushing step consists of a 1-1 crushing step and a 1-2 crushing step. In the 1-1 crushing step, small pieces of Fe-based amorphous alloy selected to a predetermined size are roughly crushed. In the 1-2 crushing step, the crushed powder obtained in the 1-1 crushing step is medium crushed, and in the second crushing step, the crushed powder obtained in the 1-2 crushing step is finely divided. It is preferable to grind.
 前記第1-1粉砕工程で粉砕粉の平均粒径を2~20 mmとし、前記第1-2粉砕工程で粉砕粉の平均粒径を0.5~4 mmとし、前記第2粉砕工程で粉砕粉の平均粒径を50~240μmとするのが好ましい。 The average particle size of the crushed powder was set to 2 to 20 mm in the 1-1 crushing step, the average particle size of the crushed powder was set to 0.5 to 4 mm in the 1-2 crushing step, and the crushed powder was set to 0.5 to 4 mm in the second crushing step. The average particle size of is preferably 50 to 240 μm.
 前記第1粉砕工程の粉砕手段を破砕整粒機とし、前記第2粉砕工程の粉砕手段をピンミル又はハンマーミルとするのが好ましい。 It is preferable that the crushing means in the first crushing step is a crushing and sizing machine, and the crushing means in the second crushing step is a pin mill or a hammer mill.
 前記粉砕工程後に、粉砕粉の表面に酸化膜を形成する酸化膜形成工程を備えるのが好ましい。 After the pulverization step, it is preferable to include an oxide film forming step of forming an oxide film on the surface of the pulverized powder.
 前記Fe基アモルファス合金粉末の合金組成は、FeaSibBcCdMe(但し、MはCr、Mo、Mn、Zr及びHfからなる群から選ばれた少なくとも1種の元素であり、原子%で、50≦a≦90、2≦b≦15、5≦c≦30、0≦d≦3、0≦e≦10、a+b+c+d+e=100)で表されるのが好ましい。 The alloy composition of the Fe-based amorphous alloy powder is Fe a Si b B c C d Me (where M is at least one element selected from the group consisting of Cr, Mo, Mn, Zr and Hf. In atomic%, it is preferably represented by 50 ≦ a ≦ 90, 2 ≦ b ≦ 15, 5 ≦ c ≦ 30, 0 ≦ d ≦ 3, 0 ≦ e ≦ 10, a + b + c + d + e = 100).
 前記Fe基アモルファス合金粉末の合金組成は、Fe100-x-yAxXy(ただし、AはCu及び/又はAu、XはB、Si、S、C、P、Al、Ge、B、Sn及びCrからなる群から選ばれた少なくとも一種類の元素)で表され、原子%で、0<x≦5、10≦y≦24により表されるのが好ましい。 The alloy composition of the Fe -based amorphous alloy powder is Fe 100-xy A x X y (where A is Cu and / or Au, X is B, Si, S, C, P, Al, Ge, B, Sn and It is represented by at least one element selected from the group consisting of Cr), and is preferably represented by 0 <x ≦ 5 and 10 ≦ y ≦ 24 in atomic%.
 本発明によれば、加工歪が小さく、保磁力の小さいFe基アモルファス合金粉末を得るための最適な製造方法を提供することができる。 According to the present invention, it is possible to provide an optimum production method for obtaining an Fe-based amorphous alloy powder having a small processing strain and a small coercive force.
本発明のFe基アモルファス合金粉末の製造方法において、製造工程の一例を示すフローチャートである。It is a flowchart which shows an example of the manufacturing process in the manufacturing method of the Fe-based amorphous alloy powder of this invention. 本発明のFe基アモルファス合金粉末の製造方法で使用する選別装置の一例を示す模式図である。It is a schematic diagram which shows an example of the sorting apparatus used in the manufacturing method of the Fe-based amorphous alloy powder of this invention. 図2に示す選別装置において円筒体の構造を説明するための模式図である。It is a schematic diagram for demonstrating the structure of a cylindrical body in the sorting apparatus shown in FIG. 本発明のFe基アモルファス合金粉末の製造方法で使用する選別装置の他の例を示す模式図である。It is a schematic diagram which shows another example of the sorting apparatus used in the manufacturing method of the Fe-based amorphous alloy powder of this invention. 本発明のFe基アモルファス合金粉末の製造方法において、製造工程の他の例を示すフローチャートである。It is a flowchart which shows the other example of the manufacturing process in the manufacturing method of the Fe-based amorphous alloy powder of this invention. 本発明のFe基アモルファス合金粉末の製造方法において、製造工程のさらに他の例を示すフローチャートである。It is a flowchart which shows the further example of the manufacturing process in the manufacturing method of the Fe-based amorphous alloy powder of this invention. Fe基アモルファス合金粉末からなる圧粉磁心の製造工程を示すフローチャートである。It is a flowchart which shows the manufacturing process of the powder magnetic core made of Fe-based amorphous alloy powder. 本発明のFe基アモルファス合金粉末の製造方法において、巻き体を脆化熱処理炉に配置した状態を模式的に示す正面図である。It is a front view which shows typically the state which arranged the wound body in the embrittlement heat treatment furnace in the manufacturing method of the Fe-based amorphous alloy powder of this invention. 本発明のFe基アモルファス合金粉末の製造方法において、巻き体を脆化熱処理炉に配置した状態を模式的に示す平面図である。FIG. 5 is a plan view schematically showing a state in which a wound body is arranged in an embrittlement heat treatment furnace in the method for producing an Fe-based amorphous alloy powder of the present invention. 本発明のFe基アモルファス合金粉末の製造方法において、脆化熱処理炉の設定温度、並びに上段右奥及び下段左前に設置した巻き体の温度を経過時間に対してプロットしたグラフである。It is a graph which plotted the set temperature of the embrittlement heat treatment furnace, and the temperature of the wound body installed in the upper right back and the lower left front in the manufacturing method of the Fe-based amorphous alloy powder of this invention with respect to the elapsed time. 本発明の実施例1の粉砕粉のSEM観察像である。It is an SEM observation image of the pulverized powder of Example 1 of this invention. 脆化処理の温度と平均粒径との関係を示す図である。It is a figure which shows the relationship between the temperature of the embrittlement treatment and the average particle diameter. 本発明の実施例2の粉砕粉のSEM観察像である。It is an SEM observation image of the pulverized powder of Example 2 of this invention.
 以下、本発明のFe基アモルファス合金粉末の製造方法の実施形態について図面を参照しながら具体的に説明するが、本発明はこれらの実施形態に限定されるものではない。また図の一部又は全部において、説明に不要な部分は省略し、また説明を容易にするために拡大又は縮小等して図示した部分がある。本明細書中において、「~」を用いて表される数値範囲は、「~」の前後に記載される数値を下限値及び上限値として含む範囲を意味する。本明細書中において、「工程」との語は、独立した工程だけでなく、他の工程と明確に区別できない場合であっても工程の所期の目的が達成されれば、本用語に含まれる。 Hereinafter, embodiments of the method for producing an Fe-based amorphous alloy powder of the present invention will be specifically described with reference to the drawings, but the present invention is not limited to these embodiments. Further, in a part or all of the figure, a part unnecessary for the explanation is omitted, and there is a part shown by enlarging or reducing the part for facilitating the explanation. In the present specification, the numerical range represented by using "-" means a range including the numerical values before and after "-" as the lower limit value and the upper limit value. In the present specification, the term "process" is included in this term not only as an independent process but also as long as the intended purpose of the process is achieved even if it cannot be clearly distinguished from other processes. Is done.
[1]Fe基アモルファス合金粉末の製造方法
 本発明のFe基アモルファス合金粉末の製造方法を以下に説明する。図1は、本発明のFe基アモルファス合金粉末の製造方法における製造工程のフローチャートである。図1に示す通り、箔状のFe基アモルファス合金を素材として所定の大きさの塊とし、それを加熱して脆化させたものを乾式粉砕して所望の粒径としたFe基アモルファス合金粉末を得る。必要に応じて、さらにFe基アモルファス合金粉末の表面に酸化膜を形成する。以下、各工程について詳細に説明する。
[1] Method for producing Fe-based amorphous alloy powder The method for producing the Fe-based amorphous alloy powder of the present invention will be described below. FIG. 1 is a flowchart of a manufacturing process in the method for manufacturing a Fe-based amorphous alloy powder of the present invention. As shown in FIG. 1, a foil-shaped Fe-based amorphous alloy powder is used as a material to form a mass of a predetermined size, which is then heated to embrittle and then dry-ground to obtain a desired particle size. To get. If necessary, an oxide film is further formed on the surface of the Fe-based amorphous alloy powder. Hereinafter, each step will be described in detail.
(1)素材
 本実施形態で素材となる箔状のアモルファス合金には、例えば、単ロール法のように合金溶湯を急冷することによって得られる急冷凝固薄帯を用いる。Fe基アモルファス合金薄帯として、1.4 T以上の高い飽和磁束密度Bsを有するFe基アモルファス合金薄帯を用いるのが好ましい。例えば、Metglas(登録商標)2605SA1材に代表されるFe-Si-B系等のFe基アモルファス合金薄帯を用いることができる。さらに他の元素を含むFe-Si-B-C系、Fe-Si-B-C-Cr系等の組成を採用することもできる。Feの一部をCo、Ni等で置換してもよい。本発明の実施形態に用いるFe基アモルファス合金薄帯の合金組成の一例としては、FeaSibBcCdMe(但し、MはCr、Mo、Mn、Zr及びHfからなる群から選ばれた少なくとも1種の元素であり、原子%で、50≦a≦90、2≦b≦15、5≦c≦30、0≦d≦3、0≦e≦10、a+b+c+d+e=100)で表されるものが好ましい。合金組成はこれを特に限定するものではなく、必要とされる特性に応じて選定することができる。
(1) Material As the foil-shaped amorphous alloy used as the material in the present embodiment, for example, a quenching solidification strip obtained by quenching the molten alloy as in the single roll method is used. As the Fe-based amorphous alloy strip, it is preferable to use a Fe-based amorphous alloy strip having a high saturation magnetic flux density Bs of 1.4 T or more. For example, a Fe-based amorphous alloy strip such as Fe-Si-B system represented by Metglas (registered trademark) 2605SA1 material can be used. Further, a composition such as Fe-Si-BC type or Fe-Si-BC-Cr type containing other elements can be adopted. A part of Fe may be replaced with Co, Ni or the like. As an example of the alloy composition of the Fe-based amorphous alloy strip used in the embodiment of the present invention, Fe a Si b B c C d Me (where M is selected from the group consisting of Cr, Mo, Mn, Zr and Hf). It is at least one kind of element, and is represented by 50 ≦ a ≦ 90, 2 ≦ b ≦ 15, 5 ≦ c ≦ 30, 0 ≦ d ≦ 3, 0 ≦ e ≦ 10, a + b + c + d + e = 100) in atomic%. It is preferable that it is made. The alloy composition is not particularly limited, and can be selected according to the required properties.
 本実施形態で素材となる箔状のアモルファス合金には、熱処理によりナノ結晶組織を発現するアモルファス合金を使用しても良い。これは、ナノ結晶合金と呼ばれるものであり、急冷凝固時はアモルファス状態であるが、その後熱処理することによりナノ結晶組織となり、優れた軟磁気特性を示すものである。この場合も箔状のアモルファス合金の形態で製造され、それを粉砕して粉砕粉とし、磁心材料として用いることができる。この場合、1.2 T以上の高い飽和磁束密度Bsを有するFe基ナノ結晶合金薄帯となるアモルファス合金薄帯を用いるのが好ましい。具体的には、例えば、Fe-Si-B-Cu-Nb系、Fe-Cu-Si-B系、Fe-Cu-B系、Fe-Ni-Cu-Si-B系等のFe基ナノ結晶合金用のアモルファス合金薄帯を用いることができる。これらの元素の一部を置換した系及び他の元素を添加した系を用いてもよい。本発明の実施形態に用いる合金組成の一例としては、Fe100-x-yAxXy(ただし、AはCu及び/又はAu、XはB、Si、S、C、P、Al、Ge、B、Sn及びCrからなる群から選ばれた少なくとも一種類の元素)で表され、原子%で、0<x≦5、10≦y≦24により表されるものが好ましい。なおナノ結晶組織とは、粒径が100 nm以下の微結晶組織である。 As the foil-shaped amorphous alloy used as the material in the present embodiment, an amorphous alloy that develops a nanocrystal structure by heat treatment may be used. This is called a nanocrystal alloy, which is in an amorphous state during quenching and solidification, but is subsequently heat-treated to form a nanocrystal structure and exhibits excellent soft magnetic properties. Also in this case, it is produced in the form of a foil-like amorphous alloy, which can be pulverized into pulverized powder and used as a magnetic core material. In this case, it is preferable to use an amorphous alloy strip which is a Fe-based nanocrystal alloy strip having a high saturation magnetic flux density Bs of 1.2 T or more. Specifically, for example, Fe-based nanocrystals such as Fe-Si-B-Cu-Nb series, Fe-Cu-Si-B series, Fe-Cu-B series, and Fe-Ni-Cu-Si-B series. Aluminous alloy strips for alloys can be used. A system in which a part of these elements is substituted and a system in which other elements are added may be used. As an example of the alloy composition used in the embodiment of the present invention, Fe 100-xy A x X y (where A is Cu and / or Au, X is B, Si, S, C, P, Al, Ge, B , At least one element selected from the group consisting of Sn and Cr), and is preferably represented by 0 <x ≦ 5, 10 ≦ y ≦ 24 in atomic%. The nanocrystal structure is a microcrystal structure having a particle size of 100 nm or less.
 ナノ結晶を発現させるための熱処理は、例えば、磁心形状とした後、又は磁心形状とする前であって、粉砕の後に行うことができる。この熱処理によりナノ結晶組織を発現するアモルファス合金を用いる場合、最終的に得られる圧粉磁心等において粉砕粉がナノ結晶組織を有していればよい。したがって、粉砕に供する時点では、熱処理によりナノ結晶組織を発現するアモルファス合金であってもよい。 The heat treatment for expressing nanocrystals can be performed, for example, after forming the magnetic core shape or before forming the magnetic core shape and after pulverization. When an amorphous alloy that develops a nanocrystal structure by this heat treatment is used, it is sufficient that the pulverized powder has a nanocrystal structure in the finally obtained dust core or the like. Therefore, at the time of subjecting to pulverization, an amorphous alloy that develops a nanocrystal structure by heat treatment may be used.
 本実施形態の箔状のアモルファス合金の厚さは、10~50μmの範囲が好ましい。10μm未満では、機械的強度が低くて、安定に長尺の合金薄帯を鋳造することが困難である。また、50μmを超えると合金の一部が結晶化しやすくなる。本実施形態では合金の一部が結晶化していても良いが、保磁力が大きくなる等、磁気特性が劣化する場合があるため、磁気特性への影響を考慮すれば、合金組織に結晶相を極力含まず、得られる磁気特性がアモルファス単相に近い状態であるのが好ましい。箔状のアモルファス合金の厚さは、より好ましくは13~35μmである。 The thickness of the foil-like amorphous alloy of the present embodiment is preferably in the range of 10 to 50 μm. If it is less than 10 μm, the mechanical strength is low and it is difficult to stably cast a long alloy strip. Further, if it exceeds 50 μm, a part of the alloy is likely to crystallize. In the present embodiment, a part of the alloy may be crystallized, but the magnetic properties may deteriorate such as a large coercive force. Therefore, considering the influence on the magnetic properties, a crystal phase is formed in the alloy structure. It is preferable that the magnetic properties obtained are close to those of an amorphous single phase without containing as much as possible. The thickness of the foil-like amorphous alloy is more preferably 13 to 35 μm.
 箔状のアモルファス合金は、長尺の形態をなし、大きな巻き体として流通しているアモルファス合金薄帯や、薄帯を切断したり打抜いたりして、必要な部分以外として生じる切れ端部分である端材であっても良い。 Foil-shaped amorphous alloy is an amorphous alloy thin band that has a long shape and is distributed as a large wound body, or a piece of piece that is generated by cutting or punching the thin band as a part other than the necessary part. It may be scrap material.
 薄帯とする場合の幅は、これを特に限定するものではなく、市場に流通している程度の幅のものを用いることができるし、市場に流通している程度の幅のものからスリットした幅のものを用いることもできる。例えば、100~300 mm程度の幅のものを用いることができる。 The width of the thin band is not particularly limited, and a band having a width that is on the market can be used, and a slit is formed from the width that is on the market. A width one can also be used. For example, one having a width of about 100 to 300 mm can be used.
(2)塊状化工程a1
 アモルファス合金粉末用の素材として、箔状のFe基アモルファス合金をアモルファス合金薄帯として大きな巻き体のまま使用したり、端材を使用したりすることは可能である。端材は所望の形状のアモルファス合金薄帯を取り除いた残りであり、その大きさや形状は多種多様で、バラバラの状態では非常に嵩張り、取り扱いが容易でない。一方でアモルファス合金薄帯は長尺の形態をなし、大きな巻き体、典型的には外径が直径1~2 m程度の巻き体として流通していて、その重量は数百 kgを超えるため、この場合もまたそのままでは取り扱いが容易でない場合がある。そのため、箔状のFe基アモルファス合金を取り扱いが容易な程度の大きさ、重量の塊状体とするのが好ましい。
(2) Agglomeration step a1
As a material for the amorphous alloy powder, it is possible to use a foil-like Fe-based amorphous alloy as an amorphous alloy strip as a large wound body, or to use scraps. The offcuts are the residue after removing the amorphous alloy strips of the desired shape, and their sizes and shapes are diverse, and they are very bulky in a disjointed state and are not easy to handle. On the other hand, amorphous alloy strips have a long shape and are distributed as large wound bodies, typically wound bodies with an outer diameter of about 1 to 2 m, and their weight exceeds several hundred kg. In this case as well, it may not be easy to handle as it is. Therefore, it is preferable to make the foil-shaped Fe-based amorphous alloy into a mass having a size and weight that is easy to handle.
 本実施形態のアモルファス合金粉末の製造方法では、素材としてアモルファス合金薄帯を使用する場合に、まず大きな巻き体からアモルファス合金薄帯を引き出し、それを巻き直した小さな巻き体とした塊状体を用意する。設備的な要因で、大きな巻き体のままでは、取り扱いが困難である場合、好適な大きさの巻き体を適宜作製して塊状化を行うのが好ましい。大きな巻き体から円環状又は円柱状の小型の巻き体(塊状体)に巻き直す場合、その好適な質量は好ましくは5~50 kg、より好ましくは10~20 kgであり、巻き体の外径としては好ましくは100~400 mm、より好ましくは120~150 mmである。また、巻き体の作製方法としては、アモルファス合金薄帯を巻き回す通常の巻き方を用いればよい。例えば、巻き回す際の張力は10~100 kPaが好ましく、巻き取り速度は50~150 m/分が好ましい。 In the method for producing an amorphous alloy powder of the present embodiment, when an amorphous alloy strip is used as a material, an amorphous alloy strip is first pulled out from a large roll and then rewound to prepare a lumpy body as a small roll. do. If it is difficult to handle the large wound body as it is due to equipment factors, it is preferable to appropriately prepare a wound body having a suitable size and agglomerate it. When rewinding from a large winding body to a small annular or columnar winding body (mass), the suitable mass thereof is preferably 5 to 50 kg, more preferably 10 to 20 kg, and the outer diameter of the wound body. It is preferably 100 to 400 mm, and more preferably 120 to 150 mm. Further, as a method for producing the wound body, a normal winding method for winding an amorphous alloy strip may be used. For example, the tension at the time of winding is preferably 10 to 100 kPa, and the winding speed is preferably 50 to 150 m / min.
 素材が端材である場合、端材を型に入れ、プレスして一体化して、端材の塊を成形する塊状化を行うのが好ましい。これにより取り扱いが容易になる。端材の塊を作製するには、例えば、三方締めプレス機、二方締めプレス機などの金属圧縮機を用いることができる。また、一方締めプレス機を用いてもかまわない。このようなプレス機を用いて端材をプレスすることにより、端材の塊状体とすることができる。塊状体の大きさとしては、例えば、一辺が20 cm程度の直方体とすれば良く、一辺の大きさは10~30 cm程度が好ましく、15~25 cm程度がより好ましい。塊状体が小さ過ぎると取り扱いが煩雑となり、大き過ぎると質量が増加し取り扱いが困難となる。塊状体の形状は必ずしも直方体とする必要はなく、多角形体でもよく、円柱体でも良いし、それらに近しい形状であっても構わない。取り扱いしやすい形状、質量であれば、その形態は適宜選択できる。アモルファス合金薄帯の端材をプレスして一体化する際の加圧力は、1~500 MPaとするのが好ましい。1 MPa未満であると、塊とすることが困難であり、500 MPaを超えると、プレスが大型化して効率的でないし、アモルファス合金に対して大きな歪を生じさせて、得られるアモルファス合金粉末は磁気特性が劣るものとなる場合がある。加圧力の下限は、より好ましくは5 MPaであり、更に好ましくは10 MPaである。加圧力の上限は、より好ましくは200 MPaであり、更に好ましくは100 MPaである。 When the material is offcuts, it is preferable to put the offcuts into a mold, press and integrate them to form a lump of offcuts. This facilitates handling. A metal compressor such as a three-way press or a two-way press can be used to produce a lump of offcuts. Further, a one-sided tightening press may be used. By pressing the offcuts with such a press, it is possible to form a lump of offcuts. The size of the lump may be, for example, a rectangular parallelepiped having a side of about 20 cm, and the size of one side is preferably about 10 to 30 cm, more preferably about 15 to 25 cm. If the mass is too small, handling becomes complicated, and if it is too large, the mass increases and handling becomes difficult. The shape of the massive body does not necessarily have to be a rectangular parallelepiped, and may be a polygonal body, a cylindrical body, or a shape close to them. If the shape and mass are easy to handle, the form can be appropriately selected. The pressing force when pressing and integrating the scraps of the amorphous alloy strip is preferably 1 to 500 MPa. If it is less than 1 MPa, it is difficult to make a lump, and if it exceeds 500 MPa, the press becomes large and inefficient, and the amorphous alloy is distorted greatly, and the obtained amorphous alloy powder is obtained. The magnetic characteristics may be inferior. The lower limit of the pressing force is more preferably 5 MPa, still more preferably 10 MPa. The upper limit of the pressing force is more preferably 200 MPa, still more preferably 100 MPa.
(3)脆化工程a2
 本実施形態では、塊状体に対し、脆化のための熱処理を行うのが好ましい。この脆化処理は、Fe基アモルファス合金の薄帯や端材を塊状体とせずにそのまま利用する場合は必須ではないが、その場合でも脆化処理を施した方が粉砕性を高めることができるので好ましい。熱処理は大気中でも良いし、非酸化性雰囲気中でも良い。Fe基アモルファス合金はその組成にもよるが、250℃以上の熱処理により脆化が起こり、粉砕しやすくなる性質を持っている。脆化処理の温度を上げると、より脆化し、粉砕しやすくなる。ただし、温度を上げすぎると結晶化が始まり、粉砕粉の著しい結晶化は、例えば圧粉磁心として使用する場合に、保磁力の増加や磁心損失の増加に影響するので好ましくない。このため脆化処理の温度は、Fe基アモルファス合金であれば、その結晶化温度よりも100~220℃低温とするのが好ましく、300~400℃の温度であるのが好ましい。脆化処理の温度は、より好ましくは300~380℃であり、さらに好ましくは320~380℃であり、最も好ましくは340~380℃である。
(3) Embrittlement step a2
In the present embodiment, it is preferable to heat-treat the agglomerates for embrittlement. This embrittlement treatment is not essential when the thin strips and scraps of the Fe-based amorphous alloy are used as they are without being agglomerated, but even in that case, the embrittlement treatment can improve the pulverizability. Therefore, it is preferable. The heat treatment may be performed in the atmosphere or in a non-oxidizing atmosphere. Although it depends on the composition of the Fe-based amorphous alloy, it has the property of being easily crushed due to embrittlement caused by heat treatment at 250 ° C. or higher. Increasing the temperature of the embrittlement process makes it more embrittled and easier to grind. However, if the temperature is raised too high, crystallization starts, and remarkable crystallization of the pulverized powder is not preferable because it affects an increase in coercive force and an increase in magnetic core loss when used as a dust core, for example. Therefore, in the case of an Fe-based amorphous alloy, the embrittlement treatment temperature is preferably 100 to 220 ° C. lower than the crystallization temperature, and preferably 300 to 400 ° C. The temperature of the embrittlement treatment is more preferably 300 to 380 ° C, still more preferably 320 to 380 ° C, and most preferably 340 to 380 ° C.
 本発明においては塊状体がこの脆化処理の温度範囲に達していれば、その温度で長時間保持する必要はなく、保持時間は1時間以下で十分であり、好ましくは30分以下である。複数個の巻き体を同時に脆化処理する場合、全ての巻き体が上記の温度に達していれば、それぞれの保持時間や到達温度は異なっていても良い。つまり、熱処理炉内の位置によって温度に差が生じる場合があるが、その場合は、全ての巻き体が所定の脆化処理の温度範囲に達していればよく、それぞれの到達温度又は保持時間は異なっていても良い。一つの塊状体でも全体で温度が均一になっていなくても良く、少なくとも一部が脆化処理の温度範囲となっていれば良い。アモルファス合金の組成よっては、脆化処理を省略してもよい。 In the present invention, if the mass has reached the temperature range of this embrittlement treatment, it is not necessary to hold it at that temperature for a long time, and the holding time of 1 hour or less is sufficient, preferably 30 minutes or less. When embrittlement treatment is performed on a plurality of wound bodies at the same time, the holding time and the reached temperature of each may be different as long as all the wound bodies have reached the above temperature. That is, there may be a difference in temperature depending on the position in the heat treatment furnace, but in that case, it is sufficient that all the wound bodies have reached the predetermined temperature range of the embrittlement treatment, and the respective reached temperature or holding time is It may be different. The temperature of one agglomerate does not have to be uniform as a whole, and at least a part thereof may be in the temperature range of the embrittlement treatment. Depending on the composition of the amorphous alloy, the embrittlement treatment may be omitted.
(4)解砕工程a3
 本実施形態では、脆化処理後又は未処理の塊状体に対して解砕処理を行うのが好ましい。この解砕工程は主に塊状体を対象に行い、塊になっている箔状のアモルファス合金の塊状体を粗く破砕させる。解砕は解砕用プレス機やハンマーを用い外力を作用させて行うことができる。このとき、解砕用プレス機の加圧方向は塊状体が巻き体であれば、その巻軸方向が一致する状態で、塊状体をプレスして解砕するのが好ましい。端材から得られる塊状体であれば加圧はいずれの方向からでも良いが、加圧方向に平坦な面があるのが好ましい。プレスの加圧力は、塊状体の質量あたり0.3 ton/kg以上とするのが好ましい。この加圧力は解砕用プレス機で解砕する際の最大加圧力を投入する巻き体の質量で除した数値と定義する。この加圧力が0.3 ton/kg未満であると、解砕力が弱く十分に解砕されない。加圧力が5 ton/kgより大きい場合は、プレス機が大型化し効率的でない。従って、解砕工程でのプレスの加圧力は、塊状体の質量あたり0.3~5 ton/kgであるのが好ましい。
(4) Crushing process a3
In the present embodiment, it is preferable to perform a crushing treatment on the agglomerates after the embrittlement treatment or the untreated mass. This crushing step is mainly performed on the lumps, and the lumps of the foil-like amorphous alloy that are lumps are roughly crushed. Crushing can be performed by applying an external force using a crushing press or a hammer. At this time, if the mass is wound in the pressurizing direction of the crushing press machine, it is preferable to press and crush the mass in a state where the winding axis directions are the same. Pressurization may be performed from any direction as long as it is a mass obtained from scraps, but it is preferable that there is a flat surface in the pressurization direction. The pressing force of the press is preferably 0.3 ton / kg or more per mass of the mass. This pressing force is defined as a value obtained by dividing the maximum pressing force when crushing with a crushing press by the mass of the wound body to be charged. If this pressing force is less than 0.3 ton / kg, the crushing force is weak and crushing is not sufficient. If the pressing force is greater than 5 ton / kg, the press will be large and inefficient. Therefore, the pressing force of the press in the crushing step is preferably 0.3 to 5 ton / kg per mass of the mass.
(5)選別工程a4
 塊状体の解砕工程を終えた後の解砕体の形態は、不定形で大小に分割された箔状の破片の状態や、箔が多層に重なりそれらが密着して多層体を形成した状態となっている。特に、アモルファス合金薄帯を巻き直して小さな巻き体とした塊状体を用いた場合、解砕体には多層体が多く存在している。解砕体は、大きなものでは平面視で人の拳よりも大きな形状のものも含んでいる。大きな解砕体のままでは次の粉砕工程の粉砕機に供給できない場合や、粉砕機に大きな負荷がかかり過負荷となって、処理できない粉砕粉が粉砕機の内部に溜まり、粉砕機が停止する可能性がある。また、粉砕に時間を要するため、得られる粉砕粉末は内部応力が大きく磁気特性に劣るものとなり易い。選別工程a4では、多層体の状態の解砕体を解して分離させ、箔の重なりを減じ、更には小片に分割し、Fe基アモルファス合金の小片を篩って所定の大きさに選別して分離する。このようにして選別して分離した小片を次の粉砕工程に供給する。
(5) Sorting process a4
The morphology of the crushed body after the crushing process of the lump body is in the state of foil-like fragments that are irregularly divided into large and small pieces, or in the state where the foils are stacked in multiple layers and adhere to each other to form a multilayer body. It has become. In particular, when a massive body obtained by rewinding an amorphous alloy strip to form a small wound body is used, many multilayer bodies are present in the crushed body. The crushed body includes a large one having a shape larger than a human fist in a plan view. If the large crushed material cannot be supplied to the crusher in the next crushing process, or the crusher is overloaded due to a large load, unprocessable crushed powder accumulates inside the crusher and the crusher stops. there is a possibility. Further, since it takes time to pulverize, the obtained pulverized powder tends to have a large internal stress and inferior in magnetic characteristics. In the sorting step a4, the crushed body in the multi-layered state is disassembled and separated to reduce the overlap of foils, further divided into small pieces, and the small pieces of Fe-based amorphous alloy are sieved and sorted to a predetermined size. To separate. The small pieces sorted and separated in this way are supplied to the next pulverization step.
 箔状のFe基アモルファス合金の解砕体の分割、特にこれらの箔が多層に重なった多層体の分離は、例えば、人手で行うこともできるが、大量のFe基アモルファス合金の解砕体を処理しようとする場合には効率的でない。そこで、本実施形態では、解砕体の分割、分離及び選別は、図2に示すような選別装置100を用いた選別手段で行う。選別装置100は、有底の円筒体101を備え、円筒体101は、その中心軸線CLが装置の水平な設置面に対して平行か、底側が低くなるように45度以下の角度で傾斜して、中心軸線CLに回転自在に支持されている。円筒体101は中心軸線CL周りに、例えば、モーター(図示せず。)によって回転させることができる。円筒体101は、多数の貫通孔107が貫通形成された側面105を有しており、各貫通孔107の直径は好ましくは3~15 cmである。貫通孔107は、側面105の単位面積(1 m2)あたり20個以上形成されているのが好ましく、図3に示すように、千鳥状に配置されるのが好ましい。 The division of the crushed body of the foil-like Fe-based amorphous alloy, in particular, the separation of the multilayer body in which these foils are laminated in multiple layers can be performed by hand, for example, but a large amount of the crushed body of the Fe-based amorphous alloy can be used. Not efficient when trying to process. Therefore, in the present embodiment, the crushed body is divided, separated and sorted by the sorting means using the sorting device 100 as shown in FIG. The sorting device 100 includes a bottomed cylinder 101, which is tilted at an angle of 45 degrees or less so that its central axis CL is parallel to the horizontal installation surface of the device or the bottom side is low. It is rotatably supported by the central axis CL. The cylinder 101 can be rotated around the central axis CL, for example, by a motor (not shown). The cylindrical body 101 has a side surface 105 through which a large number of through holes 107 are formed, and the diameter of each through hole 107 is preferably 3 to 15 cm. It is preferable that 20 or more through holes 107 are formed per unit area (1 m 2 ) of the side surface 105, and as shown in FIG. 3, they are preferably arranged in a staggered pattern.
 円筒体101の上側(図では左側)の開口部から円筒体101の中に、解砕工程a3で得られた解砕体15を投入し、円筒体を回転駆動させることにより、解砕体15の分割、分離及び選別を行う。回転中の円筒体101の内側では、解砕体15同士が衝突することによる衝撃や、解砕体15が円筒体101の側面105の内側にそって滑ったときの接触による摩擦抵抗によって、多層体が解されて重なった箔が分離され、破片が更に小片に分割される。投入された解砕体15の内、円筒体101の側面105に形成された貫通孔107を通過できる大きさとなったFe基アモルファス合金の小片が貫通孔107を通過し、貫通孔107を通過できない大きさの解砕体15が円筒体内に残され、引き続き解し及び分割が行われる。このような選別手段により、側面105に形成された貫通孔107の孔径に応じた大きさのFe基アモルファス合金の小片20を選別し分離することができる。 The crushed body 15 obtained in the crushing step a3 is put into the cylindrical body 101 through the opening on the upper side (left side in the figure) of the cylindrical body 101, and the crushed body 15 is rotationally driven to drive the crushed body 15. Divide, separate and sort. Inside the rotating cylinder 101, there are multiple layers due to the impact caused by the collision of the crushed bodies 15 and the frictional resistance due to the contact when the crushed bodies 15 slide along the inside of the side surface 105 of the cylinder 101. The body is unraveled, the overlapping foils are separated, and the pieces are further divided into small pieces. Of the charged crushed bodies 15, a small piece of Fe-based amorphous alloy having a size capable of passing through the through hole 107 formed on the side surface 105 of the cylindrical body 101 passes through the through hole 107 and cannot pass through the through hole 107. The crushed body 15 of the size is left in the cylindrical body, and the crushed body 15 is continuously crushed and divided. By such a sorting means, a small piece 20 of an Fe-based amorphous alloy having a size corresponding to the hole diameter of the through hole 107 formed on the side surface 105 can be sorted and separated.
 他の好ましい本実施形態では、箔状のFe基アモルファス合金を、図4に示すように、多数の貫通孔107を有する板状体201の上に投入し、板状体201を振動させてFe基アモルファス合金を小片として貫通孔107を通過させ篩う振動篩200からなる選別装置を選別手段として使用する。板状体201の上では、解砕体15どうしの衝突による衝撃や、解砕体15と板状体201との接触による摩擦抵抗によって多層体が解され、重なった箔が分離され、破片が更に小片に分割される。投入された解砕体15の内、板状体201に形成された貫通孔107を通過できる大きさとなったFe基アモルファス合金の小片が貫通孔107を通過し、貫通孔107を通過できない大きさの解砕体15が板状体状201に残され、引き続き解し及び分割が行われる。このような選別手段より、板状体201に形成された貫通孔107の孔径に応じた大きさのFe基アモルファス合金の小片20を選別し分離することができる。貫通孔107の孔径や、単位面積(1m2)あたり形成数、配置は前述の円筒体101と同様で良い。円筒体101及び板状体201は、鉄鋼板、ステンレス鋼板、アルミニウム等から作製されるパンチングメタル、エッチングメタル、エキスパンドメタル等で形成されるのが好ましい。 In another preferred embodiment, as shown in FIG. 4, a foil-shaped Fe-based amorphous alloy is thrown onto a plate-shaped body 201 having a large number of through holes 107, and the plate-shaped body 201 is vibrated to provide Fe. A sorting device including a vibrating sieve 200 that sifts a basic amorphous alloy through a through hole 107 as a small piece is used as a sorting means. On the plate-shaped body 201, the multilayer body is disassembled by the impact due to the collision between the crushed bodies 15 and the frictional resistance due to the contact between the crushed body 15 and the plate-shaped body 201, the overlapping foils are separated, and the fragments are separated. It is further divided into small pieces. Of the charged crushed bodies 15, a small piece of Fe-based amorphous alloy having a size capable of passing through the through hole 107 formed in the plate-shaped body 201 passes through the through hole 107 and cannot pass through the through hole 107. The crushed body 15 of the above is left in the plate-like body 201, and the crushed body 15 is continuously crushed and divided. From such a sorting means, a small piece 20 of an Fe-based amorphous alloy having a size corresponding to the hole diameter of the through hole 107 formed in the plate-shaped body 201 can be sorted and separated. The hole diameter of the through hole 107, the number of formations per unit area (1 m 2 ), and the arrangement may be the same as those of the above-mentioned cylindrical body 101. The cylindrical body 101 and the plate-shaped body 201 are preferably formed of a punching metal, an etching metal, an expanded metal or the like made of an iron steel plate, a stainless steel plate, aluminum or the like.
(6)粉砕工程a5
 次に、本実施形態では、選別工程a4で得られたFe基アモルファス合金の小片を粉砕する。粉砕は、ピンミル又はハンマーミルを用いて行うのが好ましい。ピンミルは向かい合った2枚の円板とその表面に互いにかみ合うよう植えられた多数のピンを備える機器である。ピンミルに投入されたFe基アモルファス合金の小片は、円板中心に供給され、片方の円板、又は両方の円板が高速回転することで生じる遠心力で円周方向に移動しながら、ピンによる衝撃力、せん断力によって破砕、粉砕される。ハンマーミルは、高速回転するハンマーによる衝撃力、せん断力によってFe基アモルファス合金の小片を破砕及び粉砕する。
(6) Crushing process a5
Next, in the present embodiment, small pieces of the Fe-based amorphous alloy obtained in the sorting step a4 are pulverized. The pulverization is preferably carried out using a pin mill or a hammer mill. A pin mill is a device that has two discs facing each other and a large number of pins planted on the surface of the discs so that they mesh with each other. The small pieces of Fe-based amorphous alloy put into the pin mill are supplied to the center of the disc, and move in the circumferential direction by the centrifugal force generated by the high-speed rotation of one disc or both discs, and are driven by the pins. It is crushed and crushed by impact force and shearing force. The hammer mill crushes and crushes small pieces of Fe-based amorphous alloy by the impact force and shearing force of a high-speed rotating hammer.
 ピンミル又はハンマーミルによる粉砕によれば、得られるFe基アモルファス合金粉末は、エッジがシャープで表面も薄帯状態に近い平坦な面を有し、そのほぼ全体が平面と破断面の側面を備える薄片状体となる。これらの方法により、おおよそ平均粒径が240μm以下で、加工歪が小さい粉砕粉を得ることができる。本実施形態では、粉砕粉の加工歪を小さくできるので、保磁力の小さいFe基アモルファス合金粉末を得ることができる。保磁力の小さい粉砕粉は、圧粉磁心に利用した場合、磁心損失が小さくて磁気特性に優れた磁心を得ることができるので好ましい。なお粉砕手段としては、加工歪を受ける粉砕時間が短いピンミルを使用するのがより好ましい。 According to crushing with a pin mill or a hammer mill, the obtained Fe-based amorphous alloy powder has a flat surface with sharp edges and a surface close to a thin band state, and almost the entire surface is a flaky piece having a flat surface and side surfaces of a fracture surface. It becomes a state. By these methods, it is possible to obtain a pulverized powder having an average particle size of about 240 μm or less and a small processing strain. In the present embodiment, since the processing strain of the pulverized powder can be reduced, an Fe-based amorphous alloy powder having a small coercive force can be obtained. When pulverized powder having a small coercive force is used for a dust core, it is preferable because a magnetic core having a small magnetic core loss and excellent magnetic characteristics can be obtained. As the crushing means, it is more preferable to use a pin mill having a short crushing time that receives processing strain.
 図5に示すように、本実施形態では、粉砕工程a5を第1粉砕工程a5-1と第2粉砕工程a5-2とに分けて行っても良い。本実施形態の第1粉砕工程a5-1では、粉砕整粒機を用いて粉砕を行うのが好ましい。粉砕整粒機とは、カッターやナイフと呼ばれる1つ以上の粉砕刃を備えた羽根と、それを内部に納める円筒形のスクリーンを持つ粉砕機である。粉砕整粒機に投入されたFe基アモルファス合金の小片を、羽根の回転軸の周囲に設置されたスクリーンに形成された多数の貫通する孔を通過するまで、高速で回転する羽根に配設された粉砕刃によりせん断力又は切断力によって破砕、粉砕する。スクリーンの孔は丸や角に形成されていて、スクリーンが丸孔であれば、選別工程a4でFe基アモルファス合金の小片が通過する孔よりも小径であって、直径1.5~12 mmとするのが好ましい。 As shown in FIG. 5, in the present embodiment, the crushing step a5 may be divided into a first crushing step a5-1 and a second crushing step a5-2. In the first pulverization step a5-1 of the present embodiment, it is preferable to pulverize using a pulverizing and sizing machine. A crushing and sizing machine is a crushing machine having a blade equipped with one or more crushing blades called a cutter or a knife and a cylindrical screen in which the blade is housed. Small pieces of Fe-based amorphous alloy charged into the pulverizer and sizing machine are arranged on the blades that rotate at high speed until they pass through a large number of through holes formed in the screen installed around the rotation axis of the blades. It is crushed and crushed by shearing force or cutting force with a crushing blade. The holes in the screen are rounded or rounded, and if the screen is round, the diameter is smaller than the holes through which the small pieces of Fe-based amorphous alloy pass in the sorting step a4, and the diameter is 1.5 to 12 mm. Is preferable.
 第1粉砕工程a5-1での粗粉砕により得られた粉砕粉は、第2粉砕工程a5-2で微粉砕する。第2粉砕工程a5-2では粉砕機にピンミル又はハンマーミルを使用するのが好ましく、ピンミルを用いるのがより好ましい。ピンミル又はハンマーミルを用いて行う微粉砕では、平均粒径が50~240μmの粉砕粉とするのが好ましい。更に、平均粒径が50~180μmの粉砕粉とするのが好ましい。粉砕粉の平均粒径を小さくすることは、それだけ粉砕に時間を要し、よって粉砕粉に導入される加工歪が大きくなり易く、ヒステリシス損失の増加の原因になる。しかしながら本実施態様では、粉砕工程a5を複数の工程に分けることで、粉砕効率の高い条件で粉砕可能として粉砕機への負荷を低減し、粉砕粉への内部応力の蓄積を抑制する。それによって、平均粒径が小さい粉砕粉であってもヒステリシス損失の増加を抑えることができる。一方、平均粒径が大きい粉砕粉は、流動性が低下して、成形時の金型への充填性が悪くなり圧粉磁心の高密度化がしにくくなる。本実施形態で得られる粉砕粉は実用的な流動性を備えるが、粉砕粉が扁平であるとその流動性が低下する傾向があるから、良好な流動性を得ようとすれば、平均粒径は箔状のアモルファス合金の厚さに対して2倍超から6倍以下とするのが好ましい。 The crushed powder obtained by the coarse crushing in the first crushing step a5-1 is finely crushed in the second crushing step a5-2. In the second crushing step a5-2, it is preferable to use a pin mill or a hammer mill as the crusher, and it is more preferable to use a pin mill. In fine pulverization performed using a pin mill or a hammer mill, it is preferable to use pulverized powder having an average particle size of 50 to 240 μm. Further, it is preferable to use a pulverized powder having an average particle size of 50 to 180 μm. Reducing the average particle size of the pulverized powder requires more time for pulverization, so that the processing strain introduced into the pulverized powder tends to increase, which causes an increase in hysteresis loss. However, in the present embodiment, by dividing the crushing step a5 into a plurality of steps, it is possible to crush under the condition of high crushing efficiency, the load on the crusher is reduced, and the accumulation of internal stress in the crushed powder is suppressed. As a result, it is possible to suppress an increase in hysteresis loss even for pulverized powder having a small average particle size. On the other hand, in the pulverized powder having a large average particle size, the fluidity is lowered, the filling property into the mold at the time of molding is deteriorated, and it becomes difficult to increase the density of the dust core. The pulverized powder obtained in the present embodiment has practical fluidity, but if the pulverized powder is flat, its fluidity tends to decrease. Therefore, if good fluidity is to be obtained, the average particle size Is preferably more than 2 times to 6 times or less the thickness of the foil-like amorphous alloy.
 前述したように、粉砕工程a5を第1粉砕工程a5-1と第2粉砕工程a5-2とに分けて行うことにより、第1粉砕工程a5-1で粗粉砕による粉砕を行って粒径をある程度小さくし、第2粉砕工程a5-2での粉砕における負荷を低減しているが、更に図6に示すように、第2粉砕工程a5-2の前に第1-1粉砕工程a5-1-1の粗粉砕と第1-2粉砕工程a5-1-2の中粉砕とに分けた2回の粉砕を行っても良い。更に第1粉砕工程a5-1を3回以上の粉砕に分けて行って段階的に粒度を落としてもよい。それぞれの粉砕で粉砕効率の良い条件で粉砕を行うことができれば、一層粉砕粉への内部応力の蓄積を抑制することができる。 As described above, by performing the crushing step a5 separately in the first crushing step a5-1 and the second crushing step a5-2, crushing by coarse crushing is performed in the first crushing step a5-1 to reduce the particle size. The load is reduced to some extent in the crushing in the second crushing step a5-2, but as shown in FIG. 6, the 1-1 crushing step a5-1 is further before the second crushing step a5-2. The coarse pulverization of -1 and the medium pulverization of the first and second crushing steps a5-1-2 may be carried out twice. Further, the first pulverization step a5-1 may be divided into three or more pulverizations to gradually reduce the particle size. If pulverization can be performed under conditions of good pulverization efficiency in each pulverization, the accumulation of internal stress in the pulverized powder can be further suppressed.
 第1粉砕工程a5-1、第1-1粉砕工程a5-1-1、及び第1-2粉砕工程a5-1-2の粉砕では、それぞれ破砕整粒機を粉砕に使用するのが好ましい。第1-2粉砕工程a5-1-2の中粉砕で用いるスクリーンの孔は、第1-1粉砕工程a5-1-1の粗粉砕で用いるスクリーンの孔よりも小さい穴が設定される。スクリーンが丸孔であれば、直径0.3~5 mmとするのが好ましい。第1-1粉砕工程a5-1-1の粗粉砕で用いるスクリーンの孔は、第1粉砕工程a5-1の設定と同じで良い。 In the crushing of the first crushing step a5-1, the 1-1 crushing step a5-1-1, and the 1-2 crushing step a5-1-2, it is preferable to use a crushing and sizing machine for crushing, respectively. The holes of the screen used in the medium crushing of the first 1-2 crushing step a5-1-2 are set to be smaller than the holes of the screen used in the coarse crushing of the first 1-1 crushing step a5-1-1. If the screen has a round hole, the diameter is preferably 0.3 to 5 mm. The holes of the screen used in the coarse crushing of the first crushing step a5-1-1 may be the same as the settings of the first crushing step a5-1.
 本発明の実施形態において、保磁力Hcが2000 A/m以下の粉砕粉を得ることができる。粉砕粉の保磁力Hcは、好ましくは1500 A/m以下であり、更に好ましくは1000 A/m以下である。なお、この保磁力Hcは歪み取りの熱処理を行っていない、粉砕後の粉砕粉の値である。 In the embodiment of the present invention, a pulverized powder having a coercive force Hc of 2000 A / m or less can be obtained. The coercive force Hc of the pulverized powder is preferably 1500 A / m or less, and more preferably 1000 A / m or less. The coercive force Hc is the value of the pulverized powder after pulverization that has not been subjected to the heat treatment for removing strain.
 粉砕粉の粒径を、粉砕粉が使用される圧粉磁心の各種用途において適切な粒径とするために、得られた粉砕粉に分級を行っても良い。分級の方法は特に限定するものではないが、篩による方法が簡易であり、特に振動篩が好適である。例えば、粉砕を終えた粉砕粉を目開き106μm(対角150μm)の篩に通し、篩に残った大きな粉砕粉を取り除くことにより、平均粒径が100μm以下の粉砕粉を得ることができる。目開き106μm(対角150μm)の篩に通し、篩に残った大きな粉砕粉を再度ピンミルに投入して微粉砕することもできる。微小な粉砕粉を取り除きたい場合は、例えば、目開き32μm(対角45μm)の篩により通過する粉砕粉を除去することもできる。これら篩の大きさは、適宜、所望の粉砕粉の大きさに合わせて設定すれば良い。 In order to make the particle size of the crushed powder suitable for various uses of the dust core in which the crushed powder is used, the obtained crushed powder may be classified. The classification method is not particularly limited, but the method using a sieve is simple, and a vibrating sieve is particularly preferable. For example, a crushed powder having an average particle size of 100 μm or less can be obtained by passing the crushed powder through a sieve having an opening of 106 μm (diagonal 150 μm) and removing the large crushed powder remaining on the sieve. It is also possible to pass through a sieve with a mesh size of 106 μm (diagonal 150 μm) and put the large pulverized powder remaining on the sieve into the pin mill again for fine pulverization. When it is desired to remove fine pulverized powder, for example, the pulverized powder passing through with a sieve having a mesh size of 32 μm (diagonal 45 μm) can be removed. The size of these sieves may be appropriately set according to the desired size of the pulverized powder.
(7)酸化被膜形成工程a6
 粉砕工程a5を経た粉砕粉の表面に酸化被膜を形成しても良い。酸化被膜の形成は必須ではないが、防錆や絶縁のため形成するのが好ましい。酸化被膜を形成するのに、アンモニアを触媒としてTEOS(テトラエトキシシラン)を加水分解して粉砕粉の表面にSiO2被膜を形成するのが好ましい。また酸素を含む雰囲気中で加熱することによって粉砕粉の表面を酸化して、表面に合金組成に由来する酸化被膜を形成するのも好ましい。酸化のための熱処理は、例えば、大気中で、100~350℃の温度で2~6時間保持するのが好ましい。
(7) Oxide film forming step a6
An oxide film may be formed on the surface of the pulverized powder that has undergone the pulverization step a5. The formation of an oxide film is not essential, but it is preferable to form it for rust prevention and insulation. In order to form an oxide film, it is preferable to hydrolyze TEOS (tetraethoxysilane) using ammonia as a catalyst to form a SiO 2 film on the surface of the pulverized powder. It is also preferable to oxidize the surface of the pulverized powder by heating in an atmosphere containing oxygen to form an oxide film derived from the alloy composition on the surface. The heat treatment for oxidation is preferably held in the air at a temperature of 100 to 350 ° C. for 2 to 6 hours, for example.
(8)歪み取り熱処理
 本実施形態により得られた粉砕粉(粉砕工程a5を経たもの)は、上記したとおり、2000 A/m以下の保磁力Hcを有している。この粉砕粉に対し、歪み取り熱処理を行うことにより、保磁力を一層小さくすることができる。なお歪み取り熱処理は粉砕粉を使用して圧粉磁心とした後で行われることが多く、粉砕粉にあらかじめ歪み取り熱処理を行うことは必須ではない。この歪み取り熱処理は、箔状のアモルファス合金が前述のFe-Si-B系、Fe-Si-B-C系、Fe-Si-B-C-Cr系等のFe基アモルファス合金薄帯であれば、それらが結晶化しない温度条件で、結晶化温度未満の温度で行うのが好ましい。好ましくは350℃以上の温度であり、より好ましくは360℃以上であり、更に好ましくは380℃以上である。歪み取り熱処理は温度が高いほど効果が得られるので結晶化温度に近い温度350~420℃で行うのが好ましく、360~410℃で行うのがより好ましく、380~400℃で行うのが最も好ましい。歪み取り熱処理によって、粉砕粉の保磁力を200 A/m以下とすることができる。歪み取り熱処理後の粉砕粉の保磁力は、好ましくは180 A/m以下であり、さらに好ましくは160 A/m以下であり、最も好ましくは150 A/m以下である。この歪み取り熱処理は、例えば、昇温時間を1~6時間程度、保持時間を0.5~4時間程度として行えばよい。
(8) Strain-removing heat treatment As described above, the pulverized powder obtained by the present embodiment (which has undergone the pulverization step a5) has a coercive force Hc of 2000 A / m or less. By performing a strain removing heat treatment on the pulverized powder, the coercive force can be further reduced. It should be noted that the strain removing heat treatment is often performed after the crushed powder is used to form a dust core, and it is not essential to perform the strain removing heat treatment on the crushed powder in advance. In this strain removing heat treatment, if the foil-like amorphous alloy is a Fe-based amorphous alloy strip such as the above-mentioned Fe-Si-B type, Fe-Si-BC type, Fe-Si-BC-Cr type, they are used. It is preferably carried out at a temperature lower than the crystallization temperature under a temperature condition that does not crystallize. The temperature is preferably 350 ° C. or higher, more preferably 360 ° C. or higher, and even more preferably 380 ° C. or higher. Since the higher the temperature, the more effective the strain removing heat treatment is, it is preferably performed at a temperature close to the crystallization temperature of 350 to 420 ° C., more preferably 360 to 410 ° C., and most preferably 380 to 400 ° C. .. By the strain removing heat treatment, the coercive force of the pulverized powder can be reduced to 200 A / m or less. The coercive force of the pulverized powder after the strain removing heat treatment is preferably 180 A / m or less, more preferably 160 A / m or less, and most preferably 150 A / m or less. This strain removing heat treatment may be performed, for example, with a temperature rise time of about 1 to 6 hours and a holding time of about 0.5 to 4 hours.
 ナノ結晶組織を発現するアモルファス合金を用いる場合は、歪み取り熱処理とナノ結晶組織を発現させる熱処理とを合わせて行っても良い。熱処理の温度は結晶化温度以上であるのが好ましく、Fe2Bなどの強磁性の結晶が生じない温度とするのが好ましい。熱処理の温度は好ましくは400~600℃であり、より好ましくは450~550℃であり、最も好ましくは500~530℃である。 When an amorphous alloy that expresses a nanocrystal structure is used, the strain removing heat treatment and the heat treatment that expresses the nanocrystal structure may be performed in combination. The heat treatment temperature is preferably equal to or higher than the crystallization temperature, and is preferably a temperature at which ferromagnetic crystals such as Fe 2 B are not generated. The heat treatment temperature is preferably 400 to 600 ° C, more preferably 450 to 550 ° C, and most preferably 500 to 530 ° C.
 なお歪み取り熱処理は、粉砕粉への酸化被膜の形成の後でも良い。 The strain removing heat treatment may be performed even after the formation of an oxide film on the pulverized powder.
 本実施形態のFe基アモルファス合金粉末は圧粉磁心に好適に用いることができる。図7は、Fe基アモルファス合金粉末を使った圧粉磁心の製造工程のフローチャートである。Fe基アモルファス合金粉末とバインダーとを混合し造粒粉を得る造粒工程cと、得られた造粒粉を加圧成形して成形体を得る成形工程dと、得られた成形体を熱処理して成形体の歪み取りを行う熱処理工程eとを有し、得られた圧粉磁心は、薄片状のFe基アモルファス合金粉末どうしがバインダーで結着されたものとなる。バインダーは成形体の強度を得るのに、アクリル系樹脂、ポリビニルアルコール等を用いるのが好ましい。熱処理後の圧粉磁心の強度を得るために低融点ガラスやシリコーンレジンを用いるのが好ましく、それらを適宜組み合わせて使用するのが好ましい。造粒粉は、成形金型を用いて、トロイダル形状、直方体形状等の所定形状に加圧成形されるが、典型的には1~3 GPaの圧力で、数秒程度の保持時間で成形すればよい。成形工程においては5.3×103 kg/m3 以上に圧密化しておくのが好ましい。得られた成形体を、Fe基アモルファス合金の結晶化温度よりも低温で熱処理するのが好ましい。熱処理によって、成形工程で加えられた圧力によるFe基アモルファス合金粉末の歪みが低減され、優れた軟磁気特性が得られる。 The Fe-based amorphous alloy powder of the present embodiment can be suitably used for a dust core. FIG. 7 is a flowchart of a powder magnetic core manufacturing process using Fe-based amorphous alloy powder. A granulation step c in which a Fe-based amorphous alloy powder and a binder are mixed to obtain a granulated powder, a molding step d in which the obtained granulated powder is pressure-molded to obtain a molded body, and the obtained molded body is heat-treated. The powder magnetic core obtained is obtained by binding flaky Fe-based amorphous alloy powders to each other with a binder. As the binder, it is preferable to use an acrylic resin, polyvinyl alcohol, or the like in order to obtain the strength of the molded product. It is preferable to use low melting point glass or silicone resin in order to obtain the strength of the dust core after the heat treatment, and it is preferable to use them in an appropriate combination. The granulated powder is pressure-molded into a predetermined shape such as a toroidal shape or a rectangular parallelepiped shape using a molding die, but typically, if it is molded at a pressure of 1 to 3 GPa and a holding time of about several seconds. good. In the molding process, it is preferable to consolidate to 5.3 × 10 3 kg / m 3 or more. It is preferable to heat-treat the obtained molded product at a temperature lower than the crystallization temperature of the Fe-based amorphous alloy. By the heat treatment, the distortion of the Fe-based amorphous alloy powder due to the pressure applied in the molding process is reduced, and excellent soft magnetic properties can be obtained.
 本発明を以下の実施例によりさらに詳細に説明するが、本発明はこれらに限定されるものではない。 The present invention will be described in more detail with reference to the following examples, but the present invention is not limited thereto.
実施例1
(a)素材及び塊状化処理
 箔状のアモルファス合金として、厚さ25μm及び幅213 mmの長尺の日立金属株式会社製Metglas(登録商標)2605SA1材を用いた。この2605SA1材は、Fe-Si-B系材料のFe基アモルファス合金薄帯である。このFe基アモルファス合金薄帯は合金の溶湯を急冷凝固させる液体急冷法により、溶湯を高速回転する単ロール上で連続鋳造し、得られた薄帯をスプールに巻き取ることにより製造されたものである。このFe基アモルファス合金薄帯をスプールから巻き出し、巻き直して質量が約10 kg及び外径が150 mmの巻き体(塊状体)を18個作製した。
Example 1
(a) Material and agglomeration treatment As a foil-like amorphous alloy, a long Metglas (registered trademark) 2605SA1 material manufactured by Hitachi Metals, Ltd. with a thickness of 25 μm and a width of 213 mm was used. This 2605SA1 material is a Fe-based amorphous alloy strip of Fe-Si-B based material. This Fe-based amorphous alloy strip is manufactured by continuously casting the molten metal on a single roll that rotates at high speed by the liquid quenching method that quenches and solidifies the molten alloy, and winds the obtained strip on a spool. be. This Fe-based amorphous alloy strip was unwound from the spool and rewound to prepare 18 wound bodies (lumps) having a mass of about 10 kg and an outer diameter of 150 mm.
(b)脆化処理
 この18個の巻き体をそれぞれステンレスの容器(図示せず)に入れ、乾燥した大気雰囲気の熱処理炉内に適宜積み込み、脆化のための熱処理(脆化処理)を行った。積み込み状態を図8及び図9に模式的に示す。図8は正面から見た模式図であり、図9は平面的に見た模式図ある。図8及び図9に示すように、巻き体1を熱処理炉内に、一面に3列で各列に3個、縦に2段に配置した。縦方向は設置台(図示せず)を設けており、巻き体1同士は離れている。なお図8及び図9では、各巻き体1の位置関係のみを示すため、ステンレスの容器及び設置台の図示は省略した。
(b) Embrittlement treatment Each of these 18 rolls is placed in a stainless steel container (not shown), loaded appropriately in a heat treatment furnace in a dry air atmosphere, and heat-treated for embrittlement (embrittlement treatment). rice field. The loading state is schematically shown in FIGS. 8 and 9. FIG. 8 is a schematic view viewed from the front, and FIG. 9 is a schematic view viewed in a plane. As shown in FIGS. 8 and 9, the winding body 1 was arranged in the heat treatment furnace in three rows on one side, three in each row, and two stages in the vertical direction. An installation stand (not shown) is provided in the vertical direction, and the winding bodies 1 are separated from each other. Note that in FIGS. 8 and 9, only the positional relationship of each winding body 1 is shown, so that the stainless steel container and the installation stand are not shown.
 脆化処理は、大気雰囲気中で行い、熱処理炉の温度設定は、室温から最高温度までの昇温時間を2時間とし、最高温度を320℃、340℃、360℃及び380℃の4条件とし、最高温度での保持時間を4時間とし、その後加熱を止め炉内で冷却した。炉内は循環式となっており、加熱を止めると熱風温度が低下して徐々に空冷される。図10に、熱処理炉の設定温度、並びに上段右奥及び下段左前に設置した巻き体の温度を経過時間に対してプロットしたグラフを示す。各巻き体には熱電対を付けて温度を測定した。熱電対は、巻き体のアモルファス合金薄帯の積層方向の中間で、薄帯の幅方向の中間となる位置に挿入した。各巻き体は熱処理炉内の位置が異なることにより、温度変化は多少異なるものの、ほぼ設定温度に達していることがわかる。これらの巻き体は、その後の解砕及び粉砕において、粉砕され方に大差ないことが確認されており、巻き体の粉砕が支障なく行うことができた。 The brittle treatment is performed in an air atmosphere, and the temperature of the heat treatment furnace is set to 2 hours from room temperature to the maximum temperature and 4 conditions of maximum temperature of 320 ° C, 340 ° C, 360 ° C and 380 ° C. The holding time at the maximum temperature was set to 4 hours, after which the heating was stopped and the mixture was cooled in the furnace. The inside of the furnace is a circulation type, and when heating is stopped, the temperature of the hot air drops and it is gradually air-cooled. FIG. 10 shows a graph in which the set temperature of the heat treatment furnace and the temperature of the wound body installed in the upper right back and the lower left front are plotted against the elapsed time. A thermocouple was attached to each wound body to measure the temperature. The thermocouple was inserted at a position in the middle of the stacking direction of the amorphous alloy strips of the wound body and in the middle of the width direction of the strips. It can be seen that each wound body has almost reached the set temperature, although the temperature change is slightly different due to the different positions in the heat treatment furnace. It was confirmed that there was not much difference in the way these wound bodies were crushed in the subsequent crushing and crushing, and the wound bodies could be crushed without any trouble.
(c)解砕処理
 次に、脆化処理した巻き体に解砕処理を行った。解砕工程は、巻き体を解砕用プレス機に、巻き体の軸方向がプレス機の加圧方向と同じになるように配置し、巻き体に対し1 ton/kgの加圧力でプレスして解砕した。巻き体を解砕した解砕体は、箔状のアモルファス合金が多層に重なり部分的に密着したような多層体の状態となっている部分があった。
(c) Crushing treatment Next, the embrittled wound body was crushed. In the crushing process, the wound body is placed on a crushing press so that the axial direction of the wound body is the same as the pressurizing direction of the press machine, and the wound body is pressed with a pressing force of 1 ton / kg. And crushed. The crushed body obtained by crushing the wound body had a portion in a multi-layered state in which foil-like amorphous alloys were stacked in multiple layers and partially adhered to each other.
(d)選別処理
 解砕処理によって得られた解砕体に含まれる多層体部分を、解して重なった箔を分離するとともに、破片となった箔状のアモルファス合金を更に小片に分割して、以下の選別処理を行った。本実施例では、図2に示すように、直径が約10 cmの多数の貫通孔107が形成された側面105を有し、φ600の開口部を有する有底の円筒体101の中に解砕体15を投入し、円筒体101を軸周りに回転させ、円筒体101の側面105に設けられた貫通孔107を通過させることでFe基アモルファス合金の小片を篩い分けた。貫通孔107から落ちるFe基アモルファス合金の小片20は、ベルトコンベアで次の粉砕工程へ送った。Fe基アモルファス合金の小片20の大きさ(この大きさとは、薄帯の厚さ方向に垂直な方向における幅方向の最短部分の寸法のことであり、長方形状であれば短い側の幅寸法に相当する)は、概ね3~10 cm程度であり、更に細かな小片も含んでいた。なお、Fe基アモルファス合金の小片は変形可能であるので、屈曲していたりすると10 cmの貫通孔107は通過するものの、偏平形状に伸ばすと最長部分の寸法は10 cmを超えるものも存在していた。得られたFe基アモルファス合金の小片20は、偏平状の最長部分の寸法をLとし、その最長部分に直交する方向の最長部分の寸法をMとしたとき、おおむねL≦1.5Mの関係にあった。
(d) Sorting treatment The multilayer part contained in the crushed body obtained by the crushing treatment is crushed to separate the overlapping foils, and the foil-like amorphous alloy that has become fragments is further divided into small pieces. , The following sorting process was performed. In this embodiment, as shown in FIG. 2, crushed into a bottomed cylinder 101 having a side surface 105 formed with a large number of through holes 107 having a diameter of about 10 cm and having an opening of φ600. The body 15 was thrown in, the cylindrical body 101 was rotated about an axis, and the small pieces of the Fe-based amorphous alloy were sieved by passing through the through holes 107 provided in the side surface 105 of the cylindrical body 101. The Fe-based amorphous alloy small piece 20 falling from the through hole 107 was sent to the next pulverization step by a belt conveyor. The size of the small piece 20 of the Fe-based amorphous alloy (this size is the dimension of the shortest part in the width direction in the direction perpendicular to the thickness direction of the thin band, and if it is rectangular, the width dimension on the shorter side (Corresponding) was about 3 to 10 cm, and also included finer pieces. Since small pieces of Fe-based amorphous alloy are deformable, some of them pass through the 10 cm through hole 107 when bent, but the longest part exceeds 10 cm when stretched into a flat shape. rice field. The obtained Fe-based amorphous alloy small piece 20 has a relationship of approximately L≤1.5M, where L is the dimension of the longest flat portion and M is the dimension of the longest portion in the direction orthogonal to the longest portion. rice field.
(e)粉砕工程
 次に、粗粉砕、中粉砕及び微粉砕を順次行う粉砕工程を行った。なお、粗粉砕は第1-1粉砕工程a5-1-1、中粉砕が第1-2粉砕工程a5-1-2に相当し、微粉砕が第2粉砕工程a5-2に相当する。第1-1粉砕工程a5-1-1の粗粉砕は、粉砕整粒機を用いた。直径4 mmの穴を施したスクリーンを設置した粉砕整粒機に解砕体を連続して投入し、粉砕刃を高速回転させて粉砕処理した。この粗粉砕により得られた粉砕粉の大きさは、直径4 mmの穴を通過することができる大きさである。
(e) Crushing Step Next, a crushing step was carried out in which coarse crushing, medium crushing and fine crushing were sequentially performed. The coarse pulverization corresponds to the 1-1 pulverization step a5-1-1, the medium pulverization corresponds to the 1-2 pulverization step a5-1-2, and the fine pulverization corresponds to the second pulverization step a5-2. The coarse crushing of the first 1-1 crushing step a5-1-1 was carried out by using a crushing and sizing machine. The crushed material was continuously put into a crushing and sizing machine equipped with a screen with a hole with a diameter of 4 mm, and the crushing blade was rotated at high speed for crushing. The size of the pulverized powder obtained by this coarse pulverization is such that it can pass through a hole having a diameter of 4 mm.
 第1-2粉砕工程a5-1-2の中粉砕は、同じく粉砕整粒機を用い、粗粉砕により得られた粗粉砕粉を直径1.5 mmの穴を施したスクリーンを設置した粉砕整粒機に連続して投入し、粉砕刃を高速回転させて粉砕処理した。この中粉砕により得られた粉砕粉の大きさは、直径1.5 mmの穴を通過することができる大きさである。 For the medium crushing of the first 1-2 crushing steps a5-1-2, the same crushing and sizing machine was used, and the coarsely crushed powder obtained by the coarse crushing was crushed and sized with a screen having a hole with a diameter of 1.5 mm. The crushing blade was rotated at high speed for crushing. The size of the crushed powder obtained by pulverization is such that it can pass through a hole having a diameter of 1.5 mm.
 第2粉砕工程a5-2の微粉砕は、ピンミルを用い、中粉砕粉を連続して投入し、数百本のピンを備えるディスクを高速回転させて粉砕処理した。これにより、アモルファス合金粉砕粉末を作製した。このピンミルにより得られた粉砕粉(脆化処理360℃)のSEM観察像を図11に示す。このピンミルにより粉砕された粉砕粉はエッジがシャープで表面も元の薄帯の状態に近い平坦面を有していた。 For the fine pulverization in the second pulverization step a5-2, medium pulverized powder was continuously charged using a pin mill, and a disk equipped with several hundred pins was pulverized by rotating at high speed. As a result, an amorphous alloy crushed powder was produced. FIG. 11 shows an SEM observation image of the pulverized powder (embrittlement treatment 360 ° C.) obtained by this pin mill. The pulverized powder crushed by this pin mill had a flat surface with sharp edges and a surface close to the original thin band state.
 得られたアモルファス合金粉砕粉末(第2粉砕工程a5-2で粉砕処理して得られた粉砕粉)の平均粒径を求めた。粉砕粉の粒径測定は、約20 gの粉砕粉を用いて、所定の粒径区分に篩分けし、各粒径区分の質量を測定することによって行った。粒径区分は篩分に使用した篩のJIS試験用ふるい(JIS Z8801-1:2006)の公称目開きに基づき、各粒径区分は、45μm以下、45μm超63μm以下、63μm超90μm以下、90μm超125μm以下、125μm超180μm以下、180μm超355μm以下、355μm超425μm以下の最小粒径超及び最大粒径以下の範囲とした。各粒径区分に含まれる粒子は全てその粒径区分の平均径であるとして、(平均径×質量)の総計を合計質量で割って、平均粒径とした。本発明において「平均粒径」は、いずれもこの算出方法によるものである。 The average particle size of the obtained amorphous alloy crushed powder (crushed powder obtained by crushing in the second crushing step a5-2) was determined. The particle size of the pulverized powder was measured by sieving into a predetermined particle size category using about 20 g of the pulverized powder and measuring the mass of each particle size category. The particle size classification is based on the nominal opening of the JIS test sieve (JIS Z8801-1: 2006) of the sieve used for the sieve, and each particle size classification is 45 μm or less, 45 μm or more 63 μm or less, 63 μm or more 90 μm or less, 90 μm. The range was set to the range of more than 125 μm, more than 125 μm, more than 180 μm, more than 180 μm and less than 355 μm, more than 355 μm and less than 425 μm, and more than the minimum particle size and less than the maximum particle size. Assuming that all the particles included in each particle size category are the average diameter of the particle size category, the total of (average diameter x mass) was divided by the total mass to obtain the average particle size. In the present invention, the "average particle size" is based on this calculation method.
 実施例1で得られた粉砕粉は、脆化処理320℃で184μm、脆化処理340℃で107μm、脆化処理360℃で88μm、及び脆化処理380℃で75μmの平均粒径を有していた。いずれの場合の粉末も目開き425μmの篩を通過し、篩に残る粉末は無いか、あっても平均粒径を決めるのに実質的に影響のない程度の、ごく僅かの量であった。図12に脆化処理の温度と平均粒径との関係を示す。本実施例では、脆化熱処理温度を高くすると平均粒径が小さくなった。これは、脆化熱処理の温度が高い方が粉砕され易いことを示している。本実施例では、平均粒径が75~184μmのFe基アモルファス合金粉末が得られた。 The pulverized powder obtained in Example 1 has an average particle size of 184 μm at 320 ° C. for embrittlement treatment, 107 μm at 340 ° C. for embrittlement treatment, 88 μm at 360 ° C. for embrittlement treatment, and 75 μm at 380 ° C. for embrittlement treatment. Was there. In each case, the powder passed through a sieve having an opening of 425 μm, and there was no powder remaining on the sieve, or even if there was, the amount was so small that it had substantially no effect on determining the average particle size. Figure 12 shows the relationship between the embrittlement treatment temperature and the average particle size. In this example, the average particle size became smaller as the embrittlement heat treatment temperature was increased. This indicates that the higher the temperature of the embrittlement heat treatment, the easier it is to pulverize. In this example, Fe-based amorphous alloy powder having an average particle size of 75 to 184 μm was obtained.
実施例2
 第2粉砕工程a5-2において、粉砕機としてディスク型振動ミルを用いた以外は、実施例1の粉末C(脆化処理360℃の条件)と同様にしてFe基アモルファス合金粉末を得た。ディスク型振動ミルは、モーターによって揺動する試料容器内のリングとストーンとが遊星運動を起こすことで、容器内の試料を圧力と摩砕とによって粉砕するものである。粉砕は50 gの粉砕粉を投入し1分間運転して行った。得られたFe基アモルファス合金粉末の大きさは、粉末Cとほぼ同様であった。実施例2の粉砕粉のSEM観察像を図13に示す。実施例2の粉砕粉は、ピンミルで粉砕した粉末Cより角が丸まった形態で、表面も荒れた状態となっている粉砕粉を多く含んでいた。粉末C及び実施例2の粉砕粉の保磁力を、それぞれ歪み取り熱処理を行っていない粉砕後の粉砕粉と、420℃で歪み取り熱処理を行った後の粉砕粉との両方で評価した。結果を表1に示す。
Example 2
In the second pulverization step a5-2, an Fe-based amorphous alloy powder was obtained in the same manner as in Powder C of Example 1 (under the conditions of embrittlement treatment 360 ° C.) except that a disk-type vibration mill was used as the pulverizer. The disc-type vibration mill crushes the sample in the container by pressure and grinding by causing planetary motion between the ring and the stone in the sample container that are swung by the motor. The crushing was carried out by adding 50 g of crushed powder and operating for 1 minute. The size of the obtained Fe-based amorphous alloy powder was almost the same as that of powder C. The SEM observation image of the pulverized powder of Example 2 is shown in FIG. The pulverized powder of Example 2 contained a large amount of pulverized powder having rounded corners and a rough surface as compared with powder C crushed by a pin mill. The coercive force of the powder C and the pulverized powder of Example 2 was evaluated by both the pulverized powder which had not been subjected to the strain removing heat treatment and the pulverized powder which had been subjected to the strain removing heat treatment at 420 ° C. The results are shown in Table 1.
 なお、保磁力は、東英工業株式会社製の振動試料型磁力計(型式:VSM-5-20)を用い、外径7 mmφ、内径6 mmφ及び高さ5 mm(試料充填高さ2 mm)の試料ケースに粉砕粉を100 mg充填し、測定磁界10 kOe(800k A/m)で測定した。 For the coercive force, a vibrating sample magnetometer (model: VSM-5-20) manufactured by Toei Kogyo Co., Ltd. was used, with an outer diameter of 7 mmφ, an inner diameter of 6 mmφ, and a height of 5 mm (sample filling height 2 mm). ) Was filled with 100 mg of crushed powder and measured with a measurement magnetic field of 10 kOe (800 kA / m).
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
 実施例2の粉砕後の粉砕粉は、実施例1(粉末C)の粉砕後の粉砕粉に対して、保磁力が4倍程度と大きい。ディスク型振動ミルでの粉砕は粉末をすり潰す力が常時働き、粉末内部の残留応力がピンミルで粉砕する場合よりも大きくなったものと推察され、ピンミルでの粉砕は粉砕粉に与える歪みが小さいので好ましいことが分かる。なお実施例2の保磁力Hcは歪み取り熱処理によって応力緩和され大きく改善された。 The crushed powder after crushing in Example 2 has a coercive force of about 4 times as large as that of the crushed powder after crushing in Example 1 (powder C). It is presumed that the force to grind the powder always works in the crushing with the disc type vibration mill, and the residual stress inside the powder is larger than that in the case of crushing with the pin mill. Therefore, it can be seen that it is preferable. The coercive force Hc of Example 2 was relaxed by stress relaxation heat treatment and was greatly improved.
実施例3
 脆化処理を、熱処理炉の温度設定として、最高温度を300℃、最高温度での保持時間を2時間として行い、粉砕工程a5として、第1粉砕工程a5-1の粗粉砕(直径4 mmの穴を施したスクリーンを設置した破砕整粒機による粉砕;実施例1で行った第1-1粉砕工程a5-1-1の粗粉砕と同条件)と、三種類の粉砕機(ディスク型振動ミル、ハンマーミル、及びピンミル)を用いた第2粉砕工程a5-2の微粉砕とを行った以外、実施例1と同様にして、それぞれ三種類のアモルファス合金粉砕粉末を作製した。得られた三種類の粉砕粉を粒径150μm通過の篩いを通過し、粒径75μm通過の篩いを通過しない粉砕粉となるように分級した。歪み取り未熱処理の粉砕粉と、歪み取り熱処理を360℃、380℃及び400℃で行った粉砕粉を準備し、実施例2と同様にして保磁力Hcを測定した。結果を表2に示す。
Example 3
The embrittlement treatment was performed with the maximum temperature set to 300 ° C and the holding time at the maximum temperature set to 2 hours as the temperature setting of the heat treatment furnace. Grinding with a crushing and sizing machine equipped with a perforated screen; the same conditions as the coarse crushing of the 1-1 crushing step a5-1-1 performed in Example 1) and three types of crushers (disc type vibration). Three types of amorphous alloy pulverized powders were prepared in the same manner as in Example 1 except that the second pulverization step a5-2 was performed using a mill, a hammer mill, and a pin mill). The obtained three types of pulverized powders were classified so as to pass through a sieve having a particle size of 150 μm and not to pass through a sieve having a particle size of 75 μm. The pulverized powder which had not been subjected to the strain removing heat treatment and the pulverized powder which had been subjected to the strain removing heat treatment at 360 ° C., 380 ° C. and 400 ° C. were prepared, and the coercive force Hc was measured in the same manner as in Example 2. The results are shown in Table 2.
Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000002
 表2に示すとおり、ハンマーミル又はピンミルを用いて微粉砕を行った粉砕粉は、ディスクミルに比較し、粉砕後(歪み取り熱処理を行っていない)においても、歪み取り熱処理後においても、保磁力Hcが著しく小さいことがわかる。すなわちハンマーミルとピンミルとは、加工歪の小さい粉砕粉が得られる粉砕機であることがわかる。Fe基アモルファス合金薄帯を用いた場合、粉砕後の粉砕粉(歪み取り熱処理を行っていない)において、保磁力Hcが2000 A/m以下の粉砕粉を得ることができる。また、歪み取り熱処理後において、保磁力Hcが200 A/m以下の粉砕粉を得ることができる。 As shown in Table 2, the pulverized powder obtained by finely pulverizing using a hammer mill or a pin mill is retained both after pulverization (without strain removing heat treatment) and after strain removing heat treatment as compared with a disc mill. It can be seen that the magnetic force Hc is extremely small. That is, it can be seen that the hammer mill and the pin mill are crushers that can obtain crushed powder having a small processing strain. When the Fe-based amorphous alloy strip is used, it is possible to obtain a crushed powder having a coercive force Hc of 2000 A / m or less in the crushed powder after crushing (without the strain removing heat treatment). Further, after the strain removing heat treatment, pulverized powder having a coercive force Hc of 200 A / m or less can be obtained.
 なお、粉砕に用いたFe基アモルファス合金薄帯(日立金属株式会社製Metglas(登録商標)2605SA1材)の保磁力を測定(5試料を測定した平均)したところ、保磁力は60 A/mであった。保磁力の測定は、粉砕粉の測定と同様であって、試料ケース入る大きさに切断した薄帯を、試料ケースに積み重ねて充填して行った。Fe基アモルファス合金粉末は、粉砕前の薄帯に比較し保磁力が大きくなっている。しかしながら、歪み取り熱処理によって保持力は改善され、本発明によれば保磁力の上昇が抑制されていることがわかる。 The coercive force of the Fe-based amorphous alloy strip (Metglas (registered trademark) 2605SA1 material manufactured by Hitachi Metals Co., Ltd.) used for crushing was measured (average of 5 samples measured), and the coercive force was 60 A / m. there were. The measurement of the coercive force was the same as the measurement of the pulverized powder, and the thin strips cut into a size that fits in the sample case were stacked and filled in the sample case. The Fe-based amorphous alloy powder has a larger coercive force than the thin band before crushing. However, it can be seen that the holding force is improved by the strain removing heat treatment, and the increase in the coercive force is suppressed according to the present invention.
実施例4
 アモルファス合金薄帯の端材として、日立金属株式会社製Metglas(登録商標)2605SA1材(厚さ25μm)の端材を用いて、Fe基アモルファス合金薄帯の端材の塊状態を以下のようにして作製した。約10 kgの端材を、二方締めプレス機で圧縮し、約20×15×25 mmの直方体を複数個作製した。この直方体は表面に凹凸が形成された状態である。この直方体を端材の塊状態とする。この端材の塊状態を、乾燥した大気雰囲気の熱処理炉内に適宜積み込み、脆化熱処理を行った。脆化熱処理は、最高温度を360℃とした以外実施例1と同様にして行った。
Example 4
Using Metglas (registered trademark) 2605SA1 material (thickness 25 μm) manufactured by Hitachi Metals, Ltd. as the end material of the amorphous alloy thin band, the lump state of the end material of the Fe-based amorphous alloy thin band is as follows. Made. Approximately 10 kg of scrap was compressed with a two-way press to prepare a plurality of rectangular parallelepipeds of approximately 20 × 15 × 25 mm. This rectangular parallelepiped is in a state where irregularities are formed on the surface. This rectangular parallelepiped is made into a lump of scraps. The lump state of this offcut was appropriately loaded into a heat treatment furnace in a dry air atmosphere, and embrittlement heat treatment was performed. The embrittlement heat treatment was carried out in the same manner as in Example 1 except that the maximum temperature was set to 360 ° C.
 次に、脆化熱処理した端材の塊状態に解砕処理を行った。解砕工程は、端材の塊を解砕用プレス機に配置し、1 ton/kgの加圧力でプレスして解砕した。解砕処理で得られた解砕体を、実施例1と同様にして、直径が約10 cmの多数の貫通孔が形成された側面を有する円筒体に投入し、円筒体を軸周りに回転させ、Fe基アモルファス合金の小片に分割し、選別した。得られた小片の大きさ(この大きさとは、薄帯の厚さ方向に垂直な方向における幅方向の最短部分の寸法のことであり、長方形状であれば短い側の幅寸法に相当する)は、3~10 cm程度であった。このFe基アモルファス合金の小片を実施例1で行った粉砕工程と同様にして粉砕し、Fe基アモルファス合金の粉砕粉を得た。得られた粉砕粉の平均粒径は86μmであった。また粉砕粉の保磁力は実施例1の粉末Cとほぼ同じであった。 Next, crushing treatment was performed on the lump state of the embrittled heat-treated offcuts. In the crushing step, a lump of scrap was placed in a crushing press and pressed with a pressing force of 1 ton / kg to crush it. The crushed body obtained by the crushing treatment is put into a cylindrical body having a side surface having a large number of through holes having a diameter of about 10 cm in the same manner as in Example 1, and the cylindrical body is rotated about an axis. Then, it was divided into small pieces of Fe-based amorphous alloy and sorted. The size of the obtained small piece (this size is the dimension of the shortest part in the width direction in the direction perpendicular to the thickness direction of the thin band, and if it is rectangular, it corresponds to the width dimension on the short side). Was about 3 to 10 cm. The small pieces of the Fe-based amorphous alloy were crushed in the same manner as in the crushing step performed in Example 1 to obtain crushed powder of the Fe-based amorphous alloy. The average particle size of the obtained pulverized powder was 86 μm. The coercive force of the pulverized powder was almost the same as that of the powder C of Example 1.
比較例1
 実施例4と同様にして、アモルファス合金薄帯の端材から塊状化処理、脆化処理、及び解砕処理を行って得られた解砕体を、手で粗く解してディスク型振動ミルに投入し、粉砕粉の平均粒径が88μmとなるまで粉砕してFe基アモルファス合金の粉砕粉を作製した。得られた粉砕粉の大部分は角が丸まった形態で、表面も荒れた状態となっていた。粉砕粉の保磁力は4140 A/mと大きかった。この粉砕粉に340℃で歪み取り熱処理を施したが、保磁力の改善程度は本発明の実施例と比べて劣っていた。
Comparative example 1
In the same manner as in Example 4, the crushed body obtained by performing the agglomeration treatment, the embrittlement treatment, and the crushing treatment from the scraps of the amorphous alloy strip is roughly crushed by hand into a disk type vibration mill. The powder was charged and crushed until the average particle size of the crushed powder became 88 μm to prepare a crushed powder of Fe-based amorphous alloy. Most of the obtained pulverized powder had rounded corners, and the surface was also rough. The coercive force of the crushed powder was as large as 4140 A / m. This pulverized powder was subjected to a strain removing heat treatment at 340 ° C., but the degree of improvement in coercive force was inferior to that of the examples of the present invention.

Claims (14)

  1.  箔状のFe基アモルファス合金の塊状体を加熱して脆化させる脆化工程と、
     前記脆化した塊状体を粗く破砕させる解砕工程と、
     得られた解砕体を、選別手段で所定の大きさに選別してFe基アモルファス合金の小片を得る選別工程と、
     前記Fe基アモルファス合金の小片を、粉砕手段で乾式粉砕する粉砕工程とを備え、
     前記選別手段は、多数の貫通孔を有する円筒体を備え、
     前記円筒体の内側に前記解砕体を投入した状態で前記円筒体を軸周りに回転させ、前記解砕体を解して箔状に分離するとともに、小片に分割し、前記円筒体に形成された貫通孔を通過させる、Fe基アモルファス合金粉末の製造方法。
    An embrittlement process that heats and embrittles a foil-like mass of Fe-based amorphous alloy.
    A crushing step of roughly crushing the embrittled agglomerates, and
    A sorting step of sorting the obtained crushed material into a predetermined size by a sorting means to obtain small pieces of Fe-based amorphous alloy.
    The Fe-based amorphous alloy small piece is provided with a pulverization step of dry pulverization by a pulverization means.
    The sorting means includes a cylindrical body having a large number of through holes.
    With the crushed body put inside the cylindrical body, the crushed body is rotated around an axis, the crushed body is crushed and separated into a foil shape, and the crushed body is divided into small pieces and formed into the cylindrical body. A method for producing an Fe-based amorphous alloy powder through which a through hole is formed.
  2.  箔状のFe基アモルファス合金の塊状体を加熱して脆化する脆化工程と、
     前記脆化した塊状体を粗く破砕させる解砕工程と、
     得られた解砕体を、選別手段で所定の大きさに選別してFe基アモルファス合金の小片を得る選別工程と、
     前記Fe基アモルファス合金の小片を、粉砕手段で乾式粉砕する粉砕工程とを備え、
     前記選別手段は、多数の貫通孔を有する板状体を備え、
     前記板状体の上に前記解砕体を投入した状態で前記板状体を振動させ、前記解砕体を解して箔状に分離するとともに、小片に分割し、前記板状体に形成された貫通孔を通過させる、Fe基アモルファス合金粉末の製造方法。
    An embrittlement process that heats and embrittles a mass of foil-like Fe-based amorphous alloy.
    A crushing step of roughly crushing the embrittled agglomerates, and
    A sorting step of sorting the obtained crushed material into a predetermined size by a sorting means to obtain small pieces of Fe-based amorphous alloy.
    The Fe-based amorphous alloy small piece is provided with a pulverization step of dry pulverization by a pulverization means.
    The sorting means includes a plate-like body having a large number of through holes, and the sorting means has a plate-like body.
    The crushed body is vibrated in a state where the crushed body is put on the plate-shaped body, the crushed body is crushed and separated into a foil shape, and the crushed body is divided into small pieces and formed into the plate-shaped body. A method for producing an Fe-based amorphous alloy powder through which a through hole is formed.
  3.  請求項1又は2に記載のFe基アモルファス合金粉末の製造方法において、
     前記円筒体又は板状体に形成された貫通孔の直径が30~150 mmである、Fe基アモルファス合金粉末の製造方法。
    In the method for producing an Fe-based amorphous alloy powder according to claim 1 or 2.
    A method for producing an Fe-based amorphous alloy powder, wherein the through-holes formed in the cylindrical or plate-like body have a diameter of 30 to 150 mm.
  4.  請求項1から3のいずれかに記載のFe基アモルファス合金粉末の製造方法において、
     前記粉砕工程で、粉砕粉の平均粒径を50~240μmとする、Fe基アモルファス合金粉末の製造方法。
    In the method for producing an Fe-based amorphous alloy powder according to any one of claims 1 to 3,
    A method for producing an Fe-based amorphous alloy powder, wherein the average particle size of the crushed powder is 50 to 240 μm in the crushing step.
  5.  請求項1から4のいずれかに記載のFe基アモルファス合金粉末の製造方法において、
     前記粉砕工程の粉砕手段がピンミル又はハンマーミルである、Fe基アモルファス合金粉末の製造方法。
    In the method for producing an Fe-based amorphous alloy powder according to any one of claims 1 to 4,
    A method for producing an Fe-based amorphous alloy powder, wherein the crushing means in the crushing step is a pin mill or a hammer mill.
  6.  請求項1から5のいずれかに記載のFe基アモルファス合金粉末の製造方法において、
     前記脆化工程の前に、箔状のFe基アモルファス合金を塊状体とする塊状化工程を備える、Fe基アモルファス合金粉末の製造方法。
    In the method for producing an Fe-based amorphous alloy powder according to any one of claims 1 to 5,
    A method for producing an Fe-based amorphous alloy powder, comprising a lumping step of forming a foil-like Fe-based amorphous alloy into a lump before the embrittlement step.
  7.  請求項1から6のいずれかに記載のFe基アモルファス合金粉末の製造方法において、
     前記粉砕工程が第1粉砕工程と第2粉砕工程とからなり、
     前記第1粉砕工程で、所定の大きさで選別されたFe基アモルファス合金の小片を粗粉砕し、
     前記第2粉砕工程で、前記第1粉砕工程で得られた粉砕粉を微粉砕する、Fe基アモルファス合金粉末の製造方法。
    In the method for producing an Fe-based amorphous alloy powder according to any one of claims 1 to 6,
    The crushing step comprises a first crushing step and a second crushing step.
    In the first pulverization step, small pieces of Fe-based amorphous alloy selected to a predetermined size are coarsely pulverized.
    A method for producing an Fe-based amorphous alloy powder, in which the pulverized powder obtained in the first pulverization step is finely pulverized in the second pulverization step.
  8.  請求項7に記載のFe基アモルファス合金粉末の製造方法において、
     前記第1粉砕工程で粉砕粉の平均粒径を0.5~10 mmとし、前記第2粉砕工程で粉砕粉の平均粒径を50~240μmとする、Fe基アモルファス合金粉末の製造方法。
    In the method for producing an Fe-based amorphous alloy powder according to claim 7,
    A method for producing an Fe-based amorphous alloy powder, wherein the average particle size of the crushed powder is 0.5 to 10 mm in the first crushing step, and the average particle size of the crushed powder is 50 to 240 μm in the second crushing step.
  9.  請求項7に記載のFe基アモルファス合金粉末の製造方法において、
     前記第1粉砕工程が、第1-1粉砕工程と第1-2粉砕工程とからなり、
     前記第1-1粉砕工程で、所定の大きさで選別されたFe基アモルファス合金の小片を粗粉砕し、
     前記第1-2粉砕工程で、前記第1-1粉砕工程で得られた粉砕粉を中粉砕し、
     前記第2粉砕工程で、前記第1-2粉砕工程で得られた粉砕粉を微粉砕する、Fe基アモルファス合金粉末の製造方法。
    In the method for producing an Fe-based amorphous alloy powder according to claim 7,
    The first crushing step comprises a 1-1 crushing step and a 1-2 crushing step.
    In the 1-1 crushing step, small pieces of Fe-based amorphous alloy selected to a predetermined size are roughly crushed.
    In the 1-2 crushing step, the crushed powder obtained in the 1-1 crushing step is medium crushed.
    A method for producing an Fe-based amorphous alloy powder, in which the pulverized powder obtained in the 1-2 pulverization steps is finely pulverized in the second pulverization step.
  10.  請求項9に記載のFe基アモルファス合金粉末の製造方法において、
     前記第1-1粉砕工程で粉砕粉の平均粒径を2~10 mmとし、前記第1-2粉砕工程で粉砕粉の平均粒径を0.5~4 mmとし、前記第2粉砕工程で粉砕粉の平均粒径を50~240μmとする、Fe基アモルファス合金粉末の製造方法。
    In the method for producing an Fe-based amorphous alloy powder according to claim 9,
    The average particle size of the crushed powder was set to 2 to 10 mm in the 1-1 crushing step, the average particle size of the crushed powder was set to 0.5 to 4 mm in the 1-2 crushing step, and the crushed powder was set to 0.5 to 4 mm in the second crushing step. A method for producing an Fe-based amorphous alloy powder having an average particle size of 50 to 240 μm.
  11.  請求項7から10のいずれかに記載のFe基アモルファス合金粉末の製造方法において、
     前記第1粉砕工程の粉砕手段を破砕整粒機とし、前記第2粉砕工程の粉砕手段をピンミル又はハンマーミルとする、Fe基アモルファス合金粉末の製造方法。
    In the method for producing an Fe-based amorphous alloy powder according to any one of claims 7 to 10.
    A method for producing an Fe-based amorphous alloy powder, wherein the crushing means in the first crushing step is a crushing and sizing machine, and the crushing means in the second crushing step is a pin mill or a hammer mill.
  12.  請求項1から11のいずれかに記載のFe基アモルファス合金粉末の製造方法において、
     前記粉砕工程後に、粉砕粉の表面に酸化膜を形成する酸化膜形成工程を備える、Fe基アモルファス合金粉末の製造方法。
    In the method for producing an Fe-based amorphous alloy powder according to any one of claims 1 to 11.
    A method for producing an Fe-based amorphous alloy powder, comprising an oxide film forming step of forming an oxide film on the surface of the crushed powder after the crushing step.
  13.  請求項1から12のいずれかに記載のFe基アモルファス合金粉末の製造方法において、
     前記Fe基アモルファス合金粉末の合金組成が、FeaSibBcCdMe(但し、MはCr、Mo、Mn、Zr及びHfからなる群から選ばれた少なくとも1種の元素であり、原子%で、50≦a≦90、2≦b≦15、5≦c≦30、0≦d≦3、0≦e≦10、a+b+c+d+e=100)で表される、Fe基アモルファス合金粉末の製造方法。
    In the method for producing an Fe-based amorphous alloy powder according to any one of claims 1 to 12,
    The alloy composition of the Fe-based amorphous alloy powder is Fe a Si b B c C d Me (where M is at least one element selected from the group consisting of Cr, Mo, Mn, Zr and Hf. Production of Fe-based amorphous alloy powder represented by 50 ≦ a ≦ 90, 2 ≦ b ≦ 15, 5 ≦ c ≦ 30, 0 ≦ d ≦ 3, 0 ≦ e ≦ 10, a + b + c + d + e = 100) in atomic% Method.
  14.  請求項1から12のいずれかに記載のFe基アモルファス合金粉末の製造方法において、
     前記Fe基アモルファス合金粉末の合金組成が、Fe100-x-yAxXy(ただし、AはCu及び/又はAu、XはB、Si、S、C、P、Al、Ge、B、Sn及びCrからなる群から選ばれた少なくとも一種類の元素)で表され、原子%で、0<x≦5、10≦y≦24により表される、Fe基アモルファス合金粉末の製造方法。
    In the method for producing an Fe-based amorphous alloy powder according to any one of claims 1 to 12,
    The alloy composition of the Fe -based amorphous alloy powder is Fe 100-xy A x X y (where A is Cu and / or Au, X is B, Si, S, C, P, Al, Ge, B, Sn and A method for producing an Fe-based amorphous alloy powder, which is represented by (at least one element selected from the group consisting of Cr) and represented by 0 <x≤5 and 10≤y≤24 in atomic%.
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* Cited by examiner, † Cited by third party
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JPH05335129A (en) * 1992-05-29 1993-12-17 Mitsui Petrochem Ind Ltd Fe-based soft magnetic alloy particle and manufacturing method thereof
CN107578877A (en) * 2017-06-29 2018-01-12 安泰科技股份有限公司 A kind of iron based nano crystal powder core of magnetic permeability μ=90 and preparation method thereof

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05335129A (en) * 1992-05-29 1993-12-17 Mitsui Petrochem Ind Ltd Fe-based soft magnetic alloy particle and manufacturing method thereof
CN107578877A (en) * 2017-06-29 2018-01-12 安泰科技股份有限公司 A kind of iron based nano crystal powder core of magnetic permeability μ=90 and preparation method thereof

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