WO2021179609A1 - Appareil de mesure d'installation micro-mécanique et procédé de mesure associé - Google Patents

Appareil de mesure d'installation micro-mécanique et procédé de mesure associé Download PDF

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Publication number
WO2021179609A1
WO2021179609A1 PCT/CN2020/122130 CN2020122130W WO2021179609A1 WO 2021179609 A1 WO2021179609 A1 WO 2021179609A1 CN 2020122130 W CN2020122130 W CN 2020122130W WO 2021179609 A1 WO2021179609 A1 WO 2021179609A1
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control
sample
fixed
displacement
horizontal
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PCT/CN2020/122130
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English (en)
Chinese (zh)
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王永维
郝一枫
王俊
韦真博
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浙江大学
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Publication of WO2021179609A1 publication Critical patent/WO2021179609A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/02—Details
    • G01N3/04—Chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/02—Details
    • G01N3/06—Special adaptations of indicating or recording means
    • G01N3/068—Special adaptations of indicating or recording means with optical indicating or recording means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0014—Type of force applied
    • G01N2203/0016—Tensile or compressive
    • G01N2203/0017—Tensile
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0014—Type of force applied
    • G01N2203/0016—Tensile or compressive
    • G01N2203/0019—Compressive
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/003—Generation of the force
    • G01N2203/005—Electromagnetic means
    • G01N2203/0051—Piezoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0058—Kind of property studied
    • G01N2203/0069—Fatigue, creep, strain-stress relations or elastic constants
    • G01N2203/0075—Strain-stress relations or elastic constants
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02—Details not specific for a particular testing method
    • G01N2203/06—Indicating or recording means; Sensing means
    • G01N2203/0617—Electrical or magnetic indicating, recording or sensing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02—Details not specific for a particular testing method
    • G01N2203/06—Indicating or recording means; Sensing means
    • G01N2203/067—Parameter measured for estimating the property
    • G01N2203/0676—Force, weight, load, energy, speed or acceleration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02—Details not specific for a particular testing method
    • G01N2203/06—Indicating or recording means; Sensing means
    • G01N2203/067—Parameter measured for estimating the property
    • G01N2203/0682—Spatial dimension, e.g. length, area, angle

Definitions

  • the present invention relates to the field of micromechanics testing, in particular to a mechanics that uses piezoelectric actuators to provide nanometer-level micro-displacement, can perform compression and tensile tests on micro-scale samples to obtain mechanical properties and perform real-time dynamic observation of microscopic morphological changes Detection device.
  • the mechanical properties of the microstructure have a certain influence on the response of the macroscopic external force.
  • people's demand for smaller-scale mechanical properties of matter is also increasing.
  • the mechanical properties of plants are analyzed to optimize the corresponding operating mechanical parameters
  • the micromechanical properties of new materials are characterized in material mechanics
  • the interaction of soil particles and mechanical performance are analyzed in soil mechanics.
  • Micromechanics is to study the mechanical properties of materials at the micrometer and nanometer scales to analyze the macroscopic response or damage mechanism.
  • Piezoelectric ceramics is a special material that can convert mechanical energy and electrical energy. It can produce controllable deformation when subjected to a certain excitation signal, and on the contrary, it can output electrical signals when its shape changes.
  • the piezoelectric actuator is a device made of piezoelectric ceramics that can produce deformation through electrical signal control. It has the advantages of simple structure and precise control. It can realize precise micro-displacement driving of nano-scale displacement, and can be better suitable for micro-mechanical testing. However, there are few related detection devices that utilize this principle at present.
  • the purpose of the present invention is to solve the existing problems of limited mechanical property detection sample size, difficulty in achieving mechanical property detection of micro-scale samples, low measurement accuracy, and inability to dynamically obtain microstructure changes in real time.
  • the present invention proposes a sample suitable for micro-scale , Simple structure, reliable measurement of micromechanics visualization dynamic detection device and its detection method, through the piezoelectric actuator to generate nano-level high-precision micro-displacement, making it suitable for the study of micro-scale samples; through two detachable sample holders Perform compression and tensile experiments on micro-scale samples; obtain sample force information through force sensors; place the device body under a stereo microscope, and obtain real-time visual detection of changes in microstructure through the camera during the experiment; overall measurement accuracy of the device High, simple operation, precise control, it provides a detection device with excellent performance for the exploration of micromechanics.
  • a plant micromechanics testing device which includes a nano-scale tension and compression drive assembly, a sample clamping assembly, a three-coordinate micro-scale micro-displacement adjustment assembly, a control assembly, and a data image processing assembly;
  • the nano-scale tension and compression drive assembly includes a bottom plate, a rigid spacer, a driver holder and a piezoelectric driver.
  • the rigid spacer is fixed on the bottom plate, and the driver holder is fixed on the top of the rigid spacer; the piezoelectric driver is fixed on the driver holder. It is a rectangular parallelepiped with strain gauges attached on both sides;
  • the sample clamping assembly includes a mobile support frame, a connecting plate and a fixed clamping frame; the sample mobile support frame is fixed at the front of the upper end of the force sensor, with an inverted "L" shape and its horizontal part facing the fixed clamping frame.
  • the movable support frame is fixed by the displacement output end of the force sensor and the piezoelectric driver; the three-coordinate micrometer-level micro-displacement adjustment assembly is fixed on the bottom plate, and the connecting plate is fixed on the three-coordinate micro-scale micro-displacement adjustment assembly;
  • the fixed clamping frame is fixed On the upper part of the connecting plate, the front part is a vertical flat plate, the rear part is a horizontal connecting flat plate, the vertical flat plate is perpendicular to the horizontal connecting flat plate; the upper part of the vertical flat plate is provided with a protruding rectangular flat plate;
  • the control assembly includes a strain amplifier circuit, a piezoelectric control and data collector, a force sensor and a computer.
  • the piezoelectric control and data collector are fixed on the bottom plate; the piezoelectric control and data collector are respectively excited by the control line and the piezoelectric driver.
  • Wire, force sensor signal wire and strain amplifier circuit output signal wire connection, piezoelectric control and data collector are connected with computer through data wire, strain amplifier circuit input wire is connected with strain gauge signal wire on piezoelectric driver;
  • the data image processing assembly includes a stereo microscope, a camera, and a computer.
  • the camera is fixed on the camera holder of the stereo microscope, and the camera is connected to the computer through a data cable; the stereo microscope is placed above the sample holder assembly, and the stereo microscope The objective lens is aligned with the sample to be tested between the movable holder and the fixed holder;
  • the movable clamping frame Under the control of the piezoelectric control and the data collector, the movable clamping frame can be driven by the piezoelectric driver to move back and forth toward the fixed clamping frame. Driven to move the whole horizontally and vertically, the projecting rectangular plate on the fixed clamping frame can be parallel to the projecting plate of the moving clamping frame and constitute the clamping and pressing surface of the sample to be tested; the detection data of the force sensor and the strain gauge and the camera The photographed stereo microscope imaging images are sent synchronously and stored in the computer.
  • the drive fixing frame is fixed to the middle of the drive fixing frame by fixing glue.
  • the three-coordinate micrometer-level micro-displacement regulator always becomes a three-coordinate micro-scale micro-displacement regulator, which includes a vertical displacement mechanism, a horizontal longitudinal displacement mechanism, a horizontal lateral displacement mechanism, a vertical displacement mechanism, a horizontal lateral displacement mechanism,
  • the horizontal and longitudinal displacement mechanisms are equipped with micro-displacement adjustment knobs;
  • the vertical displacement mechanism is fixed on the bottom plate and includes a vertical moving slider and a vertical sliding rail.
  • the vertical moving slider and the vertical sliding rail constitute a moving pair; vertical moving The slider is equipped with a screw pair, the vertical micro-displacement adjustment knob is connected with the bolt in the built-in screw pair of the vertical-moving slider through a bevel gear drive, and the vertical micro-displacement adjustment knob is rotated to drive the vertical-moving slider along the vertical slide rail.
  • the horizontal and lateral displacement mechanism includes a lower horizontal slide rail and an upper horizontal slide block, the horizontal slide block and the horizontal slide rail constitute a moving pair,
  • the horizontal slider is equipped with a screw pair, the horizontal micro-displacement adjustment knob is connected with the bolt in the horizontal slider's built-in screw pair, and the horizontal micro-displacement adjustment knob is rotated to drive the horizontal slider to move along the horizontal slide rail;
  • the lower part of the horizontal and longitudinal displacement mechanism is fixed on the whole On the horizontal slider of the horizontal and lateral displacement mechanism; the horizontal and longitudinal displacement mechanism and the horizontal and lateral displacement mechanism have the same structure, but the moving directions of the two are perpendicular to each other.
  • the sample to be tested is fixed on the vertical end surface of the protruding rectangular plate facing the horizontal part of the movable support frame by glue.
  • the displacement output direction of the piezoelectric driver is perpendicular to the clamping and pressing surface.
  • the bottom plate is provided with a number of mounting holes, and the bottom of the rigid pad, strain amplifier circuit, piezoelectric control and data collector, and three-coordinate micrometer-level micro-displacement adjustment assembly are all fixed in the mounting holes by threaded connectors .
  • the computer is provided with control software for upper-level control of the entire detection device.
  • Another object of the present invention is to provide a method for measuring the compressive and tensile mechanical properties of the plant micromechanics detection device according to any one of the above solutions, which is specifically as follows:
  • the first step is sample processing and parameter setting: after the installation and debugging of the entire device, process the sample to be tested according to the size and specifications required for the test, and fix the test sample on the vertical end surface of the fixed holding frame with glue; in the control software of the computer Enter the test parameters required for testing in the interface;
  • the second step is to adjust the position of the sample: adjust the three micro-displacement adjustment knobs of the three-coordinate micro-scale micro-displacement adjuster to control the fixed clamping frame to move in the vertical and horizontal directions, so that the sample is facing the front surface of the horizontal part of the moving clamping frame. Adjust the objective lens of the stereo microscope so that the objective lens is facing the sample;
  • the third step is to adjust the initial position of compression: use the control and data collector to generate excitation signals, and jog to control the piezoelectric driver, so that the power sensor and the mobile clamping frame move as a whole, so that the mobile clamping frame gradually approaches the sample to be tested, and then stops.
  • the mobile holding frame moves; then, the fixed holding frame is adjusted longitudinally by the three-coordinate micrometer micro-displacement adjuster to make it close to the moving holding frame.
  • the force sensor detects the force signal and passes After the control and data collector is transmitted to the computer to display the readings, the force sensor and piezoelectric actuator strain gauges are cleared as the starting point of detection;
  • the fourth step compression test control the startup program in the computer and send the test parameters to the control and data collector.
  • the control and data collector controls the piezoelectric driver to run according to the set parameters.
  • the horizontal part of the moving support frame continuously compresses the sample.
  • Sensors and strain gauges respectively obtain the force and displacement signals of the compression process and transmit them to the computer through the control and data collector; at the same time, the stereo microscope obtains the microscopic image information of the sample compression process, and transmits it to the computer through the camera, and the computer records the sample compression process synchronously
  • the received microscopic deformation images, force and displacement data when the compression displacement reaches the test setting parameter requirements, the control and data collector controls the piezoelectric actuator to stop moving, that is, a compression test is completed;
  • the fifth step of data processing use the control and data collector to control the reset of the piezoelectric driver, disassemble the mobile clamping frame and the fixed clamping frame, clean it for use, and wait for the next test;
  • the first step is sample processing and parameter setting: After the entire device is installed and debugged, the samples to be tested are processed according to the size and specifications required for the test, and the test parameters required for the test are input in the computer control interface;
  • the second step is to fix the sample: use the control and data collector to generate the excitation signal, jog to control the piezoelectric driver, so that the power sensor and the mobile clamping frame move as a whole.
  • the mobile clamping frame approaches the fixed support frame, stop the mobile clamping Frame movement; adjust the three micro-displacement adjustment knobs of the three-coordinate micro-scale micro-displacement regulator to control the movement of the fixed clamping frame in the vertical and horizontal directions, so that the horizontal part of the mobile clamping frame is flat with the protruding rectangular plate of the fixed clamping frame Align and face each other, use glue to fix one end of the sample to be tested on the end surface of the horizontal part of the mobile holding frame, and fix the other end on the end face of the protruding rectangular flat plate of the fixed holding frame;
  • the third step is to adjust the position of the sample: adjust the objective lens of the stereo microscope so that the objective lens is directly facing the sample; then use the three-coordinate micrometer micro-displacement adjuster to fine-tune the fixed holding frame longitudinally to make the moving holding frame gradually move away from the fixed holding frame.
  • the force sensor detects the force signal and transmits it to the computer through the control and data collector to display the reading, clear the force sensor and strain gauge indications as the starting point of detection;
  • the fourth step tensile test control the startup program in the computer and send the test parameters to the control and data collector, the control and data collector controls the piezoelectric driver to run according to the set parameters, and the horizontal part of the moving clamp frame continuously pulls the sample Stretching, force sensors, and strain gauges respectively obtain the force and displacement signals of the stretching process and transmit them to the computer through the control and data collector; at the same time, the stereo microscope obtains the microscopic image information of the sample stretching process and transmits it to the computer through the camera.
  • the fifth step of data processing use the control and data collector to control the reset of the piezoelectric driver, disassemble the mobile clamping frame and the fixed clamping frame, clean it for use, and wait for the next test.
  • the present invention has the beneficial effects: the present invention generates nano-level high-precision micro-displacement through the piezoelectric actuator, making it suitable for the research of micro-scale samples; and compresses and pulls the micro-scale samples through two detachable sample holders.
  • the extension experiment is convenient for loading and unloading and cleaning; the force information of the sample is obtained through the force sensor; the main body of the device is placed under the stereo microscope, and the microstructure changes are synchronously obtained through the camera during the experiment, realizing real-time visual detection.
  • the device of the invention has high overall measurement accuracy, simple operation and precise control, and provides a detection device with excellent performance for the exploration of micromechanics.
  • Figure 1 is a schematic diagram of the overall structure of the present invention.
  • Figure 2 is a schematic diagram of the main structure of the device of the present invention.
  • Figure 3 is a top view of the main structure of the device of the present invention.
  • Figure 4 is a front view of the main structure of the device of the present invention.
  • Fig. 5 is a schematic diagram of the structure of the three-coordinate micrometer-level micro-displacement adjuster of the present invention.
  • Fig. 6 is a schematic diagram of the structure of the sample fixing and holding frame of the present invention.
  • bottom plate 1
  • rigid pad 2
  • driver fixing frame 3
  • piezoelectric driver 4 strain amplifier circuit 5
  • control and data collector 6 force sensor 7
  • sample moving support frame 8 three-coordinate micrometer-level micro-displacement adjustment
  • the device 9 the sample clamping and fixing end is connected to the flat plate 10, the sample fixing and clamping frame 11, the stereo microscope 12, and the camera 13.
  • FIG. 1 to 4 it is a plant micromechanics detection device provided in a preferred embodiment of the present invention.
  • Its main structure includes a nano-scale tension and compression drive assembly, a sample clamping assembly, and three-coordinate micro-scale micro-displacement.
  • Several parts of the adjustment assembly, the control assembly, and the data image processing assembly are described in detail below.
  • the function of the nano-scale tension and compression drive assembly is to perform nano-scale stretching or compression of the plant tissue sample to be tested, and its components include a bottom plate 1, a rigid pad 2, a driver holder 3 and a piezoelectric driver 4.
  • the rigid cushion block 2 is fixed on the bottom plate 1
  • the driver fixing frame 3 is fixed on the top of the rigid cushion block 2; the driver fixing frame 3 can be fixed to the middle of the driver fixing frame 3 by fixing glue.
  • the piezoelectric actuator 4 is in the shape of a rectangular parallelepiped with strain gauges 4-1 attached to both sides.
  • the piezoelectric actuator 4 can achieve precise expansion and contraction under external control, thereby providing tensile or compression power for the sample, which is attached to both sides.
  • the strain gauge 4-1 on the side can detect the displacement during tension or compression.
  • the three-coordinate micrometer-level micro-displacement adjustment assembly adopts a three-coordinate micrometer-level micro-displacement adjuster 9, which can realize horizontal and vertical displacement adjustment in the three directions of XYZ.
  • the three-coordinate micrometer-level micro-displacement adjuster 9 is fixed on the bottom plate 1, and its implementation forms are various, as long as it can achieve precise adjustment in three directions.
  • the three-coordinate micrometer-level micro-displacement adjuster 9 includes a vertical displacement mechanism 9-1, a horizontal lateral displacement mechanism 9-2, a horizontal longitudinal displacement mechanism 9-3, and a vertical displacement mechanism. 9-1.
  • the horizontal and lateral displacement mechanism 9-2 and the horizontal and longitudinal displacement mechanism 9-3 are all equipped with micro-displacement adjustment knobs;
  • the vertical displacement mechanism 9-1 is fixed on the bottom plate 1, and includes a vertical sliding block and a vertical sliding block.
  • the vertical moving slider and the vertical sliding rail constitute a moving pair;
  • the vertical moving slider is equipped with a screw pair, and the vertical micro-displacement adjusting knob is connected with the bolt in the built-in screw pair of the vertical moving slider through a bevel gear drive.
  • Rotate the vertical micro-displacement adjustment knob to drive the vertical sliding slider to move along the vertical slide rail.
  • the lower part of the horizontal and lateral displacement mechanism 9-2 is integrally fixed on the vertical moving slider of the vertical displacement mechanism 9-1, and can move synchronously with the vertical moving slider as a whole.
  • the horizontal lateral displacement mechanism 9-2 includes a lower lateral slide rail and an upper lateral slide.
  • the lateral slide and the lateral slide constitute a moving pair.
  • the horizontal slide is equipped with a screw pair, and the horizontal micro-displacement adjustment knob and the horizontal slide have a built-in screw.
  • the bolt connection in the auxiliary, rotating the horizontal micro-displacement adjustment knob drives the horizontal slider to move along the horizontal slide rail.
  • the lower part of the horizontal and longitudinal displacement mechanism 9-3 is integrally fixed on the transverse slider of the horizontal and transverse displacement mechanism 9-2, and can move synchronously with the entire transverse slider of the horizontal and transverse displacement mechanism 9-2.
  • the horizontal and longitudinal displacement mechanism 9-3 has the same structure as the horizontal and lateral displacement mechanism 9-2, and also includes a lower longitudinal slide rail and an upper longitudinal slide block.
  • the longitudinal slide block and the longitudinal slide rail form a moving pair, and the longitudinal slide block is equipped with a spiral pair.
  • the longitudinal micro-displacement adjustment knob is connected with the bolts in the built-in screw pair of the longitudinal slider, and the longitudinal micro-displacement adjustment knob is rotated to drive the longitudinal slider to move along the longitudinal slide rail.
  • the moving directions of the horizontal and longitudinal displacement mechanism 9-3 and the horizontal and lateral displacement mechanism 9-2 are perpendicular to each other, and the horizontal and longitudinal displacement mechanism 9-3 is used to control the fixed clamping frame 11 to approach or move away from the movable clamp. Hold frame 8.
  • Through the three-coordinate micrometer-level micro-displacement adjuster 9 it is possible to achieve precise spatial movement of the upper mounted components.
  • the sample clamping assembly includes a movable support frame 8, a connecting plate 10 and a fixed clamping frame 11.
  • the sample moving support frame 8 is fixed on the front part of the upper end of the force sensor 7, and its shape is an inverted "L" shape, composed of a horizontal part and a vertical part, and the horizontal part faces the fixed clamping frame 11 side.
  • the sample moving support frame 8 is fixed to the displacement output end of the piezoelectric driver 4 through the force sensor 7. When the piezoelectric driver 4 expands and contracts under external control, it can drive the sample moving support frame 8 and the force sensor 7 to move synchronously.
  • the connecting plate 10 is fixed on the three-coordinate micrometer-level micro-displacement adjuster 9; the fixed clamping frame 11 is fixed on the upper part of the connecting plate 10, and can be driven by the three-coordinate micrometer-level micro-displacement adjuster 9 in three directions.
  • the front part of the fixed clamping frame 11 is a vertical plate 11-1, and the rear part is a horizontal connection plate 11-2.
  • the vertical plate 11-1 is perpendicular to the horizontal connection plate 11-2. There are a number of ribs between them for reinforcement.
  • the upper part of the vertical plate 11-1 is provided with a protruding rectangular plate 11-3, and the protruding rectangular plate 11-3 also faces the moving support frame 8 side.
  • the control assembly includes a strain amplifier circuit 5, a piezoelectric control and data collector 6, a force sensor 7 and a computer.
  • the piezoelectric control and data collector 6 is fixed on the base plate 1; the piezoelectric control and data collector 6 respectively pass through control lines It is connected with the excitation signal line of the piezoelectric driver 4, the signal line of the force sensor 7 and the output signal line of the strain amplifier circuit 5, the piezoelectric control and data collector 6 is connected with the computer through the data line, and the input line of the strain amplifier circuit 5 is connected with the piezoelectric driver 4 Connect the 4-1 signal wire on the strain gauge.
  • the computer can be equipped with control software for upper control of the entire detection device.
  • Corresponding control parameters can be input in the control interface of the control software, such as the output displacement length and output displacement speed of the piezoelectric actuator 4 Wait.
  • the computer can send control signals to the control and data collector 6 according to the set control parameters, and the control and data collector 6 further controls the action of the piezoelectric driver 4 to realize the output of compression or extension displacement.
  • the force sensor 7 can detect the force on the mobile support frame 8 in real time, and feed it back to the piezoelectric control and data collector 6; at the same time, the strain gauge 4-1 can convert the stress change into a reaction pressure
  • the electric driver 4 outputs an electric signal of the magnitude of the displacement.
  • the electric signal is amplified by the strain amplifier circuit 5 and sent to the piezoelectric control and data collector 6 synchronously.
  • the data collected in the piezoelectric control and data collector 6 are uniformly sent to the computer for storage and subsequent processing.
  • the data and image processing assembly includes a stereo microscope 12, a camera 13 and a computer.
  • the camera 13 is fixed on the camera fixing frame of the stereo microscope 12 and is used to capture images within the field of view of the stereo microscope 12.
  • the camera 13 is connected to the computer through a data cable, and the images taken by the camera 13 can be transmitted to the computer in real time.
  • the stereo microscope 12 is placed above the sample holding assembly, and the objective lens of the stereo microscope 12 can be aligned with the sample to be tested between the movable holding frame 8 and the fixed holding frame 11.
  • the movable clamping frame 8 can be driven by the piezoelectric driver 4 to reciprocate toward the fixed clamping frame 11.
  • the displacement output direction of the piezoelectric actuator 4 should be perpendicular to the clamping extrusion surface, that is, perpendicular to the vertical plate 11-1 on the fixed clamping frame 11.
  • the fixed clamping frame 11 can be moved horizontally and vertically as a whole under the drive of the three-coordinate micrometer micro-displacement adjuster 9, so that the protruding rectangular plate 11-3 on the fixed clamping frame 11 can be combined with the protruding plate 8 of the movable clamping frame 8.
  • the side ends of the two can form a clamping and pressing surface for clamping and pressing the sample to be tested.
  • the clamping and pressing surfaces are actually two parallel end surfaces, not separate planes.
  • the side end surfaces of the two sides can also be used to fix the two ends of the sample to realize the stretching of the sample.
  • the sample to be tested is preferably fixed by glue on the vertical end surface of the protruding rectangular plate 11-3 facing the horizontal part of the movable support frame 8 in the sample holding assembly.
  • the movable clamping frame 8 and the fixed clamping frame 11 can be separately disassembled, and the upper fixed sample can be removed and cleaned for re-testing.
  • a number of internally tapped mounting holes, rigid spacer 2, strain amplifier circuit 5, piezoelectric control and data collector 6 and 6 can be evenly opened on the base plate 1.
  • the bottom of the three-coordinate micrometer-level micro-displacement adjustment assembly is fixed in the mounting hole through a threaded connection piece.
  • the threaded connection can be selected from bolts, studs, screws and other components that can be matched with the mounting holes.
  • the present invention also provides a compression and tension mechanical property measurement method, which includes a compression mechanical property detection method and a tensile mechanical property detection method.
  • a compression and tension mechanical property measurement method which includes a compression mechanical property detection method and a tensile mechanical property detection method.
  • the first step is sample processing and parameter setting: After the entire device is installed and debugged, the sample to be tested is processed according to the size and specifications required for the test, and the test sample is fixed on the vertical end surface of the fixed holding frame 11 with glue; under the control of the computer Enter the test parameters required for the test in the software interface.
  • the test parameters are determined according to the test needs, including but not limited to the displacement length and displacement speed required for the experiment.
  • the second step is to adjust the position of the sample: adjust the three micro-displacement adjustment knobs of the three-coordinate micro-scale micro-displacement adjuster 9 to control the fixed holding frame 11 to move in the vertical and horizontal directions, so that the sample is facing the horizontal part of the moving holding frame 8 On the front face, adjust the 12 objective lens of the stereo microscope so that the objective lens faces the sample;
  • the third step is to adjust the initial position of compression: use the control and data collector 6 to generate an excitation signal, and jog to control the piezoelectric driver 4, so that the power sensor 7 and the mobile clamping frame 8 move as a whole, so that the mobile clamping frame 8 gradually approaches the waiting frame. Measure the sample, stop the movement of the mobile clamping frame 8; then use the three-coordinate micrometer micro-displacement adjuster 9 to adjust the fixed clamping frame 11 longitudinally to make it close to the mobile clamping frame 8.
  • the fourth step of the compression test control the startup program in the computer and send the test parameters to the control and data collector 6, the control and data collector 6 controls the piezoelectric driver 4 to run according to the set parameters, and the mobile support frame 8 keeps the sample on the horizontal part
  • the force sensor 7 and the strain gage 4-1 obtain the force and displacement signals of the compression process and transmit them to the computer through the control and data collector 6.
  • the stereo microscope 12 obtains the microscopic image information of the sample compression process and passes the camera 13 Transmit to the computer, and the computer synchronously records the microscopic deformation images, force and displacement data received during the compression process of the sample; when the compression displacement reaches the test setting parameter requirements, the control and data collector 6 controls the piezoelectric driver 4 to stop moving, which is complete A compression test;
  • the fifth step data processing: use the control and data collector 6 to control the piezoelectric driver 4 to reset, disassemble the mobile clamping frame 8 and the fixed clamping frame 11, clean it for use, and wait for the next test;
  • the first step is sample processing and parameter setting: After the entire device is installed and debugged, the samples to be tested are processed according to the size specifications required for the test, and the test parameters required for the test are input in the computer 14 control interface. The test parameters are determined according to the test needs, including but not limited to the displacement length and displacement speed required for the experiment.
  • the second step is to fix the sample: use the control and data collector 6 to generate an excitation signal, and jog to control the piezoelectric driver 4, so that the power sensor 7 and the mobile holding frame 8 move as a whole, and the holding frame 8 to be moved is close to the fixed support frame 11
  • stop the movement of the mobile clamping frame 8 ; adjust the three micro-displacement adjustment knobs of the three-coordinate micrometer micro-displacement adjuster 9 to control the fixed clamping frame 11 to move in the vertical and horizontal directions, so that the horizontal part of the mobile clamping frame 8 It is flush and directly opposite to the side end surface of the protruding rectangular flat plate 11-3 of the fixed holding frame 11, keeping a proper distance between the two end surfaces, and using glue to fix one end of the sample to be tested on the side of the horizontal part of the moving holding frame 8 On the end surface, the other end is fixed on the side end surface of the protruding rectangular flat plate 11-3 of the fixed clamping frame 11;
  • the third step is to adjust the position of the sample: adjust the objective lens of the stereo microscope 12 so that the objective lens is facing the sample; then use the three-coordinate micrometer micro-displacement adjuster 9 to adjust the fixed clamping frame 11 longitudinally, so that the movable clamping frame 8 gradually moves away from the fixed clamp Holder 11, when the force sensor 7 detects the force signal and is transmitted to the computer through the control and data collector 6 to display the reading, stop the movement of the fixed holder 11, and clear the force sensor 7 and the strain gauge 4-1. Detection starting point;
  • the fourth step tensile test control the startup program in the computer and send the test parameters to the control and data collector 6, the control and data collector 6 controls the piezoelectric driver 4 to run according to the set parameters, and the horizontal part of the mobile clamping frame 8 is constantly
  • the sample is stretched, the force sensor 7 and the strain gauge 4-1 obtain the force and displacement signals of the stretching process and transmit them to the computer through the control and data collector 6; at the same time, the stereo microscope 12 obtains the microscopic image of the stretching process of the sample
  • the information is transmitted to the computer through the camera 13, and the computer synchronously records the microscopic deformation images, force and displacement data received during the stretching process of the sample; when the tensile displacement reaches the test setting parameter requirements, the control and data collector 6 controls the piezoelectric
  • the driver 4 stops moving, that is, a tensile test is completed;
  • the fifth step of data processing use the control and data collector 6 to control the piezoelectric driver 4 to reset, disassemble the mobile clamping frame 8 and the fixed clamping frame 11, clean it for use, and wait for the next test.
  • the size of the sample to be tested should be determined according to the testing requirements, and the distance between the fixed holding frame 11 and the moving holding frame 8 should be adjusted to ensure that the sample can be fixed between the two.

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  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)

Abstract

L'invention concerne un appareil de mesure d'installation micro-mécanique, et un procédé de mesure associé, l'appareil générant un micro-déplacement de haute précision à l'échelle nanométrique au moyen d'un dispositif d'entraînement piézoélectrique, permettant à l'appareil d'être approprié pour l'étude d'un échantillon à l'échelle micrométrique ; un essai de compression et de tension étant réalisé sur un échantillon à l'échelle micrométrique au moyen de deux supports de serrage détachables ; et des informations de contrainte d'échantillon étant acquises au moyen d'un capteur de force. Le corps principal de l'appareil est placé au-dessous d'un microscope stéréoscopique, et une condition de variation structurale microscopique de l'échantillon est acquise de manière synchrone dans une expérience au moyen d'un appareil de prise de vues, mettant en œuvre une mesure visualisée en temps réel. L'appareil est doté d'une précision de mesure globale élevée, d'un fonctionnement simple et d'une commande précise, en fournissant ainsi un appareil de mesure ayant d'excellentes performances pour la recherche en micro-mécanique.
PCT/CN2020/122130 2020-03-13 2020-10-20 Appareil de mesure d'installation micro-mécanique et procédé de mesure associé WO2021179609A1 (fr)

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CN114813022A (zh) * 2022-04-25 2022-07-29 中国空气动力研究与发展中心超高速空气动力研究所 一种风洞内试验模型动态特性测量的加卸载系统

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