WO2021179226A1 - 光谱信息获取方法及光谱探测装置 - Google Patents

光谱信息获取方法及光谱探测装置 Download PDF

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WO2021179226A1
WO2021179226A1 PCT/CN2020/078883 CN2020078883W WO2021179226A1 WO 2021179226 A1 WO2021179226 A1 WO 2021179226A1 CN 2020078883 W CN2020078883 W CN 2020078883W WO 2021179226 A1 WO2021179226 A1 WO 2021179226A1
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light
spectral
photoelectric response
detection device
array detector
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PCT/CN2020/078883
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English (en)
French (fr)
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缪同群
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上海新产业光电技术有限公司
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters

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  • This application relates to the field of spectral analysis, and in particular to a method for acquiring spectral information and a spectral detection device.
  • Spectroscopic instruments are instruments that reveal the intensity distribution of electromagnetic radiation according to frequency or wavelength.
  • Mainstream spectroscopy instruments use gratings as spectroscopic devices.
  • the spectral resolution of the grating beam splitting is affected by the number of grating lines, diffraction orders and the focal length of the monochromator. With high spectral resolution, the area of the grating and the size of the monochromator are large; on the contrary, the size of the grating monochromator is small. The spectral resolution is not high. While maintaining high spectral resolution and reducing the size of the spectrometer, a new method or device for acquiring spectral information is required.
  • the present application provides a method for acquiring spectral information, which includes: using an optical system to receive light emitted from the object to be detected, illuminating it on an array detector, and allowing the array to detect The detector generates a photoelectric response to the light; and performs data processing on the photoelectric response to obtain spectral distribution information of the light, wherein the photoelectric response of the pixel of the array detector is modulated, so that the array detector
  • the different picture elements have different photoelectric response curves for the light in the studied spectral range.
  • the optical system before using the optical system to receive the light emitted from the object to be measured, it includes: using an array detector to receive monochromatic light with a predetermined wavelength and unit intensity, and generate spectral response calibration information corresponding to the monochromatic light e(i, ⁇ j ), the number of the monochromatic light is consistent with the number of the pixel, ⁇ j is the wavelength of the monochromatic light, i corresponds to the pixel at different positions, ⁇ 1 ⁇ j ⁇ 2 , ⁇ 1 is the minimum wavelength, and ⁇ 2 is the maximum wavelength.
  • the performing data processing on the photoelectric response to obtain the spectral distribution information of the light includes: generating and communicating with the optical array detector according to the spectral response calibration information e(i, ⁇ j) Corresponding n-level calibration matrix, n is the number of pixels; and according to the photoelectric response of each pixel and the measured light Constructing an n-order equation corresponding to the n-order calibration matrix, calculating a unique solution of the n-order equation, and obtaining spectral distribution information I( ⁇ j ) of the light.
  • the present application also provides a spectrum detection device, including: a spectrum modulation plate, which modulates the light transmitted by the optical system; and an array sensor, which responds to the modulated light, generates a photoelectric response, and responds to the photoelectricity Data processing is performed to obtain the spectral information of the light, wherein different picture elements of the array detector have different photoelectric response curves for the light in the studied spectral range.
  • a spectrum detection device including: a spectrum modulation plate, which modulates the light transmitted by the optical system; and an array sensor, which responds to the modulated light, generates a photoelectric response, and responds to the photoelectricity Data processing is performed to obtain the spectral information of the light, wherein different picture elements of the array detector have different photoelectric response curves for the light in the studied spectral range.
  • a film layer whose transmittance responds to a continuous change is provided on the pixel, so that different pixels have a one-to-one corresponding spectral transmittance.
  • the film layer is formed by plating.
  • the spectrum modulation plate is formed by any one of ion implantation, ion exchange, or printing.
  • the present application also provides a spectrum detection device for obtaining spectrum information, including: an array sensor, which responds to the light transmitted by the optical system, generates a photoelectric response, performs data processing on the photoelectric response, and obtains the light Spectral information, wherein the array sensor is provided with picture elements, and the sensor is provided with a film layer, so that different picture elements of the array detector have a one-to-one corresponding spectral transmittance, so that the array sensor is The light in the studied spectral range has different photoelectric response curves.
  • the present application has the advantages of retaining all incident light energy, improving the resolution of the spectrum, improving the sensitivity of spectrum recognition, the recognition device has a simple structure, small size, low cost, and improved portability.
  • Fig. 1 is a schematic structural diagram of a spectrum detection device in one or more embodiments of the present application.
  • Fig. 2 is a schematic diagram of the structure of a spectrum detection device in another embodiment of the present application.
  • Fig. 1 is a schematic diagram of the structure of a spectrum detection device in an embodiment of the present application.
  • the optical system 1 receives the light emitted from the object to be detected and causes it to illuminate the spectrum detection device 100.
  • the optical system 1 may be composed of a lens, a mirror, or a combination thereof.
  • the spectral detection device 100 detects the light transmitted by the optical system 1, generates a photoelectric response corresponding to the received light, and performs data processing on the photoelectric response to obtain spectral information.
  • the spectrum detection device 100 may be composed of an array detector. The photoelectric response of the pixels of the array detector is modulated, so that different pixels of the array detector have different photoelectric response curves for the light in the studied spectral range.
  • the spectrum detection device 100 may include a spectrum modulation board 10 and an array sensor 20.
  • the spectrum modulation plate 10 modulates incident light.
  • the transmittance of the spectrum modulation plate 10 is not constant to zero.
  • the transmittance (or reflectance) of the spectrum modulation plate 10 changes in a prescribed manner according to the spatial position and the wavelength of the light.
  • the modulation method of the spectrum modulation plate can be formed by coating, but is not limited to coating, and can also be formed by other methods such as ion implantation, ion exchange, or printing.
  • the spectrum modulation board can modulate the transmittance (or reflectance) of the spectrum modulation board by adjusting the thickness of the coating.
  • the array sensor 20 responds to the incident light modulated by the spectrum modulation plate 10 to generate a photoelectric response.
  • the sensor 2 can be a common CMOS or CCD chip.
  • the CMOS (or CCD) chip is provided with a plurality of picture elements 21 that independently generate photoelectric responses.
  • the image element 21 may also be provided with a film layer whose transmittance responds continuously to change, so that different image elements have a one-to-one corresponding spectral transmittance.
  • the film on the spectrum modulation board and the array sensor can be generated by chemical coating or physical coating.
  • the final measured spectral distribution of each pixel in the array sensor conforms to the following formula:
  • e(i, ⁇ j ) is the photoelectric response of the i-th pixel to the monochromatic light whose incident wavelength is ⁇ j unit intensity
  • [e(i, ⁇ j )] -1 is the inverse matrix of [e(i, ⁇ j )],
  • e(i) is the output photoelectric response.
  • Fig. 2 is a schematic structural diagram of a spectrum detection device in another embodiment of the present application.
  • the spectral detection device 200 may only include an array sensor 30, and the array sensor 30 may be provided with a coating layer 32 on each pixel 31, so that the photoelectric response of each pixel meets the above requirements.
  • the sensor 3 can also be provided with a coating on the window of the spectral detection device, so that the pixel 31 under the window outputs spectral information corresponding to the one-to-one correspondence of the spectral response.
  • Optical coating or photolithography can be used to generate a film on the pixel.
  • optical coating or other methods to coat the window through which the incident light of the sensor of the spectral detection device enters with a film with a continuously changing transmittance to ensure that the different pixels behind it have a one-to-one corresponding spectral transmittance.
  • the product of the spectral transmittance function and the spectral response function of the pixel itself determines the spectral response matrix of the device.
  • Different pixels and different wavelengths of incident light have a one-to-one correspondence with the spectral transmittance, and different pixels have different transmittance curves for monochromatic light in the studied spectral range, so different pixels have different effects on the studied Monochromatic light in the spectral range has different photoelectric response curves.
  • the spectral resolution is only related to the number of pixels, and the higher the number of pixels, the higher the spectral resolution.
  • the spectral resolution has little to do with the volume of the pixel and the volume of the detector. Therefore, the way to obtain the spectrum does not require a complicated optical system.
  • the spectrum detection device of this embodiment has a simple structure, and the spectroscopic device in the spectrum detection device is only an array spectrum detection device that has been modulated to the spectral response of the pixel.
  • the volume can be set as required, and there are no moving parts, and the structure is firm. It is compact and the production process is also very simple.
  • each pixel can receive light of all wavelengths and generate photoelectric response during operation. Therefore, under the same circumstances, the luminous flux that can be analyzed by the spectral detection device is much higher than that of the existing equipment, which is conducive to the incident Detection and analysis of weak signals in light.
  • This embodiment also provides a method for acquiring spectral information, including the following steps:
  • the optical system is used to receive the light emitted from the object to be detected, so that it illuminates the array detector, and the array detector generates a photoelectric response to the light;
  • the photoelectric response of the pixel of the array detector is modulated, so that different pixels of the array detector have different photoelectric response curves for the light in the studied spectral range.
  • the calibration test includes the following: the array detector is used to receive the monochromatic light with a predetermined wavelength and unit intensity, and generate the corresponding monochromatic light.
  • Spectral response calibration information e(i, ⁇ j ) the number of monochromatic light is consistent with the number of pixels, and ⁇ i is the wavelength of monochromatic light.
  • the wavelength range [ ⁇ 1 , ⁇ 2 ] can be divided into N-1 equal parts to obtain N different wavelengths of ⁇ j .
  • the device is calibrated with monochromatic light of N wavelengths, that is, monochromatic light I o ( ⁇ j ) of unit intensity is used as an input signal to irradiate the spectrum detection device, and the photoelectric output signal of the detector is measured.
  • the detector can obtain the corresponding e(i, ⁇ j ).
  • the wavelength ⁇ j used for calibration should satisfy the bandwidth ⁇ j of monochromatic light:
  • the frequency range [ ⁇ 1 , ⁇ 2 ] can be divided into N-1 equal parts to obtain N ⁇ j of different wavelengths. For each ⁇ j , the detector can get the corresponding e(i, ⁇ j ).
  • performing data processing on the photoelectric response to obtain light spectral distribution information includes:
  • Step 1 According to the spectral response calibration information e(i, ⁇ j ), an n-order calibration matrix corresponding to the array detector is generated, where N is the number of pixels.
  • the spectrum detection device Use different monochromatic light to irradiate the spectrum detection device, record the test data after the detector is irradiated, and obtain the spectral response matrix element e(i, ⁇ j ). According to the position of the pixel i in the detector, the spectral response matrix element is correspondingly formed into a matrix .
  • Use the spectrum detection device to receive the electromagnetic wave I( ⁇ ) to be measured, ⁇ 1 ⁇ 2 , ⁇ 1 is the minimum wavelength, and ⁇ 2 is the maximum wavelength.
  • N the number of pixels.
  • Step 2 According to the photoelectric response of each pixel and the measured light Construct an n-order equation corresponding to the n-order calibration matrix, calculate the unique solution of the n-order equation, and obtain the light spectral distribution information I( ⁇ j ).
  • Photoelectric response So I( ⁇ j ) [e(i, ⁇ j )] -1 [e(i)].
  • the wavelength of the corresponding light can be deduced to obtain the spectral distribution information I( ⁇ j ) of the light.
  • the one-to-one modulation mode for the spectral response of the pixel ensures that the linear equation system of the n-th order determinant has a unique solution.
  • the spectrum generated by the spectrum detection device can be expressed as a function of light intensity varying with wavelength, or as a function of light intensity varying with frequency, or as a function of light intensity varying with wavenumber.

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  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

一种光谱信息获取方法，及光谱探测装置（100）。采用光学系统（1）接收从待检测对象发出的光，使其照射在阵列探测器上，阵列探测器对光生成光电响应；对光电响应进行数据处理，获得光的光谱信息。阵列探测器的像元（21）的光电响应受到调制，使得阵列探测器的不同的像元（21）对于在所研究的光谱范围内的光具有不同的光电响应曲线。

Description

光谱信息获取方法及光谱探测装置 技术领域
本申请涉及光谱分析领域，具体涉及一种光谱信息获取方法及光谱探测装置。
背景技术
光谱仪器是把电磁辐射的强度分布按照频率或者波长揭示出来的仪器。主流的光谱仪器采用光栅作为分光器件。光栅分光的光谱分辨率受光栅上刻线的数量、衍射级次和单色仪焦距的影响，光谱分辨率高，光栅的面积和单色仪的尺寸就大；反之，光栅单色仪体积小了，光谱分辨率就不高。在保持高光谱分辨率和减小光谱仪的体积的情况下，需要新的光谱信息获取方法或装置。
发明内容
因此，为了克服上述现有技术的缺点，本申请提供一种光谱信息获取方法，包括：采用光学系统接收从待检测对象发出的光，使其照射在阵列探测器上，并让所述阵列探测器对所述光生成光电响应；及对所述光电响应进行数据处理，获得所述光的光谱分布信息，其中，所述阵列探测器的像元的光电响应受到调制，使得所述阵列探测器的不同的像元对于所研究的光谱范围内的光具有不同的光电响应曲线。
在一个实施例中，所述采用光学系统接收从待测对象发出的光之前，包括：采用阵列探测器接收预定波长单位强度的单色光，生成与所述单色光对应的光谱响应标定信息e(i,λ j)，所述单色光的数量与所述像元的数量一致，λ j为单色光的波长，i对应不同位置的像元，λ 1≤λ j≤λ 2，λ 1为最小波长，λ 2为最大波长。
在一个实施例中，所述对所述光电响应进行数据处理，获得所述光的光谱 分布信息，包括：根据所述光谱响应标定信息e(i,λ j)生成与所述光阵列探测器对应的n阶标定矩阵，n为像元数；及根据各个像元和被测光对应的光电响应
Figure PCTCN2020078883-appb-000001
构建与所述n阶标定矩阵对应的n阶方程，计算所述n阶方程的唯一解，得到所述光的光谱分布信息I(λ j)。
本申请还提供了一种光谱探测装置，包括：光谱调制板，对光学系统传输后的光进行调制；及阵列传感器，对调制后的所述光进行响应，生成光电响应，对所述光电响应进行数据处理，获得所述光的光谱信息，其中，所述阵列探测器的不同的像元对于所研究的光谱范围内的光具有不同的光电响应曲线。
在一个实施例中，所述像元上设置有透射率响应连续变化的膜层，使得不同像元具有一一对应的光谱透射率。
在一个实施例中，所述膜层采用镀膜的方式形成。
在一个实施例中，所述光谱调制板是采用离子注入、离子交换或者印刷中的任意一种方式形成的。
本申请还提供了一种光谱探测装置，用于获取光谱信息，包括：阵列传感器，对光学系统传输后的光进行响应，生成光电响应，对所述光电响应进行数据处理，获得所述光的光谱信息，其中，所述阵列传感器上设置有像元，所述传感器上设置有膜层，使得所述阵列探测器的不同的像元具有一一对应的光谱透射率，让所述阵列传感器对于所研究的光谱范围内的光具有不同的光电响应曲线。
与现有技术相比，本申请的优点在于：保留了所有入射光能量，提高了光谱的分辨率，使光谱识别灵敏度提高、识别设备结构简单、体积小、成本低、便携性提高。
附图说明
图1是本申请的一个或多个实施例中光谱探测装置的结构示意图；及
图2是本申请的另一个实施例中光谱探测装置的结构示意图。
具体实施方式
为使本申请的目的、技术方案和优点更加清楚明白，以下结合具体实施例，并参照附图，对本申请进一步详细说明。
图1是本申请的实施例中光谱探测装置的结构示意图。
如图1所示，光学系统1接收从待检测对象发出的光，使其照射在光谱探测装置100上。光学系统1可以是由透镜、反射镜或其组合等构成的。
在其中一个实施例中，光谱探测装置100对光学系统1传输的光进行检测，生成与接收光对应的光电响应，对光电响应进行数据处理，得到光谱信息。光谱探测装置100可以是由阵列探测器构成的。该阵列探测器的像元的光电响应受到调制，使得阵列探测器的不同的像元对于在所研究的光谱范围内的光具有不同的光电响应曲线。
光谱探测装置100的光电响应可以用
Figure PCTCN2020078883-appb-000002
表示，e(i)是输出的光电响应，e(i,λ)是第i个像元与入射波长为λ的单色光一一对应的光电响应，i＝1,2,…N，N是像元数，I(λ)为入射光强，λ是入射光的波长，λ 1≤λ≤λ 2，λ 1是输入光的最小波长，λ 2是输入光的最大波长。当i 1≠i 2时，函数e(i 1,λ)≠函数e(i 2,λ)，i 1,i 2＝1,2,…N，e(i 1,λ)是第i 1个像元与入射波长为λ的单位强度的单色光对应的光电响应函数,e(i 2,λ)是第i 2个像元与入射波长为λ的单位强度的单色光对应的光电响应函数。
光谱探测装置100可以包括光谱调制板10和阵列传感器20。
光谱调制板10对入射光进行调制。光谱调制板10的透射率不恒为0。光谱调制板10的透射率(或反射率)随空间位置和光的波长按照规定的方式变化。光谱调制板调制的方式可以用镀膜的方式，但不局限于镀膜，还可以采用其他方式如采用离子注入、离子交换或者印刷等中的任意一种方式形成的。
当光谱调制板采用镀膜方式制备时，光谱调制板可以通过调整镀膜的厚度 调制光谱调制板的透射率(或反射率)。
阵列传感器20对光谱调制板10调制后的入射光进行响应，生成光电响应。传感器2可以是常见的CMOS或CCD芯片。CMOS(或CCD)芯片设置有多个相互之间独立产生光电响应的像元21。像元21上也可设置有透射率响应连续变化的膜层，使得不同像元具有一一对应的光谱透射率。其中，光谱探测装置中上各个像元21对接受到的光的光电响应输出为
Figure PCTCN2020078883-appb-000003
i＝1,2,……N，N为像元数，I(λ i)是待测光在波长λ j处的强度分布。
光谱调制板和阵列传感器上的膜层均可以采用化学镀膜或物理镀膜等的方式的生成，阵列传感器中各个像元最终测得的光谱分布符合下述公式：
I(λ j)＝[e(i,λ j)] -1[e(i)]，
其中，e(i,λ j)是第i个像元与入射波长为λ j单位强度的单色光对应的光电响应，
[e(i,λ j)] -1是[e(i,λ j)]的逆矩阵，
e(i)是输出的光电响应。
图2是本申请的另一实施例中光谱探测装置的结构示意图。
如图2所示，在另一实施例中，光谱探测装置200可以仅包括阵列传感器30，该阵列传感器30可以在各个像元31上设置有涂层32，使得各个像元的光电响应满足上述一一对应的光谱响应关系；该传感器3也可以在光谱探测装置的窗口上设置涂层，使得窗口下方的像元31输出与一一对应的光谱响应对应的光谱信息。可以采用光学镀膜或光刻的方式在像元上生成膜层。
也可以在光谱探测装置的传感器入射光进入的窗口上采用光学镀膜的方式或其他方式涂覆上透射率响应连续变化的膜层，保证其后面的不同像元具有一一对应的光谱透射率。光谱透射率函数与像元本身的光谱响应函数的乘积决定了器件的光谱响应矩阵。
不同像元与不同波长的入射光具有一一对应的光谱透射率，且不同像元对于在所研究的光谱范围内的单色光具有不同的透射率曲线，因而不同像元对于 在所研究的光谱范围内的单色光具有不同的光电响应曲线。
上述光谱探测装置中，光谱分辨率仅与像元数有关，像元数越高，光谱分辨率也就越高。但是光谱分辨率与像元的体积、探测器的体积关系不大，因而，获取光谱的方式也不需要复杂的光学系统。本实施例的光谱探测装置结构简单，且光谱探测装置中的分光器件仅是一个已对像元的光谱响应调制过的阵列光谱探测装置，体积可以根据需要设置，且没有任何运动部件，结构牢固紧凑，制作过程也很简单。而且，在工作时每个像元都可以接收所有波长的光，并生成光电响应，所以，在同一情况下，光谱探测装置可分析的光通量远高于现有设备可分析的光通量，利于对入射光中弱信号的检测分析。
本实施例还提供了一种光谱信息获取方法，包括以下步骤：
采用光学系统接收从待检测对象发出的光，使其照射在阵列探测器上，并让阵列探测器对光生成光电响应；
对光电响应进行数据处理，获得光的光谱信息，
其中，阵列探测器的像元的光电响应受到调制，使得阵列探测器的不同的像元对于在所研究的光谱范围内的光具有不同的光电响应曲线。
不同单色光经过调制板和传感器后，与光谱探测装置输出的响应的关系是一一对应的，以保证有唯一的解。
在采用光谱探测装置接收待测样品的入射光前，需要对光谱探测装置进行标定测试，标定测试包括以下内容：采用阵列探测器接收预定波长单位强度的单色光，生成与单色光对应的光谱响应标定信息e(i,λ j)，单色光的数量与像元的数量一致，λ i为单色光的波长。
i对应着不同位置的像元，i＝1,2,……N，N为像元数。可以将波长区间[λ 1，λ 2]分成N-1等分，得到N个不同波长的λ j。采用N个波长的单色光对器件进行标定，即用单位强度的单色光I o(λ j)作为输入信号照射在光谱探测装置上，并测量探测器的光电输出信号。探测器对于每一个λ j，都可以得到相应的e(i,λ j)。这里标定用的波长为λ j单色光的带宽δλ j要满足：
δλ j＜(λ 2-λ 1)/(N-1)。
在另一个实施例中，可以将频率区间[ν 1,ν 2]分成N-1等分，得到N个不同波长的ν j。探测器对于每一个ν j，都可以得到相应的e(i,ν j)。
在另一个实施例中，对光电响应进行数据处理，获得光的光谱分布信息，包括：
步骤1，根据光谱响应标定信息e(i,λ j)生成与阵列探测器对应的n阶标定矩阵，N为像元数。
采用不同单色光照射光谱探测装置，记录探测器照射后的试验数据，得到光谱响应矩阵元e(i,λ j)，根据像元i在探测器的位置，将光谱响应矩阵元对应形成矩阵。用光谱探测装置接收待测的电磁波I(λ)，λ 1≤λ≤λ 2，λ 1为最小波长，λ 2为最大波长。
将e(i,λ i)生成与光谱探测装置对应的n阶标定矩阵，即、得系数矩阵：
Figure PCTCN2020078883-appb-000004
i,j＝1,2,…N，N是像元数。
步骤2，根据各个像元和被测光对应的光电响应
Figure PCTCN2020078883-appb-000005
构建与n阶标定矩阵对应的n阶方程，计算n阶方程的唯一解，得到光的光谱分布信息I(λ j)。
光电响应
Figure PCTCN2020078883-appb-000006
所以I(λ j)＝[e(i,λ j)] -1[e(i)]。根据检测到的光电响应可以逆推出对应的光的波长，从而得到光的光谱分布信息I(λ j)。而且在本实施例中，对像元的光谱响应一一对应的调制方式保证了n阶行列式的线性方程组有唯一的解。
光谱探测装置生成的光谱可以用光强随波长变化的函数来表示，也可以用光强随频率的变化函数来表示，也可以用光强随波数的变换函数来表示。
以上所述仅为本申请的较佳实施例而已，并不用以限制本申请，凡在本申 请的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本申请的保护范围之内。以上所述仅是本申请的优选实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本申请技术原理的前提下，还可以做出若干改进和变型，这些改进和变型也应视为本申请的保护范围。

Claims (8)

  1. 一种光谱信息获取方法，其特征在于，包括：
    采用光学系统接收从待检测对象发出的光，使其照射在阵列探测器上，并让所述阵列探测器对所述光生成光电响应；及
    对所述光电响应进行数据处理，获得所述光的光谱分布信息，
    其中，所述阵列探测器的像元的光电响应受到调制，使得所述阵列探测器的不同的像元对于所研究的光谱范围内的光具有不同的光电响应曲线。
  2. 根据权利要求1所述的光谱信息获取方法，其特征在于，所述采用光学系统接收从待测对象发出的光之前，包括：
    采用阵列探测器接收预定波长单位强度的单色光，生成与所述单色光对应的光谱响应标定信息e(i,λ j)，所述单色光的数量与所述像元的数量一致，λ j为单色光的波长，i对应不同位置的像元，λ 1≤λ j≤λ 2，λ 1为最小波长，λ 2为最大波长。
  3. 根据权利要求2所述的光谱信息获取方法，其特征在于，所述对所述光电响应进行数据处理，获得所述光的光谱分布信息，包括：
    根据所述光谱响应标定信息e(i,λ j)生成与所述光阵列探测器对应的n阶标定矩阵，n为像元数；及
    根据各个像元和被测的所述光对应的光电响应
    Figure PCTCN2020078883-appb-100001
    构建与所述n阶标定矩阵对应的n阶方程，计算所述n阶方程的唯一解，得到所述光的光谱分布信息I(λ j)。
  4. 一种光谱探测装置，用于获取光谱分布信息，其特征在于，包括：
    光谱调制板，对光学系统传输后的光进行调制；及
    阵列传感器，对调制后的所述光进行响应，生成光电响应，对所述光电响应进行数据处理，获得所述光的光谱分布信息，
    其中，所述阵列探测器的不同的像元对于所研究的光谱范围内的光具有不同的光电响应曲线。
  5. 根据权利要求4所述的光谱探测装置，其特征在于，所述像元上设置有透射率响应连续变化的膜层，使得不同像元具有一一对应的光谱透射率。
  6. 根据权利要求5所述的光谱探测装置，其特征在于，所述膜层采用镀膜的方式形成。
  7. 根据权利要求4所述的光谱探测装置，其特征在于，所述光谱调制板是采用离子注入、离子交换或者印刷中的任意一种方式形成的。
  8. 一种光谱探测装置，用于获取光谱分布信息，其特征在于，包括：
    阵列传感器，对光学系统传输后的光进行响应，生成光电响应，对所述光电响应进行数据处理，获得所述光的光谱分布信息，
    其中，所述阵列传感器上设置有像元，
    所述传感器上设置有膜层，使得所述阵列探测器的不同的像元具有一一对应的光谱透射率，让所述阵列传感器对于所研究的光谱范围内的光具有不同的光电响应曲线。
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