WO2021172731A1

WO2021172731A1 - Mother panel adsorption device

Info

Publication number: WO2021172731A1
Application number: PCT/KR2021/000006
Authority: WO
Inventors: 박진; 박노선; 조창제
Original assignee: 주식회사 메가센
Priority date: 2020-02-25
Filing date: 2021-01-04
Publication date: 2021-09-02
Also published as: KR102430727B1; CN114788034A; KR20210108200A

Abstract

A mother panel adsorption device according to an embodiment of the present invention can inspect whether a display panel is defective, by suctioning one surface of a mother panel in a state where the other surface opposite to the one surface is oriented downward. The present invention relates to a mother panel absorption device which can minimize deterioration of suctioning performance even when the suctioning function is partly lost while a large mother panel is suctioned and transferred to a desired position to prevent deterioration of transferring stability and accuracy.

Description

ledger panel adsorption device

The present invention relates to a led panel adsorption device, and more particularly, to a led panel adsorption device capable of adsorbing a large ledger panel in a face down method and stably transporting it to a desired location.

Organic light emitting diodes (OLEDs) used as flat panel display devices have a wide viewing angle, excellent contrast, and fast response speed.

In an organic light emitting diode (OLED), an organic material layer for forming an organic light emitting layer is deposited on a panel serving as a substrate, thereby realizing a pixel that emits light and color by an electrical signal.

Here, when an organic material layer is formed on a panel serving as a substrate by deposition to realize a pixel, an inspection should be performed on whether the pixel is defective before the encapsulation process.

In the related art, in order to prevent contamination from scattered particles during the inspection, the inspection was carried out in a face-down method, that is, in a state where the deposition part of the display panel requiring inspection is located on one side facing downward.

The display panel can be manufactured in various sizes according to the purpose of use, and is provided on the ledger panel during the manufacturing process, and the ledger panel is a single type or various sizes in which a plurality of display panels of the same size exist in order to increase the chamfering efficiency. The display panel may be of a mixed type formed by mixing.

Conventionally, in order to inspect whether the display panel is defective, it is disposed on a fishbone-type stage module with one side of the display panel having a deposition part on the ledger panel facing downward, and a fishbone-type stage module. is moved into the chamber for inspection after gripping the outer portion on which the deposition part is not formed among one surface where the deposition part is present in a state in which the deposition part faces downward.

After that, the other surface of the ledger panel without the deposition part was adsorbed by the vacuum plate, moved to the location where the probe block of the probe unit was located, and the contact pad of the display panel was brought into contact with the probe block. .

However, although the conventional inspection method is useful for inspecting a display panel on a relatively small ledger panel, there is a serious problem in inspecting whether a display panel on a large ledger panel is defective in a face down method. difficult situation.

In other words, in the case of a large ledger panel, when the deposition part is placed on the fishbone-type stage module with one side facing downward, the fishbone-type stage module is one of the one surface on which the deposition part is present. The outer part where the deposition part is not formed is supported. In this case, the central part of the large led panel sags by its own weight, which makes accurate inspection impossible.

In addition, the conventional inspection method causes the following problems in addition to the problems described above.

The probe unit has no choice but to be equipped with a probe block for inspecting whether one type of display panel is defective. As a result, display panels of various sizes that require inspection exist on the ledger panel, so that the display panel to be inspected is different. In this case, it is inevitably necessary to replace it with a new probe unit suitable for it.

In general, the replacement operation of the probe unit is performed manually by an operator, and accordingly, the time required for the replacement operation is increased, and thus there is a problem in that the yield is reduced.

In addition, when replacing the probe unit, there is a problem in that the operator is often injured or electric shock.

Therefore, as a face down method to prevent contamination from scattering particles during inspection, research on the development of facilities to quickly and accurately inspect the defects of various types of display panels on a large ledger panel is urgent. the current situation.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a led panel adsorption device capable of stably inspecting whether display panels of various sizes included in a large ledger panel are defective in a face down method.

More specifically, in the process of adsorbing a large ledger panel and transferring it to a desired location, even if some adsorption function is lost, it is to provide a led panel adsorption device that can minimize the deterioration of the adsorption performance and prevent the deterioration of the stability and accuracy of the transfer. .

In the mother panel adsorption device according to an embodiment of the present invention, one surface of the mother panel - the one surface is provided with at least one type of display panel on which an organic material layer for forming an organic light emitting layer is deposited - the one surface in a downward-facing state A device for adsorbing the other surface, which is the opposite surface, of the display panel to check whether the display panel is defective. The module includes a plurality of stage units for preventing the central portion of the mother panel from sagging due to its own weight, and the mother panel is rotated from the normal state to an inverted state in which the one side faces downward. After adsorbing the other surface changed from the normal state to the inverted state, a transfer module for transferring the mother panel to a position for checking whether the display panel is defective while maintaining the inverted state, wherein the plurality of The stage units are respectively disposed to be spaced apart from each other so that a first space is formed therebetween, and the transfer module, when the stage module is rotated to change the state of the mother panel from the normal state to the inverted state, 1 is inserted into the space and adsorbs the other surface disposed in the reversed state, but includes a plurality of transfer units for preventing the central portion of the mother panel from sagging due to its own weight, each of the plurality of transfer units, and an adsorption unit spaced apart for adsorption, wherein the plurality of transfer units are divided into a plurality of combinations including at least one, and the adsorption function is individually controlled with each of the plurality of combinations, the adsorption included in a specific combination When the adsorption function is lost, it may be characterized in that the fall of the ledger panel adsorbing the other surface in the reversed state is prevented by the adsorption function of the adsorption unit included in another combination.

The plurality of transfer units of the led panel adsorption device according to an embodiment of the present invention each include a vacuum line for implementing the adsorption function, and the plurality of combinations share the vacuum line, respectively. can do.

A mother panel adsorption device according to another embodiment of the present invention includes one surface of the mother panel - the one surface is provided with at least one type of display panel on which an organic material layer for forming an organic light emitting layer is deposited - in a downward-facing state A device for adsorbing the other surface, which is the opposite surface of one surface, to check whether the display panel is defective. The stage module includes a plurality of stage units for preventing the central portion of the mother panel from sagging due to its own weight, and the mother panel is rotated from the normal state to an inverted state in which the one side faces downward. and a transfer module for transferring the mother panel to a position for inspecting whether the display panel is defective while maintaining the inverted state after adsorbing the other surface changed from the normal state to the inverted state, wherein the plurality of The stage units are respectively disposed to be spaced apart from each other to form a first space therebetween, and the transfer module, when the stage module is rotated to change the state of the mother panel from the normal state to the inverted state, It is inserted into the first space and adsorbs the other surface disposed in the reversed state, and includes a plurality of transfer units for preventing the central portion of the mother panel from sagging due to its own weight, wherein each of the plurality of transfer units includes the other surface and an adsorption unit spaced apart to adsorb the It may be characterized in that it prevents the fall of the ledger panel adsorbing the other surface in the inverted state.

A mother panel adsorption device according to another embodiment of the present invention is provided with at least one type of display panel on which an organic material layer for forming an organic light emitting layer is deposited on one surface of the mother panel - the state facing downward A device for adsorbing the other surface, which is the opposite surface of the one surface, to check whether the display panel is defective. The stage module includes a plurality of stage units for preventing the central portion of the mother panel from sagging due to its own weight, and the mother panel is rotated from the normal state to an inverted state in which the one side faces downward. After adsorbing the other surface changed from the normal state to the inverted state on the upper surface, by a transfer module for transferring the mother panel to a first position for checking whether the display panel is defective while maintaining the inverted state, After adsorbing the other surface of the ledger panel moved to the first position, the vacuum adsorption module is moved to a second position while maintaining the inverted state. By an action, the inspection on whether the display panel is defective is made to be adsorbed on the other side while the mother panel maintains the inverted state, so that the display panel is inspected by the interaction. and a picker module, wherein the picker module includes a plurality of picker units spaced apart from each other so as to uniformly adsorb the other surface of the ledger panel, wherein the plurality of picker units are horizontally or vertically spaced apart from each other. When the adsorption unit is divided based on the adsorption unit disposed so as to be divided into a plurality of combinations including at least one, and the adsorption function is individually controlled with each of the plurality of combinations, the adsorption unit included in the specific combination loses the adsorption function The reversed state by the adsorption function of the adsorption unit included in another combination It may be characterized in that it prevents the fall of the led panel adsorbing the other surface.

The plurality of picker units of the led panel adsorption device according to another embodiment of the present invention each include a vacuum line for implementing the adsorption function, and the plurality of combinations each share the vacuum line. can be characterized.

A mother panel adsorption device according to another embodiment of the present invention is provided with at least one type of display panel on which an organic material layer for forming an organic light emitting layer is deposited on one surface of the mother panel - the state facing downward A device for adsorbing the other surface, which is the opposite surface of the one surface, to check whether the display panel is defective. The stage module includes a plurality of stage units for preventing the central portion of the mother panel from sagging due to its own weight, and the mother panel is rotated from the normal state to an inverted state in which the one side faces downward. After adsorbing the other surface changed from the normal state to the inverted state on the upper surface, by a transfer module for transferring the mother panel to a first position for checking whether the display panel is defective while maintaining the inverted state, After adsorbing the other surface of the ledger panel moved to the first position, the vacuum adsorption module is moved to a second position while maintaining the inverted state. By an action, the inspection on whether the display panel is defective is made to be adsorbed on the other side while the mother panel maintains the inverted state, so that the display panel is inspected by the interaction. and a picker module, wherein the picker module includes a plurality of picker units spaced apart from each other so as to uniformly adsorb the other surface of the ledger panel, wherein the plurality of picker units each have the adsorption function. Individually controlled, when a specific picker unit loses the adsorption function, it may be characterized in that the fall of the ledger panel adsorbing the other surface in the reversed state is prevented by the adsorption function of another picker unit.

A mother panel adsorption device according to another embodiment of the present invention is provided with at least one type of display panel on which an organic material layer for forming an organic light emitting layer is deposited on one surface of the mother panel - the state facing downward A device for adsorbing the other surface, which is the opposite surface of the one surface, to check whether the display panel is defective. The stage module includes a plurality of stage units for preventing the central portion of the mother panel from sagging due to its own weight, and the mother panel is rotated from the normal state to an inverted state in which the one side faces downward. After adsorbing the other surface changed from the normal state to the inverted state on the upper surface, by a transfer module for transferring the mother panel to a first position for checking whether the display panel is defective while maintaining the inverted state After adsorbing the other surface of the ledger panel moved to the first position, the ledger panel moved to the second position by a picker module for moving it to the second position while maintaining the inverted state is mounted with a probe block and a vacuum adsorption module for inspecting whether the display panel is defective by interaction with the probe unit, wherein the vacuum adsorption module is spaced apart from each other so that the other surface of the mother panel can be uniformly adsorbed and a plurality of vacuum adsorption units disposed as being, wherein the plurality of vacuum adsorption units are divided based on the adsorption units disposed to be horizontally or vertically spaced apart, and are divided into a plurality of combinations including at least one, the plurality of The adsorption function is individually controlled for each combination, and when the adsorption unit included in a specific combination loses the adsorption function, the led panel adsorbs the other side in the reversed state by the adsorption function of the adsorption unit included in another combination. It may be characterized in that it prevents falling.

A mother panel adsorption device according to another embodiment of the present invention is provided with at least one type of display panel on which an organic material layer for forming an organic light emitting layer is deposited on one surface of the mother panel - the state facing downward A device for adsorbing the other surface, which is the opposite surface of the one surface, to check whether the display panel is defective. The stage module includes a plurality of stage units for preventing the central portion of the mother panel from sagging due to its own weight, and the mother panel is rotated from the normal state to an inverted state in which the one side faces downward. After adsorbing the other surface changed from the normal state to the inverted state on the upper surface, by a transfer module for transferring the mother panel to a first position for checking whether the display panel is defective while maintaining the inverted state After adsorbing the other surface of the ledger panel moved to the first position, the ledger panel moved to the second position by a picker module for moving it to the second position while maintaining the inverted state is mounted with a probe block and a vacuum adsorption module for inspecting whether the display panel is defective by interaction with the probe unit, wherein the vacuum adsorption module is spaced apart from each other so that the other surface of the mother panel can be uniformly adsorbed and a plurality of vacuum adsorption units arranged in such a way that each of the plurality of vacuum adsorption units is individually controlled for the adsorption function, so that when a specific picker unit loses the adsorption function, the adsorption function of another picker unit causes the It may be characterized in that it prevents the fall of the ledger panel adsorbing the other surface in an inverted state.

According to the led panel adsorption device according to the present invention, it is possible to stably inspect whether display panels of various sizes included in the large ledger panel are defective in a face down method.

In addition, even if some adsorption function is lost in the process of adsorbing a large ledger panel in a face-down method and transferring it to a desired location, it is possible to prevent deterioration of the stability and accuracy of transfer by minimizing the deterioration of adsorption performance.

1 is a view for explaining a display panel inspected for defects by the display panel inspection facility according to the present invention.

FIG. 2 is a view for explaining various embodiments of a combination of display panels included in a ledger panel that can be seated on a stage module provided in a display panel inspection facility according to the present invention; FIG.

3 is a block diagram illustrating a display panel inspection facility according to the present invention.

4 is a view for explaining a display panel inspection facility according to the present invention.

5 and 6 are views for explaining the flow of air in the inspection process proceeding equipment provided to the display panel inspection equipment according to the present invention, Figure 5 is a schematic cross-sectional view taken along line AA of Figure 4, Figure 6 is A schematic cross-sectional view taken along line BB in Fig.

7 is a flowchart for explaining a process in which a ledger panel is adsorbed to a vacuum adsorption module by a director panel transfer device provided to a display panel inspection facility according to the present invention;

8 is a view for explaining a situation in which the mother panel is seated in a normal state on the stage module provided in the mother panel transfer device according to the present invention;

9 and 10 are views for explaining a situation in which the ledger panel in a normal state is changed to an inverted state by the rotation of the stage module in the situation shown in FIG. 8;

11 is a view for explaining a situation in which the transfer module provided in the ledger panel transfer apparatus according to the present invention enters the stage module;

12 and 13 are views for explaining a situation in which the transfer module provided in the mother panel transfer apparatus according to the present invention adsorbs the led panel in an inverted state.

14 is a view for explaining a situation in which the transfer module provided in the mother panel transfer apparatus according to the present invention is moved to the first position;

15 and 16 are views for explaining a situation in which the picker module provided in the mother panel transfer apparatus according to the present invention is lowered to adsorb the mother panel in an inverted state.

17 is a view for explaining a situation in which the transfer module provided in the mother panel transfer apparatus according to the present invention is returned to its original position;

18 is a view for explaining a situation in which the picker module provided in the mother panel transfer device according to the present invention is raised to a second position.

19 is a view for explaining a situation in which the picker module provided in the mother panel transfer device according to the present invention is raised to a third position;

20 is a view for explaining a display panel inspection apparatus provided in the display panel inspection facility according to the present invention.

21 to 28 are views for explaining a situation in which the inspection is performed on whether the 65-inch display panel and the 55-inch display panel provided in the mother panel are defective by the display panel inspection apparatus according to the present invention.

29 is a view for explaining another method in which power is applied to a probe pin provided in a probe block;

30 and 31 are views for explaining a method for fixing or separating a probe block on a probe unit;

Hereinafter, specific embodiments of the present invention will be described in detail with reference to the drawings. However, the spirit of the present invention is not limited to the embodiments presented, and those skilled in the art who understand the spirit of the present invention may add, change, delete, etc. other components within the scope of the same spirit, through addition, change, deletion, etc. Other embodiments included within the scope of the invention may be easily proposed, but this will also be included within the scope of the invention.

In addition, components having the same function within the scope of the same idea shown in the drawings of each embodiment will be described using the same reference numerals.

1. 디스플레이 패널 및 원장 패널1. Display panel and ledger panel

1 is a view for explaining a display panel that is inspected for defects by the display panel inspection facility according to the present invention, Figure 2 is a ledger that can be seated on a stage module provided in the display panel inspection facility according to the present invention It is a diagram for explaining various embodiments of a combination of display panels included in the panel.

Referring to FIG. 1 , the display panel DP is a display panel inspection facility 1000 according to the present invention, in which an organic material layer for forming an organic light emitting layer is deposited on a panel serving as a substrate to implement a pixel, and prior to the encapsulation process, the display panel inspection facility 1000 ( FIG. 3 ). and see FIG. 4 ) may be used to check whether there is a defect.

The display panel DP includes a first electrode pad EP1 formed along a first corner area which is one of the corner areas of the upper surface, and a second electrode pad EP1 which is the other one of the corner areas of the upper surface to inspect whether a pixel is defective. Another one of the second electrode pad EP2 formed along the corner region, the third electrode pad EP3 formed along the third corner region that is another one of the corner regions of the upper surface, and the corner region of the upper surface. A fourth electrode pad EP4 formed along the fourth corner region may be provided.

However, in the display panel DP, the formation position and number of electrode pads may vary depending on the characteristics of the panel. Hereinafter, the process of inspecting for defects will be described using the display panel DP shown in FIG. 1 as an example. to explain

The display panel DP is to be manufactured through a process such as cutting after a plurality of the display panel DP is formed on the ledger panel MP whose size is determined depending on the size of the stage module 110 (refer to FIGS. 3 and 4) in the manufacturing process. In addition, the ledger panel MP may be a glass substrate that is the basis for the production of the display panel DP.

The ledger panel MP is a display panel of a single type or of various sizes in which a plurality of display panels DP of the same size exist in order to increase the efficiency of the defect inspection by minimizing the empty space, that is, to increase the chamfering efficiency. (DP) may be a mixed type formed by mixing.

For example, the ledger panel MP is a mixed type of two 98-inch display panels as shown in FIG. 2(a), and three 65-inch display panels and a 32-inch display panel as shown in FIG. 6 mixed types, 18 single types of 31.5 inch display panels as shown in Fig. 2(c), 2 49 inch display panels and 2 mixed types of 75 inch display panels as shown in Fig. 2(d), and Fig. As shown in 2(e), it may be a mixed type of three 65-inch display panels and two 55-inch display panels, but is not limited thereto, and may be a panel to which a mixed type of display panels of various sizes is applied.

The display panel inspection facility 1000 according to the present invention may inspect whether each of all the display panels included in the mixed-type ledger panel MP of the various combinations described above is defective. Hereinafter, the ledger panel is 65 A case of a mixed type in which three inch display panels and two 55 inch display panels are formed will be described as a representative example.

2. 디스플레이 패널 검사 설비2. Display panel inspection equipment

3 is a block diagram for explaining a display panel inspection facility according to the present invention, and FIG. 4 is a diagram for explaining a display panel inspection facility according to the present invention.

3 and 4, the display panel inspection facility 1000 according to the present invention is a display panel (DP) of various sizes included in the mother panel (MP) in a back adsorption method, that is, a face down method. ) is an inspection equipment that can maximize the accuracy and speed of inspection for defects by allowing the probe unit (PU1, PU2, see FIG. It may include a process progress facility 1200 .

Inspection process preparation facility 1100 is provided with at least one type of display panel DP having an organic material layer deposited on one surface for forming an organic light emitting layer on one surface of the mother panel MP in a normal state with the one surface facing upward. When the other surface of the MP) is adsorbed to the stage module 110 , the stage module 110 is rotated so that the ledger panel MP is in an inverted state in which the one surface faces downward from the normal state, and then transferred The module 120 may be a facility for receiving the ledger panel MP in the inverted state and moving the ledger panel MP to a facility for the next process while maintaining the inverted state.

In the inspection process progress facility 1200 , the picker module 130 adsorbs the other surface of the ledger panel MP entered by the transfer module 120 , and then vacuums the picker module 130 through position movement. When the module 140 adsorbs the led panel MP in the inverted state, the electrode pad of the display panel DP is moved to the probe of the display panel inspection apparatus 200 through the position movement of the vacuum adsorption module 140 . It may be a facility for inspecting whether the display panel DP is defective by making it come into contact with the probe pin 3002 (refer to FIG. 22) of the block PB (refer to FIG. 22).

On the other hand, in the display panel inspection facility 1000 according to the present invention, the ledger panel MP is seated on the stage module 110 , and the ledger panel MP is mediated by the picker module 130 by the transfer module 120 . As a result, the components until adsorbed to the vacuum adsorption module 140 can be defined as the ledger panel transfer device 100, and the display adsorbed to the vacuum adsorption module 140 by the ledger panel transfer device 100 The process of inspecting whether the panel DP is defective by the display panel inspection apparatus 200 including the probe block assembly 2000 and the probe block loading unit 3000 is described with reference to FIGS. 20 to 28 , Described specifically.

5 and 6 are views for explaining the flow of air in the inspection process proceeding equipment provided to the display panel inspection equipment according to the present invention, Figure 5 is a schematic cross-sectional view taken along line AA of Figure 4, Figure 6 is It is a schematic cross-sectional view taken along line BB in Fig.

Referring to FIGS. 5 and 6 together with FIGS. 3 and 4 , the inspection process progress facility 1200 includes the electrode pads of the display panel DP and the probe pins 3002 of the probe block PB (see FIG. 22 ). reference), the first space part 300 for inspecting whether the display panel DP is defective, and the display panel DP to be inspected for the defect, The vision module 410 for checking the presence or absence of stains or scratches on the display panel DP may include a second space portion 400 installed to be movable, and the second space portion 400 . may be located below the first space 300 .

Here, the vision module 410 may include, for example, four camera units, and the working distance (WD) of the camera unit varies according to the size of the display panel DP to be photographed, The position may be movable toward the top or bottom.

In addition, since the four camera units must photograph the entire area of the display panel DP corresponding to the size of the display panel DP to be photographed, it is 1/4 of the display panel DP to be photographed, respectively. It must be located in the center of the area, and for this purpose it can be moved forward or backward, left or right. Also, if necessary, the display panel DP may be rotated forward or reversed to correspond to the rotation of the display panel DP to be photographed.

Meanwhile, the inspection on whether the display panel DP is defective in the inspection process preparation facility 1100 and the inspection process progress facility 1200 may be performed under a nitrogen atmosphere.

In particular, in the case of the inspection process proceeding facility 1200 , the nitrogen air must be circulated stably without stagnation in the first space 300 and the second space 400 .

To this end, the inspection process proceeding facility 1200 is a forced circulation module 310 located above the first space 300 , for circulation of the nitrogen air in the first space 300 . It may include a first circulation duct module 320 connecting the upper portion and the lower portion, and a second circulation duct module 420 connecting the first space portion 300 and the second space portion 400 .

The second circulation duct module 420 is configured so that the nitrogen air introduced into the second space 400 from the first space 300 is introduced back into the first space 300 and circulated. It can be, and the forced suction module 430 may be located on the second circulation duct module 420 .

Here, the forced circulation module 310 and the forced suction module 420 are a kind of suction fan, and the forced suction module 420 is located on the second circulation duct module 410 and the first space part ( The nitrogen air introduced into the second space 400 from 300 ) may be sucked and then discharged into the first space 300 .

Accordingly, the inspection process progress facility 1200 performs the inspection process of the display panel under a uniform nitrogen atmosphere.

Meanwhile, since the inspection process preparation facility 1100 and the inspection process progress facility 1200 require a worker to enter the inside during maintenance, the conversion to a clean dry air (CDA) atmosphere can be made.

3. 원장 패널 이송 장치3. Ledger panel transfer device

7 is a flowchart illustrating a process in which a mother panel is adsorbed to a vacuum adsorption module by a mother panel transfer device provided to a display panel inspection facility according to the present invention.

First, referring to FIGS. 3 and 4 , the ledger panel transfer apparatus 100 may include a stage module 110 , a transfer module 120 , a picker module 130 , and a vacuum adsorption module 140 .

The stage module 110 is a component for adsorbing and fixing the other surface of the mother panel MP in a normal state in which one surface of the mother panel MP faces upward, and one surface of the mother panel MP has an organic light emitting layer. At least one type of display panel DP on which an organic material layer for formation is deposited may be provided.

Here, the other surface of the mother panel MP may be a non-deposition part as a whole.

The stage module 110 may be rotated so that the display panel is inspected in a face-down manner, whereby the mother panel MP is disposed and adsorbed to the stage module 110 in the normal state. ) may be an inverted state in which the one surface faces downward.

The transfer module 120 adsorbs the other surface of the mother panel MP whose state is changed from the normal state to the inverted state on the stage module 110, and then transfers the mother panel MP to the inverted state. It may be a component for moving it to the first position for inspection for defects while maintaining it.

The picker module 130 adsorbs the other surface of the ledger panel MP moved to the first position by the transfer module 120 and then rises based on the first position while maintaining the inverted state. As a component for moving to the second position, which is the current position, a plate-shaped vacuum adsorption module 140 to be described later may adsorb the mother panel MP in the inverted state.

When the led panel MP in the inverted state is moved to the second position by the transfer module 120 by the transfer module 120, the vacuum adsorption module 140 adsorbs the ledger panel MP while maintaining smoothness in the inverted state. After that, it is a component that allows the inspection of whether the display panel DP is defective by interaction with the probe pin 3002 of the probe block PB of the display panel inspection apparatus 200. can

When the ledger panel MP is adsorbed in the inverted state by the vacuum adsorption module 140, the vacuum adsorption module 140 moves the position while maintaining the ledger panel MP in the inverted state, By bringing the electrode pad of the display panel DP into contact with the probe pin 3002 of the probe block PB, the inspection is performed on whether the display panel DP is defective in the reversed state.

Here, the reason that the ledger panel MP must be finally adsorbed to the vacuum adsorption module 140 while maintaining the inverted state is accurate position control and In order to maintain the smoothness of the display panel DP, if the mother panel MP is adsorbed by other components instead of the vacuum adsorption module 140 and is moved to the display panel inspection apparatus 200, the smoothness This is because an accurate inspection for defects is not guaranteed due to a problem in the back.

Hereinafter, a process in which the mother panel MP is adsorbed to the vacuum adsorption module 140 by the mother panel transfer device 100 according to the present invention will be described.

Referring to FIG. 7 , the step of adsorbing the ledger panel to the vacuum adsorption module by the ledger panel transfer device 100 according to the present invention is the first step in which the ledger panel MP is disposed on the stage module 110 in a normal state. Step 1 (S10), the second step (S20) in which the stage module 110 is rotated, the third step (S30) in which the transfer module 120 enters and adsorbs the ledger panel MP (S30), the transfer module ( A fourth step (S40) in which the 120) moves to the first position, a fifth step (S50) in which the picker module 130 is lowered to absorb the ledger panel MP (S50), a fourth step in which the transfer module 120 returns Step 6 (S60), a seventh step (S70) in which the picker module 130 is raised to a second position, an eighth step (S80) in which the display panel DP is adsorbed by the vacuum adsorption module 140, A ninth step (S90) in which the picker module 130 is raised and moved to a third position may be included.

Hereinafter, each of the above-described steps will be described in detail with reference to FIGS. 8 to 19 .

8 is a view for explaining a situation in which the mother panel is normally seated on the stage module provided in the mother panel transfer device according to the present invention.

Referring to FIG. 8 , the mother panel MP may be adsorbed after being disposed ( S10 ) on the stage module 110 in a normal state.

Here, it should be noted that, for convenience of explanation, one surface on which at least one display panel DP is provided is expressed in shades of the mother panel MP.

On the other hand, the method of disposing the mother panel MP on the stage module 110 is not particularly determined, and may be various such as an automatic method by a robot device or a manual method by an operator under a nitrogen atmosphere.

The stage module 110 may include a plurality of stage units 112 for adsorbing the other surface SF2 of the mother panel MP in the normal state, and the stage units 112 are spaced apart from each other. It can be arranged so that a first space (S1) is formed therebetween.

For example, the stage unit 112 may be formed of nine as shown in FIG. 8 , but is not necessarily limited thereto, and the mother panel MP to be supported does not have a central portion sagging due to its own weight. The number may be changed as long as it can be stably supported.

The stage unit 112 may include a plurality of adsorption units 114 for adsorbing the mother panel MP, respectively, and the adsorption unit 114 may implement an adsorption function using a vacuum.

9 and 10 are diagrams for explaining a situation in which the ledger panel in a normal state is changed to an inverted state by the rotation of the stage module in the situation shown in FIG. 8 .

9 and 10 , the stage module 110 may be rotated (R, S20) while adsorbing the mother panel MP in a normal state, and the rotation direction is not limited.

A driving method for rotation of the stage module 110 is not particularly determined, and may be rotated using, for example, a known motor.

When the stage module 110 is rotated, the state of the mother panel MP, which has been adsorbed in a normal state, is changed to an inverted state in which the one surface SF1 on which the deposition part is located faces downward.

The ledger panel MP continuously maintains an inverted state while the inspection for defects is in progress, so that the display panel DP can proceed with the inspection for defects in a face down method. do.

11 is a view for explaining a situation in which the transfer module provided in the ledger panel transfer apparatus according to the present invention enters the stage module, and FIGS. 12 and 13 are the transfer modules provided in the ledger panel transfer apparatus according to the present invention. It is a diagram to explain the situation in which the ledger panel in the inverted state is adsorbed.

11 to 13 , when the ledger panel MP is in an inverted state due to the rotation of the stage module 110 , the transfer module 120 enters the stage module 110 , and then the ledger panel (MP) is adsorbed (S30).

The transfer module 120 is inserted into the first space S1 provided by the stage unit 112 and a plurality of transfer units for adsorbing the other surface SF2 of the ledger panel MP arranged in an inverted state. (122).

The transfer unit 122 may be disposed to be spaced apart from each other similarly to the stage unit 112 .

For example, the transfer unit 122 may be formed of eight as shown in the drawing, but is not necessarily limited thereto.

The transfer unit 122 may adsorb the other surface SF2 of the mother panel MP after entering the first space S1 provided by the mother panel MP and the stage unit 112 , , if necessary for adsorption of the mother panel MP, the position may be moved in the vertical direction.

The transfer unit 122 may include a plurality of adsorption units 124 spaced apart from each other to adsorb the mother panel MP, and the adsorption unit 124 implements an adsorption function using a vacuum. can be

When the mother panel MP is adsorbed by the transfer unit 122 as described above, the adsorption of the mother panel MP by the stage unit 112 is released, thereby causing the mother panel MP to be absorbed. is interlocked with the movement of the transfer unit 122 .

14 is a view for explaining a situation in which the transfer module provided in the mother panel transfer apparatus according to the present invention is moved to the first position.

Referring to FIG. 14 , the transfer module 120 may be moved (S40) to a first position for inspection for defects while maintaining the inverted state while adsorbing the ledger panel MP in an inverted state. .

Here, the first position may mean a position on the lower part of the ledger panel MP in the inverted state with respect to the position where the vacuum adsorption module 140 and the picker module 130 are disposed, and in a later step, the picker The module 130 may stably adsorb the ledger panel MP in the inverted state while maintaining the inverted state.

15 and 16 are diagrams for explaining a situation in which the picker module provided in the ledger panel transfer device according to the present invention is lowered and adsorbs the led panel in an inverted state. It is a view for explaining a situation in which the provided transfer module is returned to its original position.

15 and 16 , the picker module 130 can move to the first position after passing through the vacuum adsorption module 140 by descending from the third position, and by the transfer module 120 . The led panel MP in an inverted state moved to the first position may be adsorbed (S50).

The picker module 130 may include a plurality of picker units 134 spaced apart from each other to prevent sagging by uniformly adsorbing the other surface SF2 of the mother panel MP.

The plurality of picker units 134 may be divided based on the adsorption unit 132 disposed to be horizontally or vertically spaced apart, and the adsorption unit 132 may implement an adsorption function using a vacuum.

When the ledger panel MP is adsorbed by the picker module 130, the transfer module 120 releases adsorption as shown in FIG. S60).

The transfer module 120 moved to its original position can operate to inspect another display panel provided in another ledger panel.

Referring to FIG. 18 , the picker module 130 may adsorb the ledger panel MP in an inverted state and then move to the second position by rising ( S70 ). The ledger panel MP can be adsorbed (S80).

Here, the second position may be a position raised to the vacuum adsorption module 140 by the picker module 130 based on the first position, and the vacuum adsorption module 140 is the picker module 130 . Thus, it is possible to stably adsorb the ledger panel MP in an inverted state.

As shown in FIG. 15 , the vacuum adsorption module 140 may include a plurality of vacuum adsorption units 142 spaced apart from each other in order to uniformly adsorb the other surface SF2 of the mother panel MP. .

The plurality of vacuum adsorption units 142 may be divided based on the adsorption units 144 that are horizontally or vertically spaced apart, and the adsorption unit 144 may implement an adsorption function using a vacuum.

19 is a view for explaining a situation in which the picker module provided in the mother panel transfer device according to the present invention is raised to a third position.

Referring to FIG. 19 , when the other surface SF2 of the ledger panel MP moved to the second position is adsorbed by the vacuum adsorption module 140 , the picker module 130 releases the adsorption to the ledger panel After being separated from (MP), it may be raised and returned to the third position (S990).

Thereafter, an inspection for defects may be performed by interaction with the vacuum adsorption module 140 and the display panel inspection apparatus 200 .

Here, in the interaction, the vacuum adsorption module 140 is moved and the electrode pad of the display panel DP provided in the mother panel MP and the probe pin 3002 of the probe block PB are in contact, It may mean that an inspection is performed on whether the display panel DP is defective.

Hereinafter, a process of inspecting whether the display panel DP is defective by the display panel inspection apparatus 200 will be described in detail.

4. 디스플레이 패널 검사 장치4. Display panel inspection device

20 is a view for explaining a display panel inspection apparatus provided in a display panel inspection facility according to the present invention.

Referring to FIG. 20 , the display panel inspection apparatus 200 is a device capable of inspecting LCD or OLED, and is applied to all facilities for inspecting display panels using probe units PU1 and PU2 and probe block PB. It may be possible.

That is, the display panel inspection apparatus 200 can be applied not only to the equipment inspecting the face-down method described with reference to FIGS. 1 to 19 , but also to the equipment inspecting the face-up method. can be applied.

Hereinafter, a situation in which the display panel inspection apparatus 200 is applied to a facility for inspection in the face-down method described with reference to FIGS. 1 to 19 will be described as an example.

The display panel inspection apparatus 200 may include a probe block assembly 2000 and a probe block loading unit 3000 .

The probe block assembly 2000 is moved to the inspection position through the position movement of the vacuum adsorption module 140 for adsorbing the other surface of the mother panel MP with one surface of the mother panel MP in an inverted state toward the bottom. The display panel DP is in the inverted state and is configured to be inspected for defects, and the probe block PB in contact with the electrode pad of the display panel DP and the probe block PB supporting the probe block PB It may include probe units PU1 and PU2.

Here, the probe block assembly 2000 inspects whether the display panel DP moved to the inspection position is defective by moving the position of the vacuum adsorption module for adsorbing the mother panel MP in a face-up manner. It may be a configuration for allowing the .

The probe block loading unit 3000 has a configuration in which various types of probe blocks PB are loaded and stored, and the loaded probe blocks PB may be brought in and out.

The probe block PB is selected while being loaded on the probe block loading unit 3000 in order to perform an inspection on the display panel DP, and then taken out to a predetermined position on the probe units PU1 and PU2. can be mounted on

The probe units PU1 and PU2 include a first probe unit PU1 for testing the display panel DP and a second probe unit PU1 for testing other display panels having different sizes after testing of the display panel DP is completed. A probe unit PU2 may be included.

The first probe unit PU1 includes a 1-1 probe unit PU1-1 disposed in a transverse direction D1, a 1-2 probe unit PU1-2 disposed in a longitudinal direction D2, and the The 1-3 th probe unit PU1-3 disposed in the longitudinal direction D2 and the 1-4 th probe unit PU1-4 disposed in the transverse direction D1 may be included.

The second probe unit PU2 includes a 2-1 probe unit PU2-1 disposed in the transverse direction D1, a 2-2 probe unit PU2-2 disposed in the longitudinal direction D2, and the It may include a 2-3th probe unit PU2-3 disposed in the longitudinal direction D2 and a 2-4th probe unit PU2-4 disposed in the transverse direction D1.

Here, the 1-1 probe unit PU1-1 and the 2-1 probe unit PU2-1 may be formed as a single unit as shown in the drawings.

The probe block PB loaded on the probe block loading unit 3000 may be unloaded based on the display panel DP to be inspected and mounted on the probe units PU1 and PU2, and the probe block PB ) can be carried out and mounted by an unloading and mounting means not shown.

The carrying-out and mounting means may be various known means such as a robot arm, and there is no particular limitation, for example, including a belt or a rail.

Hereinafter, a process in which the 65-inch display panel and the 55-inch display panel included in the mother panel MP are inspected for defects by the display panel inspection apparatus 200 shown in FIG. 20 will be described.

21 to 28 are diagrams for explaining a situation in which the inspection for defects of the 65-inch display panel and the 55-inch display panel provided in the mother panel is performed by the display panel inspection apparatus according to the present invention.

First, it is assumed that three 65-inch display panels and two 55-inch display panels are included in one ledger panel (MP), and electrode pads of each display panel are provided on both sides, but 65-inch display panels are included. It is assumed that the display panel is inspected first and the inspection of the 55-inch display panel is performed after the inspection is completed for all 65-inch display panels.

The display panel inspection apparatus 200 according to the present invention detects that three 65-inch display panels and two 55-inch display panels are included in the director panel MP in a sensing unit (not shown).

The sensing unit may include an imaging unit and/or various sensor units using a camera or the like, and after the ledger panel MP is seated on the stage module 110 , the ledger panel MP moves through the vacuum The size of the display panel (DP) constituting the ledger panel (MP) before or during the movement to the position where the probe units (PU, PU2) are disposed in the state adsorbed to the adsorption module 140, the display panel ( The number and formation positions of the electrode pads of the DP) are sensed.

Of course, the detection by the sensing unit by the number and formation positions of the electrode pads of the display panel DP is not limited in time as long as the inspection is performed by the display panel inspection apparatus 200 .

When the size and/or type of the display panel DP constituting the ledger panel MP is detected by the detection unit, the control unit determines which type of display panel to inspect first, and below, As shown, a situation in which a 65-inch display panel is determined as an inspection target in preference to a 55-inch display panel will be described as an example.

When the size and/or type of the display panel formed on the ledger panel MP is detected by the control unit, and a 65-inch display panel among the detected display panels is preferentially inspected, the control unit is detected by the detection unit Based on the number and formation positions of the electrode pads of the 65-inch display panel, the probe block PB required for inspection is selected from among the probe blocks PB loaded in the probe block loading unit 3000, and the probe unit PU1, Among the mounting regions SR on PU2), a mounting region SR in which the selected probe block is to be mounted is selected and determined.

Here, the mounting region SR is a region for individually mounting the probe blocks PB, and the probe units PU1 and PU2 may include a plurality of mounting regions SR, and The probe block may not be mounted in the specific mounting area SR depending on the type of display to be used, the formation position and number of electrode pads, and the like.

Meanwhile, the control unit controls the first probe unit PU1 when the above process is completed.

That is, the control unit is configured to include the 1-2 probe unit PU1-2, the 1-3 probe unit PU1-3 and At least one of the 1-4 probe units PU1-4 is moved so that the first probe unit PU1 is disposed at a position corresponding to the electrode pad provided in the 65-inch display panel.

For example, as shown in FIG. 21 , the control unit controls the 1-2 probe unit PU1 in a state in which the 1-1 probe unit PU1-1 is fixed on the support plate unit 210 . -2), the 1-3 th probe unit PU1-3 and the 1-4 th probe unit PU1-4 can be positioned on the support plate unit 210, and the positional movement is not linear. It may be a position movement by

Here, the position movement may be implemented using various well-known elements, such as a linear motion guide, a motor, a ball screw, and a ball nut, but this is only an example, and may be implemented by applying various known movement methods.

The 1-2 th probe unit PU1-2 and the 1-3 th probe unit PU1-3 may approach each other by a predetermined distance, and the 1-4 th probe unit PU1-4 is configured to -1 A predetermined distance can be approached toward the probe unit PU1-1.

Here, the 1-4 th probe unit PU1-4 is configured to prevent interference with the 1-2 th probe unit PU1-2 and the 1-3 th probe unit PU1-3 during linear movement. , a positional movement may be implemented in the lower portion of the 1-2 th probe unit PU1 - 2 and the 1-3 th probe unit PU1-3 .

When the position movement of the first probe unit PU1 is completed to inspect the 65-inch display panel as described above, the control unit determines that the selected probe block PB is transported and mounted to the 1-1 probe unit PU1-1. ), a predetermined mounting area SR on the 1-2 probe unit PU1-2, a predetermined mounting area SR on the 1-3 probe unit PU1-3, and the 1- 4 The carry-out and mounting means is controlled so as to be mounted in a predetermined mounting area SR on the probe unit PU1-4.

As shown in FIGS. 22 and 23, the mounting of the probe block PB can be stably implemented by the interaction of the

position fixing units

3001 and 3003 and the

guide units

3005 and 3007, and the position height The tops 3001 and 3003 may include a first positioning part 3001 that is recessed from the bottom surface of the probe block PB, and a second positioning part 3003 that protrudes from the bottom surface.

The

guide parts

3005 and 3007 may include a first guide part 3005 formed to protrude from the top surface of the probe units PU1 and PU2 and a second guide part 3007 formed to be recessed from the top surface. .

In the probe block PB, the first position fixing unit 3001 matches the first guide unit 3005, and the second position fixing unit 3003 matches the second guide unit 3007, It can be stably mounted in the mounting area SR on the probe units PU1 and PU2.

The mounting area SR on the probe units PU1 and PU2 interacts with the

position fixing parts

3001 and 3003 formed in the probe block PB to guide the position where the probe block PB is mounted. It may include

parts

3005 and 3007, and as a method for stably mounting the probe block PB to the probe units PU1 and PU2, other well-known methods may be applied in addition to the above method. .

On the other hand, when the probe block PB is unloaded from the probe block loading unit 3000 and the unloaded probe block PB is mounted in the mounting area SR on the probe units PU1 and PU2, FIG. 22 and As shown in FIG. 23 , power may be applied to the probe pin 3002 of the probe block PB by electrical connection between the connection terminal 3006 and the power applying unit 3009 .

The power supply unit 3009 is a circuit board on which a type of power application terminal pattern is formed so that power is applied to the probe block PB when the probe block PB is mounted on the probe units PU1 and PU2. can be

The probe block PB is electrically connected to the probe pin 3002 in contact with the electrode pad of the display panel, the body 3004 supporting the probe pin 3002, and the power supply unit 3009 so that the power is supplied. and a connection terminal 3006 to be applied to the probe pin 3002 and a circuit pattern part 3008 for electrically connecting the probe pin 3002 and the connection terminal 3006, the circuit The pattern unit 3008 may be a printed circuit board.

Here, the connection terminals 3006 may be formed in the same number as or less than the number of power supply terminals to which power is applied by the power application unit 3009, and the circuit pattern unit 3008 includes the probe pins ( When the number of 3002 is smaller than the number of the power applying terminals, the printed circuit board may be a printed circuit board that allows only a portion of the power applied to the power applying terminal to be applied to the probe pin 3002 .

On the other hand, among the probe blocks unloaded from the probe block loading unit 3000 by the loading and unloading means, the probe blocks PB mounted on the 1-4 probe units PU1-4 include the probe block loading unit 3000 . It is carried out from the probe block and is longer in the height direction D3 than the probe block PB mounted on the 1-2 th probe unit PU1-2 or the 1-3 th probe unit PU1-3, so that the first - Compensating for the positions of the 1-4th probe units PU1-4 in the height direction D3 with respect to the -2 probe unit PU1-2 and the 1-3th probe unit PU1-3. can do.

In other words, the display panel DP to be inspected is maintained in a horizontal state. In this state, in order for the probe pins 3002 of the probe block PB to contact all the electrode pads, they must all be positioned at the same height. do.

For this reason, in the case of the 1-4 th probe unit PU1-4 positioned at a relatively lower position than the 1-2 th probe unit PU1-2 and the 1-3 th probe unit PU1-3, The probe block PB that is longer in the height direction D3 than the probe block PB mounted on the 1-2 probe unit PU1-2 and the 1-3 probe unit PU1-3 needs to be mounted. will be.

As a result, when the probe block PB is to be mounted on the 1-4th probe unit PU1-4, the control unit selects the probe block PB for position compensation in the height direction D3.

Of course, the probe block PB to be mounted on the 1-4 th probe unit PU1-4 is combined with a separate component such as a spacer, and the 1-2 th probe unit PU1-2 and the first probe block PB -3 It may be implemented to be longer in the height direction D3 than the probe block PB mounted on the probe unit PU1-3.

In the above example, after the first probe unit PU1 is disposed at a position corresponding to the electrode pad provided on the 65-inch display panel by the control unit, the probe block PB is mounted on the first probe unit PU1 . However, the present invention is not necessarily limited thereto, and after the probe block PB is mounted on the first probe unit PU1 , the first probe unit PU1 on which the probe block PB is mounted. It may be disposed at a position corresponding to the electrode pad provided on the 65-inch display panel.

As shown in FIG. 24 , when the mounting of the probe block PB for inspection of the 65-inch display panel on the first probe unit PU1 is completed, the first probe unit PU1 is shown in FIG. 25 . As described above, it is rotated 180 degrees by the rotation (R) of the support plate unit 210 .

After the first probe unit PU1 is rotated by the rotation of the support plate unit 210 , the electrode pad of the 65-inch display panel is moved to the first probe unit PU1 by the position movement of the vacuum adsorption module 140 . It comes into contact with the probe pin 3002 of the probe block PB mounted on the .

On the other hand, as shown in FIG. 26 , while the inspection on whether the 65-inch display panel is defective by the first probe unit PU1 is in progress, the second probe unit PU2 is the 55-inch display panel by the control unit. Prepare for inspection for defects.

The control unit includes a 2-2 probe unit PU2-2, a 2-3 probe unit PU2-3, and a 2-4 probe unit in a state in which the 2-1 probe unit PU2-1 is fixed. At least one of PU2-4 is moved so that the second probe unit PU2 is disposed at a position corresponding to the electrode pad provided in the 55-inch display panel.

For example, as shown in FIG. 26 , the control unit controls the second probe unit PU2 -2), the 2-3th probe unit PU2-3 and the 2-4th probe unit PU2-4 may be positionally moved on the support plate unit 210, and the positional movement may be performed in a linear motion. It may be a position movement by

The 2-2nd probe unit PU2-2 and the 2-3th probe unit PU2-3 may approach each other by a predetermined distance, and the 2-4th probe unit PU2-4 is connected to the second probe unit PU2-4. -1 A predetermined distance can be approached toward the probe unit PU2-1.

Here, the 2-4th probe unit PU2-4 is configured to prevent interference between the 2nd-2nd probe unit PU2-2 and the 2-3th probe unit PU2-3 during linear movement. , a positional movement may be implemented in the lower portions of the second-second probe unit PU2-2 and the second-third probe unit PU2-3.

When the position movement of the second probe unit PU2 is completed to inspect the 55-inch display panel as described above, the control unit determines that the selected probe block PB is transported and mounted by the 2-1 probe unit PU2-1. ), a prescribed mounting area SR on the second-second probe unit PU2-2, a prescribed mounting area SR on the 2-3-th probe unit PU2-3, and the second- 4 The carrying-out and mounting means is controlled so as to be mounted in a predetermined mounting area SR on the probe unit PU2-4.

As a result, as shown in FIG. 27 , the mounting of the probe block PB for inspection of the 55-inch display panel on the second probe unit PU2 is completed, and the 65-inch probe block PB is completed by the first probe unit PU1. When all of the display panels are inspected, the second probe unit PU2 is rotated 180 degrees as shown in FIG. 28 by the rotation R of the support plate unit 210 .

After the second probe unit PU2 is rotated by the rotation of the support plate unit 210 , the electrode pad of the 55-inch display panel is moved to the second probe unit PU2 by the position movement of the vacuum adsorption module 140 . It comes into contact with the probe pin 3002 of the probe block PB mounted on the .

Here, the probe block PB mounted on the first probe unit PU1 is moved to the probe block loading unit 3000 by the transport and mounting means, etc., and proceeds to a preparation mode for examining a display panel of another size. and the same process as above is repeated.

Meanwhile, in the above description, the electrode pad of the display panel DP to be inspected is formed on all four side surfaces as an example. It may be formed only on the side, and in this case, it will be natural that only a part of the probe unit required for inspection may be used.

The above contents are summarized as follows.

In the display panel inspection apparatus 200 according to the present invention, the display panel DP is inspected by selectively mounting the probe blocks PB required for inspection on the probe units PU1 and PU2, and another display panel This is a device that can improve the yield by performing inspection more conveniently through replacement of the probe block PB, etc.

To this end, the display panel inspection apparatus 200 may include a probe block assembly 2000 and a probe block loading unit 3000 , and the probe block assembly 2000 includes a plurality of probe block assemblies provided on a side surface of the display panel DP. and a plurality of probe blocks PB in contact with electrode pads of the , and probe units PU1 and PU2 supporting the plurality of probe blocks PB.

Here, the plurality of probe blocks PB are selected from the probe blocks PB loaded in the probe block loading unit 3000 , respectively, in order to perform the inspection on the display panel DP, and then are taken out and the probes are carried out. It is mounted at a predetermined position on the units PU1 and PU2.

The probe units PU1 and PU2 may include a plurality of mounting regions SR for individually mounting the probe blocks PB, and among the plurality of mounting regions SR, the probe blocks PB are mounted. The mounting area SR to be mounted is selected based on the number and formation positions of the electrode pads of the display panel DP to be inspected.

Meanwhile, the probe units PU1 and PU2 may include a first probe unit PU1 and a second probe unit PU2 , and may be disposed on the first probe unit PU1 and the first probe unit PU1 . When the inspection of a specific display panel is completed by the probe block PB mounted on the are exchanged with each other, so that the second probe unit PU2 and the other display panel are inspected by the probe block PB mounted on the second probe unit PU2.

The above-mentioned probe block assembly 2000 is an assembly capable of performing an inspection of the display panel DP by mounting a plurality of probe blocks PB necessary for inspection of the display panel DP on a probe unit as needed. Therefore, both may be applicable to an apparatus for inspecting the display panel DP in a face-down or face-up manner.

In this case, the control method of the probe block assembly 2000 includes determining whether at least one type of display panel included in the mother panel MP is defective among the display panel, wherein the display panel includes a plurality of electrode pads formed along the side surface. A first step of detecting the number and formation positions of a plurality of electrode pads of a first display panel that needs to be tested A second step of selecting a probe block, a third step of selecting a mounting area in which the probe block is to be mounted from among mounting areas on the probe unit based on the detection result of the first step, and applying the selected probe block to the probe It may include a fourth step of taking out the block loading unit and mounting it in the selected mounting area.

Here, in the fourth step, after the inspection of the first display panel is completed, when at least one of the probe blocks mounted on the mounting area is unnecessary or needs to be replaced, for the inspection of the second display panel having a different size, the It may include selecting an unnecessary or replacement probe block, then taking it out and loading it in the probe block loading unit.

In addition, in the fourth step, after the inspection of the first display panel is completed, when an additional probe block is required for inspection of a second display panel having a different size, the addition of the probe block loaded in the probe block loading unit is performed. The method may include selecting a probe block, selecting a mounting region in which the additional probe block is to be mounted, and then mounting the selected additional probe block to the selected mounting region.

Accordingly, the probe block assembly can be inspected for defects in numerous types of display panels due to replacement of the probe block.

29 is a view for explaining another method in which power is applied to a probe pin provided in a probe block.

Referring to FIG. 29 , the connection between the connection terminal 3106 of the probe block PB′ and the power applying unit 3109 may be implemented by a method such as a socket.

Here, the carrying-out and mounting means grips the main body 3104 and the connection terminal 3106 when carrying out the probe block PB' from the probe block loading unit 3000, and then attaches the main body 3104 to the probe unit. While seated in the region, the connection terminal 3106 is inserted into the power applying unit 3109 to realize electrical connection between the connection terminal 3106 and the power applying unit 3109 .

30 and 31 are diagrams for explaining a method for fixing or separating a probe block on a probe unit.

Referring to FIG. 30 , the mounting regions of the probe unit may be partitioned from each other by the partition wall W, and the probe block PB is fixed in position by the first fixing means 3200 and the second fixing means 3300 . and separation may be possible.

The first fixing means 3200 may be movable in the height direction D3, and when it moves downward in the height direction D3, the second fixing means 3300 is rotated based on the hinge, so that the probe block ( PB) can be separated.

Referring to FIG. 31 , the position fixation and separation of the probe block PB may be possible by the third fixing means 3400 , and the probe block PB is pressed by the sliding of the third fixing means 3400 . The pressing means 3500 is rotated, so that the separation of the probe block PB is possible.

5. 디스플레이 패널 검사 설비 내에서의 원장 패널의 이송에 대한 안정성 및 정확성5. Stability and accuracy of transport of ledger panels within display panel inspection facilities

In the above, after the director panel MP adsorbed to the stage module 110 in the display panel inspection facility 1000 is finally transferred to the vacuum adsorption module 140 by the transfer module 120 and the picker module 130 . , it has been described that the inspection of whether the display panel DP is defective is in progress.

Specifically, the display panel DP provided in the mother panel MP is adsorbed by the adsorption unit 114 on the stage unit 112 of the stage module 110 and the transfer unit 122 of the transfer module 120 is adsorbed. ), adsorption by the adsorption unit 124 on the picker module 130, adsorption by the adsorption unit 132 on the picker unit 134 of the picker module 130, and the adsorption unit 144 on the vacuum adsorption unit 142 of the vacuum adsorption module 140 ) is sequentially implemented to check for defects.

Here, the stage module 110 , the transfer module 120 , the picker module 130 , and the vacuum adsorption module 140 are all ledgers in terms of the adsorption function for the other surface SF2 of the ledger panel MP. It can be common to a panel adsorption device. Hereinafter, a principle in which the fall of the ledger panel MP can be prevented even when an abnormal situation occurs when the led panel adsorption device is adsorbed will be described in detail.

(1) 원장 패널 흡착 장치로서의 스테이지 모듈(1) Stage module as a led panel adsorption device

As described with reference to FIG. 8 , the stage module 110 may include a plurality of stage units 112 spaced apart from each other.

The stage unit 112 may include a plurality of adsorption units 114 for adsorbing the mother panel MP, respectively.

The plurality of stage units 112 may be divided into a plurality of combinations including at least one, and the adsorption function may be individually controlled by each of the plurality of combinations.

For example, the plurality of stage units 112 may be formed in a total of nine, and each of the plurality of stage units 112 is divided into one combination, so that each of the plurality of stage units 112 is individually controlled. can be

The plurality of stage units 112 can be divided into a total of nine combinations.

Here, the plurality of adsorption units 114 provided in one stage unit 112 may be controlled in common.

Each of the plurality of stage units 112 may include a vacuum line for implementing an adsorption function, and the plurality of combinations may each share the vacuum line.

The vacuum line may be connected to a vacuum generating means for vacuum adsorption, and any known means may be applied to the vacuum generating means.

Each of the nine combinations share a vacuum line and are individually controlled, and when the adsorption unit 114 included in a specific combination loses the adsorption function, it is reversed by the adsorption function of the adsorption unit 114 included in another combination. The fall of the ledger panel MP which adsorbed the other surface SF2 can be prevented in advance.

Of course, a situation in which the ledger panel MP is adsorbed in an inverted state by the stage module 110 may be a situation in which the ledger panel MP is adsorbed in a normal state and then rotated.

For another example, the plurality of stage units 112 may be formed of a total of nine, and the plurality of stage units 112 may be formed by a combination of two outermost units, and the other two in the inner direction. can be made by a combination of

In this case, a single stage unit 112 at the center may be formed in one combination, and the plurality of stage units 112 may be divided into a total of five combinations.

Each of the five combinations share a vacuum line and are individually controlled, and when the adsorption unit 114 included in a specific combination loses the adsorption function, it is reversed by the adsorption function of the adsorption unit 114 included in another combination. The fall of the ledger panel MP which adsorbed the other surface SF2 can be prevented in advance.

In addition to the above combination, various combinations may be made, which may be variously changed according to the size of the ledger panel MP.

On the other hand, the vacuum line may be shared based on the adsorption unit 114 rather than a combination, for example, a separate vacuum line is connected to each adsorption unit 114, so that each adsorption unit 114 may be individually controlled. .

(2) 원장 패널 흡착 장치로서의 이송 모듈(2) Transfer module as a ledger panel adsorption device

As described with reference to FIGS. 11 to 14 , the transfer module 120 is inserted into the first space S1 when the stage module 110 is rotated and the ledger panel MP is changed from a normal state to an inverted state. and adsorbs the other surface SF2 of the mother panel MP disposed in the inverted state, but may include a plurality of transfer units 122 for preventing the central portion of the mother panel MP from sagging due to its own weight. .

Here, each of the plurality of transfer units 122 may include an adsorption unit 124 spaced apart from each other to adsorb the other surface SF2 .

The plurality of transfer units 122 may be divided into a plurality of combinations including at least one, and the adsorption function may be individually controlled by each of the plurality of combinations.

For example, the plurality of transfer units 122 may be formed of a total of eight, and each of the plurality of transfer units 122 is divided into one combination, so that each of the plurality of transfer units 122 is individually controlled can be

The plurality of transfer units 122 can be divided into a total of eight combinations.

Here, the plurality of adsorption units 124 provided in one transfer unit 122 may be controlled in common.

The plurality of transfer units 122 may each include a vacuum line for implementing an adsorption function, and the plurality of combinations may each share the vacuum line.

Each of the eight combinations share a vacuum line and are individually controlled, and when the adsorption unit 124 included in a specific combination loses the adsorption function, it is reversed by the adsorption function of the adsorption unit 124 included in another combination. The fall of the ledger panel MP which adsorbed the other surface SF2 can be prevented in advance.

For another example, the plurality of transfer units 122 may be formed of a total of eight, and the plurality of transfer units 122 are formed by a combination of two of the outermost units, and two each in the inner direction. can be made by a combination of

The plurality of stage units 112 may be divided into a total of four combinations.

Each of the four combinations share a vacuum line and are individually controlled, and when the adsorption unit 124 included in a specific combination loses the adsorption function, it is reversed by the adsorption function of the adsorption unit 124 included in another combination. The fall of the ledger panel MP which adsorbed the other surface SF2 can be prevented in advance.

On the other hand, the vacuum line may be shared based on the adsorption unit 124 rather than the combination, for example, a separate vacuum line is connected to each adsorption unit 124, so that each adsorption unit 124 may be individually controlled. .

(3) 원장 패널 흡착 장치로서의 픽커 모듈(3) Picker module as led panel adsorption device

As described with reference to FIGS. 15 to 17 , the picker module 130 uniformly adsorbs the other surface SF2 of the ledger panel MP to prevent sagging. may include

The plurality of picker units 134 may be divided into a plurality of combinations including at least one, and the adsorption function may be individually controlled by each of the plurality of combinations.

For example, the plurality of picker units 134 may be formed in a total of seven, and each of the plurality of picker units 134 is divided into one combination, so that each of the plurality of picker units 134 is individually controlled. can be

The plurality of picker units 134 may be divided into a total of seven combinations.

Here, the plurality of adsorption units 132 provided in one picker unit 134 may be controlled in common.

The plurality of picker units 134 may each include a vacuum line for implementing an adsorption function, and the plurality of combinations may each share the vacuum line.

Each of the seven combinations share a vacuum line and are individually controlled, and when the adsorption unit 132 included in a specific combination loses the adsorption function, it is reversed by the adsorption function of the adsorption unit 132 included in another combination. The fall of the ledger panel MP which adsorbed the other surface SF2 can be prevented in advance.

As another example, the plurality of picker units 134 may be formed in a total of seven, and the plurality of picker units 134 are formed by a combination of two outermost picker units, and two picker units 134 in the inner direction. can be made by a combination of

In this case, a single picker unit 134 at the center may be formed as one combination, and the plurality of picker units 134 may be divided into a total of four combinations.

Each of the four combinations share a vacuum line and are individually controlled, and when the adsorption unit 132 included in a specific combination loses the adsorption function, it is reversed by the adsorption function of the adsorption unit 132 included in another combination. The fall of the ledger panel MP which adsorbed the other surface SF2 can be prevented in advance.

On the other hand, the vacuum line may be shared based on the adsorption unit 132 rather than a combination, for example, a separate vacuum line is connected to each adsorption unit 132, and each adsorption unit 132 may be individually controlled. .

(4) 원장 패널 흡착 장치로서의 진공흡착 모듈(4) Vacuum adsorption module as a led panel adsorption device

As described with reference to FIG. 19 , the vacuum adsorption module 140 may include a plurality of vacuum adsorption units 142 spaced apart from each other so as to uniformly adsorb the other surface SF2 of the mother panel MP. have.

The complex vacuum adsorption unit 142 may be divided into a plurality of combinations including at least one, and an adsorption function may be individually controlled by each of the plurality of combinations.

Since the individual control of the adsorption function is the same as that of the picker module 130 , a detailed description thereof will be omitted.

In the above, the display panel DP provided in the mother panel MP is adsorbed by the adsorption unit 114 on the stage unit 112 of the stage module 110, and the transfer unit 122 of the transfer module 120 is adsorbed. Adsorption by the adsorption unit 124 of the bed, adsorption by the adsorption unit 132 on the picker unit 134 of the picker module 130, and the adsorption unit 144 on the vacuum adsorption unit 142 of the vacuum adsorption module 140 It has been explained that stable and accurate transfer of the ledger panel (MP) is realized even if a non-ideal situation occurs by individual control of adsorption in the process of sequentially implementing adsorption by .

In the above, the configuration and features of the present invention have been described based on the embodiments according to the present invention, but the present invention is not limited thereto, and it is understood that various changes or modifications can be made within the spirit and scope of the present invention. It is intended that such changes or modifications will be apparent to those skilled in the art, and therefore fall within the scope of the appended claims.

Claims

One surface of the mother panel - The one surface is provided with at least one type of display panel on which an organic material layer is deposited for forming an organic light emitting layer - Whether the display panel is defective by adsorbing the other surface opposite to the one surface in a state facing downward In the led panel adsorption device to be inspected,

The ledger panel adsorption device,

A stage module for adsorbing and fixing the other surface with the one surface facing upward in a normal state - The stage module includes a plurality of stage units for preventing the mother panel from sagging at the center by its own weight, the mother panel The display panel is rotated to be in an inverted state in which the one surface faces downward in the normal state - After adsorbing the other surface changed from the normal state to the inverted state on the display panel, the mother panel is maintained in the inverted state Includes a transport module for transporting to a location for inspection for defects,

The plurality of stage units,

They are respectively spaced apart from each other to form a first space therebetween,

The transfer module is

When the stage module is rotated to change the state of the mother panel from the normal state to the inverted state, it is inserted into the first space to adsorb the other surface disposed in the inverted state, and the mother panel loses its own weight to the central portion. It includes a plurality of conveying units to prevent sagging,

Each of the plurality of transfer units,

and an adsorption unit disposed to be spaced apart to adsorb the other surface,

The plurality of transfer units,

It is divided into a plurality of combinations including at least one, and the adsorption function is individually controlled with each of the plurality of combinations, so that when the adsorption unit included in a specific combination loses the adsorption function, the adsorption function of the adsorption unit included in another combination is determined. Led panel adsorption device, characterized in that it prevents the fall of the ledger panel adsorbing the other surface in the inverted state by the
According to claim 1,

The plurality of transfer units,

Each includes a vacuum line for implementing the adsorption function,

A combination of the plurality of

Ledger panel adsorption device, characterized in that each share the vacuum line.
One surface of the mother panel - The one surface is provided with at least one type of display panel on which an organic material layer is deposited for forming an organic light emitting layer - Whether the display panel is defective by adsorbing the other surface opposite to the one surface in a state facing downward In the led panel adsorption device to be inspected,

The ledger panel adsorption device,

A stage module for adsorbing and fixing the other surface with the one surface facing upward in a normal state - The stage module includes a plurality of stage units for preventing the mother panel from sagging at the center by its own weight, the mother panel The display panel is rotated to be in an inverted state in which the one surface faces downward in the normal state - After adsorbing the other surface changed from the normal state to the inverted state on the display panel, the mother panel is maintained in the inverted state Includes a transport module for transporting to a location for inspection for defects,

The plurality of stage units,

They are respectively spaced apart from each other to form a first space therebetween,

The transfer module is

When the stage module is rotated to change the state of the mother panel from the normal state to the inverted state, it is inserted into the first space to adsorb the other surface disposed in the inverted state, and the mother panel loses its own weight to the central portion. It includes a plurality of conveying units to prevent sagging,

Each of the plurality of transfer units,

and an adsorption unit disposed to be spaced apart to adsorb the other surface,

The adsorption unit provided in each of the plurality of transfer units,

The adsorption function is individually controlled, and when a specific adsorption unit loses the adsorption function, the mother panel adsorption, characterized in that it prevents the fall of the mother panel adsorbing the other surface in the inverted state by the adsorption function of another adsorption unit Device.
One surface of the mother panel - The one surface is provided with at least one type of display panel on which an organic material layer is deposited for forming an organic light emitting layer - Whether the display panel is defective by adsorbing the other surface opposite to the one surface in a state facing downward In the led panel adsorption device to be inspected,

The ledger panel adsorption device,

A stage module for adsorbing and fixing the other surface with the one surface facing upward in a normal state - The stage module includes a plurality of stage units for preventing the mother panel from sagging at the center by its own weight, the mother panel The display panel is rotated to be in an inverted state in which the one surface faces downward in the normal state - After adsorbing the other surface changed from the normal state to the inverted state on the display panel, the mother panel is maintained in the inverted state By the transfer module for transferring to the first position for inspection on whether or not the defect of Vacuum adsorption module - The vacuum adsorption module allows the inspection of whether the display panel is defective by interaction with the probe unit equipped with the probe block - so that the ledger panel maintains the inverted state and a picker module for checking whether the display panel is defective due to the interaction by adsorbing the other surface,

The picker module is

and a plurality of picker units spaced apart from each other so as to uniformly adsorb the other surface of the mother panel,

The plurality of picker units,

Divided based on the adsorption unit spaced apart horizontally or vertically, divided into a plurality of combinations including at least one, and the adsorption function is individually controlled with each of the plurality of combinations, so that the adsorption unit included in the specific combination is the adsorption When the function is lost, the mother panel adsorption device, characterized in that the fall of the mother panel adsorbing the other surface in the inverted state is prevented by the adsorption function of the adsorption unit included in the other combination.
5. The method of claim 4,

The plurality of picker units,

Each includes a vacuum line for implementing the adsorption function,

A combination of the plurality of

Ledger panel adsorption device, characterized in that each share the vacuum line.
One surface of the mother panel - The one surface is provided with at least one type of display panel on which an organic material layer is deposited for forming an organic light emitting layer - Whether the display panel is defective by adsorbing the other surface opposite to the one surface in a state facing downward In the led panel adsorption device to be inspected,

The ledger panel adsorption device,

A stage module for adsorbing and fixing the other surface with the one surface facing upward in a normal state - The stage module includes a plurality of stage units for preventing the mother panel from sagging at the center by its own weight, the mother panel The display panel is rotated to be in an inverted state in which the one surface faces downward in the normal state - After adsorbing the other surface changed from the normal state to the inverted state on the display panel, the mother panel is maintained in the inverted state By the transfer module for transferring to the first position for inspection on whether or not the defect of Vacuum adsorption module - The vacuum adsorption module allows the inspection of whether the display panel is defective by interaction with the probe unit equipped with the probe block - so that the ledger panel maintains the inverted state and a picker module for checking whether the display panel is defective due to the interaction by adsorbing the other surface,

The picker module is

and a plurality of picker units spaced apart from each other so as to uniformly adsorb the other surface of the mother panel,

The plurality of picker units,

Each of the adsorption functions is individually controlled, so that when a specific picker unit loses the adsorption function, the led panel adsorbing the other surface in the inverted state is prevented from falling by the adsorption function of another picker unit. Ledger panel adsorption device.
One surface of the mother panel - The one surface is provided with at least one type of display panel on which an organic material layer is deposited for forming an organic light emitting layer - Whether the display panel is defective by adsorbing the other surface opposite to the one surface in a state facing downward In the led panel adsorption device to be inspected,

The ledger panel adsorption device,

A stage module for adsorbing and fixing the other surface with the one surface facing upward in a normal state - The stage module includes a plurality of stage units for preventing the mother panel from sagging at the center by its own weight, the mother panel The display panel is rotated to become an inverted state in which the one surface faces downward in the normal state - After adsorbing the other surface changed from the normal state to the inverted state on the display panel, the mother panel is maintained in the inverted state After adsorbing the other surface of the ledger panel, which has been moved to the first position by a transfer module for transferring it to the first position for checking whether the and a vacuum adsorption module for inspecting whether the display panel is defective by interaction of the led panel, which has been moved to the second position by the picker module, with a probe unit equipped with a probe block;

The vacuum adsorption module,

and a plurality of vacuum adsorption units arranged to be spaced apart from each other so as to uniformly adsorb the other surface of the mother panel,

The plurality of vacuum adsorption units,

Divided based on the adsorption unit spaced apart horizontally or vertically, divided into a plurality of combinations including at least one, and the adsorption function is individually controlled with each of the plurality of combinations, so that the adsorption unit included in the specific combination is the adsorption When the function is lost, the mother panel adsorption device, characterized in that the fall of the mother panel adsorbing the other surface in the inverted state is prevented by the adsorption function of the adsorption unit included in the other combination.
8. The method of claim 7,

The plurality of picker units,

Each includes a vacuum line for implementing the adsorption function,

A combination of the plurality of

Ledger panel adsorption device, characterized in that each share the vacuum line.
One surface of the mother panel - The one surface is provided with at least one type of display panel on which an organic material layer is deposited for forming an organic light emitting layer - Whether the display panel is defective by adsorbing the other surface opposite to the one surface in a state facing downward In the led panel adsorption device to be inspected,

The ledger panel adsorption device,

A stage module for adsorbing and fixing the other surface with the one surface facing upward in a normal state - The stage module includes a plurality of stage units for preventing the mother panel from sagging at the center by its own weight, the mother panel The display panel is rotated to be in an inverted state in which the one surface faces downward in the normal state - After adsorbing the other surface changed from the normal state to the inverted state on the display panel, the mother panel is maintained in the inverted state After adsorbing the other surface of the ledger panel, which has been moved to the first position by a transfer module for transferring it to the first position for checking whether the and a vacuum adsorption module for inspecting whether the display panel is defective by interaction of the mother panel moved to the second position by the picker module with a probe unit equipped with a probe block,

The vacuum adsorption module,

and a plurality of vacuum adsorption units arranged to be spaced apart from each other so as to uniformly adsorb the other surface of the mother panel,

The plurality of vacuum adsorption units,

Each of the adsorption functions is individually controlled, so that when a specific picker unit loses the adsorption function, the led panel adsorbing the other surface in the inverted state is prevented from falling by the adsorption function of another picker unit. Ledger panel adsorption device.