WO2021153854A1

WO2021153854A1 - Gas sensor using mim structure, and gas detection apparatus comprising same

Info

Publication number: WO2021153854A1
Application number: PCT/KR2020/007340
Authority: WO
Inventors: 안성훈; 김영균; 조영균
Original assignee: 서울대학교산학협력단
Priority date: 2020-01-28
Filing date: 2020-06-05
Publication date: 2021-08-05
Also published as: KR20210096501A; KR102338846B1; KR20210111719A; KR102298686B1

Abstract

The present invention relates to a gas sensor using an MIM structure, and a gas detection apparatus comprising same, the gas sensor using an MIM structure comprises: a first metal layer; an insulator layer which is arranged below the first metal layer and which is optically transparent or semitransparent; and a second metal layer which is provided below the insulator layer and which is glossy, wherein: the thickness of the first metal layer changes by mean of the reaction of the first metal layer and a gas or the refractive index of the insulator layer changes by means of the reaction of the insulator layer and a gas; the thickness of the first metal layer changes by means of the gas so that color is displayed or the refractive index of the insulator layer changes by means of the gas so that color is displayed; and the gas detection apparatus comprising the gas sensor using an MIM structure comprises the gas sensor, a gas permeable layer which is provided on the gas sensor and through which gas passes, and a main body part to which the gas sensor is attached.

Description

Gas sensor using MIM structure and gas detection device including same

The present invention relates to a gas sensor using a MIM structure and a gas detection device including the same, and more particularly, it includes a first metal layer whose thickness changes by reacting with a gas and an insulator layer whose refractive index changes by reacting with the gas. The present invention relates to a gas sensor using a MIM structure in which a color is displayed by a gas detected by using the MIM structure, and a gas detection device including the same.

NO _X gas is a harmful gas that can cause problems in various respiratory diseases, including lung disease, when exposed to more than several hundred PPM to humans, and it is a gas that requires sensing and purification.

In _{order to sense NO x} gas, a NO _x gas sensor is used, and _{most conventional NO x} gas sensors are made using a semiconductor material such as _{WO 3 and a MOFSET structure.} Looking at the operation method of the conventional NO _{X gas as follows.}

In the conventional NO _X gas sensor _{, a circuit is made of a material such as WO 3} , and a separate heating device passes through the circuit. When NO _X gas passes through it, the circuit part is doped, and at this time, the resistance value of the circuit changes and this change is amplified in a structure such as a MOFSET to measure _{NO X gas.}

The conventional NO _X gas sensor has an advantage of high sensitivity, but has a disadvantage that a separate heating device and a separate measuring device for measuring the current flowing in the circuit are required to construct the device.

In general industrial fields, but also need to precisely measure the NO _X gas may occur may need simply measure the NO _X gas. _{In this case, it is not suitable to manufacture and use a conventional NO X} gas sensor that requires a separate heating device and measuring equipment. Therefore, a gas sensor that is easy to manufacture while simply measuring gas is required.

The present invention is to solve the above problems, and more specifically, by using a MIM structure including a first metal layer whose thickness is changed by reacting with gas and an insulator layer whose refractive index is changed by reacting with gas, sensing It relates to a gas sensor using a MIM structure in which a color is displayed by a gas, and a gas detection device including the same.

A gas sensor using the MIM structure of the present invention for solving the above-described problems, a first metal layer; an insulator layer disposed under the first metal layer and having optically transparent or translucent properties; It is provided under the insulator layer and includes a second metal layer having a luster, and the thickness of the first metal layer is changed by reacting with the gas, or the refractive index is changed by the gas of the insulator layer reacting with the gas. It is characterized in that the color is displayed by changing the thickness of the first metal layer, or by changing the refractive index of the insulator layer by the gas.

The thickness of the first metal layer of the gas sensor using the MIM structure of the present invention for solving the above-described problems may be changed while being corroded by the gas.

The thickness of the insulator layer of the gas sensor using the MIM structure of the present invention for solving the above problems may be 10 to 1000 nm.

The thickness of the first metal layer of the gas sensor using the MIM structure of the present invention for solving the above problems may be 5 to 50 nm.

The thickness of the second metal layer of the gas sensor using the MIM structure of the present invention for solving the above problems may be 5 nm or more.

The thickness of the first metal layer is changed by reacting with the first metal layer of the gas sensor using the MIM structure of the present invention for solving the above problems, or the refractive index of the insulator layer is changed by reacting with the insulator layer. The changing gas may be a corrosive gas including any one or more _{of NO X ,} SO _X , HF and NH _{4 .}

The first metal layer and the second metal layer of the gas sensor using the MIM structure of the present invention for solving the above problems may be made of any one of Ag, Sn, Ni, Al, Pt, and Au. there is.

The insulator layer of the gas sensor using the MIM structure of the present invention for solving the above problems is, SiO ₂ , WO ₃ , TiO ₂ , Cr Doped TiO ₂ , Al ₂ O ₃ , PO ₃ , Hydrogel, Nafion any can be made into one.

The gas sensor using the MIM structure of the present invention for solving the above-described problems may further include a base layer provided with an adhesive.

A gas detection apparatus including a gas sensor using the MIM structure of the present invention for solving the above-described problems, the gas sensor; When provided on the gas sensor, a gas permeable layer through which the gas; a body portion to which the gas sensor is attached, wherein the gas sensor includes: a first metal layer; an insulator layer disposed under the first metal layer and having optically transparent or translucent properties; It is provided under the insulator layer and includes a second metal layer having a luster, and the thickness of the first metal layer is changed by reacting with the gas, or the refractive index is changed by the gas of the insulator layer reacting with the gas. It is characterized in that the color is displayed by changing the thickness of the first metal layer, or by changing the refractive index of the insulator layer by the gas.

The present invention relates to a gas sensor using a MIM structure and a gas detection device including the same, comprising: a MIM structure including a first metal layer whose thickness is changed by reacting with a gas and an insulator layer whose refractive index is changed by reacting with the gas There is an advantage in that gas can be easily detected without a separate measuring device as it is used to detect gas.

The present invention has an advantage in that power consumption and heat generation are small because a separate heating device is not required, and the present invention has an advantage of high industrial applicability due to low manufacturing cost.

1 is a diagram showing the configuration of a gas sensor using a MIM structure according to an embodiment of the present invention.

2 is a view showing the thickness of the first metal layer and the insulator layer of the gas sensor using the MIM structure according to an embodiment of the present invention.

3 (a) and 3 (b) are diagrams showing the material of each layer of the gas sensor using the MIM structure according to an embodiment of the present invention.

4 is a diagram illustrating an analysis of the MIM structure according to an embodiment of the present invention by a time domain finite difference method (FDTD).

5 is a diagram illustrating an absorption pick according to a thickness of an insulator layer according to an embodiment of the present invention.

6 is a diagram illustrating a color change implemented in a gas sensor according to a thickness of an insulator layer according to an embodiment of the present invention.

7 is a diagram illustrating that a gas sensor using a MIM structure is provided in a portable device according to an embodiment of the present invention.

Figure 8 is a view showing that the gas sensor using the MIM structure in the garment according to an embodiment of the present invention is provided.

A gas sensor using the MIM structure according to an embodiment of the present invention includes a first metal layer; an insulator layer disposed under the first metal layer and having optically transparent or translucent properties; It is provided under the insulator layer and includes a second metal layer having a luster, and the thickness of the first metal layer is changed by reacting with the gas, or the refractive index is changed by the gas of the insulator layer reacting with the gas. It is characterized in that the color is displayed by changing the thickness of the first metal layer, or by changing the refractive index of the insulator layer by the gas.

A gas detection apparatus including a gas sensor using a MIM structure according to an embodiment of the present invention includes: a gas sensor; When provided on the gas sensor, a gas permeable layer through which the gas; a body portion to which the gas sensor is attached, wherein the gas sensor includes: a first metal layer; an insulator layer disposed under the first metal layer and having optically transparent or translucent properties; It is provided under the insulator layer and includes a second metal layer having a luster, and the thickness of the first metal layer is changed by reacting with the gas, or the refractive index is changed by the gas of the insulator layer reacting with the gas. It is characterized in that the color is displayed by changing the thickness of the first metal layer, or by changing the refractive index of the insulator layer by the gas.

This specification clarifies the scope of the present invention, explains the principles of the present invention, and discloses embodiments so that those of ordinary skill in the art to which the present invention pertains can practice the present invention. The disclosed embodiments may be implemented in various forms.

Expressions such as “comprises” or “may include” that may be used in various embodiments of the present invention indicate the existence of a corresponding disclosed function, operation, or component, and may include one or more additional functions, operations, or components, etc. are not limited. In addition, in various embodiments of the present invention, terms such as "comprise" or "have" are intended to designate that a feature, number, step, action, component, part, or combination thereof described in the specification is present, It should be understood that it does not preclude the possibility of addition or existence of one or more other features or numbers, steps, operations, components, parts, or combinations thereof.

When a component is referred to as being “connected to and coupled to” another component, the component may be directly connected or coupled to the other component, but between the component and the other component. It should be understood that there may be other new components in the . On the other hand, when an element is referred to as being "directly connected" or "directly coupled" to another element, it will be understood that no new element exists between the element and the other element. should be able to

The terms first, second, etc. used herein may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another.

The present invention relates to a gas sensor using a MIM structure and a gas detection device including the same, comprising: a MIM structure including a first metal layer whose thickness is changed by reacting with a gas and an insulator layer whose refractive index is changed by reacting with the gas The present invention relates to a gas sensor using a MIM structure in which a color is displayed by a gas to be sensed according to use, and a gas detection device including the same.

The gas detected by the gas sensor using the MIM structure according to an embodiment of the present invention and the gas detection device including the same may be a corrosive gas including _{NO X,} SO _X , HF, NH _{4, etc., but is limited thereto} No, any gas capable of changing the thickness of the first metal layer by reacting with the first metal layer or changing the refractive index of the insulator layer by reacting with the insulator layer may be various gases. Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Referring to FIG. 1 , a gas sensor 100 using a MIM structure according to an embodiment of the present invention includes a first metal layer 110 , an insulator layer 120 , and a second metal layer 130 .

The gas sensor 100 using the MIM structure according to the embodiment of the present invention uses a MIM structure consisting of a metal-insulator-metal structure, and the visible light region through the MIM structure. Light (color) can be realized by selectively absorbing light in some wavelength bands.

Specifically, referring to FIG. 2 , when white light 10 is irradiated to the MIM structure according to the embodiment of the present invention, the light trapped between the two metal mirror layers (the first metal layer and the second metal layer) is the insulator layer. At the same time, the reflection color 20 may be realized by selectively absorbing light of a partial wavelength band in the visible ray region in the metal mirror layer (the first metal layer and the second metal layer).

The thickness of the first metal layer 110 of the gas sensor 100 using the MIM structure according to an embodiment of the present invention may be changed by reacting with a gas, and the thickness of the first metal layer 110 may be changed. Accordingly, a color change may be recognized as the wavelength band of the absorbed light is changed.

In addition, the refractive index of the insulator layer 120 of the gas sensor 100 using the MIM structure according to an embodiment of the present invention may be changed by reacting with a gas, and as the refractive index of the insulator layer 120 is changed, A color may be realized as the wavelength band of the absorbed light is changed.

To this end, the first metal layer 110 may be made of a metal whose thickness is changed by reacting with the gas, and the insulator layer 120 may be made of a material whose refractive index is changed by reacting with the gas.

The first metal layer 110 may be made of a metal whose thickness is changed by reacting with a gas, and the thickness of the first metal layer 110 may be changed while being corroded by the gas. However, the present invention is not limited thereto, and the thickness of the first metal layer 110 may be changed due to chemical reaction with other gases in addition to corrosion.

In order to confine the light of the white light 10 irradiated between the first metal layer 110 and the second metal layer 130 , the first metal layer 110 may be made of a metal having gloss and reflectivity.

Specifically, the first metal layer 110 may be made of any one of Ag, Sn, Ni, Al, Pt, and Au. However, the first metal layer 110 is not limited thereto, and may be a variety of metals as long as the thickness is changed by chemical reaction with the gas and has gloss and reflectivity.

The insulator layer 120 is disposed under the first metal layer 110 and is optically transparent or translucent. The insulator layer 120 is made of a ceramic or polymer having optical transparency, and the insulator layer 120 is SiO ₂ , WO ₃ , TiO ₂ , Cr Doped TiO ₂ , Al ₂ O ₃ , PO ₃ , Hydrogel or Nafion may be used.

The insulator layer 120 may change its refractive index by reacting with a gas. In the gas sensor 100 using the MIM structure according to an embodiment of the present invention, the refractive index of the insulator layer 120 is changed to change the color. Changes can be acknowledged.

That is, in the gas sensor 100 using the MIM structure according to the embodiment of the present invention, the thickness of the first metal layer 110 is changed by the gas to display a color change, or the insulator layer ( 120) is changed so that a color change can be displayed. The change in the thickness of the first metal layer 110 and the change in the refractive index of the insulator layer 120 are selectively combined, or the change in the thickness of the first metal layer 110 and the change in the refractive index of the insulator layer 120 are both used. and a color change may be displayed.

In the gas sensor 100 using the MIM structure according to an embodiment of the present invention, the thickness of the first metal layer 110 may be changed by reacting with the first metal layer 110 or the insulator layer 120 . The gas that reacts with and changes the refractive index of the insulator layer 120 may be a corrosive gas including at least one _{of NO X ,} SO _X , HF and NH _{4 .}

However, the gas is not limited thereto, and reacts with the first metal layer 110 to change the thickness of the first metal layer 110 or reacts with the insulator layer 120 to react with the insulator layer ( 120) can be various gases as long as the refractive index can be changed.

The second metal layer 130 is provided under the insulator layer 120 and has a luster. In order to confine the light of the white light 10 irradiated between the first metal layer 110 and the second metal layer 130 , the second metal layer 130 may be made of a metal having gloss and reflectivity.

Specifically, the second metal layer 130 may be made of any one of Ag, Sn, Ni, Al, Pt, and Au. However, the second metal layer 130 is not limited thereto, and as long as it is a metal having gloss and reflectivity, various metals may be used.

Referring to FIG. 1 , the gas sensor 100 using the MIM structure according to an embodiment of the present invention may further include a base layer 140 provided with an adhesive. The base layer 140 is for combining the gas sensor 100 using the MIM structure according to an embodiment of the present invention with other devices, and the base layer 140 is made of various materials such as glass, polymer, graphite, and the like. can

Referring to FIGS. 3A and 3B , the insulator layer 120 may include a plurality of layers. The insulator layer 120 may have a refractive index that is changed by a gas, and the insulator layer 120 may be formed of a plurality of layers to variously change the refractive index.

Referring to FIGS. 3A and 3B , the gas sensor 100 using the MIM structure according to an embodiment of the present invention may further include a gas permeable layer 160 . The gas permeable layer 160 may be provided on the first metal layer 110 , and gas may be introduced into the upper portion of the first metal layer 110 through the gas permeable layer 160 .

When the gas permeable layer 160 is formed, the gas sensor 100 using the MIM structure according to an embodiment of the present invention can be used as an indicator. Specifically, if the gas permeable layer 160 forms a permeable portion through which gas can pass in a designated shape, such as a warning phrase or a warning shape, a color can be expressed according to the shape of the permeable portion.

In addition, other substances may be filtered while passing only a designated gas through the gas permeable layer 160 . The gas permeable layer 160 may be formed of a membrane that allows only a designated gas to pass therethrough, and through this, other contaminants such as moisture and salt do not pass through, thereby protecting the gas sensor 100 .

The gas permeable layer 160 may be made of a material including a fluorine-coated fiber such as Gore-Tex, but is not limited thereto, and may be made of various materials as long as it can transmit gas without being damaged by the gas.

The thickness of the first metal layer 110 of the gas sensor 100 using the MIM structure according to an embodiment of the present invention is preferably 5 to 50 nm, and the thickness of the insulator layer 120 is 10 to It is preferably made of 1000 nm.

Since humans can recognize light (color) in the visible ray region, the gas sensor 100 using the MIM structure according to the embodiment of the present invention must implement the reflected color 20 in the visible ray region. For this, the thickness of the insulator layer 120 is preferably 10 to 1000 nm.

Specifically, when the thickness of the insulator layer 120 is a visible ray wavelength (800 nm or less), the gas sensor 100 can implement a reflected color in the visible ray region, but the thickness of the insulator layer 120 is excessively If it is thick (1000 nm or more), there is a problem in that visibility is not good as the color sharpness is lowered.

4 is a time domain finite difference method (FDTD) analysis of the MIM structure according to an embodiment of the present invention. Referring to FIG. 4, when the thickness of the insulator layer 120 is 10 to 400 nm, a clear absorption peak ( blue line). When the thickness of the insulator layer 120 exceeds 1000 nm, the overlap of the blue line may be severe, and the complex pick may be severe, and thus visibility may be deteriorated as the color sharpness is lowered.

If the thickness of the insulator layer 120 is too small (5 nm), it is difficult to manufacture the insulator layer 120 and it is difficult to realize the reflection color 20 in the visible ray region. The thickness is preferably greater than 5 nm.

The thickness of the first metal layer 110 is preferably 5 to 50 nm. When the thickness of the first metal layer 110 is 5 nm or more, the reflective color 20 may be realized in the visible ray region, and when the thickness of the first metal layer 110 is less than 5 nm, the reflective color is clear in the visible ray region. (20) is difficult to implement.

In addition, as described above, the thickness of the first metal layer 110 may be changed by reacting with the gas. There is a problem that it is difficult to play a role as a .

The thickness of the first metal layer 110 is preferably 50 nm or less. Referring to FIG. 5 , the width of color change decreases from the thickness of the first metal layer 110 of 35 nm or more, and the color is visually recognized as silver or gold due to total reflection with the naked eye. There is a difficult problem.

Also, referring to FIG. 6 , when the thickness of the first metal layer 110 is less than 5 nm or greater than 50 nm, resonance occurs between the first metal layer 110 and the second metal layer 130 . There is a problem in that color recognition does not occur because the phenomenon is reduced. Accordingly, the thickness of the first metal layer 110 is preferably 5 nm to 50 nm, and more preferably, the thickness of the first metal layer 110 is 5 nm to 35 nm.

The thickness of the second metal layer 130 is preferably 5 nm or more. Referring to FIG. 2 , since the second metal layer 130 can serve as a reflector, for this purpose, the thickness of the second metal layer 130 is preferably 5 nm or more. More preferably, it is good that it is 30 nm or more.

The gas sensor 100 using the MIM structure according to an embodiment of the present invention may include a separate heating device. The heating device is for increasing the reactivity with the gas, and as heat is applied through the heating device, the reactivity between the gas sensor and the gas may be improved.

The gas sensor 100 using the MIM structure according to an embodiment of the present invention changes the thickness of the first metal layer 110 or the refractive index of the insulator layer 120 according to the amount of exposure of the gas and the exposure time of the gas. that can change

Through this, the gas sensor 100 using the MIM structure according to the embodiment of the present invention may implement different colors in the gas sensor 100 according to the exposure amount of the gas and the exposure time of the gas. That is, the gas sensor 100 using the MIM structure according to an embodiment of the present invention can sense gas while changing the color according to the exposure amount of the gas and the exposure time of the gas.

A gas detection apparatus including a gas sensor using a MIM structure according to an embodiment of the present invention includes a gas sensor 100 , a gas permeable layer 160 , and a body part. A gas detection device including a gas sensor using a MIM structure according to an embodiment of the present invention is a detection device that can use the above-described gas sensor 100 . Since the gas sensor 100 is the same as the gas sensor 100 described above, a detailed description thereof will be omitted below.

The gas permeable layer 160 may selectively transmit gas through the gas sensor 100 . When the gas permeable layer 160 is formed, the gas sensor 100 can be used as an indicator. Specifically, if the gas permeable layer 160 forms a permeable portion through which a gas passes in a designated shape, such as a warning phrase or a warning shape, a color can be expressed according to the shape of the permeable portion.

In addition, only a designated gas passes through the gas permeable layer 160 , and other materials may be filtered out. The gas permeable layer 160 may be formed of a membrane that allows only a designated gas to pass therethrough, and through this, other contaminants such as moisture and salt do not pass through, thereby protecting the gas sensor 100 .

The body part is to which the gas sensor 100 is attached, and if the gas sensor 100 can be attached to the body part, the body part may have various configurations. Referring to FIG. 7 , the main body may be a portable detector 210 having a rod shape.

The gas sensor 100 may be coupled to the portable detector 210 through an adhesive 150 attached to the base layer 140, and is formed of a membrane to protect the gas sensor 100 from other contaminants. The gas permeable layer 160 may be formed.

The portable detector 210 may be manufactured in a rod shape so that a user can move, and as the user carries the portable detector 210, gas can be detected in various places.

Referring to FIG. 8 , the body part may be clothing 220 . The clothing 220 is to which the gas sensor 100 is attached, and a user who works in a hazardous area can check the amount of gas exposure through the clothing 220 .

When the body part is made of clothes 220 , the gas sensor 100 may be used as an indicator. A color is implemented by the gas sensor 100 according to the amount of exposure of the gas. At this time, the gas sensor 100 can be used as an indicator by implementing the color according to the warning phrase of the clothing 220 .

In the above description, the main body has been described with the portable detector 210 and the clothing 220, but the present invention is not limited thereto. .

In addition, the gas sensor 100 may be attached to the main body in various forms as long as the color change can be visually recognized.

For example, according to an embodiment of the present invention, the gas sensor 100 includes a transparent first basal layer and a second basal layer disposed to be spaced apart from the first basal layer, and provided with a first adhesive thereunder. The MIM structure including the first metal layer 110 , the insulator layer 120 , and the second metal layer 130 is attached to the upper portion of the second base layer through a second adhesive.

A gas permeable layer is formed on one side and the other side of the first base layer and the second base layer, and the gas permeable layer is formed by connecting the first base layer and the second base layer to a membrane capable of permeating gas, and the gas sensor 100 is It may be attached to the main body through the pressure-sensitive adhesive provided on the second base layer.

Since the first base layer is made of a transparent material, when a color change is recognized by the reaction of the MIM structure with the gas, the user can recognize it through the first base layer.

In the above description, a form in which the gas sensor 100 is attached to the main body has been described, but the present invention is not limited thereto. can be attached.

The gas sensor using the MIM structure and the gas detection device including the same according to the embodiment of the present invention described above have the following effects.

A gas sensor using a MIM structure and a gas detection device including the same according to an embodiment of the present invention have a MIM structure including a first metal layer whose thickness changes by reacting with a gas and an insulator layer whose refractive index changes by reacting with the gas. There is an advantage in that gas can be easily detected without a separate measuring device as gas is detected using

In addition, the conventional gas sensor necessarily requires a heating device, but the gas sensor using the MIM structure and the gas detection device including the same according to an embodiment of the present invention can change at room temperature, so a separate heating device is not required. Therefore, it has the advantage of low power consumption and heat generation.

In addition, the gas sensor using the MIM structure according to the embodiment of the present invention and the gas detection device including the same have the advantage of high industrial applicability due to low manufacturing cost, and the MIM structure according to the embodiment of the present invention. A gas sensor and a gas detection apparatus including the same have the advantage of being able to be variously applied to a mobile device or a wearable device.

As described above, the present invention has been described with reference to one embodiment shown in the drawings, but it will be understood that this is merely exemplary and that various modifications and variations of embodiments are possible therefrom by those skilled in the art. . Therefore, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

Claims

In a gas sensor that changes color when gas is detected,

a first metal layer;

an insulator layer disposed under the first metal layer and having optically transparent or translucent properties;

It is provided under the insulator layer and includes a second metal layer having a luster,

The thickness of the first metal layer is changed by reacting with the gas, or the refractive index of the insulator layer is changed by reacting with the gas,

The gas sensor using the MIM structure, characterized in that the color is displayed by changing the thickness of the first metal layer by the gas, or by changing the refractive index of the insulator layer by the gas.
According to claim 1,

The gas sensor using the MIM structure, characterized in that the thickness of the first metal layer is changed while being corroded by the gas.
According to claim 1,

The gas sensor using the MIM structure, characterized in that the thickness of the insulator layer is 10 to 1000 nm.
According to claim 1,

The gas sensor using the MIM structure, characterized in that the thickness of the first metal layer is 5 to 50 nm.
According to claim 1,

A gas sensor using a MIM structure, characterized in that the thickness of the second metal layer is 5 nm or more.
According to claim 1,

The gas reacting with the first metal layer to change the thickness of the first metal layer or reacting with the insulator layer to change the refractive index of the insulator layer is NO X, SO X , HF, NH 4 Any one or more A gas sensor using a MIM structure, characterized in that it is a corrosive gas comprising a.
According to claim 1,

The first metal layer and the second metal layer, Ag, Sn, Ni, Al, Pt, a gas sensor using a MIM structure, characterized in that made of any one of Au metal.
According to claim 1,

The insulator layer, SiO 2 , WO 3 , TiO 2 , Cr Doped TiO 2 , Al 2 O 3 , PO 3 Gas sensor using a MIM structure, characterized in that made of any one of Hydrogel, Nafion.
According to claim 1,

Gas sensor using the MIM structure, characterized in that it further comprises a base layer provided with an adhesive.
A gas detection device for detecting gas by sensing gas, comprising:

gas sensor;

When provided on the gas sensor, a gas permeable layer through which the gas;

and a body part to which the gas sensor is attached;

The gas sensor is

a first metal layer;

an insulator layer disposed under the first metal layer and having optically transparent or translucent properties;

It is provided under the insulator layer and includes a second metal layer having a luster,

The thickness of the first metal layer is changed by reacting with the gas, or the refractive index of the insulator layer is changed by reacting with the gas,

Gas detection apparatus including a gas sensor using a MIM structure, characterized in that the color is displayed by changing the thickness of the first metal layer by the gas, or the color is displayed by changing the refractive index of the insulator layer by the gas .