WO2021140774A1 - 焼成用セッター - Google Patents

焼成用セッター Download PDF

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Publication number
WO2021140774A1
WO2021140774A1 PCT/JP2020/044083 JP2020044083W WO2021140774A1 WO 2021140774 A1 WO2021140774 A1 WO 2021140774A1 JP 2020044083 W JP2020044083 W JP 2020044083W WO 2021140774 A1 WO2021140774 A1 WO 2021140774A1
Authority
WO
WIPO (PCT)
Prior art keywords
flat plate
firing setter
firing
skeleton
sic
Prior art date
Application number
PCT/JP2020/044083
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
二本松　浩明
伊藤　貴志
一輝 抜水
Original Assignee
日本碍子株式会社
エヌジーケイ・アドレック株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本碍子株式会社, エヌジーケイ・アドレック株式会社 filed Critical 日本碍子株式会社
Priority to JP2021516829A priority Critical patent/JPWO2021140774A1/ja
Priority to CN202080006828.1A priority patent/CN114945787A/zh
Priority to KR1020217014436A priority patent/KR20210091164A/ko
Publication of WO2021140774A1 publication Critical patent/WO2021140774A1/ja

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
    • C04B38/0051—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof characterised by the pore size, pore shape or kind of porosity
    • C04B38/0058—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof characterised by the pore size, pore shape or kind of porosity open porosity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00—Charging; Discharging; Manipulation of charge
    • F27D3/12—Travelling or movable supports or containers for the charge
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D5/00—Supports, screens or the like for the charge within the furnace
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D5/00—Supports, screens or the like for the charge within the furnace
    • F27D5/0006—Composite supporting structures
    • F27D5/0012—Modules of the sagger or setter type; Supports built up from them
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/42—Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
    • C04B2235/428—Silicon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C04B2235/9607—Thermal properties, e.g. thermal expansion coefficient
    • C04B2235/9623—Ceramic setters properties

Definitions

  • Patent Document 1 discloses a firing setter having a honeycomb structure (truss structure).
  • the firing setter of Patent Document 1 has a surface layer (mounting surface on which the object to be fired is placed) having a thickness of 50 to 2000 ⁇ m to ensure the strength of the mounting surface. Further, the intermediate layer between the front surface layer and the back surface layer has a honeycomb structure to reduce the heat capacity.
  • the firing setter of Patent Document 1 adopts a truss structure and secures the thickness of the surface layer, so that it exhibits sufficient strength under normal use conditions such as placing and removing the object to be fired. ..
  • a local impact is applied to the firing setter, such as when the firing setter itself is dropped, for example, the skeleton constituting the intermediate layer may be damaged. If a part of the skeleton is damaged, the durability (life) of the firing setter is reduced. It is an object of the present specification to provide a technique for realizing a highly durable firing setter.
  • the firing setter disclosed in the present specification is made of ceramics, connects a pair of flat plates facing each other at intervals, and connects the flat plates, and divides the flat plates into a plurality of compartments extending in one direction. It may be provided with a corrugated portion. Further, the open porosity of the skeleton constituting the flat plate portion and the corrugated portion may be less than 5%.
  • the perspective view of the firing setter of 1st Example is shown.
  • the plan view of the firing setter of 1st Example is shown.
  • a partially enlarged view of FIG. 2 is shown.
  • the concentration distribution of a specific element contained in the skeleton of the firing setter is shown.
  • the perspective view of the firing setter of the 2nd Example is shown.
  • the firing setter disclosed in the present specification is made of ceramics, and may include a pair of flat plate portions facing each other at intervals and a corrugated portion connecting the flat plate portions.
  • the corrugated portion may be divided into a plurality of sections extending in one direction between the flat plate portions. That is, the corrugated portion may form a plurality of through holes extending in one direction between the flat plate portions.
  • the corrugated portion has a corrugated plate shape, and the folded portion of the wave may be connected to the flat plate portion.
  • a substantially triangular truss structure may be formed by the flat plate portion and the corrugated portion.
  • the firing setter may be one in which the flat plate portion and the corrugated portion of separate parts are connected (joined), or the flat plate portion and the corrugated portion may be integrally molded. Further, the firing setter may have only one combination of a pair of flat plate portions and a corrugated portion (truss structure), or may have a plurality of the combinations. That is, the firing setter may be configured by one truss structure or may be configured by laminating a plurality of truss structures.
  • the porosity of the skeleton constituting the firing setter may be less than 5%, may be 4% or less, may be 3% or less, and may be 2% or less. It may be, and it may be 1% or less.
  • the porosity between the pair of flat plates may be 50% or more and 95% or less.
  • the porosity between the pair of flat plates may be 60% or more, 70% or more, or 80% or more.
  • the porosity between the pair of flat plates may be 90% or less, 80% or less, or 70% or less.
  • the porosity between the pair of flat plates can be calculated by the following formula. ⁇ (Space volume between a pair of flat plates)-(Volume of corrugated portion) ⁇ / (Space volume between a pair of flat plates) x 100
  • the porosity between the pair of flat plates can be adjusted by changing the thickness of the corrugated portion and the pitch of the wave folding portion of the corrugated portion. For example, in order to increase the porosity between a pair of flat plates, (1) increase the distance between the flat plates, (2) reduce the thickness of the corrugated portion, and (3) the folded portion of the wave of the corrugated portion. It suffices to carry out at least one of increasing the pitch of. Further, by (4) reducing the thickness of the flat plate portions, the distance between the flat plate portions can be substantially increased ((1) above). Usually, when (1) to (4) are carried out, the strength of the flat plate portion or the corrugated portion itself decreases.
  • the open porosity of the skeleton constituting the firing setter is less than 5%, the strength of the skeleton itself is increased, so that damage to the skeleton itself is suppressed and the durability of the firing setter is suppressed. Sex (lifetime) is improved.
  • the surface on which the object to be fired is placed may be composed of a plurality of sections formed by a flat plate portion and a corrugated portion, or may be composed of a flat plate portion.
  • the mounting surface is composed of the above-mentioned plurality of sections means that the surface of the firing setter (mounting) when the firing setter is viewed in a plan view (the mounting surface is observed from a direction orthogonal to the mounting surface). It means that the truss structure formed by the flat plate portion and the corrugated portion is observed on the placing surface).
  • the gas generated from the object to be fired can be easily moved to the outside of the object to be fired through the through hole. As a result, the object to be fired can be fired satisfactorily. Further, since the flat plate portion and the corrugated portion extend in the direction orthogonal to the mounting surface (vertical direction), the strength of the mounting surface can be ensured.
  • the mounting surface is composed of a flat plate portion, there are a plurality of through holes extending in one direction on the back surface side (corrugated portion) of the mounting surface. Therefore, the gas in the furnace passes through the back surface side of the mounting surface, and the in-plane temperature of the mounting surface can be made uniform. As a result, it is possible to suppress the occurrence of uneven firing on the object to be fired. Further, since the truss structure increases the strength in the thickness direction, the strength of the mounting surface can be secured.
  • the flat plate portion and the corrugated portion may be made of the same material.
  • the backbone of the firing setter (flat plate portions and the corrugated portion), alumina, mullite, ZrO 2 quality, SiC quality may be a Si-SiC membrane.
  • the “Si—SiC quality” means a material containing SiC particles as a main component (50% by mass or more of the total) and containing metallic Si between the SiC particles.
  • the open porosity of the surface portion of the skeleton constituting the firing setter can be lowered, and the strength of the firing setter is improved.
  • the Si—SiC material has a high thermal conductivity, the in-plane temperature of the mounting surface tends to be uniform.
  • the firing setter may be one in which the flat plate portion and the corrugated portion are integrally molded.
  • a firing setter for example, after forming a desired shape with a flammable material, an intermediate is formed by impregnating this material with a ceramic material (ceramic slurry), and the intermediate is fired.
  • Ceramic slurry ceramic slurry
  • flammable materials include paper, cloth, and resin. Depending on the flammable material used, the material components of the flammable material tend to remain inside the skeleton as compared with the surface portion of the skeleton constituting the firing setter.
  • At least one element of carbon and calcium may be contained in a large amount inside the skeleton as compared with the surface portion of the skeleton.
  • the surface portion of the skeleton is mainly composed of SiC (more than 50 wt% of the whole) and the rest is metallic Si, and the inside of the skeleton is mainly composed of metallic Si.
  • the balance may be carbon and / or calcium.
  • the firing setter 100 has a plate shape and is composed of a plurality of flat plate portions 2 and a plurality of corrugated portions 4.
  • Each flat plate portion 2 is rectangular (rectangular), one side (short side) extends in the thickness direction (Z-axis direction) of the setter 100 for firing, and the other side (long side) is on which the object to be fired is placed. It extends in one direction (X-axis direction) parallel to the mounting surface 8 to be mounted.
  • the flat plate portions 2 are parallel to the mounting surface 8 and face each other at intervals in a direction (Y-axis direction) orthogonal to the extending direction of the long side (the other one side).
  • the corrugated iron portion 4 has a corrugated plate shape and is arranged between a pair of flat plate portions 2.
  • the folded portion of the wave of the corrugated portion 4 is connected to the flat plate portion 2.
  • the space between the pair of flat plate portions 2 is divided into a plurality of sections.
  • the truss structures 10a to 10f are formed by the pair of flat plate portions 2 and the corrugated portions 4.
  • the truss structures 10a to 10f are arranged side by side in the Y-axis direction (stacked in the Y-axis direction).
  • the truss structures 10a to 10f are made of SiC material.
  • the length of the corrugated portion 4 is equal to the length of the flat plate portion 2. That is, the mounting surface 8 is formed by the flat plate portion 2 and the corrugated portion 4.
  • the short side of the flat plate portion 2 extends in the Z-axis direction and the long side extends in the X-axis direction, but in the baking setter 100, the long side of the flat plate portion 2 extends in the Z-axis direction. It may be extended and its short side may be extended in the X-axis direction. Alternatively, the length of the flat plate portion 2 in the Z-axis direction and the length in the X-axis direction may be equal. In this case, the shape of the flat plate portion 2 is square.
  • FIG. 2 shows a plan view of the firing setter 100.
  • a plurality of through holes 6 extending in the Z-axis direction are formed by the flat plate portion 2 and the corrugated portion 4.
  • the through hole 6 extends from the front surface of the firing setter 100 to the back surface (from one end to the other end in the Z-axis direction).
  • the through hole 6 is provided on almost the entire surface of the firing setter 100.
  • the truss structures 10a to 10f composed of the flat plate portion 2 and the corrugated portion 4 have substantially the same structure. Therefore, in the following, the features of the firing setter 100 will be described with reference to a partially enlarged view of the truss structure 10a.
  • the flat plate portion 2 and the corrugated portion 4 of the truss structure 10a are integrally molded.
  • the flat plate portion 2 on the truss structure 10b side also serves as one of the pair of flat plate portions 2 constituting the truss structure 10b. (See also FIGS. 1 and 2). Therefore, the truss structure 10a and the truss structure 10b are also integrally molded.
  • all the components are integrally molded.
  • each truss structure 10a to 10f (porosity between the pair of flat plate portions 2) can be adjusted by changing the distance 2a between the flat plate portions 2, the thickness 5 of the corrugated portion 4, and the folding pitch. it can.
  • the distance between the flat plate portions 2, the thickness 5 of the corrugated portion 4, and the wave folding pitch of the corrugated portion 4 are adjusted so that the porosity of the truss structures 10a to 10f is 50 to 95% by volume. Has been done.
  • the firing setter 100 is manufactured by forming an intermediate in which a flammable base material such as paper is impregnated with a SiC slurry, and then firing in a state where metallic Si is in contact with the setter 100. Therefore, the surface portion of the skeleton (flat plate portion 2 and corrugated portion 4) constituting the firing setter 100 is mainly composed of SiC and the rest is metallic Si.
  • the inside of the skeleton is mainly composed of metallic Si and the rest is elements (carbon and / or calcium) contained in the base material.
  • the open porosity on the surface of the skeleton is less than 1%.
  • FIG. 4 shows the concentration distribution of the components of the base material contained in the skeleton constituting the firing setter 100.
  • the horizontal axis of the graph indicates the thickness of the skeleton (for example, the thickness 3 of the flat plate portion 2 and the thickness 5 of the corrugated portion 4 shown in FIG. 3) in terms of the distance (%) from one end to the other end.
  • the vertical axis shows the ratio of elements (C, Ca) derived from the base material.
  • the surface portion of the aggregate contains almost no “C” or “Ca”. "C” and "Ca” begin to appear after a predetermined depth has passed from the surface of the skeleton and increase toward the center of the skeleton.
  • the firing setter 200 will be described with reference to FIG.
  • the firing setter 200 is a modified example of the firing setter 100, and the mounting surface 208 is formed by the flat plate portion 2.
  • the same configuration as the firing setter 100 may be omitted by assigning the same reference number as the reference number assigned to the firing setter 100.
  • the firing setter 200 In the firing setter 200, two truss structures 20a and 20b are laminated in the thickness direction (Z-axis direction). Therefore, one of the pair of flat plate portions 2 constituting the truss structure 20a constitutes the mounting surface 208.
  • two truss structures 20a and 20b are laminated in the Z-axis direction, but the firing setter 200 may be composed of one truss structure or three or more trusses. The structures may be laminated in the Z-axis direction. Similar to the firing setter 100, the firing setter 200 forms an intermediate in which a flammable base material is impregnated with a SiC slurry, the intermediate is fired, and then the metal Si is brought into contact with the intermediate. Manufactured by firing.
  • the firing setter 200 all the components (flat plate portion 2 and corrugated portion 4) are integrally molded. Further, the through hole 6 composed of the flat plate portion 2 and the corrugated portion 4 extends from one end to the other end in the Y-axis direction of the firing setter 200. That is, the firing setter 200 is provided with a through hole 6 extending from one end to the other end of the side surface on the back surface side of the mounting surface 208.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Furnace Charging Or Discharging (AREA)
  • Ceramic Products (AREA)
PCT/JP2020/044083 2020-01-06 2020-11-26 焼成用セッター WO2021140774A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2021516829A JPWO2021140774A1 (enrdf_load_stackoverflow) 2020-01-06 2020-11-26
CN202080006828.1A CN114945787A (zh) 2020-01-06 2020-11-26 烧成用承烧板
KR1020217014436A KR20210091164A (ko) 2020-01-06 2020-11-26 소성용 세터

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-000553 2020-01-06
JP2020000553 2020-01-06

Publications (1)

Publication Number Publication Date
WO2021140774A1 true WO2021140774A1 (ja) 2021-07-15

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PCT/JP2020/044083 WO2021140774A1 (ja) 2020-01-06 2020-11-26 焼成用セッター

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JP (1) JPWO2021140774A1 (enrdf_load_stackoverflow)
KR (1) KR20210091164A (enrdf_load_stackoverflow)
CN (1) CN114945787A (enrdf_load_stackoverflow)
TW (1) TW202128599A (enrdf_load_stackoverflow)
WO (1) WO2021140774A1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023155951A1 (de) * 2022-02-16 2023-08-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. Verfahren zur herstellung eines gesinterten bauteils und sinterunterlage zur anordnung eines bauteilrohlings innerhalb einer sintereinheit

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01167600U (enrdf_load_stackoverflow) * 1988-05-16 1989-11-24
JPH04300238A (ja) * 1991-03-29 1992-10-23 Matsushita Electric Ind Co Ltd 多孔質耐熱材
JP2002194423A (ja) * 2000-12-21 2002-07-10 Rhythm Corp 軸状部品の熱処理用治具
JP2014210697A (ja) * 2013-04-02 2014-11-13 日本碍子株式会社 複合耐火物および複合耐火物の製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01167600U (enrdf_load_stackoverflow) * 1988-05-16 1989-11-24
JPH04300238A (ja) * 1991-03-29 1992-10-23 Matsushita Electric Ind Co Ltd 多孔質耐熱材
JP2002194423A (ja) * 2000-12-21 2002-07-10 Rhythm Corp 軸状部品の熱処理用治具
JP2014210697A (ja) * 2013-04-02 2014-11-13 日本碍子株式会社 複合耐火物および複合耐火物の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023155951A1 (de) * 2022-02-16 2023-08-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. Verfahren zur herstellung eines gesinterten bauteils und sinterunterlage zur anordnung eines bauteilrohlings innerhalb einer sintereinheit

Also Published As

Publication number Publication date
KR20210091164A (ko) 2021-07-21
JPWO2021140774A1 (enrdf_load_stackoverflow) 2021-07-15
CN114945787A (zh) 2022-08-26
TW202128599A (zh) 2021-08-01

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